WO2019131925A1 - Élément optique, réseau de microlentilles et procédé de production d'élément optique - Google Patents

Élément optique, réseau de microlentilles et procédé de production d'élément optique Download PDF

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Publication number
WO2019131925A1
WO2019131925A1 PCT/JP2018/048287 JP2018048287W WO2019131925A1 WO 2019131925 A1 WO2019131925 A1 WO 2019131925A1 JP 2018048287 W JP2018048287 W JP 2018048287W WO 2019131925 A1 WO2019131925 A1 WO 2019131925A1
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Prior art keywords
polymer material
electrode layer
optical element
voltage
electrode
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PCT/JP2018/048287
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English (en)
Japanese (ja)
Inventor
山田　泰美
利博 平井
Original Assignee
日東電工株式会社
国立大学法人信州大学
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Priority claimed from JP2018243598A external-priority patent/JP7233082B2/ja
Application filed by 日東電工株式会社, 国立大学法人信州大学 filed Critical 日東電工株式会社
Priority to CN201880083287.5A priority Critical patent/CN111512209A/zh
Priority to KR1020207017917A priority patent/KR20200100657A/ko
Priority to EP18894261.9A priority patent/EP3734347A4/fr
Priority to US16/957,822 priority patent/US20210063786A1/en
Publication of WO2019131925A1 publication Critical patent/WO2019131925A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/12—Fluid-filled or evacuated lenses
    • G02B3/14—Fluid-filled or evacuated lenses of variable focal length
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/02—Diffusing elements; Afocal elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B15/00—Special procedures for taking photographs; Apparatus therefor

Definitions

  • the present invention relates to an optical element, a microlens array, and a method of manufacturing an optical element.
  • a focusing mechanism see, for example, Patent Document 1
  • a lens driving mechanism see, for example, Patent Document 2
  • a polymer material is used for a lens holder for holding a lens, and the position of the lens is moved along the optical axis by using expansion and contraction of the polymer material by applying a voltage.
  • an organic material can be obtained by sandwiching an organic material that expands and contracts in the application direction of the electric field with a pair of electrodes, and providing an electrostrictive strain amount per unit electric field in a plane perpendicular to the application direction of the organic material layer.
  • a method of forming a convex lens, a concave lens and the like by deforming a layer and an electrode has been proposed (see, for example, Patent Document 3).
  • a gel material containing 1 to 30 parts by weight of an ionic liquid with respect to 1 to 50 parts by weight of polyvinyl chloride is known (see, for example, Patent Document 4).
  • the configuration in which the lens is moved along the optical axis changes the position of a single lens by expanding and contracting the polymer material disposed in the lens holder.
  • the holder is first deformed, and the lens position is changed by the deformation of the holder, so it is difficult to sufficiently improve the responsiveness and accuracy of the lens drive.
  • the present invention has an object to provide an optical element capable of adjusting optical characteristics with a simple configuration and a method of manufacturing the same.
  • the light scatterer is formed on the surface of the optical element by using expansion and contraction or deformation of the polymer material by voltage application.
  • an optical element having a first electrode layer, a second electrode layer, and a polymer material layer disposed between the first electrode layer and the second electrode layer, Under voltage application, the polymer material layer is deformed to form a light scatterer on the surface of the optical element.
  • a method of manufacturing an optical element is Forming a polymer material layer on the first electrode layer; Placing a second electrode layer on the polymeric material layer; A voltage is applied between the first electrode layer and the second electrode layer to deform the polymer material layer, and a part of the polymer material layer is projected on the surface of the second electrode layer To form a light scatterer, Including the steps.
  • FIG. 5D is a top view of the electrode configuration used in the microlens array of FIGS. 5A-5D.
  • FIG. 5D is a cross-sectional view of an electrode configuration used in the microlens array of FIGS. 5A-5D.
  • FIG. 5D shows the cross-sectional profile of the microlens array of FIGS. 5A-5D as a function of voltage.
  • FIG. 5D is a view for explaining the operating principle of the optical element in the form of the microlens array of FIGS. 5A to 5D. It is a 3D image when a mesh electrode is used as a comparative example.
  • FIG. It is a figure which shows the cross-sectional profile of the polymer gel used in FIG. It is a schematic diagram explaining the deformation
  • FIGS. 1A to 1C are basic configuration diagrams of an optical element 10 according to an embodiment.
  • the optical element 10 has a three-layer laminated structure in which the polymer material layer 11 is sandwiched between the pair of electrodes 12 and 13. In a state where a voltage is applied between the electrode 12 and the electrode 13, the light scatterer 15 is provided on the surface 13 s of at least one of the electrodes (for example, the electrode 13).
  • the light scatterer 15 is formed of the same material as the polymer material layer 11.
  • the polymer material layer 11 and the light scattering body 15 are formed of a gel-like polymer material (hereinafter, appropriately referred to as “polymer gel”).
  • the light scatterer 15 is formed by using expansion and contraction or deformation of the polymer gel by application of a voltage.
  • the light scatterer 15 has a convex shape.
  • convex means that at least a portion of the deformed polymer gel protrudes at least partially upward from the surface 13s (zero plane) of the electrode.
  • the present invention is not limited to the state in which all project as shown in FIG. 1A.
  • the concave shape of the light scatterer near the center of the convex light scatterer also protrudes from the opening 14 of the electrode 13 when viewed as a whole of the light scatterer 15, and the light scattering effect Have.
  • FIG. 1B not only when the top of the light scatterer 15A is slightly recessed, but also when the center of the light scatterer 15B is below the surface 13s of the electrode 13 as shown in FIG. 1C. It is included in "convex shape".
  • the polymer gel is polyvinyl chloride (PVC), polymethyl methacrylate, polyurethane, polystyrene, polyvinyl acetate, polyvinyl alcohol, polycarbonate, polyethylene terephthalate, polyacrylonitrile, silicone rubber, etc., and is transparent to the used wavelength.
