CN110561255A - Grain polishing device - Google Patents

Grain polishing device Download PDF

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Publication number
CN110561255A
CN110561255A CN201910848529.1A CN201910848529A CN110561255A CN 110561255 A CN110561255 A CN 110561255A CN 201910848529 A CN201910848529 A CN 201910848529A CN 110561255 A CN110561255 A CN 110561255A
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CN
China
Prior art keywords
adjusting
polishing
shaped
strip
lifting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201910848529.1A
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Chinese (zh)
Other versions
CN110561255B (en
Inventor
孙永武
嵇群群
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anhui Jiangqiao Technology Service Co.,Ltd.
Original Assignee
Wuhu Derui Electronic Technology Co Ltd
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Publication date
Application filed by Wuhu Derui Electronic Technology Co Ltd filed Critical Wuhu Derui Electronic Technology Co Ltd
Priority to CN201910848529.1A priority Critical patent/CN110561255B/en
Publication of CN110561255A publication Critical patent/CN110561255A/en
Application granted granted Critical
Publication of CN110561255B publication Critical patent/CN110561255B/en
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • B24B29/02Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/02Frames; Beds; Carriages
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/06Work supports, e.g. adjustable steadies
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00Drives or gearings; Equipment therefor
    • B24B47/22Equipment for exact control of the position of the grinding tool or work at the start of the grinding operation

Abstract

The invention discloses a crystal grain polishing device, which relates to a polishing table, and comprises a base, a polishing table and a clamping assembly, wherein the clamping assembly is used for fixing crystal grains and comprises a clamping part and a supporting rod fixedly connected with the clamping part; the lifting component can adjust the height of the clamping device. The problem of artifical handheld probably appear the error when cuing open the light, the staff need confirm the light degree of cuing open repeatedly and lead to the waste of time is solved.

