WO2020003574A1 - Oscillation device and optical detection device - Google Patents

Oscillation device and optical detection device Download PDF

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Publication number
WO2020003574A1
WO2020003574A1 PCT/JP2019/002548 JP2019002548W WO2020003574A1 WO 2020003574 A1 WO2020003574 A1 WO 2020003574A1 JP 2019002548 W JP2019002548 W JP 2019002548W WO 2020003574 A1 WO2020003574 A1 WO 2020003574A1
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WO
WIPO (PCT)
Prior art keywords
vibration
light transmitting
vibrating
transmitting body
vibrating body
Prior art date
Application number
PCT/JP2019/002548
Other languages
French (fr)
Japanese (ja)
Inventor
藤本　克己
西山　健次
倉谷　康浩
Original Assignee
株式会社村田製作所
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Publication of WO2020003574A1 publication Critical patent/WO2020003574A1/en

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B15/00—Special procedures for taking photographs; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B17/00—Details of cameras or camera bodies; Accessories therefor
    • G03B17/02—Bodies
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B17/00—Details of cameras or camera bodies; Accessories therefor
    • G03B17/56—Accessories
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof

Definitions

  • the present invention relates to a vibration device and an optical detection device capable of removing water droplets and the like by mechanical vibration.
  • Patent Literature 1 discloses a vibration device having a light-transmitting portion disposed in front of a camera body. In this vibrating device, water droplets adhering to the light transmitting portion are atomized by vibrating the light transmitting portion largely. Patent Literature 1 describes that a water droplet can be moved to a hydrophilic portion side by forming a hydrophilic portion other than a region to be photographed.
  • antinodes of vibration and nodes of vibration are formed in a portion of the translucent portion located in the visual field region of the camera body.
  • the water droplet moves toward the antinode of the vibration, and the water droplet is atomized near the antinode of the vibration.
  • the water droplet located at the node of the vibration is hard to move toward the antinode of the vibration. For this reason, water droplets may remain and the field of view of the camera body may be obstructed.
  • An object of the present invention is to provide a vibration device and an optical detection device that can more reliably secure a detection area of an optical detection element.
  • a vibration device includes a light-transmitting member disposed so as to include at least a part of a detection region of an optical detection element, and a vibration device disposed such that an optical axis of the light-transmitting member is inclined from a vertical direction. And a vibrating element having a vibrating body directly or indirectly connected to the translucent body, wherein the hydrophilic film is provided at least in a portion including the detection region in the translucent body.
  • a control unit electrically connected to the vibrating element, wherein the control unit controls the vibration in a first control mode in which the vibrating element alternately switches between vibration and rest.
  • the optical detection device includes a vibration device configured according to the present invention, and an optical detection element arranged so that the light transmitting body includes a detection region.
  • FIG. 1 is a schematic perspective view of an imaging device having a vibration device according to the first embodiment of the present invention.
  • FIG. 2 is a schematic front sectional view of an imaging device having the vibration device according to the first embodiment of the present invention.
  • FIG. 3 is a schematic perspective view of the piezoelectric vibrator according to the first embodiment of the present invention.
  • FIG. 4 is a schematic diagram for explaining each vibration mode.
  • FIG. 5 is a diagram showing a relationship between the excitation frequency f of the capillary wave and the wavelength ⁇ .
  • FIGS. 6A to 6D show a vibration device according to the first embodiment of the present invention for explaining the behavior of a droplet such as a water droplet when the vibration is controlled by the first control mode.
  • FIG. 3 is a schematic plan view of FIG. FIGS.
  • FIG. 7A to 7C are schematic perspective views illustrating an example of the polarization structure of the piezoelectric body according to the first embodiment.
  • FIG. 8 is a schematic front sectional view of a vibration device according to a second embodiment of the present invention.
  • FIG. 9 is a schematic cross-sectional view illustrating a state of vibration of the vibrating body according to the second embodiment of the present invention in the second control mode.
  • FIG. 10 is a schematic perspective view of a light transmitting body and a case member according to the third embodiment of the present invention.
  • FIG. 11 is a schematic partially cutaway perspective view of the vibration device according to the third embodiment of the present invention.
  • FIG. 12 is a schematic partial cutaway perspective view of a vibrating body according to a first modification of the third embodiment of the present invention.
  • FIG. 13 is a schematic perspective view of a case member according to a second modification of the third embodiment of the present invention.
  • FIG. 14 is a schematic partial cutaway perspective view of a vibrating body according to a second modification of the third embodiment of the present invention.
  • FIG. 15 is a perspective view schematically illustrating a vibrating body according to a third modification of the third embodiment of the present invention.
  • FIG. 1 is a schematic perspective view of an imaging device having the vibration device according to the first embodiment.
  • FIG. 2 is a schematic front sectional view of an imaging device having the vibration device according to the first embodiment.
  • a control unit described later may be omitted.
  • the vibration device 1 is a vibration device that removes water droplets and foreign matter from the field of view of the image sensor by moving water droplets and foreign matter by vibration.
  • the vibration device 1 includes a vibration element 2 including a cylindrical vibration body 3, a light transmitting body 4 provided to cover an opening of the vibration element 2, and an electric And a control unit 12 that is electrically connected.
  • a hydrophilic film 5 is provided on the entire surface of the light transmitting body 4.
  • the entire surface of the light transmitting body 4 refers to the entire outer surface of the vibrating device 1 that transmits light and energy rays.
  • the vibration device 1 is arranged so that the optical axis L of the light transmitting body 4 is inclined from the vertical direction. More specifically, in the present embodiment, the vibration device 1 is arranged such that the optical axis L of the light transmitting body 4 is orthogonal to the vertical direction. When the vibration device 1 is arranged to be inclined at an angle of 45 ° or more with respect to the vertical direction, water droplets and the like can be particularly preferably removed from the light transmitting member 4.
  • the imaging device 10 includes a cylindrical case member 18 that supports the vibration device 1 at one end, and a base member 14 that is fixed to the other end of the case member 18.
  • An image sensor 10A is arranged in an internal space surrounded by the vibration device 1, the case member 18, and the base member 14. Thereby, an imaging device 10 as an optical detection device according to one embodiment of the present invention is configured.
  • the imaging element 10A for example, a CMOS, a CCD, a bolometer, a thermopile, or the like that receives light of any wavelength from the visible region to the far infrared region can be used.
  • the imaging device 10 include a camera, a Radar and a LIDAR device, and the like.
  • the case member 18 is fixed on the base member 14.
  • a plurality of legs 15 are fixed on the base member 14.
  • a board 16 is fixed on the plurality of legs 15.
  • the image sensor 10A is fixed on the substrate 16.
  • the imaging device 10A has an imaging device body 10a and a lens module 10b. The portion on the lens module 10b side of the imaging element 10A is located in the internal space of the vibration device 1, and the remaining portion is located in the internal space of the case member 18. Note that the entire imaging element 10A may be located in the internal space of the vibration device 1.
  • a circuit for driving the image sensor 10A and the control unit 12 are provided on at least one main surface of the substrate 16 or one main surface of the base member 14.
  • an optical detection element other than the imaging element 10A for optically detecting an energy ray may be arranged.
  • the energy ray to be detected may be, for example, an active energy ray such as an electromagnetic wave or an infrared ray.
  • a field of view as a detection region of the imaging element 10 ⁇ / b> A is included in the light transmitting body 4.
  • the light transmitting body 4 only needs to be disposed so as to include at least a part of the field of view of the imaging element 10A.
  • the term "light-transmitting property" in the present specification refers to a light-transmitting property at which an energy ray or light having a wavelength detected by the optical detection element is transmitted.
  • the imaging device 10 shown in FIGS. 1 and 2 is an example, and the configuration of the imaging device 10 is not limited to the above.
  • the imaging device 10 only needs to include the vibration device 1 and the imaging element 10A.
  • the vibration element 2 has a vibration body 3 and a piezoelectric vibrator 7.
  • the vibrating body 3 is substantially cylindrical and has a first open end 3a and a second open end 3b.
  • the direction parallel to the direction connecting the first opening end 3a and the second opening end 3b is defined as the height direction of the vibration device 1, and the direction orthogonal to the height direction is defined as the radial direction.
  • the vibrating body 3 has an extension 3c located on the first opening end 3a side and extending radially inward. The portion of the extension 3c on the light transmitting body 4 side is included in the first opening end 3a.
  • the light transmitting member 4 is connected to a portion of the first opening end 3a located at the extension 3c so as to cover the opening of the vibrating member 3.
  • the vibrating body 3 has a hinge 3d located between the first open end 3a and the second open end 3b.
  • the hinge 3d extends radially outward.
  • the vibration device 1 is supported by the case member 18 at the hinge 3d.
  • the thickness in the radial direction of the vibrating body 3 is a thickness
  • the thickness of the portion located between the hinge 3d and the extension 3c is the thickness of the hinge 3d and the second opening end. 3b.
  • the vibrating body 3 may not have the hinge portion 3d and the extension portion 3c, and the thickness of the vibrating body 3 may be the same in all portions.
  • the vibrating body 3 may have a cylindrical shape.
  • the vibrating body 3 may have a cylindrical shape or a rectangular cylindrical shape.
  • the piezoelectric vibrator 7 is disposed at the second opening end 3 b of the vibrating body 3.
  • the piezoelectric vibrator 7 vibrates the connected body of the light transmitting body 4 and the vibrating body 3.
  • FIG. 3 is a schematic perspective view of the piezoelectric vibrator according to the first embodiment.
  • the piezoelectric vibrator 7 has an annular piezoelectric body 8.
  • the piezoelectric body 8 is made of, for example, an appropriate piezoelectric ceramic such as Pb (Zr, Ti) O 3 or (K, Na) NbO 3 or an appropriate piezoelectric single crystal such as LiTaO 3 or LiNbO 3 .
  • An electrode 9a is provided on one main surface of the piezoelectric body 8, and an electrode 9b is provided on the other main surface.
  • one annular piezoelectric vibrator 7 is disposed on the vibrating body 3.
  • the shape and the number of the piezoelectric vibrators 7 are not limited to the above.
  • a plurality of piezoelectric vibrators may be arranged along a circumferential direction with the center of the vibrating body 3 as a rotation axis.
  • the light transmitting body 4 is directly connected to the vibrating body 3. Note that the light transmitting body 4 may be indirectly connected to the vibrating body 3 via another member.
  • the light transmitting body 4 has a dome shape in the present embodiment.
  • the shape of the light transmitting body 4 is not limited to the above, and may be, for example, a disk shape.
  • the light transmitting body 4 is made of a light transmitting material.
  • As the light-transmitting material for example, a light-transmitting resin, glass, or a light-transmitting ceramic can be used.
  • the hydrophilic film 5 is provided on the entire surface of the light transmitting body 4. Note that the hydrophilic film 5 only needs to be provided at least in a portion including the visual field of the imaging element 10A.
  • the material of the hydrophilic film 5 include TiO 2 for an inorganic type and hydrophilic PVDF for an organic type.
  • the control unit 12 is electrically connected to the vibration element 2. More specifically, the control unit 12 is electrically connected to the piezoelectric vibrator 7.
  • the control unit 12 controls the vibration of the connected body of the light transmitting body 4 and the vibrating body 3 by the piezoelectric vibrator 7.
  • the control unit 12 vibrates the connected body of the light transmitting body 4 and the vibrating body 3 so that the node of the vibration is located at the hinge 3d of the vibrating body 3.
  • the vibration device 1 can be easily supported by the case member 18, and the sealing property of the imaging device 10 can be improved.
  • the support of the case member 18 makes it difficult to hinder the vibration of the vibration device 1.
  • the control unit 12 of the vibration device 1 controls the vibration by the first control mode in which the vibration of the vibration element 2 and the stationary state are alternately switched.
  • the hydrophilic film 5 is provided on the entire surface of the light transmitting body 4 and that the control unit 12 controls the vibration in the first control mode. Thereby, the visual field of the imaging element 10A as a detection area of the optical detection element can be more reliably secured. This will be described below.
  • FIG. 4 is a schematic diagram for explaining each vibration mode.
  • FIG. 4 shows the phase of vibration of each region in the light transmitting body when viewed in plan.
  • the region marked with a + sign and the region marked with a-sign indicate that the phases of vibration are opposite to each other.
  • the vibration mode can be represented by the (m, n) mode.
  • m and n are integers.
  • m is the number of vibration node lines extending in the circumferential direction
  • n is the number of vibration node lines extending in the radial direction.
  • the (0,0) mode is used.
  • the piezoelectric vibrator 7 of the vibration device 1 is configured to be able to excite the (0, 0) mode vibration in the light transmitting body 4.
  • the (0, 0) mode vibration is excited by controlling the voltage and the like applied to the piezoelectric vibrator 7 by the control unit 12.
  • the hydrophilic film 5 is provided on the entire surface of the light transmitting body 4. Therefore, even if the light transmitting member 4 is vibrated, water droplets and the like are hardly atomized. This is considered for the following reasons.
  • the atomization of the droplet by the vibration is due to the fact that the standing wave of the capillary wave is excited, a part of the droplet becomes columnar, and the tip of the columnar portion scatters.
  • the wavelength of the capillary wave is ⁇
  • the excitation frequency is f
  • the surface tension of the droplet is ⁇
  • the density of the droplet is ⁇
  • FIG. 5 is a diagram showing the relationship between the excitation frequency f of the capillary wave and the wavelength ⁇ .
