WO2019225042A1 - Oscillation device and optical detection device - Google Patents

Oscillation device and optical detection device Download PDF

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Publication number
WO2019225042A1
WO2019225042A1 PCT/JP2018/046594 JP2018046594W WO2019225042A1 WO 2019225042 A1 WO2019225042 A1 WO 2019225042A1 JP 2018046594 W JP2018046594 W JP 2018046594W WO 2019225042 A1 WO2019225042 A1 WO 2019225042A1
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WO
WIPO (PCT)
Prior art keywords
vibration
transparent electrode
electrode layer
vibration device
vibrator
Prior art date
Application number
PCT/JP2018/046594
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French (fr)
Japanese (ja)
Inventor
藤本　克己
西山　健次
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株式会社村田製作所
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Publication of WO2019225042A1 publication Critical patent/WO2019225042A1/en

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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator

Definitions

  • the present invention relates to a vibration device and an optical detection device capable of removing water droplets and the like by mechanical vibration.
  • Patent Document 1 discloses a vibration device having a translucent portion disposed in front of a camera body. By vibrating the plate-like body including the translucent portion, the water droplets are moved and atomized. In this vibration device, a high-order resonance mode is used so that a vibration antinode is located in a portion other than the central portion of the plate-like body.
  • the surface tension of the water plate-like body differs between the vibration antinode portion and the vibration node portion. The difference in surface tension at each position becomes a driving force, the water droplet moves toward the antinode of vibration, and then the water droplet is further atomized to secure a visual field.
  • An object of the present invention is to provide a vibration device and an optical detection device that can reliably move a water droplet without depending on a difference in surface tension at each position.
  • a vibrating device includes a vibrating element having a light transmitting body portion, a vibrating element having a vibrator that vibrates the vibrating body, and a transparent electrode provided on the light transmitting body portion of the vibrating body.
  • An optical detection device includes a vibration device configured according to the present invention and an optical detection element arranged so that a detection region is included in the light transmitting body portion.
  • FIG. 1 is a schematic partially cutaway perspective view of the vibration device according to the first embodiment of the present invention.
  • FIG. 2 is a front sectional view of the imaging device having the vibration device according to the first embodiment of the present invention.
  • FIG. 3 is a perspective view of the resonator element according to the first embodiment of the invention.
  • FIG. 4 is a schematic circuit diagram of the drive circuit and the voltage application circuit in the first embodiment of the present invention.
  • FIG. 5 is a schematic front cross-sectional view of a vibration element for explaining a vibration mode of the vibration element in the first embodiment of the present invention.
  • FIG. 6 is a schematic perspective view of the vibration element for explaining a vibration mode of the vibration element in the first embodiment of the present invention.
  • FIG. 1 is a schematic partially cutaway perspective view of the vibration device according to the first embodiment of the present invention.
  • FIG. 2 is a front sectional view of the imaging device having the vibration device according to the first embodiment of the present invention.
  • FIG. 3 is a perspective view of the
  • FIG. 7 is a plan view of a piezoelectric vibrator according to a modification of the first embodiment of the present invention.
  • FIG. 8 is a perspective view of a vibration element according to the second embodiment of the present invention.
  • FIG. 9 is a front cross-sectional view of a vibration device according to a third embodiment of the present invention.
  • FIG. 10 is a front sectional view of a vibration device according to the fourth embodiment of the present invention.
  • FIG. 11 is a front cross-sectional view of a vibration device according to a fifth embodiment of the present invention.
  • FIG. 12 is a front sectional view of an imaging device according to the sixth embodiment of the present invention.
  • FIG. 13 is a front sectional view of the vibration device according to the seventh embodiment of the present invention.
  • FIG. 14 is a front cross-sectional view of a vibration device according to a modification of the seventh embodiment of the present invention.
  • FIG. 1 is a schematic partially cutaway perspective view of the vibration device according to the first embodiment.
  • the vibration device 1 shown in FIG. 1 is a vibration device that removes water droplets and foreign matter from the field of view of the image sensor by moving the water droplets and foreign matter by vibration.
  • the vibration device 1 includes a vibration element 2, a case member 9 that holds the vibration element 2, a drive circuit 13, and a voltage application circuit 14.
  • the drive circuit 13 and the voltage application circuit 14 are electrically connected to the vibration element 2.
  • FIG. 2 is a front sectional view of an imaging device having the vibration device according to the first embodiment. Note that the drive circuit and the voltage application circuit may be omitted in perspective views and cross-sectional views other than FIG.
  • an image pickup element 10A indicated by a one-dot chain line is disposed in an internal space surrounded by the vibration element 2 and the case member 9, an image pickup element 10A indicated by a one-dot chain line is disposed.
  • the imaging device 10 includes the vibration device 1 and an image sensor 10A.
  • the image pickup element 10A include a CMOS, a CCD, a bolometer, a thermopile, and the like that receive light of any wavelength from the visible region to the far infrared region.
  • Examples of the imaging device 10 include a camera, a Radar, a LIDAR device, and the like.
  • an optical detection element that optically detects energy rays other than the imaging element 10A may be arranged.
  • an energy ray to detect active energy rays, such as electromagnetic waves and infrared rays, may be used, for example.
  • the detection region of the optical detection element is included in a light transmitting body portion to be described later.
  • the visual field of the image sensor 10 ⁇ / b> A is a detection region and is included in the translucent part.
  • FIG. 3 is a perspective view of the vibration element according to the first embodiment.
  • the vibration element 2 has a substantially disk shape. More specifically, the vibration element 2 includes a substantially disk-shaped vibration body 3 having an opening 3c at the center.
  • the vibrating body 3 has a first main surface 3a and a second main surface 3b facing each other.
  • the first main surface 3a is an outer main surface of the vibration device 1, and the second main surface 3b is a main surface on the inner space side.
  • An extension 3d extends from the outer peripheral edge of the opening 3c on the first main surface 3a in a direction perpendicular to the first main surface 3a. Note that the extension 3d may not be provided.
  • a translucent body 4 serving as a translucent body is provided on the extension 3 d of the vibrating body 3 so as to cover the opening 3 c.
  • the light transmitting body 4 is made of a light transmitting material.
  • the translucent material for example, translucent plastic, glass, translucent ceramics, or the like can be used.
  • a transparent electrode layer 15 is provided on the translucent body 4.
  • a dielectric layer 16 is provided on the transparent electrode layer 15. More specifically, the transparent electrode layer 15 is provided so as to cover the entire surface of the transparent body 4 in plan view. Similarly, the dielectric layer 16 is provided so as to cover the entire surface of the transparent body 4 and the transparent electrode layer 15 in plan view.
  • the transparent electrode layer 15 is made of a transparent electrode material such as ITO or ZnO, for example.
  • the dielectric layer 16 is made of silicon oxide.
  • the material of the dielectric layer 16 is not limited to the above, and an appropriate dielectric having translucency can be used.
  • the translucency in this specification means the translucency which transmits the energy beam and light of the wavelength which the said optical detection element detects at least.
  • the transparent electrode layer 15 is electrically connected to the voltage application circuit 14.
  • the voltage application circuit 14 applies a voltage to the transparent electrode layer 15 at a certain timing.
  • the shapes of the vibrating body 3 and the translucent body 4 in a plan view are circular, but are not limited to this, and may be substantially elliptical, or may be rectangular or polygonal. Good.
  • the translucent body 4 has a disc shape, but may have a dome shape or the like.
  • the piezoelectric vibrator 5A and the piezoelectric vibrator 5B are provided on the second main surface 3b of the vibrating body 3 so as to face each other with the opening 3c therebetween.
  • the piezoelectric vibrator 5A has a rectangular plate-like piezoelectric body 6.
  • the piezoelectric body 6 is made of, for example, an appropriate piezoelectric ceramic such as Pb (Zr, Ti) O 3 or (K, Na) NbO 3 or an appropriate piezoelectric single crystal such as LiTaO 3 or LiNbO 3 .
  • the shape of the piezoelectric body 6 is not limited to the above.
  • the piezoelectric vibrator 5A includes a first electrode 7a and a feedback electrode 7c provided on one main surface of the piezoelectric body 6.
  • the first electrode 7a and the return electrode 7c are provided separately.
  • the piezoelectric vibrator 5A has a second electrode 7b provided on the other main surface of the piezoelectric body 6 so as to face the first electrode 7a.
  • the first electrode 7 a and the feedback electrode 7 c are electrically connected to the drive circuit 13.
  • the second electrode 7b is connected to the ground potential.
  • the piezoelectric vibrator 5B is configured similarly to the piezoelectric vibrator 5A.
  • the piezoelectric vibrator 5A is bonded to the vibrating body 3 on the second electrode 7b side, and the piezoelectric vibrator 5B is bonded to the vibrating body 3 on the first electrode and feedback electrode side. Accordingly, the piezoelectric vibrator 5A and the piezoelectric vibrator 5B vibrate in the opposite directions with respect to the vibrating body 3 and vibrate the vibrating body 3.
  • the feature of this embodiment is that the transparent electrode layer 15 and the dielectric layer 16 are provided on the transparent body 4, and the voltage application circuit 14 that applies a voltage to the transparent electrode layer 15 at a certain timing is provided. is there. Accordingly, it is possible to move water droplets and the like more reliably outside the field of view of the image sensor without depending on the difference in surface tension at each position described above. Details will be described below.
  • FIG. 4 is a schematic circuit diagram of the drive circuit and the voltage application circuit in the first embodiment.
  • FIG. 4 shows a connection form with one piezoelectric vibrator, but the drive circuit and the voltage application circuit are similarly connected to other piezoelectric vibrators.
  • the vibration device 1 has a circuit 12 shown in FIG.
  • the circuit 12 includes the drive circuit 13 and the voltage application circuit 14. Further, the circuit 12 includes an amplifier connected between the drive circuit 13 and the voltage application circuit 14 and the feedback electrode 7c of the piezoelectric vibrator 5A.
  • the drive circuit 13 applies an electric signal to the piezoelectric vibrator 5A so that the vibration element 2 is in a resonance state.
  • the drive circuit 13 has a phase circuit 13A connected to the amplifier.
  • the drive circuit 13 includes an amplifier circuit 13B connected between the phase circuit 13A and the first electrode 7a of the piezoelectric vibrator 5A.
  • a self-excited circuit is configured by the amplifier, the drive circuit 13, and the piezoelectric vibrator 5A.
  • the configuration of the drive circuit 13 and the form of connection between the drive circuit 13 and the piezoelectric vibrator 5A are not limited to the above.
  • the drive circuit 13 applies an electrical signal to the piezoelectric vibrator 5B as well as the piezoelectric vibrator 5A.
  • the voltage application circuit 14 includes a timing generation circuit 14A connected to the amplifier.
  • the voltage application circuit 14 includes a switching circuit 14B connected between the timing generation circuit 14A and the transparent electrode layer 15. Further, the voltage application circuit 14 has a power source 14C connected to the switching circuit 14B. The power source 14C is connected to the transparent electrode layer 15 via the switching circuit 14B.
  • the timing generation circuit 14A applies an electrical signal to the switching circuit 14B at a certain timing according to the feedback signal output from the piezoelectric vibrator 5A. While the electrical signal is being applied, the switching circuit 14B is in an ON state, and a voltage is applied to the transparent electrode layer 15 from the power source 14C. On the other hand, when the electrical signal is not applied to the switching circuit 14B from the timing generation circuit 14A, the switching circuit 14B is in an OFF state, and no voltage is applied to the transparent electrode layer 15.
  • the configuration of the voltage application circuit 14 is not limited to the above, and any circuit that applies a voltage to the transparent electrode layer 15 at a certain timing may be used.
  • the dielectric layer 16 when a voltage is applied to the transparent electrode layer 15, the dielectric layer 16 is polarized. As a result, the surface tension of the dielectric layer 16 such as water droplets attached to the dielectric layer 16 changes. In the present embodiment, since the surface tension changes at a certain timing, it is possible to move water droplets and the like more reliably in a certain direction by the vibration of the vibration element 2. Therefore, it is possible to make it difficult for the above-described reciprocating motion of water droplets or the like, and it is possible to move the water droplets or the like more reliably outside the field of view of the image sensor.
