WO2019080050A1 - 微纳光纤布拉格光栅的制备系统及制备方法 - Google Patents
微纳光纤布拉格光栅的制备系统及制备方法Info
- Publication number
- WO2019080050A1 WO2019080050A1 PCT/CN2017/107822 CN2017107822W WO2019080050A1 WO 2019080050 A1 WO2019080050 A1 WO 2019080050A1 CN 2017107822 W CN2017107822 W CN 2017107822W WO 2019080050 A1 WO2019080050 A1 WO 2019080050A1
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- WIPO (PCT)
- Prior art keywords
- micro
- femtosecond laser
- nano fiber
- laser
- preparation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
Definitions
- the invention belongs to the technical field of gratings, and in particular relates to a preparation system and a preparation method of a micro-nano fiber Bragg grating based on femtosecond laser two-photon polymerization technology.
- Bragg gratings are mainly prepared by the following methods:
- Phase mask method using ultraviolet light to illuminate the phase mask, the diffraction fringes are generated by the diffraction of the phase mask, and the positive and negative first-order diffraction fringes form a light-dark interlace after the interference.
- the phase mask is expensive and has a fixed period.
- HF acid etching method the raw material of bare fiber is only reacted with HF acid (fluoric acid), and the fiber with grating is placed in a device containing HF acid solution, by controlling the ambient temperature of HF acid and The concentration of HF acid can etch away the cladding to obtain a micro/nano fiber grating.
- HF acid is toxic.
- Focused ion beam etching The ion beam emitted by the ion source is accelerated and focused as an incident beam, and the high-energy ions collide with the solid surface atoms to sputter off the solid atoms, using the accelerated ions in the micro-nano fiber.
- the surface forms a periodic refractive index modulated corrugated structure.
- the technical problem to be solved by the present invention is to provide a preparation system and a preparation method of a micro-nano fiber Bragg grating based on femtosecond laser two-photon polymerization technology, aiming at solving the problems of expensive equipment and long preparation period of the prior art grating preparation.
- the present invention is achieved by a femtosecond laser two-photon polymerization technology micro-nano fiber Bragg grating preparation system, comprising a laser generating unit, a preparation unit, a displacement platform and a host computer, and the sample is placed on the displacement platform.
- the sample is a micro/nano fiber coated with a layer of cured glue;
- the laser generating unit is configured to generate a femtosecond laser with a preset power value, and transmit the femtosecond laser to the preparation unit;
- the preparation unit is configured to focus the femtosecond laser on the micro/nano fiber
- the upper computer is configured to control the displacement platform to move, so that the femtosecond laser scans along a radial direction of the micro/nano fiber, and the pre-set Bragg grating is solidified on the micro/nano fiber.
- the laser generating unit includes a femtosecond laser, a beam expander, a laser power attenuator, and an optical path adjustment module;
- the femtosecond laser is configured to generate a femtosecond laser and inject the femtosecond laser into the beam expander;
- the beam expander is configured to expand the femtosecond laser beam, and the expanded femtosecond laser light is incident on the laser power attenuator;
- the laser power attenuator is configured to perform power adjustment on the incident femtosecond laser, and the power-adjusted femtosecond laser is incident on the optical path adjustment module;
- the optical path adjustment module is configured to perform optical path adjustment on the incident femtosecond laser, so that the femtosecond laser is incident on the preparation unit according to a preset angle.
- the laser generating unit further includes a power meter and a switch connected to the upper computer;
- the power meter is located between the laser power attenuator and the optical path adjustment module, and is configured to acquire a power value of the power-adjusted femtosecond laser and send the power value to the upper computer;
- the switch is configured to control an irradiation time of a femtosecond laser injected into the preparation unit.
- the optical path adjustment module includes two mirrors.
- the preparation unit comprises a dichroic mirror and a microscope objective
- the dichroic mirror is configured to reflect a beam of a near-infrared band in an incident femtosecond laser into the microscope objective;
- the microscope objective is configured to focus the beam of the near-infrared band on the micro/nano fiber.
- the preparation system further includes an observation unit;
- the observation unit is configured to observe a curing phenomenon of the curing glue when the femtosecond laser is scanned.
- observation unit includes a filter and an image sensor CCD;
- the dichroic mirror is configured to transmit visible light in the incident femtosecond laser into the filter
- the visible light is filtered by the filter and then enters the image sensor CCD for imaging.
- the embodiment of the invention further provides a preparation method for preparing a micro/nano fiber Bragg grating by the preparation system of the micro/nano fiber Bragg grating described above, comprising:
- the laser power attenuator is used to adjust the femtosecond laser to a preset power value, and the horizontal moving speed of the displacement platform is controlled by the upper computer, and the power-adjusted femtosecond laser is focused on the micro-nano fiber by using the microscope objective lens;
- the cured sample is rinsed with a cleaning solution, and the residual cleaning liquid of the sample is washed with alcohol to prepare a micro/nano fiber Bragg grating solidified on the micro/nano fiber.
