WO2019114583A1 - 一种基于交变电场的绝对式时栅角位移传感器 - Google Patents
一种基于交变电场的绝对式时栅角位移传感器 Download PDFInfo
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- WO2019114583A1 WO2019114583A1 PCT/CN2018/119280 CN2018119280W WO2019114583A1 WO 2019114583 A1 WO2019114583 A1 WO 2019114583A1 CN 2018119280 W CN2018119280 W CN 2018119280W WO 2019114583 A1 WO2019114583 A1 WO 2019114583A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
- G01D5/2053—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable non-ferromagnetic conductive element
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
- G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders
Definitions
- the cloth composition wherein the 4n 1 +1 fan annular pole pieces are connected into a group to form an A excitation phase, and the 4n 1 + 2 fan annular pole pieces are connected into a group to form a B excitation phase, the 4th 1 + 3 fan
- the annular pole pieces are connected in a group to form a C excitation phase, and the 4n 1 + 4 fan annular pole pieces are connected in a group to form a D excitation phase
- n 1 sequentially takes all integers from 0 to M 1 -1
- M 1 represents an excitation electrode. The number of poles.
- the 4n 4 + 4 fan annular pole pieces II are connected in a group to form the D 2 reflection group, n 4 sequentially takes all integers from 0 to M 4 -1, and M 4 represents the number of opposite poles of the reflective electrode II;
- a 2 The reflection group is connected to the A sensing group, the B 2 reflection group is connected to the B induction group, the C 2 reflection group is connected to the C induction group, and the D 2 reflection group is connected to the D induction group.
- the receiving electrode I is composed of a circle of the same blade-shaped pole piece I arranged in the circumferential direction with equal arc lengths, the radial height of the blade-shaped pole piece I being smaller than the radial height of the fan-shaped pole piece I, the fan
- the receiving electrode II is composed of a circle of the same blade-shaped pole piece II which are equally spaced in the circumferential direction, and the radial height of the blade-shaped pole piece II is smaller than the radial height of the fan-shaped pole piece II, the fan
- the four-way traveling wave signal induced by the sensing electrode is used as the excitation signal of the secondary coupling modulation, and the excitation signal of the secondary coupling modulation is reflected back to the receiving electrode I, II through the reflective electrode I, II, and the receiving electrode I, II
- the output of the traveling wave signal, the rotor base body does not need to lead the signal output line, and the application range is wider.
- the wave signal is processed by the phase difference after the phase to obtain the coarse measured polar positioning value; the coarse measuring position and the fine measuring are both the first and second fine measuring sinusoidal traveling wave signals, and the combination of "rough measurement + fine measurement"
- the method not only realizes the absolute angular displacement measurement, but also reduces the signal difference, thereby ensuring the measurement accuracy.
- the receiving electrodes I and II adopt a symmetrical differential structure, which improves the stability of measurement, suppresses common mode interference, enhances signal amplitude, and is more industrially adaptable.
- FIG. 1 is a schematic view of an electrode on a stator base and an electrode on a rotor base in the present invention.
- Figure 4 is a schematic view of the lead of the rotor base of the present invention.
- FIG. 5 is a block diagram showing the principle of signal processing of the present invention.
- An absolute time-gear angular displacement sensor based on an alternating electric field as shown in FIGS. 1 to 4 includes a stator base 1 and a rotor base 2 mounted coaxially with the stator base 1, a lower surface of the rotor base 2 and an upper surface of the stator base 1.
- the pair is parallel and has a gap of 0.5 mm.
- the stator base 1 and the rotor base 2 are made of ceramic as a base material.
- the sensing electrode 2-1 is composed of a circle of identical double cosine-shaped pole pieces arranged at equal intervals in the circumferential direction, and the central angle corresponding to the interval (ie, the central angle of the interval between two adjacent double cosine-shaped pole pieces) is 4.5.
- each double cosine pole piece has a radial height of 3.4mm and a corresponding central angle of 18°; wherein the 4n 2 +1 double cosine pole piece in the clockwise direction passes through the first induction
- the signal connection lines are connected into a group to form an A-sensing group, and the 4n 2 + 2 double cosine-shaped pole pieces are connected into a group through a second sensing signal connection line to form a B-induction group, and
- the B 2 reflection group is connected to the B induction group through the signal lead, and the 4n 4 + 3 fan annular pole piece II is connected into a group through the seventh reflection signal connection line to form a C 2 reflection group, and the C 2 reflection group passes the signal lead induction and group C is connected to the first sector number + 4n 4 ii annular pole pieces through the eighth root reflex signal cable connected to Group, consisting of D 2 group reflection, reflection groups D 2 and D through a signal lead connected to sensor group, n 4 sequentially takes all integer of 0 to 2.
- Second line wave signal The first way of measuring the sinusoidal traveling wave signal U o1 is synthesized by the subtraction circuit:
- the first sinusoidal traveling wave signal U o1 (which may also be the second sine traveling wave signal U o2 ) and the same-frequency reference sinusoidal signal U r with a phase fixed are formed into a square wave by the shaping circuit and then sent to the FPGA.
