WO2020011262A1

WO2020011262A1 - Mechanical scraper apparatus and mechanical scraping film-removing device

Info

Publication number: WO2020011262A1
Application number: PCT/CN2019/095862
Authority: WO
Inventors: 丁阳
Original assignee: 北京铂阳顶荣光伏科技有限公司
Priority date: 2018-07-12
Filing date: 2019-07-12
Publication date: 2020-01-16
Also published as: CN110711730A

Abstract

Provided in the present disclosure are a mechanical scraper apparatus and a mechanical scraping film-removing device. The mechanical scraper apparatus comprises a mounting substrate; and a scraper mechanism and a push-press mechanism respectively arranged on the mounting substrate; the scraper mechanism comprises a tool rest base and a scraper unit; the tool rest base is arranged on the mounting substrate, the scraper unit being rotatably mounted on the tool rest base and having a tool blade in contact with the surface being processed; and the push-press mechanism is used for driving the scraper mechanism, such that the tool blade adheres to the surface being processed; Using the mechanical scraper apparatus and mechanical scraping film-removing device of the present disclosure enables the tool blade of the scraper to implement adaptive shape-conforming movement relative to the surface being processed, ensuring that the tool blade is always in tight contact with the surface being processed, and also reducing the mounting precision of each component, thereby saving mounting time.

Description

Mechanical scraper device and mechanical scraping type film removing equipment

This disclosure claims the priority of a Chinese patent application with a filing date of July 12, 2018, application number 201810763388.9, and a name of "mechanical doctor blade device and mechanical doctor blade removal device". In this disclosure.

Technical field

The present disclosure relates to the field of film removing equipment, and in particular, to a mechanical scraper device and a mechanical scraping type film removing equipment.

Background technique

In the manufacturing process of thin-film solar photovoltaic modules, especially CIGS photovoltaic modules (a photovoltaic module based on the semiconductor Cu (In, Ga) Se2), it is sometimes necessary to use Mo or similar metal electrodes on the substrate to draw current. However, in general, there is a film layer formed by the previous process above the metal electrode. In order to draw current from the metal electrode, it is necessary to remove the film layer on the metal electrode at the corresponding position of the substrate to expose it. Metal electrodes at these locations. Film removal methods generally include mechanical film removal, chemical film removal, and laser film removal. Among them, the chemical film removal method is likely to cause pollution of other film layers, and the laser film removal method currently stays at the research stage, which is expensive. Mechanical film removal method can be divided into grinding machine film removal method and mechanical scraping film removal method, etc. Among them, the mainstream method is mechanical scraping film removal method, which uses the linear movement of the scraper to scrape Mo. Or similar film layer above the metal electrode.

Most of the existing mechanical scraping type film removing equipment adopts a rigid fixed structure, that is, the scraper and the tool holder structure are completely rigid mechanical connections. When the blade in the scraper scrapes off the substrate, the blade of the scraper and the substrate may not completely adhere to each other, so that some of the blades cannot contact the film layer on the substrate, resulting in the residual of the film layer; It may cause damage to the blade or scratch the substrate.

Due to the risks mentioned above, the installation and commissioning of the equipment is required to have very high accuracy, which requires a lot of effort to ensure the absolute level of the support platform of the substrate (and maintain the level during subsequent use), and to ensure that the installation of the scraper is free from errors, etc. The waste of manpower and material resources and the reduction of equipment movement rate.

Summary of the invention

In order to solve the above-mentioned drawbacks in the prior art, the present disclosure provides a mechanical doctor blade device and a mechanical doctor blade-type film removing device including the same.

In a first aspect, the present disclosure provides a mechanical scraper device that includes a scraper mechanism;

The scraper mechanism includes: a knife holder base; a scraper unit rotatably mounted on the knife holder base; and the scraper unit has a cutting edge in contact with a surface to be processed.

In a second aspect, the present disclosure also provides a mechanical scraping type film removing device, which includes any one of the mechanical scraper devices described above;

A support structure for supporting a substrate having a film layer to be removed on its surface;

A moving mechanism is used to drive the mechanical scraper device to move in a direction of a surface of the substrate with respect to the support structure.

