WO2020024694A1

WO2020024694A1 - Curvature radius measurement device and measurement method thereof

Info

Publication number: WO2020024694A1
Application number: PCT/CN2019/089622
Authority: WO
Inventors: 董钊; 张志�; 曾琴
Original assignee: 京东方科技集团股份有限公司; 合肥鑫晟光电科技有限公司
Priority date: 2018-08-01
Filing date: 2019-05-31
Publication date: 2020-02-06
Also published as: CN108917689B; CN108917689A

Abstract

Disclosed is a curvature radius measurement device, comprising a first base platform (100), a micrometer (200) and a moving device (300); the first base platform (100) is used for fixing a member to be measured (10); the micrometer (200) comprises a contact (210), the contact (210) being configured to maintain, during measurement, contact with an arc-shaped surface of the member to be measured (10), and obtain a first displacement of the contact (210) moving in an axial direction of the contact (210); the moving device (300) is configured such that the first base platform (100) and the contact (210) move relative to each other in a vertical direction and a horizontal direction with respect to the first base platform (100), and obtain a second displacement of the first base platform (100) moving in the horizontal direction. Further disclosed is a curvature radius measurement method. The curvature radius measurement device and method can achieve inverse measurement of a curvature radius while reducing cost.

Description

Curvature radius measuring device and measuring method

This application claims priority from Chinese Patent Application No. 201810862744.2, filed on August 1, 2018, and the contents of the above-mentioned Chinese patent application disclosure are incorporated herein by reference in its entirety as part of this application.

Technical field

Embodiments of the present disclosure relate to a curvature radius measuring device and a measuring method thereof.

Background technique

As more and more electronic products adopt curved display screens, the cover glass for the curved display screens has also developed rapidly. The cover glass is usually a curved glass with a curved surface. The parameters of the curved surface of the curved glass, such as the radius of curvature, will not only affect the assembly of electronic products, but also affect the display function and touch function of the curved display. Therefore, when the processing of curved glass is completed, the reverse measurement of the radius of curvature of the curved surface of the curved glass becomes particularly important.

Summary of the invention

At least one embodiment of the present disclosure provides a device for measuring a radius of curvature, including: a first base for fixing a device under test; a micrometer including a contact, the contact configured to hold The arc-shaped surface of the device under test contacts and obtains a first displacement amount of the contact moving in the axial direction of the contact; a moving device is configured so that the first base and the contact are at Relative movement in the vertical direction and the horizontal direction relative to the first base table, and obtaining a second displacement amount when the first base table moves in the horizontal direction.

For example, in a curvature radius measuring device provided by an embodiment of the present disclosure, the moving device includes: a second base, which is arranged in parallel with the first base; and a vertical lifting device, which is connected to the second base and Configured to make the second base move in the vertical direction; a horizontal moving device fixed to the second base and connected to the first base, and configured to make the first base The abutment moves in the horizontal direction relative to the second abutment and the contact.

For example, in a curvature radius measuring device provided by an embodiment of the present disclosure, the horizontal moving device includes a first lead screw and a first motor. The first lead screw is connected to the first abutment and the first motor; the first motor is configured to rotate the first lead screw, thereby driving the first abutment at the level Move in the direction.

For example, in a curvature radius measuring device provided by an embodiment of the present disclosure, the horizontal moving device further includes a grating ruler. The grating ruler is disposed on the first base and the second base, and is configured to obtain the second displacement amount.

For example, in a curvature radius measuring device provided by an embodiment of the present disclosure, the vertical lifting device includes a second lead screw and a second motor. The second lead screw is connected to the second base and the second motor; the second motor is configured to rotate the second lead screw, thereby driving the second base in the vertical direction. Move in the direction.

For example, the curvature radius measuring device provided by an embodiment of the present disclosure further includes an angle measuring instrument and a rotation device. The rotation device is connected to the contact, and is configured to rotate the contact in a first plane defined by the horizontal direction and the vertical direction; the angle measuring instrument is configured to obtain the contact A rotation angle when the head is rotated in the first plane.

For example, in a curvature radius measuring device provided by an embodiment of the present disclosure, the rotation device includes a bearing and a third motor. The bearing is connected to the contact, the third motor is configured to rotate the bearing and drive the contact to rotate, and an axial direction of the bearing is perpendicular to the first plane.

For example, in a curvature radius measuring device provided by an embodiment of the present disclosure, the angle measuring instrument is a circular grating, and the circular grating is disposed on the bearing.

For example, the curvature radius measuring device provided by an embodiment of the present disclosure further includes a pillar, the bearing is fixed on the pillar, and an axial direction of the bearing is perpendicular to an extending direction of the pillar.

For example, in a curvature radius measuring device provided by an embodiment of the present disclosure, the micrometer includes an inductive micrometer.

For example, in a curvature radius measuring device provided by an embodiment of the present disclosure, a limiting table and a fixing member are provided on the first base table, and the limiting table and the fixing member are used for fixing the measured component.

At least one embodiment of the present disclosure also provides a measurement method for a curvature radius measuring device provided by an embodiment of the present disclosure, including: fixing the measured object on the first base; adjusting the moving device , So that the contact is moved to a reference position relative to the first base and the contact is in contact with an arcuate surface of the device under test; the moving device is adjusted so that the contact is relative to the The first abutment moves N times to reach each of the N positions; respectively recording the first displacement amount and the second displacement amount when the contact is moved from the reference position to the N positions; and according to The N first displacements and the N second displacements obtain a radius of curvature of at least a portion of an arcuate surface of the test piece; wherein, during the measurement, the contact and the test piece are measured. The curved surfaces of the pieces remain in contact, and N is an integer greater than or equal to one.

