WO2019127164A1 - Preparation method for anti-aliasing imaging element and optical sensor - Google Patents

Preparation method for anti-aliasing imaging element and optical sensor Download PDF

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Publication number
WO2019127164A1
WO2019127164A1 PCT/CN2017/119148 CN2017119148W WO2019127164A1 WO 2019127164 A1 WO2019127164 A1 WO 2019127164A1 CN 2017119148 W CN2017119148 W CN 2017119148W WO 2019127164 A1 WO2019127164 A1 WO 2019127164A1
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WO
WIPO (PCT)
Prior art keywords
imaging element
aliasing imaging
optical
light
optical sensor
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PCT/CN2017/119148
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French (fr)
Chinese (zh)
Inventor
林峰
Original Assignee
深圳信炜科技有限公司
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Application filed by 深圳信炜科技有限公司 filed Critical 深圳信炜科技有限公司
Priority to PCT/CN2017/119148 priority Critical patent/WO2019127164A1/en
Priority to CN201780002242.6A priority patent/CN108124467A/en
Publication of WO2019127164A1 publication Critical patent/WO2019127164A1/en

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/04Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings formed by bundles of fibres
    • G02B6/06Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings formed by bundles of fibres the relative position of the fibres being the same at both ends, e.g. for transporting images
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12Fingerprints or palmprints
    • G06V40/13Sensors therefor
    • G06V40/1318Sensors therefor using electro-optical elements or layers, e.g. electroluminescent sensing

Definitions

  • the present invention relates to the field of photoelectric sensing, and in particular to an anti-aliasing imaging element and a method of preparing the optical sensor.
  • biometric information sensors especially fingerprint identification devices
  • the optical fingerprint recognition device Since the optical fingerprint recognition device has stronger penetration capability than the capacitive fingerprint recognition device, more consideration is given to applying the optical fingerprint recognition device to the mobile terminal.
  • the existing optical fingerprint recognition device is applied to a mobile terminal, a clear and accurate fingerprint image cannot be obtained, and improvement is required.
  • embodiments of the present invention aim to at least solve one of the technical problems existing in the prior art. To this end, embodiments of the present invention are required to provide an anti-aliasing imaging element and a method of fabricating the optical sensor.
  • Embodiments of the present invention provide a method for preparing an anti-aliasing imaging element, including the following steps:
  • optical transmission fiber comprising a light transmissive body and a non-transparent layer located outside the light transmissive body;
  • the anti-aliasing imaging element of the embodiment of the invention has low preparation cost, and the prepared anti-aliasing imaging element has a simple structure, and when applied to an optical sensor, the sensing precision of the optical sensor is improved.
  • the step S12 includes: gathering a plurality of light-transmitting fibers, filling the cured glue of the non-translucent material in a vacuum environment, and then curing the fibers.
  • the step S11 further includes:
  • the light rod is drawn to form a light-transmitting body of the light-transmitting fiber, and a non-light-transmitting material is sprayed on the outer surface of the light-transmitting body to form a non-transmissive layer of the light-transmitting fiber.
  • the light bar comprises one or more of quartz, glass, polymer.
  • the light transmissive body has a circular, square, rectangular, or elliptical cross section.
  • the light-transmissive body has a rectangular cut surface and the axial cut surface has a width of 5 to 50 um.
  • the step S12 includes coating a cured adhesive of a non-translucent material on the outside of the optical transmission fiber to bond the plurality of optical transmission fibers.
  • the method further comprises:
  • the fixed optical transmission fibers are cut according to the required size and length.
  • Embodiments of the present invention provide a method of fabricating an optical sensor, including the following steps:
  • the anti-aliasing imaging element is prepared by the method for preparing an anti-aliasing imaging element of any of the above embodiments to make;
  • the anti-aliasing imaging element is prepared by the above preparation method, the preparation cost of the optical sensor is low, and the anti-aliasing imaging element is utilized to improve the sensing accuracy of the optical sensor.
  • the ratio of length to diameter of the optical axis section of the anti-aliasing imaging element is greater than or equal to 5 and less than or equal to 50.
  • the optical sensor is used to acquire biometric information of an object above the sensor.
  • the biometric information includes one or more of a fingerprint, a palm print, a vein, a blood pressure, a heart rate, and a blood oxygen concentration.
  • Embodiments of the present invention provide a method of fabricating another optical sensor, including the following steps:
  • the anti-aliasing imaging element is attached to the optical sensor chip and packaged.
  • the optical sensor chip and the anti-aliasing imaging element can be independently fabricated, and can be formed in plurality at a time, thereby improving the preparation efficiency of the optical sensor.
  • the anti-aliasing imaging plate is fabricated using the method of preparing the anti-aliasing imaging element of any of the above embodiments.
  • the ratio of the length to the diameter of the optical axis of the anti-aliasing imaging element obtained in the step S34 is greater than or equal to 5 and less than or equal to 50.
  • FIG. 1 is a schematic structural view of a conventional optical fingerprint sensor
  • FIG. 2 is a schematic structural view of a photosensitive unit of an optical fingerprint sensor corresponding to an axial section of an optical fiber;
  • FIG. 3 is a schematic cross-sectional structural view of an anti-aliasing imaging element according to an embodiment of the present invention.
  • FIG. 4 is a schematic structural view showing an axial section of an optical transmission fiber and a photosensitive unit in an optical sensor according to an embodiment of the present invention
  • Figure 5a is a schematic diagram of an optical signal of an optical transmission fiber in the anti-aliasing imaging element of Figure 3;
  • Figure 5b is a schematic diagram of another optical signal of one optical transmission fiber in the anti-aliasing imaging element of Figure 3;
  • FIG. 6 is a schematic view showing a preparation process of an optical transmission fiber according to an embodiment of the present invention.
  • FIG. 7 is a schematic flow chart of a method for preparing an anti-aliasing imaging element according to an embodiment of the present invention.
  • FIG. 8a is a schematic view showing an arrangement structure of optical transmission fibers in an anti-aliasing imaging element according to an embodiment of the present invention
  • 8b is a schematic view showing another arrangement structure of optical transmission fibers in an anti-aliasing imaging element according to an embodiment of the present invention.
  • FIG. 9 is a schematic flow chart of a method for preparing an anti-aliasing imaging element according to another embodiment of the present invention.
  • Figure 10 is a cross-sectional structural view showing an optical sensor according to an embodiment of the present invention.
  • Figure 11 is a view showing the configuration of an optical sensor according to still another embodiment of the present invention.
  • FIG. 12 is a schematic circuit diagram of an optical sensor according to another embodiment of the present invention.
  • Figure 13 is a schematic view showing a specific structure of a photosensitive unit of Figure 12;
  • Figure 14 is a schematic view showing another specific structure of a photosensitive unit of Figure 12;
  • 15 is a schematic flow chart of a method of fabricating an optical sensor according to an embodiment of the present invention.
  • 16 is a schematic flow chart of a method of fabricating an optical sensor according to another embodiment of the present invention.
  • FIG. 17 is a schematic front view of a wafer according to an embodiment of the present invention.
  • FIG. 18 is a schematic front structural view of an electronic device according to an embodiment of the present invention.
  • FIG. 19 is a cross-sectional structural view of the electronic device of FIG. 18 taken along line I-I.
  • first and second are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, features defining “first” or “second” may include one or more of the described features either explicitly or implicitly. In the description of the present invention, the meaning of “a plurality” is two or more unless specifically and specifically defined otherwise.
  • Contact or “touch” includes direct or indirect contact.
  • the optical sensor disclosed hereinafter is disposed inside the electronic device, such as below the display screen, and the user's finger indirectly contacts the optical sensor through the protective cover and the display screen.
  • connection In the description of the present invention, it should be noted that the terms “installation”, “connected”, and “connected” are to be understood broadly, and may be fixed or detachable, for example, unless otherwise explicitly defined and defined. Connected, or integrally connected; may be mechanically connected, or may be electrically connected or may communicate with each other; may be directly connected or indirectly connected through an intermediate medium, may be internal communication of two elements or interaction of two elements relationship. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood on a case-by-case basis.
  • FIG. 1 is a schematic structural view of a conventional optical fingerprint sensor.
  • An existing optical fingerprint sensor is used for identification of an electronic device.
  • the optical fingerprint sensor 200 is located below the display screen 100 of the electronic device and is at least partially located within the display area of the display screen 100.
  • the optical fingerprint sensor 200 includes a plurality of photosensitive units 210 arranged in an array.
  • the photosensitive unit 210 of the optical fingerprint sensor 200 After passing through the display screen 100 to reach the optical fingerprint sensor 200, the photosensitive unit 210 of the optical fingerprint sensor 200 receives the reflected light signal, and converts the received optical signal into a corresponding electrical signal, thereby based on the converted electrical signal. , obtain biometric information of the object.
  • the biometric information herein includes, for example, one or more of a fingerprint, a palm print, a vein, a blood pressure, a heart rate, and a blood oxygen concentration.
  • Objects such as, but not limited to, human bodies, may also be other suitable types of organisms.
  • biometric information of the object is an inherent physiological feature of the human body
  • biometric information of the object will be used as an important basis for the identification of the object, and it is used to determine whether the identity of the user of the electronic device is legal, and thus the electronic device is controlled to perform corresponding operations, for example, Unlock operations, view data, mobile payments, and more.
  • the electronic device mentioned in the embodiments of the present invention is, for example, but not limited to, a suitable type of electronic product such as a consumer electronic product, a home electronic product, a vehicle-mounted electronic product, a financial terminal product, or the like.
  • consumer electronic products are, for example, mobile phones, tablet computers, notebook computers, desktop displays, computer integrated machines, and the like.
  • Home-based electronic products such as smart door locks, televisions, refrigerators, wearable devices, and the like.
  • Vehicle-mounted electronic products are, for example, car navigation systems, car DVDs, and the like.
  • Financial terminal products such as ATM machines, terminals for self-service business, etc.
  • the display screen of the electronic device may not work when the optical fingerprint sensor is in operation.
  • the electronic device to which the optical fingerprint sensor is applied is not limited to the display screen structure, that is, an electronic product without a display screen is also included.
  • FIG. 2 is a schematic structural view of a photosensitive unit of an optical fingerprint sensor corresponding to an axial section of the optical fiber.
  • An optical fiber 220 is disposed on the photosensitive unit 210.
  • the optical fiber 220 includes a light-tight dielectric layer 221 and a light-diffusing dielectric layer 222 and a plastic coating layer 223 from the inside to the outside.
  • the optically dense dielectric layer 221 is a dielectric layer having a large refractive index.
  • the dielectric layer 222 is a dielectric layer having a small refractive index, whereby a critical plane L is formed between the optically dense dielectric layer 221 and the optically dispersed dielectric layer 222.
  • n 0 is the refractive index in the air
  • n 1 is the refractive index of the optically dense medium layer 221
  • n 2 is the refractive index of the light-diffusing dielectric layer 222. Since the refractive index in the air is 1, substantially the incident angle maximum value ⁇ max is only related to the refractive indices of the optically dense medium layer 221 and the light-diffusing dielectric layer 222. As can be seen from the above equation, an optical signal having an incident angle less than or equal to the maximum value of the incident angle ⁇ max can be totally reflected at the critical plane L and emitted from the exit surface S2 of the optical fiber.
  • the inventors have found that although the above-mentioned optical fiber structure can avoid the optical signal larger than the incident angle maximum value ⁇ max reaching the photosensitive unit 210, the biometric information collected by the optical fingerprint sensor is still not clear enough, and the main reason is found after analysis.
  • Two First, the maximum incident angle ⁇ max of the fiber structure is too large, and there are still some adjacent interference signals. By changing the refractive index of the fiber dielectric layer, the incident angle maximum value ⁇ max of the fiber structure is reduced, although The optical fingerprint sensor collects clear biometric information, but the manufacturing process cost of the optical fiber structure also increases accordingly. Second, an optical signal larger than the incident angle maximum ⁇ max enters the optical fiber, passes through the optically dense dielectric layer 221 and the optically dispersed dielectric layer.
  • the inventors propose a new structure, that is, an anti-aliasing imaging element, which can solve the problem of the manufacturing process cost and enable the optical sensor to collect clearer and more accurate biometric information.
  • FIG. 3 is a schematic cross-sectional view of an anti-aliasing imaging element according to an embodiment of the present invention
  • FIG. 4 is an axial section of an optical transmission fiber and a photosensitive unit in an optical sensor according to an embodiment of the present invention.
  • the anti-aliasing imaging element 30 includes a plurality of optical transmission fibers 310, and each of the optical transmission fibers 310 includes a light transmissive body 311 and a non-transmissive layer 312 located outside the light transmissive body 311.
  • the light transmitting body 311 is, for example, a core in an optical fiber structure.
  • the non-transmissive layer 312 is formed of a light absorbing material and covers a cladding layer on the outer side of the light-transmitting body 311, and the non-light-transmitting layer 312 and the light-transmitting body 311 are in close contact with each other.
  • the light-transmitting body 311 is formed, and a non-light-transmitting material (that is, a light-absorbing material) is applied to the outer periphery of the light-transmitting body 311, and then subjected to a curing treatment.
  • a non-light-transmitting material that is, a light-absorbing material
  • the non-transmissive layer 312 and the light-transmitting body 311 may be separately pressed and bonded together after being separately formed.
  • the light absorbing material comprises a metal oxide, a carbon black coating, a black ink, and the like.
  • the metal in the metal oxide is, for example but not limited to, one of chromium (Cr), nickel (Ni), iron (Fe), tantalum (Ta), tungsten (W), titanium (Ti), molybdenum (Mo) or Several.
  • both ends of the optical transmission fiber 310 are an incident end surface 301 and an emission end surface 302, respectively, and an optical signal is incident from the incident end surface 301, is emitted from the emission end surface 302, and reaches the photosensitive unit 32.
  • the optical signal When the optical signal is incident on the transparent body 311 from the incident end surface 301, the optical signal will be refracted due to the difference of the medium, and most of the optical signals of the refracted optical signal will reach the critical surface of the transparent body 311 and the non-transmissive layer 312. L' is absorbed by the non-transmissive layer 312; the remaining optical signal will be substantially parallel to the axial direction of the light-transmitting body 311, and will be emitted from the exit end face 302 and reach the photosensitive unit 32.
  • FIG. 5a is a schematic diagram of an optical signal of an optical transmission fiber in the anti-aliasing imaging element of FIG.
  • an incident light signal P1 enters the incident end surface 301, refraction occurs, and the refracted light signal P1' reaches the critical surface L' of the light transmitting body 311 and the non-light transmitting layer 312, and is absorbed by the non-light transmitting layer 312.
  • Figure 5b is a schematic illustration of another optical signal of one of the optical transmission fibers of the anti-aliasing imaging element of Figure 3.
  • an incident light signal P2 enters the incident end surface 301, refraction occurs, and the direction of the refracted light signal P2' is substantially parallel to the axial direction P3 of the light transmitting body 311, and is emitted from the exit end surface 302, and is received by the photosensitive unit 32.