Compared with the prior art, the present disclosure has beneficial effects:

According to the mechanical scraper device and the mechanical scraping type film removing device provided by the present disclosure, the scraper unit can rotate relative to the knife holder base under a reaction force applied from the processed surface to the blade, So that the blade edge is in contact with the surface to be processed. Therefore, during the scraping film removal process, the blade edge can adaptively follow the shape of the surface being processed, ensuring that the blade edge is always completely in close contact (fitting) with the surface being processed, so that no residual film will occur. To ensure the quality of the film.

BRIEF DESCRIPTION OF THE DRAWINGS

1 is a schematic perspective view of a mechanical scraper device provided in Embodiment 1 of the present disclosure;

2 is a schematic side view of a mechanical scraper device that is performing a film removing operation according to Embodiment 1 of the present disclosure;

3 is a schematic perspective view of a mechanical scraper device provided in Embodiment 2 of the present disclosure;

4 is a schematic partial plan view of a mechanical scraper device viewed from above the tool post rod along an axial direction of the tool post rod provided in Embodiment 3 of the present disclosure;

5a and 5b are schematic diagrams showing the influence of substrate deformation on the film removal process in a conventional mechanical scraping film removal device, wherein FIG. 5a is a schematic diagram of a film removal state when the substrate is not deformed, and FIG. 5b is Schematic diagram of the film removal state when the substrate is deformed;

5c and 5d are schematic diagrams showing the influence of the blade installation accuracy on the film removal process in a conventional mechanical scraper film removal device, wherein FIG. 5c is a schematic diagram of a film removal state when the blade is installed accurately, and FIG. 5d It is a schematic diagram of the state of film removal when the doctor blade is installed at an angle.

detailed description

In order to enable those skilled in the art to better understand the technical solutions of the present disclosure, the present disclosure is described in further detail below with reference to the accompanying drawings and embodiments.

Generally, the mechanical scraping type film removing equipment mostly adopts a rigid fixed structure, that is, the scraper and the tool holder structure are completely rigid mechanical connections. As shown in FIG. 5a, the scraper blade 13 "is fixed on the blade holder 12", and the blade holder 12 "is driven by a driving mechanism (not shown) rigidly connected thereto, so that the blade blade 13" is pressed against the substrate with a predetermined pushing force. On the substrate surface 50 ", the tool holder 12" and the driving mechanism are moved along the substrate surface 50 "by the movement mechanism, so as to scrape the film layer on the substrate surface 50" by the blade of the scraper 13 ". Ideally, In the case, as shown in Figures 5a and 5c, the blade of the scraper 13 "and the substrate surface 50" should be completely and closely fitted. However, in actual conditions, the substrate itself may deform (as shown in Figure 5b), The support platform of the substrate is tilted, and the blade holder mechanism is not installed vertically enough, which causes the blade edge to be not parallel to the surface of the substrate 50 ", and cannot be closely fitted when scraping; or, it causes installation errors when replacing the blade 13", It also causes the blade to be non-parallel to the substrate (as shown in Figure 5d), and the two cannot be closely adhered during scraping. This leads to the phenomenon of film residue, blade damage or substrate scratching when scraping the film.

In view of this, the embodiments of the present disclosure provide a mechanical scraper device and a mechanical scraping type film removing device, which are used to improve the tightness of the contact between the blade and the surface being processed, so as to avoid the residue of the film layer when the film layer is scraped off. Damage or scratching of the substrate, thereby improving the quality of the film removal.

Example 1

FIG. 1 is a schematic perspective view of a mechanical scraper device provided in Embodiment 1 of the present disclosure. FIG. 2 is a schematic side view of a mechanical scraper device undergoing a film removing operation according to Embodiment 1 of the present disclosure.

As shown in FIGS. 1 and 2, the mechanical scraper device includes a scraper mechanism 10 and a pressing mechanism 20. The scraper mechanism 10 includes a knife holder base 11 and a scraper unit 14. The doctor blade unit 14 has a blade 131 (suitable) that is in contact with the processed surface 50 (see FIG. 2) of the substrate. More specifically, in this embodiment, the doctor blade unit 14 further includes a knife holder 12 and a doctor blade 13. The doctor blade 13 is mounted on the knife holder 12, and the blade 131 is located at an end of the doctor blade 13. The pressing mechanism 20 is used to move the doctor blade mechanism 10 to attach the blade 131 of the doctor blade mechanism 10 (specifically, the blade 131 of the doctor blade 13 in the doctor blade unit 14 in the doctor blade mechanism 10) to the surface 50 to be processed.

