WO2019179603A1

WO2019179603A1 - Method and device for process-oriented beam shape adapting and beam orientation

Info

Publication number: WO2019179603A1
Application number: PCT/EP2018/056987
Authority: WO
Inventors: Dmitriy Mikhaylov; Alexander Kroschel; Reiner Ramsayer; Damir Shakirov; Alexander Ilin; Thomas Kiedrowski
Original assignee: Robert Bosch Gmbh
Priority date: 2018-03-20
Filing date: 2018-03-20
Publication date: 2019-09-26

Abstract

The invention relates to a method and a device, in particular a laser machining system, having at least one process control unit, as well as a user program, a laser beam source, a beam shaping module and a beam profile rotating optic, with which a laser beam can be adapted in real-time in terms of its beam profile and orientation to a forward velocity vector and to the topography of the workpiece to be machined. Rotating dove prisms and/or cylindrical lens telescopes, for example, are used for a beam profile rotation. An adapting of the beam shape can occur by means of liquid crystal on silicon spatial light modulators (LCoS-SLM) or digital micro mirror devices. In this way, a laser machining can be significantly improved in terms of quality and productivity. With this concept, modular laser machining systems can be constructed. Existing systems can be retrofitted.

Description

description

title

Method and apparatus for process-oriented beamforming adaptation and

Strahlorientierunq

State of the art

The invention relates to a method for adjusting the beam shape and beam orientation in a laser processing process, in which a laser beam focuses on the surface of a component by means of deflecting mirrors and lens systems and the laser beam by means of at least one beam shaping module with respect to its intensity distribution to the surface of the component to be machined can be adjusted.

The invention further relates to a device, in particular a laser processing system with a process control unit for carrying out the method according to the invention.

The intensity or fluence distribution of a laser beam in the working plane plays a major role in the results of a laser processing process. It thus forms an important parameter of laser material processing. However, the beam shape is not easily varied, which is why Gaussian beam profile laser beams are most commonly used. For beam shaping, fixed optics called diffractive optical elements (DOE) can be installed in the beam path, who can modify a typical Gaussian beam into different but not variable beam forms. Such DOEs have the advantage that the intensity distribution of the laser beam can be adjusted within certain limits at will. However, the DOEs are fixed optics, which while working out can be exchanged (eg by means of a DOE changer). However, the change duration is usually too long compared to the process duration, so that the conversion of the intensity distribution during processing is only suitable for very different geometries and parameter sets. Furthermore, the high costs of the DOEs, which amount to several thousand euros per item, must be mentioned, which limit the number of DOEs used per unit (cost / benefit calculation and cost-effectiveness of the unit). If such DOEs are used, then it is usually one or two optics that are only optimized for one process. Another disadvantage of solid beam shaper is when used in combination with a scanner system:

Since a scanner system is optimized to correctly position a single narrow laser beam on the working plane (1D point) and to compensate for all systemic distortions, a shaped beam profile in the working plane (2D image) may experience image distortion. Especially with beam splitting but also with beam shaping, this can lead to a reduction of the processing quality (positioning accuracy, compliance with tolerances, constancy of the intensity distribution, etc.). Furthermore, the flexible, freely programmable beam shaper are called, such as Spatial Light Modulator (SLM), the spatial distribution of the phase or the amplitude of the laser beam or both sizes together vary and can set specifically. Such modulators function according to different physical principles, e.g. the use of birefringent liquid crystals. Also pure amplitude modulators, the targeted hide areas in the laser beam profile (for example, Digital Micro-Mirror Device) are also to be mentioned. Such systems are known and can be used to optimize the laser processes.

US Pat. No. 6,717,104 B2 describes a system for material processing by means of laser radiation, consisting of a laser source which generates a laser beam which is directed to a workpiece, a spatial light modulator SLM, which individually controllable elements for influencing the phase profile of the laser beam in order to generate an associated intensity distribution on the workpiece, a control unit connected to the SLM in order to control its individually controllable elements, so that the phase profile of the laser beam can be adjusted so that a desired intensity profile is achieved on the workpiece suitable for the intended material processing. Furthermore, in front of the SLM and on the workpiece Directed sensors that detect the intensity distribution and send data to the control unit, based on which deviations in the phase distribution are corrected.

