WO2019140915A1 - 设备状态监控方法、监控器及监控装置 - Google Patents

设备状态监控方法、监控器及监控装置 Download PDF

Info

Publication number
WO2019140915A1
WO2019140915A1 PCT/CN2018/102848 CN2018102848W WO2019140915A1 WO 2019140915 A1 WO2019140915 A1 WO 2019140915A1 CN 2018102848 W CN2018102848 W CN 2018102848W WO 2019140915 A1 WO2019140915 A1 WO 2019140915A1
Authority
WO
WIPO (PCT)
Prior art keywords
information
status
limit value
status information
preset
Prior art date
Application number
PCT/CN2018/102848
Other languages
English (en)
French (fr)
Inventor
安九旭
Original Assignee
北京铂阳顶荣光伏科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 北京铂阳顶荣光伏科技有限公司 filed Critical 北京铂阳顶荣光伏科技有限公司
Publication of WO2019140915A1 publication Critical patent/WO2019140915A1/zh

Links

Images

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/4184—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by fault tolerance, reliability of production system
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production

Definitions

  • the present application relates to the field of semiconductor manufacturing, and in particular, to a device status monitoring method, a monitor, and a monitoring device.
  • Semiconductor product manufacturing processes include, but are not limited to, plasma enhanced chemical vapor deposition, photolithography, etching, or thin film growth processes.
  • the precise control and risk alarms for the inlet and outlet ports of each equipment on a production line are relatively scarce.
  • the operator observes the light fixtures on the site and makes a simple record.
  • the light labels are different.
  • the color represents the different states of the device.
  • the purpose of the application is to provide a device status monitoring method, a monitor, and a monitoring device.
  • Some embodiments of the present disclosure provide a device status monitoring method, including: acquiring status information of an inbound and outbound port of a device on a production line, wherein the status information includes process flow information; and determining whether the status information includes preset first information, If the first information is not included, an alert message is sent, wherein the first information is used to indicate that the device is in a non-idle state.
  • the status information further includes time information of the device processing the workpiece corresponding to the process flow information, the method further comprising: if the first information is included in the status information, time information according to the status information Acquiring the second information of the device; comparing the second information with the preset duration upper limit value and the duration lower limit value; if the second information is greater than the duration upper limit value or less than the duration lower limit value, the warning information is sent.
  • acquiring the second information of the device according to the time information of the state information includes: acquiring a first time point when the device corresponding to the process flow information starts processing the workpiece, and ending the device corresponding to the process flow information Processing a second time point of the workpiece; calculating a processing time length of the device according to the time difference between the first time point and the second time point, wherein the processing time is the second information.
  • obtaining status information of the inlet and outlet of the equipment on the production line includes: obtaining status information of the inlet and outlet of the equipment on the production line according to a preset acquisition period.
  • the sending alert information includes any one or more of the following: sending an email containing the alert information to the target terminal, transmitting the visual information including the alert information to the target terminal, and transmitting the alert to the target terminal. Text information for the message.
  • Some embodiments of the present disclosure provide a device status monitor, including: a reader configured to acquire status information of an ingress and egress port of a device on a production line, wherein the status information includes process flow information; a processor, The processor is configured to determine whether the state information includes preset first information, wherein the first information is configured to indicate that the device is in a non-idle state; and the alarm is configured to be included in the processor determining that the state information is not included When the first message is sent, a warning message is issued.
  • the status information further includes time information of the device processing the workpiece corresponding to the process flow information
  • the processor is further configured to: when the first information is included in the status information, acquire the second information of the device according to the time information of the status information; and compare the second information with the preset duration upper limit value and the duration lower limit value;
  • the alarm is further configured to issue an alert message when the processor determines that the second information is greater than the upper limit of the duration or less than the lower limit of the duration.
  • the device status monitor further includes: a timer configured to preset an acquisition period; the reader is further configured to acquire an inlet and a discharge port of the line device according to a preset acquisition period Status information.
  • the alarm is configured to perform one or more of the following operations: transmitting an email containing alert information to the target terminal; transmitting visual information including the alert information to the target terminal; and transmitting the alert information including the alert information to the target terminal Text information.
  • Some embodiments of the present disclosure provide a computer program that, when run on a computer, causes the computer to perform the steps of the aforementioned device status monitoring method.
  • Some embodiments of the present disclosure provide a computer readable storage medium storing a computer program that, when executed on a computer, causes the computer to perform the steps of the aforementioned device state monitoring method.
  • Some embodiments of the present disclosure provide a computer program product stored on a non-transitory computer readable medium that, when executed on a computer, causes the computer to perform the steps of the aforementioned device state monitoring method.
  • the method of the present disclosure enables automatic monitoring of devices and risk warnings.
  • this method can reduce labor costs, avoid equipment idling, reduce equipment failure, improve production resource utilization, make the manufacturing process more intelligent, and improve product yield.
  • the utilization rate of the device is improved, thereby effectively increasing the utilization rate of the device.
  • FIG. 1 is a flowchart of a device status monitoring method according to some embodiments of the present disclosure
  • FIG. 2 is a flowchart of another method for monitoring device status according to some embodiments of the present disclosure
  • FIG. 3 is a schematic diagram of a device status monitor according to some embodiments of the present disclosure.
  • FIG. 4 is a schematic diagram of another device status monitor according to some embodiments of the present disclosure.
  • FIG. 5 is a schematic diagram of a device status monitoring apparatus according to some embodiments of the present disclosure.
  • Some embodiments of the present disclosure provide a device status monitoring method, as shown in FIG. 1, the method includes steps 100-300 (S100-S300).
  • Step 100 obtaining status information of a port of the production line device, wherein the status information includes process flow information.
  • step 201 it is determined whether the status information includes the preset first information. If the first information is not included, step 300 is performed, where the first information is used to indicate that the device is in a non-idle state.
