WO2019218961A1

WO2019218961A1 - Worktable and back side alignment device

Info

Publication number: WO2019218961A1
Application number: PCT/CN2019/086604
Authority: WO
Inventors: 蔡晨; 王鑫鑫
Original assignee: 上海微电子装备（集团）股份有限公司
Priority date: 2018-05-18
Filing date: 2019-05-13
Publication date: 2019-11-21
Also published as: KR20210010582A; TW202004953A; CN110504203A; KR102427693B1; TWI746979B

Abstract

A worktable and a back side alignment device, relating to the technical field of integrated circuit manufacturing. The worktable comprises a horizontal base (1), an air-support plate (2), a suction cup (5), and a first air guide assembly (6); the horizontal base (1) is provided with a light transmission hole (11) penetrating the top and bottom surfaces of the horizontal base (1); the air-support plate (2) is disposed on the horizontal base (1) and is movable on a horizontal plane with respect to the horizontal base (1); a plurality of first light passing holes (211) spaced apart from each other is provided on the air-support plate (2), one of the plurality of first light passing holes (211) being communicated with the light transmission hole (11) when the air-support plate (2) moves above the horizontal base (1); the suction cup (5) is disposed above the air-support plate (2) and can rotate in three degrees of freedom with respect to the air-support plate (2) and translate in the vertical direction; the suction cup (5) is provided with second light passing holes (51) at positions corresponding to the first light passing holes (211); the upper surface of the suction cup (5) is provided with a first suction air passage for sucking a substrate (20); a first end of the first air guide assembly (6) is communicated with the air-support plate (2), and a second end of the first air guide assembly (6) is communicated with the first suction air passage.

Description

Work table and back alignment device

The present application claims priority to Chinese Patent Application No. 201 810 148 119 8.8 filed on May 18, 2018, the entire disclosure of which is incorporated herein by reference.

Technical field

This application relates to the field of integrated circuit fabrication, for example, to a workbench and a backside alignment device.

Background technique

With the continuous development of electronic products, the number of silicon wafers included in integrated circuits in electronic products is increasing, and the demand for miniaturization and intelligent development of electronic products is higher for the intelligence and miniaturization of semiconductor package devices. Claim. A multi-wafer package is a silicon-scale package method in which two or more planar devices are stacked and connected, thereby enabling more semiconductor devices to be placed in a limited space.

The Through Silicon Via (TSV) is a type of multi-silicon package that forms micro vias on the front side to the back side of the semiconductor wafer to electrically connect the upper and lower silicon wafers to realize the silicon wafer. The connection between the packages. Due to the vertical interconnection method, the length of the interconnection leads between the silicon wafers is shortened, the lead length is short, the lead seal is high, the package volume is small, and the signal transmission between the silicon wafers is fast.

The TSV package process requires exposure on the back side of the silicon wafer, thus requiring a semiconductor lithography apparatus with a backside alignment device to meet the process requirements of wafer backside exposure. The backside alignment device has an existing pattern on the front surface of the silicon wafer (or referred to as the front surface of the silicon wafer) as an alignment mark on the back side of the silicon wafer, thereby determining the relationship between the backside exposure pattern of the silicon wafer and the existing pattern on the front surface of the silicon wafer. Position error. The measurement accuracy of the backside alignment device will directly determine the overlay error between the front and back surface lithographic patterns of the silicon wafer.

In the related art, a back alignment mark corresponds to a set of back alignment mark illumination devices, resulting in complicated assembly and high cost of the back alignment mark illumination device; since the back alignment mark illumination device is located under the wafer carrier, the silicon wafer bearing The structure of the stage is complicated in design and high in processing cost. At the same time, since the position of the back alignment mark in the device must be located in the illumination field of view of the back alignment mark illumination device, the process adaptability is poor.

In addition, in the related art, the silicon wafer back surface marking illumination device can also be installed in the silicon wafer carrier table, so the workpiece table structure design and assembly are relatively complicated, and the processing cost is high, and the wafer full field alignment precision and the silicon wafer are received. The space size of the film carrier is restricted; the corresponding silicon wafer back alignment mark needs to be made at the specified position of the marking device on the back side of the silicon wafer, thereby increasing the process flow and complexity, resulting in poor process adaptability.

Summary of the invention

The following is an overview of the topics detailed in this document. This Summary is not intended to limit the scope of the claims.

The application provides a workbench to reduce the structural complexity of the workbench for the backside alignment device, reduce the processing cost of the workbench, and improve the process adaptability of the workbench.

The present application provides a back alignment device that reduces the structural complexity of the backside alignment device, reduces the processing cost of the backside alignment device, and improves the flexibility of use and process adaptability of the backside alignment device.

This application uses the following technical solutions:

A workbench includes: a horizontal base having a light-transmissive hole penetrating through an upper surface of the horizontal base, wherein the light-transmissive hole is provided with a first light-transmissive sheet; and a pneumatic foot is disposed at the level a plurality of first light-passing holes are spaced apart from the horizontal base, and a plurality of first light-passing holes are spaced apart from each other when the air foot moves on the horizontal base One of the first light-passing holes is electrically connected to the light-transmitting hole; a suction cup is disposed above the air foot, and the suction cup can rotate in three degrees of freedom with respect to the air foot and can be opposite to the Translating the gas foot in a vertical direction, the suction cup is provided with a second light passing hole corresponding to the position of the first light passing hole, and the first light passing hole is in communication with the second light passing hole, the first a second light-transmissive sheet is disposed in the second light-transmitting hole; a first air-guiding assembly is disposed on the upper surface of the suction cup, and a first adsorption air passage for adsorbing the substrate is disposed, the first end of the first air guide assembly is The air foot is internally connected, and the second end of the first air guide assembly is in communication with the first adsorption air passage.

In an embodiment, the work table further includes an adjustment device, the adjustment device includes: a horizontal adjustment component coupled to the air foot, configured to drive the air foot to move in a horizontal direction; and a vertical adjustment component a first end of the adjustment assembly is coupled to the air foot, and a second end of the vertical adjustment assembly is coupled to the suction cup, configured to drive the suction cup to have a non-zero angle and a vertical direction with respect to a horizontal direction; And an assembly connected to the suction cup, configured to drive the suction cup to rotate in a vertical direction relative to the air foot.

In an embodiment, the workbench further includes: a suction cup holder, an upper end of the suction cup holder is connected to the suction cup, a lower end of the suction cup holder is connected to the air foot, and the vertical adjustment component and the rotation adjustment component are both The suction cup holder is connected to the suction cup, and the suction cup holder is provided with a third light-passing hole corresponding to the position of the first light-passing hole, and the third light-passing hole and the first light-passing hole respectively Communicating with the second light-passing aperture; at least one of an upper surface of the chuck holder and a lower surface of the chuck is provided with a second adsorption air passage, the first air guide assembly and the second adsorption gas The road is connected.

In an embodiment, the workbench further includes: an upper plate, a lower end of the upper plate is connected to the air foot, an upper end of the upper plate is connected with the suction cup seat, and the vertical adjustment component is One end of the vertical adjustment assembly is connected to the upper plate, and the suction cup holder and the suction cup are rotatable relative to the upper plate in a vertical direction, the vertical adjustment The assembly (8) is connected to the suction cup (5) via the upper plate (3) and the suction cup holder (4).

In an embodiment, the suction cup holder and the suction cup are both disc-shaped structures, and the rotation adjusting assembly drives the suction cup holder to rotate around a central axis of the suction cup holder.

In one embodiment, the rotation adjustment assembly includes: a curved motor, a stator of the arc motor is fixed to the upper plate, and a rotor of the arc motor is fixedly connected to an outer wall of the suction cup seat, and The side of the rotor remote from the stator is attached to the outer wall of the chuck holder.

In one embodiment, the rotation adjustment assembly further includes: an arcuate guide block fixed on the upper plate, a plurality of arcuate guide blocks disposed along a circumferential interval of the suction cup holder, and the arc guide The curved face of the block cooperates with the outer wall of the suction cup holder.