  • the wavelength ⁇ of the capillary wave becomes about 10 ⁇ m, which indicates that the fog is close to a gas.
  • a droplet such as a water droplet spreads on the surface of the hydrophilic film immediately after adhering to the hydrophilic film and becomes a liquid film.
  • the liquid film spreads further, and the liquid film becomes thinner.
  • the frequency at which the vibrating body of the vibrating device for atomizing the droplets is excited is generally about 50 kHz.
  • the wavelength ⁇ of the capillary wave is about 90 ⁇ m when the excitation frequency f is about 50 kHz.
  • the thickness of the liquid film is smaller than the wavelength ⁇ of the capillary wave, the standing wave of the capillary wave is hardly excited. Therefore, the liquid on the hydrophilic film is not easily atomized.
  • FIGS. 6A to 6D are schematic diagrams of the vibration device according to the first embodiment for explaining the behavior of a droplet such as a water droplet when the vibration is controlled by the first control mode. It is a top view.
  • the first control mode is a control mode for alternately switching the vibration and the rest of the vibration element 2.
  • the light transmitting body 4 shown in FIG. 6A is vibrating in the (0,0) mode in which the antinode of vibration is located at the center.
  • the droplets A move toward the center of the light transmitting body 4 where the antinode of vibration is located and gather.
  • the light transmitting body 4 is stopped by the control unit 12. As a result, a force for moving the droplet A toward the center of the light transmitting member 4 is not applied to the droplet A.
  • the droplets A are gathered and integrated near the center of the light transmitting body 4, the gravity applied to the droplets A increases. Therefore, the droplet A hangs down as shown in FIG. Next, as shown in FIG. 6D, the droplet A hangs down below the light transmitting body 4. Even in the case where foreign matter is included together with the droplet A, the foreign matter can hang down together with the integrated droplet A. Thereby, the droplets A and the like can be removed from the light transmitting member 4.
  • the liquid may vibrate as in the case shown in FIG. It gathers in the part located on the belly, and the liquid film becomes thick in this part. Next, as in the case shown in FIGS. 6C and 6D, the liquid hangs down.
  • the hydrophilic film 5 is preferably wider than the field of view. Therefore, the dropping of the droplet A can be performed more reliably.
  • a vibration mode other than the (0, 0) mode is used.
  • a vibration mode such as a (0, 1) mode or a (0, 2) mode may be used.
  • FIGS. 7A to 7C are schematic perspective views illustrating an example of the polarization structure of the piezoelectric body according to the first embodiment.
  • a region with a + sign indicates a region in which the polarization direction is from the lower surface to the upper surface in FIG. 7A of the piezoelectric body.
  • a region with a minus sign indicates that the polarization direction is a direction from the upper surface to the lower surface of the piezoelectric body.
  • FIGS. 7B and 7C The same applies to FIGS. 7B and 7C.
  • FIG. 7A the polarization directions of the regions arranged in the circumferential direction are all the same.
  • the electrodes 9a and 9b of the piezoelectric vibrator 7 shown in FIG. 3 are annular. Therefore, when the piezoelectric body 8 having the polarization structure shown in FIG. 7A is used, (0, 0) mode vibration is excited in the light transmitting body 4.
  • FIG. 7B in the region divided into four in the circumferential direction, the polarization directions of the regions on both sides facing each other via the center are opposite.
  • the piezoelectric body 8 having the polarization structure shown in FIG. 7B is used, the (0, 1) mode vibration is excited in the light transmitting body 4.
  • FIG. 7A the electrodes 9a and 9b of the piezoelectric vibrator 7 shown in FIG. 3 are annular. Therefore, when the piezoelectric body 8 having the polarization structure shown in FIG. 7A is used, (0, 0) mode vibration is excited in the light transmitting body 4.
  • FIG. 7B in the region
  • the electrode 9a and the electrode 9b shown in FIG. 3 may be divided in the circumferential direction, and the divided electrodes may be arranged in the above-described regions of the piezoelectric body 8.
  • the AC voltages having phases opposite to each other are applied to the regions on both sides opposed to each other with the center therebetween.
  • the (0, 1) mode vibration can be excited.
  • the (0, 2) mode vibration can be excited in the light transmitting member 4 by applying an AC voltage having the same phase to both regions facing each other via the center.
  • the antinode of the vibration can be located at a portion not including the optical axis L of the light transmitting body 4. Thereby, even when water droplets and the like are gathered near the antinode of vibration, it is possible to suppress the obstruction of the visual field of the image sensor 10A.
  • the control unit 12 controls the vibration so that the antinode of the vibration is located in a portion located in the region outside the field of view.
  • the field of view of the imaging element 10A is located only near the center of the light transmitting body 4, it is preferable to use the (0, 1) mode or the (0, 2) mode in the first control mode. It is. Thereby, the field of view of the imaging element 10A is hardly hindered.
  • the control unit 12 controls the vibration in the light transmitting body 4 so that a plurality of antinodes of the vibration are positioned in the vertical direction.
  • antinode of the vibration is preferably located outside the central region of the light transmitting body 4.
  • FIG. 8 is a schematic front sectional view of the vibration device according to the second embodiment.
  • the present embodiment is different from the first embodiment in that a connecting member 26 connecting the vibrating body 23 and the light transmitting body 4 is provided. Further, the configuration of the vibrating body 23 and the control mode used are different from those of the first embodiment. Except for the above points, the vibration device of the present embodiment has the same configuration as the vibration device 1 of the first embodiment.
  • the light transmitting member 4 is fixed to the connecting member 26.
  • the connecting member 26 has a tubular portion 26a and a flange portion 26b extending radially outward from one end of the tubular portion 26a.
  • the light transmitting body 4 is fixed to one surface of the flange portion 26b.
  • the other end of the cylindrical portion 26a is fixed to the vibrating body 23.
  • the light transmitting member 4 is indirectly connected to the vibrating member 23 via the connecting member 26.
  • the translucent member 4 may be directly connected to the first flange portion 23d of the vibrating member 23 without using the connecting member 26.
  • the first flange portion 23 d is directly connected to and integrated with the light transmitting body 4, and both are oscillated at different frequencies by the vibration of the vibrating body 3.
  • the vibrating body 23 has an outer surface 23g and an inner surface 23h that connect the first open end 3a and the second open end 3b.
  • the vibrating body 23 is provided with an annular support portion 23c extending radially inward from an inner side surface 23h of the vibrating body 23.
  • the cylindrical portion 26a of the connecting member 26 is fixed to the support portion 23c.
  • the light transmitting body 4 is connected to the vibrating body 23 by the connecting member 26.
  • the support portion 23c need not be annular.
  • the vibrating body 23 is usually cylindrical except for the first flange 23d, but may be provided with a second flange 23e and a third flange 23f.
  • the first flange portion 23d, the second flange portion 23e, and the third flange portion 23f have an annular shape extending radially outward from an outer surface 23g of the vibrating body 23.
  • the vibrating body 23 has a tripod tuning fork shape in a cross section along the radial direction and the height direction of the vibrating body 23 shown in FIG.
  • the outer diameters of the first flange portion 23d, the second flange portion 23e, and the third flange portion 23f are made equal.
  • the outer diameters of the first flange portion 23d, the second flange portion 23e, and the third flange portion 23f do not necessarily have to be equal.
  • the first flange portion 23d is provided along the first opening end 3a, and the second flange portion 23e is provided along the second opening end 3b.
  • the first flange portion 23d may be located closer to the second opening end 3b in the height direction than the first opening end 3a.
  • the second flange 23e may also be located closer to the first opening end 3a than the second opening end 3b.
  • control unit 12 controls the vibration in the second control mode.
  • the second control mode is a mode in which the vibration is controlled such that the amplitude of the vibrating body 23 is larger than the amplitude of the light transmitting body 4.
  • FIG. 9 is a schematic cross-sectional view illustrating a state of vibration of the vibrating body in the second embodiment in the second control mode.
  • the solid line indicates a vibrating state
  • the dashed line indicates the original state.
  • the vibrator 23 has a plurality of resonance frequencies.
  • a resonance frequency of a vibration mode in which the first flange portion 23d and the second flange portion 23e are displaced in opposite phases in the height direction is selected.
  • Antinodes of vibration in the vibrating body 23 are located at outer peripheral edges of the first flange portion 23d and the second flange portion 23e.
  • the outer peripheral edge refers to the outer peripheral edge viewed from the height direction.
  • a portion between the first flange portion 23d and the second flange portion 23e is a node of vibration.
  • the support portion 23c is located between the first flange portion 23d and the second flange portion 23e in the height direction.
  • the support part 23c is located near the node of the vibration.
  • the light transmitting body 4 is connected to the support portion 23c via a connecting member 26. Therefore, in the second control mode, the amplitude of the vibration of the vibrating body 23 is larger than the amplitude of the vibration of the light transmitting body 4.
  • control may be performed such that the light transmitting body 4 does not vibrate and only the vibrating body 23 vibrates. For example, when the support portion 23c is accurately arranged at a node of the vibration, the light transmitting body 4 does not easily vibrate.
  • Water droplets and the like attached to the light transmitting body 4 hang down due to gravity. Water droplets and the like reaching the first flange portion 23d from the light transmitting member 4 via the flange portion 26b of the connecting member 26 are scattered outside the first flange portion 23d by the vibration of the first flange portion 23d. Or atomized. Thereby, water droplets and the like can be more reliably removed from the translucent member 4, and the field of view of the imaging device 10A can be more reliably secured.
  • the light-transmitting member 4 may be made of various light-transmitting materials, but may be made of a resin.
  • the cost can be reduced.
  • the mechanical Q is low, so that it is difficult to vibrate. Therefore, when atomization is performed only in the second control mode without using the first control mode, the light transmitting body 4 may be made of resin, and cost reduction can be realized.
  • the control unit 12 alternately switches between the first control mode and the second control mode.
  • the first control mode allows the water droplets and the like attached to the light transmitting body 4 to drop more reliably, as in the first embodiment. Water drops or the like hanging down from the light transmitting body 4 can be atomized by the second control mode. This makes it difficult for water droplets and the like to remain vertically downward.
  • water droplets and the like can be more reliably and quickly drooped from the light transmitting member 4, and drainage from the light transmitting member 4 is enhanced. be able to.
  • water droplets and the like can be more reliably removed, and the visual field of the image sensor 10A can be removed. Can be more reliably ensured.
  • a water-repellent film is provided on the first flange portion 23d. Thereby, water droplets and the like can be more easily atomized.
  • the resonance frequency of the vibration of the first flange portion 23d and the resonance frequency of the vibration of the second flange portion 23e are made substantially equal.
  • the two resonance frequencies are equal. Therefore, the node of the vibration is located at the center of the vibration body 23 in the height direction.
  • the third flange portion 23f is located at the center between the first flange portion 23d and the second flange portion 23e. Therefore, the third flange portion 23f is located at a node of vibration. Since the third flange portion 23f is supported by the case member 18 shown in FIG. 2, the vibration is hardly hindered.
  • the region of the node of vibration is the height of the vibrating body 23. It may be shifted from the center in the height direction to the first opening end 3a side or the second opening end 3b side. In that case, it is preferable to dispose the third flange portion 23f at a position serving as a node of vibration.
  • the third flange portion 23f does not necessarily have to be arranged exactly at the node of the vibration.
  • the tuning fork-shaped cross-sectional shape formed by the first to third flange portions 23d to 23f is not particularly limited.
  • the cross-section of the tuning fork may be a two-legged, a three-legged, a four-legged, or a five-legged or more.
  • at least the first flange portion 23d and the second flange portion 23e may be provided on the outer surface 23g of the vibrating body 23.
  • the vibrator 23 may have a tuning fork shape of two or more legs in cross section, and may have an outer surface shape obtained by rotating the tuning fork shape of two or more legs with respect to the center axis of the cylindrical body.
  • FIG. 10 is a schematic perspective view of a light transmitting body and a case member according to the third embodiment.
  • FIG. 11 is a perspective view of the vibration device according to the third embodiment, which is schematically cut away.
  • the vibration device of the present embodiment includes a case member 38, and the light transmitting body 34 is directly joined to the case member 38.
  • the case member 38 is a peripheral member joined to the light transmitting body 34.
  • the light transmitting body 34 is a lens of the image sensor.
  • the hydrophilic film 5 is provided on the entire surface of the light transmitting body 34.
  • a circular opening 38a is provided on the surface of the case member 38 to which the translucent member 34 is joined.
  • the opening 38a is provided with a gap from the light transmitting body 34 in a plan view.
  • the vibration element 32 shown in FIG. 11 is arranged so as to seal the opening 38a.
  • the vibration element 32 may be provided at a position that does not overlap the light transmitting body 34 in a plan view.
  • the vibrating body 33 of the vibrating element 32 is indirectly connected to the light transmitting body 34 via a case member 38.
  • the vibration element 32 causes the case member 38 to vibrate.
  • the vibration element 32 has a vibration body 33 and the piezoelectric vibrator 7.
  • the vibrating body 33 has a first vibrating body part 33A, a second vibrating body part 33B, and a third vibrating body part 33C.
  • the second vibrating part 33B is cylindrical and has a first open end 33a and a second open end 33b.
  • the first vibrating body part 33A has a disk shape, and seals the first opening end 33a of the first vibrating body part 33A.
  • the third vibrating body part 33C is annular, and is connected to the second opening end 33b of the second vibrating body part 33B.
  • Each vibrating part may be formed separately and joined, or each vibrating part may be formed integrally.
  • the first vibrator 33A has a first flange 33d extending radially outward from a portion connected to the second vibrator 33B.