  • step 300 (S300), a warning message is sent.
  • the method is adapted to monitor all equipment on the production line, such as a plasma enhanced chemical vapor deposition apparatus lithography machine, an etch machine, a thin film growth apparatus, and the like.
  • the status information of the Port acquired in step 100 includes all information related to process production.
  • the status information of the port includes process flow information, such as: ReadyToLoad, ReservedToLoad, ReadyToProcess, Processing, ReadyToUnload, Unloading reservation unloading (ReservedToUnload), etc.
  • the status of the Port changes in the following order: ready to load, scheduled to load, preparatory process, in process, ready to unload, scheduled to unload. If the workpiece on the transport mechanism of the port is being processed, the status information of the port is Processing, and the previous status information of the status is ReadyToProcess.
  • a specific information for characterizing the non-idle state of the device is predetermined in the status information, that is, the first information in step 201. The first information is used as an identification feature for detecting and determining whether or not the device is idling on the production line.
  • the status information of the port acquired in step 100 is status information of the port of the device acquired in the processing flow order. In some embodiments of the present disclosure, the status information of the port acquired in step 100 is the status information of the ports of all devices on the production line acquired at the same time. In some embodiments of the present disclosure, status information of the port is periodically acquired according to a preset acquisition period. That is, at the time point of the preset acquisition period, the device status monitor acquires the status information of the port recorded in the current period. Exemplarily, during the operation of the production line, the port of the device is in a corresponding state, and the state information corresponding to the current state is sent to the device state monitor.
  • the device status monitor receives the corresponding status information and stores it.
  • the state information of the port in the preset period is searched, the state information of the port in the preset period is deleted from the device state monitor, thereby saving the space for storing the state information of the port.
  • step 201 when "ReadyToProcess" appears in the status information of the device Port, it is considered that the device has completed normal loading via the pre-loading action, so the device does not appear idling.
  • "ReadyToProcess” is the first information in step 201. If the status information of the port of the device does not include preparation processing (ie, the first information), the device is in an idle state. This idling state may be caused by factors such as load failure, material breakage, or equipment failure. At this time, step 300 is executed to issue a warning message to effectively control the operation risk of the production line.
  • the status information of the Port of the device on the production line is other status information.
  • the specific information (first information) as the preset of the identification feature can also be adaptively adjusted according to the actual situation.
  • the acquired status information of the port further includes time information of the device processing workpiece corresponding to the process flow information to control the time of the process.
  • the device status monitoring method further includes steps 202 to 203 (S202 to S203):
  • Step 202 (S202), if the process information of the status information includes the first information, and acquiring the second information of the device according to the time information of the status information.
  • Step 203 Comparing the second information with the preset duration upper limit value and the preset duration lower limit value. If the second information is greater than the duration upper limit value or less than the duration length lower limit value, step 300 is performed.
  • acquiring the second information of the device according to the time information of the state information includes the steps of: acquiring a first time point when the device corresponding to the process flow information starts processing the workpiece, and corresponding to the process flow information. At the second time point when the device ends processing the workpiece, the processing time of the device to the workpiece is calculated and acquired according to the time difference between the first time point and the second time point, and the processing time is the second information.
  • acquiring the second information of the device according to the time information of the state information comprises the steps of: acquiring a first time point when the sensor disposed at the feed port of the device detects the workpiece and setting at the discharge port of the device The second time point when the sensor detects the workpiece, and according to the time difference between the first time point and the second time point, the processing time of the device to the workpiece is calculated, and the processing time is the second information.
  • the type of the inductor is not limited in this example, for example, a temperature sensor, a pressure sensor, an image sensor, and the like.
  • acquiring the second information of the device according to the time information of the status information includes the following steps: acquiring the first time point when the status information of the port of the device is “preparing to load” and the status information of the port of the device is “preparing to uninstall” At the second time point of the time, the processing time of the device to the workpiece is calculated according to the time difference between the first time point and the second time point, and the processing time is the second information.
  • acquiring the second information of the device according to the time information of the status information includes the following steps: acquiring the first time point when the status information of the port of the device is “reserved loading” and the status information of the device port is “reserving the uninstall” At a second time point of time, the processing time of the device to the workpiece is calculated according to the time difference between the first time point and the second time point, and the processing time is the second information.
  • each product or artifact is tracked and monitored by a Product ID contained in the status information.
  • the time difference is the processing time of the processing device for the workpiece, and the processing duration is the second information.
  • the preset time length upper limit value and the time length lower limit value may be different according to the production line process requirements and the corresponding device specific settings, which are not limited by the disclosure.
  • step 300 the function of the warning information is to indicate to the target terminal that the device has an abnormal condition, and the warning content and the warning manner are various.
  • the alert mode is to send an email containing alert information to the target terminal.
  • an email alert is sent to a designated production-related target terminal via an email system.
  • the alert mode is to transmit visual information including alert information to the target terminal.
  • visualized warning information is displayed to the target terminal by any of the visualization media in the production system, such as a GUI interface or a display screen disposed at the manufacturing site.
  • the visualization media in the production system such as a GUI interface or a display screen disposed at the manufacturing site.
  • it is realized by a pop-up window in the GUI interface, or the warning information is displayed in a scrolling or flashing manner on the display screen.
