WO2019130411A1

WO2019130411A1 - Measurement device

Info

Publication number: WO2019130411A1
Application number: PCT/JP2017/046551
Authority: WO
Inventors: 伊藤　明; 亜里沙川添
Original assignee: 株式会社Ｆｕｊｉ
Priority date: 2017-12-26
Filing date: 2017-12-26
Publication date: 2019-07-04
Also published as: JPWO2019130411A1; JP7404072B2

Abstract

The purpose of the present invention is to make it possible for a measurement device, which is capable of automatically measuring the electrical characteristics of a component, to stably detect the electrical characteristics. This measurement device is installed in a mounting device for mounting a component on a circuit board and measures the electrical characteristics of a component held on a holding table and sandwiched between a pair of probes. The external conductors of a plurality of coaxial cables composing a pair of coaxial cable parts respectively connected to the pair of probes are electrically connected to each other and are made to have the same potential. Because the external conductors of the plurality of coaxial cables are made to have the same potential in the vicinity of the pair of probes in this way, it is possible to reduce noise and stably detect the electrical characteristics of the component.

Description

measuring device

The present disclosure relates to a measuring device that inspects a component mounted on a circuit board.

Patent Document 1 shows a measuring apparatus mounted on a mounting machine which picks up a component supplied by a component supply device and mounts the component on a circuit board, and (a) a holding stand capable of holding the component, (b) It is described that it includes a pair of measuring elements provided so as to be close to and separated from one another and capable of measuring the electrical characteristics of the part.

Unexamined-Japanese-Patent No. 2017-26325

Overview

Task

An object of the present disclosure is to make it possible to stably detect electrical characteristics in a measurement device capable of automatically measuring the electrical characteristics of parts.

Means, action and effect for solving the problem

The measuring device according to the present disclosure includes a holding table mounted on a mounting machine and holding a component, and a pair of measuring elements provided so as to be able to approach and separate from each other, and the component is held by the pair of measuring elements sandwiching the component. A plurality of coaxial cable sections respectively connected to each of the pair of probes and provided in the pair of coaxial cable sections, to constitute a pair of coaxial cable sections. The outer conductors of each of the coaxial cables are electrically connected to each other to include the same potential portion at the same potential. As described above, since the outer conductor of each of the plurality of coaxial cables is at the same ground potential, noise can be reduced, and the electrical characteristics of the component can be stably detected.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view of a placement machine including a measurement device that is an embodiment of the present disclosure. It is a perspective view of the principal part of the above-mentioned measuring device. It is sectional drawing of the principal part of the said measuring apparatus. It is a partial top view of the said measuring apparatus. It is an air circuit diagram contained in the above-mentioned measuring device. It is a figure which shows notionally the coaxial cable used for the said measuring apparatus. It is sectional drawing of the same electric potential part provided in the said coaxial cable. It is the figure which decomposed | disassembled the said same electric potential part. It is a figure which shows the periphery of the measuring element side connection part of the said coaxial cable. It is a figure which shows notionally the connection state of the coaxial cable of the said measuring apparatus. It is a perspective view showing the whole of the above-mentioned measuring device. It is a block diagram which represents notionally the periphery of the control apparatus of the said measuring apparatus. It is a flowchart showing the electrical characteristic measurement program memorize | stored in the memory | storage part of the said control apparatus. FIG. 14A is a view showing an initial state of the measurement apparatus, FIG. 14B is a view showing a clamp state, FIG. 14C is a view showing a measurement state, and FIG. 14D is a view showing a discard state.

Embodiment

Hereinafter, a mounting machine including a measuring device which is an embodiment of the present disclosure will be described in detail based on the drawings.

The mounting machine shown in FIG. 1 mounts components on a circuit board, and includes a main body 2, a circuit board carrying and holding device 4, a component feeding device 6, a head moving device 8 and the like.
The circuit board transport holding device 4 transports and holds a circuit board P (hereinafter referred to as a substrate P) in a horizontal posture, and in FIG. The width direction is y direction, and the thickness direction of the substrate P is z direction. The y direction and the z direction are the front-rear direction and the up-down direction of the mounting machine, respectively. The x direction, the y direction, and the z direction are orthogonal to one another. The component supply device 6 supplies an electronic component (hereinafter referred to as a component) s to be mounted on the substrate P, and includes a plurality of tape feeders 14 and the like. The head moving device 8 holds the mounting head 16 and moves the mounting head 16 in the x, y and z directions. The mounting head 16 has a suction nozzle 18 that suctions and holds the component s.