In one embodiment, the rotation adjustment assembly further includes: a second air guide assembly, at least one of an upper surface of the upper plate and a lower surface of the suction cup holder is provided with an inflation air passage, the second guide A first end of the gas assembly is in communication with the interior of the air foot, and a second end of the second air guide assembly is in communication with the inflation air passage.

In an embodiment, the curved guide block is an arcuate air float, and the arcuate air float is in communication with the second air guide assembly.

In an embodiment, at least one of an upper surface of the upper plate and a lower surface of the suction cup holder is provided with a third adsorption air passage, and the third adsorption air passage is in communication with the second air guide assembly.

In an embodiment, an upper surface of the upper plate is convexly provided with an air floating surface, and a plurality of air floating surfaces are circumferentially spaced apart; a upper surface of the upper plate is provided with a vacuum chamber, and a plurality of vacuum chambers are spaced around the circumference The upper end surface of the vacuum chamber is flush with the air floating surface; the lower surface of the upper plate is provided with a first annular air passage and a second annular air passage, and the first annular air passage respectively communicates with the first a second air guide assembly and the air floating surface, the second annular air passage respectively communicating with the second air guide assembly and the vacuum chamber; a lower surface of the upper plate corresponding to the first annular air passage and A second sealing plate is connected to the position of the second annular air passage.

In an embodiment, the first adsorption air passage includes a first air passage, a second air passage, and a third air passage that are radially spaced along the suction cup, the first air passage and the second air The track and the third airway are adapted to six, eight and twelve inch substrates, respectively.

In an embodiment, the first air guiding assembly includes: a first shunting block, the first end of the first shunting block is connected to the air foot; the first air guiding tube, the first end of the first air guiding tube is a second end of the first shunt block is connected; a second shunt block is connected to the first air pipe, the second shunt block has four air outlets, and the four air outlets are respectively connected to the first air The passage, the second air passage, the third air passage, and the second adsorption air passage are in communication.

In an embodiment, the vertical adjustment assembly includes: an adapter plate having a lower surface abutting the upper surface of the upper plate; and a linear motor, the fixed portion of the linear motor is connected to the air foot, An output shaft of the linear motor is coupled to the adapter plate; an elastic member is sleeved outside the fixing portion, and a first end of the elastic member is coupled to the air foot, and the second end of the elastic member is opposite to the upper portion The lower surface of the plate is connected.

In an embodiment, the vertical adjustment assembly further includes: a base, a lower end of the base is coupled to the air foot, an upper end of the base is coupled to a lower end of the linear motor; and an adjustment seat is threaded on the base The upper end surface of the adjusting seat is provided with a groove, and the lower end of the elastic member is locked in the groove.

In an embodiment, the vertical adjustment assembly is provided with four sets along the circumference of the upper plate, and the four sets of the vertical adjustment components are distributed in a rectangular shape.

In an embodiment, the workbench further includes a support assembly, the support assembly includes: a support base disposed at a center of the rectangle, a lower end of the support base is fixedly connected to the air foot; an elastic piece, the The outer side of the upper surface of the elastic piece is fixedly connected to the upper plate, and the inner side of the lower surface of the elastic piece is fixedly connected to the upper end of the support seat.

A back alignment device comprising the above-described table.

Other aspects will be apparent upon reading and understanding the drawings and detailed description.

DRAWINGS

1 is a schematic structural view of a workbench provided by the embodiment;

Figure 2 is a perspective view showing the structure of the workbench provided in the embodiment;

3 is a perspective view showing the structure of a horizontal base, a horizontal adjustment assembly, and an air foot provided by the embodiment;

Figure 4 is a bottom view of the air foot provided by the embodiment;

Figure 5 is a top plan view of an air foot and level adjustment assembly of an embodiment;

Figure 6 is a top plan view of another embodiment of the pneumatic foot and leveling assembly;

FIG. 7 is a schematic structural diagram of a portion of a workbench provided by the embodiment; FIG.

8 is a schematic structural view of an air foot, an upper plate, and a vertical adjustment assembly according to the embodiment;

Figure 9 is a cross-sectional view of the vertical adjustment assembly provided by the embodiment;

FIG. 10 is a schematic structural diagram of a support assembly according to an embodiment; FIG.

11 is a schematic structural view of a chuck holder and a rotation adjusting assembly according to the embodiment;

Figure 12 is a partial enlarged view of I in Figure 11;

Figure 13 is a bottom view of the upper plate provided in the embodiment;

Figure 14 is a top plan view of the upper plate provided in the embodiment;

15 is a schematic structural view of a chuck holder and a first air guide assembly according to an embodiment of the present invention;

Figure 16 is a schematic structural view of a suction cup provided in the embodiment;

Figure 17 is a diagram showing the internal air passage of the suction cup of Figure 16.

The figure is marked as follows:

1-level pedestal; 11-light transmission hole; 12-first light-transmissive sheet;

2-air foot; 21-body portion; 211-first light-passing hole; 212-positioning groove; 22-air floating portion; 221-air floating hole;

3-upper plate; 31-fourth aperture hole; 32-first annular air passage; 33-second annular air passage; 34-first communication air passage; 35-second communication air passage; 36-third connection Air passage; 37-fourth connecting air passage; 38-air floating surface; 39-vacuum chamber;

4-sucker holder; 41-third light passage hole; 42-second adsorption air passage; 421-third annular air passage; 422-transition air passage; 423-fourth annular air passage; 43-interchange block; 44-first diversion tube; 45-second diversion tube; 46-first vertical air passage; 47-second vertical air passage; 48-third vertical air passage;

5-sucker; 51-second light-passing hole; 52-second light-transmissive sheet; 53-first airway; 54-second airway; 55-third airway;

6-first air guiding component; 61-first air guiding tube; 62-second shunting block;

7-level adjustment assembly; 71-first slide rail; 72-second slide rail; 73-first slider; 74-second slider; 75-support block; 76-connection rail; 77-first region; 78-second area;

8-vertical adjustment assembly; 81-linear motor; 82-elastic element; 83-arrangement plate; 84-base; 85-adjustment seat; 86-mounting seat;

9-rotation adjustment assembly; 91-arc motor; 911-stator; 9111-stationary housing; 9112-coil; 912-rotor; 9121-moving housing; 9122-magnet; 92-curved guide block; Two air guiding components; 931 - third diverting block; 932 - second air guiding pipe; 933 - fourth diverting block;

10-support assembly; 101-support base; 102-elastic sheet; 103-lower ring piece; 104-lower plate;

20-substrate; 201-back alignment mark; 30-illumination device.

Detailed ways

The present application will be further described in detail below with reference to the accompanying drawings and embodiments. It is understood that the specific embodiments described herein are merely illustrative of the application and are not intended to be limiting. In addition, it should be noted that, for the convenience of description, only some but not all of the structures related to the present application are shown in the drawings.

1 is a schematic structural view of a workbench provided by the embodiment, and FIG. 2 is a perspective view showing a structure of the workbench according to the embodiment, wherein the vertical direction is the Z direction, the horizontal direction is the X direction and the Y direction, and X, Y and Z satisfy the rule of the right-handed coordinate system. As shown in FIGS. 1 and 2, the present embodiment provides a table for a back side alignment device, which mainly includes a horizontal base 1, a pneumatic foot 2, a suction cup 5, and a first air guide assembly 6. The horizontal base 1 is used to provide structural support for the entire workbench, and the horizontal base 1 is provided with a light-transparent hole 11 penetrating through the upper and lower surfaces of the horizontal base 1, and the first light-transmissive sheet 12 is disposed in the light-transmitting hole 11; 2 is disposed on the horizontal base 1 and can perform horizontal movement in the X and Y directions with respect to the horizontal base 1, and the plurality of first light passing holes 211 are spaced apart from the air foot 2, when the air foot 2 is on the horizontal base 1 When moving in the horizontal direction, one of the plurality of first light passing holes 211 is electrically connected to the light transmitting hole 11; the suction cup 5 is disposed above the air foot 2, and is rotatable relative to the air foot 2 and translational movement in the Z direction a second light-passing hole 51 is defined in the position of the first light-passing hole 211, and the first light-passing hole 211 and the second light-passing hole 51 are electrically connected to each other. a light-transmissive sheet 52; a first adsorption air passage for adsorbing the substrate 20 is opened on the upper surface of the suction cup 5. The first end of the first air guide assembly 6 communicates with the inside of the air foot 2, and the second end of the first air guide assembly 6 It is in communication with the first adsorption airway.

