WO2019097597A1

WO2019097597A1 - Temperature control device and warm-up completion time estimation method

Info

Publication number: WO2019097597A1
Application number: PCT/JP2017/041044
Authority: WO
Inventors: 茂文後藤; 裕久吉川
Original assignee: 理化工業株式会社
Priority date: 2017-11-15
Filing date: 2017-11-15
Publication date: 2019-05-23
Also published as: JPWO2019097597A1; JP6845449B2

Abstract

A temperature control device characterized by: for each temperature control zone of a plurality of temperature control zones 11 to 1N, setting, as an upper-limit operation amount, a restrictive output limiter value obtained by multiplying a predetermined output limiter value set for the temperature control zone by a total power restriction coefficient, which is common to all of the temperature control zones, wherein the predetermined output limiter values for the temperature control zones are set so as to equalize the time it takes for each temperature control zone to reach a target temperature; calculating a warm-up time scale factor, which is the ratio of a calculated reference warm-up time value obtained by substituting reference conditions into an approximate expression, relative to a calculated warm-up time value obtained by substituting desired setting conditions into the approximate expression, wherein the approximate expression is obtained by approximating the warm-up characteristics of a controlled object to a first order lag; and calculating an estimated warm-up time by multiplying an actual warm-up time measured under said reference conditions by the warm-up time scale factor.

Description

Temperature control device and estimation method of temperature rise completion time

The present invention relates to a temperature control device that controls the temperatures of a plurality of temperature control zones, and a method of estimating heating completion time.

In plastic molding machines with multiple temperature control zones, reflow furnaces, heat treatment equipment, etc., the heater is designed according to the characteristics such as heat capacity in each temperature control zone, but in actual temperature control, each temperature control The time when the zone reaches the target temperature often varies.
In the temperature control zone where the target temperature is reached quickly, it is necessary to maintain the target temperature until the other temperature control zones reach the target temperature, so that the resin which is a molding such as a plastic molding machine may be burned is there. Also, it consumes unnecessary power.
With regard to such a problem, Patent Document 1 discloses a temperature after a predetermined time has elapsed based on the temperature measurement value of the temperature control zone that is the slowest in reaching the target temperature in order to synchronize the temperature rise completion time. And a temperature control method for setting the predicted temperature to a provisional target temperature of another temperature control zone.
According to Patent Document 2, even when the target temperatures of a plurality of temperature control zones are different, the temperature control zone (master A temperature control method is disclosed that calculates a corrected temperature target value of another temperature control zone (slave section) using the measured value arrival rate of the section).
In Patent Document 3, a value obtained by dividing the integrated value of the operating amount in each temperature control zone by the largest value among the integrated values of the operating amount in the plurality of temperature control zones is an output limiter value of each temperature control zone Thus, even when the temperatures of the plurality of temperature control zones interfere with each other, the time required to reach the target temperature of each temperature control zone can be made substantially the same without causing generation of a large peak power. A temperature control device and temperature control method are disclosed.

Japanese Patent Application Laid-Open No. 10-315291 JP 2005-35090 A International Publication No. 2016/075786

The technique of Patent Document 3 makes the time required to reach the target temperature of each temperature control zone substantially the same for a control target having a plurality of temperature control zones without causing generation of a large peak power. Can be very useful.
However, there are also calls for further suppression of peak power. In addition, since suppressing the peak power lengthens the time until the temperature rise is completed, there is also a request to know how long the temperature rise time will be extended when the peak power is suppressed. .

The present invention, in view of the above points, is a temperature control device capable of making the time required to reach the target temperature of each temperature control zone substantially the same for a control target having a plurality of temperature control zones. It aims at providing a temperature control device and estimation method of temperature rise completion time which can estimate temperature rise completion time which fluctuates by suppression of the peak power concerned while aiming at control of peak power more.