  • FIG. 5 is a schematic front cross-sectional view of the vibration element for explaining the vibration mode of the vibration element in the first embodiment.
  • FIG. 6 is a schematic perspective view of the vibration element for explaining a vibration mode of the vibration element in the first embodiment. 5 and 6, the initial state of the vibration element is indicated by a solid line, and the vibration element is vibrated by a dashed line. Note that the light transmitting body, the transparent electrode layer, and the dielectric layer are omitted. In FIG. 6, a portion surrounded by a broken line is a vibration node.
  • the vibration element 2 of this embodiment vibrates in the seesaw mode by the drive circuit 13.
  • the seesaw mode refers to a vibration mode that vibrates with a vibration node line extending in the radial direction of the vibration element as a rotation axis. Since the vibration node is located at the center of the vibration element 2, the vibration antinode is located at a portion other than the center of the vibration element 2.
  • the vibration mode in the present embodiment is a seesaw mode having one vibration node line extending in the circumferential direction in addition to one vibration node line extending in the radial direction.
  • Acceleration is applied to water droplets and the like in the left and right directions in FIG. 5 by rotational vibration with a vibration node line extending in the radial direction as a rotation axis.
  • water droplets and the like reciprocate in a certain position range.
  • a water droplet or the like does not move from the fixed position range.
  • the difference in surface tension with respect to the vibration element 2 such as a water drop between the vibration antinode and the vibration node increases.
  • water droplets or the like can move toward the vibration belly using the difference in surface tension as a driving force.
  • some water droplets may remain. The remaining water droplets and the like continue to reciprocate within a certain range.
  • the vibration element 2 when the vibration element 2 is vibrating as described above, a voltage is applied to the transparent electrode layer 15 at a certain timing to change the surface tension of the dielectric layer 16 such as water droplets. Thereby, a water droplet or the like can be moved more reliably outside the field of view of the image sensor.
  • the transparent electrode layer 15 and the dielectric layer 16 are provided so as to cover the entire light transmitting body 4 in plan view. Thereby, water droplets and the like can be effectively moved out of the field of view of the image sensor.
  • the transparent electrode layer 15 and the dielectric material layer 16 should just be provided so that at least one part of the transparent body 4 may be covered.
  • the transparent electrode layer 15 and the dielectric layer 16 are preferably provided so as to be located in at least a part of the field of view of the imaging device. However, as in the present embodiment, it is more preferable that the transparent electrode layer 15 and the dielectric layer 16 are provided so as to be positioned in the entire field of view of the imaging device.
  • the transparent electrode layer 15 and the dielectric layer 16 may be provided not only on the light transmitting body 4 that is the light transmitting body portion of the vibration element 2 but also on the vibrating body 3 other than the light transmitting body portion.
  • the translucent body 4 is provided on the extension 3d of the vibrating body 3. Thereby, the rotational force of the translucent body 4 when vibrated by the seesaw mode or the like can be increased.
  • the entire vibrating body 3 may be a translucent body.
  • the vibration element 2 is supported by a case member 9 and a seal member 8 at a vibration node.
  • the case member 9 has a first case portion 9a and a second case portion 9b.
  • the first case portion 9a has a substantially ring-shaped bottom portion 19a and an inner wall 19b extending from the inner peripheral edge of the bottom portion 19a.
  • the inner wall 19b extends in a direction orthogonal to the ring-shaped surface of the bottom 19a.
  • a ring-shaped seal member 8 is provided at the tip of the inner wall 19b.
  • the seal member 8 is not particularly limited, but is a sealing rubber in the present embodiment.
  • the second case portion 9b is provided on the bottom portion 19a of the first case portion 9a.
  • the second case portion 9b has an outer wall 19c facing the inner wall 19b and a top plate portion 19d connected to the outer wall 19c, having a ring shape and facing the bottom portion 19a.
  • the outer wall 19c has a step portion.
  • the 2nd case part 9b has the rib 19e extended from the inner periphery of the top-plate part 19d to the said bottom part 19a side.
  • the rib 19e and the seal member 8 are opposed to each other.
  • the vibration element 2 is supported by being sandwiched between the rib 19e of the second case portion 9b and the seal member 8.
  • the configuration of the case member 9 is not limited to the above.
  • the case member 9 may support the vibration element 2 by line contact or may support by point contact.
  • the vibration element 2 is circular in a plan view and vibrates in a seesaw mode. Therefore, a part of the vibration node of the vibration element 2 has a substantially ring shape.
  • the rib 19e and the seal member 8 are provided so as to extend along the vibration node of the vibration element 2.
  • the case member 9 can easily support the vibration node in the vibration element 2. Therefore, the sealing performance of the vibration device 1 can be improved effectively and more reliably.
  • the case member 9 has a gap B so as not to contact the vibration element 2 at a portion other than the rib 19e of the second case portion 9b. Accordingly, it is difficult to further inhibit the vibration of the vibration element 2.
  • the case member 9 of the vibration device 1 is provided with four cylindrical recesses 9x. More specifically, the recess 9x penetrates the bottom portion 19a of the first case portion 9a and reaches the second case portion 9b.
  • the concave portion 9x can be used as a screw hole, and the vibration device 1 can be fixed to the outside by a screw or the like, or can be connected to another case member.
  • the shape and number of the recesses 9x are not limited to the above.
  • the case member 9 may not be provided with the recess 9x.
  • FIG. 7 is a plan view of a piezoelectric vibrator according to a modification of the first embodiment.
  • the piezoelectric vibrator 25 of this modification has a ring-shaped piezoelectric body 26.
  • the piezoelectric vibrator 25 has a first region C and a second region D that are adjacent to each other with the center line S interposed therebetween.
  • the polarization axis direction of the piezoelectric body 26 is the same in any region.
  • a first electrode 27 a is provided in the first region C
  • a second electrode 27 b is provided in the second region D.
  • the second electrode 27 b is provided in the first region C
  • the first electrode 27 a is provided in the second region D.
  • a return electrode 27c is also provided on the other main surface.
  • the second electrode 27b is provided with a notch so that the feedback electrode 27c and the second electrode 27b do not contact each other. But the said notch does not necessarily need to be provided and the return electrode 27c and the other electrode in the piezoelectric vibrator 25 should just not contact.
  • the piezoelectric body 26 may have the polarization axis directions opposite to each other in the first region C and the second region D.
  • an electrode may be provided so that alternating current signals having the same phase are applied to the first region C and the second region D.
  • the second electrode 27b is provided in the first region C and the second region D on one main surface, and the first region C and the second region D on the other main surface are provided with the first electrode.
  • An electrode 27a may be provided.
  • FIG. 8 is a perspective view of the vibration element according to the second embodiment.
  • the vibration device of this embodiment is different from the first embodiment in the configuration of the vibration element 32 and the vibration mode used. Except for the above points, the vibration device of the present embodiment has the same configuration as the vibration device 1 of the first embodiment.
  • the vibration element 32 includes a piezoelectric vibrator 35C and a piezoelectric vibrator 35D that face each other with the opening 3c therebetween.
  • the piezoelectric vibrator 35C and the piezoelectric vibrator 35D are provided on the second main surface 3b of the vibrating body 3 together with the piezoelectric vibrator 5A and the piezoelectric vibrator 5B.
  • a straight line connecting the piezoelectric vibrator 35C and the piezoelectric vibrator 35D is orthogonal to a straight line connecting the piezoelectric vibrator 5A and the piezoelectric vibrator 5B.
  • the piezoelectric vibrator 35C and the piezoelectric vibrator 35D are configured similarly to the piezoelectric vibrator 5A and the piezoelectric vibrator 5B.
  • the phases of vibrations of the piezoelectric vibrators adjacent in the circumferential direction differ by 90 °.
  • the vibration phases of the piezoelectric vibrator 5A and the piezoelectric vibrator 5B facing each other are different by 180 °.
  • the phases of the vibrations of the piezoelectric vibrator 35C and the piezoelectric vibrator 35D facing each other are also different by 180 °.
  • the vibration element 32 vibrates in the turning mode.
  • the swivel mode is a vibration mode in which the rotation axis rotates at a constant cycle with the vibration element line extending in the radial direction of the vibration element as a rotation axis and the center of the vibration element as an axis. It is.
  • the vibration node 32 since the vibration element 32 vibrates in the turning mode, the vibration node has a substantially ring-shaped portion. Therefore, similarly to the first embodiment, the vibration node in the vibration element 32 can be easily supported, and the sealing performance of the vibration device can be improved effectively and more reliably.
  • the vibration device of the present embodiment also includes the transparent electrode layer 15 and the dielectric layer 16 provided on the light transmitting body 4 and the voltage application circuit 14 similar to that of the first embodiment, Water droplets can be reliably moved in a certain direction. Accordingly, it is possible to move water droplets and the like more reliably outside the field of view of the image sensor without depending on the difference in surface tension at each position.
  • the vibration mode of a vibration element is not limited to these.
  • a vibration mode of torsional vibration may be used.
  • torsional vibration is a vibration mode in which, for example, one main surface and the other main surface rotate in the circumferential direction and in opposite directions.
  • the vibration devices according to the third to fifth embodiments also include the transparent electrode layer and the dielectric layer provided on the light transmitting body and the voltage application circuit similar to that of the first embodiment, It is possible to move water droplets and the like more reliably out of the field of view of the image sensor without depending on the difference in surface tension.
  • FIG. 9 is a front sectional view of the vibration device according to the third embodiment.
  • the vibration element 42 in the present embodiment includes a first vibration body 43A and a second vibration body 43B that face each other.
  • the first vibrating body 43A has the same configuration as that of the vibrating body 3 in the first embodiment, and the translucent body 4 is provided on the extension 3d of the first vibrating body 43A.
  • the second vibrating body 43B has a configuration similar to that of the first vibrating body 43A except that the extension portion is not provided.
  • the vibration element 42 of the present embodiment vibrates in the seesaw mode or the turning mode.
  • the vibration element 42 is disposed between the first vibration body 43A and the second vibration body 43B, and a support body 43c that connects the first vibration body 43A and the second vibration body 43B is provided.
  • the support body 43c connects the outer peripheral edge of the first vibrating body 43A and the outer peripheral edge of the second vibrating body 43B in the entire circumferential direction.
  • the shape of the support body 43c is a substantially cylindrical shape.
  • the support 43c has an outer surface and an inner surface, and a hinge portion 43d that protrudes radially outward from the outer surface.
  • the vibration device of the present embodiment is supported by the hinge portion 43d.
  • the shape of the support body 43c is not limited to the above.
  • the same piezoelectric vibrator 5A and piezoelectric vibrator 5B as those of the first embodiment are provided on the main surface of the second vibrating body 43B located outside the vibration device.
  • the piezoelectric vibrator 5A and the piezoelectric vibrator 5B may be provided on the main surface of the second vibrating body 43B on the first vibrating body 43A side.
  • the vibration element 42 may include the ring-shaped piezoelectric vibrator 25 illustrated in FIG.
  • the vibration node in the seesaw mode or the turning mode is located not on the first vibrating body 43A but on the hinge portion 43d.
  • FIG. 10 is a front sectional view of the vibration device according to the fourth embodiment. Note that the piezoelectric vibrator is omitted in FIG. 10 and FIGS. 11 and 12 described later.
  • the vibration device of the present embodiment includes a lens module 58.
  • the lens module 58 includes a lens 58a and a lens holder 58b that holds the lens 58a.
  • the translucent body 54 of the vibration element 52 is a dome cover.
  • the vibrating body 53 has a ring shape and does not have the extension portion.
  • a transparent electrode layer 55 is provided so as to cover the outer surface of the dome-shaped translucent body 54.
