WO2019114496A1 - X-ray streak camera imaging performance testing system and method - Google Patents

X-ray streak camera imaging performance testing system and method Download PDF

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WO2019114496A1
WO2019114496A1 PCT/CN2018/115897 CN2018115897W WO2019114496A1 WO 2019114496 A1 WO2019114496 A1 WO 2019114496A1 CN 2018115897 W CN2018115897 W CN 2018115897W WO 2019114496 A1 WO2019114496 A1 WO 2019114496A1
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stripe
camera
static
dynamic
stripe camera
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PCT/CN2018/115897
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French (fr)
Chinese (zh)
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顾礼
杨勤劳
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深圳大学
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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/30—Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from X-rays
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N17/00—Diagnosis, testing or measuring for television systems or their details
    • H04N17/002—Diagnosis, testing or measuring for television systems or their details for television cameras

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  • the invention relates to the field of X-ray stripe camera imaging performance testing, and more particularly to an X-ray stripe camera imaging performance testing system and method.
  • X-ray stripe camera is an important diagnostic instrument for obtaining continuous spatiotemporal change information of ultra-fast X-ray/ultraviolet radiation.
  • it is an indispensable diagnostic instrument for obtaining impulsive dynamics and implosion compression information in laser-driven inertial confinement fusion to obtain continuous spatiotemporal changes of plasma radiation.
  • Large-area X-ray stripe cameras can get more time, space, and spectrum diagnostic information. Due to the design of the electro-optical system and the electrode assembly, there is an inevitable aberration in the large-area X-ray stripe camera, and the camera imaging performance needs to be accurately calibrated and tested.
  • the modulation transfer function is the most objective method and standard for evaluating optical imaging systems such as lenses and cameras.
  • the error of the X-ray stripe camera MTF obtained by the simulation method and the actual system is that the emission impedance effect of the photocathode in the X-ray stripe camera, the screen manufacturing process, the panel information transmission and the detector sampling loss are not considered, and the spatial resolution theoretical value is universal. Greater than the experimental measurements, and the exact spatial resolution of the actual camera system is not accurately obtained.
  • the experimental test methods in the electron optical imaging system MTF are usually the knife edge method and the noise theory method. The knife edge method is difficult to obtain a sharp interface, and the resulting MTF is small.
  • the noise theory method obtains a large MTF, a slow decay, a long tail, and a large error in high spatial resolution.
  • the large-area X-ray stripe camera's field curvature and other aberrations cause the camera to have different spatial resolutions from different off-axis distances. Since it is difficult to make multiple sets of resolution patterns at the same position of the split cathode, the previous X-ray stripe camera uses a reticle type photocathode test, as shown in Fig. 1, only to obtain whether the imaging at the imaging point reaches the spatial resolution of the test. As shown in Fig. 2, the MTF, the limit spatial resolution, and the limit spatial resolution of the full imaging plane cannot be obtained.
  • the technical problem to be solved by the present invention is to solve the defects of the above prior art, and provide an X-ray stripe camera imaging performance testing system and method.
  • the technical solution adopted by the present invention to solve the technical problem is to construct an X-ray stripe camera static test system, comprising a stripe camera disposed in a vacuum chamber for receiving an ultraviolet light signal emitted by a light source, and an input end of the stripe camera Providing a differentiated plate type gold cathode for receiving the ultraviolet light signal;
  • a high voltage power supply connected to the stripe camera for providing a driving signal to the stripe camera, the high voltage power source being connected to the stripe camera through a voltage divider;
  • the output of the stripe camera is provided with a CCD camera for receiving an optical signal output from the screen of the stripe camera, the CCD camera being coupled to a computer and converting the optical signal to a digital signal for transmission to the computer.
  • the light source is an ultraviolet disk-shaped lamp
  • the differentiated plate type gold cathode includes a stainless steel base, a fused silica layer disposed on the stainless steel base, and a spacer aluminum film disposed on the fused silica layer, wherein the spacer aluminum film is a gold film.
  • the present invention also provides an X-ray stripe camera static test method, which is applied to the above X-ray stripe camera static test system, and includes the following steps:
  • the differentiation plate type gold cathode receives the ultraviolet light emitted by the ultraviolet disk lamp in a static test mode of the stripe camera, and the high voltage power supply output driving signal drives the stripe camera;
  • the CCD camera receives the optical signal output by the fluorescent screen of the stripe camera, converts the optical signal into a digital signal and transmits the signal to the computer to obtain a striped digital image;
  • the contrast of the static light and dark stripes obtained in the step S3 comprises: obtaining the contrast of the static light and dark stripes according to the formula (1);
  • the I max is the intensity of the static image bright fringes fringes
  • the I min is the intensity of the static image of the dark stripe of the stripes
  • the step S5 includes: obtaining a corresponding electronic diffusion spot radius ⁇ e at the distance from the formula (3) according to the modulation degree data at a plurality of off-axis distances;
  • the step S6 includes: according to the electron diffusion spot radius ⁇ e , the entire static spatial modulation transfer function at the off-axis distance of the camera is obtained by the formula (3).
  • the first preset value is 0.393%
  • the method further includes:
  • the static limit spatial resolution distribution of the full imaging region of the stripe camera in the static working mode is obtained by the static limit spatial resolution quadratic curve relationship and the camera static imaging region range.
  • the present invention also provides an X-ray stripe camera dynamic test system, comprising a stripe camera disposed in a vacuum chamber for receiving an ultraviolet light signal emitted by a laser, the input end of the stripe camera being provided for receiving the ultraviolet light Signalized plate-type gold cathode;
  • a high voltage power supply connected to the stripe camera for providing a driving signal to the stripe camera, the high voltage power source being connected to the stripe camera through a scanning circuit;
  • the output end of the stripe camera is provided with a CCD camera for receiving an optical signal output by the screen of the stripe camera, the CCD camera is connected to a computer, and converts the optical signal into a digital signal and transmits it to the computer;
  • a photosensor for receiving a control light signal emitted by the laser the photosensor being respectively connected to a scan circuit and an enhancer by a delay device, the enhancer being disposed between the stripe camera and the CCD camera.
  • the ultraviolet light signal is incident on the differentiation plate type gold cathode through an optical path adjusting device, and the optical path adjusting device includes a full mirror M1 and a half mirror M2, semi-reverse half lens M3, full mirror M4;
  • the differentiated plate type gold cathode includes a stainless steel base, a fused silica layer disposed on the stainless steel base, and a spacer aluminum film disposed on the fused silica layer, wherein the spacer aluminum film is a gold film.
  • the present invention also provides an X-ray stripe camera dynamic test method, which is applied to the above X-ray stripe camera dynamic test system, and includes the following steps:
  • the T1 the differentiation plate type gold cathode receives the ultraviolet light emitted by the laser in a dynamic test mode of the stripe camera, and the high voltage power source drives the stripe camera through a scan circuit output driving signal, wherein the scanning circuit emits the control light by the laser Signal control
  • a CCD camera receives an optical signal output by the screen of the stripe camera, converts the optical signal into a digital signal, and transmits the signal to the computer to obtain a striped digital image;
  • T4 Obtain a stripe intensity distribution of the stripe digital image, and sample a dynamic stripe image of different resolutions at different distances from the symmetry axis to obtain a contrast of dynamic light and dark stripes;
  • T5 obtaining modulation degree data at a plurality of off-axis distances according to a relationship between modulation degree and contrast
  • T7 Obtain a dynamic spatial modulation transfer function at the off-axis distance of the camera according to the electron diffusion spot radius
  • the contrast of the dynamic light and dark stripes obtained in the step T4 comprises: obtaining the contrast of the dynamic light and dark stripes according to the formula (4);
  • I max is the intensity of the bright stripe in the dynamic stripe image
  • I min is the intensity of the dark stripe in the dynamic stripe image
  • the step T6 includes: obtaining a corresponding electron diffusion spot radius ⁇ e at the distance from the formula (6) according to the modulation degree data at a plurality of off-axis distances;
  • the step T7 includes: obtaining a dynamic spatial modulation transfer function at the off-axis distance of the camera according to the electron diffusion spot radius ⁇ e and then by the formula (6).
  • the second preset value is 0.393%
  • the method further includes:
  • the dynamic limit spatial resolution distribution of the full imaging region of the stripe camera in the dynamic working mode is obtained by the dynamic limit spatial resolution quadratic curve relationship and the camera dynamic imaging region range.
  • An X-ray stripe camera imaging performance testing system and method embodying the present invention has the following beneficial effects: the present invention is based on an electro-optical MTF theory and a reticle type photocathode fabrication, on a large working area X-ray stripe camera, in a static In the two working modes of dynamic and dynamic, the spatial resolution of the stripe camera is measured, and the SMTF, DMTF and extreme spatial resolution of the stripe camera are calculated. This method can obtain the limit spatial resolution distribution of all imaging regions of the stripe camera by fitting the experimental measurement data, which is of great significance for realizing the quantitative, semi-quantitative measurement and "precision" diagnosis target of laser ICF.
  • FIG. 1 is a schematic diagram of a static spatial resolution test of a prior art X-ray stripe camera
  • FIG. 3 is a schematic structural view of a static test system for an X-ray stripe camera according to the present invention.
  • Figure 4 is a flow chart showing the production of a differentiated plate type gold cathode in the present invention.
  • FIG. 5 is a flow chart of a static test method for an X-ray stripe camera according to the present invention.
  • Figure 6 is a static test image of the stripe X-ray stripe camera of the present invention.
  • Figure 7 is a SMTF of different off-axis distances of the stripe X-ray stripe camera of the present invention.
  • Figure 8 is a diagram showing the relationship between the static limit spatial resolution and the off-axis distance of the stripe camera of the present invention.
  • Figure 9 is a full-screen static limit spatial resolution diagram of the stripe camera of the present invention.
  • FIG. 10 is a schematic structural view of a dynamic test system for an X-ray stripe camera according to the present invention.
  • FIG. 11 is a flow chart of a method for dynamically testing an X-ray stripe camera according to the present invention.
