WO2019071717A1

WO2019071717A1 - Color film substrate and manufacturing method therefor, and structure for increasing film layer thickness

Info

Publication number: WO2019071717A1
Application number: PCT/CN2017/111626
Authority: WO
Inventors: 曹武
Original assignee: 深圳市华星光电半导体显示技术有限公司
Priority date: 2017-10-12
Filing date: 2017-11-17
Publication date: 2019-04-18
Also published as: CN107505766A; CN107505766B

Abstract

A color film substrate, comprising: a lower substrate; a color resistance layer, wherein the color resistance layer comprises a first color resistance part and a second color resistance part; a hydrophobic thin film layer formed on the second color resistance part and the lower substrate, wherein the hydrophobic thin film layer extends, from an upper face of the second color resistance part, to be adjacent to the first color resistance part; and a spacer layer comprising a main spacer located on the first color resistance part and an auxiliary spacer located on the second color resistance part, wherein a third contact angle formed when the spacer layer is located on the first color resistance part is smaller than a fourth contact angle formed when the spacer layer is located on the hydrophobic thin film layer, so that the spacer layer converges towards the main spacer so as to increase a segment difference between the main spacer and the auxiliary spacer. Further disclosed are a manufacturing method for a color film substrate and a structure for increasing a film layer thickness. By means of the arrangement of a hydrophobic film layer, the problem of a film layer thickness being reduced due to leveling is improved.

Description

Color film substrate and manufacturing method thereof, structure for increasing film thickness

The present invention claims the priority of the prior art application No. 201710947981.4, entitled "Color film substrate and manufacturing method, structure for increasing film thickness", which is filed on October 12, 2017, the content of which is incorporated herein by reference. Incorporated into this text.

Technical field

The present invention relates to the field of display, and in particular to a color film substrate and a manufacturing method thereof, and a structure for increasing the thickness of a film layer.

Background technique

With the development of the film layer technology, more and more products need to use different heights of the film layer. Referring to FIG. 1, a first film layer 120 is formed on the glass substrate 110, and then coated on the glass substrate 110 by a wet film. A second film layer 130 is formed on the first film layer 120, where the first film layer 120 can function to raise the second film layer 130 thereon. However, since the second film layer 130 is formed on the glass substrate 110 and the first film layer 120 by wet film coating, some of the second film layers 130 have sufficient material leveling property, and the first film layer 120 and the glass substrate 110 are opposite to each other. The hydrophilicity of the two membrane layers 130 is similar. At this time, after a certain period of time, the second membrane layer 130 on the first membrane layer 120 flows to both sides, that is, from a high point to a low position, resulting in H2 after film formation. The thickness is much smaller than H1 such that the second film layer 130 above the first film layer 120 does not reach the desired height.

According to the above principle, in the liquid crystal display panel, referring to FIG. 2, the main spacer 241 and the auxiliary spacer 242 are generally included, and the main spacer 241 mainly supports the auxiliary spacer 241 when the main spacer 241 is compressed to a certain height. The object 242 only serves as a support, so that the main spacer 241 and the auxiliary spacer 242 have a step difference. In order to achieve the difference between the two, the prior art generally processes the main spacer 241 and the auxiliary spacer 242 by forming a color resist layer 220 on the lower substrate 210, and the color resist layer 220 includes a first color resist portion 241 and a The two color resist portions 242 are disposed separately, and are designed such that the thickness of the first color resist portion 241 is greater than the thickness of the second color resist portion 242; and the flat layer 230 is formed on the color resist layer 220 and the lower substrate 210, the flat Layer 230 is an organic material or an inorganic material. A spacer layer 240 is formed on the flat layer 230, and the spacer layer 240 is coated on the flat layer 230 by a wet film, and the package thereof The main spacer 241 on the first color resist portion 241 and the auxiliary spacer 242 on the second color resist portion 242 are formed to form a step. However, in the above process, the first color resist portion 241 and the second color resist portion 242 are made to have different thicknesses, and the halftone mask is required to increase the complexity of the process, which is difficult to implement; The main spacer 241 and the auxiliary spacer 242 are both formed on the flat layer 230. Since the position of the main spacer 241 is high, the auxiliary spacer 242 and the spacer layer 240 at other positions are positioned lower, so that the main spacer 241 The material at the place will flow to other areas, eventually resulting in an undesirable step difference between the main spacer 241 and the auxiliary spacer 242.