  • a dielectric layer 56 is provided on the transparent electrode layer 55. In plan view, the transparent electrode layer 55 and the dielectric layer 56 cover the entire light transmitting body 54.
  • the vibration element 52 is supported by the case member 59.
  • the case member 59 of the present embodiment includes a rib that supports the first main surface 3a of the vibrating body 53 and a rib that supports the second main surface 3b. Also in this embodiment, as in the first embodiment, the case member 59 supports the vibration element 52 at the vibration node.
  • the vibration device of the present embodiment has a bottom plate 57, and a case member 59 and a lens holder 58 b are provided on the bottom plate 57.
  • the lens module 58 is disposed in an internal space surrounded by the vibration element 52, the case member 59, and the bottom plate 57.
  • FIG. 11 is a front sectional view of the vibration device according to the fifth embodiment.
  • This embodiment is different from the fourth embodiment in that the inner periphery of the vibrating body 53 is joined to the lens holder 58b and does not have a dome cover.
  • a transparent electrode layer 55 is provided so as to cover the outer surface of the lens 58a as a light transmitting body portion.
  • a dielectric layer 56 is provided on the transparent electrode layer 55. In plan view, the transparent electrode layer 55 and the dielectric layer 56 cover the entire lens 58a.
  • FIG. 12 is a front sectional view of an imaging device according to the sixth embodiment of the present invention.
  • the imaging device 60 includes the vibration device 51 of the fifth embodiment and an image sensor 60A.
  • the imaging device 60 has a bottom plate 67, and a lens holder 58 b is provided on the bottom plate 67.
  • the image sensor 60A is disposed in an internal space surrounded by the bottom plate 67, the lens holder 58b, and the lens 58a.
  • the same case member 59 as in the fourth embodiment may be provided.
  • the imaging device 60 by having the vibration device 51, it is possible to move water droplets and the like more reliably outside the field of view of the image sensor 60A without depending on the difference in surface tension at each position.
  • the vibrator is a piezoelectric vibrator, but the vibrator may be, for example, an electromagnetic induction element such as an electromagnetic actuator.
  • an electromagnetic actuator An example in which the vibrator is an electromagnetic actuator will be described below.
  • FIG. 13 is a front sectional view of the vibration device according to the seventh embodiment.
  • the vibrator is an electromagnetic actuator 75.
  • the electromagnetic actuator 75 has a solenoid coil 76 and a magnet 77.
  • the drive circuit and the voltage application circuit are connected to the solenoid coil 76.
  • the shape of the case member 79 is also different from that of the first embodiment. Except for the above points, the vibration device of the present embodiment has the same configuration as the vibration device 1 of the first embodiment.
  • the magnet 77 of the electromagnetic actuator 75 is provided on the second main surface 3 b of the vibrating body 3.
  • the case member 79 of the present embodiment has a support portion 79 a that extends radially inward from the inner surface and supports the solenoid coil 76. Except for the above points, the case member 79 has the same configuration as the case member 59 of the fourth embodiment.
  • the solenoid coil 76 is disposed so as to face the magnet 77.
  • a piezoelectric element may be bonded to the vibration body 3. Alternatively, a part or all of the electromagnetic actuator may be used to generate and output the feedback signal.
  • the vibration device also includes a voltage application circuit that applies a voltage to the transparent electrode layer 15 at a certain timing.
  • a piezoelectric element having a feedback electrode is preferably provided on the vibrating body 3.
  • the vibrating body 83 includes an extension portion 83 d that extends toward the internal space of the vibration device.
  • the magnet 77 is disposed on the outer surface of the extension 83d.
  • the solenoid coil 76 is supported by a support portion 79 a of the case member 79 so as to face the magnet 77. Even in such a case, a water droplet or the like can be moved more reliably without depending on the difference in surface tension at each position.
  • Timing generation circuit 14B Switching circuit 14C ... Power source 15 ... Transparent electrode layer 16 ... Dielectric layer 19a ... Bottom 19b ... Inner wall 19c ... Outer wall 19d ... Top plate portion 19e ... Rib 25 ... Piezoelectric vibrator 26 ... Piezoelectric body 27a ... First electrode 27b ... Second electrode 27c ... Feedback electrode 32 ... Vibrating elements 35C, 35D ... Piezoelectric vibrator 42 ... Vibrating element 43A 1st vibrating body 43B ... 2nd vibrating body 43c ... support body 43d ... hinge part 51 ... vibrating device 52 ... vibrating element 53 ... vibrating body 54 ... translucent body 55 ... transparent electrode layer 56 ... dielectric layer 57 ...
  • bottom plate 58 ... Lens module 58a ... Lens 58b ... Lens holder 59 ... Case member 60 ... Imaging device 60A ... Imaging device 67 ... Bottom plate 72 ... Vibration element 75 ... Electromagnetic actuator 76 ... Solenoid coil 77 ... Magnet 79 ... Case member 79a ... Supporting part 83 ... Vibrating body 83d ... Extension part

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Abstract

Provided is an oscillation device with which it is possible to reliably move water droplets, without relying on differences in surface tension at different positions. This oscillation device 1 comprises: an oscillating element 2 having a oscillating body 3 having a translucent body 4 (translucent body portion) and a piezoelectric oscillator 5A (oscillator) which oscillates the oscillating body 3; a transparent electrode layer 15 provided on the translucent body 4 of the oscillating body 3; a dielectric layer 16 provided on the transparent electrode layer 15; and a voltage application circuit which is electrically connected to the transparent electrode layer 15 and which applies a voltage to the transparent electrode layer 15.

Description

振動装置及び光学検出装置Vibration device and optical detection device
　本発明は、機械的振動によって水滴などを除去することが可能な振動装置及び光学検出装置に関する。 The present invention relates to a vibration device and an optical detection device capable of removing water droplets and the like by mechanical vibration.
　従来、監視装置として用いられるカメラ等のイメージングデバイスにおいては、その視野を常に明瞭にすることが求められている。特に、車載用途等の屋外で使用されるカメラにおいては、雨滴などの水滴を除去するための機構が種々提案されている。下記の特許文献１には、カメラ本体の前方に配置される、透光性部分を有する振動装置が開示されている。上記透光性部分を含む板状体を振動させることにより、水滴を移動させ、かつ霧化する。この振動装置では、高次の共振モードを利用して、板状体の中央部以外の部分に振動の腹が位置するようにしている。ここで、振動に際し、水の板状体に対する表面張力は、振動の腹の部分と振動の節の部分とにおいて異なる。上記各位置における表面張力の差が駆動力となり、水滴が振動の腹に向かい移動し、その後さらに水滴を霧化することにより、視野を確保する。 Conventionally, in an imaging device such as a camera used as a monitoring device, it is required to always make the field of view clear. In particular, for a camera used outdoors such as in-vehicle use, various mechanisms for removing water drops such as raindrops have been proposed. Patent Document 1 below discloses a vibration device having a translucent portion disposed in front of a camera body. By vibrating the plate-like body including the translucent portion, the water droplets are moved and atomized. In this vibration device, a high-order resonance mode is used so that a vibration antinode is located in a portion other than the central portion of the plate-like body. Here, upon vibration, the surface tension of the water plate-like body differs between the vibration antinode portion and the vibration node portion. The difference in surface tension at each position becomes a driving force, the water droplet moves toward the antinode of vibration, and then the water droplet is further atomized to secure a visual field.
特開２０１７－２２９００８号公報JP 2017-229008 A
　しかしながら、特許文献１に記載された振動装置では、上記各位置における表面張力の差を駆動力としているため、水滴の移動のし易さは振動の腹からの距離に依存する。そのため、板状体の中央部など、振動の腹から遠い部分の水滴が残ることがあった。 However, since the vibration device described in Patent Document 1 uses the difference in surface tension at each position as a driving force, the ease of movement of water droplets depends on the distance from the antinode of vibration. For this reason, water droplets at portions far from the vibration belly, such as the central portion of the plate-like body, may remain.
　他方、水滴を確実に除去するために振幅を大きくする場合には、駆動電圧を大きくする必要があり、効率が低くなるという問題があった。 On the other hand, when the amplitude is increased in order to surely remove water droplets, it is necessary to increase the driving voltage, resulting in a problem that efficiency is lowered.
　本発明の目的は、各位置における表面張力の差に依存せず、水滴を確実に移動させることができる、振動装置及び光学検出装置を提供することにある。 An object of the present invention is to provide a vibration device and an optical detection device that can reliably move a water droplet without depending on a difference in surface tension at each position.
　本発明に係る振動装置は、透光体部を有する振動体と、前記振動体を振動させる振動子とを有する振動素子と、前記振動体の前記透光体部上に設けられている透明電極層と、前記透明電極層上に設けられている誘電体層と、前記透明電極層に電気的に接続されており、前記透明電極層に電圧を印加する電圧印加回路とを備える。 A vibrating device according to the present invention includes a vibrating element having a light transmitting body portion, a vibrating element having a vibrator that vibrates the vibrating body, and a transparent electrode provided on the light transmitting body portion of the vibrating body. A layer, a dielectric layer provided on the transparent electrode layer, and a voltage application circuit that is electrically connected to the transparent electrode layer and applies a voltage to the transparent electrode layer.
　本発明に係る光学検出装置は、本発明に従い構成された振動装置と、前記透光体部に検出領域が含まれるように配置されている光学検出素子とを備える。 An optical detection device according to the present invention includes a vibration device configured according to the present invention and an optical detection element arranged so that a detection region is included in the light transmitting body portion.
　本発明によれば、各位置における表面張力の差に依存せず、水滴を確実に移動させることができる、振動装置及び光学検出装置を提供することができる。 According to the present invention, it is possible to provide a vibration device and an optical detection device that can reliably move a water droplet without depending on a difference in surface tension at each position.
図１は、本発明の第１の実施形態に係る振動装置の模式的部分切欠き斜視図である。FIG. 1 is a schematic partially cutaway perspective view of the vibration device according to the first embodiment of the present invention. 図２は、本発明の第１の実施形態に係る振動装置を有するイメージングデバイスの正面断面図である。FIG. 2 is a front sectional view of the imaging device having the vibration device according to the first embodiment of the present invention. 図３は、本発明の第１の実施形態における振動素子の斜視図である。FIG. 3 is a perspective view of the resonator element according to the first embodiment of the invention. 図４は、本発明の第１の実施形態における駆動回路及び電圧印加回路の模式的回路図である。FIG. 4 is a schematic circuit diagram of the drive circuit and the voltage application circuit in the first embodiment of the present invention. 図５は、本発明の第１の実施形態における振動素子の振動モードを説明するための、振動素子の模式的正面断面図である。FIG. 5 is a schematic front cross-sectional view of a vibration element for explaining a vibration mode of the vibration element in the first embodiment of the present invention. 図６は、本発明の第１の実施形態における振動素子の振動モードを説明するための、振動素子の模式的斜視図である。FIG. 6 is a schematic perspective view of the vibration element for explaining a vibration mode of the vibration element in the first embodiment of the present invention. 図７は、本発明の第１の実施形態の変形例における圧電振動子の平面図である。FIG. 7 is a plan view of a piezoelectric vibrator according to a modification of the first embodiment of the present invention. 図８は、本発明の第２の実施形態における振動素子の斜視図である。FIG. 8 is a perspective view of a vibration element according to the second embodiment of the present invention. 図９は、本発明の第３の実施形態に係る振動装置の正面断面図である。FIG. 9 is a front cross-sectional view of a vibration device according to a third embodiment of the present invention. 図１０は、本発明の第４の実施形態に係る振動装置の正面断面図である。FIG. 10 is a front sectional view of a vibration device according to the fourth embodiment of the present invention. 図１１は、本発明の第５の実施形態に係る振動装置の正面断面図である。FIG. 11 is a front cross-sectional view of a vibration device according to a fifth embodiment of the present invention. 図１２は、本発明の第６の実施形態に係るイメージングデバイスの正面断面図である。FIG. 12 is a front sectional view of an imaging device according to the sixth embodiment of the present invention. 図１３は、本発明の第７の実施形態に係る振動装置の正面断面図である。FIG. 13 is a front sectional view of the vibration device according to the seventh embodiment of the present invention. 図１４は、本発明の第７の実施形態の変形例に係る振動装置の正面断面図である。FIG. 14 is a front cross-sectional view of a vibration device according to a modification of the seventh embodiment of the present invention.