  • Figure 12 is a dynamic test image of the stripe X-ray stripe camera of the present invention.
  • Figure 13 is a DMTF of the stripe X-ray stripe camera of the present invention with different off-axis distances;
  • Figure 14 is a diagram showing the relationship between the dynamic limit spatial resolution and the off-axis distance of the stripe camera of the present invention.
  • Figure 15 is a full-screen dynamic limit spatial resolution map of the stripe camera of the present invention.
  • FIG. 1 is a schematic diagram of a static spatial resolution test of a prior art X-ray stripe camera.
  • the X-ray stripe camera static test system includes an X-ray stripe camera (hereinafter referred to as a stripe camera) disposed in a vacuum chamber for receiving an ultraviolet light signal emitted by a light source, and an input end of the stripe camera is provided for receiving an ultraviolet light signal.
  • a stripe camera X-ray stripe camera
  • the differentiated plate type gold cathode preferably, the X-ray stripe camera static test system of the present invention
  • the light source is an ultraviolet disk lamp.
  • Fig. 4 is a flow chart showing the production of a differentiated plate type gold cathode in the present invention.
  • the differentiated plate type gold cathode includes a stainless steel base, a fused silica layer disposed on the stainless steel base, and a spacer aluminum film disposed on the fused silica layer, and the spacer aluminum film is a gold film.
  • the test-specific differentiation plate type gold cathode is prepared by depositing a 100 nm conductive aluminum film on a quartz substrate, and using a specially prepared reticle to lithographically slit the reticle-type resolution pattern on the aluminum film. Finally, a 30 nm gold film was deposited as an electron emission layer.
  • the slit of the split cathode has a total length of 30 mm and a width of 0.1 mm; the left and right sides of the center are 20 lp/mm and 22 lp/mm resolution patterns, and the pattern resolution is reduced to the cathode edge at intervals of 4 lp/mm; except for the edge 10 lp/mm pattern length 4 mm In addition, the remaining patterns are 3 mm in length and 0.5 mm apart; and the lithography error of the resolution pattern is guaranteed to be in the range of 1 ⁇ m.
  • the spatial resolution of the split cathode test the influence of the directivity of the test source is eliminated, and the test result is objective.
  • Figure 5 is a flow chart of a static test method for an X-ray stripe camera of the present invention.
  • the X-ray stripe camera static test method is applied to the above X-ray stripe camera static test system, and includes the following steps:
  • the differentiation plate type gold cathode receives the ultraviolet light emitted by the ultraviolet disk lamp in the static test mode of the stripe camera, and the high voltage power supply output drive signal drives the stripe camera.
  • the CCD camera receives the optical signal output from the screen of the stripe camera, converts the optical signal into a digital signal and transmits it to a computer to obtain a striped digital image.
  • the contrast of the static light and dark stripes obtained in step S3 includes: obtaining the contrast of the static light and dark stripes according to formula (1);
  • I max is the intensity of the bright stripe in the static stripe image
  • f is the spatial frequency of the stripe pattern
  • I min is the intensity of the dark stripe in the static stripe image.
  • step S4 Obtain modulation degree data at a plurality of off-axis distances according to a relationship between modulation degree and contrast. Further, the relationship between the modulation degree and the contrast in step S4 is:
  • MTF(f) is the degree of modulation.
  • step S5 includes: obtaining an electron diffusion spot radius ⁇ e corresponding to the distance from the formula (3) according to the modulation degree data at the plurality of off-axis distances.
  • exp is an exponential function with a natural constant e as the base, and ⁇ is the pi.
  • step S6 Obtain an entire static spatial modulation transfer function SMTF (static modulation transfer function) at the off-axis distance of the camera according to the electron diffusion speckle radius. Further, step S6 includes: obtaining an entire static spatial modulation transfer function at the off-axis distance of the camera according to the electron diffusion spot radius ⁇ e and then by formula (3).
  • SMTF static modulation transfer function
  • a static limit spatial resolution at the imaging position of the stripe camera is obtained.
  • the static limit spatial resolution distribution of the full imaging region of the stripe camera in the static working mode is obtained from the static limit spatial resolution quadratic curve relationship and the camera static imaging region range.
  • FIG. 10 is a schematic structural view of a dynamic test system for an X-ray stripe camera according to the present invention.
  • the X-ray stripe camera dynamic test system includes a stripe camera disposed in the vacuum chamber for receiving an ultraviolet light signal emitted by the laser, and the input end of the stripe camera is provided with a differentiated plate type gold cathode for receiving the ultraviolet light signal;
  • a stripe camera connection a high voltage power supply for driving signals to the stripe camera, a high voltage power supply connected to the stripe camera through a scanning circuit;
  • a output of the stripe camera is provided with a CCD camera for receiving the light signal output from the screen of the stripe camera, and the CCD camera is connected to the computer And converting the optical signal into a digital signal and transmitting it to a computer;
  • a photoelectric sensor (PIN) for receiving a control light signal from the laser, the photoelectric sensor being respectively connected to the scanning circuit and the booster through a delay device, and the booster is disposed on the stripe camera Between the CCD camera and the camera.
  • the control optical signal is an optical signal having a wavelength of 800 nm.
  • the present invention provides an optical path adjusting device, and the ultraviolet light signal is incident on the differentiation plate type gold cathode through the optical path adjusting device, and the optical path is adjusted.
  • the device comprises a full-mirror M1, a half-reverse half lens M2, a half-reverse half-lens M3, and a full-mirror M4.
  • the full-reflection mirror M1 reflects the received ultraviolet light to the half-reverse half lens M2; the half-reverse half-lens M2 transmits the light.
  • the light is directed to the polarized plate type gold cathode, and the half-reverse half lens M2 directs the reflected light perpendicularly to the half-reverse half lens M3; the half-reverse half lens M3 directs the reflected light toward the half-reverse half lens M2, and the half-reverse half-lens M3 transmits the light vertically.
  • the differentiated plate type gold cathode includes a stainless steel base, a fused silica layer disposed on the stainless steel base, and a spacer aluminum film disposed on the fused silica layer, and the spacer aluminum film is a gold film.
  • the manufacturing process and parameters of the differentiated plate type gold cathode refer to the differentiated plate type gold cathode in the above X-ray stripe camera static test system, and will not be described herein.
  • FIG. 11 is a flow chart of a method for dynamically testing an X-ray stripe camera of the present invention.
  • the X-ray stripe camera dynamic test method is applied to the above X-ray stripe camera dynamic test system, and includes the following steps:
  • the T1, differentiated plate type gold cathode receives the ultraviolet light emitted by the laser in the dynamic test mode of the stripe camera, and the high voltage power source drives the stripe camera through the scan circuit output drive signal, wherein the scan circuit is controlled by the control light signal emitted by the laser.
  • the laser is a titanium gem femtosecond laser.
  • the ultraviolet light is ultraviolet light having a wavelength of 266 nm.
  • the T2, CCD camera receives the optical signal output from the screen of the stripe camera, converts the optical signal into a digital signal and transmits it to a computer to obtain a striped digital image.
  • the contrast of the dynamic light and dark stripes obtained in step T4 includes: according to the formula ( 4) Obtain the contrast of dynamic light and dark stripes;
  • CTF(f) is the contrast of light and dark stripes
  • f is the spatial frequency of the stripe pattern
  • I max is the intensity of the bright stripe in the dynamic stripe image
  • I min is the intensity of the dark stripe in the dynamic stripe image.
  • step T5 obtaining modulation degree data at a plurality of off-axis distances according to the relationship between the degree of modulation and the contrast. Further, the relationship between modulation degree and contrast in step T5 is:
  • MTF(f) is the degree of modulation.
  • step T6 includes: obtaining a corresponding electronic diffusion spot radius ⁇ e at the distance from formula (6) according to the modulation degree data at the plurality of off-axis distances;
  • exp is an exponential function with a natural constant e as the base, and ⁇ is the pi.
  • step T7 Obtain a dynamic modulation transfer function (DMTF) at the off-axis distance of the camera according to the electron diffusion speckle radius. Further, step T7 includes: obtaining a dynamic spatial modulation transfer function at the off-axis distance of the camera according to the electron diffusion spot radius ⁇ e and then by formula (6).
  • DMTF dynamic modulation transfer function
  • the dynamic limit spatial resolution at the imaging position of the stripe camera is obtained.
  • the quadratic curve relationship between the camera imaging off-axis distance and the dynamic limit spatial resolution is fitted by the dynamic limit spatial resolution at multiple off-axis distances of the stripe camera.
  • the dynamic limit spatial resolution distribution of the full imaging region of the fringe camera in the dynamic working mode is obtained by the dynamic limit spatial resolution quadratic curve relationship and the camera dynamic imaging region range.
  • the invention is based on the electron optical MTF theory and the reticle type photocathode fabrication.
  • the spatial resolution of the stripe camera is measured in the static and dynamic working modes, and the stripe camera SMTF, DMTF and Extreme spatial resolution.
  • This method can obtain the limit spatial resolution distribution of all imaging regions of the stripe camera by fitting the experimental measurement data, which is of great significance for realizing the quantitative, semi-quantitative measurement and "precision" diagnosis target of laser ICF.

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Abstract

The present invention relates to an X-ray streak camera imaging performance testing system and method. The present invention is manufactured based on electronic optical MTF theory and a reticle type photoelectric cathode, the spatial resolution of a streak camera is measured, and the SMTF, DMTF and extreme spatial resolution of the streak camera are calculated under two working modes of a static testing mode and a dynamic testing mode on a large-working area X-ray streak camera. By means of the method, the extreme spatial resolution distribution of all imaging regions of a streak camera can be obtained by fitting experimental measurement data, so as to provide important significance for realizing laser ICF quantitative and semi-quantitative measurement and "refinement" of a diagnosis target.

