WO2020018682A1 - Mask frame and mask assembly - Google Patents

Mask frame and mask assembly Download PDF

Info

Publication number
WO2020018682A1
WO2020018682A1 PCT/US2019/042228 US2019042228W WO2020018682A1 WO 2020018682 A1 WO2020018682 A1 WO 2020018682A1 US 2019042228 W US2019042228 W US 2019042228W WO 2020018682 A1 WO2020018682 A1 WO 2020018682A1
Authority
WO
WIPO (PCT)
Prior art keywords
frame
mask
reinforcement
stacked
upper reinforcement
Prior art date
Application number
PCT/US2019/042228
Other languages
French (fr)
Inventor
Saeng Hyun Cho
Sung Ii Ahn
Sang Cheol Lee
Original Assignee
Applied Materials, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials, Inc. filed Critical Applied Materials, Inc.
Publication of WO2020018682A1 publication Critical patent/WO2020018682A1/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks

Definitions

  • the present invention relates to a mask frame and a mask assembly, and more particularly to a mask frame fixing a mask sheet thereto and a mask assembly including the mask frame.
  • a substrate-processing apparatus is an apparatus that performs a deposition process, an etching process, and the like in order to manufacture a wafer for use in the manufacture of a semiconductor, a substrate for use in the manufacture of a liquid crystal display (LCD) , a substrate for use in the manufacture of an organic light-emitting diode (OLED) , or the like.
  • the configuration of a substrate-processing apparatus may vary widely depending on the type of processing to be performed on a substrate, the substrate-processing conditions, and the like.
  • a deposition apparatus is an apparatus that forms a thin film on the surface of a substrate using chemical vapor deposition (CVD) , physical vapor deposition (PVD) , evaporation deposition, or the like.
  • CVD chemical vapor deposition
  • PVD physical vapor deposition
  • evaporation deposition or the like.
  • a process of forming a thin film on the surface of the substrate is realized through evaporation of an organic material, an inorganic material, metal, or the like.
  • a deposition apparatus may be classified into a horizontal deposition apparatus, in which a substrate is placed in a horizontal orientation in order to perform deposition thereon, and a vertical deposition apparatus, in which a substrate is erected perpendicular to the ground in order to perform deposition thereon.
  • a substrate does not need to be placed in a completely horizontal orientation or a completely vertical orientation, and may be placed at an incline with respect to the horizontal or vertical orientation depending on the processing conditions.
  • a deposition apparatus which forms a thin film by evaporating a deposition material, includes a deposition chamber, in which a substrate on which deposition is to be performed is loaded, and a source, which is mounted in the deposition chamber and heats a deposition material to be deposited on the substrate in order to evaporate the same.
  • substrate processing is performed such that a thin film is formed on the surface of the substrate through evaporation of the deposition material.
  • a mask formed to expose only a deposition region is placed on the substrate, and accordingly anodes, cathodes, organic films, pixels, or the like may be formed on the substrate in a predetermined pattern or shape.
  • the mask is usually used in combination with a mask frame, which is of a rectangular- frame type.
  • the mask may readily sag during transfer or use.
  • the weight of the mask increases, which may make it difficult to transfer the mask and may cause the mask to sag further. Therefore, technology for preventing sagging of the mask has been increasingly demanded.
  • the present invention has been made in view of the above problems, and it is an object of the present invention to provide a mask frame and a mask assembly capable of preventing deformation of the mask frame and a mask sheet and sagging of the mask sheet and securing a stable structure.
  • a mask frame configured to fix a mask sheet thereto, the mask frame including a left frame provided on a left side, a right frame provided on a right side, an upper frame connecting the upper end portion of the left frame and the upper end portion of the right frame to each other, and a lower frame connecting the lower end portion of the left frame and the lower end portion of the right frame to each other, wherein the upper frame may include an upper reference frame made of a metal material, and an upper reinforcement frame disposed in the longitudinal direction of the upper reference frame and including an upper reinforcement portion made of a CFRP material and an upper stacked portion stacked on the upper reinforcement portion and exposed from a front side thereof, the upper stacked portion being made of a metal material
  • the upper stacked portion may be configured to surround the entire surface of the upper reinforcement portion such that the upper reinforcement portion is not exposed to the outside.
  • the upper stacked portion may be made of invar or stainless steel and may be made of the same material as the upper reference frame.
  • the upper reference frame may include an upper base portion located behind the upper reinforcement frame, and an upper protrusion portion located below the upper reinforcement frame.
  • the gap between the upper base portion and the upper protrusion portion may be shielded, and the upper reinforcement frame may have an upper end height higher than the upper protrusion portion.
  • the upper reinforcement frame may be formed in a polygonal bar or polygonal pipe shape with a constant cross-section along the longitudinal direction thereof.
  • the upper reinforcement frame may include fastening units detachably coupled to the upper reference frame, the fastening units passing through the upper reinforcement frame so as to be fastened to the upper reference frame, and the fastening units may be provided on both left and right sides of the upper reinforcement frame or provided at regular intervals in the longitudinal direction of the upper reinforcement frame .
  • the lower frame may include a lower reference frame made of a metal material, and a lower reinforcement frame disposed in the longitudinal direction of the lower reference frame and including a lower reinforcement portion made of a CFRP material and a lower stacked portion stacked on the lower reinforcement portion and exposed to the outside, the lower stacked portion being made of a metal material .
  • the mask sheet may be coupled onto the lower stacked portion, and the lower frame may be horizontally symmetrical to the upper frame.
  • a mask assembly including a plurality of mask sheets arranged in a left-right direction, and a mask frame configured to fix the mask sheets thereto and including a left frame provided on a left side, a right frame provided on a right side, an upper frame connecting the upper end portion of the left frame and the upper end portion of the right frame to each other, an upper side of each of the mask sheets being coupled to the upper frame, and a lower frame connecting the lower end portion of the left frame and the lower end portion of the right frame to each other, a lower side of each of the mask sheets being coupled to the lower frame
  • the upper frame may include an upper reference frame made of a metal material, and an upper reinforcement frame disposed in the longitudinal direction of the upper reference frame and including an upper reinforcement portion made of a CFRP material and an upper stacked portion stacked on the upper reinforcement portion and exposed from a front side thereof, the upper stacked portion being made of a metal material, and wherein the mask sheets may be coupled onto the upper stacked portion
  • the upper stacked portion may be configured to surround the entire surface of the upper reinforcement portion such that the upper reinforcement portion is not exposed to the outside.
  • the upper stacked portion may be made of invar or stainless steel and may be made of the same material as the upper reference frame.
  • the upper reference frame may include an upper base portion located behind the upper reinforcement frame, and an upper protrusion portion located below the upper reinforcement frame.
  • the gap between the upper base portion and the upper protrusion portion may be shielded, and the upper reinforcement frame may have an upper end height higher than the upper protrusion portion.
  • the lower frame may include a lower reference frame made of a metal material, and a lower reinforcement frame disposed in the longitudinal direction of the lower reference frame and including a lower reinforcement portion made of a CFRP material and a lower stacked portion stacked on the lower reinforcement portion and exposed to the outside, the lower stacked portion being made of a metal material .
  • the mask sheets may be coupled onto the lower stacked portion, and the lower frame may be horizontally symmetrical to the upper frame.
  • FIG. 1 is a view of a mask assembly and a mask frame according to an embodiment of the present invention when viewed from the front;
  • FIG. 2 is a view of a mask assembly and a mask frame according to another embodiment of the present invention when viewed from the front;
  • FIG. 3 is a view illustrating the cross-sections of upper frames according to various embodiments of the present invention.
  • FIG. 4 is a view illustrating the cross-sections of lower frames according to various embodiments of the present invention.
  • FIG. 5 is a perspective view illustrating a part of a mask assembly according to an embodiment of the present invention .
  • FIG. 6 are views illustrating various cross-sectional shapes of a mask frame according to embodiments of the present invention.
  • FIG. 7 is a view illustrating a part of the configuration of the mask frame according to an embodiment of the present invention and a load acting thereon.
  • FIG. 1 is a view of a mask assembly 1 and a mask frame 10 according to two embodiments of the present invention when viewed from the front
  • FIG. 2 is a view of a mask assembly 1 and a mask frame 10 according to another embodiment of the present invention when viewed from the front
  • FIG. 3 is a view illustrating the cross-sections of upper frames 300 according to various embodiments of the present invention
  • FIG. 4 is a view illustrating the cross- sections of lower frames 400 according to various embodiments of the present invention
  • FIG. 5 is a perspective view illustrating a part of a mask assembly 1 according to an embodiment of the present invention
  • FIG. 6 are views illustrating various cross-sectional shapes of a mask frame 10 according to embodiments of the present invention
  • FIG. 7 is a view illustrating a part of the configuration of the mask frame 10 according to an embodiment of the present invention and a load acting thereon .
  • FIG. 5 further shows an enlarged partially cut-away sectional view of an upper reinforcement frame 320.
  • the mask frame 10, a mask sheet 20, 20a, 20b, and the mask assembly 1 are schematically illustrated and portions thereof are exaggerated in size for the sake of convenience in describing the technical characteristics of the mask frame 10 and the mask assembly 1 according to the embodiment of the present invention.
  • the mask frame 10 and the mask assembly 1 according to the embodiment of the present invention, which include the technical characteristics described in the present invention, may be formed in various configurations, shapes, and dimensions.
  • fixing and transfer of a wafer or a substrate, which is a workpiece may be performed.
  • Fixing and transfer of a large-area substrate, in particular, for forming an organic light-emitting diode (OLED) display panel may be performed.
  • a substrate transfer device may be configured to fix and transfer a substrate, which is a workpiece, in a substrate treatment process, such as etching, chemical vapor deposition (CVD) , sputtering, ion injection, ashing, and/or evaporation deposition, or in a process of preparing for the above substrate treatment process.
  • the mask assembly 1 according to the present invention may be located on one side of the substrate and/or the substrate transfer device.
  • the substrate-processing apparatus for performing the above processes may include a mask transfer device for fixing and transferring the mask assembly 1, the above-described substrate transfer device, and a process chamber, or the like .
