WO2019143075A1

WO2019143075A1 - Bell jar coating equipment of cvd reactor for preparing polysilicon, and coating method using same

Info

Publication number: WO2019143075A1
Application number: PCT/KR2019/000485
Authority: WO
Inventors: 전효진; 김지호; 박성은
Original assignee: 한화케미칼 주식회사
Priority date: 2018-01-17
Filing date: 2019-01-11
Publication date: 2019-07-25
Also published as: KR20190087780A; KR102340294B1

Abstract

Coating equipment according to one embodiment of the present invention is bell jar coating equipment of a CVD reactor, and comprises: a bell jar which is an outer chamber; a coater disposed inside the bell jar so as to coat the inner surface of the bell jar; and a driving part coupled to the lower part of the bell jar so as to rotate the bell jar.

Description

DESCRIPTION OF THE INVENTION

Title of the Invention

Belzer coating equipment of _CVD reactor for the production of polysilicon and coating method using the same

5 【Technical Field】

Cross-reference with related application (s)

This application claims the benefit of priority based on _₁₁₇ dates Korea Patent Application No. _{10-2018 0006021} Ho February _2018, and all information disclosed in the literature of the Korea patent application are included as part of the specification.

_The present invention relates to a coating apparatus and a coating method using the coating apparatus, and more particularly, to a bell-jar coating apparatus for a CVD (chemical vapor deposition) reactor for producing polysilicon and a coating method using the same.

BACKGROUND ART [0002]

Silicon has to be used as a raw material in the manufacture of a semiconductor or a solar cell, an increasing demand for high purity silicon suitable as a raw material for a solar cell or semiconductor _15. Polysilicon is a compound with high purity and polycrystalline molecular structure. It has excellent water repellency, fire resistance, oxidation stability, low temperature stability and gas permeability compared with general silicon. And about _90% of polysilicon production process uses Siemens method .

_{20 The} silicon production using the Siemens process is performed by firstly reacting the metal silicon with a reaction gas such as hydrogen chloride to vaporize the silicon source gas containing monosilane, disilane or trichlorosilane, and distillation Remove impurities. Generally, the Siemens method, in which a silicon rod is installed in a beU-jar type reactor, then injects silicon-containing gas into the reaction chamber through a gas inlet while applying ₂₅ current to the silicon rod. At this time, the surface of the silicon rod is heated by the applied current, and the introduced gas is thermally decomposed and deposited on the heated silicon rod to generate silicon.

This Siemens method should be carried out at high temperatures,

_{30 a} large amount of electricity is discharged to the outside, and the power consumption is large. 2019/143075 1 ^» (: 1 ^ {2019/000485

Much of the power consumption is lost to radiation convection, conduction, gas heating, and reaction heat.

The existing U.S. Patent _Application Publication No. _2011-0159214 attempts to reduce radiant heat loss by coating the reactor with gold, but it is economically disadvantageous because it is expensive 5. U.S. Patent Publication No. _2015-0184290 discloses a _method of reducing radiation energy loss by applying a metal or nitride capable of securing economical efficiency compared to gold,

Is increased at ₁₀ have the disadvantage that easy separation is difficult to secure, coating uniformity, and finally, is an increase in cost to the increase in the number of coating a low economic efficiency

It is necessary to develop a technology to lower the heat loss of the Siemens method and increase the uniformity of the coating to improve the economical efficiency.

DISCLOSURE OF THE INVENTION

₁₅ 【Technical Problems】

Embodiments of the present invention have been proposed in order to solve the above-described problems of the previously proposed methods. The present invention provides a method of manufacturing a polysilicon by lowering the heat loss in the polysilicon manufacturing process, and to provide a poly bell jar 0 ₁₁₎ ₂₀ coating equipment and a coating method using the same for producing a silicon reactor for that purpose.

However, the problems to be solved by the embodiments of the present invention are not limited to the above-mentioned problems, but can be variously expanded within the scope of the technical idea included in the present invention.

[Technical Solution]

₂₅ A coating apparatus according to an embodiment of the present invention is a bell-coating apparatus of a reactor for producing polysilicon, A coater disposed inside the bell jar for coating the inner surface of the bell jar, and a driving unit coupled to a lower portion of the bell jar for rotating the bell jar.