Description

一种X射线条纹相机成像性能测试系统及方法X-ray stripe camera imaging performance test system and method 技术领域Technical field
本发明涉及X射线条纹相机成像性能测试领域，更具体地说，涉及一种X射线条纹相机成像性能测试系统及方法。The invention relates to the field of X-ray stripe camera imaging performance testing, and more particularly to an X-ray stripe camera imaging performance testing system and method.
背景技术Background technique
X射线条纹相机是获取超快X射线/紫外光辐射连续时空变化信息的重要诊断仪器，X射线/紫外光超快现象的成像研究对自然科学、清洁能源、材料物理、光生物、光化学、超短激光技术、激光物理、高能物理等科学研究和技术领域具有重要作用。尤其是研究激光驱动惯性约束聚变中获得内爆动力学及内爆压缩信息，获取等离子辐射连续时空变化图像的不可或缺的诊断仪器。大工作面积的X射线条纹相机可以获得更多时间、空间、能谱诊断信息。由于电子光学系统的设计和电极装架存在误差，大工作面积的X射线条纹相机存在不可避免的像差，相机成像性能需要精确标定和测试。X-ray stripe camera is an important diagnostic instrument for obtaining continuous spatiotemporal change information of ultra-fast X-ray/ultraviolet radiation. Imaging research of X-ray/ultraviolet ultrafast phenomenon on natural science, clean energy, material physics, photobio, photochemistry, super Short-wave technology, laser physics, high-energy physics and other scientific research and technology fields play an important role. In particular, it is an indispensable diagnostic instrument for obtaining impulsive dynamics and implosion compression information in laser-driven inertial confinement fusion to obtain continuous spatiotemporal changes of plasma radiation. Large-area X-ray stripe cameras can get more time, space, and spectrum diagnostic information. Due to the design of the electro-optical system and the electrode assembly, there is an inevitable aberration in the large-area X-ray stripe camera, and the camera imaging performance needs to be accurately calibrated and tested.
空间调制传递函数(modulation transfer function，MTF)是最客观评价镜头、相机等光学成像系统的方法和标准。模拟方法获得的X射线条纹相机MTF与实际系统的误差在于未考虑X射线条纹相机中光电阴极的发射阻抗效应、荧光屏制作工艺、面板信息传输和探测器取样损失等因素，空间分辨率理论值普遍大于实验测量值，且并不能精确得到实际相机系统的极限空间分辨率。在电子光学成像系统MTF的实验测试方法通常为刀口法和噪声理论法。刀口法由于较难获得锐利的分界面，所得MTF偏小。噪声理论法获得MTF偏大，衰减慢、拖尾长，在高空间分辨率下误差较大。The modulation transfer function (MTF) is the most objective method and standard for evaluating optical imaging systems such as lenses and cameras. The error of the X-ray stripe camera MTF obtained by the simulation method and the actual system is that the emission impedance effect of the photocathode in the X-ray stripe camera, the screen manufacturing process, the panel information transmission and the detector sampling loss are not considered, and the spatial resolution theoretical value is universal. Greater than the experimental measurements, and the exact spatial resolution of the actual camera system is not accurately obtained. The experimental test methods in the electron optical imaging system MTF are usually the knife edge method and the noise theory method. The knife edge method is difficult to obtain a sharp interface, and the resulting MTF is small. The noise theory method obtains a large MTF, a slow decay, a long tail, and a large error in high spatial resolution.
大工作面积X射线条纹相机的场曲等像差导致的相机不同离轴距离空间分辨率不同。由于很难在分划阴极同一位置制作多组分辨率图案，因此之前X射线条纹相机使用分划板型光电阴极测试，如图1，只能得到该成像点处成像是否达到测试的空间分辨率；如图2，不能得到该处的MTF、极限空间分辨率 和全成像面的极限空间分辨率。The large-area X-ray stripe camera's field curvature and other aberrations cause the camera to have different spatial resolutions from different off-axis distances. Since it is difficult to make multiple sets of resolution patterns at the same position of the split cathode, the previous X-ray stripe camera uses a reticle type photocathode test, as shown in Fig. 1, only to obtain whether the imaging at the imaging point reaches the spatial resolution of the test. As shown in Fig. 2, the MTF, the limit spatial resolution, and the limit spatial resolution of the full imaging plane cannot be obtained.
发明内容Summary of the invention
本发明要解决的技术问题在于解决上述现有技术的存在的缺陷，提供一种X射线条纹相机成像性能测试系统及方法。The technical problem to be solved by the present invention is to solve the defects of the above prior art, and provide an X-ray stripe camera imaging performance testing system and method.
本发明解决其技术问题所采用的技术方案是：构造一种X射线条纹相机静态测试系统，包括设置在真空室内、用于接收光源发出的紫外光信号的条纹相机，所述条纹相机的输入端设置有用于接收所述紫外光信号的分化板型金阴极；The technical solution adopted by the present invention to solve the technical problem is to construct an X-ray stripe camera static test system, comprising a stripe camera disposed in a vacuum chamber for receiving an ultraviolet light signal emitted by a light source, and an input end of the stripe camera Providing a differentiated plate type gold cathode for receiving the ultraviolet light signal;
与所述条纹相机连接、用于为所述条纹相机提供驱动信号的高压电源，所述高压电源通过分压器连接所述条纹相机；a high voltage power supply connected to the stripe camera for providing a driving signal to the stripe camera, the high voltage power source being connected to the stripe camera through a voltage divider;
所述条纹相机的输出端设置有用于接收所述条纹相机的荧光屏输出的光信号的CCD摄像机，所述CCD摄像机连接计算机，并将光信号转换为数字信号并传输至所述计算机。The output of the stripe camera is provided with a CCD camera for receiving an optical signal output from the screen of the stripe camera, the CCD camera being coupled to a computer and converting the optical signal to a digital signal for transmission to the computer.
优选地，本发明所述的X射线条纹相机静态测试系统，所述光源为紫外盘形灯；Preferably, in the X-ray stripe camera static test system of the present invention, the light source is an ultraviolet disk-shaped lamp;
所述分化板型金阴极包括不锈钢底座、设置在所述不锈钢底座上的熔石英层、以及设置在所述熔石英层上的间隔铝膜，所述间隔铝膜上为金膜。The differentiated plate type gold cathode includes a stainless steel base, a fused silica layer disposed on the stainless steel base, and a spacer aluminum film disposed on the fused silica layer, wherein the spacer aluminum film is a gold film.
另，本发明还提供一种X射线条纹相机静态测试方法，应用于上述的X射线条纹相机静态测试系统，包括下述步骤：In addition, the present invention also provides an X-ray stripe camera static test method, which is applied to the above X-ray stripe camera static test system, and includes the following steps:
S1、分化板型金阴极在条纹相机的静态测试模式下接收紫外盘形灯发射的紫外光，高压电源输出驱动信号驱动所述条纹相机；S1, the differentiation plate type gold cathode receives the ultraviolet light emitted by the ultraviolet disk lamp in a static test mode of the stripe camera, and the high voltage power supply output driving signal drives the stripe camera;
S2、CCD摄像机接收所述条纹相机的荧光屏输出的光信号，将所述光信号转换为数字信号并传输至所述计算机，得到条纹数字图像；S2, the CCD camera receives the optical signal output by the fluorescent screen of the stripe camera, converts the optical signal into a digital signal and transmits the signal to the computer to obtain a striped digital image;
S3、获取所述条纹数字图像的条纹强度分布，在离对称中心不同距离处取样不同分辨率的静态条纹像，得到静态明暗条纹的对比度；S3. Acquire a stripe intensity distribution of the stripe digital image, and sample static fringe images of different resolutions at different distances from the center of symmetry to obtain a contrast of static light and dark stripes;
S4、根据调制度和对比度的关系得到多个离轴距离处的调制度数据；S4. Obtain modulation degree data at a plurality of off-axis distances according to a relationship between modulation degree and contrast;
S5、根据多个离轴距离处的所述调制度数据得到该距离处对应的电子弥 散斑半径；S5. Obtain a corresponding electron diffusion spot radius at the distance according to the modulation degree data at a plurality of off-axis distances;
S6、根据所述电子弥散斑半径得到相机该离轴距离处的整条静态空间调制传递函数；S6. Obtain an entire static spatial modulation transfer function at the off-axis distance of the camera according to the electron diffusion speckle radius;
S7、当所述静态空间调制传递函数下降到第一预设值时，得到所述条纹相机该成像位置处的静态极限空间分辨率。S7. When the static spatial modulation transfer function falls to a first preset value, a static limit spatial resolution at the imaging position of the stripe camera is obtained.
优选地，本发明所述的X射线条纹相机静态测试方法，所述步骤S3中得到静态明暗条纹的对比度包括：根据公式(1)得到静态明暗条纹的对比度；Preferably, the method for static testing of the X-ray stripe camera of the present invention, the contrast of the static light and dark stripes obtained in the step S3 comprises: obtaining the contrast of the static light and dark stripes according to the formula (1);
Figure PCTCN2018115897-appb-000001
Figure PCTCN2018115897-appb-000001
其中，所述I max为所述静态条纹像中明条纹的强度，所述I min为所述静态条纹像中暗条纹的 强度； Wherein, the I max is the intensity of the static image bright fringes fringes, the I min is the intensity of the static image of the dark stripe of the stripes;
所述步骤S4中调制度和对比度的关系为：The relationship between the modulation degree and the contrast in the step S4 is:
MTF(f)＝π/4·CTF(f)      (2)MTF(f)=π/4·CTF(f) (2)
所述步骤S5包括：根据多个离轴距离处的所述调制度数据由公式(3)得到该距离处对应的电子弥散斑半径ρ e； The step S5 includes: obtaining a corresponding electronic diffusion spot radius ρ e at the distance from the formula (3) according to the modulation degree data at a plurality of off-axis distances;
MTF(f)＝exp[-(πρ ef) 2]       (3) MTF(f)=exp[-(πρ e f) 2 ] (3)
所述步骤S6包括：根据所述电子弥散斑半径ρ e，再由所述公式(3)得到相机该离轴距离处的整条静态空间调制传递函数。 The step S6 includes: according to the electron diffusion spot radius ρ e , the entire static spatial modulation transfer function at the off-axis distance of the camera is obtained by the formula (3).
