WO2019124443A1

WO2019124443A1 - Pressing member and substrate holding tool

Info

Publication number: WO2019124443A1
Application number: PCT/JP2018/046803
Authority: WO
Inventors: 徹彌井上; 吉田　政生; 田中　拓也
Original assignee: 京セラ株式会社
Priority date: 2017-12-19
Filing date: 2018-12-19
Publication date: 2019-06-27
Also published as: JPWO2019124443A1; JP6913764B2

Abstract

A pressing member according to the present disclosure has an abutment surface abutting against an object substrate and is provided with: a deformation part that is elastic in a first direction; and two fixed parts that are connected to the deformation part. The deformation part has a plurality of first regions along the first direction, and a plurality of second regions along a second direction. The deformation part is bent at positions where the first regions and the second regions respectively intersect each other. The total length L1, in the first direction, of the deformation part is larger by 3 times or more than the height of the deformation part, the total length L2, in the second direction, of the deformation part is larger by 1.5 times or more than the width of the deformation part, and L2 is larger by 1-3 times than L1.

Description

Pressing member and substrate holder

The present invention relates to a pressing member and a substrate holder.

As the size of a substrate used in the process of manufacturing a semiconductor element is increasing, the size of a base on which the substrate is mounted is also increasing accordingly. In this base, not only a large diameter substrate but also a small diameter substrate smaller in size than the large diameter substrate may be placed. A substrate holder is used to hold such a small diameter substrate.

Patent Document 1 (Japanese Patent Laid-Open No. 2011-97043) describes a substrate holder having a contact portion for positioning a substrate, and a plate spring which is a pressing member for pressing and holding the substrate against the contact portion. ing.

There are tolerances in semiconductor substrates. The pressing member used in the substrate holder is required to hold the substrate with an appropriate holding force even when the size of the substrate has variation within a prescribed tolerance.

The pressing member of the present disclosure is a pressing member that abuts on the side surface of the target substrate placed on the base, and presses and holds the target substrate along the first direction. The pressing member has an abutting surface that abuts on the target substrate, and includes a deformation portion and two fixing portions. The deformation portion has elasticity in the first direction. The two fixing portions are spaced apart in a second direction orthogonal to the first direction, and are respectively connected to the deformation portions. The deformation portion has a plurality of first regions along the first direction and a plurality of second regions along the second direction. The deformation portion is bent at a position where the first area and the second area intersect. The total extension L1 in the first direction in the deformation portion is three or more times the height of the deformation portion. The total extension L2 in the second direction in the deformation portion is 1.5 or more times the width of the deformation portion. Further, L2 is not less than one time and not more than three times L1.

Further, the pressing member of the present disclosure is a pressing member that abuts on the side surface of the target substrate placed on the base and presses and holds the target substrate along the first direction. The pressing member includes a deformation portion, a first fixing portion, and a second fixing portion. The deformation portion has a first side surface abutting on the target substrate, and a second side surface opposite to the first side surface, and has elasticity in the first direction. The first fixing portion and the second fixing portion are spaced apart in a second direction orthogonal to the first direction, and are respectively connected to the deformation portions. The deformation portion has a plurality of first regions along the first direction and a plurality of second regions along the second direction. The deformation portion is bent at a position where the first area and the second area intersect. The deformation portion further includes a first slit to an eighth slit on the other side of a center line passing the center along the first direction. The first slit is opened at the second side, extends in a third direction opposite to the first direction, and then bends and extends away from the center line. The second slit is opened to the first side, extends in the first direction, and then bends and extends closer to the center line near the second side than the first slit. The third slit is open toward the second side at a position farther from the center line than the second slit, and has a portion extending in the third direction. The fourth slit is open toward the first side at a position farther from the center line than the third slit, and has a portion extending in the first direction. Further, the fifth slit to the eighth slit are located in line symmetry with the first slit to the fourth slit with respect to the center line on the other side of the center line as a boundary.

