WO2019235372A1 - Système optique, et dispositif et système d'imagerie équipés d'un tel système optique - Google Patents

Système optique, et dispositif et système d'imagerie équipés d'un tel système optique Download PDF

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Publication number
WO2019235372A1
WO2019235372A1 PCT/JP2019/021656 JP2019021656W WO2019235372A1 WO 2019235372 A1 WO2019235372 A1 WO 2019235372A1 JP 2019021656 W JP2019021656 W JP 2019021656W WO 2019235372 A1 WO2019235372 A1 WO 2019235372A1
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Prior art keywords
optical system
section
cross
light
front group
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PCT/JP2019/021656
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English (en)
Japanese (ja)
Inventor
吉田　博樹
木村　一己
工藤　源一郎
▲寛▼人 加納
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キヤノン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority claimed from JP2019044281A external-priority patent/JP6639718B2/ja
Application filed by キヤノン株式会社 filed Critical キヤノン株式会社
Publication of WO2019235372A1 publication Critical patent/WO2019235372A1/fr
Priority to US17/108,661 priority Critical patent/US11674908B2/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/08—Anamorphotic objectives
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/02—Simple or compound lenses with non-spherical faces
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof

Definitions

  • the present invention relates to an optical system used in an imaging apparatus that obtains image information by splitting a light beam from an object, and is suitable for inspection and evaluation in industrial fields such as manufacturing, agriculture, and medicine.
  • Patent Document 1 describes an optical system having cylindrical mirrors disposed on both sides of a slit that is long in one direction and a diffraction grating that splits a light beam from the cylindrical mirror.
  • the optical system described in Patent Document 1 employs a cylindrical mirror, the light beam incident on the slit and the light beam dispersed by the diffraction grating become parallel light in a cross section including the longitudinal direction of the slit. ing. Therefore, in order to collect the light beam in the cross section, it is necessary to dispose a lens on the image side of the diffraction grating. Furthermore, in order to realize a wide angle of view, it is necessary to arrange more optical elements, and the entire system becomes large.
  • An object of the present invention is to provide an optical system capable of realizing a wide angle of view while being small, an imaging apparatus including the optical system, and an imaging system.
  • an optical system is an optical system including a front group, a light shielding member, and a rear group arranged in order from the object side to the image side.
  • a long opening is provided in the first direction, and the front group does not form an object on the opening in the first cross section parallel to the first direction, and the first group extends in the first direction.
  • the rear group splits the light beam that has passed through the opening in the second cross section into a plurality of light beams having different wavelengths.
  • the plurality of light beams are condensed at different positions in the second cross section, and the light beams that exit from the front group and enter the aperture are not in the first cross section.
  • an XYZ coordinate system is defined as an absolute coordinate system
  • an xyz coordinate system is defined as a local coordinate system for each optical surface.
  • the x axis is the normal axis (optical axis) at the apex (origin) of each optical surface
  • the y axis is parallel to the Y axis and orthogonal to the x axis at the origin
  • the z axis is the x axis
  • It is an axis orthogonal to the y-axis.
  • the Y direction and the y direction are the first direction (reading direction)
  • the Z direction and the z direction are the second direction (spectral direction)
  • the XY cross section and the xy cross section are the first cross section (read cross section)
  • the ZX cross section and
  • the zx cross section is also referred to as a second cross section (spectral cross section).
  • FIG. 1 and FIG. 2 are main part schematic views of an optical system 10 according to an embodiment of the present invention
  • FIG. 1 shows a first cross section
  • FIG. 2 shows a second cross section
  • 1 and 2 show the shape of each member in a cross section including the optical axis.
  • each member is shown in the same sheet for convenience.
  • the diffraction grating on the diffraction surface is omitted for convenience.
  • the test object is illuminated with white light (light having a plurality of wavelength components) such as sunlight.
  • the region other than the aperture in the aperture stop 1 and the light shielding member 4 is a light shielding surface that does not transmit light in at least the use wavelength band (design wavelength band) of the optical system 10.