Summary of the invention

The technical problem to be solved by the embodiments of the present invention is to provide a color film substrate and a manufacturing method thereof, and a structure for increasing the thickness of the film layer. The problem that the thickness of the film layer is lowered due to leveling can be improved.

In order to solve the above technical problem, the first aspect of the present invention provides a color filter substrate, including:

Lower substrate

a color resist layer formed on the lower substrate, the color resist layer comprising a first color resist portion and a second color resist portion, wherein the first color resist portion and the second color resist portion are separately disposed;

a hydrophobic film layer formed on the second color resisting portion and the lower substrate, and the hydrophobic film layer extends from above the second color resisting portion to adjacent to the first color resisting portion;

a spacer layer coated on the hydrophobic film layer and the first color resisting portion by a wet film, comprising a main spacer on the first color resisting portion and a secondary spacer on the second color resisting portion Object; among them,

a third contact angle formed when the spacer layer is on the first color resisting portion is smaller than a fourth contact angle formed when the spacer layer is on the hydrophobic thin film layer, so that the spacer layer is toward the main spacer Convergence is used to increase the step difference between the primary spacer and the secondary spacer.

Wherein, the third contact angle ranges from 40° to 60°; or/and the fourth contact angle ranges from 80° to 140°.

The lateral cross-sectional area of the first color resisting portion is greater than the lateral cross-sectional area of the second color resisting portion.

Wherein the hydrophobic film layer surrounds the side of the first color resisting portion.

Wherein the height of the upper surface of the first color resisting portion relative to the first horizontal plane is higher than that of the second color resisting portion The height of the first horizontal plane.

Wherein, the range of the step is from 0.3 μm to 0.9 μm.

Wherein, the material of the hydrophobic film layer is a fluorinated polymer.

A second aspect of the present invention provides a method for manufacturing a color filter substrate, including:

Providing a lower substrate;

Forming a color resist layer on the lower substrate, the color resist layer comprising a first color resist portion and a second color resist portion, wherein the first color resist portion and the second color resist portion are separately disposed;

Forming a hydrophobic film layer on the second color resisting portion and the lower substrate, the hydrophobic film layer extending from the upper surface of the second color resisting portion to adjacent to the first color resisting portion;

Coating the spacer layer on the hydrophobic film layer and the first color resisting portion by a wet film, the spacer layer including a main spacer on the first color resisting portion and a second color resisting portion a secondary spacer, wherein a third contact angle formed when the spacer layer is on the first color resisting portion is smaller than a fourth contact angle formed when the spacer layer is on the hydrophobic thin film layer, so that the spacer The layer converges toward the main spacer for increasing the step difference between the main spacer and the auxiliary spacer.

A third aspect of the present invention provides a structure for increasing the thickness of a film layer, including:

First substrate;

a first film layer formed on the first substrate portion region;

a hydrophobic film layer formed on the first substrate and disposed next to the first film layer, the thickness of the water repellent film layer being smaller than a thickness of the first film layer;

a second film layer coated on the first film layer by a wet film, the second film layer also extending onto the water repellent film layer;

a first contact angle formed when the second film layer is on the first film layer is smaller than a second contact angle formed when the second film layer is on the water repellent layer layer, so that the second film layer faces the first film layer The upper convergence is used to increase the thickness of the second film layer on the first film layer.

Wherein the first contact angle of the second film layer on the first film layer ranges from 40° to 60°; or/and the second contact angle formed when the second film layer is located on the water repellent layer layer is 80 ° ~ 140 °.