  • Polymer (or resin) material can be selected appropriately.
  • PVC which is easily modified due to the action of the electric field
  • a suitable plasticizer may be added to PVC, or PVC may be dissolved in a solvent.
  • a plasticizer dibutyl adipate (DBA: dibutyl adipate), diethyl adipate (DEA: diethyl adipate), diethyl sebacate (DES: diethyl sebacate), dioctyl phthalate (DOP: dioctyl phthalate), diethyl phthalate (DEP: diethyl phthalate) etc.
  • DBA dibutyl adipate
  • DEA diethyl adipate
  • DES diethyl sebacate
  • DOP dioctyl phthalate
  • DEP diethyl phthalate
  • Tetrahydrofuran (THF) etc. can be used as a solvent.
  • the mixing ratio of the plasticizer is 50 wt% or more, preferably 75 wt% or more. If the mixing ratio is less than 50 wt%, it becomes difficult to deform the polymer material layer 11 even if a voltage is applied. When the mixing ratio is 50 wt% or more and less than 75 wt%, the polymer material layer 11 can be deformed by voltage application, but the voltage level to be applied may be high. By setting the mixing ratio to 75 wt% or more, the polymer material layer 11 can be deformed at an appropriate voltage level.
  • the electrodes 12 and 13 are not particularly limited as long as the materials have conductivity.
  • at least one of the electrode 12 and the electrode 13 is formed of metal, platinum, gold, silver, nickel, chromium, copper, titanium, tantalum, indium, palladium, lithium, niobium, an alloy of these, or the like can be used.
  • At least one of the electrode 12 and the electrode 13 may be formed of a transparent oxide semiconductor material such as ITO (Indium Tin Oxide: indium tin oxide), or a conductive polymer, conductive carbon, or the like may be used.
  • the polarities of the electrodes 12 and 13 can be set according to the direction in which the shape of the polymer material layer 11 is changed.
  • the electrode 12 is a cathode layer and the electrode 13 is an anode layer.
  • the electrode 12 and the electrode 13 are in surface contact with the polymer material layer 11.
  • the electrode 13 has an opening 14, and the light scatterers 15, 15 A, and 15 B protrude from the opening 14 over the surface 13 s of the electrode 13 in a state where a voltage is applied.
  • the diameter of the opening 14 can be appropriately set depending on the application of the optical element 10, but is less than 1 mm, preferably 300 ⁇ m or less. When the diameter of the opening 14 is 1 mm or more, it becomes difficult to cause the polymer gel to protrude from the opening 14 by the application of a voltage. By setting the diameter of the opening to 300 ⁇ m or less, it is possible to enhance the deformation efficiency of the polymer gel with respect to the voltage application, and to form a substantially uniform convex shape with respect to the center of the opening.
  • the shape of the opening 14 can be determined according to the purpose, such as a circle, an ellipse, or a polygon.
  • a solution of PVC to which a plasticizer is added is applied by a casting method or the like on the electrode 12 formed to have a predetermined dimension to form the polymer material layer 11.
  • the electrode 13 in which the pattern of the opening 14 is formed in advance is disposed on the polymer material layer 11.
  • a predetermined voltage is applied between the electrode 12 and the electrode 13 to form the light scatterer 15, 15A or 15B on the surface of the electrode 13.
  • the thickness of the polymer material layer 11 is appropriately determined in accordance with the size of the opening 14, the height h of the light scattering body 15 to be formed, the thickness of the electrodes 12 and 13 used, etc. Preferably, it is 0.1 mm to 0.5 mm. When the thickness of the polymer material layer 11 is 0.1 mm or less, it becomes somewhat difficult to handle, but there is a balance with the aperture size of the electrode 13 to the last, so a microlens array sheet having a large number of fine lenses is manufactured In some cases, the thickness of the polymer material layer 11 may be 0.1 mm or less.
  • FIG. 2 is a diagram for explaining the operation principle of the optical element 10 of the embodiment, taking the shape of FIG. 1A as an example.
  • (A) of FIG. 2 shows the state to which the voltage is not applied.
  • (B) of FIG. 2 shows the state when a voltage is applied.
  • the polymer material layer 11 In the state where no voltage is applied, the polymer material layer 11 is inside the opening 14 in a flat state.
  • the surface position of the polymer material layer 11 at this time is lower than the surface 13s of the electrode 13 in the height direction (stacking direction).
  • the surface 13s of the electrode 13 is a zero plane in the height direction.
  • the deformation of the polymer gel is based on the elasticity and voltage response characteristics of the gel, and it bulges from the opening 14 and becomes a point-symmetrical protrusion with respect to the center of the opening 14. If the composition of the polymer material layer 11 is uniform, by applying the same level of voltage, it is possible to form the light scatterer 15 having a convex shape with less variation.
  • the thickness of the polymer material layer 11 is slightly reduced by the amount of protrusion of the polymer gel from the opening 14.
  • the position of the electrode 13 in surface contact with the polymer material layer 11 is also lowered.
  • the deformation of the polymer material layer 11 is reversible, and can be returned to the initial state of FIG. 2 (B) by stopping the application of the voltage. Further, as described later, the height h of the light scatterer 15 can be adjusted in accordance with the level of the applied voltage.
  • FIG. 3 is a schematic view of an optical element 10A which is a modified example of the optical element 10.
  • an electrode 13A in which an insulator 16 is coated with a conductive film 17 is used as an anode, instead of the electrode 13 made of metal or the like in FIGS. 1A to 1C.
  • an inorganic insulator such as silicon dioxide or alumina ceramic, or an insulating resin can be used.
  • the conductive film 17 is a thin film of platinum, gold, silver, nickel, chromium, copper, titanium, tantalum, indium, palladium, lithium, niobium, an alloy thereof, a conductive polymer, a conductive carbon, a thin film of an oxide semiconductor And so on. Both the insulator 16 and the conductive film 17 may be formed of a transparent material.