  • the substrate transfer device may move into or out of the process chamber or within the process chamber together with the substrate. At this time, the substrate may be transferred while being placed in a horizontal orientation or a vertical orientation.
  • the mask transfer device may move into or out of the process chamber or within the process chamber together with the mask assembly 1. At this time, the mask assembly 1 may be transferred while being placed in a horizontal orientation or a vertical orientation. Also, when transferred, the mask assembly 1 may be changed from a horizontal orientation to a vertical orientation or vice versa. Within the process chamber, when the substrate is placed in a horizontal orientation, the mask assembly 1 may also be placed in a horizontal orientation, and when the substrate is placed in a vertical orientation, the mask assembly 1 may also be placed in a vertical orientation.
  • the present invention will be described on the basis of an up-down direction Y and a left-right direction X set with respect to the mask assembly 1 shown in FIGS. 1 and 2. That is, a description will be made on the basis of the directions set with respect to the mask assembly 1, which is erected in a vertical orientation. However, this is merely for the purpose of explaining the mask assembly 1 and the mask frame 10.
  • the mask assembly 1 and the mask frame 10 according to the present invention do not necessarily need to be erected in a vertical orientation when used.
  • the mask assembly 1 may have therein through-holes 21 formed in a predetermined pattern or shape .
  • the mask assembly 1 may be transferred in one direction within the process chamber, and may be located ahead of the substrate.
  • a deposition material evaporated in the process chamber passes through the through-holes 21 formed in the mask sheet 20, 20a, 20b, which forms the mask assembly 1, and is seated on the substrate, whereby anodes, cathodes, organic films, pixels, or the like are formed on the substrate in a predetermined pattern or shape .
  • the mask assembly 1 includes the mask frame 10 and the mask sheet 20, 20a, 20b.
  • the mask sheet 20, 20a, 20b may be implemented as a thin metal plate or a metallic thin film, in which the through-holes 21 are formed.
  • the mask sheet 20, 20a, 20b may have a thickness of several millimeters (mm) to several tens of millimeters (mm) , or several tens of micrometers (pm) to several hundreds of micrometers (pm) , specifically 100 to 300 pm, 10 to 20 pm, or 18 pm.
  • the through-holes 21 in the mask sheet 20, 20a, 20b may vary in size and shape depending on requirements.
  • the mask sheet 20 may be implemented as a general fine metal mask (FMM) .
  • the mask sheet 20a may be implemented in the form of a strip, which extends long in one direction (refer to FIGS. 1(a) and 1(b)).
  • a plurality of mask sheets 20a may be arranged parallel to each other, and two opposite end portions (the upper and lower end portions) of each of the mask sheets 20a may be secured to the mask frame 10.
  • the mask sheet 20 may be implemented as a general common metal mask (CMM) .
  • the mask sheet 20b may be implemented as a general open mask, which may be formed in a rectangular shape (refer to FIG. 2) .
  • four edge portions of the mask sheet 20b may be respectively secured to a left frame 100, a right frame 200, an upper frame 300, and a lower frame 300.
  • the mask frame 10 and the mask assembly 1 in the case in which the mask sheet 20 is implemented in the form of a strip that extends long in the up-down direction, that is, as shown in FIG. 1, in the case in which the upper end and the lower end of the mask sheet 20 are coupled to the mask frame 10, it is possible to prevent deformation of the mask frame 10 and the mask sheet 20, to prevent sagging of the mask sheet 20, and to provide a mask frame 10 and a mask assembly 20 having a stable structure.
  • the mask frame 10 may be made of a material having higher strength and/or rigidity than the material of the mask sheet 20, 20a, 20b.
  • the mask frame 10 may be made of a metal material.
  • the mask frame 10 may be made of invar, which is an iron-nickel alloy (Fe-Ni alloy) , or stainless steel, or may be made of a material including invar or stainless steel .
  • invar described in the present invention may be Invar36
  • stainless steel described in the present invention may be SUS430.
  • the mask frame 10 includes a left frame 100, a right frame 200, an upper frame 300, and a lower frame 400, and is formed so as to generally have a rectangular frame configuration .
  • the left frame 100 may form a left part of the mask frame 10, may extend long in the up-down direction Y, and may be formed so as to generally have a straight line shape.
  • the left frame 100 may have a constant cross-section in the up-down direction Y, and may be formed in a cylindrical shape, a polyprismatic shape, or the like.
  • the left frame 100 may also be formed in a circular pipe shape, a polygonal pipe shape, or the like.
  • the cross-section of the left frame 100 may have an L shape, a U shape, an H shape, or the like. This cross-sectional shape of the left frame 100 may favorably contribute to a reduction in the weight of the frame and an increase in the strength of the frame (refer to FIG . 6 ) .
  • the right frame 200 may form the right part of the mask frame 10, may extend long in the up-down direction Y, and may be formed so as to generally have a straight line shape.
  • the right frame 200 may have a constant cross- section in the up-down direction Y, and may be formed in a cylindrical shape, a polyprismatic shape, or the like.
  • the right frame 200 may be formed in a circular pipe shape, a polygonal pipe shape, or the like.
  • the cross- section of the right frame 200 may have an L shape, a U shape, an H shape, or the like. This cross-sectional shape of the right frame 200 may favorably contribute to a reduction in the weight of the frame and an increase in the strength of the frame (refer to FIG. 6) .
  • the left frame 100 and the right frame 200 may be formed parallel to each other, may have the same shape, the same size, and the same material as each other, and may be formed symmetrically to each other.
  • the upper frame 300 may connect the upper end portion of the left frame 100 and the upper end portion of the right frame 200 to each other, and may be secured to the left frame 100 and the right frame 200.
  • the upper frame may be integrally connected to the left frame 100, or may be integrally connected to the right frame 200.
  • the upper frame 300 may include an upper reference frame 310 and an upper reinforcement frame 320.
  • the upper reinforcement frame 320 may include an upper reinforcement portion 321 and an upper stacked portion 322.
  • the upper reference frame 310 may connect the left frame 100 and the right frame 200 to each other, and may be formed so as to generally have a straight line shape in the left-right direction X.
  • the upper reference frame 310 may have a generally constant cross-section in the left-right direction X.
  • the upper reference frame 310 may include an upper base portion 310a and an upper protrusion portion 310b.
  • the upper base portion 310a may be located behind the upper reinforcement frame 320.
  • the upper protrusion portion 310b may be located below the upper reinforcement frame 320.
  • the upper protrusion portion 310b may protrude further forwards (in the direction Z) than the upper reinforcement frame 320.
  • the upper protrusion portion 310b may protrude to the same height as the upper reinforcement frame 320.
  • the upper protrusion portion 310b may be integrally connected to the upper base portion 310a, and no hole may be formed between the upper base portion 310a and the upper protrusion portion 310b. That is, the gap between the upper base portion 310a and the upper protrusion portion 310b may be completely shielded in the left-right direction X.
  • This cross-sectional shape of the upper reference frame 310 may favorably contribute to a reduction in the weight of the mask frame 10 and an increase in the strength of the mask frame 10, may prevent evaporated deposition material from being deposited at an unintended position (i.e. may prevent a deposition material from entering a region behind the upper reference frame 310) , and may obviate unnecessary cleaning.
  • the upper reference frame 310 may be made of the same material as the left frame 100 and the right frame 200.
  • the upper reference frame 310 may be made of invar (Fe-Ni alloy) or stainless steel, or may be made of a material including invar or stainless steel.
  • the upper reference frame 310 may serve to enable the upper frame 300 to be stably and securely coupled to the left frame 100 and the right frame 200.
  • the upper reinforcement frame 320 may be coupled to the upper reference frame 310 along the longitudinal direction of the upper reference frame 310, and may form the upper frame 300 together with the upper reference frame 310.
  • the upper reinforcement frame 320 may be connected and coupled at the left and right end portions thereof to the upper reference frame 310.
  • the left and right end portions of the upper reinforcement frame 320 may be respectively connected and coupled to the left frame 100 and the right frame 200.
  • the width W 2 of the upper reinforcement frame 320 may have an arbitrary value in the range of 0.2Wi to 0.8W 1 and the thickness T 2 of the upper reinforcement frame 320 may have an arbitrary value in the range of 0.3Ti to 0.9Ti .
  • the upper reinforcement portion 321, which forms the upper reinforcement frame 320, may be made of a carbon- fiber-reinforced plastic (CFRP) material. Since the upper reinforcement portion 321 is made of a CFRP material, the upper reinforcement portion 321 is lightweight and has excellent structural strength, thus greatly reducing the weight of the mask frame 10 and the mask assembly 1. Further, since the CFRP material has no large difference in thermal expansion coefficient from stainless steel or invar, it is possible to prevent damage due to thermal expansion in a high-temperature environment. When the upper reinforcement portion 321 is made of a CFRP material, the upper reinforcement portion 321 includes carbon fibers 321a and 321b and an impregnated resin 321c. The impregnated resin 321c may be made of polyimide, which has high temperature resistance, considering that the mask frame 10 and the mask assembly 1 are exposed to a high-temperature environment .
  • CFRP carbon- fiber-reinforced plastic
  • the carbon fibers 321a of the upper reinforcement portion 321 may be disposed such that the longitudinal direction thereof is parallel to the longitudinal direction (the left-right direction) of the upper reinforcement portion 321. Also, when the upper reinforcement portion 321 is made of a CFRP material, some 321a of the carbon fibers 321a and 321b of the upper reinforcement portion 321 may be disposed such that the longitudinal direction thereof is parallel to the longitudinal direction (the left-right direction or the direction X) of the upper reinforcement portion 321, and the remaining ones 321b of the carbon fibers 321a and 321b of the upper reinforcement portion 321 may be disposed such that the longitudinal direction thereof is perpendicular to the longitudinal direction (the left-right direction or the direction X) of the upper reinforcement portion 321.
  • the carbon fibers 321a and 321b are stacked while intersecting each other in a manner such that some 321a of the carbon fibers are disposed parallel to the left-right direction and the remaining ones 321b of the carbon fibers are disposed parallel to the up-down direction or the front- rear direction.
  • the upper reinforcement portion 321 and the upper reinforcement frame 320 having high strength and capable of minimizing thermal deformation thereof.
  • the upper reinforcement portion 321 may have a constant cross-section along the longitudinal direction X thereof, and may be formed in a plate shape, a cylindrical shape, a polyprismatic shape, or the like.
  • the upper reinforcement portion 321 may be formed in a circular pipe shape, a polygonal pipe shape, or the like.
  • the cross-section of the upper reinforcement portion 321 may have an L shape, a U shape, an H shape, or the like. This cross-sectional shape of the upper reinforcement portion 321 may favorably contribute to a reduction in the weight of the frame and an increase in the strength of the frame.
  • each of the upper reinforcement frame 320 and the upper reinforcement portion 321 may have a constant cross-section along the longitudinal direction X thereof, and may be formed in a circular pipe shape or a polygonal pipe shape (particularly a rectangular pipe shape), thereby effectively preventing distortion. Further, the upper reinforcement portion 321 may include a first hollow portion 323 formed therein along the longitudinal direction thereof.