No. 8,957,349 B2 describes a device for processing materials by means of laser radiation, which consists of a laser source, an SLM and a control unit. The control unit stores a plurality of holograms which, depending on the task, are called up during material processing and forwarded to the SLM.

In laser drilling, it is known that a laser beam can not only be guided on the drilling diameter, but also rotated around its own axis. As a result, the asymmetry of the beam profile of a laser beam used can be compensated and transformed into a symmetrical circular profile by averaging. So the roundness of the hole can be achieved. To ensure the rotation of the beam profile during drilling, different drilling optics are used. A beam profile rotation can be generated by a so-called Dove prism. Furthermore, the rotation of a cylindrical lens telescope can be used for beam profile rotation. In both cases, the beam profile rotates at twice the angular velocity of the drilling optics. The beam profile rotation is thus coupled to the rotary movement of the helical drilling and can not be independent of the overall system.

It is an object of the invention to provide a method which has a process-oriented beam shape adaptation as well as an optimal adjustment of the orientation of the processing beam during the laser processing, e.g. in laser welding, he allows.

It is a further object of the invention to provide a corresponding device, in particular a control unit and a beam shaping module and a beam profile rotating optics for performing the method.

Disclosure of the invention

The object of the method is solved by the features of claims 1 to 6. According to the invention it is provided that the laser beam is additionally rotated with respect to its orientation by means of a beam profile rotating optics during processing, the adjustment of the beam shape and the rotation of the beam profile of the laser beam are adjusted depending on the surface to be machined of the component as well as the vector of the feed rate , This provides a new parameter space for laser process optimization. Compared with existing systems, in particular with respect to statically constructed beam shapers, a dynamically adapted beam shaping can be achieved so that the beamforming can be adapted in real time to the machining speeds that can be achieved today. The beam shape means the spatial distribution of the laser beam intensity or the fluence in a working plane (intensity distribution in the xy plane along the z axis as the beam propagation axis). It also includes the beam splitting. The additional adjustment of the beam orientation enables optimized laser processing, in particular if, for example, components with uneven or spatially differently oriented contours are to be welded. The laser beam can thus be adapted to the feed vector of the processing speed.

It is particularly advantageous if the beam shape adaptation and beam profile rotation of the laser beam is freely programmed or adapted as a function of a scanner control of a scanner system and / or a positioning axis control of a component positioning, with communication between beam shape adaptation and beam profile rotation taking place with the scanner control and / or the axis control.

Since many laser processing programs are usually developed before the actual processing, it is advantageous if the process parameters for the beam shape adaptation and beam profile rotation of the laser beam are integrated offline into laser processing programs. But even an online adaptation to the laser processing process may be advantageous if the process, e.g. via a corresponding sensor, beo observed or monitored, controlled or regulated.

Preferably, the beam shape adjustment and beam profile rotation of the laser beam is carried out continuously or at short intervals during the process. Laser processing processes can thus be implemented without pausing the process, which on the one hand shortens the laser processing time and on the other hand also improves the laser processing quality.

In a particularly preferred variant of the method, the beam shape adaptation of the laser beam is performed by means of an SLM unit (Spatial Light Modulator) in the beam-forming module and the beam profile rotation with one or more rotating prisms and / or cylindrical lens telescopes. Both the beam shaping and the beam profile rotation can be done with a dynamic, which is on the order of the dynamics of the feed rate or the change of the processing vector. This can be an optimal, adapted to the laser processing process beam formation and orientation achieved.

It can be provided that the beam profile rotation is adjusted by means of cocurrent or counter-rotating Dove prisms and / or cylindrical lens telescopes. This allows precise and highly dynamic beam orientation adjustments to be achieved.