  • the diaphragm 1 and the light shielding member 4 it is possible to employ one having a hole in a sheet metal or one having a chromium vapor deposited on the surface of a glass plate.
  • the optical system 10 can form an image of a linear reading region (test region) that is long in the first direction.
  • the rear group 12 only needs to have at least one diffractive surface.
  • the base surface of the diffractive surface 5 is made an aspherical surface (anamorphic surface), and the fourth reflecting surface 6 is made spherical or removed. May be.
  • the diffractive surface 5 is provided in the front group 11, only a part of the light beams having a certain wavelength can pass through the opening of the light shielding member 4. Therefore, the diffractive surface 5 needs to be provided in the rear group 12.
  • each of the front group 11 and the rear group 12 is constituted by two reflecting surfaces as in this embodiment.
  • a blazed shape is employed that is relatively easy to achieve both improvement in diffraction efficiency and ease of manufacture.
  • a blazed diffraction grating the portion farthest from the base surface in the x direction is the lattice apex, the portion that reflects (diffracts) incident light is the blazed surface (lattice surface), and does not contribute to diffraction adjacent to the blazed surface.
  • the part is called a lattice wall surface.
  • the diffractive surface 5 according to this embodiment is arranged so that the blaze surface faces the light receiving surface 7 side (image side) and the grating wall surface faces the object side. As a result, a short wavelength light beam is incident on the + Z side of the light receiving surface 7 in FIG. 2, and a long wavelength light beam is incident on the ⁇ Z side.
  • a reflective coating may be applied to the surface of the diffraction grating.
  • the base surface of the diffractive surface 5 is preferably an anamorphic surface having different curvatures in the xy section and the zx section. This makes it possible to share power with other anamorphic optical surfaces, thus facilitating correction of aberrations.
  • the base surface of the diffractive surface 5 is an anamorphic surface.
  • the base surface may be a flat surface or a spherical surface with emphasis on the ease of manufacturing the diffraction grating.
  • the light beam emitted from the test object passes through the aperture of the diaphragm 1, is reflected by the first reflecting surface 2 and the second reflecting surface 3, and reaches the light shielding member 4.
  • the front group 11 does not image the test object on the opening of the light shielding member 4 in the first cross section (XY cross section), and on the opening of the light shielding member 4 in the second cross section (ZX cross section).
  • An intermediate image of the test object is formed in That is, the front group 11 is configured such that the focal position does not coincide with the object plane in the first cross section.
  • a line-shaped intermediate image (line image) that is long in the first direction is formed on the opening of the light shielding member 4.
  • “on the opening” is not limited to the exact position of the opening, but also includes the vicinity (substantially above the opening) of the opening slightly separated from the position of the opening in the optical axis direction.
  • the light beam that has passed through the opening of the light shielding member 4 is split into a plurality of light beams having different wavelengths by the diffraction surface 5 in the second cross section.
  • the diffraction grating on the diffraction surface 5 is composed of a plurality of gratings (ridge lines) arranged in the z direction, the light beam incident on the diffraction surface 5 is subjected to spectral action only in the z direction and spectral action in the y direction. I do not receive it.
  • the plurality of light beams from the diffractive surface 5 are reflected by the fourth reflecting surface 6 and enter the light receiving surface 7 disposed on the image surface. At this time, a plurality of light beams having different wavelengths are condensed at different positions on the light receiving surface 7 in the second cross section. That is, according to the optical system 10 according to the present embodiment, since a plurality of images for each wavelength can be formed on the light receiving surface 7, the light receiving surface 7 can acquire a plurality of image information for each wavelength.
  • the optical system 10 generates different optical actions in the first cross section including the reading direction and the second cross section including the spectral direction.
  • the test object is imaged on the light receiving surface 7 without being imaged once on the opening of the light shielding member 4, but in the second cross section, the test object is imaged on the light shielding member 4.
  • the image is once formed on the aperture and then re-imaged on the light receiving surface 7. That is, the test object is imaged once in the first cross section, while the test object is imaged twice in the second cross section.