  • the light-scattering body 15 is formed in the reversible deformation process by the presence or absence of voltage application similarly to FIG. As described above, since the light scattering body 15 is formed by being extruded from the opening 14 utilizing the elasticity and the voltage response characteristic of the polymer material layer 11, it is possible to obtain a good convex shape by voltage application.
  • the convex shape of the light scatterer 15 includes the cross-sectional shape of the light scatterer 15A of FIG. 1B and the cross-sectional shape of the light scatterer 15B of FIG. 1C.
  • FIG. 3 is advantageous in that it is possible to produce a transparent optical element by using a transparent insulator and a transparent conductive film.
  • the use of a metal material can be reduced to reduce the overall mass of the optical element 10A.
  • FIGS. 1A to 1C and the configuration of FIG. 3 can be extended to a configuration having light scatterers 15 on both sides of the optical element.
  • the electrode 12 which is a cathode as a common electrode and arranging the polymer material layer 11 on both sides of the electrode 12 and sandwiching it between the electrodes 13 of two anodes, light scatterers are formed on both sides of the optical element by voltage application. 15 can be generated.
  • the electrode 12 in the middle into a transparent electrode, it is possible to form a lens unit in which both sides are convex.
  • FIG. 4 is a schematic view showing a microlens array 100 as an application example of the optical element 10 of FIGS. 1A to 1C.
  • the microlens array 100 has an array of a plurality of light scatterers 15 on the surface 13 s of the electrode 13.
  • the microlens array 100 has a three-layer laminated structure in which the polymer material layer 11 is sandwiched between a pair of electrodes 12 and 13.
  • the polymer material layer 11 is, as described with reference to FIG. 1A, a polymer gel such as PC, polymethyl methacrylate, polyurethane, polystyrene, polyvinyl acetate, polyvinyl alcohol, polycarbonate, polyethylene terephthalate, polyacrylonitrile, silicone rubber, etc. It is.
  • a plasticizer such as DBA, DEA, DES, DOP, DEP may be added to the polymer gel.
  • the mixing ratio of the plasticizer is 50 wt% or more, more preferably 75 wt% or more.
  • the electrodes 12 and 13 are formed of an appropriate conductive material.
  • the electrode 12 is a cathode layer
  • the electrode 13 is an anode layer
  • the arrangement of the light scatterers 15 is formed on the surface 13s of the anode.
  • the thickness of the polymer material layer 11 is 500 ⁇ m
  • the diameter of the light scatterer 15 is 150 ⁇ m
  • the pitch between the centers is 200 ⁇ m
  • the distance between two adjacent light scatterers 15 is 50 ⁇ m.
  • the microlens array 100 is formed by using the micron-order opening formed in the film-like electrode 13 and the elasticity of the polymer gel, and the light scatterer 15 having a uniform convex shape is formed on the surface 13 s of the electrode 13. It is arranged.
  • the arrangement of the light scatterers 15 appears and / or the height of the light scatterers 15 increases. It can be changed.
  • 5A to 5D are 3D images observed while changing the level of the voltage applied to the microlens array 100 of FIG. Images obtained by changing the applied voltage to 0 V, 600 V, 700 V, and 800 V correspond to FIGS. 5A, 5 B, 5 C, and 5 D, respectively.
  • the position of the surface 13s of the electrode 13 is 0 ⁇ m, and the direction in which the light scatterer 15 protrudes is the plus side, and the side lower than the surface 13s is the minus side.
  • 3D observation is performed using a digital microscope VHX1000 manufactured by Keyence Corporation.
  • FIGS. 6A and 6B are diagrams for explaining the specifications of the electrode 3 of the sample used for the 3D observation of FIGS. 5A to 5D.
  • the electrode 13 has a plurality of openings 14. In the 6 mm ⁇ 6 mm opening area, the openings 14 with a diameter ⁇ of 150 ⁇ m are arranged in a 30 ⁇ 30 matrix.
  • the pitch P of the openings 14 is 200 ⁇ m, and the distance between the adjacent openings 14 and the openings 14 is 50 ⁇ m.
  • An ITO film is used for the electrode 12 to be a cathode, and a metal film is used for the electrode 13 to be an anode.
  • the thickness t1 of the electrode 12 is 30 ⁇ m
  • the thickness t2 of the electrode 13 is 30 ⁇ m
  • the thickness t3 of the polymer material layer 11 is 500 ⁇ m.
  • the polymer material layer 11 is prepared by adding dibutyl adipate (DBA) to PVC so that the mixing ratio is 80 wt% and completely dissolving in a solvent of THF to form a gel solution, and then the gel solution is placed on the electrode 12 Cast to a thickness of 500 ⁇ m.
  • DBA dibutyl adipate
  • the plasticizer, DBA tends to carry negative ions, and the application of a voltage can attract the polymer gel to the opening 14 of the anode.
  • the electrode 13 is disposed on the polymer material layer 11.
  • FIG. 5B when a voltage of 600 V is applied, a partial protrusion is observed in the opening 14.
  • FIG. 5C when a voltage of 700 V is applied, the polymer gel deforms in a convex shape throughout the opening 14 and protrudes from the surface of the electrode 13.
  • FIG. 5D when a voltage of 800 V is applied, the height is further increased to obtain a convex shape approximately symmetrical with respect to the center.
  • FIG. 7 is a plot of the heights of three consecutive light scatterers 15 arranged diagonally as a function of voltage application from the 3D images of FIGS. 5A-5D.
  • the vertical axis is the height from the surface 13s of the electrode 13
  • the horizontal axis is the in-plane position of the electrode 13
  • one grid is 150 ⁇ m.
  • the height position of the polymer gel inside the opening 14 is a few ⁇ m shallower than ⁇ 30 ⁇ m. This is because the surface of the polymer material layer 11 slightly enters the opening 14 due to the weight of the electrode 3.
