WO2019049589A1 - Light source device and light projection device - Google Patents

Light source device and light projection device Download PDF

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Publication number
WO2019049589A1
WO2019049589A1 PCT/JP2018/029717 JP2018029717W WO2019049589A1 WO 2019049589 A1 WO2019049589 A1 WO 2019049589A1 JP 2018029717 W JP2018029717 W JP 2018029717W WO 2019049589 A1 WO2019049589 A1 WO 2019049589A1
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WO
WIPO (PCT)
Prior art keywords
light
laser
light source
laser light
source device
Prior art date
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PCT/JP2018/029717
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French (fr)
Japanese (ja)
Inventor
森本　廉
公博 村上
麻生　淳也
博隆 上野
古賀　稔浩
Original Assignee
パナソニックＩｐマネジメント株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to JP2019540838A priority Critical patent/JPWO2019049589A1/en
Publication of WO2019049589A1 publication Critical patent/WO2019049589A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/0239—Combinations of electrical or optical elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
    • F21S2/00—Systems of lighting devices, not provided for in main groups F21S4/00 - F21S10/00 or F21S19/00, e.g. of modular construction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/068—Stabilisation of laser output parameters
    • H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters

Definitions

  • the present disclosure relates to a light source device that emits light and a light projecting device using the light source device.
  • a light source device that generates light of a predetermined wavelength by irradiating a wavelength conversion member with light emitted from a laser light source.
  • this light source device for example, light that is wavelength-converted and diffused by the wavelength conversion member and light that is diffused without wavelength conversion by the wavelength conversion member are combined, and light of a predetermined color such as white light is generated. It is generated.
  • a light source device is used, for example, as a light source device of a vehicular headlamp.
  • Patent Document 1 discloses a light projector (headlight) that projects a light image generated by light conversion means (phosphor) onto a road by a light projection optical system.
  • the projector comprises six laser light sources and two micro mirrors. Three laser light sources are assigned to one micro mirror.
  • the three laser beams incident on one micro mirror are irradiated on the light emitting surface of the light conversion means at positions mutually displaced in the direction perpendicular to the scanning direction.
  • the micro mirror vibrates only around a single axis. As the micromirrors vibrate, the beam spots displaced relative to each other in the direction perpendicular to the scanning direction scan the light emitting surface of the light conversion means.
  • the three laser beams scanned by one micro mirror are positioned on the light emitting surface of the light conversion means at a position between the three laser beams scanned by the other micro mirror.
  • Patent Document 1 In the configuration of Patent Document 1 described above, six positions displaced in the direction perpendicular to the scanning direction are scanned with laser light emitted from each laser light source. If there is a fluctuation in intensity, band-like unevenness occurs in the light distribution from the wavelength conversion member. In addition, even when one of the optical systems for guiding the plurality of laser light sources or the respective laser beams to the wavelength conversion member is deviated due to impact such as vibration or temporal change, the light distribution is also uneven similarly. Become.
  • the present disclosure provides a light source device capable of smoothly controlling the output of each laser light source while suppressing occurrence of unevenness in light distribution, and a light projecting device using the same. To aim.
  • a first aspect of the present disclosure relates to a light source device.
  • the light source device includes a plurality of laser light sources, a wavelength conversion member, an optical deflector, an optical system, a position detector, and a controller.
  • the wavelength conversion member converts the wavelength of the laser light emitted from the plurality of laser light sources into another wavelength and diffuses the wavelength-converted light.
  • the light deflector scans laser light emitted from the plurality of laser light sources on the incident surface of the wavelength conversion member.
  • the optical system is a plurality of beams arranged in the scanning direction on the incident surface of the wavelength conversion member by a plurality of laser beams respectively emitted from a plurality of laser light sources and at least one spot is separated from the other spots. Form a spot.
  • the position detector receives specularly reflected light of the plurality of laser beams specularly reflected on the incident surface of the wavelength conversion member with respect to the scanning range on the incident surface, and outputs a detection signal according to the light receiving position and the received light amount Do.
  • the controller controls the plurality of laser light sources based on the detection signal from the position detector.
  • the beam spots are arranged in the scanning direction and are separated from each other on the incident surface of the wavelength conversion member, even if a failure such as a failure occurs in any one laser light source, There is no unevenness in light distribution.
  • the specularly reflected light of the plurality of laser beams specularly reflected on the incident surface of the wavelength conversion member is received by the position detector for all scanning ranges on the incident surface, so the detection signal from the position detector The output of each laser light source can be controlled smoothly.
  • a second aspect of the present disclosure relates to a light projecting device.
  • the light projecting device includes the light source device according to the first aspect, and a projection optical system that projects the light diffused by the wavelength conversion member.
  • the same effect as the first aspect can be exhibited.
  • the output of each laser light source can be smoothly controlled while suppressing the occurrence of unevenness in light distribution.
  • FIG. 1A is a side view showing a configuration of a light projecting device according to an embodiment.
  • FIG. 1B is a plan view showing the configuration of the light projecting device according to the embodiment.
  • FIG. 2 is a perspective view showing the configuration and arrangement of the laser light source according to the embodiment.
  • FIG. 3 is a view schematically showing a convergence state of the laser beam after being reflected by the cylindrical mirror according to the embodiment.
  • FIG. 4A is a view for explaining a configuration for separating beam spots in the scanning direction on the incident surface of the wavelength conversion member according to the embodiment.
  • FIG. 4B is a view for explaining a configuration for separating beam spots in the scanning direction on the incident surface of the wavelength conversion member according to the embodiment.
  • FIG. 4A is a view for explaining a configuration for separating beam spots in the scanning direction on the incident surface of the wavelength conversion member according to the embodiment.
  • FIG. 4B is a view for explaining a configuration for separating beam spots in the scanning direction on the incident surface of the wavelength conversion
  • FIG. 5A is a diagram showing a configuration example for adjusting the incident direction of the laser light to the cylindrical lens according to the embodiment.
  • FIG. 5B is a diagram showing a configuration example for adjusting the incident direction of the laser light to the cylindrical lens according to the embodiment.
  • FIG. 6A is a diagram showing another configuration example for adjusting the incident direction of the laser light to the cylindrical lens according to the embodiment.
  • FIG. 6B is a view schematically showing the arrangement of beam spots of each laser beam formed on the incident surface of the wavelength conversion member according to the configuration example of FIG. 6A.
  • FIG. 7A is a side view schematically showing the configuration of the wavelength conversion member according to the embodiment.
  • FIG. 7B is a plan view schematically showing the configuration of the wavelength conversion member according to the embodiment.
  • FIG. 8A is a diagram for describing a configuration of a position detector according to an embodiment and a method for generating a position detection signal.
  • FIG. 8B is a cross-sectional view schematically showing the configuration of the position detector according to the embodiment.
  • FIG. 9A is a view schematically showing the movement of the beam spot on the incident surface of the wavelength conversion member according to the embodiment.
  • FIG. 9B is a view schematically showing the movement of a specularly reflected light spot on the position detector when the beam spot moves as shown in FIG. 9A according to the embodiment.
  • FIG. 10 is a circuit block diagram showing a main circuit configuration of the light source device according to the embodiment.
  • FIG. 11A is a flowchart showing control for acquiring the light receiving position and the received light amount of each regular reflection light spot according to the embodiment.
  • FIG. 11B is a flowchart showing control for acquiring the light receiving position and the received light amount of each regular reflection light spot according to the embodiment.
  • FIG. 11C is a view schematically showing a scanning state of a specularly reflected light spot on the light receiving surface of the position detector at the time of check scanning according to the embodiment.
  • FIG. 12A is a diagram showing parameters for output control of the laser light source according to the embodiment.
  • FIG. 12B is a timing chart showing an example of output control of the laser light source according to the embodiment.
  • FIG. 13A is a view showing parameters for output control of the laser light source according to the embodiment.
  • FIG. 13B is a timing chart showing another example of output control of the laser light source according to the embodiment.
  • FIG. 14A is a side view showing the configuration of a light projecting device according to a modification.
  • FIG. 14B is a plan view showing the configuration of a light projecting device according to a modification.
  • FIG. 15A is a view for explaining a configuration for separating beam spots in the scanning direction on the incident surface of the wavelength conversion member according to the modification.
  • FIG. 15B is a view schematically showing a scanning state of a specularly reflected light spot on the light receiving surface of the position detector at the time of check scanning according to the modification.
  • This coordinate axis is a global coordinate system (Fig. 1A, Fig. 1B, Fig. 14A, Fig. 14B) in which the light projection direction of the light source device and the light projection device is Z axis, and the light emission direction or reflection of optical components to be described.
  • FIG. 15B is appropriately used in accordance with the description, and therefore, the two do not necessarily coincide.
  • FIG. 1A and FIG. 1B are a side view and a plan view showing the configuration of the light projecting device according to the embodiment, respectively.
  • the light projecting device 1 includes a light source device 2 for generating light and a projection optical system 3 for projecting the light generated by the light source device 2.
  • the projection optical system 3 includes two lenses 3a and 3b, and the lenses 3a and 3b condense light from the light source device 2 and project the light to a target area.
  • the projection optical system 3 does not necessarily have to be composed of two lenses 3a and 3b. For example, it may be a single lens or may be equipped with two or more lenses or mirrors.
  • the projection optical system 3 may be configured to condense the light from the light source device 2 by a concave mirror.
  • the light source device 2 includes three laser light sources 11a to 11c, three collimator lenses 12a to 12c, two reflecting prisms 13a and 13b, a cylindrical lens 14, a reflecting mirror 15, an optical deflector 16, and a cylindrical mirror 17 and the wavelength conversion member 18.
  • the cylindrical lens 14 and the cylindrical mirror 17 constitute a condensing optical system for causing the laser light emitted from the laser light sources 11a to 11c to converge on the incident surface of the wavelength conversion member 18.
  • the above-described members constituting the light source device 2 are installed together with the projection optical system 3 on a base (not shown).
  • the laser light sources 11a to 11c respectively emit laser light in a blue wavelength band (for example, 450 nm).
  • the laser light sources 11a to 11c are made of, for example, semiconductor lasers.
  • the laser light sources 11a to 11c are laser light sources of the same type.
  • the wavelength of the laser light emitted from the laser light sources 11a to 11c can be changed as appropriate.
  • the laser light sources 11a to 11c are not necessarily single emitter semiconductor lasers having a single light emitting area, and may be, for example, multi-emitter semiconductor lasers having a plurality of light emitting areas in one light emitting element.
  • the laser light sources 11a to 11c do not necessarily emit laser light of a single wavelength band, and may be, for example, a multi-emission semiconductor laser in which a plurality of light emitting elements are mounted on one substrate.
  • the collimator lenses 12a to 12c convert the laser beams emitted from the laser light sources 11a to 11c into parallel beams, respectively.
  • the reflecting prisms 13 a and 13 b respectively reflect the laser beams transmitted through the collimator lenses 12 b and 12 c in the direction toward the cylindrical lens 14.
  • a plate-like reflection mirror may be used instead of the reflection prisms 13a and 13b.
  • the laser light sources 11b and 11c are disposed to face each other.
  • the reflecting prisms 13a and 13b are disposed such that a gap is generated in the direction in which the laser light sources 11b and 11c face each other, that is, in the X-axis direction.
  • the laser light sources 11a to 11c are arranged such that the emission optical axis is included in one plane parallel to the XZ plane.
  • the laser light emitted from the laser light source 11a is converted into parallel light by the collimator lens 12a, and then travels to the cylindrical lens 14 through the gap between the reflecting prisms 13a and 13b.
  • the optical axes of the opposed laser light sources 11b and 11c are bent in directions parallel to the XZ plane by the reflecting prisms 13a and 13b.
  • the laser beams emitted from the laser light sources 11a to 11c are incident on the incident surface of the cylindrical lens 14 at mutually different positions in the X-axis direction.
  • three laser beams can be approached without being limited by the package and cap outer shape of the laser light sources 11a to 11c.
  • the optical system after the cylindrical lens 14 can be made compact, and the influence of the aberration of the optical system can be reduced.
  • the size of the mirror 16 a of the light deflector 16 can be reduced, and the increase in size and power consumption of the light deflector 16 can be suppressed.
  • the laser light emitted from the laser light source 11 a is incident on the central position of the incident surface of the cylindrical lens 14.
  • the laser beams emitted from the laser light sources 11 b and 11 c are respectively incident at positions deviated from the central position of the incident surface of the cylindrical lens 14 by a predetermined distance in the X axis positive and negative directions.
  • the cylindrical lens 14 is a curved surface in which the incident surface is curved only in the direction parallel to the XZ plane.
  • the entrance surface of the cylindrical lens 14 is aspheric, and the exit surface of the cylindrical lens 14 is a plane perpendicular to the Z axis.
  • the exit surface of the cylindrical lens 14 may also be a curved surface curved in a direction parallel to the XZ plane.
  • the entrance surface of the cylindrical lens 14 may be flat and the exit surface may be curved.
  • the cylindrical lens 14 is disposed such that the generatrix of the incident surface is perpendicular to a plane including the optical axes of the three laser beams incident on the incident surface, that is, parallel to the Y-axis direction.
  • the cylindrical lens 14 has a convergence power only in the direction in which the three optical axes of the laser light sources 11a to 11c at the incident position are aligned, ie, in the X-axis direction.
  • the laser light emitted from the laser light sources 11a to 11c is converged by the cylindrical lens 14 on the incident surface of the wavelength conversion member 18 in the scanning direction of the laser light.
  • beam spots of three laser beams are formed on the incident surface of the wavelength conversion member 18 so as to be aligned in the scanning direction and separated from each other.
  • the reflection mirror 15 bends the optical axes of the three laser beams transmitted through the cylindrical lens 14 in the direction parallel to the YZ plane.
  • the three laser beams are reflected by the reflection mirror 15 and then enter the mirror 16 a of the light deflector 16. Note that, depending on the layout of the optical system from the cylindrical lens 14 to the wavelength conversion member 18, the reflection mirror 15 may be omitted. In this case, the three laser beams transmitted through the cylindrical lens 14 directly enter the mirror 16 a of the light deflector 16.
  • the light deflector 16 includes a mirror 16a, and changes the traveling direction of the laser beam reflected by the reflection mirror 15 by rotating the mirror 16a about a rotation axis L1 parallel to the Z axis.
  • the incident surface of the mirror 16a is a plane.
  • the mirror 16a is, for example, a high reflectance mirror in which a dielectric multilayer film is formed on a glass plate.
  • the mirror 16a is disposed parallel to the XZ plane at the neutral position.
  • the light deflector 16 is configured of, for example, a MEMS (Micro Electro Mechanical Systems) mirror.
  • the cylindrical mirror 17 is a reflecting surface whose incident surface is curved in a concave direction only in the direction parallel to the YZ plane.
  • the incident surface of the cylindrical mirror 17 is spherical, but may be aspheric.
  • the cylindrical mirror 17 is disposed such that the generatrix of the incident surface is parallel to a plane including the optical axes of the three laser beams incident on the incident surface, that is, parallel to the X-axis direction.
  • the cylindrical mirror 17 has convergent power only in the direction perpendicular to the direction in which the three optical axes of the laser light sources 11a to 11c at the incident position are aligned, ie, in the direction parallel to the YZ plane.
  • the laser light emitted from the laser light sources 11a to 11c is converged by the cylindrical mirror 17 on the incident surface of the wavelength conversion member 18 in the direction perpendicular to the scanning direction of the laser light.
  • the cylindrical mirror 17 may be replaced with a transmission type cylindrical lens.
  • the three laser beams incident on the cylindrical lens are subjected to the converging action in the direction parallel to the YZ plane by the cylindrical lens, and then enter the wavelength conversion member 18.
  • the incident surface of the mirror 16a may be replaced with a cylindrical mirror surface.
  • the cylindrical mirror 17 is omitted or is a flat reflection mirror, and the three laser beams incident on the cylindrical lens 14 have a converging action in a direction parallel to the YZ plane by the mirror 16a of the cylindrical surface. After receiving, it passes through the reflection mirror or directly enters the wavelength conversion member 18 as it is.
  • the wavelength conversion member 18 is disposed at a position where the laser light reflected by the cylindrical mirror 17 is incident.
  • the wavelength conversion member 18 is a rectangular plate-like member, and is installed so that the incident surface is parallel to the XY plane. As described above, when the mirror 16a pivots about the pivot axis L1, the wavelength conversion member 18 is scanned in the longitudinal direction by the laser beam.
  • the wavelength conversion member 18 converts a part of the incident laser light into a wavelength different from that of the blue wavelength band and diffuses it in the Z-axis direction. Other laser beams not subjected to wavelength conversion are diffused by the wavelength conversion member 18 in the Z-axis direction. Thus, the diffused light of two types of wavelengths is combined to generate light of a predetermined color. The light of each wavelength is taken into the projection optical system 3 and projected onto the target area.
  • part of the laser light is converted into light in the yellow wavelength band by the wavelength conversion member 18.
  • the diffused light in the yellow wavelength band after wavelength conversion and the scattered light in the blue wavelength band not subjected to wavelength conversion are synthesized to generate white light.
  • the wavelength after wavelength conversion may not be in the yellow wavelength band, and the color of the light generated may be a color other than white.
  • the configuration of the wavelength conversion member 18 will be described later with reference to FIGS. 7A and 7B.
  • FIG. 2 is a perspective view showing the configuration and arrangement of the laser light source 11a.
  • the structure of the light emitting element 110 with which the laser light source 11a was equipped is shown by FIG.
  • the configuration of the light emitting elements of the other laser light sources 11b and 11c is the same as that shown in FIG.
  • Upper and lower surfaces of the light emitting element 110 are electrodes 111 and 112.
  • the laser beam 130 is emitted from the active layer 113 sandwiched between the upper and lower cladding layers along the emission optical axis 120.
  • the laser beam 130 spreads in a direction parallel to the active layer 113 and in a direction perpendicular to the active layer 113 at a predetermined radiation angle.
  • the radiation angle in the direction perpendicular to the active layer 113 is larger than the radiation angle in the direction parallel to the active layer 113. Therefore, the beam shape of the emitted laser beam 130 is an ellipse.
  • the major axis of this ellipse is called the fast axis
  • the minor axis of the ellipse is called the slow axis.
  • the laser light source 11 a is disposed such that the fast axis is parallel to the convergence direction of the cylindrical lens 14.
  • the remaining two laser light sources 11 b and 11 c are arranged such that the fast axis of the laser light is parallel to the convergence direction of the cylindrical lens 14 at the incident position of the cylindrical lens 14.
  • the laser light is more likely to converge in the direction along the fast axis than the direction along the slow axis. This is because the width of the light emitting region in the fast axis direction at the end face of the laser light sources 11a to 11c (semiconductor laser) is generally narrower than that of the slow axis. Therefore, by arranging the laser light sources 11a to 11c as described above, the laser beams emitted from the laser light sources 11a to 11c can be converged efficiently by the cylindrical lens 14.
  • FIG. 3 is a view schematically showing the convergence state of the laser beam after being reflected by the cylindrical mirror 17.
  • broken lines from the cylindrical mirror 17 toward the wavelength conversion member 18 indicate the laser beams 130a to 130c emitted from the laser light sources 11a to 11c, and the ellipses indicated by the broken lines indicate the beam spots BSa to BSa of these laser lights. It shows BSc.
  • the laser beam source 11a is arranged such that the three beam spots BSa to BSc are aligned in the scanning direction of the laser beam and separated from each other on the incident surface 18a of the wavelength conversion member 18. 11c and the cylindrical lens 14 (condensing optical system) are adjusted.
  • the size of beam spots BSa to BSc is defined by an area of 1 / e 2 or more of the intensity peak.
  • the sizes of the beam spots BSa to BSc may be defined by full width at half maximum (FWHM). In this case, even if a part of the region of 1 / e 2 or more of the intensity peak overlaps, it can be said that the beam spots BSa to BSc are separated from each other if the beam spots defined by FWHM do not overlap. .
  • the method of defining the beam size is the same as in the modification described later.
  • FIGS. 4A and 4B are diagrams for explaining the configuration for separating the beam spots BSa to BSc in the scanning direction on the incident surface 18a of the wavelength conversion member 18, respectively.
  • the illustration of the optical member disposed between the cylindrical lens 14 and the wavelength conversion member 18 is omitted.
  • the arrangement of the laser light sources 11a to 11c or the arrangement of the reflecting prisms 13a and 13b is adjusted so that the laser beams 130a to 130c enter the cylindrical lens 14 in a nonparallel state.
  • the laser beam 130a emitted from the laser light source 11a is incident on the cylindrical lens 14 with the optical axis parallel to the Z axis
  • the laser beams 130b and 130c emitted from the laser light sources 11b and 11c are Respectively, the light is incident on the cylindrical lens 14 in a state in which the optical axis is slightly inclined in the positive and negative directions of the X-axis from the state in parallel with the Z-axis.
  • the cylindrical lens 14 has no aberration, and the cylindrical lens 14 is configured to converge incident parallel light into one focal line. That is, the cylindrical lens 14 is a single focus cylindrical lens. Further, the optical system is set such that the optical path length from the cylindrical lens 14 to the wavelength conversion member 18 and the focal length of the cylindrical lens 14 are substantially the same.
  • the convergence position of the laser beams 130a to 130c is the incident surface 18a of the wavelength conversion member 18.
  • they are mutually displaced in the scanning direction (X-axis direction).
  • the beam spots BSa to BSc of the laser beams 130a to 130c are aligned in the scanning direction on the incident surface 18a of the wavelength conversion member 18 and separated from each other.
  • the laser beams 130a to 130c may be incident on the cylindrical lens 14 in parallel with each other as shown in FIG. 4B.
  • the beam spots BSa to BSc of the laser beams 130a to 130c are positioned on the incident surface 18a of the wavelength conversion member 18 so as to be aligned in the scanning direction and separated from each other.
  • the adjustment of the incident direction of the laser beams 130b and 130c to the cylindrical lens 14 is performed, for example, on the reflection surface of the reflecting prisms 13a and 13b with respect to the emission optical axis of the laser light sources 11b and 11c, as shown in FIG. It can be done by adjusting the tilt.
  • the laser light sources 11b and 11c are disposed such that the emission light axes are parallel to the X axis, and the light emission axes of the laser light sources 11b and 11c are opposite to the reflection surfaces of the reflection prisms 13a and 13b.
  • the reflective prisms 13a and 13b are disposed such that the angle ⁇ is slightly larger than 45 degrees.
  • the laser light source 11a is disposed such that the emission optical axis is parallel to the Z axis.
  • the laser beam 130a emitted from the laser light source 11a is incident on the cylindrical lens 14 in parallel to the Z axis, and the laser beams 130b and 130c emitted from the laser light sources 11b and 11c are , And enters the cylindrical lens 14 in a state slightly inclined from the state parallel to the Z axis.
  • adjustment of the incident direction of the laser beams 130b and 130c with respect to the cylindrical lens 14 is performed, for example, as shown in FIG. 5B, with the emission optical axes of the laser light sources 11b and 11c parallel to the X axis. Can also be performed by tilting in a direction parallel to the XZ plane.
  • the reflecting prisms 13a and 13b are disposed such that the reflecting surface has an inclination of 45 degrees with respect to the X axis, and the emission optical axes of the laser light sources 11b and 11c and the reflection of the reflecting prisms 13a and 13b, for example.
  • the laser light sources 11 b and 11 c are disposed such that the angles ⁇ with the surface are slightly larger than 45 degrees, respectively.
  • the collimator lenses 12b and 12c are arranged such that the optical axes thereof are aligned with the emission optical axes of the laser light sources 11b and 11c.
  • the laser light source 11a is disposed such that the emission optical axis is parallel to the Z axis.