(Configuration 1)
A temperature control device for controlling the temperature of a controlled object having a plurality of temperature control zones, wherein the temperature control devices are determined for each temperature control zone such that the time for the temperature of each temperature control zone to reach the target temperature matches. A predetermined output limiter value is multiplied by the total power suppression coefficient common to each temperature control zone to obtain a suppression output limiter value, and the operation amount for temperature control in the temperature control zone calculated based on the target temperature and the measured temperature is The calculated operation amount is used as the operation amount when the suppression output limiter value is equal to or less than the suppression output limiter value, and the suppression output limiter value is used as the operation amount when the calculated operation amount is larger than the suppression output limiter value. A temperature control unit for controlling the temperature of each temperature control zone, and a reference increase obtained by substituting a reference condition into an approximate expression approximating the temperature rise characteristic of the control object by a first-order delay; A heating rate multiplying factor, which is a ratio of a time calculation value and a heating time calculation value obtained by substituting a desired setting condition into the approximate expression, is calculated, and the temperature raising time measured under the reference condition is What is claimed is: 1. A temperature control apparatus comprising: a temperature rise time estimation unit that calculates an estimated temperature rise time by multiplying a temperature rise time ratio.

(Configuration 2)
The temperature control device according to Configuration 1, wherein the temperature raising time multiplying factor is calculated by the following equation 1 or an equation obtained by modifying the same.

In the above equation, C: heating time multiplication factor, B: total power suppression coefficient, θ _SP : load factor at control stabilization after temperature rising.

(Configuration 3)
The temperature control device according to Configuration 1, wherein the temperature increase time ratio is calculated by the following equation 2 or a equation obtained by modifying the following equation.

In the above formula, C: heat-up time ratio, B: total power reduction coefficient, theta _SP: control stability when the load rate after heating, K: process gain, [Delta] Y: the difference in ambient temperature at reference conditions and setting conditions.

(Configuration 4)
The temperature control device according to Configuration 2 or 3, wherein the load factor at the time of control stabilization after the temperature rise is calculated by the following equation 3 or a equation obtained by modifying the following equation.

In the above equation, P _i : rated power of the heat source in each temperature control zone, θ _SPi : load factor at control stabilization after temperature rise in each temperature control zone.

(Configuration 5)
A temperature control method for controlling the temperature of a controlled object having a plurality of temperature control zones, wherein the temperature control method is determined for each temperature control zone so that the time for the temperature of each temperature control zone to reach the target temperature matches. A suppression output limiter value, which is a value obtained by multiplying the total output suppression coefficient common to each temperature control zone by a predetermined output limiter value, is set as the upper limit of the operation amount, and from the target temperature and the measurement temperature, for temperature control in the temperature control zone The operation amount is calculated, and the calculated operation amount is used as the operation amount when the calculated operation amount is less than the suppression output limiter value, and the suppression output limiter is used when the calculated operation amount is larger than the suppression output limiter value. It is a method of estimating temperature rising completion time in a temperature control method of controlling temperature of each temperature control zone using a value as an operation amount, which is the temperature rising characteristic of the control object Ascension, which is the ratio of the calculated reference temperature increase time obtained by substituting the reference condition into an approximation formula approximated by a first-order delay, and the calculated temperature rise time obtained by substituting a desired setting condition into the approximation formula A temperature rising completion time estimation method comprising: calculating a heating time magnification; and calculating an estimated temperature rising time by multiplying the temperature rising time multiplied by the temperature rising time actually measured under the reference condition.

(Configuration 6)
The temperature rise completion time estimation method according to Configuration 5, wherein the temperature rise time magnification is calculated by the following formula 4 or a formula obtained by modifying the formula 4 below.

(Configuration 7)
The temperature rise completion time estimation method according to Configuration 5, wherein the temperature rise time magnification is calculated by the following formula 5 or a formula obtained by modifying the following formula 5:

(Configuration 8)
The method for estimating the temperature rise completion time according to Configuration 6 or 7, wherein the load factor at the time of control stabilization after the temperature rise is calculated by the following equation 6 or a equation obtained by modifying the following equation.

According to the temperature control device of the present invention, in the temperature control device capable of making the time required to reach the target temperature of each temperature control zone substantially the same, peak power can be further suppressed and the peak power It is possible to estimate the temperature rise completion time that fluctuates due to the suppression of.