- the cleaning agent is isopropyl alcohol
- the rinsing of the cured sample with a cleaning solution, and then washing the residual liquid of the sample with alcohol includes:
- the cover glass was removed, and the cured sample was rinsed with the isopropyl alcohol for 30 seconds to 2 minutes, and then the sample was rinsed with alcohol for 30 seconds to 2 minutes.
- the slide glass is a magnesium fluoride sheet having a grid pitch ⁇ of 0.5 ⁇ m to 3 ⁇ m, a grid period number N of 300 to 500, and a single grid length l of 3 ⁇ m to 8 Micron.
- the present invention has the beneficial effects that: in the embodiment of the invention, a sample is prepared by coating a layer of curing glue on the micro-nano fiber, and the pre-set Bragg grating is cured on the sample by the focused femtosecond laser.
- the embodiment of the present invention does not require a cumbersome grating sensitization process, and the grating period is controllable and the reflectivity is high.
- the Bragg grating prepared in this embodiment is cured.
- the micro-nano fiber surface is extremely sensitive to the external environment.
- the refractive index is modulated by solidifying the Bragg grating on the surface of the micro-nano fiber, so that the optical fiber itself does not cause any damage or deformation, and the preparation process is simple, and the preparation system is relatively In the case of prior art devices, the price is low.
- FIG. 1 is a schematic structural diagram of a preparation system of a micro/nano fiber Bragg grating according to an embodiment of the present invention
- FIG. 2 is a detailed structural diagram of a preparation system of a micro/nano fiber Bragg grating according to an embodiment of the present invention
- FIG. 3 is a schematic structural diagram of a micro-nano fiber Bragg grating according to an embodiment of the present invention.
- FIG. 4 is a flow chart of preparing a micro/nano fiber Bragg grating by a micro-nano fiber Bragg grating preparation system according to an embodiment of the present invention
- FIG. 5 is a scanning electron micrograph of a micro-nano fiber Bragg grating provided by an embodiment of the present invention.
- FIG. 6 is a grating spectrum diagram of different refractive index liquids according to an embodiment of the present invention.
- FIG. 7 is a graph showing the relationship between the grating Bragg peak wavelength and the refractive index liquid change according to an embodiment of the present invention.
- FIG. 1 shows a preparation system of a micro-nano fiber Bragg grating provided by an embodiment of the present invention, comprising a laser generating unit 1, a preparation unit 2, a displacement platform 3 and a host computer 4, and the sample is placed on the displacement platform 3,
- the sample is a micro/nano fiber coated with a layer of cured glue;
- the laser generating unit 1 is configured to generate a femtosecond laser with a preset power value, and transmit the femtosecond laser to the preparation unit 2;
- the upper computer 4 is configured to control the displacement platform 3 to move, so that the femtosecond laser scans along the radial direction of the micro/nano fiber, and the pre-set Bragg grating is solidified on the micro-nano fiber.
- the displacement platform 3 is a three-dimensional precision displacement platform, and the three-dimensional glutinous rice moving platform can be moved in the horizontal direction and the vertical direction under the control of the upper computer 4, and the three-dimensional precision mobile platform can also be controlled by the upper computer 4.
- the host computer 4 is a computer.
- FIG. 2 shows a preparation system of a micro-nano fiber Bragg grating provided by an embodiment of the present invention, comprising a laser generating unit 1, a preparation unit 2, a displacement platform 3, a host computer 4, and an observation unit 5, wherein:
- the laser generating unit 1 includes a femtosecond laser, a beam expander, a laser power attenuator, a power meter, a switch, and an optical path adjustment module;
- the femtosecond laser is configured to generate a femtosecond laser and inject the femtosecond laser into the beam expander;
- the beam expander is configured to expand the femtosecond laser beam, and the expanded femtosecond laser light is incident on the laser power attenuator;
- the laser power attenuator is configured to perform power adjustment on the incident femtosecond laser, and the power-adjusted femtosecond laser is incident on the optical path adjustment module after the power meter;
- the power meter is located between the laser power attenuator and the optical path adjustment module, and is configured to acquire a power value of the power-adjusted femtosecond laser and send the power value to the upper computer;
- the switch is configured to control an irradiation time of a femtosecond laser injected into the preparation unit.
- the optical path adjustment module is configured to perform optical path adjustment on the incident femtosecond laser, so that the femtosecond laser is incident on the preparation unit according to a preset angle.
- the optical path adjustment module includes two mirrors, and the power-adjusted femtosecond laser is reflected by the two mirrors, and is incident on the preparation unit 2 according to a preset incident angle;
- the preparation unit 2 comprises a dichroic mirror and a microscope objective
- the dichroic mirror is configured to reflect a beam of a near-infrared band in an incident femtosecond laser into the microscope objective;
- the microscope objective is configured to focus the beam of the near-infrared band on the micro/nano fiber.