  • the alert mode is to send text information including alert information to the target terminal. That is, a risk prompt is issued in the form of a message such as a mobile phone of the target terminal through a short message or an APP.
  • the manner of transmitting the alert information is not limited to the above-mentioned alert mode.
  • Different specific warning information is set according to different abnormal states, for example, equipment idling or abnormal processing time, and the present disclosure is not limited thereto.
  • the automatic monitoring and risk warning of the device is realized, which reduces labor cost, avoids equipment idling, reduces equipment failure, improves utilization of production resources, makes the product manufacturing process more intelligent, and improves product yield. .
  • the utilization rate of the device is improved, thereby effectively improving the equipment utilization rate.
  • the monitor includes a reader 11 configured to acquire status information of the inlet and outlet of the equipment on the production line, wherein the status information includes process flow information; the processor 12, the processing The device 12 is configured to determine whether the preset information includes the preset first information, wherein the first information is used to indicate that the device is in a non-idle state, and the alarm device 13 is configured to issue the warning information.
  • the processor 12 determines whether the status information includes the first information. If the processor 12 determines that the status information does not include the first information, the alarm 13 issues an alert message.
  • the status information further includes time information of the device processing the workpiece corresponding to the process flow information described above.
  • the processor 12 is further configured to: when the first information is included in the process information of the status information, acquire the second information of the device according to the time information of the status information, and set the second information with a preset duration upper limit and a lower limit Values are compared.
  • the alarm 13 is further configured to issue an alert message when the processor 12 determines that the second information is greater than a preset duration upper limit value or less than a preset duration lower limit value.
  • the processor 12 determines whether the first information is included in the status information. If the processor 12 determines that the process information of the status information includes the first information, the processor 12 acquires the second information of the device according to the time information of the status information. The processor 12 compares the second information of the device with a preset duration upper limit value of the device and a preset duration lower limit value. When the processor 12 determines that the second information is greater than the preset duration upper limit value or less than the preset duration lower limit value, the alarm 13 issues an alert message.
  • the device status monitor further includes a timer 14 for presetting the acquisition period.
  • the reader 11 is further configured to acquire status information of the inlet and outlet of the equipment on the production line according to a preset acquisition period.
  • the alarm 13 is configured to perform one or more of the following operations: transmitting an email containing alert information to the target terminal, and transmitting visual information including the alert information to the target terminal, The target terminal sends text information including the alert information. It will be understood by those skilled in the art that the alarm 13 can also perform other operations for alerting the target terminal according to actual needs.
  • the present disclosure also provides a computer program that, when executed on a computer, causes the computer to execute:
  • the status information also includes time information of the device processing the workpiece corresponding to the above process flow information. If the process information of the status information includes the first information, the second information of the device is obtained according to the time information of the status information.
  • the second information is compared with the preset duration upper limit value and the preset duration lower limit value. If the second information is greater than the duration upper limit value or less than the duration length lower limit value, the warning information is sent.
  • the present disclosure also provides a computer readable storage medium storing a computer program for causing a computer to execute:
  • the second information of the device is obtained according to the time information of the status information.
  • the second information is compared with the preset duration upper limit value and the preset duration lower limit value. If the second information is greater than the duration upper limit value or less than the duration length lower limit value, the warning information is sent.
  • the present disclosure also provides a computer program product stored on a non-transitory computer readable medium, the computer program causing a computer to:
  • the status information also includes time information of the device processing the workpiece corresponding to the above process flow information. If the process information of the status information includes the first information, the second information of the device is obtained according to the time information of the status information.
  • the second information is compared with the preset duration upper limit value and the preset duration lower limit value. If the second information is greater than the duration upper limit value or less than the duration length lower limit value, the warning information is sent.
  • the present disclosure also provides a device status monitoring device.
  • the device status monitoring device includes: a data transmission line 21 configured to state information of the inlet and outlet of the device on the production line. Transferred to data store 22; data store 22 and device status monitor 01 described above, the device status monitor 01 is configured to retrieve the status information from the data store 22.
  • the device on the production line transmits the status information of the ingress and egress port to the data memory 22 through the data transmission line 21, and then the device status monitor 01 acquires the status information from the data memory 22, thereby precisely controlling the status of the device.
  • the data transmission line 21 is a transmission protocol in the field of industrial control. In other embodiments of the present disclosure, the data transmission line 21 is a data cable in the field of industrial control.
  • data store 22 is a random access memory (RAM). In other embodiments of the present disclosure, data store 22 is a read only memory (ROM). In some embodiments disclosed, the monitor 01 is a microprocessor.
  • the various readers, processors, alarms, and devices described above are implemented in hardware. In other embodiments of the present disclosure, the various readers, processors, alarms, and devices described above are implemented by a software program running on one or more processors. In other embodiments of the present disclosure, the various readers, processors, alarms, and devices described above are implemented by a combination of hardware and software programs. Exemplarily, the reader, the processor, and the alarm in the above embodiment are combined into one upper device, or the reader, the processor, and the alarm in the above embodiment are split into a plurality of lower devices. In some embodiments of the present disclosure, it is conceivable to integrate all the readers, processors, and alarms mentioned in the device monitoring device into a manufacturing execution system (MES) commonly used in the industrial field to enhance the convenience of implementation. .
  • MES manufacturing execution system

