WO2019176688A1

WO2019176688A1 - Liquid application device, liquid application method, and liquid application device

Info

Publication number: WO2019176688A1
Application number: PCT/JP2019/008865
Authority: WO
Inventors: 山中　昭浩
Original assignee: Ntn株式会社
Priority date: 2018-03-12
Filing date: 2019-03-06
Publication date: 2019-09-19
Also published as: JP7101501B2; JP2019155252A

Abstract

A motor (120) of a liquid application unit (4A) drives an application needle (24) up and down. A linear motion mechanism (130) includes an eccentric plate (116) and a connection member (112). The eccentric plate (116) includes a first anchor unit that is off center by a first distance from a rotational shaft rotated by the motor (120) and a second anchor unit that is off center by a second distance from the rotational shaft. The connection member (112) connects, to the first anchor unit or the second anchor unit, a third anchor unit (110) that moves up and down together with an application needle supporting unit (109). The eccentric plate (116) and the connection member (112) are connected to each other at the first anchor unit or the second anchor unit via a bearing that supports the connection member (112) so as to be able to rotate with respect to the first anchor unit or the second anchor unit.

Description

Liquid coating unit, liquid coating method, and liquid coating apparatus

The present invention relates to a liquid application unit, a liquid application method, and a liquid application apparatus, and more particularly to a liquid application unit, a liquid application method, and a liquid application apparatus for forming an electrode pattern of a crystal resonator.

The printed electronics technology that forms fine circuits such as RFID (Radio Frequency Identifier) tags by a printing method, ie, a coating method, has been rapidly developed. As a method for forming a fine electrode pattern, a printing method, an ink jet method, or the like is generally used. However, as a method for forming a fine electrode pattern, a method using a coating needle can be used in addition to these methods. This is because the method using the application needle enables fine application using a material having a wide range of viscosity. A method for performing fine coating using a coating needle is disclosed in, for example, Japanese Patent Application Laid-Open No. 2017-945 (Patent Document 1). Japanese Unexamined Patent Application Publication No. 2017-945 discloses an apparatus that performs fine coating using a coating unit.

Japanese Unexamined Patent Publication No. 2017-945

The liquid application unit described in Japanese Patent Application Laid-Open No. 2017-945 converts the rotation of the motor into a motion in the linear motion direction via a link mechanism. Thereby, the liquid application unit can drive the application needle at high speed.

However, in the configuration using the link mechanism, the moving distance of the coating needle in the vertical direction is constant and cannot be varied. Also in this configuration, it is possible to change the vertical movement distance of the application needle by limiting the rotation angle of the motor and reciprocating it. However, for that purpose, it is necessary to reverse the rotation direction of the motor while the motor is moving at high speed. For this reason, if the motor is moving at high speed, the variation in the lower end position of the application needle becomes large. On the other hand, in order to reduce the variation, it is necessary to slow down the rotation speed of the motor, and there is a problem that the overall tact time is slowed down. That is, in Japanese Patent Application Laid-Open No. 2017-945, it is difficult to achieve both high-speed movement of the application needle and change in the vertical movement distance due to its configuration.

The present invention has been made in view of the above problems. The object is to provide a liquid application unit, a liquid application method, and a liquid application apparatus that can achieve both high-speed movement of the application needle and change in the vertical movement distance.

The liquid application unit of the present invention includes a motor, an application needle support portion, and a linear motion mechanism. The motor drives the application needle up and down. The application needle support unit supports the application needle. The linear movement mechanism moves the application needle support portion up and down according to the rotation of the motor. The linear motion mechanism includes an eccentric plate and a connecting member. The eccentric plate is attached to a rotating shaft that is rotated by a motor, and is provided with a first fixing portion provided at a position that is eccentric by a first distance from the rotating shaft, and is eccentric by a second distance that is different from the first distance from the rotating shaft. And a second fixing portion provided at the position. The connecting member connects the third fixing portion that moves up and down together with the application needle support portion and the first fixing portion or the second fixing portion. The eccentric plate and the connecting member are connected to each other at the first fixing portion or the second fixing portion via a bearing that rotatably supports the connecting member with respect to the first fixing portion or the second fixing portion. Is done.

In the liquid application method of the present invention using the above liquid application unit, a liquid material is applied to the tip of the application needle. The application needle is lowered to bring the application needle into contact with the application target surface. In the contacting step, the lowering speed of the application needle is reduced immediately before the tip of the application needle contacts the application target surface.

The liquid application apparatus of the present invention includes the above-described liquid application unit, and can apply the application liquid onto the application target surface.

According to the present invention, any one of the first fixing portion and the second fixing portion having different distances from the rotation axis in the eccentric plate and the third fixing portion fixed to the application needle support portion are connected by the connecting member. Is done. For this reason, the up-and-down movement distance can be changed according to which fixed part of the eccentric plate is connected to the connecting member. Further, the application needle can be driven at a high speed by converting the rotation of the motor into a movement in the linear motion direction. Therefore, it is possible to achieve both high-speed movement of the application needle and change in the vertical movement distance.

3 is a front view of the coating unit according to Embodiment 1. FIG. FIG. 3 is a schematic enlarged cross-sectional view of a region A surrounded by a dotted line in FIG. It is the side view of the coating unit seen from the direction B shown by the arrow in FIG. In Embodiment 1, it is a schematic top view which shows the movement aspect of the up-down direction of the applicator needle by rotation of an eccentric board in case an eccentric board and a connection board are mutually connected in a 1st fixing | fixed part. In Embodiment 1, it is a schematic top view which shows the movement aspect of the up-down direction of the applicator needle by rotation of an eccentric board in case an eccentric board and a connection board are mutually connected in a 2nd fixing | fixed part. It is a typical perspective view of the liquid application apparatus according to this Embodiment. It is typical sectional drawing for demonstrating the position of the application needle | hook accompanying operation | movement of the application | coating unit shown in FIG. It is the figure which showed the rotation of the eccentric board and the positional relationship with a spacer in a comparative example. FIG. 10 is a schematic enlarged cross-sectional view of a region A surrounded by a dotted line in FIG. In Embodiment 2, it is a schematic plan view which shows the movement aspect of the up-down direction of the applicator needle by rotation of an eccentric board, when an eccentric board and a connection board are mutually connected in a 1st fixing | fixed part. In Embodiment 2, it is a schematic plan view which shows the movement aspect of the up-down direction of the applicator needle by rotation of an eccentric board, when an eccentric board and a connection board are mutually connected in the 2nd fixing | fixed part. It is a general | schematic expanded sectional view which shows the nut for fixing a fixing pin to a recessed part. It is a schematic plan view which shows the planar shape of the recessed part for enabling fixing a fixing pin with a nut like FIG. It is a schematic sectional drawing of the part which follows the XIV-XIV line | wire of FIG. It is a schematic sectional drawing of the part which follows the XV-XV line | wire of FIG. FIG. 10 is a schematic enlarged cross-sectional view of a region A surrounded by a dotted line in FIG. In Embodiment 3, it is a schematic plan view which shows the movement aspect of the applicator needle | hook up and down by rotation of an eccentric board in case an eccentric board and a connection board are mutually connected in a 1st fixing | fixed part. In Embodiment 3, it is a schematic top view which shows the movement aspect of the up-down direction of the applicator needle by rotation of an eccentric board, when an eccentric board and a connection board are mutually connected in the 2nd fixing | fixed part. It is a front view of the coating unit which concerns on Embodiment 4. FIG. 19 is a schematic enlarged cross-sectional view (A) along the rotation axis of a region C surrounded by a dotted line in FIG. 19 in the first embodiment, and a schematic front view of the connecting plate as seen from a direction XXB indicated by an arrow in FIG. It is a figure (B). A first example (A) of a schematic enlarged cross-sectional view along the rotation axis of a region C surrounded by a dotted line in FIG. 19 in the third embodiment, and a region C surrounded by a dotted line in FIG. 19 in the third embodiment. They are the 2nd example (B) of the schematic expanded sectional view which follows a rotating shaft, and the schematic front view (C) of the connecting plate seen from direction XXIC shown by the arrow in Drawing 21 (A) and (B).