A block diagram schematically showing the configuration of a temperature control device according to an embodiment of the present invention Block diagram schematically showing the configuration of the temperature control unit Schematic illustration of a plastic molding machine having _N temperature control zones 1 ₁ to 1 _N with mutually interfering temperatures. Graph showing experimental results of temperature control when using the temperature control method disclosed in Patent Document 3 Graph showing experimental results of temperature control when the temperature control method according to the embodiment is used Graph showing experimental results of temperature control when the temperature control method according to the embodiment is used

The present invention is a temperature control device for controlling the temperature of a controlled object having a plurality of temperature control zones, and operation in each temperature control zone such that the time for the temperature of each temperature control zone to reach the target temperature matches. It is a technique used for temperature controlled devices whose quantity is controlled. In the present invention, the amount of operation of each temperature control zone (temperature rise time) is controlled in order to suppress the peak power of the conventional device controlled so that the temperature rise time of each temperature control zone matches. The manipulated variable (controlled to match) is multiplied by the total power suppression coefficient common to each temperature control zone. Further, the present invention is a temperature control device capable of estimating a temperature rise completion time that fluctuates with such suppression of peak power, and a method of estimating a temperature rise completion time.
In the embodiment described below, as a method of “controlling the operation amount in each temperature control zone so that the time when the temperature of each temperature control zone reaches the target temperature matches” to which the present invention is applied, Patent Document 3 Using the technology disclosed in

Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings. In addition, the following embodiment is one form at the time of embodying this invention, Comprising: This invention is not limited within the range.

The temperature control device 100 according to the present embodiment is, for example, a temperature of a control target having N (N is an integer of 1 or more) temperature control zones such as a plastic molding machine shown in FIG. Control.
FIG. 1 is a block diagram showing an outline of a configuration of a temperature control device of the present embodiment.
As shown in FIG. 1, the temperature control device 100 according to the present embodiment includes a display unit 120 for displaying various types of information, an input unit 130 for receiving input of set values from a user, an operation instruction, and the like, A heat time estimation unit 110 and a temperature control unit 140 are provided.
The display unit 120 is formed of, for example, a liquid crystal panel, and also displays the estimated value of the temperature rise completion time calculated by the temperature rise time estimation unit 110 described below.
The input unit 130 in the present embodiment has a function of receiving a signal input from another device (for example, a temperature controller) in addition to the function as a UI that receives an input from the user.