Embodiments of the present invention have the following beneficial effects:

Since the spacer layer is coated on the hydrophobic film layer and the first color resisting portion by a wet film, it includes a main spacer on the first color resisting portion and a auxiliary spacer on the second color resisting portion; Wherein the third contact angle formed when the spacer layer is on the first color resisting portion is smaller than the fourth contact angle formed when the spacer layer is on the hydrophobic thin film layer, so that the spacer layer is spaced apart from the main spacer Convergence at the object is used to increase the step difference between the main spacer and the auxiliary spacer. Thereby, the first color resisting portion attracts the main spacer, and the hydrophobic thin film layer repels the auxiliary spacer, and the main spacer on the first color resisting portion does not flow to the low side of the both sides, Therefore, the height of the main spacer is not lowered, and, due to the repulsion of the hydrophobic film layer, the spacer layer (including the auxiliary spacer) on the hydrophobic film layer is attracted by the first color resist portion and is above the main spacer. Converging, so that the thickness of the main spacer on the first color resist portion can be maintained and increased, and at the same time, the auxiliary spacer has a small decrease in height due to the repulsion of the hydrophobic film layer, thereby causing the main spacer and the auxiliary spacer The step difference between the objects is maintained or increased, will not decrease, and the step difference is ideal.

DRAWINGS

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the description of the prior art will be briefly described below. Obviously, the drawings in the following description are only It is a certain embodiment of the present invention, and other drawings can be obtained from those skilled in the art without any creative work.

1 is a schematic view showing a general film structure of the prior art;

2 is a schematic view of a prior art color film substrate;

3 is a schematic view showing the structure of increasing the thickness of a film layer according to an embodiment of the present invention;

4 is a schematic view of a color filter substrate according to an embodiment of the present invention;

FIG. 5 is a flow chart of a method of manufacturing a color filter substrate according to an embodiment of the present invention.

Detailed ways

The technical solutions in the embodiments of the present invention are clearly and completely described in the following with reference to the accompanying drawings in the embodiments of the present invention. It is obvious that the described embodiments are only a part of the embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, one of ordinary skill in the art does not create All other embodiments obtained under the premise of sexual labor are within the scope of protection of the present invention.

The terms "comprising" and "having", and any variations thereof, appearing in the specification, the claims, and the drawings are intended to cover a non-exclusive inclusion. For example, a process, method, system, product, or device that comprises a series of steps or units is not limited to the listed steps or units, but optionally also includes steps or units not listed, or, optionally, Other steps or units inherent to these processes, methods, products or equipment. Moreover, the terms "first," "second," and "third," etc. are used to distinguish different objects, and are not intended to describe a particular order.

Embodiments of the present invention provide a structure for increasing the thickness of a film layer. Referring to FIG. 3, a first substrate 310, a first film layer 320, a hydrophobic film layer 340, and a second film layer 330 are included.

In this embodiment, the first substrate 310 is used to carry other film layers, and the first substrate 310 may be a glass substrate, a plastic substrate, or the like.

In this embodiment, the first film layer 320 is formed on a partial region of the first substrate 310, and one of the functions of the first film layer 320 is used to raise the second film layer 330 thereon.

In this embodiment, the hydrophobic film layer 340 is formed on the first substrate 310 and disposed next to the first film layer 320. Specifically, the hydrophobic film layer 340 is disposed around the first film layer 320. The thickness of the hydrophobic film layer 340 is smaller than the thickness of the first film layer 320 such that the height of the upper surface of the first film layer 320 is greater than the height of the upper surface of the hydrophobic film layer 340.

In the present embodiment, the second film layer 330 is coated on the first film layer 320 by a wet film, so that the second film layer 330 is in a liquid state just after coating. The second film layer 330 also extends onto the hydrophobic film layer 340. Thereby, the second film layer 330 formed above the first film layer 320 has a higher height, and the second film layer 330 formed on the water repellent film layer 340 has a lower height, and generally the thickness of the second film layer 330 is generally at the beginning. More consistent.