　以下、図面を参照しつつ、本発明の具体的な実施形態を説明することにより、本発明を明らかにする。 Hereinafter, the present invention will be clarified by describing specific embodiments of the present invention with reference to the drawings.
　なお、本明細書に記載の各実施形態は、例示的なものであり、異なる実施形態間において、構成の部分的な置換または組み合わせが可能であることを指摘しておく。 It should be pointed out that each embodiment described in this specification is an example, and a partial replacement or combination of configurations is possible between different embodiments.
　図１は、第１の実施形態に係る振動装置の模式的部分切欠き斜視図である。 FIG. 1 is a schematic partially cutaway perspective view of the vibration device according to the first embodiment.
　図１に示す振動装置１は、振動により水滴や異物を移動させ、撮像素子の視野内から水滴や異物を除去する振動装置である。振動装置１は、振動素子２と、振動素子２を保持するケース部材９と、駆動回路１３及び電圧印加回路１４とを有する。駆動回路１３及び電圧印加回路１４は振動素子２に電気的に接続されている。 The vibration device 1 shown in FIG. 1 is a vibration device that removes water droplets and foreign matter from the field of view of the image sensor by moving the water droplets and foreign matter by vibration. The vibration device 1 includes a vibration element 2, a case member 9 that holds the vibration element 2, a drive circuit 13, and a voltage application circuit 14. The drive circuit 13 and the voltage application circuit 14 are electrically connected to the vibration element 2.
　図２は、第１の実施形態に係る振動装置を有するイメージングデバイスの正面断面図である。なお、図１以外の斜視図や断面図においては、駆動回路及び電圧印加回路を省略することがある。 FIG. 2 is a front sectional view of an imaging device having the vibration device according to the first embodiment. Note that the drive circuit and the voltage application circuit may be omitted in perspective views and cross-sectional views other than FIG.
　振動素子２及びケース部材９により囲まれた内部空間内に、一点鎖線で示す撮像素子１０Ａが配置されている。それによって、本発明の一実施形態に係る光学検出装置としてのイメージングデバイス１０が構成されている。イメージングデバイス１０は振動装置１及び撮像素子１０Ａを有する。撮像素子１０Ａとしては、例えば、可視領域から遠赤外領域のいずれかの波長の光を受光する、ＣＭＯＳ、ＣＣＤ、ボロメーターやサーモパイルなどを挙げることができる。イメージングデバイス１０としては、例えば、カメラ、ＲａｄａｒやＬＩＤＡＲデバイスなどを挙げることができる。 In an internal space surrounded by the vibration element 2 and the case member 9, an image pickup element 10A indicated by a one-dot chain line is disposed. Thereby, an imaging device 10 as an optical detection apparatus according to an embodiment of the present invention is configured. The imaging device 10 includes the vibration device 1 and an image sensor 10A. Examples of the image pickup element 10A include a CMOS, a CCD, a bolometer, a thermopile, and the like that receive light of any wavelength from the visible region to the far infrared region. Examples of the imaging device 10 include a camera, a Radar, a LIDAR device, and the like.
　なお、上記内部空間内には、撮像素子１０Ａ以外の、エネルギー線を光学的に検出する光学検出素子が配置されていてもよい。検出するエネルギー線としては、例えば、電磁波や赤外線などの活性エネルギー線であってもよい。光学検出素子の検出領域は、後述する透光体部に含まれる。図２に示すイメージングデバイス１０においては、撮像素子１０Ａの視野が検出領域であり、透光体部に含まれている。 In the internal space, an optical detection element that optically detects energy rays other than the imaging element 10A may be arranged. As an energy ray to detect, active energy rays, such as electromagnetic waves and infrared rays, may be used, for example. The detection region of the optical detection element is included in a light transmitting body portion to be described later. In the imaging device 10 shown in FIG. 2, the visual field of the image sensor 10 </ b> A is a detection region and is included in the translucent part.
　図３は、第１の実施形態における振動素子の斜視図である。 FIG. 3 is a perspective view of the vibration element according to the first embodiment.
　振動素子２は略円板状である。より具体的には、振動素子２は、中央部に開口部３ｃを有する略円板状の振動体３を有する。振動体３は、対向し合う第１の主面３ａ及び第２の主面３ｂを有する。第１の主面３ａは振動装置１における外側の主面であり、第２の主面３ｂは上記内部空間側の主面である。開口部３ｃの第１の主面３ａにおける外周縁から、第１の主面３ａに垂直な方向に、延長部３ｄが延びている。なお、延長部３ｄは設けられていなくともよい。 The vibration element 2 has a substantially disk shape. More specifically, the vibration element 2 includes a substantially disk-shaped vibration body 3 having an opening 3c at the center. The vibrating body 3 has a first main surface 3a and a second main surface 3b facing each other. The first main surface 3a is an outer main surface of the vibration device 1, and the second main surface 3b is a main surface on the inner space side. An extension 3d extends from the outer peripheral edge of the opening 3c on the first main surface 3a in a direction perpendicular to the first main surface 3a. Note that the extension 3d may not be provided.
　図２に戻り、振動体３の延長部３ｄ上に、開口部３ｃを覆うように、透光体部としての透光体４が設けられている。透光体４は透光性材料からなる。透光性材料としては、例えば、透光性のプラスチック、ガラスまたは透光性のセラミックスなどを用いることができる。 Referring back to FIG. 2, a translucent body 4 serving as a translucent body is provided on the extension 3 d of the vibrating body 3 so as to cover the opening 3 c. The light transmitting body 4 is made of a light transmitting material. As the translucent material, for example, translucent plastic, glass, translucent ceramics, or the like can be used.
　透光体４上には透明電極層１５が設けられている。透明電極層１５上には誘電体層１６が設けられている。より具体的には、平面視において、透光体４の全面を覆うように、透明電極層１５が設けられている。同様に、平面視において、透光体４及び透明電極層１５の全面を覆うように、誘電体層１６が設けられている。 A transparent electrode layer 15 is provided on the translucent body 4. A dielectric layer 16 is provided on the transparent electrode layer 15. More specifically, the transparent electrode layer 15 is provided so as to cover the entire surface of the transparent body 4 in plan view. Similarly, the dielectric layer 16 is provided so as to cover the entire surface of the transparent body 4 and the transparent electrode layer 15 in plan view.
　本実施形態では、透明電極層１５は、例えば、ＩＴＯやＺｎＯなどの透明電極材料からなる。誘電体層１６は酸化ケイ素からなる。なお、誘電体層１６の材料は上記に限定されず、透光性を有する適宜の誘電体を用いることができる。なお、本明細書における透光性とは、少なくとも上記光学検出素子が検出する波長のエネルギー線や光が透過する透光性をいう。 In the present embodiment, the transparent electrode layer 15 is made of a transparent electrode material such as ITO or ZnO, for example. The dielectric layer 16 is made of silicon oxide. The material of the dielectric layer 16 is not limited to the above, and an appropriate dielectric having translucency can be used. In addition, the translucency in this specification means the translucency which transmits the energy beam and light of the wavelength which the said optical detection element detects at least.
　図１に示すように、透明電極層１５は、電圧印加回路１４に電気的に接続されている。電圧印加回路１４は、透明電極層１５に一定のタイミングにおいて電圧を印加する。 As shown in FIG. 1, the transparent electrode layer 15 is electrically connected to the voltage application circuit 14. The voltage application circuit 14 applies a voltage to the transparent electrode layer 15 at a certain timing.
　本実施形態においては、平面視における振動体３及び透光体４の形状は円形であるが、これに限定されず、略楕円形であってもよく、あるいは矩形や多角形などであってもよい。透光体４は円板状であるが、ドーム状などであってもよい。 In the present embodiment, the shapes of the vibrating body 3 and the translucent body 4 in a plan view are circular, but are not limited to this, and may be substantially elliptical, or may be rectangular or polygonal. Good. The translucent body 4 has a disc shape, but may have a dome shape or the like.
　図２に示すように、振動体３の第２の主面３ｂ上には、圧電振動子５Ａ及び圧電振動子５Ｂが、開口部３ｃを隔てて対向し合うように設けられている。 2, the piezoelectric vibrator 5A and the piezoelectric vibrator 5B are provided on the second main surface 3b of the vibrating body 3 so as to face each other with the opening 3c therebetween.
　圧電振動子５Ａは矩形板状の圧電体６を有する。圧電体６は、例えば、Ｐｂ（Ｚｒ，Ｔｉ）Ｏ３や（Ｋ，Ｎａ）ＮｂＯ３などの適宜の圧電セラミックスまたはＬｉＴａＯ３やＬｉＮｂＯ３などの適宜の圧電単結晶からなる。なお、圧電体６の形状は上記に限定されない。 The piezoelectric vibrator 5A has a rectangular plate-like piezoelectric body 6. The piezoelectric body 6 is made of, for example, an appropriate piezoelectric ceramic such as Pb (Zr, Ti) O 3 or (K, Na) NbO 3 or an appropriate piezoelectric single crystal such as LiTaO 3 or LiNbO 3 . The shape of the piezoelectric body 6 is not limited to the above.
　圧電振動子５Ａは、圧電体６の一方主面上に設けられている第１の電極７ａ及び帰還電極７ｃを有する。第１の電極７ａ及び帰還電極７ｃは分割して設けられている。圧電振動子５Ａは、圧電体６の他方主面上に、第１の電極７ａに対向するように設けられている第２の電極７ｂを有する。本実施形態では、第１の電極７ａ及び帰還電極７ｃが上記駆動回路１３に電気的に接続されている。第２の電極７ｂはグラウンド電位に接続される。 The piezoelectric vibrator 5A includes a first electrode 7a and a feedback electrode 7c provided on one main surface of the piezoelectric body 6. The first electrode 7a and the return electrode 7c are provided separately. The piezoelectric vibrator 5A has a second electrode 7b provided on the other main surface of the piezoelectric body 6 so as to face the first electrode 7a. In the present embodiment, the first electrode 7 a and the feedback electrode 7 c are electrically connected to the drive circuit 13. The second electrode 7b is connected to the ground potential.
　圧電振動子５Ｂも圧電振動子５Ａと同様に構成されている。圧電振動子５Ａは、第２の電極７ｂ側において振動体３に接合されており、圧電振動子５Ｂは、第１の電極及び帰還電極側において振動体３に接合されている。これにより、圧電振動子５Ａ及び圧電振動子５Ｂは振動体３に対して互いに反対方向に振動し、かつ振動体３を振動させる。 The piezoelectric vibrator 5B is configured similarly to the piezoelectric vibrator 5A. The piezoelectric vibrator 5A is bonded to the vibrating body 3 on the second electrode 7b side, and the piezoelectric vibrator 5B is bonded to the vibrating body 3 on the first electrode and feedback electrode side. Accordingly, the piezoelectric vibrator 5A and the piezoelectric vibrator 5B vibrate in the opposite directions with respect to the vibrating body 3 and vibrate the vibrating body 3.
　本実施形態の特徴は、透光体４上に透明電極層１５及び誘電体層１６が設けられており、かつ透明電極層１５に一定のタイミングにおいて電圧を印加する電圧印加回路１４を有することにある。それによって、上述した各位置における表面張力の差に依存せず、撮像素子の視野外に水滴などをより確実に移動させることができる。この詳細を以下において説明する。 The feature of this embodiment is that the transparent electrode layer 15 and the dielectric layer 16 are provided on the transparent body 4, and the voltage application circuit 14 that applies a voltage to the transparent electrode layer 15 at a certain timing is provided. is there. Accordingly, it is possible to move water droplets and the like more reliably outside the field of view of the image sensor without depending on the difference in surface tension at each position described above. Details will be described below.