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(Embodiment 1)
First, the coating unit 4 provided with the linear motion mechanism according to the present embodiment will be described with reference to FIGS.

FIG. 1 is a front view of a coating unit 4A according to the present embodiment. FIG. 2 is a schematic enlarged cross-sectional view along the rotation axis RA of a region A surrounded by a dotted line in FIG. 1 in the first embodiment. FIG. 3 is a side view of the coating unit 4A viewed from the direction B indicated by the arrow in FIG. In particular, FIG. 3A shows a state where the application needle 24 is raised, and FIG. 3B shows a state where the application needle 24 is lowered.

Referring to FIG. 1, an application unit 4A according to the present embodiment is a liquid application unit that moves an application needle that finely applies a liquid material. The application unit 4A mainly includes a servo motor 120 as a motor, an application needle support portion 109, and a linear motion mechanism 130. The servo motor 120 serves as a drive source for driving the application needle up and down. The application needle support portion 109 is for supporting the application needle. The linear motion mechanism 130 moves the application needle support portion 109 up and down according to the rotation of the servo motor 120. This will be specifically described below.

The servo motor 120 has a shape extending in the left-right direction, that is, in the horizontal direction, and a rotation axis RA extends at the center of a cross section intersecting the extending direction. A motor control unit 121 is arranged inside the servo motor 120. The motor control unit 121 controls the rotation of the servo motor 120 so that the vertical movement of the application needle holder 102 becomes an appropriate speed.

The application needle support portion 109 is disposed below the linear motion mechanism 130. The application needle support unit 109 includes an application needle holder 102, an application needle holder storage unit 104, an application needle holder fixing unit 106, and an application liquid container 21, which support the application needle 24.

The application needle holder 102 holds one application needle 24 whose tip is tapered. That is, the application needle holder 102 is disposed so as to extend in the vertical direction (vertical direction), and holds the application needle 24 whose tip 23 faces downward from the side opposite to the tip 23, that is, from the upper side. The application needle holder storage unit 104 is disposed on the upper side of the application needle holder 102 and has a configuration capable of storing the application needle holder 102. The application needle holder fixing unit 106 is disposed on the upper side of the application needle holder storage unit 104 and has a configuration capable of fixing the application needle holder 102.

The linear motion mechanism 130 includes an origin sensor 118, an eccentric plate 116, a spacer 114, a linear guide 132, a connection plate 112 (connection member), a spacer 110 (third fixed portion), a bearing 122, and a bearing 124. And a movable part 108. These are generally on an extension line of the rotation axis RA with respect to the direction in which the servo motor 120 extends, and are disposed in a region directly above the application needle support portion 109.

The origin sensor 118 is disposed on the uppermost side of the linear motion mechanism 130, detects the origin provided on the eccentric plate 116, and outputs the detected origin to the motor control unit 121. This origin is closest to the origin sensor 118 when the eccentric plate 116 matches the reference rotation angle (for example, the state shown in FIG. 5A).

In the movable portion 108, the application needle holder 102 is attached to the application needle holder fixing portion 106, and one application needle 24 is held with the tip 23 facing downward from the lower surface of the application needle holder 102. The linear guide 132 supports the movable portion 108 to which the application needle holder 102 is fixed so as to be movable up and down.

1, 2 and 3, eccentric plate 116 is arranged below origin sensor 118 and has a circular shape, for example, as viewed from direction B indicated by the arrow in FIG. 1. The circular center of the eccentric plate 116 substantially coincides with the rotation axis RA. That is, the eccentric plate 116 is rotated by the servo motor 120 and attached to the rotation axis RA of the servo motor 120 that intersects the vertical movement direction of the application needle holder 102.

More specifically, the spacer 114 is provided so as to contact the right side of the circular surface of the eccentric plate 116, for example. A part of the surface of the eccentric plate 116 on the right side of the circular shape in FIG. 2, for example, has a recess 123A as a first fixing part and a recess 123B as a second fixing part.

The

recesses

123A and 123B are formed so as to remove a part of the thickness of the eccentric plate 116, and in this embodiment, for example, have a circular shape when viewed from the direction indicated by the arrow B in FIG. The recess 123A and the recess 123B are formed with a space therebetween, and are, for example, screw holes.

2, the spacer 114 is disposed so as to include a region overlapping with the concave portion 123 A of the eccentric plate 116 as viewed from the direction B indicated by the arrow in FIG. 1. In the spacer 114, a hole 114C that penetrates the spacer 114 is formed so as to extend in the left-right direction in FIG.

The connecting plate 112 connects the spacer 110 provided on the movable portion 108 that moves up and down together with the application needle holder 102 and the concave portion 123A or the concave portion 123B with a fixed length. As an example, in FIG. 2, the connecting plate 112 includes a spacer 110 (see FIG. 1) that moves up and down together with the application needle support portion 109, and a recess 123 A as a first fixing portion or a recess 123 B as a second fixing portion ( In FIG. 2, the recess 123A) is connected. More specifically, the eccentric plate 116 and the connecting plate 112 are formed by the recess 123A via a bearing 122 that supports the connecting plate 112 so as to be rotatable with respect to the recess 123A or the recess 123B (the recess 123A in FIG. 2). Alternatively, they are connected to each other in the recess 123B (the recess 123A in FIG. 2).