  • the laser beam 130a emitted from the laser light source 11a is incident on the cylindrical lens 14 in parallel to the Z axis, and the laser beams 130b and 130c emitted from the laser light sources 11b and 11c are , And enters the cylindrical lens 14 in a state slightly inclined from the state parallel to the Z axis.
  • the arrangement of both the laser light sources 11b and 11c and the reflecting prisms 13a and 13b may be adjusted.
  • the laser light sources 11b and 11c are tilted so that the optical axes of the laser beams 130b and 130c approach the optical axis of the laser beam 130a as the incident surface of the cylindrical lens 14 is approached.
  • the laser beams 130b and 130c intersect and the laser beam 130b is shifted to the X axis negative side with respect to the laser beam 130a.
  • the laser beam 130c is converged to a position deviated to the X axis positive side with respect to the laser beam 130a. Therefore, also according to this configuration, the three beam spots BSa to BSc can be arranged on the incident surface 18a of the wavelength conversion member 18 so as to be aligned in the scanning direction of the laser light and separated from each other.
  • the laser light sources 11b and 11c are disposed so that the emission optical axis is parallel to the X axis, and the reflection prisms 13a and 13b are disposed such that the reflection surface is inclined 45 degrees with respect to the X axis. Ru.
  • the laser light source 11a is disposed such that the emission optical axis is parallel to the Z axis.
  • the laser beams 130a to 130b enter the cylindrical lens 14 with the optical axes parallel to each other.
  • the optical path length from the cylindrical lens 14 to the wavelength conversion member 18 is set to be approximately the same as the focal length of the cylindrical lens 14, in the incident surface 18 a of the wavelength conversion member 18
  • the width of the three laser beams 130a to 130c (beam spots BSa to BSc) in the scanning direction of the laser beam, that is, the X axis direction is compressed to about the width of the focal line generated by the converging action of the cylindrical lens 14.
  • the optical path length from the cylindrical mirror 17 to the wavelength conversion member 18 may be the same as or different from the focal length of the cylindrical mirror 17.
  • the optical path length from the cylindrical mirror 17 to the wavelength conversion member 18 is set to be equal to the focal length of the cylindrical mirror 17, the laser light converges to the minimum width proportional to the focal length of the cylindrical mirror 17.
  • the laser beam is less likely to be converged than the fast axis.
  • the light is incident on the wavelength conversion member 18 at a predetermined incident angle (referred to as ⁇ 1) from the direction parallel to the slow axis.
  • ⁇ 1 a predetermined incident angle
  • the width of the beam in the slow axis direction is expanded to 1 / cos ⁇ 1 times the minimum width proportional to the focal length of the cylindrical mirror 17. For this reason, laser light is converged with a certain width in the slow axis direction.
  • the width of the beam spots BSa to BSc in the slow axis direction is cylindrical.
  • the width can be designed wider than the minimum width at the focal position of the mirror 17.
  • the beam spots BSa to BSc of the three laser beams 130a to 130c are perpendicular to the scanning direction of the laser beam, that is, parallel to the YZ plane. You can design freely in a wide range. Therefore, on the incident surface 18a of the wavelength conversion member 18, the beam spots BSa to BSc of the three laser beams 130a to 130c have a linear shape extending in the direction perpendicular to the scanning direction of the laser beam.
  • the optical path length from the cylindrical mirror 17 to the wavelength conversion member 18 is set to be different from the focal length of the cylindrical mirror 17 good.
  • the wavelength conversion member 18 can be scanned with a wide width in the direction intersecting the scanning direction, the wavelength conversion member 18 can be efficiently scanned with each laser beam.
  • FIG. 7A is a side view schematically showing the configuration of the wavelength conversion member 18.
  • the wavelength conversion member 18 has a configuration in which the reflective film 202 and the phosphor layer 203 are laminated on the upper surface of the substrate 201.
  • the substrate 201 is made of, for example, silicon, aluminum nitride ceramic, sapphire glass or the like.
  • the reflective film 202 is configured by laminating a first reflective film 202a and a second reflective film 202b.
  • the first reflective film 202a is, for example, a metal film such as Ag, an Ag alloy, or Al.
  • the second reflective film 202b also has a function of protecting the first reflective film 202a from oxidation or the like as well as reflection.
  • One or more layers of dielectrics such as SiN, AlN.
  • the reflective film 202 does not necessarily have to be composed of the first reflective film 202a and the second reflective film 202b, and may have a single layer or a structure in which three or more layers are stacked.
  • the phosphor layer 203 is formed by fixing the phosphor particles 203a with a binder 203b.
  • the phosphor particles 203a emit fluorescence in the yellow wavelength band by being irradiated with laser light in the blue wavelength band emitted from the laser light sources 11a to 11c.
  • As the phosphor particles 203a for example, (Y n G d 1-n ) 3 (Al m Ga 1-m ) 5 O 12 : Ce (0.5 ⁇ n ⁇ 1, 0.5) having an average particle diameter of 1 ⁇ m to 30 ⁇ m. ⁇ m ⁇ 1) is used.
  • the binder 203b a transparent material mainly containing silsesquioxane such as polymethyl silsesquioxane is used.
  • the laser light that has entered inside can be scattered more efficiently and can be extracted from the light source device 2. Further, by the presence of the void 203c in the vicinity of the second reflective film 202b, it is possible to effectively scatter the laser light and the fluorescence while reducing the energy loss due to the surface of the second reflective film 202b.
  • the phosphor layer 203 further contains a filler 203 d for enhancing the strength and the heat resistance.
  • the laser light emitted from the laser light sources 11a to 11c is irradiated to the excitation region R1 shown in FIG. 7A, and is scattered and absorbed on the surface or inside of the phosphor layer 203.
  • a part of the laser light is converted into light of a yellow wavelength band by the phosphor particles 203 a and emitted from the phosphor layer 203.
  • the other part of the laser light is scattered without being converted to light in the yellow wavelength band, and is emitted from the phosphor layer 203 as light in the blue wavelength band.
  • the light of each wavelength band is scattered while propagating in the phosphor layer 203, and is thus emitted from the light emitting region R2 slightly wider than the excitation region R1.
  • FIG. 7B is a plan view schematically showing the configuration of the wavelength conversion member 18.
  • the wavelength conversion member 18 has a rectangular shape elongated in the X-axis direction in plan view.
  • the wavelength conversion member 18 is scanned with laser light in the X-axis direction by rotating the mirror 16 a of the light deflector 16.
  • the mirror 16a is rotated in a predetermined angular range in both directions from a neutral position parallel to the XZ plane.
  • BS indicates the beam spot of each laser beam emitted from the laser light sources 11a to 11c as described above.
  • the three beam spots BS reciprocate on the incident surface 18a of the wavelength conversion member 18 in the width W1.
  • the reciprocating movement of the beam spot BS is indicated by a straight arrow, but since the laser beam is incident on the wavelength conversion member 18 from an oblique direction, the movement locus of the actual beam spot BS is X It becomes a slightly curved locus in which both ends in the positive and negative directions of the X axis are displaced in the negative direction of the Y axis with respect to the central position in the axial direction.
  • the area of the beam spot BS on the incident surface 18a corresponds to the excitation area R1 of FIG. 7A. While the beam spot BS moves on the incident surface 18a of the wavelength conversion member 18, diffused light of the blue wavelength band and diffused light of the yellow wavelength band from the light emission area R2 slightly wider than the area of the beam spot BS in the positive Z-axis direction It is emitted.
  • the two wavelength bands of light thus emitted are taken in by the projection optical system 3 shown in FIGS. 1A and 1B and projected onto the target area. Thereby, white light in which the light of the blue wavelength band and the light of the yellow wavelength band are combined is projected from the light projecting device 1 to the target area.
  • the position detector 19 is installed at a position where the laser light (hereinafter, referred to as “regular reflection light”) specularly reflected by the incident surface 18 a of the wavelength conversion member 18 is received.
  • the position detector 19 is disposed such that the specularly reflected light is incident on the central position in the X-axis direction of the incident surface of the position detector 19 when the mirror 16 a of the light deflector 16 is in the neutral position.
  • the position detector 19 receives specularly reflected light with respect to the scanning range on the incident surface of the wavelength conversion member 18, and outputs a detection signal according to the light receiving position and the received light amount.
  • the position detector 19 has a long light receiving surface in the X-axis direction so as to be able to receive specularly reflected light with respect to the scanning range on the incident surface of the wavelength conversion member 18.
  • the position detector 19 is made of, for example, a PSD (Position Sensitive Detector). Besides, the position detector 19 may have a configuration in which photodetectors are arranged on an array, or may be an imaging device such as a CCD (Charge Coupled Device).
  • PSD Position Sensitive Detector
  • CCD Charge Coupled Device
  • FIG. 8A is a diagram for describing a configuration of the position detector 19 and a method of generating a position detection signal.
  • 8B is a cross-sectional view schematically showing the configuration of the position detector 19. As shown in FIG.
  • the position detector 19 has a structure in which a P-type resistive layer which also serves as a light receiving surface and a resistive layer is formed on the surface of an N-type high-resistance silicon substrate. Electrodes EX1 and EX2 for outputting a photocurrent in the lateral direction are formed in the resistance layer on the front side, and a common electrode EX3 is formed in the resistance layer on the back side. The photocurrents flowing into the electrodes EX1 and EX2 are output from the terminals 19b and 19c.
  • the light receiving surface 19a of the position detector 19 When the light receiving surface 19a of the position detector 19 is irradiated with the regular reflection light (the regular reflection light spot RB), a charge proportional to the light quantity is generated at the light reception position of the regular reflection light (the regular reflection light spot RB). This charge reaches the resistance layer as a photocurrent, is divided in inverse proportion to the distance to each of the electrodes EX1 and EX2, and is output from the terminals 19b and 19c connected to the electrodes EX1 and EX2.
  • the photocurrents output from the terminals 19b and 19c have sizes divided in inverse proportion to the distances Lx1 and Lx2 from the light reception position of the regular reflection light to the electrodes EX1 and EX2. . Therefore, the light receiving position of the specularly reflected light in the X-axis direction on the light receiving surface can be detected based on the current value of the photocurrent output from the terminals 19 b and 19 c.
  • the specularly reflected light spot RB is irradiated at the position shown in FIG. 8A.
  • the lateral coordinates Px of the light receiving position relative to the lateral center position Lmx of the light receiving surface 19a are Ix1 and Ix2, respectively, the current values of the photocurrents output from the electrodes EX1 and EX2.
  • the distance between EX1 and EX2 is Lx, it is calculated by the following equation.
  • the formula (1) is calculated to obtain the specularly reflected light spot RB on the light receiving surface 19a.
  • a position detection signal (coordinates Px) indicating the position can be calculated. Further, by adding the current values Ix1 and Ix2 of the photocurrent to each other, it is possible to acquire the received light amount of the specularly reflected light.
  • FIG. 9A is a view schematically showing the movement of the beam spots BS1 to BS3 on the incident surface 18a of the wavelength conversion member 18.
  • FIG. 9B is a view schematically showing the movement of the specularly reflected light spots RB1 to RB3 on the light receiving surface 19a of the position detector 19 when the beam spots BS1 to BS3 move as shown in FIG. 9A.
  • Wm is the center position in the X-axis direction of the incident surface 18a.
  • the three beam spots that scan the incident surface 18a of the wavelength conversion member 18 are referred to as beam spots BS1, BS2, and BS3 in order from the X-axis positive side.
  • the beam spots BS1, BS2, and BS3 correspond to the beam spots BSb, BSa, and BSc illustrated in FIGS. 4A and 4B, respectively.
  • the specularly reflected light spots RB1, RB2, and RB3 are beam spots of specularly reflected light in which the laser beams of the beam spots BS1, BS2, and BS3 are specularly reflected on the incident surface 18a of the wavelength conversion member 18, respectively.
  • the specularly reflected light spots RB1 to RB3 move along the light receiving surface 19a of the position detector 19 as shown in FIG. Move like.
  • the lateral movement positions of the specularly reflected light spots RB1 to RB3 correspond one-to-one to the movement positions of the beam spots BS1 to BS3 in the X-axis direction on the incident surface 18a.
  • the specularly reflected light spots RB1 to RB3 move the light receiving surface 19a of the position detector 19 in the lateral direction in the range of the width Lw.
  • the laser light source corresponding to the specularly reflected light spot to be detected is turned on, and the other laser light sources are turned off.
  • the laser light sources of the regular reflection spots are turned on sequentially from the regular reflection light spot RB3 on the left side of FIG. 9B.
  • the calculation of the equation (1) is performed, and the light receiving position of each specularly reflected light spot is detected.
  • the current values Ix1 and Ix2 are added to each other to detect the amount of light received by each regular reflection light spot.
  • the light receiving position of each specularly reflected light spot and the method of detecting the amount of light received will be described later with reference to FIGS. 11A to 11C.
  • FIG. 10 is a circuit block diagram showing a main circuit configuration of the light source device 2 according to the embodiment.
  • the light source device 2 includes a controller 301, laser drive circuits 302a to 302c, a mirror drive circuit 303, a position detection circuit 304, and an interface 305 as the configuration of the circuit section. .
  • the controller 301 includes an arithmetic processing circuit such as a CPU (Central Processing Unit) and a memory, and controls each part according to a predetermined control program.
  • the laser drive circuits 302a to 302c drive the laser light sources 11a to 11c according to the control signal from the controller 301, respectively.
  • the mirror drive circuit 303 drives the mirror 16 a of the light deflector 16 in accordance with the control signal from the controller 301.
  • the position detection circuit 304 calculates the position detection signal by the calculation of the equation (1) based on the current values Ix1 and Ix2 output from the position detector 19, and adds the current values Ix1 and Ix2 to each other to calculate the light amount. Calculate the signal.
  • the position detection circuit 304 outputs the calculated position detection signal and light amount signal to the controller 301.
  • the interface 305 is, for example, an input / output circuit for the controller 301 to transmit / receive a signal to / from an external control circuit such as a control circuit on the vehicle side.
  • the controller 301 controls the laser light sources 11a to 11c and the light deflector 16 so that the light irradiated to the target area from the projection optical system 3 has a predetermined light distribution pattern in the target area. That is, the controller 301 controls the light deflector 16 so that the scanning range of the three beam spots BS1 to BS3 has the width W1 shown in FIG. 9A, and the light distribution pattern in the target area is a predetermined light distribution pattern As described above, the control of turning on / off the laser light sources 11a to 11c corresponding to the three beam spots BS1 to BS3 is performed.
  • the three beam spots BS1 to BS3 are arranged in line in the scanning direction and are separated from each other.
  • the amounts of light of the beam spots BS1 to BS3 and the positions and intervals of the beam spots BS1 to BS3 may change due to changes over time, vibrations or shocks transmitted to the light source device 2, and the like. Therefore, in order to appropriately perform the above control, the controller 301 needs to detect the decrease in the light amount of the beam spot and the fluctuation of the position and the interval of the beam spot for each beam spot as needed. In other words, it is necessary for the controller 301 to perform control by detecting the received light amount of each regular reflection light spot, the light receiving position, and the interval between the regular reflection light as needed.
  • FIG. 11A and FIG. 11B are flowcharts showing control for acquiring the light receiving position and the received light amount of each regular reflection light spot, respectively.
  • the controller 301 when the light source device 2 is activated (S11), the controller 301 performs check scanning for detecting the light reception positions and the light reception amounts of the regular reflection light spots RB1 to RB3 (S12). Then, the controller 301 obtains the light reception positions and the light reception amounts of the regular reflection light spots RB1 to RB3 based on the position detection signal and the light amount signal input from the position detection circuit 304 at the time of the check scanning (S13) .
  • the controller 301 receives the light reception positions and the light reception amounts of the regular reflection light spots RB1 to RB3.
  • a check scan is performed to detect (S22).
  • the controller 301 obtains the light reception positions and the light reception amounts of the regular reflection light spots RB1 to RB3 based on the position detection signal and the light amount signal input from the position detection circuit 304 at the time of this check scan (S23) .
  • the check timing in step S21 is set to, for example, a fixed cycle (for example, several seconds) from the activation of the light source device 2.
  • FIG. 11C is a diagram schematically showing the scanning state of the specularly reflected light spots RB1 to RB3 on the light receiving surface 19a of the position detector 19 at the time of check scanning (S12 and S22 in FIGS. 11A and 11B).
  • the spots filled in black indicate that the specularly reflected light spot is in the lighted state
  • the broken and white spots indicate that the specularly reflected light spot is in the extinguished state.
  • the controller 301 controls the light deflector 16 so that the regular reflection light spots RB1 to RB3 move the light receiving surface 19a at a constant speed. Then, the controller 301 controls the laser light sources 11a to 11c so that the specularly reflected light spots RB1 to RB3 are sequentially turned on at a predetermined cycle.
  • the controller 301 drives only the laser light source 11c corresponding to the regular reflection light spot RB3 in a pulse shape, and turns on only the regular reflection light spot RB3.
  • the controller 301 drives only the laser light source 11a corresponding to the regular reflection light spot RB2 in a pulse shape at a predetermined time interval from the driving of the laser light source 11c. Only the light spot RB2 is turned on.
  • the controller 301 drives only the laser light source 11a corresponding to the regular reflection light spot RB1 in a pulse shape at a predetermined time interval from the driving of the laser light source 11a. Only the spot RB1 is turned on.
  • each laser light source is driven by pulse signals of the same level and the same time width. Therefore, if the output characteristics of the respective laser light sources are the same, the values of the light quantity signal at the time of the irradiation of the respective specularly reflected light spots become the same.
  • the controller 301 controls the position detection signal and the light amount of the specularly reflected light spot from the position detection circuit 304 when lighting each specularly reflected light spot in steps S13 and S23 of FIGS. 11A and 11B.
  • a signal is acquired, and the light receiving position and the light receiving amount on the light receiving surface 19a of the position detector 19 are obtained for each specularly reflected light spot.
  • the controller 301 determines the specularly reflected light spots RB1 based on the light receiving positions acquired for the specularly reflected light spots RB1 to RB3, and the scanning speed by the light deflector 16 and the time interval for lighting the specularly reflected light spots RB1 to RB3. Calculate the interval between ... and RB3.
  • the controller 301 determines that the light distribution pattern from the wavelength conversion member 18 has a predetermined pattern using the light receiving position of each regular reflection light spot acquired by the above processing and the interval between the reflection light spots.
  • the laser light sources 11a to 11c are controlled so that At this time, at the same time, the controller 301 controls the laser light sources 11a to 11c so that the laser light is emitted with the output of the predetermined level based on the light reception amounts of the regular reflection light spots.
  • the controller 301 executes control on the laser light sources 11a to 11c by updating the light reception amount, the light reception position, and the interval of each regular reflection light spot each time the timing of the check scan comes.
  • FIG. 12B is a timing chart showing an example of output control of the laser light sources 11a to 11c.
  • the top row of FIG. 12B shows the waveform of the drive signal for driving the mirror 16a of the light deflector 16.
  • the second to fourth rows from the top of FIG. 12B show the specularly reflected light spots RB1 to RB3, respectively.
  • the waveforms of control signals for driving the corresponding laser light sources are shown.
  • 12B is the waveform of the drive signal of the laser light source 11b
  • the waveform of the third stage from the top of FIG. 12B is the waveform of the drive signal of the laser light source 11a.
  • the lower waveform is the waveform of the drive signal of the laser light source 11c.
  • FIG. 12A shows respective parameters used in the output control of FIG. 12B.
  • the scan in the right direction is set to “scan 1”
  • the scan in the left direction is set to “scan 2”.
  • the dashed arrows indicate the scanning direction and scanning range of the specularly reflected light spot.
  • the scanning speed is constant.
  • the interval X1 between the regular reflection light spots RB1 and RB2 and the interval X2 between the regular reflection light spots RB2 and RB3 are successively updated by the processing shown in FIGS. 11A to 11C.
  • the light reception amounts of the specularly reflected light spots RB1 to RB3 when the respective laser light sources are driven by pulse signals of a predetermined level and a predetermined time width are detected and sequentially updated. .
  • a non-light emission interval Xoff for stopping light emission is set at both ends of the scanning range.
  • non-light emitting sections corresponding to the non-light emitting section X off are set at both ends of the width W1 shown in FIG. 9A.
  • the output of each laser light source is controlled such that the amount of emitted light increases at the center of the width W1 shown in FIG. 9A.
  • the controller 301 applies output control signals shown in the second and subsequent stages of FIG. 12B to the respective laser light sources in synchronization with the drive signal of the mirror 16a.
  • the controller 301 calculates and sets the intervals of the waveforms of the output control signals according to the calculation equation appended to FIG. 12B based on the parameters shown in FIG. 12A. Further, the controller 301 sets each output control signal so that the output of each laser light source becomes a predetermined same level based on the received light amount of each regular reflection light spot acquired by the processing shown in FIGS. 11A to 11C. Set the maximum value of the waveform.
  • light is projected to the target area with a light distribution pattern in which the width in the horizontal direction is somewhat restricted and the central light amount is increased.
  • FIG. 13B is a timing chart showing another example of output control of the laser light sources 11a to 11c. Similar to FIG. 12B, the top row of FIG. 13B shows the waveform of a drive signal for driving the mirror 16a of the light deflector 16. The second to fourth rows from the top of FIG. The waveforms of control signals for driving the laser light sources respectively corresponding to RB1 to RB3 are shown.
  • FIG. 13A shows each parameter used in the output control of FIG. 13B as in FIG. 12A.
  • the non-lighting interval X ADB in which light emission is stopped is set in the middle of the scanning range.
  • a non-light emitting period corresponding to the light off period X ADB is set in part of the width W1 shown in FIG. 9A.
  • the light source device 2 is controlled to turn off the position of the oncoming vehicle, the oncoming vehicle, or the person. Be instructed.
  • This instruction is input to the controller 301 via the interface 305 of FIG.
  • the controller 301 controls the laser drive circuits 302a to 302c to turn off the laser light sources 11a to 11c in a predetermined section in the width W1 in accordance with an instruction from the vehicle side.
  • the turn-off section X ADB shown in FIG. 13A corresponds to a section to turn off the laser light sources 11a to 11c by this control.
  • a section corresponding to the light off section ADB is indicated by hatching.
  • control is performed such that light is projected onto the target area with uniform intensity. Therefore, the output control signal for each laser light source has a rectangular waveform.
  • the controller 301 applies an output control signal shown in the second or lower stage of FIG. 13B to each laser light source in synchronization with the drive signal of the mirror 16a.
  • the controller 301 calculates and sets the intervals of the waveforms of the output control signals according to the calculation equation appended to FIG. 13B based on the parameters shown in FIG. 13A.
  • the intervals of the waveforms of the output control signals are the same as the intervals of the waveforms of the output control signals shown in FIG. 12B.
  • the controller 301 sets a part of the waveform of each output control signal to the zero level in accordance with the turn-off period X ADB .
  • the controller 301 calculates and sets the timing and period for setting a part of the waveform to the zero level based on the parameters shown in FIG. 13A according to the calculation equation appended to FIG. 13B.
  • the controller 301 sets the level of the rectangular waveform of each output control signal based on the light quantity of each regular reflection light spot acquired by the processing shown in FIGS. 11A to 11C.
  • light is projected to the target area with a light distribution pattern in which the width in the horizontal direction is somewhat restricted and light emission is stopped in a part of the section.
  • the wavelength No unevenness occurs in the light distribution from the conversion member 18.
  • the specularly reflected light of the plurality of laser beams specularly reflected on the incident surface 18 a of the wavelength conversion member 18 is received by the position detector 19 with respect to all scanning ranges on the incident surface 18 a. The output of each laser light source can be smoothly controlled by the detection signal from
  • the controller 301 drives the laser light sources 11a to 11c independently to receive the light receiving positions and the light receiving positions of the regular reflection lights (regular reflection light spots RB1 to RB3) from the position detector 19. A detection signal corresponding to the light amount is acquired. As a result, the light receiving position and the light receiving amount of the regular reflection light (regular reflection light spots RB1 to RB3) separated from each other in the scanning direction can be accurately detected.