- the microscope objective is an oil immersion objective.
- the observation unit 5 is configured to observe a curing phenomenon of the curing glue when the femtosecond laser is scanned, including a filter and an image sensor CCD;
- the dichroic mirror is configured to transmit visible light in the incident femtosecond laser into the filter
- the visible light is filtered by the filter and then enters the image sensor CCD for imaging.
- the femtosecond laser beam generated by the femtosecond laser is expanded by a beam expander, and the size of the laser spot after the beam expansion is 2 to 3 times that before the beam expansion, and the expanded femtosecond laser passes.
- the laser power attenuator and the two mirrors are then focused into the glue of the cured glue through an oil immersion objective with a numerical aperture greater than 0.8.
- the laser attenuator is used to adjust the power value of the femtosecond laser
- the power meter is used to detect the power value of the femtosecond laser
- the computer-driven switch is used to control the irradiation time of the femtosecond laser
- the visible light part of the femtosecond laser passes through the two-color
- the excess red light is filtered through the filter and then enters the image sensor CCD image to observe the solidification phenomenon in real time.
- the near-infrared band in the femtosecond laser is reflected by the dichroic mirror and then enters the microscope objective to focus on the glue of the curing glue.
- the sample is fixed on a three-dimensional precision displacement platform, and the movement of the three-dimensional precision displacement platform in three directions of X, Y and Z is controlled by a computer.
- 3 is a micro-nano fiber Bragg grating prepared by an embodiment of the present invention, and the cured Bragg grating is uniformly distributed on the surface of the micro-nano fiber.
- FIG. 4 is a diagram showing a method for preparing a micro/nano fiber Bragg grating by the above-described micro-nano fiber Bragg grating preparation system according to an embodiment of the present invention, comprising:
- a micro-nano fiber with a preset diameter is prepared by a fiber taper method.
- a micro-nano fiber having a diameter of less than 4 micrometers is prepared by a conventional fiber taper method.
- the micro-nano fiber is fixed on a glass slide, and a layer of curing glue is uniformly coated on the micro-nano fiber and covered with a cover glass to prepare a sample.
- the slide glass is a magnesium fluoride sheet
- the micro-nano fiber prepared in step S401 is fixed on a clean magnesium fluoride sheet, and a layer of ultraviolet curing glue is uniformly coated on the micro-nano fiber and covered. Slides were prepared and samples were prepared.
- the power attenuator is used to adjust the power value of the laser beam of the femtosecond laser to a suitable range, and the horizontal moving speed of the three-dimensional precision displacement platform is controlled by a computer, and the femtosecond laser is used by a microscope objective lens with a numerical aperture larger than 0.8. Focus on the micro/nano fiber immersed in the UV curable gel.
- the preset Bragg grating is cured on the sample according to a preset scanning manner.
- the Bragg grating with parameters such as the number of cycles, the length of the grid, and the grid spacing is solidified by line-by-line scanning, and the UV curing is performed during the femtosecond laser irradiation process.
- the exposed area of the gel undergoes cross-linking polymerization to form a solid compound.
- a micro-nano fiber with a diameter of about 1.7 ⁇ m was prepared by a fiber taper method.
- the micro-nano fiber was fixed on a glass slide and placed in a natural straight state.
- a layer of UV-curable adhesive was uniformly coated on the micro-nano fiber. Cover the slide to prepare the sample, then fix the sample on the three-dimensional precision moving platform, and use the 100X microscope to focus the beam of the femtosecond laser on the micro-nano fiber immersed in the UV-curable adhesive.
- the software controls the shutter diaphragm switch and drives the movement of the three-dimensional precision moving platform, so that the femtosecond laser scans the curing grating along the radial direction of the fiber.
- the cured Bragg grating is rinsed with isopropyl alcohol solution for 1 min, and then the residual difference is washed with alcohol.
- Propanol gives a Bragg grating that solidifies on the surface of the micro/nano fiber.
- the scanning electron micrograph of the fiber Bragg grating after curing is shown in Fig. 5.
- the cured Bragg grating has a good bonding force with the micro/nano fiber and uniformly and stably adheres to the surface of the micro/nano fiber.
- the micro/nano fiber shown in Fig. 5 has a diameter of 1.7 ⁇ m, a grating period of 1.07 ⁇ m, a period of 500, a cured grating line width of 700 nm, and a grating line length of 4 ⁇ m.
- Fig. 6 is the grating spectrum of the micro-nano fiber Bragg grating in the environment of five different refractive index liquids. The evanescent field around the micro-nano fiber is enhanced with the increase of the external refractive index value, and the Bragg peak wavelength is obvious. Redshift.
- Figure 7 shows the relationship between the grating Bragg peak wavelength as a function of the refractive index liquid.
- the inset in Figure 7 shows that the high refractive index region (1.42-1.45) exhibits a good linear relationship at a refractive index of 1.446.