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • General Factory Administration (AREA)

Abstract

一种设备状态监控方法、设备状态监控器、计算机程序、计算机可读存储介质和计算机程序产品，方法包括：获取产线上设备的进出料口的状态信息（S100），其中，状态信息包括工艺流程信息；判断状态信息中是否包含预设的第一信息(S201)，若不包含第一信息，则发出警示信息（S300），其中，该第一信息用于指示设备处于非空转状态。该方法实现了自动对设备的监控以及风险警示，从而，一方面可以减少人力成本，避免设备空转，减少设备故障，提高生产资源利用率，使制造过程更为智能化，另一方面，由于避免了设备的空转，提高了设备的利用率，因此有效提升设备稼动率。

Description

设备状态监控方法、监控器及监控装置
本申请要求于2018年1月16日提交中国专利局、申请号为201810042399.8、发明名称为“一种设备状态监控方法、模块及装置”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请涉及半导体制造领域，尤其涉及一种设备状态监控方法、监控器及监控装置。
背景技术
半导体产品的生产工艺包括但不限于等离子体增强型化学气相沉积、光刻、刻蚀或薄膜生长等工序。
目前对于一条产线上各设备的进出料口(Port)状态的精确管控及风险报警还相对匮乏，通常是由操作人员在现场观察设备自带的灯标进行判定并作简单记录，灯标的不同的颜色代表设备的不同状态。
但是，通过人为的主观判断，容易出现错误的判断和纰漏。如果仅作简单的记录而无相应的风险警示，尤其对于产线上的设备而言，若产线上的设备出现空转状态(IDLE)，不仅浪费生产资源，甚者还存在一定的风险造成设备故障。
发明内容
本申请的目的是提供一种设备状态监控方法、监控器及监控装置。
本公开一些实施例提供一种设备状态监控方法，包括：获取产线上设备的进出料口的状态信息，其中，状态信息包括工艺流程信息；判断状态信息中是否包含预设的第一信息，若不包含第一信息，则向发出警示信息，其中，第一信息用于指示设备处于非空转状态。
在本公开一些实施例中，状态信息还包括与工艺流程信息相对应的设备处理工件的时间信息，该方法还包括：若在状态信息中包含所述第一信息，则根据状态信息的时间信息获取设备的第二信息；将第二信息与预设的时长上限值和时长下限值进行比对；若第二信息大于时长上限值或者小于时长下限值，则发出警示信息。
在本公开一些实施例中，根据状态信息的时间信息获取设备的第二信息包括：获取与工艺流程信息相对应的设备开始处理工件的第一时间点，以及与工艺流程信息相对应的设备结束处理工件的第二时间点；根据第一时间点和第二时间点之间的时间差，计算设备对工件的处理时长，该处理时长为第二信息。
在本公开一些实施例中，获取产线上设备的进出料口的状态信息包括：按预设的获取周期，获取产线上设备的进出料口的状态信息。
在本公开一些实施例中，所述向发送警示信息包括以下任一种或多种：向目标终端发送包含警示信息的邮件、向目标终端发送包含警示信息的可视化信息、向目标终端发送包含警示信息的文本信息。
本公开一些实施例提供一种设备状态监控器，包括：读取器，该读取器配置为获取产线上设备的进出料口的状态信息，其中，状态信息包括工艺流程信息；处理器，该处理器配置为判断状态信息中是否包含预设的第一信息，其中，第一信息配置为指示设备处于非空转状态；和报警器，该报警器配置为当处理器确定状态信息中不包含第一信息时，发出警示信息。
在本公开一些实施例中，所述状态信息还包括与所述工艺流程信息相对应的设备处理工件的时间信息；
处理器还配置为当状态信息中包含第一信息时，根据状态信息的时间信息获取设备的第二信息；和将第二信息与预设的时长上限值和时长下限值进行比对；报警器还配置为当处理器确定第二信息大于时长上限值或者小于时长下限值时，发出警示信息。
在本公开一些实施例中，设备状态监控器还包括：计时器，该计时器配置为预先设置获取周期；读取器还配置为按预设的获取周期，获取产线上设备的进出料口的状态信息。
在本公开一些实施例中，报警器配置为执行以下一种或多种操作：向目标终端发送包含警示信息的邮件；向目标终端发送包含警示信息的可视化信息；向目标终端发送包含警示信息的文本信息。
本公开一些实施例提供一种计算机程序，该计算机程序在计算机 上运行时令计算机执行前述的设备状态监控方法的步骤。
本公开一些实施例提供一种存储有计算机程序的计算机可读存储介质，该计算机程序在计算机上运行时令计算机执行前述的设备状态监控方法的步骤。
本公开一些实施例提供一种存储在非瞬时性的计算机可读介质上的计算机程序产品，该计算机程序在计算机上运行时令计算机执行前述的设备状态监控方法的步骤。
综上，本公开的方法实现了对设备的自动监控以及风险警示。一方面，通过该方法，可以减少人力成本，避免设备空转，减少设备故障，提高生产资源利用率，使制造过程更智能化，提高产品良率。另一方面，由于避免了设备的空转，提高了设备的利用率，因此有效提升了设备的稼动率。
附图说明
为使本公开的目的、技术方案和优点更加清楚，下面将结合附图对本公开作进一步描述，其中：
图1为本公开一些实施例提供的一种设备状态监控方法的流程图；
图2为本公开一些实施例提供的另一种设备状态监控方法的流程图；
图3为本公开一些实施例提供的一种设备状态监控器的示意图；
图4为本公开一些实施例提供的另一种设备状态监控器的示意图；和
图5为本公开一些实施例提供的一种设备状态监控装置的示意图。
具体实施方式
下面详细描述本公开的实施例，所述实施例的示例在附图中示出，其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施例是示例性的，仅用于解释本公开，而不能解释为对本公开的限制。
本公开一些实施例提供了一种设备状态监控方法，如图1所示，该方法包括步骤100-步骤300(S100-S300)。
步骤100(S100)，获取产线上设备的进出料口(Port)的状态信息，其中，所述状态信息包括工艺流程信息。