The workbench provided by the present application adopts a horizontal base, a pneumatic foot and a suction cup, and the air foot can move horizontally with respect to the horizontal base, and the suction cup can perform three degrees of freedom rotation and vertical direction translation with respect to the air foot. Adjusting the entire table in six degrees of freedom; by providing a light-transmissive hole 11 in the horizontal base 1, a horizontally movable air foot 2 is disposed above the horizontal base 1, and on the air foot 2 and the suction cup 5 Correspondingly, a plurality of first light passing holes 211 and second light passing holes 51 are respectively disposed, and the horizontal movement of the air foot 2 relative to the horizontal base 1 causes the plurality of first light passing holes 211 and the corresponding second light passing holes The transparent light hole 11 is respectively turned on during the movement of the air foot 2, and then the infrared light emitted by the illumination device 30 located under the light transmission hole 11 can pass through the light transmission hole 11 and the first light transmission hole 211 communicating therewith. And the second light passing hole 51 is irradiated on the back surface alignment mark 201 of the substrate 20 located above the chuck 5. In order to achieve the back surface alignment of the substrate 20, a plurality of back surface alignment marks 201 are generally disposed on the substrate 20. Such an arrangement of the above-mentioned worktables can be disposed on the illumination device by moving the back surface alignment marks 201. Within 30 fields of view, all of the back alignment marks 201 can be captured by a set of illumination devices 30, simplifying the structure of the table, reducing the design requirements of the table to the illumination device 30, and the assembly complexity of the table, while reducing the complexity. The development cost increases the process adaptability of the backside alignment device to the backside alignment mark 201 of the substrate 20.

In this embodiment, the substrate 20 may be a silicon wafer or a other substrate material for photolithography such as a glass substrate.

The air foot 2 is arranged to achieve a horizontal range of movement relative to the horizontal base 1, and the rear alignment mark 201 is aligned with respect to the illumination device 30; in order to achieve horizontal movement of the air foot 2 on the horizontal base 1, the embodiment provides The workbench also includes a level adjustment assembly 7.

FIG. 3 is a perspective view showing the structure of the horizontal base 1, the horizontal adjustment assembly 7, and the air foot 2 provided by the embodiment. As shown in FIG. 3, the horizontal adjustment assembly 7 provided in this embodiment includes a first slide rail 71 disposed along the Y direction and a second slide rail 72 disposed along the X direction. Two first sliding rails 71 are arranged in parallel and are respectively located at opposite ends of the air foot 2, and two connecting rails 76 are connected between the two first sliding rails 71. The two connecting rails 76 are respectively located on the first sliding rails. The two second sliding rails 72 are disposed in parallel at intervals, and are respectively located outside the corresponding connecting rails 76. In the present embodiment, the two connecting rails 76 are disposed in parallel and parallel to the second sliding rail 72. A first slider 73 is respectively connected to two sides of the air foot 2 and the first sliding rail 71, and the first slider 73 is slidable along the length of the first sliding rail 71, so that the air foot 2 is opposite to the horizontal base 1 Translational movement in the Y direction; a second slider 74 is coupled to the connecting rail 76, and the second slider 74 is moved along the length of the second sliding rail 72 to cause a translational movement of the pneumatic foot 2 relative to the horizontal base 1 in the X direction.

In this embodiment, the first slider 73 is a Z-shaped slider, the upper end of the Z-shaped slider is slidably connected with the upper surface of the first sliding rail 71, and the lower end of the Z-shaped slider is fixedly connected with the air foot 2; The first side of the air foot 2 is provided with two first sliders 73. In other embodiments, the structure and the number of the first sliders 73 can be set to other forms as needed. The structure and the number of the rails 71 are limited. Similarly, the structures of the slide rails and the sliders in FIG. 3 are exemplary structures, and the present embodiment does not affect the first slide rail 71, the second slide rail 72, and the second slider 74. The specific form is specifically limited as long as the structure in which the slider and the slide rail are relatively slid can be realized.

In this embodiment, both ends of the first sliding rail 71 are provided with a supporting block 75. On the one hand, the supporting block 75 is arranged to raise the height of the lower surface of the first sliding rail 71 from the horizontal base 1 so that the air foot 2 is partially Extending into the lower side of the first slide rail 71, reducing the volume of the overall structure of the worktable; on the other hand, the arrangement of the support block 75 can reduce the contact area between the first slide rail 71 and the horizontal base 1, and reduce the air foot 2 Resistance to sliding in the X direction. In this embodiment, the support block 75 is an air floating support block. The support block 75 is formed by filling a positive pressure gas into the support block 75 and forming a gas film between the lower surface of the support block 75 and the horizontal base 1. The structure supported by the support block 75 floats on the horizontal base 1 to realize the frictionless translation of the air foot 2 in the X direction, thereby improving the adjustment precision of the worktable and facilitating the high-precision operation of the back surface alignment device.

In this embodiment, the first slide rail 71 and the second slide rail 72 are used for the Y-direction movement and the X-direction movement adjustment of the air foot 2, and in other embodiments, the horizontal adjustment assembly 7 of other structural forms may also be used. As long as the structure in which the air foot 2 moves in the X direction and the Y direction with respect to the horizontal base 1 can be achieved.

4 is a bottom view of the air foot 2 provided in the embodiment. As shown in FIG. 4 , the air foot 2 includes a body portion 21 and an air floating portion 22 disposed on two sides of the body portion 21 , and the air floating portion 22 is vertically opened. The air floating hole 221 penetrating the lower surface of the air floating portion 22, by inputting positive pressure gas to the air floating portion 22, causes the air foot 2 to have a certain supporting strength; and the positive pressure gas acts on the lower surface and level of the air foot 2 through the air floating hole 221. Between the upper surfaces of the base 1, a gas film is formed between the upper surface of the air foot 2 and the lower surface of the horizontal base 1, so that the air foot 2 floats on the horizontal base 1. Through the design of the air foot 2, the frictionless movement of the air foot 2 on the horizontal base 1 is realized, the running precision of the air foot 2 on the horizontal base 1 is improved, and the precision measurement of the back surface alignment device is ensured. The body portion 21 is provided to support other structures disposed on the air foot 2, and the plurality of first light passing holes 211 are formed on the body portion 21 and penetrate the upper and lower surfaces of the body portion 21.

In the present embodiment, two air floating holes 221 are disposed on each of the air floating portions 22, and two air floating holes 221 are respectively disposed at both ends of the air floating portion 22, and in other embodiments, each gas may be One, three or more air floating holes 221 are provided in the floating portion 22, and the position and the number of the air floating holes 221 are not specifically limited in this embodiment. In the present embodiment, the air foot 2 has a rectangular structure, which is advantageous for controlling the displacement amount of the air foot 2 in the X direction and the Y direction and the design of the level adjusting assembly 7. In other embodiments, the air foot 2 may also be of a configuration having other shapes.