  • the thickness of the first flange portion 33d is smaller than the thickness of the first vibrating body portion 33A.
  • the third vibrating body part 33C has a second flange part 33e extending radially outward from a portion connected to the second vibrating body part 33B.
  • the thickness of the second flange 33e is the same as the thickness of the third vibrator 33C.
  • the second flange 33e is longer than the first flange 33d.
  • the piezoelectric vibrator 7 of the vibration element 32 is the same piezoelectric vibrator as in the first embodiment.
  • the piezoelectric vibrator 7 is arranged on a third vibrating body portion 33C of the vibrating body 33.
  • the control unit 12 controls the vibration in the second control mode in addition to the control in the first control mode. That is, control is performed in the first control mode or the second control mode.
  • the control of vibration in the first control mode is the same as in the first and second embodiments.
  • the control unit 12 controls the vibration so that, for example, the antinode of the vibration is located in the first vibrating body 33A of the vibrating body 33.
  • the vibration of the vibration element 32 propagates to the case member 38.
  • water droplets and the like that hang down below the light transmitting body 34 and are located near the outer peripheral edge of the light transmitting body 34 can be moved more reliably to the vibration element 32 side.
  • Water droplets and the like remaining between the light transmitting body 34 and the vibration element 32 can also be moved to the vibration element 32 side, and it is difficult to hinder the dripping of the water droplets and the like from the light transmitting body 34. Therefore, water droplets and the like can be more reliably removed from the light transmitting body 34, and the field of view of the image sensor can be more reliably secured.
  • the configuration of the vibration element and the shape of the opening of the case member are not limited to the above.
  • first to third modified examples of the third embodiment will be described. Also in the first to third modifications, similarly to the third embodiment, the field of view of the image sensor can be more reliably secured.
  • the vibrating body 43 includes a disk-shaped first vibrating body 43A and a cylindrical second vibrating body 43B, and has a third vibrating body. do not do.
  • the first vibrator 43A does not have a flange.
  • the piezoelectric vibrator 7 is arranged in the first vibrator 43A, and is located in an internal space surrounded by the first vibrator 43A and the second vibrator 43B.
  • the vibrating body 53 of the second modification includes a first vibrating body 53A having a rectangular plate shape and a second vibrating body 53B having a rectangular tube shape.
  • the second vibrating body 53B has a first side 53a, a second side 53b, a third side 53c, and a fourth side 53d.
  • the first side face 53a and the third side face 53c face each other and are connected to the long side of the first vibrating body 53A.
  • the second side face 53b and the fourth side face 53d face each other and are connected to the short side of the first vibrating body 53A.
  • the piezoelectric body of the piezoelectric vibrator 57 of the present modification has a rectangular plate shape. Electrodes are provided on both main surfaces of the piezoelectric body, respectively.
  • the vibration element 52 has two piezoelectric vibrators 57. One piezoelectric vibrator 57 is disposed on the first side surface 53a of the second vibrator 53B, and the other piezoelectric vibrator 57 is disposed on the third side surface 53c.
  • the vibrating body 63 of the third modified example includes a first vibrating body part 63A and a second vibrating body part 63B, as in the second modified example.
  • the planar shape of the first vibrating body 63A is a square
  • the second vibrating body 63B is a rectangular tube.
  • the vibration element 62 has four piezoelectric vibrators 57 similar to those of the second modification. Each of the piezoelectric vibrators 57 is provided on the first side surface 63a, the second side surface 63b, the third side surface 63c, and the fourth side surface 63d of the second vibrating body 63B.
  • Vibration Body 23c Support portions 23d to 23f First to third flange portions 23g Outside surface 23h Inner surface 26 Connecting member 26a Cylindrical portion 26b Flange portion 32 Vibrating element 33 Vibrating body 33A to 33C First to third vibrating body portions 33a, 33b: first and second opening end portions 33d, 33e: first and second flange portions 34: light transmitting member 38: case member 38a: opening portion 43: vibration Body 43A, 43B ...
  • first Second vibrating body portion 52 Vibrating element 53 Vibrating bodies 53A and 53B First and second vibrating body portions 53a to 53d First to fourth side surfaces 57

Abstract

The purpose of the present invention is to provide an oscillation device capable of more reliably securing the detection area of an optical detection element. Provided is an oscillation device 1 which includes a light transmission body 4 arranged to include at least a portion of the detection area of an image capture element 10A (optical detection element) and in which the optical axis L of the light transmission body 4 is arranged obliquely relative to the vertical direction, said oscillation device further including: a hydrophilic membrane 5 provided on a portion of the light transmission body 4 which includes at least the detection area; an oscillation element 2 having an oscillating body 3 directly or indirectly connected to the light transmission body 4; and a controller 12 electrically connected to the oscillation element 2. The controller 12 controls the oscillation element 2 in a first mode where the oscillation element alternates between oscillation and non-oscillation.

Description

振動装置及び光学検出装置Vibration device and optical detection device
　本発明は、機械的振動によって水滴等を除去することが可能な振動装置及び光学検出装置に関する。 The present invention relates to a vibration device and an optical detection device capable of removing water droplets and the like by mechanical vibration.
　従来、監視装置として用いられるカメラ等のイメージングデバイスにおいては、その視野を常に明瞭にすることが求められている。特に、車載用途等の屋外で使用されるカメラにおいては、雨滴等の水滴を除去するための機構が種々提案されている。下記の特許文献１には、カメラ本体の前方に配置される、透光性部分を有する振動装置が開示されている。この振動装置においては、透光性部分を大きく振動させることにより、透光体部に付着した水滴を霧化させる。特許文献１には、撮影される領域以外に親水性部分を構成することにより、水滴を親水性部分側に移動させ得ることが記載されている。 Conventionally, imaging devices such as cameras used as surveillance devices have been required to always have a clear visual field. In particular, for a camera used outdoors such as in a vehicle, various mechanisms for removing water droplets such as raindrops have been proposed. Patent Literature 1 below discloses a vibration device having a light-transmitting portion disposed in front of a camera body. In this vibrating device, water droplets adhering to the light transmitting portion are atomized by vibrating the light transmitting portion largely. Patent Literature 1 describes that a water droplet can be moved to a hydrophilic portion side by forming a hydrophilic portion other than a region to be photographed.
国際公開２０１７／０２２３８２号WO 2017/022382
　特許文献１に記載された振動装置では、透光性部分における、カメラ本体の視野領域に位置する部分に、振動の腹及び振動の節が形成される。このとき、透光性部分に水滴が付着すると、振動の腹に向かい水滴が移動し、振動の腹付近において水滴が霧化される。しかしながら、振動の節に位置する水滴は、振動の腹の方に移動し難い。そのため、水滴が残留し、カメラ本体の視野が阻害されるおそれがあった。 振動 In the vibration device described in Patent Literature 1, antinodes of vibration and nodes of vibration are formed in a portion of the translucent portion located in the visual field region of the camera body. At this time, if a water droplet adheres to the translucent portion, the water droplet moves toward the antinode of the vibration, and the water droplet is atomized near the antinode of the vibration. However, the water droplet located at the node of the vibration is hard to move toward the antinode of the vibration. For this reason, water droplets may remain and the field of view of the camera body may be obstructed.
　本発明の目的は、光学検出素子の検出領域をより確実に確保することができる、振動装置及び光学検出装置を提供することにある。 An object of the present invention is to provide a vibration device and an optical detection device that can more reliably secure a detection area of an optical detection element.
　本発明に係る振動装置は、光学検出素子の検出領域の少なくとも一部を含むように配置される透光体を備え、前記透光体の光軸が鉛直方向から傾くように配置される振動装置であって、前記透光体における、少なくとも前記検出領域を含む部分に設けられている親水性膜と、前記透光体に直接的にまたは間接的に連結されている振動体を有する振動素子と、前記振動素子に電気的に接続されている制御部とをさらに備え、前記制御部が、前記振動素子の振動及び静止を交互に切り替える第１の制御モードにより振動を制御する。 A vibration device according to the present invention includes a light-transmitting member disposed so as to include at least a part of a detection region of an optical detection element, and a vibration device disposed such that an optical axis of the light-transmitting member is inclined from a vertical direction. And a vibrating element having a vibrating body directly or indirectly connected to the translucent body, wherein the hydrophilic film is provided at least in a portion including the detection region in the translucent body. A control unit electrically connected to the vibrating element, wherein the control unit controls the vibration in a first control mode in which the vibrating element alternately switches between vibration and rest.
　本発明に係る光学検出装置は、本発明に従って構成された振動装置と、前記透光体に検出領域が含まれるように配置されている光学検出素子とを備える。 The optical detection device according to the present invention includes a vibration device configured according to the present invention, and an optical detection element arranged so that the light transmitting body includes a detection region.
　本発明によれば、光学検出素子の検出領域をより確実に確保することができる、振動装置及び光学検出装置を提供することができる。 According to the present invention, it is possible to provide a vibration device and an optical detection device that can more reliably secure a detection area of an optical detection element.
図１は、本発明の第１の実施形態に係る振動装置を有するイメージングデバイスの模式的斜視図である。FIG. 1 is a schematic perspective view of an imaging device having a vibration device according to the first embodiment of the present invention. 図２は、本発明の第１の実施形態に係る振動装置を有するイメージングデバイスの模式的正面断面図である。FIG. 2 is a schematic front sectional view of an imaging device having the vibration device according to the first embodiment of the present invention. 図３は、本発明の第１の実施形態における圧電振動子の模式的斜視図である。FIG. 3 is a schematic perspective view of the piezoelectric vibrator according to the first embodiment of the present invention. 図４は、各振動モードを説明するための模式図である。FIG. 4 is a schematic diagram for explaining each vibration mode. 図５は、キャピラリーウェーブの励振周波数ｆと波長λとの関係を示す図である。FIG. 5 is a diagram showing a relationship between the excitation frequency f of the capillary wave and the wavelength λ. 図６（ａ）～図６（ｄ）は、第１の制御モードにより振動を制御した場合の水滴等の液滴の挙動を説明するための、本発明の第１の実施形態に係る振動装置の模式的平面図である。FIGS. 6A to 6D show a vibration device according to the first embodiment of the present invention for explaining the behavior of a droplet such as a water droplet when the vibration is controlled by the first control mode. FIG. 3 is a schematic plan view of FIG. 図７（ａ）～図７（ｃ）は、第１の実施形態における圧電体の分極構造の例を説明するための模式的斜視図である。FIGS. 7A to 7C are schematic perspective views illustrating an example of the polarization structure of the piezoelectric body according to the first embodiment. 図８は、本発明の第２の実施形態に係る振動装置の模式的正面断面図である。FIG. 8 is a schematic front sectional view of a vibration device according to a second embodiment of the present invention. 図９は、本発明の第２の実施形態における振動体の、第２の制御モードにおける振動の状態を説明するための模式的断面図である。FIG. 9 is a schematic cross-sectional view illustrating a state of vibration of the vibrating body according to the second embodiment of the present invention in the second control mode. 図１０は、本発明の第３の実施形態における透光体及びケース部材の模式的斜視図である。FIG. 10 is a schematic perspective view of a light transmitting body and a case member according to the third embodiment of the present invention. 図１１は、本発明の第３の実施形態における振動装置の模式的部分切欠き斜視図である。FIG. 11 is a schematic partially cutaway perspective view of the vibration device according to the third embodiment of the present invention. 図１２は、本発明の第３の実施形態の第１の変形例における振動体の模式的部分切欠き斜視図である。FIG. 12 is a schematic partial cutaway perspective view of a vibrating body according to a first modification of the third embodiment of the present invention. 図１３は、本発明の第３の実施形態の第２の変形例におけるケース部材の模式的斜視図である。FIG. 13 is a schematic perspective view of a case member according to a second modification of the third embodiment of the present invention. 図１４は、本発明の第３の実施形態の第２の変形例における振動体の模式的部分切欠き斜視図である。FIG. 14 is a schematic partial cutaway perspective view of a vibrating body according to a second modification of the third embodiment of the present invention. 図１５は、本発明の第３の実施形態の第３の変形例における振動体の模式的部分切欠き斜視図である。FIG. 15 is a perspective view schematically illustrating a vibrating body according to a third modification of the third embodiment of the present invention.
　以下、図面を参照しつつ、本発明の具体的な実施形態を説明することにより、本発明を明らかにする。 Hereinafter, the present invention will be clarified by describing specific embodiments of the present invention with reference to the drawings.
　なお、本明細書に記載の各実施形態は、例示的なものであり、異なる実施形態間において、構成の部分的な置換または組み合わせが可能であることを指摘しておく。 Note that each embodiment described in the present specification is merely an example, and it should be pointed out that partial replacement or combination of configurations between different embodiments is possible.
　図１は、第１の実施形態に係る振動装置を有するイメージングデバイスの模式的斜視図である。図２は、第１の実施形態に係る振動装置を有するイメージングデバイスの模式的正面断面図である。なお、図２以外の断面図や斜視図においては、後述する制御部を省略することがある。 FIG. 1 is a schematic perspective view of an imaging device having the vibration device according to the first embodiment. FIG. 2 is a schematic front sectional view of an imaging device having the vibration device according to the first embodiment. In a cross-sectional view or a perspective view other than FIG. 2, a control unit described later may be omitted.