步骤201(S201)，判断状态信息中是否包含预设的第一信息，若不包含第一信息，则执行步骤300，其中，第一信息用于指示设备处于非空转状态。
步骤300(S300)，发出警示信息。
在一些实施例中，该方法适应于监控产线上的所有设备，例如：等离子体增强型化学气相沉积设备光刻机、刻蚀机、薄膜生长设备等。
在本公开一些实施例中，步骤100中获取到的Port的状态信息包括与工艺生产相关的所有信息。示例性的，Port的状态信息包括工艺流程信息，该工艺流程信息例如为：准备装载(ReadyToLoad)、预约装载(ReservedToLoad)、准备工艺(ReadyToProcess)、工艺中(Processing)、准备卸载(ReadyToUnload)、卸料预约卸载(ReservedToUnload)等。
在本公开一些实施例中，在产线运行过程中，对于单个设备，Port的状态按如下顺序发生变化：准备装载、预约装载、准备工艺、工艺中、准备卸载、预约卸载。若Port的搬送机构上有工件正在加工，则这个Port的状态信息为工艺中(Processing)，且该状态的前一状态信息为准备工艺(ReadyToProcess)。为了预防设备空转运行，保证产线上的设备处于连续的带料加工状态，在状态信息中预定一个用于表征设备非空转状态的特定信息，即步骤201中的第一信息。该第一信息作为检测、判定产线上有无设备发生空转的识别特征。
在本公开一些实施例中，步骤100中获取到的Port的状态信息是按加工流程次序获取到的设备的Port的状态信息。在本公开一些实施例中，步骤100中获取到的Port的状态信息是同一时间获取到的产线上所有设备的Port的状态信息。在本公开一些实施例中，根据预设的获取周期，定时获取Port的状态信息。即在预设的获取周期的时间点，设备状态监控器获取当前周期内记录的Port的状态信息。示例性的，在产线运行过程中，设备的Port在相应的状态，向设备状态监控器发送对应当前状态的状态信息。同时，设备状态监控器接收相应的状态信息，并对其 进行存储。另外，在查取预设的周期内的Port的状态信息后，从设备状态监控器中删除该段预设的周期内的Port的状态信息，从而节省存储Port的状态信息的空间。
在本公开一些实施例中，当设备Port的状态信息中出现“准备处理(ReadyToProcess)”时，认为该设备已经经由前序载料动作完成了正常上料，所以设备不会出现空转状态。因而“准备处理(ReadyToProcess)”为步骤201中的第一信息。若设备的Port的状态信息中不包含准备处理(即第一信息)，则该设备为空转状态。该空转状态可能是因为载料失效、断料或者设备故障等因素造成。此时，执行步骤300，发出警示信息，以对产线运转风险进行有效的管控。
除了“准备处理(ReadyToProcess)”之外，在本公开另一些实施例中，产线上的设备的Port的状态信息为其他状态信息。并且，作为识别特征的预设的特定信息(第一信息)也可以根据实际情况进行适应性调整。
如图2所示，在本公开一些实施例中，获取到的Port的状态信息还包括与工艺流程信息相对应的设备处理工件的时间信息，以对工艺制程的时间进行管控。此时，设备状态监控方法还包括步骤202至步骤203(S202至S203)：
步骤202(S202)，若状态信息的工艺流程信息中包含第一信息，根据状态信息的时间信息获取设备的第二信息。
步骤203(S203)：将第二信息与预设的时长上限值和预设的时长下限值进行比较，若第二信息大于时长上限值或者小于时长下限值，则执行步骤300。
在本公开一些实施例中，根据状态信息的时间信息获取设备的第二信息包括以下步骤：获取与工艺流程信息相对应的设备开始处理工件的第一时间点，以及与工艺流程信息相对应的设备结束处理工件的第二时间点，根据第一时间点和第二时间点之间的时间差，计算并获取设备对工件的处理时长，该处理时长为第二信息。
示例性的，根据状态信息的时间信息获取设备的第二信息包括以 下步骤：获取设置在设备的进料口处的感应器检测到工件时的第一时间点以及设置在设备的出料口处的感应器检测到工件时的第二时间点，根据第一时间点和第二时间点之间的时间差，计算设备对工件的处理时长，该处理时长为第二信息。该示例中对感应器的类型不做限定，例如，温度感应器、压力感应器、图像感应器等。
示例性的，根据状态信息的时间信息获取设备的第二信息包括以下步骤：获取设备的Port的状态信息为“准备装载”时的第一时间点以及该设备的Port的状态信息为“准备卸载”时的第二时间点，根据第一时间点和第二时间点之间的时间差，计算设备对工件的处理时长，该处理时长为第二信息。
示例性的，根据状态信息的时间信息获取设备的第二信息包括以下步骤：获取设备的Port的状态信息为“预约装载”时的第一时间点以及该设备Port的状态信息为“预约卸载”时的第二时间点，根据第一时间点和第二时间点之间的时间差，计算设备对工件的处理时长，该处理时长为第二信息。
示例性的，通过状态信息中包含的产品识别码(Product ID)来追踪和监控每个产品或工件。获取在设备的进料口处出现产品识别码时的第一时间点以及在设备的出料口处出现产品识别码时的第二时间点，根据第一时间点和第二时间点之间的时间差，计算设备对工件的处理时长，该处理时长为第二信息。
由于不同的产线以及不同的设备加工所需的时长不同，因而预设的时长上限值和时长下限值可以根据产线工艺要求以及相应的设备具体设置，本公开对此不作限定。
步骤300中，警示信息的作用是向目标终端指示设备出现异常状况，警示内容和警示方式是多样的。
在本公开一些实施例中，警示方式为向目标终端发送包含警示信息的邮件。示例性的，通过电子邮件系统向指定的与生产相关的目标终端发送邮件提醒。
在本公开一些实施例中，警示方式为向目标终端发送包含警示信 息的可视化信息。示例性的，通过生产系统中任一种可视化媒体，例如GUI界面或者设置在制造现场的显示屏，向目标终端显示可视化的警示信息。例如在GUI界面中通过弹窗实现，或者在显示屏上以滚动或者闪烁的形式显示警示信息。
在本公开一些实施例中，警示方式为向用目标终端发送包含警示信息的文本信息。即以向目标终端的手机等设备通过短信或者APP推送消息的形式发出风险提示。