5 is a top plan view of the air foot 2 and level adjustment assembly 7 of one embodiment, and FIG. 6 is a top plan view of the air foot 2 and level adjustment assembly 7 of another embodiment, as shown in FIGS. 5 and 6. According to the positional relationship of the air floating portion 22 with respect to the first slide rail 71, the air floating portion 22 has two different moving regions during the movement of the air foot 2 relative to the horizontal base 1. In FIG. 5, the air floating portion 22 is located on both sides of the first foot rail 71 of the air foot 2, and each air floating portion 22 moves in the corresponding first region 77; in FIG. 6, the air floating portion 22 is located at the air foot 2 Parallel to both sides of the second slide rail 72, each air floating portion 22 moves within the corresponding second region 78. In FIG. 5 and FIG. 6, the solid rectangular hole represents the first light passing hole 211 opened in the air foot 2, and the plurality of first light passing holes 211 are arranged around the center of the air foot 2, and the solid circular hole represents A light transmission hole 11 is formed in the horizontal base 1. During the movement of the air foot 2, the first light passing holes 211 need to be aligned with the light transmitting holes 11 so that the back surface alignment marks 201 corresponding to the respective first light passing holes 211 can be searched by the field of view of the illumination device 30. During the movement of the air foot 2, the position of the light transmission hole 11 cannot interfere with the motion area of the air floating portion 22, and each of the first light transmission holes 211 can be aligned by the light transmission hole 11, that is, the gas foot 2 needs Sufficient area to avoid interference of the air floating portion 22 with the light transmission hole 11, and sufficient range of motion is required for each of the first light transmission holes 211 to communicate with the light transmission hole 11; the size and level adjustment assembly of the air foot 2 The size of 7 is directly related to the size of the horizontal base 1 and the entire table. In order to meet the requirements for miniaturization of the table, the area of the air foot 2 is required to be sufficiently small.

In the present embodiment, the light-transmitting hole 11 is opened in a circular range having a center of a rectangular moving region and having a radius of 50 mm. By arranging the light-transmitting holes 11 in the range, it is possible to reduce the movable range of the air-foot 2 and reduce the volume of the table while satisfying the search of the first light-passing holes 211 by the light-transmitting holes 11.

In this embodiment, since the air foot 2 moves on the first slide rail 71, and the first slide rail 71 drives the air foot 2 to slide relative to each other on the second slide rail 72, in this embodiment, the air float can be used. The portion 22 is disposed on both sides of the first foot rail 71 of the air foot 2, and at this time, by extending the air floating portion 22 between the first slide rail 71 and the horizontal base 1, the movement area of the air foot 2 can be ensured. At the same time, the size of the entire level adjusting assembly 7 is reduced, thereby reducing the overall size of the horizontal base 1 and the table.

In the embodiment of FIG. 3-6, the first light-passing hole 211 and the corresponding second light-passing hole 51 are rectangular. In other embodiments, the first light-passing hole 211 and the corresponding second light-passing hole are The 51 can be in other forms, such as a circular hole. The present embodiment does not limit the specific shape of the light transmission hole and the light transmission hole. In the embodiment, the number of the first light-passing holes 211 is three. In other embodiments, the number of the first light-passing holes 211 can be specifically set according to specific needs.

FIG. 7 is a partial schematic structural view of the workbench provided in the embodiment. As shown in FIG. 7, the suction cup 5 is disposed above the air foot 2 for adsorbing the base 20, and the suction cup 5 can perform Z-direction translation and each of the air foot 2 The fine adjustment of the rotation improves the accuracy of the alignment of the back alignment mark 201 with respect to the illumination device 30 and the measurement accuracy of the back alignment device. In an embodiment, in order to realize the movement of the suction cup 5, the workbench provided by the embodiment further comprises a vertical adjustment assembly 8 and a rotation adjustment assembly 9, wherein the vertical adjustment assembly 8 is arranged to drive the suction cup 5 around the air foot 2 The X-axis and the Y-axis rotate, and the rotation adjustment assembly 9 is arranged to drive the suction cup 5 to rotate about the Z-axis.

In order to simplify the structure of the suction cup 5, facilitate the layout of each structure, and assemble and assemble the worktable, the workbench provided by the embodiment further includes an upper plate 3 and a suction cup holder 4. The upper plate 3 is disposed between the air foot 2 and the suction cup 5. The first end of the vertical adjustment assembly 8 is connected with the air foot 2, and the second end of the vertical adjustment assembly 8 is connected with the upper plate 3 to realize the upper plate 3 relative to the air. The vertical direction of the foot 2 is translated; the suction cup holder 4 is disposed between the upper plate 3 and the suction cup 5, and the rotation adjusting assembly 9 is connected with the suction cup holder 4 to drive the suction cup holder 4 to rotate relative to the upper plate 3 to realize the rotation of the suction cup 5 about the Z axis. Fine tune. A third light-passing hole 41 and a fourth light-passing hole 31 are respectively defined in the first light-passing hole 211, and the first light-passing hole 211, the second light-passing hole 51, and the third pass are respectively corresponding to the first light-passing hole 211. The light hole 41 and the fourth light passing hole 31 are sequentially turned on. By providing the upper plate 3 and the suction cup holder 4, the rotation adjustment assembly 9 and the vertical adjustment assembly 8 are not directly connected to the suction cup 5, which reduces the complexity of the design of the suction cup 5, and is advantageous for making the design of the suction cup 5 more suitable for the substrate to be connected. 20; and facilitate the repair and replacement of various components, and facilitate the assembly and disassembly of the workbench, and while reducing the size of the structure, the arrangement space between the adjustment components is greater, without the interference of the various adjustment components The situation, and facilitates the decoupling adjustment of the respective degrees.

FIG. 8 is a schematic structural view of the air foot 2, the upper plate 3, and the vertical adjustment assembly 8 according to the embodiment. As shown in FIG. 8, in the embodiment, the upper plate 3 has a rectangular structure, and the vertical adjustment component 8 is A set of four corners of the upper plate 3 is provided. The vertical adjustment unit 8 is disposed between the upper plate 3 and the air foot 2, and is arranged to finely adjust the distance between the upper plate 3 and the air foot 2 in the vertical direction. At the same time, by setting the vertical adjustment assembly 8 at the four corners of the upper plate 3, the upper plate 3 is finely adjusted on the Rx and Ry degrees of freedom by adjusting the adjustment height of each set of the vertical adjustment components 8, which can be simplified. The complexity of the overall structure reduces design costs. In other embodiments, other adjustment devices may be provided to adjust the adjustment of the Rx and Ry degrees of the tray. Since there are many devices for adjusting the X-direction and the Y-direction in the related art, the embodiment is no longer correct. Other ways of implementing Rx and Ry adjustments are described.

9 is a cross-sectional view of the vertical adjustment assembly 8 provided by the present embodiment. As shown in FIGS. 8 and 9, the vertical adjustment assembly 8 includes a linear motor 81, an adapter plate 83, and an elastic member 82. The linear motor 81 is vertically disposed on the air foot 2, and the fixing portion thereof is fixedly connected with the air foot 2, and the upper plate 3 is provided with a through hole corresponding to the position of the output shaft, and the upper end of the output shaft passes through the through hole and is located above the upper plate 3. The adapter plate 83 is connected to the fixed connection. The inner side of the lower end surface of the adapter plate 83 is fixedly coupled to the output shaft, and the outer side is fixedly coupled to the upper surface of the upper plate 3. The elastic member 82 is sleeved on the outside of the linear motor 81, and the first end of the elastic member 82 is connected to the air foot 2, and the second end of the elastic member 82 is in contact with the upper plate 3. By providing the linear motor 81, the adapter plate 83 and the elastic member 82, the linear motion of the output shaft of the linear motor 81 can be driven to drive the vertical movement of the upper plate 3 to adjust the vertical distance between the upper plate 3 and the air foot 2; The elastic member 82 is disposed to offset part of the gravity of the structure above the upper plate 3 to realize vertical gravity compensation; by providing the adapter plate 83, the connection and disassembly of the linear motor 81 and the upper platform can be facilitated, which is beneficial to the linear motor 81. Repair and replacement.

To facilitate installation, removal, and adjustment of the vertical adjustment assembly 8, the vertical adjustment assembly 8 also includes an adjustment seat 85, a base 84, and a mount 86. The lower end of the fixing base 86 is fixedly connected with the air foot 2, the lower end of the base 84 is connected to the upper end of the fixing base 86, and the lower end of the base 84 is connected with the linear motor 81. The adjusting seat 85 is sleeved on the outer wall of the base 84 and is screwed to the outer wall of the base 84. The upper end surface of the base 84 is provided with an annular groove. The lower end of the elastic member 82 is locked in the annular groove, and the adjusting seat is adjusted by screwing. With respect to the position of the vertical direction of the air foot 2, the amount of compression or elongation of the elastic member 82 can be adjusted, and the force of the elastic member 82 on the upper plate 3 can be changed to better perform the function of gravity compensation.