Description

Grain polishing device
Technical Field
the invention relates to a polishing table, in particular to a grain polishing device.
Background
In order to ensure the quality of semiconductor devices, it is common to inspect the wafer after some semiconductor manufacturing processes, and when inspecting the wafer, the wafer is usually cut into tiny grains (about 4-6 mm square), and then polished on a simple polishing machine of the prior art as shown in fig. 1 to form the required inspection surfaces (including planes, sections and inclined surfaces). The simple polishing machine table in the prior art is provided with a base and a polishing table arranged on the base and used for polishing crystal grains, and when the crystal grains are polished on the polishing table, an operator needs to hold the crystal grains for polishing and manually apply pressure to control polishing.
Such a polishing apparatus has disadvantages that it is manually held, an error may occur in polishing, the polishing time is difficult to control, and a worker needs to repeatedly confirm the polishing degree to prevent excessive polishing, which wastes time.
Disclosure of Invention
The object of running to put is to provide a grain polishing device to solve the above-mentioned manual work handheld probably error appearing when dissecting out that provides in the background art, the staff need confirm the problem that leads to the waste of time repeatedly dissecting the light degree.
a grain polishing device comprises a base, a polishing table and a polishing head
The clamping assembly is used for fixing the crystal grains and comprises a clamping part and a supporting rod fixedly connected with the clamping part;
a lifting assembly capable of adjusting the height of the clamping device, the lifting assembly comprising
The lifting rack is arranged above the polishing table, the height of the lifting rack is adjustable, a strip-shaped through hole is formed in the middle of the lifting table right above the polishing table, and the supporting rod is rotatably arranged in the strip-shaped through hole;
The base is fixed on the side edge of the polishing table;
The lower end of the adjusting screw is fixedly connected with the base, and the upper end of the adjusting screw penetrates through the lifting platform and is in threaded connection with an adjusting nut at the end of the adjusting screw;
And the adjusting spring is sleeved on the adjusting screw rod and elastically supports the lifting platform.
As an embodiment of the invention, the supporting rod is rotatably connected with the inside of the strip-shaped through hole through a hinge rod.
As an embodiment of the invention, the device further comprises an angle adjusting component, the angle adjusting component adjusts the rotation angle of the supporting rod, and the adjusting component comprises
the adjusting plate is horizontally arranged above the lifting platform, a strip-shaped chute is arranged in the middle of the adjusting plate, limiting plates are arranged at two end parts of the lower surface of the adjusting plate in a downward protruding mode, and the limiting plates can be slidably inserted into the lifting platform;
the T-shaped sliding block is arranged in the strip-shaped sliding groove in a sliding mode, and the lower end of the T-shaped sliding block is rotatably connected with the upper end of the supporting rod;
The screw rod penetrates through the middle of the adjusting plate and is connected with the T-shaped sliding block in a matched mode.
According to one embodiment of the invention, a plurality of limiting rods are arranged at two end parts of the lower surface of the adjusting plate in a downward protruding mode, and the limiting rods are slidably inserted into the lifting table.
As an embodiment of the invention, the lower end of the T-shaped sliding block is rotatably connected with the upper end of the supporting rod through a bolt.
as an embodiment of the invention, the extending end of the screw rod is provided with a turntable.
The invention has the beneficial effects that: the crystal grain to be polished is installed on the clamping part, the height of the crystal grain is adjusted by adjusting the height of the lifting component, the specific adjusting method is that the adjusting nut is rotated and is in threaded connection with the adjusting screw rod, when the adjusting nut moves downwards, the lifting platform is driven to synchronously move downwards and is adjusted by the adjusting nut, the displacement change of the lifting platform is slow, the size of the crystal grain is very small, the precision of the crystal grain can be better controlled by the fine adjustment mode, the adjusting spring has a supporting effect on the lifting platform, under the action of the adjusting spring, the lifting platform applies an upward force to the adjusting nut, the self-locking of the adjusting nut is guaranteed, and the free rotation of the adjusting nut is prevented. And after the crystal grains are pressed on the polishing table, starting the polishing table to polish the crystal grains, and if the crystal grains are not satisfactory in the adjusting process, continuing to rotate the adjusting nut to further polish the crystal grains. And through the rotation of bracing piece, can also adjust the polishing angle of crystalline grain to can operate in the polishing process again, need not take off the crystalline grain and adjust the angle and cut open the light again, this kind of mode saves time, and practiced thrift the human cost.
The T-shaped sliding block is hinged to the supporting rod, and the supporting rod is rotatably connected with the strip-shaped through hole, so that the T-shaped sliding block moves to drive the supporting rod to rotate around the rotating connection of the supporting rod and the strip-shaped through hole, the polishing angle of the crystal grains is changed, and the height of the crystal grains is adjusted by rotating the adjusting nut at the moment. A plurality of T-shaped sliding blocks can be arranged in the strip-shaped sliding groove at the same time, angle adjustment is carried out on a plurality of clamping parts, a plurality of crystal grains can be polished at the same time, and the working efficiency is improved.
Drawings
FIG. 1 is a front cross-sectional view of a die polishing apparatus according to an embodiment of the present invention;
FIG. 2 is a left side view of a support pole according to an embodiment of the present invention;
fig. 3 is a bottom view of an adjustment plate according to an embodiment of the invention.
Detailed Description
In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described with the specific embodiments.
as shown in FIGS. 1 to 3, a grain polishing apparatus includes a base 2 and a polishing table 1, and further includes
The clamping assembly is used for fixing the crystal grain and comprises a clamping part 43 and a supporting rod 41 fixedly connected with the clamping part 43; the lifting assembly can adjust the height of the clamping device and comprises a lifting table 11, the lifting table 11 is erected above the polishing table 1, the height of the lifting assembly is adjustable, a strip-shaped through hole is formed in the middle of the lifting table 11 located right above the polishing table 1, and the supporting rod 41 is rotatably arranged in the strip-shaped through hole; the base 10, the base 10 is fixed on the side of the polishing table 1; the lower end of the adjusting screw rod 31 is fixedly connected with the base 10, and the upper end of the adjusting screw rod 31 penetrates through the lifting platform 11 and is in threaded connection with an adjusting nut 32 at the end part of the adjusting screw rod 31; and the adjusting spring 33, the adjusting screw 31 is sleeved with the adjusting spring 33, and the lifting platform 11 is elastically supported by the adjusting spring 33.
The crystal grain to be polished is installed on the clamping part 431, the height of the crystal grain is adjusted by adjusting the height of the lifting component, the specific adjustment method is that the adjusting nut 32 is rotated, the adjusting nut 32 is in threaded connection with the adjusting screw 31, when the adjusting nut 32 moves downwards, the lifting platform 11 is driven to synchronously move downwards, the adjusting nut 32 is used for adjusting, the displacement change of the lifting platform 11 is slow, the size of the crystal grain is very small, the precision of the crystal grain can be better controlled by the fine adjustment mode, the adjusting spring 33 has a supporting effect on the lifting platform 11, under the action of the adjusting spring 33, the lifting platform 11 exerts an upward force on the adjusting nut 32, the self-locking of the adjusting nut 32 is ensured, and the adjusting nut 32 is prevented from freely rotating. After pressing the crystal grains on the polishing table 1, starting the polishing table 1 to polish the crystal grains, and if the crystal grains are not satisfactory in the adjusting process, continuing to rotate the adjusting nut 32 to further polish the crystal grains. And through the rotation of bracing piece 41, can also adjust the polishing angle of crystalline grain to can operate in the polishing process again, need not take off the crystalline grain again and adjust the angle and cut open the light again, this kind of mode saves time, and has practiced thrift the human cost.
The lifting platform is characterized by further comprising an angle adjusting assembly, the adjusting assembly adjusts the rotating angle of the supporting rod 41 and comprises an adjusting plate 7, the adjusting plate 7 is horizontally arranged above the lifting platform 11, a strip-shaped sliding groove is formed in the middle of the adjusting plate 7, limiting plates 9 are arranged at two end portions of the lower surface of the adjusting plate 7 in a downward protruding mode, and the limiting plates 9 can be slidably inserted into the lifting platform 11; the T-shaped sliding block 5 is arranged in the strip-shaped sliding groove in a sliding mode, and the lower end of the T-shaped sliding block 5 is rotatably connected with the upper end of the supporting rod 41; and the screw rod 6 is arranged in the middle of the adjusting plate 7 in a penetrating way and is matched and connected with the T-shaped sliding block 5. The lower end of the T-shaped sliding block 5 is rotatably connected with the upper end of the supporting rod 41 through a bolt. The extending end of the screw rod 6 is provided with a turntable 61. The support rod 41 is rotatably connected with the inside of the strip-shaped through hole through a hinge rod 111. The screw rod 6 is rotated, the T-shaped sliding block 5 moves in the strip-shaped sliding groove along with the rotation of the screw rod 6, and the T-shaped sliding block 5 is hinged with the supporting rod 41, and the supporting rod 41 is rotatably connected with the strip-shaped through hole, so that the movement of the T-shaped sliding block 5 drives the supporting rod 41 to rotate around the rotating connection position of the supporting rod and the strip-shaped through hole, the polishing angle of the crystal grains is changed, and the height of the crystal grains is adjusted by rotating the adjusting nut 32. A plurality of T-shaped sliding blocks 5 can be arranged in the strip-shaped sliding groove at the same time, angle adjustment is carried out on a plurality of clamping parts 43, a plurality of crystal grains can be polished at the same time, and working efficiency is improved.
as another embodiment of the present invention
Two end parts of the lower surface of the adjusting plate 7 are provided with a plurality of limiting rods in a downward protruding mode, and the limiting rods can be slidably inserted into the lifting table 11. The limiting rod can be slidably inserted into the lifting table 11, so that the angle of the adjusting plate 7 is fixed, and the adjusting plate 7 is always in a horizontal state.
The specific working principle and steps are as follows: the crystal grain to be polished is installed on the clamping part 431, the height of the crystal grain is adjusted by adjusting the height of the lifting component, the specific adjustment method is that the adjusting nut 32 is rotated, the adjusting nut 32 is in threaded connection with the adjusting screw 31, when the adjusting nut 32 moves downwards, the lifting platform 11 is driven to synchronously move downwards, the adjusting nut 32 is used for adjusting, the displacement change of the lifting platform 11 is slow, the size of the crystal grain is very small, the precision of the crystal grain can be better controlled by the fine adjustment mode, the adjusting spring 33 has a supporting effect on the lifting platform 11, under the action of the adjusting spring 33, the lifting platform 11 exerts an upward force on the adjusting nut 32, the self-locking of the adjusting nut 32 is ensured, and the adjusting nut 32 is prevented from freely rotating. After pressing the crystal grains on the polishing table 1, starting the polishing table 1 to polish the crystal grains, and if the crystal grains are not satisfactory in the adjusting process, continuing to rotate the adjusting nut 32 to further polish the crystal grains. And through the rotation of bracing piece 41, can also adjust the polishing angle of crystalline grain to can operate in the polishing process again, need not take off the crystalline grain again and adjust the angle and cut open the light again, this kind of mode saves time, and has practiced thrift the human cost. The screw rod 6 is rotated, the T-shaped sliding block 5 moves in the strip-shaped sliding groove along with the rotation of the screw rod 6, and the T-shaped sliding block 5 is hinged with the supporting rod 41, and the supporting rod 41 is rotatably connected with the strip-shaped through hole, so that the movement of the T-shaped sliding block 5 drives the supporting rod 41 to rotate around the rotating connection position of the supporting rod and the strip-shaped through hole, the polishing angle of the crystal grains is changed, and the height of the crystal grains is adjusted by rotating the adjusting nut 32. A plurality of T-shaped sliding blocks 5 can be arranged in the strip-shaped sliding groove at the same time, angle adjustment is carried out on a plurality of clamping parts 43, a plurality of crystal grains can be polished at the same time, and working efficiency is improved.
While there have been shown and described what are at present considered the fundamental principles and essential features of the invention and its advantages, it will be apparent to those skilled in the art that the invention is not limited to the details of the foregoing exemplary embodiments, but is capable of other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims (6)