优选地，本发明所述的X射线条纹相机静态测试方法，所述第一预设值为0.393％；Preferably, the X-ray stripe camera static test method of the present invention, the first preset value is 0.393%;
在所述步骤S7后还包括：After the step S7, the method further includes:
S8、由所述条纹相机多个离轴距离处的所述静态极限空间分辨率拟合相机成像离轴距离和静态极限空间分辨率二次曲线关系；S8. Fitting a quadratic curve relationship between a camera imaging off-axis distance and a static limit spatial resolution by the static limit spatial resolution at a plurality of off-axis distances of the stripe camera;
S9、由所述静态极限空间分辨率二次曲线关系、相机静态成像区域范围得到所述条纹相机在静态工作模式下全成像区域的静态极限空间分辨率分布。S9. The static limit spatial resolution distribution of the full imaging region of the stripe camera in the static working mode is obtained by the static limit spatial resolution quadratic curve relationship and the camera static imaging region range.
另，本发明还提供一种X射线条纹相机动态测试系统，包括设置在真空室内、用于接收激光器发出的紫外光信号的条纹相机，所述条纹相机的输入端设置有用于接收所述紫外光信号的分化板型金阴极；In addition, the present invention also provides an X-ray stripe camera dynamic test system, comprising a stripe camera disposed in a vacuum chamber for receiving an ultraviolet light signal emitted by a laser, the input end of the stripe camera being provided for receiving the ultraviolet light Signalized plate-type gold cathode;
与所述条纹相机连接、用于为所述条纹相机提供驱动信号的高压电源，所述高压电源通过扫描电路连接所述条纹相机；a high voltage power supply connected to the stripe camera for providing a driving signal to the stripe camera, the high voltage power source being connected to the stripe camera through a scanning circuit;
所述条纹相机的输出端设置有用于接收所述条纹相机的荧光屏输出的光信号的CCD摄像机，所述CCD摄像机连接计算机，并将光信号转换为数字信号并传输至所述计算机；The output end of the stripe camera is provided with a CCD camera for receiving an optical signal output by the screen of the stripe camera, the CCD camera is connected to a computer, and converts the optical signal into a digital signal and transmits it to the computer;
用于接收所述激光器发出的控制光信号的光电传感器，所述光电传感器通过延时器分别连接扫描电路和增强器，所述增强器设置在所述条纹相机和CCD摄像机之间。A photosensor for receiving a control light signal emitted by the laser, the photosensor being respectively connected to a scan circuit and an enhancer by a delay device, the enhancer being disposed between the stripe camera and the CCD camera.
优选地，本发明所述的X射线条纹相机动态测试系统，所述紫外光信号通过光路调节装置射入所述分化板型金阴极，所述光路调节装置包括全反镜M1、半反半透镜M2、半反半透镜M3、全反镜M4；Preferably, in the X-ray stripe camera dynamic test system of the present invention, the ultraviolet light signal is incident on the differentiation plate type gold cathode through an optical path adjusting device, and the optical path adjusting device includes a full mirror M1 and a half mirror M2, semi-reverse half lens M3, full mirror M4;
所述分化板型金阴极包括不锈钢底座、设置在所述不锈钢底座上的熔石英层、以及设置在所述熔石英层上的间隔铝膜，所述间隔铝膜上为金膜。The differentiated plate type gold cathode includes a stainless steel base, a fused silica layer disposed on the stainless steel base, and a spacer aluminum film disposed on the fused silica layer, wherein the spacer aluminum film is a gold film.
另，本发明还提供一种X射线条纹相机动态测试方法，应用于上述的X射线条纹相机动态测试系统，包括下述步骤：In addition, the present invention also provides an X-ray stripe camera dynamic test method, which is applied to the above X-ray stripe camera dynamic test system, and includes the following steps:
T1、分化板型金阴极在条纹相机的动态测试模式下接收激光器发射的紫外光，高压电源通过扫描电路输出驱动信号驱动所述条纹相机，其中，所述扫描电路由所述激光器发射的控制光信号控制；The T1, the differentiation plate type gold cathode receives the ultraviolet light emitted by the laser in a dynamic test mode of the stripe camera, and the high voltage power source drives the stripe camera through a scan circuit output driving signal, wherein the scanning circuit emits the control light by the laser Signal control
T2、CCD摄像机接收所述条纹相机的荧光屏输出的光信号，将光信号转换为数字信号并传输至所述计算机，得到条纹数字图像；a T2, a CCD camera receives an optical signal output by the screen of the stripe camera, converts the optical signal into a digital signal, and transmits the signal to the computer to obtain a striped digital image;
T3、多次移动激光光斑，使所述紫外光照射在所述分化板型金阴极的不同区域，测试和记录不同距离下的所述条纹数字图像；T3, moving the laser spot multiple times, so that the ultraviolet light is irradiated on different regions of the differentiated plate type gold cathode, and testing and recording the striped digital image at different distances;
T4、获取所述条纹数字图像的条纹强度分布，在离对称轴不同距离处取样不同分辨率的动态条纹像，得到动态明暗条纹的对比度；T4. Obtain a stripe intensity distribution of the stripe digital image, and sample a dynamic stripe image of different resolutions at different distances from the symmetry axis to obtain a contrast of dynamic light and dark stripes;
T5、根据调制度和对比度的关系得到多个离轴距离处的调制度数据；T5, obtaining modulation degree data at a plurality of off-axis distances according to a relationship between modulation degree and contrast;
T6、根据多个离轴距离处的所述调制度数据得到该距离处对应的电子弥散斑半径；T6. Obtain a corresponding electron diffusion spot radius at the distance according to the modulation degree data at a plurality of off-axis distances;
T7、根据所述电子弥散斑半径得到相机该离轴距离处的动态空间调制传 递函数；T7. Obtain a dynamic spatial modulation transfer function at the off-axis distance of the camera according to the electron diffusion spot radius;
T8、当所述动态空间调制传递函数下降到第二预设值时，得到所述条纹相机该成像位置处的动态极限空间分辨率。T8. When the dynamic spatial modulation transfer function falls to a second preset value, a dynamic limit spatial resolution at the imaging position of the stripe camera is obtained.
优选地，本发明所述的X射线条纹相机动态测试方法，所述步骤T4中得到动态明暗条纹的对比度包括：根据公式(4)得到动态明暗条纹的对比度；Preferably, the method for dynamically testing the X-ray stripe camera of the present invention, the contrast of the dynamic light and dark stripes obtained in the step T4 comprises: obtaining the contrast of the dynamic light and dark stripes according to the formula (4);
Figure PCTCN2018115897-appb-000002
Figure PCTCN2018115897-appb-000002
其中，所述I max为所述动态条纹像中明条纹的强度，所述I min为所述动态条纹像中暗条纹的强度 Wherein I max is the intensity of the bright stripe in the dynamic stripe image, and the I min is the intensity of the dark stripe in the dynamic stripe image
所述步骤T5中调制度和对比度的关系为：The relationship between the modulation degree and the contrast in the step T5 is:
MTF(f)＝π/4·CTF(f)      (5)MTF(f)=π/4·CTF(f) (5)
所述步骤T6包括：根据多个离轴距离处的所述调制度数据由公式(6)得到该距离处对应的电子弥散斑半径ρ e； The step T6 includes: obtaining a corresponding electron diffusion spot radius ρ e at the distance from the formula (6) according to the modulation degree data at a plurality of off-axis distances;
MTF(f)＝exp[-(πρ ef) 2]       (6) MTF(f)=exp[-(πρ e f) 2 ] (6)
所述步骤T7包括：根据所述电子弥散斑半径ρ e，再由所述公式(6)得到相机该离轴距离处的动态空间调制传递函数。 The step T7 includes: obtaining a dynamic spatial modulation transfer function at the off-axis distance of the camera according to the electron diffusion spot radius ρ e and then by the formula (6).
优选地，本发明所述的X射线条纹相机动态测试方法，所述第二预设值为0.393％；Preferably, the X-ray stripe camera dynamic test method of the present invention, the second preset value is 0.393%;
在所述步骤T8后还包括：After the step T8, the method further includes:
T9、由所述条纹相机多个离轴距离处的所述动态极限空间分辨率拟合相机成像离轴距离和动态极限空间分辨率二次曲线关系；T9, fitting, by the dynamic limit spatial resolution at a plurality of off-axis distances of the stripe camera, a quadratic curve relationship between a camera imaging off-axis distance and a dynamic limit spatial resolution;
T10、由所述动态极限空间分辨率二次曲线关系、相机动态成像区域范围得到所述条纹相机在动态工作模式下全成像区域的动态极限空间分辨率分布。T10. The dynamic limit spatial resolution distribution of the full imaging region of the stripe camera in the dynamic working mode is obtained by the dynamic limit spatial resolution quadratic curve relationship and the camera dynamic imaging region range.
实施本发明的一种X射线条纹相机成像性能测试系统及方法，具有以下有益效果：本发明基于电子光学MTF理论和分划板型光电阴极制作，在大工作面积X射线条纹相机上，在静态和动态两个工作模式下，测量条纹相机空间分辨率，计算条纹相机SMTF、DMTF和极限空间分辨率。该方法可通过实验测量数据拟合得到条纹相机全部成像区域的极限空间分辨率分布，为实现激 光ICF定量、半定量测量和“精密化”诊断目标具有重要意义。An X-ray stripe camera imaging performance testing system and method embodying the present invention has the following beneficial effects: the present invention is based on an electro-optical MTF theory and a reticle type photocathode fabrication, on a large working area X-ray stripe camera, in a static In the two working modes of dynamic and dynamic, the spatial resolution of the stripe camera is measured, and the SMTF, DMTF and extreme spatial resolution of the stripe camera are calculated. This method can obtain the limit spatial resolution distribution of all imaging regions of the stripe camera by fitting the experimental measurement data, which is of great significance for realizing the quantitative, semi-quantitative measurement and "precision" diagnosis target of laser ICF.