Reference numeral 20 denotes a camera. The camera 20 picks up an image of the component s held by the suction nozzle 18, and it is determined whether or not the component s is to be attached to the circuit board P based on the image taken by the camera 20. It is judged. The code | symbol 22 shows a measuring apparatus. The measuring device 22 measures the electrical characteristics of the component s. As the electrical characteristics of the component s, L (inductance), C (capacitance), R (resistance), Z '(impedance) and the like correspond, and one or more of these are measured by the measuring device 22.

The measuring device 22 is provided on the main body of the circuit board transport holding device 4 via the trash can 26. A waste passage 28 is provided between the waste box 26 and the measuring device 22, and the parts s whose electrical characteristics have been measured are stored in the waste box 26 through the waste passage 28. The measuring device 22 is provided on the trash can 26 so as to be adjustable in height. As shown in FIGS. 2 and 11, a base portion 30 is engaged with the trash can 26 so as to be able to move up and down, and a fastening portion including a bolt, a nut, etc. (hereinafter referred to as a fastening portion) The term “generally refers to one including members for fastening two members in a wide manner” 31 (see FIGS. 3 and 4). The base portion 30 and the measurement stand 29 can be integrally raised and lowered. In addition, through

holes

29a and 30a that can communicate with the waste passage 28 are provided in the measurement stand 29 and the base portion 30, respectively (see FIGS. 3 and 4).

As shown in FIGS. 2 to 4 and 11, the measuring device 22 includes (i) the measurement stand 29 and the base portion 30, (ii) a holding stand 32 capable of holding the component s, (iii) the stator 34 and the mover. 36, (iv) a holder moving device 40 for moving the holder 32, (v) a mover moving device 41 for moving the mover 36 closer to or away from the stator 34, (vi) It includes an electrical characteristic detection unit 42 and the like as an electrical characteristic acquisition unit. In the present embodiment, the component s has electrodes at both ends and can be gripped by the pair of measuring elements 37, and can be, for example, a corner chip.

The holding table 32 includes a component placement unit 44 and a placement unit holder 46 that holds the component placement unit 44. A V groove 44c is formed in the component placement portion 44, and the component s is placed thereon. The component placement unit 44 abuts on the placement unit holder 46 and is fixed by the fastening unit 47. Further, the mounting portion holding body 46 abuts on the measurement stand 29 via the stopper 90 (see FIG. 3), and the measurement stand 29 is fixed to the base portion 30 by the fastening portion 31 as described above. The component mounting portion 44, the mounting portion holder 46, the stopper 90, the measuring stand 29, the base portion 30, the

fastening portions

31 and 47, etc. are made of a conductive material which is a conductive material. . Also, the base portion 30 is grounded. By the above, the component placement unit 44 is grounded. Further, thereby, the part s placed on the part placement unit 44 can be de-electrified.

The stator 34 and the mover 36 respectively have

opposing surfaces

34 f and 36 f facing each other, and the component s is gripped by the pair of

opposing surfaces

34 f and 36 f. The stator 34 is held by the stator holder 55, and the stator holder 55 is fixed to the measurement stand 29. The mover 36 is movably held integrally with the mover holder 56, and the mover holder 56 is provided movably with respect to the measurement stand 29. As a result, the mover 36 can be moved toward and away from the stator 34.

As shown in FIGS. 2 and 4 and the like, the coaxial cable portion 58 is connected to the stator holder 55 via the L-shaped bracket 57, and the coaxial cable via the L-shaped bracket 59 is connected to the mover holder 56. The unit 60 is connected. The L-shaped

brackets

57, 59 are shaped to have a first side and a second side substantially orthogonal to each other. The stator support 55, the stator 34, the mover support 56, the mover 36, and the

brackets

57 and 59 are all made of a conductive material, so the stator 34, the mover 36, and the coaxial cable are provided. The

parts

58 and 60 are electrically connected. Further, an electrical characteristic measurement circuit 61 is formed by the stator 34, the mover 36 and the like, the

coaxial cable portions

58 and 60, the electrical characteristic detection unit 42 and the like.

A cover 62 is attached to the holder 32. The cover portion 62 covers the periphery of the part at the time of measurement. Further, the cover portion 62 functions to prevent the diffusion of the air and to prevent the scattering of the parts s dropped by the ejection of the air.