Therefore, a through hole 125 for connecting to the eccentric plate 116 is formed in the connecting plate 112. The through-hole 125 is formed by penetrating a part of the connecting plate 112 in the left-right direction in FIG. 2, and has, for example, a circular shape when viewed from the direction indicated by the arrow B in FIG. The application unit 4A further includes a fixing pin 128 for rotatably connecting the connecting plate 112 and one of the

recesses

123A and 123B via the bearing 122. The fixing pin 128 passes through the through hole 125 of the connecting plate 112 and the hole 114C of the spacer 114, and is further inserted into the recess 123A (or the recess 123B). As a method for fixing the fixing pin 128 to the concave portion 123A or the concave portion 123B, any removable method can be used. A bearing 122 is disposed between the fixing pin 128 and the through hole 125 of the connecting plate 112, that is, in the through hole 125. For this reason, the fixing pin 128 connects the connecting plate 112 to the eccentric plate 116 and the spacer 114 by the bearing 122 so as to be rotatable around the center of the bearing 122.

Since the

concave portions

123A and 123B can be fixed by inserting the fixing pin 128, the diameter of the circular shape is substantially equal to the diameter of the shaft portion into which the fixing pin 128 is inserted. Since the through hole 125 can be connected to the

recesses

123A and 123B (the shaft portion of the fixed pin 128) via the bearing 122, the circular diameter of the through hole 125 is the axis into which the fixed pin 128 is inserted. It is larger than the diameter of the part. Further, from the viewpoint of preventing the connection plate 112 from falling off the fixing pin 128, the diameter of the through hole 125 may be smaller than the diameter of the head portion of the fixing pin 128.

The bearing 122 includes an outer ring 122A, an inner ring 122B, and rollers 122C between them. For example, the outer ring 122A is in contact with the inner wall surface of the through hole 125, and the inner ring 122B is in contact with the shaft portion of the fixing pin 128. Thereby, the connecting plate 112 can rotate around the axis of the fixing pin 128, that is, around the axis of the spacer 114.

Although not shown, in the coating unit 4A, the connecting plate 112 is rotatably connected to the movable portion 108 and the spacer 110 via the bearing 124. This is the same as the case where the connecting plate 112 is rotatably connected to the eccentric plate 116 via the fixing pin 128 and the bearing 122 described above. The configuration of the bearing 124 is basically the same as that of the bearing 122. Any method can be used as a method of fixing the

bearings

124 and 122 to the connecting plate 112.

Referring to FIG. 3 in particular, the movable portion 108 is attracted to the spring support pin 131 via the spring 126, and is configured such that no vibration is generated by the play of the

bearings

122 and 124 during driving. A configuration in which the spring 126 is not provided is also possible by preloading the

bearings

122 and 124 to eliminate backlash.

When the eccentric plate 116 is rotated by driving the servo motor 120, the application needle 24 is reciprocated upward and downward as the connecting plate 112 moves upward and downward. This is because the connecting plate 112 is rotatably supported by the movable portion 108 via the bearing 124 and is connected to the eccentric plate 116. The movement distance of the application needle 24 in the vertical direction is the amount indicated by ΔZ in FIG. Next, this ΔZ will be described in detail with reference to FIGS.

FIG. 4 shows the vertical movement of the application needle 24 by the rotation of the eccentric plate 116 when the eccentric plate 116 and the connecting plate 112 are connected to each other in the concave portion 123A which is the first fixed portion. That is, FIG. 4A shows the initial state, and FIGS. 4B to 4E show the position of the connecting plate 112 when the eccentric plate 116 rotates by 90 ° with respect to the state shown on the left side. ing. FIG. 5 shows the vertical movement of the application needle 24 by the rotation of the eccentric plate 116 when the eccentric plate 116 and the connecting plate 112 are connected to each other in the recess 123B as the second fixing portion. That is, FIG. 5A shows the initial state, and FIGS. 5B to 5E show the position of the connecting plate 112 when the eccentric plate 116 rotates by 90 ° with respect to the state shown on the left side. ing.

Referring to FIG. 4A, the recess 123A has a first distance from the center of the circle when viewed from the direction of arrow B in FIG. 1 to the center of the eccentric plate 116, that is, the rotation axis RA of the servo motor 120. It is a. This distance a is the amount of eccentricity of the recess 123A from the rotation axis RA. Similarly, in the recess 123B, the distance from the center of the circle when viewed from the direction of arrow B in FIG. 1 to the center of the eccentric plate 116, that is, the rotation axis RA of the servo motor 120 is the second distance b. This distance b is the amount of eccentricity of the recess 123B from the rotation axis RA. The second distance b is different from the first distance a, and the distance b is shorter than the distance a in FIG. Although not shown, the circular shape of the

recesses

123A and 123B has a diameter into which the fixing pin 128 can be inserted.

In the initial state of FIG. 4A, the fixing pin 128 is inserted into the recess 123A, and the recess 123A and the connection plate 112 are connected via a bearing 122 fitted in the through hole 125 of the connection plate 112. . From the initial state of FIG. 4 (A), the eccentric plate 116 rotates around its center (rotation axis RA) half as shown in FIGS. 4 (B) and 4 (C). The eccentric plate 116 is rotated by the servo motor 120. Accordingly, in the state of FIG. 4C, the circular center of the recess 123A and the movable portion 108 (see FIG. 3) are lowered by a distance 2a compared to the initial state of FIG. 4A. From the state of FIG. 4 (C), the eccentric plate 116 rotates around its center (rotation axis RA) half as shown in FIGS. 4 (D) and 4 (E). As a result, in the state of FIG. 4E, the circular center of the recess 123A and the movable portion 108 (see FIG. 3) are raised by a distance 2a compared to the state of FIG. Return to the same state. When the distance 2a described above corresponds to ΔZ in FIG. 3 and the concave portion 123A is used, the linear motion mechanism 130 operates as described above.

On the other hand, in the initial state of FIG. 5A, the fixing pin 128 is inserted into the recess 123B, and the recess 123B and the connecting plate 112 are connected via the bearing 122 fitted in the through hole 125 of the connecting plate 112. ing. From the initial state of FIG. 5 (A), the eccentric plate 116 rotates around its center (rotation axis RA) half as shown in FIGS. 5 (B) and 5 (C). Accordingly, in the state of FIG. 5C, the circular center of the recess 123B and the movable portion 108 (see FIG. 3) are lowered by 2b compared to the initial state of FIG. 4A. As shown in FIGS. 5D and 5E, the eccentric plate 116 rotates around its center (rotation axis RA) from the state shown in FIG. 5C. Thus, in the state of FIG. 5E, the circular center of the recess 123B and the movable portion 108 (see FIG. 3) are raised by 2b compared to the state of FIG. 5C, and are the same as FIG. Return to the state. The above 2b corresponds to ΔZ in FIG. 3, and when the concave portion 123B is used, the linear motion mechanism 130 operates as described above.