　図１に示すイメージングデバイス１０は振動装置１を有する。振動装置１は、振動により水滴や異物を移動させることにより、撮像素子の視野内から水滴や異物を除去する振動装置である。図２に示すように、振動装置１は、筒状の振動体３を含む振動素子２と、振動素子２の開口部を覆うように設けられている透光体４と、振動素子２に電気的に接続されている制御部１２とを有する。透光体４の全面に親水性膜５が設けられている。なお、本明細書において透光体４の全面とは、振動装置１の内部に光やエネルギー線を透過させる外表面の全面をいう。 イ メ ー ジ ン グ The imaging device 10 shown in FIG. The vibration device 1 is a vibration device that removes water droplets and foreign matter from the field of view of the image sensor by moving water droplets and foreign matter by vibration. As shown in FIG. 2, the vibration device 1 includes a vibration element 2 including a cylindrical vibration body 3, a light transmitting body 4 provided to cover an opening of the vibration element 2, and an electric And a control unit 12 that is electrically connected. A hydrophilic film 5 is provided on the entire surface of the light transmitting body 4. In this specification, the entire surface of the light transmitting body 4 refers to the entire outer surface of the vibrating device 1 that transmits light and energy rays.
　振動装置１は、透光体４の光軸Ｌが鉛直方向から傾くように配置される。より具体的には、本実施形態では、透光体４の光軸Ｌが鉛直方向に直交するように振動装置１が配置される。振動装置１は、鉛直方向に対して４５°以上傾くように配置される場合に、透光体４から水滴等を特に好適に除去することができる。 The vibration device 1 is arranged so that the optical axis L of the light transmitting body 4 is inclined from the vertical direction. More specifically, in the present embodiment, the vibration device 1 is arranged such that the optical axis L of the light transmitting body 4 is orthogonal to the vertical direction. When the vibration device 1 is arranged to be inclined at an angle of 45 ° or more with respect to the vertical direction, water droplets and the like can be particularly preferably removed from the light transmitting member 4.
　イメージングデバイス１０は、振動装置１を一端側で支持している筒状のケース部材１８と、ケース部材１８の他端に固定されているベース部材１４とを有する。振動装置１、ケース部材１８及びベース部材１４により囲まれた内部空間内に、撮像素子１０Ａが配置されている。それによって、本発明の一実施形態に係る光学検出装置としてのイメージングデバイス１０が構成されている。 The imaging device 10 includes a cylindrical case member 18 that supports the vibration device 1 at one end, and a base member 14 that is fixed to the other end of the case member 18. An image sensor 10A is arranged in an internal space surrounded by the vibration device 1, the case member 18, and the base member 14. Thereby, an imaging device 10 as an optical detection device according to one embodiment of the present invention is configured.
　撮像素子１０Ａとしては、例えば、可視領域から遠赤外領域のいずれかの波長の光を受光する、ＣＭＯＳ、ＣＣＤ、ボロメーターやサーモパイル等を挙げることができる。イメージングデバイス１０としては、例えば、カメラ、ＲａｄａｒやＬＩＤＡＲデバイス等を挙げることができる。 As the imaging element 10A, for example, a CMOS, a CCD, a bolometer, a thermopile, or the like that receives light of any wavelength from the visible region to the far infrared region can be used. Examples of the imaging device 10 include a camera, a Radar and a LIDAR device, and the like.
　図２に示すように、ケース部材１８はベース部材１４上に固定されている。ベース部材１４上に複数の脚部１５が固定されている。複数の脚部１５上に基板１６が固定されている。基板１６上に撮像素子１０Ａが固定されている。撮像素子１０Ａは、撮像素子本体１０ａ及びレンズモジュール１０ｂを有する。撮像素子１０Ａにおけるレンズモジュール１０ｂ側の部分が、振動装置１の内部空間内に位置しており、残りの部分がケース部材１８の内部空間内に位置している。なお、撮像素子１０Ａ全体が振動装置１の内部空間内に位置していてもよい。 ケ ー ス As shown in FIG. 2, the case member 18 is fixed on the base member 14. A plurality of legs 15 are fixed on the base member 14. A board 16 is fixed on the plurality of legs 15. The image sensor 10A is fixed on the substrate 16. The imaging device 10A has an imaging device body 10a and a lens module 10b. The portion on the lens module 10b side of the imaging element 10A is located in the internal space of the vibration device 1, and the remaining portion is located in the internal space of the case member 18. Note that the entire imaging element 10A may be located in the internal space of the vibration device 1.
　本実施形態では、基板１６の少なくとも一方の主面またはベース部材１４の一方の主面に撮像素子１０Ａを駆動する回路や上記制御部１２が設けられている。 In the present embodiment, a circuit for driving the image sensor 10A and the control unit 12 are provided on at least one main surface of the substrate 16 or one main surface of the base member 14.
　なお、振動装置１、ケース部材１８及びベース部材１４により囲まれた内部空間内には、撮像素子１０Ａ以外の、エネルギー線を光学的に検出する光学検出素子が配置されていてもよい。検出するエネルギー線としては、例えば、電磁波や赤外線等の活性エネルギー線であってもよい。図２に示すイメージングデバイス１０においては、撮像素子１０Ａの検出領域としての視野が、透光体４に含まれる。なお、透光体４は、撮像素子１０Ａの視野の少なくとも一部を含むように配置されていればよい。ここで、本明細書における透光性とは、少なくとも上記光学検出素子が検出する波長のエネルギー線や光が透過する透光性をいう。 In the internal space surrounded by the vibration device 1, the case member 18, and the base member 14, an optical detection element other than the imaging element 10A for optically detecting an energy ray may be arranged. The energy ray to be detected may be, for example, an active energy ray such as an electromagnetic wave or an infrared ray. In the imaging device 10 shown in FIG. 2, a field of view as a detection region of the imaging element 10 </ b> A is included in the light transmitting body 4. Note that the light transmitting body 4 only needs to be disposed so as to include at least a part of the field of view of the imaging element 10A. Here, the term "light-transmitting property" in the present specification refers to a light-transmitting property at which an energy ray or light having a wavelength detected by the optical detection element is transmitted.
　図１及び図２に示すイメージングデバイス１０は一例であって、イメージングデバイス１０の構成は上記に限定されない。イメージングデバイス１０は、振動装置１及び撮像素子１０Ａを有していればよい。 The imaging device 10 shown in FIGS. 1 and 2 is an example, and the configuration of the imaging device 10 is not limited to the above. The imaging device 10 only needs to include the vibration device 1 and the imaging element 10A.
　以下において、振動装置１の詳細を説明する。 詳細 The details of the vibration device 1 will be described below.
　図２に示すように、振動素子２は振動体３及び圧電振動子７を有する。本実施形態では、振動体３は略円筒状であり、第１の開口端部３ａ及び第２の開口端部３ｂを有する。ここで、第１の開口端部３ａ及び第２の開口端部３ｂを結ぶ方向に平行な方向を振動装置１の高さ方向とし、高さ方向に直交する方向を径方向とする。振動体３は、第１の開口端部３ａ側に位置し、径方向内側に延びる延長部３ｃを有する。延長部３ｃの透光体４側の部分は第１の開口端部３ａに含まれる。上記透光体４は、振動体３の開口部を覆うように、第１の開口端部３ａにおける延長部３ｃに位置する部分に連結されている。 振動 As shown in FIG. 2, the vibration element 2 has a vibration body 3 and a piezoelectric vibrator 7. In the present embodiment, the vibrating body 3 is substantially cylindrical and has a first open end 3a and a second open end 3b. Here, the direction parallel to the direction connecting the first opening end 3a and the second opening end 3b is defined as the height direction of the vibration device 1, and the direction orthogonal to the height direction is defined as the radial direction. The vibrating body 3 has an extension 3c located on the first opening end 3a side and extending radially inward. The portion of the extension 3c on the light transmitting body 4 side is included in the first opening end 3a. The light transmitting member 4 is connected to a portion of the first opening end 3a located at the extension 3c so as to cover the opening of the vibrating member 3.
　振動体３は、第１の開口端部３ａと第２の開口端部３ｂとの間に位置しているヒンジ部３ｄを有する。ヒンジ部３ｄは径方向外側に延びている。振動装置１は、ヒンジ部３ｄにおいて、ケース部材１８に支持されている。ここで、振動体３の径方向における厚みを肉厚としたときに、ヒンジ部３ｄと延長部３ｃとの間に位置している部分の肉厚は、ヒンジ部３ｄと第２の開口端部３ｂとの間に位置している部分の肉厚より薄い。 The vibrating body 3 has a hinge 3d located between the first open end 3a and the second open end 3b. The hinge 3d extends radially outward. The vibration device 1 is supported by the case member 18 at the hinge 3d. Here, when the thickness in the radial direction of the vibrating body 3 is a thickness, the thickness of the portion located between the hinge 3d and the extension 3c is the thickness of the hinge 3d and the second opening end. 3b.
　なお、振動体３はヒンジ部３ｄ及び延長部３ｃを有していなくともよく、振動体３の肉厚は全ての部分において同じであってもよい。振動体３は筒状であればよく、例えば、振動体３は円筒状や角筒状であってもよい。 Note that the vibrating body 3 may not have the hinge portion 3d and the extension portion 3c, and the thickness of the vibrating body 3 may be the same in all portions. The vibrating body 3 may have a cylindrical shape. For example, the vibrating body 3 may have a cylindrical shape or a rectangular cylindrical shape.
　振動素子２においては、振動体３の第２の開口端部３ｂに、圧電振動子７が配置されている。圧電振動子７は、透光体４及び振動体３の連結体を振動させる。 圧 電 In the vibrating element 2, the piezoelectric vibrator 7 is disposed at the second opening end 3 b of the vibrating body 3. The piezoelectric vibrator 7 vibrates the connected body of the light transmitting body 4 and the vibrating body 3.
　図３は、第１の実施形態における圧電振動子の模式的斜視図である。 FIG. 3 is a schematic perspective view of the piezoelectric vibrator according to the first embodiment.
　圧電振動子７は円環状の圧電体８を有する。圧電体８は、例えば、Ｐｂ（Ｚｒ，Ｔｉ）Ｏ３や（Ｋ，Ｎａ）ＮｂＯ３等の適宜の圧電セラミックスまたはＬｉＴａＯ３やＬｉＮｂＯ３等の適宜の圧電単結晶からなる。圧電体８の一方主面には電極９ａが設けられており、他方主面には電極９ｂが設けられている。 The piezoelectric vibrator 7 has an annular piezoelectric body 8. The piezoelectric body 8 is made of, for example, an appropriate piezoelectric ceramic such as Pb (Zr, Ti) O 3 or (K, Na) NbO 3 or an appropriate piezoelectric single crystal such as LiTaO 3 or LiNbO 3 . An electrode 9a is provided on one main surface of the piezoelectric body 8, and an electrode 9b is provided on the other main surface.
　本実施形態では、振動体３に１つの円環状の圧電振動子７が配置されている。なお、圧電振動子７の形状及び個数は上記に限定されない。例えば、平面視において、振動体３の中心を回転軸とした周回方向に沿い、複数の圧電振動子が配置されていてもよい。 In this embodiment, one annular piezoelectric vibrator 7 is disposed on the vibrating body 3. The shape and the number of the piezoelectric vibrators 7 are not limited to the above. For example, in a plan view, a plurality of piezoelectric vibrators may be arranged along a circumferential direction with the center of the vibrating body 3 as a rotation axis.
　透光体４は、振動体３に直接的に連結されている。なお、透光体４は、他の部材を介して間接的に振動体３に連結されていてもよい。透光体４は、本実施形態ではドーム状である。なお、透光体４の形状は上記に限られず、例えば、円板状等であってもよい。透光体４は透光性材料からなる。透光性材料としては、例えば、透光性の樹脂、ガラスまたは透光性のセラミックス等を用いることができる。 光 The light transmitting body 4 is directly connected to the vibrating body 3. Note that the light transmitting body 4 may be indirectly connected to the vibrating body 3 via another member. The light transmitting body 4 has a dome shape in the present embodiment. The shape of the light transmitting body 4 is not limited to the above, and may be, for example, a disk shape. The light transmitting body 4 is made of a light transmitting material. As the light-transmitting material, for example, a light-transmitting resin, glass, or a light-transmitting ceramic can be used.
　上述したように、透光体４の全面に親水性膜５が設けられている。なお、親水性膜５は、少なくとも撮像素子１０Ａの視野を含む部分に設けられていればよい。親水性膜５の材料としては、例えば、無機系ではＴｉＯ２、有機系では親水化ＰＶＤＦ等を挙げることができる。 As described above, the hydrophilic film 5 is provided on the entire surface of the light transmitting body 4. Note that the hydrophilic film 5 only needs to be provided at least in a portion including the visual field of the imaging element 10A. Examples of the material of the hydrophilic film 5 include TiO 2 for an inorganic type and hydrophilic PVDF for an organic type.
　振動素子２に上記制御部１２が電気的に接続されている。より具体的には、制御部１２は圧電振動子７に電気的に接続されている。制御部１２は、圧電振動子７による、透光体４及び振動体３の連結体の振動を制御する。本実施形態では、制御部１２は、振動体３のヒンジ部３ｄに振動の節が位置するように、透光体４及び振動体３の連結体を振動させる。それによって、ケース部材１８により振動装置１を容易に支持することができ、イメージングデバイス１０の密閉性を高めることができる。加えて、ケース部材１８による支持によって、振動装置１の振動を阻害し難い。 制 御 The control unit 12 is electrically connected to the vibration element 2. More specifically, the control unit 12 is electrically connected to the piezoelectric vibrator 7. The control unit 12 controls the vibration of the connected body of the light transmitting body 4 and the vibrating body 3 by the piezoelectric vibrator 7. In the present embodiment, the control unit 12 vibrates the connected body of the light transmitting body 4 and the vibrating body 3 so that the node of the vibration is located at the hinge 3d of the vibrating body 3. Thereby, the vibration device 1 can be easily supported by the case member 18, and the sealing property of the imaging device 10 can be improved. In addition, the support of the case member 18 makes it difficult to hinder the vibration of the vibration device 1.