  • the upper reinforcement frame 320 When the upper reinforcement frame 320 is coupled to the upper reference frame 310, not only the left and right end portions of the upper reinforcement frame 320 but also the entire surface thereof may be coupled to the upper reference frame 310 in the longitudinal direction thereof, or at least a part of the upper reinforcement frame 320 may be coupled to the upper reference frame 310.
  • the left and right end portions of the upper reinforcement frame 320 may be connected and coupled to the upper reference frame 310, whereas the middle portion of the upper reinforcement frame 320 may be spaced apart from the upper reference frame 310. That is, the entire surface of the upper reinforcement frame 320, except for the left and right end portions thereof, may be spaced apart from the upper reference frame 310 in the longitudinal direction thereof.
  • the upper stacked portion 322 may be stacked on the outer surface of the upper reinforcement portion 321 and may be coupled thereto.
  • the upper stacked portion 322 may be made of invar or stainless steel .
  • the upper stacked portion 322 may be made of the same material as the upper reference frame 310, and may be coupled to the upper reference frame
  • the upper stacked portion 322 is coupled to the mask sheet 20, 20a, 20b, and at least a part of the upper stacked portion 322 is located between the upper reinforcement portion 321 and the mask sheet 20, 20a, 20b.
  • the upper stacked portion 322 may be formed in a plate or sheet shape, and may be coupled to the upper reinforcement portion 321.
  • the upper stacked portion 322 may have a constant cross-section along the left-right direction X.
  • the upper stacked portion 322 may be coupled to the upper reinforcement portion 321 through bonding using an adhesive.
  • an adhesive such as, for example, epoxy or polyimide may be used, or a structural adhesive may be used.
  • a friction- stir welding method may be used, or a laser welding method may be used .
  • the upper stacked portion 322, which is coupled to the upper reinforcement portion 321, may be made of metal like the upper reference frame 310. Also, the upper stacked portion 322 may be made of the same material as the upper reference frame 310 (also, the left frame 100 or the right frame 200) so as to be easily welded and stably coupled to the upper reference frame 310, thereby securing a stable structure of the mask assembly 1 including the upper reinforcement portion 321.
  • the upper stacked portion 322 may be coupled to the upper reinforcement portion 321 so as to surround the entire outer surface of the upper reinforcement portion 321.
  • the upper stacked portion 322 may prevent the upper reinforcement portion 321 from being exposed to the outside (refer to FIGS. 3(b) and 3(c)).
  • the upper reinforcement frame 320 may include an upper reinforcement portion 321, which is located at an inner side, and an upper stacked portion 322, which is coupled to the upper reinforcement portion 321 while surrounding the upper reinforcement portion 321.
  • the upper reinforcement portion 321 may be made of a different material from the left frame 100, the right frame 200, and the upper reference frame 310
  • the upper stacked portion 322 may be made of the same material as the left frame 100, the right frame 200, and the upper reference frame 310.
  • the upper stacked portion 322 may be made of the same material as the left frame 100 and the right frame 200, and the upper reinforcement portion 321 may be made of a CFRP material.
  • the upper reinforcement frame 320 is coupled to the left frame 100 and the right frame 200 via the upper stacked portion 322 through welding or the like, thereby facilitating the coupling process and securing a stable coupling structure of the mask frame 10. Furthermore, since the upper reinforcement portion 321 is not exposed to the outside due to the upper stacked portion 322, the upper reinforcement portion 321, which is made of a CFRP material, may be prevented from chemically reacting to a cleaning liquid or corroding in the process of cleaning the mask frame 10, and the entire surface of the mask frame 10 may be cleaned at the same time.
  • the lower frame 400 may connect the lower end portion of the left frame 100 and the lower end portion of the right frame 200 to each other, and may be secured to the left frame 100 and the right frame 200.
  • the lower frame 400 may be implemented as a single frame (made of a single material or having a unitary structure) like the left frame 100 and the right frame 200 (refer to FIG. 1(a)) , or may be formed so as to have the same shape and the same structure as the upper frame 300 (refer to FIG. 1(b)) .
  • the lower frame 400 may connect the left frame 100 and the right frame 200 to each other, and may be formed in the shape of a straight line that extends in the left-right direction.
  • the lower frame 400 may have a constant cross- section along the left-right direction, and may be formed in a cylindrical shape, a polyprismatic shape, or the like.
  • the lower frame 400 may be formed in a circular pipe shape, a polygonal pipe shape, or the like.
  • the cross- section of the lower frame 400 may have an L shape, a U shape, an H shape, or the like. This cross-sectional shape of the lower frame 400 may favorably contribute to a reduction in the weight of the frame and an increase in the strength of the frame (refer to FIG. 6) .
  • the lower frame 400 may be made of the same material as the left frame 100, the right frame 200, and the upper frame 300.
  • the lower frame 400 may include a lower reference frame 410 and a lower reinforcement frame 420.
  • the lower reinforcement frame 420 may include a lower reinforcement portion 421 and a lower stacked portion 422.
  • the lower frame 400 may have the same structure, shape, material, and size as the upper frame 300 described above.
  • the lower reference frame 410 may be formed to be the same as the upper reference frame 310
  • the lower reinforcement frame 420 may be formed to be the same as the upper reinforcement frame 320 described above
  • the lower reinforcement portion 421 may be formed to be the same as the upper reinforcement portion 321 described above
  • the lower stacked portion 422 may be formed to be the same as the upper stacked portion 322.
  • each of the lower reinforcement frame 420 and the lower reinforcement portion 421 may have a constant cross-section along the longitudinal direction X thereof, and may be formed in a circular pipe shape or a polygonal pipe shape (particularly a rectangular pipe shape), thereby effectively preventing distortion. Further, the lower reinforcement portion 421 may include a second hollow portion 423 formed therein along the longitudinal direction thereof.
  • the lower reference frame 410 may have a generally constant cross-section along the left-right direction, and may include a lower base portion 410a and a lower protrusion portion 410b.
  • the mask frame 10 according to the present invention may be formed in a horizontally and vertically symmetrical shape. Accordingly, the upper frame 300 and the lower frame 400 may be formed symmetrically to each other. When the lower frame 400 is formed symmetrically to the upper frame 300, the lower frame 400 may have the same operation and effects as the upper frame 300 described above .
  • the mask sheet 20, 20a, 20b when the mask sheet 20, 20a, 20b is coupled to the mask frame 10, the mask sheet 20, 20a, 20b needs to be stretched sufficiently tight.
  • the mask sheet 20, 20a, 20b may be coupled to the mask frame 10 through welding or using separate fixing units (fastening units) such as, for example, bolts or rivets.
  • the mask frame and the mask assembly according to the embodiment of the present invention may include fastening units 500.
  • the fastening units 500 may pass through the upper reinforcement frame 320 so as to be fastened to the upper reference frame 310.
  • the upper reinforcement frame 320 may be separated from the upper reference frame 310 by releasing the fastening units 500.
  • the fastening units 500 may be used in order to easily and stably couple the upper reinforcement frame 320 to the mask frame 10 and to separate the upper reinforcement frame 320 from the mask frame 10 when it is desired for cleaning.
  • the fastening units 500 may be provided on both left and right sides of the upper reinforcement frame 320, or may be provided at regular intervals in the longitudinal direction of the upper reinforcement frame 320.
  • the upper end portion of the mask sheet 20, 20a, 20b may be coupled to the upper reference frame 310 of the upper frame 300.
  • the upper end portion of the mask sheet 20, 20a, 20b may also be coupled to the upper reinforcement frame 320 of the upper frame 300.
  • the upper end portion of the mask sheet 20, 20a, 20b may not be coupled to the upper reference frame 310, but may be coupled to the upper reinforcement frame 320 of the upper frame 300. Further, the upper end portion of the mask sheet 20, 20a, 20b may be coupled to the upper reinforcement frame 320, and may be spaced apart from the upper reference frame 310.
  • the upper end portion of the mask sheet 20, 20a, 20b may be coupled to the upper reinforcement frame 320 via the upper stacked portion 322.
  • the lower end portion of the mask sheet 20, 20a, 20b may be secured to the lower frame 400.
  • the lower end portion of the mask sheet 20, 20a, 20b may be coupled to the lower reference frame 410 of the lower frame 400.
  • the lower end portion of the mask sheet 20, 20a, 20b may also be coupled to the lower reinforcement frame 420 of the lower frame 400.
  • the lower end portion of the mask sheet 20, 20a, 20b may not be coupled to the lower reference frame 410, but may be coupled to the lower reinforcement frame 420 of the lower frame 400. Further, the lower end portion of the mask sheet 20, 20a, 20b may be coupled to the lower reinforcement frame 420, and may be spaced apart from the lower reference frame 410.
  • the lower end portion of the mask sheet 20, 20a, 20b may be coupled to the lower reinforcement frame 420 via the lower stacked portion 422.
  • a plurality of mask sheets 20a may be provided so as to be arranged repeatedly in the left-right direction, and each of the mask sheets 20a may be implemented in the form of a strip that extends long in the up-down direction.
  • the upper end portions of the mask sheets 20a may be secured to the upper reinforcement frame 320.
  • a load FI may act on the points of the upper reinforcement frame 320, to which the mask sheets 20a are coupled, in the downward direction due to the mask sheets 20a.
  • the load FI may act along the overall length of the upper reinforcement frame 320 in the downward direction.
  • the upper reinforcement portion 321 of the upper reinforcement frame 320 is made of a CFRP material, it is possible to reduce deformation of the mask frame compared to a conventional mask frame.
  • the upper base portion 310a of the upper reference frame 310 may be located behind the upper reinforcement frame 320, and the upper protrusion portion 310b of the upper reference frame 310 may be located below the upper reinforcement frame 320.
  • the upper reinforcement frame 320 is interposed between the two parts 310a and 310b of the upper reference frame 310, which are orthogonal to each other, it is possible to secure sufficient flexural rigidity to withstand the load FI acting on the upper reinforcement frame 320, and consequently to prevent deformation of the mask frame 10 and sagging of the mask sheet 20, 20a, 20b.
  • the lower end portion of the mask sheet 20, 20a, 20b may be secured to the lower reinforcement frame 420, and a load may act along the overall length of the lower reinforcement frame 420 in the up-down direction.
  • the lower reinforcement portion 410 of the lower reinforcement frame 420 is made of a CFRP material, it is possible to reduce deformation of the mask frame 10 compared to a conventional mask frame. Further, it is possible to prevent deformation of the lower frame 400 as well as the upper frame 300, and to secure the stable structure of the mask frame 10.
  • the present invention provides a mask frame and a mask assembly capable of increasing the rigidity of the mask frame while reducing the weight thereof compared to a conventional mask frame and preventing deformation of the mask frame.