In the embodiment, the lower end of the base 84 is provided with a threaded hole, and the upper end of the fixing seat 86 is screwed with the threaded hole, for example, by fine thread connection, facilitating the installation of the linear motor 81 and the installation, disassembly and maintenance of the vertical adjustment assembly 8. . In other embodiments, the base 84 and the mount 86 can also be in other detachable connections. In the present embodiment, the linear motor 81 is a voice coil motor, which has a small volume, high adjustment sensitivity, and high adjustment precision. In the present embodiment, the elastic member 82 is a spring. In other embodiments, the elastic member 82 can also be other members that can be sleeved outside the motor and can be elastically deformed.

In this embodiment, the adapter plate 83 is provided with a plurality of connecting bosses spaced apart on the periphery thereof, and the adjacent two connecting bosses are connected by a circular arc transition, and may be connected by a concave arc. By providing the connecting bosses, the connection and positioning of the adapter plate 83 is facilitated, and the structure of the adapter plate 83 is advantageous for reducing the weight and volume of the adapter plate 83. In the present embodiment, three connecting bosses are evenly spaced on each of the adapter plates 83. In other embodiments, two, four or more connecting bosses may also be provided. In this embodiment, the structure of the adapter plate 83 with the connecting boss and the arc transition is used. In other embodiments, other types of the adapter plate 83, such as a circular shape, may be used. The specific structure of the plate 83 is limited.

In the present embodiment, in order to smoothly lead the cable in the linear motor 81, the upper plate 3 is provided with a escape groove for avoiding the cable.

In the present embodiment, by using a plurality of sets of the above-described vertical adjustment components 8, the vertical distance between the upper plate 3 and the air foot 2 can be finely adjusted, and the upper plate 3 can be finely adjusted in Rx and Ry degrees of freedom. Moreover, the partial gravity of the structure located above the vertical adjustment component 8 can be offset, and the gravity compensation in the vertical direction can be realized; the vertical adjustment component 8 provided in this embodiment is convenient to install and maintain, has a small volume, and is suitable for being narrow in vertical space. Positioning, arranging, maintaining and disassembling the vertical adjustment assembly 8 is advantageous for reducing the overall structural size of the worktable, reducing the vertical dimension of the worktable, making the worktable movement more stable, and facilitating the high speed and high height of the worktable. Precision operation.

10 is a schematic structural view of a support assembly 10 according to the embodiment. As shown in FIG. 10, the workbench provided in this embodiment further includes a support assembly 10, and the support assembly 10 includes a support base 101 and an elastic piece 102, wherein the support base The lower end of the 101 is fixedly connected to the air foot 2, and the air foot 2 is provided with a positioning groove 212 for supporting the positioning of the support base 101; the elastic piece 102 is a spoke-like structure, and the upper end of the support base 101 is fixedly connected with the inner ring of the elastic piece 02. The outer ring of the elastic piece 102 is fixedly coupled to the lower surface of the upper plate 3. When the adjustment heights of the plurality of sets of the vertical adjustment assemblies 8 are different, the deformation of the outer portions of the respective elastic pieces 102 corresponding to the vertical adjustment assembly 8 is different, and the inner circumference of the elastic piece 102 is substantially not deformed due to the limitation of the support base 101, thereby The decoupling motion of the Z-direction translation, the x-direction rotation, and the Y-direction rotation can be realized by the deformation of the outer ring of the elastic piece 102.

In this embodiment, the elastic piece 102 is fixed to the support base 101 by the upper ring piece and the lower ring piece 103. The inner ring of the elastic piece 102 is disposed between the upper ring piece and the lower ring piece 103, and is supported by the upper ring piece and The lower ring piece 103 is clamped, and the upper ring piece and the lower ring piece 103 are connected to the support base 101 by means of a screw or the like. The elastic piece 102 and the upper plate 3 are realized by the opposite upper and lower clamping plates 104. The elastic piece 102 is disposed between the upper and lower clamping plates 104, and is clamped and fixed by the upper and lower clamping plates 104, the upper and lower clamping plates. 104 is connected to the upper plate 3 by means of a thread or the like, and the upper plate and the lower plate 104 are evenly spaced apart from each other in the circumferential direction of the elastic piece 102. In other embodiments, the connection between the elastic piece 102 and the support base 101 and the upper plate 3 may also be in other detachable connection forms.

In the embodiment, the elastic sheet 102 is provided with a fifth light-passing hole corresponding to the position of the fourth light-passing hole 31. The area of the fifth through-hole is larger than the fourth light-passing hole 31, and the inner diameter of the fifth light-passing hole is equal to The outer diameter of the support base 101 can improve the deformation sensitivity at the position of each of the vertical adjustment assemblies 8 corresponding to the elastic piece 102. Each of the upper and lower jaws 104 is disposed on the outer edge of the fifth light-passing aperture to facilitate the mounting of the upper and lower jaws 104. In the present embodiment, the upper and lower jaws 104 are both arc-shaped and have an inner diameter equal to the outer diameter of the fifth light-passing aperture. The elastic piece 102 is provided with a tear-proof groove on both sides of the fifth light-passing hole, so as to prevent the elastic piece 102 from being torn by force, and the tear-proof groove of the plurality of fifth light-passing holes is along the circumferential direction of the support base 101. Radial setting.

In the present embodiment, the support base 101 has a cylindrical structure and includes three legs which are evenly spaced in the circumferential direction, and the side walls of each of the legs are provided with grooves extending through the side walls of the legs. The structure of the support base 101 can reduce the overall weight of the support base 101 while ensuring the stability of the support. In this embodiment, the elastic piece 102 is a reed. In other embodiments, the elastic piece 102 may also be other lamellar structures capable of elastic deformation.

Figure 11 is a schematic structural view of the suction cup holder 4 and the rotation adjusting assembly 9 according to the embodiment, and Figure 12 is a partial enlarged view of the portion I in Figure 11, as shown in Figure 11 and Figure 12, the suction cup holder 4 provided in this embodiment For the disc-shaped structure, the rotation adjusting assembly 9 provided in this embodiment includes a curved motor 91, an arc guiding block 92 and a second air guiding assembly 93. The arc motor 91 includes a stator 911 and a rotor 912 rotatable relative to the stator 911. The stator 911 is fixedly coupled to the upper plate 3, and the stator 911 has an arc structure including an arc-shaped fixed housing 9111 and a coil 9112, wherein the coil 9112 It is disposed in the receiving groove of the fixed housing 9111 and is located between the fixed housing 9111 and the rotor 912. The rotor 912 includes an arc-shaped movable housing 9121 and a magnet 9122. The movable housing 9121 is fixedly connected to the suction cup holder 4, and the side facing the suction cup holder 4 is closely attached to the outer wall of the suction cup holder 4, and the plurality of magnets 9122 are spaced apart. The magnetic housing between the two housing magnets 9122 is opposite to the side of the movable housing 9121 away from the chuck holder 4. The magnet 9122 and the coil 9112 are oppositely disposed. When the arc motor 91 is energized, the magnetic force generated between the coil 9112 and the magnet 9122 causes the movable housing 9121 to rotate relative to the fixed housing 9111, thereby realizing the suction cup holder 4 to rotate relative to the upper plate 3. The rotation of the direction.

In order to provide guidance for the Z-direction rotation of the suction cup holder 4, the upper plate 3 is provided with a plurality of curved guide blocks 92. The curved guide block 92 is curved toward the side of the suction cup holder 4, and the diameter of the curved surface is In cooperation with the outer diameter of the chuck holder 4, a plurality of curved guide blocks 92 are evenly spaced along the circumferential direction of the chuck holder 4. In order to reduce the friction of the chuck seat 4 about the Z-direction rotation, the accuracy of the Z-direction rotation adjustment is improved, the rotation adjustment assembly 9 further includes a second air guide assembly 93, and the curved guide block 92 is an air-floating guide block, and the second portion is provided. The air guide assembly 93 floats the suction cup holder 4 on the upper plate 3, and simultaneously guides the rotation of the suction cup holder 4 by the air floating guide block, thereby realizing the frictionless movement of the suction cup holder 4 when rotating in the Z direction. In the present embodiment, the three curved guide blocks 92 are evenly spaced along the sidewall of the chuck holder 4. In other embodiments, the number of the arcuate guide blocks 92 may be two, four or more.