For example, in a measurement method provided by an embodiment of the present disclosure, the contact is moved N times relative to the first base station to reach N positions, respectively, including the contact is moved from the reference position to the first position. And moving from the reference position to a second position. The obtaining a curvature radius of at least a part of an arcuate surface of the device under test according to N the first displacement amounts and N the second displacement amounts includes: The distance of the center of curvature corresponding to the curved surface in the horizontal direction is denoted by l, the distance between the reference position and the first abutment in the vertical direction is denoted by d, and the The radius of curvature corresponding to the curved surface is denoted as R, l, d, and R satisfy the first equation: l ² + (Rd) ² = R ² ; move the contact from the reference position to the first position The second displacement amount during the process is denoted as l ₁ , and the first displacement amount during the contact is moved from the reference position to the first position is denoted as d ₁ , l _1, and d ₁ Satisfy the second equation: (l + l ₁ ) ² + (Rdd ₁ ) ² = R ² ; record the second displacement amount during the process of moving the contact from the reference position to the second position As l ₂ , the first displacement amount during the movement of the contact from the reference position to the second position is recorded as d ₂ , and l ₂ and d ₂ satisfy the third equation: (l + l ₂ ) ² + (Rdd ₂ ) ² = R ² ; and the curvature radius is obtained by calculation according to the first equation, the second equation, and the third equation.

For example, in the measurement method provided by an embodiment of the present disclosure, N is an integer greater than 2, and the arc of the device under test is obtained according to N the first displacement amount and N the second displacement amount. The curvature radius of at least a part of the surface includes: obtaining N + 1 equations according to N said first displacement amounts and N said second displacement amounts; randomly extracting three from the N + 1 equations, Obtain l and d according to the three equations; substitute l and d into the N + 1 equations to obtain the curvature radius.

For example, in the measurement method provided by an embodiment of the present disclosure, substituting l and d into the N + 1 equations to obtain the curvature radius includes: substituting l and d into the N + 1 equations to obtain N + 1 R values; and averaging the N + 1 R values to obtain the curvature radius.

For example, in a measurement method provided by an embodiment of the present disclosure, a range of a curvature radius of at least a part of an arcuate surface of the test piece is 50 mm to 80 mm.

At least one embodiment of the present disclosure also provides a measurement method for a curvature radius measuring device provided by an embodiment of the present disclosure, including: fixing the measured object on the first base; adjusting the moving device , So that the contact is moved to a reference position relative to the first base and the contact is in contact with an arcuate surface of the test piece; the rotation device is adjusted so that the contact is relative to the The first abutment moves N times to reach each of the N positions; respectively records the first displacement and the rotation angle when the contact is moved from the reference position to the N positions; and according to the N positions The first displacement amount and the N rotation angles obtain a radius of curvature of at least a part of an arcuate surface of the test piece; wherein, in the measurement process, the arc shape of the contact and the test piece The surfaces remain in contact, and N is an integer of 1 or more.

For example, in a measurement method provided by an embodiment of the present disclosure, a range of a curvature radius of at least a part of an arcuate surface of the test piece is 3 mm to 5 mm.

BRIEF DESCRIPTION OF THE DRAWINGS

In order to more clearly illustrate the technical solutions of the embodiments of the present disclosure, the drawings of the embodiments will be briefly introduced below. Obviously, the drawings in the following description only relate to some embodiments of the present disclosure, rather than limiting the present disclosure. .

FIG. 1 is a schematic diagram of a curvature radius measuring device provided by at least one embodiment of the present disclosure;

2A is a top view of a first base;

2B is a side view of the first abutment;

3 is a schematic diagram of a micrometer in at least one embodiment of the present disclosure;

FIG. 4 is a schematic diagram of the first abutment moving in the horizontal direction;

FIG. 5 is a schematic diagram of the second base table after being moved in the vertical direction;

6 is a schematic diagram of a horizontal moving device in at least one embodiment of the present disclosure;

7 is a schematic diagram of another curvature radius measuring device provided by at least one embodiment of the present disclosure;

8 is a side view of a part of the structure of FIG. 7;

9 is a first schematic diagram of a measurement method provided by at least one embodiment of the present disclosure;

10 is a second schematic diagram of a measurement method provided by at least one embodiment of the present disclosure;

FIG. 11 is a first schematic view of another measurement method provided by at least one embodiment of the present disclosure; and

FIG. 12 is a second schematic diagram of another measurement method provided by at least one embodiment of the present disclosure.

detailed description

To make the objectives, technical solutions, and advantages of the embodiments of the present disclosure more clear, the technical solutions of the embodiments of the present disclosure will be described clearly and completely in combination with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are a part of embodiments of the present disclosure, but not all the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by a person of ordinary skill in the art without creative labor shall fall within the protection scope of the present disclosure.

Unless otherwise defined, the technical or scientific terms used in the present disclosure shall have the ordinary meanings understood by those having ordinary skills in the field to which the present disclosure belongs. The terms "first", "second", and the like used in this disclosure do not indicate any order, quantity, or importance, but are only used to distinguish different components. Similarly, "a", "a", or "the" and the like do not indicate a limit on quantity, but rather indicate that there is at least one. Words such as "including" or "including" mean that the element or item appearing before the word covers the element or item appearing after the word and the equivalent thereof without excluding other elements or items. Words such as "connected" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right", etc. are only used to indicate the relative position relationship. When the absolute position of the described object changes, the relative position relationship may also change accordingly.

In the curvature radius measurement technology, optical measurement technology is currently used. Optical measurement technology is based on optical principles and computer graphics processing is the main method. For example, first obtain a picture of the DUT by scanning or taking pictures, and then compare it with the design drawing to know whether the DUT meets the design requirements. The advantage of using optical measurement technology is that the test speed is fast, and the error between the finished product and the design can be compared, but there are also the following disadvantages: 1. It requires professional optical instruments (such as interferometers, etc.), and the cost is higher; 2. Pieces (such as cover glass) have stricter requirements. The remaining ink or other substances on the cover glass will seriously affect the measurement results, and may not allow effective reverse measurement. 3. When the curvature radius is relatively small (for example, 4mm) ), Will cause the intensity of the emitted light to be high, which will lead to a high measurement error.