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Abstract

Disclosed are a mask frame and a mask assembly. The mask frame of the present disclosure is configured to fix a mask sheet thereto and includes: a left frame provided on a left side; a right frame provided on a right side; an upper frame connecting an upper end portion of the left frame and an upper end portion of the right frame to each other; and a lower frame connecting a lower end portion of the left frame and a lower end portion of the right frame to each other. The upper frame includes an upper reference frame made of a metal material, an upper reinforcement frame disposed in a longitudinal direction of the upper reference frame and comprising an upper reinforcement portion made of a CFRP material, and an upper stacked portion stacked on the upper reinforcement portion and exposed from a front side thereof. The upper stacked portion is made of a metal material.

Description

MASK FRAME AND MASK ASSEMBLY
BACKGROUND OF THE INVENTION
Field of the Invention
The present invention relates to a mask frame and a mask assembly, and more particularly to a mask frame fixing a mask sheet thereto and a mask assembly including the mask frame.
Description of the Related Art
A substrate-processing apparatus is an apparatus that performs a deposition process, an etching process, and the like in order to manufacture a wafer for use in the manufacture of a semiconductor, a substrate for use in the manufacture of a liquid crystal display (LCD) , a substrate for use in the manufacture of an organic light-emitting diode (OLED) , or the like. The configuration of a substrate-processing apparatus may vary widely depending on the type of processing to be performed on a substrate, the substrate-processing conditions, and the like.
As one example of a substrate-processing apparatus, a deposition apparatus is an apparatus that forms a thin film on the surface of a substrate using chemical vapor deposition (CVD) , physical vapor deposition (PVD) , evaporation deposition, or the like. In the process of depositing a deposition material, for example, on a substrate for use in the manufacture of an OLED display, a process of forming a thin film on the surface of the substrate is realized through evaporation of an organic material, an inorganic material, metal, or the like.
A deposition apparatus may be classified into a horizontal deposition apparatus, in which a substrate is placed in a horizontal orientation in order to perform deposition thereon, and a vertical deposition apparatus, in which a substrate is erected perpendicular to the ground in order to perform deposition thereon. However, a substrate does not need to be placed in a completely horizontal orientation or a completely vertical orientation, and may be placed at an incline with respect to the horizontal or vertical orientation depending on the processing conditions.
A deposition apparatus, which forms a thin film by evaporating a deposition material, includes a deposition chamber, in which a substrate on which deposition is to be performed is loaded, and a source, which is mounted in the deposition chamber and heats a deposition material to be deposited on the substrate in order to evaporate the same. With this configuration, substrate processing is performed such that a thin film is formed on the surface of the substrate through evaporation of the deposition material.
In this substrate-processing method, a mask formed to expose only a deposition region is placed on the substrate, and accordingly anodes, cathodes, organic films, pixels, or the like may be formed on the substrate in a predetermined pattern or shape.
The mask is usually used in combination with a mask frame, which is of a rectangular- frame type. However, the mask may readily sag during transfer or use. In particular, with an increase in the size of the substrate and the mask, the weight of the mask increases, which may make it difficult to transfer the mask and may cause the mask to sag further. Therefore, technology for preventing sagging of the mask has been increasingly demanded.
SUMMARY OF THE INVENTION
Therefore, the present invention has been made in view of the above problems, and it is an object of the present invention to provide a mask frame and a mask assembly capable of preventing deformation of the mask frame and a mask sheet and sagging of the mask sheet and securing a stable structure.
It is another object of the present invention to provide a mask frame and a mask assembly capable of preventing deformation of a fine-metal-mask-type (FMM- type) mask sheet and enabling the manufacture of a high- resolution panel . In accordance with an aspect of the present invention, the above and other objects can be accomplished by the provision of a mask frame configured to fix a mask sheet thereto, the mask frame including a left frame provided on a left side, a right frame provided on a right side, an upper frame connecting the upper end portion of the left frame and the upper end portion of the right frame to each other, and a lower frame connecting the lower end portion of the left frame and the lower end portion of the right frame to each other, wherein the upper frame may include an upper reference frame made of a metal material, and an upper reinforcement frame disposed in the longitudinal direction of the upper reference frame and including an upper reinforcement portion made of a CFRP material and an upper stacked portion stacked on the upper reinforcement portion and exposed from a front side thereof, the upper stacked portion being made of a metal material .
Further, in the mask frame according to the embodiment of the present invention, the upper stacked portion may be configured to surround the entire surface of the upper reinforcement portion such that the upper reinforcement portion is not exposed to the outside.
Further, in the mask frame according to the embodiment of the present invention, the upper stacked portion may be made of invar or stainless steel and may be made of the same material as the upper reference frame.
Further, in the mask frame according to the embodiment of the present invention, the upper reference frame may include an upper base portion located behind the upper reinforcement frame, and an upper protrusion portion located below the upper reinforcement frame. The gap between the upper base portion and the upper protrusion portion may be shielded, and the upper reinforcement frame may have an upper end height higher than the upper protrusion portion.
Further, in the mask frame according to the embodiment of the present invention, the upper reinforcement frame may be formed in a polygonal bar or polygonal pipe shape with a constant cross-section along the longitudinal direction thereof.
Further, in the mask frame according to the embodiment of the present invention, the upper reinforcement frame may include fastening units detachably coupled to the upper reference frame, the fastening units passing through the upper reinforcement frame so as to be fastened to the upper reference frame, and the fastening units may be provided on both left and right sides of the upper reinforcement frame or provided at regular intervals in the longitudinal direction of the upper reinforcement frame .
Further, in the mask frame according to the embodiment of the present invention, the lower frame may include a lower reference frame made of a metal material, and a lower reinforcement frame disposed in the longitudinal direction of the lower reference frame and including a lower reinforcement portion made of a CFRP material and a lower stacked portion stacked on the lower reinforcement portion and exposed to the outside, the lower stacked portion being made of a metal material . The mask sheet may be coupled onto the lower stacked portion, and the lower frame may be horizontally symmetrical to the upper frame.
In accordance with another aspect of the present invention, there is provided a mask assembly including a plurality of mask sheets arranged in a left-right direction, and a mask frame configured to fix the mask sheets thereto and including a left frame provided on a left side, a right frame provided on a right side, an upper frame connecting the upper end portion of the left frame and the upper end portion of the right frame to each other, an upper side of each of the mask sheets being coupled to the upper frame, and a lower frame connecting the lower end portion of the left frame and the lower end portion of the right frame to each other, a lower side of each of the mask sheets being coupled to the lower frame, wherein the upper frame may include an upper reference frame made of a metal material, and an upper reinforcement frame disposed in the longitudinal direction of the upper reference frame and including an upper reinforcement portion made of a CFRP material and an upper stacked portion stacked on the upper reinforcement portion and exposed from a front side thereof, the upper stacked portion being made of a metal material, and wherein the mask sheets may be coupled onto the upper stacked portion.
Further, in the mask assembly according to the embodiment of the present invention, the upper stacked portion may be configured to surround the entire surface of the upper reinforcement portion such that the upper reinforcement portion is not exposed to the outside.
Further, in the mask assembly according to the embodiment of the present invention, the upper stacked portion may be made of invar or stainless steel and may be made of the same material as the upper reference frame.
Further, in the mask assembly according to the embodiment of the present invention, the upper reference frame may include an upper base portion located behind the upper reinforcement frame, and an upper protrusion portion located below the upper reinforcement frame. The gap between the upper base portion and the upper protrusion portion may be shielded, and the upper reinforcement frame may have an upper end height higher than the upper protrusion portion.
Further, in the mask assembly according to the embodiment of the present invention, the lower frame may include a lower reference frame made of a metal material, and a lower reinforcement frame disposed in the longitudinal direction of the lower reference frame and including a lower reinforcement portion made of a CFRP material and a lower stacked portion stacked on the lower reinforcement portion and exposed to the outside, the lower stacked portion being made of a metal material . The mask sheets may be coupled onto the lower stacked portion, and the lower frame may be horizontally symmetrical to the upper frame.
BRIEF DESCRIPTION OF THE DRAWINGS