The driving unit includes: a motor generating a driving force; A driving gear rotated by ₃₀ rotations to the motor; And an upper end of the driving part is connected to a lower surface of the bell jar And one side of the driving unit facing the inside may be in contact with the driving gear, and the turntable may be rotated by the rotation of the driving gear to engage with one side of the driving unit.

A guide portion coupled to a lower end of the turntable and disposed on an outer side of the drive portion, the guide portion having a groove formed downward; _first support; and placed on the lower side of the guide part is, one surface may be a _second support portion that is provided connected to the _first support part, the upper part fixed to be moved through the groove of the guide part.

The _second support portion may have a vertical surface connected to the fixing portion and a horizontal surface disposed perpendicularly to the vertical surface at a lower end of the vertical surface. Wherein the _first support portion, said guide portion and said turntable is fixed bond between the _first support portion is connected to the _second support portion and a plurality of cam followers _(Cam Follower) it can be moved along the surface of the second support have

The driving unit may further include a sealing member for holding the inside of the bellows in a vacuum state.

The sealing member may include at least one of a magnetic seal and an energized seal.

Wherein the bell jar includes a head disposed on an upper side and a side wall disposed on a lower side connected to the head, wherein the coater includes: an upper coating portion for coating the head of the bell jar; And may include a lower coating portion for coating the side wall of the bell jar.

Each of the upper coating portion and the lower coating portion may include a cathode.

The cathode provided in the upper coating part may be a cylindrical cathode.

The cathode provided in the lower coating part may be a rotary cathode.

The upper coating portion may include a plurality of cathodes.

The lower coating portion may include a plurality of cathodes. The coater may further include a vacuum pump.

The vacuum pump may be a rotary comprising a booster pump _{(Rotary booster pump),} the turbo-molecular pump for the high-vacuum pump _{(TMP, Turbo} _{molecular pump)} Heavy or above for the low vacuum pump.

₅ The coater may further include a heater for heating the bell jar.

The heater may be a heater for the head of the bell jar and a heater for the side wall. The coating film coated on the inner surface of the bell jar by the coater may be a multilayer reflective coating film.

Wherein the reflective coating layer comprises: a reflective coating layer formed toward the inner space of the bell jar and reflecting _ten rows; And a buffer layer formed between the reflective coating layer and the inner surface of the bell jar.

The reflective coating layer can be formed of a material having high corrosion resistance at high temperatures and a material having high reflectivity.

The reflective nose tangcheung silver, can be made hangeoteuro combining compounds, gold, gold compounds, nickel, nickel alloy, and compound ₁₅ any one or at least two or more of them selected from the group consisting of a.

The reflective coating layer may have a thermal reflectivity of _80% or more in the ultraviolet visible ( _UV-Vis) and near _- infrared ( _NIR) regions.

_Wherein the buffer layer is selected from the group consisting of _{SUS 304} , _SUS _{316, an} iron-iron alloy, a titanium- ₂₀ titanium alloy copper, a copper alloy, a nickel and nickel alloy, a molybdenum and molybdenum alloy, One or a combination of at least two of these.

In one embodiment of the present invention, the coating method is a coating method using a bell-coating apparatus of a _CVD ₂₅ reactor for producing polysilicon, comprising the steps of: placing a bell of a _CVD reactor outside of a coater as an outer chamber; A driving unit coupled to a lower portion of the bell jar, the step of rotating the bell jar; And the coater disposed within the bell jar, coating the inner surface of the bell jar. And heating the bell jar with a heater.

₃₀ EFFECT OF THE INVENTION 2019/143075 1 ^» (: 1 ^ {2019/000485

According to the embodiments of the present invention, in order to lower the radiant heat loss in the Siemens method, the present invention relates to a bell-jar coating apparatus for coating the interior of a bell jar of a reactor, It is possible to reduce the heat loss and ensure the uniformity of the coating when manufacturing the polysilicon by the 5 Siemens method, thereby improving the economical efficiency.

BRIEF DESCRIPTION OF THE DRAWINGS

BRIEF DESCRIPTION OF THE DRAWINGS FIG. ₁ is a view showing the entire construction of a coating equipment according to an embodiment of the present invention; FIG.