FIG. 2 is a block diagram schematically showing the configuration of the temperature control unit 140. As shown in FIG.
The temperature control unit 140 includes temperature control means 10 ₁ to 10 _N respectively corresponding to the _N temperature control zones 1 ₁ to 1 _N , and controls the power supply to the respective heaters 2 ₁ to 2 _N. By performing each of them, temperature control for each of the temperature control zones 1 ₁ to 1 _N is performed.
The temperature control units 10 ₁ to 10 _N have the same configuration, and switch the signals of the correction target temperature setting unit 11, the target temperature setting unit 12, the correction target temperature setting unit 11, and the target temperature setting unit 12 to obtain SV values. Switch 13 for outputting, temperature measuring unit 14 for measuring the temperature (PV value) of the temperature control zone, difference calculating unit 15 for calculating the difference between the PV value and the SV value from the switch 13, the SV value and the PV value The PID control calculation unit 16 that calculates the MV value by performing PID control based on the difference between the two, the calculated MV value, and the suppression output limiter value output from the total power suppression coefficient multiplication unit 60 described below In comparison, the output limiter 17 outputs the MV value if the MV value is less than or equal to the suppression output limiter value, and outputs the suppression output limiter value if the MV value exceeds the suppression output limiter value. It comprises a changeover switch 18, to output as MV by switching the signal of the output limiter 17 and the PID control calculation unit 16.
As described above, the temperature control apparatus 100 according to the present embodiment uses, as a method of “controlling the operation amount in each temperature control zone so that the time when the temperature in each temperature control zone reaches the target temperature matches”. The difference between the temperature control unit 140 and the patent document 3 is the total power suppression coefficient multiplication unit 60 only.
The parts other than the total power suppression coefficient multiplying unit 60 have the same configuration and processing concept as those of Patent Document 3, and therefore will be described here in a simplified manner. The processing concept concerning the same configuration as Patent Document 3 is to use an output limiter value for matching the temperature rise time and suppressing the peak power for each of the temperature control zones 1 ₁ to 1 _N. This output limiter value measures the temperature rise of temperature control zones 1 ₁ to 1 _N once with an operation amount controlled so that the temperature rise completion time of each temperature control zones 1 ₁ to 1 _N coincide. It is calculated by dividing the integrated value of the operation amount of each temperature control zone by the largest value among the integrated values of the operation amount for each temperature control zone.
Specifically, the temperature control zones 1 ₁ to 1 _N are raised by the SV ₁ ′ (corresponding to the operation amount controlled to match the temperature rise time) set by the correction target temperature setting unit 11. Perform the temperature once (the changeover switch 13 outputs SV ₁ ′ from the correction target temperature setting unit 11 and the changeover switch 18 outputs MV ₁ from the PID control calculation unit 16), and the operation amount for each temperature control zone at this time The integrated value of is stored in the operation amount integrated value storage unit 40.
Next, in the output limiter value calculation unit 50, the largest value among the integrated values of the operation amounts for each temperature control zone stored in the operation amount integrated value storage unit 40 corresponds to the operation amount of each temperature control zone. by dividing the integrated value by the temperature control zones 1 _{1 ~} 1 _~ output limiter value L ₁ corresponding to _N L N _(as described above, the maximum amount of operation of the integrated value (the maximum value of the output), the temperature A value of 0 to 1) obtained by normalizing the integrated value of the operation amount of the control zone is calculated.
In the temperature raising control after obtaining the output limiter values L ₁ to L _N , the changeover switch 13 is the output from the target temperature setting unit 12 (for example, SV inputted from the temperature controller), and the changeover switch 18 is the output limiter It is switched to select each of the outputs from 17. The output limiter 17 outputs the MV value as it is if the MV value from the PID control calculation unit 16 is equal to or less than the output limiter value, and if the MV value from the PID control calculation unit 16 exceeds the output limiter value. Output the output limiter value. As a result, the operation amount for controlling the power supply to the heater is controlled with the output limiter value corresponding to each of the temperature control zones 1 ₁ to 1 _N as the upper limit. According to the technology of Patent Document 3, the temperature rise time is made to coincide and the peak power is suppressed by the above process.

In the temperature control device 100 according to the present embodiment, the total power suppression coefficient multiplication unit 60 is provided for the technique of Patent Document 3 to allow each temperature to be set for the output limiter value for each temperature control zone described above. By multiplying the total power suppression coefficient common to the control zones (0 <total power suppression coefficient <1), the “suppressed output limiter value” is calculated in which the output limiter value is further restricted. The output limiter 17 outputs the MV value as it is if the MV value from the PID control calculation unit 16 is equal to or less than the suppression output limiter value, and the MV value from the PID control calculation unit 16 exceeds the suppression output limiter value. Outputs the suppression output limiter value.
Thereby, in the temperature control device 100 according to the present embodiment, the peak power can be further suppressed while matching the temperature increase completion time of each temperature control zone.
That is, the temperature control unit 140 in the temperature control device 100 according to the present embodiment is configured such that, in temperature control of a control target having a plurality of temperature control zones, the time for the temperature of each temperature control zone to reach the target temperature matches. A control output limiter value, which is a value obtained by multiplying a predetermined output limiter value determined for each temperature control zone by a total power suppression coefficient common to each temperature control zone, is set as the upper limit of the operation amount, and the target temperature and the measured temperature The operation amount for temperature control in the temperature control zone is calculated from the above, and when the calculated operation amount is equal to or less than the suppression output limiter value, the calculated operation amount is used as the operation amount, and the calculated operation amount is the suppression output When the value is larger than the limiter value, the suppression output limiter value is used as an operation amount to control the temperature of each temperature control zone.