In order to prevent the second film layer 330 on the first film layer 320 from flowing from a high place to a low place in the initial stage of the application, in the embodiment, the first film layer 320 is opposite to the second film layer 330. Hydrophilic, the hydrophobic film layer 340 is hydrophobic with respect to the second film layer 330, so that when the second film layer 330 is formed on the first film layer 320 and the hydrophobic film layer 340, the first A film layer 320 will attract the second film layer 330, and the water repellent film layer 340 will repel the second film layer 330, so that the second film layer 330 portion of the first film layer 320 does not face two The lateral level is flat, and, due to the repulsion of the hydrophobic membrane layer 340, the portion of the second membrane layer 330 on the hydrophobic membrane layer 340 will converge above the first membrane layer 320, The thickness of the second film layer 330 on the first film layer 320 can be increased, so that the height of the second film layer 330 on the first film layer 320 is maintained or increased without being lowered.

In order to demonstrate that the first film layer 320 is hydrophilic relative to the second film layer 330, the water repellent film layer 340 is hydrophobic relative to the second film layer 330, which is reflected by the contact angle in this embodiment. . Specifically, the first film layer 320 is hydrophilic with respect to the second film layer 330, that is, the first contact angle of the second film layer 330 on the first film layer 320 ranges from 40° to ～ 60°, for example, 40°, 45°, 50°, 55°, 60°, and the like. The hydrophobic film layer 340 is hydrophobic with respect to the second film layer 330, that is, the second contact layer 30 is located on the hydrophobic film layer 340 and has a second contact angle ranging from 80° to 140°, for example 80°, 90°, 100°, 110°, 120°, 130°, 140°, and the like.

The embodiment of the present invention further provides a color filter substrate by using the above principle. Here, the range of the color filter substrate is larger than the range of the color filter substrate as usual, as long as the color resist layer is provided on the substrate. The structure is included in the scope of the color filter substrate of the present invention. Referring to FIG. 4 , in the embodiment, the color filter substrate is an array substrate of a COA technology, and the color film substrate includes a lower substrate 410 , a color resist layer 420 , a hydrophobic film layer 430 , and a spacer layer 440 .

In the embodiment, the lower substrate 410 includes a transparent substrate, a gate, a gate insulating layer, a semiconductor layer, a source, a drain, and a passivation layer. Specifically, the transparent substrate may be a glass substrate, a flexible substrate, a plastic substrate, or the like. The gate is located on the transparent substrate. Of course, the scan line electrically connected to the gate is also located on the transparent substrate. The gate insulating layer forms the gate and the scan line. The semiconductor layer is formed on the gate insulating layer, and the semiconductor layer may be an a-Si semiconductor layer, an IGZO semiconductor layer, a polysilicon semiconductor layer, or the like. A source and a drain are formed on both sides of the semiconductor layer, and a data line electrically connected to the source is formed together with the source and the drain. A passivation layer is formed on the source, drain, and data lines. In addition, in other embodiments of the present invention, the lower substrate may be only a transparent substrate. In this case, the color filter substrate is a color filter substrate known to those skilled in the art.

In this embodiment, the color resist layer 420 is located on the lower substrate 410, specifically on the passivation layer. The color resist layer 420 includes a red color resist (R), a blue color resist (B), and a green color resist (G), and the color resist is separated from the color resist. In the embodiment, the color resist layer 420 includes a first color resist portion 421 and a second color resist portion 422, and the first color resist portion 421 and the second color resist portion 422 are separately disposed. The one color resisting portion 421 is one of a red color resist, a blue color resist, and a green color resist, and the second color resist portion 422 is one of red color resistance, blue color resistance, and green color resistance.

In this embodiment, the hydrophobic film layer 430 is formed on the second color resisting portion 422 and the lower substrate 410, and the hydrophobic film layer 430 extends from above the second color resisting portion 422 to adjacent to the first The color resist portion 421. Specifically, in the embodiment, the hydrophobic film layer 430 surrounds the side of the first color resisting portion 421, and a specific layer is formed for the material forming the hydrophobic film layer 430, and then the first color resist is deposited. A portion of the upper surface of the portion 421 is removed to surround the hydrophobic film layer 430 around the side of the first color resist portion 421. In the present embodiment, the hydrophobic film layer 430 covers the region between the second color resist portion 422, the second color resist portion 422 and the first color resist portion 421, and the region around the first color resist portion 421. In the present embodiment, the hydrophobic thin film layer 430 is relatively thin, and the thickness is preferably 300 nm or less, for example, 250 nm, 200 nm, 100 nm, or the like.