Furthermore, the pressing member of the present disclosure is a pressing member that abuts on the side surface of the target substrate placed on the base, and presses and holds the target substrate in the first direction. The pressing member includes a deformation portion, a first fixing portion, and a second fixing portion. The deformation portion has a first side surface abutting on the target substrate, and a second side surface opposite to the first side surface, and has elasticity in the first direction. The first fixing portion and the second fixing portion are spaced apart in a second direction orthogonal to the first direction, and are respectively connected to the deformation portions. The deformation portion includes first to eighteenth parts bordering on a center line passing the center along the first direction. The first portion comprises the first side. The second portion extends from the first portion in the first direction. The third portion extends from the second portion in a direction approaching the center line. The fourth portion extends from the third portion in the first direction. The fifth portion extends from the fourth portion in a direction away from the centerline. The sixth portion extends from the fifth portion in a third direction opposite to the first direction. A seventh portion extends from the sixth portion in a direction away from the centerline. The eighth portion extends from the seventh portion in the first direction. The ninth portion extends from the eighth portion in a direction away from the center line. The tenth to eighteenth portions are located in line symmetry with the first to ninth portions with respect to the center line on the other side of the center line as a boundary. The deformation portion further includes a grip portion extending in the first direction from the first portion and the tenth portion between the fourth portion and the thirteenth portion.

The substrate holder of the present disclosure includes the base having a substrate contact portion, and any one of the above-described pressing members located on the base.

(A) is a top view which shows an example of embodiment of the press member of this indication, (b) is the side view seen from the arrow A direction in (a). It is an explanatory view of each part of a pressing member of this indication. (A) is a top view which shows an example of embodiment of the board | substrate holder of this indication, (b) is the side view seen from the arrow B direction in (a). It is a stress analysis result of the press member of this indication. It is explanatory drawing of the dimension of the press member of this indication. It is a top view of the press member of a comparative example.

Hereinafter, embodiments of the pressing member and the substrate holder of the present disclosure will be described.

FIG. 1 is a plan view showing an example of the embodiment of the pressing member of the present disclosure, and FIG. 1 (b) is a side view seen from the direction of arrow A in (a). FIG. 2A is an explanatory view for explaining the first slit to the eighth slit, and FIG. 2B is an explanatory view for explaining the first portion to the eighteenth portion. FIG. 3 is a plan view showing an example of the embodiment of the substrate holder of the present disclosure, and FIG. 3 (b) is a side view seen from the arrow B direction in (a). Moreover, FIG. 5 is explanatory drawing of the dimension of the press member of this indication.

The pressing member 1 of the present disclosure is used to press and hold a small diameter substrate (a long chain line in FIG. 3) on a base 11 designed for a large diameter substrate. The pressing member 1 is also called a leaf spring. The substrate holder 10 of the present disclosure includes a base 11, a substrate contact portion 12, and a pressing member 1, as shown in FIG. The base 11 is for mounting a substrate. The substrate contact portion 12 is for contacting the side surface of the substrate to position the substrate. The pressing member 1 is located on the base 11. In addition, in FIG. 3, although the thing of pin shape is shown as the board | substrate contact part 12, it is not limited to a pin shape, It protruded from the inner surface itself or the inner surface in the recessed part with which the base 11 is provided. It may be a protrusion or the like.

The pressing member 1 includes a deformation portion 6 and two fixing portions 5. The deformation portion 6 has an abutment surface 6d that abuts on the substrate, and has elasticity in a first direction (a direction from the bottom to the top in FIG. 1A). The two fixing portions 5 are separated from each other in a second direction (left and right direction in FIG. 1A) orthogonal to the first direction, and are connected to the deformation portion 6 respectively.

The deformation portion 6 has a plurality of first regions 6a along the first direction and a plurality of second regions 6b along the second direction. In the deformation portion 6, the position at which the first area 6a and the second area 6b intersect is bent. The total length L1 of the deformation portion 6 in the first direction 6a in the deformation portion 6 is three or more times the height of the deformation portion 6 (H in FIG. 5), and the deformation portion 6 in the pressing member 1 of the present disclosure The total extension L2 in the second direction in the above is 1.5 times or more of the width (W in FIG. 5) of the deformation portion 6, and L2 is 1 or more and 3 times or less of L1.