在实际操作中，发送警示信息的方式不限于上述的警示方式。根据不同的异常状态，例如，设备空转或者加工时长异常等，设置不同的具体的警示信息，对此本公开不予限定。
通过该状态监控方法实现了对设备的自动监控及风险警示，一方面减少了人力成本，避免设备空转，减少设备故障，提高生产资源利用率，使产品制造过程更智能化，提高了产品良率。另一方面，由于避免了设备的空转，提高了设备的利用率，因此有效提升了设备稼动率。
本公开一些实施例提供了一种设备状态监控器01。如图3所示，该监控器包括读取器11，该读取器11配置为获取产线上设备的进出料口的状态信息，其中，状态信息包括工艺流程信息；处理器12，该处理器12配置为判断状态信息中是否包含预设的第一信息，其中，第一信息用于指示设备处于非空转状态的，及报警器13，该报警器13配置为发出警示信息。
读取器11获取进出料口的状态信息后，处理器12判断该状态信息是否包含第一信息，若处理器12确定该状态信息中不包含第一信息时，报警器13发出警示信息。
在本公开一些实施例中，如图4所示，状态信息还包括与上述工艺流程信息相对应的设备处理工件的时间信息。处理器12还配置为当状态信息的工艺流程信息中包含第一信息时，根据状态信息的时间信息获取设备的第二信息，和将第二信息与预设的时长上限值和时长下限值进行比较。报警器13还配置为当处理器12确定第二信息大于预设的时长上限值或者小于预设的时长下限值时，发出警示信息。
读取器11获取进出料口的状态信息后，处理器12判断状态信息中是否包含第一信息。若处理器12确定状态信息的工艺流程信息中包含第一信息时，处理器12根据状态信息的时间信息获取设备的第二信息。处理器12将设备的第二信息与设备的预设的时长上限值和预设的时长下限值进行比较。当处理器12确定第二信息大于预设的时长上限值或者小于预设的时长下限值时，报警器13发出警示信息。
在本公开一些实施例中，如图4所示，设备状态监控器还包括计时器14，该计时器14用于预先设置获取周期。在该实施例中，读取器11还配置为按预设的获取周期，获取产线上设备的进出料口的状态信息。
在本公开一些实施例中，如图4所示，报警器13配置为执行以下一种或多种操作：向目标终端发送包含警示信息的邮件，向目标终端发送包含警示信息的可视化信息，向目标终端发送包含警示信息的文本信息。本领域技术人员可以理解的是，根据实际需要，报警器13还可以执行其他用于警示目标终端的操作。
本公开还提供了一种计算机程序，当该计算机程序在计算机上运行时令计算机执行：
获取产线上设备的进出料口(Port)的状态信息，其中，状态信息包括工艺流程信息。
判断状态信息中是否包含预设的用于指示设备处于非空转状态的第一信息，若不包含第一信息，则发出警示信息。
状态信息还包括与上述工艺流程信息相对应的设备处理工件的时间信息。若状态信息的工艺流程信息中包含第一信息，则根据状态信息的时间信息获取设备的第二信息。
将第二信息与预设的时长上限值和预设的时长下限值进行比较，若第二信息大于时长上限值或者小于时长下限值，则发出警示信息。
本公开还提供了一种存储有计算机程序的计算机可读存储介质，该计算机程序令计算机执行：
获取产线上设备的进出料口(Port)的状态信息。
判断状态信息中是否包含预设的用于指示设备处于非空转状态的第一信息，若不包含第一信息，则发出警示信息。
若状态信息的工艺流程信息中包含第一信息，根据状态信息的时间信息获取设备的第二信息。
将第二信息与预设的时长上限值和预设的时长下限值进行比较，若第二信息大于时长上限值或者小于时长下限值，则发出警示信息。
本公开还提供了一种存储在非瞬时性的计算机可读介质上的计算机程序产品，该计算机程序令计算机执行：
获取产线上设备的进出料口(Port)的状态信息，其中，状态信息包括工艺流程信息。
判断状态信息中是否包含预设的用于指示设备处于非空转状态的第一信息，若不包含第一信息，则发出警示信息。
状态信息还包括与上述工艺流程信息相对应的设备处理工件的时间信息。若状态信息的工艺流程信息中包含第一信息，根据状态信息的时间信息获取设备的第二信息。
将第二信息与预设的时长上限值和预设的时长下限值进行比较，若第二信息大于时长上限值或者小于时长下限值，则发出警示信息。
本公开还提供了一种设备状态监控装置，如图5所示，该设备状态监控装置包括：数据传输线路21，该数据传输线路21配置为将产线上的设备的进出料口的状态信息传输到数据存储器22；数据存储器22以及上述的设备状态监控器01，该设备状态监控器01配置为从所述数据存储器22中获取所述状态信息。产线上的设备通过数据传输线路21将进出料口(Port)的状态信息传输到数据存储器22中，然后设备状态监控器01从数据存储器22中获取状态信息，从而对设备状态进行精确管控。
在本公开一些实施例中，数据传输线路21为工控领域中的传输协议。在本公开另一些实施例中，数据传输线路21为工控领域中的数据线缆。在本公开一些实施例中，数据存储器22为随机存储器(RAM)。在本公开另一些实施例中，数据存储器22为只读存储器(ROM)。在 公开一些实施例中，监控器01为微处理器。
在本公开一些实施例中，上述各个读取器、处理器、报警器及装置通过硬件实现。在本公开另一些实施例中，在上述各个读取器、处理器、报警器及装置通过在一个或者多个处理器上运行的软件程序实现。在本公开另一些实施例中，上述各个读取器、处理器、报警器及装置通过硬件和软件程序的组合实现。示例性的，以上实施例中的读取器、处理器、报警器被组合成一个上位器件，或者，以上实施例中的读取器、处理器、报警器被拆分成多个下位器件。在本公开一些实施例中，可以考虑将设备监控装置中提及的各个读取器、处理器、报警器全部集成在工业领域常用的制造执行系统(MES)之中，以增强其实施便捷性。
以上实施例详细说明了本公开的构造、特征及作用效果。需要说明的是，本领域技术人员可以在不脱离、不改变本公开的设计思路以及技术效果的情况下，对上述实施例中的技术特征进行合理地组合以形成多种等效方案。因此，本公开不限定在上述实施例范围内，凡是依照本公开的构想所作的改变，或修改为等同变化的等效实施例，且仍未超出说明书与权利要求书所涵盖的精神时，均应在本公开的保护范围内。

