WO2019146242A1 - Gas sensor - Google Patents

Gas sensor Download PDF

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Publication number
WO2019146242A1
WO2019146242A1 PCT/JP2018/043593 JP2018043593W WO2019146242A1 WO 2019146242 A1 WO2019146242 A1 WO 2019146242A1 JP 2018043593 W JP2018043593 W JP 2018043593W WO 2019146242 A1 WO2019146242 A1 WO 2019146242A1
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Prior art keywords
gas
casing
sensor
measured
catalyst
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PCT/JP2018/043593
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French (fr)
Japanese (ja)
Inventor
雅 山崎
上木　正聡
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日本特殊陶業株式会社
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Publication of WO2019146242A1 publication Critical patent/WO2019146242A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416—Systems

Definitions

  • the present disclosure relates to a gas sensor.
  • Patent Document 1 As a gas sensor for measuring the concentration of a specific component in a gas to be measured, it is known to measure the concentration of a gas component with a sensor element after chemically changing the component in the gas using a catalyst (see Patent Document 1) .
  • the catalyst converts a gas component to be measured into a component detectable by the sensor element by a chemical change, and removes miscellaneous gas components contained in the object to be measured by a chemical change such as combustion.
  • the sensor element is heated by the heater at the time of measurement.
  • the casing in which the sensor element is disposed is formed of metal in terms of cost, moldability, strength, heat resistance, and the like.
  • the casing when the casing is heated together with the sensor element by the heater, the casing acts as a reducing agent, which may cause a chemical reaction with the component of the measurement gas that has undergone a chemical change due to the catalyst. For example, if the gas to be measured containing NO 2, NO 2 is reduced to NO by a heated casing.
  • the component ratio in the gas to be measured (for example, the ratio of NO to NO 2 ) changes due to the chemical reaction, and the measurement accuracy of the component to be measured by the sensor element decreases. .
  • One aspect of the present disclosure aims to provide a gas sensor that can improve measurement accuracy while using a metal casing for a sensor unit.
  • the gas sensor for measuring the concentration of a component contained in a measurement gas.
  • the gas sensor comprises a catalyst unit, a sensor unit and at least one heater.
  • the catalyst unit has a catalyst for chemically changing the components contained in the gas to be measured, and a first casing for storing the catalyst.
  • the sensor unit has a sensor element configured to detect a specific component in the gas to be measured which has passed through the catalyst unit, and a metal second casing for storing the sensor element.
  • At least one heater is configured to heat the catalyst unit and the sensor unit.
  • the inner surface of the second casing is coated with an inert coating material that does not adsorb a specific component in the gas to be measured and does not chemically react with the specific component in the gas to be measured.
  • the inner surface of the metallic second casing is covered with the inert coating material which does not adsorb the specific component in the gas to be measured and does not chemically react with the specific component in the gas to be measured Therefore, the chemical reaction of the specific component in the gas to be measured can be suppressed in the second casing. As a result, the measurement accuracy of the specific component in the gas to be measured can be enhanced.
  • the second casing is provided with an inlet for introducing the measured gas into the second casing, and an outlet for discharging the measured gas in the second casing.
  • FIG. 1 It is a typical sectional view showing a gas sensor of an embodiment. It is a schematic cross section which shows the gas sensor of embodiment different from FIG.
  • the gas sensor 1 shown in FIG. 1 is a gas sensor for measuring the concentration of the gas component contained in the measurement gas G.
  • gas components to be measured by the gas sensor 1 include nitrogen oxides (NOx) and carbon dioxide.
  • the gas sensor 1 can be used in fields such as environmental management, process management, and medical care.
  • the gas sensor 1 can be suitably used for measurement of a gas containing extremely low concentration of NOx, particularly at a level of several ppb to several hundreds ppb, specifically, for asthma diagnosis.
  • the gas sensor 1 is provided with the catalyst unit 2, the sensor unit 3, the flow path 4, the one heater 5, the partition 6, and the sealing material 7, as shown in FIG.
  • the gas to be measured G in the present embodiment is exhalation.
  • the catalyst unit 2 includes a catalyst unit 2A that chemically changes a component included in the measurement gas G, and a first casing 2B that stores the catalyst unit 2A.
  • the chemical change by the catalyst unit 2A includes converting a certain component to another component and burning a certain component. Specifically, the catalyst unit 2A converts a component whose concentration is to be measured by the gas sensor 1 into a component detectable by the sensor element 3A. In addition, the catalyst unit 2A burns a component whose concentration is not measured by the gas sensor 1. For example, in the case of asthma diagnosis, the catalyst unit 2A converts NO to be measured into NO 2, and at the same time, trace amounts of reducing gas contained in the gas to be measured G (breath) such as CO, H 2 and VOC. Burn it.
  • G trace amounts of reducing gas contained in the gas to be measured G (breath) such as CO, H 2 and VOC. Burn it.
  • the catalyst portion 2A has a catalyst for chemically changing a component contained in the measurement gas G, and a base portion supporting the catalyst.
  • a flow path of the measurement gas G is formed in the base portion.
  • the catalyst is disposed on at least the inner surface of the gas flow path of the base portion.
  • the base portion of the catalyst portion 2A contains, for example, a ceramic such as alumina as a main component.
  • the catalyst of catalyst part 2A is suitably selected according to a use and temperature.
  • the catalyst for example, noble metals such as platinum, rhodium and gold, supports obtained by supporting particles of such noble metals on, for example, ⁇ alumina and zeolite, or metal oxides such as manganese oxide, cobalt oxide and tin oxide are used. Ru.
  • the first casing 2B is open at a surface facing the sensor unit 3, and the opening surface is closed by a partition 6 described later.
  • the catalyst portion 2A is disposed in an internal space defined by the first casing 2B and the partition wall 6. Specifically, the catalyst portion 2A is fixed to the partition wall 6 and a surface of the inner surface of the first casing 2B facing the partition wall 6.
  • the first casing 2B has a flange 2C facing the partition wall 6. Further, the first casing 2B is provided with an inlet 2D and an outlet 2E that respectively communicate the internal space of the first casing 2B with the outside. A flow passage 4 described later is connected to the discharge port 2E.
  • the first casing 2B is formed of, for example, a metal such as aluminum or stainless steel (SUS).
  • the sensor unit 3 includes a sensor element 3A configured to detect a specific component (that is, a measurement target component) in the measurement gas G that has passed through the catalyst unit 2, and a second casing 3B storing the sensor element 3A. Have.
  • the sensor element 3A has a mixed potential type detection body, and the detection body is mounted on a base substrate made of ceramic.
  • the sensor element 3A may further include a temperature measuring resistor.
  • the mixed potential type detection body is not described in detail because it is known, for example, has a solid electrolyte body made of zirconia and electrodes made of different materials, and outputs the potential difference between these electrodes as a sensor signal It has composition.