　振動装置１の制御部１２は、振動素子２の振動及び静止を交互に切り替える第１の制御モードにより振動を制御する。 The control unit 12 of the vibration device 1 controls the vibration by the first control mode in which the vibration of the vibration element 2 and the stationary state are alternately switched.
　本実施形態の特徴は、透光体４の全面に親水性膜５が設けられていること及び第１の制御モードにより振動を制御する制御部１２を有することにある。それによって、光学検出素子の検出領域としての、撮像素子１０Ａの視野をより確実に確保することができる。これを以下において説明する。 特 徴 The features of the present embodiment are that the hydrophilic film 5 is provided on the entire surface of the light transmitting body 4 and that the control unit 12 controls the vibration in the first control mode. Thereby, the visual field of the imaging element 10A as a detection area of the optical detection element can be more reliably secured. This will be described below.
　本実施形態においては、以下の振動モードを利用する。 に お い て In the present embodiment, the following vibration modes are used.
　図４は、各振動モードを説明するための模式図である。図４においては、平面視したときの透光体における各領域の振動の位相を示す。＋の符号が付されている領域と、－の符号が付されている領域とは、振動の位相が互いに逆であることを示す。 FIG. 4 is a schematic diagram for explaining each vibration mode. FIG. 4 shows the phase of vibration of each region in the light transmitting body when viewed in plan. The region marked with a + sign and the region marked with a-sign indicate that the phases of vibration are opposite to each other.
　振動モードは（ｍ，ｎ）モードで表すことができる。ここで、ｍ及びｎは整数である。ｍは周回方向に延びる振動の節のラインの本数であり、ｎは径方向に延びる振動の節のラインの本数である。本実施形態においては、例えば、（０，０）モードを利用する。 The vibration mode can be represented by the (m, n) mode. Here, m and n are integers. m is the number of vibration node lines extending in the circumferential direction, and n is the number of vibration node lines extending in the radial direction. In the present embodiment, for example, the (0,0) mode is used.
　ここで、振動装置１の圧電振動子７は、透光体４において（０，０）モードの振動を励振させることができるように構成されている。なお、圧電振動子７に印加する電圧等を上記制御部１２により制御することによって、（０，０）モードの振動を励振させる。 Here, the piezoelectric vibrator 7 of the vibration device 1 is configured to be able to excite the (0, 0) mode vibration in the light transmitting body 4. The (0, 0) mode vibration is excited by controlling the voltage and the like applied to the piezoelectric vibrator 7 by the control unit 12.
　本実施形態においては、透光体４の全面に親水性膜５が設けられている。そのため、透光体４を振動させても水滴等は霧化され難い。これは以下の理由によると考えられる。 In the present embodiment, the hydrophilic film 5 is provided on the entire surface of the light transmitting body 4. Therefore, even if the light transmitting member 4 is vibrated, water droplets and the like are hardly atomized. This is considered for the following reasons.
　振動による液滴の霧化は、キャピラリーウェーブの定在波が励振されて液滴の一部が柱状となり、柱状となった部分の先端が飛散することによる。キャピラリーウェーブの波長をλ、励振周波数をｆ、液滴の表面張力をσ、液滴の密度をρとしたときに、波長λは下記の式１により表される。
Figure JPOXMLDOC01-appb-M000001
 The atomization of the droplet by the vibration is due to the fact that the standing wave of the capillary wave is excited, a part of the droplet becomes columnar, and the tip of the columnar portion scatters. When the wavelength of the capillary wave is λ, the excitation frequency is f, the surface tension of the droplet is σ, and the density of the droplet is ρ, the wavelength λ is represented by the following equation 1.
Figure JPOXMLDOC01-appb-M000001
　σを７２．７５ｍＮ／ｍとすると、下記の図５のような波長λの励振周波数ｆに対する依存性が示される。 Assuming that σ is 72.75 mN / m, the dependence of the wavelength λ on the excitation frequency f is shown in FIG. 5 below.
　図５は、キャピラリーウェーブの励振周波数ｆと波長λとの関係を示す図である。 FIG. 5 is a diagram showing the relationship between the excitation frequency f of the capillary wave and the wavelength λ.
　図５に示すように、励振周波数ｆが、一般的に加湿器に用いられる程度の周波数である１０００ｋＨｚを超えると、キャピラリーウェーブの波長λは１０μｍ程度となり、気体に近い霧となることがわかる。 と As shown in FIG. 5, when the excitation frequency f exceeds 1000 kHz, which is a frequency generally used for humidifiers, the wavelength λ of the capillary wave becomes about 10 μm, which indicates that the fog is close to a gas.
　ここで、水滴等の液滴は親水性膜に付着した直後に親水性膜の表面に広がり液膜となる。液膜はさらに広がり、液膜の膜厚は薄くなる。液滴を霧化させる振動装置の振動体が励振される周波数は一般的に５０ｋＨｚ程度である。キャピラリーウェーブの波長λは、励振周波数ｆが５０ｋＨｚ程度の場合においては９０μｍ程度である。液膜の膜厚がキャピラリーウェーブの波長λよりも薄い場合には、キャピラリーウェーブの定在波は励振され難い。そのため、親水性膜上の液は霧化され難い。 液滴 Here, a droplet such as a water droplet spreads on the surface of the hydrophilic film immediately after adhering to the hydrophilic film and becomes a liquid film. The liquid film spreads further, and the liquid film becomes thinner. The frequency at which the vibrating body of the vibrating device for atomizing the droplets is excited is generally about 50 kHz. The wavelength λ of the capillary wave is about 90 μm when the excitation frequency f is about 50 kHz. When the thickness of the liquid film is smaller than the wavelength λ of the capillary wave, the standing wave of the capillary wave is hardly excited. Therefore, the liquid on the hydrophilic film is not easily atomized.
　図２に示すように、振動装置１においては、透光体４の全面に親水性膜５が設けられているため、液滴は霧化され難い。一方で、液膜が透光体４を覆うため、振動の腹に向かい液滴の移動が生じ易くなる。 As shown in FIG. 2, in the vibration device 1, since the hydrophilic film 5 is provided on the entire surface of the light transmitting body 4, droplets are not easily atomized. On the other hand, since the liquid film covers the light transmitting body 4, the movement of the droplet toward the antinode of the vibration is likely to occur.
　図６（ａ）～図６（ｄ）は、第１の制御モードにより振動を制御した場合の水滴等の液滴の挙動を説明するための、第１の実施形態に係る振動装置の模式的平面図である。 FIGS. 6A to 6D are schematic diagrams of the vibration device according to the first embodiment for explaining the behavior of a droplet such as a water droplet when the vibration is controlled by the first control mode. It is a top view.
　図６（ａ）に示すように、透光体４に設けられた親水性膜５に複数の液滴Ａが付着している。ここで、上述したように第１の制御モードは振動素子２の振動及び静止を交互に切り替える制御モードである。図６（ａ）に示す透光体４は、振動の腹が中央に位置する（０，０）モードにより振動している。次に、図６（ｂ）に示すように、液滴Ａは振動の腹が位置する透光体４の中央に向かい移動し、集合する。次に、制御部１２により透光体４を静止させる。これにより、液滴Ａを透光体４の中央に向かい移動させる力が液滴Ａに加わらなくなる。さらに、透光体４の中央近傍に液滴Ａが集合して一体となったことよって、液滴Ａに加わる重力が大きくなる。よって、図６（ｃ）に示すように、液滴Ａが垂下する。次に、図６（ｄ）に示すように、液滴Ａは透光体４よりも下方へ垂下する。液滴Ａと共に異物が含まれていた場合においても、集合して一体となった液滴Ａと共に異物を下方へ垂下させ得る。それによって、透光体４から液滴Ａ等を除去することができる。 複数 As shown in FIG. 6A, a plurality of droplets A adhere to the hydrophilic film 5 provided on the light transmitting body 4. Here, as described above, the first control mode is a control mode for alternately switching the vibration and the rest of the vibration element 2. The light transmitting body 4 shown in FIG. 6A is vibrating in the (0,0) mode in which the antinode of vibration is located at the center. Next, as shown in FIG. 6B, the droplets A move toward the center of the light transmitting body 4 where the antinode of vibration is located and gather. Next, the light transmitting body 4 is stopped by the control unit 12. As a result, a force for moving the droplet A toward the center of the light transmitting member 4 is not applied to the droplet A. Further, since the droplets A are gathered and integrated near the center of the light transmitting body 4, the gravity applied to the droplets A increases. Therefore, the droplet A hangs down as shown in FIG. Next, as shown in FIG. 6D, the droplet A hangs down below the light transmitting body 4. Even in the case where foreign matter is included together with the droplet A, the foreign matter can hang down together with the integrated droplet A. Thereby, the droplets A and the like can be removed from the light transmitting member 4.
　なお、透光体４に設けられた親水性膜５の全面に液膜が広がり、液が液滴という形態にならない場合においても、図６（ｂ）に示す場合と同様に、液が振動の腹に位置する部分に集合し、該部分において液膜の膜厚が厚くなる。次に、図６（ｃ）及び図６（ｄ）に示す場合と同様に、液が垂下する。 Note that, even when the liquid film spreads over the entire surface of the hydrophilic film 5 provided on the light transmitting body 4 and the liquid does not form a droplet, the liquid may vibrate as in the case shown in FIG. It gathers in the part located on the belly, and the liquid film becomes thick in this part. Next, as in the case shown in FIGS. 6C and 6D, the liquid hangs down.
　第１の制御モードにより振動素子２の振動及び静止を繰り返すことにより、水滴等をより確実に除去することができ、撮像素子１０Ａの視野をより確実に確保することができる。加えて、水滴等を霧化させる必要はないため、圧電振動子７に高電圧を印加する必要はない。従って、効率的に水滴等を除去することができる。 (4) By repeatedly oscillating and stopping the vibration element 2 in the first control mode, water droplets and the like can be more reliably removed, and the field of view of the imaging element 10A can be more reliably secured. In addition, since it is not necessary to atomize water droplets or the like, it is not necessary to apply a high voltage to the piezoelectric vibrator 7. Therefore, water droplets and the like can be efficiently removed.
　また、親水性膜５は、撮像素子１０Ａの視野が透光体４内に位置している場合には、親水性膜５は、視野よりも広いことが好ましい。それによって、液滴Ａの垂下をより確実に行うことができる。 In addition, when the field of view of the imaging element 10A is located in the light transmitting body 4, the hydrophilic film 5 is preferably wider than the field of view. Thereby, the dropping of the droplet A can be performed more reliably.
　本実施形態では、第１の制御モードにおいて、透光体４を振動させる際に、（０，０）モードを利用する例を示しているが、（０，０）モード以外の振動モードを利用してもよい。例えば、下記に示すように、（０，１）モードや（０，２）モード等の振動モードを利用してもよい。 In the present embodiment, an example in which the (0, 0) mode is used when the light transmitting body 4 is vibrated in the first control mode, but a vibration mode other than the (0, 0) mode is used. May be. For example, as described below, a vibration mode such as a (0, 1) mode or a (0, 2) mode may be used.
　図７（ａ）～図７（ｃ）は、第１の実施形態における圧電体の分極構造の例を説明するための模式的斜視図である。図７（ａ）において、＋の符号が付されている領域は、分極方向が圧電体の図７（ａ）における下面から上面に向かう方向となっている領域であることを示す。－の符号が付されている領域は、分極方向が圧電体の上面から下面に向かう方向となっている領域であることを示す。図７（ｂ）及び図７（ｃ）においても同様である。 FIGS. 7A to 7C are schematic perspective views illustrating an example of the polarization structure of the piezoelectric body according to the first embodiment. In FIG. 7A, a region with a + sign indicates a region in which the polarization direction is from the lower surface to the upper surface in FIG. 7A of the piezoelectric body. A region with a minus sign indicates that the polarization direction is a direction from the upper surface to the lower surface of the piezoelectric body. The same applies to FIGS. 7B and 7C.
　図７（ａ）では、周回方向に配置された領域の分極方向が全て同じである。ここで、図３に示す圧電振動子７の電極９ａ及び電極９ｂは円環状である。よって、図７（ａ）に示す分極構造の圧電体８を用いる場合、透光体４において（０，０）モードの振動が励振される。図７（ｂ）では、周回方向に４分割された領域において、中心を介して対向している両側の領域の分極方向が反対となっている。図７（ｂ）に示す分極構造の圧電体８を用いる場合、透光体４において（０，１）モードの振動が励振される。図７（ｃ）では、周回方向に４分割された領域において、中心を介して対向している両側の領域の分極方向が等しくされている。図７（ｃ）に示す分極構造の圧電体８を用いる場合、透光体４において（０，２）モードの振動が励振される。 で は In FIG. 7A, the polarization directions of the regions arranged in the circumferential direction are all the same. Here, the electrodes 9a and 9b of the piezoelectric vibrator 7 shown in FIG. 3 are annular. Therefore, when the piezoelectric body 8 having the polarization structure shown in FIG. 7A is used, (0, 0) mode vibration is excited in the light transmitting body 4. In FIG. 7B, in the region divided into four in the circumferential direction, the polarization directions of the regions on both sides facing each other via the center are opposite. When the piezoelectric body 8 having the polarization structure shown in FIG. 7B is used, the (0, 1) mode vibration is excited in the light transmitting body 4. In FIG. 7C, in the region divided into four in the circumferential direction, the polarization directions of both regions facing each other with the center therebetween are equalized. When the piezoelectric body 8 having the polarization structure shown in FIG. 7C is used, (0, 2) mode vibration is excited in the light transmitting body 4.