- the maximum refractive index sensitivity value is 207.14 nm/RIU.
- the embodiment of the invention provides a micro-nano fiber Bragg grating by using femtosecond laser two-photon polymerization technology.
- the most prominent advantage of the embodiment of the invention is that a Bragg grating is cured on the surface of the micro-nano fiber, and the solidified The Bragg grating is more sensitive to changes in the refractive index of the surrounding environment, and the structure does not cause any damage to the micro/nano fiber itself, thereby protecting the integrity of the micro/nano fiber.
- Sample preparation A micro-nano fiber with a diameter of less than 4 ⁇ m is obtained by tapping a fiber, such as a quartz fiber. The micro-nano fiber is fixed horizontally on the glass slide and placed in a natural straight state, and a layer of ultraviolet curable glue is uniformly coated on the micro-nano fiber and covered with a thickness of 0.13 mm. - 0.17mm coverslips were prepared to obtain samples, which were then mounted on a three-dimensional precision displacement platform.
- the micro-nano fiber Bragg grating of the grating parameters provided the control software on the host computer Bragg grating grid spacing ⁇ is 0.5 ⁇ m to 3 m, N is the number of grating periods 300 to 500, a single raster to 3 m of length l 8 ⁇ m.
- the preparation process by adjusting the three-dimensional displacement platform auxiliary microscope observation, the micro-nano fiber axial level, adjust the laser power attenuator to adjust the laser energy to 5mw -9mw (16 mw / ⁇ m 2 - 20 mw / ⁇ m 2 ), near
- the femtosecond laser beam in the infrared range is focused on the micro/nano fiber through a microscope objective with a numerical aperture greater than 0.8.
- the distance between the laser spot of the femtosecond laser and the micro-nano fiber is d1 ⁇ m to 3 ⁇ m.
- the laser spot position of the femtosecond laser is fixed, and the shutter light is controlled by the software on the upper computer.