The configuration of the liquid coating apparatus 200 according to the present embodiment including the coating unit 4A that performs the above operation will be described with reference to FIG.

FIG. 6 is a schematic perspective view of the liquid coating apparatus 200 according to the present embodiment. In FIG. 6, for convenience of explanation, an X direction, a Y direction, and a Z direction are introduced. Referring to FIG. 6, a liquid coating apparatus 200 includes a coating unit 4 (including a coating unit 4 B described later) as the coating unit 4 A, a base 12 disposed on the floor, an X-axis table 1, and the like. , Y-axis table 2, Z-axis table 3, observation optical system 6, CCD camera 7 connected to observation optical system 6, and control unit 11.

A Y-axis table 2 configured to be movable in the Y-axis direction in FIG. 1 is installed on the upper surface of the base 12. Specifically, a guide portion is installed on the lower surface of the Y-axis table 2 and is slidably connected along a guide rail installed on the upper surface of the base 12. A ball screw is connected to the lower surface of the Y-axis table 2. By operating the ball screw by a driving member such as a motor, the Y-axis table 2 can move along the guide rail (in the Y-axis direction). Further, the upper surface portion of the Y-axis table 2 is a mounting surface on which a substrate 5 that is an object to be coated is mounted.

On the base 12, a gate-shaped structure is provided so as to straddle the guide rail of the Y-axis table 2 in the X-axis direction. On this structure, an X-axis table 1 that is movable in the X-axis direction is mounted. The X-axis table 1 can move in the X-axis direction using, for example, a ball screw.

The Z-axis table 3 is mounted on the moving body of the X-axis table 1, and the coating unit 4 and the observation optical system 6 are mounted on the Z-axis table 3. The coating unit 4 and the observation optical system 6 can move in the X direction together with the Z-axis table 3. The application unit 4 is provided for applying the application liquid to the application surface (upper surface side) of the substrate 5 using an application needle provided in the application unit. The observation optical system 6 is provided for observing the application position of the substrate 5 to be applied. The CCD camera 7 of the observation optical system 6 converts the observed image into an electrical signal. The Z-axis table 3 supports the coating unit 4 and the observation optical system 6 so as to be movable in the Z-axis direction.

The control unit 11 includes an operation panel 8, a monitor 9, and a control computer 10, and controls the X-axis table 1, the Y-axis table 2, the Z-axis table 3, the coating unit 4, and the observation optical system 6. The operation panel 8 is used for inputting a command to the control computer 10. The monitor 9 displays the image data converted by the CCD camera 7 of the observation optical system 6 and the output data from the control computer 10. The control computer 10 controls the entire liquid application apparatus 200.

When drawing a circuit pattern on the substrate 5, the drawing position of the substrate 5 to be coated is moved to just below the observation optical system 6 by the X-axis table 1 and the Y-axis table 2, and the drawing start position is set by the observation optical system 6. Observe and confirm and determine the drawing start position. Then, a circuit pattern is drawn based on the determined drawing start position. From the drawing start position, the substrate 5 is moved by the X-axis table 1 and the Y-axis table 2 so that the drawing position is directly below the coating unit 4. When the movement is completed, the coating unit 4 is driven to perform coating. By repeating this continuously, a circuit pattern can be drawn. That is, when there are a plurality of positions to be coated, the substrate 5 is moved by the X-axis table 1 and the Y-axis table 2 so that the drawing start position is immediately below the coating unit 4 in order. Each time the movement is completed, the application unit 4 is driven to perform application.

The relationship between the descending end position of the application needle 24 and the focus position of the observation optical system 6 is stored in advance, and at the time of drawing, the application needle 24 is positioned with the position where the image is focused by the observation optical system 6 as the Z-axis direction reference. The application is performed after the position in the Z-axis direction is moved by the Z-axis table to a height at which it contacts the substrate 5. If the area of the circuit pattern to be drawn is large and the change in the substrate surface height of the substrate 5 to be coated during drawing is large, the focus position is confirmed in the middle if necessary and the position in the Z-axis direction is corrected. Then apply. The adjustment of the focus position at this time may be a method of automatically focusing using image processing, or the height position of the surface of the substrate 5 to be coated is always detected and corrected in real time using a laser sensor or the like. You can hang it.

Next, a liquid application method using the liquid application apparatus 200 including the application unit 4 of the present embodiment will be described with reference to FIG.

FIG. 7 is a schematic cross-sectional view for explaining the position of the application needle accompanying the operation of the application unit 4 shown in FIG. Specifically, FIG. 7A shows a state where the application needle 24 is raised, and FIG. 7B shows a state where the application needle 24 is lowered.

Referring to FIG. 7A, a coating liquid 100 as a liquid material is held in a coating liquid container 21 which is a part of the coating needle support 109 shown in FIG. The tip 23 of the application needle 24 supported by the application needle support portion 109 is immersed in the application liquid 100 in the application liquid container 21. At this time, the tip 23 of the application needle 24 is disposed so as to face the substrate 5 that is the application target. This shows a process of applying the coating liquid 100 to the tip 23 of the coating needle 24 as a stage before supplying the coating liquid 100 to the surface of the substrate 5 that is the surface to be coated. In FIG. 7A, since the application needle 24 is disposed above, this state corresponds to FIGS. 4A and 4E or FIGS. 5A and 5E.

Referring to FIG. 7B, the application needle 24 is lowered from the state of FIG. 7A and is brought into contact with the application target surface (upper main surface) of the substrate 5. Specifically, as shown in FIG. 4C or FIG. 5C, the eccentric plate 116 rotates and the connecting plate 112 descends. Thereby, the application needle 24 in which the tip 23 has been housed in the application needle container 21 so far moves downward as compared with the state of FIG. A container through hole 22 through which the application needle 24 penetrates is formed at the lower end portion of the application needle container 21. For this reason, the tip 23 of the application needle 24 protrudes from the container through hole 22 to the outside of the application needle container 21 by lowering and comes into contact with the application target surface of the substrate 5. Thereby, the coating liquid 100 adhered to the tip 23 of the coating needle 24 is supplied onto the coating target surface of the substrate 5. As described above, the application needle 24 is lowered to bring the application needle 24 into contact with the application target surface.

In this embodiment, the motor control unit 121 is attached to the servo motor 120 as described above. The motor control unit 121 rotates the servo motor 120 so that when the application needle 24 is lowered, the front end 23 of the application needle 24 decelerates just before contacting the application target surface such as the substrate 5. Therefore, when the tip 23 of the application needle 24 is brought into contact with the application target surface in the step of FIG. 7B, the lowering speed of the application needle 24 is set immediately before the tip 23 of the application needle 24 comes into contact with the application target surface. Reduce.