As shown in FIG. 3, an air passage may be provided to a member on the stator side (for example, an upper portion of the stator 34, a portion above the stator 34 of the stator holder 55, one or more of the measurement bases 29). 70 are formed and connected to the

air cylinders

72, 74. The opening 70 a of the air passage 70 is formed to face the facing surface 36 f of the mover 36. Further, an ionizer 76 is provided in the air passage 70. The ionizer 76 causes corona discharge to ionize air.

As shown in FIG. 5, the air cylinder 72 is a drive source of the holder moving device 40, and the mounting portion holder 46 is connected to the piston rod 72p (see FIG. 5) of the air cylinder 72. A solenoid valve device 80 is provided between the two

air chambers

72a and 72b of the air cylinder 72, the air source 78, the air passage 70, and the filter (atmosphere). The movement of the mounting portion holder 46 (holding base 32) and the like are controlled by the control of the solenoid valve device 80.

The air cylinder 74 is a drive source of the mover moving device 41, and the mover holder 56 is connected to the piston rod 74p. An air source 78, an air passage 70, and a filter (atmosphere) are connected to the

air chambers

74a and 74b of the air cylinder 74 via the solenoid valve device 82. The movement of the mover holder 56 (the mover 36) is controlled by the control of the solenoid valve device 82. Further, when the holder 32 advances and when the mover 36 retracts, air is supplied from the

air cylinders

72 and 74 to the air passage 70 and supplied to the opposing surface 36 f of the mover 36.

A pair of

guide rods

86 and 87 extending in the y direction is provided between the holding table 32 and the mover holding body 56, and extends in the y direction between the mover holding body 56 and the measurement stand 29. A pair of

guide rods

88 and 89 are provided, and the holding base 32 and the mover 36 move relative to each other in the y direction with respect to the measuring base 29 by these

guide rods

86, 87, 88 and 89 (see FIG. 2). While being made possible, the holding stand 32 and the mover 36 can be moved relative to each other in the y direction.

Further, as shown in FIG. 3, a stopper 92 is provided on the stator side of the mover holding member 56, and a stopper 90 is provided on a portion of the measurement stand 29 that holds the stator holding member 55. The stopper 92 defines an approach limit between the mover holder 56 and the holder 32 (placement holder 46), and the stopper 90 includes the stator 34 (measuring stand 29) and the holder 32. It defines the access limit.

On the other hand, as shown in FIGS. 4 and 11, the surface 29 f of the measurement stand 29 and the surface 30 f of the base portion 30 are connected by the ground wire 132. One end of the ground wire 132 is attached to the first side of the L-shaped bracket 130 by the fastening portion 131, and the other end of the ground wire 132 is attached to the surface 30f of the base portion 30 by the fastening portion 133. The second side of the L-shaped bracket 130 is attached to the surface 29 f of the measuring table 29 by the fastening portion 134. In addition, the L-shaped bracket 130 and the

fastening portions

131, 133 and 134 are made of a conductive material. Therefore, the measurement stand 29 and the base portion 30 are electrically connected by the ground wire 132. The ground wire 136 is also attached to the lower end portion 30 d of the base portion 30 by the fastening portion 137. Thereby, the entire charge removal of the measuring device 22 is achieved.

In the electrical characteristic measurement circuit 61, as shown in FIGS. 4 and 10, the

coaxial cable sections

58 and 60 respectively include two

coaxial cables

58a and 58b and

coaxial cables

60a and 60b. The

coaxial cables

58a, 58b, 60a, 60b respectively have the same structure, and as shown in FIG. 6, the inner conductor 140, the insulator (dielectric) 142, the outer conductor 144 are coaxially provided. , A protective film 146 and the like. The outer conductor 144 is often formed of a braided copper wire meshed with copper wire and is generally connected to the ground. By providing the outer conductor 144, the leakage of the transmitted signal to the outside is suppressed. From this, the copper wire of the outer conductor 144 can be referred to as a shield wire. Further, the inner conductor 140, the insulator 142 and the outer conductor 144 are covered with a protective film 146.

In this embodiment, the electrical characteristics of the component s are measured by the automatic balance bridge method, and the

coaxial cables

58a, 58b, 60a, 60b are connected by the four-terminal pair measurement method. The method of measuring the electrical characteristics of the component s and the method of connecting the

coaxial cable portions

58 and 60 are not limited to the automatic balance bridge method and the four-terminal pair measurement method.