- the switch drives and moves the three-dimensional precision moving platform. After the displacement platform moves a grid length at a speed of 6 ⁇ m / s - 10 ⁇ m / s, the first grid is solidified, and then the three-dimensional precision mobile platform drives the micro-nano fiber. Return to the initial position and shift the pitch by one cycle to the right to start the solidification of the next grid, and cycle until the number of grating cycles set above is completed.
- the development process remove the cover slip on the sample, rinse the sample with isopropyl alcohol for 30s ⁇ 2min, then rinse the sample with alcohol for 30s ⁇ 2min, to obtain the cured micro-nano fiber Bragg grating.
- micro/nano fiber Bragg grating solidified by femtosecond laser two-photon polymerization technology proposed in the embodiment of the invention can be used as a sensitive refractive index sensor.
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Abstract
微纳光纤布拉格光栅的制备方法及系统，制备系统包括激光产生单元（1）、制备单元（2）、位移平台（3）和上位机（4），样品放置于位移平台（3）上，样品为涂覆有一层固化胶的微纳光纤；激光产生单元（1），用于产生预置功率值的飞秒激光，并将飞秒激光传输给制备单元（2）；制备单元（2），用于将飞秒激光聚焦在微纳光纤上；上位机（4），用于控制位移平台（3）进行移动，以使飞秒激光沿微纳光纤的径向扫描，在微纳光纤上固化预先设置的布拉格光栅。制备微纳光纤布拉格光栅不需要繁琐的光栅增敏性处理过程，且光栅周期可控，反射率高，同时制备的布拉格光栅固化在微纳光纤表面，对外界环境极其敏感，提供的制备系统价格低廉。
Description
本发明属于光栅技术领域，尤其涉及一种基于飞秒激光双光子聚合技术的微纳光纤布拉格光栅的制备系统及制备方法。
在现有技术中，主要通过以下方法制备布拉格光栅：
1、相位掩膜法：利用紫外光照射在相位掩膜板上，通过相位掩膜板的衍射作用产生衍射条纹，正负1级衍射条纹在经过干涉后会形成明暗相间的条纹落在微纳光纤上，当微纳光纤在亮条纹位置时，其光敏性部分就会曝光发生折射率变化形成光栅。该方法的缺点是相位掩膜板价格昂贵且周期固定。
2、HF酸腐蚀法：裸光纤的制作材料二氧化硅仅与HF酸（氢氟酸）反应，将写有光栅的光纤置于含有HF酸溶液的装置中，通过控制HF酸的环境温度和HF酸的浓度，便可腐蚀掉包层，得到微纳光纤光栅。该方法的缺点是HF酸带有毒性。
3、聚焦离子束刻蚀：采用离子源发射的离子束经过加速聚焦后作为入射束，高能量的离子与固体表面原子碰撞的过程中可以将固体原子溅射剥离，利用加速离子在微纳光纤表面形成周期性折射率调制的波纹结构，该方法的缺点是耗时较长，加工出来的结构有时会产生缺陷而且设备昂贵。
本发明所要解决的技术问题在于提供一种基于飞秒激光双光子聚合技术的微纳光纤布拉格光栅的制备系统及制备方法，旨在解决现有技术制备光栅的设备昂贵、制备周期长的问题。
本发明是这样实现的，一种基于飞秒激光双光子聚合技术的微纳光纤布拉格光栅的制备系统，包括激光产生单元、制备单元、位移平台和上位机，样品放置于所述位移平台上，所述样品为涂覆有一层固化胶的微纳光纤；
所述激光产生单元，用于产生预置功率值的飞秒激光，并将所述飞秒激光传输给所述制备单元；
所述制备单元，用于将所述飞秒激光聚焦在所述微纳光纤上；
所述上位机，用于控制所述位移平台进行移动，以使所述飞秒激光沿所述微纳光纤的径向扫描，在所述微纳光纤上固化预先设置的布拉格光栅。
进一步地，所述激光产生单元包括飞秒激光器、扩束镜、激光功率衰减器和光路调整模块；
所述飞秒激光器，用于产生飞秒激光，并将所述飞秒激光入射至所述扩束镜；
所述扩束镜，用于对所述飞秒激光进行扩束，将扩束后的飞秒激光入射至所述激光功率衰减器；
所述激光功率衰减器，用于对入射的飞秒激光进行功率调节，将功率调节后的飞秒激光入射至所述光路调整模块；
所述光路调整模块，用于对入射的飞秒激光进行光路调整，使飞秒激光按照预置角度入射至所述制备单元。
进一步地，所述激光产生单元还包括与所述上位机相连接的功率计和开关；
所述功率计，位于所述激光功率衰减器和所述光路调整模块之间，用于获取所述功率调节后的飞秒激光的功率值，并发送给所述上位机；