Next, the effects of the present embodiment will be described with reference to FIG. 8 as a comparative example.

FIG. 8 is a diagram showing the rotation of the eccentric plate 116 and the positional relationship between the bearing 122 and the bearing 124 in the comparative example. FIGS. 8A to 8E correspond to FIGS. 4A to 4E or FIGS. 5A to 5E in the present embodiment. 8A to 8E, also in the comparative example, as in the present embodiment, the eccentric plate 116 and the connecting plate 112 are rotated with respect to the concave portion 123 that is a fixed portion provided on the eccentric plate 116. The recesses 123 are coupled to each other via a bearing 122 that is movably supported. The recess 123 is provided at a position that is eccentric by a predetermined distance from the rotation axis. Also in the comparative example, as in the present embodiment, the eccentric plate 116 rotates in one direction as shown in FIGS. 8A to 8E, so that the connecting plate 112 on which the

bearings

122 and 124 are installed is Moves up and down by the vertical movement stroke ΔZ.

However, in the comparative example, only a single recess 123 is formed in the eccentric plate 116. For this reason, the value of ΔZ is uniquely determined to be twice the distance between the center of the eccentric plate 116 and the center of the recess 123, and this cannot be changed.

Therefore, in the present embodiment, as shown in FIGS. 2, 4, and 5, the eccentric plate 116 has two fixing portions of the concave portion 123 A and the concave portion 123 B having different distances from the rotation axis RA of the servomotor 120. Is formed. For this reason, the position where the eccentric plate 116 is connected to the connecting plate 112 via the bearing 122 can be freely changed to the concave portion 123A as shown in FIG. 4 or the concave portion 123B as shown in FIG. . Therefore, ΔZ, which is the amount by which the eccentric plate 116 is rotated to move the connecting plate 112, that is, the application needle 24 in the vertical direction, can be freely changed.

In FIG. 2 and the like, the eccentric plate 116 has two

recesses

123A and 123B. However, the eccentric plate 116 may be formed with three or more fixing portions having different distances from the rotation axis RA. In this way, the option for changing the amount of ΔZ can be further increased by the amount of increase in the number of recesses.

Also, the coating unit 4A of the present embodiment converts the rotation of the servo motor 120 into a motion in the linear motion direction via the linear motion mechanism 130. For this reason, the application unit 4A can drive the application needle 24 at high speed. As described above, the coating unit 4A of the present embodiment can achieve both high-speed movement of the coating needle 24 and change in the vertical movement distance.

For example, there are various crystal resonators whose electrodes are formed by supplying the coating solution 100 depending on the package depth. For this reason, when forming the electrode, it is desirable to make the moving distance of the applicator needle 24 in the vertical direction (the amount of protrusion from the coating solution container 21) as optimum as possible. For this reason, there is an actual advantage that the vertical movement distance of the application needle 24 can be changed as in the application unit 4A of the present embodiment.

The liquid application apparatus 200 including the application unit 4A (application unit 4) of the present embodiment can move the application needle 24 at a high speed as described above, and can change the vertical movement distance. Further, as shown in FIGS. 4 and 5, the rotation direction of the eccentric plate 116 can be made the same regardless of whether the application needle 24 is lowered or raised. For example, in the example of FIGS. 4 and 5, the rotational direction of the eccentric plate 116 is the same counterclockwise direction both when it is lowered and when it is raised. Therefore, since the application needle 24 is moved up and down at high speed, it is not necessary to suddenly limit the rotation angle of the servo motor 120 and reverse the servo motor 120 while the application needle 24 is moving at high speed. For this reason, when the servo motor 120 is rotating at a high speed, if the rotation direction is reversed, the variation in the position of the descending end of the application needle 24 that can be caused by the overshoot of the movement amount of the application needle 24 is reduced. can do. Thereby, the coating liquid 100 can be applied with high accuracy by the coating needle 24.

Also, by controlling the position of the connecting plate 112 without reversing the rotation direction of the eccentric plate 116 as in the present embodiment, conditions such as the amount of vertical movement of the application needle 24 can be easily determined. In addition, even when the target to which the coating liquid 100 is applied is changed within one line in which the liquid coating apparatus 200 according to the present embodiment is used, the vertical movement distance of the application needle 24 is changed in accordance with the change of the target. Work can be done easily.

In the coating unit 4A of the present embodiment, the connecting plate 112 and the eccentric plate 116 are rotatably connected by the fixing pin 128 and the bearing 122. Further, when the fixing pin 128 passes through the through hole 125 formed in the connecting plate 112, the connecting plate 112 and the eccentric plate 116 are connected. For this reason, the connecting plate 112 can be smoothly rotated around the center of the fixing pin 128.

In the coating unit 4A of the present embodiment, the motor control unit 121 of the servo motor 120 rotates the servo motor 120 so as to decelerate before the tip 23 of the coating needle 24 contacts the coating target surface. That is, in the liquid application method using the application unit 4A, in the step of bringing the application needle 24 into contact with the application target surface, the lowering speed of the application needle 24 is decreased immediately before the tip 23 of the application needle 24 contacts the application target surface. Let Therefore, for example, when the tip 23 of the application needle 24 comes into contact with the application target surface, the occurrence of a large impact at the time of contact and the accompanying damage to the application needle 24 that are assumed when the lowering speed of the application needle 24 does not decrease. The occurrence of defects can be suppressed.

By the way, in order to change the protruding length of the application needle 24 from the application liquid container 21, in addition to the method of changing the movement distance of the connecting plate 112 described above, the application liquid container 21 is made smaller, for example. It is also possible to change the size. However, for example, if the coating liquid container 21 is made small in order to increase the protruding length of the coating needle 24 from the coating liquid container 21, the coating liquid container is moved up when the coating needle 24 moves up with the coating liquid 100 attached. A part of the application needle 24 to which the application liquid 100 is attached is exposed to the outside of the container upper hole portion 26 (see FIG. 7) through which the application needle 24 at the uppermost portion of 21 penetrates. As a result, the coating liquid 100 adhered to the coating needle 24 adheres to the inner wall surface of the container upper hole portion 26 and the like. When this is dried, the coating liquid 100 adheres to the inner wall surface of the container upper hole portion 26 so as to rise, and the container upper hole portion 26 is blocked. For this reason, the applicator needle 24 is prevented from moving up and down so as to penetrate the container upper hole portion 26, thereby hindering its normal operation. For this reason, from the viewpoint of preventing the coating liquid 100 from adhering to the inner wall surface of the container upper hole 26, a method of reducing the coating liquid container 21 is not a good idea. Therefore, there is an actual advantage of applying this embodiment in which the distance of the vertical movement of the connecting plate 112 is changed.