　図４は、第１の実施形態における駆動回路及び電圧印加回路の模式的回路図である。なお、図４においては、１つの圧電振動子との接続の形態を示すが、駆動回路及び電圧印加回路は他の圧電振動子とも同様に接続されている。 FIG. 4 is a schematic circuit diagram of the drive circuit and the voltage application circuit in the first embodiment. FIG. 4 shows a connection form with one piezoelectric vibrator, but the drive circuit and the voltage application circuit are similarly connected to other piezoelectric vibrators.
　振動装置１は図４に示す回路１２を有する。回路１２は上記駆動回路１３及び上記電圧印加回路１４を有する。さらに、回路１２は、駆動回路１３及び電圧印加回路１４と、圧電振動子５Ａの帰還電極７ｃとの間に接続されている増幅器を有する。 The vibration device 1 has a circuit 12 shown in FIG. The circuit 12 includes the drive circuit 13 and the voltage application circuit 14. Further, the circuit 12 includes an amplifier connected between the drive circuit 13 and the voltage application circuit 14 and the feedback electrode 7c of the piezoelectric vibrator 5A.
　駆動回路１３は、振動素子２を共振状態とするように、圧電振動子５Ａに電気信号を印加する。駆動回路１３は、上記増幅器に接続されている位相回路１３Ａを有する。駆動回路１３は、位相回路１３Ａと圧電振動子５Ａの第１の電極７ａとの間に接続されている増幅回路１３Ｂを有する。本実施形態においては、増幅器、駆動回路１３及び圧電振動子５Ａにより、自励振回路が構成されている。なお、駆動回路１３の構成及び駆動回路１３と圧電振動子５Ａとの接続の形態は上記に限定されない。駆動回路１３は、圧電振動子５Ｂにも、圧電振動子５Ａと同様に電気信号を印加する。 The drive circuit 13 applies an electric signal to the piezoelectric vibrator 5A so that the vibration element 2 is in a resonance state. The drive circuit 13 has a phase circuit 13A connected to the amplifier. The drive circuit 13 includes an amplifier circuit 13B connected between the phase circuit 13A and the first electrode 7a of the piezoelectric vibrator 5A. In the present embodiment, a self-excited circuit is configured by the amplifier, the drive circuit 13, and the piezoelectric vibrator 5A. The configuration of the drive circuit 13 and the form of connection between the drive circuit 13 and the piezoelectric vibrator 5A are not limited to the above. The drive circuit 13 applies an electrical signal to the piezoelectric vibrator 5B as well as the piezoelectric vibrator 5A.
　電圧印加回路１４は、上記増幅器に接続されているタイミング生成回路１４Ａを有する。電圧印加回路１４は、タイミング生成回路１４Ａと透明電極層１５との間に接続されているスイッチング回路１４Ｂを有する。さらに、電圧印加回路１４は、スイッチング回路１４Ｂに接続されている電源１４Ｃを有する。電源１４Ｃは、スイッチング回路１４Ｂを介して透明電極層１５に接続されている。 The voltage application circuit 14 includes a timing generation circuit 14A connected to the amplifier. The voltage application circuit 14 includes a switching circuit 14B connected between the timing generation circuit 14A and the transparent electrode layer 15. Further, the voltage application circuit 14 has a power source 14C connected to the switching circuit 14B. The power source 14C is connected to the transparent electrode layer 15 via the switching circuit 14B.
　タイミング生成回路１４Ａは、圧電振動子５Ａから出力された帰還信号に応じた一定のタイミングにおいて、電気信号をスイッチング回路１４Ｂに印加する。電気信号が印加されている間、スイッチング回路１４ＢはＯＮの状態となり、電源１４Ｃから透明電極層１５に電圧が印加される。他方、スイッチング回路１４Ｂにタイミング生成回路１４Ａから電気信号が印加されていない状態においては、スイッチング回路１４ＢはＯＦＦの状態であり、透明電極層１５に電圧は印加されない。 The timing generation circuit 14A applies an electrical signal to the switching circuit 14B at a certain timing according to the feedback signal output from the piezoelectric vibrator 5A. While the electrical signal is being applied, the switching circuit 14B is in an ON state, and a voltage is applied to the transparent electrode layer 15 from the power source 14C. On the other hand, when the electrical signal is not applied to the switching circuit 14B from the timing generation circuit 14A, the switching circuit 14B is in an OFF state, and no voltage is applied to the transparent electrode layer 15.
　なお、電圧印加回路１４の構成は上記に限定されず、透明電極層１５に一定のタイミングにおいて電圧を印加する回路であればよい。 The configuration of the voltage application circuit 14 is not limited to the above, and any circuit that applies a voltage to the transparent electrode layer 15 at a certain timing may be used.
　図２に戻り、透明電極層１５に電圧が印加されたとき、誘電体層１６が分極される。これにより、誘電体層１６に付着した水滴などの誘電体層１６に対する表面張力が変化する。本実施形態においては、一定のタイミングにおいて上記表面張力が変化するため、振動素子２の振動によって水滴などを一定の方向に、より確実に移動させることができる。従って、上述した水滴などの往復運動を生じ難くすることができ、撮像素子の視野外に、水滴などをより確実に移動させることができる。 Returning to FIG. 2, when a voltage is applied to the transparent electrode layer 15, the dielectric layer 16 is polarized. As a result, the surface tension of the dielectric layer 16 such as water droplets attached to the dielectric layer 16 changes. In the present embodiment, since the surface tension changes at a certain timing, it is possible to move water droplets and the like more reliably in a certain direction by the vibration of the vibration element 2. Therefore, it is possible to make it difficult for the above-described reciprocating motion of water droplets or the like, and it is possible to move the water droplets or the like more reliably outside the field of view of the image sensor.
　以下において、本実施形態における振動素子２の振動モードを説明する。 Hereinafter, the vibration mode of the vibration element 2 in the present embodiment will be described.
　図５は、第１の実施形態における振動素子の振動モードを説明するための、振動素子の模式的正面断面図である。図６は、第１の実施形態における振動素子の振動モードを説明するための、振動素子の模式的斜視図である。図５及び図６においては、実線により振動素子の初期の状態を示し、一点鎖線により振動素子が振動している状態を示す。なお、透光体、透明電極層及び誘電体層は省略している。図６において、破線で囲まれた部分が振動の節である。 FIG. 5 is a schematic front cross-sectional view of the vibration element for explaining the vibration mode of the vibration element in the first embodiment. FIG. 6 is a schematic perspective view of the vibration element for explaining a vibration mode of the vibration element in the first embodiment. 5 and 6, the initial state of the vibration element is indicated by a solid line, and the vibration element is vibrated by a dashed line. Note that the light transmitting body, the transparent electrode layer, and the dielectric layer are omitted. In FIG. 6, a portion surrounded by a broken line is a vibration node.
　図５及び図６に示すように、本実施形態の振動素子２は、駆動回路１３によって、シーソーモードにより振動する。本明細書においてシーソーモードとは、振動素子の径方向に延びる振動の節のラインを回転軸として振動する振動モードをいう。振動の節が振動素子２の中心に位置することにより、振動の腹が振動素子２の中心以外の部分に位置する。なお、本実施形態における振動モードは、径方向に延びる１本の振動の節のラインに加えて、周回方向に延びる１本の振動の節のラインを有するシーソーモードである。 As shown in FIG. 5 and FIG. 6, the vibration element 2 of this embodiment vibrates in the seesaw mode by the drive circuit 13. In this specification, the seesaw mode refers to a vibration mode that vibrates with a vibration node line extending in the radial direction of the vibration element as a rotation axis. Since the vibration node is located at the center of the vibration element 2, the vibration antinode is located at a portion other than the center of the vibration element 2. Note that the vibration mode in the present embodiment is a seesaw mode having one vibration node line extending in the circumferential direction in addition to one vibration node line extending in the radial direction.
　径方向に延びる振動の節のラインを回転軸とした回転振動により、水滴などに、図５中における左右の方向に加速度が加わる。定在振動であれば、一方の方向に加速度が加わった後、反対の方向に同じ加速度が加わることが繰り返されるため、水滴などは一定の位置の範囲において往復する。この場合、水滴などは上記一定の位置の範囲からは移動しない。なお、振幅が大きい場合には、振動の腹の部分と振動の節の部分とにおける、水滴などの振動素子２に対する表面張力の差が大きくなる。この場合には、表面張力の差を駆動力として、水滴などは振動の腹に向かい移動し得る。しかしながら、上述したように、一部の水滴などは残ることがある。残った水滴などは、一定の位置の範囲において往復し続けることとなる。 Acceleration is applied to water droplets and the like in the left and right directions in FIG. 5 by rotational vibration with a vibration node line extending in the radial direction as a rotation axis. In the case of standing vibration, since acceleration is applied in one direction and then the same acceleration is applied in the opposite direction, water droplets and the like reciprocate in a certain position range. In this case, a water droplet or the like does not move from the fixed position range. When the amplitude is large, the difference in surface tension with respect to the vibration element 2 such as a water drop between the vibration antinode and the vibration node increases. In this case, water droplets or the like can move toward the vibration belly using the difference in surface tension as a driving force. However, as described above, some water droplets may remain. The remaining water droplets and the like continue to reciprocate within a certain range.
　本実施形態においては、上記のように振動素子２が振動しているときに、一定のタイミングにおいて透明電極層１５に電圧を加え、水滴などの誘電体層１６に対する表面張力を変化させる。それによって、撮像素子の視野外に、水滴などをより確実に移動させることができる。 In the present embodiment, when the vibration element 2 is vibrating as described above, a voltage is applied to the transparent electrode layer 15 at a certain timing to change the surface tension of the dielectric layer 16 such as water droplets. Thereby, a water droplet or the like can be moved more reliably outside the field of view of the image sensor.
　本実施形態では、振動の腹の部分と振動の節の部分とにおける表面張力の差に依存せず、水滴をより確実に移動させることができる。このように、上記各位置における表面張力の差が大きくなる程の振幅とする必要がないため、水滴を効率的に移動させることができる。 In this embodiment, it is possible to move the water droplets more reliably without depending on the difference in surface tension between the vibration antinode portion and the vibration node portion. Thus, since it is not necessary to set it as the amplitude which the difference of the surface tension in each said position becomes large, a water droplet can be moved efficiently.
　上述したように、本実施形態では、平面視において、透光体４の全体を覆うように透明電極層１５及び誘電体層１６が設けられている。それによって、撮像素子の視野外に、水滴などを効果的に移動させることができる。なお、透明電極層１５及び誘電体層１６は、透光体４の少なくとも一部を覆うように設けられていればよい。透明電極層１５及び誘電体層１６は、撮像素子の視野の少なくとも一部に位置するように設けられていることが好ましい。もっとも、本実施形態のように、透明電極層１５及び誘電体層１６は、撮像素子の視野の全体に位置するように設けられていることがより好ましい。透明電極層１５及び誘電体層１６は、振動素子２の透光体部である透光体４上だけではなく、透光体部以外の振動体３上に設けられていてもよい。 As described above, in the present embodiment, the transparent electrode layer 15 and the dielectric layer 16 are provided so as to cover the entire light transmitting body 4 in plan view. Thereby, water droplets and the like can be effectively moved out of the field of view of the image sensor. In addition, the transparent electrode layer 15 and the dielectric material layer 16 should just be provided so that at least one part of the transparent body 4 may be covered. The transparent electrode layer 15 and the dielectric layer 16 are preferably provided so as to be located in at least a part of the field of view of the imaging device. However, as in the present embodiment, it is more preferable that the transparent electrode layer 15 and the dielectric layer 16 are provided so as to be positioned in the entire field of view of the imaging device. The transparent electrode layer 15 and the dielectric layer 16 may be provided not only on the light transmitting body 4 that is the light transmitting body portion of the vibration element 2 but also on the vibrating body 3 other than the light transmitting body portion.