The total extension L1 in the first direction of the deformation portion 6 and the total extension L2 in the second direction are respectively the first direction of the center line 6c of the deformation portion 6 when the pressing member 1 as shown in FIG. , And a total extension of the second direction. In FIG. 1, in the center line 6 c, the first region is indicated by a long chain line, and the second region is indicated by a dotted line. The total extension L1 in the first direction is the sum of the lengths of the long chain lines, and the total extension L2 in the second direction is the sum of the lengths of the dotted lines.

Also, “along the first direction” means extending at an angle of less than 45 ° with respect to a center line passing the center of the deformation portion 6 along the first direction. Also, “along the second direction” means extending at an angle of 45 ° or more with respect to the center line.

The origin of the lengths of the first region 6a and the second region 6b is the intersection of the center line 6c of the first region 6a and the center line 6c of the second region 6b, and this intersection is a bent portion To be present.

When the outline of the first area 6a has a curve in plan view, the length may be determined from an imaginary line connecting the center of the width at the start point of one first area 6a and the center of the width at the end point. . The same applies to the second region 6b.

The pressing member 1 also includes a deformation portion 6, a first fixing portion 5a, and a second fixing portion 5b. The deformation portion 6 has a first side surface (contact surface) 6 d and a second side surface 6 e opposite to the first side surface 6 d, and has elasticity in the first direction. The first fixing portion 5 a and the second fixing portion 5 b are separated from each other in a second direction orthogonal to the first direction, and are connected to the deformation portion 6 respectively.

The deformation portion 6 includes a first slit 8a, a second slit 8b, a third slit 8c, and a fourth slit 8d. The first slit 8a is opened in the second side face 6e with a center line passing the center along the first direction, and opens in the second side 6e and extends in a third direction opposite to the first direction. It bends in the direction away and extends. The second slit 8b is opened on the side of the first side face 6d, extends in the first direction, and then bends and extends closer to the center line near the second side face 6e than the first slit 8a. The third slit 8c is open toward the second side face 6e at a position farther from the center line than the second slit 8b, and has a portion extending in the third direction. The fourth slit 8d is open on the side of the first side face 6d at a position farther from the center line than the third slit 8c, and has a portion extending in the first direction.

Further, the deformation portion 6 is located fifth line 8e, sixth line 8f and seventh line 8g in line symmetry with the first slit 8a to the fourth slit 8d with respect to the center line on the other side of the center line. , 8th slit 8h.

Note that extending in the first and third directions means that an imaginary line connecting the center of the width of the opening of the slit 8 and the center of the width of the bottom is less than 45 ° with respect to the center line Say Moreover, although the example which 4th slit 8d is in contact with the 1st fixing | fixed part 5a is shown in FIG. 1a, it does not restrict to this, The other site | part between the 4th slit 8d and the 1st fixing | fixed part 5a It may have the

Further, on the left side in FIG. 1A which is one side of the center line, the direction approaching the center line can be reworded as the direction toward the second fixed portion 5 b, and the direction away from the center line is the first It can be reworded as the direction toward the fixed part 5a.

Further, the deformation portion 6 includes a first portion 9a, a second portion 9b, a third portion 9c, a fourth portion 9d, a fifth portion 9e, a sixth portion 9f, a seventh portion 9g, and a sixth portion. An eighth portion 9h and a ninth portion 9i are provided. The first portion 9a includes a first side surface 6d on the other side of the center line. The second portion 9b extends in the first direction from the first portion 9a. The third portion 9c extends from the second portion 9b in a direction approaching the center line. The fourth portion 9d extends in the first direction from the third portion 9c. The fifth portion 9 e extends away from the center line from the fourth portion 9 d. The sixth portion 9 f extends from the fifth portion 9 e in a third direction opposite to the first direction. The seventh portion 9g extends away from the central line from the sixth portion 9f. The eighth portion 9h extends in the first direction from the seventh portion 9g. The ninth portion 9i extends away from the central line from the eighth portion 9h.

The deformation portion 6 is a tenth portion 9j, an eleventh portion 9k, a twelfth portion 91, and a tenth portion 9j, which are located in line symmetry with the first portion 9a to the ninth portion 9i with respect to the centerline on the other side of the centerline. And 13th part 9m, 14th part 9n, 15th part 9o, 16th part 9p, 17th part 9q, 18th part 9r.