  • the width of the light transmitting body 311 in the axial section of the optical transmission fiber 310 is D and the height is H;
  • the medium refractive index of the light transmitting body 311 in the optical transmission fiber 310 is n 3 , and the optical transmission fiber
  • the medium other than 310 has a refractive index of n 4 .
  • the calculation formula of the incident angle maximum ⁇ max is as follows:
  • the optical signal having an incident angle smaller than or equal to the incident angle maximum ⁇ max can pass through the light transmitting body 311 of the optical transmission fiber 310 and reach the photosensitive unit 32.
  • the incident angle maximum ⁇ max is reduced. It can be seen from the above formula (2) that the incident angle maximum value ⁇ max is related to the refractive index of the medium and the height H and the width D of the axial section of the light transmitting body 311. Therefore, it is possible to reduce the incident angle maximum value ⁇ max .
  • the anti-aliasing imaging element 30 has a simple structure and a low manufacturing process cost.
  • the anti-aliasing imaging element 30 of the embodiment of the present invention has a simple structure and a low manufacturing process cost, and also makes the biometric information collected by the optical sensor 300 clearer and more accurate than the prior art.
  • the cross section of the light transmissive body 311 is, for example, a circle, a square, a rectangle, an ellipse, or the like.
  • the axial section of the transparent body 311 is rectangular, and the width D of the axial section ranges from 5 to 50 ⁇ m, and the width can be set to, for example, 10 ⁇ m, 15 ⁇ m, 20 ⁇ m, 30 ⁇ m, and 35 ⁇ m according to actual use and preparation processes. , 40 ⁇ m, 45 ⁇ m, etc.
  • the light transmissive body 311 includes, for example, one or more materials of materials such as quartz, glass, plastic, infrared, and the like.
  • FIG. 6 is a schematic diagram of a preparation process of an optical transmission fiber according to an embodiment of the present invention.
  • the preparation process of the optical transmission fiber specifically includes the following steps:
  • the light bar includes, for example, a rod of one or more materials of materials such as quartz, glass, plastic, infrared, and the like.
  • the light rod is drawn to form a light transmitting body 311 of the optical transmission fiber
  • the light bar is fixed to the top of the wire drawing machine and gradually heated to a certain temperature, for example, 2000 ° C.
  • a certain temperature for example, 2000 ° C.
  • the one end of the light bar on the heating side is gradually melted after being heated and accumulates as a liquid at the end, and when it is naturally suspended, the light transmitting body 311 of the light transmitting fiber is formed.
  • a non-transmissive material is uniformly sprayed on the outer periphery of the formed light-transmitting body 311 to form a non-transmissive layer 312 of the light-transmitting fiber 310.
  • the formed light-transmitting body 311 may be placed in a sol of a non-light-transmitting material and then taken out.
  • the light transmitting fiber 310 is irradiated with ultraviolet rays to cure the non-light transmitting layer 312 of the light transmitting fiber 310.
  • the light transmitting fiber 310 can also be naturally cooled.
  • the preparation process of the optical transmission fiber 310 described above is performed in a dust-free environment to ensure the optical quality of the optical transmission fiber 310.
  • the above steps S103 and S102 may be performed simultaneously, that is, spraying of the non-transparent material is performed while forming the light-transmitting body 311.
  • FIG. 7 is a schematic flow chart of a method for preparing an anti-aliasing imaging element according to an embodiment of the present invention.
  • the method for preparing the anti-aliasing imaging element comprises the following steps:
  • optical transmission fiber comprising a light transmissive body and a non-transparent layer located outside the light transmissive body;
  • a plurality of optical transmission fibers are produced according to the production method shown in Fig. 6, and of course, it is not limited to other preparation methods.
  • the resulting optical transmission fiber includes the structures described in the above embodiments, and includes, for example, a light transmitting body 311 and a non-light transmitting layer 312 located outside the light transmitting body 311.
  • the plurality of light transmitting fibers are then gathered together and fixed.
  • the curing glue of the non-translucent material is coated on the periphery of the plurality of optical transmission fibers to bond the plurality of optical transmission fibers; or in another embodiment, the optical transmission fibers are in a vacuum environment. The gap between the gaps is filled with a curing adhesive of a non-translucent material and cured.
  • the plurality of optical transmission fibers 310 are gathered together in a predetermined arrangement to form the anti-aliasing imaging element 30.
  • the axes of the plurality of optical transmission fibers 31 gathered together are parallel to each other, and the optical transmission fibers 310 are bonded by a cured adhesive of a non-translucent material.
  • a layer of curing glue is applied to the outer periphery of the optical transmission fiber 310, and then a plurality of optical transmission fibers 310 are gathered together, and the optical transmission fiber 310 is bonded and fixed by the peripheral curing glue to form an anti-aliasing imaging element. 30. As shown in Fig.
  • the optical transmission fibers are arranged in a rectangular arrangement.
  • the optical transmission fibers are arranged in a honeycomb-like structure.
  • the arrangement shown in Fig. 8b is smaller than the arrangement shown in Fig. 8a, and the gap between the optical transmission fibers is small.
  • the gap when the plurality of light transmitting fibers 310 are brought together, there is a gap between the light transmitting fibers 310, the gap being filled with a cured glue of a non-translucent material.
  • the optical transmission fibers 310 are first gathered together, and then glued from one end or both ends of the optical transmission fibers 310 so that the curing glue fills the gap between the optical transmission fibers 310.
  • the potting process will be performed under a vacuum environment to avoid the presence of air bubbles during the filling process that affect the optical quality of the anti-aliasing imaging element 30.
  • the anti-aliasing imaging element 30 has an aperture ratio greater than or equal to 30%. Preferably, the aperture ratio is greater than or equal to 50%. In order to ensure both the anti-aliasing effect and the sufficient amount of optical signal to pass through the anti-aliasing imaging element 30, a preferred value may be selected depending on the actual use, such as 55%, 60%, 70%, and the like. It is to be noted that the aperture ratio of the anti-aliasing imaging element 30 is a percentage of the cross-sectional area of the cross-sectional area of the anti-aliasing imaging element 30 in the entire cross-sectional area.
  • the non-transmissive material in the cured gel filled in the gap is consistent with the material of the non-transmissive layer 312 in the optical transmission fiber 310. This causes the non-transmissive layer 312 of the optical transmission fiber 310 to be completely fused with the cured glue in the gap, thereby making the bonding between the optical transmission fibers 310 more stable.
  • the non-transmissive layer 312 may be semi-cured or not cured after the above step S103, and after the plurality of optical transmission fibers 310 are gathered together, the extrusion process is performed to make the non-transparent layer. 312 fills the gap between the optical transmission fibers 310.
  • FIG. 9 is a schematic flow chart of a method for preparing an anti-aliasing imaging element according to another embodiment of the present invention. Based on the foregoing embodiment, after step S202, the method further includes:
  • the anti-aliasing imaging element its corresponding size and thickness will be set according to actual use requirements.
  • the shape of the optical sensor may include a rectangle, a square, a circle, etc., and as described above, by adjusting the thickness of the anti-aliasing imaging element, the anti-aliasing imaging element can be reduced.
  • the maximum angle of incidence thereby improving the sensing accuracy of the optical sensor, and the manufacturing process cost is reduced. Therefore, in the production of the anti-aliasing imaging element, the longer optical transmission fibers are gathered and fixed, and then laterally cut to obtain an anti-aliasing imaging plate of a desired thickness.
  • the transversely-cut anti-aliasing imaging plate is longitudinally cut according to the actual size of the optical sensor to obtain an anti-aliasing imaging element of a desired size.
  • the longitudinal cutting means cutting in a direction parallel to the axis of the optical transmission fiber
  • the transverse cutting means cutting in a direction perpendicular to the axis of the optical transmission fiber.
  • the optical quality is affected.
  • the outer periphery of the anti-aliased imaging element after cutting is coated with one.
  • the layer is a non-transparent material.
  • the anti-aliasing imaging element described above is applied, for example, to an optical sensor to prevent optical signals received by adjacent photosensitive units from interfering with each other and affecting the sensing accuracy of the optical sensor.
  • the anti-aliasing imaging element can also be applied to other optical components.
  • FIG. 10 is a schematic cross-sectional structural view of an optical sensor according to an embodiment of the present invention.
  • the optical sensor 300 is configured to collect biometric information of an object above the sensor, and the biometric information includes one or more of a fingerprint, a palm print, a vein, a blood pressure, a heart rate, and a blood oxygen concentration.
  • the optical sensor 300 includes, for example, a substrate 31, a plurality of photosensitive cells 32 arranged on the substrate 31, and an anti-aliasing imaging element 30 on the photosensitive unit 32.
  • the anti-aliasing imaging element 30 is implemented with reference to the structure described in the above embodiments for enabling an optical signal having an incident angle smaller than the incident angle maximum ⁇ max to pass through and reach the photosensitive unit 32, and the remaining optical signals are anti-aliased
  • the imaging element 30 absorbs, thus improving the sensing accuracy of the optical sensor, resulting in clearer, more accurate biometric information.
  • the ratio between the length and the width of the optical axis section of the anti-aliasing imaging element 30 ranges from 5 to 50, ie, the ratio is greater than or equal to 5 and less than or equal to 50. For example, 10, 15, 20, 30, 40, etc.
  • the ratio By setting the ratio, the maximum incident angle of the optical transmission fiber in the anti-aliasing imaging element 30 is adjusted to improve the sensing accuracy of the optical sensor.
  • each of the light-transmitting fibers of the anti-aliasing imaging member 30 has a light-transmissive axis-cut width that is small, one photosensitive unit 32 corresponds to a plurality of light-transmitting fibers, thus making the anti-aliasing imaging element When placed on the photosensitive unit 32, the alignment is not required, thereby reducing the manufacturing process cost of the optical sensor, and also improving the sensing accuracy of the optical sensor 300.
  • the optical sensor 300 further includes a light source 33 disposed on the substrate 31 and located outside the photosensitive region, which is a photosensitive region formed by the plurality of photosensitive cells 32.
  • the light source 33 is for emitting an optical signal of a predetermined wavelength, such as a white light signal, an infrared light signal, an ultraviolet light signal, a fluorescent signal, or the like.
  • FIG. 11 is a configuration of an optical sensor 300 according to still another embodiment of the present invention.
  • the optical sensor 300 further includes a package body 34 for packaging the substrate 31 and all devices on the substrate 31, such as the photosensitive unit 32.
  • the anti-aliasing imaging element 30, the light source 33, and the like are packaged.
  • the substrate 31 and the plurality of photosensitive cells 32 on the substrate 31 form a photosensitive die, and the photosensitive die (Die) is a semiconductor integrated circuit device.
  • the substrate 31 is further formed with a scan line group and a data line group electrically connected to the photosensitive unit 32, and the scan line group is configured to transmit a scan driving signal to the photosensitive unit 32 to activate the photosensitive unit 32 to perform light sensing, data.
  • the line group is used to output an electric signal generated by the photosensitive unit 32 performing light sensing.
  • the substrate 31 is, for example but not limited to, a silicon substrate or the like.
  • FIG. 12 is a schematic diagram of a circuit structure of an optical sensor according to another embodiment of the present invention.
  • the photosensitive cells 32 are distributed in an array, such as a matrix distribution. Of course, it can also be distributed in other rule manners or in an irregular manner.
  • the scan line group includes a plurality of scan lines 303.
  • the data line group includes a plurality of data lines 304.
  • the plurality of scan lines 303 and the plurality of data lines 304 are disposed to cross each other and disposed between adjacent photosensitive units 32.
  • a plurality of scanning lines G1, G2, ..., Gm are arranged at intervals in the Y direction
  • a plurality of data lines S1, S2, ..., Sn are arranged at intervals in the X direction.
  • the plurality of scanning lines 303 and the plurality of data lines 304 are not limited to the vertical arrangement shown in FIG. 12, and may be disposed at an angle, for example, 30°, 60°, or the like.
  • the scan line 303 and the data line 304 at the intersection are separated by an insulating material.
  • the distribution and the number of the scan lines 303 and the data lines 304 are not limited to the above-exemplified embodiments, and the corresponding scan line groups and data line groups may be correspondingly set according to the structure of the photosensitive pixels. .
  • a plurality of scan lines 303 are connected to a driving circuit 35, and a plurality of data lines 304 are connected to a signal processing circuit 36.
  • the driving circuit 35 is configured to provide a corresponding scan driving signal and transmit it to the corresponding photosensitive unit 32 through the corresponding scanning line 303 to activate the photosensitive unit 32 to perform light sensing.
  • the driving circuit 35 is formed on the substrate 31.
  • the flexible circuit board can also be electrically connected to the photosensitive unit 32, that is, the plurality of scanning lines 303 are connected.
  • the signal processing circuit 36 receives an electrical signal generated by the corresponding photosensitive unit 32 performing light sensing through the data line 303, and acquires biometric information of the target object based on the electrical signal.
  • the optical sensor 300 further includes a controller 37 for controlling the drive circuit to output a corresponding scan drive signal, such as, but not limited to, progressively activating the photosensitive unit 32 to perform light sensing.
  • the controller 37 is further configured to control the signal processing circuit 36 to receive the electrical signal output by the photosensitive unit 32, and after receiving the electrical signals output by all the photosensitive units 32 that perform light sensing, generate biometric information of the target object based on the electrical signals. .
  • the signal processing circuit 36 and the controller 37 may be formed on the substrate 31 or electrically connected to the photosensitive die through the flexible circuit board.
  • FIG. 13 is a detailed structural diagram of a photosensitive unit 32 of FIG.
  • the photosensitive unit 32 includes a photosensitive device 320 and a switching device 322.
  • the switching device 322 has a control terminal C and two signal terminals, such as a first signal terminal Sn1 and a second signal terminal Sn2.
  • the control terminal C of the switching device 322 is connected to the scan line 304.
  • the first signal terminal Sn1 of the switching device 322 is connected to the reference signal L via the photosensitive device 320.
  • the second signal terminal Sn2 of the switching device 322 is connected to the data line 304.
  • the photosensitive unit 32 shown in FIG. 13 is for illustrative purposes only and is not limited to other constituent structures of the photosensitive unit 32.
  • the above-mentioned photosensitive device 320 is, for example but not limited to, any one or several of a photodiode, a phototransistor, a photodiode, a photo resistor, and a thin film transistor.
  • a photodiode as an example, a negative voltage is applied across the photodiode.
  • the photodiode receives the optical signal, a photocurrent is generated in a proportional relationship with the optical signal, and the received optical signal is more intense. Larger, the larger the photocurrent generated, the faster the voltage drop on the negative pole of the photodiode.
  • the intensity of the optical signal reflected from different parts of the target object is obtained, and the target is obtained. Biometric information of the object. It can be understood that in order to increase the photosensitive effect of the photosensitive device 320, a plurality of photosensitive devices 320 may be disposed.
  • the switching device 322 is, for example but not limited to, any one or several of a triode, a MOS transistor, and a thin film transistor.