  • the detection body of the sensor element 3A is not limited to this, and a detection body made of a metal oxide semiconductor whose resistance changes due to the presence of a gas component to be detected, or a capacitance change type detection body is used May be
  • the detection body and the resistance for temperature measurement are electrically connected to the wiring formed in the partition wall 6, and power is supplied from the outside.
  • the second casing 3 B is open at the surface facing the catalyst unit 2, and the opening surface is closed by the partition wall 6.
  • the sensor element 3A is disposed in an internal space defined by the second casing 3B and the partition wall 6. Specifically, the sensor element 3A is fixed to the partition wall 6.
  • the second casing 3B has a flange 3C that faces the partition wall 6. Further, the second casing 3B is provided with an inlet 3D and an outlet 3E that respectively communicate the internal space of the second casing 3B with the outside.
  • the inlet 3D introduces the measurement gas G into the second casing 3B.
  • the flow passage 4 is connected to the inlet 3D.
  • the exhaust port 3E exhausts the measurement gas G in the second casing 3B.
  • the second casing 3B is formed of, for example, a metal such as aluminum or stainless steel (SUS).
  • the inner surface of the second casing 3B is coated with an inert coating material that does not adsorb a specific component of G in the measurement gas and does not chemically react with the specific component in the measurement gas. That is, the second casing 3B has the coating layer 3F formed of the inert coating material.
  • the inert coating material preferably has no catalytic action on the components contained in the gas to be measured G, or at least a smaller catalytic action on the components contained in the gas to be measured G than the metal constituting the second casing 3B.
  • the coating layer 3F is laminated on the inner surface of the second casing 3B.
  • the coating layer 3F is densely formed so as not to allow a specific component of the measurement gas G to pass through. That is, the coating layer 3F prevents the specific component of the measurement gas G from contacting the second casing 3B.
  • the inert coating material does not adsorb a specific component of G in the gas to be measured in this heated state among the substances chemically stabilized when the gas sensor 1 is used, that is, in the state heated by the heater 5. It is not particularly limited as long as it is a substance that does not chemically react with a specific component in the measurement gas.
  • the inert coating material may, for example, be a fluorine resin such as alumina or polytetrafluoroethylene.
  • the coating layer 3F can be formed, for example, by a method such as sputtering, sol-gel method, application of a sol solution, or the like.
  • the measured gas G introduced into the second casing 3B from the inlet 3D contacts the sensor element 3A, and the outside of the second casing 3B from the outlet 3E (specifically, the gas sensor 1) Out of the system).
  • the flow passage 4 supplies the measurement gas G in the first casing 2B into the second casing 3B.
  • the flow passage 4 is a pipe that connects the outlet 2E of the first casing 2B and the inlet 3D of the second casing 3B.
  • the heater 5 heats the catalyst unit 2 and the sensor unit 3 simultaneously.
  • the heater 5 is disposed in the sensor element 3A.
  • temperature control of the sensor element 3A that needs to be temperature controlled at a temperature higher than that of the catalyst unit 2 becomes possible.
  • the catalyst unit 2 and the sensor unit 3 can be simultaneously heated by one heater 5, the power consumption of the gas sensor 1 can be reduced.
  • the structure of the gas sensor 1 can be simplified.
  • the heater 5 is formed of, for example, metal wiring such as platinum (that is, load resistance).
  • the heater 5 is electrically connected to the wiring formed in the partition 6 and generates heat when power is supplied from the outside.
  • the partition wall 6 is interposed between the first casing 2B and the second casing 3B, and is arranged to separate a space in which the catalyst portion 2A is disposed and a space in which the sensor element 3A is disposed.
  • the dividing wall 6 is disposed between the flange 2C of the first casing 2B and the flange 3C of the second casing 3B. Further, a ring-shaped seal member 7 is disposed between the partition wall 6 and the two flanges 2C and 3C, respectively, to ensure air tightness.
  • the partition wall 6 is sandwiched in the thickness direction by the flange 2C of the first casing 2B and the flange 3C of the second casing 3B via the two seal members 7.
  • the flange 2C of the first casing 2B and the flange 3C of the second casing 3B are fixed, for example, by fastening in the thickness direction.
  • a gasket containing a fluorine resin such as polytetrafluoroethylene as a main component is used as a gasket containing a fluorine resin such as polytetrafluoroethylene as a main component.
  • a part of the partition 6 extends to the outside of the flanges 2C and 3C.
  • the partition 6 has a wiring disposed on the surface or inside thereof.
  • the wiring is for connecting the sensor element 3A and the heater 5 to an external circuit, and has an electrode pad.
  • the sensor element 3A and the heater 5 are electrically connected to the electrode pad by resistance welding, bonding or the like.
  • the material of the partition 6 is not particularly limited, but the partition 6 is mainly made of, for example, ceramic.
  • “main component” means a component contained at 80% by mass or more.
  • an insulating ceramic for example, alumina is preferable.
  • the thickness of the arrangement portion 6A in which the catalyst portion 2A and the sensor element 3A are disposed is smaller than the thickness of the other portions.
  • the catalyst portion 2A and the sensor element 3A are fixed to the arrangement portion 6A which is thinner than the other portions in the partition wall 6.
  • the gas sensor 11 shown in FIG. 2 is a gas sensor for measuring the concentration of the gas component contained in the measurement gas G.
  • the gas sensor 11 includes a catalyst unit 2, a sensor unit 13, a flow passage 4, one heater 5, a partition 6, and a sealing material 7.
  • the catalyst unit 2, the flow passage 4, the heater 5, the partition wall 6, and the seal member 7 are the same as the gas sensor 1 of FIG.
  • the sensor unit 13 is the same as the sensor unit 3 of FIG. 1 except for the coating layer 13F.
  • the coating layer 13F of the present embodiment is laminated on the inner surface of the inlet 3D and the outlet 3E of the second casing 3B in addition to the inner surface of the second casing 3B. That is, the inlet 3D and the outlet 3E are covered with the inert coating material.
  • the first casing 2B and the second casing 3B may be connected not by piping but by through holes provided in the partition wall 6. That is, the flow passage 4 may be configured by a through hole that penetrates the first casing 2B and the second casing 3B.
  • the gas sensors 1 and 11 may not necessarily include the partition wall 6 and the sealing material 7.
  • the first casing 2 ⁇ / b> B and the second casing 3 ⁇ / b> B may be disposed apart from each other, or may be joined without the partition wall 6.
  • the heater 5 may be disposed between the sensor element 3A and the partition 6, inside the catalyst unit 2A, or between the catalyst unit 2A and the partition 6.
  • the gas sensors 1 and 11 may include a first heater that heats the catalyst unit 2A and a second heater that heats the sensor element 3A.
  • the first casing 2B and the second casing 3B may each be formed by piping. That is, the catalyst portion 2A and the sensor element 3A may be respectively disposed inside the pipe.
  • the inner surface of the first casing 2B of the catalyst unit 2 may be coated with an inert coating material.
  • the coating layer 13F is provided on both the inlet 3D of the second casing 3B and the inner surface of the outlet 3E.
  • the coating layer 13F is a second casing It may be configured to be provided only on the inner surface of the inlet 3D of 3B.