It should be noted that the blade holder and the scraper are integrally formed in the present disclosure, and the blade holder and the scraper may also be formed by being fixedly connected. It is not specifically limited here. In addition, the blade may be part of a scraper.

Unlike the prior art, in this embodiment, the scraper unit 14 (specifically, the blade holder 12 in the scraper unit 14) is rotatably mounted on the blade holder base 11. In this way, when the pressing mechanism 20 presses (moves downward) the scraper mechanism 10 to attach the blade 131 to the processed surface 50, the scraper unit 14 (the blade holder 12 and the scraper 13) can move toward the processed surface 50. The reaction force applied by the blade 131 automatically rotates relative to the blade base 11. For example, as shown in FIG. 2, if the blade 131 is not parallel to the processed surface 50 due to the installation error of the scraper, and the left side of the blade 131 is slightly higher, the right part of the blade 131 will first contact and push with a larger force. Press the machined surface 50 (to be precise, into a film layer (not shown) on the substrate), and the left part of the blade 131 does not contact the machined surface 50, or comes into contact with it and pushes it with a small force Processed surface 50. Therefore, the reaction force applied by the machined surface 50 to the right portion of the blade 131 is large, and the reaction force applied to the left portion of the blade 131 is small or zero. Under the action of the reaction force applied to the cutting edge 131, the scraper unit 14 will rotate counterclockwise with respect to the tool holder base 11, so that the cutting edge 131 is in close contact with the surface to be processed 50. In the process of removing the film, if the substrate is deformed, a local reaction force will also be caused, and the scraper unit 14 can be rotated correspondingly. Therefore, the structure of this embodiment enables the blade edge 131 to adaptively follow the shape of the surface 50 to be processed, ensuring that the blade edge 131 is always completely in close contact with the surface 50 to be processed, so that no residual film layer occurs, ensuring removal Membrane quality. Correspondingly, the installation accuracy of each component is also reduced, and the installation time is saved. When the scraper blade 13 is detachably mounted on the blade holder 12, the scraper blade 13 can be used immediately.

Next, the details of this embodiment are described in further detail.

As shown in FIGS. 1 and 2, the mechanical scraper device of this embodiment may further include a mounting substrate 40 and a guide rail 30. Among them, the mounting substrate 40 serves as a mounting basis for the mechanical scraper device; the guide rail 30 is mounted on the mounting substrate 40 or is integrally formed on the mounting substrate 40, and the guide rail 30 moves the moving direction of the scraper mechanism 10 along the pushing mechanism 20 (in this embodiment, Vertical direction). The tool post base 11 has a chute structure that cooperates (slid-fits) with the guide rail 30 so that it can slide relative to the guide rail 30 as a slider. By setting the guide rail, the movement of the tool post base 11 is made more stable and accurate. It can be understood that the number of the guide rails 30 may be one as shown in FIG. 1, or two or more, so as to further enhance stability.

In some alternative embodiments, the tool post base 11 may include a tool post base body 112 and a tool post connection base 111. The knife holder connection base 11 is fixed on the knife holder base body 112. A bearing (not shown) is provided inside the tool post connection base 111. Corresponding to the blade holder connecting base 111, the blade holder 12 includes a blade holder rod 121. The tool post rod 121 is a cylindrical rod (the tool post rod may also have other shapes), which penetrates into the tool post connection base 111 and rotates to cooperate with a bearing in the tool post connection base 111. In other words, the squeegee unit 14 is rotatably mounted on a bearing in the turret connection base 111 of the turret base 11 of the squeegee mechanism 10 through the turret rod 121 on the turret 12 of the squeegee mechanism 10. Therefore, the vertical axis (central axis) of the tool post lever 121 is the rotation axis of the tool post 12 (that is, the rotation axis of the scraper unit 14, the tool post lever 121, and the scraper 13). The longitudinal axis of the blade holder lever 121 may be inclined with respect to the direction (vertical downward direction) in which the pressing mechanism 20 pushes the scraper mechanism 10. The tilt angle may be in a range of 20 ° to 80 °, and preferably in a range of 45 ° to 70 °. In this embodiment, the tilt angle is 60 °. In addition, a structure for restricting the axial movement of the tool post rod 121 may be provided in the tool post rod 121 and / or the tool post connecting base 111 to prevent the tool post lever 121 from falling out of the tool post connecting base 111.