　本実施形態では、振動体３の延長部３ｄ上に透光体４が設けられている。それによって、シーソーモードなどにより振動した際の、透光体４の回転力を大きくすることができる。もっとも、振動体３全体が透光体部であってもよい。 In the present embodiment, the translucent body 4 is provided on the extension 3d of the vibrating body 3. Thereby, the rotational force of the translucent body 4 when vibrated by the seesaw mode or the like can be increased. However, the entire vibrating body 3 may be a translucent body.
　図２に示すように、振動素子２はケース部材９及びシール部材８により、振動の節において支持されている。より具体的には、ケース部材９は第１のケース部９ａ及び第２のケース部９ｂを有する。第１のケース部９ａは、略リング状の底部１９ａと、底部１９ａの内周縁から延びている内壁１９ｂとを有する。内壁１９ｂは、底部１９ａのリング状の面に直交する方向に延びている。内壁１９ｂの先端にリング状のシール部材８が設けられている。シール部材８は、特に限定されないが、本実施形態ではシーリングゴムである。 As shown in FIG. 2, the vibration element 2 is supported by a case member 9 and a seal member 8 at a vibration node. More specifically, the case member 9 has a first case portion 9a and a second case portion 9b. The first case portion 9a has a substantially ring-shaped bottom portion 19a and an inner wall 19b extending from the inner peripheral edge of the bottom portion 19a. The inner wall 19b extends in a direction orthogonal to the ring-shaped surface of the bottom 19a. A ring-shaped seal member 8 is provided at the tip of the inner wall 19b. The seal member 8 is not particularly limited, but is a sealing rubber in the present embodiment.
　第２のケース部９ｂは第１のケース部９ａの底部１９ａ上に設けられている。第２のケース部９ｂは、上記内壁１９ｂに対向する外壁１９ｃと、外壁１９ｃに接続されており、リング状であり、かつ上記底部１９ａに対向する天板部１９ｄを有する。本実施形態では、外壁１９ｃは段差部を有する。第２のケース部９ｂは、天板部１９ｄの内周縁から上記底部１９ａ側に延びるリブ１９ｅを有する。リブ１９ｅとシール部材８とは対向している。振動素子２は、第２のケース部９ｂのリブ１９ｅ及びシール部材８によって挟まれることにより支持されている。なお、ケース部材９の構成は上記に限定されない。ケース部材９は、振動素子２を線接触により支持していてもよく、点接触により支持していてもよい。 The second case portion 9b is provided on the bottom portion 19a of the first case portion 9a. The second case portion 9b has an outer wall 19c facing the inner wall 19b and a top plate portion 19d connected to the outer wall 19c, having a ring shape and facing the bottom portion 19a. In the present embodiment, the outer wall 19c has a step portion. The 2nd case part 9b has the rib 19e extended from the inner periphery of the top-plate part 19d to the said bottom part 19a side. The rib 19e and the seal member 8 are opposed to each other. The vibration element 2 is supported by being sandwiched between the rib 19e of the second case portion 9b and the seal member 8. The configuration of the case member 9 is not limited to the above. The case member 9 may support the vibration element 2 by line contact or may support by point contact.
　図６に示したように、振動素子２は平面視において円形であり、かつシーソーモードにより振動する。そのため、振動素子２の振動の節の一部は略リング状となる。上記リブ１９ｅ及び上記シール部材８は、振動素子２の振動の節に沿い延びるように設けられている。本実施形態では、振動の節が略リング状という単純な形状となるため、ケース部材９は、振動素子２における振動の節を容易に支持することができる。従って、振動装置１の密閉性を効果的に、かつより一層確実に高めることができる。 As shown in FIG. 6, the vibration element 2 is circular in a plan view and vibrates in a seesaw mode. Therefore, a part of the vibration node of the vibration element 2 has a substantially ring shape. The rib 19e and the seal member 8 are provided so as to extend along the vibration node of the vibration element 2. In the present embodiment, since the vibration node has a simple ring shape, the case member 9 can easily support the vibration node in the vibration element 2. Therefore, the sealing performance of the vibration device 1 can be improved effectively and more reliably.
　本実施形態のように、ケース部材９は、第２のケース部９ｂのリブ１９ｅ以外の部分において振動素子２に接しないように、空隙部Ｂを有することが好ましい。それによって、振動素子２の振動をより一層阻害し難い。 As in the present embodiment, it is preferable that the case member 9 has a gap B so as not to contact the vibration element 2 at a portion other than the rib 19e of the second case portion 9b. Accordingly, it is difficult to further inhibit the vibration of the vibration element 2.
　振動装置１のケース部材９には、円筒形の凹部９ｘが４つ設けられている。より具体的には、凹部９ｘは、第１のケース部９ａの底部１９ａを貫通しており、かつ第２のケース部９ｂ内に至っている。例えば、凹部９ｘを螺子穴として、螺子などにより振動装置１を外部に固定することができ、あるいは他のケース部材に接続することもできる。なお、凹部９ｘの形状及び個数は上記に限定されない。ケース部材９には凹部９ｘは設けられていなくともよい。 The case member 9 of the vibration device 1 is provided with four cylindrical recesses 9x. More specifically, the recess 9x penetrates the bottom portion 19a of the first case portion 9a and reaches the second case portion 9b. For example, the concave portion 9x can be used as a screw hole, and the vibration device 1 can be fixed to the outside by a screw or the like, or can be connected to another case member. The shape and number of the recesses 9x are not limited to the above. The case member 9 may not be provided with the recess 9x.
　図７は、第１の実施形態の変形例における圧電振動子の平面図である。 FIG. 7 is a plan view of a piezoelectric vibrator according to a modification of the first embodiment.
　本変形例の圧電振動子２５はリング状の圧電体２６を有する。圧電振動子２５は、中心線Ｓを介して隣り合う第１の領域Ｃ及び第２の領域Ｄを有する。圧電体２６の分極軸方向は、どの領域においても同じ方向である。圧電体２６の一方主面上においては、第１の領域Ｃに第１の電極２７ａが設けられており、第２の領域Ｄに第２の電極２７ｂが設けられている。圧電体２６の他方主面上においては、第１の領域Ｃに第２の電極２７ｂが設けられており、第２の領域Ｄに第１の電極２７ａが設けられている。これにより、第１の領域Ｃ及び第２の領域Ｄは互いに逆位相で振動する。 The piezoelectric vibrator 25 of this modification has a ring-shaped piezoelectric body 26. The piezoelectric vibrator 25 has a first region C and a second region D that are adjacent to each other with the center line S interposed therebetween. The polarization axis direction of the piezoelectric body 26 is the same in any region. On one main surface of the piezoelectric body 26, a first electrode 27 a is provided in the first region C, and a second electrode 27 b is provided in the second region D. On the other main surface of the piezoelectric body 26, the second electrode 27 b is provided in the first region C, and the first electrode 27 a is provided in the second region D. As a result, the first region C and the second region D vibrate in opposite phases.
　上記他方主面上には帰還電極２７ｃも設けられている。帰還電極２７ｃと第２の電極２７ｂとが接触しないように、第２の電極２７ｂには切欠き部が設けられている。もっとも、上記切欠き部は必ずしも設けられていなくともよく、帰還電極２７ｃと圧電振動子２５における他の電極とが接触していなければよい。 A return electrode 27c is also provided on the other main surface. The second electrode 27b is provided with a notch so that the feedback electrode 27c and the second electrode 27b do not contact each other. But the said notch does not necessarily need to be provided and the return electrode 27c and the other electrode in the piezoelectric vibrator 25 should just not contact.
　なお、圧電体２６は、第１の領域Ｃ及び第２の領域Ｄにおいて、互いに逆方向の分極軸方向であってもよい。この場合には、第１の領域Ｃ及び第２の領域Ｄに同位相の交流信号が印加されるように電極が設けられていればよい。例えば、一方主面上における第１の領域Ｃ及び第２の領域Ｄに第２の電極２７ｂが設けられており、他方主面上における第１の領域Ｃ及び第２の領域Ｄに第１の電極２７ａが設けられていてもよい。 Note that the piezoelectric body 26 may have the polarization axis directions opposite to each other in the first region C and the second region D. In this case, an electrode may be provided so that alternating current signals having the same phase are applied to the first region C and the second region D. For example, the second electrode 27b is provided in the first region C and the second region D on one main surface, and the first region C and the second region D on the other main surface are provided with the first electrode. An electrode 27a may be provided.
　図８は、第２の実施形態における振動素子の斜視図である。 FIG. 8 is a perspective view of the vibration element according to the second embodiment.
　本実施形態の振動装置は、振動素子３２の構成及び用いる振動モードが第１の実施形態と異なる。上記の点以外においては、本実施形態の振動装置は第１の実施形態の振動装置１と同様の構成を有する。 The vibration device of this embodiment is different from the first embodiment in the configuration of the vibration element 32 and the vibration mode used. Except for the above points, the vibration device of the present embodiment has the same configuration as the vibration device 1 of the first embodiment.
　振動素子３２は、開口部３ｃを隔てて対向し合う圧電振動子３５Ｃ及び圧電振動子３５Ｄを有する。圧電振動子３５Ｃ及び圧電振動子３５Ｄは、圧電振動子５Ａ及び圧電振動子５Ｂと共に、振動体３の第２の主面３ｂ上に設けられている。圧電振動子３５Ｃと圧電振動子３５Ｄとを結ぶ直線は、圧電振動子５Ａと圧電振動子５Ｂとを結ぶ直線に直交する。圧電振動子３５Ｃ及び圧電振動子３５Ｄは、圧電振動子５Ａ及び圧電振動子５Ｂと同様に構成されている。 The vibration element 32 includes a piezoelectric vibrator 35C and a piezoelectric vibrator 35D that face each other with the opening 3c therebetween. The piezoelectric vibrator 35C and the piezoelectric vibrator 35D are provided on the second main surface 3b of the vibrating body 3 together with the piezoelectric vibrator 5A and the piezoelectric vibrator 5B. A straight line connecting the piezoelectric vibrator 35C and the piezoelectric vibrator 35D is orthogonal to a straight line connecting the piezoelectric vibrator 5A and the piezoelectric vibrator 5B. The piezoelectric vibrator 35C and the piezoelectric vibrator 35D are configured similarly to the piezoelectric vibrator 5A and the piezoelectric vibrator 5B.
　振動素子３２においては、周回方向に隣り合う圧電振動子の振動の位相が９０°異なる。第１の実施形態と同様に、対向し合う圧電振動子５Ａ及び圧電振動子５Ｂの振動の位相は１８０°異なる。対向し合う圧電振動子３５Ｃ及び圧電振動子３５Ｄの振動の位相も１８０°異なる。これにより、振動素子３２は旋回モードによって振動する。なお、本明細書において旋回モードとは、振動素子の径方向に延びる振動の節のラインを回転軸として振動すると同時に、振動素子の中心を軸として上記回転軸が一定の周期で回転する振動モードである。 In the vibration element 32, the phases of vibrations of the piezoelectric vibrators adjacent in the circumferential direction differ by 90 °. As in the first embodiment, the vibration phases of the piezoelectric vibrator 5A and the piezoelectric vibrator 5B facing each other are different by 180 °. The phases of the vibrations of the piezoelectric vibrator 35C and the piezoelectric vibrator 35D facing each other are also different by 180 °. Thereby, the vibration element 32 vibrates in the turning mode. In this specification, the swivel mode is a vibration mode in which the rotation axis rotates at a constant cycle with the vibration element line extending in the radial direction of the vibration element as a rotation axis and the center of the vibration element as an axis. It is.
　本実施形態においては、振動素子３２が旋回モードにより振動するため、振動の節が略リング状の部分を有する。よって、第１の実施形態と同様に、振動素子３２における振動の節を容易に支持することができ、振動装置の密閉性を効果的に、かつより一層確実に高めることができる。 In this embodiment, since the vibration element 32 vibrates in the turning mode, the vibration node has a substantially ring-shaped portion. Therefore, similarly to the first embodiment, the vibration node in the vibration element 32 can be easily supported, and the sealing performance of the vibration device can be improved effectively and more reliably.