  • the profile of the polymer gel in the opening 14 is flat.
  • the polymer gel When the voltage is applied at 600 V, the polymer gel partially protrudes from the opening 14 beyond the surface position of the electrode 13. The protrusion starts from the central part of the opening 14.
  • the protrusion of the polymer gel becomes prominent and deforms into a convex shape.
  • a convex shape with a voltage application of 800 V and a height of 40 ⁇ m is obtained.
  • the end face shape of each light scatterer is a uniform shape.
  • FIG. 8 is a view for explaining the operation principle of the microlens array by voltage application in FIGS. 5A to 5D.
  • the applied voltage is less than 500 V
  • the polymer material layer 11 is inside the opening 14 in a flat state.
  • the surface position of the polymer material layer 11 at this time is lower than the surface 13s of the electrode 13 in the height direction (stacking direction).
  • the applied voltage is less than 500 V is a voltage level determined by the elastic modulus of the polymer material layer 11 used, the diameter ⁇ of the opening 14 of the electrode 13 and the like, and this is merely an example.
  • the polymer gel bearing electrons is attracted to the end face of the opening 14 of the electrode 13 of the anode.
  • the initial stage of deformation of the polymer gel is preferentially attracted to the end face of the opening 14 which is positively charged, and the polymer gel at the center of the opening 14 is lower than the surface 13 s position of the electrode 13.
  • FIGS. 5A, 5 B, and 7 it is believed that the first protrusion of the polymer gel as it transitions from a concave to a convex state drawn around the opening 14 originates from the central portion of the opening 14.
  • the current flowing through the polymer gel is as low as 10 ⁇ A or less, the calorific value is suppressed, and it can withstand long-term use.
  • the polymer gel change of FIG. 8 occurs at all apertures 14. Under the ideal condition that the composition of the polymer material layer 11 is completely uniform and all the openings 14 are completely identical, an array of light scatterers 15 of uniform shape should be obtained. In fact, as shown in FIG. 7, although the shape of the light scatterer 15 slightly varies due to processing variation of the opening 14, composition variation inside the polymer material layer 11, etc., it is observed in FIG. 5B. Thus, an overall uniform microlens array 100 is realized.
  • FIG. 9 is, as a comparative example, a 3D image obtained by observing a change in polymer gel when using a mesh electrode using a metal wire having a circular cross section in place of the electrode 13.
  • a 70 ⁇ m diameter copper wire is woven into a 140 ⁇ m mesh to form a mesh electrode with 140 ⁇ m ⁇ 140 ⁇ m openings 114.
  • a polymer material layer 11 using a polymer gel of the same composition is applied to a thickness of 150 ⁇ m on the same 30 ⁇ m thick cathode as used in FIGS. 5A and 5B, and a mesh is formed on the polymer material layer 11 Place the electrode.
  • (A) of FIG. 9 shows a state in which no voltage is applied
  • (b) of FIG. 9 shows an observation image when a voltage of 800 V is applied between the cathode and the mesh electrode as in FIG. 5B. In the 3D observation, no protrusion is observed in the opening 114 of the mesh electrode even when a voltage of 800 V is applied.
  • FIG. 10 is a plot of the height of the polymer material layer 11 in the openings aligned along the X-X ′ line from the 3D image of FIG.
  • the vertical axis is the height from the surface of the mesh electrode.
  • the mesh electrode is formed of a copper wire having a circular cross section, and the highest position of the wire is 0 ⁇ m.
  • the height position is ⁇ 200 ⁇ m in the state where no voltage is applied because the thickness of two conductive lines is at the point where the conductive lines cross in the mesh structure. .
  • the meshing of the mesh is not necessarily uniform, and if the conductive wire contains gaps or distortions, the depth position at the cross position slightly fluctuates.
  • the measurement result of FIG. 10 is a reasonable result in consideration of an error (about ⁇ 20 ⁇ m) in the depth direction where light does not easily enter by optical measurement.
  • FIG. 11 is a diagram for explaining the operation when a voltage is applied in the configuration of the comparative example of FIG.
  • the applied voltage is 0 V in (a) of FIG. 11
  • the surface of the polymer material layer 11 is flat.
  • the conductive lines of the mesh electrode disposed on the polymer material layer 11 are in contact with the surface of the polymer material layer 11 in the tangential direction.
  • the applied voltage is further increased (for example, when it is set to 1000 V or more), there is a possibility that the polymer gel may protrude into the opening 114, but the power consumption is increased and a uniform shape as in the embodiment is obtained.
  • a microlens array having an arrangement of light scatterers 15 can not be expected.
  • FIG. 12 shows a configuration of an optical element 10B as still another modified example of the optical element 10.
  • the electrode 13 has an opening 14 and causes the light scatterer 15 to project from the opening 14 under voltage application.
  • the electrode 13 has a nonconductive region 19 of a predetermined shape.
  • the nonconductive region 19 is formed of a light transmissive material which is electrically neutral and deformable following the deformation of the polymer material layer 11.
  • the deformable nonconductive and light transmissive material may be the same material as the polymeric material layer 11 or may be a different material.
  • the nonconductive region 19 is formed of a material different from that of the polymer material layer 11, the difference in refractive index can be used to control light diffusion.
  • the planar shape of the nonconductive region 19 is appropriately selected according to the purpose and application of the optical element, and is a circle, an ellipse, a polygon or the like.
  • Non-conductive region 19 forms, for example, an opening 14 of a predetermined shape in electrode 13 in advance, and is electrically neutral within the opening and light transmissive which can be deformed following the deformation of polymer material layer 11. Is formed by filling a layer of material.
  • the thickness of the layer constituting the nonconductive region 19 does not have to be the same as the thickness of the electrode 13 and may be thinner than the thickness of the electrode 13.