Abstract

Provided is a gas sensor which has enhanced measurement accuracy, while using a casing that is formed from a metal for a sensor unit. The present disclosure is a gas sensor for measuring the concentration of a component that is contained in a gas to be measured. This gas sensor is provided with a catalyst unit, a sensor unit and at least one heater. The catalyst unit comprises: a catalyst for chemically altering a component that is contained in a gas to be measured; and a first casing which contains the catalyst. The sensor unit comprises: a sensor element which is configured so as to sense a specific component in the gas to be measured that has passed through the catalyst unit; and a second casing which is formed from a metal and contains the sensor element. The at least one heater is configured so as to heat the catalyst unit and the sensor unit. The inner surface of the second casing is covered by an inert coating material which does not adsorb the specific component in the gas to be measured, and which does not chemically react with the specific component in the gas to be measured.

Description

ガスセンサGas sensor
本開示は、ガスセンサに関する。 The present disclosure relates to a gas sensor.
被測定ガス中の特定成分の濃度を測定するガスセンサとして、触媒を用いてガス中の成分を化学変化させた後に、センサ素子によってガス成分濃度を測定するものが公知である（特許文献１参照）。　 As a gas sensor for measuring the concentration of a specific component in a gas to be measured, it is known to measure the concentration of a gas component with a sensor element after chemically changing the component in the gas using a catalyst (see Patent Document 1) .
特許文献１のガスセンサでは、触媒によって測定対象のガス成分を化学変化によってセンサ素子が検知可能な成分に変換すると共に、被測定対象に含まれる雑ガス成分を燃焼等の化学変化によって除去する。 In the gas sensor of Patent Document 1, the catalyst converts a gas component to be measured into a component detectable by the sensor element by a chemical change, and removes miscellaneous gas components contained in the object to be measured by a chemical change such as combustion.
特開平１０－３００７０２号公報Japanese Patent Application Laid-Open No. 10-300702
上述のガスセンサにおいて、センサ素子は測定時にヒータによって加熱される。また、センサ素子が配置されるケーシングは、コスト、成型性、強度、耐熱性等の観点から金属で形成される。　 In the above-described gas sensor, the sensor element is heated by the heater at the time of measurement. Further, the casing in which the sensor element is disposed is formed of metal in terms of cost, moldability, strength, heat resistance, and the like.
このようなガスセンサでは、ヒータによってセンサ素子と共にケーシングが加熱されると、ケーシングが還元剤として働いてしまい、触媒による化学変化を経た被測定ガスの成分と化学反応するおそれがある。例えば、被測定ガスがＮＯ２を含む場合、加熱されたケーシングによってＮＯ２がＮＯに還元される。　 In such a gas sensor, when the casing is heated together with the sensor element by the heater, the casing acts as a reducing agent, which may cause a chemical reaction with the component of the measurement gas that has undergone a chemical change due to the catalyst. For example, if the gas to be measured containing NO 2, NO 2 is reduced to NO by a heated casing.
このような化学反応がセンサのケーシング内において生じると、化学反応によって被測定ガス中の成分比（例えばＮＯ２に対するＮＯの比）が変化するため、センサ素子による測定対象成分の測定精度が低下する。　 When such a chemical reaction occurs in the casing of the sensor, the component ratio in the gas to be measured (for example, the ratio of NO to NO 2 ) changes due to the chemical reaction, and the measurement accuracy of the component to be measured by the sensor element decreases. .
本開示の一局面は、センサユニットに金属製のケーシングを使用しつつ、測定精度を高められるガスセンサを提供することを目的とする。 One aspect of the present disclosure aims to provide a gas sensor that can improve measurement accuracy while using a metal casing for a sensor unit.
本開示の一態様は、被測定ガスに含まれる成分の濃度を測定するためのガスセンサである。ガスセンサは、触媒ユニットと、センサユニットと、少なくとも１つのヒータと、を備える。触媒ユニットは、被測定ガスに含まれる成分を化学変化させるための触媒と、触媒を格納する第１ケーシングとを有する。センサユニットは、触媒ユニットを通過した被測定ガス中の特定成分を検知するように構成されたセンサ素子と、センサ素子を格納する金属製の第２ケーシングとを有する。少なくとも１つのヒータは、触媒ユニットとセンサユニットとを加熱するように構成される。第２ケーシングの内面は、被測定ガス中の特定成分を吸着せず、かつ被測定ガス中の特定成分と化学反応しない不活性コーティング材によって被覆される。　 One aspect of the present disclosure is a gas sensor for measuring the concentration of a component contained in a measurement gas. The gas sensor comprises a catalyst unit, a sensor unit and at least one heater. The catalyst unit has a catalyst for chemically changing the components contained in the gas to be measured, and a first casing for storing the catalyst. The sensor unit has a sensor element configured to detect a specific component in the gas to be measured which has passed through the catalyst unit, and a metal second casing for storing the sensor element. At least one heater is configured to heat the catalyst unit and the sensor unit. The inner surface of the second casing is coated with an inert coating material that does not adsorb a specific component in the gas to be measured and does not chemically react with the specific component in the gas to be measured.
このような構成によれば、金属製の第２ケーシングの内面が、被測定ガス中の特定成分を吸着せず、かつ被測定ガス中の特定成分と化学反応しない不活性コーティング材によって被覆されるため、第２ケーシング内で被測定ガス中の特定成分が化学反応することを抑制できる。その結果、被測定ガス中の特定成分の測定精度を高めることができる。　 According to such a configuration, the inner surface of the metallic second casing is covered with the inert coating material which does not adsorb the specific component in the gas to be measured and does not chemically react with the specific component in the gas to be measured Therefore, the chemical reaction of the specific component in the gas to be measured can be suppressed in the second casing. As a result, the measurement accuracy of the specific component in the gas to be measured can be enhanced.
本開示の一態様では、第２ケーシングには、第２ケーシング内に被測定ガスを導入するための導入口と、第２ケーシング内の被測定ガスを排出するための排出口と、が設けられてもよい。少なくとも導入口の内面は、不活性コーティング材によって被覆されてもよい。このような構成によれば、第２ケーシングに被測定ガスを導入する流路内における被測定ガス中の特定成分の化学反応も抑制できるため、被測定ガス中の特定成分の測定精度をさらに高めることができる。 In one aspect of the present disclosure, the second casing is provided with an inlet for introducing the measured gas into the second casing, and an outlet for discharging the measured gas in the second casing. May be At least the inner surface of the inlet may be coated with an inert coating material. According to such a configuration, the chemical reaction of the specific component in the gas to be measured in the flow path for introducing the gas to be measured into the second casing can also be suppressed, thereby further enhancing the measurement accuracy of the specific component in the gas to be measured be able to.
実施形態のガスセンサを示す模式的な断面図である。It is a typical sectional view showing a gas sensor of an embodiment. 図１とは異なる実施形態のガスセンサを示す模式的な断面図である。It is a schematic cross section which shows the gas sensor of embodiment different from FIG.
以下、本開示が適用された実施形態について、図面を用いて説明する。