As shown in FIGS. 7 to 10, the inner conductors 140 of the

coaxial cables

58a and 58b are connected to one (identical) probe-side connector 58c, and the probe-side connector 58c is an L-shaped bracket 57. It is attached to the first side by the fastening portion 57a. The inner conductor 140 of the

coaxial cables

60a and 60b is also connected to one probe-side connection portion 60c, and the probe-side connection portion 60c is attached to the first side of the L-shaped bracket 59 by a fastening portion 59a. In the present embodiment, the measurement element

side connection portions

58c and 60c are respectively used as common end portions of the

coaxial cables

58a and 58b and the

coaxial cables

60a and 60b.

Further, as shown in FIGS. 4 and 10, the detection unit

side connection portions

58p, 58q, 60p, 60q, which are the other end portions of the

coaxial cables

58a, 58b, 60a, 60b, respectively, are electrically characteristic detection portions 42. Are connected to the terminals Hc, Hp, Lc, Lp. The L-shaped

brackets

57 and 59 are attached to the stator holder 55 and the mover holder 56 by the

fastening portions

57b and 59b, respectively, at the second side.

As conceptually shown in FIG. 10, at the terminal Hc, the output of the AC power supply is supplied to the inner conductor 140 of the coaxial cable 58 a and returned via the outer conductor 144. At the terminal Hp, the potential difference between the inner conductor 140 and the outer conductor 144 of the coaxial cable 58b is detected as a voltage value applied to the component s. At the terminal Lc, the current flowing between the inner conductor 140 and the outer conductor 144 of the coaxial cable 60a is acquired as the current value flowing through the component s. Strictly speaking, the potential difference between the resistance R of the resistance value x (not shown) provided between the inner conductor 140 and the outer conductor 144 is acquired, and the current flowing in the resistance R is acquired based on the potential difference and the resistance value x. Be done. At the terminal Lp, the potential difference between the inner conductor 140 and the outer conductor 144 is detected, and the components (oscillator etc.) of the electrical characteristic detection unit 42 (not shown) are controlled so that the detected potential difference becomes zero. As a result, the current flowing through the resistor R and the current flowing through the component s become the same, and in this state, the current flowing through the resistor R obtained at the terminal Lc becomes the current value flowing through the component s.

The same potential portion 150 is provided on each of the

coaxial cables

58a, 58b, 60a, 60b, and the external conductors 144 of the

coaxial cables

58a, 58b, 60a, 60b are electrically connected to each other in the same potential portion 150. . As shown in FIGS. 7 and 8, the protective film 146 is peeled off for each of the

coaxial cables

58a, 58b, 60a, 60b, and the copper foil tape 152 is wound around the exposed outer conductor 144, and the solder 154 is applied. It is In addition, the portion where the protective film 146 is peeled off is covered by the protective tube 156.

In this manner, in the same potential portion 150, as shown in FIG. 10, the outer conductors 144 of the

coaxial cables

58a, 58b, 60a, 60b can be made conductive with each other, and the potential of each outer conductor 144 It can be the same.

As shown in FIGS. 4 and 9, the same potential portion 150 is attached to a portion of the

coaxial cables

58a, 58b, 60a, 60b each having a length of 150 mm or less from the

contact portion

58c, 60c. In other words, the length Lx between each of the probe-

side connectors

58c, 60c of the

coaxial cables

58a, 58b, 60a, 60b and the same potential unit 150 is the connection between the probe-

side connectors

58c, 60c and the detector. The length La between the

parts

58p, 58q, 60p and 60q is 5% or less of the length La. As described above, the same potential portion 150 is provided in the vicinity of the

connection terminals

58c and 60c which are the connection parts of the

coaxial cables

58a, 58b, 60a and 60b to the pair of connection terminals 37, respectively. In the vicinity of the probe 37, the outer conductors 144 of the

coaxial cables

58a, 58b, 60a, 60b are set to the same ground potential. The lengths of the

coaxial cable

58a, 58b and the

coaxial cable

60a, 60b between the test piece

side connection portions

58c, 60c and the same potential portion 150 are not necessarily the same. For example, as for the

coaxial cables

60a and 60b connected to the mover holding body 56, the distance between the probe-side connection portion 60c and the same potential portion 150 is higher than that of the

coaxial cables

58a and 58b connected to the stator holding body 55. The length may be increased.