　加えて、本実施形態の振動装置も、透光体４上に設けられた透明電極層１５及び誘電体層１６を有し、かつ第１の実施形態と同様の電圧印加回路１４を有するため、水滴などを一定の方向により確実に移動させることができる。それによって、各位置における表面張力の差に依存せず、撮像素子の視野外に、水滴などをより確実に移動させることができる。 In addition, since the vibration device of the present embodiment also includes the transparent electrode layer 15 and the dielectric layer 16 provided on the light transmitting body 4 and the voltage application circuit 14 similar to that of the first embodiment, Water droplets can be reliably moved in a certain direction. Accordingly, it is possible to move water droplets and the like more reliably outside the field of view of the image sensor without depending on the difference in surface tension at each position.
　なお、第１の実施形態においてはシーソーモードによる振動の例を示し、第２の実施形態においては旋回モードによる振動の例を示したが、振動素子の振動モードはこれらに限定されない。例えば、ねじり振動の振動モードなどであってもよい。本明細書においてねじり振動とは、例えば一方主面と他方主面とが周回方向に、かつ互いに逆方向に回転するような振動モードである。 In addition, although the example of the vibration by seesaw mode was shown in 1st Embodiment and the example of the vibration by turning mode was shown in 2nd Embodiment, the vibration mode of a vibration element is not limited to these. For example, a vibration mode of torsional vibration may be used. In the present specification, torsional vibration is a vibration mode in which, for example, one main surface and the other main surface rotate in the circumferential direction and in opposite directions.
　以下において、図９～図１１を参照して、第３～第５の実施形態を説明する。第３～第５の実施形態の振動装置も、透光体上に設けられた透明電極層及び誘電体層を有し、かつ第１の実施形態と同様の電圧印加回路を有するため、各位置における表面張力の差に依存せず、撮像素子の視野外に、水滴などをより確実に移動させることができる。 Hereinafter, the third to fifth embodiments will be described with reference to FIGS. 9 to 11. Since the vibration devices according to the third to fifth embodiments also include the transparent electrode layer and the dielectric layer provided on the light transmitting body and the voltage application circuit similar to that of the first embodiment, It is possible to move water droplets and the like more reliably out of the field of view of the image sensor without depending on the difference in surface tension.
　図９は、第３の実施形態に係る振動装置の正面断面図である。 FIG. 9 is a front sectional view of the vibration device according to the third embodiment.
　本実施形態における振動素子４２は、対向し合う第１の振動体４３Ａ及び第２の振動体４３Ｂを有する。第１の振動体４３Ａは、第１の実施形態における振動体３と同様の構成を有し、第１の振動体４３Ａの延長部３ｄ上に透光体４が設けられている。第２の振動体４３Ｂは、延長部が設けられていない点以外においては、第１の振動体４３Ａと同様の構成を有する。本実施形態の振動素子４２は、シーソーモードまたは旋回モードにより振動する。 The vibration element 42 in the present embodiment includes a first vibration body 43A and a second vibration body 43B that face each other. The first vibrating body 43A has the same configuration as that of the vibrating body 3 in the first embodiment, and the translucent body 4 is provided on the extension 3d of the first vibrating body 43A. The second vibrating body 43B has a configuration similar to that of the first vibrating body 43A except that the extension portion is not provided. The vibration element 42 of the present embodiment vibrates in the seesaw mode or the turning mode.
　振動素子４２は、第１の振動体４３Ａと第２の振動体４３Ｂとの間に配置されており、第１の振動体４３Ａ及び第２の振動体４３Ｂを連結している、支持体４３ｃを有する。より具体的には、支持体４３ｃは、第１の振動体４３Ａの外周縁と第２の振動体４３Ｂの外周縁とを、周回方向全体において連結している。支持体４３ｃの形状は略円筒形である。支持体４３ｃは、外側面及び内側面と、外側面から径方向外側に突出しているヒンジ部４３ｄとを有する。本実施形態の振動装置は、ヒンジ部４３ｄにおいて支持される。なお、支持体４３ｃの形状は上記に限定されない。 The vibration element 42 is disposed between the first vibration body 43A and the second vibration body 43B, and a support body 43c that connects the first vibration body 43A and the second vibration body 43B is provided. Have. More specifically, the support body 43c connects the outer peripheral edge of the first vibrating body 43A and the outer peripheral edge of the second vibrating body 43B in the entire circumferential direction. The shape of the support body 43c is a substantially cylindrical shape. The support 43c has an outer surface and an inner surface, and a hinge portion 43d that protrudes radially outward from the outer surface. The vibration device of the present embodiment is supported by the hinge portion 43d. In addition, the shape of the support body 43c is not limited to the above.
　第２の振動体４３Ｂの、振動装置における外側に位置する主面上に、第１の実施形態と同様の圧電振動子５Ａ及び圧電振動子５Ｂが設けられている。なお、圧電振動子５Ａ及び圧電振動子５Ｂは第２の振動体４３Ｂの第１の振動体４３Ａ側の主面上に設けられていてもよい。振動素子４２は、図８に示したリング状の圧電振動子２５を有していてもよい。なお、本実施形態において、シーソーモードまたは旋回モードにおける振動の節は、第１の振動体４３Ａではなく、ヒンジ部４３ｄに位置する。 The same piezoelectric vibrator 5A and piezoelectric vibrator 5B as those of the first embodiment are provided on the main surface of the second vibrating body 43B located outside the vibration device. The piezoelectric vibrator 5A and the piezoelectric vibrator 5B may be provided on the main surface of the second vibrating body 43B on the first vibrating body 43A side. The vibration element 42 may include the ring-shaped piezoelectric vibrator 25 illustrated in FIG. In the present embodiment, the vibration node in the seesaw mode or the turning mode is located not on the first vibrating body 43A but on the hinge portion 43d.
　図１０は、第４の実施形態に係る振動装置の正面断面図である。なお、図１０及び後述する図１１及び図１２においては、圧電振動子を省略している。 FIG. 10 is a front sectional view of the vibration device according to the fourth embodiment. Note that the piezoelectric vibrator is omitted in FIG. 10 and FIGS. 11 and 12 described later.
　本実施形態の振動装置はレンズモジュール５８を含む。レンズモジュール５８は、レンズ５８ａ及びレンズ５８ａを保持しているレンズホルダ５８ｂとを有する。振動素子５２の透光体５４はドームカバーである。振動体５３はリング状であり、上記延長部を有しない。ドーム状の透光体５４の外側の面を覆うように透明電極層５５が設けられている。透明電極層５５上に誘電体層５６が設けられている。平面視において、透明電極層５５及び誘電体層５６は透光体５４の全体を覆っている。 The vibration device of the present embodiment includes a lens module 58. The lens module 58 includes a lens 58a and a lens holder 58b that holds the lens 58a. The translucent body 54 of the vibration element 52 is a dome cover. The vibrating body 53 has a ring shape and does not have the extension portion. A transparent electrode layer 55 is provided so as to cover the outer surface of the dome-shaped translucent body 54. A dielectric layer 56 is provided on the transparent electrode layer 55. In plan view, the transparent electrode layer 55 and the dielectric layer 56 cover the entire light transmitting body 54.
　振動素子５２はケース部材５９により支持されている。本実施形態のケース部材５９は、振動体５３の第１の主面３ａを支持するリブ及び第２の主面３ｂを支持するリブを有する。本実施形態においても、第１の実施形態と同様に、ケース部材５９は振動素子５２を振動の節において支持している。 The vibration element 52 is supported by the case member 59. The case member 59 of the present embodiment includes a rib that supports the first main surface 3a of the vibrating body 53 and a rib that supports the second main surface 3b. Also in this embodiment, as in the first embodiment, the case member 59 supports the vibration element 52 at the vibration node.
　本実施形態の振動装置は底板５７を有し、底板５７上にケース部材５９及びレンズホルダ５８ｂが設けられている。レンズモジュール５８は、振動素子５２、ケース部材５９及び底板５７により囲まれた内部空間内に配置されている。 The vibration device of the present embodiment has a bottom plate 57, and a case member 59 and a lens holder 58 b are provided on the bottom plate 57. The lens module 58 is disposed in an internal space surrounded by the vibration element 52, the case member 59, and the bottom plate 57.
　図１１は、第５の実施形態に係る振動装置の正面断面図である。 FIG. 11 is a front sectional view of the vibration device according to the fifth embodiment.
　本実施形態は、振動体５３の内周縁がレンズホルダ５８ｂに接合されており、ドームカバーを有しない点において、第４の実施形態と異なる。透光体部としてのレンズ５８ａの外側の面を覆うように透明電極層５５が設けられている。透明電極層５５上に誘電体層５６が設けられている。平面視において、透明電極層５５及び誘電体層５６はレンズ５８ａの全体を覆っている。 This embodiment is different from the fourth embodiment in that the inner periphery of the vibrating body 53 is joined to the lens holder 58b and does not have a dome cover. A transparent electrode layer 55 is provided so as to cover the outer surface of the lens 58a as a light transmitting body portion. A dielectric layer 56 is provided on the transparent electrode layer 55. In plan view, the transparent electrode layer 55 and the dielectric layer 56 cover the entire lens 58a.
　図示していないが、本実施形態においても、第４の実施形態と同様のケース部材５９などが設けられていてもよい。 Although not shown, also in this embodiment, a case member 59 similar to that in the fourth embodiment may be provided.
　図１２は、本発明の第６の実施形態に係るイメージングデバイスの正面断面図である。 FIG. 12 is a front sectional view of an imaging device according to the sixth embodiment of the present invention.
　イメージングデバイス６０は、第５の実施形態の振動装置５１と、撮像素子６０Ａとを有する。イメージングデバイス６０は底板６７を有し、底板６７上にレンズホルダ５８ｂが設けられている。底板６７、レンズホルダ５８ｂ及びレンズ５８ａにより囲まれた内部空間内に撮像素子６０Ａが配置されている。なお、本実施形態においても、第４の実施形態と同様のケース部材５９などが設けられていてもよい。 The imaging device 60 includes the vibration device 51 of the fifth embodiment and an image sensor 60A. The imaging device 60 has a bottom plate 67, and a lens holder 58 b is provided on the bottom plate 67. The image sensor 60A is disposed in an internal space surrounded by the bottom plate 67, the lens holder 58b, and the lens 58a. In the present embodiment, the same case member 59 as in the fourth embodiment may be provided.
　イメージングデバイス６０においては、振動装置５１を有することにより、各位置における表面張力の差に依存せず、撮像素子６０Ａの視野外に、水滴などをより確実に移動させることができる。 In the imaging device 60, by having the vibration device 51, it is possible to move water droplets and the like more reliably outside the field of view of the image sensor 60A without depending on the difference in surface tension at each position.
　ここで、第１～第６の実施形態において振動子は圧電振動子であるが、振動子は例えば、電磁アクチュエータなどの電磁誘導素子であってもよい。振動子が電磁アクチュエータである例を以下において説明する。 Here, in the first to sixth embodiments, the vibrator is a piezoelectric vibrator, but the vibrator may be, for example, an electromagnetic induction element such as an electromagnetic actuator. An example in which the vibrator is an electromagnetic actuator will be described below.
　図１３は、第７の実施形態に係る振動装置の正面断面図である。 FIG. 13 is a front sectional view of the vibration device according to the seventh embodiment.
　本実施形態は、振動子が電磁アクチュエータ７５である点において、第１の実施形態と異なる。電磁アクチュエータ７５は、ソレノイドコイル７６及び磁石７７を有する。本実施形態においては、駆動回路及び電圧印加回路はソレノイドコイル７６に接続されている。ケース部材７９の形状も第１の実施形態と異なる。上記の点以外においては、本実施形態の振動装置は第１の実施形態の振動装置１と同様の構成を有する。 This embodiment is different from the first embodiment in that the vibrator is an electromagnetic actuator 75. The electromagnetic actuator 75 has a solenoid coil 76 and a magnet 77. In the present embodiment, the drive circuit and the voltage application circuit are connected to the solenoid coil 76. The shape of the case member 79 is also different from that of the first embodiment. Except for the above points, the vibration device of the present embodiment has the same configuration as the vibration device 1 of the first embodiment.