A preferred use of the method, as it was previously described with its variants, provides for use in laser processing systems for Laserabtragen, as well as laser drilling, laser marking, laser cleaning, laser soldering or laser welding and laser polishing before. The invention provides the advantage of the process-adapted laser beam guidance with a shaped laser beam and orientation of the laser beam adapted to the feed vector, which brings advantages in particular in the case of the above-mentioned methods. The invention can be integrated both in existing and in new laser systems. By further optimizing the laser processes by means of the invention, the field of application of laser processing is enhanced. The processing quality increases, the process time decreases. Advantageous is the modularity and the flexibility of the system: It can be used in various systems and laser processing systems, without heavy dependence on the appli cation of the corresponding system. But even existing laser systems can possibly be retrofitted with the technology. Possibly. For example, the presented ray profile-oriented optics can be integrated into scanner systems, whereby the functionality of modern scanners is increased. Increasing the productivity of laser equipment by the purposeful rotation of shaped beam profiles is in mass production of great interest and importance. Due to the high flexibility, the invention is also of the highest relevance for the production of small batches or individual pieces.

The object relating to the device is achieved in that the process control unit devices for performing the method, as previously described with his Vari, and the laser processing system additionally a Strahlpro fildrehende optics for adjusting the laser beam orientation and a beam forming module for adjusting the intensity distribution , This allows a modular laser processing concept to be realized. Even existing laser processing systems can be retrofitted with it. An offline integration of the functionality enables an extension of existing user programs for laser processing. An online integration also enables the process-oriented optimization of laser machining, in which the control of the beam shaping or rotation takes place via corresponding interfaces for laser process control or regulation.

In a preferred embodiment, the beam-shaping module has at least one SLM unit in the form of a phase and / or amplitude modulation unit. Beam shaping by means of a phase modulation can advantageously be effected by means of an LCoS-SLM unit (liquid crystal on silicon) in which the phase of the incident laser beam can be discretized by means of an array of double-refractive liquid crystals by each pixel having a differently controllable angular orientation of the liquid crystals having. With this, a high-resolution, fast and flexible change of the phase in the raw beam can be made possible and the change of the laser power density distribution in a working plane after a Fourier transformation can be adjusted by means of a lens system. Beam shaping with the aid of amplitude modulation can be carried out by means of a DMD unit (Digital Micromirror Device) in the beam forming module. In this case, an array of individually controllable micromirrors discretizes the incident laser beam by dividing it into many small sub-beams, whereby the intensity distribution of the laser beam in the working plane can be adjusted by the different deflection of the individual beams. In this case, the incident light is partially reflected directly back again, which takes place in a horizontal mirror position, or partially cut out of the beam by tilting the micromirrors. An adaptation of the laser beam orientation can suc conditions in a simple and precise manner when the beam profile rotating optics from one or more rotatable about the optical axis prisms in the form of beam profile rotating prisms, preferably Dove Prism and / or cylindrical lens telescopes is formed, wherein the prisms and / or cylindrical lens telescopes are arranged in the same direction or in opposite directions rotatable. With dove prisms and / or cylindrical lens telescopes, the beam orientation can be rotated by the angle 2 ^* a when the dove prism and / or the cylindrical lens telescope is rotated by the angle a. By connecting N Dove prisms and / or cylindrical lens telescopes in series, it is possible to achieve beam profile rotation by an angle of N ^* 2 ^* a in the same direction of rotation by the angle a. This makes it possible to achieve very fast angle adjustments with high dynamics. In counter rotating dove prisms and / or cylindrical lens telescopes, the laser beam is rotated 2 times the differential angular velocity. In this case, it is advantageous that the dove prisms and / or cylindrical lens telescopes rotate more or less constantly and only slightly slows or accelerates the angular velocity of one of the rotating dove prisms and / or cylindrical lens telescopes for a beam profile rotation. As a result, on the one hand, a high degree of dynamics and, on the other hand, a high degree of precision in the adaptation of the laser beam orientation can be achieved.

The invention will be explained in more detail below with reference to an exemplary embodiment shown in the figures Ausfüh. It shows:

FIG. 1 shows a schematic block diagram of a laser processing machine, FIG. 2 shows a further schematic representation of a laser processing machine,

3a to 3c show a schematic representation of a welding of various construction parts,

FIG. 4 shows a beam profile rotating optic with a rotating prism,

Figure 5 is a beam profile rotating optics with a cylindrical lens telescope and

FIG. 6 shows a beam-profile-rotating optical system with several prisms connected in series. FIG. 1 shows, in a schematic block diagram, a laser processing machine 1, which has as its main component a process control unit 20, which receives corresponding specifications for the upcoming laser processing from a user program 10. The process control unit 20 controls via a default laser parameters 31, such as laser power, on / off status and a repetition rate, pulse duration and pulse energy in pulsed lasers, a laser source 30, such as a CO2 laser or Nd: YAG laser on. The laser beam 32 of the laser source 30, which normally emits a symmetrical Gaussian profile, is modified in a beam shaping module 40 in accordance with the surface to be machined of the workpiece to be machined with respect to its intensity distribution, wherein the process control unit 20 sets the beam shaping 41. Here, for example, a intensity distribution I (x, y, _z , t) and for pulsed lasers a fluence distribution <P (x, _y , _z , t) are given.