Figure ₁₀ shows cut bell according to one embodiment of the _second invention neunbon.

₃ is a view showing a coater according to an embodiment of the present invention.

₄ is a view showing the configuration of a coater according to an embodiment of the present invention.

FIG. ₅ is a view showing _fifteen aspects of a coating apparatus in which a bell self is combined according to an embodiment of the present invention.

₆ is an enlarged view of a portion of a driving unit according to an embodiment of the present invention.

FIG. ₇ is a view ₂₀ illustrating a coating method using a bayer coating apparatus of a reactor for producing polysilicon according to an embodiment of the present invention.

DETAILED DESCRIPTION OF THE INVENTION

Hereinafter, a detailed description to be easily implemented by those of ordinary skill in the art with respect to the various embodiments of the present invention will be described with the accompanying drawings as a reference. The present invention ₂₅ in many different forms And is not limited to the embodiments described herein.

In order to clearly illustrate the present invention, parts not related to the description are omitted, and the same or similar components are denoted by the same reference numerals throughout the specification. In addition, because each configuration of the size and thickness shown in the figures were arbitrarily shown for convenience of explanation, and is not limited _{to 30} bar, to which the present invention necessarily shown. 2019/143075 1 ^» (: 1 ^ {2019/000485

Also _, throughout the specification, when an element is _referred to as _" comprising _" , it means that it may include other elements as well, without excluding other elements unless specifically stated otherwise.

_{5 In} addition, in the entire specification, in the case of a "plane", this means that the object portion is viewed from above, and when it is referred to as "section," this means that the object portion is viewed from the side.

₁₀ As shown in FIG. ₁ , the coating equipment ₁₀ according to the present embodiment

The bell jar _{100, and} is disposed in the interior of the bell jar ₁₀₀₎ coupled to the interior of the bell jar (coater ₂₀₀ and the bell jar ₁₀₀ to coat the inner surface ₁₀₀₎ including a driver ₃₀₀ for rotating the bell jar ₁₀₀ As a feature of the configuration.

Figure ₁₅ shows cut bell according to one embodiment of the _second invention neunbon.

Bell jar according to the present embodiment ₁₀₀ is also connected to the head ₁₁₀ and the head ₁₁₀ is disposed on the upper side as shown in Figure ₂ may include a side wall ₁₂₀ that is disposed on the lower side. In Figure _2, the head ₁₁₀ although shown as semi-spherical, and can be formed in one of the ellipsoidal and the spherical plate in a modified example, but is not limited thereto _20.

: There is the interior of the bell jar ₁₀₀ to the outer chamber part in the reactor, the coater ₂₀₀ for coating the inner surface of the bell jar _100, as described later in FIG. ₃ can be placed.

The bell jar _{100 may further} comprise a ₂₅ cooling water jacket (not shown) to maintain a constant temperature range during operation of the reactor, depending on the embodiment: during operation of the reactor a cooling water jacket flow can be to maintain the temperature below ₃₀₀ ° C.

Referring to Figure _3, coating ₂₀₀ is coupled to the top coating _210, top coating _110, coating the _30-head ₁₁₀ of the bell jar ₁₀₀ in FIG. ₂ 2019/143075 1 ^» (: 1 ^ {2019/000485

As being disposed on the lower side it can be also a lower coating ₂₂₀ to coat the side wall ₁₂₀ of the bell jar ₁₀₀ shown in _Fig.

The upper coating portion ₂₁₀ and the lower coating portion _{220 may} each include a cathode ₂₃₀ . According to the embodiment, the upper coating portion ₂₁₀ may be provided with a circular cathode ₂₃₂ having a five-round shape in the cathode, and the lower coating portion ₂₂₀ may be provided with a rotary cathode ₂₃₄ . The rotary cathode ₂₃₄ refers to a cathode that is rotationally moved with respect to a certain axis. [0029] FIG.

_It can be confirmed that the linear cathode provided in the lower coating portion ₂₂₀ from the cathode 3 is the rotary cathode ₂₃₄ . The rotary cathode _{234 includes} a lower

₁₀ coating portion ₂₂₀ while rotating the coating portion ₂₂₀ to coat the side wall of the bell jar. Unlike the circular cathode ₂₃₂ having no positional movement, the rotary cathode ₂₃₄ is rotationally moved so that it is possible to coat a large area with only a small number.