　電磁アクチュエータ７５の磁石７７は、振動体３の第２の主面３ｂ上に設けられている。ここで、本実施形態のケース部材７９は、内側面から径方向内側に延び、ソレノイドコイル７６を支持している支持部７９ａを有する。上記の点以外においては、ケース部材７９は第４の実施形態のケース部材５９と同様の構成を有する。ソレノイドコイル７６は、磁石７７に対向するように配置されている。振動素子７２の変位に対応する帰還信号を生成し、出力するために、圧電素子を振動体３に接合してもよい。あるいは、上記帰還信号を生成し、出力するために、電磁アクチュエータの一部または全部を利用してもよい。 The magnet 77 of the electromagnetic actuator 75 is provided on the second main surface 3 b of the vibrating body 3. Here, the case member 79 of the present embodiment has a support portion 79 a that extends radially inward from the inner surface and supports the solenoid coil 76. Except for the above points, the case member 79 has the same configuration as the case member 59 of the fourth embodiment. The solenoid coil 76 is disposed so as to face the magnet 77. In order to generate and output a feedback signal corresponding to the displacement of the vibration element 72, a piezoelectric element may be bonded to the vibration body 3. Alternatively, a part or all of the electromagnetic actuator may be used to generate and output the feedback signal.
　図１３中の矢印Ｅ及び矢印Ｆで示すように、振動素子７２はシーソーモードにより振動する。本実施形態の振動装置も、一定のタイミングにおいて透明電極層１５に電圧を印加する電圧印加回路を有する。それによって、電磁アクチュエータ７５により振動素子７２が振動する場合においても、水滴などを一定の方向に、より確実に移動させることができる。従って、各位置における表面張力の差に依存せず、撮像素子の視野外に、水滴などをより確実に移動させることができる。なお、振動体３上には、帰還電極を有する圧電素子が設けられていることが好ましい。 As shown by arrows E and F in FIG. 13, the vibration element 72 vibrates in the seesaw mode. The vibration device according to the present embodiment also includes a voltage application circuit that applies a voltage to the transparent electrode layer 15 at a certain timing. Thereby, even when the vibration element 72 is vibrated by the electromagnetic actuator 75, water droplets and the like can be moved more reliably in a certain direction. Therefore, it is possible to move water droplets and the like more reliably outside the field of view of the image sensor without depending on the difference in surface tension at each position. Note that a piezoelectric element having a feedback electrode is preferably provided on the vibrating body 3.
　電磁アクチュエータ７５の配置は上記に限定されない。例えば、図１４に示す第７の実施形態の変形例では、振動体８３は、振動装置の内部空間側に延びる延長部８３ｄを有する。磁石７７は、延長部８３ｄにおける外側面上に配置されている。ソレノイドコイル７６は、磁石７７に対向するように、ケース部材７９の支持部７９ａにより支持されている。このような場合においても、各位置における表面張力の差に依存せず、水滴などをより確実に移動させることができる。 The arrangement of the electromagnetic actuator 75 is not limited to the above. For example, in the modification of the seventh embodiment illustrated in FIG. 14, the vibrating body 83 includes an extension portion 83 d that extends toward the internal space of the vibration device. The magnet 77 is disposed on the outer surface of the extension 83d. The solenoid coil 76 is supported by a support portion 79 a of the case member 79 so as to face the magnet 77. Even in such a case, a water droplet or the like can be moved more reliably without depending on the difference in surface tension at each position.
１…振動装置
２…振動素子
３…振動体
３ａ…第１の主面
３ｂ…第２の主面
３ｃ…開口部
３ｄ…延長部
４…透光体
５Ａ，５Ｂ…圧電振動子
６…圧電体
７ａ…第１の電極
７ｂ…第２の電極
７ｃ…帰還電極
８…シール部材
９…ケース部材
９ａ…第１のケース部
９ｂ…第２のケース部
９ｘ…凹部
１０…イメージングデバイス
１０Ａ…撮像素子
１２…回路
１３…駆動回路
１３Ａ…位相回路
１３Ｂ…増幅回路
１４…電圧印加回路
１４Ａ…タイミング生成回路
１４Ｂ…スイッチング回路
１４Ｃ…電源
１５…透明電極層
１６…誘電体層
１９ａ…底部
１９ｂ…内壁
１９ｃ…外壁
１９ｄ…天板部
１９ｅ…リブ
２５…圧電振動子
２６…圧電体
２７ａ…第１の電極
２７ｂ…第２の電極
２７ｃ…帰還電極
３２…振動素子
３５Ｃ，３５Ｄ…圧電振動子
４２…振動素子
４３Ａ…第１の振動体
４３Ｂ…第２の振動体
４３ｃ…支持体
４３ｄ…ヒンジ部
５１…振動装置
５２…振動素子
５３…振動体
５４…透光体
５５…透明電極層
５６…誘電体層
５７…底板
５８…レンズモジュール
５８ａ…レンズ
５８ｂ…レンズホルダ
５９…ケース部材
６０…イメージングデバイス
６０Ａ…撮像素子
６７…底板
７２…振動素子
７５…電磁アクチュエータ
７６…ソレノイドコイル
７７…磁石
７９…ケース部材
７９ａ…支持部
８３…振動体
８３ｄ…延長部 DESCRIPTION OF SYMBOLS 1 ... Vibration apparatus 2 ... Vibration element 3 ... Vibrating body 3a ... 1st main surface 3b ... 2nd main surface 3c ... Opening part 3d ... Extension part 4 ... Translucent body 5A, 5B ... Piezoelectric vibrator 6 ... Piezoelectric body 7a ... 1st electrode 7b ... 2nd electrode 7c ... Return electrode 8 ... Seal member 9 ... Case member 9a ... 1st case part 9b ... 2nd case part 9x ... Recess 10 ... Imaging device 10A ... Imaging element 12 ... Circuit 13 ... Drive circuit 13A ... Phase circuit 13B ... Amplifier circuit 14 ... Voltage application circuit 14A ... Timing generation circuit 14B ... Switching circuit 14C ... Power source 15 ... Transparent electrode layer 16 ... Dielectric layer 19a ... Bottom 19b ... Inner wall 19c ... Outer wall 19d ... Top plate portion 19e ... Rib 25 ... Piezoelectric vibrator 26 ... Piezoelectric body 27a ... First electrode 27b ... Second electrode 27c ... Feedback electrode 32 ... Vibrating elements 35C, 35D ... Piezoelectric vibrator 42 ... Vibrating element 43A 1st vibrating body 43B ... 2nd vibrating body 43c ... support body 43d ... hinge part 51 ... vibrating device 52 ... vibrating element 53 ... vibrating body 54 ... translucent body 55 ... transparent electrode layer 56 ... dielectric layer 57 ... bottom plate 58 ... Lens module 58a ... Lens 58b ... Lens holder 59 ... Case member 60 ... Imaging device 60A ... Imaging device 67 ... Bottom plate 72 ... Vibration element 75 ... Electromagnetic actuator 76 ... Solenoid coil 77 ... Magnet 79 ... Case member 79a ... Supporting part 83 ... Vibrating body 83d ... Extension part

Claims (12)

  1. 　透光体部を有する振動体と、前記振動体を振動させる振動子と、を有する振動素子と、
    　前記振動体の前記透光体部上に設けられている透明電極層と、
    　前記透明電極層上に設けられている誘電体層と、
    　前記透明電極層に電気的に接続されており、前記透明電極層に電圧を印加する電圧印加回路と、
    を備える、振動装置。     A vibrating element having a vibrating body having a light transmitting body portion, and a vibrator that vibrates the vibrating body;
    A transparent electrode layer provided on the translucent part of the vibrator,
    A dielectric layer provided on the transparent electrode layer;
    A voltage application circuit that is electrically connected to the transparent electrode layer and applies a voltage to the transparent electrode layer;
    A vibration device comprising:
  2. 　前記電圧印加回路が前記振動子に電気的に接続されており、
    　前記電圧印加回路が、前記振動子から出力された帰還信号に応じて前記透明電極層に電圧を印加するタイミングを決定する、タイミング生成回路を有する、請求項１に記載の振動装置。     The voltage application circuit is electrically connected to the vibrator;
    2. The vibration device according to claim 1, wherein the voltage application circuit includes a timing generation circuit that determines a timing of applying a voltage to the transparent electrode layer according to a feedback signal output from the vibrator.
  3. 　平面視において、前記透明電極層及び前記誘電体層が、前記透光体部の全体を覆うように設けられている、請求項１または２に記載の振動装置。 3. The vibration device according to claim 1, wherein the transparent electrode layer and the dielectric layer are provided so as to cover the entirety of the light transmitting body part in a plan view.
  4. 　前記振動子が圧電振動子である、請求項１～３のいずれか１項に記載の振動装置。 The vibration device according to any one of claims 1 to 3, wherein the vibrator is a piezoelectric vibrator.
  5. 　前記振動子が電磁誘導素子である、請求項１～３のいずれか１項に記載の振動装置。 The vibration device according to any one of claims 1 to 3, wherein the vibrator is an electromagnetic induction element.
  6. 　前記振動素子がシーソーモードにより振動する、請求項１～５のいずれか１項に記載の振動装置。 The vibration device according to any one of claims 1 to 5, wherein the vibration element vibrates in a seesaw mode.
  7. 　前記振動素子が旋回モードにより振動する、請求項１～５のいずれか１項に記載の振動装置。 The vibration device according to any one of claims 1 to 5, wherein the vibration element vibrates in a turning mode.
  8. 　前記振動素子が略円板状である、請求項１～７のいずれか１項に記載の振動装置。 The vibration device according to any one of claims 1 to 7, wherein the vibration element has a substantially disk shape.
  9. 　前記振動素子の振動の節において前記振動素子を保持しているケース部材をさらに備える、請求項１～８のいずれか１項に記載の振動装置。 The vibration device according to any one of claims 1 to 8, further comprising a case member holding the vibration element at a vibration node of the vibration element.
  10. 　請求項１～９のいずれか１項に記載の振動装置と、
    　前記透光体部に検出領域が含まれるように配置されている光学検出素子と、
    を備える、光学検出装置。     The vibration device according to any one of claims 1 to 9,
    An optical detection element arranged so that a detection region is included in the light transmitting body part;
    An optical detection device comprising:
  11. 　前記光学検出素子が撮像素子であり、前記検出領域が視野である、請求項１０に記載の光学検出装置。 The optical detection device according to claim 10, wherein the optical detection element is an imaging element and the detection region is a visual field.
  12. 　前記検出領域の少なくとも一部に前記透明電極層が位置している、請求項１０または１１に記載の光学検出装置。 The optical detection device according to claim 10 or 11, wherein the transparent electrode layer is located in at least a part of the detection region.
PCT/JP2018/046594 2018-05-22 2018-12-18 Oscillation device and optical detection device WO2019225042A1 (en)

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JP2011010094A (en) * 2009-06-26 2011-01-13 Nikon Corp Optical device and apparatus
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WO2017110564A1 (en) * 2015-12-25 2017-06-29 株式会社村田製作所 Vibration device and camera
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JP2011010094A (en) * 2009-06-26 2011-01-13 Nikon Corp Optical device and apparatus
JP2013028072A (en) * 2011-07-28 2013-02-07 Sharp Corp Contamination-resistant structure, and method for performing the same
WO2017110563A1 (en) * 2015-12-24 2017-06-29 株式会社村田製作所 Vibration device, method for driving same, and camera
WO2017110564A1 (en) * 2015-12-25 2017-06-29 株式会社村田製作所 Vibration device and camera

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WO2023021812A1 (en) * 2021-08-18 2023-02-23 株式会社村田製作所 Housing and sensor device

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