  • the switching device 322 may also include other types of devices, and the number may also be two, three, and the like.
  • the gate of the MOS transistor serves as the control terminal C of the switching device 322, and the source and the drain of the MOS transistor correspond to the first signal terminal Sn1 and the second of the switching device 322.
  • the gate of the MOS transistor is connected to the scanning line 303, the source of the MOS transistor is connected to the cathode of the photodiode D1, and the drain of the MOS transistor is connected to the data line 304.
  • the anode of the photodiode D1 is connected to a reference signal L, which is, for example, a ground signal or a negative voltage signal.
  • a scan driving signal is applied to the gate of the thin film transistor TFT through the scan line 303 to drive the MOS transistor to be turned on.
  • the data line 304 is connected to a positive voltage signal.
  • the MOS transistor is turned on, the positive voltage signal on the data line 304 is applied to the negative electrode of the photodiode D1 via the MOS transistor. Since the positive electrode of the photodiode D1 is grounded, the photodiode D1 is A reverse voltage will be applied across the terminals such that the photodiode D1 is in a reverse bias, ie, in operation.
  • the reverse current of the photodiode D1 rapidly increases, thereby causing a change in current on the photodiode D1, which can be obtained from the data line 304. Since the intensity of the optical signal is larger, the reverse current generated is also larger. Therefore, according to the current signal acquired on the data line 304, the intensity of the optical signal can be obtained, thereby obtaining the biometric information of the target object.
  • the reference signal L may be a positive voltage signal, a negative voltage signal, a ground signal, or the like. As long as the electrical signal provided on the data line 304 and the reference signal L are applied across the photodiode D1 such that a reverse voltage is formed across the photodiode D1 to perform photo sensing, both are within the scope of protection defined by the present invention.
  • connection manner of the MOS tube and the photodiode D1 in the above-mentioned photosensitive unit 32 is not limited to the connection manner shown in FIG. 13, and may be other connection methods.
  • the gate G of the MOS transistor is connected to the scanning line 303
  • the drain D of the MOS transistor is connected to the anode of the photodiode D1
  • the source S of the MOS transistor is connected to the data line 304.
  • the negative terminal of the photodiode D1 is connected to a positive voltage signal.
  • FIG. 15 is a flow chart showing a method of manufacturing an optical sensor according to an embodiment of the present invention.
  • the preparation method comprises the following steps:
  • the substrate 31 is, for example but not limited to, a silicon substrate, a metal plate, a circuit printing plate, or the like, and may of course be a substrate such as a glass substrate.
  • a photosensitive device 320 and a switching device 322 of the photosensitive unit 32 are formed on the substrate 31, respectively.
  • data lines and scan lines, and corresponding circuit structures such as the drive circuit 35, the signal processing circuit 36, and the like, will also be formed on the substrate 31.
  • the anti-aliasing imaging element 30 is produced by the preparation method of each of the above embodiments, and the anti-aliasing imaging element 30 is cut to a desired size and thickness and then attached to the photosensitive unit 32.
  • the size and thickness of the anti-aliasing imaging element meet the requirements, it is directly attached to the photosensitive unit 32 without a cutting process.
  • FIG. 16 is a schematic flow chart of a method for fabricating an optical sensor according to another embodiment of the present invention.
  • the preparation method comprises the following steps:
  • S401 providing a wafer, the wafer comprising a plurality of optical sensing chips arranged at intervals;
  • Fig. 17 is a front view showing the structure of a wafer according to an embodiment of the present invention.
  • the wafer 400 includes a substrate and a plurality of optical sensing circuits formed on the substrate, the substrate including a plurality of spaced apart sensing chip regions 410, each of the sensing chip regions 410 for forming an optical Sensor chip.
  • the sensing chip regions 410 are arranged in an array, and a cutting region 420 is formed between adjacent sensing chip regions 410.
  • the wafer is diced in the dicing zone to obtain a plurality of independent optical sensing chips.
  • an optical transmission fiber strip is produced, that is, a plurality of optical transmission fiber ribbons are gathered together and fixedly formed.
  • the plurality of transport fiber strips are transversely cut to the thickness required for the anti-aliasing imaging plate to form an anti-aliasing imaging plate.
  • the anti-aliasing imaging plate is longitudinally cut to obtain an anti-aliasing imaging element. Since the anti-aliasing imaging element is identical in size and shape to the optical sensing chip, the obtained anti-aliasing imaging element does not need to be aligned and directly attached to the optical sensing chip. Of course, the anti-aliasing imaging element can also be longitudinally cut against the aliasing imaging plate according to the size and shape of the sensing area of the optical sensing chip, thus saving the cost of the anti-aliasing imaging element.
  • the anti-aliasing imaging element is bonded to an optical sensing chip and packaged.
  • the anti-aliasing imaging element is attached to the optical sensing chip such that the anti-aliasing imaging element is located at least above the sensing region of the optical sensing chip.
  • the bonded anti-aliasing imaging element and the optical sensor chip are then packaged to form an optical sensor.
  • FIG. 18 is a schematic front structural view of an electronic device according to an embodiment of the present invention
  • FIG. 19 is a cross-sectional structural view of the electronic device of FIG. 18 taken along line I-I.
  • the electronic device 1 includes, for example, a display screen 500 and an optical sensor 300 located below the display screen 500.
  • the sensing area R2 of the optical sensor 300 is located at a partial position of the display area R1 of the display screen 500, such as the middle-lower position of the display area R1 shown in FIG. 18, facilitating the one-hand touch electronic device 1 to perform a fingerprint recognition operation.
  • the installation position of the optical sensor 300 will also vary according to actual needs.
  • the sensing region R2 of the optical sensor in FIG. 18 will not be displayed in the display screen or displayed in other forms.
  • optical sensor 300 is implemented by referring to the optical sensor of each of the above embodiments.
  • the display screen 500 and the optical sensor 300 are fixed by optical glue bonding.
  • a protective cover 600 is also disposed over the display screen to prevent the display screen 500 from directly contacting the object and damaging the display screen 500.
  • the target object as a finger
  • the protective cover 600 of the electronic device 1 and located in the fingerprint recognition area R2 the light signal emitted by the display screen 500 will be reflected after reaching the finger, and the reflected light signal is worn.
  • the optical sensor 300 is reached after the display screen 500. The optical sensor 300 receives the reflected optical signal and converts the received optical signal into a corresponding electrical signal.
  • the valley portion and the ridge portion of the finger have different degrees of reflection on the optical signal, for example, the valley portion totally reflects the optical signal, and the ridge portion diffuses the optical signal, so that the fingerprint image of the finger is obtained according to the converted electrical signal, This carries out the identification of the user of the electronic device.

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Abstract

Disclosed in the present invention is a preparation method for an anti-aliasing imaging element and an optical sensor. The preparation method for the anti-aliasing imaging element comprises the following steps: S11, providing a plurality of optical transmission fibers, the optical transmission fibers comprising a transmitting body and a non-transmitting layer located at the outer side of the transmitting body; and S12, bunching together and fixing in place the plurality of optical transmission fibers. The optical sensor is manufactured by using the anti-aliasing imaging element prepared according to the preparation method for an anti-aliasing imaging element.

Description

抗混叠成像元件以及光学式传感器的制备方法Anti-aliasing imaging element and method of preparing optical sensor 技术领域Technical field
本发明涉及光电传感领域,尤其涉及一种抗混叠成像元件以及光学式传感器的制备方法。The present invention relates to the field of photoelectric sensing, and in particular to an anti-aliasing imaging element and a method of preparing the optical sensor.
背景技术Background technique
目前,生物信息传感器,尤其是指纹识别装置,已逐渐成为移动终端等电子产品的标配组件。由于光学式指纹识别装置比电容式指纹识别装置具有更强的穿透能力,因此人们更多地考虑将光学式指纹识别装置应用于移动终端。但是,现有的光学式指纹识别装置应用于移动终端时,无法获得清晰、准确的指纹图像,需要改进。At present, biometric information sensors, especially fingerprint identification devices, have gradually become the standard components of electronic products such as mobile terminals. Since the optical fingerprint recognition device has stronger penetration capability than the capacitive fingerprint recognition device, more consideration is given to applying the optical fingerprint recognition device to the mobile terminal. However, when the existing optical fingerprint recognition device is applied to a mobile terminal, a clear and accurate fingerprint image cannot be obtained, and improvement is required.
发明内容Summary of the invention
本发明实施方式旨在至少解决现有技术中存在的技术问题之一。为此,本发明实施方式需要提供一种抗混叠成像元件以及光学式传感器的制备方法。The embodiments of the present invention aim to at least solve one of the technical problems existing in the prior art. To this end, embodiments of the present invention are required to provide an anti-aliasing imaging element and a method of fabricating the optical sensor.
本发明实施方式提供一种抗混叠成像元件的制备方法,包括以下步骤:Embodiments of the present invention provide a method for preparing an anti-aliasing imaging element, including the following steps:
S11,提供多个光传输纤维,所述光传输纤维包括透光体以及位于所述透光体外侧的非透光层;S11, providing a plurality of optical transmission fibers, the optical transmission fiber comprising a light transmissive body and a non-transparent layer located outside the light transmissive body;
S12,将所述多个光传输纤维收拢,并固定。S12, the plurality of optical transmission fibers are gathered and fixed.
本发明实施方式的抗混叠成像元件的制备成本低,而且制备的抗混叠成像元件结构简单,应用于光学式传感器时,提高了光学式传感器的感测精度。The anti-aliasing imaging element of the embodiment of the invention has low preparation cost, and the prepared anti-aliasing imaging element has a simple structure, and when applied to an optical sensor, the sensing precision of the optical sensor is improved.
在某些实施方式中,所述步骤S12包括:将多个光传输纤维收拢,并在真空环境下填充非透光材料的固化胶,然后对其进行固化。In certain embodiments, the step S12 includes: gathering a plurality of light-transmitting fibers, filling the cured glue of the non-translucent material in a vacuum environment, and then curing the fibers.
在某些实施方式中,所述步骤S11进一步包括:In some embodiments, the step S11 further includes:
S111,提供一光棒;S111, providing a light rod;
S112,对所述光棒进行拉丝形成所述光传输纤维的透光体,同时在所述透光体外周喷涂非透光材料,形成所述光传输纤维的非透光层。S112, the light rod is drawn to form a light-transmitting body of the light-transmitting fiber, and a non-light-transmitting material is sprayed on the outer surface of the light-transmitting body to form a non-transmissive layer of the light-transmitting fiber.
在某些实施方式中,所述光棒包括石英、玻璃、聚合物中的一种或多种材料。In certain embodiments, the light bar comprises one or more of quartz, glass, polymer.
在某些实施方式中,所述透光体的横截面为圆形、正方形、长方形、椭圆形。In some embodiments, the light transmissive body has a circular, square, rectangular, or elliptical cross section.
在某些实施方式中,所述透光体轴切面为长方形,且该轴切面的宽度为5~50um。In some embodiments, the light-transmissive body has a rectangular cut surface and the axial cut surface has a width of 5 to 50 um.
在某些实施方式中,所述步骤S12包括:在所述光传输纤维外侧涂覆非透光材料的固化胶,以将所述多个光传输纤维粘合固定。In some embodiments, the step S12 includes coating a cured adhesive of a non-translucent material on the outside of the optical transmission fiber to bond the plurality of optical transmission fibers.
在某些实施方式中,所述步骤S12之后进一步包括:In some embodiments, after the step S12, the method further comprises:
按照需要的大小和长度对收拢固定的光传输纤维进行切割。The fixed optical transmission fibers are cut according to the required size and length.
本发明实施方式提供一种光学式传感器的制备方法,包括以下步骤:Embodiments of the present invention provide a method of fabricating an optical sensor, including the following steps:
S21,提供一基板;S21, providing a substrate;
S22,在所述基板上形成多个感光单元;S22, forming a plurality of photosensitive cells on the substrate;
S23,提供一抗混叠成像元件,并将该抗混叠成像元件贴合于所述感光单元上;所述抗混叠成像元件由上述任意一实施方式的抗混叠成像元件的制备方法制成;S23, providing an anti-aliasing imaging element, and attaching the anti-aliasing imaging element to the photosensitive unit; the anti-aliasing imaging element is prepared by the method for preparing an anti-aliasing imaging element of any of the above embodiments to make;
S24,对所述基板以及基板上的感光单元、抗混叠成像元件进行封装。S24, encapsulating the substrate and the photosensitive unit and the anti-aliasing imaging element on the substrate.
由于采用上述制备方法制备抗混叠成像元件,因此使得光学式传感器的制备成本低,而且利用抗混叠成像元件,提高了光学式传感器的感测精度。Since the anti-aliasing imaging element is prepared by the above preparation method, the preparation cost of the optical sensor is low, and the anti-aliasing imaging element is utilized to improve the sensing accuracy of the optical sensor.
在某些实施方式中,抗混叠成像元件中透光体轴切面的长度与直径的比值大于或等于5,且小于或等于50。In certain embodiments, the ratio of length to diameter of the optical axis section of the anti-aliasing imaging element is greater than or equal to 5 and less than or equal to 50.
在某些实施方式中,所述光学式传感器用于采集传感器上方的物体的生物特征信息。In some embodiments, the optical sensor is used to acquire biometric information of an object above the sensor.
在某些实施方式中,所述生物特征信息包括指纹、掌纹、静脉、血压、心率、血氧浓度的一种或几种。In some embodiments, the biometric information includes one or more of a fingerprint, a palm print, a vein, a blood pressure, a heart rate, and a blood oxygen concentration.
本发明实施方式提供另一种光学式传感器的制备方法,包括以下步骤:Embodiments of the present invention provide a method of fabricating another optical sensor, including the following steps:
S31,提供一晶圆,所述晶圆包括间隔排列的多个光学传感芯片;S31, providing a wafer, the wafer comprising a plurality of optical sensor chips arranged at intervals;
S32,对晶圆进行切割,获得多个光学传感芯片;S32, cutting the wafer to obtain a plurality of optical sensor chips;
S33,提供一抗混叠成像板,所述抗混叠成像板包括多个光传输纤维;S33, providing an anti-aliasing imaging plate, the anti-aliasing imaging plate comprising a plurality of optical transmission fibers;
S34,按照光学传感芯片的尺寸及形状,对所述抗混叠成像板进行切割,以获得与所述光学传感芯片对应的抗混叠成像元件;S34, cutting the anti-aliasing imaging plate according to the size and shape of the optical sensor chip to obtain an anti-aliasing imaging element corresponding to the optical sensor chip;
S35,将所述抗混叠成像元件与所述光学传感芯片贴合,并封装。S35. The anti-aliasing imaging element is attached to the optical sensor chip and packaged.
本发明实施方式的光学式传感器进行制备时,光学式传感芯片与抗混叠成像元件不但能独立制成,且一次能批量形成多个,从而提高了光学式传感器的制备效率。When the optical sensor of the embodiment of the present invention is prepared, the optical sensor chip and the anti-aliasing imaging element can be independently fabricated, and can be formed in plurality at a time, thereby improving the preparation efficiency of the optical sensor.