  • the controller 301 executes control to drive the laser light sources 11a to 11c independently and acquire a detection signal from the position detector 19 when the light source device 2 is activated.
  • the controller 301 executes control to drive the laser light sources 11a to 11c independently and acquire a detection signal from the position detector 19 when the light source device 2 is activated.
  • each specularly reflected light specularly reflected light spots RB1 to RB3
  • the light receiving position and the light receiving amount can be detected.
  • the controller 301 performs control to drive the laser light sources 11a to 11c independently and acquire a detection signal from the position detector 19 every predetermined period after the light source device 2 is activated. Run. In this way, during actual operation of light emission, it is possible to sequentially acquire the light reception positions and the light reception amounts of the regular reflection lights (regular reflection light spots RB1 to RB3). Thus, even when the light receiving positions and the light receiving amounts of the regular reflection lights (regular reflection light spots RB1 to RB3) change during actual light emission operation, the respective laser light sources can be controlled with high accuracy.
  • acquisition of the detection signal (light reception position, light reception light quantity) after starting of the light source device 2 may not necessarily be performed in a fixed cycle, and the number of times of acquisition of detection signals may not be plural. Acquisition of detection signals after activation of the light source device 2 is performed at a predetermined timing at which the possibility of fluctuations in the light reception positions and light reception amounts of the regular reflection lights (regular reflection light spots RB1 to RB3) may be assumed. Just do it. For example, instead of the control in FIG. 11B or together with this control, acquisition control of detection signals (light receiving position, received light quantity) is executed at the timing when it is detected that a large vibration or impact is applied to the light source device 2. May be
  • the controller 301 generates light in a predetermined light distribution pattern from the wavelength conversion member 18 based on the detection signal from the position detector 19.
  • the laser light sources 11a to 11c are controlled. As described above, by individually controlling the laser light sources 11a to 11c based on the detection signal, the resolution of the light distribution pattern from the wavelength conversion member 18 can be enhanced, and a more sophisticated light distribution pattern can be realized.
  • the controller 301 performs control to stop light emission in a part of the scanning range with respect to the wavelength conversion member 18 (light-off section X ADB ).
  • the controller 301 controls the turn-off timing and the turn-off period of each of the laser light sources such that the turn-off of the laser light sources 11a to 11c matches with a partial range (turn-off section X ADB ) in which light emission is stopped.
  • the boundary of the non-lighting section X ADB can be cleared, and light extinguishing of a part of the range can be satisfactorily performed.
  • the controller 301 obtains the intervals X1 and X2 of the specularly reflected light on the light receiving surface 19a of the position detector 19 based on the detection signal from the position detector 19. It is preferable to set the extinguishing timing of the laser light sources 11a to 11c based on the acquired intervals X1 and X2. In this way, the turn-off timings of the laser light sources 11a to 11c can be set smoothly and accurately.
  • the beam spots BS1 to BS3 can be separated and arranged in the scanning direction on the incident surface 18a of the wavelength conversion member 18 while realizing a compact optical system.
  • FIG. 14A and FIG. 14B are respectively a side view and a plan view showing a configuration of a light projecting device 1 according to a modification.
  • the number of laser light sources arranged in the light source device 2 is increased to four. That is, the laser light source 11d is newly added as compared with the above embodiment.
  • the laser light source 11d is the same as the laser light sources 11a to 11c.
  • the laser light emitted from the laser light source 11 d is converted into parallel light by the collimator lens 12 d.
  • the laser light source 11a and the laser light source 11d are disposed to face each other.
  • the laser light sources 11a and 11d are arranged such that the fast axis is parallel to the Z axis, as with the laser light sources 11b and 11c.
  • the reflection prism 13c is disposed in the emission direction of the laser light source 11a
  • the reflection prism 13d is disposed in the emission direction of the laser light source 11d.
  • the optical axis of the laser light source 11a and the optical axis of the laser light source 11d are bent in directions parallel to the XZ plane by the reflecting prisms 13c and 13d so as to be directed to the cylindrical lens 14, respectively.
  • the reflecting prisms 13c and 13d are disposed without a gap in the X-axis direction. Compared to the above embodiment, the gap between the reflecting prisms 13a and 13b is widened.
  • the laser beams emitted from the laser light sources 11a and 11d are bent along the optical axes by the reflecting prisms 13c and 13d, and then enter the cylindrical lens 14 through the gap between the reflecting prisms 13a and 13b.
  • the optical axes of the laser light sources 11 a to 11 d are included in one plane perpendicular to the generatrix of the cylindrical lens 14, that is, one plane parallel to the XZ plane.
  • the positions of the laser light sources 11a to 11d in the Y-axis direction are adjusted.
  • the incident surface 18a of the wavelength conversion member 18 is positioned at the position of the focal length of the cylindrical lens 14 as in the above embodiment.
  • beam spots of four laser beams are formed on the incident surface of the wavelength conversion member 18 so as to align in the scanning direction and to be separated from each other.
  • the four laser beams 130a to 130d can be obtained by causing the laser beams 130a to 130d emitted from the laser light sources 11a to 11d to be incident on the cylindrical lens 14 in a nonparallel state.
  • the beam spots BSa to BSd can be aligned in the scanning direction and separated from each other on the incident surface 18a of the wavelength conversion member 18. In this case, a single-focus cylindrical lens without aberration is used as the cylindrical lens 14.
  • the laser beams 130a to 130d can be incident on the cylindrical lens 14 in a nonparallel state. it can.
  • the beam spots BSa to BSd may be arranged in the scanning direction on the incident surface 18a of the wavelength conversion member 18 and separated from each other by using the cylindrical lens 14 having aberration in advance. Good. Further, as in the case of FIGS. 6A and 6B, the laser beams 130a to 130d are made to intersect with each other in the optical path from the cylindrical lens 14 to the wavelength conversion member 18, and the beam spots BSa to BSd of the laser beams 130a to 130c are obtained. Alternatively, they may be separated from each other on the incident surface 18 a of the wavelength conversion member 18.
  • the position detector 19 is configured to receive the laser beams 130a to 130d with respect to all scanning ranges on the incident surface 18a of the wavelength conversion member 18 and output a detection signal according to the light reception position and the light reception amount. .
  • a laser drive circuit for driving the laser light source 11d is added to the circuit block of FIG.
  • the controller 301 drives the laser light sources 11a to 11d independently as shown in FIG. 15B in steps S12 and S22 in FIG. 11A and FIG. 11B, and acquires detection signals from the position detector 19 The light receiving position of the light, the light receiving amount, and the interval of the regular reflection light are acquired.
  • RB1 to RB4 are regular reflection light spots by the laser light emitted from the laser light sources 11b, 11a, 11d and 11c, respectively.
  • the laser light sources 11b, 11a, 11d, and 11c are individually driven such that the regular reflection light spots are sequentially irradiated from the leftmost regular reflection light spot RB4.
  • the controller 301 controls the laser light sources 11a to 11d based on the acquired light reception positions of the regularly reflected light, the received light amount and the interval of the regularly reflected light, for example, similar to FIGS. 12A, 12B and 13A, 13B. Take control.
  • the beam spot of the laser beam emitted from each laser light source is separated in the scanning direction on the incident surface 18a of the wavelength conversion member 18 in the above embodiment and the modified example, it is in the scanning direction on the incident surface 18a If a plurality of beam spots are formed side by side and spaced apart from one another, several beam spots may overlap on the incident surface 18a.
  • the beam spots BSa and BSb may be overlapped, and two beam spots may be formed on the incident surface 18a of the wavelength conversion member 18 so as to be aligned in the scanning direction and separated from each other.
  • the beam spots BSa and BSb may be overlapped, and three beam spots may be formed on the incident surface 18a of the wavelength conversion member 18 so as to be aligned in the scanning direction and separated from each other.
  • the beam spots BSa and BSb are overlapped, and the beam spots BSc and BSd are further overlapped, and two beam spots are aligned in the scanning direction on the incident surface 18a of the wavelength conversion member 18 It may be formed to be separated from each other.
  • the laser beams superimposed on each other may be made incident on the cylindrical lens 14 so as to be parallel to each other.
  • the cylindrical lens 14 a single-focus cylindrical lens without aberration is used.
  • the mutually overlapping laser beams are made to be incident on the cylindrical lens 14 so as to be parallel to each other. Can be incident on the cylindrical lens 14 in a non-parallel state.
  • the light reception position and the light reception amount of the specularly reflected light corresponding to each laser light source are separately detected, and each laser light source is individually controlled. do it.
  • predetermined control is performed by individually controlling the respective laser light sources. Light distribution pattern can be realized well.
  • the number of beam spots to be overlapped is limited to about two. Thereby, it can suppress that a light density increases excessively, and it can suppress that the luminous efficiency in the wavelength conversion member 18 falls by the temperature quenching effect by light saturation or heat_generation
  • the laser light sources 11a to 11c are individually turned on while scanning the specularly reflected light spots RB1 to RB3 on the light receiving surface 19a, and the light receiving positions and the received light amounts of the specularly reflected light spots RB1 to RB3.
  • the specularly reflected light spots may not necessarily be scanned.
  • the laser light sources 11a to 11c are individually turned on to detect the light reception positions and the light reception amounts of the regular reflection light spots RB1 to RB3. Good.
  • 13A and 13B show the control in the case of turning off part of the scanning range, but it may be control to turn on only part of the scanning range.
  • the laser light source is controlled based on the light receiving positions of the specularly reflected light spots RB1 to RB3 and the received light amounts. However, based on the light receiving positions of the specularly reflected light spots RB1 to RB3.
  • the mirror 16 a of the light deflector 16 may be controlled. For example, the movement range of the regular reflection light (the swing angle of the mirror 16a) is detected based on any one light reception position of the regular reflection light spots RB1 to RB3, and the movement range of the regular reflection light (the swing angle of the mirror 16a)
  • the light deflector 16 may be controlled so as to be appropriate.
  • each laser light source is arranged such that the fast axis of the laser light is parallel to the convergence direction of the cylindrical lens 14, but the arrangement method of the laser light source is necessarily limited to this. It is not something to be done.
  • each laser light source may be arranged such that the slow axis of the laser light is parallel to the convergence direction of the cylindrical lens 14.
  • the fast axis of the laser light is parallel to the convergence direction of the cylindrical lens 14 as in the embodiment and the modifications described above.
  • each laser light source is arranged.
  • the number of laser light sources disposed in the light source device 2 is not limited to the number shown in the above embodiment and the modification, and may be two or five or more.
  • the configuration of the optical system does not necessarily have to be the configuration shown in FIGS. 1A, 1B and 14A, 14B, so that it is aligned in the scanning direction on the incident surface 18a of the wavelength conversion member 18 and separated from each other.
  • Various modifications are possible as long as multiple beam spots can be formed.
  • the condensing optical system does not necessarily have to be divided into the cylindrical lens 14 and the cylindrical mirror 17, and the laser light may be converged in the scanning direction and the direction perpendicular to the scanning direction by one lens.
  • the lens constituting the condensing optical system may be a Fresnel lens or a diffractive lens.
  • the light deflector 16 may be configured to rotate the mirror 16a about two axes perpendicular to each other.
  • the type of phosphor particles 203a contained in the phosphor layer 203 of the wavelength conversion member 18 is not necessarily limited to one type, and for example, the laser beams from the laser light sources 11a to 11d produce fluorescence of different wavelengths.
  • Plural kinds of phosphor particles 203 a may be included in the phosphor layer 203. In this case, light of a predetermined color is generated by the diffused light of the fluorescent light generated from the phosphor particles 203a of each type and the diffused light of the laser light which is not wavelength-converted by the phosphor particles 203a.
  • the wavelength conversion member 18 is not limited to the reflection type, and may be a transmission type.
  • the scanning direction of the laser light may not necessarily be the horizontal direction, and the vertical direction may be the scanning direction of the laser light depending on the required irradiation conditions.
  • the outputs of the respective laser light sources can be smoothly controlled while suppressing the occurrence of unevenness in light distribution. Therefore, the light source device and the light projecting device according to the present disclosure can be used, for example, as a light source device of a vehicle headlamp, and is industrially useful.

Abstract

Provided are a light source device capable of controlling the output of each laser light source smoothly while suppressing the occurrence of unevenness in light distribution, and a light projection device using the same. According to the present invention, the light source device is provided with: a laser light source; a wavelength conversion member; an optical deflector for scanning a laser beam emitted from the laser light source on an incident surface of the wavelength conversion member; and an optical system for forming a plurality of beam spots on the incident surface of the wavelength conversion member by a plurality of laser beams respectively emitted from the laser light source so as to be in parallel in the scanning direction and spaced apart from each other. In addition, the light source device is provided with: a position detector that receives a plurality of laser beams specularly reflected from the incident surface of the wavelength conversion member with respect to all scanning ranges on the incident surface, and outputs a detection signal corresponding to the received light position and the received light amount; and a controller that controls the laser light source on the basis of the detection signal from the position detector.

Description

光源装置および投光装置Light source device and light projecting device
　本開示は、光を発する光源装置およびそれを用いた投光装置に関する。 The present disclosure relates to a light source device that emits light and a light projecting device using the light source device.
　従来、レーザ光源から出射された光を波長変換部材に照射することにより所定波長の光を生成する光源装置が知られている。この光源装置では、たとえば、波長変換部材により波長変換されて拡散された光と、波長変換部材により波長変換されずに拡散された光とが合成されて、白色光等、所定の色の光が生成される。このような光源装置が、たとえば、車両用前照灯の光源装置として利用されている。 BACKGROUND Conventionally, a light source device is known that generates light of a predetermined wavelength by irradiating a wavelength conversion member with light emitted from a laser light source. In this light source device, for example, light that is wavelength-converted and diffused by the wavelength conversion member and light that is diffused without wavelength conversion by the wavelength conversion member are combined, and light of a predetermined color such as white light is generated. It is generated. Such a light source device is used, for example, as a light source device of a vehicular headlamp.
　以下の特許文献１には、光変換手段（蛍光体）によって生成された光像を投光光学系によって道路上に投光する投光器（ヘッドライト）が開示されている。投光器は、６つのレーザ光源と、２つのマイクロミラーとを備える。１つのマイクロミラーに対して３つのレーザ光源が割り当てられている。１つのマイクロミラーに入射した３つのレーザ光は、それぞれ、走査方向に垂直な方向に互いに変位した位置において、光変換手段の発光面に照射される。マイクロミラーは、単一軸の周りにのみ振動する。マイクロミラーが振動することにより、走査方向に垂直な方向に互いに変位したビームスポットが、光変換手段の発光面を走査する。一方のマイクロミラーで走査される３つのレーザ光は、光変換手段の発光面上において、他方のマイクロミラーで走査される３つのレーザ光の間の位置に位置づけられる。 Patent Document 1 below discloses a light projector (headlight) that projects a light image generated by light conversion means (phosphor) onto a road by a light projection optical system. The projector comprises six laser light sources and two micro mirrors. Three laser light sources are assigned to one micro mirror. The three laser beams incident on one micro mirror are irradiated on the light emitting surface of the light conversion means at positions mutually displaced in the direction perpendicular to the scanning direction. The micro mirror vibrates only around a single axis. As the micromirrors vibrate, the beam spots displaced relative to each other in the direction perpendicular to the scanning direction scan the light emitting surface of the light conversion means. The three laser beams scanned by one micro mirror are positioned on the light emitting surface of the light conversion means at a position between the three laser beams scanned by the other micro mirror.
国際公開第２０１４／１２１３１５号International Publication No. 2014/121315
　上記特許文献１の構成では、走査方向に垂直な方向に変位した６つの位置を、各レーザ光源から出射されたレーザ光で走査する構成であるため、これらレーザ光源のうち１つにでも故障もしくは強度の変動があると、波長変換部材からの配光に帯状のムラが生じる。また、振動等の衝撃や経時変化等によって複数のレーザ光源または各レーザ光を波長変換部材へと導く各光学系のうち１つにでもずれが生じた場合も、同様に、配光が不均一になってしまう。 In the configuration of Patent Document 1 described above, six positions displaced in the direction perpendicular to the scanning direction are scanned with laser light emitted from each laser light source. If there is a fluctuation in intensity, band-like unevenness occurs in the light distribution from the wavelength conversion member. In addition, even when one of the optical systems for guiding the plurality of laser light sources or the respective laser beams to the wavelength conversion member is deviated due to impact such as vibration or temporal change, the light distribution is also uneven similarly. Become.
　かかる課題に鑑み、本開示は、配光にムラが生じることを抑制しつつ、各レーザ光源の出力を円滑に制御することが可能な光源装置およびそれを用いた投光装置を提供することを目的とする。 In view of such problems, the present disclosure provides a light source device capable of smoothly controlling the output of each laser light source while suppressing occurrence of unevenness in light distribution, and a light projecting device using the same. To aim.
　本開示の第１の態様は、光源装置に関する。この態様に係る光源装置は、複数のレーザ光源と、波長変換部材と、光偏向器と、光学系と、位置検出器と、コントローラと、を備える。波長変換部材は、複数のレーザ光源から出射されたレーザ光の波長を他の波長に変換するとともに波長変換された光を拡散させる。光偏向器は、複数のレーザ光源から出射されたレーザ光を波長変換部材の入射面上において走査させる。光学系は、複数のレーザ光源からそれぞれ出射された複数のレーザ光により、波長変換部材の入射面上において、走査方向に並び、且つ少なくとも１つのスポットが他のスポットと離間するように複数のビームスポットを形成する。位置検出器は、波長変換部材の入射面において正反射した複数のレーザ光の正反射光を、入射面上の走査範囲に対して受光して、受光位置および受光光量に応じた検出信号を出力する。コントローラは、位置検出器からの検出信号に基づいて複数のレーザ光源を制御する。 A first aspect of the present disclosure relates to a light source device. The light source device according to this aspect includes a plurality of laser light sources, a wavelength conversion member, an optical deflector, an optical system, a position detector, and a controller. The wavelength conversion member converts the wavelength of the laser light emitted from the plurality of laser light sources into another wavelength and diffuses the wavelength-converted light. The light deflector scans laser light emitted from the plurality of laser light sources on the incident surface of the wavelength conversion member. The optical system is a plurality of beams arranged in the scanning direction on the incident surface of the wavelength conversion member by a plurality of laser beams respectively emitted from a plurality of laser light sources and at least one spot is separated from the other spots. Form a spot. The position detector receives specularly reflected light of the plurality of laser beams specularly reflected on the incident surface of the wavelength conversion member with respect to the scanning range on the incident surface, and outputs a detection signal according to the light receiving position and the received light amount Do. The controller controls the plurality of laser light sources based on the detection signal from the position detector.
　本態様に係る光源装置によれば、波長変換部材の入射面上において、各ビームスポットが走査方向に並び且つ互いに離間するため、何れか１つのレーザ光源に故障等の不具合が生じたとしても、配光にムラが生じることがない。また、波長変換部材の入射面で正反射した複数のレーザ光の正反射光が、入射面上の全ての走査範囲に対して位置検出器で受光されるため、位置検出器からの検出信号により、各レーザ光源の出力を円滑に制御することができる。 According to the light source device according to this aspect, since the beam spots are arranged in the scanning direction and are separated from each other on the incident surface of the wavelength conversion member, even if a failure such as a failure occurs in any one laser light source, There is no unevenness in light distribution. In addition, the specularly reflected light of the plurality of laser beams specularly reflected on the incident surface of the wavelength conversion member is received by the position detector for all scanning ranges on the incident surface, so the detection signal from the position detector The output of each laser light source can be controlled smoothly.
　本開示の第２の態様は、投光装置に関する。この態様に係る投光装置は、第１の態様に係る光源装置と、前記波長変換部材により拡散された光を投射する投射光学系と、を備える。 A second aspect of the present disclosure relates to a light projecting device. The light projecting device according to this aspect includes the light source device according to the first aspect, and a projection optical system that projects the light diffused by the wavelength conversion member.
　本態様に係る投光装置によれば、第１の態様と同様の効果が奏され得る。 According to the light projecting device relating to the present aspect, the same effect as the first aspect can be exhibited.
　以上のとおり、本開示に係る光源装置および投光装置によれば、配光にムラが生じることを抑制しつつ、各レーザ光源の出力を円滑に制御することができる。 As described above, according to the light source device and the light projecting device according to the present disclosure, the output of each laser light source can be smoothly controlled while suppressing the occurrence of unevenness in light distribution.
　本開示効果ないし意義は、以下に示す実施の形態の説明により更に明らかとなろう。ただし、以下に示す実施の形態は、あくまでも、本開示にかかる発明を実施化する際の一つの例示であって、本開示にかかる発明は、以下の実施の形態に記載されたものに何ら制限されるものではない。 The effects and significance of the present disclosure will become more apparent from the description of the embodiments shown below. However, the embodiment shown below is merely an example when implementing the invention according to the present disclosure, and the invention according to the present disclosure is in no way limited to those described in the following embodiments. It is not something to be done.