It should be noted that the installation manner of the scraper blade 13 on the blade holder 12 in the present disclosure is not particularly limited. For example, the scraper blade 13 may be mounted on the bottom of the blade holder 12 by screws (not shown). The material of the scraper 13 may be a tool alloy steel, and the material requirement is that the hardness is greater than the hardness of the film to be scraped, but smaller than the hardness of the metal (such as metal Mo) to be retained.

In some alternative embodiments, the tool holder base body 112 may be T-shaped, and the chute structure slidingly fitted with the guide rail 20 is formed on the narrow end side of the T-shape (left side in FIG. 2). Both the frame connecting base 111 and the scraper unit 14 are provided on the wide end side (the right side in FIG. 2) of the blade base base body 112.

It should be emphasized that the shape of the main body of the tool holder base may also be other shapes. For example, the main body of the tool holder base is a plate-like structure, and the plate-like structure has a sliding groove to facilitate sliding connection with the guide rail.

In some optional embodiments, the mechanical scraper device may further include a biasing mechanism for applying a bias toward the reference position to the scraper unit when the scraper unit deviates from the reference position due to rotation relative to the blade base. pressure. In this embodiment, as shown in FIG. 2, the biasing mechanism includes two springs (or elastic top wires) 31 provided between the blade holder base body 112 and the scraper unit 14. Two springs 31 are optionally disposed between the tool post base body 112 and the tool post 12, are parallel to each other, and are arranged in a direction perpendicular to the axial direction of the tool post lever 121. The purpose of the biasing mechanism is to prevent the inclination angle of the scraper blade 13 from being out of control, and to reduce undesired vibrations. Specifically, when the blade 131 is not in contact with the surface to be processed 50, the scraper unit 14 is at a reference position relative to the tool holder base 11, and at this time, neither of the two springs 31 exerts a force on the scraper unit 14 (tool holder 12). Or the moments applied to the scraper unit 14 cancel each other, so this position is also referred to as a balanced position. When the scraper unit 14 receives an external force (such as a reaction force from the surface 50 to be processed) and rotates relative to the tool holder base 11 and deviates from the reference position, both springs 31 apply the scraper unit 14 toward the reference position (ie, The biasing force that returns the scraper unit 14 to the reference position). For example, suppose that when the scraper unit 14 is in a balanced position, neither of the two springs 31 exerts a force on the scraper unit 14; when the scraper unit 14 rotates clockwise, the spring 31 arranged above in FIG. 2 will exert a pulling force on the scraper unit 14. The spring 31 arranged below will apply a pushing force to the scraper unit 14. The greater the rotation angle of the scraper unit 14, the greater the force applied by the spring 31. Therefore, the spring 31 functions as a buffer and shock absorber, and the tilt angle of the scraper 13 is not out of control. Those skilled in the art can understand that the number of the springs (or elastic top wires) 30 is not limited to two, and the arrangement manner is not limited to be arranged in a direction perpendicular to the axial direction of the tool post rod 121. For example, the two springs 31 may be arranged in an angle (for example, an angle less than 90 ° and greater than 60 °) with the axial direction of the tool post rod 121; or, four elastic top wires (or springs) may be provided, respectively It is arranged between the four corners of the blade holder 12 and the blade holder base body 112. Alternatively, three elastic top wires (or springs) may also be provided and arranged on the blade holder 12 in an isosceles triangle or an equilateral triangle. And the tool holder base body 112; or, the biasing mechanism may be composed of a combination of a plurality of springs and a plurality of elastic top wires.

Specifically, as shown in FIG. 1, the pressing mechanism 20 may include a pressing source 21 and a pressing rod 22. As shown in FIG. 2, the pressing source 21 is fixed on the mounting substrate 40. The push rod 22 is connected to the knife holder base 11 and can move in the up and down direction under the driving of the pressing source 21, thereby pushing the scraper mechanism 10 downward and lifting the scraper mechanism 10 upward. Specifically, in this embodiment, the bottom of the push rod 22 is connected to the top of the tool holder base body 112, and the tool holder base 11 moves correspondingly along the guide rail 30 under the push and pull action of the push rod 22.