The deformation portion 6 further includes a gripping portion 7 extending in the first direction from the first portion 9a and the tenth portion 9j between the fourth portion 9d and the thirteenth portion 9m.

By satisfying the above-described configuration, the pressing member 1 of the present disclosure has a small change in holding force due to dimensional variations of the substrate. In other words, the pressing member 1 of the present disclosure has a sufficiently large holding force even with a small amount of deformation, and the holding force is not too large even with a large amount of deformation. In addition, since the substrate holder of the present disclosure includes the pressing member in which the change in holding power due to the dimensional variation of the substrate is small, the processing yield and the processing accuracy are improved.

The thickness of a substrate used in a semiconductor manufacturing apparatus or a semiconductor inspection apparatus is generally 1 mm or less. If the thickness of the pressing member 1 is 1 mm or less, the thickness of the substrate holder 10 can be made small and compact. In particular, when the substrate holder 10 is a substrate holder 10 for holding a small diameter substrate on a suction stand of a device designed for a large diameter substrate, the maximum thickness of the substrate holder 10 (the thickness of the pressing member 1 or The maximum value of the sum of the thickness of the substrate contact portion 12 and the thickness of the substrate mounting surface of the substrate holder 10 is preferably equal to or less than the maximum thickness of the large diameter substrate mountable on the device design. The thickness of is preferably 0.5 mm or less.

When the deformation portion 6 is deformed, the portions constituting the first region 6a and the second region 6b are respectively deformed, and the bent portion where the first region 6a and the second region 6b intersect is in the case of deformation. It becomes a support point for The deformation portion 6 is axisymmetrical along the center line, and when the first region 6a and the second region 6b are respectively connected substantially perpendicularly, the moment acting on the support point is stabilized, and the deformation of the adjacent portion is Since the influence on the pressure is reduced, the deformation of the pressing member 1 is stabilized.

When the substrate holder 10 is used in a semiconductor manufacturing apparatus, if the material of the pressing member 1 is metal, metal contamination of the substrate is concerned. Therefore, the material of the pressing member 1 is preferably resin. In particular, polycarbonate resins are suitable also from the viewpoint of strength and elastic modulus.

When holding the substrate by the substrate holder 10 as shown in FIG. 3, deformation at the contact surface 6d of the pressing member 1 when holding the smallest substrate within the tolerance of the SEMI standard and when holding the largest substrate The difference in amount is determined by the tolerance of the outer diameter and the tolerance of the orientation flat, 1.33 mm for a 2 inch substrate, 2.26 mm for a 3 inch substrate, 1.85 mm for a 4 inch substrate, 1.89 mm for a 5 inch substrate, It is 1.26 mm with a 6 inch substrate. The largest deformation amount difference required for the pressing member 1 is 2.26 mm of the 3-inch substrate. When the amount of deformation of the pressing member 1 when holding the smallest substrate within the tolerance in the substrate holder 10 is 0.5 mm, the amount of deformation of the pressing member 1 is between 0.5 mm and 2.8 mm. If the member 1 has an appropriate holding power, the pressing member 1 and the substrate are used even if the sizes of the substrates vary within tolerances in all the substrate holders 10 from the substrate for 2 inches to the substrate for 6 inches. The holder 10 can hold the substrate with a suitable holding force.

In addition, the degree of stress concentration (the ratio of the stress value at the stress concentration point to the sum of the stress values at a plurality of analysis points) at the point (stress concentration point) where the largest stress is concentrated at the time of deformation is correlated with the holding force. When the degree of stress concentration is small, the increase in the holding power against deformation tends to be remarkable, and conversely, when the degree of stress concentration is high, the increase in the holding power against deformation tends to be small. When the degree of stress concentration falls within a predetermined range, the pressing member 1 can have an appropriate holding force with either a small amount of deformation or a large amount of deformation. From the analysis result to be described later, the stress concentration portion of the pressing member 1 is a portion near the seventh portion 9g on the third slit 8c side of the eighth portion 9h.