図１Ａは、実施の形態に係る投光装置の構成を示す側面図である。FIG. 1A is a side view showing a configuration of a light projecting device according to an embodiment. 図１Ｂは、実施の形態に係る投光装置の構成を示す平面図である。FIG. 1B is a plan view showing the configuration of the light projecting device according to the embodiment. 図２は、実施の形態に係るレーザ光源の構成と配置を示す斜視図である。FIG. 2 is a perspective view showing the configuration and arrangement of the laser light source according to the embodiment. 図３は、実施の形態に係るシリンドリカルミラーで反射された後のレーザ光の収束状態を模式的に示す図である。FIG. 3 is a view schematically showing a convergence state of the laser beam after being reflected by the cylindrical mirror according to the embodiment. 図４Ａは、実施の形態に係る、波長変換部材の入射面においてビームスポットを走査方向に離間させるための構成を説明する図である。FIG. 4A is a view for explaining a configuration for separating beam spots in the scanning direction on the incident surface of the wavelength conversion member according to the embodiment. 図４Ｂは、実施の形態に係る、波長変換部材の入射面においてビームスポットを走査方向に離間させるための構成を説明する図である。FIG. 4B is a view for explaining a configuration for separating beam spots in the scanning direction on the incident surface of the wavelength conversion member according to the embodiment. 図５Ａは、実施の形態に係る、シリンドリカルレンズに対するレーザ光の入射方向を調整するための構成例を示す図である。FIG. 5A is a diagram showing a configuration example for adjusting the incident direction of the laser light to the cylindrical lens according to the embodiment. 図５Ｂは、実施の形態に係る、シリンドリカルレンズに対するレーザ光の入射方向を調整するための構成例を示す図である。FIG. 5B is a diagram showing a configuration example for adjusting the incident direction of the laser light to the cylindrical lens according to the embodiment. 図６Ａは、実施の形態に係る、シリンドリカルレンズに対するレーザ光の入射方向を調整するための他の構成例を示す図である。FIG. 6A is a diagram showing another configuration example for adjusting the incident direction of the laser light to the cylindrical lens according to the embodiment. 図６Ｂは、図６Ａの構成例により波長変換部材の入射面に形成される各レーザ光のビームスポットの配置を模式的に示す図である。FIG. 6B is a view schematically showing the arrangement of beam spots of each laser beam formed on the incident surface of the wavelength conversion member according to the configuration example of FIG. 6A. 図７Ａは、実施の形態に係る波長変換部材の構成を模式的に示す側面図である。FIG. 7A is a side view schematically showing the configuration of the wavelength conversion member according to the embodiment. 図７Ｂは、実施の形態に係る波長変換部材の構成を模式的に示す平面図である。FIG. 7B is a plan view schematically showing the configuration of the wavelength conversion member according to the embodiment. 図８Ａは、実施の形態に係る位置検出器の構成および位置検出信号の生成方法を説明するための図である。FIG. 8A is a diagram for describing a configuration of a position detector according to an embodiment and a method for generating a position detection signal. 図８Ｂは、実施の形態に係る位置検出器の構成を模式的に示す断面図である。FIG. 8B is a cross-sectional view schematically showing the configuration of the position detector according to the embodiment. 図９Ａは、実施の形態に係る、波長変換部材の入射面におけるビームスポットの移動を模式的に示す図である。FIG. 9A is a view schematically showing the movement of the beam spot on the incident surface of the wavelength conversion member according to the embodiment. 図９Ｂは、実施の形態に係る、図９Ａのようにビームスポットが移動した場合の位置検出器上における正反射光スポットの移動を模式的に示す図である。FIG. 9B is a view schematically showing the movement of a specularly reflected light spot on the position detector when the beam spot moves as shown in FIG. 9A according to the embodiment. 図１０は、実施の形態に係る光源装置の主たる回路構成を示す回路ブロック図である。FIG. 10 is a circuit block diagram showing a main circuit configuration of the light source device according to the embodiment. 図１１Ａは、実施の形態に係る各正反射光スポットの受光位置および受光光量を取得するための制御を示すフローチャートである。FIG. 11A is a flowchart showing control for acquiring the light receiving position and the received light amount of each regular reflection light spot according to the embodiment. 図１１Ｂは、実施の形態に係る各正反射光スポットの受光位置および受光光量を取得するための制御を示すフローチャートである。FIG. 11B is a flowchart showing control for acquiring the light receiving position and the received light amount of each regular reflection light spot according to the embodiment. 図１１Ｃは、実施の形態に係るチェック走査時における位置検出器の受光面上の正反射光スポットの走査状態を模式的に示す図である。FIG. 11C is a view schematically showing a scanning state of a specularly reflected light spot on the light receiving surface of the position detector at the time of check scanning according to the embodiment. 図１２Ａは、実施の形態に係るレーザ光源の出力制御のための各パラメータを示す図である。FIG. 12A is a diagram showing parameters for output control of the laser light source according to the embodiment. 図１２Ｂは、実施の形態に係るレーザ光源の出力制御の一例を示すタイミングチャートである。FIG. 12B is a timing chart showing an example of output control of the laser light source according to the embodiment. 図１３Ａは、実施の形態に係るレーザ光源の出力制御のための各パラメータを示す図である。FIG. 13A is a view showing parameters for output control of the laser light source according to the embodiment. 図１３Ｂは、実施の形態に係るレーザ光源の出力制御の他の例を示すタイミングチャートである。FIG. 13B is a timing chart showing another example of output control of the laser light source according to the embodiment. 図１４Ａは、変更例に係る投光装置の構成を示す側面図である。FIG. 14A is a side view showing the configuration of a light projecting device according to a modification. 図１４Ｂは、変更例に係る投光装置の構成を示す平面図である。FIG. 14B is a plan view showing the configuration of a light projecting device according to a modification. 図１５Ａは、変更例に係る、波長変換部材の入射面においてビームスポットを走査方向に離間させるための構成を説明する図である。FIG. 15A is a view for explaining a configuration for separating beam spots in the scanning direction on the incident surface of the wavelength conversion member according to the modification. 図１５Ｂは、変更例に係るチェック走査時における位置検出器の受光面上の正反射光スポットの走査状態を模式的に示す図である。FIG. 15B is a view schematically showing a scanning state of a specularly reflected light spot on the light receiving surface of the position detector at the time of check scanning according to the modification.
　以下、本開示の実施の形態について、図を参照して説明する。便宜上、各図には互いに直交するＸ、Ｙ、Ｚ軸が付記されている。この座標軸は、光源装置および投光装置の光投射方向をＺ軸とするグローバル座標系（図１Ａ、図１Ｂ、図１４Ａ、図１４Ｂ）と、説明対象となる光学部品の光出射方向、または反射面の法線方向をＺ軸とするローカル座標系（図２、図４Ａ、図４Ｂ、図５Ａ、図５Ｂ、図６Ａ、図６Ｂ、図７Ａ、図７Ｂ、図９Ａ、図９Ｂ、図１５Ａ、図１５Ｂ）を説明に合わせて適宜使い分けており、従って、両者は必ずしも一致するものではない。 Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. For convenience, X, Y, and Z axes orthogonal to each other are added to the respective drawings. This coordinate axis is a global coordinate system (Fig. 1A, Fig. 1B, Fig. 14A, Fig. 14B) in which the light projection direction of the light source device and the light projection device is Z axis, and the light emission direction or reflection of optical components to be described. 2A, 4A, 4B, 5A, 5B, 6A, 6A, 7A, 7B, 9A, 9A, 9A, 9A, 9A, 9A, 9A, 9A, 9A, 9A, 9A, 9A, 9A, 9A, 9A, 9A, 7A, 7A, 7A, 7A, 7B). FIG. 15B is appropriately used in accordance with the description, and therefore, the two do not necessarily coincide.
　図１Ａ、図１Ｂは、それぞれ、実施の形態に係る投光装置の構成を示す側面図および平面図である。 FIG. 1A and FIG. 1B are a side view and a plan view showing the configuration of the light projecting device according to the embodiment, respectively.
　投光装置１は、光を生成する光源装置２と、光源装置２により生成された光を投射するための投射光学系３とを備える。投射光学系３は、２つのレンズ３ａ、３ｂを備え、これらレンズ３ａ、３ｂによって光源装置２からの光を集光して目標領域へと投射する。なお、投射光学系３は、必ずしも２つのレンズ３ａ、３ｂから構成されなくともよく、たとえば、１つのレンズでもよく、２つ以上のレンズやミラーを備えていてもよい。また、投射光学系３は、凹面ミラーによって光源装置２からの光を集光する構成であってもよい。 The light projecting device 1 includes a light source device 2 for generating light and a projection optical system 3 for projecting the light generated by the light source device 2. The projection optical system 3 includes two lenses 3a and 3b, and the lenses 3a and 3b condense light from the light source device 2 and project the light to a target area. The projection optical system 3 does not necessarily have to be composed of two lenses 3a and 3b. For example, it may be a single lens or may be equipped with two or more lenses or mirrors. The projection optical system 3 may be configured to condense the light from the light source device 2 by a concave mirror.
　光源装置２は、３つのレーザ光源１１ａ～１１ｃと、３つのコリメータレンズ１２ａ～１２ｃと、２つの反射プリズム１３ａ、１３ｂと、シリンドリカルレンズ１４と、反射ミラー１５と、光偏向器１６と、シリンドリカルミラー１７と、波長変換部材１８とを備えている。シリンドリカルレンズ１４とシリンドリカルミラー１７は、レーザ光源１１ａ～１１ｃから出射されたレーザ光を波長変換部材１８の入射面に収束させるための集光光学系を構成する。光源装置２を構成する上記部材は、投射光学系３とともに、図示しないベースに設置されている。 The light source device 2 includes three laser light sources 11a to 11c, three collimator lenses 12a to 12c, two reflecting prisms 13a and 13b, a cylindrical lens 14, a reflecting mirror 15, an optical deflector 16, and a cylindrical mirror 17 and the wavelength conversion member 18. The cylindrical lens 14 and the cylindrical mirror 17 constitute a condensing optical system for causing the laser light emitted from the laser light sources 11a to 11c to converge on the incident surface of the wavelength conversion member 18. The above-described members constituting the light source device 2 are installed together with the projection optical system 3 on a base (not shown).
　レーザ光源１１ａ～１１ｃは、それぞれ、青色波長帯（たとえば、４５０ｎｍ）のレーザ光を出射する。レーザ光源１１ａ～１１ｃは、たとえば、半導体レーザからなっている。レーザ光源１１ａ～１１ｃは、同一機種のレーザ光源である。レーザ光源１１ａ～１１ｃから出射されるレーザ光の波長は、適宜変更可能である。レーザ光源１１ａ～１１ｃは、必ずしも単一の発光領域を有するシングルエミッターの半導体レーザでなくともよく、たとえば、１つの発光素子に複数の発光領域を有するマルチエミッターの半導体レーザであってもよい。また、レーザ光源１１ａ～１１ｃは、必ずしも単一波長帯のレーザ光を出射するものでなくともよく、たとえば、１基板に複数の発光素子がマウントされたマルチ発光の半導体レーザであってもよい。 The laser light sources 11a to 11c respectively emit laser light in a blue wavelength band (for example, 450 nm). The laser light sources 11a to 11c are made of, for example, semiconductor lasers. The laser light sources 11a to 11c are laser light sources of the same type. The wavelength of the laser light emitted from the laser light sources 11a to 11c can be changed as appropriate. The laser light sources 11a to 11c are not necessarily single emitter semiconductor lasers having a single light emitting area, and may be, for example, multi-emitter semiconductor lasers having a plurality of light emitting areas in one light emitting element. The laser light sources 11a to 11c do not necessarily emit laser light of a single wavelength band, and may be, for example, a multi-emission semiconductor laser in which a plurality of light emitting elements are mounted on one substrate.
　コリメータレンズ１２ａ～１２ｃは、それぞれ、レーザ光源１１ａ～１１ｃから出射されたレーザ光を平行光に変換する。反射プリズム１３ａ、１３ｂは、それぞれ、コリメータレンズ１２ｂ、１２ｃを透過したレーザ光を、シリンドリカルレンズ１４に向かう方向に反射する。反射プリズム１３ａ、１３ｂに代えて、板状の反射ミラーを用いてもよい。 The collimator lenses 12a to 12c convert the laser beams emitted from the laser light sources 11a to 11c into parallel beams, respectively. The reflecting prisms 13 a and 13 b respectively reflect the laser beams transmitted through the collimator lenses 12 b and 12 c in the direction toward the cylindrical lens 14. A plate-like reflection mirror may be used instead of the reflection prisms 13a and 13b.
　図１Ｂに示すように、レーザ光源１１ｂ、１１ｃは、互いに向き合うように配置されている。反射プリズム１３ａ、１３ｂは、レーザ光源１１ｂ、１１ｃが向き合う方向、すなわち、Ｘ軸方向に隙間が生じるように配置されている。レーザ光源１１ａ～１１ｃは、出射光軸がＸ－Ｚ平面に平行な１つの平面に含まれるように配置されている。 As shown in FIG. 1B, the laser light sources 11b and 11c are disposed to face each other. The reflecting prisms 13a and 13b are disposed such that a gap is generated in the direction in which the laser light sources 11b and 11c face each other, that is, in the X-axis direction. The laser light sources 11a to 11c are arranged such that the emission optical axis is included in one plane parallel to the XZ plane.
　レーザ光源１１ａから出射されたレーザ光は、コリメータレンズ１２ａにより平行光に変換された後、反射プリズム１３ａ、１３ｂの間の隙間を通って、シリンドリカルレンズ１４へと向かう。対向配置されたレーザ光源１１ｂ、１１ｃの光軸は、反射プリズム１３ａ、１３ｂによって、Ｘ－Ｚ平面に平行な方向に曲げられる。これにより、レーザ光源１１ａ～１１ｃから出射されたレーザ光は、シリンドリカルレンズ１４の入射面に対し、Ｘ軸方向において互いに異なる位置に入射する。 The laser light emitted from the laser light source 11a is converted into parallel light by the collimator lens 12a, and then travels to the cylindrical lens 14 through the gap between the reflecting prisms 13a and 13b. The optical axes of the opposed laser light sources 11b and 11c are bent in directions parallel to the XZ plane by the reflecting prisms 13a and 13b. As a result, the laser beams emitted from the laser light sources 11a to 11c are incident on the incident surface of the cylindrical lens 14 at mutually different positions in the X-axis direction.
　以上の構成により、レーザ光源１１ａ～１１ｃのパッケージやキャップ外形に制限されることなく、３つのレーザ光を接近させることが可能となる。これにより、シリンドリカルレンズ１４に入射する３つのレーザ光を束ねた光束の全幅を小さくできる。その結果、シリンドリカルレンズ１４以降の光学系のコンパクト化が可能となると共に、光学系が有する収差の影響を小さくすることができる。また、光偏向器１６のミラー１６ａのサイズを小さくでき、光偏向器１６の大型化や消費電力の増大を抑制できる。 According to the above configuration, three laser beams can be approached without being limited by the package and cap outer shape of the laser light sources 11a to 11c. As a result, it is possible to reduce the overall width of a bundle of three laser beams incident on the cylindrical lens 14. As a result, the optical system after the cylindrical lens 14 can be made compact, and the influence of the aberration of the optical system can be reduced. In addition, the size of the mirror 16 a of the light deflector 16 can be reduced, and the increase in size and power consumption of the light deflector 16 can be suppressed.
　レーザ光源１１ａから出射されたレーザ光は、シリンドリカルレンズ１４の入射面の中央位置に入射する。レーザ光源１１ｂ、１１ｃから出射されたレーザ光は、それぞれ、シリンドリカルレンズ１４の入射面の中央位置からＸ軸正負の方向に所定距離だけずれた位置に入射する。 The laser light emitted from the laser light source 11 a is incident on the central position of the incident surface of the cylindrical lens 14. The laser beams emitted from the laser light sources 11 b and 11 c are respectively incident at positions deviated from the central position of the incident surface of the cylindrical lens 14 by a predetermined distance in the X axis positive and negative directions.
　シリンドリカルレンズ１４は、入射面がＸ－Ｚ平面に平行な方向のみに湾曲した曲面となっている。シリンドリカルレンズ１４の入射面は非球面であり、シリンドリカルレンズ１４の出射面は、Ｚ軸に垂直な平面である。シリンドリカルレンズ１４の出射面も、Ｘ－Ｚ平面に平行な方向に湾曲した曲面であってもよい。あるいは、シリンドリカルレンズ１４の入射面が平面で出射面が曲面であってもよい。 The cylindrical lens 14 is a curved surface in which the incident surface is curved only in the direction parallel to the XZ plane. The entrance surface of the cylindrical lens 14 is aspheric, and the exit surface of the cylindrical lens 14 is a plane perpendicular to the Z axis. The exit surface of the cylindrical lens 14 may also be a curved surface curved in a direction parallel to the XZ plane. Alternatively, the entrance surface of the cylindrical lens 14 may be flat and the exit surface may be curved.
　シリンドリカルレンズ１４は、入射面の母線が、入射面に入射する３つのレーザ光の光軸を含む平面に垂直、すなわちＹ軸方向に平行となるように配置されている。シリンドリカルレンズ１４は、入射位置におけるレーザ光源１１ａ～１１ｃの３つの光軸が並ぶ方向、すなわち、Ｘ軸方向のみに収束パワーを有する。レーザ光源１１ａ～１１ｃから出射されたレーザ光は、シリンドリカルレンズ１４によって、波長変換部材１８の入射面上においてレーザ光の走査方向に収束される。後述のように、本実施の形態では、３つのレーザ光のビームスポットが、波長変換部材１８の入射面上において走査方向に並び、且つ、互いに離間するように形成される。 The cylindrical lens 14 is disposed such that the generatrix of the incident surface is perpendicular to a plane including the optical axes of the three laser beams incident on the incident surface, that is, parallel to the Y-axis direction. The cylindrical lens 14 has a convergence power only in the direction in which the three optical axes of the laser light sources 11a to 11c at the incident position are aligned, ie, in the X-axis direction. The laser light emitted from the laser light sources 11a to 11c is converged by the cylindrical lens 14 on the incident surface of the wavelength conversion member 18 in the scanning direction of the laser light. As described later, in the present embodiment, beam spots of three laser beams are formed on the incident surface of the wavelength conversion member 18 so as to be aligned in the scanning direction and separated from each other.
　反射ミラー１５は、シリンドリカルレンズ１４を透過した３つのレーザ光の光軸を、それぞれ、Ｙ－Ｚ平面に平行な方向に折り曲げる。３つのレーザ光は、反射ミラー１５で反射された後、光偏向器１６のミラー１６ａに入射する。なお、シリンドリカルレンズ１４から波長変換部材１８までの光学系のレイアウトによっては、反射ミラー１５が省略され得る。この場合、シリンドリカルレンズ１４を透過した３つのレーザ光は、直接、光偏向器１６のミラー１６ａに入射する。 The reflection mirror 15 bends the optical axes of the three laser beams transmitted through the cylindrical lens 14 in the direction parallel to the YZ plane. The three laser beams are reflected by the reflection mirror 15 and then enter the mirror 16 a of the light deflector 16. Note that, depending on the layout of the optical system from the cylindrical lens 14 to the wavelength conversion member 18, the reflection mirror 15 may be omitted. In this case, the three laser beams transmitted through the cylindrical lens 14 directly enter the mirror 16 a of the light deflector 16.
　光偏向器１６は、ミラー１６ａを備え、ミラー１６ａをＺ軸に平行な回動軸Ｌ１について回動させることにより、反射ミラー１５で反射されたレーザ光の進行方向を変化させる。ミラー１６ａの入射面は平面である。ミラー１６ａは、たとえば、ガラス板に誘電体多層膜を形成した高反射率のミラーである。ミラー１６ａは、中立位置において、Ｘ－Ｚ平面に平行となるように配置される。光偏向器１６は、たとえば、ＭＥＭＳ（Micro Electro Mechanical Systems）ミラーによって構成される。 The light deflector 16 includes a mirror 16a, and changes the traveling direction of the laser beam reflected by the reflection mirror 15 by rotating the mirror 16a about a rotation axis L1 parallel to the Z axis. The incident surface of the mirror 16a is a plane. The mirror 16a is, for example, a high reflectance mirror in which a dielectric multilayer film is formed on a glass plate. The mirror 16a is disposed parallel to the XZ plane at the neutral position. The light deflector 16 is configured of, for example, a MEMS (Micro Electro Mechanical Systems) mirror.
　シリンドリカルミラー１７は、入射面がＹ－Ｚ平面に平行な方向のみ凹面に湾曲した反射面となっている。シリンドリカルミラー１７の入射面は球面であるが、非球面であってもよい。シリンドリカルミラー１７は、入射面の母線が、入射面に入射する３つのレーザ光の光軸を含む平面に平行、すなわちＸ軸方向に平行となるように配置されている。シリンドリカルミラー１７は、入射位置におけるレーザ光源１１ａ～１１ｃの３つの光軸が並ぶ方向に垂直な方向、すなわち、Ｙ－Ｚ平面に平行な方向のみに収束パワーを有する。レーザ光源１１ａ～１１ｃから出射されたレーザ光は、シリンドリカルミラー１７によって、波長変換部材１８の入射面上においてレーザ光の走査方向に垂直な方向に収束される。 The cylindrical mirror 17 is a reflecting surface whose incident surface is curved in a concave direction only in the direction parallel to the YZ plane. The incident surface of the cylindrical mirror 17 is spherical, but may be aspheric. The cylindrical mirror 17 is disposed such that the generatrix of the incident surface is parallel to a plane including the optical axes of the three laser beams incident on the incident surface, that is, parallel to the X-axis direction. The cylindrical mirror 17 has convergent power only in the direction perpendicular to the direction in which the three optical axes of the laser light sources 11a to 11c at the incident position are aligned, ie, in the direction parallel to the YZ plane. The laser light emitted from the laser light sources 11a to 11c is converged by the cylindrical mirror 17 on the incident surface of the wavelength conversion member 18 in the direction perpendicular to the scanning direction of the laser light.
　なお、光偏向器１６から波長変換部材１８までの光学系のレイアウトによっては、シリンドリカルミラー１７が透過型のシリンドリカルレンズに置き換えられ得る。この場合、シリンドリカルレンズに入射した３つのレーザ光は、シリンドリカルレンズでＹ－Ｚ平面に平行な方向の収束作用を受けた後、波長変換部材１８に入射する。 Depending on the layout of the optical system from the light deflector 16 to the wavelength conversion member 18, the cylindrical mirror 17 may be replaced with a transmission type cylindrical lens. In this case, the three laser beams incident on the cylindrical lens are subjected to the converging action in the direction parallel to the YZ plane by the cylindrical lens, and then enter the wavelength conversion member 18.
　さらに、ミラー１６ａの入射面を、シリンドリカルミラー面に置き換えてもよい。この場合、シリンドリカルミラー１７は、省略されるか、平面の反射ミラーとされ、シリンドリカルレンズ１４に入射した３つのレーザ光は、シリンドリカル面のミラー１６ａによりＹ－Ｚ平面に平行な方向の収束作用を受けた後、反射ミラーを経るか、または、そのまま直接、波長変換部材１８に入射する。 Furthermore, the incident surface of the mirror 16a may be replaced with a cylindrical mirror surface. In this case, the cylindrical mirror 17 is omitted or is a flat reflection mirror, and the three laser beams incident on the cylindrical lens 14 have a converging action in a direction parallel to the YZ plane by the mirror 16a of the cylindrical surface. After receiving, it passes through the reflection mirror or directly enters the wavelength conversion member 18 as it is.
　波長変換部材１８は、シリンドリカルミラー１７によって反射されたレーザ光が入射する位置に配置されている。波長変換部材１８は、長方形形状の板状の部材であり、入射面がＸ－Ｙ平面に平行となるように設置されている。上記のようにミラー１６ａが回動軸Ｌ１について回動することにより、波長変換部材１８は、レーザ光によって長手方向に走査される。 The wavelength conversion member 18 is disposed at a position where the laser light reflected by the cylindrical mirror 17 is incident. The wavelength conversion member 18 is a rectangular plate-like member, and is installed so that the incident surface is parallel to the XY plane. As described above, when the mirror 16a pivots about the pivot axis L1, the wavelength conversion member 18 is scanned in the longitudinal direction by the laser beam.
　波長変換部材１８は、入射したレーザ光の一部を、青色波長帯とは異なる波長に変換して、Ｚ軸方向に拡散させる。波長変換されなかった他のレーザ光は、波長変換部材１８によってＺ軸方向に拡散される。こうして拡散された２種類の波長の光が合成されて、所定の色の光が生成される。各波長の光は、投射光学系３に取り込まれて、目標領域に投射される。 The wavelength conversion member 18 converts a part of the incident laser light into a wavelength different from that of the blue wavelength band and diffuses it in the Z-axis direction. Other laser beams not subjected to wavelength conversion are diffused by the wavelength conversion member 18 in the Z-axis direction. Thus, the diffused light of two types of wavelengths is combined to generate light of a predetermined color. The light of each wavelength is taken into the projection optical system 3 and projected onto the target area.
　本実施の形態では、波長変換部材１８によって、レーザ光の一部が、黄色波長帯の光に変換される。波長変換後の黄色波長帯の拡散光と、波長変換されなかった青色波長帯の散乱光とが合成されて、白色の光が生成される。なお、波長変換後の波長は黄色波長帯でなくてもよく、生成される光の色は、白以外の色であってもよい。波長変換部材１８の構成は、追って、図７Ａ、図７Ｂを参照して説明する。 In the present embodiment, part of the laser light is converted into light in the yellow wavelength band by the wavelength conversion member 18. The diffused light in the yellow wavelength band after wavelength conversion and the scattered light in the blue wavelength band not subjected to wavelength conversion are synthesized to generate white light. The wavelength after wavelength conversion may not be in the yellow wavelength band, and the color of the light generated may be a color other than white. The configuration of the wavelength conversion member 18 will be described later with reference to FIGS. 7A and 7B.