In view of the problems in the optical measurement technology described above, at least one embodiment of the present disclosure provides a curvature radius measuring device. The curvature radius measuring device includes a first base, a micrometer, and a mobile device. The first abutment is used to fix the DUT; the micrometer includes contacts, and the contacts are configured to maintain contact with the curved surface of the DUT during the measurement process, and obtain the contact moving along the axial direction of the contact. A first displacement amount; the moving device is configured to relatively move the first base and the contact in a vertical direction and a horizontal direction relative to the first base, and obtain a second when the first base moves in the horizontal direction Amount of displacement.

At least one embodiment of the present disclosure also provides a measurement method corresponding to the above-mentioned curvature radius measurement device.

The curvature radius measuring device and measuring method provided in the embodiments of the present disclosure can perform measurement without knowing design parameters to realize reverse measurement; meanwhile, effective measurement can also be performed when there is a residual substance on the surface of the device under test; in addition, Since no professional optical instruments are required, measurement costs can also be reduced.

The embodiments of the present disclosure and examples thereof will be described in detail below with reference to the drawings.

At least one embodiment of the present disclosure provides a curvature radius measuring device. As shown in FIG. 1, the measuring device includes a first base 100, a micrometer 200 (not shown in FIG. 1, see FIG. 3), and a mobile device. 300.

The first base 100 is used for fixing the device under test 10. For example, as shown in FIGS. 2A and 2B, FIG. 2A is a top view of the first base 100 and FIG. 2B is a side view of the first base 100. As shown in FIG. 2A, a limiting table 110 and a fixing member 120 are disposed on the first base table 100. The limiting table 110 and the fixing member 120 are used for fixing the device under test 10. For example, when fixing the device under test 10, firstly, one side of the device under test is abutted against the limit table 110, and then the device under test 10 is fixed on the first base 100 with the fixing member 120. For example, when the material of the first base 100 is metal, the fixing member 120 may be a magnet, for example, the shape of the magnet is a cube. It should be noted that, the type and number of the fixing members 120 are not limited in the embodiments of the present disclosure, as long as the device under test 10 can be firmly fixed on the first base 100.

In addition, in the embodiment of the present disclosure, the device under test 10 may be a curved glass having a curved surface. For example, a curved surface is on the edge of curved glass. For example, the two long sides of the curved glass are curved, that is, hyperboloid glass; for example, the four sides of the curved glass are all curved, that is, four-curved glass. For example, the curved glass can be used for a curved display screen as a cover glass to protect the curved display screen. It should be noted that, the device under test 10 in the embodiment of the present disclosure is not limited to the above-mentioned curved glass, and may also have other structures having a curved surface.

The micrometer 200 includes a contact 210 configured to maintain contact with an arcuate surface of the test piece 10 during measurement, and obtain a first displacement of the contact 210 moving in the axial direction of the contact 210. the amount. For example, as shown in FIG. 1, the external shape of the contact 210 is an elongated shape, and the axial direction of the contact 210 is the extending direction of the contact 210. For example, as shown in FIG. 1, the contact 210 includes a contact portion 211 provided on one side. During the test, the contact of the micrometer can be expanded and contracted so as to keep the contact portion 211 in contact with the curved surface of the device under test 10. . For example, the contact portion 211 can be made of a hard material, such as ruby, and the contact portion 211 has a spherical shape, so that it can be embedded in the contact 210.

For example, as shown in FIG. 3, in addition to the contacts 210, the micrometer 200 may further include a cable 220 and a data processing device 230. The cable 220 is connected to the contact 210 and the data processing device 230 so that communication can be performed between the contact 210 and the data processing device 230. For example, both the contact 210 and the data processing device 230 are provided with a communication interface, and the communication interface includes, but is not limited to, RS232, RS485, Ethernet, GPIB, USB, and optical fiber. Of course, the cable 210 may not be provided between the contact 210 and the data processing device 230, and the wireless communication method is used for communication. The present disclosure does not limit the communication method between the contact 210 and the data processing device 230, as long as it can be implemented Data transmission is sufficient.

For example, during the measurement, when the contact 210 moves in the axial direction of the contact 210, a plurality of pulse signals can be generated, and the pulse signals are transmitted to the data processing device 230 through the cable 220, and the data processing device 230 receives the The first pulse can be obtained by processing the pulse signal. For example, the data processing device 230 may use a computer; for another example, the data processing device 230 may use a dedicated board with a data processing function, such as a single chip microcomputer. For example, the data processing device 230 may be connected to a display screen, thereby real-time display of the first displacement amount.

In the embodiment of the present disclosure, the micrometer 200 may be of any appropriate type and structure. For example, an inductive micrometer or the like may be adopted. The embodiments of the present disclosure include but are not limited to this.

As shown in FIG. 1, the mobile device 300 is configured to relatively move the first base 100 and the contact 210 in a vertical direction and a horizontal direction relative to the first base 100, and obtain the first base 100 in the horizontal direction. The second amount of displacement when moving up. In different embodiments, the mobile device 300 may drive the first base 100 or the contact 210 so that the two move relative to each other. The following description is made by taking the mobile device 300 to drive the first base 100 as an example. The embodiment is not limited to this case.