The beam shaping can be done for example by means of so-called Liquid Crystal on Silicon Spatial Light Modulators (LCoS-SLM). Here, by an array of birefringent liquid crystals, the phase of the incident laser beam 32 can be discretized by different employment of each individual pixel. Another possibility of beam shaping can be achieved by means of a digital micromirror device (DMD), wherein an array of micromirrors of the incident laser beam 32 can be discretized by the division into many small sub-beams, whereby the laser beam 32 by a deflection of the individual beams in the working plane can be formed. Such a shaped laser beam 42 can be used without further processing for laser processing.

In order to achieve optimum laser processing, a beam profile rotating optics 50 is further provided, which according to a specification of the beam profile rotation 51 (eg, an angle for the beam profile rotation or a rotational speed) of the process control unit 20, a shaped and rotated laser beam 52 he testifies to a scanner system 60 is guided, which is controlled by appropriate inputs of the scan parameters 61 (scan program or scan paths) of the process control unit 20. Thus, the relative position between the ge formed and rotated laser beam 52 and the workpiece can be changed in space, whereby a positioned, shaped and rotated laser beam 63 results. Conventionally, this function is realized by the scanner system 60 in conjunction with a component positioning 70 by means of CUZabg axes. The scanner system 60 is thereby used speed due to the smaller moving masses for a much larger movement. In any case, the dynamics of beam profile rotation must match the optics 50 and the beamforming module 40 both the dynamics of the scanner system 60 and the positioning system. If the beam profile is to be rotated relative to the component, the component can also be rotated relative to the beam profile. This can be achieved by using a precise axis system to position the component. Thus, eliminating the need for a special beam profile rotating optics 50. However, it may occur that an axis system depending on the application and component size can not achieve the desired or necessary dynamics. Wei terhin it can be provided that, if necessary, focusing by means of the component positioning 72 tion takes place. In addition, a feedback for scanning position or scanning speed 62 may be provided.

Fig. 2 shows in a further schematic representation of a Laserbearbeitungsan position 1, in which only a beam shaping for optimal laser processing vorgese hen, but which can be supplemented with beam profile rotating optics 50 (not shown in Figure 2).

From the laser beam source 30, the laser beam 32 is fed via deflecting mirror 130 to the beam-forming module 40, which directs the laser beam via one or more further deflecting mirrors 45 onto an SLM unit 43, as described above. The laser beam 32 is modified to a shaped laser beam 42 by this phase or amplitude modulator, in which a phase or amplitude mask is modulated, and which is controlled by the beam shaping 41 from a beam profile database 90. It can be provided that the ge-shaped laser beam 42 passes through further lens systems 44 and is deflected by means of further order steering mirror 45.

The shaped laser beam 42 can be used in a first processing plane 80 or passes through another lens system 140 as a focusing lens and can with a scanner system and other lens systems 140 are projected onto a further processing level 80. The positioning can take place via the component positioning 70, which is controlled via an axis controller 120.

A master program unit 100 controls the presetting of the laser parameters 31 for the laser beam source 30, via the beam profile database 90 the shape of the laser beam 32, as well as the scanner system 60 and the axis controller 120. A central computing unit 110 synchronizes all subsystems, e.g. Time-based or event-based for executing a fixed program or for a process control, in which an additional sensor 150 or measurement technology is integrated into the laser processing system 1. On this central processing unit 110, a master code can be executed. It may also be e.g. an FPGA board, a graphics card or other real-time hardware systems can be used as arithmetic unit 110. In an alternative configuration, a master-slave system with laser and scanner control card (RTC card) as the master and other components as slaves for executing a fixed program can be provided. The arithmetic unit 110 can be designed as a host for self-standing systems.