(Embodiment 2)
FIG. 9 is a schematic enlarged cross-sectional view of the region A surrounded by the dotted line in FIG. FIG. 10 is a view corresponding to FIG. 4 of the first embodiment. In the second embodiment, the eccentric plate 116 and the connecting plate 112 are connected to each other in the recess 123A that is the first fixing portion. The movement mode of the applicator needle 24 in the vertical direction by the rotation of the plate 116 is shown. FIG. 11 is a view corresponding to FIG. 5 of the first embodiment. In the second embodiment, the eccentric plate 116 and the connecting plate 112 are connected to each other in the recess 123B which is the second fixing portion. The movement mode of the applicator needle 24 in the vertical direction by the rotation of the plate 116 is shown.

Referring to FIGS. 9 to 11, also in the present embodiment, basically, as in the first embodiment, the eccentric plate 116 and the connecting plate 112 are connected to each other in the concave portion 123A or the concave portion 123B via the bearing 122. Connected. However, in the present embodiment, recess 123A or recess 123B extends longer than in Embodiment 1 along the direction away from rotation axis RA. Specifically, the recess 123A or the recess 123B extends longer than that in the first embodiment in the direction away from the rotation axis RA, that is, in the radial direction of the eccentric plate 116 having a circular shape. On the other hand, the recess 123A and the recess 123B have the same dimensions as those of the first embodiment in the width direction intersecting the radial direction, and are substantially the same as the diameter of the fixing pin 128 to the extent that the fixing pin 128 can be inserted. It is a dimension.

As a result, in the concave portion 123A or the concave portion 123B of the present embodiment, the dimension in the radial direction of the eccentric plate 116, that is, the direction away from the rotation axis RA is larger than the dimension in the direction intersecting with the away direction. 9 to 11, both the recess 123A and the recess 123B extend in the radial direction as described above, and are larger than the dimensions in the width direction intersecting the recess. In this respect, the

recesses

123A and 123B of the present embodiment are different in shape from the

recesses

123A and 123B of the first embodiment having a circular shape. An arbitrary method can be used for fixing the fixing pin 128 to the

recesses

123A and 123B. Here, an example of a method for fixing the fixing pin 128 to the

recesses

123A and 123B will be described with reference to FIGS.

FIG. 12 is a schematic enlarged sectional view showing a nut for fixing the fixing pin 128 to the

recesses

123A and 123B. FIG. 13 is a schematic plan view showing the planar shape of the

recesses

123A and 123B for making it possible to fix the fixing pin 128 with the nut 127 as shown in FIG. FIG. 14 is a schematic cross-sectional view of the recess 123A of FIG. 13 in the region 123C1 where the hole width is particularly large on the surface of the eccentric plate 116. FIG. 15 is a schematic cross-sectional view of the recess 123A of FIG. 13 in the region 123C2 where the hole width is particularly small on the surface of the eccentric plate 116.

Referring to FIG. 12, this figure is basically the same as FIG. 9, but differs from FIG. 9 in that a nut 127 for fixing the fixing pin 128 is disposed in the recess 123A. As shown in FIG. 9, the male screw of the fixing pin 128 is fitted into the female screw of the nut 127 in the recess 123 A.

Referring to FIG. 13, this figure is basically the same as the eccentric plate 116 of FIGS. 10 and 11, but in the shape when the recesses 123 A and 123 B formed in the eccentric plate 116 are viewed from above. And is different from FIG. Specifically, when the recess 123A is viewed from above, the dimension in the width direction that intersects the radial direction of the eccentric plate 116 is larger than a region near the rotation axis RA, for example, at a position away from the rotation axis RA. ing. In this regard, FIG. 13 is a view in which the dimension in the width direction of the eccentric plate 116 when viewed from above the recess 123A is substantially constant regardless of the distance from the rotation axis RA (except for the end portion). 10 and FIG. Similarly to the recess 123A, the recess 123B has a width dimension that intersects the radial direction of the eccentric plate 116 when viewed from above, for example, at a position away from the rotation axis RA, compared to a region near the rotation axis RA. It is getting bigger. Contrary to FIG. 13, the recesses 123 A and 123 B may be larger in the width direction in a region near the rotation axis RA than in a region away from the rotation axis RA.

Referring to FIGS. 13, 14, and 15, hole 123 C constituting recess 123 A has a large portion 123 C 1 having a large width when viewed from above, and a small width portion 123 C 2 having a small width when viewed from above have. As shown in FIG. 14, the large portion 123C1 has a constant dimension in the width direction in the entire depth direction thereof, that is, in the entire range within the depth d2 from the surface 116S of the eccentric plate 116 to the bottom surface of the recess 123A. d1. d1 is larger than the dimension of the nut 127 in the lateral direction. By having d1, the nut 127 can be stored in the large portion 123C1.

On the other hand, the narrow portion 123C2 is a region close to the surface 116S of the eccentric plate 116 in the depth direction as shown in FIG. In this region, that is, the small width portion 123C2, the dimension in the width direction is d3 smaller than d1. d3 is smaller than the dimension of the nut 127 in the lateral direction. However, the bottom concave portion 123C3 immediately below the small width portion 123C2 has the same dimension d1 as the large portion 123C1 in the width direction. That is, for the bottom recess 123C3 that is deeper in the depth direction than the small width portion 123C2 of the recess 123A and extends to the bottom surface having the same depth d2 as the large portion 123C1, the dimension in the width direction is the same d1 as the large portion 123C1. .

By having the above configuration, the nut 127 is stored as follows. First, the nut 127 is housed in the large portion 123C1 of the recess 123A. Thereafter, the nut 127 slides in the concave portion 123A in the radial direction to the narrow portion 123C2. As a result, the nut 127 is housed in the bottom recess 123C3 directly below the narrow portion 123C2. Thereby, as shown in FIG. 12, the nut 127 can be accommodated in the recess 123A. In addition, since the dimension in the width direction of the nut 127 is larger than the dimension d3 in the width direction of the small width part 123C2, the nut 127 cannot come out of the recess 123A from the small width part 123C2. This is because the narrow portion 123C2 in FIG. 15 is narrow, and the nut 127 interferes with the inner wall surface of the uppermost surface of the bottom recess 123C3, thereby preventing the nut 127 from being pulled upward. The above fixing method using the nut 127 is similarly applied to the recess 123B.

The coating unit 4A of the present embodiment is different from the first embodiment in the above points. However, since the present embodiment is basically the same as the first embodiment except for the above points, the same components are denoted by the same reference numerals, and the description thereof will not be repeated.