  • the nonconductive region 19 and the polymer material layer 11 may not necessarily be in surface contact, and an air layer may be interposed therebetween. In the latter case, when the polymer material layer 11 is deformed by application of a voltage and comes into contact with the nonconductive region 19, the nonconductive region 19 is deformed following the deformation of the polymer material layer 11, and the light scatterer 15 can be formed.
  • FIG. 13 is a schematic view of a test apparatus for evaluating the light diffusion distribution of the optical element 10 of the embodiment.
  • the optical element 10 uses a metal film with a thickness of 30 ⁇ m in which an opening with a diameter of 150 ⁇ m is formed in the anode, and uses an ITO film with a thickness of 150 ⁇ m for the cathode.
  • a PVC gel having a plasticizer DBA content of 83% is used as a polymer material layer sandwiched between the anode and the cathode.
  • the thickness of the PVC gel is 150 ⁇ m.
  • the optical element 10 of this three-layer structure is held on a base film of polyethylene terephthalate (PET), and various direct current voltages are applied to form the light scatterer 15 on the surface of the anode.
  • PET polyethylene terephthalate
  • the optical element 10 has an ITO film serving as a cathode on the side of the laser source, and is held so that the light scatterer 15 protrudes toward the screen.
  • the voltage applied to the electrodes is changed to 0V, 600V, 700V, 800V.
  • the red parallel light L is made incident on the optical element 10 from the laser source, and the light collection and diffusion by the light scatterer 15 are evaluated.
  • the red laser light enters from the transparent cathode side of the optical element 10 and is condensed by the light scatterer 15.
  • the light scatterer 15 of the optical element 10 has a diameter of 150 ⁇ m and a height of 0 to 40 ⁇ m.
  • the focal position is very near to the optical element 10 and observation with the naked eye is difficult. Therefore, a screen is placed at a position beyond the focal point, and light diffusion once observed is observed.
  • FIG. 14 is an image showing an evaluation result in the test apparatus of FIG.
  • the upper left image is a light diffusion image on the screen when the applied voltage is 0V.
  • the upper right image is a light diffusion image on the screen when the applied voltage is 600V.
  • the lower left image is a light diffusion image on the screen when the applied voltage is 700V.
  • the lower right image is a light diffusion image on the screen when the applied voltage is 800V.
  • the light scatterer 15 When no voltage is applied (0 V), the light scatterer 15 is not formed on the anode surface of the optical element 10, and light incident from the ITO film of the cathode is transmitted through the flat PVC gel layer as it is. , Is projected on the screen. Light diffusion is small and bright spots are observed at the center of the screen.
  • the applied voltage is 600 V
  • it is in the early stage of deformation of the PVC gel, and even if deformation is started, it has not reached a convex shape that exhibits a light collecting function. Therefore, light incident from the cathode side of the optical element 10 is projected onto the screen with almost no light condensing effect, and a light spot similar to that when the applied voltage is 0 V is observed.
  • the convex light scatterer 15 is formed on the surface of the anode.
  • the laser light is condensed by the light scatterer 15 and then diffused to project the diffused light on the screen.
  • the radius of curvature of the light scatterer 15 is relatively large and the focal length is long, so the light diffusion at the screen position is not so remarkable.
  • a convex light scatterer 15 having a high height is formed by the surface of the anode.
  • the radius of curvature of the light scatterer is small, the focal length is short, and the light scatters after being focused in the vicinity of the optical element 10. At the position of the screen, highly diffuse light is observed.
  • the focal length of the light scatterer 15 can be made variable by adjusting the applied voltage.
  • the optical element 10 of the embodiment can be used as a variable focus lens or a variable shape lens.
  • FIG. 15 is a schematic view of an imaging device 150 using the microlens array 100 of the embodiment.
  • the imaging device 150 has a microlens array 100 having an array of a plurality of light scatterers 15, and an imaging element array 130 in which a plurality of imaging elements are arrayed.
  • the imaging device is formed of a charge coupled device (CCD), a complementary metal oxide semiconductor (CMOS) sensor, or the like.
  • CMOS complementary metal oxide semiconductor
  • Three color filters 131 may be arranged corresponding to the arrangement of the imaging elements. In this example, red (R), green (G) and blue (B) color filters 131R, 131G and 131B are alternately arranged.
  • FIG. 16 is a schematic view of a lighting device 250 using the microlens array 100 of the embodiment.
  • the lighting device 250 includes a light source 230 such as an LED lamp, and a microlens array 100 disposed on the front side of the light source 230 on the output side.
  • a light source 230 such as an LED lamp
  • a microlens array 100 disposed on the front side of the light source 230 on the output side.
  • the microlens array 100 is formed to be 1 mm or less in thickness, and both the anode and the cathode can be made transparent, so application to an ultra-thin camera, head mounted display (HMD), microlens array (MLA) sheet, etc. In addition, it is applicable also to the field of medical care, such as an endoscope system.
  • the optical element 10 having a single light scatterer 15 can also be applied to a light diffusion sheet, a lens sheet or the like in the field of medicine and image formation.
  • the optical element and the microlens array of the embodiment generate light scatterers having various orientation distributions by controlling the voltage on / off or adjusting the voltage level without using a complicated mechanism. It can be done. It is desirable that the applied voltage be low. Therefore, the applied voltage is reduced by devising the composition of the polymer material used for the optical element and the microlens array.
  • the driving voltage of the optical element 10 or the microlens array 100 can be obtained by adding an ionic liquid satisfying a predetermined condition to the gel-like polymer material (polymer gel) used in the polymer material layer 11. Reduce.
  • the addition of the ionic liquid can enhance the deformation efficiency of the polymer material.
  • the ionic liquid is a salt composed of a cation (positively charged ion) and an anion (negatively charged ion), and is a liquid at 25 ° C.
  • One of the predetermined conditions is that the ionic liquid has an anion (negative ion) transport number of a certain value or more at 25 ° C. Details of this condition will be described later.