The pressing source 21 may be a cylinder, a hydraulic cylinder, a motor (for example, a servo motor), or the like. Considering the economics of the device, it is preferable to use a cylinder. The intake air volume of the cylinder can be controlled by a proportional valve or the like, thereby achieving stable control of the pressure. When the pressing source 21 is a cylinder, the push rod 22 may be a piston rod driven by a piston in the cylinder accordingly. In addition, when the pressing source 21 is a motor, the push rod 22 may be a screw rod or a screw rod, and the push rod 22 may be screwed into a threaded hole at the top of the tool holder base body 112, and the push rod 22 is driven by the motor 21 Rotate to make the tool holder base body 112 move along the guide rail 30 accordingly.

Based on the same inventive idea, this embodiment also provides a mechanical scraping type film removing device that implements a film removing process. The device includes the mechanical scraper device described above; further includes: a support portion and a moving mechanism; wherein, the support portion It is used to support a substrate having a film layer to be removed on its surface, such as the substrate (generally a glass substrate) having a metal electrode and a film layer to be removed covered on the metal electrode described above. The supporting portion may be a supporting platform, a high-precision workbench, and the like, for supporting the substrate. The supporting portion usually supports the substrate in parallel with the horizontal plane, but may also support the substrate in other directions according to design requirements. The moving mechanism is used to drive the mechanical squeegee device to move in the direction of the substrate surface relative to the support portion (horizontal movement when the substrate surface is horizontal). Generally, the moving mechanism moves the mechanical scraper device while the support portion remains stationary, but it can also be reversed. The moving mechanism only moves the support portion without moving the mechanical scraper device. The moving mechanism may be, for example, a servo motor. The support portion may be provided with a chute. Correspondingly, the support portion may serve as a slider that slides along the chute, and is driven by the servo motor to move along the chute at a predetermined scraping speed.

In the following, an exemplary film removing process performed by using the mechanical scraping type film removing apparatus in Example 1 will be briefly described.

First, a substrate covered with a film to be scraped is fixed on a support platform. Then, after the doctor blade is aligned with the starting position of the film removal of the substrate, the mechanical doctor device is turned on. Second, the control software issues a command to send compressed air into the cylinder through a proportional valve. The piston in the cylinder descends, pushing the piston rod, and the piston rod pushes the scraper mechanism at the lower part of the cylinder to move down the guide rail, pressing the scraper to completely contact the lower substrate. Because the scraper can rotate with the blade holder, the blade of the scraper can automatically adapt to the deformation of the substrate during the pressing process, so that the blade and the processed surface of the substrate are kept completely in close contact at all times. After the moving mechanism drives the mounting substrate to move horizontally for a predetermined length, the air cylinder deflates and retracts, the scraper lifts up and leaves the surface of the substrate, and the process ends.

Example 2

FIG. 3 is a schematic perspective view of a mechanical scraper device provided in Embodiment 2 of the present disclosure. In this embodiment, the same components as those in Embodiment 1 are assigned the same reference numerals.

The mechanical scraper device of this embodiment is different from the mechanical scraper device of Embodiment 1 in that in this embodiment, the knife holder connection base 111 'includes a knife holder connection base rod 121'; the knife holder connection base rod 121 '; It is a cylindrical rod and is fixedly connected to the knife holder connection base 111 '. Accordingly, a bearing is provided inside the tool holder 12 ', and the tool holder connection seat bar 121' can be rotatably fitted with the bearing. In other words, in the present embodiment, the scraper unit 14 'is rotatably mounted on the knife holder connection seat rod 121' of the knife holder connection seat 111 'of the knife holder base 11' through a bearing inside the knife holder 12 '. Therefore, the vertical axis (central axis) of the blade holder connection base 111 'is the rotation axis of the blade holder 12' (that is, the rotation axis of the blade unit 14 'and the blade 13). Similar to Embodiment 1, as shown in FIG. 3, the longitudinal axis of the knife holder connection seat bar 121 'can also be inclined at an angle with respect to the direction (vertical downward direction) in which the pushing mechanism 20 pushes the scraper mechanism 10'. In addition, a structure that restricts the axial movement of the tool post connection seat bar 121 'may be provided in the tool post 12' to prevent the tool post 12 'from being separated from the tool post connection seat 121'. In addition, in this embodiment, the connection manner of the biasing mechanism and the scraper unit 14 'may be the same as that of the first embodiment.

Example 3

FIG. 4 is a schematic partial plan view of a mechanical scraper device according to Embodiment 3 of the present disclosure. In this embodiment, the same components as those in Embodiment 1 are assigned the same reference numerals.