It should be noted that, in the embodiment of the present disclosure, both the vertical direction and the horizontal direction are relative to the first base 100. For example, the vertical direction is a direction perpendicular to the surface of the first base 100, and the horizontal direction is a direction parallel to the surface of the first base 100. Of course, if the surface of the first base 100 is parallel to the ground plane, the horizontal direction in the embodiment of the present disclosure is a direction parallel to the ground plane, and the vertical direction is a direction perpendicular to the ground plane.

For example, when the measurement is started, the mobile device 300 may be controlled so that the first base 100 and the contact 210 are relatively moved in the vertical direction, so that the contact 210 is in contact with the curved surface of the device under test 10, for example, The position of the head 210 is a reference position. Then, the mobile device 300 is controlled to relatively move the first base 100 and the contact 210 in the horizontal direction and the vertical direction, so that the contacts 210 reach the N positions from the reference position, respectively. For example, in this process, the first base 100 moves only in the horizontal direction and does not move in the vertical direction; the contact 210 moves (stretches and contracts) only in the vertical direction and does not move in the horizontal direction.

Since the device under test 10 is fixed on the first base 100, when the first base 100 is moved in the horizontal direction, the device under test 10 is also moved in the horizontal direction. Since the contact 210 can move in the axial direction of the contact 210, it can be ensured that the contact 210 is in contact with the curved surface of the device under test 10 during the measurement process.

The curvature radius measuring device provided by the embodiment of the present disclosure makes the first base 100 and the contact 210 relatively move multiple times by controlling the moving device 300 to obtain a plurality of first displacement amounts and a plurality of second displacement amounts. By processing the first displacement amount and the plurality of second displacement amounts, a curvature radius of at least a part of the arcuate surface of the device under test 10 can be obtained. The curvature radius measuring device provided by the embodiment of the present disclosure can realize the reverse measurement of the curvature radius, and is particularly suitable for a case where the curvature radius of the DUT is large (for example, 50 mm to 80 mm).

The curvature radius measuring device provided by at least one embodiment of the present disclosure can perform measurement without knowing design parameters to realize reverse measurement; meanwhile, effective measurement can also be performed when there is a residual substance on the surface of the device under test; in addition, Since professional optical instruments are not required, measurement costs can also be reduced.

For example, in some embodiments, as shown in FIG. 1, the mobile device 300 includes a second base 310, a vertical lifting device 320, and a horizontal moving device 330.

For example, the second base station 310 is disposed in parallel with the first base station 100. For example, the first base station 100 is provided on the second base station 310 through a pair of guide rails (not shown) parallel to each other. The horizontal moving device 330 is fixed on the second base 310 and connected to the first base 100, and is configured such that the first base 100 is horizontal with respect to the second base 310 and the contact 210 along the guide rail. mobile.

For example, in one example, as shown in FIG. 1, the horizontal moving device 330 includes a first lead screw 331 and a first motor 332. The first lead screw 331 is connected to the first base 100 and the first motor 332. The first motor 332 is configured to rotate the first lead screw 331, thereby driving the first base 100 to move in a horizontal direction. For example, the first lead screw 331 is connected to the first base 100 through a connecting member 130. For example, the connecting member 130 is a component sleeved on the first lead screw 331 and fixedly connected to the first base 100. When the first motor 332 controls the first lead screw 331 to rotate, the connecting member 130 is on the first wire. The bar 331 moves correspondingly, so that the first base 100 can be driven forward or backward, thereby realizing the movement of the first base 100 in the horizontal direction. FIG. 4 shows a schematic diagram of a first base 100 after moving in a horizontal direction.

In the embodiment of the present disclosure, for example, the first motor 332 may be a servo motor or a stepper motor. The second displacement amount can be obtained according to the rotation angle generated by the first motor 332 and the wheelbase of the first lead screw 331.

For example, as shown in FIG. 1, the vertical lifting device 320 is connected to the second base 310 and configured to move the second base 310 in a vertical direction. Since the vertical lifting device 320 is connected to the second base table 310, when the vertical lifting device 320 moves in the vertical direction, the second base table 310 can be driven to move.

For example, as shown in FIG. 1, in one example, the vertical lifting device 320 includes a second lead screw 322 and a second motor 323. The second screw 322 is connected to the second base 310 and the second motor 323. The second motor 323 is configured to rotate the second lead screw 322 to move the second base table 310 in a vertical direction.

For example, as shown in FIG. 1, the curvature radius measuring device provided by the embodiment of the present disclosure may further include a base 400, and the vertical lifting device 320 is fixed on the base 400, so that the curvature radius measuring device is more stable during measurement. For example, in one example, a buffer support 321 may be provided between the base 400 and the second base table 310 so that the second base table 310 plays a supporting and buffering role when the second base table 310 moves in the vertical direction. The buffer support 321 is, for example, a compression spring. FIG. 5 shows a schematic diagram of a second base table 310 after being moved in the vertical direction.

It should be noted that the embodiment of the present disclosure does not limit the specific implementation of the vertical lifting device 320, as long as it can drive the second base 310 in the vertical direction. In addition, the second motor 323 may be a servo motor or a stepper motor, and the embodiment of the present disclosure does not limit the type of the second motor 323.

In some embodiments of the present disclosure, as shown in FIG. 6, the horizontal moving device 330 further includes a grating ruler 333. The grating ruler 333 is disposed on the first base 100 and the second base 310 and is configured to obtain the Second displacement.

For example, as shown in FIG. 6, the scale rule 333 includes a scale ruler 3330 and a scale ruler 3331. For example, the scale ruler is set on the second base 310 and the scale ruler is set on the first base 100. When the first base 100 moves in the horizontal direction relative to the second base 310, the grating ruler 3331 moves with the first base 100, and a second displacement amount can be obtained according to the optical principle of the grating. The embodiment of the present disclosure can improve the accuracy of the obtained second displacement amount by providing the grating ruler 333.