- the phase ratio is compared, and the phase difference after the phase is represented by the number of interpolated high-frequency clock pulses, and is transformed to obtain the refined angular displacement value; the first road sine wave signal U o1 and the first
- the two-way fine-sampling sinusoidal traveling wave signal U o2 is formed into a square wave by the shaping circuit and then sent to the FPGA signal processing system for phase comparison, the phase difference after the phase ratio and the same-frequency reference signal U which is formed by the phase of the square wave.
- the r then performs the phase comparison, the phase difference after the phase is represented by the number of interpolated high frequency clock pulses, and is transformed to obtain the coarse measured polar positioning value, and the FPGA signal processing system will accurately measure the angular displacement value and the coarse measurement pair.
- the polar positioning values are combined to obtain an absolute angular displacement value (see Figure 5).
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
Claims (5)
- 一种基于交变电场的绝对式时栅角位移传感器,包括定子基体(1)和与定子基体(1)同轴安装的转子基体(2),转子基体下表面与定子基体上表面正对平行,并留有间隙,转子基体下表面设有感应电极(2-1),定子基体上表面设有与感应电极(2-1)正对的激励电极(1-1),所述激励电极(1-1)由一圈径向高度相同、圆心角相等的扇环形极片沿圆周方向等间隔排布组成,其中,第4n 1+1号扇环形极片连成一组,组成A激励相,第4n 1+2号扇环形极片连成一组,组成B激励相,第4n 1+3号扇环形极片连成一组,组成C激励相,第4n 1+4号扇环形极片连成一组,组成D激励相,n 1依次取0至M 1-1的所有整数,M 1表示激励电极的对极数;其特征是:所述定子基体上表面设有差动式的接收电极Ⅰ(1-2)和差动式的接收电极Ⅱ(1-3),接收电极Ⅰ(1-2)位于激励电极(1-1)的外侧,接收电极Ⅱ(1-3)位于激励电极的内侧,所述转子基体下表面设有与接收电极Ⅰ正对的反射电极Ⅰ(2-2)和与接收电极Ⅱ正对的反射电极Ⅱ(2-3);所述感应电极(2-1)由一圈相同的双余弦形极片沿圆周方向等间隔排布组成,该双余弦形极片的径向高度小于所述扇环形极片的径向高度,其中,第4n 2+1号双余弦形极片连成一组,组成A感应组,第4n 2+2号双余弦形极片连成一组,组成B感应组,第4n 2+3号双余弦形极片连成一组,组成C感应组,第4n 2+4号双余弦形极片连成一组,组成D感应组,n 2依次取0至M 2-1的所有整数,M 2表示感应电极的对极数;所述反射电极Ⅰ(2-2)具有A 1反射组、B 1反射组、C 1反射组和D 1反射组,A 1、B 1、C 1、D 1反射组分别与对应的A、B、C、D感应组相连,所述反射电极Ⅱ(2-3)具有A 2反射组、B 2反射组、C 2反射组和D 2反射组,A 2、B 2、C 2、D 2反射组分别与对应的A、B、C、D感应组相连;测量时,转子基体与定子基体相对平行转动,对定子基体的A、B、C、D激励相分别施加相位依次相差90°的四路同频等幅正弦激励电压,接收电极Ⅰ上产生相位相差180°的同频等幅的第一、第二行波信号,接收电极Ⅱ上产生相位相差180°的同频等幅的第三、第四行波信号,第一行波信号与第二行波信号经减法电路合成第一路精测正弦行波信号,第三行波信号与第四行波信号经减法电路合成第二路精测正弦行波信号,第一路精测正弦行波信号或者第二路精测正弦行波信号经处理后得到精测角位移值,第一路精测正弦行波信号与第二路精测正弦行波信号比相后的相位差经处理后得到粗测对极定位值,将精测角位移值与粗测对极定位值相结合得到绝对角位移值。
- 根据权利要求1所述的基于交变电场的绝对式时栅角位移传感器,其特征是:所述感应电极(2-1)中的双余弦形极片沿圆周方向展开后的形状为两条幅值相等、相位相差180°的余弦曲线在[-π,π]区间围成的全封闭轴对称图形。
- 根据权利要求1所述的基于交变电场的绝对式时栅角位移传感器,其特征是:所述激励电极(1-1)中的相邻两个扇环形极片之间间隔的圆心角等于一个扇环形极片的圆心角。