The mechanical scraper device of this embodiment is different from the mechanical scraper device in Embodiment 1 in that the mechanical scraper device does not use a spring or an elastic top wire as a biasing mechanism, but uses a blade holder 121 connected to the blade holder. The coil spring 32 between the seats 111 serves as a biasing mechanism. The coil spring 32 may be disposed on a surface of the blade holder connecting base 111 away from the scraper 13. As shown in FIG. 4, the inner end 32 b of the coil spring 32 is connected to the side surface of the blade holder lever 121, and the outer end 23 a of the coil spring 32 is connected to the surface of the blade holder connection base 111. The connection manner of the coil spring 32 with the tool holder lever 121 and the tool holder connection base 111 is not specifically limited. In this embodiment, the inner end 32b of the coil spring 32 is directly adhered to the side of the blade holder lever 121, and the outer end 23a of the coil spring 32 is provided in a hook form on a pin on the surface of the blade holder connection base 111. When the tool post lever 121 rotates clockwise or counterclockwise from the reference position when the blade does not contact the surface to be machined, the coil spring 32 is deformed, and an offset is applied to the tool post lever 121 to return the tool post lever 121 toward the reference position. pressure.

Those skilled in the art can understand that the coil spring 32 in this embodiment may also be provided on the surface of the side of the knife holder connection base 111 close to the scraper 13 or near a bearing in the knife holder connection base 111, or in multiple places. Multiple coil springs are provided at each position, or used in combination with the spring or elastic top wire in the first embodiment. In addition, those skilled in the art can also understand that the biasing mechanism in this embodiment can be similarly applied in Embodiment 2. In this case, the mechanical scraper device of Embodiment 2 does not use a spring or an elastic top wire as a biasing mechanism, but uses a coil spring 32 connected between the blade holder connection seat rod 121 'and the blade holder 12' as a biasing device.压机构。 Pressure mechanism. The connection method of the coil spring 32 between the tool post connecting seat rod 121 'and the tool post 12' may be similar to the connection method of the coil spring 32 between the tool post lever 121 and the tool post connecting seat 111.

Based on the same inventive idea, the present disclosure also provides a mechanical scraper device, the mechanical scraper device includes a scraper mechanism, the scraper mechanism includes a knife holder base, a scraper unit rotatably mounted on the knife holder base, and a scraper unit It has a cutting edge in contact with the surface to be processed.

Specifically, the structures of the scraper unit and the blade holder base are the same as those of the scraper mechanism provided in Embodiment 1, Embodiment 2, and Embodiment 3. For example, referring to FIG. 1, the scraper unit 14 includes: a blade holder 12, a scraper blade 13, and a blade 131 at an end of the blade 13; the blade holder base 11 may include a blade holder base body 112 and a blade holder connection base 111; The tool post 12 includes a tool post 121. The connection relationship between the above components and the installation position of each component are the same as those of the first embodiment. Alternatively, as another example, referring to FIG. 3, the scraper unit 14 ′ includes: a blade holder 12 ′, a scraper 13, and a blade 131 at an end of the blade 13; the blade holder base 11 ′ may include a blade holder base body 112 and a blade holder. The connection base 111 '; the tool holder connection base 111' includes a tool holder connection base rod 121 '; the tool holder connection base rod 121' is a cylindrical rod and is fixedly connected to the tool holder connection base 111 '. Accordingly, a bearing is provided inside the tool holder 12 ', and the tool holder connection seat bar 121' can be rotatably fitted with the bearing. Each component in the scraper mechanism is the same as that described in the second embodiment. The same points are not repeated. The manner in which the blade holder in the scraper unit is rotatably mounted on the blade holder base is the same as that of Embodiment 1, Embodiment 2, and Embodiment 3.

Therefore, in the scraper mechanism provided in the present disclosure, the scraper unit can be rotated relative to the base of the blade holder, so that when a pressure is applied to the scraper unit by an external force, so that the blade of the scraper unit fits on the surface to be processed, The blade can move adaptively with respect to the surface being processed, ensuring that the blade is always completely in close contact (fitting) with the surface being processed, so that no film residues occur and the quality of the film is removed. The structures of the scraper unit and the scraper mechanism are the same as those in Embodiment 1, Embodiment 2, and Embodiment 3, and the same points are not described repeatedly.