在某些实施方式中,所述步骤S33中,抗混叠成像板利用上述任意一实施方式的抗混叠成像元件的制备方法制成。In some embodiments, in step S33, the anti-aliasing imaging plate is fabricated using the method of preparing the anti-aliasing imaging element of any of the above embodiments.
在某些实施方式中,所述步骤S34中获得的抗混叠成像元件的透光体轴切面的长度与 直径的比值大于或等于5,且小于或等于50。In some embodiments, the ratio of the length to the diameter of the optical axis of the anti-aliasing imaging element obtained in the step S34 is greater than or equal to 5 and less than or equal to 50.
本发明实施方式的附加方面和优点将在下面的描述中部分给出,部分将从下面的描述中变得明显,或通过本发明实施方式的实践了解到。Additional aspects and advantages of the embodiments of the invention will be set forth in part in
附图说明DRAWINGS
本发明实施方式的上述和/或附加的方面和优点从结合下面附图对实施方式的描述中将变得明显和容易理解,其中:The above and/or additional aspects and advantages of the embodiments of the present invention will become apparent and readily understood from
图1是现有的一种光学式指纹传感器的结构示意图;1 is a schematic structural view of a conventional optical fingerprint sensor;
图2是光学式指纹传感器的一个感光单元对应设置光纤的轴切面的结构示意图;2 is a schematic structural view of a photosensitive unit of an optical fingerprint sensor corresponding to an axial section of an optical fiber;
图3是本发明一实施方式的抗混叠成像元件的截面结构示意图;3 is a schematic cross-sectional structural view of an anti-aliasing imaging element according to an embodiment of the present invention;
图4是本发明一实施方式的光学式传感器中一个光传输纤维和一个感光单元的轴切面结构示意图;4 is a schematic structural view showing an axial section of an optical transmission fiber and a photosensitive unit in an optical sensor according to an embodiment of the present invention;
图5a是图3的抗混叠成像元件中一个光传输纤维的一种光信号示意图;Figure 5a is a schematic diagram of an optical signal of an optical transmission fiber in the anti-aliasing imaging element of Figure 3;
图5b是图3的抗混叠成像元件中一个光传输纤维的另一种光信号示意图;Figure 5b is a schematic diagram of another optical signal of one optical transmission fiber in the anti-aliasing imaging element of Figure 3;
图6是本发明一实施方式中光传输纤维的制备流程示意图;6 is a schematic view showing a preparation process of an optical transmission fiber according to an embodiment of the present invention;
图7是本发明一实施方式的抗混叠成像元件的制备方法的流程示意图;7 is a schematic flow chart of a method for preparing an anti-aliasing imaging element according to an embodiment of the present invention;
图8a是本发明一实施方式的抗混叠成像元件中光传输纤维的一种排列结构示意图;8a is a schematic view showing an arrangement structure of optical transmission fibers in an anti-aliasing imaging element according to an embodiment of the present invention;
图8b是本发明一实施方式的抗混叠成像元件中光传输纤维的另一种排列结构示意图;8b is a schematic view showing another arrangement structure of optical transmission fibers in an anti-aliasing imaging element according to an embodiment of the present invention;
图9是本发明另一实施方式的抗混叠成像元件的制备方法的流程示意图;9 is a schematic flow chart of a method for preparing an anti-aliasing imaging element according to another embodiment of the present invention;
图10是本发明一实施方式的光学式传感器的剖面结构示意图;Figure 10 is a cross-sectional structural view showing an optical sensor according to an embodiment of the present invention;
图11是本发明又一实施方式的光学式传感器的结构;Figure 11 is a view showing the configuration of an optical sensor according to still another embodiment of the present invention;
图12是本发明另一实施方式的光学式传感器的电路结构示意图;FIG. 12 is a schematic circuit diagram of an optical sensor according to another embodiment of the present invention; FIG.
图13是图12中一个感光单元的一种具体结构示意图;Figure 13 is a schematic view showing a specific structure of a photosensitive unit of Figure 12;
图14是图12中一个感光单元的另一种具体结构示意图;Figure 14 is a schematic view showing another specific structure of a photosensitive unit of Figure 12;
图15是本发明一实施方式的光学式传感器的制备方法的流程示意图;15 is a schematic flow chart of a method of fabricating an optical sensor according to an embodiment of the present invention;
图16是本发明另一实施方式的光学式传感器的制备方法的流程示意图;16 is a schematic flow chart of a method of fabricating an optical sensor according to another embodiment of the present invention;
图17是本发明一实施方式的晶圆的正面结构示意图;17 is a schematic front view of a wafer according to an embodiment of the present invention;
图18是本发明一实施方式的电子设备的正面结构示意图;18 is a schematic front structural view of an electronic device according to an embodiment of the present invention;
图19是图18中电子设备沿I-I线的剖面结构示意图。19 is a cross-sectional structural view of the electronic device of FIG. 18 taken along line I-I.
具体实施方式Detailed ways
下面详细描述本发明的实施方式,所述实施方式的示例在附图中示出,其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施方式是示例性的,仅用于解释本发明,而不能理解为对本发明的限制。The embodiments of the present invention are described in detail below, and the examples of the embodiments are illustrated in the drawings, wherein the same or similar reference numerals indicate the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the drawings are intended to be illustrative of the invention and are not to be construed as limiting.
在本发明的描述中,需要理解的是,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个所述特征。在本发明的描述中,“多个”的含义是两个或两个以上,除非另有明确具体的限定。“接触”或“触摸”包括直接接触或间接接触。例如,下文中揭示的光学式传感器,其被设置在电子设备的内部,例如显示屏的下方,则用户手指通过保护盖板以及显示屏间接接触该光学式传感器。In the description of the present invention, it is to be understood that the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, features defining "first" or "second" may include one or more of the described features either explicitly or implicitly. In the description of the present invention, the meaning of "a plurality" is two or more unless specifically and specifically defined otherwise. "Contact" or "touch" includes direct or indirect contact. For example, the optical sensor disclosed hereinafter is disposed inside the electronic device, such as below the display screen, and the user's finger indirectly contacts the optical sensor through the protective cover and the display screen.
在本发明的描述中,需要说明的是,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接或可以相互通信;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通或两个元件的相互作用关系。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本发明中的具体含义。In the description of the present invention, it should be noted that the terms "installation", "connected", and "connected" are to be understood broadly, and may be fixed or detachable, for example, unless otherwise explicitly defined and defined. Connected, or integrally connected; may be mechanically connected, or may be electrically connected or may communicate with each other; may be directly connected or indirectly connected through an intermediate medium, may be internal communication of two elements or interaction of two elements relationship. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood on a case-by-case basis.
下文的公开提供了许多不同的实施方式或例子用来实现本发明的不同结构。为了简化本发明的公开,下文中对特定例子的部件和设定进行描述。当然,它们仅仅为示例,并且目的不在于限制本发明。此外,本发明可以在不同例子中重复参考数字和/或参考字母,这种重复是为了简化和清楚的目的,其本身不指示所讨论各种实施方式和/或设定之间的关系。此外,本发明提供了的各种特定的工艺和材料的例子,但是本领域普通技术人员可以意识到其他工艺的应用和/或其他材料的使用。The following disclosure provides many different embodiments or examples for implementing different structures of the present invention. In order to simplify the disclosure of the present invention, the components and settings of specific examples are described below. Of course, they are merely examples and are not intended to limit the invention. In addition, the present invention may be repeated with reference to the numerals and/or reference numerals in the various examples, which are for the purpose of simplification and clarity, and do not indicate the relationship between the various embodiments and/or settings discussed. Moreover, the present invention provides examples of various specific processes and materials, but one of ordinary skill in the art will recognize the use of other processes and/or the use of other materials.
进一步地,所描述的特征、结构可以以任何合适的方式结合在一个或更多实施方式中。在下面的描述中,提供许多具体细节从而给出对本发明的实施方式的充分理解。然而,本领域技术人员应意识到,没有所述特定细节中的一个或更多,或者采用其它的结构、组元等,也可以实践本发明的技术方案。在其它情况下,不详细示出或描述公知结构或者操作以避免模糊本发明。Further, the described features, structures may be combined in one or more embodiments in any suitable manner. In the following description, numerous specific details are set forth However, those skilled in the art will appreciate that the technical solution of the present invention can be practiced without one or more of the specific details or other structures, components, and the like. In other instances, well-known structures or operations are not shown or described in detail to avoid obscuring the invention.
参照图1,图1是现有的一种光学式指纹传感器的结构示意图。现有的一种光学式指纹传感器用于电子设备的身份识别,该光学式指纹传感器200位于电子设备的显示屏100下方,且至少部分位于显示屏100的显示区域内。光学式指纹传感器200包括多个排列设置的感光单元210。当物体的某个部位(例如,人体手指)放置在显示屏100上 时,显示屏100发出的光信号到达手指后,部分光信号被手指吸收,部分光信号则发生反射;反射回来的光信号穿过显示屏100后到达光学式指纹传感器200,光学式指纹传感器200的感光单元210接收该反射光信号,并将接收到的光信号转换为相应的电信号,从而根据该转换后的电信号,获得物体的生物特征信息。这里的生物特征信息例如包括:指纹、掌纹、静脉、血压、心率、血氧浓度的一种或几种。物体例如但不限于人体,也可以为其它合适类型的生物体。Referring to FIG. 1, FIG. 1 is a schematic structural view of a conventional optical fingerprint sensor. An existing optical fingerprint sensor is used for identification of an electronic device. The optical fingerprint sensor 200 is located below the display screen 100 of the electronic device and is at least partially located within the display area of the display screen 100. The optical fingerprint sensor 200 includes a plurality of photosensitive units 210 arranged in an array. When a certain part of the object (for example, a human finger) is placed on the display screen 100, after the light signal emitted by the display screen 100 reaches the finger, part of the light signal is absorbed by the finger, and part of the light signal is reflected; the reflected light signal is reflected. After passing through the display screen 100 to reach the optical fingerprint sensor 200, the photosensitive unit 210 of the optical fingerprint sensor 200 receives the reflected light signal, and converts the received optical signal into a corresponding electrical signal, thereby based on the converted electrical signal. , obtain biometric information of the object. The biometric information herein includes, for example, one or more of a fingerprint, a palm print, a vein, a blood pressure, a heart rate, and a blood oxygen concentration. Objects such as, but not limited to, human bodies, may also be other suitable types of organisms.
由于物体的生物特征信息是人体固有的生理特征,因此物体的生物特征信息将作为物体身份识别的重要依据,用来判断电子设备的使用者身份是否合法,进而控制电子设备进行相应的操作,例如解锁操作、查看资料、移动支付等等。Since the biometric information of the object is an inherent physiological feature of the human body, the biometric information of the object will be used as an important basis for the identification of the object, and it is used to determine whether the identity of the user of the electronic device is legal, and thus the electronic device is controlled to perform corresponding operations, for example, Unlock operations, view data, mobile payments, and more.
本发明实施方式中提及的电子设备例如但不局限为消费性电子产品、家居式电子产品、车载式电子产品、金融终端产品等合适类型的电子产品。其中,消费性电子产品例如为手机、平板电脑、笔记本电脑、桌面显示器、电脑一体机等。家居式电子产品例如为智能门锁、电视、冰箱、穿戴式设备等。车载式电子产品例如为车载导航仪、车载DVD等。金融终端产品如为ATM机、自助办理业务的终端等。The electronic device mentioned in the embodiments of the present invention is, for example, but not limited to, a suitable type of electronic product such as a consumer electronic product, a home electronic product, a vehicle-mounted electronic product, a financial terminal product, or the like. Among them, consumer electronic products are, for example, mobile phones, tablet computers, notebook computers, desktop displays, computer integrated machines, and the like. Home-based electronic products such as smart door locks, televisions, refrigerators, wearable devices, and the like. Vehicle-mounted electronic products are, for example, car navigation systems, car DVDs, and the like. Financial terminal products such as ATM machines, terminals for self-service business, etc.
需要说明的是,若光学式指纹传感器还包括光源,则该光学式指纹传感器工作时,电子设备的显示屏可以不工作。如此,使得该光学式指纹传感器应用的电子设备不局限于显示屏结构,即还包括不带显示屏的电子产品。It should be noted that, if the optical fingerprint sensor further includes a light source, the display screen of the electronic device may not work when the optical fingerprint sensor is in operation. As such, the electronic device to which the optical fingerprint sensor is applied is not limited to the display screen structure, that is, an electronic product without a display screen is also included.
进一步地,由于光信号经过显示屏100上方的物体反射后,反射光信号多且乱,再加上感光单元210之间的间距非常小,因此感光单元210上方的物体反射的光信号可能会被邻近的感光单元210接收,从而造成光学式指纹传感器200获得的生物特征信息不准确、不清晰。对此,有人提出采用光纤结构来解决该问题。如图2所示,图2是光学式指纹传感器的一个感光单元对应设置光纤的轴切面的结构示意图。在感光单元210上设置光纤220,该光纤220由内到外依次包括光密介质层221和光疏介质层222、塑料涂层223,光密介质层221为折射率较大的介质层,光疏介质层222为折射率较小的介质层,由此光密介质层221和光疏介质层222之间形成临界面L。由于临界面L两侧的折射率差,使得光信号从光纤220的入射面S1进入时,只有一定范围内的光信号能在临界面L发生全反射,直至从光纤的出射面S2射出。假设光纤发生全反射时的临界角为θ,则进入光纤入射面S1的入射角最大值β max的计算公式如下: Further, since the light signal is reflected by the object above the display screen 100, the reflected light signal is many and disordered, and the distance between the photosensitive cells 210 is very small, so the light signal reflected by the object above the photosensitive unit 210 may be The adjacent photosensitive unit 210 receives, thereby causing the biometric information obtained by the optical fingerprint sensor 200 to be inaccurate and unclear. In response, it has been proposed to use fiber optic structures to solve this problem. As shown in FIG. 2, FIG. 2 is a schematic structural view of a photosensitive unit of an optical fingerprint sensor corresponding to an axial section of the optical fiber. An optical fiber 220 is disposed on the photosensitive unit 210. The optical fiber 220 includes a light-tight dielectric layer 221 and a light-diffusing dielectric layer 222 and a plastic coating layer 223 from the inside to the outside. The optically dense dielectric layer 221 is a dielectric layer having a large refractive index. The dielectric layer 222 is a dielectric layer having a small refractive index, whereby a critical plane L is formed between the optically dense dielectric layer 221 and the optically dispersed dielectric layer 222. Due to the difference in refractive index on both sides of the critical surface L, when the optical signal enters from the incident surface S1 of the optical fiber 220, only a certain range of optical signals can be totally reflected at the critical plane L until it is emitted from the exit surface S2 of the optical fiber. Assuming that the critical angle when the fiber is totally reflected is θ, the calculation formula of the maximum angle of incidence β max entering the incident surface S1 of the fiber is as follows:
Figure PCTCN2017119148-appb-000001
Figure PCTCN2017119148-appb-000001
其中,n 0是空气中的折射率,n 1是光密介质层221的折射率,n 2是光疏介质层222 的折射率。由于空气中的折射率为1,实质上该入射角最大值β max仅与光密介质层221和光疏介质层222的折射率有关。由上式可知,入射角小于或等于该入射角最大值β max的光信号能在临界面L发生全反射,并从光纤的出射面S2射出。 Where n 0 is the refractive index in the air, n 1 is the refractive index of the optically dense medium layer 221, and n 2 is the refractive index of the light-diffusing dielectric layer 222. Since the refractive index in the air is 1, substantially the incident angle maximum value β max is only related to the refractive indices of the optically dense medium layer 221 and the light-diffusing dielectric layer 222. As can be seen from the above equation, an optical signal having an incident angle less than or equal to the maximum value of the incident angle β max can be totally reflected at the critical plane L and emitted from the exit surface S2 of the optical fiber.