When the

coaxial cables

58a, 58b, 60a and 60b are connected by the four-terminal pair measurement method in this way, the current flowing through the component s and the voltage applied to the component s are measured in separate circuits. , The influence of the residual impedance of each of the

coaxial cables

58a, 58b, 60a, 60b can be reduced. In addition, since the current flowing in each of the inner conductor 140 and the outer conductor 144 is in the opposite direction, the generation of the magnetic flux of each of the inner conductor 140 and the outer conductor 144 can be suppressed. Therefore, the current and voltage flowing to the component s can be measured accurately.

On the other hand, as shown in FIG. 11, the shield cover 180 is attached to the base portion 30 in a state of covering the holding stand 32 held by the measurement stand 29, the pair of measuring elements 37 and the like. The shield cover 180 generally has a hollow rectangular shape, and is attached by fastening

portions

182 and 184 provided on the base portion 30. The shield cover 180 is electrically connected to the base portion 30 because the

fastening portions

182 and 184 are made of a conductive material. In addition, a through hole 190 is formed in a portion corresponding to the component placement portion 44 on the upper surface of the shield cover 180. The through hole 190 is for mounting the component s from the outside of the shield cover 180 to the V groove 44 c.

In addition, members made of a conductive material, for example, the base 30, the measuring stand 29, these bases 30, the members held by the measuring stand 29 (the holding stand 32, the mover moving body 56, the L-shaped

bracket

57, 59, 130,

fastening portions

31, 131, 57a, 59b, 59a, 59b, 182, 184, shield cover 180, etc., except for the opposing

surfaces

34f, 36f of the stator 34 and the mover 36) Treatment is performed with a metallic material such as electroless nickel. Thereby, the conductivity is improved.

The mounting machine includes a control device 200. As shown in FIG. 12, control device 200 includes a controller 202 mainly composed of a computer and a plurality of drive circuits 204. The controller 202 includes an execution unit 210, a storage unit 212, an input / output unit 214, and the like. The substrate conveyance / holding device 4, the component supply device 6, and the head moving device 8 respectively drive circuits 204 in the input / output unit 214. The movable element moving device 41 and the

electromagnetic valve devices

80 and 82 of the holding table moving device 40 are connected. In addition, an electrical characteristic detection unit 42, a display 216, a mover position sensor 218, a holding stand position sensor 220, a nozzle height sensor 222, and the like are connected.

The electrical characteristics of the component s are measured by the execution of the electrical characteristic measurement program represented by the flowchart of FIG. The

solenoid valve devices

80 and 82 are controlled based on output signals from the mover position sensor 218 and the holding table position sensor 220, and the like. The measurement results can be displayed on the display 216. The measuring device 22 is always in the initial state shown in FIG. 14A. The mover 36 is in the retracted end position, and the holder 32 is in the advanced end position, that is, in the position abutted against the stopper 90.

In step 1 (hereinafter abbreviated as S1; the same applies to other steps), it is determined whether or not a measurement command of the electrical characteristics of the component s has been issued. For example, when a command to measure the electrical characteristics of the part s is issued, such as when a setup change is performed, the determination becomes YES, and the mounting head 16 is moved in S2. The mounting head 16 reaches the V-shaped groove 44c, the suction nozzle 18 is lowered, the component s is opened, and the component s is placed in the V-shaped groove 44c.

In S3, the mover 36 is advanced by the control of the solenoid valve device 82, and the component s is clamped by the mover 36 and the stator 34 as shown in FIG. 14B. In S4, as shown in FIG. 14C, the holding stand 32 is retracted until it abuts against the stopper 92 under the control of the solenoid valve device 80. The holding stand 32 reaches a position not in contact with the component s and the mover 36.

In S5, the parts s are opened by the suction nozzle 18 and are placed on the V-shaped groove 44c. The static elimination time is a time during which static electricity charged on the component s is removed, and is predetermined. When the elapsed time reaches the charge removal time, the determination in S5 is YES, and the electrical characteristics of the component s are measured in S6. Then, after the detection of the electrical characteristics of the part s is completed, the mover 36 is retracted in S7, and the part s gripped between the mover 36 and the stator 34 is released. Further, as the mover 36 retracts, air is supplied from the opening 70 a to the opposing surface 36 f of the mover 36 from diagonally above. Thereby, temporarily, parts s can be favorably dropped from the opposing surface 36 f.