The upper coating part ₂₁₀ and the lower coating part _{220 are provided} with a plurality of cathodes ₂₃₀

₁₅ . According to one embodiment, _ten circular cathodes ₂₃₂ are provided in the upper coating portion ₂₁₀ to uniformly coat the inner surface of the head ₁₁₀ of the bell jar _{100 shown} in FIG. ₂ , and the lower coating portion _{220 )} may be uniformly coated on the inner surface of the side wall ₁₂₀ of the _two rotary cathode (the bell jar ₁₀₀ shown _in Figure is provided with a _234). The _two ₂₀ rotary cathode ₂₃₄ provided on the lower coating portion ₂₂₀ may be disposed in symmetric positions relative to the rotational axis of the rotational driving unit. Of course, the cathode contained in the coating ₂₀₀ of the invention _230, the type of the cathode shown in Figure ₃ and described, it is not limited in number.

₄ is a view ₂₅ showing a configuration of a coater according to an embodiment of the present invention.

In addition to the coating machine ₍₂₀₀₎ includes an upper coating section ₂₁₀ is configured according to Figure _{_3, the} bottom coating unit _{220, a} cathode ₂₃₀ of the present invention can further include a pump _{240, a} heater _250, a vacuum configuration .

Pump _240, a vacuum is rough, and ₃₀ may comprise a pump for pumping a high vacuum. Depending upon the embodiment, the pump _240, a vacuum is a vacuum pump that (within ^_3 ...) And a turbo molecular pump (TMP) for high vacuum pumping (~ ^1E_6 torr).

Heater ₂₅₀ serves to heat the 5 bell jar ₁₀₀ in FIG. ₂ are included in the coating machine _(200). Therefore, the heater in the embodiment ₂₅₀ can be a side wall heater for heating the side wall ₁₂₀ of the heater head and the bell jar ₍₁₀₀₎ for heating the head ₁₁₀ of the bell jar _{100. Fig.}

FIG. ₅ is a view showing a coating apparatus in which a bell self is combined according to an embodiment of the present invention.

₁₀ degrees from the diagram shown in Figure ₅ is disposed in the interior of the bell jar _{100, and} the bell jar ₁₀₀ is coupled to the lower part of the coating machine _200, and the bell jar ₁₀₀ to coat the internal surface of the bell jar _100, the bell jar _{(100 The} driving unit ₃₀₀ is rotated. Or less with respect to the configuration of the driver ₃₀₀ shall be described in detail in _FIG.

₆ ₁₅ ₆ is ₆ as shown by the figure to enlarge a portion of the driving unit _(a) in accordance with one embodiment of the invention is showing a structure as viewed used on the inside of the driving unit _{_{(300) (b)}} is a driving unit As shown in Fig.

_Referring to FIG. ₆ , the driving unit ₃₀₀ according to the present embodiment includes a driving force

Motor ₂₀ to generate _(310), may include a drive gear ₃₂₀ and turntable ₃₃₀ which is rotated by a motor _{310. The} One side of the top of the driver ₃₀₀ is the bell jar driver ₃₀₀ is coupled with the lower surface ₍₁₀₀₎ towards the inside by being in contact with the drive gear _320, drive gear ₃₂₀ is the touched driving unit ₍₃₀₀ rotates _The turntable ₃₃₀ corresponding to one side of the turntable ₃₃₀ can be rotated.

Driver ₃₀₀ according to the ₂₅ present embodiment, is coupled to the bottom of the turntable ₃₃₀ disposed on the outer side of the driver ₃₀₀ at the bottom of the guide portion _340, and a turntable ₍₃₃₀₎ toward the lower side groove is formed combined and disposed on the inner side of the driver ₃₀₀ includes a _first support ₃₅₀ that is coupled one end and fixing of the guide portion _340, is disposed on the lower side of the guide portion _340, the _first support _350, a surface The _second

₃₀ support portion _{360. As shown} in FIG. The _first support portion _350, guide portions ₃₄₀ and the turntable ₃₃₀ is rotated when moving the turntable _{330, the} _first support ₃₅₀ and the guide portion ₃₄₀ of the fixed coupling between, the turntable ₃₃₀ with .