所述开关，用于控制射入所述制备单元的飞秒激光的照射时间。
进一步地，所述光路调整模块包括两个反射镜。
进一步地，制备单元包括双色镜和显微物镜；
所述双色镜，用于将入射的飞秒激光中的近红外波段的光束反射入所述显微物镜；
所述显微物镜，用于将所述近红外波段的光束聚焦在所述微纳光纤上。
进一步地，所述制备系统还包括观察单元；
所述观察单元，用于观察所述飞秒激光进行扫描时，所述固化胶的固化现象。
进一步地，所述观察单元包括滤波片和图像传感器CCD；
所述双色镜，用于将入射的飞秒激光中的可见光透射入所述滤波片；
所述可见光经所述滤波片进行滤波后进入所述图像传感器CCD成像。
本发明实施例还提供了一种通过上述所述的微纳光纤布拉格光栅的制备系统制备微纳光纤布拉格光栅的制备方法，包括：
采用光纤拉锥法制备出预置直径的微纳光纤；
将所述微纳光纤固定在载玻片上，在所述微纳光纤上均匀涂覆一层固化胶并盖上盖玻片，制备得到样品；
将所述样品固定在位移平台上，并将所述样品调整至水平；
利用激光功率衰减器将飞秒激光调节至预置功率值，通过上位机控制位移平台的水平移动速度，利用显微物镜将功率调整后的飞秒激光聚焦在所述微纳光纤上；
利用聚焦后的飞秒激光，根据预设的扫描方式在所述样品上固化预先设置的布拉格光栅；
使用清洗液冲洗固化后的样品，再用酒精冲洗样品残留的清洗液，制备得到固化在所述微纳光纤上的微纳光纤布拉格光栅。
进一步地，所述清洗剂为异丙醇，所述使用清洗液冲洗固化后的样品，再用酒精冲洗样品残留的清洗液包括：
取下所述盖玻片，使用所述异丙醇冲洗所述固化后的样品30秒~2分钟后，再用酒精冲洗样品30秒~2分钟。
进一步地，所述载玻片为氟化镁片，所述布拉格光栅的栅格间距Λ为0.5微米至3微米，栅格周期数N为300至500，单个栅格长度l为3微米至8微米。
本发明与现有技术相比，有益效果在于：本发明实施例通过在微纳光纤上涂覆一层固化胶制备得到样品，并通过聚焦后的飞秒激光在样品上固化预先设置的布拉格光栅，本发明实施例与相位掩膜板法相比，制备微纳光纤布拉格光栅不需要繁琐的光栅增敏性处理过程，且光栅周期可控，反射率高，同时本实施例制备的布拉格光栅固化在微纳光纤表面，对外界环境极其敏感，本发明实施例通过在微纳光纤表面固化出布拉格光栅引起折射率的调制，对光纤本身没有不造成任何的损伤或者形变，制备过程简单，制备系统相对现有技术的设备来说，价格低廉。
图1是本发明实施例提供的微纳光纤布拉格光栅的制备系统的结构示意图；
图2是本发明实施例提供的微纳光纤布拉格光栅的制备系统的详细结构示意图；
图3是本发明实施例提供的微纳光纤布拉格光栅的结构示意图；
图4是本发明实施例提供的通过微纳光纤布拉格光栅的制备系统制备微纳光纤布拉格光栅的流程图；
图5是本发明实施例提供的微纳光纤布拉格光栅的扫描电镜图；
图6是本发明实施例提供的不同折射率液的光栅光谱图；
图7是本发明实施例提供的光栅布拉格峰波长随着折射率液变化的关系图。
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图及实施例，对本发明进行进一步详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。
图1示出了本发明实施例提供的一种微纳光纤布拉格光栅的制备系统，包括激光产生单元1、制备单元2、位移平台3和上位机4，样品放置于位移平台3上，所述样品为涂覆有一层固化胶的微纳光纤；
激光产生单元1，用于产生预置功率值的飞秒激光，并将所述飞秒激光传输给制备单元2；
制备单元2，用于将所述飞秒激光聚焦在所述微纳光纤上；
上位机4，用于控制位移平台3进行移动，以使所述飞秒激光沿所述微纳光纤的径向扫描，在所述微纳光纤上固化预先设置的布拉格光栅。
在具体使用中，位移平台3为三维精密位移平台，该三维粳米移动平台可以在上位机4的控制下沿水平方向及竖直方向运动，同时还可以通过上位机4控制下该三维精密移动平台的运动速度。进一步地，上位机4为电脑。
图2示出了本发明实施例提供的微纳光纤布拉格光栅的制备系统，包括激光产生单元1、制备单元2、位移平台3、上位机4和观察单元5，其中：
激光产生单元1包括飞秒激光器、扩束镜、激光功率衰减器、功率计、开关和光路调整模块；
所述飞秒激光器，用于产生飞秒激光，并将所述飞秒激光入射至所述扩束镜；
所述扩束镜，用于对所述飞秒激光进行扩束，将扩束后的飞秒激光入射至所述激光功率衰减器；
所述激光功率衰减器，用于对入射的飞秒激光进行功率调节，功率调节后的飞秒激光经所述功率计后入射至所述光路调整模块；
所述功率计，位于所述激光功率衰减器和所述光路调整模块之间，用于获取所述功率调节后的飞秒激光的功率值，并发送给所述上位机；
所述开关，用于控制射入所述制备单元的飞秒激光的照射时间。
所述光路调整模块，用于对入射的飞秒激光进行光路调整，使飞秒激光按照预置角度入射至所述制备单元。在实际应用中，光路调整模块包括两个反射镜，功率调整后的飞秒激光经两个反射镜反射后，按照预置的入射角度入射至制备单元2；
制备单元2包括双色镜和显微物镜；