　ここで、図３に示した電極９ａ及び電極９ｂは周回方向において分割されていてもよく、分割された各電極が圧電体８の上記各領域に配置されていてもよい。この場合には、図７（ａ）に示す分極構造の圧電体８を用いる場合においても、中心を介して対向している両側の領域に互いに逆の位相の交流電圧を印加することにより、透光体４において（０，１）モードの振動を励振させることができる。あるいは、中心を介して対向している両側の領域に同じ位相の交流電圧を印加することにより、透光体４において（０，２）モードの振動を励振させることができる。 Here, the electrode 9a and the electrode 9b shown in FIG. 3 may be divided in the circumferential direction, and the divided electrodes may be arranged in the above-described regions of the piezoelectric body 8. In this case, even when the piezoelectric body 8 having the polarization structure shown in FIG. 7A is used, the AC voltages having phases opposite to each other are applied to the regions on both sides opposed to each other with the center therebetween. In the optical body 4, the (0, 1) mode vibration can be excited. Alternatively, the (0, 2) mode vibration can be excited in the light transmitting member 4 by applying an AC voltage having the same phase to both regions facing each other via the center.
　（０，１）モードまたは（０，２）モードを利用した場合には、透光体４の光軸Ｌを含まない部分に振動の腹を位置させることができる。それによって、水滴等を振動の腹近傍に集合させたときにおいても、撮像素子１０Ａの視野の阻害を抑制することができる。 When the (0, 1) mode or the (0, 2) mode is used, the antinode of the vibration can be located at a portion not including the optical axis L of the light transmitting body 4. Thereby, even when water droplets and the like are gathered near the antinode of vibration, it is possible to suppress the obstruction of the visual field of the image sensor 10A.
　透光体４が撮像素子１０Ａの視野外の領域に位置する部分を有する場合には、視野外の領域に位置する部分に振動の腹が位置するように、制御部１２が振動を制御することが好ましい。例えば、撮像素子１０Ａの視野が透光体４の中央付近のみに位置する場合には、第１の制御モードにおいて、（０，１）モードまたは（０，２）モード等を利用することが好適である。それによって、撮像素子１０Ａの視野がより一層阻害され難い。 When the light transmitting body 4 has a portion located in a region outside the field of view of the image sensor 10A, the control unit 12 controls the vibration so that the antinode of the vibration is located in a portion located in the region outside the field of view. Is preferred. For example, when the field of view of the imaging element 10A is located only near the center of the light transmitting body 4, it is preferable to use the (0, 1) mode or the (0, 2) mode in the first control mode. It is. Thereby, the field of view of the imaging element 10A is hardly hindered.
　あるいは、透光体４の光軸Ｌが鉛直方向から傾くように配置されたときに、透光体４において、鉛直方向において振動の腹が複数位置するように、制御部１２が振動を制御してもよい。この場合には、複数の位置から下方へ水滴等を速やかに移動させることができる。より好ましくは、振動の腹は、透光体４の中央領域外に位置していることが望ましい。それによって、視野の中央における明瞭度を改善することができ、かつ水滴等の分散による垂下効率の向上を図ることができる。 Alternatively, when the optical axis L of the light transmitting body 4 is arranged to be inclined from the vertical direction, the control unit 12 controls the vibration in the light transmitting body 4 so that a plurality of antinodes of the vibration are positioned in the vertical direction. You may. In this case, water droplets and the like can be quickly moved downward from a plurality of positions. More preferably, the antinode of the vibration is preferably located outside the central region of the light transmitting body 4. Thereby, the clarity at the center of the visual field can be improved, and the drooping efficiency can be improved by dispersion of water droplets and the like.
　図８は、第２の実施形態に係る振動装置の模式的正面断面図である。 FIG. 8 is a schematic front sectional view of the vibration device according to the second embodiment.
　本実施形態は、振動体２３と透光体４とを連結している連結部材２６を有する点が第１の実施形態と異なる。さらに、振動体２３の構成及び用いる制御モードが第１の実施形態と異なる。上記の点以外においては、本実施形態の振動装置は第１の実施形態の振動装置１と同様の構成を有する。 The present embodiment is different from the first embodiment in that a connecting member 26 connecting the vibrating body 23 and the light transmitting body 4 is provided. Further, the configuration of the vibrating body 23 and the control mode used are different from those of the first embodiment. Except for the above points, the vibration device of the present embodiment has the same configuration as the vibration device 1 of the first embodiment.
　透光体４が、連結部材２６に固定されている。連結部材２６は筒状部２６ａと、筒状部２６ａの一端から径方向外側に延ばされたフランジ部２６ｂとを有する。フランジ部２６ｂの一方の面に、透光体４が固定されている。筒状部２６ａの他端が、振動体２３に固定されている。このように、透光体４は、連結部材２６を介して間接的に振動体２３に連結されている。 光 The light transmitting member 4 is fixed to the connecting member 26. The connecting member 26 has a tubular portion 26a and a flange portion 26b extending radially outward from one end of the tubular portion 26a. The light transmitting body 4 is fixed to one surface of the flange portion 26b. The other end of the cylindrical portion 26a is fixed to the vibrating body 23. Thus, the light transmitting member 4 is indirectly connected to the vibrating member 23 via the connecting member 26.
　なお、透光体４は、振動体２３の第１のフランジ部２３ｄに連結部材２６を介さず、直接的に連結されていてもよい。その結果、第１のフランジ部２３ｄは直接透光体４と接続され一体となり、振動体３の振動により両者とも異なった周波数で振動可能な状態に置かれる。 The translucent member 4 may be directly connected to the first flange portion 23d of the vibrating member 23 without using the connecting member 26. As a result, the first flange portion 23 d is directly connected to and integrated with the light transmitting body 4, and both are oscillated at different frequencies by the vibration of the vibrating body 3.
　振動体２３は、第１の開口端部３ａ及び第２の開口端部３ｂを接続する、外側面２３ｇ及び内側面２３ｈを有する。振動体２３には、振動体２３の内側面２３ｈから径方向内側に延ばされた円環状の支持部２３ｃが設けられている。支持部２３ｃに、連結部材２６の筒状部２６ａが固定されている。それによって、透光体４が振動体２３に連結部材２６により連結されている。なお、支持部２３ｃは円環状でなくともよい。 The vibrating body 23 has an outer surface 23g and an inner surface 23h that connect the first open end 3a and the second open end 3b. The vibrating body 23 is provided with an annular support portion 23c extending radially inward from an inner side surface 23h of the vibrating body 23. The cylindrical portion 26a of the connecting member 26 is fixed to the support portion 23c. Thus, the light transmitting body 4 is connected to the vibrating body 23 by the connecting member 26. Note that the support portion 23c need not be annular.
　振動体２３は、第１のフランジ部２３ｄを除いて通常は円筒状であるが、第２のフランジ部２３ｅと第３のフランジ部２３ｆとを設けてもよい。第１のフランジ部２３ｄ、第２のフランジ部２３ｅ及び第３のフランジ部２３ｆは、振動体２３の外側面２３ｇから径方向外側に延ばされた、円環状の形状を有する。振動体２３は、図８に示す振動体２３の径方向及び高さ方向に沿う断面において、三脚音叉状の形状を有する。本実施形態では、第１のフランジ部２３ｄ、第２のフランジ部２３ｅ及び第３のフランジ部２３ｆの外径は等しくされている。もっとも、第１のフランジ部２３ｄ、第２のフランジ部２３ｅ及び第３のフランジ部２３ｆの外径は必ずしも等しくなくともよい。 The vibrating body 23 is usually cylindrical except for the first flange 23d, but may be provided with a second flange 23e and a third flange 23f. The first flange portion 23d, the second flange portion 23e, and the third flange portion 23f have an annular shape extending radially outward from an outer surface 23g of the vibrating body 23. The vibrating body 23 has a tripod tuning fork shape in a cross section along the radial direction and the height direction of the vibrating body 23 shown in FIG. In the present embodiment, the outer diameters of the first flange portion 23d, the second flange portion 23e, and the third flange portion 23f are made equal. However, the outer diameters of the first flange portion 23d, the second flange portion 23e, and the third flange portion 23f do not necessarily have to be equal.
　また、第１のフランジ部２３ｄは、第１の開口端部３ａに沿うように設けられており、第２のフランジ部２３ｅは、第２の開口端部３ｂに沿うように設けられている。もっとも、第１のフランジ部２３ｄは第１の開口端部３ａよりも高さ方向において第２の開口端部３ｂ側に位置していてもよい。第２のフランジ部２３ｅについても、第２の開口端部３ｂよりも第１の開口端部３ａ側に位置していてもよい。 The first flange portion 23d is provided along the first opening end 3a, and the second flange portion 23e is provided along the second opening end 3b. However, the first flange portion 23d may be located closer to the second opening end 3b in the height direction than the first opening end 3a. The second flange 23e may also be located closer to the first opening end 3a than the second opening end 3b.
　本実施形態では、制御部１２が第２の制御モードにより振動を制御する。第２の制御モードは、振動体２３の振幅が透光体４の振幅よりも大きくなるように振動を制御するモードである。 In the present embodiment, the control unit 12 controls the vibration in the second control mode. The second control mode is a mode in which the vibration is controlled such that the amplitude of the vibrating body 23 is larger than the amplitude of the light transmitting body 4.
　図９は、第２の実施形態における振動体の、第２の制御モードにおける振動の状態を説明するための模式的断面図である。図９において、実線は振動している状態を示し、一点鎖線は元の状態を示す。 FIG. 9 is a schematic cross-sectional view illustrating a state of vibration of the vibrating body in the second embodiment in the second control mode. In FIG. 9, the solid line indicates a vibrating state, and the dashed line indicates the original state.
　振動体２３には複数の共振周波数が存在する。第２の制御モードにおいては、図９に示すように、第１のフランジ部２３ｄと、第２のフランジ部２３ｅとが高さ方向に対し逆相で変位する振動モードの共振周波数を選択する。振動体２３における振動の腹は、第１のフランジ部２３ｄ及び第２のフランジ部２３ｅの外周縁に位置する。本明細書において外周縁とは、高さ方向から見た外周縁をいう。他方、第１のフランジ部２３ｄと、第２のフランジ部２３ｅとの間の部分が振動の節となっている。支持部２３ｃは、高さ方向において、第１のフランジ部２３ｄと第２のフランジ部２３ｅとの間に位置している。よって、支持部２３ｃは振動の節付近に位置している。この支持部２３ｃに連結部材２６を介して透光体４が連結されている。従って、第２の制御モードにおいては、振動体２３の振動の振幅は透光体４の振動の振幅よりも大きい。 The vibrator 23 has a plurality of resonance frequencies. In the second control mode, as shown in FIG. 9, a resonance frequency of a vibration mode in which the first flange portion 23d and the second flange portion 23e are displaced in opposite phases in the height direction is selected. Antinodes of vibration in the vibrating body 23 are located at outer peripheral edges of the first flange portion 23d and the second flange portion 23e. In this specification, the outer peripheral edge refers to the outer peripheral edge viewed from the height direction. On the other hand, a portion between the first flange portion 23d and the second flange portion 23e is a node of vibration. The support portion 23c is located between the first flange portion 23d and the second flange portion 23e in the height direction. Therefore, the support part 23c is located near the node of the vibration. The light transmitting body 4 is connected to the support portion 23c via a connecting member 26. Therefore, in the second control mode, the amplitude of the vibration of the vibrating body 23 is larger than the amplitude of the vibration of the light transmitting body 4.
　なお、第２の制御モードにおいて、透光体４が振動せず、振動体２３のみが振動するように制御されてもよい。例えば、支持部２３ｃが振動の節に正確に配置されている場合には、透光体４は振動し難い。 In the second control mode, control may be performed such that the light transmitting body 4 does not vibrate and only the vibrating body 23 vibrates. For example, when the support portion 23c is accurately arranged at a node of the vibration, the light transmitting body 4 does not easily vibrate.
　透光体４に付着した水滴等は、重力により垂下する。透光体４から連結部材２６のフランジ部２６ｂを介して、第１のフランジ部２３ｄに至った水滴等が、上記第１のフランジ部２３ｄの振動により第１のフランジ部２３ｄの外に飛散されたり、霧化されたりする。それによって、透光体４から水滴等をより確実に除去することができ、撮像素子１０Ａの視野をより確実に確保することができる。 水 Water droplets and the like attached to the light transmitting body 4 hang down due to gravity. Water droplets and the like reaching the first flange portion 23d from the light transmitting member 4 via the flange portion 26b of the connecting member 26 are scattered outside the first flange portion 23d by the vibration of the first flange portion 23d. Or atomized. Thereby, water droplets and the like can be more reliably removed from the translucent member 4, and the field of view of the imaging device 10A can be more reliably secured.