Here, it was confirmed by experiments that the temperature control device 100 of the present embodiment can further suppress peak power while making the temperature rise completion time of each temperature control zone coincide with each other.
FIGS. 4 to 6 are graphs showing experimental results of experiments in which each temperature control zone is heated to 100 ° C. in a plastic molding machine having four temperature control zones shown in FIG.
FIG. 4 shows experimental results in the case of using the temperature control method disclosed in Patent Document 3, and FIGS. 5 and 6 show the total power suppression coefficient in the temperature control device 100 of this embodiment of 0.8 ( It is a graph which shows the result of the experiment performed by FIG. 5) and 0.6 (FIG. 6).
In the case of control by the temperature control device 100 of the present embodiment (FIGS. 5 and 6), as shown as “PV for each CH (ie, measured temperature of each temperature control zone)” in FIGS. The temperature rise completion time of each temperature control zone could be matched at a level comparable to the control (FIG. 4) of Patent Document 3.
Further, as shown by “total power MV MV of 4 CH” in FIGS. 4 to 6, in the case of control by the temperature control device 100 of the present embodiment (FIGS. 5 and 6), the control of Patent Document 3 (FIG. 4) The peak power could be further suppressed.

Here, as also shown in FIGS. 4 to 6, by using the suppression output limiter value in which the output limiter value is further restricted by the total power suppression coefficient, the time until the temperature rise completion becomes longer. Specifically, in the control of Patent Document 3 (FIG. 4), the temperature rise is completed in about 32 minutes, but when the total power suppression coefficient is 0.8 (FIG. 5), the temperature rise When the completion time is about 43 minutes and the total power suppression coefficient is 0.6 (FIG. 6), the temperature rise completion time is extended to about 58 minutes.
In this regard, the temperature control device 100 according to the present embodiment includes the temperature increase time estimation unit 110 so as to be able to calculate an estimated value of the temperature increase completion time that increases in accordance with the total power suppression coefficient.
The temperature rising time estimation unit 110 substitutes the reference temperature calculated value obtained by substituting the reference conditions into an approximation formula that approximates the temperature rising characteristics of the control object with a first-order delay, and substitutes the desired setting conditions into the approximation formula. The estimated temperature increase time is calculated by calculating the temperature increase time ratio that is the ratio to the temperature increase time calculated value obtained by the above-mentioned method, and multiplying the temperature increase time measured by the reference condition by the temperature increase time ratio. It is calculated.

A calculation formula for calculating an estimated value of the temperature rise completion time will be described.

First, process gain K is a value that means the variation range of the manipulated variable (electric power) and the variation range of the controlled variable, and the final value of the controlled variable (temperature) when manipulated variable = P ₁ is Y ₁ Assuming that the final value of the control amount when the amount = P ₂ is Y ₂ , the value represented by the equation 7 is, however, the load ratio θ which is a value normalized by the maximum value P _MAX of the operation amount Is expressed by Equation 7. That is, the load factor corresponding to the maximum value of the operation amount corresponds to the maximum operation amount normalized by the maximum value of the operation amount.

Also, in the control theory, the relationship between the manipulated variable and the final value of the controlled variable is treated as linear (K is the same value regardless of Y and P, and generally the manipulated variable P is its maximum value P _The value normalized by _MAX (hereinafter referred to as the load factor θ) is used. In this definition, the relationship between the change width Y of the final value of the control amount (temperature) (Y = Y _2- Y ₁ ) and the change width θ of the load factor (θ = θ ₂ -θ ₁ ) It is expressed by equation 8 below.

Next, related variables and their relational expressions are defined as shown in Table 1 below.

“Formula representing step response of control amount (expression in which control target is approximated by temporary delay)” in Table 1 is represented again as Expression 9.

Here, when Ta is calculated by substituting y (t) = Ysp, t = Ta, θ = 1, Ye = Y ₀ into Expression 9, Expression 10 is obtained. This Ta is “a reference temperature rise time calculated value obtained by substituting a reference condition into an approximate expression that approximates the temperature rise characteristic to be controlled by a first order delay”.

