WO2019127692A1 - Coa type array substrate and display panel - Google Patents

Coa type array substrate and display panel Download PDF

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Publication number
WO2019127692A1
WO2019127692A1 PCT/CN2018/072866 CN2018072866W WO2019127692A1 WO 2019127692 A1 WO2019127692 A1 WO 2019127692A1 CN 2018072866 W CN2018072866 W CN 2018072866W WO 2019127692 A1 WO2019127692 A1 WO 2019127692A1
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Prior art keywords
thin film
film transistor
electrode
opening
insulating layer
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PCT/CN2018/072866
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French (fr)
Chinese (zh)
Inventor
甘启明
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深圳市华星光电半导体显示技术有限公司
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Publication of WO2019127692A1 publication Critical patent/WO2019127692A1/en

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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136213Storage capacitors associated with the pixel electrode
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136227Through-hole connection of the pixel electrode to the active element through an insulation layer
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136286Wiring, e.g. gate line, drain line
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/1368Active matrix addressed cells in which the switching element is a three-electrode device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/12Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1248Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement

Definitions

  • the present invention relates to the field of display technologies, and in particular, to a COA type array substrate and a display panel.
  • the current liquid crystal display panel adds a color resist layer on the array substrate, thereby realizing RGB three primary colors on the array substrate, thereby avoiding the array substrate and the filter substrate.
  • the alignment operation allows the liquid crystal display device to perform a full color display better.
  • COA Color Filter on Array
  • the prior art adopts the 3T design, and in the 3T pixel structure design, one pixel structure is divided into two parts of the main pixel area and the sub-pixel area, and The shared thin film transistor is increased to lower the voltage of the sub-pixel region, thereby controlling the difference in liquid crystal rotation between the main pixel region and the sub-pixel region to improve the phenomenon of color distortion at a wide viewing angle.
  • each pixel unit PX includes: a main pixel region and a sub-pixel region, the main pixel region having a main thin film transistor TFT_m, the second The pixel region has a sub-thin film transistor TFT_s and a shared thin film transistor TFT_share; wherein the main pixel region further has a main pixel electrode 181 for forming a main liquid crystal capacitor Cls_m and a sub-pixel region between the common electrode and the common electrode Com on the filter substrate. There is also a sub-pixel electrode 182 for forming a sub-liquid crystal capacitance Cls_s with the common electrode Com on the filter substrate.
  • the gate of the main thin film transistor TFT_m and the gate of the sub-thin film transistor TFT_s are connected to the same scan line SL; the source of the main thin film transistor TFT_m and the source of the sub-thin film transistor TFT_s are connected to the same data line.
  • the drain of the main thin film transistor TFT_m is connected to the main pixel electrode 181 of the main pixel region, and the drain of the sub-thin film transistor TFT_s is connected to the sub-pixel electrode 182 of the sub-pixel region, thereby respectively controlling the main pixel region and the second The display of the pixel area.
  • the source of the shared thin film transistor TFT_share is connected to the common electrode line 122, the drain of the shared thin film transistor TFT_share is electrically connected to the sub-pixel electrode 182, the gate of the shared thin film transistor TFT_share and the main thin film transistor TFT_m,
  • the scan lines SL connected to the sub-thin film transistor TFT_s are electrically connected.
  • the scan line SL, the gate electrode and the common electrode line 122 all belong to the first metal layer, and the first metal layer is formed on the base substrate 110.
  • the data line DL, the source and drain of the main thin film transistor TFT_m, the source and drain of the sub-thin film transistor TFT_s, and the source and drain of the shared thin film transistor TFT_share belong to the second metal layer, and are formed on the first metal layer.
  • a gate insulating layer 130 is disposed between the second metal layer and the first metal layer.
  • the first insulating layer 150 is located on the second metal layer, and after the second metal layer is formed, the color resist layer 160 is located on the first insulating layer 150, after the first insulating layer 150, and the second insulating layer 170 is located in the color.
  • the resistive layer 160 is formed behind the color resist layer 160, and the main pixel electrode 181 and the sub-pixel electrode 182 belong to the third metal layer, and the third metal layer is an ITO transparent conductive layer formed on the second insulating layer 170. after that.
  • the design of the original three vias on the color resist layer 160 is changed to A large opening 161 and a small opening, that is, two of the via holes on the color resist layer 160 are merged into a large opening 161, specifically a via and corresponding to the main thin film transistor TFT_m on the color resist layer 160.
  • the vias of the shared thin film transistor TFT_share are merged into one large opening 161, and the remaining one is an opening similar to the via.
  • a second insulating layer 170 is formed and the second insulating layer 170 is filled into the large opening 161, and then two via holes 171, 172 are diced on the first insulating layer 150 and the second insulating layer 170, the two Holes 171, 172 pass through the opening 161.
  • an ITO transparent conductive layer is deposited, and then exposed and developed to form a main pixel electrode 181, a sub-pixel electrode 182, and connection electrodes 183, 184.
  • connection electrodes 183, 184 are respectively located in the two via holes 171, 172, and the connection electrode 183
  • the drain for the main thin film transistor TFT_m is electrically connected to the main pixel electrode 181, and the source electrode for the shared thin film transistor TFT_share is electrically connected to the common electrode line 122.
  • connection electrode 183 in the corresponding main thin film transistor TFT_m via 171 and the connection electrode 184 in the corresponding shared thin film transistor TFT_share via 172 may be short-circuited, thereby causing the main pixel electrode 181 and the common electrode line 122 to be short-circuited.
  • a dark spot is formed, which affects the lighting of the main pixel electrode 181, thereby affecting the display of the display panel.
  • a technical problem to be solved by the embodiments of the present invention is to provide a COA type array substrate and a display panel. It can effectively improve the short circuit of the main thin film transistor and the shared thin film transistor.
  • the first aspect of the present invention provides a COA type array substrate, including:
  • a thin film transistor array substrate comprising:
  • common electrode lines for providing a common voltage, the common electrode lines being in the same metal layer as the scan lines;
  • a plurality of thin film transistors each comprising a main thin film transistor, a sub thin film transistor, and a shared thin film transistor;
  • a color resist layer on the first insulating layer, wherein the color resist layer forms a plurality of first openings, each of the first openings extending from above the drain of the main thin film transistor to above the source of the shared thin film transistor ;
  • An electrode layer formed on the second insulating layer comprising a plurality of pixel electrodes, each pixel electrode being disposed corresponding to a group of thin film transistors, each of the pixel electrodes including a main pixel electrode and a sub-pixel electrode, the main film
  • the drain of the transistor is electrically connected to the corresponding main pixel electrode
  • the drain of the sub-thin film transistor is electrically connected to the corresponding sub-pixel electrode
  • the drain and the source of the shared thin film transistor are respectively corresponding to the corresponding a pixel electrode and a common electrode line are electrically connected;
  • the electrode layer further includes a first connecting electrode and a second connecting electrode, wherein the first connecting electrode is located in the first via hole Connecting the drain of the main thin film transistor and the main pixel electrode, wherein the second connection electrode is located in the second via hole to connect the drain of the shared thin film transistor and the common electrode line; wherein the COA type array substrate further includes The upper layer of the pad, the pad upper layer at least raising the height of the second insulating layer in the first opening for preventing the first connection electrode and the second connection electrode from being short-circuited.
  • the upper layer of the pad is formed by extending a lower edge of the first opening toward the inside of the first opening, and the upper layer of the pad is integrally formed with the color resist layer.
  • the upper layer of the pad is in the same layer as the data line and is made of the same metal, and the projection of the pad in the horizontal plane extends from the lower edge of the first opening toward the inside of the first opening.
  • the gates of the same group of thin film transistors are connected to the same scan line, and the scan lines are located between the main pixel electrode and the sub-pixel electrode, and the first opening and the common electrode line are located at a position of the scan line close to the main pixel electrode.
  • the first opening extends from the upper direction scanning line direction of the common electrode line to the gap area between the common electrode line and the scanning line.
  • the first opening comprises an opening first portion and an opening second portion, the opening first portion overlapping the common electrode line, the opening second portion being staggered from the common electrode line, and the opening second portion being located The lower side of the first portion of the opening, the projection of the level in the horizontal plane is at least partially located in the second portion of the opening.
  • the projection of the pad in the horizontal plane is located between the first connection electrode and the second connection electrode.
  • the source of the main thin film transistor and the source of the sub-thin film transistor of the same group of thin film transistors are electrically connected to the same data line
  • the gate of the main thin film transistor, the gate of the sub-thin film transistor, and the The gate of the shared thin film transistor is electrically connected to the same scan line.
  • the main thin film transistor and the sub-thin film transistor share the same source and share the same gate.
  • a second aspect of the present invention provides a display panel including the above COA type array substrate.
  • the pad upper layer at least raises the height of the second insulating layer in the first opening, and can block the metal on both sides of the padded second insulating layer, thereby preventing the padding from being high.
  • the metal on both sides of the second insulating layer is short-circuited, so that the first connection electrode and the second connection electrode can be prevented from being short-circuited.
  • FIG. 1 is a schematic view of a prior art display panel
  • FIG. 2 is a schematic top view of a pixel unit of the prior art
  • Figure 3 is a cross-sectional view of the ee line of Figure 2;
  • FIG. 4 is an electrical connection diagram of a main thin film transistor, a sub-thin film transistor, and a shared thin film transistor in a pixel unit;
  • FIG. 5 is a schematic diagram of a pixel unit in a COA type array substrate according to a first embodiment of the present invention
  • Figure 6 is a cross-sectional view taken along line EE of Figure 5;
  • FIG. 7 is a schematic diagram of a pixel unit in a COA type array substrate in a second embodiment of the present invention.
  • Figure 8 is a cross-sectional view taken along line EE of Figure 7.
  • the embodiment of the present invention provides a COA type array substrate.
  • the COA type array substrate includes a thin film transistor array substrate, a first insulating layer 250, a color resist layer 260, a second insulating layer 270, and an electrode. Floor.
  • the thin film transistor array substrate includes a base substrate 210, a plurality of scan lines SL, a plurality of data lines DL, a plurality of common electrode lines 222, and a plurality of sets of thin film transistors.
  • the base substrate 210 may be a glass substrate, or may be a rigid plastic substrate or a flexible plastic substrate.
  • the substrate substrate 210 is transparent, and light can penetrate through.
  • a plurality of the scan lines SL are formed on the base substrate 210, and an insulating layer may or may not be disposed between the scan lines SL and the base substrate 210.
  • the plurality of scan lines SL extend in the first direction, and the scan lines SL and the scan lines SL are parallel to each other.
  • the plurality of the common electrode lines 222 and the scan lines SL are located in the same metal layer.
  • the metal layer where the scan lines SL and the common electrode lines 222 are located is referred to as a first metal layer.
  • the scan line SL and the common electrode line 222 are electrically insulated from each other.
  • the common electrode line 222 is for providing a common voltage.
  • the data line DL is located above the first metal layer, the data line DL is in the second metal layer, and the gate insulation is at least spaced between the first metal layer and the second metal layer.
  • the plurality of data lines DL extend in the second direction, the second direction and the first direction are perpendicular to each other, and the data lines DL and the data lines DL are parallel to each other.
  • a plurality of thin film transistors are formed on the base substrate 210.
  • Each of the thin film transistors includes a main thin film transistor TFT_m, a sub-thin film transistor TFT_s, and a shared thin film transistor TFT_share, wherein each thin film transistor includes a source and a drain.