The _first support portion _{350 is connected} to the _second support portion _{360 by a} plurality of cam followers ₃₇₀ . The _second outside a cam follower ₃₇₀ disposed in the support portion ₃₆₀ is capable of moving along the surface of the _second support portion ₃₆₀ and _first support _{350 includes} a _second support in a state associated with the cam follower ₃₇₀ (Not shown ₎ .

The rotation of the _second support _360, the upper side is provided with a fixing part ₃₄₂ of the form, the size that can pass through a groove of the guide portion ₃₄₀ of the turntable ₃₃₀ provided at the _second support ₍₃₆₀₎ The fixing portion ₃₄₂ rotates while passing through the groove of the guide portion ₃₄₀ .

According to the embodiment, as shown in Figure _{6, the} _second support part a ₃₆₀ is fixed ₃₄₂ and perpendicular to the vertical plane ₃₆₂ disposed at the bottom of the associated vertical plane ₃₆₂ and the vertical surface _362, the horizontal surface ( _{364 may} be in an integrated form.

According to this embodiment, a bell jar ₁₀₀ of Figure ₅ coupled to the upper end of the rotation, the rotation of the turntable ₃₃₀ by the driving gear ₃₂₀ of the driving gear ₃₂₀ by the motor _310, the turntable ₃₃₀ . More specifically, the turntable ₃₃₀ is fixedly coupled to the _first support portion ₃₅₀ and the guide portion ₃₄₀ so as to be rotatably moved, and the _second support portion _{360 And} finally the bell jar ₁₀₀ of FIG. ₅ coupled to the upper end of the turntable ₃₃₀ is rotated.

5 may further include a sealing member 380 for holding the inside of the bell jar 100 in a vacuum state, and the sealing member 380 may include a magnetic member It may contain one or more of a magnet (seal) and an energized seal.

Magnet seal is a seal that has a long life span of more than ₁₀ years with perfect sealing function. Specifically, a magnetic seal is a magnetic fluid seal, which is a radial gap between a stationary pole and a rotating shaft. Injected magnetic fluid (Ferror fuid) It is a rotary chamber that can form a liquid o-ring (LIQUID 0-RING) by the action of a magnetic field and can perform a perfect sealing (Hermetric seal). At this time, it is a non-contact seal without friction between the seal and the rotating shaft.

_{Energized seal Energized seal} is made of Teflon and stainless steel spring material and is excellent in abrasion resistance and chemical resistance. These _{energized seal energized seals} are used in various fields such as corrosive chemicals, solvent low temperature, and high temperature due to the nature of materials, and are used in food and pharmaceutical equipment, medical equipment, semiconductor equipment and the like. In particular, _{Energized Seal Energized Seal} has excellent sealing ability and is suitable for high pressure sealing. It has a low coefficient of friction and low wear rate.

The sealing member ₃₈₀ according to the present embodiment is not limited to the type of the yarn described above, but it is possible to use a sealing material that can maintain the inside of the bell jar ₁₀₀ of FIG. ₅ in a vacuum state.

FIG. ₇ is a view illustrating a coating method using a bayer coating apparatus of a _CVD reactor for producing polysilicon according to an embodiment of the present invention. Referring to FIG.

The coating method using a bell jar coating equipment of the _CVD reactor according to the present embodiment, as shown in Figure ₇ is the step of character level of the _CVD reactor as an outer chamber disposed outside the coating machine, _S100), the driver coupled to a lower portion's Bell Bel ( _{S200) of} rotating the _ruler , and a coater disposed in the interior of the bell jar, coating the inner surface of the bell jar. According to an embodiment of the present invention, after the step of arranging the bell jar, the step of connecting the bell jar to the driving part may be further included. Further, in the step of coating the inner surface of the bell jar, the heater described above may further include a step of heating the bell jar to increase the adhesion of the coating film by the coater.

A coating film is formed on the inner surface of the bell jar through the coater according to an embodiment of the present invention, and the coating film formed according to one embodiment may be a reflection coating film composed of a material having excellent reflectivity. With this reflective coating film, 2019/143075 1 ^» (: 1 ^ {2019/000485

By configuring, the heat released from the heated filament is reflected back into the interior of the bell jar, thereby reducing heat loss due to radiation.