  • the polymer material is, as described above, polyvinyl chloride (PVC), polymethyl methacrylate, polyurethane, polystyrene, polyvinyl acetate, polyvinyl alcohol, polycarbonate, polyethylene terephthalate, polyacrylonitrile, silicone rubber and the like.
  • PVC polyvinyl chloride
  • polymethyl methacrylate polyurethane
  • polystyrene polyvinyl acetate
  • polyvinyl alcohol polycarbonate
  • polyethylene terephthalate polyacrylonitrile
  • silicone rubber polyacrylonitrile
  • the weight ratio of the ionic liquid to such a polymer material is 0.2 wt% or more and 1.5 wt% or less, more preferably 0.3 wt% or more and 1.0 wt% or less.
  • the drive voltage of the optical element or the microlens array can be reduced by mixing this weight ratio of the ionic liquid. This basis will also be described later.
  • a suitable plasticizer may be added to the polymer gel or it may be dissolved in a solvent.
  • a plasticizer dibutyl adipate (DBA: dibutyl adipate), diethyl adipate (DEA: diethyl adipate), diethyl sebacate (DES: diethyl sebacate), dioctyl phthalate (DOP: dioctyl phthalate), diethyl phthalate (DEP: diethyl phthalate) etc.
  • DBA dibutyl adipate
  • DEA diethyl adipate
  • DES diethyl sebacate
  • DOP dioctyl phthalate
  • DEP diethyl phthalate
  • solvent ether solvents such as tetrahydrofuran (THF) can be used.
  • the polymer material to which the ionic liquid is added is applicable to any of the optical element 10 of FIGS. 1A to 2, the optical element 10A of FIG. 3, the optical element 10B of FIG. 12, and the microlens array 100 of FIG. is there.
  • the drive voltage of the polymer material layer 11 can be reduced to 200 V or less, more preferably 150 V or less, by adding an ionic liquid under predetermined conditions to the polymer material.
  • FIG. 17 shows the voltage response characteristics of the polymer gel when various ionic liquids are added.
  • a polymer gel in which PVC having a weight average molecular weight of 230,000 is dissolved in a solvent of tetrahydrofuran (THF) is prepared, and various ionic liquids are added to prepare multiple types of samples.
  • THF tetrahydrofuran
  • Each sample is sandwiched between the electrodes 12 and 13 as shown in FIGS. 1A to 1C and FIG. 2, and the applied voltage is changed to measure the voltage dependency of the peak height h.
  • the voltage dependence of peak height is also measured using a polymer gel to which no ionic liquid is added.
  • peak height refers to the value of the portion where the height h from the surface 13s of the electrode 13 is the highest.
  • the polymer gel of the sample and the comparative example is applied to a thickness of 300 ⁇ m on the electrode 12 to be the lower electrode.
  • a metal thin film with a thickness of 20 ⁇ m in which holes with a diameter of 100 ⁇ m are formed is disposed as the upper electrode 13.
  • the voltage applied between the electrode 12 and the electrode 13 is changed between 0 V and 400 V, and the peak height h of the light scatterer 15 protruding from the electrode 13 is measured.
  • the weight ratio of EMI-BF 4 to PVC is 0.5 wt%.
  • EMI is a cation and BF 4 is an anion.
  • the weight ratio of OMI-BF 4 to PVC is 0.5 wt%.
  • OMI is a cation and BF 4 is an anion.
  • Line C shows the voltage dependence of the peak height of sample C to which 1-ethyl-3-methylimidazolium dicyanamide (EMI-DCA) is added as an ionic liquid.
  • EMI-DCA 1-ethyl-3-methylimidazolium dicyanamide
  • the weight ratio of EMI-DCA to PVC is 0.5 wt%.
  • EMI is a cation
  • DCA C 2 N 3
  • the weight ratio of TBP-BF 4 to PVC is 0.1 wt%.
  • TBP is a cation, and BF 4 is an anion.
  • Type of ionic liquids are the same as sample D, but the weight ratio of TBP-BF 4 for PVC is 0.5 wt%.
  • TBP is a cation, and BF 4 is an anion.
  • the weight ratio of EMI-TFSI to PVC is 0.5 wt%.
  • EMI is a cation and TFSI is an anion.
  • the weight ratio of TBP-MES to PVC is 0.5 wt%.
  • TBP is a cation and MES is an anion.
  • Line W shows the voltage dependence of the peak height of the PVC polymer gel of sample W to which the ionic liquid is not added as a comparative example.
  • the polymer gel W of the comparative example in which the ionic liquid is not added the height of the light scatterer 15 increases substantially linearly with the applied voltage.
  • a voltage of 400 V is required.
  • Sample A to which 0.5 wt% of EMI-BF 4 was added as an ionic liquid and Sample B to which 0.5 wt% of OMI-BF 4 was added were polymer material layers when a voltage of 100 V or less was applied.
  • 11 can be driven to a height of 20 ⁇ m or more.
  • the sample A is displaced to a height of less than 40 ⁇ m by application of a voltage of 50 V and a height of 20 ⁇ m and application of a voltage of 200 V.
  • the sample B is also displaced to a height of 25 ⁇ m at a voltage application of 100 V and a height of 30 ⁇ m at a voltage application of 200 V.
  • Sample C added with 0.5 wt% of EMI-DCA can obtain the same 20 ⁇ m peak height with about half applied voltage (210 to 220 V) as compared with sample W to which no ionic liquid is added. The deformation efficiency has been greatly improved.
  • Sample D to which 0.1 wt% of TBP-BF 4 is added, can cause the light scatterer 15 to project from the surface 13 s of the electrode 13 by applying a voltage of 50 V, but the peak height It remains less than 10 ⁇ m and the change in peak height is small in the range of 50V to 400V. In the sample D, it is difficult to accurately adjust the height of the light scatterer 15 by voltage control.
  • FIG. 18 is a view showing the relationship between the displacement of the polymer gel and the physical properties of the ionic liquid.