  • the light beam passing through the opening of the light shielding member 4 can be made non-parallel light. Thereby, it becomes easy to realize a wide angle of view in the first cross section. If the light beam passing through the opening of the light shielding member 4 is parallel light, it is necessary to arrange a large number of optical elements in the rear group 12 in order to increase the angle of view of the optical system 10. The system becomes larger.
  • a wide angle of view is realized by using a divergent light as a light beam passing through the opening of the light shielding member 4.
  • a light beam passing through the opening of the light shielding member 4 as necessary. May be convergent light.
  • each of the front group 11 and the rear group 12 when the test object is once imaged on the opening of the light shielding member 4, each of the front group 11 and the rear group 12 must independently correct the aberration. Therefore, it is necessary to increase the power of each optical surface, for example, the degree of freedom in designing each optical surface is lowered, and it is difficult to increase the angle of view of the optical system 10.
  • the second cross section since it is not necessary to widen the angle of view, it is possible to increase the NA by once imaging the test object on the opening of the light shielding member 4.
  • each of the front group 11 and the rear group 12 has different powers in the first cross section and the second cross section.
  • the anamorphic optical surface included in the front group 11 should be positively given power not only to the second cross section but also to the first cross section (make the absolute value of curvature larger than 0). desirable.
  • the power code of the front group 11 and the power code of the rear group 12 are different from each other.
  • a positive power is applied to the front group 11 and the rear group 12 in order to form an image once on the opening of the light shielding member 4 and then re-image the light receiving surface 7. It is necessary to have.
  • the front group 11 is given negative power. It is desirable to give the rear group 12 positive power.
  • the optical system 10 becomes a retro focus type in the first cross section, the focal length of the entire system is shortened, and a wide angle of view can be realized.
  • the optical system 10 is made a telephoto optical system by giving the front group 11 positive power and giving the rear group 12 negative power. Also good.
  • the chief ray L1P and the marginal rays L1U and L1L in the white light beam emitted from the test object are line-shaped intermediately on the opening of the light shielding member 4 via the stop 1, the first reflecting surface 2, and the second reflecting surface 3. Form an image.
  • the principal ray L2P and the marginal rays L2U, L2L that have passed through the opening of the light shielding member 4 are caused by the diffraction surface 5 to have rays L3P, L3U, L3L of wavelength ⁇ 1, rays L4P, L4U, L4L of wavelength ⁇ 2, and rays of wavelength ⁇ 3.
  • each of the light beams having the wavelength ⁇ 1, the wavelength ⁇ 2, and the wavelength ⁇ 3 is condensed at the first position 73, the second position 74, and the third position 75 on the light receiving surface 7.
  • Example 1 The optical system 10 according to Example 1 of the present invention will be described below.
  • the optical system 10 according to the present example has the same configuration as the optical system 10 according to the above-described embodiment.
  • the distance from the test object to the diaphragm 1 is 300 mm
  • the width of the reading region in the first direction is 300 mm
  • the angle of view in the first section is ⁇ 24.17 °.
  • the wavelength band used is 400 nm to 1000 nm
  • the width of the image forming area (incident area) of the light beam on the light receiving surface 7 in the second direction is 2.7 mm.
  • the composite focal lengths in the first cross section of the front group 11 and the rear group 12 according to this embodiment are -16.27 mm and 28.30 mm, respectively, and the composite focal lengths in the second cross section of the front group 11 and the rear group 12 are respectively.
  • the focal lengths are 19.99 mm and 25.76 mm, respectively.
  • the optical system 10 according to the present embodiment improves the imaging performance by performing the intermediate in the second cross section, while widening the angle of view (reading) by adopting the retrofocus type in the first cross section. Realization of wide area).
  • each optical surface of the optical system 10 will be described.
  • the expression of the surface shape of each optical surface is not limited to that described later, and each optical surface may be designed using another expression as necessary.