In the present embodiment, the spacer layer 440 is coated on the hydrophobic film layer 430 and the first color resisting portion 421 by a wet film, so that the spacer layer 440 is initially in a liquid state. The spacer layer 440 includes a main photo spacer 441 on the first color resisting portion 421 and a sub photo spacer 442 on the second color resisting portion 422. The main spacer A spacer spacer layer 440 is provided between the 441 and the auxiliary spacer 442 to connect the two. In the present embodiment, since the main spacer 441 and the auxiliary spacer 442 are both located on the color resist layer 420, and the hydrophobic film layer 430 is relatively thin, the main spacer 441 and the auxiliary spacer are compared with each other. A portion of the spacer layer 440 protrudes upward.

In order to maintain and increase the step difference between the main spacer 441 and the auxiliary spacer 442, that is, to maintain and increase the height difference between the upper surface of the main spacer 441 and the upper surface of the auxiliary spacer 442, in the present embodiment, The color resist layer 420 is hydrophilic with respect to the spacer layer 440, and the hydrophobic film layer 430 is hydrophobic with respect to the spacer layer 440, so that when the spacer layer 440 is formed on the hydrophobic film layer 430 and the When the first color resisting portion 421 is described, the first color resisting portion 421 attracts the main spacer 441, and the hydrophobic thin film layer 430 repels the auxiliary spacer 442, thereby, the first color resisting portion The main spacer 441 on the 421 does not flow to the low side of the both sides, so that the height of the main spacer 441 is not lowered, and the spacer layer 440 on the hydrophobic film layer 430 due to the repulsion of the hydrophobic film layer 430. (including the auxiliary spacer 442) is attracted by the first color resisting portion 421, and is concentrated above the main spacer 441, so that the thickness of the main spacer 441 on the first color resisting portion 421 can be maintained and increased, and at the same time, the auxiliary spacer The object 442 has a small height due to the repulsion of the hydrophobic film layer 430. Decreases, so will the main spacer The step difference between the 441 and the auxiliary spacer 442 is maintained or increased without being reduced, and the step difference is ideal.

In order to demonstrate that the color resist layer 420 (the first color resistive portion 421) is hydrophilic with respect to the spacer layer 440, the hydrophobic thin film layer 430 is hydrophobic with respect to the spacer layer 440, in this embodiment. It is reflected by the contact angle. Specifically, the color resist layer 420 is hydrophilic with respect to the spacer layer 440, that is, when the spacer layer 440 is located on the color resist layer 420, the third contact angle ranges from 40° to 60. °, for example, 40°, 45°, 50°, 55°, 60°, and the like. The hydrophobic film layer 430 is hydrophobic with respect to the spacer layer 440, that is, when the spacer layer 440 is located on the hydrophobic film layer 430, the fourth contact angle ranges from 80° to 140°, for example. It is 80°, 90°, 100°, 110°, 120°, 130°, 140°, and the like. By providing the color resist layer 420 and the hydrophobic film layer 430 to be hydrophilic or hydrophobic with respect to the spacer layer 440, the step difference between the main spacer 441 and the auxiliary spacer 442 is ideal. In this embodiment, the step difference between the main spacer 441 and the auxiliary spacer 442 is 0.3 μm to 0.9 μm, for example, 0.3 μm, 0.4 μm, 0.5 μm, 0.6 μm, 0.7 μm, and 0.8 μm. 0.9μm, etc.