附图说明DRAWINGS
下面将结合附图及实施例对本发明作进一步说明，附图中：The present invention will be further described below in conjunction with the accompanying drawings and embodiments, in which:
图1是现有技术X射线条纹相机静态空间分辨率测试原理图；1 is a schematic diagram of a static spatial resolution test of a prior art X-ray stripe camera;
图2是现有技术X射线条纹相机空间分辨率测试结果；2 is a spatial resolution test result of a prior art X-ray stripe camera;
图3是本发明一种X射线条纹相机静态测试系统的结构示意图；3 is a schematic structural view of a static test system for an X-ray stripe camera according to the present invention;
图4是本发明中分化板型金阴极的制作流程图；Figure 4 is a flow chart showing the production of a differentiated plate type gold cathode in the present invention;
图5是本发明一种X射线条纹相机静态测试方法的流程图；5 is a flow chart of a static test method for an X-ray stripe camera according to the present invention;
图6是本发明条纹X射线条纹相机静态测试图像；Figure 6 is a static test image of the stripe X-ray stripe camera of the present invention;
图7是本发明条纹X射线条纹相机不同离轴距离的SMTF；Figure 7 is a SMTF of different off-axis distances of the stripe X-ray stripe camera of the present invention;
图8是本发明条纹相机静态极限空间分辨率和离轴距离的关系图；Figure 8 is a diagram showing the relationship between the static limit spatial resolution and the off-axis distance of the stripe camera of the present invention;
图9是本发明条纹相机全屏静态极限空间分辨率图；Figure 9 is a full-screen static limit spatial resolution diagram of the stripe camera of the present invention;
图10是本发明一种X射线条纹相机动态测试系统的结构示意图；10 is a schematic structural view of a dynamic test system for an X-ray stripe camera according to the present invention;
图11是本发明一种X射线条纹相机动态测试方法的流程图；11 is a flow chart of a method for dynamically testing an X-ray stripe camera according to the present invention;
图12是本发明条纹X射线条纹相机动态测试图像；Figure 12 is a dynamic test image of the stripe X-ray stripe camera of the present invention;
图13是本发明条纹X射线条纹相机不同离轴距离的DMTF；Figure 13 is a DMTF of the stripe X-ray stripe camera of the present invention with different off-axis distances;
图14是本发明条纹相机动态极限空间分辨率和离轴距离的关系图；Figure 14 is a diagram showing the relationship between the dynamic limit spatial resolution and the off-axis distance of the stripe camera of the present invention;
图15是本发明条纹相机全屏动态极限空间分辨率图。Figure 15 is a full-screen dynamic limit spatial resolution map of the stripe camera of the present invention.
具体实施方式Detailed ways
为了对本发明的技术特征、目的和效果有更加清楚的理解，现对照附图详细说明本发明的具体实施方式。For a better understanding of the technical features, objects and effects of the present invention, the embodiments of the present invention are described in detail with reference to the accompanying drawings.
图1是现有技术X射线条纹相机静态空间分辨率测试原理图。1 is a schematic diagram of a static spatial resolution test of a prior art X-ray stripe camera.
具体的，该X射线条纹相机静态测试系统包括设置在真空室内、用于接收光源发出的紫外光信号的X射线条纹相机(以下简称条纹相机)，条纹相机的输入端设置有用于接收紫外光信号的分化板型金阴极(分化阴极)，优选地，本发明的X射线条纹相机静态测试系统，光源为紫外盘形灯。与条纹相机连 接、用于为条纹相机提供驱动信号的高压电源，高压电源通过分压器连接条纹相机；条纹相机的输出端设置有用于接收条纹相机的荧光屏输出的光信号的CCD摄像机，CCD摄像机连接计算机，并将光信号转换为数字信号并传输至计算机。Specifically, the X-ray stripe camera static test system includes an X-ray stripe camera (hereinafter referred to as a stripe camera) disposed in a vacuum chamber for receiving an ultraviolet light signal emitted by a light source, and an input end of the stripe camera is provided for receiving an ultraviolet light signal. The differentiated plate type gold cathode (differentiated cathode), preferably, the X-ray stripe camera static test system of the present invention, the light source is an ultraviolet disk lamp. A high-voltage power supply connected to the stripe camera for driving signals to the stripe camera, the high-voltage power supply is connected to the stripe camera through a voltage divider; the output of the stripe camera is provided with a CCD camera for receiving the light signal output from the screen of the stripe camera, the CCD camera Connect to a computer and convert the optical signal to a digital signal and transfer it to a computer.
图4是本发明中分化板型金阴极的制作流程图。分化板型金阴极包括不锈钢底座、设置在不锈钢底座上的熔石英层、以及设置在熔石英层上的间隔铝膜，间隔铝膜上为金膜。测试专用分化板型金阴极的制作方法是：在石英衬底上蒸镀一层100nm的导电铝膜，利用专门制作的掩模版，在铝膜上光刻狭缝分划板型分辨率图案，最后蒸镀30nm金膜，作为电子发射层。分划阴极的狭缝总长30mm，宽0.1mm；中心左右两侧为20lp/mm和22lp/mm分辨率图案，图案分辨率以4lp/mm间隔递减到阴极边缘；除了边缘10lp/mm图案长度4mm外，其余图案长度均为3mm，间隔0.5mm；同时保证分辨率图案的光刻误差均在1μm范围内。使用分划阴极测试空间分辨率，排除了测试光源方向性的影响，测试结果客观。Fig. 4 is a flow chart showing the production of a differentiated plate type gold cathode in the present invention. The differentiated plate type gold cathode includes a stainless steel base, a fused silica layer disposed on the stainless steel base, and a spacer aluminum film disposed on the fused silica layer, and the spacer aluminum film is a gold film. The test-specific differentiation plate type gold cathode is prepared by depositing a 100 nm conductive aluminum film on a quartz substrate, and using a specially prepared reticle to lithographically slit the reticle-type resolution pattern on the aluminum film. Finally, a 30 nm gold film was deposited as an electron emission layer. The slit of the split cathode has a total length of 30 mm and a width of 0.1 mm; the left and right sides of the center are 20 lp/mm and 22 lp/mm resolution patterns, and the pattern resolution is reduced to the cathode edge at intervals of 4 lp/mm; except for the edge 10 lp/mm pattern length 4 mm In addition, the remaining patterns are 3 mm in length and 0.5 mm apart; and the lithography error of the resolution pattern is guaranteed to be in the range of 1 μm. Using the spatial resolution of the split cathode test, the influence of the directivity of the test source is eliminated, and the test result is objective.
图5是本发明一种X射线条纹相机静态测试方法的流程图。Figure 5 is a flow chart of a static test method for an X-ray stripe camera of the present invention.
具体的，该X射线条纹相机静态测试方法应用于上述的X射线条纹相机静态测试系统，包括下述步骤：Specifically, the X-ray stripe camera static test method is applied to the above X-ray stripe camera static test system, and includes the following steps:
S1、分化板型金阴极在条纹相机的静态测试模式下接收紫外盘形灯发射的紫外光，高压电源输出驱动信号驱动条纹相机。S1, the differentiation plate type gold cathode receives the ultraviolet light emitted by the ultraviolet disk lamp in the static test mode of the stripe camera, and the high voltage power supply output drive signal drives the stripe camera.
S2、CCD摄像机接收条纹相机的荧光屏输出的光信号，将光信号转换为数字信号并传输至计算机，得到条纹数字图像。S2. The CCD camera receives the optical signal output from the screen of the stripe camera, converts the optical signal into a digital signal and transmits it to a computer to obtain a striped digital image.
S3、获取条纹数字图像的条纹强度分布，在离对称中心不同距离处取样不同分辨率的静态条纹像，得到静态明暗条纹的对比度。进一步，本发明的X射线条纹相机静态测试方法，步骤S3中得到静态明暗条纹的对比度包括：根据公式(1)得到静态明暗条纹的对比度；S3. Acquire a stripe intensity distribution of the stripe digital image, and sample static fringe images of different resolutions at different distances from the center of symmetry to obtain a contrast of static light and dark stripes. Further, in the static test method of the X-ray stripe camera of the present invention, the contrast of the static light and dark stripes obtained in step S3 includes: obtaining the contrast of the static light and dark stripes according to formula (1);
Figure PCTCN2018115897-appb-000003
Figure PCTCN2018115897-appb-000003
其中，I max为静态条纹像中明条纹的强度，f为条纹图案的空间频率，I min为静态条纹像中暗条纹的强度。 Where I max is the intensity of the bright stripe in the static stripe image, f is the spatial frequency of the stripe pattern, and I min is the intensity of the dark stripe in the static stripe image.
S4、根据调制度和对比度的关系得到多个离轴距离处的调制度数据。进一步，步骤S4中调制度和对比度的关系为：S4. Obtain modulation degree data at a plurality of off-axis distances according to a relationship between modulation degree and contrast. Further, the relationship between the modulation degree and the contrast in step S4 is:
MTF(f)＝π/4·CTF(f)      (2)MTF(f)=π/4·CTF(f) (2)
其中，MTF(f)为调制度。Where MTF(f) is the degree of modulation.
S5、根据多个离轴距离处的调制度数据得到该距离处对应的电子弥散斑半径。进一步，步骤S5包括：根据多个离轴距离处的调制度数据由公式(3)得到该距离处对应的电子弥散斑半径ρ e。 S5. Obtain a corresponding electron diffusion spot radius at the distance according to the modulation degree data at the plurality of off-axis distances. Further, step S5 includes: obtaining an electron diffusion spot radius ρ e corresponding to the distance from the formula (3) according to the modulation degree data at the plurality of off-axis distances.
MTF(f)＝exp[-(πρ ef) 2]       (3) MTF(f)=exp[-(πρ e f) 2 ] (3)
其中，exp为自然常数e为底的指数函数，π为圆周率；Where exp is an exponential function with a natural constant e as the base, and π is the pi.