  • the gate that is, the main thin film transistor TFT_m, the sub-thin film transistor TFT_s, and the shared thin film transistor TFT_share, each include a source, a drain, and a gate.
  • the gate is located in the first metal layer and is electrically connected to the corresponding scan line SL, and the source and the drain are located in the second metal layer.
  • the gates of the main thin film transistor TFT_m, the sub-thin film transistor TFT_s, and the shared thin film transistor TFT_share in each group of thin film transistors are connected to the same scan line SL, and the main thin film transistor TFT_m and the sub-thin film transistor in each group of thin film transistors are connected.
  • the source of the TFT_s is connected to the same data line DL.
  • the main thin film transistor TFT_m and the sub-thin film transistor TFT_s share one source, and the drain of the shared thin film transistor TFT_share is the same as the same group.
  • the drain of the thin film transistor TFT_s is electrically connected, and the source of the shared thin film transistor TFT_share is electrically connected to the corresponding common electrode line 222.
  • the main thin film transistor TFT_m and the sub-thin film transistor TFT_s of each group of thin film transistors share one gate, and the gates shared by the main thin film transistor TFT_m and the sub-thin film transistor TFT_s and the shared thin film transistor TFT_share in the same group
  • the gates are electrically connected and share the same metal, except that the gates of the two are located in different regions of the common metal.
  • the gates of the main thin film transistor TFT_m, the sub-thin film transistor TFT_s, and the shared thin film transistor TFT_share in the same group are all located on the same side of the scan line SL connected thereto, which is the lower side of the scan line SL in this embodiment. .
  • the first insulating layer 250 is located on the thin film transistor array substrate. Specifically, the first insulating layer 250 is located above the second metal layer. In this embodiment, the first insulating layer 250 is an inorganic insulating layer.
  • a color resist layer 260 is formed on the first insulating layer 250, and the color resist layer 260 includes a plurality of red color resists, a plurality of green color resists, and a plurality of blue color resists, and the like.
  • a plurality of first openings 261 are formed on the resist layer 260.
  • the first openings 261 are a large opening, and the first openings 261 are square, and are rectangular here, and each of the first openings 261 is disposed in each Above the group of thin film transistors, the first opening 261 extends from above the drain of the main thin film transistor TFT_m to the source of the shared thin film transistor TFT_share. This arrangement facilitates process simplification.
  • the first opening 261 is disposed corresponding to a group of thin film transistors, and the first opening 261 is located at a side of the scan line SL electrically connected to the gate of the group of thin film transistors, where is scanning On the upper side of the line SL, the gate of the group of thin film transistors is located on the other side of the scanning line SL to which it is electrically connected, here the lower side of the scanning line SL.
  • the second insulating layer 270 is formed on the color resist layer 260 and the first insulating layer 250, and the second insulating layer 270 is filled into the first opening 261, thereby being in the first opening 261.
  • the second insulating layer 270 is disposed adjacent to the first insulating layer 250.
  • the second insulating layer 270 is an inorganic insulating layer.
  • the electrode layer is formed on the second insulating layer 270, the electrode layer includes a plurality of pixel electrodes, each pixel electrode is disposed corresponding to a group of thin film transistors, and each pixel electrode includes a main pixel electrode. 281 and the sub-pixel electrode 282.
  • the main pixel electrode 281 is located on the upper side of the scan line SL electrically connected to the set of thin film transistors, and the sub-pixel electrode 282 is electrically connected to the set of thin film transistors.
  • the lower side of the scan line SL (see Figure 5).
  • the drain of the main thin film transistor TFT_m is electrically connected to the corresponding main pixel electrode 281, and the drain of the sub-thin film transistor TFT_s is electrically connected to the corresponding sub-pixel electrode 282, the shared thin film The drain of the transistor TFT_share is electrically connected to the corresponding sub-pixel electrode 282, and the source thereof is electrically connected to the common electrode line 222.
  • the drain of the sub-thin film transistor TFT_s is integrated with the drain of the shared thin film transistor TFT_share, and the drain of the sub-thin film transistor TFT_s and the shared thin film transistor TFT_share are in FIG. The drains are connected together by a large metal.
  • the source of the shared thin film transistor TFT_share is electrically connected to the common electrode line 222.
  • the first opening 261 is provided separately from each other.
  • the first via 271 and the second via 272 pass through the first insulating layer 250 and the second insulating layer 270 to reach the drain of the main thin film transistor TFT_m, and the second via 272 penetrates the first The insulating layer 250, the second insulating layer 270, and the partial thin film transistor array substrate reach the common electrode line 222.
  • the second via 272 penetrates at least the first insulating layer 250, the second insulating layer 270, and the gate insulating layer 230, and The second via 272 is next to the source of the shared thin film transistor TFT_share.
  • the electrode layer further includes a first connection electrode 283 and a second connection electrode 284.
  • the first connection electrode 283 is located in the first via 271 to connect the drain of the main thin film transistor TFT_m with the
  • the main pixel electrode 281 is located in the second via 272 to connect the source of the shared thin film transistor TFT_share and the common electrode line 222.
  • the first connection electrode 283, the second connection electrode 284, the main pixel electrode 281, and the sub-pixel electrode 282 are formed of the same metal layer, and may be referred to herein as a third metal layer.
  • the COA type array substrate further includes a pad high layer 262.
  • the pad high layer 262 and the data line are used to prevent the first connection electrode 283 and the second connection electrode 284 from being short-circuited.
  • the DL is parallel, of course, in other embodiments of the invention the upper layer of the pad may also not be parallel to the data line.
  • the pad high layer 262 at least raises the height of the second insulating layer 270 in the first opening 261 for improving the short circuit of the first connection electrode 283 and the second connection electrode 284.
  • the pad high layer 262 raises the height of the second insulating layer 270 thereon, the third metal layer on both sides of the padned second insulating layer 270 can be blocked, so that the padded second insulating layer 270 can be prevented.
  • the metal on both sides is short-circuited, so that the first connection electrode 283 and the second connection electrode 284 can be prevented from being short-circuited.
  • the projection upper layer 262 is located between the first connection electrode 283 and the second connection electrode 284 at a horizontal plane.
  • the common electrode line 222 electrically connected to the shared thin film transistor TFT_share is located on the side of the scan line SL electrically connected thereto away from the sub-pixel electrode 282, that is, the side away from the gate.
  • the upper side of the scan line SL, and the common electrode line 222 and the scan line SL have a gap
  • the first opening 261 extends from the upper direction of the common electrode line 222 to the scan line SL to a region between the common electrode line 222 and the scan line SL, that is, a region extending to a gap between the common electrode line 222 and the scan line SL, the projection of the common electrode line 222 and the first opening 261 at a horizontal plane is large
  • the overlapped first opening 261 portion may be referred to as an opening first portion 261a, and the first opening 261 region located in the gap region between the common electrode line 222 and the scan line SL does not overlap with the common electrode line 222.
  • the portion of the non-overlapping first opening 261 may be referred to as an opening second portion 261b, where the opening first portion 261a and the opening second portion 261b constitute a first opening 261, and the first portion 261 is opened in FIG. a is located at one end of the first opening 261 away from the scanning line SL, which is an upper end in the drawing, and the opening second portion 261b is located at one end of the first opening 261 near the scanning line SL, which is a lower end in the drawing.
  • the first insulating layer 250, the gate insulating layer 230, and the common electrode line 222 are present under the opening first portion 261a.
  • the second insulating layer 270 is present inside the opening first portion 261a, and below the opening second portion 261b.
  • the lower second portion 261b of the opening has less common electrode lines 222 below the opening first portion 261a.
  • the area of the opening second portion 261b is lower than the area of the opening first portion 261a.
  • the topography of the second insulating layer 270 is in the lowest potential in the present embodiment in which the second insulating layer 270 in the opening second portion 261 is at the top potential. Thereafter, after depositing the third metal layer, subsequent exposure and development, due to the relatively low potential of the second insulating layer 270 in the second portion 261b of the opening, the photoresist exposure here is incomplete, resulting in the second portion of the opening.
  • the photoresist above 261b has a high probability of residual, resulting in a large probability that the third metal layer under the photoresist will remain, resulting in the remaining third metal layer portion will be the first connection electrode 283 and The second connection electrode 284 is short-circuited.
  • the pad high layer 262 is formed by the color resist layer 260 extending toward the inside of the first opening 261.
  • One of the first openings 261 has at least one pad high layer 262, which in this embodiment is a pad high layer 262. .
  • the pad high layer 262 is formed by extending a lower edge of the first opening 261 toward the inside of the first opening 261.
  • the pad high layer 262 is located at the first connection electrode 283 and the second connection electrode 284.
  • the upper layer 262 of the pad is raised by the second insulating layer 270, so that the second portion 261b is opened in the second portion 261b.
  • the second insulating layer 270 on the left side of the pad high layer 262 and the second insulating layer 270 on the right side of the pad high layer 262 are lower than the second insulating layer 270 above the pad high layer 262, so that even when the third metal layer is exposed and developed, even The presence of metal residue is also located on the left or right side of the upper layer 262 of the pad, and there is no upper layer 262 above the pad, thereby blocking the first connection electrode 283 on the left side of the pad high layer 262 and the second connection electrode 284 on the right side of the pad upper layer 262. Short circuit.
  • the pad high layer 262 is located at an intermediate position between the first connection electrode 283 and the second connection electrode 284, for example, at an intermediate position of the lower edge of the first opening.
  • the pad high-rise 262 may extend from the opening second portion 261b to the opening first portion 261a, and the end of the pad-up layer 262 extending inward overlaps the projection of the common electrode line 222 in the horizontal plane.
  • the pad upper layer 262 may also not extend to the opening first portion 261a.
  • the first insulating layer 250, the color resist layer 260, and the second insulating layer 270 are provided.
  • the electrode layer further includes a third connection electrode 285, the third connection electrode 285 being located in the third via 273 to connect the drain of the sub-thin film transistor TFT_s with the sub-pixel electrode 282, the shared film The drain of the transistor TFT_share and the sub-pixel electrode 282.
  • the portion of the third via 273 located in the color resist layer 260 and the portion of the third via 273 located in the first insulating layer 250 and the second insulating layer 270 may be formed in one process or may be divided into A plurality of steps are formed, and when formed in a plurality of steps, the portion of the third via 273 located in the color resist layer 260 at this time may be referred to as a second opening.
  • an embodiment of the present invention further provides a display panel, which includes the COA type array substrate described above.
  • the display panel further includes a filter substrate, the filter substrate is located above the COA type array substrate, and the filter substrate is provided with a common electrode.
  • a liquid crystal layer is disposed between the COA type array substrate and the filter substrate.
  • the main pixel electrode and the common electrode on the filter substrate form a main liquid crystal capacitor
  • the main pixel electrode and the common electrode line form a main storage capacitor
  • the sub-pixel electrode and the common electrode on the filter substrate form a sub-liquid crystal capacitor
  • the sub-pixel electrode and the common electrode line form a secondary storage capacitor.
  • FIG. 7 is a schematic view of a COA type array substrate according to a second embodiment of the present invention.
  • the schematic diagram of FIG. 7 is similar to the schematic diagram of FIG. 5, and thus the same component symbols represent the same components.
  • the main difference between this embodiment and the first embodiment is the position of the upper layer of the pad.
  • the material of the high-rise layer 362 is made of a metal material, and the high-rise layer 362 of the pad is located on the second metal layer, that is, the high-rise layer 362 of the pad is located on the same layer as the data line DL. And the data line DL is made of the same metal.