所述双色镜，用于将入射的飞秒激光中的近红外波段的光束反射入所述显微物镜；
所述显微物镜，用于将所述近红外波段的光束聚焦在所述微纳光纤上。在本实施例中，显微物镜为油浸物镜。
观察单元5，用于观察所述飞秒激光进行扫描时，所述固化胶的固化现象，包括滤波片和图像传感器CCD；
所述双色镜，用于将入射的飞秒激光中的可见光透射入所述滤波片；
所述可见光经所述滤波片进行滤波后进入所述图像传感器CCD成像。
在本发明实施例中，首先，飞秒激光器产生的飞秒激光光束通过扩束镜扩束，扩束后的激光光斑大小为扩束前的2至3倍，扩束后的飞秒激光通过激光功率衰减器以及两个反射镜后经过数值孔径大于0.8的油浸物镜聚焦到固化胶的胶水内部。其中，激光衰减器用于调节飞秒激光的功率值，功率计用于探测飞秒激光的功率值，电脑驱动的开关用于控制飞秒激光的照射时间，飞秒激光中的可见光部分透过双色镜后再通过滤波片滤掉多余的红光后进入图像传感器CCD成像，以便实时观察固化现象，而飞秒激光中的近红外波段光束经双色镜反射后进入显微物镜聚焦到固化胶的胶水内部进行加工。样品被固定在三维精密位移平台上，通过电脑控制三维精密位移平台在X、Y、Z三个方向的移动。图3为通过本发明实施例制备的微纳光纤布拉格光栅，固化的布拉格光栅均匀的分布在微纳光纤表面。
图4示出了本发明实施例提供的通过上述微纳光纤布拉格光栅的制备系统制备微纳光纤布拉格光栅的制备方法，包括：
S401，采用光纤拉锥法制备出预置直径的微纳光纤。在本步骤中，采用传统的光纤拉锥法制备出直径小于4微米的微纳光纤。
S402，将所述微纳光纤固定在载玻片上，在所述微纳光纤上均匀涂覆一层固化胶并盖上盖玻片，制备得到样品。在本实施例中，载玻片为氟化镁片，将步骤S401制备得到微纳光纤固定在洁净的氟化镁片上，在微纳光纤上均匀地涂覆一层紫外固化胶并盖上盖玻片，制备得到样品。
S403，将所述样品固定在位移平台上，并将所述样品调整至水平；
S404，利用激光功率衰减器将飞秒激光调节至预置功率值，通过上位机控制位移平台的水平移动速度，利用显微物镜将功率调整后的飞秒激光聚焦在所述微纳光纤上。在本步骤中，利用功率衰减器将飞秒激光的激光光束的功率值调节至合适的范围，通过电脑控制三维精密位移平台的水平移动速度，利用数值孔径大于0.8的显微物镜将飞秒激光聚焦在浸没在紫外固化胶内的微纳光纤上。
S405，利用聚焦后的飞秒激光，根据预设的扫描方式在所述样品上固化预先设置的布拉格光栅。在本步骤中，利用聚焦后的飞秒激光，采用逐线扫描的方式固化预先设置好的周期数、栅格长度、栅格间距等参数的布拉格光栅，在飞秒激光照射过程中，紫外固化胶被曝光的区域发生交联聚合反应形成固态化合物。
S406，使用清洗液冲洗固化后的样品，再用酒精冲洗样品残留的清洗液，制备得到固化在所述微纳光纤上的微纳光纤布拉格光栅。在本步骤中，取下固化完成后的样品上的盖玻片，先用异丙醇冲洗样品，未曝光的紫外固化胶不发生聚合被异丙醇溶解后冲洗掉，曝光的紫外固化胶发生交联聚合反应变成固态化合物不溶于异丙醇，再用酒精冲洗去除残留的异丙醇，得到固化在微纳光纤表面上的布拉格光栅。
下面通过具体的例子对本发明实施例进行进一步地解释：
采用光纤拉锥法制备出直径约为1.7微米的微纳光纤，将微纳光纤固定在载玻片上并使其处于自然绷直地状态，在微纳光纤上均匀的涂敷一层紫外固化胶并盖上盖玻片以制备样品，然后将样品固定在三维精密移动平台上，利用100X显微物镜聚将飞秒激光的光束聚焦在浸没在紫外固化胶内的微纳光纤上，通过上位机上的软件控制快门光阑的开关并驱动三维精密移动平台移动，使飞秒激光沿光纤径向逐线扫描固化光栅，固化后的布拉格光栅用异丙醇溶液冲洗1min，再用酒精冲洗残留的异丙醇，得到固化在微纳光纤表面的布拉格光栅。固化后的光纤布拉格光栅扫描电镜图如图5所示。
固化后的布拉格光栅与微纳光纤有良好的结合力并均匀稳定的附着在微纳光纤表面。图5所示的微纳光纤直径为1.7微米，光栅周期为1.07微米，周期数为500，固化后的光栅线宽为700纳米，光栅线长为4微米。图6为固化得到微纳光纤布拉格光栅处在五种不同折射率液环境内的光栅光谱，随着外界折射率值的增大，微纳光纤周围的倏逝场增强，布拉格峰波长呈现出明显的红移。图7显示了光栅布拉格峰波长随着折射率液变化的关系曲线，图7中的插图表明在高折射率区（1.42-1.45）两者表现出良好的线性关系，在折射率值为1.446时可以得到最大的折射率灵敏度值为207.14nm/RIU。
本发明实施例提出了利用飞秒激光双光子聚合技术制备微纳光纤布拉格光栅，和现有的技术相比，本发明实施例最突出的优势是在微纳光纤表面固化出布拉格光栅，固化的布拉格光栅对周围环境的折射率变化更加敏感，同时该结构不会对微纳光纤本身造成任何破坏，从而保护了微纳光纤的完整性。
在通过本发明实施例制备微纳光纤布拉格光栅时，需要注意以下关键点：
一、样品制备：对光纤，如石英光纤进行拉锥获得直径小于4μm的微纳光纤。将微纳光纤水平的固定在载玻片上并使其处于自然绷直地状态，在微纳光纤上均匀的涂敷一层紫外固化胶并盖上厚度为0.13mm
- 0.17mm的盖玻片制备得到样品，再将该样品固定在三维精密位移平台上。