The curvature radius measuring device provided by some embodiments of the present disclosure, as shown in FIGS. 7 and 8, further includes an angle measuring instrument 500 and a rotating device 600. It should be noted that the angle measuring instrument 500 is not shown in FIG. 7 due to the blocking of the rotating device 600. FIG. 8 is a side view of some components in FIG. 7.

The rotating device 600 is connected to the contact 210 and is configured to rotate the contact 210 in a first plane defined by a horizontal direction and a vertical direction. For example, as shown in FIG. 8, in one example, the rotation device 600 includes a bearing 610 and a third motor 620. The bearing 610 and the contact 210 are connected. The third motor 620 is configured to rotate the bearing 610 and drive the contact 210 to rotate, and the axial direction of the bearing 610 is perpendicular to the first plane.

It should be noted that the third motor 620 may be a servo motor or a stepping motor, and the embodiment of the present disclosure does not limit the type of the third motor 620.

For example, as shown in FIG. 8, the curvature radius measuring device provided by the embodiment of the present disclosure may further include a pillar 700, a bearing 610 is fixed on the pillar 700, and an axis of the bearing 610 is perpendicular to the extending direction of the pillar 700. For example, the third motor 620 may be disposed on the pillar 700. For example, the pillar 700 is fixed on the ground, thereby ensuring stability during measurement. It should be noted that, in the embodiment of the present disclosure, the rotation device 600 may not be provided, and the rotation device 600 may be directly fixed to another place, for example, the bearing 610 of the rotation device 600 is directly fixed to a wall. The embodiment of the disclosure This is not limited.

The angle measuring instrument 500 is configured to obtain a rotation angle when the contact 210 is rotated in a first plane. For example, in one example, as shown in FIG. 8, the angle measuring instrument 500 may adopt a circular grating, and the circular grating is disposed on the bearing 610. For example, the bearing 610 usually includes an outer ring fixing member and an inner ring rotating member. The circular grating includes a circular grating fixed ruler and a circular grating moving ruler. The circular grating fixed ruler is set on the outer ring fixing member of the bearing 610, and the circular grating moves The ruler is disposed on the inner ring rotating member of the bearing 610, so that when the inner ring rotating member of the bearing rotates, the circular grating can obtain the rotation angle of the contact 210.

It should be noted that the embodiment of the present disclosure is not limited to a specific type of the angle measuring instrument 500, as long as it can obtain the rotation angle when the contact 210 rotates in the first plane.

For example, when the curvature radius (for example, 3 mm to 5 mm) of the curved surface of the test object 10 is relatively small, when the measurement is started, the mobile device 300 may be controlled so that the first base 100 and the contact 210 are in a vertical direction. The relative movement causes the contact 210 to contact the arc-shaped surface of the device under test 10, for example, the position of the contact 210 is a reference position at this time. Then, the first base 100 is kept stationary, and the contacts 210 are rotated so that the contacts 210 reach the N positions from the reference position, respectively. During the rotation, the contact 210 is kept in contact with the arcuate surface of the device under test 10 and obtains a plurality of first displacement amounts and a plurality of rotation angles, and then processes the plurality of first displacement amounts and a plurality of rotation angles. That is, the curvature radius of at least a part of the curved surface of the test piece 10 can be obtained.

The curvature radius measuring device provided by the embodiment of the present disclosure can improve the flexibility of measurement by setting the rotation device 600 and the angle measuring instrument 500. The curvature radius measuring device is not only applicable to the case where the curvature radius of the DUT is large, but also applicable to the DUT. When the curvature radius of the piece is small.

At least one embodiment of the present disclosure also provides a measurement method for the above-mentioned curvature radius measuring device, the measurement method including the following operation steps.

Step S100: Fix the component under test 10 on the first base 100;

Step S200: adjust the moving device 300 so that the contact 210 moves to a reference position relative to the first base 100 and the contact 210 contacts the curved surface of the test piece 10;

Step S300: Adjust the mobile device 300 so that the contact 210 moves N times relative to the first base station 100 to reach N positions, respectively;

Step S400: Record the first displacement amount and the second displacement amount when the contact 210 is moved from the reference position to the N positions, respectively; and

Step S500: Obtain a curvature radius of at least a part of the curved surface of the test piece 10 according to the N first displacement amounts and the N second displacement amounts.

During the measurement, the contact 210 is kept in contact with the curved surface of the device under test 10, and N is an integer greater than or equal to 1. It should be noted that, in the embodiment of the present disclosure, the contact of the contact 210 with the curved surface of the device under test 10 indicates that the contact portion 211 of the contact 210 is in contact with the device under test 10; in addition, the position of the contact 210 indicates the contact The position of the contact portion 211 of the head 210. The following embodiments are the same and will not be described again.

For example, in step S100, as shown in FIG. 2A, the test piece 10 may be fixed on the first base 100 using a fixing member 120.

For example, in step S200, as shown in FIG. 7, a vertical lifting device 320 may be used to raise the first base 100 in a vertical direction until the contact 210 and the curved surface of the device under test 10 contact, and The position of the contact 210 is referred to as a reference position, as shown on the left side in FIG. 9.

For example, in step S300, as shown in FIG. 7, a horizontal moving device 330 may be used to move the first base 100 in the horizontal direction. Since the device under test 10 is fixed on the first base 100, the device under test 10 It also moves in the horizontal direction. Each time the first base 100 moves, the contact 210 reaches a position relative to the first base 100. The first base 100 moves N times, and the contacts 210 reach N positions, respectively. The position reached by the head 210 is referred to as the Nth position, for example, as shown on the right side in FIG. 9.