  • the pad high layer 362 is located below the first insulating layer 250, and the pad high layer 362 heights the height of a portion of the first insulating layer 250 and a portion of the second insulating layer 270 in the opening first portion 261a.
  • the pad high layer 362 is located between the first connection electrode 283 and the second connection electrode 284.
  • the pad high-rise 362 extends from the lower edge of the first opening 261 toward the inside of the first opening 261, and the projections of the pad high-rise 362 and the opening first portion 261a in the horizontal plane overlap.
  • the pad high-rise 362 may further extend downward beyond the lower edge of the first opening 261, that is, the pad high-rise 362 further exists in the scanning line SL and the An area between openings 261.

Abstract

A color filter on array (COA) type array substrate, comprising: a thin film transistor array substrate, a first insulating layer (250), a color resist layer (260), a second insulating layer (270), and an electrode layer; a first opening (261) is internally provided with a first through hole (271) and a second through hole (272) that are separated from each other; the first through hole (271) penetrates the first insulating layer (250) and the second insulating layer (270) and reaches a drain electrode of a main thin film transistor; and the second through hole (272) penetrates the first insulating layer (250), the second insulating layer (270) and part of the thin film transistor array substrate and reaches a common electrode line (222); the COA type array substrate further comprises an elevated layer (262), wherein the elevated layer (262) at least elevates the height of the second insulating layer (270) in the first opening (261) so as to prevent a first connection electrode (283) and second connection electrode (284) from short circuiting. A display panel, which likewise has the advantage of preventing the first connection electrode (283) and second connection electrode (284) from short circuiting.

Description

COA型阵列基板及显示面板COA type array substrate and display panel
本发明要求2017年12月26日递交的发明名称为“COA型阵列基板及显示面板”的申请号201711434862.5的在先申请优先权,上述在先申请的内容以引入的方式并入本文本中。The present application claims priority to the filing date of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the present disclosure.
技术领域Technical field
本发明涉及显示技术领域,特别是涉及一种COA型阵列基板及显示面板。The present invention relates to the field of display technologies, and in particular, to a COA type array substrate and a display panel.
背景技术Background technique
随着科技的发展,液晶显示面板的应用越来越多。为了实现液晶显示面板较好的彩色显示,现在的液晶显示面板在阵列基板上增加了一层色阻层,从而在阵列基板上就实现了RGB三基色,避免了阵列基板和滤光片基板的对位操作,以便液晶显示装置更好的进行全彩显示。上述技术被称为COA(Color Filter on array)技术。With the development of technology, the application of liquid crystal display panels is increasing. In order to achieve better color display of the liquid crystal display panel, the current liquid crystal display panel adds a color resist layer on the array substrate, thereby realizing RGB three primary colors on the array substrate, thereby avoiding the array substrate and the filter substrate. The alignment operation allows the liquid crystal display device to perform a full color display better. The above technique is called COA (Color Filter on Array) technology.
而对于COA型阵列基板,为了改善大视角显示模式下颜色失真,现有技术采用了3T设计,在3T像素结构设计时会将一个像素结构分为主像素区和次像素区两部分,并通过增加共享薄膜晶体管来降低次像素区的电压,从而控制主像素区和次像素区的液晶旋转量差,以改善在广视角下颜色失真的现象。For the COA type array substrate, in order to improve the color distortion in the large viewing angle display mode, the prior art adopts the 3T design, and in the 3T pixel structure design, one pixel structure is divided into two parts of the main pixel area and the sub-pixel area, and The shared thin film transistor is increased to lower the voltage of the sub-pixel region, thereby controlling the difference in liquid crystal rotation between the main pixel region and the sub-pixel region to improve the phenomenon of color distortion at a wide viewing angle.
通常采用上述3T设计的阵列基板中,请参见图1-图4,每一个像素单元PX均包括:一个主像素区以及一个次像素区,所述主像素区具有主薄膜晶体管TFT_m,所述次像素区具有次薄膜晶体管TFT_s以及共享薄膜晶体管TFT_share;其中主像素区还具有主像素电极181,主像素电极181用于和滤光片基板上共通电极Com之间形成主液晶电容Cls_m,次像素区还具有次像素电极182,次像素电极182用于和滤光片基板上共通电极Com之间形成次液晶电容Cls_s。所述主薄膜晶体管TFT_m的栅极和所述次薄膜晶体管TFT_s的栅极均连接同一扫描线SL;所述主薄膜晶体管TFT_m的源极和所述次薄膜晶体管TFT_s的源极均连接同一数据线DL,所述主薄膜晶体管TFT_m的漏极连接主像素区的主像素电极181,所述次薄膜晶体管TFT_s的漏极连接次像 素区的次像素电极182,从而分别用于控制主像素区以及次像素区的显示。所述共享薄膜晶体管TFT_share的源极与公共电极线122连接,所述共享薄膜晶体管TFT_share的漏极与所述次像素电极182电连接,所述共享薄膜晶体管TFT_share的栅极与主薄膜晶体管TFT_m、次薄膜晶体管TFT_s连接的扫描线SL电连接。Generally, in the array substrate of the above 3T design, referring to FIG. 1 to FIG. 4, each pixel unit PX includes: a main pixel region and a sub-pixel region, the main pixel region having a main thin film transistor TFT_m, the second The pixel region has a sub-thin film transistor TFT_s and a shared thin film transistor TFT_share; wherein the main pixel region further has a main pixel electrode 181 for forming a main liquid crystal capacitor Cls_m and a sub-pixel region between the common electrode and the common electrode Com on the filter substrate. There is also a sub-pixel electrode 182 for forming a sub-liquid crystal capacitance Cls_s with the common electrode Com on the filter substrate. The gate of the main thin film transistor TFT_m and the gate of the sub-thin film transistor TFT_s are connected to the same scan line SL; the source of the main thin film transistor TFT_m and the source of the sub-thin film transistor TFT_s are connected to the same data line. DL, the drain of the main thin film transistor TFT_m is connected to the main pixel electrode 181 of the main pixel region, and the drain of the sub-thin film transistor TFT_s is connected to the sub-pixel electrode 182 of the sub-pixel region, thereby respectively controlling the main pixel region and the second The display of the pixel area. The source of the shared thin film transistor TFT_share is connected to the common electrode line 122, the drain of the shared thin film transistor TFT_share is electrically connected to the sub-pixel electrode 182, the gate of the shared thin film transistor TFT_share and the main thin film transistor TFT_m, The scan lines SL connected to the sub-thin film transistor TFT_s are electrically connected.
在采用上述3T设计的COA型阵列基板的具体制作过程中,所述扫描线SL、栅极以及公共电极线122皆属于第一金属层,所述第一金属层形成于衬底基板110上。所述数据线DL、主薄膜晶体管TFT_m的源漏极、次薄膜晶体管TFT_s的源漏极、及共享薄膜晶体管TFT_share的源漏极则属于第二金属层,形成于所述第一金属层之上,所述第二金属层与所述第一金属层之间具有栅极绝缘层130。第一绝缘层150位于第二金属层之上,形成于第二金属层之后,色阻层160位于第一绝缘层150之上,形成于第一绝缘层150之后,第二绝缘层170位于色阻层160之上,形成于色阻层160之后,而主像素电极181、次像素电极182则属于第三金属层,所述第三金属层为ITO透明导电层,形成于第二绝缘层170之后。为了使像素电极与漏极连接、共享薄膜晶体管TFT_share与公共电极线122电连接,且受限于像素单元尺寸的大小及曝光制程的限制,色阻层160上原本三个过孔的设计变更为一个大的开口161和一个小的开孔,也即将色阻层160上的其中两个过孔合并成一个大的开口161,具体为色阻层160上对应主薄膜晶体管TFT_m的过孔和对应共享薄膜晶体管TFT_share的过孔合并成一个大的开口161,剩余一个为与过孔类似的开孔。其后形成第二绝缘层170并且第二绝缘层170填充到该大的开口161中,然后在第一绝缘层150和第二绝缘层170上挖两个过孔171、172,该两个过孔171、172穿过所述开口161。其后,沉积ITO透明导电层,然后进行曝光、显影形成主像素电极181、次像素电极182、连接电极183、184,连接电极183、184分别位于两个过孔171、172中,连接电极183用于主薄膜晶体管TFT_m的漏极与主像素电极181电连接,连接电极184用于共享薄膜晶体管TFT_share的源级与公共电极线122电连接。然而,由于色阻层160的开口161处地势不一样,有的地势高有的地势低,在涂布光阻之后,曝光后光阻可能会存在残留,特别是地势低的地方,从而会导致ITO透明导电层存在残留,致使对应主薄膜晶体管TFT_m过孔171中的连接电极183与对应共享薄膜晶体管TFT_share 过孔172中的连接电极184可能短路,进而导致主像素电极181与公共电极线122短路,形成暗点,影响主像素电极181的点亮,从而对显示面板的显示造成影响。In the specific fabrication process of the COA type array substrate using the above 3T design, the scan line SL, the gate electrode and the common electrode line 122 all belong to the first metal layer, and the first metal layer is formed on the base substrate 110. The data line DL, the source and drain of the main thin film transistor TFT_m, the source and drain of the sub-thin film transistor TFT_s, and the source and drain of the shared thin film transistor TFT_share belong to the second metal layer, and are formed on the first metal layer. A gate insulating layer 130 is disposed between the second metal layer and the first metal layer. The first insulating layer 150 is located on the second metal layer, and after the second metal layer is formed, the color resist layer 160 is located on the first insulating layer 150, after the first insulating layer 150, and the second insulating layer 170 is located in the color. The resistive layer 160 is formed behind the color resist layer 160, and the main pixel electrode 181 and the sub-pixel electrode 182 belong to the third metal layer, and the third metal layer is an ITO transparent conductive layer formed on the second insulating layer 170. after that. In order to connect the pixel electrode and the drain, and the shared thin film transistor TFT_share is electrically connected to the common electrode line 122, and limited by the size of the pixel unit and the limitation of the exposure process, the design of the original three vias on the color resist layer 160 is changed to A large opening 161 and a small opening, that is, two of the via holes on the color resist layer 160 are merged into a large opening 161, specifically a via and corresponding to the main thin film transistor TFT_m on the color resist layer 160. The vias of the shared thin film transistor TFT_share are merged into one large opening 161, and the remaining one is an opening similar to the via. Thereafter, a second insulating layer 170 is formed and the second insulating layer 170 is filled into the large opening 161, and then two via holes 171, 172 are diced on the first insulating layer 150 and the second insulating layer 170, the two Holes 171, 172 pass through the opening 161. Thereafter, an ITO transparent conductive layer is deposited, and then exposed and developed to form a main pixel electrode 181, a sub-pixel electrode 182, and connection electrodes 183, 184. The connection electrodes 183, 184 are respectively located in the two via holes 171, 172, and the connection electrode 183 The drain for the main thin film transistor TFT_m is electrically connected to the main pixel electrode 181, and the source electrode for the shared thin film transistor TFT_share is electrically connected to the common electrode line 122. However, since the ground at the opening 161 of the color resist layer 160 is different, some terrains have a high topography, and after coating the photoresist, there may be residual photoresist after exposure, especially in a low-lying area, which may result in The ITO transparent conductive layer remains, so that the connection electrode 183 in the corresponding main thin film transistor TFT_m via 171 and the connection electrode 184 in the corresponding shared thin film transistor TFT_share via 172 may be short-circuited, thereby causing the main pixel electrode 181 and the common electrode line 122 to be short-circuited. A dark spot is formed, which affects the lighting of the main pixel electrode 181, thereby affecting the display of the display panel.