Next, the effect of this Embodiment is demonstrated.
In the present embodiment, the recess 123A or (and) the recess 123B extends elongated along the direction away from the rotation axis RA, that is, the center of the eccentric plate 116. Therefore, for example, as shown in FIGS. 10A to 10E, the eccentric plate 116 and the connecting plate 112 are arranged such that the center of the fixing pin 128 is separated from the center of the eccentric plate 116 by a distance a. 4A to 4E of the first embodiment, the connecting plate 112 can be lowered by the distance 2a. However, since the recess 123A is elongated in the radial direction, the distance between the center of the fixing pin 128 and the center of the eccentric plate 116 can be freely changed within the range where the recess 123A is formed. Similarly, for example, as shown in FIGS. 11A to 11E, the eccentric plate 116 and the connecting plate 112 are arranged at a position where the center of the fixing pin 128 is separated from the center of the eccentric plate 116 by a distance b. In such a case, the connecting plate 112 can be lowered by the distance 2b as in FIGS. 5A to 5E of the first embodiment. However, since the recess 123A extends in the radial direction, the distance between the center of the fixing pin 128 and the center of the eccentric plate 116 can be freely changed within the range of the length of the recess 123A. Therefore, the stroke amount as ΔZ in FIG. 3 can be changed with a higher degree of freedom than in the first embodiment.

In the present embodiment, only one elongated groove-shaped recess 123A may be formed on the eccentric plate 116.

(Embodiment 3)
FIG. 16 is a schematic enlarged cross-sectional view along the rotation axis RA of a region A surrounded by a dotted line in FIG. FIG. 17 is a view corresponding to FIG. 4 of the first embodiment. In the third embodiment, the eccentric plate 116 and the connecting plate 112 are connected to each other in the recess 123A that is the first fixing portion. The movement mode of the applicator needle 24 in the vertical direction by the rotation of the plate 116 is shown. 18 is a view corresponding to FIG. 5 of the third embodiment. In the third embodiment, the eccentric plate 116 and the connecting plate 112 are connected to each other in the concave portion 123B which is the second fixing portion. The movement mode of the applicator needle 24 in the vertical direction by the rotation of the plate 116 is shown.

Referring to FIGS. 16 to 18, also in the present embodiment, basically, as in the first embodiment, the eccentric plate 116 and the connecting plate 112 are connected to each other in the concave portion 123A or the concave portion 123B via the bearing 122. Connected. However, in the present embodiment, the dimension of the through hole 125 in the extending direction of the connecting plate 112 is larger than the dimension in the direction intersecting with the extending direction. On the other hand, the through hole 125 has the same dimensions as those of the first embodiment in the direction intersecting the extending direction, and is larger in diameter than the shaft portion of the fixing pin 128 and smaller than the head portion of the fixing pin 128. have. In this regard, the through hole 125 of the present embodiment is different in shape from the through hole 125 of the first embodiment having a circular shape. An arbitrary method can be adopted as a method of fixing the

bearings

122 and 124 to the connecting plate 112.

Next, the effect of this Embodiment is demonstrated.
In the present embodiment, the through holes 125 are elongated along the direction in which the connecting plate 112 extends. Therefore, for example, as shown in FIGS. 17A to 17E and FIGS. 18A to 18E, when the connecting plate 112 and the eccentric plate 116 are connected in the recess 123A or the recess 123B, the connecting plate The position where 112 reaches the lowest position by the rotation of the eccentric plate 116 can be adjusted. This is because the position of the through hole 125 with respect to the position where the fixing pin 128 is inserted, that is, the position in the vertical direction of the connecting plate 112 can be freely changed within the range in which the through hole 125 extends.

On the other hand, the stroke amount indicated by ΔZ in FIG. 3 is limited to either the

distance

2a or 2b in the present embodiment, as in the first embodiment. This is because the positions of the

recesses

123A and 123B formed in the eccentric plate 116 are the same as those of the

recesses

123A and 123B of the first embodiment.

Note that the through-hole 125 has two dimensions (excluding a portion having a narrow width at both ends), for example, so as to be able to overlap both of the

recesses

123A and 123B formed in a row. The distance a + b between the centers of the

recesses

123A and 123B is preferable. In this way, the position where the connecting plate 112 descends most can be freely changed within a sufficiently wide range.

(Embodiment 4)
In the above, for the sake of simplification, description is given using a schematic diagram in which only one connecting plate 112 is configured. However, in practice, the connecting plate 112 may be a plate in which two plate members are overlapped. Hereinafter, an embodiment in which two plate-like members are stacked as the connecting plate 112 of the first to third embodiments will be described with reference to FIGS.

FIG. 19 is a front view of the coating unit 4B according to the present embodiment. FIG. 20A is a schematic enlarged cross-sectional view of the region C surrounded by the dotted line in FIG. 19 along the rotation axis. FIG. 20B is a schematic front view of the connecting plate viewed from the direction indicated by the arrow XXB in FIG.

Referring to FIG. 19, coating unit 4B according to the present embodiment basically has the same configuration as coating unit 4A in FIG. However, in FIG. 19, a connecting plate 112 in which a first plate member 112A and a second plate member 112B are integrated is used. Here, the first plate-like member 112A is the side exposed to the outside (the right side in FIG. 19), and the second plate-like member 112B is the inside (the left side in FIG. 19) where the servo motor 120 is disposed. To do. Note that the first plate-like member 112A and the second plate-like member 112B are integrally fixed by a connecting plate fixing screw 133 disposed at the center in the longitudinal direction of FIG.

Referring to FIGS. 20A and 20B, for example, an interval between the second plate-like member 112B and the eccentric plate 116 is secured so that the connecting plate 112 can rotate around the center of the bearing 122. There is a need. A member for securing this interval is the spacer 114. Similarly, it is necessary to secure a distance between the second plate-like member 112B and the movable portion 108 so that the connecting plate 112 can rotate around the central portion of the bearing 124, for example. A member for securing this interval is the spacer 110. The spacer 114 is a portion extending in the left-right direction in FIG. 20A (securing a space) around the fixed pin 128 in a plan view and a portion extending in the radial direction that is bent from the fixed pin 128 and away from the fixed pin 128. It has the shape which has.