　なお、透光体４は、様々な透光性材料より構成され得るが、樹脂を用いてもよい。透光体４が樹脂からなる場合、コストを低めることができる。樹脂からなる透光体４の場合、機械的Ｑが低いため、振動し難い。従って、第１の制御モードを用いずに、第２の制御モードによりのみ霧化を行う場合には、透光体４は樹脂からなっていてもよく、低コスト化を実現することができる。 The light-transmitting member 4 may be made of various light-transmitting materials, but may be made of a resin. When the light transmitting body 4 is made of a resin, the cost can be reduced. In the case of the light transmitting body 4 made of resin, the mechanical Q is low, so that it is difficult to vibrate. Therefore, when atomization is performed only in the second control mode without using the first control mode, the light transmitting body 4 may be made of resin, and cost reduction can be realized.
　制御部１２は、第１の制御モード及び第２の制御モードを交互に切り替えることが好ましい。例えば、第１のフランジ部２３ｄと透光体４とが直接接合されている形状で振動子を励振すると、透光体４と第１のフランジ部２３ｄとがそれぞれが異なった共振周波数をもつことが可能となる。この場合には、第１の制御モードにより、第１の実施形態と同様に、透光体４に付着した水滴等をより一層確実に垂下させることができる。透光体４から垂下した水滴等を、第２の制御モードにより霧化させることができる。それによって、鉛直方向下方に水滴等が残留し難い。従って、第２の制御モードから第１の制御モードに切り替えたとき、透光体４から水滴等をより一層確実に、かつ速やかに垂下させることができ、透光体４からの排水性を高めることができる。このように、第１の制御モード及び第２の制御モードを交互に切り替え、水滴等の垂下及び霧化を繰り返すことにより、水滴等をより一層確実に除去することができ、撮像素子１０Ａの視野をより一層確実に確保することができる。 It is preferable that the control unit 12 alternately switches between the first control mode and the second control mode. For example, when the vibrator is excited in a shape in which the first flange portion 23d and the light transmitting member 4 are directly joined, the light transmitting member 4 and the first flange portion 23d have different resonance frequencies. Becomes possible. In this case, the first control mode allows the water droplets and the like attached to the light transmitting body 4 to drop more reliably, as in the first embodiment. Water drops or the like hanging down from the light transmitting body 4 can be atomized by the second control mode. This makes it difficult for water droplets and the like to remain vertically downward. Therefore, when switching from the second control mode to the first control mode, water droplets and the like can be more reliably and quickly drooped from the light transmitting member 4, and drainage from the light transmitting member 4 is enhanced. be able to. In this manner, by alternately switching between the first control mode and the second control mode and repeating dripping and atomization of water droplets and the like, water droplets and the like can be more reliably removed, and the visual field of the image sensor 10A can be removed. Can be more reliably ensured.
　第１のフランジ部２３ｄには、撥水性膜が設けられていることが好ましい。それによって、水滴等をより一層容易に霧化させることができる。 水性 It is preferable that a water-repellent film is provided on the first flange portion 23d. Thereby, water droplets and the like can be more easily atomized.
　第１のフランジ部２３ｄの振動の共振周波数と、第２のフランジ部２３ｅの振動の共振周波数とがほぼ等しくされることが好ましい。本実施形態では、両者の共振周波数が等しくされている。よって、振動の節が、振動体２３の高さ方向中央に位置している。ここで、第３のフランジ部２３ｆは、第１のフランジ部２３ｄと第２のフランジ部２３ｅとの間の中央に位置している。従って、第３のフランジ部２３ｆは振動の節に位置している。図２に示したケース部材１８により第３のフランジ部２３ｆが支持されることにより、振動が阻害され難い。 。 It is preferable that the resonance frequency of the vibration of the first flange portion 23d and the resonance frequency of the vibration of the second flange portion 23e are made substantially equal. In the present embodiment, the two resonance frequencies are equal. Therefore, the node of the vibration is located at the center of the vibration body 23 in the height direction. Here, the third flange portion 23f is located at the center between the first flange portion 23d and the second flange portion 23e. Therefore, the third flange portion 23f is located at a node of vibration. Since the third flange portion 23f is supported by the case member 18 shown in FIG. 2, the vibration is hardly hindered.
　もっとも、第１のフランジ部２３ｄと第２のフランジ部２３ｅとが、振動体２３の高さ方向中央に対して対称に設けられていない場合には、振動の節の領域は振動体２３の高さ方向中央から第１の開口端部３ａ側または第２の開口端部３ｂ側にずれることがある。その場合には、振動の節となる位置に第３のフランジ部２３ｆを配置することが好ましい。もっとも、第３のフランジ部２３ｆは、必ずしも振動の節に正確に配置されなくともよい。本発明における振動体２３においては、第１～第３のフランジ部２３ｄ～２３ｆで構成される音叉状の断面形状は特に限定されない。すなわち、音叉状の断面形状は、二脚であってもよく、三脚であってもよく、四脚であってもよく、五脚以上であってもよい。本発明においては、少なくとも第１のフランジ部２３ｄと第２のフランジ部２３ｅとが振動体２３の外側面２３ｇに設けられていればよい。振動体２３は、断面において二脚以上の音叉形状を有し、その二脚以上の断面音叉形状を円筒体の中心軸に対して回転させた外面形状を有していればよい。 However, when the first flange portion 23d and the second flange portion 23e are not provided symmetrically with respect to the center in the height direction of the vibrating body 23, the region of the node of vibration is the height of the vibrating body 23. It may be shifted from the center in the height direction to the first opening end 3a side or the second opening end 3b side. In that case, it is preferable to dispose the third flange portion 23f at a position serving as a node of vibration. However, the third flange portion 23f does not necessarily have to be arranged exactly at the node of the vibration. In the vibrating body 23 of the present invention, the tuning fork-shaped cross-sectional shape formed by the first to third flange portions 23d to 23f is not particularly limited. That is, the cross-section of the tuning fork may be a two-legged, a three-legged, a four-legged, or a five-legged or more. In the present invention, at least the first flange portion 23d and the second flange portion 23e may be provided on the outer surface 23g of the vibrating body 23. The vibrator 23 may have a tuning fork shape of two or more legs in cross section, and may have an outer surface shape obtained by rotating the tuning fork shape of two or more legs with respect to the center axis of the cylindrical body.
　図１０は、第３の実施形態における透光体及びケース部材の模式的斜視図である。図１１は、第３の実施形態における振動装置の模式的部分切欠き斜視図である。 FIG. 10 is a schematic perspective view of a light transmitting body and a case member according to the third embodiment. FIG. 11 is a perspective view of the vibration device according to the third embodiment, which is schematically cut away.
　図１０に示すように、本実施形態の振動装置はケース部材３８を含み、ケース部材３８に透光体３４が直接的に接合されている。本実施形態では、ケース部材３８は透光体３４に接合された周辺部材である。透光体３４は撮像素子のレンズである。透光体３４の全面に親水性膜５が設けられている。ケース部材３８の透光体３４が接合された面上には、円形の開口部３８ａが設けられている。開口部３８ａは、平面視において、透光体３４とギャップを隔てて設けられている。開口部３８ａを封止するように、図１１に示す振動素子３２が配置される。このように、平面視において、透光体３４に重ならない位置に振動素子３２が設けられていてもよい。振動素子３２の振動体３３は、ケース部材３８を介して間接的に透光体３４に連結されている。振動素子３２はケース部材３８を振動させる。 As shown in FIG. 10, the vibration device of the present embodiment includes a case member 38, and the light transmitting body 34 is directly joined to the case member 38. In the present embodiment, the case member 38 is a peripheral member joined to the light transmitting body 34. The light transmitting body 34 is a lens of the image sensor. The hydrophilic film 5 is provided on the entire surface of the light transmitting body 34. A circular opening 38a is provided on the surface of the case member 38 to which the translucent member 34 is joined. The opening 38a is provided with a gap from the light transmitting body 34 in a plan view. The vibration element 32 shown in FIG. 11 is arranged so as to seal the opening 38a. As described above, the vibration element 32 may be provided at a position that does not overlap the light transmitting body 34 in a plan view. The vibrating body 33 of the vibrating element 32 is indirectly connected to the light transmitting body 34 via a case member 38. The vibration element 32 causes the case member 38 to vibrate.
　図１１に示すように、振動素子３２は振動体３３及び圧電振動子７を有する。振動体３３は、第１の振動体部３３Ａ、第２の振動体部３３Ｂ及び第３の振動体部３３Ｃを有する。第２の振動体部３３Ｂは円筒状であり、第１の開口端部３３ａ及び第２の開口端部３３ｂを有する。第１の振動体部３３Ａは円板状であり、第１の振動体部３３Ａの第１の開口端部３３ａを封止している。第３の振動体部３３Ｃは円環状であり、第２の振動体部３３Ｂの第２の開口端部３３ｂに連結されている。各振動体部が別体として形成され、接合されていてもよく、各振動体部が一体として形成されていてもよい。 振動 As shown in FIG. 11, the vibration element 32 has a vibration body 33 and the piezoelectric vibrator 7. The vibrating body 33 has a first vibrating body part 33A, a second vibrating body part 33B, and a third vibrating body part 33C. The second vibrating part 33B is cylindrical and has a first open end 33a and a second open end 33b. The first vibrating body part 33A has a disk shape, and seals the first opening end 33a of the first vibrating body part 33A. The third vibrating body part 33C is annular, and is connected to the second opening end 33b of the second vibrating body part 33B. Each vibrating part may be formed separately and joined, or each vibrating part may be formed integrally.
　第１の振動体部３３Ａは、第２の振動体部３３Ｂに連結されている部分から径方向外側に延びる第１のフランジ部３３ｄを有する。第１のフランジ部３３ｄの厚みは第１の振動体部３３Ａの厚みよりも薄い。第３の振動体部３３Ｃは、第２の振動体部３３Ｂに連結されている部分から径方向外側に延びる第２のフランジ部３３ｅを有する。第２のフランジ部３３ｅの厚みは、第３の振動体部３３Ｃの厚みと同じである。ここで、径方向における、第１の振動体部３３Ａまたは第３の振動体部３３Ｃの第２の振動体部３３Ｂの外周縁に連結された位置から、径方向にフランジ部が延びる長さをフランジ部の長さとする。本実施形態では、第２のフランジ部３３ｅが第１のフランジ部３３ｄより長い。 The first vibrator 33A has a first flange 33d extending radially outward from a portion connected to the second vibrator 33B. The thickness of the first flange portion 33d is smaller than the thickness of the first vibrating body portion 33A. The third vibrating body part 33C has a second flange part 33e extending radially outward from a portion connected to the second vibrating body part 33B. The thickness of the second flange 33e is the same as the thickness of the third vibrator 33C. Here, the radially extending length of the flange portion from the position connected to the outer peripheral edge of the first vibrating body portion 33A or the third vibrating body portion 33B of the third vibrating body portion 33C in the radial direction. Length of flange. In the present embodiment, the second flange 33e is longer than the first flange 33d.
　振動素子３２の圧電振動子７は第１の実施形態と同様の圧電振動子である。圧電振動子７は、振動体３３の第３の振動体部３３Ｃに配置されている。 圧 電 The piezoelectric vibrator 7 of the vibration element 32 is the same piezoelectric vibrator as in the first embodiment. The piezoelectric vibrator 7 is arranged on a third vibrating body portion 33C of the vibrating body 33.
　本実施形態では、制御部１２は前述した第１の制御モードによる制御に加えて、第２の制御モードによっても振動を制御する。すなわち、第１の制御モードまたは第２の制御モードで制御が行われる。第１の制御モードによる振動の制御は、第１及び第２の実施形態の場合と同様である。第２の制御モードでは、制御部１２は、例えば、振動体３３の第１の振動体部３３Ａに振動の腹が位置するように振動を制御する。振動素子３２の振動はケース部材３８に伝搬する。それによって、透光体３４の下方に垂下し、透光体３４の外周縁付近に位置している水滴等を振動素子３２側により確実に移動させることができる。透光体３４と振動素子３２との間に残留している水滴等も振動素子３２側に移動させることができ、透光体３４からの水滴等の垂下を阻害し難い。従って、透光体３４から水滴等をより確実に除去することができ、撮像素子の視野をより確実に確保することができる。 In the present embodiment, the control unit 12 controls the vibration in the second control mode in addition to the control in the first control mode. That is, control is performed in the first control mode or the second control mode. The control of vibration in the first control mode is the same as in the first and second embodiments. In the second control mode, the control unit 12 controls the vibration so that, for example, the antinode of the vibration is located in the first vibrating body 33A of the vibrating body 33. The vibration of the vibration element 32 propagates to the case member 38. Thus, water droplets and the like that hang down below the light transmitting body 34 and are located near the outer peripheral edge of the light transmitting body 34 can be moved more reliably to the vibration element 32 side. Water droplets and the like remaining between the light transmitting body 34 and the vibration element 32 can also be moved to the vibration element 32 side, and it is difficult to hinder the dripping of the water droplets and the like from the light transmitting body 34. Therefore, water droplets and the like can be more reliably removed from the light transmitting body 34, and the field of view of the image sensor can be more reliably secured.
　なお、振動素子の構成やケース部材の開口部の形状は上記に限定されない。以下において、第３の実施形態の第１～第３の変形例を示す。第１～第３の変形例においても、第３の実施形態と同様に、撮像素子の視野をより確実に確保することができる。 The configuration of the vibration element and the shape of the opening of the case member are not limited to the above. Hereinafter, first to third modified examples of the third embodiment will be described. Also in the first to third modifications, similarly to the third embodiment, the field of view of the image sensor can be more reliably secured.