1. a grain polishing device comprises a base and a polishing table, and is characterized by also comprising
The clamping assembly is used for fixing the crystal grains and comprises a clamping part and a supporting rod fixedly connected with the clamping part;
A lifting assembly capable of adjusting the height of the clamping device, the lifting assembly comprising
The lifting rack is arranged above the polishing table, the height of the lifting rack is adjustable, a strip-shaped through hole is formed in the middle of the lifting table right above the polishing table, and the supporting rod is rotatably arranged in the strip-shaped through hole;
The base is fixed on the side edge of the polishing table;
The lower end of the adjusting screw is fixedly connected with the base, and the upper end of the adjusting screw penetrates through the lifting platform and is in threaded connection with an adjusting nut at the end of the adjusting screw;
And the adjusting spring is sleeved on the adjusting screw rod and elastically supports the lifting platform.
2. A grain polishing apparatus as set forth in claim 1, wherein the support rod is rotatably connected to the inside of the strip-shaped through hole by a hinge rod.
3. the grain polishing apparatus as set forth in claim 1, further comprising an angle adjusting member for adjusting a rotation angle of the supporting rod, the adjusting member comprising
The adjusting plate is horizontally arranged above the lifting platform, a strip-shaped chute is arranged in the middle of the adjusting plate, limiting plates are arranged at two end parts of the lower surface of the adjusting plate in a downward protruding mode, and the limiting plates can be slidably inserted into the lifting platform;
The T-shaped sliding block is arranged in the strip-shaped sliding groove in a sliding mode, and the lower end of the T-shaped sliding block is rotatably connected with the upper end of the supporting rod;
the screw rod penetrates through the middle of the adjusting plate and is connected with the T-shaped sliding block in a matched mode.
4. A grain polishing apparatus as set forth in claim 3, wherein a plurality of stopper rods are provided to protrude downward from both end portions of a lower surface of said adjusting plate, and said stopper rods are slidably inserted into said elevating table.
5. A grain polishing apparatus as set forth in claim 4, wherein the lower end of the T-shaped slider is rotatably connected to the upper end of the support rod by a bolt.
6. a grain polishing device according to claim 5, wherein the projecting end of the screw is provided with a turntable.
CN201910848529.1A 2019-09-09 2019-09-09 Grain polishing device Active CN110561255B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910848529.1A CN110561255B (en) 2019-09-09 2019-09-09 Grain polishing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910848529.1A CN110561255B (en) 2019-09-09 2019-09-09 Grain polishing device