  • R y is a radius of curvature (bus curvature radius) in the xy section
  • K y , B 2 , B 4 , and B 6 are aspheric coefficients in the xy section.
  • the numerical values of the aspheric coefficients B 2 , B 4 , and B 6 may be different from each other on both sides of the x axis ( ⁇ y side and + y side) as necessary.
  • the bus shape can be asymmetric in the y direction with respect to the x axis.
  • secondary to sixth-order aspheric coefficients are used, but higher-order aspheric coefficients may be used as necessary.
  • K z and M jk are aspheric coefficients in the zx section.
  • r ′ is a radius of curvature (sub-wire curvature radius) in the zx section at a position separated by y from the optical axis in the y direction, and is represented by the following equation.
  • the near infrared region can be intensively observed, or by setting the fundamental wavelength to about 700 nm, the near infrared region can be observed in a balanced manner from the visible region. Also good.
  • curvature radii in the XY cross section and the ZX cross section at the reflection point of the light beam are shown.
  • the value of the radius of curvature of each reflecting surface is positive, it indicates a concave surface, and when it is negative, it indicates a convex surface.
  • Table 3 shows the aperture [1] in the y direction and the z direction of the aperture of the diaphragm 1, the aperture of the light shielding member 4, and the light receiving surface 7.
  • all of the aperture of the diaphragm 1, the aperture of the light shielding member 4, and the light receiving surface 7 are rectangular.
  • FIG. 4 is a schematic diagram of a main part in the first and second cross sections of the optical system 10 according to the embodiment of the present invention.
  • the optical system 10 according to the present embodiment has a shorter optical path length from the stop 1 to the light receiving surface 7 than the optical system 10 according to the first embodiment, thereby realizing further downsizing of the entire system.
  • the distance from the test object to the diaphragm 1 is 300 mm
  • the width of the reading region in the first direction is 300 mm
  • the angle of view in the first section is ⁇ 24.46 °.
  • the used wavelength band is 400 nm to 1000 nm
  • the width of the imaging region in the second direction on the light receiving surface 7 is 2.7 mm.
  • the composite focal lengths in the first cross section of the front group 11 and the rear group 12 according to the present embodiment are respectively -14.21 mm and 16.69 mm
  • the composite focal lengths in the second cross section of the front group 11 and the rear group 12 are respectively.
  • the focal lengths are 19.33 mm and 11.01 mm, respectively.
  • FIG. 5 shows the MTF of the optical system 10 according to the present embodiment, as in FIG. As can be seen from FIG. 5, the aberration is satisfactorily corrected over the entire reading region, and a sufficient depth of focus is ensured.
  • the distance from the test object to the diaphragm 1 is 300 mm
  • the width of the reading region in the first direction is 300 mm
  • the angle of view in the first section is ⁇ 24.44 °.
  • the wavelength band used is 400 nm to 1000 nm
  • the width of the imaging region in the second direction on the light receiving surface 7 is 2.64 mm.
  • the composite focal lengths in the first cross section of the front group 11 and the rear group 12 according to the present embodiment are -14.46 mm and 26.85 mm, respectively, and the composite focal lengths in the second cross section of the front group 11 and the rear group 12 are respectively.
  • the focal lengths are 19.34 mm and 24.98 mm, respectively.
  • Table 7 shows the position of the vertex of each optical surface of the optical system 10 according to this example, the direction of the normal at the vertex, and the radius of curvature at each cross section.
  • Table 8 shows each optical surface.
  • Table 9 shows the aperture of the diaphragm 1, the aperture of the light shielding member 4, and the diameter of the light receiving surface 7.
  • FIG. 7 shows the MTF of the optical system 10 according to the present embodiment, as in FIG. As can be seen from FIG. 7, the aberration is satisfactorily corrected over the entire reading region, and a sufficient depth of focus is ensured.
  • Example 4 The optical system 10 according to Example 4 of the present invention will be described below.
  • the description of the configuration equivalent to that of the optical system 10 according to Embodiment 1 described above is omitted.