　図１２に示す第１の変形例においては、振動体４３は、円板状の第１の振動体部４３Ａ及び円筒状の第２の振動体部４３Ｂからなり、第３の振動体部を有しない。第１の振動体部４３Ａはフランジ部を有しない。圧電振動子７は、第１の振動体部４３Ａに配置されており、かつ第１の振動体部４３Ａ及び第２の振動体部４３Ｂにより囲まれた内部空間内に位置する。 In the first modified example shown in FIG. 12, the vibrating body 43 includes a disk-shaped first vibrating body 43A and a cylindrical second vibrating body 43B, and has a third vibrating body. do not do. The first vibrator 43A does not have a flange. The piezoelectric vibrator 7 is arranged in the first vibrator 43A, and is located in an internal space surrounded by the first vibrator 43A and the second vibrator 43B.
　図１３に示すように、第２の変形例においては、ケース部材５８の開口部５８ａは矩形である。図１４に示すように、第２の変形例の振動体５３は、矩形板状の第１の振動体部５３Ａ及び角筒状の第２の振動体部５３Ｂからなる。第２の振動体部５３Ｂは、第１の側面５３ａ、第２の側面５３ｂ、第３の側面５３ｃ及び第４の側面５３ｄを有する。第１の側面５３ａ及び第３の側面５３ｃは互いに対向しており、第１の振動体部５３Ａの長辺に連結されている。第２の側面５３ｂ及び第４の側面５３ｄは互いに対向しており、第１の振動体部５３Ａの短辺に連結されている。 開口 As shown in FIG. 13, in the second modification, the opening 58a of the case member 58 is rectangular. As shown in FIG. 14, the vibrating body 53 of the second modification includes a first vibrating body 53A having a rectangular plate shape and a second vibrating body 53B having a rectangular tube shape. The second vibrating body 53B has a first side 53a, a second side 53b, a third side 53c, and a fourth side 53d. The first side face 53a and the third side face 53c face each other and are connected to the long side of the first vibrating body 53A. The second side face 53b and the fourth side face 53d face each other and are connected to the short side of the first vibrating body 53A.
　本変形例の圧電振動子５７の圧電体は矩形板状である。圧電体の両主面にそれぞれ電極が設けられている。振動素子５２は２つの圧電振動子５７を有する。一方の圧電振動子５７は、第２の振動体部５３Ｂの第１の側面５３ａに配置されており、他方の圧電振動子５７は第３の側面５３ｃに配置されている。 圧 電 The piezoelectric body of the piezoelectric vibrator 57 of the present modification has a rectangular plate shape. Electrodes are provided on both main surfaces of the piezoelectric body, respectively. The vibration element 52 has two piezoelectric vibrators 57. One piezoelectric vibrator 57 is disposed on the first side surface 53a of the second vibrator 53B, and the other piezoelectric vibrator 57 is disposed on the third side surface 53c.
　第３の変形例におけるケース部材の開口部は正方形である。図１５に示すように、第３の変形例の振動体６３は、第２の変形例と同様に、第１の振動体部６３Ａ及び第２の振動体部６３Ｂからなる。第１の振動体部６３Ａの平面形状は正方形であり、第２の振動体部６３Ｂは角筒状である。振動素子６２は、第２の変形例と同様の圧電振動子５７を４つ有する。各圧電振動子５７は、第２の振動体部６３Ｂの第１の側面６３ａ、第２の側面６３ｂ、第３の側面６３ｃ及び第４の側面６３ｄにそれぞれ設けられている。 開口 The opening of the case member in the third modification is square. As shown in FIG. 15, the vibrating body 63 of the third modified example includes a first vibrating body part 63A and a second vibrating body part 63B, as in the second modified example. The planar shape of the first vibrating body 63A is a square, and the second vibrating body 63B is a rectangular tube. The vibration element 62 has four piezoelectric vibrators 57 similar to those of the second modification. Each of the piezoelectric vibrators 57 is provided on the first side surface 63a, the second side surface 63b, the third side surface 63c, and the fourth side surface 63d of the second vibrating body 63B.
１…振動装置
２…振動素子
３…振動体
３ａ，３ｂ…第１，第２の開口端部
３ｃ…延長部
３ｄ…ヒンジ部
４…透光体
５…親水性膜
７…圧電振動子
８…圧電体
９ａ，９ｂ…電極
１０…イメージングデバイス
１０Ａ…撮像素子
１０ａ…撮像素子本体
１０ｂ…レンズモジュール
１２…制御部
１４…ベース部材
１５…脚部
１６…基板
１８…ケース部材
２１…振動装置
２３…振動体
２３ｃ…支持部
２３ｄ～２３ｆ…第１～第３のフランジ部
２３ｇ…外側面
２３ｈ…内側面
２６…連結部材
２６ａ…筒状部
２６ｂ…フランジ部
３２…振動素子
３３…振動体
３３Ａ～３３Ｃ…第１～第３の振動体部
３３ａ，３３ｂ…第１，第２の開口端部
３３ｄ，３３ｅ…第１，第２のフランジ部
３４…透光体
３８…ケース部材
３８ａ…開口部
４３…振動体
４３Ａ，４３Ｂ…第１，第２の振動体部
５２…振動素子
５３…振動体
５３Ａ，５３Ｂ…第１，第２の振動体部
５３ａ～５３ｄ…第１～第４の側面
５７…圧電振動子
５８…ケース部材
５８ａ…開口部
６２…振動素子
６３…振動体
６３Ａ，６３Ｂ…第１，第２の振動体部
６３ａ～６３ｄ…第１～第４の側面 DESCRIPTION OF SYMBOLS 1 ... Vibration device 2 ... Vibration element 3 ... Vibration body 3a, 3b ... 1st, 2nd opening end part 3c ... Extension part 3d ... Hinge part 4 ... Translucent body 5 ... Hydrophilic film 7 ... Piezoelectric vibrator 8 ... Piezoelectric bodies 9a, 9b ... Electrode 10 ... Imaging device 10A ... Imaging device 10a ... Imaging device body 10b ... Lens module 12 ... Control unit 14 ... Base member 15 ... Leg 16 ... Substrate 18 ... Case member 21 ... Vibration device 23 ... Vibration Body 23c Support portions 23d to 23f First to third flange portions 23g Outside surface 23h Inner surface 26 Connecting member 26a Cylindrical portion 26b Flange portion 32 Vibrating element 33 Vibrating body 33A to 33C First to third vibrating body portions 33a, 33b: first and second opening end portions 33d, 33e: first and second flange portions 34: light transmitting member 38: case member 38a: opening portion 43: vibration Body 43A, 43B ... first Second vibrating body portion 52 Vibrating element 53 Vibrating bodies 53A and 53B First and second vibrating body portions 53a to 53d First to fourth side surfaces 57 Piezoelectric vibrator 58 Case member 58a Opening Part 62: vibrating element 63: vibrating bodies 63A, 63B: first and second vibrating parts 63a to 63d: first to fourth side surfaces

Claims (12)

  1. 　光学検出素子の検出領域の少なくとも一部を含むように配置される透光体を備え、前記透光体の光軸が鉛直方向から傾くように配置される振動装置であって、
    　前記透光体における、少なくとも前記検出領域を含む部分に設けられている親水性膜と、
    　前記透光体に直接的にまたは間接的に連結されている振動体を有する振動素子と、
    　前記振動素子に電気的に接続されている制御部と、
    をさらに備え、
    　前記制御部が、前記振動素子の振動及び静止を交互に切り替える第１の制御モードにより振動を制御する、振動装置。     A vibrating device comprising a light-transmitting member disposed so as to include at least a part of the detection region of the optical detection element, wherein the optical axis of the light-transmitting member is disposed to be inclined from a vertical direction,
    A hydrophilic film provided at least in a portion including the detection region in the light transmitting body,
    A vibrating element having a vibrating body directly or indirectly connected to the light transmitting body,
    A control unit electrically connected to the vibration element,
    Further comprising
    A vibrating device, wherein the control unit controls the vibration by a first control mode that alternately switches between vibration and rest of the vibration element.
  2. 　前記親水性膜が前記透光体の全面に設けられている、請求項１に記載の振動装置。 The vibration device according to claim 1, wherein the hydrophilic film is provided on an entire surface of the light transmitting body.
  3. 　前記透光体において、前記透光体の光軸を含まない部分に振動の腹が位置するように、前記制御部が振動を制御する、請求項１または２に記載の振動装置。 The vibration device according to claim 1 or 2, wherein the control unit controls the vibration such that an antinode of the vibration is located at a portion of the light transmitting body that does not include the optical axis of the light transmitting body.
  4. 　前記透光体において、鉛直方向において振動の腹が複数位置するように、前記制御部が振動を制御する、請求項３に記載の振動装置。 4. The vibration device according to claim 3, wherein the control unit controls the vibration such that a plurality of antinodes of the vibration are positioned in the vertical direction in the light transmitting body. 5.
  5. 　前記振動の腹が、前記透光体の中央領域外に位置している、請求項３に記載の振動装置。 The vibration device according to claim 3, wherein the antinode of the vibration is located outside a central region of the light transmitting body.
  6. 　前記制御部が、前記振動体の振幅が前記透光体の振幅よりも大きくなるように振動を励振させる第２の制御モードと、前記第１の制御モードとを切り替えることにより振動を制御する、請求項１～５のいずれか１項に記載の振動装置。 The control unit controls the vibration by switching between a second control mode that excites vibration so that the amplitude of the vibrating body is larger than the amplitude of the light transmitting body, and the first control mode, The vibration device according to any one of claims 1 to 5.
  7. 　前記第２の制御モードにおいて前記透光体が振動しない、請求項６に記載の振動装置。 The vibration device according to claim 6, wherein the light transmitting body does not vibrate in the second control mode.
  8. 　前記透光体が樹脂からなる、請求項７に記載の振動装置。 The vibrating device according to claim 7, wherein the translucent member is made of a resin.
  9. 　前記透光体に接合されている周辺部材をさらに備え、
    　前記周辺部材を介して、前記振動体が前記透光体に間接的に連結されている、請求項６～８のいずれか１項に記載の振動装置。     Further comprising a peripheral member joined to the translucent body,
    The vibration device according to any one of claims 6 to 8, wherein the vibration body is indirectly connected to the light transmitting body via the peripheral member.
  10. 　前記振動体が前記透光体に直接的に連結されている、請求項１～８のいずれか１項に記載の振動装置。 The vibrating device according to any one of claims 1 to 8, wherein the vibrating body is directly connected to the light transmitting body.
  11. 　請求項１～１０のいずれか１項に記載の振動装置と、
    　前記透光体に前記検出領域が含まれるように配置されている光学検出素子と、
    を備える、光学検出装置。     A vibration device according to any one of claims 1 to 10,
    An optical detection element arranged so as to include the detection region in the light transmitting body,
    An optical detection device comprising:
  12. 　前記光学検出素子が撮像素子であり、前記検出領域が視野である、請求項１１に記載の光学検出装置。 The optical detection device according to claim 11, wherein the optical detection element is an imaging element, and the detection area is a visual field.
PCT/JP2019/002548 2018-06-28 2019-01-25 Oscillation device and optical detection device WO2020003574A1 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113767616A (en) * 2020-03-27 2021-12-07 株式会社村田制作所 Vibration device and vibration control method
WO2023153017A1 (en) * 2022-02-10 2023-08-17 株式会社村田製作所 Vibration device and imaging device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007189802A (en) * 2006-01-12 2007-07-26 Canon Inc Oscillatory wave drive unit and oscillatory wave drive apparatus
JP2009265473A (en) * 2008-04-28 2009-11-12 Konica Minolta Opto Inc Lens, imaging lens and imaging apparatus
JP2013080177A (en) * 2011-10-05 2013-05-02 Aisin Seiki Co Ltd Camera with water droplet removal function
JP2015231216A (en) * 2014-06-06 2015-12-21 株式会社タムロン Optical unit and on-vehicle imaging apparatus
JP2017170303A (en) * 2016-03-22 2017-09-28 オリンパス株式会社 Droplet removal device, imaging device having droplet removal device, control method of droplet removal device, and control program of droplet removal device
US20170361360A1 (en) * 2016-06-20 2017-12-21 Texas Instruments Incorporated Ultrasonic lens cleaning with travelling wave excitation

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007189802A (en) * 2006-01-12 2007-07-26 Canon Inc Oscillatory wave drive unit and oscillatory wave drive apparatus
JP2009265473A (en) * 2008-04-28 2009-11-12 Konica Minolta Opto Inc Lens, imaging lens and imaging apparatus
JP2013080177A (en) * 2011-10-05 2013-05-02 Aisin Seiki Co Ltd Camera with water droplet removal function
JP2015231216A (en) * 2014-06-06 2015-12-21 株式会社タムロン Optical unit and on-vehicle imaging apparatus
JP2017170303A (en) * 2016-03-22 2017-09-28 オリンパス株式会社 Droplet removal device, imaging device having droplet removal device, control method of droplet removal device, and control program of droplet removal device
US20170361360A1 (en) * 2016-06-20 2017-12-21 Texas Instruments Incorporated Ultrasonic lens cleaning with travelling wave excitation

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113767616A (en) * 2020-03-27 2021-12-07 株式会社村田制作所 Vibration device and vibration control method
CN113767616B (en) * 2020-03-27 2023-04-04 株式会社村田制作所 Vibration device and vibration control method
WO2023153017A1 (en) * 2022-02-10 2023-08-17 株式会社村田製作所 Vibration device and imaging device

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