发明人研究后发现,虽然上述光纤结构能避免大于该入射角最大值β max的光信号到达感光单元210,但该光学式指纹传感器采集到的生物特征信息仍然不够清晰,分析后发现主要原因有两个:其一,光纤结构的入射角最大值β max过大,仍然有部分邻近的干扰信号,通过改变光纤介质层的折射率来减小光纤结构的入射角最大值β max,虽然能使光学式指纹传感器采集到清晰的生物特征信息,但是该光纤结构的制备工艺成本也相应增加;其二,大于入射角最大值β max的光信号进入光纤,经过光密介质层221和光疏介质层222的折射后,将在光疏介质层222与塑料涂层223的临界面上发生反射,反射后的光信号将重新进入光密介质层221,并从光纤的出射面S2射出。 The inventors have found that although the above-mentioned optical fiber structure can avoid the optical signal larger than the incident angle maximum value β max reaching the photosensitive unit 210, the biometric information collected by the optical fingerprint sensor is still not clear enough, and the main reason is found after analysis. Two: First, the maximum incident angle β max of the fiber structure is too large, and there are still some adjacent interference signals. By changing the refractive index of the fiber dielectric layer, the incident angle maximum value β max of the fiber structure is reduced, although The optical fingerprint sensor collects clear biometric information, but the manufacturing process cost of the optical fiber structure also increases accordingly. Second, an optical signal larger than the incident angle maximum β max enters the optical fiber, passes through the optically dense dielectric layer 221 and the optically dispersed dielectric layer. After the refraction of 222, it will be reflected on the critical surface of the light-diffusing dielectric layer 222 and the plastic coating 223, and the reflected optical signal will re-enter the optical-dense dielectric layer 221 and be emitted from the exit surface S2 of the optical fiber.
因此,发明人提出一种新的结构,即抗混叠成像元件,既能解决制备工艺成本的问题,又能使得光学式传感器采集到更清晰、更准确的生物特征信息。Therefore, the inventors propose a new structure, that is, an anti-aliasing imaging element, which can solve the problem of the manufacturing process cost and enable the optical sensor to collect clearer and more accurate biometric information.
参照图3及图4,图3是本发明一实施方式的抗混叠成像元件的截面结构示意图,图4是本发明一实施方式的光学式传感器中一个光传输纤维和一个感光单元的轴切面结构示意图。该抗混叠成像元件30包括多个光传输纤维310,且每一光传输纤维310包括透光体311以及位于透光体311外侧的非透光层312。透光体311例如为光纤结构中的纤芯。非透光层312为由吸光材料形成,并包覆透光体311外侧的包层,且该非透光层312与透光体311之间紧密贴合。为了保证非透光层312与透光体311的紧密贴合,形成透光体311后在透光体311外周涂覆非透光材料(也就是吸光材料),然后进行固化处理。当然,可变更地,非透光层312与透光体311还可以在分别独立制成后,再通过压紧、贴合在一起。3 and FIG. 4, FIG. 3 is a schematic cross-sectional view of an anti-aliasing imaging element according to an embodiment of the present invention, and FIG. 4 is an axial section of an optical transmission fiber and a photosensitive unit in an optical sensor according to an embodiment of the present invention. Schematic. The anti-aliasing imaging element 30 includes a plurality of optical transmission fibers 310, and each of the optical transmission fibers 310 includes a light transmissive body 311 and a non-transmissive layer 312 located outside the light transmissive body 311. The light transmitting body 311 is, for example, a core in an optical fiber structure. The non-transmissive layer 312 is formed of a light absorbing material and covers a cladding layer on the outer side of the light-transmitting body 311, and the non-light-transmitting layer 312 and the light-transmitting body 311 are in close contact with each other. In order to ensure a close adhesion between the non-transmissive layer 312 and the light-transmitting body 311, the light-transmitting body 311 is formed, and a non-light-transmitting material (that is, a light-absorbing material) is applied to the outer periphery of the light-transmitting body 311, and then subjected to a curing treatment. Of course, the non-transmissive layer 312 and the light-transmitting body 311 may be separately pressed and bonded together after being separately formed.
在某些实施方式中,该吸光材料包括金属氧化物、炭黑涂料、黑色油墨等。其中,金属氧化物中的金属例如但不限于铬(Cr)、镍(Ni)、铁(Fe)、钽(Ta)、钨(W)、钛(Ti)、钼(Mo)的一种或几种。In certain embodiments, the light absorbing material comprises a metal oxide, a carbon black coating, a black ink, and the like. Wherein the metal in the metal oxide is, for example but not limited to, one of chromium (Cr), nickel (Ni), iron (Fe), tantalum (Ta), tungsten (W), titanium (Ti), molybdenum (Mo) or Several.
上述抗混叠成像元件30中,光传输纤维310的两端分别为入射端面301和出射端面302,光信号从入射端面301射入,从出射端面302射出,并到达感光单元32。当光信号从入射端面301射入透光体311时,由于介质差异,该光信号将发生折射,折射的光信号中大部分光信号将到达透光体311与非透光层312的临界面L'上,从而被非透光层312吸收;其余光信号将与透光体311的轴线方向大致平行,从而从出射端面302射出,并到达感光单元32。In the anti-aliasing imaging element 30, both ends of the optical transmission fiber 310 are an incident end surface 301 and an emission end surface 302, respectively, and an optical signal is incident from the incident end surface 301, is emitted from the emission end surface 302, and reaches the photosensitive unit 32. When the optical signal is incident on the transparent body 311 from the incident end surface 301, the optical signal will be refracted due to the difference of the medium, and most of the optical signals of the refracted optical signal will reach the critical surface of the transparent body 311 and the non-transmissive layer 312. L' is absorbed by the non-transmissive layer 312; the remaining optical signal will be substantially parallel to the axial direction of the light-transmitting body 311, and will be emitted from the exit end face 302 and reach the photosensitive unit 32.
具体地,参照图5a,图5a是图3的抗混叠成像元件中一个光传输纤维的一种光信号示意图。当一入射光信号P1进入入射端面301时发生折射,且折射光信号P1'到达透光体311与非透光层312的临界面L'上,并被非透光层312吸收。Specifically, referring to FIG. 5a, FIG. 5a is a schematic diagram of an optical signal of an optical transmission fiber in the anti-aliasing imaging element of FIG. When an incident light signal P1 enters the incident end surface 301, refraction occurs, and the refracted light signal P1' reaches the critical surface L' of the light transmitting body 311 and the non-light transmitting layer 312, and is absorbed by the non-light transmitting layer 312.
参照图5b,图5b是图3的抗混叠成像元件中一个光传输纤维的另一种光信号示意图。当一入射光信号P2进入入射端面301时发生折射,且折射光信号P2'的方向与透光体311的轴线方向P3大致平行,并从出射端面302射出,被感光单元32接收。Referring to Figure 5b, Figure 5b is a schematic illustration of another optical signal of one of the optical transmission fibers of the anti-aliasing imaging element of Figure 3. When an incident light signal P2 enters the incident end surface 301, refraction occurs, and the direction of the refracted light signal P2' is substantially parallel to the axial direction P3 of the light transmitting body 311, and is emitted from the exit end surface 302, and is received by the photosensitive unit 32.
进一步地,继续参照图4,假设光传输纤维310的轴切面中透光体311的宽度为D,高度为H;光传输纤维310中透光体311的介质折射率为n 3,光传输纤维310以外的介质折射率为n 4。根据折射原理可知,入射角最大值γ max的计算公式如下: Further, with continued reference to FIG. 4, it is assumed that the width of the light transmitting body 311 in the axial section of the optical transmission fiber 310 is D and the height is H; the medium refractive index of the light transmitting body 311 in the optical transmission fiber 310 is n 3 , and the optical transmission fiber The medium other than 310 has a refractive index of n 4 . According to the principle of refraction, the calculation formula of the incident angle maximum γ max is as follows:
Figure PCTCN2017119148-appb-000002
Figure PCTCN2017119148-appb-000002
也就是说,入射角小于或等于该入射角最大值γ max的光信号,才能通过光传输纤维310的透光体311,并到达感光单元32。如此为了提高抗混叠成像元件30的抗混叠效果,则要减小该入射角最大值γ max。由上述公式(2)可知,该入射角最大值γ max与介质折射率以及透光体311轴切面的高度H和宽度D有关,因此要减小该入射角最大值γ max,可以有多种实现办法,例如增大抗混叠成像元件30的整体高度H(当然,也可以称为厚度)、减小光传输纤维310中透光体311轴切面的宽度D,以及减小光传输纤维310中透光体311的折射率n3,增大光传输纤维310以外介质的折射率n4。而且,该抗混叠成像元件30的结构简单,制备工艺成本也较低。另外,由于透光体311外侧为吸光材料层,因此进入抗混叠成像元件30的光信号不会从侧面漏出,而且也不会造成进入抗混叠成像元件30的光信号中入射角大于入射角最大值γ max的光信号从出射端面302射出,并到达感光单元32。因此,本发明实施方式的抗混叠成像元件30相对于现有技术,不但结构简单,制备工艺成本降低,而且还使得光学式传感器300采集到的生物特征信息更加清晰、准确。 That is, the optical signal having an incident angle smaller than or equal to the incident angle maximum γ max can pass through the light transmitting body 311 of the optical transmission fiber 310 and reach the photosensitive unit 32. In order to improve the anti-aliasing effect of the anti-aliasing imaging element 30, the incident angle maximum γ max is reduced. It can be seen from the above formula (2) that the incident angle maximum value γ max is related to the refractive index of the medium and the height H and the width D of the axial section of the light transmitting body 311. Therefore, it is possible to reduce the incident angle maximum value γ max . This is accomplished, for example, by increasing the overall height H of the anti-aliasing imaging element 30 (which may also be referred to as thickness), reducing the width D of the axial section of the light transmissive body 311 in the optical transmission fiber 310, and reducing the optical transmission fiber 310. The refractive index n3 of the medium-transmissive body 311 increases the refractive index n4 of the medium other than the optical transmission fiber 310. Moreover, the anti-aliasing imaging element 30 has a simple structure and a low manufacturing process cost. In addition, since the outer side of the light transmitting body 311 is a light absorbing material layer, the light signal entering the anti-aliasing imaging element 30 does not leak from the side, and the incident angle of the light signal entering the anti-aliasing imaging element 30 is not larger than the incident. The optical signal of the angular maximum γ max is emitted from the exit end face 302 and reaches the photosensitive unit 32. Therefore, the anti-aliasing imaging element 30 of the embodiment of the present invention has a simple structure and a low manufacturing process cost, and also makes the biometric information collected by the optical sensor 300 clearer and more accurate than the prior art.
在某些实施方式中,透光体311的横截面例如为圆形、正方形、长方形、椭圆形等等。而且该透光体311轴切面为长方形,且该轴切面的宽度D的取值范围为5~50μm,可以根据实际使用情况以及制备工艺,设置该宽度例如为10μm、15μm、20μm、30μm、35μm、40μm、45μm等等。In some embodiments, the cross section of the light transmissive body 311 is, for example, a circle, a square, a rectangle, an ellipse, or the like. Moreover, the axial section of the transparent body 311 is rectangular, and the width D of the axial section ranges from 5 to 50 μm, and the width can be set to, for example, 10 μm, 15 μm, 20 μm, 30 μm, and 35 μm according to actual use and preparation processes. , 40 μm, 45 μm, etc.
在某些实施方式中,透光体311例如包括石英、玻璃、塑料、红外等材料中的一种或多种材料。In some embodiments, the light transmissive body 311 includes, for example, one or more materials of materials such as quartz, glass, plastic, infrared, and the like.
进一步地,参照图6,图6是本发明一实施方式中光传输纤维的制备流程示意图。该光传输纤维的制备过程具体包括如下步骤:Further, referring to FIG. 6, FIG. 6 is a schematic diagram of a preparation process of an optical transmission fiber according to an embodiment of the present invention. The preparation process of the optical transmission fiber specifically includes the following steps:
S101,提供一光棒;S101, providing a light bar;
光棒例如包括石英、玻璃、塑料、红外等材料中的一种或多种材料的棒体。The light bar includes, for example, a rod of one or more materials of materials such as quartz, glass, plastic, infrared, and the like.
S102,对光棒进行拉丝,形成光传输纤维的透光体311;S102, the light rod is drawn to form a light transmitting body 311 of the optical transmission fiber;
利用拉丝机,将光棒固定于拉丝机顶端,并逐渐加热至一定温度,例如2000℃。光棒位于加热侧的一端受热后逐渐融化并在端部积累成液体,待其自然垂下时,就形成光传输纤维的透光体311。Using a wire drawing machine, the light bar is fixed to the top of the wire drawing machine and gradually heated to a certain temperature, for example, 2000 ° C. The one end of the light bar on the heating side is gradually melted after being heated and accumulates as a liquid at the end, and when it is naturally suspended, the light transmitting body 311 of the light transmitting fiber is formed.
S103,在透光体311的外周喷涂非透光材料,形成光传输纤维的非透光层;S103, spraying a non-transparent material on the outer periphery of the transparent body 311 to form a non-transparent layer of the optical transmission fiber;
在形成的透光体311的外周均匀喷涂非透光材料,从而形成光传输纤维310的非透光层312。当然,可替换地,也可以将形成的透光体311放入非透光材料的溶胶内再取出。A non-transmissive material is uniformly sprayed on the outer periphery of the formed light-transmitting body 311 to form a non-transmissive layer 312 of the light-transmitting fiber 310. Of course, alternatively, the formed light-transmitting body 311 may be placed in a sol of a non-light-transmitting material and then taken out.
S104,对光传输纤维的非透光层进行固化。S104, curing the non-transmissive layer of the optical transmission fiber.
利用紫外线照射光传输纤维310,以使该光传输纤维310的非透光层312固化。当然,可变更地,也可以将该光传输纤维310自然冷却。The light transmitting fiber 310 is irradiated with ultraviolet rays to cure the non-light transmitting layer 312 of the light transmitting fiber 310. Of course, the light transmitting fiber 310 can also be naturally cooled.