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CN110561255A true CN110561255A (en) 2019-12-13
CN110561255B CN110561255B (en) 2020-12-04

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4287686A (en) * 1979-03-27 1981-09-08 Werkzeugmaschinenfabrik Oerlikon-Buhrle Ag Clamping apparatus for clamping cutter blades of a gear cutting machine at a grinding machine
CN201186404Y (en) * 2008-04-24 2009-01-28 中芯国际集成电路制造(上海)有限公司 Simple polisher station
CN204327017U (en) * 2014-12-23 2015-05-13 广东梅雁吉祥水电股份有限公司 A kind of novel oil pumping fixator
CN107234449A (en) * 2017-08-15 2017-10-10 南陵智联电子科技有限公司 A kind of Digit Control Machine Tool positioner
CN207732696U (en) * 2017-12-04 2018-08-14 西安汇富融通信息科技有限责任公司 A kind of adjustable solar-cell panel mounting device
CN207762786U (en) * 2018-01-04 2018-08-24 合肥市靖鑫光伏科技工程有限公司 A kind of photovoltaic plant street lamp power generation plate mounting bracket
CN108781610A (en) * 2018-04-30 2018-11-13 海宁市高级技工学校 It is a kind of to facilitate sized digging apparatus

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4287686A (en) * 1979-03-27 1981-09-08 Werkzeugmaschinenfabrik Oerlikon-Buhrle Ag Clamping apparatus for clamping cutter blades of a gear cutting machine at a grinding machine
CN201186404Y (en) * 2008-04-24 2009-01-28 中芯国际集成电路制造(上海)有限公司 Simple polisher station
CN204327017U (en) * 2014-12-23 2015-05-13 广东梅雁吉祥水电股份有限公司 A kind of novel oil pumping fixator
CN107234449A (en) * 2017-08-15 2017-10-10 南陵智联电子科技有限公司 A kind of Digit Control Machine Tool positioner
CN207732696U (en) * 2017-12-04 2018-08-14 西安汇富融通信息科技有限责任公司 A kind of adjustable solar-cell panel mounting device
CN207762786U (en) * 2018-01-04 2018-08-24 合肥市靖鑫光伏科技工程有限公司 A kind of photovoltaic plant street lamp power generation plate mounting bracket
CN108781610A (en) * 2018-04-30 2018-11-13 海宁市高级技工学校 It is a kind of to facilitate sized digging apparatus

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