发明内容Summary of the invention
本发明实施例所要解决的技术问题在于,提供一种COA型阵列基板及显示面板。可有效改善主薄膜晶体管和共享薄膜晶体管短路的问题。A technical problem to be solved by the embodiments of the present invention is to provide a COA type array substrate and a display panel. It can effectively improve the short circuit of the main thin film transistor and the shared thin film transistor.
为了解决上述技术问题,本发明第一方面实施例提供了一种COA型阵列基板,包括:In order to solve the above technical problem, the first aspect of the present invention provides a COA type array substrate, including:
薄膜晶体管阵列基板,其包括:A thin film transistor array substrate comprising:
多条扫描线,其沿第一方向延伸;a plurality of scan lines extending in a first direction;
多条数据线,其沿垂直于第一方向的第二方向延伸;a plurality of data lines extending in a second direction perpendicular to the first direction;
多条公共电极线,其用于提供公共电压,所述公共电极线与所述扫描线位于同一金属层;a plurality of common electrode lines for providing a common voltage, the common electrode lines being in the same metal layer as the scan lines;
多组薄膜晶体管,每组薄膜晶体管包括主薄膜晶体管、次薄膜晶体管和共享薄膜晶体管;a plurality of thin film transistors each comprising a main thin film transistor, a sub thin film transistor, and a shared thin film transistor;
第一绝缘层,其位于所述薄膜晶体管阵列基板上;a first insulating layer on the thin film transistor array substrate;
色阻层,其位于第一绝缘层上,所述色阻层上形成多个第一开口,每个所述第一开口由主薄膜晶体管的漏极的上方延伸到共享薄膜晶体管源极的上方;a color resist layer on the first insulating layer, wherein the color resist layer forms a plurality of first openings, each of the first openings extending from above the drain of the main thin film transistor to above the source of the shared thin film transistor ;
第二绝缘层,其形成在色阻层和第一绝缘层上,且所述第二绝缘层填充到第一开口中;a second insulating layer formed on the color resist layer and the first insulating layer, and the second insulating layer is filled into the first opening;
电极层,其形成在第二绝缘层上,所述电极层包括多个像素电极,每个像素电极对应一组薄膜晶体管设置,每个像素电极包括主像素电极和次像素电极,所述主薄膜晶体管的漏极与对应的主像素电极电连接,所述次薄膜晶体管的漏极与对应的所述次像素电极电连接,所述共享薄膜晶体管的漏极和源极分别与对应的所述次像素电极、公共电极线电连接;其中,An electrode layer formed on the second insulating layer, the electrode layer comprising a plurality of pixel electrodes, each pixel electrode being disposed corresponding to a group of thin film transistors, each of the pixel electrodes including a main pixel electrode and a sub-pixel electrode, the main film The drain of the transistor is electrically connected to the corresponding main pixel electrode, the drain of the sub-thin film transistor is electrically connected to the corresponding sub-pixel electrode, and the drain and the source of the shared thin film transistor are respectively corresponding to the corresponding a pixel electrode and a common electrode line are electrically connected; wherein
所述第一开口中设有彼此分离的第一过孔和第二过孔,所述第一过孔贯通第一绝缘层和第二绝缘层到达主薄膜晶体管的漏极,所述第二过孔贯通第一绝缘层、第二绝缘层、部分薄膜晶体管阵列基板到达公共电极线,所述电极层还 包括第一连接电极和第二连接电极,所述第一连接电极位于第一过孔中以连接主薄膜晶体管的漏极与主像素电极,所述第二连接电极位于第二过孔中以连接共享薄膜晶体管的漏极与所述公共电极线;其中,所述COA型阵列基板还包括垫高层,所述垫高层至少垫高第一开口中的第二绝缘层的高度以用于防止第一连接电极和第二连接电极短路。a first via hole and a second via hole separated from each other are disposed in the first opening, and the first via hole penetrates the first insulating layer and the second insulating layer to reach a drain of the main thin film transistor, the second pass The hole penetrates the first insulating layer, the second insulating layer, and the partial thin film transistor array substrate reaches the common electrode line, the electrode layer further includes a first connecting electrode and a second connecting electrode, wherein the first connecting electrode is located in the first via hole Connecting the drain of the main thin film transistor and the main pixel electrode, wherein the second connection electrode is located in the second via hole to connect the drain of the shared thin film transistor and the common electrode line; wherein the COA type array substrate further includes The upper layer of the pad, the pad upper layer at least raising the height of the second insulating layer in the first opening for preventing the first connection electrode and the second connection electrode from being short-circuited.
其中,所述垫高层由所述第一开口的下边沿向第一开口内部延伸形成,所述垫高层与所述色阻层一体成型。The upper layer of the pad is formed by extending a lower edge of the first opening toward the inside of the first opening, and the upper layer of the pad is integrally formed with the color resist layer.
其中,所述垫高层与所述数据线位于同一层且由相同金属构成,在水平面的投影所述垫高层从第一开口的下边沿向第一开口内部延伸。Wherein the upper layer of the pad is in the same layer as the data line and is made of the same metal, and the projection of the pad in the horizontal plane extends from the lower edge of the first opening toward the inside of the first opening.
其中,同一组薄膜晶体管的栅极连接同一条扫描线,该扫描线位于主像素电极和次像素电极之间,所述第一开口、所述公共电极线位于该扫描线靠近主像素电极的一侧,所述第一开口由公共电极线的上方向扫描线方向延伸到公共电极线与扫描线之间的间隙区域。The gates of the same group of thin film transistors are connected to the same scan line, and the scan lines are located between the main pixel electrode and the sub-pixel electrode, and the first opening and the common electrode line are located at a position of the scan line close to the main pixel electrode. On the side, the first opening extends from the upper direction scanning line direction of the common electrode line to the gap area between the common electrode line and the scanning line.
其中,所述第一开口包括开口第一部分和开口第二部分,所述开口第一部分与所述公共电极线重叠,所述开口第二部分与所述公共电极线错开,且开口第二部分位于开口第一部分的下侧,在水平面的投影所述垫高层至少部分位于开口第二部分中。Wherein the first opening comprises an opening first portion and an opening second portion, the opening first portion overlapping the common electrode line, the opening second portion being staggered from the common electrode line, and the opening second portion being located The lower side of the first portion of the opening, the projection of the level in the horizontal plane is at least partially located in the second portion of the opening.
其中,在水平面的投影所述垫高层向内延伸到开口第一部分中。Wherein the projection of the horizontal plane extends inwardly into the first portion of the opening.
其中,在水平面的投影所述垫高层位于所述第一连接电极和第二连接电极之间。Wherein the projection of the pad in the horizontal plane is located between the first connection electrode and the second connection electrode.
其中,同一组薄膜晶体管中所述主薄膜晶体管的源极和次薄膜晶体管的源极电连接到同一条数据线,所述主薄膜晶体管的栅极、所述次薄膜晶体管的栅极和所述共享薄膜晶体管的栅极电连接到同一条扫描线。Wherein the source of the main thin film transistor and the source of the sub-thin film transistor of the same group of thin film transistors are electrically connected to the same data line, the gate of the main thin film transistor, the gate of the sub-thin film transistor, and the The gate of the shared thin film transistor is electrically connected to the same scan line.
其中,所述主薄膜晶体管、次薄膜晶体管共用同一个源极和共用同一个栅极。Wherein, the main thin film transistor and the sub-thin film transistor share the same source and share the same gate.
本发明第二方面实施例提供了一种显示面板,包括上述的COA型阵列基板。A second aspect of the present invention provides a display panel including the above COA type array substrate.
实施本发明实施例,具有如下有益效果:Embodiments of the present invention have the following beneficial effects:
由于所述COA型阵列基板包括垫高层,所述垫高层至少垫高第一开口中的第二绝缘层的高度,可以隔断垫高了的第二绝缘层两侧的金属,从而可以防止垫高的第二绝缘层两侧的金属短路,从而可以防止第一连接电极和第二连接电极短路。Since the COA type array substrate includes a pad high layer, the pad upper layer at least raises the height of the second insulating layer in the first opening, and can block the metal on both sides of the padded second insulating layer, thereby preventing the padding from being high. The metal on both sides of the second insulating layer is short-circuited, so that the first connection electrode and the second connection electrode can be prevented from being short-circuited.
附图说明DRAWINGS
为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the description of the prior art will be briefly described below. Obviously, the drawings in the following description are only It is a certain embodiment of the present invention, and other drawings can be obtained from those skilled in the art without any creative work.
图1是现有技术显示面板的概略示意图;1 is a schematic view of a prior art display panel;
图2现有技术一个像素单元的俯视示意图;2 is a schematic top view of a pixel unit of the prior art;
图3是图2中ee线的剖视图;Figure 3 is a cross-sectional view of the ee line of Figure 2;
图4是一个像素单元中主薄膜晶体管、次薄膜晶体管、共享薄膜晶体管的电性连接图;4 is an electrical connection diagram of a main thin film transistor, a sub-thin film transistor, and a shared thin film transistor in a pixel unit;
图5是本发明第一实施例中COA型阵列基板中一个像素单元的概略示意图;5 is a schematic diagram of a pixel unit in a COA type array substrate according to a first embodiment of the present invention;
图6是图5中EE线的剖视图;Figure 6 is a cross-sectional view taken along line EE of Figure 5;
图7是本发明第二实施例中COA型阵列基板中一个像素单元的概略示意图;7 is a schematic diagram of a pixel unit in a COA type array substrate in a second embodiment of the present invention;
图8是图7中EE线的剖视图。Figure 8 is a cross-sectional view taken along line EE of Figure 7.
具体实施方式Detailed ways
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The technical solutions in the embodiments of the present invention are clearly and completely described in the following with reference to the accompanying drawings in the embodiments of the present invention. It is obvious that the described embodiments are only a part of the embodiments of the present invention, but not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative efforts are within the scope of the present invention.
本申请说明书、权利要求书和附图中出现的术语“包括”和“具有”以及它们任何变形,意图在于覆盖不排他的包含。例如包含了一系列步骤或单元的过程、方法、系统、产品或设备没有限定于已列出的步骤或单元,而是可选地还包括没有列出的步骤或单元,或可选地还包括对于这些过程、方法、产品或设备固有的其它步骤或单元。此外,术语“第一”、“第二”和“第三”等是用于区别不同的对象,而并非用于描述特定的顺序。The terms "comprising" and "having", and any variations thereof, appearing in the specification, the claims, and the drawings are intended to cover a non-exclusive inclusion. For example, a process, method, system, product, or device that comprises a series of steps or units is not limited to the listed steps or units, but optionally also includes steps or units not listed, or alternatively Other steps or units inherent to these processes, methods, products or equipment. Moreover, the terms "first," "second," and "third," etc. are used to distinguish different objects, and are not intended to describe a particular order.
第一实施例First embodiment
本发明实施例提供一种COA型阵列基板,请参见图5、图6,所述COA型阵列基板包括薄膜晶体管阵列基板、第一绝缘层250、色阻层260、第二绝缘层270和电极层。The embodiment of the present invention provides a COA type array substrate. Referring to FIG. 5 and FIG. 6, the COA type array substrate includes a thin film transistor array substrate, a first insulating layer 250, a color resist layer 260, a second insulating layer 270, and an electrode. Floor.