二、微纳光纤布拉格光栅的光栅参数：在上位机的控制软件上设置布拉格光栅的栅格间距Λ为0.5μm至
3μm，栅格周期数N为300至500，单个栅格长度l为3μm 至8μm。
三、制备过程：通过调节三维位移平台辅助显微镜观察，使微纳光纤轴向水平，调节激光功率衰减器将激光能量调节到5mw
-9mw（16 mw/μm2 - 20
mw/μm2），近红外波段的飞秒激光光束通过数值孔径大于0.8的显微物镜聚焦在微纳光纤上。通过控制三维精密移动平台使飞秒激光的激光光斑距离微纳光纤的距离为d为1μm
至3μm，固化过程中，飞秒激光的激光光斑位置固定不动，通过上位机上的软件控制快门光阑的开关并驱动三维精密移动平台移动，位移平台在径向以6μm /s—10μm/s的速度移动一个栅格长度后，完成第一个栅格的固化，接着三维精密移动平台带动微纳光纤返回至初始位置并右移一个周期的间距，开始下一个栅格的固化，如此循环直至完成上述设定的光栅周期数。
四、显影过程：取下样品上的盖玻片，用异丙醇冲洗样品30s~2min后再用酒精冲洗样品30s~2min，得到固化后的微纳光纤布拉格光栅。
五、折射率测试：将微纳光纤布拉格光栅浸没在不同的折射率液中，通过光谱仪监测谐振峰的漂移量，用于折射率传感。
本发明实施例提出的用飞秒激光双光子聚合技术固化出的微纳光纤布拉格光栅可用作一种灵敏度较高的折射率传感。
以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本发明的保护范围之内。
Claims (10)
- 一种微纳光纤布拉格光栅的制备系统，其特征在于，所述制备系统包括激光产生单元、制备单元、位移平台和上位机，样品放置于所述位移平台上，所述样品为涂覆有一层固化胶的微纳光纤；
所述激光产生单元，用于产生预置功率值的飞秒激光，并将所述飞秒激光传输给所述制备单元；
所述制备单元，用于将所述飞秒激光聚焦在所述微纳光纤上；
所述上位机，用于控制所述位移平台进行移动，以使所述飞秒激光沿所述微纳光纤的径向扫描，在所述微纳光纤上固化预先设置的布拉格光栅。 - 如权利要求1所述的制备系统，其特征在于，所述激光产生单元包括飞秒激光器、扩束镜、激光功率衰减器和光路调整模块；
所述飞秒激光器，用于产生飞秒激光，并将所述飞秒激光入射至所述扩束镜；
所述扩束镜，用于对所述飞秒激光进行扩束，将扩束后的飞秒激光入射至所述激光功率衰减器；
所述激光功率衰减器，用于对入射的飞秒激光进行功率调节，将功率调节后的飞秒激光入射至所述光路调整模块；
所述光路调整模块，用于对入射的飞秒激光进行光路调整，使飞秒激光按照预置角度入射至所述制备单元。 - 如权利要求2所述的制备系统，其特征在于，所述激光产生单元还包括与所述上位机相连接的功率计和开关；
所述功率计，位于所述激光功率衰减器和所述光路调整模块之间，用于获取所述功率调节后的飞秒激光的功率值，并发送给所述上位机；
所述开关，用于控制射入所述制备单元的飞秒激光的照射时间。 - 如权利要求2所述的制备系统，其特征在于，所述光路调整模块包括两个反射镜。
- 如权利要求1所述的制备系统，其特征在于，所述制备单元包括双色镜和显微物镜；
所述双色镜，用于将入射的飞秒激光中的近红外波段的光束反射入所述显微物镜；
所述显微物镜，用于将所述近红外波段的光束聚焦在所述微纳光纤上。 - 如权利要求4所述的制备系统，其特征在于，所述制备系统还包括观察单元；
所述观察单元，用于观察所述飞秒激光进行扫描时，所述固化胶的固化现象。 - 如权利要求6所述的制备系统，其特征在于，所述观察单元包括滤波片和图像传感器CCD；
所述双色镜，用于将入射的飞秒激光中的可见光透射入所述滤波片；
所述可见光经所述滤波片进行滤波后进入所述图像传感器CCD成像。 - 一种通过权利要求1至7任一项所述的制备系统制备微纳光纤布拉格光栅的制备方法，其特征在于，包括：
采用光纤拉锥法制备出预置直径的微纳光纤；
将所述微纳光纤固定在载玻片上，在所述微纳光纤上均匀涂覆一层固化胶并盖上盖玻片，制备得到样品；
将所述样品固定在位移平台上，并将所述样品调整至水平；
利用激光功率衰减器将飞秒激光调节至预置功率值，通过上位机控制位移平台的水平移动速度，利用显微物镜将功率调整后的飞秒激光聚焦在所述微纳光纤上；
利用聚焦后的飞秒激光，根据预设的扫描方式在所述样品上固化预先设置的布拉格光栅；
使用清洗液冲洗固化后的样品，再用酒精冲洗样品残留的清洗液，制备得到固化在所述微纳光纤上的微纳光纤布拉格光栅。 - 如权利要求8所述的制备方法，其特征在于，所述清洗剂为异丙醇，所述使用清洗液冲洗固化后的样品，再用酒精冲洗样品残留的清洗液包括：
取下所述盖玻片，使用所述异丙醇冲洗所述固化后的样品30秒~2分钟后，再用酒精冲洗样品30秒~2分钟。 - 如权利要求8所述的制备方法，其特征在于，所述载玻片为氟化镁片，所述布拉格光栅的栅格间距Λ为0.5微米至3微米，栅格周期数N为300至500，单个栅格长度l为3微米至8微米。
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