The above and other objects, features and other advantages of the present invention will be more clearly understood from the following detailed description taken in conjunction with the accompanying drawings, in which:
FIG. 1 is a view of a mask assembly and a mask frame according to an embodiment of the present invention when viewed from the front;
FIG. 2 is a view of a mask assembly and a mask frame according to another embodiment of the present invention when viewed from the front;
FIG. 3 is a view illustrating the cross-sections of upper frames according to various embodiments of the present invention;
FIG. 4 is a view illustrating the cross-sections of lower frames according to various embodiments of the present invention;
FIG. 5 is a perspective view illustrating a part of a mask assembly according to an embodiment of the present invention ;
FIG. 6 are views illustrating various cross-sectional shapes of a mask frame according to embodiments of the present invention; and
FIG. 7 is a view illustrating a part of the configuration of the mask frame according to an embodiment of the present invention and a load acting thereon.
DETAILED DESCRIPTION OF THE INVENTION
Reference will now be made in detail to the embodiments of the present invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same reference numbers will be used throughout the specification to refer to the same parts.
FIG. 1 is a view of a mask assembly 1 and a mask frame 10 according to two embodiments of the present invention when viewed from the front, FIG. 2 is a view of a mask assembly 1 and a mask frame 10 according to another embodiment of the present invention when viewed from the front, FIG. 3 is a view illustrating the cross-sections of upper frames 300 according to various embodiments of the present invention, FIG. 4 is a view illustrating the cross- sections of lower frames 400 according to various embodiments of the present invention, FIG. 5 is a perspective view illustrating a part of a mask assembly 1 according to an embodiment of the present invention, FIG. 6 are views illustrating various cross-sectional shapes of a mask frame 10 according to embodiments of the present invention, and FIG. 7 is a view illustrating a part of the configuration of the mask frame 10 according to an embodiment of the present invention and a load acting thereon .
FIG. 5 further shows an enlarged partially cut-away sectional view of an upper reinforcement frame 320.
In the drawings, the mask frame 10, a mask sheet 20, 20a, 20b, and the mask assembly 1 are schematically illustrated and portions thereof are exaggerated in size for the sake of convenience in describing the technical characteristics of the mask frame 10 and the mask assembly 1 according to the embodiment of the present invention. The mask frame 10 and the mask assembly 1 according to the embodiment of the present invention, which include the technical characteristics described in the present invention, may be formed in various configurations, shapes, and dimensions.
In the process of manufacturing a semiconductor or a display panel, fixing and transfer of a wafer or a substrate, which is a workpiece, may be performed. Fixing and transfer of a large-area substrate, in particular, for forming an organic light-emitting diode (OLED) display panel may be performed.
A substrate transfer device may be configured to fix and transfer a substrate, which is a workpiece, in a substrate treatment process, such as etching, chemical vapor deposition (CVD) , sputtering, ion injection, ashing, and/or evaporation deposition, or in a process of preparing for the above substrate treatment process. The mask assembly 1 according to the present invention may be located on one side of the substrate and/or the substrate transfer device. The substrate-processing apparatus for performing the above processes may include a mask transfer device for fixing and transferring the mask assembly 1, the above-described substrate transfer device, and a process chamber, or the like .
The substrate transfer device may move into or out of the process chamber or within the process chamber together with the substrate. At this time, the substrate may be transferred while being placed in a horizontal orientation or a vertical orientation.
The mask transfer device may move into or out of the process chamber or within the process chamber together with the mask assembly 1. At this time, the mask assembly 1 may be transferred while being placed in a horizontal orientation or a vertical orientation. Also, when transferred, the mask assembly 1 may be changed from a horizontal orientation to a vertical orientation or vice versa. Within the process chamber, when the substrate is placed in a horizontal orientation, the mask assembly 1 may also be placed in a horizontal orientation, and when the substrate is placed in a vertical orientation, the mask assembly 1 may also be placed in a vertical orientation.
Hereinafter, the present invention will be described on the basis of an up-down direction Y and a left-right direction X set with respect to the mask assembly 1 shown in FIGS. 1 and 2. That is, a description will be made on the basis of the directions set with respect to the mask assembly 1, which is erected in a vertical orientation. However, this is merely for the purpose of explaining the mask assembly 1 and the mask frame 10. The mask assembly 1 and the mask frame 10 according to the present invention do not necessarily need to be erected in a vertical orientation when used.
Further, a description will be made on the assumption that the side of the mask frame 10 to which a mask sheet 20, 20a, 20b is coupled is a front side.
The mask assembly 1 may have therein through-holes 21 formed in a predetermined pattern or shape . The mask assembly 1 may be transferred in one direction within the process chamber, and may be located ahead of the substrate. A deposition material evaporated in the process chamber passes through the through-holes 21 formed in the mask sheet 20, 20a, 20b, which forms the mask assembly 1, and is seated on the substrate, whereby anodes, cathodes, organic films, pixels, or the like are formed on the substrate in a predetermined pattern or shape .
The mask assembly 1 according to the embodiment of the present invention includes the mask frame 10 and the mask sheet 20, 20a, 20b.
The mask sheet 20, 20a, 20b may be implemented as a thin metal plate or a metallic thin film, in which the through-holes 21 are formed. The mask sheet 20, 20a, 20b may have a thickness of several millimeters (mm) to several tens of millimeters (mm) , or several tens of micrometers (pm) to several hundreds of micrometers (pm) , specifically 100 to 300 pm, 10 to 20 pm, or 18 pm. The through-holes 21 in the mask sheet 20, 20a, 20b may vary in size and shape depending on requirements.
The mask sheet 20 may be implemented as a general fine metal mask (FMM) . The mask sheet 20a may be implemented in the form of a strip, which extends long in one direction (refer to FIGS. 1(a) and 1(b)). Here, a plurality of mask sheets 20a may be arranged parallel to each other, and two opposite end portions (the upper and lower end portions) of each of the mask sheets 20a may be secured to the mask frame 10.
The mask sheet 20 may be implemented as a general common metal mask (CMM) . The mask sheet 20b may be implemented as a general open mask, which may be formed in a rectangular shape (refer to FIG. 2) . Here, four edge portions of the mask sheet 20b may be respectively secured to a left frame 100, a right frame 200, an upper frame 300, and a lower frame 300.
According to the mask frame 10 and the mask assembly 1 according to the embodiment of the present invention, in the case in which the mask sheet 20 is implemented in the form of a strip that extends long in the up-down direction, that is, as shown in FIG. 1, in the case in which the upper end and the lower end of the mask sheet 20 are coupled to the mask frame 10, it is possible to prevent deformation of the mask frame 10 and the mask sheet 20, to prevent sagging of the mask sheet 20, and to provide a mask frame 10 and a mask assembly 20 having a stable structure.
The mask frame 10 may be made of a material having higher strength and/or rigidity than the material of the mask sheet 20, 20a, 20b. The mask frame 10 may be made of a metal material. In particular, the mask frame 10 may be made of invar, which is an iron-nickel alloy (Fe-Ni alloy) , or stainless steel, or may be made of a material including invar or stainless steel .
Specifically, "invar" described in the present invention may be Invar36, and "stainless steel" described in the present invention may be SUS430.
The mask frame 10 includes a left frame 100, a right frame 200, an upper frame 300, and a lower frame 400, and is formed so as to generally have a rectangular frame configuration .
The left frame 100 may form a left part of the mask frame 10, may extend long in the up-down direction Y, and may be formed so as to generally have a straight line shape. The left frame 100 may have a constant cross-section in the up-down direction Y, and may be formed in a cylindrical shape, a polyprismatic shape, or the like. The left frame 100 may also be formed in a circular pipe shape, a polygonal pipe shape, or the like. Further, the cross-section of the left frame 100 may have an L shape, a U shape, an H shape, or the like. This cross-sectional shape of the left frame 100 may favorably contribute to a reduction in the weight of the frame and an increase in the strength of the frame (refer to FIG . 6 ) .
The right frame 200 may form the right part of the mask frame 10, may extend long in the up-down direction Y, and may be formed so as to generally have a straight line shape. The right frame 200 may have a constant cross- section in the up-down direction Y, and may be formed in a cylindrical shape, a polyprismatic shape, or the like. The right frame 200 may be formed in a circular pipe shape, a polygonal pipe shape, or the like. Further, the cross- section of the right frame 200 may have an L shape, a U shape, an H shape, or the like. This cross-sectional shape of the right frame 200 may favorably contribute to a reduction in the weight of the frame and an increase in the strength of the frame (refer to FIG. 6) .
The left frame 100 and the right frame 200 may be formed parallel to each other, may have the same shape, the same size, and the same material as each other, and may be formed symmetrically to each other.
The upper frame 300 may connect the upper end portion of the left frame 100 and the upper end portion of the right frame 200 to each other, and may be secured to the left frame 100 and the right frame 200. The upper frame may be integrally connected to the left frame 100, or may be integrally connected to the right frame 200.