Next, when Tb is calculated by substituting y (t) = Ysp, t = Tb, θ = B, Ye = Y ₀ + ΔY into Expression 9, Expression 11 is obtained. This Tb is “a temperature rise time calculation value obtained by substituting a desired setting condition into an approximate expression in which the temperature rise characteristic to be controlled is approximated by a first order delay”.

Here, when C = Tb / Ta is obtained as θ _SP = (Y _SP -Y ₀ ) / K, Expression 12 is obtained.

“C calculated by the equation 12 is“ a reference temperature increase calculation value (Ta) obtained by substituting a reference condition into an approximate expression that approximates the temperature It is a temperature rising time magnification which is a ratio with the temperature rising time calculated value (Tb) obtained by substituting setting conditions.
Equation 12 is the case where the maximum value of the manipulated variable is a value (desired setting condition) obtained by multiplying the maximum value of the manipulated variable (reference condition) by that time by the coefficient B (the desired setting condition), and the ambient temperature is Y ₀ (reference In the case where the condition (desired setting condition) deviates from the condition (the desired setting condition), it is an equation for calculating how many times the time until the target temperature is reached becomes with respect to the reference condition.

However, Equation 12 is a formula derived for one control target, but in the case of a control target having a plurality of temperature control zones, the load factor θ _SPi when stabilized at the target value is calculated for each temperature control zone In order to obtain different values, it is necessary to calculate one load factor θ _SP to be used for this calculation. The following equation 13 is a calculation equation of the load factor θ _SP substituted into the equation 12. In Equation 13, P _i is the rated power of the heat source (heater) in each temperature control zone, and θ _SPi is the load factor at the time of control stabilization after temperature rise in each temperature control zone.

Assuming that the time required for the temperature (control amount) of the control object to reach the target value is Ta, where the operation amount (load factor) to be added to the control object is A, and the temperature of the control object (control The target value when the maximum value of the manipulated variable (load factor) is A · B compared to the case where the manipulated variable (load factor) is θ _SP when sufficient time has elapsed in a stable state) The time Tc required for the arrival can be calculated by equation 14.

From the above, if previously measured Ta and theta _SP, the operation amount (load factor) is taken as A · B, the time Tc required for the Atsushi Nobori can be calculated by equation 14. That is, the total power consumption is obtained by measuring the temperature rise time under the reference condition Ta which is the temperature rise time under the reference condition, the load factor θ _SP when the temperature is stable, and the process gain K by actually performing the temperature rise control once in advance. It is possible to calculate an estimated value of the temperature rise completion time when the suppression coefficient B is changed or when the ambient temperature is changed (desired setting condition). The temperature and the stable state of the load factor theta _SP, a load factor of the control stability when the temperature was raised (a state in which the control object is stabilized at the target temperature).

In the temperature control device 100 of the present embodiment, the temperature rise time estimation unit 110 calculates the estimated value of the temperature rise completion time described above.
Specifically, temperature rise control is performed in advance by an actual device, Ta, θ _SP , and K (reference conditions) measured by this are acquired, and these values are stored in the temperature rise time estimation unit 110.
When the user inputs the setting value of the total power suppression coefficient B and the ambient temperature information (desired setting condition) from the input unit 130 in the temperature rising control to be performed thereafter, the temperature rising time estimation unit 110 causes Expression 12 and Expression 14 to be input. An estimated value of the temperature rise completion time is calculated based on this, and this is output to the display unit 120. Since the user can know the estimated value of the temperature increase completion time when setting the temperature increase control, it is very convenient.
In the control, the characteristics of the object to be controlled are generally approximated by "temporary delay + waste time", but in the explanation so far, the waste time has been omitted, and therefore, the case where the waste time is included is described below. Do.
Since the waste time is a constant value regardless of the coefficient with respect to the manipulated variable, the waste time is simply subtracted from the time required from the start of temperature rise to the completion of temperature rise, and the previous term is calculated, and the waste time is added after the calculation. In this case, it is possible to calculate the time required to reach the target value in the case of “temporary delay + dead time” when the output limiter value is “output limiter value × total power suppression coefficient B”.