In an embodiment, at least one of the upper surface of the upper plate 3 and the lower surface of the suction cup holder 4 is provided with an inflation air passage, and the first end of the second guide assembly communicates with the interior of the air foot 2, and the second guide assembly The two ends are connected to the inflation air passage, and the positive air in the air foot 2 is filled into the inflation air passage to form a gas film between the upper plate 3 and the suction cup holder 4, and the suction cup holder 4 floats on the upper plate 3. At least one of the upper surface of the upper plate 3 and the lower surface of the suction cup holder 4 is provided with a third adsorption air passage for vacuum adsorption of the upper plate 3 and the suction cup holder 4.

In the present embodiment, an inflation air passage and a third adsorption air passage are opened on the upper surface of the upper plate 3. The second gas guide assembly 93 includes a third flow dividing block 931, a second air guiding tube 932, and a fourth flow dividing block 933. Both ends of the third diverting block 931 are respectively connected to the inside of the air foot 2 and the first end of the second air guiding tube 932, and the fourth diverting block 933 is connected to the second end of the second air guiding tube 932. The third diverting block 931 has three diverting outlets, the fourth diverting block 933 has three diverting inlets and three diverting outlets respectively, and the second air guiding duct 932 has three air dividing ducts, each of which is connected to a third shunt. The split outlet of the block 931 and the split inlet of the fourth split block 933, the three split outlets of the fourth split block 933 are respectively connected to the inflation air passage, the third adsorption air passage, and the curved guide block 92.

In the present embodiment, the second air guide tube 932 includes three bellows that respectively communicate with the three split outlets of the third splitter block 931 and the three split inlets of the fourth splitter block 933. In other embodiments, the second air guiding tube 932 may be a spiral hose, and the spiral hose includes three hoses, and the three hoses respectively connect three divided outlets of the third dividing block 931 and three of the fourth dividing block 933. Divide the entrance. The use of bellows or spiral hoses allows the bellows or spiral hose to be free of stress when it is slightly moved with the table, ie it does not affect the performance of the table.

In this embodiment, by providing three shunt tubes and three shunt outlets, each of the split outlets of the fourth shunt block 933 can sequentially communicate with the inflating air passage, the third adsorbing air passage, and the curved guiding block 92, which can be according to actual needs. The opening or closing of each airway and the adjustment of the flow rate into the airway make the overall pneumatic system more powerful and more suitable for practical use. In other embodiments, the number of the shunt tube and the split port may be selected according to actual needs, such as an inflation air passage for floating the suction cup holder 4 on the upper plate 3 and for absorbing the suction cup holder 4 by the upper plate 3. The third adsorption air passage is not used at the same time. Therefore, the inflation air passage and the third adsorption air passage can share one air passage. When the positive air is filled into the common air passage to float the suction cup base 4 on the upper flat plate 3, The common air passage serves as an inflation air passage, and when the upper air passage 3 sucks the suction cup holder 4, the common air passage serves as a third adsorption air passage.

In an embodiment, FIG. 13 is a bottom view of the upper plate 3 provided by the embodiment, and FIG. 14 is a top view of the upper plate 3 according to the embodiment. The upper surface of the upper plate 3 is shown in FIG. 13 and FIG. A plurality of air bearing surfaces 38 are convexly disposed, and the plurality of air floating surfaces 38 are evenly spaced along a circumference coaxial with the chuck holder 4. The lower surface of the upper plate 3 is provided with a first annular air passage 32. The upper plate 3 is horizontally opened with a diversion outlet communicating with the third diverter block 931 and a first communication air passage 34 of the first annular air passage 32. The upper plate 3 A second communication air passage 35 connecting the air floating surface 38 and the first annular air passage 32 is vertically opened, and the inflation air passage includes a first communication air passage 34, a first annular air passage 32 and a second communication air passage 35 which are sequentially connected. . The first connecting air passages 34 may be disposed in plurality, and the second connecting air passages 35 are disposed correspondingly at least one of the air floating surfaces 38. In this embodiment, the number of the air floating surfaces 38 is three, and each of the air floating surfaces 38 is correspondingly provided with a second connecting air passage 35. In other embodiments, the first connecting air passage 34, the air floating surface 38, and the second The number of connected air passages 35 can be specifically set according to actual needs.

The upper surface of the upper plate 3 is provided with a plurality of vacuum chambers 39. The upper end surface of the vacuum chamber 39 is flush with the air floating surface 38, and the plurality of vacuum chambers 39 are disposed at intervals along the circumference coaxial with the chuck holder 4. The lower surface of the upper plate 3 is provided with a second annular air passage 33. The upper plate 3 is horizontally opened with another split port communicating with the third splitter block 931 and a third connecting air passage 36 of the second annular air passage 33. 3, a fourth connecting air passage 37 connecting the vacuum chamber 39 and the second annular air passage 33 is vertically opened, and the third adsorption air passage includes a third connecting air passage 36, a second annular air passage 33 and a fourth connection that are sequentially connected. Airway 37. In the present embodiment, the circumference of the air floating surface 38 is the same as the circumference of the vacuum chamber 39, and each of the air floating surfaces 38 is provided with a vacuum chamber 39 on both sides of the circumferential circumference. In other embodiments, the number and positional relationship of the vacuum chambers 39 can be specifically set according to actual needs.

In this embodiment, since the positive pressure gas or the vacuum is introduced into the upper surface of the upper plate 3 through the annular air passage at the bottom of the upper plate 3, the arrangement can make the arrangement of the air path simpler and more convenient, and occupy less space. It does not interfere with the arrangement of the suction cup holder 4 disposed above the upper plate 3, which is advantageous for simplifying the overall structure of the table and facilitating the installation of the table. In order to prevent vacuum gas or positive pressure gas from flowing out of the upper plate 3 from the bottom of the upper plate 3, an annular first sealing plate is provided at the bottom of the upper plate 3, and is provided to seal the first annular air passage 32 and the second annular air passage 33.

The suction cup holder 4 is disposed between the upper plate 3 and the suction cup 5, and the upper end surface of the suction cup holder 4 is for sucking the suction cup 5. At least one of the upper surface of the suction cup holder 4 and the lower surface of the suction cup 5 is provided with a second adsorption air passage 42 for vacuum-absorbing the suction cup 5 to the suction cup holder 4. In the present embodiment, the second adsorption air channel 42 is opened on the upper surface of the suction cup holder 4. The suction cup 5 is disposed on the upper surface of the suction cup holder 4, and the first adsorption air passage for adsorbing the substrate 20 is opened on the upper surface of the suction cup 5. In the present embodiment, the first adsorption air passage communicates with the first air guide assembly 6 through the suction cup holder 4, and the suction air holder 4 is provided with a transfer air passage corresponding to the first adsorption air passage.

In the present embodiment, the first adsorbing air passage includes a first air passage 53, a second air passage 54, and a third air passage 55, which are adapted to the six-inch, eight-inch, and twelve-inch bases 20, respectively. Therefore, the transfer gas path is correspondingly provided with a first transfer gas path connecting the first air passage 53 , a second transfer gas path connecting the second air passage 54 , and a third transfer gas path connecting the third air passage 55 . .

In an embodiment, FIG. 15 is a schematic structural view of the suction cup holder 4 and the first air guide assembly 6 according to the embodiment. As shown in FIG. 15, the first air guide assembly 6 includes a first flow dividing block and a first air guiding tube. 61 and a second shunt block 62. The two ends of the first shunt block are respectively connected to the inside of the air foot 2 and the first air guiding pipe 61, and the second diverting block 62 communicates with the first air guiding pipe 61 and the suction cup seat 4, respectively. The first splitter block has four split outlets, the second splitter block 62 has four split inlets, and the first air guide tube 61 has four splitter tubes respectively corresponding to the four split outlets and the second splitter block 62 connecting the first splitter block. The four diversion entrances. The second diverting block 62 has four diversion outlets that respectively connect the second adsorption air channel 42, the first transfer gas path, the second transfer gas path, and the third transfer gas path.