In the present embodiment, since the spacer layer 440 is coated on the hydrophobic film layer 430 and the first color resisting portion 421 by a wet film, it includes the main spacer 441 and the first color resisting portion 421. a secondary spacer 442 on the second color resisting portion 422; wherein a third contact angle formed when the spacer layer 440 is on the first color resisting portion 421 is smaller than when the spacer layer 440 is located in the hydrophobic thin film layer 430 The fourth contact angle formed on the upper side causes the spacer layer 440 to converge toward the main spacer 441 for increasing the step difference between the main spacer 441 and the auxiliary spacer 442. Therefore, the first color resisting portion 421 attracts the main spacer 441, and the hydrophobic thin film layer 430 repels the auxiliary spacer 442, and the main spacer 441 on the first color resisting portion 421 does not The low-lying flow on both sides does not cause a decrease in the height of the main spacer 441, and the spacer layer 440 (including the auxiliary spacer 442) on the hydrophobic film layer 430 is subjected to the first due to the repulsion of the hydrophobic film layer 430. The attraction of the color resist portion 421 is concentrated above the main spacer 441, so that the thickness of the main spacer 441 on the first color resist portion 421 can be maintained and increased, and at the same time, the auxiliary spacer 442 is repelled by the hydrophobic film layer 430. There is a small decrease in height, so that the step difference between the main spacer 441 and the auxiliary spacer 442 is maintained or increased without being reduced, and the step difference is ideal.

In order to make the hydrophobic film layer 430 hydrophobic relative to the spacer layer 440, in this embodiment The material of the hydrophobic film layer 430 is a cytop. Of course, in other embodiments of the invention, the hydrophobic film layer may also be other materials that are hydrophobic relative to the spacer layer.

In general, the smaller the first color resist portion 421 under the main spacer 441 and the second color resist portion 422 under the auxiliary spacer 442, the easier the leveling of the main spacer 441 and the auxiliary spacer 442 are. In order to smoothly maintain the step difference between the main spacer 441 and the auxiliary spacer 442, in the embodiment, the lateral cross-sectional area of the first color resisting portion 421 located under the main spacer 441 is larger than that of the auxiliary spacer 442. The lateral cross-sectional area of the second color resisting portion 422 is lower, so that the height of the main spacer 441 on the first color resisting portion 421 is smaller than the height of the auxiliary spacer 442 above the second color resisting portion 422. Thereby, the step difference between the main spacer 441 and the auxiliary spacer 442 can be maintained or increased.

Further, in order to increase the step difference between the main spacer 441 and the auxiliary spacer 442, in the embodiment, the height of the upper surface of the first color resisting portion 421 relative to the first horizontal plane is higher than the second color resisting portion 422. The height of the upper surface relative to the first horizontal plane, where the first horizontal plane is, for example, a sea level. Since the upper surface of the first color resist portion 421 is set higher, and the hydrophobic film layer 430 itself is thin, the step can be increased. Preferably, the height of the upper surface of the first color resisting portion 421 relative to the first horizontal plane is higher than the height of the upper surface of the hydrophobic film layer 430 above the second color resisting portion 422 with respect to the first horizontal plane. In this embodiment, in order to realize that the upper surface of the first color resisting portion 421 is higher than the upper surface of the second color resisting portion 422, the second color resisting portion 422 reduces the thickness during the process, that is, the second color. The resist portion 422 is partially removed in the longitudinal direction. Of course, in other embodiments of the present invention, it is also possible to thicken the thickness of the first color resist portion. In addition, in other embodiments of the present invention, a high layer of the pad may be disposed under the first color resisting portion to raise the height of the first color resisting portion.

In addition, in other embodiments of the present invention, an upper substrate 450 may be disposed above the main spacer 441 and the auxiliary spacer 442, and a liquid crystal layer is filled between the upper substrate 450 and the lower substrate 410.

An embodiment of the present invention further provides a method for manufacturing a color filter substrate. Referring to FIG. 4 and FIG. 5, the method includes:

S110: providing a lower substrate 410;

S120: forming a color resist layer 420 on the lower substrate 410, the color resist layer 420 including a first color resist portion 421 and a second color resist portion 422, the first color resist portion 421 and the second color resist portion 422 Separate settings;

S130: forming a hydrophobic thin film layer 430 on the second color resisting portion 422 and the lower substrate 410, the hydrophobic The film layer 430 extends from the upper surface of the second color resisting portion 422 adjacent to the first color resisting portion 421;

S140: coating the spacer layer 440 on the hydrophobic thin film layer 430 and the first color resisting portion 421 by a wet film, the spacer layer 440 including a main spacer 441 on the first color resisting portion 421 and a spacer spacer 442 located on the second color resisting portion 422, wherein a third contact angle formed when the spacer layer 440 is on the first color resisting portion 421 is smaller than when the spacer layer 440 is located in the hydrophobic film layer The fourth contact angle formed on 430 causes the spacer layer 440 to converge toward the main spacer 441 for increasing the step difference between the main spacer 441 and the auxiliary spacer 442.