It can be understood that the above embodiments are merely exemplary implementations adopted to explain the principles of the present disclosure, but the present disclosure is not limited thereto. For those of ordinary skill in the art, various variations and improvements can be made without departing from the spirit and essence of the present disclosure, and these variations and improvements are also considered to be within the protection scope of the present disclosure. For example, those skilled in the art can easily understand that the mechanical scraping type film removing device of the present disclosure can be used for the surface film removing process of other electronic products, mechanical materials, etc. . In the embodiment of the present disclosure, the main body of the knife holder base may be integrated with the knife holder connection base and / or the knife holder may be integrated with the scraper blade. For example, the scraper blade may be an integrated scraper blade with a rotatable rod that cooperates with a bearing, and accordingly It is not necessary to provide a separate blade holder, and the biasing member directly acts on the integrated scraper; the chute structure of the blade holder base may be a separate structure installed on the blade holder base body. The mounting substrate may be replaced by other mounting structures; the mounting substrate may not be provided with a guide rail; the mounting substrate may be two mounting substrates respectively disposed on both sides of the blade holder. In addition, the rotary connection between the scraper unit and the knife holder base is not limited to the connection achieved by the rotatable rod and the bearing. It can also be the friction fit between the rotatable rod and the complementary circular hole, the screw and Rotary connection with screw holes or gears.

Claims

A mechanical scraper device includes a scraper mechanism, wherein the scraper mechanism includes:

Knife base

A scraper unit is rotatably mounted on the base of the knife holder, and the scraper unit has a cutting edge in contact with a surface to be processed.
The mechanical scraper device according to claim 1, wherein the mechanical scraper device further comprises: a pressing mechanism connected to the knife holder base, the pressing mechanism is used to drive the knife holder base To drive the blade of the scraper unit to fit on the surface to be processed.
The mechanical scraper device according to claim 1 or 2, wherein:

When the blade is not in contact with the surface to be processed, the scraper unit is at a reference position with respect to the tool holder base;

The mechanical scraper device further includes a biasing mechanism for applying a bias toward the reference to the scraper unit when the scraper unit rotates relative to the knife holder base and deviates from the reference position. Position bias.
The mechanical scraper device according to claim 1, wherein the scraper unit comprises:

A knife holder rotatably mounted on the knife holder base;

A scraper is fixedly connected to the blade holder, and the blade is located at an end of the scraper.
The mechanical scraper device according to claim 4, wherein:

The tool holder base includes a tool holder connection base, and a bearing is provided inside the tool holder connection base;

The tool post has a tool post lever, and the tool post lever is rotatably connected to the tool post connecting seat through the bearing.
The mechanical scraper device according to claim 5, wherein:

The mechanical scraper device further includes a coil spring connected between the blade holder rod and the blade holder connecting seat.
The mechanical scraper device according to claim 4, wherein:

The knife holder base includes a knife holder connection seat, and the knife holder connection seat has a knife holder connection seat rod;

A bearing is provided inside the tool holder, and the tool holder connection seat rod is rotatably connected to the tool holder through the bearing.
The mechanical scraper device according to claim 7, wherein:

The mechanical scraper device further includes a coil spring connected between the knife holder connection seat post and the knife holder.
The mechanical scraper device according to claim 5 or 7, wherein:

The knife holder base further includes a knife holder base body, and the knife holder connection seat and the knife holder are disposed on one side of the knife holder base body;

The mechanical scraper device further includes: a spring or an elastic top wire provided between the blade holder base body and the blade holder.
The mechanical scraper device according to any one of claims 2 to 8, wherein:

The mechanical scraper device further includes a mounting substrate; the mounting substrate has a guide rail extending in a moving direction in which the pressing mechanism moves the scraper mechanism;

The knife holder base has a chute structure that slidingly cooperates with the guide rail.
The mechanical scraper device according to claim 10, wherein the pushing mechanism comprises:

The pressing source is fixed on the mounting substrate;

A push rod is connected to the knife holder base and is capable of moving in the moving direction under the driving of the pressing source.
The mechanical scraper device according to claim 10, wherein:

The knife holder base includes a knife holder base body, the scraper unit is disposed on one side of the knife holder base body, and the chute structure is formed on the other side of the knife holder base body.
A mechanical scraping type film removing device, characterized in that the mechanical scraping type film removing device comprises: a mechanical scraper device according to any one of claims 1 to 12;

A support portion for supporting a substrate having a film layer to be removed on its surface;

A moving mechanism is used to drive the mechanical scraper device to move in a direction of the surface of the substrate with respect to the support portion.