　［１．第１実施形態］

　［１－１．構成］

　図１に示すガスセンサ１は、被測定ガスＧに含まれるガス成分の濃度を測定するためのガスセンサである。ガスセンサ１の測定対象のガス成分としては、窒素酸化物（ＮＯｘ）、二酸化炭素等が挙げられる。　 Hereinafter, embodiments to which the present disclosure is applied will be described using the drawings.

[1. First embodiment]

[1-1. Constitution]

The gas sensor 1 shown in FIG. 1 is a gas sensor for measuring the concentration of the gas component contained in the measurement gas G. Examples of gas components to be measured by the gas sensor 1 include nitrogen oxides (NOx) and carbon dioxide.
ガスセンサ１は、環境管理、プロセス管理、医療等の分野に使用できる。ガスセンサ１は、特に数ｐｐｂから数百ｐｐｂレベルの極低濃度のＮＯｘを含むガスの測定、具体的には喘息診断に好適に使用できる。　 The gas sensor 1 can be used in fields such as environmental management, process management, and medical care. The gas sensor 1 can be suitably used for measurement of a gas containing extremely low concentration of NOx, particularly at a level of several ppb to several hundreds ppb, specifically, for asthma diagnosis.
ガスセンサ１は、図１に示すように、触媒ユニット２と、センサユニット３と、流通路４と、１つのヒータ５と、隔壁６と、シール材７とを備える。なお、本実施形態での被測定ガスＧは呼気である。　 The gas sensor 1 is provided with the catalyst unit 2, the sensor unit 3, the flow path 4, the one heater 5, the partition 6, and the sealing material 7, as shown in FIG. The gas to be measured G in the present embodiment is exhalation.
＜触媒ユニット＞

　触媒ユニット２は、被測定ガスＧが含む成分を化学変化させる触媒部２Ａと、触媒部２Ａを格納する第１ケーシング２Ｂとを有する。　 <Catalyst unit>

The catalyst unit 2 includes a catalyst unit 2A that chemically changes a component included in the measurement gas G, and a first casing 2B that stores the catalyst unit 2A.
触媒部２Ａによる化学変化には、ある成分を他の成分に変換することや、ある成分を燃焼させることが含まれる。具体的には、触媒部２Ａは、ガスセンサ１が濃度を測定する成分をセンサ素子３Ａが検知可能な成分に変換する。また、触媒部２Ａは、ガスセンサ１が濃度を測定しない成分を燃焼する。例えば、喘息診断の場合では、触媒部２Ａは、測定対象であるＮＯをＮＯ２に変換すると共に、ＣＯ、Ｈ２、ＶＯＣ等の被測定ガスＧ（呼気）中に含まれる微量の還元ガスを燃焼させる。　 The chemical change by the catalyst unit 2A includes converting a certain component to another component and burning a certain component. Specifically, the catalyst unit 2A converts a component whose concentration is to be measured by the gas sensor 1 into a component detectable by the sensor element 3A. In addition, the catalyst unit 2A burns a component whose concentration is not measured by the gas sensor 1. For example, in the case of asthma diagnosis, the catalyst unit 2A converts NO to be measured into NO 2, and at the same time, trace amounts of reducing gas contained in the gas to be measured G (breath) such as CO, H 2 and VOC. Burn it.
触媒部２Ａは、被測定ガスＧが含む成分を化学変化させるための触媒と、触媒を担持する基体部とを有する。基体部内には、被測定ガスＧの流路が形成されている。触媒は、基体部の少なくともガス流路の内面に配置されている。　 The catalyst portion 2A has a catalyst for chemically changing a component contained in the measurement gas G, and a base portion supporting the catalyst. A flow path of the measurement gas G is formed in the base portion. The catalyst is disposed on at least the inner surface of the gas flow path of the base portion.
触媒部２Ａの基体部は、例えばアルミナ等のセラミックを主成分とする。触媒部２Ａの触媒は、用途や温度に応じて適宜選択される。触媒としては、例えば白金、ロジウム、金等の貴金属、それら貴金属の粒子を例えばγアルミナやゼオライトに担持させた担持体、又は、例えば酸化マンガン、酸化コバルト、酸化錫等の金属酸化物が使用される。　 The base portion of the catalyst portion 2A contains, for example, a ceramic such as alumina as a main component. The catalyst of catalyst part 2A is suitably selected according to a use and temperature. As the catalyst, for example, noble metals such as platinum, rhodium and gold, supports obtained by supporting particles of such noble metals on, for example, γ alumina and zeolite, or metal oxides such as manganese oxide, cobalt oxide and tin oxide are used. Ru.
第１ケーシング２Ｂは、センサユニット３と対向する面が開口しており、この開口面が後述する隔壁６によって塞がれている。触媒部２Ａは、第１ケーシング２Ｂと隔壁６とによって画定される内部空間に配置されている。具体的には、触媒部２Ａは、隔壁６と、第１ケーシング２Ｂの内面のうち隔壁６と対向する面とに固定されている。　 The first casing 2B is open at a surface facing the sensor unit 3, and the opening surface is closed by a partition 6 described later. The catalyst portion 2A is disposed in an internal space defined by the first casing 2B and the partition wall 6. Specifically, the catalyst portion 2A is fixed to the partition wall 6 and a surface of the inner surface of the first casing 2B facing the partition wall 6.
第１ケーシング２Ｂは、隔壁６と対向するフランジ２Ｃを有する。また、第１ケーシング２Ｂには、第１ケーシング２Ｂの内部空間と外部とをそれぞれ連通する導入口２Ｄ及び排出口２Ｅが設けられている。排出口２Ｅには、後述する流通路４が接続されている。第１ケーシング２Ｂは、例えば、アルミニウム、ステンレス（ＳＵＳ）等の金属で形成される。　 The first casing 2B has a flange 2C facing the partition wall 6. Further, the first casing 2B is provided with an inlet 2D and an outlet 2E that respectively communicate the internal space of the first casing 2B with the outside. A flow passage 4 described later is connected to the discharge port 2E. The first casing 2B is formed of, for example, a metal such as aluminum or stainless steel (SUS).
導入口２Ｄから第１ケーシング２Ｂ内に導入された被測定ガスＧは、触媒部２Ａの触媒に接触しながら、排出口２Ｅから第１ケーシング２Ｂの外（具体的には第２ケーシング３Ｂ内）に排出される。　 The to-be-measured gas G introduced into the first casing 2B from the inlet 2D contacts the catalyst of the catalyst portion 2A while the outside of the first casing 2B from the outlet 2E (specifically, in the second casing 3B) Discharged into
＜センサユニット＞