Ta and the like were measured in the experiment of FIG. 4 as “the temperature increase control under the reference conditions in which the experiment shown in FIG. The estimated value of the temperature rise completion time calculated by the above calculation method is approximately about “the desired setting condition”, B = 0.8, ΔY = 0.0 ° C., using the actual measurement value under the reference condition. It was 41.5 minutes. In addition, when “desired setting condition” is B = 0.6 and ΔY = 2.0 ° C., the estimated value of the temperature rise completion time calculated by the above calculation method was about 57.4 minutes .
Table 2 summarizes these conditions and the like.

B = 0.8 and ΔY = 0.0 ° C. are the experimental conditions of FIG. 5, and as shown in FIG. 5, the actual temperature rise completion time was about 43 minutes. In addition, B = 0.6 and ΔY = 2.0 ° C. are the experimental conditions of FIG. 6, and the actual temperature rise completion time was about 58 minutes. It was confirmed that the estimated values (about 41.5 minutes and about 57.4 minutes) calculated by the above method are values close to the actual temperature rise completion time, and have practical accuracy.

As described above, according to the temperature control device 100 of the present embodiment, the total power suppression coefficient (0 <total power suppression coefficient <1) common to each temperature control zone is set to the output limiter value for each temperature control zone. By setting the “suppressed output limiter value” that further restricts the output limiter value by multiplication as the upper limit of the operation amount, it is possible to further suppress the peak power while matching the temperature rise completion time of each temperature control zone can do.
In addition, since it is possible to calculate the estimated value of the temperature rise completion time which fluctuates by setting of the total power suppression coefficient, the convenience is high.

In this embodiment, in the calculation of the estimated value of the temperature rise completion time, the difference (ΔY) of the ambient temperature is also used as a parameter as an example, and the case where this is input by the user is taken as an example. Thus, the ambient temperature may be automatically measured, and ΔY, which is the difference from the “reference condition”, may be automatically calculated.
Further, for example, when the installation environment of the apparatus is basically temperature-controlled and it is not necessary to consider the difference in the ambient temperature, etc., ΔY in equation 12 is not used (ΔY = 0), thereby It may be simplified as 15.

In this embodiment, although the formula 12 (or the formula 15) and the formula 14 are shown as the form of the formula for calculating the estimated value of the temperature rise completion time, the form of the formula is not limited to this. Of course, the equation may be appropriately modified and used.
Further, in the present embodiment, although it has been described that the calculation process based on Equation 12 and Equation 14 is performed by the temperature rising time estimation unit 110, the increase corresponding to each condition is performed in advance based on Equation 12 (or Equation 15). The heating time magnification C is calculated, and the temperature rising time magnification C corresponding to each condition is set as a table in the apparatus, and the calculation of the estimated value of the temperature rising completion time by the temperature rising time estimation unit 110 is Alternatively, calculation may be performed only on the basis of Equation 14 using C acquired from the table.

In the present embodiment, although the present invention is applied to an apparatus for controlling the temperatures of a plurality of temperature control zones which mutually interfere with each other, the present invention is directed to a control in which the temperatures of the respective temperature control zones do not interfere. Of course it can also be used for the subject.
Further, in the present embodiment, a method of “controlling the operation amount in each temperature control zone so that the time when the temperature of each temperature control zone reaches the target temperature matches” in the temperature control device to which the present invention is applied. Although the method using the method of Patent Document 3 is taken as an example, the present invention can also be applied to one in which the temperature rise time is synchronized by another method.