FIGS. 3a, 3b and 3c show two welding tasks in a schematic representation. In Figure 3a is a straight joint gap 163 share between two construction, component 1 161 and component 2 162, welded. This is done in the example shown using a beam profile distributed in the working plane (here a 3-spot beam). Since the laser beam feed direction 170 does not change during different times 171, 172, 173, 174, the beam profile does not have to be rotated either. However, if the feed direction of the laser beam / components 161 changes,

162 at various times 171, 172, 173, 174, as shown in Figures 3b and 3c to follow the odd joint gap 163, it is advantageous if the beam profile can be rotated as well. The difference between the non-rotation and the rotation of the beam profile is shown in Figures 3b and 3c. Fi gur 3b shows the situation without beam profile rotation. FIG. 3 c shows an optimized welding process in which the beam profile corresponds to the course of the joint gap

163 is turned. A simple solution for rotating the beam profile in the working plane is given by the rotation of the beam profiler (eg the DEO) itself around the Strahlaus distribution axis. Provided that the incident beam is perfectly circular in nature, the rotation of the beamformer in the XY plane also rotates the beam profile. The benefits of such a design include simplicity - in addition to the beam former itself and a mechanism that rotates it around the Z axis, no other optics are added. In addition, many beam profile shapers, such as DOEs, are small and lightweight, making them ideal for highly dynamic opto-mechanical constructions. However, the quality of the beam shaping depends strongly on the input beam. If this is not perfectly circularly symmetrical, then the beam profile depicted in the machining plane is not only rotated during the rotation of the beam profile former, but also distorted.

If a beam profile is already formed, its imaging in the working plane can be e.g. be rotated with an optic based on a dove prism 53. When running through a Dove prism a beam profile undergoes a rotation through 180 ° about the Z axis = beam axis). If the dove prism is rotated by an angle a, then the beam profile at the output rotates by an angle 2 * a. FIG. 4 shows a beam-profile-rotating optical system 50 based on a dove prism 53. The already shaped laser beam 42 is coupled into the rotatable dove prism 53 by means of deflecting mirrors 54 in the embodiment shown. The already shaped laser beam 42 is at Durchlau fen of the Dove prism according to the o.g. Condition by the angle 2 * a Dre Dre the Dove prism rotated by the angle a. The shaped and rotated laser beam 52 leaves the beam profile-rotating optics 50 via a lens system 55.

FIG. 5 schematically shows an alternative possibility of beam profile rotation based on the use of a cylindrical lens telescope 56. The already shaped laser beam 42 is coupled into the rotatable cylindrical lens telescope 56 by means of deflection mirrors 54 in the exemplary embodiment shown. The shaped and rotated La serstrahl 52 leaves the jet-rotating optics 50 via a lens system 55th

It should be noted that the arrangements shown in Figures 4 and 5 show only one possible arrangement. When drilling, for example, the deflection mirror 54 are rotated for the helical diameter and the angle of attack. Since here only the Beam profile rotation is required, the beam can also be coupled without deflection and Verkip pung, so just straight into the Dove prism 53 or in the cylindrical lens telescope 56. Then the beam comes straight out again. The Lin sensystem 55 is then also not necessary for this application, since even wei tere optical elements follow up to the processing level.

The beam profile of a beam passing through a cylindrical lens telescope 56 is rotated similar to Dove prism 53. If the telescope is rotated by the angle cp, the beam profile rotates by the angle 2 * cp. The Dove-prism construction he explained ways to increase the system dynamics and the Strahlprofilverdreh speed can also be on the structure with the cylindrical lens telescope 56 carry over. Thus, several telescopes can be arranged one after another to increase the proportionality factor between the rotation of the beam profile and the Zy linderlinsensystems. In addition, it is also possible to use e.g. two telescopes are ge rotated in rotation to achieve the beam profile rotation with the principle of the difference angle.