需要说明的是,上述光传输纤维310的制备过程都在无尘环境下进行,以保证光传输纤维310的光学质量。另外,上述步骤S103与步骤S102可以同时进行,即在形成透光体311的同时进行非透光材料的喷涂。It should be noted that the preparation process of the optical transmission fiber 310 described above is performed in a dust-free environment to ensure the optical quality of the optical transmission fiber 310. In addition, the above steps S103 and S102 may be performed simultaneously, that is, spraying of the non-transparent material is performed while forming the light-transmitting body 311.
进一步地,参照图7,图7是本发明一实施方式的抗混叠成像元件的制备方法的流程示意图。该抗混叠成像元件的制备方法包括以下步骤:Further, referring to FIG. 7, FIG. 7 is a schematic flow chart of a method for preparing an anti-aliasing imaging element according to an embodiment of the present invention. The method for preparing the anti-aliasing imaging element comprises the following steps:
S201,提供多个光传输纤维,该光传输纤维包括透光体以及位于透光体外侧的非透光层;S201, providing a plurality of optical transmission fibers, the optical transmission fiber comprising a light transmissive body and a non-transparent layer located outside the light transmissive body;
S202,将多个光传输纤维收拢,并固定。S202, the plurality of optical transmission fibers are gathered and fixed.
具体地,例如按图6所示的制备方法制成多个光传输纤维,当然也不限于其他的制备方法制成。制成的光传输纤维包括上述各实施方式中描述的结构,例如包括透光体311以及位于透光体311外侧的非透光层312。然后再将该多个光传输纤维聚集在一起,并固定。例如一实施例中,在多个光传输纤维外周涂覆非透光材料的固化胶,以将多个光传输纤维粘合固定;或者另一实施例中,通过真空环境下在光传输纤维之间的间隙内填充非透光材料的固化胶,并对其进行固化。Specifically, for example, a plurality of optical transmission fibers are produced according to the production method shown in Fig. 6, and of course, it is not limited to other preparation methods. The resulting optical transmission fiber includes the structures described in the above embodiments, and includes, for example, a light transmitting body 311 and a non-light transmitting layer 312 located outside the light transmitting body 311. The plurality of light transmitting fibers are then gathered together and fixed. For example, in one embodiment, the curing glue of the non-translucent material is coated on the periphery of the plurality of optical transmission fibers to bond the plurality of optical transmission fibers; or in another embodiment, the optical transmission fibers are in a vacuum environment. The gap between the gaps is filled with a curing adhesive of a non-translucent material and cured.
进一步地,制备光传输纤维310后,将多个光传输纤维310按照预定的排列方式聚 集在一起,形成抗混叠成像元件30。在某些实施方式中,聚集在一起的多个光传输纤维31的轴线相互平行,且光传输纤维310之间通过非透光材料的固化胶粘合。具体地,在该光传输纤维310外周涂覆一层固化胶,再将多个光传输纤维310聚集在一起,光传输纤维310由于外周的固化胶而粘合固定,从而形成抗混叠成像元件30。如图8a所示,该光传输纤维按照矩形排列的方式进行排列。如图8b所示,该光传输纤维按照类似蜂窝状结构进行排列。图8b所示的排列结构相对图8a所示的排列结构,光传输纤维之间的间隙较小。Further, after the optical transmission fiber 310 is prepared, the plurality of optical transmission fibers 310 are gathered together in a predetermined arrangement to form the anti-aliasing imaging element 30. In some embodiments, the axes of the plurality of optical transmission fibers 31 gathered together are parallel to each other, and the optical transmission fibers 310 are bonded by a cured adhesive of a non-translucent material. Specifically, a layer of curing glue is applied to the outer periphery of the optical transmission fiber 310, and then a plurality of optical transmission fibers 310 are gathered together, and the optical transmission fiber 310 is bonded and fixed by the peripheral curing glue to form an anti-aliasing imaging element. 30. As shown in Fig. 8a, the optical transmission fibers are arranged in a rectangular arrangement. As shown in Figure 8b, the optical transmission fibers are arranged in a honeycomb-like structure. The arrangement shown in Fig. 8b is smaller than the arrangement shown in Fig. 8a, and the gap between the optical transmission fibers is small.
在某些实施方式中,当多个光传输纤维310聚集在一起时,光传输纤维310之间具有间隙,该间隙填充有非透光材料的固化胶。具体地,先将光传输纤维310聚集在一起,再从光传输纤维310一端或两端同时进行灌胶,以使固化胶将光传输纤维310之间的间隙填满。进一步地,该灌胶过程将在真空环境下进行,以避免填充过程中存在气泡而影响抗混叠成像元件30的光学质量。In certain embodiments, when the plurality of light transmitting fibers 310 are brought together, there is a gap between the light transmitting fibers 310, the gap being filled with a cured glue of a non-translucent material. Specifically, the optical transmission fibers 310 are first gathered together, and then glued from one end or both ends of the optical transmission fibers 310 so that the curing glue fills the gap between the optical transmission fibers 310. Further, the potting process will be performed under a vacuum environment to avoid the presence of air bubbles during the filling process that affect the optical quality of the anti-aliasing imaging element 30.
在某些实施方式中,上述抗混叠成像元件30的开口率大于或等于30%。优选地,该开口率大于或等于50%。为了既保证抗混叠效果又使得足量的光信号通过抗混叠成像元件30,可以根据实际使用情况来选取一个较佳值,例如55%、60%、70%等等。需要说明的是,抗混叠成像元件30的开口率为抗混叠成像元件30的横截面中透光区域占整个横截面积的百分比。In some embodiments, the anti-aliasing imaging element 30 has an aperture ratio greater than or equal to 30%. Preferably, the aperture ratio is greater than or equal to 50%. In order to ensure both the anti-aliasing effect and the sufficient amount of optical signal to pass through the anti-aliasing imaging element 30, a preferred value may be selected depending on the actual use, such as 55%, 60%, 70%, and the like. It is to be noted that the aperture ratio of the anti-aliasing imaging element 30 is a percentage of the cross-sectional area of the cross-sectional area of the anti-aliasing imaging element 30 in the entire cross-sectional area.
在某些实施方式中,间隙内填充的固化胶中非透光材料与光传输纤维310中非透光层312的材料一致。如此使得光传输纤维310的非透光层312与间隙内的固化胶完全融合,从而使得光传输纤维310之间的粘接更加稳定。In some embodiments, the non-transmissive material in the cured gel filled in the gap is consistent with the material of the non-transmissive layer 312 in the optical transmission fiber 310. This causes the non-transmissive layer 312 of the optical transmission fiber 310 to be completely fused with the cured glue in the gap, thereby making the bonding between the optical transmission fibers 310 more stable.
在某些实施方式中,上述步骤S103之后也可以对非透光层312进行半固化或不固化,待多个光传输纤维310聚集在一起后,再通过挤压处理,从而使得非透光层312将光传输纤维310之间的间隙填满。In some embodiments, the non-transmissive layer 312 may be semi-cured or not cured after the above step S103, and after the plurality of optical transmission fibers 310 are gathered together, the extrusion process is performed to make the non-transparent layer. 312 fills the gap between the optical transmission fibers 310.
进一步地,参照图9,图9是本发明另一实施方式的抗混叠成像元件的制备方法的流程示意图。在上述实施方式的基础上,步骤S202之后进一步包括:Further, referring to FIG. 9, FIG. 9 is a schematic flow chart of a method for preparing an anti-aliasing imaging element according to another embodiment of the present invention. Based on the foregoing embodiment, after step S202, the method further includes:
S203,按照需要的大小和厚度对收拢固定的光传输纤维进行切割。S203, cutting the fixed optical transmission fiber according to the required size and thickness.
在抗混叠成像元件的实际使用中,将根据实际使用需求而设置其相应的大小和厚度。例如应用于光学式传感器中时,光学式传感器的形状可包括长方形、正方形、圆形等等,而且如前所述,通过调节抗混叠成像元件的厚度,可以减小抗混叠成像元件的入射角最大值,从而提高该光学式传感器的感测精度,而且制备工艺成本降低。因此,在制作抗 混叠成像元件时,将较长的光传输纤维收拢并固定后,再对其进行横向切割,从而获得所需厚度的抗混叠成像板。同时,按照光学式传感器的实际大小对横向切割后的抗混叠成像板进行纵向切割,从而获得所需大小的抗混叠成像元件。这里的纵向切割是指沿光传输纤维的轴线平行的方向进行切割,横向切割是指沿与光传输纤维的轴线垂直的方向进行切割。In the actual use of the anti-aliasing imaging element, its corresponding size and thickness will be set according to actual use requirements. For example, when applied to an optical sensor, the shape of the optical sensor may include a rectangle, a square, a circle, etc., and as described above, by adjusting the thickness of the anti-aliasing imaging element, the anti-aliasing imaging element can be reduced. The maximum angle of incidence, thereby improving the sensing accuracy of the optical sensor, and the manufacturing process cost is reduced. Therefore, in the production of the anti-aliasing imaging element, the longer optical transmission fibers are gathered and fixed, and then laterally cut to obtain an anti-aliasing imaging plate of a desired thickness. At the same time, the transversely-cut anti-aliasing imaging plate is longitudinally cut according to the actual size of the optical sensor to obtain an anti-aliasing imaging element of a desired size. Here, the longitudinal cutting means cutting in a direction parallel to the axis of the optical transmission fiber, and the transverse cutting means cutting in a direction perpendicular to the axis of the optical transmission fiber.
进一步地,在对收拢并固定的光传输纤维进行纵向切割后,为避免光传输纤维的透光体外漏而影响光学质量,本实施方式中在切割后的抗混叠成像元件的外周涂覆一层非透光材料。Further, after longitudinally cutting the folded and fixed optical transmission fiber, in order to avoid optical transmission of the optical transmission fiber, the optical quality is affected. In the embodiment, the outer periphery of the anti-aliased imaging element after cutting is coated with one. The layer is a non-transparent material.
在某些实施方式中,上述抗混叠成像元件例如应用于光学式传感器,以防止相邻的感光单元接收到的光信号相互干扰,而影响光学式传感器的感测精度。当然,该抗混叠成像元件还可以应用于其他光学部件中。In some embodiments, the anti-aliasing imaging element described above is applied, for example, to an optical sensor to prevent optical signals received by adjacent photosensitive units from interfering with each other and affecting the sensing accuracy of the optical sensor. Of course, the anti-aliasing imaging element can also be applied to other optical components.
具体地,参照图10,图10是本发明一实施方式的光学式传感器的剖面结构示意图。该光学式传感器300用于采集传感器上方的物体的生物特征信息,该生物特征信息包括指纹、掌纹、静脉、血压、心率、血氧浓度中的一种或几种。该光学式传感器300例如包括衬底31、排列在衬底31上的多个感光单元32,位于感光单元32上的抗混叠成像元件30。该抗混叠成像元件30参照上述各实施方式描述的结构实施,用于使入射角小于入射角最大值γ max的光信号能穿过并到达感光单元32,其余的光信号均被抗混叠成像元件30吸收,因此提高了光学式传感器的感测精度,获得更清晰的、更准确的生物特征信息。 Specifically, referring to FIG. 10, FIG. 10 is a schematic cross-sectional structural view of an optical sensor according to an embodiment of the present invention. The optical sensor 300 is configured to collect biometric information of an object above the sensor, and the biometric information includes one or more of a fingerprint, a palm print, a vein, a blood pressure, a heart rate, and a blood oxygen concentration. The optical sensor 300 includes, for example, a substrate 31, a plurality of photosensitive cells 32 arranged on the substrate 31, and an anti-aliasing imaging element 30 on the photosensitive unit 32. The anti-aliasing imaging element 30 is implemented with reference to the structure described in the above embodiments for enabling an optical signal having an incident angle smaller than the incident angle maximum γ max to pass through and reach the photosensitive unit 32, and the remaining optical signals are anti-aliased The imaging element 30 absorbs, thus improving the sensing accuracy of the optical sensor, resulting in clearer, more accurate biometric information.
在某些实施方式中,抗混叠成像元件30中透光体轴切面的长度与宽度之间的比值取值范围为5~50,即比值大于或等于5,且小于或等于50。例如10、15、20、30、40等等。通过设置该比值,调整抗混叠成像元件30中光传输纤维的入射角最大值,以提高光学式传感器的感测精度。In some embodiments, the ratio between the length and the width of the optical axis section of the anti-aliasing imaging element 30 ranges from 5 to 50, ie, the ratio is greater than or equal to 5 and less than or equal to 50. For example, 10, 15, 20, 30, 40, etc. By setting the ratio, the maximum incident angle of the optical transmission fiber in the anti-aliasing imaging element 30 is adjusted to improve the sensing accuracy of the optical sensor.
在某些实施方式中,由于该抗混叠成像元件30中每个光传输纤维的透光体轴切面宽度较小,因此一个感光单元32对应多个光传输纤维,如此使得抗混叠成像元件30置于感光单元32上时,不需要进行对位,从而降低了光学式传感器的制备工艺成本,而且还提高了光学式传感器300的感测精度。In some embodiments, since each of the light-transmitting fibers of the anti-aliasing imaging member 30 has a light-transmissive axis-cut width that is small, one photosensitive unit 32 corresponds to a plurality of light-transmitting fibers, thus making the anti-aliasing imaging element When placed on the photosensitive unit 32, the alignment is not required, thereby reducing the manufacturing process cost of the optical sensor, and also improving the sensing accuracy of the optical sensor 300.
进一步地,上述光学式传感器300还包括光源33,该光源33例如设置于衬底31上,且位于感光区域外侧,该感光区域为多个感光单元32形成的感光区域。该光源33用于发出预定波长的光信号,例如白光信号、红外光信号、紫外光信号、荧光信号等等。Further, the optical sensor 300 further includes a light source 33 disposed on the substrate 31 and located outside the photosensitive region, which is a photosensitive region formed by the plurality of photosensitive cells 32. The light source 33 is for emitting an optical signal of a predetermined wavelength, such as a white light signal, an infrared light signal, an ultraviolet light signal, a fluorescent signal, or the like.
在某些实施方式中,请参照图11,图11是本发明又一实施方式的光学式传感器300的结构。在某些实施方式中,所述光学式传感器300进一步包括一封装体34,所述封装体34用于将所述衬底31以及所述衬底31上的所有器件进行封装,例如感光单元32、抗混叠成像元件30、光源33等进行封装。In some embodiments, please refer to FIG. 11, which is a configuration of an optical sensor 300 according to still another embodiment of the present invention. In some embodiments, the optical sensor 300 further includes a package body 34 for packaging the substrate 31 and all devices on the substrate 31, such as the photosensitive unit 32. The anti-aliasing imaging element 30, the light source 33, and the like are packaged.