S6、根据电子弥散斑半径得到相机该离轴距离处的整条静态空间调制传递函数SMTF(static modulation transfer function)。进一步，步骤S6包括：根据电子弥散斑半径ρ e，再由公式(3)得到相机该离轴距离处的整条静态空间调制传递函数。 S6. Obtain an entire static spatial modulation transfer function SMTF (static modulation transfer function) at the off-axis distance of the camera according to the electron diffusion speckle radius. Further, step S6 includes: obtaining an entire static spatial modulation transfer function at the off-axis distance of the camera according to the electron diffusion spot radius ρ e and then by formula (3).
S7、当静态空间调制传递函数下降到第一预设值时，得到条纹相机该成像位置处的静态极限空间分辨率。优选地，第一预设值为0.393％，即CTF＝5％处，得到条纹相机该成像位置处的静态极限空间分辨率。S7. When the static spatial modulation transfer function falls to a first preset value, a static limit spatial resolution at the imaging position of the stripe camera is obtained. Preferably, the first preset value is 0.393%, that is, CTF=5%, and the static limit spatial resolution at the imaging position of the stripe camera is obtained.
S8、由条纹相机多个离轴距离处的静态极限空间分辨率拟合相机成像离轴距离和静态极限空间分辨率二次曲线关系。S8. Fit the quadratic curve relationship between the camera imaging off-axis distance and the static limit spatial resolution by the static limit spatial resolution at multiple off-axis distances of the stripe camera.
S9、由静态极限空间分辨率二次曲线关系、相机静态成像区域范围得到条纹相机在静态工作模式下全成像区域的静态极限空间分辨率分布。S9. The static limit spatial resolution distribution of the full imaging region of the stripe camera in the static working mode is obtained from the static limit spatial resolution quadratic curve relationship and the camera static imaging region range.
现通过实验对上述X射线条纹相机动态测试方法进行验证，实验结果如表1以及图6至图9所示。The above X-ray stripe camera dynamic test method is verified by experiments, and the experimental results are shown in Table 1 and Figures 6 to 9.
表1Table 1
Figure PCTCN2018115897-appb-000004
Figure PCTCN2018115897-appb-000004
图10是本发明一种X射线条纹相机动态测试系统的结构示意图。FIG. 10 is a schematic structural view of a dynamic test system for an X-ray stripe camera according to the present invention.
具体的，该X射线条纹相机动态测试系统包括设置在真空室内、用于接收激光器发出的紫外光信号的条纹相机，条纹相机的输入端设置有用于接收紫外光信号的分化板型金阴极；与条纹相机连接、用于为条纹相机提供驱动信号的高压电源，高压电源通过扫描电路连接条纹相机；条纹相机的输出端设置有用于接收条纹相机的荧光屏输出的光信号的CCD摄像机，CCD摄像机连接计算机，并将光信号转换为数字信号并传输至计算机；用于接收激光器发出的控制光信号的光电传感器(PIN)，光电传感器通过延时器分别连接扫描电路和增强器，增强器设置在条纹相机和CCD摄像机之间。优选地，控制光信号是波长为800nm的光信号。Specifically, the X-ray stripe camera dynamic test system includes a stripe camera disposed in the vacuum chamber for receiving an ultraviolet light signal emitted by the laser, and the input end of the stripe camera is provided with a differentiated plate type gold cathode for receiving the ultraviolet light signal; A stripe camera connection, a high voltage power supply for driving signals to the stripe camera, a high voltage power supply connected to the stripe camera through a scanning circuit; a output of the stripe camera is provided with a CCD camera for receiving the light signal output from the screen of the stripe camera, and the CCD camera is connected to the computer And converting the optical signal into a digital signal and transmitting it to a computer; a photoelectric sensor (PIN) for receiving a control light signal from the laser, the photoelectric sensor being respectively connected to the scanning circuit and the booster through a delay device, and the booster is disposed on the stripe camera Between the CCD camera and the camera. Preferably, the control optical signal is an optical signal having a wavelength of 800 nm.
作为选择，当激光器出射的紫外光不能直接射入分化板型金阴极时，需要调节光路，则本发明设置了光路调节装置，紫外光信号通过光路调节装置射入分化板型金阴极，光路调节装置包括全反镜M1、半反半透镜M2、半反半透镜M3、全反镜M4，全反镜M1将接收到的紫外光反射至半反半透镜M2；半反半透镜M2将透射光射向分化板型金阴极，半反半透镜M2将反射光垂直射向半反半透镜M3；半反半透镜M3将反射光射向半反半透镜M2，半反半透镜M3将透射光垂直射向全反镜M4。Alternatively, when the ultraviolet light emitted by the laser cannot directly enter the polarization plate type gold cathode, the optical path needs to be adjusted. The present invention provides an optical path adjusting device, and the ultraviolet light signal is incident on the differentiation plate type gold cathode through the optical path adjusting device, and the optical path is adjusted. The device comprises a full-mirror M1, a half-reverse half lens M2, a half-reverse half-lens M3, and a full-mirror M4. The full-reflection mirror M1 reflects the received ultraviolet light to the half-reverse half lens M2; the half-reverse half-lens M2 transmits the light. The light is directed to the polarized plate type gold cathode, and the half-reverse half lens M2 directs the reflected light perpendicularly to the half-reverse half lens M3; the half-reverse half lens M3 directs the reflected light toward the half-reverse half lens M2, and the half-reverse half-lens M3 transmits the light vertically. Shoot at the full mirror M4.
分化板型金阴极包括不锈钢底座、设置在不锈钢底座上的熔石英层、以及设置在熔石英层上的间隔铝膜，间隔铝膜上为金膜。分化板型金阴极的制作过程及参数参考上述X射线条纹相机静态测试系统中分化板型金阴极，在此不再赘述。The differentiated plate type gold cathode includes a stainless steel base, a fused silica layer disposed on the stainless steel base, and a spacer aluminum film disposed on the fused silica layer, and the spacer aluminum film is a gold film. The manufacturing process and parameters of the differentiated plate type gold cathode refer to the differentiated plate type gold cathode in the above X-ray stripe camera static test system, and will not be described herein.
图11是本发明一种X射线条纹相机动态测试方法的流程图。11 is a flow chart of a method for dynamically testing an X-ray stripe camera of the present invention.
具体的，该X射线条纹相机动态测试方法应用于上述的X射线条纹相机动态测试系统，包括下述步骤：Specifically, the X-ray stripe camera dynamic test method is applied to the above X-ray stripe camera dynamic test system, and includes the following steps:
T1、分化板型金阴极在条纹相机的动态测试模式下接收激光器发射的紫外光，高压电源通过扫描电路输出驱动信号驱动条纹相机，其中，扫描电路由激光器发射的控制光信号控制。优选的，激光器选用钛宝石飞秒激光器。优选的，紫外光是波长为266nm的紫外光。The T1, differentiated plate type gold cathode receives the ultraviolet light emitted by the laser in the dynamic test mode of the stripe camera, and the high voltage power source drives the stripe camera through the scan circuit output drive signal, wherein the scan circuit is controlled by the control light signal emitted by the laser. Preferably, the laser is a titanium gem femtosecond laser. Preferably, the ultraviolet light is ultraviolet light having a wavelength of 266 nm.
T2、CCD摄像机接收条纹相机的荧光屏输出的光信号，将光信号转换为数字信号并传输至计算机，得到条纹数字图像。The T2, CCD camera receives the optical signal output from the screen of the stripe camera, converts the optical signal into a digital signal and transmits it to a computer to obtain a striped digital image.
T3、多次移动激光光斑，使紫外光照射在分化板型金阴极的不同区域，测试和记录不同距离下的条纹数字图像；T3, moving the laser spot multiple times, so that the ultraviolet light is irradiated on different regions of the differentiated plate type gold cathode, and the striped digital image at different distances is tested and recorded;
T4、获取条纹数字图像的条纹强度分布，激光光斑相对于金阴极几十um区域内近似均匀分布，强度数据有足够精度，也可在相机输入前加平行光管使光强度均匀。在离对称轴不同距离处取样不同分辨率的动态条纹像，得到动态明暗条纹的对比度；进一步，本发明的X射线条纹相机动态测试方法，步骤T4中得到动态明暗条纹的对比度包括：根据公式(4)得到动态明暗条纹的对比度；T4. Acquire the stripe intensity distribution of the striped digital image. The laser spot is approximately evenly distributed in the tens of um region of the gold cathode, and the intensity data has sufficient accuracy. The parallel light tube can be added before the camera input to make the light intensity uniform. The dynamic fringe images of different resolutions are sampled at different distances from the symmetry axis to obtain the contrast of the dynamic light and dark stripes. Further, the X-ray stripe camera dynamic test method of the present invention, the contrast of the dynamic light and dark stripes obtained in step T4 includes: according to the formula ( 4) Obtain the contrast of dynamic light and dark stripes;
Figure PCTCN2018115897-appb-000005
Figure PCTCN2018115897-appb-000005
其中，CTF(f)为明暗条纹的对比度，f为条纹图案的空间频率，I max为动态条纹像中明条纹的强度，I min为动态条纹像中暗条纹的强度。 Where CTF(f) is the contrast of light and dark stripes, f is the spatial frequency of the stripe pattern, I max is the intensity of the bright stripe in the dynamic stripe image, and I min is the intensity of the dark stripe in the dynamic stripe image.
T5、根据调制度和对比度的关系得到多个离轴距离处的调制度数据。进一步，步骤T5中调制度和对比度的关系为：T5, obtaining modulation degree data at a plurality of off-axis distances according to the relationship between the degree of modulation and the contrast. Further, the relationship between modulation degree and contrast in step T5 is:
MTF(f)＝π/4·CTF(f)       (5)MTF(f)=π/4·CTF(f) (5)
其中，MTF(f)为调制度。Where MTF(f) is the degree of modulation.