在本实施例中,所述薄膜晶体管阵列基板包括衬底基板210、多条扫描线SL、多条数据线DL、多条公共电极线222、多组薄膜晶体管。In this embodiment, the thin film transistor array substrate includes a base substrate 210, a plurality of scan lines SL, a plurality of data lines DL, a plurality of common electrode lines 222, and a plurality of sets of thin film transistors.
在本实施例中,所述衬底基板210可以是玻璃基板,也可以是刚性塑料基板或者柔性塑料基板,所述衬底基板210是透明的,光线可以穿透过去。In this embodiment, the base substrate 210 may be a glass substrate, or may be a rigid plastic substrate or a flexible plastic substrate. The substrate substrate 210 is transparent, and light can penetrate through.
在本实施例中,多条所述扫描线SL形成在所述衬底基板210上,所述扫描线SL与所述衬底基板210之间可以设有绝缘层,也可以不设有绝缘层。在本实施例中,多条所述扫描线SL沿第一方向延伸,扫描线SL与扫描线SL之间彼此互相平行。In this embodiment, a plurality of the scan lines SL are formed on the base substrate 210, and an insulating layer may or may not be disposed between the scan lines SL and the base substrate 210. . In the present embodiment, the plurality of scan lines SL extend in the first direction, and the scan lines SL and the scan lines SL are parallel to each other.
在本实施例中,多条所述公共电极线222与所述扫描线SL位于同一金属层,在这里,扫描线SL、公共电极线222所处的金属层称为第一金属层,所述扫描线SL与所述公共电极线222之间彼此电性绝缘。所述公共电极线222用于提供公共电压。In this embodiment, the plurality of the common electrode lines 222 and the scan lines SL are located in the same metal layer. Here, the metal layer where the scan lines SL and the common electrode lines 222 are located is referred to as a first metal layer. The scan line SL and the common electrode line 222 are electrically insulated from each other. The common electrode line 222 is for providing a common voltage.
在本实施例中,所述数据线DL位于第一金属层的上方,所述数据线DL处于第二金属层,所述第一金属层和所述第二金属层之间至少间隔栅极绝缘层230。在本实施例中,多条所述数据线DL沿第二方向延伸,所述第二方向与所述第一方向互相垂直,数据线DL与数据线DL之间互相平行。In this embodiment, the data line DL is located above the first metal layer, the data line DL is in the second metal layer, and the gate insulation is at least spaced between the first metal layer and the second metal layer. Layer 230. In this embodiment, the plurality of data lines DL extend in the second direction, the second direction and the first direction are perpendicular to each other, and the data lines DL and the data lines DL are parallel to each other.
在本实施例中,多组薄膜晶体管形成在衬底基板210上,每组薄膜晶体管包括主薄膜晶体管TFT_m、次薄膜晶体管TFT_s和共享薄膜晶体管TFT_share, 其中,每个薄膜晶体管包括源极、漏极和栅极,也即主薄膜晶体管TFT_m、次薄膜晶体管TFT_s和共享薄膜晶体管TFT_share均包括源极、漏极和栅极。其中,栅极位于第一金属层且与对应的扫描线SL电连接,源极和漏极位于第二金属层。在本实施例中,每组薄膜晶体管中的主薄膜晶体管TFT_m、次薄膜晶体管TFT_s和共享薄膜晶体管TFT_share的栅极连接同一条扫描线SL,每组薄膜晶体管中的主薄膜晶体管TFT_m、次薄膜晶体管TFT_s的源极连接同一条数据线DL,在本实施例中所述主薄膜晶体管TFT_m和所述次薄膜晶体管TFT_s共用一个源极,所述共享薄膜晶体管TFT_share的漏极与同组的所述次薄膜晶体管TFT_s的漏极电连接,所述共享薄膜晶体管TFT_share的源极与对应的公共电极线222电连接。在本实施例中,每组薄膜晶体管中的主薄膜晶体管TFT_m、次薄膜晶体管TFT_s共用一个栅极,而且,主薄膜晶体管TFT_m、次薄膜晶体管TFT_s共用的栅极与同一组中的共享薄膜晶体管TFT_share的栅极电连接且共用同一个金属,只是两者的栅极位于该共用的金属的不同的区域。在本实施例中,同一组中主薄膜晶体管TFT_m、次薄膜晶体管TFT_s和共享薄膜晶体管TFT_share的栅极均位于与其相连的扫描线SL的同一侧,在本实施例中为扫描线SL的下侧。In this embodiment, a plurality of thin film transistors are formed on the base substrate 210. Each of the thin film transistors includes a main thin film transistor TFT_m, a sub-thin film transistor TFT_s, and a shared thin film transistor TFT_share, wherein each thin film transistor includes a source and a drain. And the gate, that is, the main thin film transistor TFT_m, the sub-thin film transistor TFT_s, and the shared thin film transistor TFT_share, each include a source, a drain, and a gate. The gate is located in the first metal layer and is electrically connected to the corresponding scan line SL, and the source and the drain are located in the second metal layer. In this embodiment, the gates of the main thin film transistor TFT_m, the sub-thin film transistor TFT_s, and the shared thin film transistor TFT_share in each group of thin film transistors are connected to the same scan line SL, and the main thin film transistor TFT_m and the sub-thin film transistor in each group of thin film transistors are connected. The source of the TFT_s is connected to the same data line DL. In this embodiment, the main thin film transistor TFT_m and the sub-thin film transistor TFT_s share one source, and the drain of the shared thin film transistor TFT_share is the same as the same group. The drain of the thin film transistor TFT_s is electrically connected, and the source of the shared thin film transistor TFT_share is electrically connected to the corresponding common electrode line 222. In this embodiment, the main thin film transistor TFT_m and the sub-thin film transistor TFT_s of each group of thin film transistors share one gate, and the gates shared by the main thin film transistor TFT_m and the sub-thin film transistor TFT_s and the shared thin film transistor TFT_share in the same group The gates are electrically connected and share the same metal, except that the gates of the two are located in different regions of the common metal. In this embodiment, the gates of the main thin film transistor TFT_m, the sub-thin film transistor TFT_s, and the shared thin film transistor TFT_share in the same group are all located on the same side of the scan line SL connected thereto, which is the lower side of the scan line SL in this embodiment. .
在本实施例中,所述第一绝缘层250位于所述薄膜晶体管阵列基板上,具体而言,所述第一绝缘层250位于所述第二金属层的上方。在本实施例中,所述第一绝缘层250为无机绝缘层。In this embodiment, the first insulating layer 250 is located on the thin film transistor array substrate. Specifically, the first insulating layer 250 is located above the second metal layer. In this embodiment, the first insulating layer 250 is an inorganic insulating layer.
在本实施例中,色阻层260形成在所述第一绝缘层250上,所述色阻层260包括多个红色色阻、多个绿色色阻和多个蓝色色阻等,所述色阻层260上形成多个第一开口261,所述第一开口261是一个大的开口,所述第一开口261呈方形,在此处为长方形,每个所述第一开口261配置在每组薄膜晶体管的上方,所述第一开口261由主薄膜晶体管TFT_m的漏极的上方延伸到共享薄膜晶体管TFT_share的源极的上方,此种设置,有利于制程简化。在本实施例中,所述第一开口261对应一组薄膜晶体管设置,且所述第一开口261位于与该组薄膜晶体管的栅极电连接的扫描线SL的一侧,在此处为扫描线SL的上侧,该组薄膜晶体管的栅极位于与其电连接的扫描线SL的另一侧,在此处为扫描线SL的下侧。In this embodiment, a color resist layer 260 is formed on the first insulating layer 250, and the color resist layer 260 includes a plurality of red color resists, a plurality of green color resists, and a plurality of blue color resists, and the like. A plurality of first openings 261 are formed on the resist layer 260. The first openings 261 are a large opening, and the first openings 261 are square, and are rectangular here, and each of the first openings 261 is disposed in each Above the group of thin film transistors, the first opening 261 extends from above the drain of the main thin film transistor TFT_m to the source of the shared thin film transistor TFT_share. This arrangement facilitates process simplification. In this embodiment, the first opening 261 is disposed corresponding to a group of thin film transistors, and the first opening 261 is located at a side of the scan line SL electrically connected to the gate of the group of thin film transistors, where is scanning On the upper side of the line SL, the gate of the group of thin film transistors is located on the other side of the scanning line SL to which it is electrically connected, here the lower side of the scanning line SL.
在本实施例中,所述第二绝缘层270形成在色阻层260和第一绝缘层250上,所述第二绝缘层270填充到第一开口261中,从而,在第一开口261中所述第二绝缘层270紧贴所述第一绝缘层250设置。在本实施例中,所述第二绝缘层270为无机绝缘层。In the embodiment, the second insulating layer 270 is formed on the color resist layer 260 and the first insulating layer 250, and the second insulating layer 270 is filled into the first opening 261, thereby being in the first opening 261. The second insulating layer 270 is disposed adjacent to the first insulating layer 250. In this embodiment, the second insulating layer 270 is an inorganic insulating layer.
在本实施例中,所述电极层形成在所述第二绝缘层270上,所述电极层包括多个像素电极,每个像素电极对应一组薄膜晶体管设置,每个像素电极包括主像素电极281和次像素电极282,在本实施例中,所述主像素电极281位于与该组薄膜晶体管电连接的扫描线SL的上侧,所述次像素电极282位于与该组薄膜晶体管电连接的扫描线SL的下侧(请参见图5)。在本实施例中,所述主薄膜晶体管TFT_m的漏极与对应的主像素电极281电连接,所述次薄膜晶体管TFT_s的漏极与对应的所述次像素电极282电连接,所述共享薄膜晶体管TFT_share的漏极与对应的次像素电极282电连接,其源极与公共电极线222电连接。在本实施例中,所述次薄膜晶体管TFT_s的漏极与所述共享薄膜晶体管TFT_share的漏极连接为一体,在图5中所述次薄膜晶体管TFT_s的漏极与所述共享薄膜晶体管TFT_share的漏极通过一个大的金属连接在一起。In this embodiment, the electrode layer is formed on the second insulating layer 270, the electrode layer includes a plurality of pixel electrodes, each pixel electrode is disposed corresponding to a group of thin film transistors, and each pixel electrode includes a main pixel electrode. 281 and the sub-pixel electrode 282. In this embodiment, the main pixel electrode 281 is located on the upper side of the scan line SL electrically connected to the set of thin film transistors, and the sub-pixel electrode 282 is electrically connected to the set of thin film transistors. The lower side of the scan line SL (see Figure 5). In this embodiment, the drain of the main thin film transistor TFT_m is electrically connected to the corresponding main pixel electrode 281, and the drain of the sub-thin film transistor TFT_s is electrically connected to the corresponding sub-pixel electrode 282, the shared thin film The drain of the transistor TFT_share is electrically connected to the corresponding sub-pixel electrode 282, and the source thereof is electrically connected to the common electrode line 222. In this embodiment, the drain of the sub-thin film transistor TFT_s is integrated with the drain of the shared thin film transistor TFT_share, and the drain of the sub-thin film transistor TFT_s and the shared thin film transistor TFT_share are in FIG. The drains are connected together by a large metal.