  • FIG. 8 is a schematic diagram of a main part in the first and second cross sections of the optical system 10 according to the embodiment of the present invention.
  • the optical system 10 according to the present embodiment has a shorter optical path length from the stop 1 to the light receiving surface 7 than the optical system 10 according to the first embodiment, thereby realizing further downsizing of the entire system.
  • the distance from the test object to the diaphragm 1 is 300 mm
  • the width of the reading region in the first direction is 300 mm
  • the angle of view in the first section is ⁇ 24.49 °.
  • the wavelength band used is 400 nm to 1000 nm
  • the width of the imaging region in the second direction on the light receiving surface 7 is 2.37 mm.
  • the combined focal lengths in the first cross section of the front group 11 and the rear group 12 according to the present embodiment are ⁇ 13.23 mm and 16.78 mm, respectively, and the combined focal lengths of the front group 11 and the rear group 12 in the second cross section are respectively.
  • the focal lengths are 17.53 mm and 11.25 mm, respectively.
  • Table 10 shows the position of the vertex of each optical surface of the optical system 10 according to this example, the direction of the normal line at the vertex, and the radius of curvature at each cross section.
  • Table 11 shows each optical surface.
  • Table 12 shows the aperture of the diaphragm 1, the aperture of the light shielding member 4, and the diameter of the light receiving surface 7. The reason why the values of the curvature radii Ry do not match between Table 10 and Table 11 is that the values of the curvature radii in Table 10 take into account the tilt angle in the second cross section.
  • the sub-wire shapes of the first reflecting surface 2, the second reflecting surface 3, the third reflecting surface 5, and the fourth reflecting surface 6 are the following formulas instead of the above formula (Equation 3). It is expressed using Further, the shape of the sub-line of the third reflecting surface 5 is expressed by the above formula (Equation 2) after defining a different local coordinate system for each position on the bus line as in the second embodiment.
  • Imaging apparatus and imaging system an imaging apparatus (spectral reading apparatus) and imaging system (spectral reading system) as examples of use of the optical system 10 according to the above-described embodiment will be described.
  • FIGS. 10 and 11 are schematic views of main parts of the imaging systems 100 and 200 according to the embodiment of the present invention.
  • the imaging systems 100 and 200 are configured to change the relative positions of the imaging system 101 and 201 having an optical system 10 and an imaging device that receives an image formed by the optical system 10, and the imaging apparatus and the test objects 103 and 203. Sections 102 and 202.
  • Each imaging system desirably has an image processing unit that generates an image based on image information obtained from the imaging element.
  • the image processing unit is a processor such as a CPU, for example, and may be provided inside or outside each imaging apparatus.
  • a plurality of pieces of image information (one-dimensional images) corresponding to a plurality of wavelengths are obtained by imaging the linear reading regions 104 and 204 that are long in the first direction (Y direction) once. Can be obtained.
  • each imaging device it is desirable to configure each imaging device as a multispectral camera that can acquire image information corresponding to four or more types of wavelengths more than a general camera.
  • each imaging device it is more preferable to configure each imaging device as a hyperspectral camera that can acquire image information corresponding to 100 or more wavelengths.
  • a CCD (Charge Coupled Device) sensor As the image pickup element in each image pickup apparatus, a CCD (Charge Coupled Device) sensor, a CMOS (Complementary Metal Oxide Semiconductor) sensor, or the like can be employed.
  • the imaging device may be configured to photoelectrically convert not only visible light but also infrared light (near infrared light or far infrared light).
  • an image sensor using a material such as InGaAs or InAsSb may be employed according to the wavelength band used.
  • the number of pixels of the image sensor is desirably determined based on the resolution required in the reading direction and the spectral direction.
  • the transport unit 102 in the imaging system 100 is means for moving the test object 103 in the second direction (Z direction).
  • a belt conveyor or the like can be employed as the transport unit 102.
  • the conveyance unit 202 in the imaging system 200 is a unit that moves the imaging device 201 in the second direction.
  • a multicopter, an airplane, an artificial satellite, or the like can be employed as the transport unit 202.