When step S300 is implemented, for example, each time the contact 210 moves relative to the first base 100, the first displacement amount and the second displacement amount are recorded, and step S400 is completed. For example, the micrometer 200 is used to obtain the first displacement amount; for example, when the curvature radius measuring device includes a grating ruler 333, the grating ruler 333 may be used to acquire the second displacement amount. When moving N times in step S300, N first displacement amounts and N second displacement amounts can be obtained in step S400.

Then, step S500 may be implemented to process the N first displacement amounts and N second displacement amounts obtained in step S400 to obtain a curvature radius of at least a part of the curved surface of the test piece 10.

For example, in one example, the above step S300 includes moving the contact 210 from the reference position to the first position and from the reference position to the second position. In this case, the above-mentioned step S500 includes the following operations.

Step S510: Let the distance in the horizontal direction between the center of curvature of the reference position and the arcuate surface of the test piece 10 be 1 and the distance in the vertical direction between the reference position and the first base 100 be d. The radius of curvature corresponding to the curved surface of the test piece 10 is denoted as R, l, d, and R satisfy the first equation: l ² + (Rd) ² = R ² ;

Step S520: Record the second displacement amount during the movement of the contact 210 from the reference position to the first position as l ₁ , and record the first displacement amount during the movement of the contact 210 from the reference position to the first position as d ₁ , L ₁ and d ₁ satisfy the second equation: (l + l ₁ ) ² + (Rdd ₁ ) ² = R ² ;

Step S530: Record the second displacement amount during the movement of the contact 210 from the reference position to the second position as l ₂ , and record the first displacement amount during the movement of the contact 210 from the reference position to the second position as d ₂ , L ₂ and d ₂ satisfy the third equation: (l + l ₂ ) ² + (Rdd ₂ ) ² = R ² ; and

Step S540: Calculate the curvature radius according to the first equation, the second equation, and the third equation.

FIG. 10 shows the relationship between the parameters of the contact 210 in the two cases of the reference position and the Nth position, that is, the first equation and the N + 1th equation. It should be noted that although the situation of the first position and the second position is not shown in FIG. 10, the second and third equations can be obtained by replacing _n in l _n and d _n with 1 and 2 respectively. . Because there are three unknowns, l, d, and R, the radius of curvature R can be obtained by solving the system of equations consisting of the first, second, and third equations.

It should be noted that in the above calculation, if one of l and d at the reference position is a known quantity, only two equations are needed to solve the radius of curvature R. In this case, the contact Just move from the reference position to the first position.

For example, in another example, the above step S500 includes the following operations.

Step S550: obtaining N + 1 equations according to the N first displacements and the N second displacements;

Step S560: randomly select three from N + 1 equations, and obtain l and d according to the three equations; and

Step S570: Substituting l and d into N + 1 equations to obtain a radius of curvature.

In step S550, N + 1 equations are obtained. For example, the N + 1 equations are as follows:

l ² + (Rd) ² = R ² (first equation);

(l + l ₁ ) ² + (Rdd ₁ ) ² = R ² (second equation);

(l + l ₂ ) ² + (Rdd ₂ ) ² = R ² (third equation);

...

(l + l _n ) ² + (Rdd _n ) ² = R ² (N + 1th equation).

Then step S560 is executed to randomly select three from the above N + 1 equations, and l and d can be obtained according to the three equations. Then step S570 is performed, and 1 and d are substituted into the above N + 1 equations to obtain N + 1 R values. Finally, for example, the N + 1 R values are averaged to obtain the final curvature radius R. In this way, the error of the obtained curvature radius R can be reduced, thereby improving the measurement accuracy.

For example, in another example, as shown in FIG. 9, a case where the first base 100 and the ground plane are not completely parallel is considered. For example, an angle between the first base 100 and the ground plane is α. In this case, the above N + 1 equations become the following equations:

l ² + (Rd) ² = R ² (first equation);

(l + l ₁ ) ² + (Rdd ₁ + l ₁ sinα) ² = R ² (second equation);

(l + l ₂ ) ² + (Rdd ₂ + l ₂ sinα) ² = R ² (third equation);

...

(l + l _n ) ² + (Rdd _n + l _n sinα) ² = R ² (N + 1th equation).

The following describes how to obtain the optimal solution of the radius of curvature R in this example. First, set an interval for the included angle α, for example, -0.05≤α≤0.05. For example, in the first calculation, the included angle α can be selected from the included angle α that was obtained when the optimal solution of the curvature radius R was obtained last time or selected based on previous experience. For example, the first included angle α is 0.02. Substitute α = 0.02 into the above N + 1 equations, and then randomly select 3 from the N + 1 equations, calculate the values of l and d, and then substitute the values of l and d into the above N + 1 equations The equation obtains N + 1 R values (R ₀ ˜R _N ), and finally obtains the measurement error value σ according to the following formula.

For example, a preset error value is set in advance, for example, 0.01. When the difference σ obtained is smaller than the preset error value, it is considered that the curvature radius of the solution at this time is within the preset error range, and the Mean

As a measure of the final radius of curvature. When the obtained difference σ is greater than or equal to the preset error value, the solution is continued.

For example, in the second calculation, the included angle α is 0.018, and then the same method as in the first calculation is used to obtain the measurement error value σ and determine whether the requirements are met. If it is not satisfied, continue to change the value of α and continue to solve Until the measured measurement error σ meets the requirements.

For example, the value of the included angle α can set a changing direction and a changing speed, for example, starting from 0.02 and decreasing by 0.002 each time. Of course, the embodiments of the present disclosure include, but are not limited to, the included angle α may also be changed in other ways. With the above method, the measurement accuracy of the curvature radius R can be further improved.

It should be noted that in a case where the radius of the contact portion 211 of the contact 210 is considered, the measured value of the curvature radius finally obtained is added to the radius of the contact portion 211.

The measurement method described above is applicable to a case where the radius of curvature is large, and the measurement method used when the radius of curvature is small is described below.