为了实现主像素电极281与主薄膜晶体管TFT_m的漏极电连接,共享薄膜晶体管TFT_share的源极与公共电极线222电连接,在本实施例中,所述第一开口261中设有彼此分离的第一过孔271和第二过孔272,所述第一过孔271贯通第一绝缘层250和第二绝缘层270到达主薄膜晶体管TFT_m的漏极,所述第二过孔272贯通第一绝缘层250、第二绝缘层270、部分薄膜晶体管阵列基板到达公共电极线222,具体所述第二过孔272至少贯通第一绝缘层250、第二绝缘层270、栅极绝缘层230,且第二过孔272与共享薄膜晶体管TFT_share的源极紧挨着。在本实施例中,所述电极层还包括第一连接电极283和第二连接电极284,所述第一连接电极283位于第一过孔271中以连接主薄膜晶体管TFT_m的漏极与所述主像素电极281,所述第二连接电极284位于第二过孔272中以连接共享薄膜晶体管TFT_share的源极与所述公共电极线222。在本实施例中,所述第一连接电极283、第二连接电极284、主像素电极281、次像素电极282是由同一金属层形成,在此处可以称为第三金属层。In order to realize the electrical connection between the main pixel electrode 281 and the drain of the main thin film transistor TFT_m, the source of the shared thin film transistor TFT_share is electrically connected to the common electrode line 222. In this embodiment, the first opening 261 is provided separately from each other. The first via 271 and the second via 272 pass through the first insulating layer 250 and the second insulating layer 270 to reach the drain of the main thin film transistor TFT_m, and the second via 272 penetrates the first The insulating layer 250, the second insulating layer 270, and the partial thin film transistor array substrate reach the common electrode line 222. Specifically, the second via 272 penetrates at least the first insulating layer 250, the second insulating layer 270, and the gate insulating layer 230, and The second via 272 is next to the source of the shared thin film transistor TFT_share. In this embodiment, the electrode layer further includes a first connection electrode 283 and a second connection electrode 284. The first connection electrode 283 is located in the first via 271 to connect the drain of the main thin film transistor TFT_m with the The main pixel electrode 281 is located in the second via 272 to connect the source of the shared thin film transistor TFT_share and the common electrode line 222. In this embodiment, the first connection electrode 283, the second connection electrode 284, the main pixel electrode 281, and the sub-pixel electrode 282 are formed of the same metal layer, and may be referred to herein as a third metal layer.
为了防止所述第一连接电极283与第二连接电极284短路,在本实施例中, 所述COA型阵列基板还包括垫高层262,在本实施例中所述垫高层262与所述数据线DL平行,当然,在本发明的其他实施例中所述垫高层也可以不与数据线平行。所述垫高层262至少垫高第一开口261中的第二绝缘层270的高度以用于改善第一连接电极283和第二连接电极284短路。从而,由于垫高层262垫高了其上的第二绝缘层270的高度,可以隔断垫高了的第二绝缘层270两侧的第三金属层,从而可以防止垫高的第二绝缘层270两侧的金属短路,从而可以防止第一连接电极283和第二连接电极284短路。较佳的,在本实施例中,在水平面的投影所述垫高层262位于第一连接电极283和第二连接电极284之间。In the embodiment, the COA type array substrate further includes a pad high layer 262. In the embodiment, the pad high layer 262 and the data line are used to prevent the first connection electrode 283 and the second connection electrode 284 from being short-circuited. The DL is parallel, of course, in other embodiments of the invention the upper layer of the pad may also not be parallel to the data line. The pad high layer 262 at least raises the height of the second insulating layer 270 in the first opening 261 for improving the short circuit of the first connection electrode 283 and the second connection electrode 284. Therefore, since the pad high layer 262 raises the height of the second insulating layer 270 thereon, the third metal layer on both sides of the padned second insulating layer 270 can be blocked, so that the padded second insulating layer 270 can be prevented. The metal on both sides is short-circuited, so that the first connection electrode 283 and the second connection electrode 284 can be prevented from being short-circuited. Preferably, in the present embodiment, the projection upper layer 262 is located between the first connection electrode 283 and the second connection electrode 284 at a horizontal plane.
在本实施例中,在同一组薄膜晶体管中,与共享薄膜晶体管TFT_share电连接的公共电极线222位于与其电连接的扫描线SL远离次像素电极282的一侧,也即远离栅极的一侧,在本实施例中为扫描线SL的上侧,且所述公共电极线222与所述扫描线SL存在间隙,所述第一开口261从公共电极线222的上方向扫描线SL方向延伸到公共电极线222与扫描线SL之间的区域,也即延伸到公共电极线222与所述扫描线SL的间隙的区域,所述公共电极线222与所述第一开口261在水平面的投影大部分是重叠的,该重叠的第一开口261部分可以称作开口第一部分261a,位于公共电极线222与扫描线SL之间间隙区域的第一开口261区域没有与所述公共电极线222重叠,该未重叠的第一开口261部分可以称作开口第二部分261b,在这里,开口第一部分261a和开口第二部分261b构成第一开口261,在图5中开口第一部分261a位于第一开口261远离扫描线SL的一端,在图中为上端,所述开口第二部分261b位于第一开口261靠近扫描线SL的一端,在图中为下端。在本实施例中,开口第一部分261a的下方存在第一绝缘层250、栅极绝缘层230、公共电极线222,开口第一部分261a的内部存在第二绝缘层270,开口第二部分261b的下方存在第一绝缘层250、栅极绝缘层230,开口第二部分261b的内部存在第二绝缘层270,可以看出,开口第二部分261b的下方相对开口第一部分261a下方少了公共电极线222,导致开口第二部分261b的区域相对开口第一部分261a的区域地势要低,当形成第二绝缘层270后,开口第二部分261b内的第二绝缘层270的地势要低于开口第一部分261a内的第二绝缘层270的地势,在本实施 例中开口第二部分261内的第二绝缘层270的地势处在最低地势。其后,沉积第三金属层后,之后的曝光、显影,由于开口第二部分261b内的第二绝缘层270的地势比较低,会导致此处的光阻曝光不完全,导致开口第二部分261b上方的光阻会有很大概率存在残留,从而导致光阻下面的第三金属层也会有很大概率存在残留,从而导致该残留的第三金属层部分会将第一连接电极283和第二连接电极284短路。在本实施例中,所述垫高层262由所述色阻层260向第一开口261内部延伸形成,一个第一开口261中具有至少一个垫高层262,在本实施例中为一个垫高层262。具体说来,所述垫高层262由所述第一开口261的下边沿向第一开口261内部延伸形成,较佳的所述垫高层262位于所述第一连接电极283和第二连接电极284之间,所述垫高层262与所述色阻层一体成型,从而,由于垫高层262的存在,垫高层262会垫高其上的第二绝缘层270,从而在开口第二部分261b内,垫高层262左侧的第二绝缘层270和垫高层262右侧的第二绝缘层270比垫高层262上方的第二绝缘层270地势要低,从而在对第三金属层曝光显影时,即使存在金属残留也是位于垫高层262左侧或者右侧,不会存在垫高层262上方,因而隔断了位于垫高层262左侧的第一连接电极283和位于垫高层262右侧的第二连接电极284的短路。较佳的,所述垫高层262位于第一连接电极283和第二连接电极284的中间位置,例如位于第一开口下边沿的中间位置。在本实施例中,所述垫高层262可以从开口第二部分261b延伸到开口第一部分261a,此时所述垫高层262向内延伸的一端与所述公共电极线222在水平面的投影重叠,当然所述垫高层262也可以不延伸到开口第一部分261a。In the present embodiment, in the same group of thin film transistors, the common electrode line 222 electrically connected to the shared thin film transistor TFT_share is located on the side of the scan line SL electrically connected thereto away from the sub-pixel electrode 282, that is, the side away from the gate. In the present embodiment, the upper side of the scan line SL, and the common electrode line 222 and the scan line SL have a gap, and the first opening 261 extends from the upper direction of the common electrode line 222 to the scan line SL to a region between the common electrode line 222 and the scan line SL, that is, a region extending to a gap between the common electrode line 222 and the scan line SL, the projection of the common electrode line 222 and the first opening 261 at a horizontal plane is large Portions are overlapped, and the overlapped first opening 261 portion may be referred to as an opening first portion 261a, and the first opening 261 region located in the gap region between the common electrode line 222 and the scan line SL does not overlap with the common electrode line 222. The portion of the non-overlapping first opening 261 may be referred to as an opening second portion 261b, where the opening first portion 261a and the opening second portion 261b constitute a first opening 261, and the first portion 261 is opened in FIG. a is located at one end of the first opening 261 away from the scanning line SL, which is an upper end in the drawing, and the opening second portion 261b is located at one end of the first opening 261 near the scanning line SL, which is a lower end in the drawing. In the present embodiment, the first insulating layer 250, the gate insulating layer 230, and the common electrode line 222 are present under the opening first portion 261a. The second insulating layer 270 is present inside the opening first portion 261a, and below the opening second portion 261b. There is a first insulating layer 250, a gate insulating layer 230, and a second insulating layer 270 exists inside the opening second portion 261b. It can be seen that the lower second portion 261b of the opening has less common electrode lines 222 below the opening first portion 261a. The area of the opening second portion 261b is lower than the area of the opening first portion 261a. When the second insulating layer 270 is formed, the second insulating layer 270 in the opening second portion 261b has a lower potential than the opening first portion 261a. The topography of the second insulating layer 270 is in the lowest potential in the present embodiment in which the second insulating layer 270 in the opening second portion 261 is at the top potential. Thereafter, after depositing the third metal layer, subsequent exposure and development, due to the relatively low potential of the second insulating layer 270 in the second portion 261b of the opening, the photoresist exposure here is incomplete, resulting in the second portion of the opening. The photoresist above 261b has a high probability of residual, resulting in a large probability that the third metal layer under the photoresist will remain, resulting in the remaining third metal layer portion will be the first connection electrode 283 and The second connection electrode 284 is short-circuited. In this embodiment, the pad high layer 262 is formed by the color resist layer 260 extending toward the inside of the first opening 261. One of the first openings 261 has at least one pad high layer 262, which in this embodiment is a pad high layer 262. . Specifically, the pad high layer 262 is formed by extending a lower edge of the first opening 261 toward the inside of the first opening 261. Preferably, the pad high layer 262 is located at the first connection electrode 283 and the second connection electrode 284. Between the upper layer 262 and the color resist layer, the upper layer 262 of the pad is raised by the second insulating layer 270, so that the second portion 261b is opened in the second portion 261b. The second insulating layer 270 on the left side of the pad high layer 262 and the second insulating layer 270 on the right side of the pad high layer 262 are lower than the second insulating layer 270 above the pad high layer 262, so that even when the third metal layer is exposed and developed, even The presence of metal residue is also located on the left or right side of the upper layer 262 of the pad, and there is no upper layer 262 above the pad, thereby blocking the first connection electrode 283 on the left side of the pad high layer 262 and the second connection electrode 284 on the right side of the pad upper layer 262. Short circuit. Preferably, the pad high layer 262 is located at an intermediate position between the first connection electrode 283 and the second connection electrode 284, for example, at an intermediate position of the lower edge of the first opening. In this embodiment, the pad high-rise 262 may extend from the opening second portion 261b to the opening first portion 261a, and the end of the pad-up layer 262 extending inward overlaps the projection of the common electrode line 222 in the horizontal plane. Of course, the pad upper layer 262 may also not extend to the opening first portion 261a.