By the series connection of a beam former and a Dove prism 53 rotating about its Z axis, the shaped beam profile can thus be rotated. By making the beam profile rotation twice the angular velocity of the rotation of the prism, higher beam profile rotation speeds can be achieved. To further increase the beam profile rotation speeds, a construction is conceivable in which N Dove prisms 53 connected in series are installed, as FIG. 6 shows. If the entire structure is rotated by the angle a, then the beam profile rotates by the angle 2 * N * a. However, it should be noted in such a design that with each prism connected, the overall weight of the system increases and dynamics decrease.

Since an important requirement for beam profile rotating optics is the fast reversal of the direction of rotation of the beam profile, the system must have a high dynamic range. For rapid reversal of the direction of rotation of the beam profile, a construction based on the principle of difference is conceivable: if two prisms or two systems consisting of several prisms are rotated at the same speed, but their rotations are pointing in opposite directions, the beam profile becomes only by twice the difference angle between the two constantly rotating Prism circuits set. If this angle of attack is to be changed, the rotating systems do not have to be braked to a standstill. Only their differential angle must be adjusted by slightly slowing one or accelerating the other. By using this principle, high dynamics of the overall system are possible, although more prisms and thus more weight are used. It should be noted that in addition to Dove prisms, other types of prisms can be used, such as the Porro Prism. The two described variants of the series connection of rotate the optical elements for beam profile rotation with the same or opposite tem rotation are on the structure with the cylindrical lens telescope 56 transfer bar.

The intensity distribution of the laser beam 32 emerging from the laser beam source 30 is varied by means of a programmable beam shaping module 40 and is focused or focused onto the component 161, 162 by an optical design. As a beam shaper phase, amplitude modulators or a series circuit (possibly also Paral lelschaltung) can be used from such. The selection of suitable beamformers depends strongly on the application, the framework conditions and on the other system technology. The beam shape is adapted to different requirements resulting, on the one hand, from the laser program / user wishes and, on the other hand, from the compensation of aberrations on the working plane (for example image distortion in the scanner field, aberrations of the optical system, etc.).

Since the calculation of the beam forms usually requires many arithmetic operations, before the start of the machining process, a database can be stored on masks which can be accessed during the process. The illustrated in Figure 1 schematic structure of the control of the beam shape based on such an off-line calculation of the beam shapes. Although the process technology is often very different for different laser material processing processes, the presented invention can be used in many processes and used for process optimization.

In the case of laser material removal, for example, the intensity distribution of the beam can be adapted to the support or component geometry or to the alignment of a weld seam be, as shown in particular in Figure 3c the example of a weld. The rotation of the beam profile during processing can be controlled both by the presented invention and by an additional module.

If a surface is to be removed, then its positionally accurate exposure to the laser can also take place with the beam shaping. The area to be exposed is displayed directly as an intensity distribution of the laser beam 32. In the case where the intensity of the beam shape is insufficient to obtain the desired removal result, the area to be exposed can be divided into (at least two) subareas, which are also converted into the intensity distribution. Then, the subareas are to be exposed alternately one after the other, with the beam shaping system dictating which area is exposed and when. Such machining also has the advantage that the alternation of the beam profiles leaves enough time to cool down the surfaces that are not currently being processed.

During drilling, the shape of the jet can be changed or adjusted depending on the geometry of the borehole and the component 161, 162 as well as on the depth. Especially when forming the drill holes, the geometry of the beam profile can play a crucial role. Since the intensity distribution can also be varied along the Z axis, the system can also be used for focus adjustment.

When welding, the flexible beam shaping can be used to adjust the intensity distribution to the component thickness or different materials to be welded. Furthermore, in contrast to a simple Gaussian profile, the beam shaping can be set to be more flexible for forming the weld seam, to prevent the formation of cracks, etc.

In contrast to programs created offline for beam shape change during laser processing, it is also conceivable that laser processing processes will run au tomatisierter in the future, with a pre-measurement and Zwischenvermessun conditions of components could belong to the machining process. In this case, automated algorithms can also be used to generate the optimized beam shapes during processing. The different beam shapes but can also be obtained from a database in real time. The invention should thus be able to respond in real time to change the system parameters and adjust the beam shape accordingly.