　図２は、レーザ光源１１ａの構成と配置を示す斜視図である。図２には、レーザ光源１１ａに装備された発光素子１１０の構成が示されている。他のレーザ光源１１ｂ、１１ｃの発光素子の構成も図２と同様である。 FIG. 2 is a perspective view showing the configuration and arrangement of the laser light source 11a. The structure of the light emitting element 110 with which the laser light source 11a was equipped is shown by FIG. The configuration of the light emitting elements of the other laser light sources 11b and 11c is the same as that shown in FIG.
　発光素子１１０は、上下面が電極１１１、１１２となっている。これら電極１１１、１１２に電圧を印加することにより、上下のクラッド層に挟まれた活性層１１３から出射光軸１２０に沿ってレーザ光１３０が出射される。レーザ光１３０は、活性層１１３に平行な方向および活性層１１３に垂直な方向に所定の放射角で広がる。活性層１１３に垂直な方向の放射角は、活性層１１３に平行な方向の放射角よりも大きい。従って、出射されたレーザ光１３０のビーム形状は楕円である。一般に、この楕円の長軸はファスト軸と呼ばれ、楕円の短軸はスロー軸と呼ばれる。 Upper and lower surfaces of the light emitting element 110 are electrodes 111 and 112. By applying a voltage to the electrodes 111 and 112, the laser beam 130 is emitted from the active layer 113 sandwiched between the upper and lower cladding layers along the emission optical axis 120. The laser beam 130 spreads in a direction parallel to the active layer 113 and in a direction perpendicular to the active layer 113 at a predetermined radiation angle. The radiation angle in the direction perpendicular to the active layer 113 is larger than the radiation angle in the direction parallel to the active layer 113. Therefore, the beam shape of the emitted laser beam 130 is an ellipse. In general, the major axis of this ellipse is called the fast axis, and the minor axis of the ellipse is called the slow axis.
　図１Ａ、図１Ｂの構成において、レーザ光源１１ａは、ファスト軸が、シリンドリカルレンズ１４の収束方向に平行となるように配置される。残り２つのレーザ光源１１ｂ、１１ｃは、シリンドリカルレンズ１４の入射位置においてレーザ光のファスト軸がシリンドリカルレンズ１４の収束方向に平行となるように配置される。レーザ光は、スロー軸に沿った方向よりもファスト軸に沿った方向の方が収束されやすい。これは、一般的にレーザ光源１１ａ～１１ｃ（半導体レーザ）の端面におけるファスト軸方向の発光領域の幅が、スロー軸に比べて狭いからである。したがって、レーザ光源１１ａ～１１ｃを上記のように配置することにより、レーザ光源１１ａ～１１ｃから出射されたレーザ光をシリンドリカルレンズ１４によって効率的に収束させることができる。 In the configuration of FIGS. 1A and 1B, the laser light source 11 a is disposed such that the fast axis is parallel to the convergence direction of the cylindrical lens 14. The remaining two laser light sources 11 b and 11 c are arranged such that the fast axis of the laser light is parallel to the convergence direction of the cylindrical lens 14 at the incident position of the cylindrical lens 14. The laser light is more likely to converge in the direction along the fast axis than the direction along the slow axis. This is because the width of the light emitting region in the fast axis direction at the end face of the laser light sources 11a to 11c (semiconductor laser) is generally narrower than that of the slow axis. Therefore, by arranging the laser light sources 11a to 11c as described above, the laser beams emitted from the laser light sources 11a to 11c can be converged efficiently by the cylindrical lens 14.
　図３は、シリンドリカルミラー１７で反射された後のレーザ光の収束状態を模式的に示す図である。 FIG. 3 is a view schematically showing the convergence state of the laser beam after being reflected by the cylindrical mirror 17.
　図３において、シリンドリカルミラー１７から波長変換部材１８に向かう破線はレーザ光源１１ａ～１１ｃから出射されたレーザ光１３０ａ～１３０ｃを示し、各破線に付記された楕円は、これらレーザ光のビームスポットＢＳａ～ＢＳｃを示している。 In FIG. 3, broken lines from the cylindrical mirror 17 toward the wavelength conversion member 18 indicate the laser beams 130a to 130c emitted from the laser light sources 11a to 11c, and the ellipses indicated by the broken lines indicate the beam spots BSa to BSa of these laser lights. It shows BSc.
　図３に示すように、本実施の形態では、３つのビームスポットＢＳａ～ＢＳｃが、波長変換部材１８の入射面１８ａ上において、レーザ光の走査方向に並び且つ互いに離間するように、レーザ光源１１ａ～１１ｃとシリンドリカルレンズ１４（集光光学系）が調整されている。 As shown in FIG. 3, in the present embodiment, the laser beam source 11a is arranged such that the three beam spots BSa to BSc are aligned in the scanning direction of the laser beam and separated from each other on the incident surface 18a of the wavelength conversion member 18. 11c and the cylindrical lens 14 (condensing optical system) are adjusted.
　なお、ビームスポットＢＳａ～ＢＳｃのサイズは、強度ピークの１／ｅ２以上の領域によって規定される。あるいは、ビームスポットＢＳａ～ＢＳｃのサイズが、ＦＷＨＭ（full width at half maximum）で規定されてもよい。この場合、強度ピークの１／ｅ２以上の領域の一部が重なっていても、ＦＷＨＭで規定された場合のビームスポットが重なっていなければ、ビームスポットＢＳａ～ＢＳｃは互いに離間していると言える。ビームサイズの規定方法は、追って説明する変更例においても同様である。 The size of beam spots BSa to BSc is defined by an area of 1 / e 2 or more of the intensity peak. Alternatively, the sizes of the beam spots BSa to BSc may be defined by full width at half maximum (FWHM). In this case, even if a part of the region of 1 / e 2 or more of the intensity peak overlaps, it can be said that the beam spots BSa to BSc are separated from each other if the beam spots defined by FWHM do not overlap. . The method of defining the beam size is the same as in the modification described later.
　図４Ａ、図４Ｂは、それぞれ、波長変換部材１８の入射面１８ａにおいてビームスポットＢＳａ～ＢＳｃを走査方向に離間させるための構成を説明する図である。なお、便宜上、図４Ａ、図４Ｂでは、シリンドリカルレンズ１４と波長変換部材１８との間に配置された光学部材の図示が省略されている。 FIGS. 4A and 4B are diagrams for explaining the configuration for separating the beam spots BSa to BSc in the scanning direction on the incident surface 18a of the wavelength conversion member 18, respectively. For convenience, in FIGS. 4A and 4B, the illustration of the optical member disposed between the cylindrical lens 14 and the wavelength conversion member 18 is omitted.
　図４Ａに示す構成では、レーザ光１３０ａ～１３０ｃが互いに非平行な状態でシリンドリカルレンズ１４に入射するよう、レーザ光源１１ａ～１１ｃの配置または反射プリズム１３ａ、１３ｂの配置が調整されている。具体的には、レーザ光源１１ａから出射されたレーザ光１３０ａは、光軸がＺ軸に並行な状態でシリンドリカルレンズ１４に入射し、レーザ光源１１ｂ、１１ｃから出射されたレーザ光１３０ｂ、１３０ｃは、それぞれ、光軸がＺ軸に並行な状態からＸ軸正負の方向にやや傾いた状態でシリンドリカルレンズ１４に入射する。 In the configuration shown in FIG. 4A, the arrangement of the laser light sources 11a to 11c or the arrangement of the reflecting prisms 13a and 13b is adjusted so that the laser beams 130a to 130c enter the cylindrical lens 14 in a nonparallel state. Specifically, the laser beam 130a emitted from the laser light source 11a is incident on the cylindrical lens 14 with the optical axis parallel to the Z axis, and the laser beams 130b and 130c emitted from the laser light sources 11b and 11c are Respectively, the light is incident on the cylindrical lens 14 in a state in which the optical axis is slightly inclined in the positive and negative directions of the X-axis from the state in parallel with the Z-axis.
　この構成において、シリンドリカルレンズ１４には収差がなく、シリンドリカルレンズ１４は、入射した平行光を１つの焦線に収束させるように構成されている。すなわち、シリンドリカルレンズ１４は、単焦点のシリンドリカルレンズである。また、シリンドリカルレンズ１４から波長変換部材１８までの光路長と、シリンドリカルレンズ１４の焦点距離とが略同じとなるように光学系が設定されている。 In this configuration, the cylindrical lens 14 has no aberration, and the cylindrical lens 14 is configured to converge incident parallel light into one focal line. That is, the cylindrical lens 14 is a single focus cylindrical lens. Further, the optical system is set such that the optical path length from the cylindrical lens 14 to the wavelength conversion member 18 and the focal length of the cylindrical lens 14 are substantially the same.
　この構成では、図４Ａに示すように、レーザ光１３０ａ～１３０ｃが互いに非平行な状態でシリンドリカルレンズ１４に入射することにより、レーザ光１３０ａ～１３０ｃの収束位置が、波長変換部材１８の入射面１８ａ上において、走査方向（Ｘ軸方向）に互いに変位する。これにより、レーザ光１３０ａ～１３０ｃの各ビームスポットＢＳａ～ＢＳｃが、波長変換部材１８の入射面１８ａ上において、走査方向に並び且つ互いに離間するようになる。 In this configuration, as shown in FIG. 4A, when the laser beams 130a to 130c enter the cylindrical lens 14 in a non-parallel state, the convergence position of the laser beams 130a to 130c is the incident surface 18a of the wavelength conversion member 18. Above, they are mutually displaced in the scanning direction (X-axis direction). As a result, the beam spots BSa to BSc of the laser beams 130a to 130c are aligned in the scanning direction on the incident surface 18a of the wavelength conversion member 18 and separated from each other.
　なお、シリンドリカルレンズ１４が予めＸ軸方向に収差をもつ場合は、図４Ｂに示すように、レーザ光１３０ａ～１３０ｃを互いに平行な状態でシリンドリカルレンズ１４に入射させてもよい。この場合、シリンドリカルレンズ１４の収差によって、レーザ光１３０ａ～１３０ｃの各ビームスポットＢＳａ～ＢＳｃが、波長変換部材１８の入射面１８ａ上において、走査方向に並び且つ互いに離間するように位置付けられる。 When the cylindrical lens 14 has an aberration in the X-axis direction in advance, the laser beams 130a to 130c may be incident on the cylindrical lens 14 in parallel with each other as shown in FIG. 4B. In this case, due to the aberration of the cylindrical lens 14, the beam spots BSa to BSc of the laser beams 130a to 130c are positioned on the incident surface 18a of the wavelength conversion member 18 so as to be aligned in the scanning direction and separated from each other.
　図４Ａの構成において、シリンドリカルレンズ１４に対するレーザ光１３０ｂ、１３０ｃの入射方向の調整は、たとえば、図５Ａに示すように、レーザ光源１１ｂ、１１ｃの出射光軸に対する反射プリズム１３ａ、１３ｂの反射面の傾きを調整することによって行われ得る。この場合、たとえば、レーザ光源１１ｂ、１１ｃは、それぞれ、出射光軸がＸ軸に平行となるように配置され、レーザ光源１１ｂ、１１ｃの出射光軸と反射プリズム１３ａ、１３ｂの反射面とのなす角θがそれぞれ４５度よりもやや大きくなるように、反射プリズム１３ａ、１３ｂが配置される。レーザ光源１１ａは、出射光軸がＺ軸に平行となるように配置される。これにより、図４Ａに示したように、レーザ光源１１ａから出射されたレーザ光１３０ａは、Ｚ軸に平行にシリンドリカルレンズ１４に入射し、レーザ光源１１ｂ、１１ｃから出射されたレーザ光１３０ｂ、１３０ｃは、Ｚ軸に平行な状態からやや傾いた状態でシリンドリカルレンズ１４に入射する。 In the configuration of FIG. 4A, the adjustment of the incident direction of the laser beams 130b and 130c to the cylindrical lens 14 is performed, for example, on the reflection surface of the reflecting prisms 13a and 13b with respect to the emission optical axis of the laser light sources 11b and 11c, as shown in FIG. It can be done by adjusting the tilt. In this case, for example, the laser light sources 11b and 11c are disposed such that the emission light axes are parallel to the X axis, and the light emission axes of the laser light sources 11b and 11c are opposite to the reflection surfaces of the reflection prisms 13a and 13b. The reflective prisms 13a and 13b are disposed such that the angle θ is slightly larger than 45 degrees. The laser light source 11a is disposed such that the emission optical axis is parallel to the Z axis. Thus, as shown in FIG. 4A, the laser beam 130a emitted from the laser light source 11a is incident on the cylindrical lens 14 in parallel to the Z axis, and the laser beams 130b and 130c emitted from the laser light sources 11b and 11c are , And enters the cylindrical lens 14 in a state slightly inclined from the state parallel to the Z axis.
　あるいは、図４Ａの構成において、シリンドリカルレンズ１４に対するレーザ光１３０ｂ、１３０ｃの入射方向の調整は、たとえば、図５Ｂに示すように、レーザ光源１１ｂ、１１ｃの出射光軸を、Ｘ軸に平行な状態からＸ－Ｚ平面に平行な方向に傾けることによっても行われ得る。 Alternatively, in the configuration of FIG. 4A, adjustment of the incident direction of the laser beams 130b and 130c with respect to the cylindrical lens 14 is performed, for example, as shown in FIG. 5B, with the emission optical axes of the laser light sources 11b and 11c parallel to the X axis. Can also be performed by tilting in a direction parallel to the XZ plane.
　この場合、たとえば、反射プリズム１３ａ、１３ｂは、それぞれ、反射面がＸ軸に対して４５度の傾きをもつように配置され、レーザ光源１１ｂ、１１ｃの出射光軸と反射プリズム１３ａ、１３ｂの反射面とのなす角θがそれぞれ４５度よりもやや大きくなるように、レーザ光源１１ｂ、１１ｃが配置される。コリメータレンズ１２ｂ、１２ｃは、光軸がレーザ光源１１ｂ、１１ｃの出射光軸に整合するように配置される。レーザ光源１１ａは、出射光軸がＺ軸に平行となるように配置される。これにより、図４Ａに示したように、レーザ光源１１ａから出射されたレーザ光１３０ａは、Ｚ軸に平行にシリンドリカルレンズ１４に入射し、レーザ光源１１ｂ、１１ｃから出射されたレーザ光１３０ｂ、１３０ｃは、Ｚ軸に平行な状態からやや傾いた状態でシリンドリカルレンズ１４に入射する。 In this case, for example, the reflecting prisms 13a and 13b are disposed such that the reflecting surface has an inclination of 45 degrees with respect to the X axis, and the emission optical axes of the laser light sources 11b and 11c and the reflection of the reflecting prisms 13a and 13b, for example. The laser light sources 11 b and 11 c are disposed such that the angles θ with the surface are slightly larger than 45 degrees, respectively. The collimator lenses 12b and 12c are arranged such that the optical axes thereof are aligned with the emission optical axes of the laser light sources 11b and 11c. The laser light source 11a is disposed such that the emission optical axis is parallel to the Z axis. Thus, as shown in FIG. 4A, the laser beam 130a emitted from the laser light source 11a is incident on the cylindrical lens 14 in parallel to the Z axis, and the laser beams 130b and 130c emitted from the laser light sources 11b and 11c are , And enters the cylindrical lens 14 in a state slightly inclined from the state parallel to the Z axis.
　なお、レーザ光１３０ｂ、１３０ｃをシリンドリカルレンズ１４に対してＺ軸方向から傾いた方向に入射させるために、レーザ光源１１ｂ、１１ｃと反射プリズム１３ａ、１３ｂの両方の配置が調整されてもよい。 In order to cause the laser beams 130b and 130c to be incident on the cylindrical lens 14 in a direction inclined from the Z-axis direction, the arrangement of both the laser light sources 11b and 11c and the reflecting prisms 13a and 13b may be adjusted.
　また、図６Ａに示すように、シリンドリカルレンズ１４の入射面に近づくに伴って、レーザ光１３０ｂ、１３０ｃの光軸がレーザ光１３０ａの光軸に接近するように、レーザ光源１１ｂ、１１ｃが傾けられてもよい。この場合、図６Ｂに示すようにシリンドリカルレンズ１４から波長変換部材１８までの光路において、レーザ光１３０ｂ、１３０ｃが交差し、レーザ光１３０ｂは、レーザ光１３０ａに対してＸ軸負側にずれた位置に収束され、レーザ光１３０ｃは、レーザ光１３０ａに対してＸ軸正側にずれた位置に収束される。よって、この構成によっても、３つのビームスポットＢＳａ～ＢＳｃは、波長変換部材１８の入射面１８ａ上において、レーザ光の走査方向に並び且つ互いに離間するように配置され得る。 Further, as shown in FIG. 6A, the laser light sources 11b and 11c are tilted so that the optical axes of the laser beams 130b and 130c approach the optical axis of the laser beam 130a as the incident surface of the cylindrical lens 14 is approached. May be In this case, as shown in FIG. 6B, in the optical path from the cylindrical lens 14 to the wavelength conversion member 18, the laser beams 130b and 130c intersect and the laser beam 130b is shifted to the X axis negative side with respect to the laser beam 130a. The laser beam 130c is converged to a position deviated to the X axis positive side with respect to the laser beam 130a. Therefore, also according to this configuration, the three beam spots BSa to BSc can be arranged on the incident surface 18a of the wavelength conversion member 18 so as to be aligned in the scanning direction of the laser light and separated from each other.
　なお、図４Ｂの構成では、出射光軸がＸ軸に平行となるようにレーザ光源１１ｂ、１１ｃが配置され、反射面がＸ軸に対して４５度傾くように反射プリズム１３ａ、１３ｂが配置される。また、レーザ光源１１ａは、出射光軸がＺ軸に平行となるように配置される。これにより、図４Ｂに示すように、光軸が互いに平行な状態でレーザ光１３０ａ～１３０ｂがシリンドリカルレンズ１４に入射する。 In the configuration of FIG. 4B, the laser light sources 11b and 11c are disposed so that the emission optical axis is parallel to the X axis, and the reflection prisms 13a and 13b are disposed such that the reflection surface is inclined 45 degrees with respect to the X axis. Ru. The laser light source 11a is disposed such that the emission optical axis is parallel to the Z axis. As a result, as shown in FIG. 4B, the laser beams 130a to 130b enter the cylindrical lens 14 with the optical axes parallel to each other.
　本実施の形態では、上記のように、シリンドリカルレンズ１４から波長変換部材１８までの光路長が、シリンドリカルレンズ１４の焦点距離と略同じに設定されているため、波長変換部材１８の入射面１８ａにおいて、３つのレーザ光１３０ａ～１３０ｃ（ビームスポットＢＳａ～ＢＳｃ）は、レーザ光の走査方向、すなわちＸ軸方向の幅が、シリンドリカルレンズ１４の収束作用により生成される焦線の幅付近にまで圧縮される。 In the present embodiment, as described above, since the optical path length from the cylindrical lens 14 to the wavelength conversion member 18 is set to be approximately the same as the focal length of the cylindrical lens 14, in the incident surface 18 a of the wavelength conversion member 18 The width of the three laser beams 130a to 130c (beam spots BSa to BSc) in the scanning direction of the laser beam, that is, the X axis direction is compressed to about the width of the focal line generated by the converging action of the cylindrical lens 14. Ru.
　なお、シリンドリカルミラー１７から波長変換部材１８までの光路長は、シリンドリカルミラー１７の焦点距離と同一であっても相違していてもよい。たとえば、シリンドリカルミラー１７から波長変換部材１８までの光路長が、シリンドリカルミラー１７の焦点距離と同一に設定された場合、レーザ光は、シリンドリカルミラー１７の焦点距離に比例した最小幅に収束する。 The optical path length from the cylindrical mirror 17 to the wavelength conversion member 18 may be the same as or different from the focal length of the cylindrical mirror 17. For example, when the optical path length from the cylindrical mirror 17 to the wavelength conversion member 18 is set to be equal to the focal length of the cylindrical mirror 17, the laser light converges to the minimum width proportional to the focal length of the cylindrical mirror 17.
　ただし、シリンドリカルミラー１７による収束方向はレーザ光１３０ａ～１３０ｃのスロー軸に平行な方向であるため、レーザ光はファスト軸に比べて収束されにくい。その上、本構成では、スロー軸に平行な方向から所定の入射角（θ１とする）で波長変換部材１８に入射する。このようにレーザ光が波長変換部材１８に対して斜めから入射することにより、スロー軸方向におけるビームの幅が、シリンドリカルミラー１７の焦点距離に比例した最小幅の１／ｃｏｓθ１倍に広がる。このため、レーザ光は、スロー軸方向にある程度の幅をもって収束される。 However, since the convergence direction by the cylindrical mirror 17 is a direction parallel to the slow axis of the laser beams 130a to 130c, the laser beam is less likely to be converged than the fast axis. Moreover, in the present configuration, the light is incident on the wavelength conversion member 18 at a predetermined incident angle (referred to as θ1) from the direction parallel to the slow axis. As described above, when the laser light obliquely enters the wavelength conversion member 18, the width of the beam in the slow axis direction is expanded to 1 / cos θ1 times the minimum width proportional to the focal length of the cylindrical mirror 17. For this reason, laser light is converged with a certain width in the slow axis direction.
　入射面１８ａ上におけるビームスポットＢＳａ～ＢＳｃのスロー軸方向の幅をできるだけ小さくしたい場合には、シリンドリカルミラー１７の焦点距離を小さく設定する必要がある。一方、シリンドリカルミラー１７から波長変換部材１８までの光路長が、シリンドリカルミラー１７の焦点距離と異なる場合、波長変換部材１８の入射面１８ａ上におけるビームスポットＢＳａ～ＢＳｃのスロー軸方向の幅は、シリンドリカルミラー１７の焦点位置における最小幅よりも広く設計することができる。 When it is desired to make the width of the beam spots BSa to BSc in the slow axis direction as small as possible on the incident surface 18a, it is necessary to set the focal distance of the cylindrical mirror 17 small. On the other hand, when the optical path length from the cylindrical mirror 17 to the wavelength conversion member 18 is different from the focal length of the cylindrical mirror 17, the width of the beam spots BSa to BSc in the slow axis direction on the incident surface 18a of the wavelength conversion member 18 is cylindrical. The width can be designed wider than the minimum width at the focal position of the mirror 17.
　以上のように、波長変換部材１８の入射面１８ａにおいて、３つのレーザ光１３０ａ～１３０ｃのビームスポットＢＳａ～ＢＳｃは、レーザ光の走査方向に垂直な方向、すなわちＹ－Ｚ平面に平行な方向の幅を広い範囲で自由に設計できる。したがって、波長変換部材１８の入射面１８ａにおいて、３つのレーザ光１３０ａ～１３０ｃのビームスポットＢＳａ～ＢＳｃは、レーザ光の走査方向に垂直な方向に延びた線状の形状となる。上記のように、走査方向に垂直な方向におけるビームスポットの長さを広げたい場合は、シリンドリカルミラー１７から波長変換部材１８までの光路長を、シリンドリカルミラー１７の焦点距離と相違するように設定すると良い。ビームスポットの長さをさらに広げたい場合には、シリンドリカルミラーの反射面を平面、または凸面に形成することで実現できる。 As described above, on the incident surface 18a of the wavelength conversion member 18, the beam spots BSa to BSc of the three laser beams 130a to 130c are perpendicular to the scanning direction of the laser beam, that is, parallel to the YZ plane. You can design freely in a wide range. Therefore, on the incident surface 18a of the wavelength conversion member 18, the beam spots BSa to BSc of the three laser beams 130a to 130c have a linear shape extending in the direction perpendicular to the scanning direction of the laser beam. As described above, when it is desired to extend the beam spot length in the direction perpendicular to the scanning direction, the optical path length from the cylindrical mirror 17 to the wavelength conversion member 18 is set to be different from the focal length of the cylindrical mirror 17 good. When it is desired to further extend the length of the beam spot, it can be realized by forming the reflection surface of the cylindrical mirror to be a flat surface or a convex surface.