  • a plurality of positions in the second direction can be obtained by causing each imaging device to sequentially image the reading area while changing the relative position of each imaging device and each test object in each transport unit.
  • a plurality of pieces of image information corresponding to can be acquired.
  • a two-dimensional image corresponding to a specific wavelength can be generated by performing rearrangement or arithmetic processing of the plurality of captured images by the image processing unit.
  • the image processing unit since each image information represents the light and shade information in the first direction, the image processing unit generates a spectrum distribution (spectrum information) based on the light and shade information for each wavelength at a specific position in the second direction. Also good.
  • each conveyance part so that both each imaging device and each test object may be moved.
  • an optical member focusing member that can be driven inside or outside the optical system 10 is arranged, and the position of the optical member may be adjusted so that the object can be focused.
  • the optical system 10 is suitable for inspection (evaluation) in industrial fields such as manufacturing, agriculture, and medicine.
  • the image information of the object is acquired by imaging the object via the optical system 10.
  • an imaging apparatus or an imaging system as described above can be used. That is, it is possible to acquire image information of the entire object by imaging the object while changing the relative positions of the object and the imaging device.
  • image information of a plurality of objects can be acquired sequentially (continuously).
  • a plurality of pieces of image information corresponding to the wavelengths of the plurality of light beams emitted from the optical system 10 may be acquired.
  • the object is inspected based on the image information acquired in the first step.
  • the user confirms (determines) the presence or absence of foreign matter or scratches in the image information, or the control unit (image processing unit) detects foreign matter or scratches in the image information and notifies the user. May be. Or you may employ
  • the object may be inspected based on the spectrum distribution of the object acquired using a plurality of pieces of image information for each wavelength.
  • the image processing unit may generate image information in which coloring or the like is enhanced for each spectrum distribution, and the user may perform inspection based on the image information.
  • the inspection method according to the present embodiment can be applied to a manufacturing method for articles such as foods, pharmaceuticals, and cosmetics.
  • the material (object) for manufacturing the article can be inspected by the inspection method described above, and the article can be manufactured using the inspected material.
  • the user (manufacturer) or the manufacturing apparatus removes the foreign matter from the material or discards the foreign matter or scratched material. can do.
  • the above inspection method may be used for detecting an abnormality in the manufacturing apparatus.
  • the presence or absence of an abnormality may be determined based on the image information of the manufacturing apparatus, and the driving of the manufacturing apparatus may be stopped or the abnormality may be corrected according to the determination result.

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Abstract

La présente invention porte sur un système optique (10) comprenant un groupe avant (11), un élément de protection contre la lumière (4) et un groupe arrière (12) qui sont placés dans cet ordre du côté objet au côté image. L'élément de protection contre la lumière (4) comporte une ouverture qui est longue dans une première direction. Le groupe avant (11) forme une image intermédiaire d'un objet dans l'ouverture dans une seconde section transversale perpendiculaire à la première direction, sans former d'image de l'objet dans l'ouverture dans une première section transversale parallèle à la première direction. Le groupe arrière (12) présente une surface de diffraction (5) destinée à diffracter des faisceaux de lumière qui ont traversé l'ouverture en une pluralité de faisceaux de lumière qui ont des longueurs d'onde différentes les unes des autres dans la seconde section transversale, et focalise la pluralité de faisceaux de lumière à différents emplacements dans la seconde section transversale. Les faisceaux de lumière qui sont émis par le groupe avant (11) et qui sont incidents sur l'ouverture ne sont pas parallèles dans la première section transversale.
PCT/JP2019/021656 2018-06-07 2019-05-31 Système optique, et dispositif et système d'imagerie équipés d'un tel système optique WO2019235372A1 (fr)

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JP2019044281A JP6639718B2 (ja) 2018-06-07 2019-03-11 光学系、それを備える撮像装置及び撮像システム

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11624654B1 (en) * 2022-11-15 2023-04-11 ML Optic Corp. Compact modulation transfer function colorimeter

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