In addition, the reflective coating layer may be formed of multiple layers, and may include a reflective coating layer for reflecting heat formed toward the inside of the bell jar and a buffer layer formed between the reflective five coating layer and the inner surface of the bell jar, Each layer may be sequentially formed on the inner surface of the bell jar through the coater.

Reflection coating layer is reflective to form a composite layer with excellent materials and high temperature corrosion resistance and wear resistance superior to a material to secure long-term stability can be _10. A material excellent in high temperature corrosion resistance is any one selected from the group consisting of titanium and titanium alloys, titanium nitride, chromium and chromium alloys, chromium nitride, graphite molybdenum and molybdenum-based alloys, zirconium and zirconium- Or a combination of at least two of these. The embodiment thus, the temperature ₁₅ the corrosion resistance and reflectivity superior material as are the compounds, gold gold compounds Nickel Nickel compounds and one or from the group consisting of an alloy which is selected may be made by combining at least two or more of these have. The reflective coating layer may also have a thermal reflectivity of at least _80% in the ultraviolet visible (- and near infrared) regions.

₂₀ buffer layer may be selected from the group consisting of alloys ₃₀₄ , _316, iron-based alloys titanium, titanium-based alloys, copper-copper-based alloys, nickel and nickel-based alloys molybdenum and molybdenum-based alloys, zinc and zinc- Selected one or a combination of at least two or more of them.

₂₅ Detailed description related to the specific configuration of the coating equipment has been described above with reference to the coating equipment according to an embodiment of the present invention, and thus a detailed description thereof will be omitted.

Coating method using a coating equipment, as the self-coupling bell to the driving rotating movement _30, to uniformly coat the inner surface of the bell's rotation of the bell 2019/143075 1 ^» (: 1 ^ {2019/000485

Thereby improving the economy.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, Of the right.

DESCRIPTION OF REFERENCE NUMERALS

10: Coating equipment 100 bell

110 head 120 side wall

200 Coater 210 Upper Coating

220 Undercoating portion 230 Cathode

232 circular cathode 234

240 Vacuum pump 250 Heater

300 driver 310 motor

320 drive gear 330 turntable

340 guide portion 342 fixing portion

350 _first support portion 360 _second support portion

362 vertical plane 364 horizontal plane

370 cam follower 380 sealing member

Claims

2019/143075 1 (: 1 ^ {2019/000485)

[Claim _1]

As the besser coating equipment of the reactor

The outer chamber,

A coater disposed inside the bell jar for coating the inner surface of the bell jar and

And a driving unit coupled to a lower portion of the bell jar for rotating the bell jar.

[Claim 2]

The method of claim 1, wherein

The driving unit

A motor for generating a driving force

A drive gear rotated by the motor and

Wherein the upper end of the driving part is engaged with the lower surface of the bell jar and the one side of the driving part facing inward is in contact with the driving gear and the rotating part of the turntable, BERZER COATING EQUIPMENT FOR POLYRENEIC MANUFACTURING.

[3]

3. The method of claim ₂ ,

A guide portion coupled to a lower end of the turntable and disposed on an outer side of the driving portion,

A _first support portion coupled to a lower end of the turntable and disposed inside the drive portion and fixedly coupled to one side of the guide portion,

And a fixing part disposed on the lower side of the guide part and having one side connected to the _first supporting part and passing through the groove of the guide part,

Belzer coating equipment.

[ _4]

The method of claim ₃ ,

The _second support portion and the vertical plane and for producing associated with the state at a lower end of the vertical surface of the polysilicon of the horizontal surface is integrally disposed vertically and the vertical bell jar type coating equipment of the _CVD reactor.

[Claim ₅ ]

The method of claim ₃ ,

The _first guide support portion and the turntable are fixedly coupled to each other

Wherein the _first support portion is connected to the _second support portion by a plurality of cam followers (Ca _m Fol lower), and is moved along one surface of the second support portion.

[Claim 6]

The method of claim 1, wherein

The driving unit includes:

Further comprising a sealing member for maintaining the inside of the bellows in a vacuum state.