另外,请继续参见图5,为了实现次薄膜晶体管TFT_s与次像素电极282电连接,在本实施例中,所述第一绝缘层250、色阻层260、第二绝缘层270上设有多个第三过孔273,所述电极层还包括第三连接电极285,所述第三连接电极285位于第三过孔273中以连接次薄膜晶体管TFT_s的漏极与次像素电极282、共享薄膜晶体管TFT_share的漏极与所述次像素电极282。在本实施例中,位于色阻层260中的第三过孔273部分与位于第一绝缘层250、第二绝缘层270中的第三过孔273部分可以在一个制程中形成,也可以分成多个步骤形成,当分成多个步骤形成时,此时位于色阻层260中的第三过孔273部分可 以称作第二开口。In addition, referring to FIG. 5, in order to realize the electrical connection between the sub-thin film transistor TFT_s and the sub-pixel electrode 282, in the embodiment, the first insulating layer 250, the color resist layer 260, and the second insulating layer 270 are provided. a third via 273, the electrode layer further includes a third connection electrode 285, the third connection electrode 285 being located in the third via 273 to connect the drain of the sub-thin film transistor TFT_s with the sub-pixel electrode 282, the shared film The drain of the transistor TFT_share and the sub-pixel electrode 282. In this embodiment, the portion of the third via 273 located in the color resist layer 260 and the portion of the third via 273 located in the first insulating layer 250 and the second insulating layer 270 may be formed in one process or may be divided into A plurality of steps are formed, and when formed in a plurality of steps, the portion of the third via 273 located in the color resist layer 260 at this time may be referred to as a second opening.
另外,本发明实施例还提供一种显示面板,所述显示面板包括上述的COA型阵列基板。另外,在本发明一实施例中,所述显示面板还包括滤光片基板,所述滤光片基板位于所述COA型阵列基板的上方,所述滤光片基板上设有共通电极,所述COA型阵列基板与所述滤光片基板之间设有液晶层。在本实施例中,主像素电极和滤光片基板上的共通电极形成主液晶电容,主像素电极和公共电极线形成主存储电容,次像素电极和滤光片基板上共通电极形成次液晶电容,次像素电极和公共电极线形成次存储电容。In addition, an embodiment of the present invention further provides a display panel, which includes the COA type array substrate described above. In addition, in an embodiment of the invention, the display panel further includes a filter substrate, the filter substrate is located above the COA type array substrate, and the filter substrate is provided with a common electrode. A liquid crystal layer is disposed between the COA type array substrate and the filter substrate. In this embodiment, the main pixel electrode and the common electrode on the filter substrate form a main liquid crystal capacitor, the main pixel electrode and the common electrode line form a main storage capacitor, and the sub-pixel electrode and the common electrode on the filter substrate form a sub-liquid crystal capacitor The sub-pixel electrode and the common electrode line form a secondary storage capacitor.
第二实施例Second embodiment
图7是本发明第二实施例COA型阵列基板的示意图,图7的示意图与图5的示意图相似,因此相同的元件符号代表相同的元器件。本实施例与第一实施例的主要不同点为垫高层的位置。7 is a schematic view of a COA type array substrate according to a second embodiment of the present invention. The schematic diagram of FIG. 7 is similar to the schematic diagram of FIG. 5, and thus the same component symbols represent the same components. The main difference between this embodiment and the first embodiment is the position of the upper layer of the pad.
请参见图7和图8,在本实施例中,所述垫高层362的材料为金属材料,所述垫高层362位于第二金属层,也即所述垫高层362与数据线DL位于同一层且与数据线DL由相同金属构成。在本实施例中,所述垫高层362位于所述第一绝缘层250的下方,所述垫高层362垫高开口第一部分261a中的部分第一绝缘层250和部分第二绝缘层270的高度,所述垫高层362位于所述第一连接电极283和第二连接电极284之间。同样,由于垫高层362上的第一绝缘层250和第二绝缘层270得到垫高,从而可以防止第一连接电极283和第二连接电极284之间短路。在本实施例中,在水平面的投影,所述垫高层362由第一开口261的下边沿向第一开口261内部延伸,所述垫高层362、开口第一部分261a在水平面的投影存在重叠。另外,在本实施例中,在水平面的投影,所述垫高层362还可以向下侧延伸超出第一开口261下边沿的范围,也即所述垫高层362还存在部分位于扫描线SL与第一开口261之间的区域。Referring to FIG. 7 and FIG. 8 , in the embodiment, the material of the high-rise layer 362 is made of a metal material, and the high-rise layer 362 of the pad is located on the second metal layer, that is, the high-rise layer 362 of the pad is located on the same layer as the data line DL. And the data line DL is made of the same metal. In this embodiment, the pad high layer 362 is located below the first insulating layer 250, and the pad high layer 362 heights the height of a portion of the first insulating layer 250 and a portion of the second insulating layer 270 in the opening first portion 261a. The pad high layer 362 is located between the first connection electrode 283 and the second connection electrode 284. Also, since the first insulating layer 250 and the second insulating layer 270 on the pad high-rise 362 are padded, it is possible to prevent a short circuit between the first connection electrode 283 and the second connection electrode 284. In the present embodiment, in the projection of the horizontal plane, the pad high-rise 362 extends from the lower edge of the first opening 261 toward the inside of the first opening 261, and the projections of the pad high-rise 362 and the opening first portion 261a in the horizontal plane overlap. In addition, in this embodiment, in the projection of the horizontal plane, the pad high-rise 362 may further extend downward beyond the lower edge of the first opening 261, that is, the pad high-rise 362 further exists in the scanning line SL and the An area between openings 261.
需要说明的是,本说明书中的各个实施例均采用递进的方式描述,每个实施例重点说明的都是与其它实施例的不同之处,各个实施例之间相同相似的部分互相参见即可。对于装置实施例而言,由于其与方法实施例基本相似,所 以描述的比较简单,相关之处参见方法实施例的部分说明即可。It should be noted that the various embodiments in the present specification are described in a progressive manner, and each embodiment focuses on differences from other embodiments, and the same similar parts between the various embodiments are mutually referred to. can. For the device embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the description of the method embodiment.
以上所揭露的仅为本发明较佳实施例而已,当然不能以此来限定本发明之权利范围,因此依本发明权利要求所作的等同变化,仍属本发明所涵盖的范围。The above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, and thus equivalent changes made in the claims of the present invention are still within the scope of the present invention.

Claims (20)

  1. 一种COA型阵列基板,其中,包括:A COA type array substrate, comprising:
    薄膜晶体管阵列基板,其包括:A thin film transistor array substrate comprising:
    多条扫描线,其沿第一方向延伸;a plurality of scan lines extending in a first direction;
    多条数据线,其沿垂直于第一方向的第二方向延伸;a plurality of data lines extending in a second direction perpendicular to the first direction;
    多条公共电极线,其用于提供公共电压,所述公共电极线与所述扫描线位于同一金属层;a plurality of common electrode lines for providing a common voltage, the common electrode lines being in the same metal layer as the scan lines;
    多组薄膜晶体管,每组薄膜晶体管包括主薄膜晶体管、次薄膜晶体管和共享薄膜晶体管;a plurality of thin film transistors each comprising a main thin film transistor, a sub thin film transistor, and a shared thin film transistor;
    第一绝缘层,其位于所述薄膜晶体管阵列基板上;a first insulating layer on the thin film transistor array substrate;
    色阻层,其位于第一绝缘层上,所述色阻层上形成多个第一开口,每个所述第一开口由主薄膜晶体管的漏极的上方延伸到共享薄膜晶体管源极的上方;a color resist layer on the first insulating layer, wherein the color resist layer forms a plurality of first openings, each of the first openings extending from above the drain of the main thin film transistor to above the source of the shared thin film transistor ;
    第二绝缘层,其形成在色阻层和第一绝缘层上,且所述第二绝缘层填充到第一开口中;a second insulating layer formed on the color resist layer and the first insulating layer, and the second insulating layer is filled into the first opening;
    电极层,其形成在第二绝缘层上,所述电极层包括多个像素电极,每个像素电极对应一组薄膜晶体管设置,每个像素电极包括主像素电极和次像素电极,所述主薄膜晶体管的漏极与对应的主像素电极电连接,所述次薄膜晶体管的漏极与对应的所述次像素电极电连接,所述共享薄膜晶体管的漏极和源极分别与对应的所述次像素电极、公共电极线电连接;其中,An electrode layer formed on the second insulating layer, the electrode layer comprising a plurality of pixel electrodes, each pixel electrode being disposed corresponding to a group of thin film transistors, each of the pixel electrodes including a main pixel electrode and a sub-pixel electrode, the main film The drain of the transistor is electrically connected to the corresponding main pixel electrode, the drain of the sub-thin film transistor is electrically connected to the corresponding sub-pixel electrode, and the drain and the source of the shared thin film transistor are respectively corresponding to the corresponding a pixel electrode and a common electrode line are electrically connected; wherein
    所述第一开口中设有彼此分离的第一过孔和第二过孔,所述第一过孔贯通第一绝缘层和第二绝缘层到达主薄膜晶体管的漏极,所述第二过孔贯通第一绝缘层、第二绝缘层、部分薄膜晶体管阵列基板到达公共电极线,所述电极层还包括第一连接电极和第二连接电极,所述第一连接电极位于第一过孔中以连接主薄膜晶体管的漏极与主像素电极,所述第二连接电极位于第二过孔中以连接共享薄膜晶体管的漏极与所述公共电极线;其中,所述COA型阵列基板还包括垫高层,所述垫高层至少垫高第一开口中的第二绝缘层的高度以用于防止第一连接电极和第二连接电极短路。a first via hole and a second via hole separated from each other are disposed in the first opening, and the first via hole penetrates the first insulating layer and the second insulating layer to reach a drain of the main thin film transistor, the second pass The hole penetrates the first insulating layer, the second insulating layer, and the partial thin film transistor array substrate reaches the common electrode line, the electrode layer further includes a first connecting electrode and a second connecting electrode, wherein the first connecting electrode is located in the first via hole Connecting the drain of the main thin film transistor and the main pixel electrode, wherein the second connection electrode is located in the second via hole to connect the drain of the shared thin film transistor and the common electrode line; wherein the COA type array substrate further includes The upper layer of the pad, the pad upper layer at least raising the height of the second insulating layer in the first opening for preventing the first connection electrode and the second connection electrode from being short-circuited.
  2. 如权利要求1所述的COA型阵列基板,其中,所述垫高层由所述第一开口的下边沿向第一开口内部延伸形成,所述垫高层与所述色阻层一体成型。The COA type array substrate according to claim 1, wherein the upper layer of the pad is formed by extending a lower edge of the first opening toward the inside of the first opening, and the upper layer of the pad is integrally formed with the color resist layer.
  3. 如权利要求1所述的COA型阵列基板,其中,所述垫高层与所述数据线位于同一层且由相同金属构成,在水平面的投影所述垫高层从第一开口的下边沿向第一开口内部延伸。The COA type array substrate according to claim 1, wherein the upper layer of the pad is in the same layer as the data line and is made of the same metal, and the projection of the pad in the horizontal plane is first from the lower edge of the first opening. The inside of the opening extends.
  4. 如权利要求1所述的COA型阵列基板,其中,同一组薄膜晶体管的栅极连接同一条扫描线,该扫描线位于主像素电极和次像素电极之间,所述第一开口、所述公共电极线位于该扫描线靠近主像素电极的一侧,所述第一开口由公共电极线的上方向扫描线方向延伸到公共电极线与扫描线之间的间隙区域。The COA type array substrate according to claim 1, wherein gates of the same group of thin film transistors are connected to a same scan line, and the scan lines are located between the main pixel electrode and the sub-pixel electrode, the first opening, the common The electrode line is located on a side of the scan line adjacent to the main pixel electrode, and the first opening extends from an upper direction of the common electrode line to a gap region between the common electrode line and the scan line.