　センサユニット３は、触媒ユニット２を通過した被測定ガスＧ中の特定成分（つまり測定対象成分）を検知するように構成されたセンサ素子３Ａと、センサ素子３Ａを格納する第２ケーシング３Ｂとを有する。　 <Sensor unit>

The sensor unit 3 includes a sensor element 3A configured to detect a specific component (that is, a measurement target component) in the measurement gas G that has passed through the catalyst unit 2, and a second casing 3B storing the sensor element 3A. Have.
センサ素子３Ａは、混成電位式の検知体を有し、検知体はセラミックからなるベース基板に搭載されている。センサ素子３Ａは、さらに測温用抵抗体を有してもよい。混成電位式の検知体は、公知であるため詳述はしないが、例えば、ジルコニアからなる固体電解質体と、それぞれ異なる材料からなる電極とを有し、これら電極間の電位差をセンサ信号として出力する構成を有する。なお、センサ素子３Ａの検知体としては、これに限定されず、検知対象のガス成分の存在により自身の抵抗が変化する金属酸化物半導体からなる検知体や、容量変化型の検知体を使用してもよい。検知体及び測温用抵抗体は、隔壁６に形成された配線に電気的に接続され、外部から電力が供給される。　 The sensor element 3A has a mixed potential type detection body, and the detection body is mounted on a base substrate made of ceramic. The sensor element 3A may further include a temperature measuring resistor. The mixed potential type detection body is not described in detail because it is known, for example, has a solid electrolyte body made of zirconia and electrodes made of different materials, and outputs the potential difference between these electrodes as a sensor signal It has composition. The detection body of the sensor element 3A is not limited to this, and a detection body made of a metal oxide semiconductor whose resistance changes due to the presence of a gas component to be detected, or a capacitance change type detection body is used May be The detection body and the resistance for temperature measurement are electrically connected to the wiring formed in the partition wall 6, and power is supplied from the outside.
第２ケーシング３Ｂは、触媒ユニット２と対向する面が開口しており、この開口面が隔壁６によって塞がれている。センサ素子３Ａは、第２ケーシング３Ｂと隔壁６とによって画定される内部空間に配置されている。具体的には、センサ素子３Ａは、隔壁６に固定されている。　 The second casing 3 B is open at the surface facing the catalyst unit 2, and the opening surface is closed by the partition wall 6. The sensor element 3A is disposed in an internal space defined by the second casing 3B and the partition wall 6. Specifically, the sensor element 3A is fixed to the partition wall 6.
第２ケーシング３Ｂは、隔壁６と対向するフランジ３Ｃを有する。また、第２ケーシング３Ｂには、第２ケーシング３Ｂの内部空間と外部とをそれぞれ連通する導入口３Ｄ及び排出口３Ｅが設けられている。　 The second casing 3B has a flange 3C that faces the partition wall 6. Further, the second casing 3B is provided with an inlet 3D and an outlet 3E that respectively communicate the internal space of the second casing 3B with the outside.
導入口３Ｄは、第２ケーシング３Ｂ内に被測定ガスＧを導入する。また、導入口３Ｄには、流通路４が接続されている。排出口３Ｅは、第２ケーシング３Ｂ内の被測定ガスＧを排出する。第２ケーシング３Ｂは、例えば、アルミニウム、ステンレス（ＳＵＳ）等の金属で形成される。　 The inlet 3D introduces the measurement gas G into the second casing 3B. Moreover, the flow passage 4 is connected to the inlet 3D. The exhaust port 3E exhausts the measurement gas G in the second casing 3B. The second casing 3B is formed of, for example, a metal such as aluminum or stainless steel (SUS).
第２ケーシング３Ｂの内面は、被測定ガス中Ｇの特定成分を吸着せず、かつ被測定ガス中の特定成分と化学反応しない不活性コーティング材によって被覆されている。つまり、第２ケーシング３Ｂは、不活性コーティング材で形成されたコーティング層３Ｆを有する。なお、不活性コーティング材は、被測定ガスＧが含む成分に対する触媒作用も有しないか、少なくとも第２ケーシング３Ｂを構成する金属に比べて被測定ガスＧが含む成分に対する触媒作用が小さいとよい。　 The inner surface of the second casing 3B is coated with an inert coating material that does not adsorb a specific component of G in the measurement gas and does not chemically react with the specific component in the measurement gas. That is, the second casing 3B has the coating layer 3F formed of the inert coating material. The inert coating material preferably has no catalytic action on the components contained in the gas to be measured G, or at least a smaller catalytic action on the components contained in the gas to be measured G than the metal constituting the second casing 3B.
コーティング層３Ｆは、第２ケーシング３Ｂの内面に積層されている。コーティング層３Ｆは、被測定ガスＧの特定成分を通過させないように緻密に形成されている。つまり、コーティング層３Ｆは、被測定ガスＧの特定成分が第２ケーシング３Ｂに接触することを阻止する。　 The coating layer 3F is laminated on the inner surface of the second casing 3B. The coating layer 3F is densely formed so as not to allow a specific component of the measurement gas G to pass through. That is, the coating layer 3F prevents the specific component of the measurement gas G from contacting the second casing 3B.
不活性コーティング材としては、ガスセンサ１の使用時、つまりヒータ５によって加熱された状態で化学的に安定した物質のうち、この加熱状態において被測定ガス中Ｇの特定成分を吸着せず、かつ被測定ガス中の特定成分と化学反応しない物質であれば、特に限定されない。　 The inert coating material does not adsorb a specific component of G in the gas to be measured in this heated state among the substances chemically stabilized when the gas sensor 1 is used, that is, in the state heated by the heater 5. It is not particularly limited as long as it is a substance that does not chemically react with a specific component in the measurement gas.
不活性コーティング材としては、アルミナ、ポリテトラフルオロエチレン等のフッ素樹脂などが例示される。また、コーティング層３Ｆは、例えば、スパッタリング、ゾルゲル法、ゾル液の塗布等の手法によって形成することができる。　 The inert coating material may, for example, be a fluorine resin such as alumina or polytetrafluoroethylene. The coating layer 3F can be formed, for example, by a method such as sputtering, sol-gel method, application of a sol solution, or the like.
導入口３Ｄ（つまり流通路４）から第２ケーシング３Ｂ内に導入された被測定ガスＧは、センサ素子３Ａに接触しながら、排出口３Ｅから第２ケーシング３Ｂの外（具体的にはガスセンサ１の系外）に排出される。　 The measured gas G introduced into the second casing 3B from the inlet 3D (that is, the flow passage 4) contacts the sensor element 3A, and the outside of the second casing 3B from the outlet 3E (specifically, the gas sensor 1) Out of the system).
＜流通路＞