- 根据权利要求1-3任一所述的基于交变电场的绝对式时栅角位移传感器,其特征是:所述反射电极Ⅰ(2-2)由一圈径向高度相同、圆心角相等的扇环形极片Ⅰ沿圆周方向等间隔排布组成,其中,第4n 3+1号扇环形极片Ⅰ连成一组,组成所述A 1反射组,第4n 3+2号扇环形极片Ⅰ连成一组,组成所述B 1反射组,第4n 3+3号扇环形极片Ⅰ连成一组,组成所述C 1反射组,第4n 3+4号扇环形极片Ⅰ连成一组,组成所述D 1反射组,n 3依次取0至M 3-1的所有整数,M 3表示反射电极Ⅰ的对极数;所述反射电极Ⅱ(2-3)由一圈径向高度相同、圆心角相等的扇环形极片Ⅱ沿圆周方向等间隔排布组成,其中,第4n 4+1号扇环形极片Ⅱ连成一组,组成所述A 2反射组,第4n 4+2号扇环形极片Ⅱ连成一组,组成所述B 2反射组,第4n 4+3号扇环形极片Ⅱ连成一组,组成所述C 2反射组,第4n 4+4号扇环形极片Ⅱ连成一组,组成所述D 2反射组,n 4依次取0至M 4-1的所有整数,M 4表示反射电极Ⅱ的对极数。
- 根据权利要求4所述的基于交变电场的绝对式时栅角位移传感器,其特征是:所述接收电极Ⅰ(1-2)由一圈相同的扇叶形极片Ⅰ沿圆周方向间隔相等的弧长排布组成,该扇叶形极片Ⅰ的径向高度小于扇环形极片Ⅰ的径向高度,该扇叶形极片Ⅰ的形状为[-π,0]区间的两条相同的余弦极坐标曲线段Ⅰ在起止点与同心的内外圆弧相交而围成的全封闭图形Ⅰ,所述的两条相同的余弦极坐标曲线段Ⅰ的起始点所夹的圆心角为α;其中,第2n 5+1号扇叶形极片Ⅰ连成一组,作为第一行波信号的输出电极,第2n 5+2号扇叶形极片Ⅰ连成一组,作为第二行波信号的输出电极,n 5依次取0至M 5-1的所有整数,M 5表示接收电极Ⅰ的对极数,M 5=M 3;所述接收电极Ⅱ(1-3)由一圈相同的扇叶形极片Ⅱ沿圆周方向间隔相等的弧长排布组 成,该扇叶形极片Ⅱ的径向高度小于扇环形极片Ⅱ的径向高度,该扇叶形极片Ⅱ的形状为[-π,0]区间的两条相同的余弦极坐标曲线段Ⅱ在起止点与同心的内外圆弧相交而围成的全封闭图形Ⅱ,所述的两条相同的余弦极坐标曲线段Ⅱ的起始点所夹的圆心角为β;其中,第2n 6+1号扇叶形极片Ⅱ连成一组,作为第三行波信号的输出电极,第2n 6+2号扇叶形极片Ⅱ连成一组,作为第四行波信号的输出电极,n 6依次取0至M 6-1的所有整数,M 6表示接收电极Ⅱ的对极数,M 6=M 4。
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CN113008129A (zh) * | 2019-12-19 | 2021-06-22 | 重庆理工大学 | 多圈绝对式时栅角位移传感器 |
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CN114061513A (zh) * | 2020-08-04 | 2022-02-18 | 通用技术集团国测时栅科技有限公司 | 基于纳米圆时栅的自标定方法 |
CN114061426A (zh) * | 2020-08-04 | 2022-02-18 | 通用技术集团国测时栅科技有限公司 | 离散型绝对式时栅角位移传感器 |
CN114061426B (zh) * | 2020-08-04 | 2024-03-19 | 通用技术集团国测时栅科技有限公司 | 离散型绝对式时栅角位移传感器 |
CN114061513B (zh) * | 2020-08-04 | 2024-03-19 | 通用技术集团国测时栅科技有限公司 | 基于纳米圆时栅的自标定方法 |
CN114018300A (zh) * | 2021-11-12 | 2022-02-08 | 德普数控(深圳)有限公司 | 一种基于正交三角函数双激励的编码器及其运行方法 |
CN114018300B (zh) * | 2021-11-12 | 2024-05-03 | 德普数控(深圳)有限公司 | 一种基于正交三角函数双激励的编码器及其运行方法 |
CN114777637A (zh) * | 2022-03-29 | 2022-07-22 | 重庆理工大学 | 一种双层正弦补偿式时栅角位移传感器 |
CN114777637B (zh) * | 2022-03-29 | 2023-06-09 | 重庆理工大学 | 一种双层正弦补偿式时栅角位移传感器 |
Also Published As
Publication number | Publication date |
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JP2020532746A (ja) | 2020-11-12 |
GB2579311B (en) | 2022-06-29 |
GB2579311A (en) | 2020-06-17 |
CN109211092B (zh) | 2019-06-21 |
EP3667229B1 (en) | 2021-09-01 |
EP3667229B8 (en) | 2021-10-06 |
JP6821288B2 (ja) | 2021-01-27 |
CN109211092A (zh) | 2019-01-15 |
EP3667229A1 (en) | 2020-06-17 |
EP3667229A4 (en) | 2020-10-28 |
GB202002131D0 (en) | 2020-04-01 |
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