T6、根据多个离轴距离处的调制度数据得到该距离处对应的电子弥散斑半径。进一步，步骤T6包括：根据多个离轴距离处的调制度数据由公式(6)得到该距离处对应的电子弥散斑半径ρ e； T6. Obtain a corresponding electronic diffusion spot radius at the distance according to the modulation degree data at the plurality of off-axis distances. Further, step T6 includes: obtaining a corresponding electronic diffusion spot radius ρ e at the distance from formula (6) according to the modulation degree data at the plurality of off-axis distances;
MTF(f)＝exp[-(πρ ef) 2]      (6) MTF(f)=exp[-(πρ e f) 2 ] (6)
其中，exp为自然常数e为底的指数函数，π为圆周率。Where exp is an exponential function with a natural constant e as the base, and π is the pi.
T7、根据电子弥散斑半径得到相机该离轴距离处的动态空间调制传递函数DMTF(dynamic modulation transfer function)。进一步，步骤T7包括：根据电子弥散斑半径ρ e，再由公式(6)得到相机该离轴距离处的动态空间调制传递函数。 T7. Obtain a dynamic modulation transfer function (DMTF) at the off-axis distance of the camera according to the electron diffusion speckle radius. Further, step T7 includes: obtaining a dynamic spatial modulation transfer function at the off-axis distance of the camera according to the electron diffusion spot radius ρ e and then by formula (6).
T8、当动态空间调制传递函数下降到第二预设值时，得到条纹相机该成像位置处的动态极限空间分辨率。优选地，第一预设值为0.393％，即CTF＝5％ 处，得到条纹相机该成像位置处的动态极限空间分辨率。T8. When the dynamic spatial modulation transfer function falls to a second preset value, the dynamic limit spatial resolution at the imaging position of the stripe camera is obtained. Preferably, the first preset value is 0.393%, that is, CTF=5%, and the dynamic limit spatial resolution at the imaging position of the stripe camera is obtained.
T9、由条纹相机多个离轴距离处的动态极限空间分辨率拟合相机成像离轴距离和动态极限空间分辨率二次曲线关系。T9, the quadratic curve relationship between the camera imaging off-axis distance and the dynamic limit spatial resolution is fitted by the dynamic limit spatial resolution at multiple off-axis distances of the stripe camera.
T10、由动态极限空间分辨率二次曲线关系、相机动态成像区域范围得到条纹相机在动态工作模式下全成像区域的动态极限空间分辨率分布。T10, the dynamic limit spatial resolution distribution of the full imaging region of the fringe camera in the dynamic working mode is obtained by the dynamic limit spatial resolution quadratic curve relationship and the camera dynamic imaging region range.
现通过实验对上述X射线条纹相机动态测试方法进行验证，实验结果如表2以及图12至图15所示。The above X-ray stripe camera dynamic test method is verified by experiments. The experimental results are shown in Table 2 and Figure 12 to Figure 15.
表2Table 2
Figure PCTCN2018115897-appb-000006
Figure PCTCN2018115897-appb-000006
本发明基于电子光学MTF理论和分划板型光电阴极制作，在大工作面积X射线条纹相机上，在静态和动态两个工作模式下，测量条纹相机空间分辨率，计算条纹相机SMTF、DMTF和极限空间分辨率。该方法可通过实验测量数据拟合得到条纹相机全部成像区域的极限空间分辨率分布，为实现激光ICF定量、半定量测量和“精密化”诊断目标具有重要意义。The invention is based on the electron optical MTF theory and the reticle type photocathode fabrication. On the large working area X-ray stripe camera, the spatial resolution of the stripe camera is measured in the static and dynamic working modes, and the stripe camera SMTF, DMTF and Extreme spatial resolution. This method can obtain the limit spatial resolution distribution of all imaging regions of the stripe camera by fitting the experimental measurement data, which is of great significance for realizing the quantitative, semi-quantitative measurement and "precision" diagnosis target of laser ICF.
以上实施例只为说明本发明的技术构思及特点，其目的在于让熟悉此项技术的人士能够了解本发明的内容并据此实施，并不能限制本发明的保护范围。凡跟本发明权利要求范围所做的均等变化与修饰，均应属于本发明权利要求的涵盖范围。The above embodiments are merely illustrative of the technical concept and the features of the present invention. The purpose of the present invention is to enable those skilled in the art to understand the contents of the present invention and to implement the present invention without limiting the scope of the present invention. Equivalent changes and modifications made within the scope of the claims of the present invention should fall within the scope of the appended claims.

Claims (10)

  1. 一种X射线条纹相机静态测试系统，其特征在于，包括设置在真空室内、用于接收光源发出的紫外光信号的条纹相机，所述条纹相机的输入端设置有用于接收所述紫外光信号的分化板型金阴极；An X-ray stripe camera static test system, comprising: a stripe camera disposed in a vacuum chamber for receiving an ultraviolet light signal emitted by a light source, wherein an input end of the stripe camera is provided with a signal for receiving the ultraviolet light signal Differentiated plate type gold cathode;
    与所述条纹相机连接、用于为所述条纹相机提供驱动信号的高压电源，所述高压电源通过分压器连接所述条纹相机；a high voltage power supply connected to the stripe camera for providing a driving signal to the stripe camera, the high voltage power source being connected to the stripe camera through a voltage divider;
    所述条纹相机的输出端设置有用于接收所述条纹相机的荧光屏输出的光信号的CCD摄像机，所述CCD摄像机连接计算机，并将光信号转换为数字信号并传输至所述计算机。The output of the stripe camera is provided with a CCD camera for receiving an optical signal output from the screen of the stripe camera, the CCD camera being coupled to a computer and converting the optical signal to a digital signal for transmission to the computer.
  2. 根据权利要求1所述的X射线条纹相机静态测试系统，其特征在于，所述光源为紫外盘形灯；The static test system for an X-ray stripe camera according to claim 1, wherein the light source is an ultraviolet disk lamp;
    所述分化板型金阴极包括不锈钢底座、设置在所述不锈钢底座上的熔石英层、以及设置在所述熔石英层上的间隔铝膜，所述间隔铝膜上为金膜。The differentiated plate type gold cathode includes a stainless steel base, a fused silica layer disposed on the stainless steel base, and a spacer aluminum film disposed on the fused silica layer, wherein the spacer aluminum film is a gold film.
  3. 一种X射线条纹相机静态测试方法，其特征在于，应用于权利要求1或2所述的X射线条纹相机静态测试系统，包括下述步骤：A static test method for an X-ray stripe camera, characterized in that it is applied to the X-ray stripe camera static test system according to claim 1 or 2, comprising the following steps:
    S1、分化板型金阴极在条纹相机的静态测试模式下接收紫外盘形灯发射的紫外光，高压电源输出驱动信号驱动所述条纹相机；S1, the differentiation plate type gold cathode receives the ultraviolet light emitted by the ultraviolet disk lamp in a static test mode of the stripe camera, and the high voltage power supply output driving signal drives the stripe camera;
    S2、CCD摄像机接收所述条纹相机的荧光屏输出的光信号，将所述光信号转换为数字信号并传输至所述计算机，得到条纹数字图像；S2, the CCD camera receives the optical signal output by the fluorescent screen of the stripe camera, converts the optical signal into a digital signal and transmits the signal to the computer to obtain a striped digital image;
    S3、获取所述条纹数字图像的条纹强度分布，在离对称中心不同距离处取样不同分辨率的静态条纹像，得到静态明暗条纹的对比度；S3. Acquire a stripe intensity distribution of the stripe digital image, and sample static fringe images of different resolutions at different distances from the center of symmetry to obtain a contrast of static light and dark stripes;
    S4、根据调制度和对比度的关系得到多个离轴距离处的调制度数据；S4. Obtain modulation degree data at a plurality of off-axis distances according to a relationship between modulation degree and contrast;
    S5、根据多个离轴距离处的所述调制度数据得到该距离处对应的电子弥散斑半径；S5. Obtain a corresponding electron diffusion spot radius at the distance according to the modulation degree data at a plurality of off-axis distances;
    S6、根据所述电子弥散斑半径得到相机该离轴距离处的整条静态空间调制传递函数；S6. Obtain an entire static spatial modulation transfer function at the off-axis distance of the camera according to the electron diffusion speckle radius;
    S7、当所述静态空间调制传递函数下降到第一预设值时，得到所述条纹相机该成像位置处的静态极限空间分辨率。S7. When the static spatial modulation transfer function falls to a first preset value, a static limit spatial resolution at the imaging position of the stripe camera is obtained.
  4. 根据权利要求3所述的X射线条纹相机静态测试方法，其特征在于，所述步骤S3中得到静态明暗条纹的对比度包括：根据公式(1)得到静态明暗条纹的对比度；The X-ray stripe camera static test method according to claim 3, wherein the contrast of the static light and dark stripes obtained in the step S3 comprises: obtaining the contrast of the static light and dark stripes according to the formula (1);
    Figure PCTCN2018115897-appb-100001
    Figure PCTCN2018115897-appb-100001
    其中，CTF(f)为明暗条纹的对比度，f为条纹图案的空间频率，所述I max为所述静态条纹像中明条纹的强度，所述I min为所述静态条纹像中暗条纹的强度； Wherein CTF(f) is the contrast of the light and dark stripes, f is the spatial frequency of the stripe pattern, the I max is the intensity of the bright stripe in the static stripe image, and the I min is the dark stripe of the static stripe image strength;
    所述步骤S4中调制度和对比度的关系为：The relationship between the modulation degree and the contrast in the step S4 is:
    MTF(f)＝π/4·CTF(f)  (2)其中，MTF(f)为调制度；MTF(f)=π/4·CTF(f) (2) where MTF(f) is the degree of modulation;
    所述步骤S5包括：根据多个离轴距离处的所述调制度数据由公式(3)得到该距离处对应的电子弥散斑半径ρ e； The step S5 includes: obtaining a corresponding electronic diffusion spot radius ρ e at the distance from the formula (3) according to the modulation degree data at a plurality of off-axis distances;
    MTF(f)＝exp[-(πρ ef) 2] (3)其中，exp为自然常数e为底的指数函数，π为圆周率； MTF(f)=exp[-(πρ e f) 2 ] (3) where exp is an exponential function with a natural constant e as the base, and π is the pi.