At S8, as shown in FIG. 14D, the holder 32 is retracted. The space between the mover 36 and the stator 34 is in communication with the waste passage 28 so that the parts s can be discarded to the trash can 26. Then, after the holding stand 32 is retracted until it abuts on the stopper 92, in S9, the holding stand 32 is advanced to be positioned between the pair of opposing

surfaces

34f, 36f. The upper part of the V groove 44c is a space, the component s can be placed, and the initial state shown in FIG. 4A is returned. In addition, since the air containing ions is supplied to the facing surface 36f of the mover 36 as the holding table 32 advances, it is possible to discharge the facing surface 36f.

As described above, in the present embodiment, since the same potential portion 150 is provided in the vicinity of the pair of probes 37, noise is reduced in the vicinity of each probe 37 of the

coaxial cables

58a, 58b, 60a, 60b. be able to. Further, since the shield cover 180 is provided, it is possible to block noise supplied from the outside onto the measurement stand 29. Furthermore, the measurement stand 29 and the base portion 30 are connected by the ground wire 132, and the members held by the measurement stand 29, the base portion 30, the shield cover 180, and the like are surface-treated with the same conductive material. Thereby, the charges of the members provided on the measurement stand 29 such as the holding stand 32 and the pair of measuring elements 37 can be quickly and favorably removed.
As described above, in the measuring apparatus 22 according to the present embodiment, the electrical characteristics of the part s can be measured with high accuracy. Even if the part s has a small impedance, the impedance of the part s is accurate It can be measured well.

As described above, in addition to the aspects described in the embodiments, the present disclosure can be implemented in various modifications and improvements based on the knowledge of those skilled in the art.

22: measuring device 29: measuring base 30: base part 31: fastening part 32: holding base 34: stator 36: mover 42: LCR detection part 44: component mounting part 57, 59: bracket 58, 60:

coaxial cable Parts

58a, 58b, 60a, 60b: coaxial cable 132: ground wire 140: inner conductor 142: dielectric 144: outer conductor 146: outer coating 150: same potential portion 152: copper foil 154: solder 180: cover

Aspect that can be charged

(1) A mounting table mounted on a mounting machine for picking up components supplied by the component supply device and mounting the component on a circuit board, and includes a holding base for holding the components and a pair of measuring elements provided so as to be close to and separated from each other A measuring device for measuring an electrical characteristic of the part by sandwiching the part between the pair of measuring elements,
A pair of coaxial cable sections respectively connected to each of the pair of measuring elements;
A measuring apparatus comprising: a pair of coaxial cable portions provided at the pair of coaxial cable portions; the outer conductors of the plurality of coaxial cables included in the pair of coaxial cable portions are electrically connected to each other and having the same potential.
Each of the coaxial cable sections may include one coaxial cable or two coaxial cables.

(2) The same potential portion is provided in a portion having a length of 200 mm or less from a contact on the measurement element side which is a connection to each of the pair of measurement elements of each of the plurality of coaxial cables (1) The measuring apparatus as described in a term.
The lengths of the respective coaxial cables between the probe-side connection portion and the same potential portion can be 170 mm or less, 150 mm or less, 130 mm or less, 110 mm or less, 80 mm or less, 50 mm or less, 30 mm or less. The same potential portion is provided in the vicinity of the measurement element side connection portion. The vicinity is a portion that reduces noise at the periphery of the measuring element by setting the external conductor to the same potential, and can detect the electrical characteristics of the component with high accuracy.

(3) The measurement device includes an electrical property detection unit that detects the electrical property of the component based on the signal input from each of the plurality of coaxial cables,
Each of the plurality of coaxial cables is connected to the pair of measuring elements at a measurement element side connection section which is one end, and is connected to the electrical characteristic acquisition section at a detection section side connection section which is the other end.
The length between the contact-side connection portion and the same potential portion of each of the plurality of coaxial cables is 10% or less of the length between the connection-side contact portion and the connection portion-side connection portion The measuring device according to (1) or (2), which is considered to be.
The length between each probe-side connector of the coaxial cable and the same potential part is 7% or less, 5% or less, 3% of the length between the probe-side connector and the detector-side connector Hereinafter, it can be 2% or less, 1% or less.