　流通路４は、第１ケーシング２Ｂ内の被測定ガスＧを、第２ケーシング３Ｂ内に供給する。流通路４は、第１ケーシング２Ｂの排出口２Ｅと、第２ケーシング３Ｂの導入口３Ｄとを連結する配管である。　 <Flow passage>

The flow passage 4 supplies the measurement gas G in the first casing 2B into the second casing 3B. The flow passage 4 is a pipe that connects the outlet 2E of the first casing 2B and the inlet 3D of the second casing 3B.
＜ヒータ＞

　ヒータ５は、触媒ユニット２とセンサユニット３とを同時に加熱する。本実施形態では、ヒータ５は、センサ素子３Ａ内に配置されている。ヒータ５をセンサ素子３Ａ内に配置することで、触媒ユニット２よりも高温で温度制御を行う必要のあるセンサ素子３Ａの温度制御が可能となる。なお、測温用抵抗体からの出力を用いてヒータ５の通電制御を行うことで、センサ素子３Ａの温度制御を精度の高いものにすることも可能である。　 <Heater>

The heater 5 heats the catalyst unit 2 and the sensor unit 3 simultaneously. In the present embodiment, the heater 5 is disposed in the sensor element 3A. By arranging the heater 5 in the sensor element 3A, temperature control of the sensor element 3A that needs to be temperature controlled at a temperature higher than that of the catalyst unit 2 becomes possible. In addition, it is also possible to make temperature control of sensor element 3A highly accurate by performing energization control of heater 5 using an output from a temperature measuring resistor.
本実施形態では、１つのヒータ５で触媒ユニット２とセンサユニット３とを同時に加熱できるため、ガスセンサ１の消費電力を低減できる。また、ガスセンサ１の構造を簡素化することができる。　 In the present embodiment, since the catalyst unit 2 and the sensor unit 3 can be simultaneously heated by one heater 5, the power consumption of the gas sensor 1 can be reduced. In addition, the structure of the gas sensor 1 can be simplified.
ヒータ５は、例えば白金等の金属配線（つまり負荷抵抗）によって構成される。ヒータ５は、隔壁６に形成された配線に電気的に接続され、外部から電力が供給されることで発熱する。　 The heater 5 is formed of, for example, metal wiring such as platinum (that is, load resistance). The heater 5 is electrically connected to the wiring formed in the partition 6 and generates heat when power is supplied from the outside.
＜隔壁及びシール材＞

　隔壁６は、第１ケーシング２Ｂと第２ケーシング３Ｂとに挟持され、触媒部２Ａが配置される空間と、センサ素子３Ａが配置される空間とを仕切るように配置されている。　 Partition wall and sealing material

The partition wall 6 is interposed between the first casing 2B and the second casing 3B, and is arranged to separate a space in which the catalyst portion 2A is disposed and a space in which the sensor element 3A is disposed.
具体的には、隔壁６は、第１ケーシング２Ｂのフランジ２Ｃと、第２ケーシング３Ｂのフランジ３Ｃとの間に配置されている。また、隔壁６と２つのフランジ２Ｃ，３Ｃとの間には、それぞれリング状のシール材７が配置され、気密が確保されている。　 Specifically, the dividing wall 6 is disposed between the flange 2C of the first casing 2B and the flange 3C of the second casing 3B. Further, a ring-shaped seal member 7 is disposed between the partition wall 6 and the two flanges 2C and 3C, respectively, to ensure air tightness.
つまり、隔壁６は、２つのシール材７を介して、第１ケーシング２Ｂのフランジ２Ｃと、第２ケーシング３Ｂのフランジ３Ｃとによって厚み方向に挟持されている。第１ケーシング２Ｂのフランジ２Ｃと、第２ケーシング３Ｂのフランジ３Ｃとは、例えば、厚み方向の締結によって固定されている。シール材７としては、例えばポリテトラフルオロエチレン等のフッ素樹脂を主成分とするガスケットが使用される。　 That is, the partition wall 6 is sandwiched in the thickness direction by the flange 2C of the first casing 2B and the flange 3C of the second casing 3B via the two seal members 7. The flange 2C of the first casing 2B and the flange 3C of the second casing 3B are fixed, for example, by fastening in the thickness direction. As the sealing material 7, for example, a gasket containing a fluorine resin such as polytetrafluoroethylene as a main component is used.
隔壁６の一部は、フランジ２Ｃ，３Ｃの外側まで延伸している。隔壁６は、その表面又は内部に配置された配線を有する。この配線は、センサ素子３Ａ及びヒータ５と外部回路とを接続するためのものであり、電極パッドを有する。電極パッドには、センサ素子３Ａ及びヒータ５が、抵抗溶接、ボンディング等によって電気的に接続されている。　 A part of the partition 6 extends to the outside of the flanges 2C and 3C. The partition 6 has a wiring disposed on the surface or inside thereof. The wiring is for connecting the sensor element 3A and the heater 5 to an external circuit, and has an electrode pad. The sensor element 3A and the heater 5 are electrically connected to the electrode pad by resistance welding, bonding or the like.
隔壁６の材質は特に限定されないが、隔壁６は例えばセラミックを主成分とする。ここで、「主成分」とは、８０質量％以上含有される成分を意味する。また、隔壁６に用いるセラミックとしては絶縁性セラミック（例えば、アルミナ）が好ましい。　 The material of the partition 6 is not particularly limited, but the partition 6 is mainly made of, for example, ceramic. Here, "main component" means a component contained at 80% by mass or more. Moreover, as a ceramic used for the partition 6, an insulating ceramic (for example, alumina) is preferable.
隔壁６は、触媒部２Ａ及びセンサ素子３Ａが配置された配置部６Ａの厚みが他の部分の厚みよりも小さい。換言すれば、触媒部２Ａ及びセンサ素子３Ａは、隔壁６において他の部分よりも薄肉化された配置部６Ａに固定されている。　 In the partition wall 6, the thickness of the arrangement portion 6A in which the catalyst portion 2A and the sensor element 3A are disposed is smaller than the thickness of the other portions. In other words, the catalyst portion 2A and the sensor element 3A are fixed to the arrangement portion 6A which is thinner than the other portions in the partition wall 6.
［１－２．効果］

　以上詳述した実施形態によれば、以下の効果が得られる。

　（１ａ）金属製の第２ケーシング３Ｂの内面が、不活性コーティング材によって被覆されるため、第２ケーシング３Ｂ内で被測定ガスＧ中の特定成分が化学反応することを抑制できる。その結果、被測定ガスＧ中の特定成分の測定精度を高めることができる。　 [1-2. effect]

According to the embodiment described above, the following effects can be obtained.