Claims (12)

  1. 一种设备状态监控方法，其特征在于，包括：
    获取产线上设备的进出料口的状态信息，其中，所述状态信息包括工艺流程信息；
    判断所述状态信息中是否包含预设的第一信息，若不包含所述第一信息，则发出警示信息，其中，
    所述第一信息用于指示设备处于非空转状态。
  2. 根据权利要求1所述的设备状态监控方法，其特征在于，
    所述状态信息还包括与所述工艺流程信息相对应的设备处理工件的时间信息，所述方法还包括：
    若在所述状态信息中包含所述第一信息，则根据所述状态信息的时间信息获取所述设备的第二信息；
    将所述第二信息与预设的时长上限值和预设的时长下限值进行比较；
    若所述第二信息大于所述预设的时长上限值或者小于所述预设的时长下限值，则发出警示信息。
  3. 根据权利要求2所述的设备状态监控方法，其特征在于，所述根据所述状态信息的时间信息获取所述设备的第二信息包括：
    获取与所述工艺流程信息相对应的所述设备开始处理工件的第一时间点，以及与所述工艺流程信息相对应的所述设备结束处理所述工件的第二时间点；
    根据所述第一时间点和所述第二时间点之间的时间差，计算并获取所述设备对所述工件的处理时长，所述处理时长为所述第二信息。
  4. 根据权利要求1所述的设备状态监控方法，其特征在于，所述获取产线上设备的进出料口的状态信息包括：按预设的获取周期，获取所述产线上所述设备的所述进出料口的状态信息。
  5. 根据权利要求1或2所述的设备状态监控方法，其特征在于，所述发出警示信息包括以下任一种或多种：向目标终端发出包含警示信息的邮件、向目标终端发出包含警示信息的可视化信息、向目标终端发出包含警示信息的文本信息。
  6. 一种设备状态监控器，其特征在于，包括：
    读取器，所述读取器配置为获取产线上设备的进出料口的状态信息，其中，所述状态信息包括工艺流程信息；
    处理器，所述处理器配置为判断所述状态信息中是否包含预设的第一信息，其中，所述第一信息用于指示设备处于非空转状态；
    报警器，所述报警器配置为当所述处理器确定所述状态信息中不包含所述第一信息时，发出警示信息。
  7. 根据权利要求6所述的设备状态监控器，其特征在于，
    所述状态信息还包括与所述工艺流程信息相对应的设备处理工件的时间信息；
    所述处理器还配置为：
    当所述状态信息中包含所述第一信息时，根据所述状态信息的时间信息获取设备的第二信息；和
    将所述第二信息与预设的时长上限值和预设的时长下限值进行比较；
    所述报警器还配置为当所述处理器确定所述第二信息大于所述预设的时长上限值或者小于所述预设的时长下限值时，发出警示信息。
  8. 根据权利要求6所述的设备状态监控器，其特征在于，还包括：
    计时器，所述计时器配置为预先设置获取周期；
    所述读取器还配置为按预设的获取周期，获取产线上设备的进出料口的状态信息。
  9. 根据权利要求6～8任一项所述的设备状态监控器，其特征在于，所述报警器配置为执行以下一种或多种操作：
    向目标终端发送包含警示信息的邮件；
    向目标终端发送包含警示信息的可视化信息；
    向目标终端发送包含警示信息的文本信息。
  10. 一种计算机程序，其特征在于，当所述计算机程序在计算机上运行时令计算机执行权利要求1-5任一项所述方法的步骤。
  11. 一种存储有计算机程序的计算机可读存储介质，其特征在于，所述计算机程序令计算机执行权利要求1-5任一项所述方法的步骤。
  12. 一种存储在非瞬时性的计算机可读介质上的计算机程序产品，其特征在于，所述计算机程序令计算机执行权利要求1-5任一项所述方法的步骤。
PCT/CN2018/102848 2018-01-16 2018-08-29 设备状态监控方法、监控器及监控装置 WO2019140915A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201810042399.8A CN108196520A (zh) 2018-01-16 2018-01-16 一种设备状态监控方法、模块及装置
CN201810042399.8 2018-01-16

