WO2019197086A1 - Transducteur à ondes acoustiques de surface à couche mince présentant des caractéristiques améliorées, filtre électroacoustique et filtre rf - Google Patents

Transducteur à ondes acoustiques de surface à couche mince présentant des caractéristiques améliorées, filtre électroacoustique et filtre rf Download PDF

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Publication number
WO2019197086A1
WO2019197086A1 PCT/EP2019/055771 EP2019055771W WO2019197086A1 WO 2019197086 A1 WO2019197086 A1 WO 2019197086A1 EP 2019055771 W EP2019055771 W EP 2019055771W WO 2019197086 A1 WO2019197086 A1 WO 2019197086A1
Authority
WO
WIPO (PCT)
Prior art keywords
stripes
stripe
transducer
layer
inner edge
Prior art date
Application number
PCT/EP2019/055771
Other languages
English (en)
Inventor
Christian Huck
Thomas Ebner
Original Assignee
RF360 Europe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RF360 Europe GmbH filed Critical RF360 Europe GmbH
Publication of WO2019197086A1 publication Critical patent/WO2019197086A1/fr

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02551—Characteristics of substrate, e.g. cutting angles of quartz substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02858—Means for compensation or elimination of undesirable effects of wave front distortion
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14517—Means for weighting
    • H03H9/14529—Distributed tap
    • H03H9/14532—Series weighting; Transverse weighting
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/1457—Transducers having different finger widths

Definitions

  • Losses can be divided into acoustic losses, viscous losses, electromagnetic losses, etc.
  • the velocity profile can depend on the kind of slowness
  • k y is the component of the wave vector in a transverse direction
  • ko is the wave number in the main propagation direction of the acoustic waves.
  • the main propagation direction in a longitudinal direction x is given by the arrangement of the electrode fingers.
  • the main propagation direction runs perpendicular to the electrode fingers. The abovementioned equation in this case holds true approximately for k y /k x ⁇ ⁇ 1.
  • the longitudinal velocity in the region of the busbars is lower than the longitudinal velocity in the inner edge stripes.
  • the longitudinal velocity is higher in the inner edge stripe than in the central excitation stripe.
  • the setting of the longitudinal velocity in regions of the acoustic track which are arranged transversely alongside the central excitation stripe is essential for achieving a high value of the overlap integral.
  • concave slowness relates to the ratio of k y , the wave number in a transverse direction, to k x , the wave number in a longitudinal direction.
  • a concave slowness means that the slowness in a transverse direction, which is proportional to k y , as a function of the slowness in a longitudinal direction, which is proportional to k x , is a concave function: the second derivative of the slowness in a longitudinal direction with respect to the slowness in a transverse direction is positive.
  • the second derivative of k x with respect to k y is positive:
  • stripes can be greater than or equal to .
  • a third rotation the c' ' -axis and the y' ' -axis are rotated about the z" -axis by the angle Q.
  • the c' ' -axis is rotated in the direction of the y' '-axis.
  • the thickness of such a compensation layer can be greater than or equal to 50% in units of l.
  • Figure 9 shows a configuration of a transducer according to the invention with material deposited in rail-type fashion on the inner edge stripes
  • Figure 10 shows the illustration of the dependence of k y as a function of k x in the case of a piezoelectric material having concave slowness
  • Figure 13 shows a transducer having different partial stripes of the outer excitation stripes
  • FIGS 16A, B, C show different embodiments of transducers having different longitudinal stripes
  • Figures 22A, B, C show different embodiments of transducers having different longitudinal stripes
  • the curves A denote the wave vectors in the excitation stripe of the acoustic track; the curves B denote the wave vectors in the outer stripe, i.e. outside the acoustic track e.g. in the stripe of the busbars.
  • the width of the gap stripe TG is defined by the distance between the electrode fingers and stub fingers connected to the opposite busbar.
  • the electrode fingers have an increased metallization ratio h in the inner edge stripes IRB.
  • Figure 14B shows various embodiments of the finger widening which are possible for the inner edge stripes.
  • the finger width can increase or decrease linearly within the inner edge stripes. A plurality of widened sections are possible between which the finger width is reduced. Moreover, it is possible to arrange elliptically shaped finger widenings .
  • Figure 21D shows a configuration of a transducer in which the electrode fingers are covered in the outer edge stripes ARB by rectangular segments of a weighting layer.
  • the segments of the weighting layer are in this case wider than the electrode fingers .
  • Figures 23G to 231 show measured values of the real part of the admittance (Fig. 23A) , of the imaginary part of the admittance (Fig. 23B) and of the absolute value of the admittance (Fig. 23C) for a de-embedded resonator without signal input lines and signal output lines (curve “1": unweighted resonator; curve “2”: cosine weighting; curve “3”: enforced piston mode by varying finger width) .
  • the stripe of the busbar SB serves here as a decay stripe in which the mode decays exponentially outwardly.
  • the width of the stripe of the busbar SB should be at least large enough that, at its outer edge, the