Further, when the sectional second moment of the second region 6b is I, and the cross-sectional area of the bending region of the first region 6a and the second region 6b is A, (L2 ^ 3 / I) / ((L1 + L2) / A The value of) has a correlation with the holding power of the pressing member 1 and may satisfy the following equation.
1700 <(L2 ^ 3 / I) / ((L1 + L2) / A) <2000

In the above equation, (L2 ^ 3 / I) corresponds to the deflection of the second region 6b, and ((L1 + L2) / A) corresponds to the deformation of the first region 6a. When the value of (L 2 3 3 / I) / ((L 1 + L 2) / A) is more than 1700 and less than 2000, suitable holding power can be obtained with either a small amount of deformation or a large amount of deformation. The cross section of the bending region is a cross section when the pressing member 1 is cut along the dotted lines shown in FIG. 2B, and the cross sectional area A of the bending portion where the first region 6a and the second region 6b intersect is plural Of the cross-sectional area of the inflection of the

FIG. 5 is an explanatory view of the dimensions of the pressing member. As shown in Table 1, a total of 18 types (sample Nos. 1 to 18) of pressing members 1 in which the dimensions of H, W1, and W2 in FIG. 5 were changed were produced as an example. Sample No. The thickness 1 to 16 is 0.5 mm, the height is 6.5 to 9.0 mm, the width is 44 mm, and the width W of the deformed portion is 34 mm. Sample No. A shape 17 shown in FIG. 6 has a thickness of 0.5 mm, a height of 6.5 mm, a width of 34 mm, and a width W of the deformed portion of 24 mm. Sample No. Sample No. 18 is a sample no. The point different from 1 is that the third slit 8c, the fourth slit 8d, the seventh slit 8g, and the eighth slit 8h are not provided.

Sample No. 1 to 16 are all L2 / W ≧ 1.5, L1 / H33, and 1 ≦ L1 / L233. Sample No. The points 17 and 18 satisfy the condition of L2 / W 試料 1.5. Sample Nos. 1 to 16 are the same as Example 1 except that L1 / H <3 and L1 / L2> 3 are points. It differs from 1 to 16.

In addition, assuming that the sectional second moment of the second region is I, and the cross-sectional area of the bending portion where the first region and the second region intersect is A, (L2 ^ 3 / I) / ((L1 + L2) / A) The values are shown in Table 1.

In addition, the holding force was examined when the amount of deformation of each sample was 0.5 mm and when the amount of deformation was 2.8 mm. The results are shown in Table 1. The evaluation of retention is as follows: 1: too small and high possibility of dropping of substrate, 2: slightly small possibility of dropping of substrate, 3: favorable, 4: slightly large possibility of breakage or dropping of substrate, 5 : There were 5 stages, which are too large and there is a high possibility of substrate breakage or detachment.

Also, using Siemens' finite element analysis software NX, version 11, sample no. Spring constants and stress distributions of 1 to 3, 6, 8, 9, 14 to 16 were analyzed. Sample No. 1 when holding power is 1N. The von Mises stress distribution of 1 is shown in FIG. In FIG. 4, the magnitude of the stress is represented by the color density. The place where the stress is the largest is the place closer to the seventh portion 9g (the place 2 in FIG. 4) on the third slit 8c side of the eighth portion 9h. The ratio of the stress value at point 2 to the sum of the stress values at points 1 to 7 is taken as a stress concentration and is shown in Table 1. When the degree of stress concentration is 24.2 or less, the holding power at a deformation of 2.8 mm is too large, and when it is 25.4 or more, the holding power at a deformation of 0.5 mm is insufficient.

When the amount of deformation is 0.5 mm, sample no. Samples Nos. 17 and 18 had too low holding power. 1 to 16 were excellent in holding power. In particular, sample no. The holding power was suitable for 1-13. When the deformation amount is 2.8 mm, sample No. Sample No. 17 had a large holding power. 1 to 16 were excellent in holding power. In particular, sample no. 5, 7 to 12 and 14 were suitable for holding power. Sample No. It was found that No. 5 and No. 7 to 12 can have appropriate holding power even with a small amount of deformation or a large amount of deformation.