In the present embodiment, the first air guide tube 61 includes four bellows that respectively communicate with the four split outlets of the first splitter block and the four split inlets of the second splitter block 62. In other embodiments, the first air duct 61 may be a spiral hose, and the spiral hose includes four hoses, and the four hoses respectively communicate with the four split outlets of the first splitter block and the fourth splitter block 62. Diversion portal. The use of bellows or spiral hoses allows the bellows or spiral hose to be free of stress when it is slightly moved with the table, ie it does not affect the performance of the table.

In this embodiment, by providing four shunt tubes and four shunt outlets, each of the split outlets of the second shunt block 62 can sequentially communicate with the second adsorption air passage 42, the first transfer air passage, and the second transfer gas. The road and the third transfer gas path can open or close each air passage according to actual needs and adjust the flow rate of entering the air passage, so that the adjustment performance of the entire pneumatic system is stronger, and is more suitable for practical use. In other embodiments, the number of the shunt tube and the split port may also be selected according to actual needs.

As shown in FIG. 15, the upper end surface of the suction cup holder 4 is provided with an annular groove, and a plurality of adapter blocks 43 are evenly spaced apart in the annular groove. The inner side of the adapter block 43 abuts against the inner groove wall of the annular groove, and rotates. The outer side of the block 43 abuts against the outer groove wall of the annular groove, and the upper end surface of the adapter block 43 is flush with the upper surface of the chuck holder 4. A third annular air passage 421 is defined in the upper surface of the suction cup base 4 on the inner side of the annular groove. The upper surface of the suction cup base 4 defines a fourth annular air passage 423 on the outer side of the annular groove, and the upper surface of the adapter block 43 is connected. The third annular air passage 421 and the fourth annular air passage 423 are coupled to the air passage 422. The second adsorption air passage 42 includes a third annular air passage 421, a transfer air passage 422, and a fourth annular air passage 423 that are sequentially connected, and the second annular air passage 33 communicates with the first split flow port of the second flow dividing block 62.

The first transfer gas path includes a first horizontal air passage horizontally opened inside the transfer block 43 and the suction cup base 4, an annular air passage groove opened on the lower surface of the suction cup base 4, and a vertical through the suction cup holder 4 and the transfer block a first vertical air passage 46 of the first horizontal air passage 46, wherein each of the transfer block 43 and the corresponding suction cup base 4 is provided with a first vertical air passage 46, and two ends of the first horizontal air passage respectively communicate with the second flow dividing block 62 The second split port and the annular through air groove communicate with the annular through air groove and the first air passage 53 respectively. The lower surface of the suction cup holder 4 is provided with a second sealing plate which is arranged as a bottom sealing annular gas passage groove.

The second transfer gas path includes a second horizontal air passage horizontally opened inside the transfer block 43 and the suction cup holder 4, a first air guiding tube 44 disposed inside the annular groove, and a vertical opening inside the transfer block 43 Two vertical airways 47. Wherein, the second horizontal air passage is connected to the third splitting port of the second shunting block 62; the first guiding tube 44 is of a ring-like shape, and sequentially runs through the respective transfer blocks 43 horizontally, and the first guiding tube 44 communicates with the second vertical line respectively. The air passage 47 and the second horizontal air passage 47 communicate with the second air passage 54. The third switching air passage is similar to the second switching air passage, and includes a third horizontal air passage horizontally opened inside the transfer block 43 and the suction cup base 4, and a second air guiding tube disposed inside the annular groove And a third vertical air passage 48 vertically extending inside the transfer block 43 , wherein the third horizontal air passage communicates with the fourth split air port of the second shunt block 62 , and the third vertical air passage 48 communicates with the third air passage 55 , The second draft tube 45 is disposed outside the first shunt tube. In the present embodiment, the first vertical air passage 46 is located on the first circumference, the second vertical air passage 47 is located on the second circumference, and the third vertical air passage 48 is located on the third circumference, the first circumference, the second circumference, and The third circumference is disposed coaxially and sequentially from the inside to the outside, and is adapted to the sizes of the six-inch, eight-inch, and twelve-inch substrates 20, respectively.

In this embodiment, by providing a suction cup holder 4 with an annular groove, an annular gas passage groove is provided at the bottom of the suction cup holder 4, thereby avoiding providing too many draft tubes in the annular groove, which is advantageous for reducing The volume of the annular groove avoids the insufficient internal space caused by the provision of the draft tube at the first circumference of the smaller diameter or the shielding of the third light-passing hole 41. By providing the first draft tube 44, the second draft tube 45 and the adapter block 43 and the annular air passage groove inside the annular groove, the air flow of the second flow dividing block 62 can be uniformly guided to the first circumference, The circumferential circumference of the second circumference and the third circumference facilitates uniform adsorption of the substrate 20.

16 is a schematic structural view of the suction cup 5 provided in the embodiment, and FIG. 17 is a schematic view showing the air passage distribution of the suction cup 5 in FIG. 16, as shown in FIG. 16 and FIG. 17, in the embodiment, the suction cup 5 is in the shape of a disk. The first air passage 53 includes a first passage radially disposed inside the suction cup 5, and a second passage and a third passage disposed along the vertical direction of the suction cup 5, wherein the upper end of the second passage communicates with the first passage, the second passage The lower end penetrates the lower surface of the suction cup 5 and communicates with the fourth communication air passage 37. The lower end of the third passage communicates with the first passage, the upper end of the third passage penetrates the upper surface of the suction cup 5, and the third passage is disposed at intervals along the longitudinal direction of the first passage. And a third path is disposed between the center of the suction cup 5 and the second track for achieving uniform adsorption of the substrate 20 in the radial direction. The second air passage 54 is similar to the third air passage 55 disposed in the first air passage 53, and the second air passage 54 includes a fourth lane disposed radially and a fifth and sixth lane disposed vertically, wherein the fifth passage The upper end of the road is connected to the fourth passage, the lower end of the fifth passage is connected to the sixth connecting air passage, and the lower end of the sixth passage is connected to the fourth passage. The upper end of the sixth passage penetrates the upper surface of the suction cup 5; the third air passage 55 includes the seventh passage in the radial direction. And the eighth and sixth lanes arranged in the vertical direction, wherein the eighth end is connected to the seventh road, the eighth end is connected to the eighth connecting air passage, and the ninth lower end is connected to the seventh road, and the ninth upper end is connected Through the upper surface of the suction cup 5. In this embodiment, the third track is disposed on the inner side of the second track, and is disposed at a plurality of intervals along the length direction of the first track, and the sixth track is disposed between the second track and the fifth track, and along the fourth There are a plurality of intervals in the length direction of the track, and the ninth track is disposed outside the fifth track, and a plurality of intervals are arranged along the length direction of the seventh track, and the first track, the fourth track, and the seventh track are all along the suction cup 5. There are multiple circumferential intervals.

In this embodiment, the first air passage 53, the second air passage 54, and the third air passage 55 are disposed in a manner suitable for the adsorption of the six-inch, eight-inch, and twelve-inch bases 20, and the base 20 is a six-inch base 20 When the substrate 20 is an eight-inch substrate 20, the first air channel 53 and the second air channel 54 are used to adsorb the substrate 20 at the same time; when the substrate 20 is twelve inches At the time of the substrate 20, the first air channel 53, the second air channel 54, and the third air channel 55 are simultaneously adsorbed to the substrate 20, and the material can be applied to the adsorption of the substrates 20 of different sizes while saving resources. Uniform adsorption can be achieved in the circumferential and radial directions of the substrate 20.

This embodiment also provides a back alignment device comprising the above table.

The back alignment device provided by the present application can capture all the back alignment marks by using one set of illumination devices by using the above-mentioned worktable, which simplifies the overall structure of the back alignment device, improves the assembly complexity of the back alignment device, and reduces the assembly complexity of the back alignment device. The cost of the backside alignment device increases the process adaptability of the backside alignment device.