  • the samples A to H to which various ionic liquids are added, in which the displacement is positive, indicate that the polymer gel protrudes from the surface 13s of the electrode 13 by application of a voltage and the light scatterer 15 is formed.
  • the negative displacement is one in which the polymer gel does not protrude from the surface 13s of the electrode 13 even when a voltage is applied.
  • each ionic liquid As physical properties of each ionic liquid, conductivity, size of potential window, diffusion coefficient and transport number of negative ions at 25 ° C. are measured. Since some of the used ionic liquids are solid at 25 ° C., the diffusion coefficient and transport number of negative ions at 80 ° C. are measured for those melted by heating to 80 ° C.
  • the conductivity of sample C is smaller by two orders of magnitude compared with samples A and B, the polymer gel to which sample C is added is positively displaced.
  • sample H is much more conductive than sample C, but the polymer gel is not positively displaced. It is believed that the conductivity of the ionic liquid is not directly related to the deformation efficiency of the polymer gel.
  • the potential window is a potential region where electrochemical stability is maintained in the system of FIG.
  • the wider the voltage window (the larger the value), the wider the range in which the system is electrochemically stable.
  • the potential windows of the sample A and the sample F are the same width, the polymer gel of the sample A is displaced to the plus, and the polymer gel of the sample F does not obtain the plus displacement.
  • the width of the potential window of the ionic liquid is also considered not to be directly related to the deformation efficiency of the polymer gel.
  • the diffusion coefficient and transport number of anions (negative ions) at 25 ° C. are examined.
  • the diffusion coefficient of positive and negative ions contained in the ionic liquid is measured using solid-state NMR (VNMR System manufactured by Varian) as a measurement instrument.
  • VNMR System manufactured by Varian
  • an ionic liquid is injected into the capillary and set in the apparatus.
  • the signal intensity with respect to the change of the magnetic field is measured at a predetermined temperature (in this case, 25 ° C. and 80 ° C.), and the diffusion coefficients of positive and negative ions are calculated from the Stokes-Einstein equation.
  • the transport number of negative ions represents the ratio of the current carried by the anion to the total current when a current is applied to the ionic liquid.
  • the transport number of the negative ion is calculated as the ratio of the diffusion coefficient of the negative ion to the sum of the diffusion coefficient of the negative ion and the diffusion coefficient of the positive ion determined above (D anion / (D cation + D anion )).
  • the ionic liquids used for the samples A, B, C, F, and H were liquids at 25 ° C., and the diffusion coefficient and transport number of negative ions of each ionic liquid were calculated from the measurement results by liquid chromatography.
  • the transport number of negative ions of the ionic liquid at 25 ° C. is 0.4 or more.
  • the transport number of negative ions at 25 ° C. of the ionic liquid used in samples F and H which can not obtain positive displacement is smaller than 0.4. From this, it is considered that the transport number of negative ions at room temperature influences the deformation efficiency of the polymer gel.
  • the diffusion coefficient can not be measured.
  • this ionic liquid was heated to 80 ° C. and melted, the diffusion coefficient and transport number of negative ions were calculated, and the transport number was 0.6.
  • the anion size and the cation size of the ionic liquid used in sample G are also moderate, the ionic liquid is solid at 25 ° C. Therefore, even if the ionic liquid is dispersed in the polymer gel by stirring, the deformation efficiency of the gel is Is considered to have contributed less.
  • ionic liquids can be used by selecting the thing which does not influence deterioration of a cathode as a cation.
  • Li-BF 4 - may be used as ionic liquids.
  • FIG. 19 is a diagram showing the relationship between the amount of ionic liquid added and the displacement of the polymer gel.
  • the abscissa represents the content (wt%) of the ionic liquid relative to the polymer material of the polymer gel, and the ordinate represents the peak height of the displacement.
  • EMI-BF 4 of sample A is used as the ionic liquid.
  • the amount of EMI-BF 4 added is varied in the range of 0 wt% to 5.0 wt%. Further, the applied voltage is changed to 0V, 50V, 100V, 200V, and 400V.
  • positive displacement can be obtained when the amount of ionic liquid added is in the range of 0.2 wt% to 1.5 wt%. In addition, the displacement is maximized in the range of 0.3 wt% to 1.0 wt%.
  • the light scatterer 15 can be formed on the surface of the electrode 13 by applying a voltage of 100 V or less.
  • the addition amount of the ionic liquid is 5.0 wt%, a memory phenomenon occurs in which the deformation does not return even when the voltage is turned off.
  • the weight ratio of the ionic liquid to the polymer is desirably 0.2 wt% to 1.5 wt%, and more preferably 0.3 wt% to 1.0 wt%. This is also in agreement with the result of FIG.
  • FIG. 20 is a view showing the evaluation results of the light diffusion distribution of the light scatterer 15 formed by applying a voltage to the polymer material layer 11 for each addition amount of the ionic liquid.
  • the optical element 10 of FIG. 2 is produced by using a polymer material layer 11 in which EMI-BF 4 is used as the ionic liquid and the addition amount of EMI-BF 4 is changed.
  • the polymer material layer 11 contains PVC as a polymer gel and dibutyl adipate (DBA) as a plasticizer.
  • DBA dibutyl adipate
  • the electrode 12 to be a cathode is formed of ITO having a thickness of 150 ⁇ m, and a voltage is applied to the polymer material layer 11 sandwiched between the electrode 12 and the electrode 13 to form a light scatterer 15. Similar to FIG. 13, the laser is disposed on the side of the electrode 12 formed of ITO, and the screen is disposed on the side on which the light scatterer 15 is formed. Laser light of red parallel light is incident on the optical element 10 from the back surface side of the electrode 12, and the light diffusion state on the screen is observed.
  • the screen is disposed on the light exit side of the light scatterer 15 at a position farther than the focal point of the light scatterer 15.