[ _7]

The method of claim ₆ , wherein

The sealing member

A besser coating equipment for a CVD reactor for the production of polysilicon comprising at least one of a magnetic seal and an energized seal.

_8.

The method according to claim 1,

The bell jar

A head disposed on the upper side and a lower Side wall,

The coater comprises:

An upper coating portion for coating the head of the bellows;

As being associated with the upper coating section disposed on the lower side, the bell jar coating equipment for preparing the polysilicon _CVD reactor including a bottom coating of coating the side walls of said five rings.

_9]

9. The method of claim ₈ ,

₁₀ A bell-jar coating apparatus for a CVD reactor for producing polysilicon, wherein a cathode is provided in each of the upper coating portion and the lower coating portion.

Claim 10

10. The method of claim 9,

_15. The bell-jar coating apparatus of a CVD reactor for producing polysilicon, wherein the cathode provided in the upper coating portion is a circular cathode.

Claim 11

10. The method of claim 9,

₂₀ The bell-jar coating apparatus of the CVD reactor for producing polysilicon, wherein the cathode provided in the lower coating portion is a rotary cathode.

Claim 12

10. The method of claim 9,

₂₅ The upper coating portion is provided with a plurality of cathodes,

Belzer coating equipment for _CVD reactor.

Claim ₁₃

The method of claim ₉ , wherein

₃₀ < SEP > ₃₀ < tb > Bore coating equipment for 0 ^ reactor.

_14.

The method according to claim 1,

The coater comprises:

The bell-jar coating equipment of a CVD reactor for the production of polysilicon further comprising a vacuum pump.

_15.

_15. The method of claim ₁₄ ,

The vacuum pump

Belzer coating equipment for a CVD reactor for the production of polysilicon containing at least one of a rotary booster pump for low vacuum pumping and a turbo molecular pump for high vacuum pumping.

Claim ₁₆

The method according to claim 1,

The coater comprises:

Further comprising a heater for heating the bell jar.

_17.

17. The method of claim ₁₆ ,

The heater

A bell-jar coating apparatus for a _CVD reactor for producing polysilicon which is a head heater for a bell jar and a heater for a side wall.

Claim ₁₈

In that U section,

The coating film coated on the inner surface of the bell jar by the coater 2019/143075 1 ^» (: 1 ^ {2019/000485

For the production of polysilicon, which is a multilayer reflective coating film (: BERZER coating equipment in the reactor.

Claim ₁₉

_5. The method of claim ₁₈ , wherein

The reflective coating film

A reflective coating layer formed toward the inner space of the bell jar and reflecting heat;

A buffer layer formed between the reflective coating layer and the inner surface of the bell jar,

Claim ₂₀

20. The method of claim ₁₉ ,

The reflective coating layer

_{15 For the} production of polysilicon to form a composite layer with high corrosion resistance and high reflectivity (: Bessel coating equipment in reactor.

_21,

The method of claim ₁₉ , wherein

₂₀ The reflective coating layer comprises

(For example, a bell-coating apparatus for a reactor) for producing polysilicon, which is made by combining at least one selected from the group consisting of silver, silver compound gold compounds, nickel-nickel compounds and alloys, or a combination of at least two thereof.

₂₅₂₅

[ _22]

The method of claim ₁₉ , wherein

The reflective coating layer

For the production of polysilicon having a thermal ₃₀ reflectivity of _80% or more in the ultraviolet visible (1 - ₃ ) and near infrared (IR) regions). 2019/143075 1 ^» (: 1 ^ {2019/000485

Claim 23

20. The method of claim 19,

Wherein the buffer layer comprises:

₅ 304, 3113316, any one selected from the group consisting of iron, iron alloys, titanium, titanium alloys, copper, copper alloys, nickel and nickel alloys, molybdenum and molybdenum alloys, zinc and zinc alloys Or polysilicon made by combining at least two of these

₁₀₁₀

[24]

Placing the bellows of the reactor outside the coater as an outer chamber

₁₅ comprising the drive unit coupled to a lower portion of said bell, rotary cut the bell; and

Wherein the coater disposed within the bell jar is adapted to coat an inner surface of the bell jar.

25. _[20]

25. The method of claim 24,

Further comprising heating the bell jar with a heater