At least one embodiment of the present disclosure also provides a measurement method for the above-mentioned curvature radius measuring device, the measurement method including the following operations.

Step S10: Fix the component under test 10 on the first base 100;

Step S20: Adjust the moving device 300 so that the contact 210 moves to a reference position relative to the first base 100 and the contact 210 and the curved surface of the test object 10 contact;

Step S30: Adjust the rotating device 600 so that the contact 210 moves N times relative to the first base 100 to reach N positions, respectively;

Step S40: Record the first displacement and rotation angle when the contact 210 is moved from the reference position to the N positions, respectively; and

Step S50: Obtain a curvature radius of at least a part of the curved surface of the test piece 10 according to the N first displacements and the N rotation angles.

During the measurement, the contact 210 is kept in contact with the curved surface of the device under test 10, and N is an integer greater than or equal to 1.

Steps S10 and S20 are similar to steps S100 and S200, respectively, and reference may be made to the corresponding descriptions above, and details are not described herein again.

For example, in step S30, as shown in FIG. 7, a rotating device 600 may be used to make the contact 210 rotate to move to N positions, and the position reached by the contact 210 during the Nth movement is referred to as the Nth position, for example, This is shown on the right in Figure 11.

When step S30 is implemented, for example, each time the contact 210 rotates, the first displacement amount and the rotation angle are recorded, and step S40 is completed. For example, the micrometer 200 is used to obtain the first displacement; for example, when the curvature radius measuring device includes a circular grating, the circular grating may be used to obtain the rotation angle of the contact 210. When rotated N times in step S30, N first displacement amounts and N rotation angles can be obtained in step S40.

The first displacement amount during the movement of the contact from the reference position to the Nth position is denoted as b _n , the rotation angle is denoted as θ _n , the length of the contact 210 at the reference position is denoted as a, and the contact is disposed at the The length at the N position is denoted as l _n , and step S50 is described in detail below.

It should be noted that the rotation axis shown in FIG. 12 is an axis around when the contact 210 rotates. For example, the rotation axis may be a rotation axis of a bearing 610.

First, as shown in FIG. 12, the length of the contact 210 at each position is obtained according to the N first displacements, and N + 1 equations are obtained as follows:

l ₀ = a (reference position);

...

l _m = a + b _m (Mth position);

...

l _n = a + b _n (Nth position).

For example, in the case where there is a measurement error Δa in the length a when the contact 210 is at the reference position, the above N + 1 equations become the following equations:

l ₀ = a + Δa (reference position);

...

l _m = a + b _m + Δa (Mth position);

...

l _n = a + b _n + Δa (Nth position).

First, set an interval for Δa, such as -0.1≤Δa≤0.1. For example, in the first calculation, Δa may be selected from the Δa corresponding to the last time when the optimal solution of the curvature radius R was obtained, or may be selected based on past experience. For example, the first time Δa takes the value of 0.05. Substitute Δa = 0.05 into the above N + 1 equations to obtain l ₀ ～ l _n , and then randomly divide a total of N data from l ₁ ～ l _n into N / 2 groups, each group includes two data. Yes, if N is an odd number, one data can be randomly removed and then grouped. As shown in FIG. 12, two data in each group are combined with l ₀ to obtain the following equation:

(The straight line distance from the Mth position to the Nth position);

(The linear distance from the Mth position to the reference position);

(The straight line distance from the Nth position to the reference position).

Then, according to the three side lengths (d _mn , d _m0, and d _n0 ) of the triangle formed by the reference position, the M- _th position, and the N- _{th position} , the area S _{i of} the triangle can be obtained as shown below.

Then, according to the area S _{i of the} triangle, the curvature radius R _i corresponding to the set of data can be obtained, as shown below.

R _i = (d _mn + d _m0 + d _n0 ) / 4S _i ;

The above method is used to process the data of the N / 2 group to obtain N / 2 curvature radii R _i , and finally obtain the test error value σ according to the following formula.

For example, in the second calculation, the value of Δa is 0.04, and then the same method as in the first calculation is used to obtain the measurement error value σ and determine whether the requirements are met. If it is not satisfied, continue to change the value of Δa and continue to solve until The obtained measurement error value σ satisfies the requirements.

For example, the value of Δa can set a changing direction and a changing speed, for example, starting from 0.05 and decreasing by 0.01 each time. Of course, the embodiments of the present disclosure include, but are not limited to, Δa can also be changed in other ways. With the above method, the measurement accuracy of the curvature radius R can be further improved.

An embodiment of the present disclosure provides a curvature radius measurement device and proposes a corresponding measurement method for the curvature radius measurement device. For example, corresponding measurement methods are proposed for the cases where the radius of curvature is large (for example, 50 mm to 80 mm) and the radius of curvature is small (for example, 3 mm to 5 mm), thereby improving the flexibility of measuring the radius of curvature; Publicly available measurement methods can also improve measurement accuracy.

The foregoing is only a specific implementation of the present disclosure, but the scope of protection of the present disclosure is not limited thereto, and the scope of protection of the present disclosure shall be subject to the protection scope of the claims.