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

L'invention concerne un transducteur TF-SAW présentant des caractéristiques améliorées. Le transducteur comporte un support (C), une couche piézoélectrique (PM) et des structures d'électrodes interdigitées (BB, EFO) pour exciter un mode principal. En présenced'un guide d'ondes acoustiques transversal, le chargement de masse fournit un profil de vitesse transversale optimisé (V) se traduisant par un mode de piston pour une suppression de mode transversal.
PCT/EP2019/055771 2018-04-12 2019-03-07 Transducteur à ondes acoustiques de surface à couche mince présentant des caractéristiques améliorées, filtre électroacoustique et filtre rf WO2019197086A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102018108732.2A DE102018108732A1 (de) 2018-04-12 2018-04-12 Dünnschicht SAW-Wandler mit verbesserten Eigenschaften, elektroakustisches Filter und HF-Filter
DE102018108732.2 2018-04-12

Publications (1)

Publication Number Publication Date
WO2019197086A1 true WO2019197086A1 (fr) 2019-10-17

Family

ID=65724409

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2019/055771 WO2019197086A1 (fr) 2018-04-12 2019-03-07 Transducteur à ondes acoustiques de surface à couche mince présentant des caractéristiques améliorées, filtre électroacoustique et filtre rf

Country Status (2)

Country Link
DE (1) DE102018108732A1 (fr)
WO (1) WO2019197086A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021136756A1 (fr) * 2019-12-30 2021-07-08 Frec'n'sys Structure de transducteur pour résonateur à port unique avec suppression de mode transversal
EP4175170A1 (fr) * 2021-10-29 2023-05-03 Qorvo US, Inc. Structures d'ondes acoustiques de surface (saw) à suppression de mode transversal
WO2023234144A1 (fr) * 2022-05-30 2023-12-07 株式会社村田製作所 Dispositif à ondes élastiques
EP4228155A4 (fr) * 2020-11-03 2023-12-20 Huawei Technologies Co., Ltd. Résonateur, filtre et dispositif électronique
WO2023241828A1 (fr) * 2022-06-14 2023-12-21 Huawei Technologies Co., Ltd. Élément résonateur à ondes acoustiques de surface et appareil électronique le comprenant

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115149922B (zh) * 2022-09-01 2022-12-09 阿尔伯达(苏州)科技有限公司 一种抑制声耦合滤波器横向寄生模的结构

Citations (4)

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Publication number Priority date Publication date Assignee Title
US20130051588A1 (en) 2010-01-25 2013-02-28 Epcos Ag Electroacoustic Transducer having Reduced Losses due to Transverse Emission and Improved Performance due to Suppression of Transverse Modes
WO2017013968A1 (fr) * 2015-07-17 2017-01-26 株式会社村田製作所 Dispositif à onde élastique
WO2017188342A1 (fr) * 2016-04-27 2017-11-02 京セラ株式会社 Élément à ondes élastiques et dispositif de communication
US20180041193A1 (en) * 2016-08-08 2018-02-08 Qorvo Us, Inc. Acoustic filtering circuitry including capacitor

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011004665A1 (fr) * 2009-07-07 2011-01-13 株式会社村田製作所 Dispositif à ondes élastiques et procédé de fabrication de dispositif à ondes élastiques
US20170155373A1 (en) * 2015-11-30 2017-06-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Surface acoustic wave (saw) resonator structure with dielectric material below electrode fingers

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130051588A1 (en) 2010-01-25 2013-02-28 Epcos Ag Electroacoustic Transducer having Reduced Losses due to Transverse Emission and Improved Performance due to Suppression of Transverse Modes
WO2017013968A1 (fr) * 2015-07-17 2017-01-26 株式会社村田製作所 Dispositif à onde élastique
US20180102761A1 (en) * 2015-07-17 2018-04-12 Murata Manufacturing Co., Ltd. Elastic wave device
WO2017188342A1 (fr) * 2016-04-27 2017-11-02 京セラ株式会社 Élément à ondes élastiques et dispositif de communication
US20190140613A1 (en) * 2016-04-27 2019-05-09 Kyocera Corporation Acoustic wave element and communication apparatus
US20180041193A1 (en) * 2016-08-08 2018-02-08 Qorvo Us, Inc. Acoustic filtering circuitry including capacitor

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021136756A1 (fr) * 2019-12-30 2021-07-08 Frec'n'sys Structure de transducteur pour résonateur à port unique avec suppression de mode transversal
EP4228155A4 (fr) * 2020-11-03 2023-12-20 Huawei Technologies Co., Ltd. Résonateur, filtre et dispositif électronique
EP4175170A1 (fr) * 2021-10-29 2023-05-03 Qorvo US, Inc. Structures d'ondes acoustiques de surface (saw) à suppression de mode transversal
WO2023234144A1 (fr) * 2022-05-30 2023-12-07 株式会社村田製作所 Dispositif à ondes élastiques
WO2023241828A1 (fr) * 2022-06-14 2023-12-21 Huawei Technologies Co., Ltd. Élément résonateur à ondes acoustiques de surface et appareil électronique le comprenant
WO2023241786A1 (fr) * 2022-06-14 2023-12-21 Huawei Technologies Co., Ltd. Élément résonateur à ondes acoustiques de surface et appareil électronique doté dudit élément résonateur à ondes acoustiques de surface

Also Published As

Publication number Publication date
DE102018108732A1 (de) 2019-10-17

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