The bearing 122 is configured by an outer ring 122A, an inner ring 122B, and rollers 122C between them, as in the first embodiment. The bearing 124 includes an outer ring 124A, an inner ring 124B, and rollers 124C between them. In the present embodiment, the connecting plate 112 (each of the first plate member 112A and the second plate member 112B) is formed with a small diameter through hole 125A and a large diameter through hole 125B as the through holes 125. Has been. The small-diameter through hole 125A has, for example, substantially the same diameter as the inner diameter of the

outer rings

122A and 124A, and is larger than the outer diameter of the spacer 114. The small-diameter through hole 125A is formed so as to penetrate only a part in the thickness direction of the first plate-like member 112A and the second plate-like member 112B. On the other hand, the large-diameter through hole 125B is a through hole provided so that the

entire bearings

122 and 124 can be fitted to the connecting

plates

112A and 112B. The large-diameter through hole 125B is formed so as to penetrate only a part other than the thickness region of the small-diameter through hole 125A in the thickness direction of the first plate-like member 112A and the second plate-like member 112B. The diameter of the large diameter through hole 125B is larger than the diameter of the small diameter through hole 125A. As shown in FIG. 20A, the first plate-like member 112A and the second plate-like member 112B are arranged so that the large-diameter through holes 125B face each other. In the

bearings

122 and 124, the first plate member 112A and the second plate member 112B are fixed to each other in the large-diameter through hole 125B between the first plate member 112A and the second plate member 112B. It is fixed by being tightened with a screw 133.

The

spacers

114 and 110 are fixed so as to contact the inner ring 122B and the inner ring 124B. Further, the

spacers

114 and 110 are at least partially accommodated in the small-diameter through-hole 125A, and are connected to the eccentric plate 116 and the movable portion 108 (not shown). On the other hand, the

outer rings

122A and 124A are in contact with the inner wall surface of the large-diameter through hole 125B, and the

inner rings

122B and 124B are in contact with the shaft portion of the fixing pin 128. Thereby, the connecting plate 112 can rotate around the axis of the fixing pin 128, that is, around the axes of the

spacers

114 and 110. Although the detailed description is omitted, even when the coating unit 4B is applied to the second embodiment in which the

concave portions

123A and 123B of the eccentric plate 116 are elongated, the configuration of the connecting plate 112 shown in FIG. Applicable.

FIG. 21A is a first example of a schematic enlarged cross-sectional view along the rotation axis of a region C surrounded by a dotted line in FIG. 19 when the configuration of the third embodiment is applied to the fourth embodiment. FIG. 21B is a second example of a schematic enlarged cross-sectional view along the rotation axis of a region C surrounded by a dotted line in FIG. 19 when the configuration of the third embodiment is applied to the fourth embodiment. FIG. 21C is a schematic front view of the connecting plate viewed from the direction indicated by the arrow XXIC in FIGS.

Referring to FIGS. 21A to 21C, when the configuration of the third embodiment is applied to the fourth embodiment, the upper through-hole 125 (small-diameter through-hole 125A and large-diameter through-hole 125B) is a connecting plate. The difference is that the dimension in which 112 extends is larger than the direction intersecting it. 21A and 21B are different in the fixing positions of the bearing 122, the fixing pin 128, and the like in the elongated through hole 125, but the other points are basically the same. Therefore, the configuration shown in each drawing of FIG. 21 is basically the same as that of FIG.

The features described in the embodiments described above (each example included in the embodiments) may be applied so as to be appropriately combined within a technically consistent range.

The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

1 X-axis table, 2 Y-axis table, 3 Z-axis table, 4A, 4B coating unit, 6 observation optical system, 7 CCD camera, 11 control unit, 12 base, 21 coating liquid container, 22 container through-hole, 23 tip , 24 coating needles, 100 coating liquid, 102 coating needle holder, 104 coating needle holder storage section, 106 coating needle holder fixing section, 108 movable section, 109 coating needle support section, 110, 114 spacer, 112 connecting plate, 112A first Plate member, 112B second plate member, 112C outer ring block, 114C hole, 116 eccentric plate, 116S surface, 118 origin sensor, 120 servo motor, 121 motor controller, 122, 124 bearing, 122A, 124A Outer ring, 122B, 124B Inner ring, 122C,

124C

123, 123A, 123B concave portion, 123C hole portion, 123C1 large portion, 123C2 small width portion, 123C3 bottom concave portion, 125 through hole, 125A small diameter through hole, 125B large diameter through hole, 126 spring, 127 nut, 128 fixing pin, 129 spacer , 130 linear motion mechanism, 131 spring support pin, 132 linear guide, 133 connecting plate fixing screw, 200 liquid applicator, RA rotating shaft.

Claims

A liquid application unit for moving an application needle for applying a liquid material,
A motor for driving the application needle up and down;
An application needle support part for supporting the application needle;
A linear motion mechanism that moves the application needle support portion up and down according to the rotation of the motor;
The linear motion mechanism is
A first fixing portion attached to a rotating shaft rotated by the motor and provided at a position eccentric by a first distance from the rotating shaft, and a second distance different from the first distance from the rotating shaft. An eccentric plate including a second fixing portion provided at an eccentric position;
A third fixing portion that moves up and down together with the application needle support portion and a connecting member that connects the first fixing portion or the second fixing portion;
The eccentric plate and the connecting member are configured such that the first fixing portion or the first connecting member is supported via a bearing that rotatably supports the connecting member with respect to the first fixing portion or the second fixing portion. A liquid application unit connected to each other at two fixed portions.
The first fixing part or the second fixing part extends along a direction away from the rotation axis,
2. The liquid application unit according to claim 1, wherein the first fixing part or the second fixing part has a dimension related to the separation direction larger than a dimension related to a direction intersecting the separation direction.
A fixing pin for rotatably connecting the connecting member and the first fixing portion or the second fixing portion via the bearing;
The liquid application unit according to claim 1, wherein a through hole for connecting to the eccentric plate by the fixing pin and a bearing is formed in the connecting member.
The liquid application unit according to claim 3, wherein the dimension of the through hole in the direction in which the connecting member extends is larger than the dimension in a direction intersecting the extending direction.
5. The liquid application unit according to claim 1, further comprising a motor control unit that rotates the motor so that the tip of the application needle is decelerated before the tip of the application needle contacts the application target surface.
A liquid application method using the liquid application unit according to any one of claims 1 to 4,
Applying the liquid material to the tip of the application needle;
Lowering the application needle and bringing the application needle into contact with the application target surface,
In the contacting step, a liquid application method in which the lowering speed of the application needle is reduced immediately before the tip of the application needle contacts the application target surface.
A liquid application method using the liquid application unit according to claim 5,
Applying the liquid material to the tip of the application needle;
Lowering the application needle and bringing the application needle into contact with the application target surface,
In the contacting step, a liquid application method in which the lowering speed of the application needle is reduced immediately before the tip of the application needle contacts the application target surface.
A liquid coating apparatus comprising the liquid coating unit according to any one of claims 1 to 4, and capable of coating a coating liquid on a surface to be coated.
A liquid coating apparatus comprising the liquid coating unit according to claim 5 and capable of coating a coating liquid on a surface to be coated.