1: Pressing member (leaf spring)
5: fixed portion 5a: first fixed portion 5b: second fixed portion 6: deformed portion 6a: first region 6b: second region 6c: central line 6d: contact surface (first side surface)
6e: second side surface 7: grip 8: slit 8a: first slit 8a: first slit 8b: second slit 8c: third slit 8d: fourth slit 8e: fifth slit 8f: sixth slit 8g: sixth slit Seventh slit 8h: eighth slit 9a: first portion 9b: second portion 9c: third portion 9d: fourth portion 9e: fifth portion 9f: sixth portion 9g: seventh portion 9h: eighth portion 9i: eighth portion 9 parts 9j: 10th part 9k: 11th part 9l: 12th part 9m: 13th part 9n: 14th part 9o: 15th part 9p: 16th part 9q: 17th part 9r: 18th part 10: substrate Holder 11: base 12: substrate contact portion

Claims

A pressing member that contacts a side surface of a target substrate placed on a base and presses and holds the target substrate along a first direction,
A deformed portion having an abutting surface that abuts on the target substrate, and having elasticity in the first direction;
And two fixed parts separated from each other in a second direction orthogonal to the first direction and connected to the deformation parts,
The deformation unit is
A plurality of first regions along the first direction;
And a plurality of second regions along the second direction,
The position at which the first area and the second area intersect is curved,
The total extension L1 in the first direction in the deformation portion is three or more times the height of the deformation portion,
The total extension L2 in the second direction in the deformed portion is 1.5 times or more the width of the deformed portion,
The pressing member, wherein L2 is at least 1 time and at most 3 times L1.
A pressing member that contacts a side surface of a target substrate placed on a base and presses and holds the target substrate along a first direction,
A deformation portion having a first side surface in contact with the target substrate and a second side surface facing the first side surface and having elasticity in the first direction;
And a first fixing portion and a second fixing portion that are separated from each other in a second direction orthogonal to the first direction, and are connected to the deformation portions, respectively.
The deformation unit is
A plurality of first regions along the first direction;
And a plurality of second regions along the second direction,
The position at which the first area and the second area intersect is curved,
Furthermore, the deformation unit is
On the other side of a center line passing the center along the first direction,
A first slit that opens in the second side surface, extends in a third direction opposite to the first direction, and then bends and extends in a direction away from the center line;
A second slit that is open to the first side and extends in the first direction, and then bends in a direction closer to the center line near the second side than the first slit;
A third slit having a portion that extends from the second slit to the second side at a position away from the center line and extends in the third direction;
And a fourth slit having a portion extending in the first direction and opening at a position away from the center line from the third slit and facing the first side,
On the other side of the center line,
A pressing member, comprising: a fifth slit to an eighth slit positioned in line symmetry with the first slit to the fourth slit with respect to the center line.
A pressing member that contacts a side surface of a target substrate placed on a base and presses and holds the target substrate along a first direction,
A deformation portion having a first side surface in contact with the target substrate and a second side surface facing the first side surface and having elasticity in the first direction;
And a first fixing portion and a second fixing portion that are separated from each other in a second direction orthogonal to the first direction, and are connected to the deformation portions, respectively.
The deformation unit is
On the other side of a center line passing the center along the first direction,
A first portion comprising the first side;
A second portion extending from the first portion in the first direction;
A third portion extending from the second portion toward the center line;
A fourth portion extending from the third portion in the first direction;
A fifth portion extending away from the centerline from the fourth portion;
A sixth portion extending from the fifth portion in a third direction opposite to the first direction;
A seventh portion extending away from the centerline from the sixth portion;
An eighth portion extending from the seventh portion in the first direction;
And a ninth portion extending away from the central line from the eighth portion,
On the other side of the center line,
And a tenth part to a eighteenth part located in line symmetry with the first part to the ninth part with respect to the center line,
Furthermore, the deformation unit is
A pressing member comprising a grip portion extending in the first direction from the first portion and the tenth portion between the fourth portion and the thirteenth portion.
Assuming that I is a cross-sectional secondary moment of the second region, and A is a cross-sectional area of a bent portion where the first region and the second region intersect with each other,
1700 <(L2 ^ 3 / I) / ((L1 + L2) / A) <2000
The pressing member according to claim 1.
The base having a substrate contact portion;
A substrate holder comprising the pressing member according to any one of claims 1 to 4 located on the base.