The upper frame 300 may include an upper reference frame 310 and an upper reinforcement frame 320. The upper reinforcement frame 320 may include an upper reinforcement portion 321 and an upper stacked portion 322.
The upper reference frame 310 may connect the left frame 100 and the right frame 200 to each other, and may be formed so as to generally have a straight line shape in the left-right direction X. The upper reference frame 310 may have a generally constant cross-section in the left-right direction X.
The upper reference frame 310 may include an upper base portion 310a and an upper protrusion portion 310b.
The upper base portion 310a may be located behind the upper reinforcement frame 320.
The upper protrusion portion 310b may be located below the upper reinforcement frame 320. The upper protrusion portion 310b may protrude further forwards (in the direction Z) than the upper reinforcement frame 320. Alternatively, the upper protrusion portion 310b may protrude to the same height as the upper reinforcement frame 320.
The upper protrusion portion 310b may be integrally connected to the upper base portion 310a, and no hole may be formed between the upper base portion 310a and the upper protrusion portion 310b. That is, the gap between the upper base portion 310a and the upper protrusion portion 310b may be completely shielded in the left-right direction X.
This cross-sectional shape of the upper reference frame 310 may favorably contribute to a reduction in the weight of the mask frame 10 and an increase in the strength of the mask frame 10, may prevent evaporated deposition material from being deposited at an unintended position (i.e. may prevent a deposition material from entering a region behind the upper reference frame 310) , and may obviate unnecessary cleaning.
The upper reference frame 310 may be made of the same material as the left frame 100 and the right frame 200. The upper reference frame 310 may be made of invar (Fe-Ni alloy) or stainless steel, or may be made of a material including invar or stainless steel. The upper reference frame 310 may serve to enable the upper frame 300 to be stably and securely coupled to the left frame 100 and the right frame 200.
The upper reinforcement frame 320 may be coupled to the upper reference frame 310 along the longitudinal direction of the upper reference frame 310, and may form the upper frame 300 together with the upper reference frame 310. The upper reinforcement frame 320 may be connected and coupled at the left and right end portions thereof to the upper reference frame 310. Alternatively, the left and right end portions of the upper reinforcement frame 320 may be respectively connected and coupled to the left frame 100 and the right frame 200.
In the mask frame 10 and the mask assembly 1 according to the present invention, assuming that the width of the upper reference frame 310 is Wj and the thickness of the upper reference frame 310 is Ti, the width W2 of the upper reinforcement frame 320 may have an arbitrary value in the range of 0.2Wi to 0.8W1 and the thickness T2 of the upper reinforcement frame 320 may have an arbitrary value in the range of 0.3Ti to 0.9Ti .
The upper reinforcement portion 321, which forms the upper reinforcement frame 320, may be made of a carbon- fiber-reinforced plastic (CFRP) material. Since the upper reinforcement portion 321 is made of a CFRP material, the upper reinforcement portion 321 is lightweight and has excellent structural strength, thus greatly reducing the weight of the mask frame 10 and the mask assembly 1. Further, since the CFRP material has no large difference in thermal expansion coefficient from stainless steel or invar, it is possible to prevent damage due to thermal expansion in a high-temperature environment. When the upper reinforcement portion 321 is made of a CFRP material, the upper reinforcement portion 321 includes carbon fibers 321a and 321b and an impregnated resin 321c. The impregnated resin 321c may be made of polyimide, which has high temperature resistance, considering that the mask frame 10 and the mask assembly 1 are exposed to a high-temperature environment .
When the upper reinforcement portion 321 is made of a CFRP material, the carbon fibers 321a of the upper reinforcement portion 321 may be disposed such that the longitudinal direction thereof is parallel to the longitudinal direction (the left-right direction) of the upper reinforcement portion 321. Also, when the upper reinforcement portion 321 is made of a CFRP material, some 321a of the carbon fibers 321a and 321b of the upper reinforcement portion 321 may be disposed such that the longitudinal direction thereof is parallel to the longitudinal direction (the left-right direction or the direction X) of the upper reinforcement portion 321, and the remaining ones 321b of the carbon fibers 321a and 321b of the upper reinforcement portion 321 may be disposed such that the longitudinal direction thereof is perpendicular to the longitudinal direction (the left-right direction or the direction X) of the upper reinforcement portion 321. That is, the carbon fibers 321a and 321b are stacked while intersecting each other in a manner such that some 321a of the carbon fibers are disposed parallel to the left-right direction and the remaining ones 321b of the carbon fibers are disposed parallel to the up-down direction or the front- rear direction. As a result, it is possible to form the upper reinforcement portion 321 and the upper reinforcement frame 320 having high strength and capable of minimizing thermal deformation thereof.
The upper reinforcement portion 321 may have a constant cross-section along the longitudinal direction X thereof, and may be formed in a plate shape, a cylindrical shape, a polyprismatic shape, or the like. The upper reinforcement portion 321 may be formed in a circular pipe shape, a polygonal pipe shape, or the like. Further, the cross-section of the upper reinforcement portion 321 may have an L shape, a U shape, an H shape, or the like. This cross-sectional shape of the upper reinforcement portion 321 may favorably contribute to a reduction in the weight of the frame and an increase in the strength of the frame.
In the mask frame 10 and the mask assembly 1 according to the present invention, each of the upper reinforcement frame 320 and the upper reinforcement portion 321 may have a constant cross-section along the longitudinal direction X thereof, and may be formed in a circular pipe shape or a polygonal pipe shape (particularly a rectangular pipe shape), thereby effectively preventing distortion. Further, the upper reinforcement portion 321 may include a first hollow portion 323 formed therein along the longitudinal direction thereof.
When the upper reinforcement frame 320 is coupled to the upper reference frame 310, not only the left and right end portions of the upper reinforcement frame 320 but also the entire surface thereof may be coupled to the upper reference frame 310 in the longitudinal direction thereof, or at least a part of the upper reinforcement frame 320 may be coupled to the upper reference frame 310.
Unlike the above configuration, the left and right end portions of the upper reinforcement frame 320 may be connected and coupled to the upper reference frame 310, whereas the middle portion of the upper reinforcement frame 320 may be spaced apart from the upper reference frame 310. That is, the entire surface of the upper reinforcement frame 320, except for the left and right end portions thereof, may be spaced apart from the upper reference frame 310 in the longitudinal direction thereof.
The upper stacked portion 322 may be stacked on the outer surface of the upper reinforcement portion 321 and may be coupled thereto. The upper stacked portion 322 may be made of invar or stainless steel . The upper stacked portion 322 may be made of the same material as the upper reference frame 310, and may be coupled to the upper reference frame
310. The upper stacked portion 322 is coupled to the mask sheet 20, 20a, 20b, and at least a part of the upper stacked portion 322 is located between the upper reinforcement portion 321 and the mask sheet 20, 20a, 20b.
The upper stacked portion 322 may be formed in a plate or sheet shape, and may be coupled to the upper reinforcement portion 321. The upper stacked portion 322 may have a constant cross-section along the left-right direction X.
The upper stacked portion 322 may be coupled to the upper reinforcement portion 321 through bonding using an adhesive. In order to couple the upper stacked portion 322 to the upper reinforcement portion 321, an adhesive such as, for example, epoxy or polyimide may be used, or a structural adhesive may be used.
Also, in order to couple the upper stacked portion 322 to the upper reinforcement portion 321, a friction- stir welding method may be used, or a laser welding method may be used .
The upper stacked portion 322, which is coupled to the upper reinforcement portion 321, may be made of metal like the upper reference frame 310. Also, the upper stacked portion 322 may be made of the same material as the upper reference frame 310 (also, the left frame 100 or the right frame 200) so as to be easily welded and stably coupled to the upper reference frame 310, thereby securing a stable structure of the mask assembly 1 including the upper reinforcement portion 321.
In the mask frame 10 and the mask assembly 1 according to the embodiment of the present invention, the upper stacked portion 322 may be coupled to the upper reinforcement portion 321 so as to surround the entire outer surface of the upper reinforcement portion 321. Here, the upper stacked portion 322 may prevent the upper reinforcement portion 321 from being exposed to the outside (refer to FIGS. 3(b) and 3(c)).
Thus, the upper reinforcement frame 320 may include an upper reinforcement portion 321, which is located at an inner side, and an upper stacked portion 322, which is coupled to the upper reinforcement portion 321 while surrounding the upper reinforcement portion 321. Here, the upper reinforcement portion 321 may be made of a different material from the left frame 100, the right frame 200, and the upper reference frame 310, and the upper stacked portion 322 may be made of the same material as the left frame 100, the right frame 200, and the upper reference frame 310.
For example, when the left frame 100 and the right frame 200 are made of Fe-Ni alloy (invar), stainless steel, or a material including invar or stainless steel, the upper stacked portion 322 may be made of the same material as the left frame 100 and the right frame 200, and the upper reinforcement portion 321 may be made of a CFRP material.