    所述步骤S6包括：根据所述电子弥散斑半径ρ e，再由所述公式(3)得到相机该离轴距离处的整条静态空间调制传递函数。 The step S6 includes: according to the electron diffusion spot radius ρ e , the entire static spatial modulation transfer function at the off-axis distance of the camera is obtained by the formula (3).
  5. 根据权利要求3或4所述的X射线条纹相机静态测试方法，其特征在于，所述第一预设值为0.393％；The static test method for an X-ray stripe camera according to claim 3 or 4, wherein the first preset value is 0.393%;
    在所述步骤S7后还包括：After the step S7, the method further includes:
    S8、由所述条纹相机多个离轴距离处的所述静态极限空间分辨率拟合相机成像离轴距离和静态极限空间分辨率二次曲线关系；S8. Fitting a quadratic curve relationship between a camera imaging off-axis distance and a static limit spatial resolution by the static limit spatial resolution at a plurality of off-axis distances of the stripe camera;
    S9、由所述静态极限空间分辨率二次曲线关系、相机静态成像区域范围得到所述条纹相机在静态工作模式下全成像区域的静态极限空间分辨率分布。S9. The static limit spatial resolution distribution of the full imaging region of the stripe camera in the static working mode is obtained by the static limit spatial resolution quadratic curve relationship and the camera static imaging region range.
  6. 一种X射线条纹相机动态测试系统，其特征在于，包括设置在真空室内、用于接收激光器发出的紫外光信号的条纹相机，所述条纹相机的输入端设置有用于接收所述紫外光信号的分化板型金阴极；An X-ray stripe camera dynamic test system, comprising: a stripe camera disposed in a vacuum chamber for receiving an ultraviolet light signal emitted by a laser, wherein an input end of the stripe camera is provided with a signal for receiving the ultraviolet light signal Differentiated plate type gold cathode;
    与所述条纹相机连接、用于为所述条纹相机提供驱动信号的高压电源， 所述高压电源通过扫描电路连接所述条纹相机；a high voltage power supply connected to the stripe camera for providing a driving signal to the stripe camera, the high voltage power source being connected to the stripe camera through a scanning circuit;
    所述条纹相机的输出端设置有用于接收所述条纹相机的荧光屏输出的光信号的CCD摄像机，所述CCD摄像机连接计算机，并将光信号转换为数字信号并传输至所述计算机；The output end of the stripe camera is provided with a CCD camera for receiving an optical signal output by the screen of the stripe camera, the CCD camera is connected to a computer, and converts the optical signal into a digital signal and transmits it to the computer;
    用于接收所述激光器发出的控制光信号的光电传感器，所述光电传感器通过延时器分别连接扫描电路和增强器，所述增强器设置在所述条纹相机和CCD摄像机之间。A photosensor for receiving a control light signal emitted by the laser, the photosensor being respectively connected to a scan circuit and an enhancer by a delay device, the enhancer being disposed between the stripe camera and the CCD camera.
  7. 根据权利要求6所述的X射线条纹相机动态测试系统，其特征在于，所述紫外光信号通过光路调节装置射入所述分化板型金阴极，所述光路调节装置包括全反镜M1、半反半透镜M2、半反半透镜M3、全反镜M4；The X-ray stripe camera dynamic test system according to claim 6, wherein the ultraviolet light signal is incident on the differentiation plate type gold cathode through an optical path adjusting device, and the optical path adjusting device comprises a full mirror M1 and a half. Reverse semi-lens M2, half-reverse half lens M3, full mirror M4;
    所述分化板型金阴极包括不锈钢底座、设置在所述不锈钢底座上的熔石英层、以及设置在所述熔石英层上的间隔铝膜，所述间隔铝膜上为金膜。The differentiated plate type gold cathode includes a stainless steel base, a fused silica layer disposed on the stainless steel base, and a spacer aluminum film disposed on the fused silica layer, wherein the spacer aluminum film is a gold film.
  8. 一种X射线条纹相机动态测试方法，其特征在于，应用于权利要求6或7所述的X射线条纹相机动态测试系统，包括下述步骤：A method for dynamically testing an X-ray stripe camera, characterized in that it is applied to the X-ray stripe camera dynamic test system according to claim 6 or 7, comprising the following steps:
    T1、分化板型金阴极在条纹相机的动态测试模式下接收激光器发射的紫外光，高压电源通过扫描电路输出驱动信号驱动所述条纹相机，其中，所述扫描电路由所述激光器发射的控制光信号控制；The T1, the differentiation plate type gold cathode receives the ultraviolet light emitted by the laser in a dynamic test mode of the stripe camera, and the high voltage power source drives the stripe camera through a scan circuit output driving signal, wherein the scanning circuit emits the control light by the laser Signal control
    T2、CCD摄像机接收所述条纹相机的荧光屏输出的光信号，将光信号转换为数字信号并传输至所述计算机，得到条纹数字图像；a T2, a CCD camera receives an optical signal output by the screen of the stripe camera, converts the optical signal into a digital signal, and transmits the signal to the computer to obtain a striped digital image;
    T3、多次移动激光光斑，使所述紫外光照射在所述分化板型金阴极的不同区域，测试和记录不同距离下的所述条纹数字图像；T3, moving the laser spot multiple times, so that the ultraviolet light is irradiated on different regions of the differentiated plate type gold cathode, and testing and recording the striped digital image at different distances;
    T4、获取所述条纹数字图像的条纹强度分布，在离对称轴不同距离处取样不同分辨率的动态条纹像，得到动态明暗条纹的对比度；T4. Obtain a stripe intensity distribution of the stripe digital image, and sample a dynamic stripe image of different resolutions at different distances from the symmetry axis to obtain a contrast of dynamic light and dark stripes;
    T5、根据调制度和对比度的关系得到多个离轴距离处的调制度数据；T5, obtaining modulation degree data at a plurality of off-axis distances according to a relationship between modulation degree and contrast;
    T6、根据多个离轴距离处的所述调制度数据得到该距离处对应的电子弥散斑半径；T6. Obtain a corresponding electron diffusion spot radius at the distance according to the modulation degree data at a plurality of off-axis distances;
    T7、根据所述电子弥散斑半径得到相机该离轴距离处的动态空间调制传递函数；T7, obtaining a dynamic spatial modulation transfer function at the off-axis distance of the camera according to the electron diffusion spot radius;
    T8、当所述动态空间调制传递函数下降到第二预设值时，得到所述条纹相机该成像位置处的动态极限空间分辨率。T8. When the dynamic spatial modulation transfer function falls to a second preset value, a dynamic limit spatial resolution at the imaging position of the stripe camera is obtained.
  9. 根据权利要求8所述的X射线条纹相机动态测试方法，其特征在于，所述步骤T4中得到动态明暗条纹的对比度包括：根据公式(4)得到动态明暗条纹的对比度；The X-ray stripe camera dynamic test method according to claim 8, wherein the contrast of the dynamic light and dark stripes obtained in the step T4 comprises: obtaining the contrast of the dynamic light and dark stripes according to the formula (4);
    Figure PCTCN2018115897-appb-100002
    Figure PCTCN2018115897-appb-100002
    其中，CTF(f)为明暗条纹的对比度，f为条纹图案的空间频率，所述I max为所述动态条纹像中明条纹的强度，所述I min为所述动态条纹像中暗条纹的强度； Wherein CTF(f) is the contrast of the light and dark stripes, f is the spatial frequency of the stripe pattern, the I max is the intensity of the bright stripe in the dynamic stripe image, and the I min is the dark stripe in the dynamic stripe image strength;
    所述步骤T5中调制度和对比度的关系为：The relationship between the modulation degree and the contrast in the step T5 is:
    MTF(f)＝π/4·CTF(f) (5)其中，MTF(f)为调制度；MTF(f)=π/4·CTF(f) (5) where MTF(f) is the degree of modulation;
    所述步骤T6包括：根据多个离轴距离处的所述调制度数据由公式(6)得到该距离处对应的电子弥散斑半径ρ e； The step T6 includes: obtaining a corresponding electron diffusion spot radius ρ e at the distance from the formula (6) according to the modulation degree data at a plurality of off-axis distances;
    MTF(f)＝exp[-(πρ ef) 2] (6)其中，exp为自然常数e为底的指数函数，π为圆周率； MTF(f)=exp[-(πρ e f) 2 ] (6) where exp is an exponential function with a natural constant e as the base, and π is the pi.
    所述步骤T7包括：根据所述电子弥散斑半径ρ e，再由所述公式(6)得到相机该离轴距离处的动态空间调制传递函数。 The step T7 includes: obtaining a dynamic spatial modulation transfer function at the off-axis distance of the camera according to the electron diffusion spot radius ρ e and then by the formula (6).
  10. 根据权利要求8或9所述的X射线条纹相机动态测试方法，其特征在于，所述第二预设值为0.393％；The X-ray stripe camera dynamic test method according to claim 8 or 9, wherein the second preset value is 0.393%;
    在所述步骤T8后还包括：After the step T8, the method further includes:
    T9、由所述条纹相机多个离轴距离处的所述动态极限空间分辨率拟合相机成像离轴距离和动态极限空间分辨率二次曲线关系；T9, fitting, by the dynamic limit spatial resolution at a plurality of off-axis distances of the stripe camera, a quadratic curve relationship between a camera imaging off-axis distance and a dynamic limit spatial resolution;
    T10、由所述动态极限空间分辨率二次曲线关系、相机动态成像区域范围得到所述条纹相机在动态工作模式下全成像区域的动态极限空间分辨率分布。T10. The dynamic limit spatial resolution distribution of the full imaging region of the stripe camera in the dynamic working mode is obtained by the dynamic limit spatial resolution quadratic curve relationship and the camera dynamic imaging region range.
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