Claims

A workbench that includes:

a horizontal base (1), the horizontal base (1) is provided with a light transmission hole (11) penetrating the upper surface of the horizontal base (1), and the first light transmission hole (11) is provided with a first Light transmissive sheet (12);

a pneumatic foot (2) disposed on the horizontal base (1) and movable on a horizontal plane relative to the horizontal base (1), the air foot (2) being spaced apart from the plurality of first passes a light hole (211), in a case where the air foot (2) moves on the horizontal base (1), one of the plurality of first light passing holes (211) and the light transmitting hole (11) conducting;

a suction cup (5) disposed above the air foot (2), the suction cup (5) being capable of three degrees of freedom rotation relative to the air foot (2) and capable of being relative to the air foot (2) Translating in the vertical direction, the suction cup (5) is provided with a second light-passing hole (51) corresponding to the position of the first light-passing hole (211), the first light-passing hole (211) and the second The light-passing holes (51) are connected, and the second light-transmitting holes (51) are provided with a second light-transmissive sheet (52), and the upper surface of the suction cup (5) is further provided with a first surface for adsorbing the substrate (20). Adsorbing the airway;

a first air guide assembly (6), a first end of the first air guide assembly (6) is in communication with the interior of the air foot (2), and a second end of the first air guide assembly (6) The first adsorption airway is connected.
The workbench according to claim 1, further comprising an adjustment device, the adjustment device comprising:

a horizontal adjustment component (7) connected to the air foot (2), configured to drive the air foot (2) to move in a horizontal direction;

a vertical adjustment assembly (8), a first end of the vertical adjustment assembly (8) coupled to the air foot (2), a second end of the vertical adjustment assembly (8) and the suction cup (5) Connecting, arranged to drive the suction cup (5) to have a non-zero angle with respect to the horizontal direction and to translate in the vertical direction;

A rotation adjustment assembly (9) is coupled to the suction cup (5) and configured to drive the suction cup (5) to rotate in a vertical direction relative to the air foot (2).
The workbench according to claim 2, further comprising:

a suction cup holder (4), an upper end of the suction cup holder (4) is connected to the suction cup (5), a lower end of the suction cup holder (4) is connected to the air foot (2), and the vertical adjustment assembly ( 8) and the rotation adjustment assembly (9) is connected to the suction cup (5) through the suction cup holder (4);

a third light-passing hole (41) is defined in the position of the first light-passing hole (211), and the third light-passing hole (41) is respectively connected to the first light-passing hole a hole (211) and the second light passing hole (51) are connected;

At least one of an upper surface of the suction cup holder (4) and a lower surface of the suction cup (5) is provided with a second adsorption air passage (42), the first air guide assembly (6) and the second The adsorption air passage (42) is connected.
The workbench according to claim 3, further comprising:

An upper plate (3), a lower end of the upper plate (3) is connected to the air foot (2), and an upper end of the upper plate (3) is connected to the suction cup seat (4), the vertical adjustment assembly a first end of (8) is connected to the air foot (2), a second end of the vertical adjustment assembly (8) is connected to the upper plate (3), the suction cup seat (4) and the suction cup ( 5) being rotatable relative to the upper plate (3) in a vertical direction, the vertical adjustment assembly (8) being connected to the suction cup (5) through the upper plate (3) and the suction cup holder (4) .
The workbench according to claim 4, wherein said suction cup holder (4) and said suction cup (5) are disc-shaped, and said rotation adjusting assembly (9) drives said suction cup holder (4) around The central axis of the suction cup holder (4) rotates.
A work bench according to claim 5, wherein said rotation adjustment assembly (9) comprises:

a curved motor (91), a stator (911) of the arc motor (91) is fixed to the upper plate (3), a rotor (912) of the arc motor (91) and the chuck seat (4) The outer wall of the rotor is fixedly connected, and the side of the rotor (912) away from the stator (911) is attached to the outer wall of the chuck holder (4).
The workbench according to claim 6, the rotation adjustment assembly (9) further comprising:

An arcuate guide block (92) is fixed to the upper plate (3), and a plurality of the arcuate guide blocks (92) are spaced apart along a circumferential direction of the chuck holder (4), and the arc guide The curved face of the block (92) mates with the outer wall of the suction cup holder (4).
The workbench according to claim 7, wherein the rotation adjustment assembly (9) further comprises:

a second air guide assembly (93), at least one of an upper surface of the upper plate (3) and a lower surface of the suction cup seat (4) is provided with an inflation air passage, and the second air guide assembly (93) The first end is in communication with the interior of the air foot (2), and the second end of the second air guide assembly (93) is in communication with the inflation air passage.
The workbench according to claim 8, wherein said curved guide block (92) is an arcuate air float, said arcuate air float being in communication with said second air guide assembly (93).
The workbench according to claim 8, wherein at least one of an upper surface of the upper plate (3) and a lower surface of the chuck holder (4) is provided with a third adsorption air passage, the third adsorption The air passage is in communication with the second air guide assembly (93).
The workbench according to claim 10, wherein an upper surface of the upper plate (3) is convexly provided with an air floating surface (38), and a plurality of the air floating surfaces (38) are circumferentially spaced apart; The upper surface of (3) is provided with a vacuum chamber (39), and a plurality of the vacuum chambers (39) are spaced around the circumference, and an upper end surface of the vacuum chamber (39) is flush with the air floating surface (38) ;

a lower surface of the upper plate (3) is provided with a first annular air passage (32) and a second annular air passage (33), and the first annular air passage (32) communicates with the second air guide assembly ( 93) and the air floating surface (38), the second annular air passage (33) communicates with the second air guide assembly (93) and the vacuum chamber (39);

A lower surface of the upper plate (3) is connected to a first sealing plate at a position corresponding to the first annular air passage (32) and the second annular air passage (33).
The workbench according to claim 1, wherein the first adsorption air passage includes a first air passage (53), a second air passage (54), and a third air passage (55), the first air passage (53) The second air passage (54) and the third air passage (55) are adapted to the six, eight and twelve inch bases (20), respectively.
The workbench according to claim 12, wherein said first gas guide assembly (6) comprises:

a first shunt block, the first end of the first shunt block being connected to the air foot (2);

a first air guiding tube (61), the first end of the first air guiding tube (61) is connected to the second end of the first shunt block;

a second diverting block (62) communicating with the first air guiding tube (61), the second diverting block (62) having four air outlets, and the four air outlets respectively and the first air passage ( 53) The second air passage (54), the third air passage (55) and the second adsorption air passage (42) are in communication.
A work bench according to claim 4, wherein said vertical adjustment assembly (8) comprises:

An adapter plate (83), a lower surface of the adapter plate (83) abutting an upper surface of the upper plate (3);

a linear motor (81), a fixed portion of the linear motor (81) is connected to the air foot (2), and an output shaft of the linear motor (81) is connected to the adapter plate (83);

An elastic member (82) is sleeved outside the fixing portion, and a first end of the elastic member (82) is coupled to the air foot (2), and a second end of the elastic member (82) is The lower surface of the flat plate (3) is connected.
The workbench according to claim 14, the vertical adjustment assembly (8) further comprising:

a base (84), a lower end of the base (84) is connected to the air foot (2), and an upper end of the base (84) is connected to a lower end of the linear motor (81);

An adjusting seat (85) is threaded on the base (84), and an upper end surface of the adjusting seat (85) is provided with a groove, and a lower end of the elastic member (82) is locked in the groove .
The workbench according to claim 15, wherein said vertical adjustment assembly (8) is provided with four groups along the circumference of said upper plate (3), and four sets of said vertical adjustment assemblies (8) are rectangularly distributed .
The workbench according to claim 16, further comprising a support assembly (10), the support assembly (10) comprising:

a support base (101) disposed at a center of the rectangle, and a lower end of the support base (101) is fixedly connected to the air foot (2);

An elastic piece (102), an outer side of an upper surface of the elastic piece (102) is fixedly connected to the upper plate (3), and an inner side of a lower surface of the elastic piece (102) is fixedly connected to an upper end of the support base (101) .
A back alignment device comprising the table of any of claims 1-17.