Thus, it is possible to increase the rigidity of the upper frame 300 while reducing the overall weight thereof. Further, the upper reinforcement frame 320 is coupled to the left frame 100 and the right frame 200 via the upper stacked portion 322 through welding or the like, thereby facilitating the coupling process and securing a stable coupling structure of the mask frame 10. Furthermore, since the upper reinforcement portion 321 is not exposed to the outside due to the upper stacked portion 322, the upper reinforcement portion 321, which is made of a CFRP material, may be prevented from chemically reacting to a cleaning liquid or corroding in the process of cleaning the mask frame 10, and the entire surface of the mask frame 10 may be cleaned at the same time.
The lower frame 400 may connect the lower end portion of the left frame 100 and the lower end portion of the right frame 200 to each other, and may be secured to the left frame 100 and the right frame 200.
The lower frame 400 may be implemented as a single frame (made of a single material or having a unitary structure) like the left frame 100 and the right frame 200 (refer to FIG. 1(a)) , or may be formed so as to have the same shape and the same structure as the upper frame 300 (refer to FIG. 1(b)) .
When the lower frame 400 is implemented as a single frame, the lower frame 400 may connect the left frame 100 and the right frame 200 to each other, and may be formed in the shape of a straight line that extends in the left-right direction. The lower frame 400 may have a constant cross- section along the left-right direction, and may be formed in a cylindrical shape, a polyprismatic shape, or the like. The lower frame 400 may be formed in a circular pipe shape, a polygonal pipe shape, or the like. Further, the cross- section of the lower frame 400 may have an L shape, a U shape, an H shape, or the like. This cross-sectional shape of the lower frame 400 may favorably contribute to a reduction in the weight of the frame and an increase in the strength of the frame (refer to FIG. 6) .
The lower frame 400 may be made of the same material as the left frame 100, the right frame 200, and the upper frame 300.
The lower frame 400 may include a lower reference frame 410 and a lower reinforcement frame 420. The lower reinforcement frame 420 may include a lower reinforcement portion 421 and a lower stacked portion 422. Here, the lower frame 400 may have the same structure, shape, material, and size as the upper frame 300 described above.
That is, the lower reference frame 410 may be formed to be the same as the upper reference frame 310, the lower reinforcement frame 420 may be formed to be the same as the upper reinforcement frame 320 described above, the lower reinforcement portion 421 may be formed to be the same as the upper reinforcement portion 321 described above, and the lower stacked portion 422 may be formed to be the same as the upper stacked portion 322.
In the mask frame 10 and the mask assembly 1 according to the present invention, each of the lower reinforcement frame 420 and the lower reinforcement portion 421 may have a constant cross-section along the longitudinal direction X thereof, and may be formed in a circular pipe shape or a polygonal pipe shape (particularly a rectangular pipe shape), thereby effectively preventing distortion. Further, the lower reinforcement portion 421 may include a second hollow portion 423 formed therein along the longitudinal direction thereof.
The lower reference frame 410 may have a generally constant cross-section along the left-right direction, and may include a lower base portion 410a and a lower protrusion portion 410b.
The mask frame 10 according to the present invention may be formed in a horizontally and vertically symmetrical shape. Accordingly, the upper frame 300 and the lower frame 400 may be formed symmetrically to each other. When the lower frame 400 is formed symmetrically to the upper frame 300, the lower frame 400 may have the same operation and effects as the upper frame 300 described above .
In the mask assembly 1 according to the present invention, when the mask sheet 20, 20a, 20b is coupled to the mask frame 10, the mask sheet 20, 20a, 20b needs to be stretched sufficiently tight. The mask sheet 20, 20a, 20b may be coupled to the mask frame 10 through welding or using separate fixing units (fastening units) such as, for example, bolts or rivets.
Accordingly, the mask frame and the mask assembly according to the embodiment of the present invention may include fastening units 500.
The fastening units 500 may pass through the upper reinforcement frame 320 so as to be fastened to the upper reference frame 310. The upper reinforcement frame 320 may be separated from the upper reference frame 310 by releasing the fastening units 500.
The fastening units 500 may be used in order to easily and stably couple the upper reinforcement frame 320 to the mask frame 10 and to separate the upper reinforcement frame 320 from the mask frame 10 when it is desired for cleaning.
The fastening units 500 may be provided on both left and right sides of the upper reinforcement frame 320, or may be provided at regular intervals in the longitudinal direction of the upper reinforcement frame 320.
In the mask assembly 1 according to the embodiment of the present invention, when the mask sheet 20, 20a, 20b is secured to the upper frame 300, the upper end portion of the mask sheet 20, 20a, 20b may be coupled to the upper reference frame 310 of the upper frame 300. Here, the upper end portion of the mask sheet 20, 20a, 20b may also be coupled to the upper reinforcement frame 320 of the upper frame 300.
Alternatively, unlike the above configuration, in the mask assembly 1 according to the present invention, when the mask sheet 20, 20a, 20b is secured to the upper frame 300, the upper end portion of the mask sheet 20, 20a, 20b may not be coupled to the upper reference frame 310, but may be coupled to the upper reinforcement frame 320 of the upper frame 300. Further, the upper end portion of the mask sheet 20, 20a, 20b may be coupled to the upper reinforcement frame 320, and may be spaced apart from the upper reference frame 310.
Furthermore, the upper end portion of the mask sheet 20, 20a, 20b may be coupled to the upper reinforcement frame 320 via the upper stacked portion 322.
Still further, in the mask assembly 1 according to the present invention, the lower end portion of the mask sheet 20, 20a, 20b may be secured to the lower frame 400.
Still further, in the mask assembly 1 according to the present invention, when the mask sheet 20, 20a, 20b is secured to the lower frame 400 and when the lower frame 400 includes the lower reference frame 410 and the lower reinforcement frame 420, the lower end portion of the mask sheet 20, 20a, 20b may be coupled to the lower reference frame 410 of the lower frame 400. Here, the lower end portion of the mask sheet 20, 20a, 20b may also be coupled to the lower reinforcement frame 420 of the lower frame 400.
Alternatively, unlike the above configuration, the lower end portion of the mask sheet 20, 20a, 20b may not be coupled to the lower reference frame 410, but may be coupled to the lower reinforcement frame 420 of the lower frame 400. Further, the lower end portion of the mask sheet 20, 20a, 20b may be coupled to the lower reinforcement frame 420, and may be spaced apart from the lower reference frame 410.
Furthermore, the lower end portion of the mask sheet 20, 20a, 20b may be coupled to the lower reinforcement frame 420 via the lower stacked portion 422.
For example, a plurality of mask sheets 20a may be provided so as to be arranged repeatedly in the left-right direction, and each of the mask sheets 20a may be implemented in the form of a strip that extends long in the up-down direction. In this case, the upper end portions of the mask sheets 20a may be secured to the upper reinforcement frame 320.
When the mask sheets 20a are coupled to the upper reinforcement frame 320, a load FI may act on the points of the upper reinforcement frame 320, to which the mask sheets 20a are coupled, in the downward direction due to the mask sheets 20a. Thus, the load FI may act along the overall length of the upper reinforcement frame 320 in the downward direction. However, since the upper reinforcement portion 321 of the upper reinforcement frame 320 is made of a CFRP material, it is possible to reduce deformation of the mask frame compared to a conventional mask frame.
Further, the upper base portion 310a of the upper reference frame 310 may be located behind the upper reinforcement frame 320, and the upper protrusion portion 310b of the upper reference frame 310 may be located below the upper reinforcement frame 320. As such, since the upper reinforcement frame 320 is interposed between the two parts 310a and 310b of the upper reference frame 310, which are orthogonal to each other, it is possible to secure sufficient flexural rigidity to withstand the load FI acting on the upper reinforcement frame 320, and consequently to prevent deformation of the mask frame 10 and sagging of the mask sheet 20, 20a, 20b.
As described above, in the case in which the mask frame 10 according to the present invention is formed in a horizontally symmetrical shape, the lower end portion of the mask sheet 20, 20a, 20b may be secured to the lower reinforcement frame 420, and a load may act along the overall length of the lower reinforcement frame 420 in the up-down direction. However, since the lower reinforcement portion 410 of the lower reinforcement frame 420 is made of a CFRP material, it is possible to reduce deformation of the mask frame 10 compared to a conventional mask frame. Further, it is possible to prevent deformation of the lower frame 400 as well as the upper frame 300, and to secure the stable structure of the mask frame 10.
As is apparent from the above description, the present invention provides a mask frame and a mask assembly capable of increasing the rigidity of the mask frame while reducing the weight thereof compared to a conventional mask frame and preventing deformation of the mask frame.
The present invention described above is not limited by the aspects described herein and the accompanying drawings. It should be apparent to those skilled in the art that various substitutions, changes and modifications which are not exemplified herein but are still within the spirit and scope of the present invention may be made. Therefore, the scope of the present invention is defined not by the detailed description, but by the claims and their equivalents, and all variations within the scope of the claims and their equivalents are to be construed as being included in the present invention.