(1a) Since the inner surface of the metallic second casing 3B is covered with the inert coating material, it is possible to suppress the chemical reaction of the specific component in the measurement gas G in the second casing 3B. As a result, the measurement accuracy of the specific component in the measurement gas G can be enhanced.
［２．第２実施形態］

　［２－１．構成］

　図２に示すガスセンサ１１は、図１に示すガスセンサ１と同様、被測定ガスＧに含まれるガス成分の濃度を測定するためのガスセンサである。　 [2. Second embodiment]

[2-1. Constitution]

Like the gas sensor 1 shown in FIG. 1, the gas sensor 11 shown in FIG. 2 is a gas sensor for measuring the concentration of the gas component contained in the measurement gas G.
ガスセンサ１１は、触媒ユニット２と、センサユニット１３と、流通路４と、１つのヒータ５と、隔壁６と、シール材７とを備える。　触媒ユニット２、流通路４、ヒータ５、隔壁６、及びシール材７は、図１のガスセンサ１と同じものであるため、同一符号を付して説明を省略する。　 The gas sensor 11 includes a catalyst unit 2, a sensor unit 13, a flow passage 4, one heater 5, a partition 6, and a sealing material 7. The catalyst unit 2, the flow passage 4, the heater 5, the partition wall 6, and the seal member 7 are the same as the gas sensor 1 of FIG.
センサユニット１３は、コーティング層１３Ｆを除いて、図１のセンサユニット３と同じものである。　本実施形態のコーティング層１３Ｆは、第２ケーシング３Ｂの内面に加えて、第２ケーシング３Ｂの導入口３Ｄ及び排出口３Ｅの内面にも積層されている。つまり、導入口３Ｄ及び排出口３Ｅは、不活性コーティング材によって被覆されている。　 The sensor unit 13 is the same as the sensor unit 3 of FIG. 1 except for the coating layer 13F. The coating layer 13F of the present embodiment is laminated on the inner surface of the inlet 3D and the outlet 3E of the second casing 3B in addition to the inner surface of the second casing 3B. That is, the inlet 3D and the outlet 3E are covered with the inert coating material.
［２－２．効果］

　以上詳述した実施形態によれば、以下の効果が得られる。

　（２ａ）第２ケーシング３Ｂの導入口３Ｄ及び排出口３Ｅの内面が不活性コーティング材によって被覆されることで、第２ケーシング３Ｂに連通する流路内における被測定ガスＧ中の特定成分の化学反応も抑制できる。そのため、被測定ガスＧ中の特定成分の測定精度をさらに高めることができる。　 [2-2. effect]

According to the embodiment described above, the following effects can be obtained.

(2a) By coating the inner surface of the inlet 3D and the outlet 3E of the second casing 3B with the inert coating material, the chemistry of the specific component in the measurement gas G in the flow passage communicating with the second casing 3B The reaction can also be suppressed. Therefore, the measurement accuracy of the specific component in the measurement gas G can be further enhanced.
［３．他の実施形態］

　以上、本開示の実施形態について説明したが、本開示は、上記実施形態に限定されることなく、種々の形態を採り得ることは言うまでもない。　 [3. Other embodiments]

As mentioned above, although embodiment of this indication was described, it can not be overemphasized that this indication can take various forms, without being limited to the above-mentioned embodiment.
（３ａ）上記実施形態のガスセンサ１，１１において、第１ケーシング２Ｂと第２ケーシング３Ｂとを配管ではなく、隔壁６に設けた貫通孔で接続してもよい。つまり、流通路４を第１ケーシング２Ｂと第２ケーシング３Ｂとを貫通する貫通孔で構成してもよい。　 (3a) In the gas sensors 1 and 11 of the above-described embodiment, the first casing 2B and the second casing 3B may be connected not by piping but by through holes provided in the partition wall 6. That is, the flow passage 4 may be configured by a through hole that penetrates the first casing 2B and the second casing 3B.
また、ガスセンサ１，１１は、必ずしも隔壁６及びシール材７を備えなくてもよい。第１ケーシング２Ｂと第２ケーシング３Ｂとは、離間して配置されてもよいし、隔壁６を介さずに接合されていてもよい。　 In addition, the gas sensors 1 and 11 may not necessarily include the partition wall 6 and the sealing material 7. The first casing 2 </ b> B and the second casing 3 </ b> B may be disposed apart from each other, or may be joined without the partition wall 6.
（３ｂ）上記実施形態のガスセンサ１，１１において、ヒータ５は、センサ素子３Ａと隔壁６との間、触媒部２Ａの内部、又は触媒部２Ａと隔壁６との間に配置されてもよい。また、ガスセンサ１，１１は、触媒部２Ａを加熱する第１ヒータと、センサ素子３Ａを加熱する第２ヒータとを備えてもよい。　 (3b) In the gas sensors 1 and 11 of the above embodiment, the heater 5 may be disposed between the sensor element 3A and the partition 6, inside the catalyst unit 2A, or between the catalyst unit 2A and the partition 6. In addition, the gas sensors 1 and 11 may include a first heater that heats the catalyst unit 2A and a second heater that heats the sensor element 3A.
（３ｃ）上記実施形態のガスセンサ１，１１において、第１ケーシング２Ｂ及び第２ケーシング３Ｂは、それぞれ配管によって構成されてもよい。つまり、触媒部２Ａ及びセンサ素子３Ａは、それぞれ配管の内部に配置されてもよい。　 (3c) In the gas sensors 1 and 11 of the above-described embodiment, the first casing 2B and the second casing 3B may each be formed by piping. That is, the catalyst portion 2A and the sensor element 3A may be respectively disposed inside the pipe.
（３ｄ）上記実施形態のガスセンサ１，１１において、触媒ユニット２の第１ケーシング２Ｂの内面に不活性コーティング材を被覆してもよい。これによって、被測定ガスＧ中の特定成分の化学反応をより確実に抑制できる。　 (3d) In the gas sensors 1 and 11 of the above embodiment, the inner surface of the first casing 2B of the catalyst unit 2 may be coated with an inert coating material. By this, the chemical reaction of the specific component in the to-be-measured gas G can be suppressed more reliably.
（３ｅ）上記第２実施形態のガスセンサ１１では、コーティング層１３Ｆを第２ケーシング３Ｂの導入口３Ｄ及び排出口３Ｅの内面の双方に設けたが、ガスセンサ１１において、コーティング層１３Ｆを、第２ケーシング３Ｂの導入口３Ｄの内面にのみ設ける構成としてもよい。導入口３Ｄ側にコーティング層１３Ｆを設けておくことで、触媒による化学変化を経た被測定ガスの成分と導入口３Ｄの内面との間での化学反応を抑制する効果をもたらすことができるからである。　 (3e) In the gas sensor 11 according to the second embodiment, the coating layer 13F is provided on both the inlet 3D of the second casing 3B and the inner surface of the outlet 3E. However, in the gas sensor 11, the coating layer 13F is a second casing It may be configured to be provided only on the inner surface of the inlet 3D of 3B. By providing the coating layer 13F on the inlet 3D side, the effect of suppressing the chemical reaction between the component of the gas to be measured which has undergone a chemical change by the catalyst and the inner surface of the inlet 3D can be brought about. is there.
（３ｆ）上記実施形態における１つの構成要素が有する機能を複数の構成要素として分散させたり、複数の構成要素が有する機能を１つの構成要素に統合したりしてもよい。また、上記実施形態の構成の一部を省略してもよい。また、上記実施形態の構成の少なくとも一部を、他の上記実施形態の構成に対して付加、置換等してもよい。なお、特許請求の範囲に記載の文言から特定される技術思想に含まれるあらゆる態様が本開示の実施形態である。 (3f) The functions of one component in the above embodiment may be distributed as a plurality of components, or the functions of a plurality of components may be integrated into one component. In addition, part of the configuration of the above embodiment may be omitted. In addition, at least a part of the configuration of the above-described embodiment may be added to or replaced with the configuration of the other above-described embodiment. In addition, all the aspects contained in the technical thought specified from the wording as described in a claim are an embodiment of this indication.
１…ガスセンサ、２…触媒ユニット、２Ａ…触媒部、２Ｂ…第１ケーシング、