　このように、ビームスポットＢＳａ～ＢＳｃを走査方向に交差する方向に長い形状とすることにより、各ビームスポットの光密度が過度に高まることがなく、光飽和や発熱による温度消光効果により波長変換部材１８における発光効率が低下することを抑止できる。また、走査方向に交差する方向に広い幅で波長変換部材１８を走査できるため、波長変換部材１８を効率的に各レーザ光で走査できる。 As described above, by forming the beam spots BSa to BSc into a long shape in the direction intersecting the scanning direction, the light density of each beam spot is not excessively increased, and the wavelength conversion member is obtained by the temperature quenching effect due to light saturation or heat generation. It is possible to suppress the decrease of the luminous efficiency at 18. Further, since the wavelength conversion member 18 can be scanned with a wide width in the direction intersecting the scanning direction, the wavelength conversion member 18 can be efficiently scanned with each laser beam.
　図７Ａは、波長変換部材１８の構成を模式的に示す側面図である。 FIG. 7A is a side view schematically showing the configuration of the wavelength conversion member 18.
　波長変換部材１８は、基板２０１の上面に、反射膜２０２と、蛍光体層２０３とを積層した構成となっている。 The wavelength conversion member 18 has a configuration in which the reflective film 202 and the phosphor layer 203 are laminated on the upper surface of the substrate 201.
　基板２０１は、たとえば、シリコンや窒化アルミニウムセラミック、サファイヤガラスなどからなっている。反射膜２０２は、第１の反射膜２０２ａと第２の反射膜２０２ｂとが積層されて構成されている。第１の反射膜２０２ａは、たとえば、Ａｇ、Ａｇ合金、Ａｌなどの金属膜である。第２の反射膜２０２ｂは、反射とともに第１の反射膜２０２ａを酸化などから保護する機能をも有し、たとえば、ＳｉＯ２、ＺｎＯ、ＺｒＯ２、Ｎｂ２Ｏ５、Ａｌ２Ｏ３、ＴｉＯ２、ＳｉＮ、ＡｌＮなど誘電体の１つまたは複数の層からなっている。反射膜２０２は、必ずしも、第１の反射膜２０２ａおよび第２の反射膜２０２ｂから構成されなくともよく、単層または３つ以上の層が積層された構成であってもよい。 The substrate 201 is made of, for example, silicon, aluminum nitride ceramic, sapphire glass or the like. The reflective film 202 is configured by laminating a first reflective film 202a and a second reflective film 202b. The first reflective film 202a is, for example, a metal film such as Ag, an Ag alloy, or Al. The second reflective film 202b also has a function of protecting the first reflective film 202a from oxidation or the like as well as reflection. For example, SiO 2 , ZnO, ZrO 2 , Nb 2 O 5 , Al 2 O 3 , TiO 2 , One or more layers of dielectrics such as SiN, AlN. The reflective film 202 does not necessarily have to be composed of the first reflective film 202a and the second reflective film 202b, and may have a single layer or a structure in which three or more layers are stacked.
　蛍光体層２０３は、蛍光体粒子２０３ａをバインダ２０３ｂで固定することにより形成される。蛍光体粒子２０３ａは、レーザ光源１１ａ～１１ｃから出射された青色波長帯のレーザ光が照射されることによって黄色波長帯の蛍光を発する。蛍光体粒子２０３ａとして、たとえば、平均粒子径が１μｍ～３０μｍの（ＹｎＧｄ１－ｎ）３（ＡｌｍＧａ１－ｍ）５Ｏ１２：Ｃｅ（０．５≦ｎ≦１、０．５≦ｍ≦１）が用いられる。また、バインダ２０３ｂとして、ポリメチルシルセスキオキサンなどのシルセスキオキサンを主に含む透明材料が用いられる。 The phosphor layer 203 is formed by fixing the phosphor particles 203a with a binder 203b. The phosphor particles 203a emit fluorescence in the yellow wavelength band by being irradiated with laser light in the blue wavelength band emitted from the laser light sources 11a to 11c. As the phosphor particles 203a, for example, (Y n G d 1-n ) 3 (Al m Ga 1-m ) 5 O 12 : Ce (0.5 ≦ n ≦ 1, 0.5) having an average particle diameter of 1 μm to 30 μm. ≦ m ≦ 1) is used. In addition, as the binder 203b, a transparent material mainly containing silsesquioxane such as polymethyl silsesquioxane is used.
　さらに、蛍光体層２０３の内部に、ボイド２０３ｃを設けることが好ましい。これにより、内部に侵入したレーザ光をより効率的に散乱させて、光源装置２から取り出すことができる。また、第２の反射膜２０２ｂ付近にボイド２０３ｃが存在することにより、第２の反射膜２０２ｂの表面によるエネルギーロスを低減しつつ、効果的にレーザ光と蛍光を散乱させることができる。蛍光体層２０３には、さらに、強度および耐熱性を高めるためのフィラー２０３ｄが含まれる。 Furthermore, it is preferable to provide a void 203 c inside the phosphor layer 203. As a result, the laser light that has entered inside can be scattered more efficiently and can be extracted from the light source device 2. Further, by the presence of the void 203c in the vicinity of the second reflective film 202b, it is possible to effectively scatter the laser light and the fluorescence while reducing the energy loss due to the surface of the second reflective film 202b. The phosphor layer 203 further contains a filler 203 d for enhancing the strength and the heat resistance.
　レーザ光源１１ａ～１１ｃから出射されたレーザ光は、図７Ａに示す励起領域Ｒ１に照射され、蛍光体層２０３の表面または内部で、散乱、吸収される。このとき、レーザ光の一部は、蛍光体粒子２０３ａにより黄色波長帯の光に変換されて、蛍光体層２０３から放射される。また、レーザ光の他の一部は、黄色波長帯の光に変換されずに散乱されて青色波長帯の光のまま蛍光体層２０３から放射される。このとき、各波長帯の光は、蛍光体層２０３内を伝搬しながら散乱されるため、励起領域Ｒ１よりもやや広い発光領域Ｒ２から放射される。 The laser light emitted from the laser light sources 11a to 11c is irradiated to the excitation region R1 shown in FIG. 7A, and is scattered and absorbed on the surface or inside of the phosphor layer 203. At this time, a part of the laser light is converted into light of a yellow wavelength band by the phosphor particles 203 a and emitted from the phosphor layer 203. In addition, the other part of the laser light is scattered without being converted to light in the yellow wavelength band, and is emitted from the phosphor layer 203 as light in the blue wavelength band. At this time, the light of each wavelength band is scattered while propagating in the phosphor layer 203, and is thus emitted from the light emitting region R2 slightly wider than the excitation region R1.
　図７Ｂは、波長変換部材１８の構成を模式的に示す平面図である。 FIG. 7B is a plan view schematically showing the configuration of the wavelength conversion member 18.
　波長変換部材１８は、平面視において、Ｘ軸方向に長い長方形の形状を有する。波長変換部材１８は、光偏向器１６のミラー１６ａが回動されることにより、レーザ光でＸ軸方向に走査される。ミラー１６ａは、Ｘ－Ｚ平面に平行な中立位置から両方向に所定の角度範囲で回動される。図７Ｂにおいて、ＢＳは、上記のようにレーザ光源１１ａ～１１ｃから出射された各レーザ光のビームスポットを示している。３つのビームスポットＢＳは、波長変換部材１８の入射面１８ａを、幅Ｗ１において往復移動する。 The wavelength conversion member 18 has a rectangular shape elongated in the X-axis direction in plan view. The wavelength conversion member 18 is scanned with laser light in the X-axis direction by rotating the mirror 16 a of the light deflector 16. The mirror 16a is rotated in a predetermined angular range in both directions from a neutral position parallel to the XZ plane. In FIG. 7B, BS indicates the beam spot of each laser beam emitted from the laser light sources 11a to 11c as described above. The three beam spots BS reciprocate on the incident surface 18a of the wavelength conversion member 18 in the width W1.
　なお、図７Ｂには、ビームスポットＢＳの往復移動が直線の矢印で示されているが、レーザ光が斜め方向から波長変換部材１８に入射するため、実際のビームスポットＢＳの移動軌跡は、Ｘ軸方向の中央位置に対してＸ軸正負方向の両端がＹ軸負方向に変位した、やや湾曲した軌跡となる。 In FIG. 7B, the reciprocating movement of the beam spot BS is indicated by a straight arrow, but since the laser beam is incident on the wavelength conversion member 18 from an oblique direction, the movement locus of the actual beam spot BS is X It becomes a slightly curved locus in which both ends in the positive and negative directions of the X axis are displaced in the negative direction of the Y axis with respect to the central position in the axial direction.
　入射面１８ａ上におけるビームスポットＢＳの領域は、図７Ａの励起領域Ｒ１に対応する。波長変換部材１８の入射面１８ａをビームスポットＢＳが移動する間に、ビームスポットＢＳの領域よりもやや広い発光領域Ｒ２から青色波長帯の拡散光と黄色波長帯の拡散光がＺ軸正方向に放射される。 The area of the beam spot BS on the incident surface 18a corresponds to the excitation area R1 of FIG. 7A. While the beam spot BS moves on the incident surface 18a of the wavelength conversion member 18, diffused light of the blue wavelength band and diffused light of the yellow wavelength band from the light emission area R2 slightly wider than the area of the beam spot BS in the positive Z-axis direction It is emitted.
　こうして放射された２つの波長帯の光が、図１Ａ、図１Ｂに示した投射光学系３により取り込まれ、目標領域に投射される。これにより、青色波長帯の光と黄色波長帯の光が合成された白色の光が、投光装置１から目標領域に投射される。 The two wavelength bands of light thus emitted are taken in by the projection optical system 3 shown in FIGS. 1A and 1B and projected onto the target area. Thereby, white light in which the light of the blue wavelength band and the light of the yellow wavelength band are combined is projected from the light projecting device 1 to the target area.
　さらに、本実施の形態では、波長変換部材１８の入射面１８ａで正反射されたレーザ光（以下、「正反射光」という）を受光する位置に、位置検出器１９が設置されている。位置検出器１９は、光偏向器１６のミラー１６ａが中立位置にあるときに、正反射光が位置検出器１９の入射面のＸ軸方向の中央位置に入射するように配置されている。 Further, in the present embodiment, the position detector 19 is installed at a position where the laser light (hereinafter, referred to as “regular reflection light”) specularly reflected by the incident surface 18 a of the wavelength conversion member 18 is received. The position detector 19 is disposed such that the specularly reflected light is incident on the central position in the X-axis direction of the incident surface of the position detector 19 when the mirror 16 a of the light deflector 16 is in the neutral position.
　位置検出器１９は、波長変換部材１８の入射面上の走査範囲に対して正反射光を受光するとともに、受光位置および受光光量に応じた検出信号を出力する。位置検出器１９は、波長変換部材１８の入射面上の走査範囲に対して正反射光を受光可能なように、Ｘ軸方向に長い受光面を有する。 The position detector 19 receives specularly reflected light with respect to the scanning range on the incident surface of the wavelength conversion member 18, and outputs a detection signal according to the light receiving position and the received light amount. The position detector 19 has a long light receiving surface in the X-axis direction so as to be able to receive specularly reflected light with respect to the scanning range on the incident surface of the wavelength conversion member 18.
　位置検出器１９は、たとえば、ＰＳＤ（Position SensitiveDetector）からなっている。この他、位置検出器１９は、フォトディテクタがアレイ上に配置された構成であってもよく、ＣＣＤ（Charge Coupled Device）等の撮像素子であってもよい。 The position detector 19 is made of, for example, a PSD (Position Sensitive Detector). Besides, the position detector 19 may have a configuration in which photodetectors are arranged on an array, or may be an imaging device such as a CCD (Charge Coupled Device).
　図８Ａは、位置検出器１９の構成および位置検出信号の生成方法を説明するための図である。また、図８Ｂは、位置検出器１９の構成を模式的に示す断面図である。 FIG. 8A is a diagram for describing a configuration of the position detector 19 and a method of generating a position detection signal. 8B is a cross-sectional view schematically showing the configuration of the position detector 19. As shown in FIG.
　図８Ｂに示すように、位置検出器１９は、Ｎ型高抵抗シリコン基板の表面に、受光面と抵抗層を兼ねたＰ型抵抗層を形成した構造となっている。表面側の抵抗層には、横方向における光電流を出力するための電極ＥＸ１、ＥＸ２が形成され、裏面側の抵抗層には共通電極ＥＸ３が形成されている。電極ＥＸ１、ＥＸ２に流入した光電流は、端子１９ｂ、１９ｃから出力される。 As shown in FIG. 8B, the position detector 19 has a structure in which a P-type resistive layer which also serves as a light receiving surface and a resistive layer is formed on the surface of an N-type high-resistance silicon substrate. Electrodes EX1 and EX2 for outputting a photocurrent in the lateral direction are formed in the resistance layer on the front side, and a common electrode EX3 is formed in the resistance layer on the back side. The photocurrents flowing into the electrodes EX1 and EX2 are output from the terminals 19b and 19c.
　次に、位置検出器１９における受光位置の算出方法について説明する。 Next, a method of calculating the light receiving position in the position detector 19 will be described.
　位置検出器１９の受光面１９ａに正反射光（正反射光スポットＲＢ）が照射されると、正反射光（正反射光スポットＲＢ）の受光位置に光量に比例した電荷が発生する。この電荷は光電流として抵抗層に到達し、各電極ＥＸ１、ＥＸ２までの距離に逆比例して分割されて、電極ＥＸ１、ＥＸ２に接続された端子１９ｂ、１９ｃから出力される。 When the light receiving surface 19a of the position detector 19 is irradiated with the regular reflection light (the regular reflection light spot RB), a charge proportional to the light quantity is generated at the light reception position of the regular reflection light (the regular reflection light spot RB). This charge reaches the resistance layer as a photocurrent, is divided in inverse proportion to the distance to each of the electrodes EX1 and EX2, and is output from the terminals 19b and 19c connected to the electrodes EX1 and EX2.
　ここで、位置検出器１９において、端子１９ｂ、１９ｃから出力される光電流は、正反射光の受光位置から電極ＥＸ１、ＥＸ２までの距離Ｌｘ１、Ｌｘ２に逆比例して分割された大きさを有する。よって、端子１９ｂ、１９ｃから出力される光電流の電流値をもとに、受光面上におけるＸ軸方向の正反射光の受光位置を検出することができる。 Here, in the position detector 19, the photocurrents output from the terminals 19b and 19c have sizes divided in inverse proportion to the distances Lx1 and Lx2 from the light reception position of the regular reflection light to the electrodes EX1 and EX2. . Therefore, the light receiving position of the specularly reflected light in the X-axis direction on the light receiving surface can be detected based on the current value of the photocurrent output from the terminals 19 b and 19 c.
　たとえば、位置検出器１９について、図８Ａの位置に正反射光スポットＲＢが照射されたとする。この場合、受光面１９ａの横方向のセンター位置Ｌｍｘを基準とする受光位置の横方向の座標Ｐｘは、電極ＥＸ１、ＥＸ２から出力される光電流の電流値をそれぞれＩｘ１、Ｉｘ２、横方向における電極ＥＸ１、ＥＸ２間の距離をＬｘとすると、以下の式によって算出される。 For example, with respect to the position detector 19, it is assumed that the specularly reflected light spot RB is irradiated at the position shown in FIG. 8A. In this case, the lateral coordinates Px of the light receiving position relative to the lateral center position Lmx of the light receiving surface 19a are Ix1 and Ix2, respectively, the current values of the photocurrents output from the electrodes EX1 and EX2. Assuming that the distance between EX1 and EX2 is Lx, it is calculated by the following equation.
Figure JPOXMLDOC01-appb-M000001
Figure JPOXMLDOC01-appb-M000001
　こうして、位置検出器１９の端子１９ｂ、１９ｃから出力された光電流の電流値Ｉｘ１、Ｉｘ２をもとに、式（１）の演算を行うことにより、受光面１９ａ上における正反射光スポットＲＢの位置を示す位置検出信号（座標Ｐｘ）を算出できる。また、光電流の電流値Ｉｘ１、Ｉｘ２を互いに加算することにより、正反射光の受光光量を取得できる。 Thus, based on the current values Ix1 and Ix2 of the photocurrents output from the terminals 19b and 19c of the position detector 19, the formula (1) is calculated to obtain the specularly reflected light spot RB on the light receiving surface 19a. A position detection signal (coordinates Px) indicating the position can be calculated. Further, by adding the current values Ix1 and Ix2 of the photocurrent to each other, it is possible to acquire the received light amount of the specularly reflected light.
　図９Ａは、波長変換部材１８の入射面１８ａにおけるビームスポットＢＳ１～ＢＳ３の移動を模式的に示す図である。図９Ｂは、図９ＡのようにビームスポットＢＳ１～ＢＳ３が移動した場合の位置検出器１９の受光面１９ａ上における正反射光スポットＲＢ１～ＲＢ３の移動を模式的に示す図である。図９Ａにおいて、Ｗｍは、入射面１８ａのＸ軸方向のセンター位置である。 FIG. 9A is a view schematically showing the movement of the beam spots BS1 to BS3 on the incident surface 18a of the wavelength conversion member 18. As shown in FIG. FIG. 9B is a view schematically showing the movement of the specularly reflected light spots RB1 to RB3 on the light receiving surface 19a of the position detector 19 when the beam spots BS1 to BS3 move as shown in FIG. 9A. In FIG. 9A, Wm is the center position in the X-axis direction of the incident surface 18a.
　なお、ここでは、波長変換部材１８の入射面１８ａを走査する３つのビームスポットが、Ｘ軸正側から順番に、ビームスポットＢＳ１、ＢＳ２、ＢＳ３と称されている。ビームスポットＢＳ１、ＢＳ２、ＢＳ３は、それぞれ、図４Ａ、図４Ｂに示したビームスポットＢＳｂ、ＢＳａ、ＢＳｃに対応する。また、正反射光スポットＲＢ１、ＲＢ２、ＲＢ３は、それぞれ、ビームスポットＢＳ１、ＢＳ２、ＢＳ３のレーザ光が波長変換部材１８の入射面１８ａで正反射した正反射光のビームスポットである。 Here, the three beam spots that scan the incident surface 18a of the wavelength conversion member 18 are referred to as beam spots BS1, BS2, and BS3 in order from the X-axis positive side. The beam spots BS1, BS2, and BS3 correspond to the beam spots BSb, BSa, and BSc illustrated in FIGS. 4A and 4B, respectively. The specularly reflected light spots RB1, RB2, and RB3 are beam spots of specularly reflected light in which the laser beams of the beam spots BS1, BS2, and BS3 are specularly reflected on the incident surface 18a of the wavelength conversion member 18, respectively.
　波長変換部材１８の入射面１８ａ上をビームスポットＢＳ１～ＢＳ３が図９Ａに示すように移動すると、これに伴い、正反射光スポットＲＢ１～ＲＢ３は、位置検出器１９の受光面１９ａ上を図９Ｂのように移動する。ここで、正反射光スポットＲＢ１～ＲＢ３の横方向の移動位置は、入射面１８ａ上におけるビームスポットＢＳ１～ＢＳ３のＸ軸方向の各移動位置に１対１で対応する。また、ビームスポットＢＳ１～ＢＳ３が幅Ｗ１の範囲をＸ軸方向に移動すると、正反射光スポットＲＢ１～ＲＢ３は、位置検出器１９の受光面１９ａを幅Ｌｗの範囲で横方向に移動する。 When the beam spots BS1 to BS3 move on the incident surface 18a of the wavelength conversion member 18 as shown in FIG. 9A, the specularly reflected light spots RB1 to RB3 move along the light receiving surface 19a of the position detector 19 as shown in FIG. Move like. Here, the lateral movement positions of the specularly reflected light spots RB1 to RB3 correspond one-to-one to the movement positions of the beam spots BS1 to BS3 in the X-axis direction on the incident surface 18a. When the beam spots BS1 to BS3 move in the X axis direction in the range of the width W1, the specularly reflected light spots RB1 to RB3 move the light receiving surface 19a of the position detector 19 in the lateral direction in the range of the width Lw.
　各正反射光の受光位置および受光光量の検出においては、後述のように、検出対象の正反射光スポットに対応するレーザ光源のみが点灯され、その他のレーザ光源は消灯される。たとえば、図９Ｂの左側の正反射光スポットＲＢ３から順番に、各正反射スポットのレーザ光源が点灯される。そして、各レーザ光源の点灯時に位置検出器１９から出力される電流値Ｉｘ１、Ｉｘ２に基づいて、上記式（１）の演算が行われ、各正反射光スポットの受光位置が検出される。さらに、電流値Ｉｘ１、Ｉｘ２が互いに加算されて、各正反射光スポットの受光光量が検出される。各正反射光スポットの受光位置および受光光量の検出方法については、追って、図１１Ａ～図１１Ｃを参照して説明する。 In the detection of the light receiving position and the light receiving amount of each specularly reflected light, as described later, only the laser light source corresponding to the specularly reflected light spot to be detected is turned on, and the other laser light sources are turned off. For example, the laser light sources of the regular reflection spots are turned on sequentially from the regular reflection light spot RB3 on the left side of FIG. 9B. Then, based on the current values Ix1 and Ix2 output from the position detector 19 at the time of lighting each laser light source, the calculation of the equation (1) is performed, and the light receiving position of each specularly reflected light spot is detected. Further, the current values Ix1 and Ix2 are added to each other to detect the amount of light received by each regular reflection light spot. The light receiving position of each specularly reflected light spot and the method of detecting the amount of light received will be described later with reference to FIGS. 11A to 11C.
　＜回路構成＞
　図１０は、実施の形態に係る光源装置２の主たる回路構成を示す回路ブロック図である。 <Circuit configuration>
FIG. 10 is a circuit block diagram showing a main circuit configuration of the light source device 2 according to the embodiment.
　図１０に示すように、光源装置２は、回路部の構成として、コントローラ３０１と、レーザ駆動回路３０２ａ～３０２ｃと、ミラー駆動回路３０３と、位置検出回路３０４と、インタフェース３０５と、を備えている。 As shown in FIG. 10, the light source device 2 includes a controller 301, laser drive circuits 302a to 302c, a mirror drive circuit 303, a position detection circuit 304, and an interface 305 as the configuration of the circuit section. .
　コントローラ３０１は、ＣＰＵ（Central Processing Unit）等の演算処理回路と、メモリとを備え、所定の制御プログラムに従って各部を制御する。レーザ駆動回路３０２ａ～３０２ｃは、それぞれ、コントローラ３０１からの制御信号に従って、レーザ光源１１ａ～１１ｃを駆動する。ミラー駆動回路３０３は、コントローラ３０１からの制御信号に従って、光偏向器１６のミラー１６ａを駆動する。位置検出回路３０４は、位置検出器１９から出力された電流値Ｉｘ１、Ｉｘ２に基づいて上記式（１）の演算により位置検出信号を算出し、また、電流値Ｉｘ１、Ｉｘ２を互いに加算して光量信号を算出する。位置検出回路３０４は、算出した位置検出信号および光量信号をコントローラ３０１に出力する。インタフェース３０５は、たとえば、車両側の制御回路等、外部制御回路との間でコントローラ３０１が信号の送受信を行うための入出力回路である。 The controller 301 includes an arithmetic processing circuit such as a CPU (Central Processing Unit) and a memory, and controls each part according to a predetermined control program. The laser drive circuits 302a to 302c drive the laser light sources 11a to 11c according to the control signal from the controller 301, respectively. The mirror drive circuit 303 drives the mirror 16 a of the light deflector 16 in accordance with the control signal from the controller 301. The position detection circuit 304 calculates the position detection signal by the calculation of the equation (1) based on the current values Ix1 and Ix2 output from the position detector 19, and adds the current values Ix1 and Ix2 to each other to calculate the light amount. Calculate the signal. The position detection circuit 304 outputs the calculated position detection signal and light amount signal to the controller 301. The interface 305 is, for example, an input / output circuit for the controller 301 to transmit / receive a signal to / from an external control circuit such as a control circuit on the vehicle side.