  5. 如权利要求4所述的COA型阵列基板,其中,所述第一开口包括开口第一部分和开口第二部分,所述开口第一部分与所述公共电极线重叠,所述开口第二部分与所述公共电极线错开,且开口第二部分位于开口第一部分的下侧,在水平面的投影所述垫高层至少部分位于开口第二部分中。The COA type array substrate according to claim 4, wherein the first opening comprises an opening first portion and an opening second portion, the opening first portion overlapping the common electrode line, and the opening second portion is The common electrode lines are staggered, and the second portion of the opening is located on the underside of the first portion of the opening, and the projection of the pad in the horizontal plane is at least partially located in the second portion of the opening.
  6. 如权利要求5所述的COA型阵列基板,其中,在水平面的投影所述垫高层向内延伸到开口第一部分中。The COA type array substrate of claim 5, wherein the projection of the horizontal plane extends inwardly into the first portion of the opening in a horizontal plane.
  7. 如权利要求2所述的COA型阵列基板,其中,同一组薄膜晶体管的栅极连接同一条扫描线,该扫描线位于主像素电极和次像素电极之间,所述第一开口、所述公共电极线位于该扫描线靠近主像素电极的一侧,所述第一开口由公共电极线的上方向扫描线方向延伸到公共电极线与扫描线之间的间隙区域。The COA type array substrate according to claim 2, wherein the gates of the same group of thin film transistors are connected to the same scan line, and the scan lines are located between the main pixel electrode and the sub-pixel electrode, the first opening, the common The electrode line is located on a side of the scan line adjacent to the main pixel electrode, and the first opening extends from an upper direction of the common electrode line to a gap region between the common electrode line and the scan line.
  8. 如权利要求3所述的COA型阵列基板,其中,同一组薄膜晶体管的栅极连接同一条扫描线,该扫描线位于主像素电极和次像素电极之间,所述第一开口、所述公共电极线位于该扫描线靠近主像素电极的一侧,所述第一开口由公共电极线的上方向扫描线方向延伸到公共电极线与扫描线之间的间隙区域。The COA type array substrate according to claim 3, wherein the gates of the same group of thin film transistors are connected to the same scan line, and the scan lines are located between the main pixel electrode and the sub-pixel electrode, the first opening, the common The electrode line is located on a side of the scan line adjacent to the main pixel electrode, and the first opening extends from an upper direction of the common electrode line to a gap region between the common electrode line and the scan line.
  9. 如权利要求1所述的COA型阵列基板,其中,在水平面的投影所述垫高层位于所述第一连接电极和第二连接电极之间。The COA type array substrate according to claim 1, wherein the projection of the pad in a horizontal plane is located between the first connection electrode and the second connection electrode.
  10. 如权利要求2所述的COA型阵列基板,其中,在水平面的投影所述垫高层位于所述第一连接电极和第二连接电极之间。The COA type array substrate according to claim 2, wherein the projection of the pad in a horizontal plane is located between the first connection electrode and the second connection electrode.
  11. 如权利要求3所述的COA型阵列基板,其中,在水平面的投影所述垫高层位于所述第一连接电极和第二连接电极之间。The COA type array substrate according to claim 3, wherein the projection of the pad in a horizontal plane is located between the first connection electrode and the second connection electrode.
  12. 如权利要求1所述的COA型阵列基板,其中,同一组薄膜晶体管中所述主薄膜晶体管的源极和次薄膜晶体管的源极电连接到同一条数据线,所述主薄膜晶体管的栅极、所述次薄膜晶体管的栅极和所述共享薄膜晶体管的栅极电连接到同一条扫描线。The COA type array substrate according to claim 1, wherein a source of the main thin film transistor and a source of the sub-thin film transistor of the same group of thin film transistors are electrically connected to a same data line, a gate of the main thin film transistor The gate of the sub-thin film transistor and the gate of the shared thin film transistor are electrically connected to the same scan line.
  13. 如权利要求12所述的COA型阵列基板,其中,所述主薄膜晶体管、次薄膜晶体管共用同一个源极和共用同一个栅极。The COA type array substrate according to claim 12, wherein the main thin film transistor and the sub-thin film transistor share the same source and share the same gate.
  14. 如权利要求2所述的COA型阵列基板,其中,同一组薄膜晶体管中所述主薄膜晶体管的源极和次薄膜晶体管的源极电连接到同一条数据线,所述主薄膜晶体管的栅极、所述次薄膜晶体管的栅极和所述共享薄膜晶体管的栅极电连接到同一条扫描线。The COA type array substrate according to claim 2, wherein a source of the main thin film transistor and a source of the sub-thin film transistor of the same group of thin film transistors are electrically connected to a same data line, a gate of the main thin film transistor The gate of the sub-thin film transistor and the gate of the shared thin film transistor are electrically connected to the same scan line.
  15. 一种显示面板,其中,包括COA型阵列基板,所述COA型阵列基板包括:A display panel, comprising a COA type array substrate, the COA type array substrate comprising:
    薄膜晶体管阵列基板,其包括:A thin film transistor array substrate comprising:
    多条扫描线,其沿第一方向延伸;a plurality of scan lines extending in a first direction;
    多条数据线,其沿垂直于第一方向的第二方向延伸;a plurality of data lines extending in a second direction perpendicular to the first direction;
    多条公共电极线,其用于提供公共电压,所述公共电极线与所述扫描线 位于同一金属层;a plurality of common electrode lines for providing a common voltage, the common electrode lines being in the same metal layer as the scan lines;
    多组薄膜晶体管,每组薄膜晶体管包括主薄膜晶体管、次薄膜晶体管和共享薄膜晶体管;a plurality of thin film transistors each comprising a main thin film transistor, a sub thin film transistor, and a shared thin film transistor;
    第一绝缘层,其位于所述薄膜晶体管阵列基板上;a first insulating layer on the thin film transistor array substrate;
    色阻层,其位于第一绝缘层上,所述色阻层上形成多个第一开口,每个所述第一开口由主薄膜晶体管的漏极的上方延伸到共享薄膜晶体管源极的上方;a color resist layer on the first insulating layer, wherein the color resist layer forms a plurality of first openings, each of the first openings extending from above the drain of the main thin film transistor to above the source of the shared thin film transistor ;
    第二绝缘层,其形成在色阻层和第一绝缘层上,且所述第二绝缘层填充到第一开口中;a second insulating layer formed on the color resist layer and the first insulating layer, and the second insulating layer is filled into the first opening;
    电极层,其形成在第二绝缘层上,所述电极层包括多个像素电极,每个像素电极对应一组薄膜晶体管设置,每个像素电极包括主像素电极和次像素电极,所述主薄膜晶体管的漏极与对应的主像素电极电连接,所述次薄膜晶体管的漏极与对应的所述次像素电极电连接,所述共享薄膜晶体管的漏极和源极分别与对应的所述次像素电极、公共电极线电连接;其中,An electrode layer formed on the second insulating layer, the electrode layer comprising a plurality of pixel electrodes, each pixel electrode being disposed corresponding to a group of thin film transistors, each of the pixel electrodes including a main pixel electrode and a sub-pixel electrode, the main film The drain of the transistor is electrically connected to the corresponding main pixel electrode, the drain of the sub-thin film transistor is electrically connected to the corresponding sub-pixel electrode, and the drain and the source of the shared thin film transistor are respectively corresponding to the corresponding a pixel electrode and a common electrode line are electrically connected; wherein
    所述第一开口中设有彼此分离的第一过孔和第二过孔,所述第一过孔贯通第一绝缘层和第二绝缘层到达主薄膜晶体管的漏极,所述第二过孔贯通第一绝缘层、第二绝缘层、部分薄膜晶体管阵列基板到达公共电极线,所述电极层还包括第一连接电极和第二连接电极,所述第一连接电极位于第一过孔中以连接主薄膜晶体管的漏极与主像素电极,所述第二连接电极位于第二过孔中以连接共享薄膜晶体管的漏极与所述公共电极线;其中,所述COA型阵列基板还包括垫高层,所述垫高层至少垫高第一开口中的第二绝缘层的高度以用于防止第一连接电极和第二连接电极短路。a first via hole and a second via hole separated from each other are disposed in the first opening, and the first via hole penetrates the first insulating layer and the second insulating layer to reach a drain of the main thin film transistor, the second pass The hole penetrates the first insulating layer, the second insulating layer, and the partial thin film transistor array substrate reaches the common electrode line, the electrode layer further includes a first connecting electrode and a second connecting electrode, wherein the first connecting electrode is located in the first via hole Connecting the drain of the main thin film transistor and the main pixel electrode, wherein the second connection electrode is located in the second via hole to connect the drain of the shared thin film transistor and the common electrode line; wherein the COA type array substrate further includes The upper layer of the pad, the pad upper layer at least raising the height of the second insulating layer in the first opening for preventing the first connection electrode and the second connection electrode from being short-circuited.
  16. 如权利要求15所述的显示面板,其中,所述垫高层由所述第一开口的下边沿向第一开口内部延伸形成,所述垫高层与所述色阻层一体成型。The display panel according to claim 15, wherein the upper layer of the pad is formed by extending a lower edge of the first opening toward the inside of the first opening, and the upper layer of the pad is integrally formed with the color resist layer.
  17. 如权利要求15所述的显示面板,其中,所述垫高层与所述数据线位于同一层且由相同金属构成,在水平面的投影所述垫高层从第一开口的下边沿向第一开口内部延伸。The display panel according to claim 15, wherein said upper layer of said pad is in the same layer as said data line and is made of the same metal, and projection of said high layer on said horizontal surface from said lower edge of said first opening to said first opening extend.
  18. 如权利要求15所述的显示面板,其中,同一组薄膜晶体管的栅极连接同一条扫描线,该扫描线位于主像素电极和次像素电极之间,所述第一开口、所述公共电极线位于该扫描线靠近主像素电极的一侧,所述第一开口由公共电极线的上方向扫描线方向延伸到公共电极线与扫描线之间的间隙区域。The display panel according to claim 15, wherein the gates of the same group of thin film transistors are connected to the same scan line, and the scan lines are located between the main pixel electrode and the sub-pixel electrode, the first opening and the common electrode line. Located at a side of the scan line adjacent to the main pixel electrode, the first opening extends from a direction of the upper direction of the common electrode line to a gap region between the common electrode line and the scan line.
  19. 如权利要求15所述的显示面板,其中,在水平面的投影所述垫高层位于所述第一连接电极和第二连接电极之间。The display panel according to claim 15, wherein the projection of the pad in a horizontal plane is located between the first connection electrode and the second connection electrode.
  20. 如权利要求15所述的显示面板,其中,同一组薄膜晶体管中所述主薄膜晶体管的源极和次薄膜晶体管的源极电连接到同一条数据线,所述主薄膜晶体管的栅极、所述次薄膜晶体管的栅极和所述共享薄膜晶体管的栅极电连接到同一条扫描线。The display panel according to claim 15, wherein the source of the main thin film transistor and the source of the sub-thin film transistor of the same group of thin film transistors are electrically connected to the same data line, the gate of the main thin film transistor, The gate of the thin film transistor and the gate of the shared thin film transistor are electrically connected to the same scan line.
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