Publications (1)

Publication Number Publication Date
WO2019140915A1 true WO2019140915A1 (zh) 2019-07-25

Family

ID=62589541

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2018/102848 WO2019140915A1 (zh) 2018-01-16 2018-08-29 设备状态监控方法、监控器及监控装置

Country Status (2)

Country Link
CN (1) CN108196520A (zh)
WO (1) WO2019140915A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117331291A (zh) * 2023-12-01 2024-01-02 上海红岩临芯半导体科技有限公司 涂胶显影设备单元均衡流片的调度方法及系统

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108196520A (zh) * 2018-01-16 2018-06-22 北京铂阳顶荣光伏科技有限公司 一种设备状态监控方法、模块及装置
CN113723315A (zh) * 2021-09-01 2021-11-30 常熟希那基汽车零件有限公司 一种基于树莓派的稼动率监视系统

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012134260A (ja) * 2010-12-20 2012-07-12 Sharp Corp 生産管理システムおよび生産管理方法
CN102937802A (zh) * 2012-11-02 2013-02-20 上海华力微电子有限公司 一种监控设备运行状态的系统及方法
CN105807742A (zh) * 2016-03-10 2016-07-27 京东方科技集团股份有限公司 生产设备监控方法及系统
CN108196520A (zh) * 2018-01-16 2018-06-22 北京铂阳顶荣光伏科技有限公司 一种设备状态监控方法、模块及装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012134260A (ja) * 2010-12-20 2012-07-12 Sharp Corp 生産管理システムおよび生産管理方法
CN102937802A (zh) * 2012-11-02 2013-02-20 上海华力微电子有限公司 一种监控设备运行状态的系统及方法
CN105807742A (zh) * 2016-03-10 2016-07-27 京东方科技集团股份有限公司 生产设备监控方法及系统
CN108196520A (zh) * 2018-01-16 2018-06-22 北京铂阳顶荣光伏科技有限公司 一种设备状态监控方法、模块及装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117331291A (zh) * 2023-12-01 2024-01-02 上海红岩临芯半导体科技有限公司 涂胶显影设备单元均衡流片的调度方法及系统
CN117331291B (zh) * 2023-12-01 2024-03-19 上海红岩临芯半导体科技有限公司 涂胶显影设备单元均衡流片的调度方法及系统

Also Published As

Publication number Publication date
CN108196520A (zh) 2018-06-22

Similar Documents

Publication Publication Date Title
WO2019140915A1 (zh) 设备状态监控方法、监控器及监控装置
US9507555B2 (en) System for the network monitoring of 3D printing and method thereof
US9571333B2 (en) Network device and method for maintaining network connection
CN111988240B (zh) 一种数据发送方法、装置、电子设备及存储介质
CN104850460A (zh) 一种服务程序线程管理方法
TW201723745A (zh) 智慧設備及其服務或應用的管理方法
US9442784B2 (en) Management device, management method, and medium storing management program
US20170160778A1 (en) Method and device for monitoring power-consuming applications, user terminal, computer program and storage medium
CN111611057B (zh) 分布式重试方法、装置、电子设备和存储介质
US20210318676A1 (en) Data delivery control apparatus, method, and program
CN111710403B (zh) 医疗设备的监管方法、设备及可读存储介质
CN115426287B (zh) 一种系统监控和优化方法、装置、电子设备及介质
US7418613B2 (en) Power supply control method, power supply control unit and information processing apparatus
US12008396B2 (en) Application state control method apparatus, and terminal and computer-readable storage medium
CN107957935B (zh) 设备的控制方法和装置、计算机可读存储介质
EP3772676B1 (en) Alarm management system and alarm management method
CN110737320A (zh) 耗电量检测方法、装置、电子设备及存储介质
CN110739249A (zh) 一种半导体设备的监控方法、装置及系统
CN111540133B (zh) 外接设备的状态检测方法、装置和相关设备
US11478933B2 (en) Equipment status estimation method and system
CN118094043A (zh) 一种页面崩溃检测方法及装置
US20240020895A1 (en) Chart generation method and information processing apparatus
US9229886B2 (en) Management data transfer between processors
CN115967608A (zh) 智能家居设备的组网管理方法、路由器和存储介质
US20070266140A1 (en) Network management apparatus

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 18901522

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

32PN Ep: public notification in the ep bulletin as address of the adressee cannot be established

Free format text: NOTING OF LOSS OF RIGHTS PURSUANT TO RULE 112(1) EPC (EPO FORM XXXX DATED 24/11/2020)

122 Ep: pct application non-entry in european phase

Ref document number: 18901522

Country of ref document: EP

Kind code of ref document: A1