在某些实施方式中,衬底31和衬底31上的多个感光单元32形成感光裸片(die),该感光裸片(Die)为一半导体集成电路器件。该衬底31上例如还形成有与感光单元32电性连接的扫描线组和数据线组,扫描线组用于传输扫描驱动信号给感光单元32,以激活感光单元32执行光感测,数据线组用于将感光单元32执行光感测而产生的电信号输出。该衬底31例如但不限于硅基板等。In some embodiments, the substrate 31 and the plurality of photosensitive cells 32 on the substrate 31 form a photosensitive die, and the photosensitive die (Die) is a semiconductor integrated circuit device. The substrate 31 is further formed with a scan line group and a data line group electrically connected to the photosensitive unit 32, and the scan line group is configured to transmit a scan driving signal to the photosensitive unit 32 to activate the photosensitive unit 32 to perform light sensing, data. The line group is used to output an electric signal generated by the photosensitive unit 32 performing light sensing. The substrate 31 is, for example but not limited to, a silicon substrate or the like.
具体地,在某些实施方式中,请参照图12,图12是本发明另一实施方式的光学式传感器的电路结构示意图。感光单元32呈阵列分布,例如矩阵分布。当然,也可以为其他规则方式分布或非规则方式分布。扫描线组包括多条扫描线303,数据线组包括多条数据线304,多条扫描线303与多条数据线304相互交叉设置,且设置在相邻的感光单元32之间。例如,多条扫描线G1、G2…Gm沿Y方向间隔布设,多条数据线S1、S2…Sn沿X方向间隔布设。然,可变更地,该多条扫描线303与多条数据线304不限定图12中示出的垂直设置,也可以呈一定角度的设置,例如30°、60°等。另外,由于扫描线303和数据线304的导电性,因此处于交叉位置的扫描线303和数据线304之间通过绝缘材料进行隔离。Specifically, in some embodiments, please refer to FIG. 12, which is a schematic diagram of a circuit structure of an optical sensor according to another embodiment of the present invention. The photosensitive cells 32 are distributed in an array, such as a matrix distribution. Of course, it can also be distributed in other rule manners or in an irregular manner. The scan line group includes a plurality of scan lines 303. The data line group includes a plurality of data lines 304. The plurality of scan lines 303 and the plurality of data lines 304 are disposed to cross each other and disposed between adjacent photosensitive units 32. For example, a plurality of scanning lines G1, G2, ..., Gm are arranged at intervals in the Y direction, and a plurality of data lines S1, S2, ..., Sn are arranged at intervals in the X direction. However, the plurality of scanning lines 303 and the plurality of data lines 304 are not limited to the vertical arrangement shown in FIG. 12, and may be disposed at an angle, for example, 30°, 60°, or the like. In addition, due to the conductivity of the scan line 303 and the data line 304, the scan line 303 and the data line 304 at the intersection are separated by an insulating material.
需要说明的是,上述扫描线303和数据线304的分布以及数量的设置并不局限于上述例举的实施方式,可以根据感光像素的结构的不同而对应设置相应的扫描线组和数据线组。It should be noted that the distribution and the number of the scan lines 303 and the data lines 304 are not limited to the above-exemplified embodiments, and the corresponding scan line groups and data line groups may be correspondingly set according to the structure of the photosensitive pixels. .
进一步地,多条扫描线303均连接一驱动电路35,多条数据线304均连接一信号处理电路36。驱动电路35用于提供相应的扫描驱动信号,并通过对应的扫描线303传输给相应的感光单元32,以激活该感光单元32执行光感测。该驱动电路35形成在衬底31上,当然也可以通过柔性电路板与感光单元32电性连接,即连接多条扫描线303。信号处理电路36通过数据线303接收相应的感光单元32执行光感测而产生的电信号,并根据该电信号来获取目标物体的生物特征信息。Further, a plurality of scan lines 303 are connected to a driving circuit 35, and a plurality of data lines 304 are connected to a signal processing circuit 36. The driving circuit 35 is configured to provide a corresponding scan driving signal and transmit it to the corresponding photosensitive unit 32 through the corresponding scanning line 303 to activate the photosensitive unit 32 to perform light sensing. The driving circuit 35 is formed on the substrate 31. Of course, the flexible circuit board can also be electrically connected to the photosensitive unit 32, that is, the plurality of scanning lines 303 are connected. The signal processing circuit 36 receives an electrical signal generated by the corresponding photosensitive unit 32 performing light sensing through the data line 303, and acquires biometric information of the target object based on the electrical signal.
在某些实施方式中,光学式传感器300还包括一控制器37,该控制器37用于控制驱动电路输出相应的扫描驱动信号,例如但不局限于逐行激活感光单元32执行光感测。该控制器37还用于控制信号处理电路36接收感光单元32输出的电信号,并在接收执行光感测的所有感光单元32输出的电信号后,根据该电信号生成目标物体的生物特征 信息。In some embodiments, the optical sensor 300 further includes a controller 37 for controlling the drive circuit to output a corresponding scan drive signal, such as, but not limited to, progressively activating the photosensitive unit 32 to perform light sensing. The controller 37 is further configured to control the signal processing circuit 36 to receive the electrical signal output by the photosensitive unit 32, and after receiving the electrical signals output by all the photosensitive units 32 that perform light sensing, generate biometric information of the target object based on the electrical signals. .
进一步地,上述信号处理电路36以及控制器37可形成在衬底31上,也可通过柔性电路板与感光裸片电性连接。Further, the signal processing circuit 36 and the controller 37 may be formed on the substrate 31 or electrically connected to the photosensitive die through the flexible circuit board.
在某些实施方式中,如图13所示,图13是图12中一个感光单元32的具体结构示意图。该感光单元32包括一感光器件320和一开关器件322。该开关器件322具有一控制端C以及两信号端,例如第一信号端Sn1和第二信号端Sn2。其中,开关器件322的控制端C与扫描线304连接,开关器件322的第一信号端Sn1经感光器件320连接一参考信号L,开关器件322的第二信号端Sn2与数据线304连接。需要说明的是,图13示出的感光单元32仅用于举例说明,并不限于感光单元32的其他组成结构。In some embodiments, as shown in FIG. 13, FIG. 13 is a detailed structural diagram of a photosensitive unit 32 of FIG. The photosensitive unit 32 includes a photosensitive device 320 and a switching device 322. The switching device 322 has a control terminal C and two signal terminals, such as a first signal terminal Sn1 and a second signal terminal Sn2. The control terminal C of the switching device 322 is connected to the scan line 304. The first signal terminal Sn1 of the switching device 322 is connected to the reference signal L via the photosensitive device 320. The second signal terminal Sn2 of the switching device 322 is connected to the data line 304. It should be noted that the photosensitive unit 32 shown in FIG. 13 is for illustrative purposes only and is not limited to other constituent structures of the photosensitive unit 32.
具体地,上述感光器件320例如但不限于光敏二极管、光敏三极管、光电二极管、光电阻、薄膜晶体管的任意一个或几个。以光电二极管为例,通过在光电二极管的两端施加负向电压,此时,若光电二极管接收到光信号时,将产生与光信号成一定比例关系的光电流,接收到的光信号强度越大,产生的光电流则越大,光电二极管负极上的电压下降的速度也就越快,因此通过采集光电二极管负极上的电压信号,从而获得目标物体不同部位反射的光信号强度,进而获得目标物体的生物特征信息。可以理解的是,为了增大感光器件320的感光效果,可以设置多个感光器件320。Specifically, the above-mentioned photosensitive device 320 is, for example but not limited to, any one or several of a photodiode, a phototransistor, a photodiode, a photo resistor, and a thin film transistor. Taking a photodiode as an example, a negative voltage is applied across the photodiode. At this time, if the photodiode receives the optical signal, a photocurrent is generated in a proportional relationship with the optical signal, and the received optical signal is more intense. Larger, the larger the photocurrent generated, the faster the voltage drop on the negative pole of the photodiode. Therefore, by collecting the voltage signal on the negative pole of the photodiode, the intensity of the optical signal reflected from different parts of the target object is obtained, and the target is obtained. Biometric information of the object. It can be understood that in order to increase the photosensitive effect of the photosensitive device 320, a plurality of photosensitive devices 320 may be disposed.
进一步地,开关器件322例如但不限于三极管、MOS管、薄膜晶体管中的任意一个或几个。当然,该开关器件322也可以包括其他类型的器件,数量也可以为2个、3个等。Further, the switching device 322 is, for example but not limited to, any one or several of a triode, a MOS transistor, and a thin film transistor. Of course, the switching device 322 may also include other types of devices, and the number may also be two, three, and the like.
以图13示出的感光单元32结构为例,该MOS管的栅极作为开关器件322的控制端C,MOS管的源极和漏极对应作为开关器件322的第一信号端Sn1和第二信号端Sn2。MOS管的栅极与扫描线303连接,MOS管的源极与光电二极管D1的负极连接,MOS管的漏极与数据线304连接。光电二极管D1的正极连接参考信号L,该参考信号L例如为地信号或负电压信号。Taking the structure of the photosensitive unit 32 shown in FIG. 13 as an example, the gate of the MOS transistor serves as the control terminal C of the switching device 322, and the source and the drain of the MOS transistor correspond to the first signal terminal Sn1 and the second of the switching device 322. Signal terminal Sn2. The gate of the MOS transistor is connected to the scanning line 303, the source of the MOS transistor is connected to the cathode of the photodiode D1, and the drain of the MOS transistor is connected to the data line 304. The anode of the photodiode D1 is connected to a reference signal L, which is, for example, a ground signal or a negative voltage signal.
在上述感光单元32执行光感测时,通过扫描线303给薄膜晶体管TFT的栅极施加一扫描驱动信号,以驱动MOS管导通。此时,数据线304连接一正电压信号,当MOS管导通后,数据线304上的正电压信号经MOS管施加至光电二极管D1的负极,由于光电二极管D1的正极接地,因此光电二极管D1两端将施加一反向电压,使得光电二极管D1处于反向偏置,即处于工作状态。此时,当有光信号照射到该光电二极管D1时,光电二极管D1的反向电流迅速增大,从而引起光电二极管D1上的电流变化,该变化的电流可以从数据线304上获取。由于光信号的强度越大,产生的反向电流也越大, 因此根据数据线304上获取到的电流信号,可以获得光信号的强度,进而获得目标物体的生物特征信息。When the photosensitive unit 32 performs photo sensing, a scan driving signal is applied to the gate of the thin film transistor TFT through the scan line 303 to drive the MOS transistor to be turned on. At this time, the data line 304 is connected to a positive voltage signal. When the MOS transistor is turned on, the positive voltage signal on the data line 304 is applied to the negative electrode of the photodiode D1 via the MOS transistor. Since the positive electrode of the photodiode D1 is grounded, the photodiode D1 is A reverse voltage will be applied across the terminals such that the photodiode D1 is in a reverse bias, ie, in operation. At this time, when an optical signal is irradiated to the photodiode D1, the reverse current of the photodiode D1 rapidly increases, thereby causing a change in current on the photodiode D1, which can be obtained from the data line 304. Since the intensity of the optical signal is larger, the reverse current generated is also larger. Therefore, according to the current signal acquired on the data line 304, the intensity of the optical signal can be obtained, thereby obtaining the biometric information of the target object.
在某些实施方式中,上述参考信号L可以为正电压信号、负电压信号、地信号等。只要数据线304上提供的电信号与该参考信号L施加在光电二极管D1两端,使得光电二极管D1两端形成反向电压,以执行光感测,均在本发明限定的保护范围内。In some embodiments, the reference signal L may be a positive voltage signal, a negative voltage signal, a ground signal, or the like. As long as the electrical signal provided on the data line 304 and the reference signal L are applied across the photodiode D1 such that a reverse voltage is formed across the photodiode D1 to perform photo sensing, both are within the scope of protection defined by the present invention.
可以理解的是,上述感光单元32中MOS管和光电二极管D1的连接方式并不局限于图13示出的连接方式,也可以为其他连接方式。例如,如图14所示,MOS管的栅极G与扫描线303连接,MOS管的漏极D与光电二极管D1的正极连接,MOS管的源极S与数据线304连接。光电二极管D1的负极连接正电压信号。It can be understood that the connection manner of the MOS tube and the photodiode D1 in the above-mentioned photosensitive unit 32 is not limited to the connection manner shown in FIG. 13, and may be other connection methods. For example, as shown in FIG. 14, the gate G of the MOS transistor is connected to the scanning line 303, the drain D of the MOS transistor is connected to the anode of the photodiode D1, and the source S of the MOS transistor is connected to the data line 304. The negative terminal of the photodiode D1 is connected to a positive voltage signal.
进一步地,参照图15,图15是本发明一实施方式的光学式传感器的制备方法的流程示意图。该制备方法包括以下步骤:Further, referring to FIG. 15, FIG. 15 is a flow chart showing a method of manufacturing an optical sensor according to an embodiment of the present invention. The preparation method comprises the following steps:
S301,提供一衬底;S301, providing a substrate;
衬底31例如但不限于硅基板,金属板、电路印刷版等等,当然,还可以为玻璃基板等基板。The substrate 31 is, for example but not limited to, a silicon substrate, a metal plate, a circuit printing plate, or the like, and may of course be a substrate such as a glass substrate.
S302,在衬底上形成多个感光单元;S302, forming a plurality of photosensitive cells on the substrate;
在衬底31上分别形成感光单元32的感光器件320和开关器件322。另外,还将在该衬底31上形成数据线和扫描线,以及相应的电路结构,例如驱动电路35、信号处理电路36等等。A photosensitive device 320 and a switching device 322 of the photosensitive unit 32 are formed on the substrate 31, respectively. In addition, data lines and scan lines, and corresponding circuit structures such as the drive circuit 35, the signal processing circuit 36, and the like, will also be formed on the substrate 31.
S303,提供一抗混叠成像元件,并将该抗混叠成像元件贴合于感光单元上。S303, providing an anti-aliasing imaging element and attaching the anti-aliasing imaging element to the photosensitive unit.
该抗混叠成像元件30通过上述各实施方式的制备方法制成,且该抗混叠成像元件30将按照所需尺寸和厚度进行切割后,再贴合于感光单元32上。当然,若该抗混叠成像元件尺寸和厚度满足要求,则不用切割处理,直接贴合于感光单元32上。The anti-aliasing imaging element 30 is produced by the preparation method of each of the above embodiments, and the anti-aliasing imaging element 30 is cut to a desired size and thickness and then attached to the photosensitive unit 32. Of course, if the size and thickness of the anti-aliasing imaging element meet the requirements, it is directly attached to the photosensitive unit 32 without a cutting process.
进一步地,参照图16,图16是本发明另一实施方式的光学式传感器的制备方法的流程示意图。该制备方法包括以下步骤:Further, referring to FIG. 16, FIG. 16 is a schematic flow chart of a method for fabricating an optical sensor according to another embodiment of the present invention. The preparation method comprises the following steps:
S401,提供一晶圆,所述晶圆包括间隔排列的多个光学式传感芯片;S401, providing a wafer, the wafer comprising a plurality of optical sensing chips arranged at intervals;
参照图17,图17是本发明一实施方式的晶圆的正面结构示意图。该晶圆400包括衬底以及形成在衬底上的多个光学式传感电路,衬底上包括多个间隔设置的传感芯片区410,每个传感芯片区410内用于形成光学式传感芯片。该传感芯片区410呈阵列排列,且相邻的传感芯片区410之间形成切割区420。Referring to Fig. 17, Fig. 17 is a front view showing the structure of a wafer according to an embodiment of the present invention. The wafer 400 includes a substrate and a plurality of optical sensing circuits formed on the substrate, the substrate including a plurality of spaced apart sensing chip regions 410, each of the sensing chip regions 410 for forming an optical Sensor chip. The sensing chip regions 410 are arranged in an array, and a cutting region 420 is formed between adjacent sensing chip regions 410.