100. . . Temperature control device 110. . . Heating time estimation unit 140. . . Temperature control unit 1 ₁ to 1 _N. . . Temperature control zone 10 ₁ to 10 _N. . . Temperature control means 50. . . Total power suppression coefficient multiplier

Claims

A temperature control device for controlling the temperature of a controlled object having a plurality of temperature control zones, wherein the temperature control devices are determined for each temperature control zone such that the time for the temperature of each temperature control zone to reach the target temperature matches. A predetermined output limiter value is multiplied by the total power suppression coefficient common to each temperature control zone to obtain a suppression output limiter value, and the operation amount for temperature control in the temperature control zone calculated based on the target temperature and the measured temperature is The calculated operation amount is used as the operation amount when the suppression output limiter value is equal to or less than the suppression output limiter value, and the suppression output limiter value is used as the operation amount when the calculated operation amount is larger than the suppression output limiter value. A temperature control unit that controls the temperature of each temperature control zone;
Reference temperature rise time calculation value obtained by substituting the reference condition into an approximation formula that approximates the temperature rise characteristic of the control object by a first-order delay, and temperature rise time obtained by substituting a desired setting condition into the approximation formula A temperature rise time estimation unit that calculates an estimated temperature rise time by calculating a temperature rise time magnification that is a ratio to a calculated value, and multiplying the temperature rise time magnification measured by the reference condition by the temperature rise time magnification When,
A temperature control device comprising:
The temperature control device according to claim 1, wherein the temperature raising time magnification is calculated by the following equation 1 or a equation obtained by modifying the same.

In the above equation, C: heating time multiplication factor, B: total power suppression coefficient, θ SP : load factor at control stabilization after temperature rising.
The temperature control device according to claim 1, wherein the temperature increase time factor is calculated by the following equation 2 or a equation obtained by modifying it.

In the above formula, C: heat-up time ratio, B: total power reduction coefficient, theta SP: control stability when the load rate after heating, K: process gain, [Delta] Y: the difference in ambient temperature at reference conditions and setting conditions.
The temperature control device according to claim 2 or 3, wherein the load factor at the time of control stabilization after the temperature rise is calculated by the following equation 3 or a equation obtained by modifying it.

In the above equation, P i : rated power of the heat source in each temperature control zone, θ SPi : load factor at control stabilization after temperature rise in each temperature control zone.
A temperature control method for controlling the temperature of a controlled object having a plurality of temperature control zones, wherein the temperature control method is determined for each temperature control zone so that the time for the temperature of each temperature control zone to reach the target temperature matches. A suppression output limiter value, which is a value obtained by multiplying the total output suppression coefficient common to each temperature control zone by a predetermined output limiter value, is set as the upper limit of the operation amount, and from the target temperature and the measurement temperature, for temperature control in the temperature control zone The operation amount is calculated, and the calculated operation amount is used as the operation amount when the calculated operation amount is less than the suppression output limiter value, and the suppression output limiter is used when the calculated operation amount is larger than the suppression output limiter value. A method of estimating temperature rise completion time in a temperature control method of controlling the temperature of each temperature control zone using a value as an operation amount,
Reference temperature rise time calculation value obtained by substituting the reference condition into an approximation formula that approximates the temperature rise characteristic of the control object by a first-order delay, and temperature rise time obtained by substituting a desired setting condition into the approximation formula It is characterized in that an estimated temperature increase time is calculated by calculating a temperature increase time ratio which is a ratio to a calculated value, and multiplying the temperature increase time measured by the reference condition by the temperature increase time ratio. How to estimate the temperature rise completion time.
The method for estimating the temperature rise completion time according to claim 5, wherein the temperature rise time magnification is calculated by the following equation 4 or a equation obtained by modifying the following equation.

In the above equation, C: heating time multiplication factor, B: total power suppression coefficient, θ SP : load factor at control stabilization after temperature rising.
The method of estimating heating completion time according to claim 5, wherein the heating temperature multiplication factor is calculated by the following expression 5 or a expression obtained by modifying the following expression.

In the above formula, C: heat-up time ratio, B: total power reduction coefficient, theta SP: control stability when the load rate after heating, K: process gain, [Delta] Y: the difference in ambient temperature at reference conditions and setting conditions.
The method according to claim 6 or 7, wherein the load factor at the time of control stabilization after the temperature rise is calculated by the following formula 6 or a formula obtained by modifying the following formula.

In the above equation, P i : rated power of the heat source in each temperature control zone, θ SPi : load factor at control stabilization after temperature rise in each temperature control zone.