It should be noted that the various embodiments in the present specification are described in a progressive manner, and each embodiment focuses on differences from other embodiments, and the same similar parts between the various embodiments are mutually referred to. can. For the device embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the description of the method embodiment.

Through the description of the above embodiments, the present invention has the following advantages:

The above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, and thus equivalent changes made in the claims of the present invention are still within the scope of the present invention.

Claims

A color film substrate, comprising:

Lower substrate

a color resist layer formed on the lower substrate, the color resist layer comprising a first color resist portion and a second color resist portion, wherein the first color resist portion and the second color resist portion are separately disposed;

a hydrophobic film layer formed on the second color resisting portion and the lower substrate, and the hydrophobic film layer extends from above the second color resisting portion to adjacent to the first color resisting portion;

a spacer layer coated on the hydrophobic film layer and the first color resisting portion by a wet film, comprising a main spacer on the first color resisting portion and a secondary spacer on the second color resisting portion Object; among them,

a third contact angle formed when the spacer layer is on the first color resisting portion is smaller than a fourth contact angle formed when the spacer layer is on the hydrophobic thin film layer, so that the spacer layer is toward the main spacer Convergence is used to increase the step difference between the primary spacer and the secondary spacer.
The color filter substrate of claim 1, wherein the third contact angle ranges from 40 to 60; or/and the fourth contact angle ranges from 80 to 140.
The color filter substrate according to claim 1, wherein a lateral cross-sectional area of the first color resisting portion is larger than a lateral cross-sectional area of the second color resisting portion.
The color filter substrate of claim 1, wherein the hydrophobic film layer surrounds a side of the first color resist portion.
The color filter substrate according to claim 1, wherein a height of an upper surface of the first color resisting portion with respect to the first horizontal plane is higher than a height of the second color resisting portion with respect to the first horizontal plane.
The color filter substrate according to claim 1, wherein the step has a range of from 0.3 μm to 0.9 μm.
The color filter substrate according to claim 1, wherein the material of the hydrophobic film layer is a fluorinated polymer.
A method of manufacturing a color filter substrate, comprising:

Providing a lower substrate;

Forming a color resist layer on the lower substrate, the color resist layer comprising a first color resist portion and a second color resist portion, wherein the first color resist portion and the second color resist portion are separately disposed;

Forming a hydrophobic film layer on the second color resisting portion and the lower substrate, the hydrophobic film layer extending from the upper surface of the second color resisting portion to adjacent to the first color resisting portion;

Coating the spacer layer on the hydrophobic film layer and the first color resisting portion by a wet film, the spacer layer including a main spacer on the first color resisting portion and a second color resisting portion a secondary spacer, wherein a third contact angle formed when the spacer layer is on the first color resisting portion is smaller than a fourth contact angle formed when the spacer layer is on the hydrophobic thin film layer, so that the spacer The layer converges toward the main spacer for increasing the step difference between the main spacer and the auxiliary spacer.
A structure for increasing the thickness of a film layer, comprising:

First substrate;

a first film layer formed on the first substrate portion region;

a hydrophobic film layer formed on the first substrate and disposed next to the first film layer, the thickness of the water repellent film layer being smaller than a thickness of the first film layer;

a second film layer coated on the first film layer by a wet film, the second film layer also extending onto the water repellent film layer;

a first contact angle formed when the second film layer is on the first film layer is smaller than a second contact angle formed when the second film layer is on the water repellent layer layer, so that the second film layer faces the first film layer The upper convergence is used to increase the thickness of the second film layer on the first film layer.
The structure for increasing the thickness of a film layer according to claim 9, wherein the first contact angle of the second film layer on the first film layer ranges from 40° to 60°; or/and the second film layer The second contact angle formed when located on the hydrophobic film layer ranges from 80° to 140°.