By integrating subsystems for the acquisition and evaluation of different sensor values and process parameters, the invention is able to react to changes in the sensor and process parameter values with a control intervention in the beam shape and beam alignment. Through the change of the beam shape and beam alignment, such parameters as local and temporal intensity distribution or fluence distribution can be changed indirectly as well as pulse overlap (with pulsed lasers) during the process. The regulation of the beam shape and beam alignment can be done in dependence on different parameters, which involves several different measurement systems because of the overall system. The possible control parameters are:

- component temperature (local at and around processing point and global)

Geometry (e.g., laser ablation or drilling)

- Absolute position of the component to be machined

Relative position of several components to each other or relative to

Tool

- roughness of the component.

The fields of application for the concepts described above are manifold. Prinzipi ell, this method for varying a further process parameter - the beam shape and orientation - in all known laser processing processes are sets are: laser welding, laser polishing, Laserabtragen, marking, drilling, La sersäubern etc. Especially in the material processing with ultra-short pulse laser, this can a significant increase in productivity, quality and accuracy. The currently available but unused high laser lines can actually be implemented using the invention.

Existing laser processing systems 1 can be expanded or retrofitted with the system components described above. This gives you a modular and in particular a flexible system, which can be optimally adapted to the machining task.

Claims

claims

1. A method for beam shape and beam orientation adjustment in a laser processing process, in which in a laser processing system (1) a laser beam (32) by means of deflecting mirrors (130) and lens systems (140) focused on the surface of a component (161, 162) and the Laser beam (32) by means of at least one beam shaping module (40) with respect to its intensity distribution to the surface to be machined of the component (161, 162) can be adjusted, characterized in that the laser beam (32) in addition to its Ori entierung means of a beam profile rotating optics (50) is rotated during processing, wherein the adjustment of the beam shape and the rotation of the beam profile of the laser beam (32) depending on the surface to be machined of the component (161, 162) as well as adapted from the vector of feed speed ,

2. The method according to claim 1, characterized in that the Strahlformanpas solution and beam profile rotation of the laser beam (32) freely programmed or Ab dependence of a scanner control of a scanner system (60) and / or a positioning axis control of a component positioning (70) is adapted.

3. The method according to claim 1 or 2, characterized in that Prozesspara meters for the beam shape adjustment and beam profile rotation of the laser beam (32) integrated offline in laser processing programs or online beitungsprozess adapted to the Laserbear process.

4. The method according to any one of claims 1 to 3, characterized in that the beam shape adaptation and beam profile rotation of the laser beam (32) is carried out continuously or at short intervals during the process.

5. The method according to any one of claims 1 to 4, characterized in that the beam shape adaptation of the laser beam (32) by means of an SLM unit (43) in the beam forming module (40) and the beam profile rotation with one or more rotating prisms and / or cylindrical lens telescopes ( 56) is performed.

6. The method according to claim 5, characterized in that the Strahlprofildre hung by means of the same or counter-rotating Dove prisms (53) and / or cylindrical lens telescopes (56) is adjusted.

7. Use of the method according to one of claims 1 to 6 in Laserbearbei processing equipment (1) for laser ablation, laser drilling, laser marking, laser soldering or laser welding, laser cleaning and laser polishing.

8. Device, in particular a laser processing system (1), which at least one process control unit (20), a laser beam source (30), a beam forming module (40) and a scanner system (60) and a component positioning (70) to summarizes, wherein a laser beam ( 32) from the laser beam source (30) by means of deflecting mirror (130) and lens systems (140) on the surface of a component (161, 162) can be focused and the laser beam (32) by means of the beam shaping module (40) with respect to its intensity distribution to be processed Surface of the component (161, 162) is adaptable, wherein by a user program (10) laser processing parameters are predetermined, characterized in that the process control unit (20) means for performing the method according to claims 1 to 6 and the laser processing system (1) in addition Beam profile rotating optics (50) for adjusting the laser beam orientation and a beam shaping module for adjusting the intensity distribution of activity.

9. Apparatus according to claim 8, characterized in that the beam-shaping module (40) has at least one SLM unit (43) in the form of a phase and / or amplitude modulation unit.

10. The device according to claim 8, characterized in that the Strahlprofildre rising optics (50) from one or more about the optical axis rotatable prisms in the form of Dove prisms (53) and / or cylindrical lens telescopes (56). is formed, wherein the prisms and / or cylindrical lens telescopes (56) are arranged in the same heat or in opposite directions rotatable.