　コントローラ３０１は、投射光学系３から目標領域に照射される光が目標領域において所定の配光パターンとなるように、レーザ光源１１ａ～１１ｃおよび光偏向器１６を制御する。すなわち、コントローラ３０１は、３つのビームスポットＢＳ１～ＢＳ３の走査範囲が図９Ａに示した幅Ｗ１となるように光偏向器１６を制御しながら、目標領域における配光パターンが所定の配光パターンとなるように、３つのビームスポットＢＳ１～ＢＳ３に対応するレーザ光源１１ａ～１１ｃに対し、点灯／消灯の制御を行う。 The controller 301 controls the laser light sources 11a to 11c and the light deflector 16 so that the light irradiated to the target area from the projection optical system 3 has a predetermined light distribution pattern in the target area. That is, the controller 301 controls the light deflector 16 so that the scanning range of the three beam spots BS1 to BS3 has the width W1 shown in FIG. 9A, and the light distribution pattern in the target area is a predetermined light distribution pattern As described above, the control of turning on / off the laser light sources 11a to 11c corresponding to the three beam spots BS1 to BS3 is performed.
　本実施の形態では、図９Ａに示したように、３つのビームスポットＢＳ１～ＢＳ３が走査方向に並びかつ互いに離間するように配置される。ここで、ビームスポットＢＳ１～ＢＳ３の光量や、ビームスポットＢＳ１～ＢＳ３の位置および間隔は、経時変化や、光源装置２に伝わる振動または衝撃等によって変動し得る。このため、コントローラ３０１は、上記の制御を適切に行うために、ビームスポットの光量低下やビームスポットの位置および間隔の変動を、ビームスポットごとに随時検出しておく必要がある。換言すると、コントローラ３０１は、各正反射光スポットの受光光量、受光位置および正反射光間の間隔を随時検出して制御を行う必要がある。 In the present embodiment, as shown in FIG. 9A, the three beam spots BS1 to BS3 are arranged in line in the scanning direction and are separated from each other. Here, the amounts of light of the beam spots BS1 to BS3 and the positions and intervals of the beam spots BS1 to BS3 may change due to changes over time, vibrations or shocks transmitted to the light source device 2, and the like. Therefore, in order to appropriately perform the above control, the controller 301 needs to detect the decrease in the light amount of the beam spot and the fluctuation of the position and the interval of the beam spot for each beam spot as needed. In other words, it is necessary for the controller 301 to perform control by detecting the received light amount of each regular reflection light spot, the light receiving position, and the interval between the regular reflection light as needed.
　以下、正反射光スポットＲＢ１～ＲＢ３の受光位置および受光光量の検出方法と、その検出結果を用いた各レーザ光源の制御方法について説明する。 The method of detecting the light receiving positions and the amount of light received of the specularly reflected light spots RB1 to RB3 and the control method of each laser light source using the detection results will be described below.
　図１１Ａ、図１１Ｂは、それぞれ、各正反射光スポットの受光位置および受光光量を取得するための制御を示すフローチャートである。 FIG. 11A and FIG. 11B are flowcharts showing control for acquiring the light receiving position and the received light amount of each regular reflection light spot, respectively.
　図１１Ａに示すように、コントローラ３０１は、光源装置２が起動されると（Ｓ１１）、正反射光スポットＲＢ１～ＲＢ３の受光位置および受光光量を検出するためのチェック走査を行う（Ｓ１２）。そして、コントローラ３０１は、このチェック走査の際に位置検出回路３０４から入力された位置検出信号および光量信号に基づいて、正反射光スポットＲＢ１～ＲＢ３の受光位置および受光光量をそれぞれ取得する（Ｓ１３）。 As shown in FIG. 11A, when the light source device 2 is activated (S11), the controller 301 performs check scanning for detecting the light reception positions and the light reception amounts of the regular reflection light spots RB1 to RB3 (S12). Then, the controller 301 obtains the light reception positions and the light reception amounts of the regular reflection light spots RB1 to RB3 based on the position detection signal and the light amount signal input from the position detection circuit 304 at the time of the check scanning (S13) .
　また、図１１Ｂに示すように、コントローラ３０１は、光源装置２が起動された後の動作中において、所定のチェックタイミングが到来すると（Ｓ２１）、正反射光スポットＲＢ１～ＲＢ３の受光位置および受光光量を検出するためのチェック走査を行う（Ｓ２２）。そして、コントローラ３０１は、このチェック走査の際に位置検出回路３０４から入力された位置検出信号および光量信号に基づいて、正反射光スポットＲＢ１～ＲＢ３の受光位置および受光光量をそれぞれ取得する（Ｓ２３）。ここで、ステップＳ２１のチェックタイミングは、たとえば、光源装置２の起動から一定周期（たとえば数秒）に設定される。 Further, as shown in FIG. 11B, when a predetermined check timing comes during operation after the light source device 2 is activated (S21), the controller 301 receives the light reception positions and the light reception amounts of the regular reflection light spots RB1 to RB3. A check scan is performed to detect (S22). Then, the controller 301 obtains the light reception positions and the light reception amounts of the regular reflection light spots RB1 to RB3 based on the position detection signal and the light amount signal input from the position detection circuit 304 at the time of this check scan (S23) . Here, the check timing in step S21 is set to, for example, a fixed cycle (for example, several seconds) from the activation of the light source device 2.
　図１１Ｃは、チェック走査時（図１１Ａ、図１１ＢのＳ１２、Ｓ２２）における位置検出器１９の受光面１９ａ上の正反射光スポットＲＢ１～ＲＢ３の走査状態を模式的に示す図である。図１１Ｃにおいて、黒で塗り潰されたスポットは、正反射光スポットが点灯状態にあることを示し、破線かつ白抜きのスポットは、正反射光スポットが消灯状態にあることを示している。 FIG. 11C is a diagram schematically showing the scanning state of the specularly reflected light spots RB1 to RB3 on the light receiving surface 19a of the position detector 19 at the time of check scanning (S12 and S22 in FIGS. 11A and 11B). In FIG. 11C, the spots filled in black indicate that the specularly reflected light spot is in the lighted state, and the broken and white spots indicate that the specularly reflected light spot is in the extinguished state.
　図１１Ｃに示すように、チェック走査時において、３つの正反射光スポットＲＢ１～ＲＢ３は、１つずつ順番に点灯状態に設定される。すなわち、チェック走査時において、コントローラ３０１は、正反射光スポットＲＢ１～ＲＢ３が一定速度で受光面１９ａを移動するように、光偏向器１６を制御する。そして、コントローラ３０１は、正反射光スポットＲＢ１～ＲＢ３が所定の周期で順番に点灯されるように、レーザ光源１１ａ～１１ｃを制御する。 As shown in FIG. 11C, at the time of check scanning, the three specularly reflected light spots RB1 to RB3 are set to light in order one by one. That is, at the time of check scanning, the controller 301 controls the light deflector 16 so that the regular reflection light spots RB1 to RB3 move the light receiving surface 19a at a constant speed. Then, the controller 301 controls the laser light sources 11a to 11c so that the specularly reflected light spots RB1 to RB3 are sequentially turned on at a predetermined cycle.
　たとえば、コントローラ３０１は、まず、図１１Ｃの上段に示すように、正反射光スポットＲＢ３に対応するレーザ光源１１ｃのみをパルス状に駆動して、正反射光スポットＲＢ３のみを点灯させる。次に、コントローラ３０１は、図１１Ｃの中段に示すように、レーザ光源１１ｃの駆動から所定の時間間隔で、正反射光スポットＲＢ２に対応するレーザ光源１１ａのみをパルス状に駆動して、正反射光スポットＲＢ２のみを点灯させる。さらに、コントローラ３０１は、図１１Ｃの下段に示すように、レーザ光源１１ａの駆動から所定の時間間隔で、正反射光スポットＲＢ１に対応するレーザ光源１１ａのみをパルス状に駆動して、正反射光スポットＲＢ１のみを点灯させる。 For example, first, as shown in the upper part of FIG. 11C, the controller 301 drives only the laser light source 11c corresponding to the regular reflection light spot RB3 in a pulse shape, and turns on only the regular reflection light spot RB3. Next, as shown in the middle part of FIG. 11C, the controller 301 drives only the laser light source 11a corresponding to the regular reflection light spot RB2 in a pulse shape at a predetermined time interval from the driving of the laser light source 11c. Only the light spot RB2 is turned on. Furthermore, as shown in the lower part of FIG. 11C, the controller 301 drives only the laser light source 11a corresponding to the regular reflection light spot RB1 in a pulse shape at a predetermined time interval from the driving of the laser light source 11a. Only the spot RB1 is turned on.
　なお、チェック走査の際、各レーザ光源は、同一レベルかつ同一時間幅のパルス信号によって駆動される。したがって、各レーザ光源の出力特性が互いに同じであれば、各正反射光スポットの照射時における光量信号の値は、互いに同一となる。 At the time of check scanning, each laser light source is driven by pulse signals of the same level and the same time width. Therefore, if the output characteristics of the respective laser light sources are the same, the values of the light quantity signal at the time of the irradiation of the respective specularly reflected light spots become the same.
　こうしてチェック走査を実行している間に、コントローラ３０１は、図１１Ａ、図１１ＢのステップＳ１３、Ｓ２３において、各正反射光スポットの点灯時に位置検出回路３０４から正反射光スポットの位置検出信号および光量信号を取得し、正反射光スポットごとに、位置検出器１９の受光面１９ａ上の受光位置および受光光量を取得する。さらに、コントローラ３０１は、正反射光スポットＲＢ１～ＲＢ３について取得した受光位置と、光偏向器１６による走査速度および正反射光スポットＲＢ１～ＲＢ３を点灯させる時間間隔とに基づいて、正反射光スポットＲＢ１～ＲＢ３間の間隔を算出する。 Thus, while executing the check scan, the controller 301 controls the position detection signal and the light amount of the specularly reflected light spot from the position detection circuit 304 when lighting each specularly reflected light spot in steps S13 and S23 of FIGS. 11A and 11B. A signal is acquired, and the light receiving position and the light receiving amount on the light receiving surface 19a of the position detector 19 are obtained for each specularly reflected light spot. Furthermore, the controller 301 determines the specularly reflected light spots RB1 based on the light receiving positions acquired for the specularly reflected light spots RB1 to RB3, and the scanning speed by the light deflector 16 and the time interval for lighting the specularly reflected light spots RB1 to RB3. Calculate the interval between ... and RB3.
　発光の実動作時において、コントローラ３０１は、上記の処理により取得した各正反射光スポットの受光位置および反射光スポット間の間隔を用いて、波長変換部材１８からの配光パターンが所定のパターンとなるように、レーザ光源１１ａ～１１ｃを制御する。このとき、同時に、コントローラ３０１は、各正反射光スポットの受光光量に基づいて、所定レベルの出力でレーザ光が出射されるように、レーザ光源１１ａ～１１ｃを制御する。コントローラ３０１は、チェック走査のタイミングが到来するごとに、各正反射光スポットの受光光量、受光位置および間隔を更新して、レーザ光源１１ａ～１１ｃに対する制御を実行する。 At the time of actual operation of light emission, the controller 301 determines that the light distribution pattern from the wavelength conversion member 18 has a predetermined pattern using the light receiving position of each regular reflection light spot acquired by the above processing and the interval between the reflection light spots. The laser light sources 11a to 11c are controlled so that At this time, at the same time, the controller 301 controls the laser light sources 11a to 11c so that the laser light is emitted with the output of the predetermined level based on the light reception amounts of the regular reflection light spots. The controller 301 executes control on the laser light sources 11a to 11c by updating the light reception amount, the light reception position, and the interval of each regular reflection light spot each time the timing of the check scan comes.
　図１２Ｂは、レーザ光源１１ａ～１１ｃの出力制御の一例を示すタイミングチャートである。図１２Ｂの最上段には、光偏向器１６のミラー１６ａを駆動するための駆動信号の波形が示され、図１２Ｂの上から２～４段目には、正反射光スポットＲＢ１～ＲＢ３にそれぞれ対応するレーザ光源を駆動するための制御信号の波形が示されている。すなわち、図１２Ｂの上から２段目の波形はレーザ光源１１ｂの駆動信号の波形であり、図１２Ｂの上から３段目の波形はレーザ光源１１ａの駆動信号の波形であり、図１２Ｂの最下段の波形はレーザ光源１１ｃの駆動信号の波形である。 FIG. 12B is a timing chart showing an example of output control of the laser light sources 11a to 11c. The top row of FIG. 12B shows the waveform of the drive signal for driving the mirror 16a of the light deflector 16. The second to fourth rows from the top of FIG. 12B show the specularly reflected light spots RB1 to RB3, respectively. The waveforms of control signals for driving the corresponding laser light sources are shown. 12B is the waveform of the drive signal of the laser light source 11b, and the waveform of the third stage from the top of FIG. 12B is the waveform of the drive signal of the laser light source 11a. The lower waveform is the waveform of the drive signal of the laser light source 11c.
　また、図１２Ａには、図１２Ｂの出力制御において用いられる各パラメータが示されている。ここでは、右方向の走査が「走査１」に設定され、左方向の走査が「走査２」に設定されている。破線の矢印は、正反射光スポットの走査方向と走査範囲を示している。走査速度は一定である。正反射光スポットＲＢ１、ＲＢ２の間隔Ｘ１および正反射光スポットＲＢ２、ＲＢ３の間隔Ｘ２は、図１１Ａ～図１１Ｃに示した処理により逐次更新される。また、図１１Ａ～図１１Ｃに示した処理により、所定レベル且つ所定時間幅のパルス信号で各レーザ光源が駆動されたときの正反射光スポットＲＢ１～ＲＢ３の受光光量が検出され、逐次更新される。 Further, FIG. 12A shows respective parameters used in the output control of FIG. 12B. Here, the scan in the right direction is set to “scan 1”, and the scan in the left direction is set to “scan 2”. The dashed arrows indicate the scanning direction and scanning range of the specularly reflected light spot. The scanning speed is constant. The interval X1 between the regular reflection light spots RB1 and RB2 and the interval X2 between the regular reflection light spots RB2 and RB3 are successively updated by the processing shown in FIGS. 11A to 11C. Further, by the processing shown in FIGS. 11A to 11C, the light reception amounts of the specularly reflected light spots RB1 to RB3 when the respective laser light sources are driven by pulse signals of a predetermined level and a predetermined time width are detected and sequentially updated. .
　図１２Ｂの制御では、図１２Ａに示すように、走査範囲の両端に発光を停止させる非発光区間Ｘｏｆｆが設定されている。換言すると、この制御では、図９Ａに示した幅Ｗ１の両端に、非発光区間Ｘｏｆｆに対応する非発光区間が設定されている。また、この制御では、図９Ａに示した幅Ｗ１の中央において発光光量が高まるように、各レーザ光源の出力が制御される。 In the control of FIG. 12B, as shown in FIG. 12A, a non-light emission interval Xoff for stopping light emission is set at both ends of the scanning range. In other words, in this control, non-light emitting sections corresponding to the non-light emitting section X off are set at both ends of the width W1 shown in FIG. 9A. Further, in this control, the output of each laser light source is controlled such that the amount of emitted light increases at the center of the width W1 shown in FIG. 9A.
　このような制御を行う場合、コントローラ３０１は、ミラー１６ａの駆動信号に同期して、各レーザ光源に対し、図１２Ｂの２段目以下に示す出力制御信号を付与する。コントローラ３０１は、各出力制御信号の波形の間隔を、図１２Ａに示したパラメータに基づいて、図１２Ｂに付記した算出式により算出して設定する。また、コントローラ３０１は、図１１Ａ～図１１Ｃに示した処理により取得した各正反射光スポットの受光光量に基づいて、各レーザ光源の出力が所定の同一レベルとなるように、各出力制御信号の波形の最大値を設定する。これにより、水平方向の幅がやや制限され且つ中央の光量が高められた配光パターンで、目標領域に光が投射される。 When such control is performed, the controller 301 applies output control signals shown in the second and subsequent stages of FIG. 12B to the respective laser light sources in synchronization with the drive signal of the mirror 16a. The controller 301 calculates and sets the intervals of the waveforms of the output control signals according to the calculation equation appended to FIG. 12B based on the parameters shown in FIG. 12A. Further, the controller 301 sets each output control signal so that the output of each laser light source becomes a predetermined same level based on the received light amount of each regular reflection light spot acquired by the processing shown in FIGS. 11A to 11C. Set the maximum value of the waveform. Thus, light is projected to the target area with a light distribution pattern in which the width in the horizontal direction is somewhat restricted and the central light amount is increased.
　図１３Ｂは、レーザ光源１１ａ～１１ｃの出力制御の他の例を示すタイミングチャートである。図１２Ｂと同様、図１３Ｂの最上段には、光偏向器１６のミラー１６ａを駆動するための駆動信号の波形が示され、図１３Ｂの上から２～４段目には、正反射光スポットＲＢ１～ＲＢ３にそれぞれ対応するレーザ光源を駆動するための制御信号の波形が示されている。 FIG. 13B is a timing chart showing another example of output control of the laser light sources 11a to 11c. Similar to FIG. 12B, the top row of FIG. 13B shows the waveform of a drive signal for driving the mirror 16a of the light deflector 16. The second to fourth rows from the top of FIG. The waveforms of control signals for driving the laser light sources respectively corresponding to RB1 to RB3 are shown.
　また、図１３Ａには、図１２Ａと同様、図１３Ｂの出力制御において用いられる各パラメータが示されている。ここでは、走査範囲の両端の他、走査範囲の途中の区間にも、発光を停止させる消灯区間ＸＡＤＢが設定されている。換言すると、この制御では、図９Ａに示した幅Ｗ１の一部に、消灯区間ＸＡＤＢに対応する非発光区間が設定されている。 Further, FIG. 13A shows each parameter used in the output control of FIG. 13B as in FIG. 12A. Here, in addition to both ends of the scanning range, the non-lighting interval X ADB in which light emission is stopped is set in the middle of the scanning range. In other words, in this control, a non-light emitting period corresponding to the light off period X ADB is set in part of the width W1 shown in FIG. 9A.
　光源装置２が車両の前照灯として用いられる場合、たとえば、車両側の制御回路からの制御指令によって、図９Ａに示した幅Ｗ１中の所定の区間においてレーザ光源１１ａ～１１ｃを消灯させる制御が行われ得る。たとえば、車両側において、前照灯の範囲内に前走車や対向車、人等が検出された場合、前走車や対向車、人の位置を消灯する制御が車両側から光源装置２に指示される。この指示は、図１０のインタフェース３０５を介してコントローラ３０１に入力される。この場合、コントローラ３０１は、車両側からの指示に応じて、幅Ｗ１中の所定の区間においてレーザ光源１１ａ～１１ｃを消灯させる制御を、レーザ駆動回路３０２ａ～３０２ｃに対し行う。 When the light source device 2 is used as a headlight of a vehicle, for example, control to turn off the laser light sources 11a to 11c in a predetermined section in the width W1 shown in FIG. It can be done. For example, when the vehicle ahead detects an oncoming vehicle, an oncoming vehicle, or a person within the range of the headlights, the light source device 2 is controlled to turn off the position of the oncoming vehicle, the oncoming vehicle, or the person. Be instructed. This instruction is input to the controller 301 via the interface 305 of FIG. In this case, the controller 301 controls the laser drive circuits 302a to 302c to turn off the laser light sources 11a to 11c in a predetermined section in the width W1 in accordance with an instruction from the vehicle side.
　図１３Ａに示した消灯区間ＸＡＤＢは、この制御によりレーザ光源１１ａ～１１ｃを消灯させる区間に相当する。図１３Ｂには、消灯区間ＡＤＢに対応する区間が、斜線のハッチングで示されている。なお、図１３Ｂの制御では、目標領域に均一な強度で光が投射される制御が行われる。このため、各レーザ光源に対する出力制御信号は、矩形状の波形となっている。 The turn-off section X ADB shown in FIG. 13A corresponds to a section to turn off the laser light sources 11a to 11c by this control. In FIG. 13B, a section corresponding to the light off section ADB is indicated by hatching. In the control of FIG. 13B, control is performed such that light is projected onto the target area with uniform intensity. Therefore, the output control signal for each laser light source has a rectangular waveform.
　このような制御を行う場合、コントローラ３０１は、ミラー１６ａの駆動信号に同期して、各レーザ光源に対し、図１３Ｂの２段目以下に示す出力制御信号を付与する。コントローラ３０１は、各出力制御信号の波形の間隔を、図１３Ａに示したパラメータに基づいて、図１３Ｂに付記した算出式により算出して設定する。各出力制御信号の波形の間隔は、図１２Ｂに示した各出力制御信号の波形の間隔と同じである。 When such control is performed, the controller 301 applies an output control signal shown in the second or lower stage of FIG. 13B to each laser light source in synchronization with the drive signal of the mirror 16a. The controller 301 calculates and sets the intervals of the waveforms of the output control signals according to the calculation equation appended to FIG. 13B based on the parameters shown in FIG. 13A. The intervals of the waveforms of the output control signals are the same as the intervals of the waveforms of the output control signals shown in FIG. 12B.
　また、コントローラ３０１は、各出力制御信号の波形の一部を、消灯区間ＸＡＤＢに応じてゼロレベルに設定する。コントローラ３０１は、波形の一部をゼロレベルに設定するタイミングおよび期間を、図１３Ａに示したパラメータに基づいて、図１３Ｂに付記した算出式により算出して設定する。さらに、コントローラ３０１は、図１１Ａ～図１１Ｃに示した処理により取得した各正反射光スポットの光量に基づいて、各出力制御信号の矩形波形のレベルを設定する。これにより、水平方向の幅がやや制限され且つ一部の区間において発光が停止された配光パターンで、目標領域に光が投射される。 Further, the controller 301 sets a part of the waveform of each output control signal to the zero level in accordance with the turn-off period X ADB . The controller 301 calculates and sets the timing and period for setting a part of the waveform to the zero level based on the parameters shown in FIG. 13A according to the calculation equation appended to FIG. 13B. Furthermore, the controller 301 sets the level of the rectangular waveform of each output control signal based on the light quantity of each regular reflection light spot acquired by the processing shown in FIGS. 11A to 11C. Thus, light is projected to the target area with a light distribution pattern in which the width in the horizontal direction is somewhat restricted and light emission is stopped in a part of the section.
　＜実施形態の効果＞
　以上、本実施形態によれば、以下の効果が奏される。 <Effect of the embodiment>
As mentioned above, according to this embodiment, the following effects are produced.