Claims

A curvature radius measuring device includes:

A first abutment for fixing the device under test;

The micrometer includes a contact, the contact is configured to maintain contact with an arcuate surface of the test piece during measurement, and obtain a first movement of the contact in an axial direction of the contact Displacement

A moving device configured to relatively move the first base and the contact in a vertical direction and a horizontal direction relative to the first base and obtain the first base in the horizontal direction The second amount of displacement when moving up.
The curvature radius measuring device according to claim 1, wherein the mobile device comprises:

A second abutment, which is arranged in parallel with the first abutment;

A vertical lifting device connected to the second base and configured to move the second base in the vertical direction;

The horizontal moving device is fixed on the second abutment and connected to the first abutment, and is configured so that the first abutment is in the second abutment and the contacts in the Move horizontally.
The curvature radius measuring device according to claim 2, wherein the horizontal moving device includes a first lead screw and a first motor;

The first lead screw is connected to the first base and the first motor;

The first motor is configured to rotate the first lead screw, thereby driving the first abutment to move in the horizontal direction.
The curvature radius measuring device according to claim 3, wherein the horizontal moving device further comprises a grating ruler;

The grating ruler is disposed on the first base and the second base, and is configured to obtain the second displacement amount.
The curvature radius measuring device according to any one of claims 2-4, wherein the vertical lifting device includes a second lead screw and a second motor;

The second lead screw is connected to the second base and the second motor;

The second motor is configured to rotate the second lead screw, thereby driving the second base table to move in the vertical direction.
The curvature radius measuring device according to any one of claims 1 to 5, further comprising an angle measuring instrument and a rotation device, wherein:

The rotation device is connected to the contact, and is configured to rotate the contact in a first plane defined by the horizontal direction and the vertical direction;

The angle measuring instrument is configured to obtain a rotation angle when the contact is rotated in the first plane.
The curvature radius measuring apparatus according to claim 6, wherein the rotation device includes a bearing and a third motor;

The bearing is connected to the contact, the third motor is configured to rotate the bearing and drive the contact to rotate, and an axial direction of the bearing is perpendicular to the first plane.
The curvature radius measuring device according to claim 7, wherein the angle measuring instrument is a circular grating, and the circular grating is provided on the bearing.
The curvature radius measuring device according to claim 7 or 8, further comprising a pillar, wherein the bearing is fixed to the pillar, and an axial direction of the bearing is perpendicular to an extending direction of the pillar.
The curvature radius measuring device according to any one of claims 1 to 9, wherein the micrometer includes an inductive micrometer.
The curvature radius measuring device according to any one of claims 1 to 10, wherein a limit table and a fixing member are provided on the first base table, and the limit table and the fixing member are used to fix the substrate Test piece.
A measuring method for a curvature radius measuring device according to any one of claims 1 to 11, comprising:

Fixing the tested part on the first base;

Adjusting the moving device so that the contact is moved to a reference position relative to the first base and the contact is in contact with an arcuate surface of the test piece;

Adjusting the moving device so that the contact moves N times relative to the first base station to reach N positions respectively;

Record the first displacement amount and the second displacement amount respectively when the contact is moved from the reference position to the N positions; and

Obtaining a curvature radius of at least a part of the curved surface of the test piece according to the N first displacement amounts and the N second displacement amounts;

During the measurement, the contact is kept in contact with the curved surface of the DUT, and N is an integer greater than or equal to 1.
The measurement method according to claim 12, wherein:

Moving the contact with respect to the first base station N times to reach N positions respectively includes moving the contact from the reference position to the first position and from the reference position to the second position;

Obtaining a curvature radius of at least a part of the curved surface of the test piece according to the N first displacement amounts and the N second displacement amounts includes:

The distance in the horizontal direction between the center of curvature of the reference position and the arcuate surface of the DUT is denoted by l, and the distance between the reference position and the first abutment in the vertical direction is The distance is denoted by d, and the radius of curvature corresponding to the curved surface of the test piece is denoted by R, and l, d, and R satisfy the first equation: l 2 + (Rd) 2 = R 2 ;

The second displacement amount during the movement of the contact from the reference position to the first position is recorded as l 1 , and the contact is in the process of moving the contact from the reference position to the first position. The first displacement amount is denoted as d 1 , and l 1 and d 1 satisfy the second equation: (l + l 1 ) 2 + (Rdd 1 ) 2 = R 2 ;

The second displacement amount during the movement of the contact from the reference position to the second position is recorded as l 2 , and the contact is in the process of moving the contact from the reference position to the second position. The first displacement amount is denoted as d 2 , and l 2 and d 2 satisfy the third equation: (l + l 2 ) 2 + (Rdd 2 ) 2 = R 2 ; and

The curvature radius is obtained by calculation from the first equation, the second equation, and the third equation.
The measuring method according to claim 13, wherein N is an integer greater than 2, and at least a part of an arcuate surface of the test piece is obtained based on the N first displacement amounts and the N second displacement amounts. The radius of curvature includes:

Obtain N + 1 equations according to N said first displacements and N said second displacements;

Randomly select three from the N + 1 equations, and obtain l and d according to the three equations; and

Substituting l and d into the N + 1 equations to obtain the curvature radius.
The measurement method according to claim 14, wherein substituting l and d into the N + 1 equations to obtain the curvature radius comprises:

Substituting l and d into the N + 1 equations to obtain N + 1 R values; and

An average is performed on the N + 1 R values to obtain the curvature radius.
The measuring method according to any one of claims 12 to 15, wherein a radius of curvature of at least a part of the curved surface of the test piece is in a range of 50 mm to 80 mm.
A measuring method for a curvature radius measuring device according to any one of claims 6 to 9, comprising:

Fixing the tested part on the first base;

Adjusting the moving device so that the contact is moved to a reference position relative to the first base and the contact is in contact with an arcuate surface of the test piece;

Adjusting the rotation device so that the contact is moved N times relative to the first base to reach N positions respectively;

Separately record the first displacement amount and the rotation angle when the contact is moved from the reference position to the N positions; and

Obtaining a curvature radius of at least a part of an arcuate surface of the test piece according to the N first displacements and the N rotation angles;

During the measurement, the contact is kept in contact with the curved surface of the DUT, and N is an integer greater than or equal to 1.
The measurement method according to claim 17, wherein a radius of curvature of at least a part of the curved surface of the test piece is in a range of 3 mm to 5 mm.