(4) Each of the pair of coaxial cable sections is composed of two coaxial cables,
The measuring device according to any one of the items (1) to (3), wherein the two coaxial cables are connected by a four-terminal pair measurement method.

(5) The measuring device according to any one of (1) to (4), wherein the measuring device includes a shield cover that covers at least the holding table and the pair of measuring elements.

(6) The measuring device according to (5), wherein a through hole is formed in a portion of the shield cover that corresponds to the portion of the holding base that holds the component.
The components are mounted on the holder from the outside of the shield cover through the through holes.

(7) The measuring device
A measurement table provided with the holding table and the pair of measuring elements;
And a base portion for holding the measuring table,
The measuring device according to (5) or (6), wherein the shield cover and the base portion are electrically connected.
The shield cover and the base portion can be electrically connected via an earth wire, can be electrically connected via a fastening portion, or the like.

(8) The measuring device
A measurement table provided with the holding table and the pair of measuring elements;
And a base portion for holding the measuring table,
The measuring apparatus according to any one of claims 1 to 6, wherein the measuring table and the base portion are connected by a ground wire.
The base and the measurement stand may be separate members for the convenience of maintenance, and the measurement stand may be removably attached to the base, in which case the measurement stand and the base are connected by a ground wire Is desirable.

(9) The measuring device according to (7) or (8), wherein at least the measuring table and the holding table are surface-treated with the same conductive material.

(10) A mounting table mounted on a mounting machine for picking up components supplied by the component supply device and mounting the component on a circuit board, and includes a holding base for holding the components and a pair of measuring elements provided so as to be close to and separated from each other. A measuring device for measuring an electrical characteristic of the part by sandwiching the part between the pair of measuring elements,
A measuring device comprising a shield cover that covers at least the holding table and the pair of measuring elements.
The technical features described in any of the items (1) to (9) can be adopted for the measuring device described in this item.

Claims

The pair of measuring elements are mounted on a mounting machine that mounts the components supplied by the component supply device on a circuit board and holds the components, and a pair of measuring elements provided so as to be close to and separated from each other A measuring device for measuring the electrical characteristics of the part by sandwiching the part,
A pair of coaxial cable sections respectively connected to each of the pair of measuring elements;
A measuring apparatus comprising: a pair of coaxial cable portions provided at the pair of coaxial cable portions; the outer conductors of the plurality of coaxial cables included in the pair of coaxial cable portions are electrically connected to each other and having the same potential.
The said same electric potential part is provided in the part of 200 mm or less in length from the measurement element side connection part which is a connection part to each of the said pair of measurement elements of each of these coaxial cables. measuring device.
The measurement apparatus includes an electrical characteristic detection unit that detects an electrical characteristic of the component based on a signal input from each of the plurality of coaxial cables.
Each of the plurality of coaxial cables is connected to the pair of measuring elements at a measurement element side connection section which is one end, and is connected to the electrical characteristic acquisition section at a detection section side connection section which is the other end.
The length of each of the plurality of coaxial cables between the contact-side connection portion and the same potential portion is 10% of the length between the connection-side contact portion and detection-side connection portion The measuring device according to claim 1 or 2 made as follows.
The measuring apparatus according to any one of claims 1 to 3, wherein the measuring apparatus includes a shield cover that covers at least the holding table and the pair of measuring elements.
The measuring device according to claim 4 in which a penetration hole was formed in a portion corresponding to a portion which holds said parts of said stand of said shield cover.
The measuring device
A measurement table provided with the holding table and the pair of measuring elements;
And a base portion for holding the measuring table,
The measuring apparatus according to claim 4 or 5, wherein the shield cover and the base portion are electrically connected.
The measuring device
A measurement table provided with the holding table and the pair of measuring elements;
And a base portion for holding the measuring table,
The measuring apparatus according to any one of claims 1 to 6, wherein the measuring table and the base portion are connected by a ground wire.
The measuring apparatus according to claim 6 or 7, wherein at least the measuring table and the holding table are surface-treated with the same conductive material.
The pair of measuring elements are mounted on a mounting machine that mounts the components supplied by the component supply device on a circuit board and holds the components, and a pair of measuring elements provided so as to be close to and separated from each other A measuring device for measuring the electrical characteristics of the part by sandwiching the part,
A measuring device comprising a shield cover that covers at least the holding table and the pair of measuring elements.