S402,对晶圆进行切割,获得多个光学式传感芯片;S402, cutting the wafer to obtain a plurality of optical sensor chips;
在切割区对晶圆进行切割,从而获得多个独立的光学式传感芯片。The wafer is diced in the dicing zone to obtain a plurality of independent optical sensing chips.
S403,提供一抗混叠成像板,该抗混叠成像板包括多个光传输纤维;S403, providing an anti-aliasing imaging plate, the anti-aliasing imaging plate comprising a plurality of optical transmission fibers;
按照上述抗混叠成像元件的制备方法制成光传输纤维条,即将多个光传输纤维条聚集在一起并固定形成。讲该多个传输纤维条按照抗混叠成像板所需的厚度进行横向切割,从而形成抗混叠成像板。According to the above-described method for preparing an anti-aliasing imaging element, an optical transmission fiber strip is produced, that is, a plurality of optical transmission fiber ribbons are gathered together and fixedly formed. The plurality of transport fiber strips are transversely cut to the thickness required for the anti-aliasing imaging plate to form an anti-aliasing imaging plate.
S404,按照光学式传感芯片的尺寸及形状,对抗混叠成像板进行切割,以获得与所述光学式传感芯片对应的抗混叠成像元件;S404, cutting the anti-aliasing imaging board according to the size and shape of the optical sensing chip to obtain an anti-aliasing imaging element corresponding to the optical sensing chip;
按照光学式传感芯片的尺寸及形状,对抗混叠成像板进行纵向切割,获得抗混叠成像元件。由于该抗混叠成像元件与光学式传感芯片的尺寸及形状一致,因此该获得的抗混叠成像元件不需要对位,直接贴合于光学式传感芯片上。当然,该抗混叠成像元件也可以按照光学式传感芯片的感测区的尺寸及形状,对抗混叠成像板纵向切割而成,如此节省了抗混叠成像元件的成本。According to the size and shape of the optical sensor chip, the anti-aliasing imaging plate is longitudinally cut to obtain an anti-aliasing imaging element. Since the anti-aliasing imaging element is identical in size and shape to the optical sensing chip, the obtained anti-aliasing imaging element does not need to be aligned and directly attached to the optical sensing chip. Of course, the anti-aliasing imaging element can also be longitudinally cut against the aliasing imaging plate according to the size and shape of the sensing area of the optical sensing chip, thus saving the cost of the anti-aliasing imaging element.
S405,将所述抗混叠成像元件与光学式传感芯片贴合,并封装。S405. The anti-aliasing imaging element is bonded to an optical sensing chip and packaged.
将抗混叠成像元件与光学式传感芯片贴合,使得抗混叠成像元件至少位于光学式传感芯片的感测区上方。然后对贴合的抗混叠成像元件与光学式传感芯片进行封装,形成光学式传感器。The anti-aliasing imaging element is attached to the optical sensing chip such that the anti-aliasing imaging element is located at least above the sensing region of the optical sensing chip. The bonded anti-aliasing imaging element and the optical sensor chip are then packaged to form an optical sensor.
进一步地,参照图18和图19,图18是本发明一实施方式的电子设备的正面结构示意图,图19是图18中电子设备沿I-I线的剖面结构示意图。该电子设备1例如包括显示屏500、以及位于显示屏500下方的光学式传感器300。光学式传感器300的感测区域R2位于显示屏500的显示区域R1的局部位置,例如图18示出的显示区域R1的中下位置,便于单手触摸电子设备1进行指纹识别操作。当然,若电子设备1的尺寸和形状不同,则光学式传感器300的设置位置也将根据实际需要发生变化。Further, referring to FIG. 18 and FIG. 19, FIG. 18 is a schematic front structural view of an electronic device according to an embodiment of the present invention, and FIG. 19 is a cross-sectional structural view of the electronic device of FIG. 18 taken along line I-I. The electronic device 1 includes, for example, a display screen 500 and an optical sensor 300 located below the display screen 500. The sensing area R2 of the optical sensor 300 is located at a partial position of the display area R1 of the display screen 500, such as the middle-lower position of the display area R1 shown in FIG. 18, facilitating the one-hand touch electronic device 1 to perform a fingerprint recognition operation. Of course, if the size and shape of the electronic device 1 are different, the installation position of the optical sensor 300 will also vary according to actual needs.
需要说明的是,图18中光学式传感器的感测区域R2在实际使用中,将不在显示屏中进行显示,或者以其他形式进行显示。It should be noted that, in actual use, the sensing region R2 of the optical sensor in FIG. 18 will not be displayed in the display screen or displayed in other forms.
进一步地,该光学式传感器300参照上述各实施方式的光学式传感器实施。另外,该显示屏500与光学式传感器300之间通过光学胶粘合固定。Further, the optical sensor 300 is implemented by referring to the optical sensor of each of the above embodiments. In addition, the display screen 500 and the optical sensor 300 are fixed by optical glue bonding.
在某些实施方式中,显示屏上方还设有保护盖板600,用以避免显示屏500直接与物体接触而损坏显示屏500。以目标物体为手指为例,当手指位于电子设备1的保护盖板600上,且位于指纹识别区域R2内时,显示屏500发出的光信号到达手指后将发生 反射,反射回来的光信号穿过显示屏500后到达光学式传感器300。光学式传感器300接收反射回来的光信号,并将接收到的光信号转换为相应的电信号。由于手指的谷部分和脊部分对光信号的反射程度不同,例如谷部分对光信号进行全反射,脊部分对光信号进行漫反射,因此根据转换后的电信号,获得手指的指纹图像,以此进行电子设备的使用者的身份识别。In some embodiments, a protective cover 600 is also disposed over the display screen to prevent the display screen 500 from directly contacting the object and damaging the display screen 500. Taking the target object as a finger as an example, when the finger is located on the protective cover 600 of the electronic device 1 and located in the fingerprint recognition area R2, the light signal emitted by the display screen 500 will be reflected after reaching the finger, and the reflected light signal is worn. The optical sensor 300 is reached after the display screen 500. The optical sensor 300 receives the reflected optical signal and converts the received optical signal into a corresponding electrical signal. Since the valley portion and the ridge portion of the finger have different degrees of reflection on the optical signal, for example, the valley portion totally reflects the optical signal, and the ridge portion diffuses the optical signal, so that the fingerprint image of the finger is obtained according to the converted electrical signal, This carries out the identification of the user of the electronic device.
在本说明书的描述中,参考术语“一个实施方式”、“某些实施方式”、“示意性实施方式”、“示例”、“具体示例”、或“一些示例”等的描述意指结合所述实施方式或示例描述的具体特征、结构、材料或者特点包含于本发明的至少一个实施方式或示例中。在本说明书中,对上述术语的示意性表述不一定指的是相同的实施方式或示例。而且,描述的具体特征、结构、材料或者特点可以在任何的一个或多个实施方式或示例中以合适的方式结合。In the description of the present specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiment", "example", "specific example", or "some examples", etc. The specific features, structures, materials or characteristics described in the embodiments or examples are included in at least one embodiment or example of the invention. In the present specification, the schematic representation of the above terms does not necessarily mean the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in a suitable manner in any one or more embodiments or examples.
尽管上面已经示出和描述了本发明的实施方式,可以理解的是,上述实施方式是示例性的,不能理解为对本发明的限制,本领域的普通技术人员在本发明的范围内可以对上述实施方式进行变化、修改、替换和变型。Although the embodiments of the present invention have been shown and described, it is understood that the above-described embodiments are illustrative and are not to be construed as limiting the scope of the invention. The embodiments are subject to changes, modifications, substitutions and variations.

Claims (15)

  1. 一种抗混叠成像元件的制备方法,包括以下步骤:A method for preparing an anti-aliasing imaging element, comprising the steps of:
    S11,提供多个光传输纤维,所述光传输纤维包括透光体以及位于所述透光体外侧的非透光层;S11, providing a plurality of optical transmission fibers, the optical transmission fiber comprising a light transmissive body and a non-transparent layer located outside the light transmissive body;
    S12,将所述多个光传输纤维收拢,并固定。S12, the plurality of optical transmission fibers are gathered and fixed.
  2. 如权利要求1所述的抗混叠成像元件的制备方法,其特征在于:所述步骤S12包括:将多个光传输纤维收拢,并在真空环境下填充非透光材料的固化胶,然后对其进行固化。The method for preparing an anti-aliasing imaging device according to claim 1, wherein the step S12 comprises: gathering a plurality of optical transmission fibers, and filling the curing adhesive of the non-transparent material in a vacuum environment, and then It is cured.
  3. 如权利要求1所述的抗混叠成像元件的制备方法,其特征在于:所述步骤S11进一步包括:The method for preparing an anti-aliasing imaging element according to claim 1, wherein the step S11 further comprises:
    S111,提供一光棒;S111, providing a light rod;
    S112,对所述光棒进行拉丝形成所述光传输纤维的透光体,同时在所述透光体外周喷涂非透光材料,形成所述光传输纤维的非透光层。S112, the light rod is drawn to form a light-transmitting body of the light-transmitting fiber, and a non-light-transmitting material is sprayed on the outer surface of the light-transmitting body to form a non-transmissive layer of the light-transmitting fiber.
  4. 如权利要求3所述的抗混叠成像元件的制备方法,其特征在于:所述光棒包括石英、玻璃、聚合物中的一种或多种材料。The method of preparing an anti-aliasing imaging element according to claim 3, wherein the light bar comprises one or more of quartz, glass, and polymer.
  5. 如权利要求3所述的抗混叠成像元件的制备方法,其特征在于:所述透光体的横截面为圆形、正方形、长方形、椭圆形。The method of preparing an anti-aliasing imaging element according to claim 3, wherein the light transmissive body has a circular, square, rectangular, or elliptical cross section.
  6. 如权利要求1所述的抗混叠成像元件的制备方法,其特征在于:所述透光体轴切面为长方形,且该轴切面的宽度为5~50um。The method for preparing an anti-aliasing imaging element according to claim 1, wherein the light-transmissive body has a rectangular cut surface and the width of the axial cut surface is 5 to 50 um.
  7. 如权利要求1所述的抗混叠成像元件的制备方法,其特征在于:所述步骤S12包括:在所述光传输纤维外侧涂覆非透光材料的固化胶,以将所述多个光传输纤维粘合固定。The method for preparing an anti-aliasing imaging element according to claim 1, wherein the step S12 comprises: coating a cured adhesive of a non-transparent material on the outside of the optical transmission fiber to The transfer fiber is bonded and fixed.
  8. 如权利要求1所述的抗混叠成像元件的制备方法,其特征在于:所述步骤S12之后进一步包括:The method for preparing an anti-aliasing imaging device according to claim 1, wherein the step S12 further comprises:
    按照需要的大小和长度对收拢固定的光传输纤维进行切割。The fixed optical transmission fibers are cut according to the required size and length.
  9. 一种光学式传感器的制备方法,包括以下步骤:A method for preparing an optical sensor includes the following steps:
    S21,提供一基板;S21, providing a substrate;
    S22,在所述基板上形成多个感光单元;S22, forming a plurality of photosensitive cells on the substrate;
    S23,提供一抗混叠成像元件,并将该抗混叠成像元件贴合于所述感光单元上;所述抗混叠成像元件由权利要求1-8中任意一项所述的方法制成;S23, providing an anti-aliasing imaging element, and attaching the anti-aliasing imaging element to the photosensitive unit; the anti-aliasing imaging element is made by the method of any one of claims 1-8 ;
    S24,对所述基板以及基板上的感光单元、抗混叠成像元件进行封装。S24, encapsulating the substrate and the photosensitive unit and the anti-aliasing imaging element on the substrate.
  10. 如权利要求9所述的光学式传感器的制备方法,其特征在于:所述抗混叠成像元件 中透光体轴切面的长度与直径的比值大于或等于5,且小于或等于50。The method of manufacturing an optical sensor according to claim 9, wherein a ratio of a length to a diameter of the optical axis section of the anti-aliasing imaging element is greater than or equal to 5 and less than or equal to 50.
  11. 如权利要求9所述的光学式传感器的制备方法,其特征在于:所述光学式传感器用于采集传感器上方的物体的生物特征信息。The method of manufacturing an optical sensor according to claim 9, wherein the optical sensor is configured to collect biometric information of an object above the sensor.
  12. 如权利要求11所述的光学式传感器的制备方法,其特征在于:所述生物特征信息包括指纹、掌纹、静脉、血压、心率、血氧浓度的一种或几种。The method of manufacturing an optical sensor according to claim 11, wherein the biometric information comprises one or more of a fingerprint, a palm print, a vein, a blood pressure, a heart rate, and a blood oxygen concentration.
  13. 一种光学式传感器的制备方法,包括以下步骤:A method for preparing an optical sensor includes the following steps:
    S31,提供一晶圆,所述晶圆包括间隔排列的多个光学传感芯片;S31, providing a wafer, the wafer comprising a plurality of optical sensor chips arranged at intervals;
    S32,对晶圆进行切割,获得多个光学传感芯片;S32, cutting the wafer to obtain a plurality of optical sensor chips;
    S33,提供一抗混叠成像板,所述抗混叠成像板包括多个光传输纤维;S33, providing an anti-aliasing imaging plate, the anti-aliasing imaging plate comprising a plurality of optical transmission fibers;
    S34,按照光学传感芯片的尺寸及形状,对所述抗混叠成像板进行切割,以获得与所述光学传感芯片对应的抗混叠成像元件;S34, cutting the anti-aliasing imaging plate according to the size and shape of the optical sensor chip to obtain an anti-aliasing imaging element corresponding to the optical sensor chip;
    S35,将所述抗混叠成像元件与所述光学传感芯片贴合,并封装。S35. The anti-aliasing imaging element is attached to the optical sensor chip and packaged.
  14. 如权利要求13所述的光学式传感器的制备方法,其特征在于:所述步骤S33中,抗混叠成像板利用权利要求1-8中任意一项所述的方法制成。The method of manufacturing an optical sensor according to claim 13, wherein in the step S33, the anti-aliasing imaging plate is produced by the method according to any one of claims 1-8.
  15. 如权利要求13所述的光学式传感器的制备方法,其特征在于:所述步骤S34中获得的抗混叠成像元件的透光体轴切面的长度与直径的比值大于或等于5,且小于或等于50。The method of manufacturing an optical sensor according to claim 13, wherein the ratio of the length to the diameter of the optical axis of the anti-aliasing imaging element obtained in step S34 is greater than or equal to 5, and less than or Equal to 50.
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