　２Ｃ…フランジ、２Ｄ…導入口、２Ｅ…排出口、３…センサユニット、

　３Ａ…センサ素子、３Ｂ…第２ケーシング、３Ｃ…フランジ、３Ｄ…導入口、

　３Ｅ…排出口、３Ｆ…コーティング層、４…流通路、５…ヒータ、６…隔壁、

　６Ａ…配置部、７…シール材、１１…ガスセンサ、１３…センサユニット、

　１３Ｆ…コーティング層。 DESCRIPTION OF SYMBOLS 1 ... Gas sensor, 2 ... catalyst unit, 2A ... catalyst part, 2B ... 1st casing,

2C: flange, 2D: inlet, 2E: outlet, 3: sensor unit,

3A: sensor element, 3B: second casing, 3C: flange, 3D: inlet,

3E: discharge port, 3F: coating layer, 4: flow passage, 5: heater, 6: partition wall,

6A ... arrangement portion, 7 ... sealing material, 11 ... gas sensor, 13 ... sensor unit,

13F ... coating layer.

Claims (2)

  1. 被測定ガスに含まれる成分の濃度を測定するためのガスセンサであって、

    　被測定ガスに含まれる成分を化学変化させるための触媒と、前記触媒を格納する第１ケーシングとを有する触媒ユニットと、

    　前記触媒ユニットを通過した前記被測定ガス中の特定成分を検知するように構成されたセンサ素子と、前記センサ素子を格納する金属製の第２ケーシングとを有するセンサユニットと、

    　前記触媒ユニットと前記センサユニットとを加熱するように構成された少なくとも１つのヒータと、

    　を備え、

    　前記第２ケーシングの内面は、前記被測定ガス中の特定成分を吸着せず、かつ前記被測定ガス中の特定成分と化学反応しない不活性コーティング材によって被覆される、ガスセンサ。     A gas sensor for measuring the concentration of a component contained in a gas to be measured,

    A catalyst unit having a catalyst for chemically changing a component contained in a gas to be measured, and a first casing for storing the catalyst;

    A sensor unit having a sensor element configured to detect a specific component in the gas to be measured which has passed through the catalyst unit, and a metal second casing for storing the sensor element;

    At least one heater configured to heat the catalyst unit and the sensor unit;

    Equipped with

    A gas sensor, wherein an inner surface of the second casing is covered with an inert coating material which does not adsorb a specific component in the gas to be measured and does not chemically react with the specific component in the gas to be measured.
  2. 前記第２ケーシングには、前記第２ケーシング内に前記被測定ガスを導入するための導入口と、前記第２ケーシング内の前記被測定ガスを排出するための排出口と、が設けられ、

    　少なくとも前記導入口の内面は、前記不活性コーティング材によって被覆される、請求項１に記載のガスセンサ。     The second casing is provided with an inlet for introducing the gas to be measured into the second casing, and an outlet for discharging the gas to be measured in the second casing,

    The gas sensor according to claim 1, wherein at least the inner surface of the inlet is coated with the inert coating material.
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JPH0666701A (en) * 1992-08-21 1994-03-11 Toyoe Moriizumi Odor identifying apparatus
JPH10300702A (en) * 1997-04-24 1998-11-13 Ngk Insulators Ltd Low-concentration nox measuring instrument
JP2005214933A (en) * 2004-02-02 2005-08-11 Shimadzu Corp Hydrogen sensor
JP2009533682A (en) * 2006-04-14 2009-09-17 セラマテック・インク Apparatus and method for measuring nitrogen oxides in exhaled breath
JP2017503153A (en) * 2013-11-20 2017-01-26 マシイネンフアブリーク・ラインハウゼン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Apparatus and method for detecting gas
JP2018004583A (en) * 2016-07-08 2018-01-11 日本特殊陶業株式会社 Gas sensor
WO2018110117A1 (en) * 2016-12-14 2018-06-21 日本特殊陶業株式会社 Exhalation sensor
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0666701A (en) * 1992-08-21 1994-03-11 Toyoe Moriizumi Odor identifying apparatus
JPH10300702A (en) * 1997-04-24 1998-11-13 Ngk Insulators Ltd Low-concentration nox measuring instrument
JP2005214933A (en) * 2004-02-02 2005-08-11 Shimadzu Corp Hydrogen sensor
JP2009533682A (en) * 2006-04-14 2009-09-17 セラマテック・インク Apparatus and method for measuring nitrogen oxides in exhaled breath
JP2017503153A (en) * 2013-11-20 2017-01-26 マシイネンフアブリーク・ラインハウゼン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Apparatus and method for detecting gas
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