Claims

WHAT IS CLAIMED IS:
1. A mask frame configured to fix a mask sheet thereto, the mask frame comprising:
a left frame provided on a left side;
a right frame provided on a right side;
an upper frame connecting an upper end portion of the left frame and an upper end portion of the right frame to each other; and
a lower frame connecting a lower end portion of the left frame and a lower end portion of the right frame to each other,
wherein the upper frame comprises:
an upper reference frame made of a metal material; and
an upper reinforcement frame disposed in a longitudinal direction of the upper reference frame and comprising an upper reinforcement portion made of a CFRP (carbon-fiber-reinforced plastic) material and an upper stacked portion stacked on the upper reinforcement portion and exposed from a front side thereof, the upper stacked portion being made of a metal material .
2. The mask frame of claim 1, wherein the upper stacked portion is configured to surround an entire surface of the upper reinforcement portion such that the upper reinforcement portion is not exposed to the outside.
3. The mask frame of any of claims 1 to 2 , wherein the upper stacked portion is made of invar or stainless steel and is made of a same material as the upper reference frame.
4. The mask frame of any of claims 1 to 3 , wherein the upper reference frame comprises:
an upper base portion located behind the upper reinforcement frame; and
an upper protrusion portion located below the upper reinforcement frame,
wherein a gap between the upper base portion and the upper protrusion portion is shielded, and
wherein the upper reinforcement frame has an upper end height higher than the upper protrusion portion.
5. The mask frame of any one of claims 1 to 4, wherein the upper reinforcement frame is formed in a polygonal bar or polygonal pipe shape with a constant cross-section along a longitudinal direction thereof.
6. The mask frame of any one of claims 1 to 5, wherein the upper reinforcement frame comprises fastening units detachably coupled to the upper reference frame, the fastening units passing through the upper reinforcement frame so as to be fastened to the upper reference frame, and
the fastening units are provided on both left and right sides of the upper reinforcement frame or provided at regular intervals in a longitudinal direction of the upper reinforcement frame.
7. The mask frame of any one of claims 1 to 6, wherein the lower frame comprises:
a lower reference frame made of a metal material; and a lower reinforcement frame disposed in a longitudinal direction of the lower reference frame and comprising a lower reinforcement portion made of a CFRP material and a lower stacked portion stacked on the lower reinforcement portion and exposed to the outside, the lower stacked portion being made of a metal material,
wherein the mask sheet is coupled onto the lower stacked portion, and
wherein the lower frame is horizontally symmetrical to the upper frame.
8. A mask assembly comprising: a plurality of mask sheets arranged in a left-right direction; and
a mask frame configured to fix the mask sheets thereto, and comprising a left frame provided on a left side, a right frame provided on a right side, an upper frame connecting an upper end portion of the left frame and an upper end portion of the right frame to each other, an upper side of each of the mask sheets being coupled to the upper frame, and a lower frame connecting a lower end portion of the left frame and a lower end portion of the right frame to each other, a lower side of each of the mask sheets being coupled to the lower frame,
wherein the upper frame comprises:
an upper reference frame made of a metal material; and
an upper reinforcement frame disposed in a longitudinal direction of the upper reference frame and comprising an upper reinforcement portion made of a CFRP material and an upper stacked portion stacked on the upper reinforcement portion and exposed from a front side thereof, the upper stacked portion being made of a metal material, and
wherein the mask sheets are coupled onto the upper stacked portion.
9. The mask assembly of claim 8, wherein the upper stacked portion is configured to surround an entire surface of the upper reinforcement portion such that the upper reinforcement portion is not exposed to the outside.
10. The mask assembly of any of claims 8 to 9, wherein the upper stacked portion is made of invar or stainless steel and is made of a same material as the upper reference frame.
11. The mask assembly of any of claims 8 to 10, wherein the upper reference frame comprises:
an upper base portion located behind the upper reinforcement frame; and
an upper protrusion portion located below the upper reinforcement frame,
wherein a gap between the upper base portion and the upper protrusion portion is shielded, and
wherein the upper reinforcement frame has an upper end height higher than the upper protrusion portion.
12. The mask frame of any one of claims 8 to 11, wherein the lower frame comprises:
a lower reference frame made of a metal material; and a lower reinforcement frame disposed in a longitudinal direction of the lower reference frame and comprising a lower reinforcement portion made of a CFRP material and a lower stacked portion stacked on the lower reinforcement portion and exposed to the outside, the lower stacked portion being made of a metal material,
wherein the mask sheets are coupled onto the lower stacked portion, and
wherein the lower frame is horizontally symmetrical to the upper frame.
PCT/US2019/042228 2018-07-17 2019-07-17 Mask frame and mask assembly WO2020018682A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2018-0083124 2018-07-17
KR20180083124 2018-07-17

Publications (1)

Publication Number Publication Date
WO2020018682A1 true WO2020018682A1 (en) 2020-01-23

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Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
WO (1) WO2020018682A1 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015042475A (en) * 2013-08-26 2015-03-05 新日鉄住金マテリアルズ株式会社 Hollow member made of reinforcement metal, and reinforcement method with fiber-reinforced plastic at the inside face of metallic hollow member
KR20170026960A (en) * 2015-08-31 2017-03-09 삼성디스플레이 주식회사 Mask assembly, apparatus for manufacturing display apparatus and method of manufacturing display apparatus
KR20170053778A (en) * 2015-11-06 2017-05-17 삼성디스플레이 주식회사 Mask frame assembly for thin layer deposition, manufacturing method of the same and manufacturing method of display device there used
KR20170114025A (en) * 2016-03-31 2017-10-13 삼성디스플레이 주식회사 Mask frame assembly and method for manufacturing display apparatus
KR20180025606A (en) * 2016-09-01 2018-03-09 (주) 유피테크 A metal mask frame

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015042475A (en) * 2013-08-26 2015-03-05 新日鉄住金マテリアルズ株式会社 Hollow member made of reinforcement metal, and reinforcement method with fiber-reinforced plastic at the inside face of metallic hollow member
KR20170026960A (en) * 2015-08-31 2017-03-09 삼성디스플레이 주식회사 Mask assembly, apparatus for manufacturing display apparatus and method of manufacturing display apparatus
KR20170053778A (en) * 2015-11-06 2017-05-17 삼성디스플레이 주식회사 Mask frame assembly for thin layer deposition, manufacturing method of the same and manufacturing method of display device there used
KR20170114025A (en) * 2016-03-31 2017-10-13 삼성디스플레이 주식회사 Mask frame assembly and method for manufacturing display apparatus
KR20180025606A (en) * 2016-09-01 2018-03-09 (주) 유피테크 A metal mask frame

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