  • the light diffusion once collected at the focal point of the light scatterer 15 is observed on the screen. This is because the diameter of the light scatterer 15 of the optical element 10 is as small as 100 ⁇ m and the height is as small as about 0 to 40 ⁇ m, and the focal position thereof is very near the optical element 10 and observation with the naked eye is difficult. By observing the light diffusion at a position beyond the focus of the light scatterer 15, it is possible to evaluate the light collection state.
  • the light scatterer 15 protruding from the surface of the electrode 13 is not formed even when a voltage of 200 V is applied.
  • the red parallel light incident from the back surface of the optical element 10 passes through the optical element 10 as collimated light without being collected, and spots of the same size are formed on the screen regardless of the level of the applied voltage. .
  • a light scatterer 15 is formed on the surface of the electrode 13 by applying a voltage of 50 V, and light which has started to be diffused after being collected is observed at the screen position .
  • the light scatterer 15 having a larger peak height, ie, a sharp curvature, is formed on the surface of the electrode 13 than when 50 V is applied.
  • the light incident from the back side of the optical element is greatly diffused after being condensed, and no spot is observed at the screen position.
  • the focal length of the light scatterer 15 can be made variable by adjusting the applied voltage.
  • the optical element 10 of the embodiment can be used as a variable focus lens or a variable shape lens.
  • FIG. 21 is a view showing the influence of the ionic liquid on the cathode degradation.
  • a PVC gel to which various ionic liquids are added is applied on a metal substrate, and an ITO electrode is disposed on the PVC gel as a counter electrode.
  • the types of PVC gel to be applied are Sample A (containing 0.5 wt% EMI-BF 4 ), Sample B (containing 0.5 wt% OMI-BF 4 ), Sample C (0.5 wt% EMI-DCA), Sample D (with 0.1 wt% TBP-BF 4 ), Sample H (with 0.5 wt% EMI-FSI), and Sample G (0.5 wt%) (Including TBP-MES).
  • Sample A to D have obtained positive displacement in FIG.
  • Sample D is a sample in which the added amount is reduced to 0.1 wt% because displacement is not obtained when the weight ratio of the ionic liquid is set to 0.5 wt% the same as the other samples.
  • the surface condition of the electrode is observed from the ITO side while changing the voltage level applied to the PVC gel by using a metal substrate as a positive electrode and ITO as a negative electrode.
  • the polymeric material to which the ionic liquid is added is applicable to the microlens array 100 of FIG. 4 as described above.
  • an array of light scatterers 15 can be formed on the surface 13 s of the electrode 13 to be an anode.
  • an array of light scatterers 15 having a height of 20 ⁇ m or more can be formed by applying a voltage of 100 V or less.
  • An array of light scatterers 15 having a diameter of 100 ⁇ m and a center-to-center pitch of 150 ⁇ m can be formed using the polymer material layer 11 to which the ionic liquid is added. At this time, the distance between two adjacent light scatterers 15 may be set to 50 ⁇ m.
  • the microlens array 100 is formed by utilizing the micron-order opening formed in the film-like electrode 13 and the voltage displacement characteristic of the polymer gel, and a light scattering member having a uniform convex shape on the surface 13 s of the electrode 13 Fifteen are arranged. Depending on the level of the voltage of 200 V or less applied between the electrodes 12 and 13, the arrangement of the light scatterers 15 can appear and / or the height of the light scatterers 15 can be adjusted.
  • insulation such as a resin having a predetermined opening formed as shown in FIG. It is also possible to use one coated on both sides of the sheet and the inside of the opening with a conductive film.
  • a light transmitting non-conductive area that can be deformed following the displacement of the polymer material layer 11 may be provided in the electrode 13.
  • the present invention has been described above based on the specific embodiments, the present invention is not limited to the above-described configuration examples.
  • the arrangement of the light scatterers 15 is not limited to the matrix arrangement, and may be a staggered arrangement.
  • the shape of the opening 14 of the electrode 13 may be hexagonal and arranged finely.
  • the optical elements 10, 10A, 10B of the embodiment and the microlens array 100 of FIG. 7 can be expanded to a configuration having the light scatterers 15 on both sides.
  • the electrode 12 as a cathode as a common electrode, arranging the polymer material layer 11 on both sides of the electrode 12 and sandwiching it between two electrodes 13 as an anode, voltage is applied to both sides of the optical element or the microlens array sheet
  • the light scatterer 15 can be generated.
  • the electrode 12 disposed in the middle into a transparent electrode it is possible to form a lens unit in which both sides are convex.
  • the optical element and the microlens array of the embodiment can generate light scatterers having various orientation distributions without using a complicated mechanism.
  • the light scattering material can be generated efficiently with the reduced driving voltage.

Abstract

L'invention concerne : un élément optique qui a une structure simple et avec lequel il est possible d'ajuster ses propriétés optiques ; et un procédé de production de celui-ci. L'élément optique (10) comprend : une première couche d'électrode (12) ; une seconde couche d'électrode (13) ; et une couche de matériau polymère (11) positionnée entre la première couche d'électrode (12) et la seconde couche d'électrode (13). Lorsqu'une tension est appliquée, la couche de matériau polymère (11) est déformée pour former un corps de diffusion de lumière (15) sur la surface de l'élément optique (10).
PCT/JP2018/048287 2017-12-28 2018-12-27 Élément optique, réseau de microlentilles et procédé de production d'élément optique WO2019131925A1 (fr)

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CN201880083287.5A CN111512209A (zh) 2017-12-28 2018-12-27 光学元件、微透镜阵列、及光学元件的制作方法
KR1020207017917A KR20200100657A (ko) 2017-12-28 2018-12-27 광학 소자, 마이크로렌즈 어레이 및 광학 소자 제작방법
EP18894261.9A EP3734347A4 (fr) 2017-12-28 2018-12-27 Élément optique, réseau de microlentilles et procédé de production d'élément optique
US16/957,822 US20210063786A1 (en) 2017-12-28 2018-12-27 Optical device, microlens array, and method of fabricating optical device

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