　波長変換部材１８の入射面１８ａ上において、各ビームスポットＢＳ１～ＢＳ３が走査方向に並び且つ互いに離間するため、レーザ光源１１ａ～１１ｃの何れか１つに故障等の不具合が生じたとしても、波長変換部材１８からの配光にムラが生じることがない。また、波長変換部材１８の入射面１８ａで正反射した複数のレーザ光の正反射光が、入射面１８ａ上の全ての走査範囲に対して位置検出器１９で受光されるため、位置検出器１９からの検出信号により、各レーザ光源の出力を円滑に制御することができる。 Since the beam spots BS1 to BS3 align in the scanning direction and are separated from each other on the incident surface 18a of the wavelength conversion member 18, even if a failure such as a failure occurs in any one of the laser light sources 11a to 11c, the wavelength No unevenness occurs in the light distribution from the conversion member 18. In addition, the specularly reflected light of the plurality of laser beams specularly reflected on the incident surface 18 a of the wavelength conversion member 18 is received by the position detector 19 with respect to all scanning ranges on the incident surface 18 a. The output of each laser light source can be smoothly controlled by the detection signal from
　図１１Ｃを参照して説明したとおり、コントローラ３０１は、レーザ光源１１ａ～１１ｃをそれぞれ単独で駆動させて、位置検出器１９から各正反射光（正反射光スポットＲＢ１～ＲＢ３）の受光位置および受光光量に応じた検出信号を取得する。これにより、走査方向に互いに分離した正反射光（正反射光スポットＲＢ１～ＲＢ３）の受光位置および受光光量を、正確に検出することができる。 As described with reference to FIG. 11C, the controller 301 drives the laser light sources 11a to 11c independently to receive the light receiving positions and the light receiving positions of the regular reflection lights (regular reflection light spots RB1 to RB3) from the position detector 19. A detection signal corresponding to the light amount is acquired. As a result, the light receiving position and the light receiving amount of the regular reflection light (regular reflection light spots RB1 to RB3) separated from each other in the scanning direction can be accurately detected.
　この場合、コントローラ３０１は、図１１Ａに示したように、光源装置２の起動時に、レーザ光源１１ａ～１１ｃをそれぞれ単独で駆動させて位置検出器１９から検出信号を取得する制御を実行する。このように、光源装置２の起動時に検出信号を取得する処理を実行することにより、光源装置２による発光の実動作を中断することなく、各正反射光（正反射光スポットＲＢ１～ＲＢ３）の受光位置および受光光量を検出できる。 In this case, as shown in FIG. 11A, the controller 301 executes control to drive the laser light sources 11a to 11c independently and acquire a detection signal from the position detector 19 when the light source device 2 is activated. As described above, by executing the process of acquiring the detection signal at the time of activation of the light source device 2, without interrupting the actual operation of light emission by the light source device 2, each specularly reflected light (specularly reflected light spots RB1 to RB3) The light receiving position and the light receiving amount can be detected.
　また、コントローラ３０１は、図１１Ｂに示したように、光源装置２の起動後所定の周期ごとに、レーザ光源１１ａ～１１ｃをそれぞれ単独で駆動させて位置検出器１９から検出信号を取得する制御を実行する。こうすると、発光の実動作中に、逐次、各正反射光（正反射光スポットＲＢ１～ＲＢ３）の受光位置および受光光量を取得できる。これにより、発光の実動作中に、各正反射光（正反射光スポットＲＢ１～ＲＢ３）の受光位置および受光光量に変動が生じた場合も、各レーザ光源を精度良く制御できる。 Further, as shown in FIG. 11B, the controller 301 performs control to drive the laser light sources 11a to 11c independently and acquire a detection signal from the position detector 19 every predetermined period after the light source device 2 is activated. Run. In this way, during actual operation of light emission, it is possible to sequentially acquire the light reception positions and the light reception amounts of the regular reflection lights (regular reflection light spots RB1 to RB3). Thus, even when the light receiving positions and the light receiving amounts of the regular reflection lights (regular reflection light spots RB1 to RB3) change during actual light emission operation, the respective laser light sources can be controlled with high accuracy.
　なお、光源装置２の起動後における検出信号（受光位置、受光光量）の取得は、必ずしも一定周期で行われなくてもよく、また、検出信号の取得の回数も複数でなくてもよい。光源装置２の起動後における検出信号の取得は、各正反射光（正反射光スポットＲＢ１～ＲＢ３）の受光位置および受光光量に変動が生じた可能性が想定され得る所定のタイミングにおいて実行されればよい。たとえば、図１１Ｂの制御に代えて、あるいは、この制御とともに、光源装置２に大きな振動や衝撃が付与されたことが検出されたタイミングで検出信号（受光位置、受光光量）の取得制御が実行されてもよい。 In addition, acquisition of the detection signal (light reception position, light reception light quantity) after starting of the light source device 2 may not necessarily be performed in a fixed cycle, and the number of times of acquisition of detection signals may not be plural. Acquisition of detection signals after activation of the light source device 2 is performed at a predetermined timing at which the possibility of fluctuations in the light reception positions and light reception amounts of the regular reflection lights (regular reflection light spots RB1 to RB3) may be assumed. Just do it. For example, instead of the control in FIG. 11B or together with this control, acquisition control of detection signals (light receiving position, received light quantity) is executed at the timing when it is detected that a large vibration or impact is applied to the light source device 2. May be
　図１２Ａ、図１２Ｂおよび図１３Ａ、図１３Ｂに示したように、コントローラ３０１は、位置検出器１９からの検出信号に基づいて、波長変換部材１８から所定の配光パターンで光が生じるように、レーザ光源１１ａ～１１ｃを制御する。このように、検出信号に基づいてレーザ光源１１ａ～１１ｃを個別に制御することにより、波長変換部材１８からの配光パターンの分解能を高めることができ、より精緻な配光パターンを実現できる。 As shown in FIGS. 12A and 12B and FIGS. 13A and 13B, the controller 301 generates light in a predetermined light distribution pattern from the wavelength conversion member 18 based on the detection signal from the position detector 19. The laser light sources 11a to 11c are controlled. As described above, by individually controlling the laser light sources 11a to 11c based on the detection signal, the resolution of the light distribution pattern from the wavelength conversion member 18 can be enhanced, and a more sophisticated light distribution pattern can be realized.
　たとえば、コントローラ３０１は、図１３Ａ、図１３Ｂに示したように、波長変換部材１８に対する走査範囲の一部の範囲（消灯区間ＸＡＤＢ）において発光を停止させる制御を行う。この場合、コントローラ３０１は、レーザ光源１１ａ～１１ｃの消灯がそれぞれ発光を停止させる一部の範囲（消灯区間ＸＡＤＢ）に整合するように、各レーザ光源の消灯タイミングと消灯期間を制御する。これにより、消灯区間ＸＡＤＢの境界をクリアにでき、一部の範囲の消灯を良好に行い得る。 For example, as shown in FIGS. 13A and 13B, the controller 301 performs control to stop light emission in a part of the scanning range with respect to the wavelength conversion member 18 (light-off section X ADB ). In this case, the controller 301 controls the turn-off timing and the turn-off period of each of the laser light sources such that the turn-off of the laser light sources 11a to 11c matches with a partial range (turn-off section X ADB ) in which light emission is stopped. Thereby, the boundary of the non-lighting section X ADB can be cleared, and light extinguishing of a part of the range can be satisfactorily performed.
　この場合、コントローラ３０１は、図１３Ａ、図１３Ｂに示したように、位置検出器１９からの検出信号に基づいて、位置検出器１９の受光面１９ａ上における正反射光の間隔Ｘ１、Ｘ２を取得し、取得した間隔Ｘ１、Ｘ２に基づいて、レーザ光源１１ａ～１１ｃの消灯タイミングを設定するのが好ましい。こうすると、レーザ光源１１ａ～１１ｃの消灯タイミングを円滑かつ正確に設定できる。 In this case, as shown in FIGS. 13A and 13B, the controller 301 obtains the intervals X1 and X2 of the specularly reflected light on the light receiving surface 19a of the position detector 19 based on the detection signal from the position detector 19. It is preferable to set the extinguishing timing of the laser light sources 11a to 11c based on the acquired intervals X1 and X2. In this way, the turn-off timings of the laser light sources 11a to 11c can be set smoothly and accurately.
　なお、図１Ａ～図６Ｂに示した構成により、光学系のコンパクト化を実現しながら、波長変換部材１８の入射面１８ａにおいて、ビームスポットＢＳ１～ＢＳ３を走査方向に分離して並べることができる。 With the configuration shown in FIGS. 1A to 6B, the beam spots BS1 to BS3 can be separated and arranged in the scanning direction on the incident surface 18a of the wavelength conversion member 18 while realizing a compact optical system.
　＜変更例＞
　図１４Ａ、図１４Ｂは、それぞれ、変更例に係る投光装置１の構成を示す側面図および平面図である。 <Modification example>
FIG. 14A and FIG. 14B are respectively a side view and a plan view showing a configuration of a light projecting device 1 according to a modification.
　変更例では、光源装置２に配置されるレーザ光源の数が４つに増やされている。すなわち、上記実施の形態に比べて、新たにレーザ光源１１ｄが追加されている。レーザ光源１１ｄは、レーザ光源１１ａ～１１ｃと同種である。レーザ光源１１ｄから出射されたレーザ光は、コリメータレンズ１２ｄによって平行光に変換される。 In the modification, the number of laser light sources arranged in the light source device 2 is increased to four. That is, the laser light source 11d is newly added as compared with the above embodiment. The laser light source 11d is the same as the laser light sources 11a to 11c. The laser light emitted from the laser light source 11 d is converted into parallel light by the collimator lens 12 d.
　レーザ光源１１ａとレーザ光源１１ｄは、対向するように配置されている。レーザ光源１１ａ、１１ｄは、レーザ光源１１ｂ、１１ｃと同様、ファスト軸がＺ軸に平行となるように配置されている。 The laser light source 11a and the laser light source 11d are disposed to face each other. The laser light sources 11a and 11d are arranged such that the fast axis is parallel to the Z axis, as with the laser light sources 11b and 11c.
　レーザ光源１１ａの出射方向に反射プリズム１３ｃが配置され、レーザ光源１１ｄの出射方向に反射プリズム１３ｄが配置されている。レーザ光源１１ａの光軸と、レーザ光源１１ｄの光軸は、それぞれ、シリンドリカルレンズ１４に向かうように、反射プリズム１３ｃ、１３ｄによって、Ｘ－Ｚ平面に平行な方向に曲げられる。反射プリズム１３ｃ、１３ｄは、Ｘ軸方向に隙間なく配置されている。上記実施の形態に比べて、反射プリズム１３ａ、１３ｂ間の隙間が広げられている。レーザ光源１１ａ、１１ｄからそれぞれ出射されたレーザ光は、反射プリズム１３ｃ、１３ｄによって光軸が曲げられた後、反射プリズム１３ａ、１３ｂ間の隙間を通って、シリンドリカルレンズ１４に入射する。 The reflection prism 13c is disposed in the emission direction of the laser light source 11a, and the reflection prism 13d is disposed in the emission direction of the laser light source 11d. The optical axis of the laser light source 11a and the optical axis of the laser light source 11d are bent in directions parallel to the XZ plane by the reflecting prisms 13c and 13d so as to be directed to the cylindrical lens 14, respectively. The reflecting prisms 13c and 13d are disposed without a gap in the X-axis direction. Compared to the above embodiment, the gap between the reflecting prisms 13a and 13b is widened. The laser beams emitted from the laser light sources 11a and 11d are bent along the optical axes by the reflecting prisms 13c and 13d, and then enter the cylindrical lens 14 through the gap between the reflecting prisms 13a and 13b.
　シリンドリカルレンズ１４の入射位置において、レーザ光源１１ａ～１１ｄの光軸は、シリンドリカルレンズ１４の母線に垂直な１つの平面、すなわちＸ－Ｚ平面に平行な１つの平面に含まれる。このように、レーザ光源１１ａ～１１ｄのＹ軸方向の位置が調整されている。 At the incident position of the cylindrical lens 14, the optical axes of the laser light sources 11 a to 11 d are included in one plane perpendicular to the generatrix of the cylindrical lens 14, that is, one plane parallel to the XZ plane. Thus, the positions of the laser light sources 11a to 11d in the Y-axis direction are adjusted.
　光学系のその他の構成は、上記実施の形態と同様である。変更例においても、上記実施の形態と同様、シリンドリカルレンズ１４の焦点距離の位置に、波長変換部材１８の入射面１８ａが位置づけられている。変更例では、４つのレーザ光のビームスポットが、波長変換部材１８の入射面上において走査方向に並び、且つ、互いに離間するように形成される。 The other configuration of the optical system is the same as that of the above embodiment. Also in the modified example, the incident surface 18a of the wavelength conversion member 18 is positioned at the position of the focal length of the cylindrical lens 14 as in the above embodiment. In a modification, beam spots of four laser beams are formed on the incident surface of the wavelength conversion member 18 so as to align in the scanning direction and to be separated from each other.
　たとえば、図１５Ａに示すように、レーザ光源１１ａ～１１ｄからそれぞれ出射されたレーザ光１３０ａ～１３０ｄを、互いに非平行な状態で、シリンドリカルレンズ１４に入射させることにより、これら４つのレーザ光１３０ａ～１３０ｄのビームスポットＢＳａ～ＢＳｄを、波長変換部材１８の入射面１８ａ上において、走査方向に並び、且つ、互いに離間させることができる。この場合、シリンドリカルレンズ１４として、収差のない単一焦点のシリンドリカルレンズが用いられる。また、シリンドリカルレンズ１４よりも前段側の光学系を図５Ａ、図５Ｂと同様の方法で調整することにより、レーザ光１３０ａ～１３０ｄを、互いに非平行な状態で、シリンドリカルレンズ１４に入射させることができる。 For example, as shown in FIG. 15A, the four laser beams 130a to 130d can be obtained by causing the laser beams 130a to 130d emitted from the laser light sources 11a to 11d to be incident on the cylindrical lens 14 in a nonparallel state. The beam spots BSa to BSd can be aligned in the scanning direction and separated from each other on the incident surface 18a of the wavelength conversion member 18. In this case, a single-focus cylindrical lens without aberration is used as the cylindrical lens 14. In addition, by adjusting the optical system on the front side of the cylindrical lens 14 by the same method as in FIGS. 5A and 5B, the laser beams 130a to 130d can be incident on the cylindrical lens 14 in a nonparallel state. it can.
　なお、図４Ｂの場合と同様、予め収差を持つシリンドリカルレンズ１４を用いて、ビームスポットＢＳａ～ＢＳｄを、波長変換部材１８の入射面１８ａ上において、走査方向に並び、且つ、互いに離間させてもよい。また、図６Ａ、図６Ｂの場合と同様、シリンドリカルレンズ１４から波長変換部材１８までの間の光路においてレーザ光１３０ａ～１３０ｄを互いに交差させて、レーザ光１３０ａ～１３０ｃの各ビームスポットＢＳａ～ＢＳｄを、波長変換部材１８の入射面１８ａ上において互いに離間させてもよい。 As in the case of FIG. 4B, the beam spots BSa to BSd may be arranged in the scanning direction on the incident surface 18a of the wavelength conversion member 18 and separated from each other by using the cylindrical lens 14 having aberration in advance. Good. Further, as in the case of FIGS. 6A and 6B, the laser beams 130a to 130d are made to intersect with each other in the optical path from the cylindrical lens 14 to the wavelength conversion member 18, and the beam spots BSa to BSd of the laser beams 130a to 130c are obtained. Alternatively, they may be separated from each other on the incident surface 18 a of the wavelength conversion member 18.
　本変更例では、波長変換部材１８の入射面１８ａにおけるレーザ光１３０ａ～１３０ｄの正反射光が、位置検出器１９の受光面１９ａに入射し、レーザ光１３０ａ～１３０ｄに対応する４つの正反射光スポットが形成される。位置検出器１９は、波長変換部材１８の入射面１８ａ上の全ての走査範囲に対してレーザ光１３０ａ～１３０ｄを受光して、受光位置および受光光量に応じた検出信号を出力可能に構成される。 In this modification, regular reflections of the laser beams 130a to 130d on the incident surface 18a of the wavelength conversion member 18 are incident on the light receiving surface 19a of the position detector 19, and four regular reflections corresponding to the laser beams 130a to 130d. A spot is formed. The position detector 19 is configured to receive the laser beams 130a to 130d with respect to all scanning ranges on the incident surface 18a of the wavelength conversion member 18 and output a detection signal according to the light reception position and the light reception amount. .
　本変更例では、図１０の回路ブロックに、レーザ光源１１ｄを駆動するためのレーザ駆動回路が追加される。コントローラ３０１は、図１１Ａ、図１１ＢのステップＳ１２、Ｓ２２において、図１５Ｂに示すように、レーザ光源１１ａ～１１ｄをそれぞれ単独で駆動させて、位置検出器１９から検出信号を取得し、各正反射光の受光位置、受光光量と、正反射光の間隔を取得する。図１５Ｂにおいて、ＲＢ１～ＲＢ４は、それぞれ、レーザ光源１１ｂ、１１ａ、１１ｄ、１１ｃから出射されたレーザ光による正反射光スポットである。 In this modification, a laser drive circuit for driving the laser light source 11d is added to the circuit block of FIG. The controller 301 drives the laser light sources 11a to 11d independently as shown in FIG. 15B in steps S12 and S22 in FIG. 11A and FIG. 11B, and acquires detection signals from the position detector 19 The light receiving position of the light, the light receiving amount, and the interval of the regular reflection light are acquired. In FIG. 15B, RB1 to RB4 are regular reflection light spots by the laser light emitted from the laser light sources 11b, 11a, 11d and 11c, respectively.
　ステップＳ１２、Ｓ２２では、最も左側の正反射光スポットＲＢ４から順番に正反射光スポットが照射されるように、レーザ光源１１ｂ、１１ａ、１１ｄ、１１ｃが個別に駆動される。コントローラ３０１は、取得した各正反射光の受光位置、受光光量および正反射光の間隔に基づいて、レーザ光源１１ａ～１１ｄに対する制御、たとえば、図１２Ａ、図１２Ｂおよび図１３Ａ、図１３Ｂと同様の制御を行う。 In steps S12 and S22, the laser light sources 11b, 11a, 11d, and 11c are individually driven such that the regular reflection light spots are sequentially irradiated from the leftmost regular reflection light spot RB4. The controller 301 controls the laser light sources 11a to 11d based on the acquired light reception positions of the regularly reflected light, the received light amount and the interval of the regularly reflected light, for example, similar to FIGS. 12A, 12B and 13A, 13B. Take control.
　本変更例においても、上記実施の形態と同様の効果が奏され得る。加えて、本変更例によれば、レーザ光源１１ｄが追加されるため、光源装置２の発光光量を高めることができる。 Also in this modification, the same effect as the above embodiment can be exhibited. In addition, according to this modification, since the laser light source 11d is added, the amount of light emitted from the light source device 2 can be increased.
　＜その他の変更例＞
　投光装置１および光源装置２の構成は、上記実施形態および変更例に示した構成以外に、種々の変更が可能である。 Other Modifications
The configurations of the light projecting device 1 and the light source device 2 can be variously modified in addition to the configurations shown in the above embodiment and the modification.
　たとえば、上記実施の形態および変更例では、各レーザ光源から出射されたレーザ光のビームスポットが、波長変換部材１８の入射面１８ａにおいて走査方向に離間したが、入射面１８ａ上において、走査方向に並び且つ互いに離間するように複数のビームスポットが形成されれば、幾つかのビームスポットが入射面１８ａ上において重なっていてもよい。 For example, although the beam spot of the laser beam emitted from each laser light source is separated in the scanning direction on the incident surface 18a of the wavelength conversion member 18 in the above embodiment and the modified example, it is in the scanning direction on the incident surface 18a If a plurality of beam spots are formed side by side and spaced apart from one another, several beam spots may overlap on the incident surface 18a.
　たとえば、上記実施の形態の構成において、ビームスポットＢＳａ、ＢＳｂが重ねられて、波長変換部材１８の入射面１８ａ上に２つのビームスポットが走査方向に並び且つ互いに離間するように形成されてもよい。また、上記変更例の構成において、ビームスポットＢＳａ、ＢＳｂが重ねられて、波長変換部材１８の入射面１８ａ上に３つのビームスポットが走査方向に並び且つ互いに離間するように形成されてもよい。あるいは、上記変更例の構成において、ビームスポットＢＳａ、ＢＳｂが重ねられ、さらに、ビームスポットＢＳｃ、ＢＳｄが重ねられて、波長変換部材１８の入射面１８ａ上に２つのビームスポットが走査方向に並び且つ互いに離間するように形成されてもよい。 For example, in the configuration of the above embodiment, the beam spots BSa and BSb may be overlapped, and two beam spots may be formed on the incident surface 18a of the wavelength conversion member 18 so as to be aligned in the scanning direction and separated from each other. . Further, in the configuration of the above-mentioned modification, the beam spots BSa and BSb may be overlapped, and three beam spots may be formed on the incident surface 18a of the wavelength conversion member 18 so as to be aligned in the scanning direction and separated from each other. Alternatively, in the configuration of the modified example, the beam spots BSa and BSb are overlapped, and the beam spots BSc and BSd are further overlapped, and two beam spots are aligned in the scanning direction on the incident surface 18a of the wavelength conversion member 18 It may be formed to be separated from each other.
　これらの場合、互いに重ねられるレーザ光を、互いに平行となるように、シリンドリカルレンズ１４に入射させればよい。シリンドリカルレンズ１４は、収差のない単焦点のシリンドリカルレンズが用いられる。シリンドリカルレンズ１４よりも前段の光学系を図５Ａ、図５Ｂと同様の方法で調整することにより、互いに重ねられるレーザ光を、互いに平行となるように、シリンドリカルレンズ１４に入射させ、その他のレーザ光を互いに非平行な状態でシリンドリカルレンズ１４に入射させることができる。 In these cases, the laser beams superimposed on each other may be made incident on the cylindrical lens 14 so as to be parallel to each other. As the cylindrical lens 14, a single-focus cylindrical lens without aberration is used. By adjusting the optical system in front of the cylindrical lens 14 by the same method as in FIGS. 5A and 5B, the mutually overlapping laser beams are made to be incident on the cylindrical lens 14 so as to be parallel to each other. Can be incident on the cylindrical lens 14 in a non-parallel state.
　このようにビームスポットが重ねられる場合も、上記実施の形態と同様、各レーザ光源に対応する正反射光の受光位置および受光光量を個別に検出して、各レーザ光源を個別に制御するようにすればよい。こうすると、経時変化や衝撃等によって、互いに重ねられたビームスポットに走査方向の位置ずれが生じて一部または全部が互いに重ならなくなったとしても、各レーザ光源を個別に制御することにより、所定の配光パターンを良好に実現することができる。 Even when beam spots are overlapped in this manner, as in the above embodiment, the light reception position and the light reception amount of the specularly reflected light corresponding to each laser light source are separately detected, and each laser light source is individually controlled. do it. In this case, even if positional deviations in the scanning direction occur in the beam spots overlapped with each other due to aging or impact, and even if some or all of the beam spots do not overlap with each other, predetermined control is performed by individually controlling the respective laser light sources. Light distribution pattern can be realized well.
　なお、重ねられるビームスポットは２つ程度に制限されることが好ましい。これにより、光密度が過度に高まることを抑制でき、光飽和や発熱による温度消光効果により波長変換部材１８における発光効率が低下することを抑制できる。 Preferably, the number of beam spots to be overlapped is limited to about two. Thereby, it can suppress that a light density increases excessively, and it can suppress that the luminous efficiency in the wavelength conversion member 18 falls by the temperature quenching effect by light saturation or heat_generation | fever.
　また、上記実施の形態では、正反射光スポットＲＢ１～ＲＢ３を受光面１９ａ上で走査させつつ、レーザ光源１１ａ～１１ｃを個別に点灯させて、正反射光スポットＲＢ１～ＲＢ３の受光位置および受光光量を検出したが、正反射光スポットＲＢ１～ＲＢ３の受光位置および受光光量を検出する際に、必ずしも、各正反射光スポットが走査されていなくてもよい。たとえば、光偏向器１６のミラー１６ａを中立位置に固定した状態で、レーザ光源１１ａ～１１ｃを個別に点灯させて、正反射光スポットＲＢ１～ＲＢ３の受光位置および受光光量を検出するようにしてもよい。 In the above embodiment, the laser light sources 11a to 11c are individually turned on while scanning the specularly reflected light spots RB1 to RB3 on the light receiving surface 19a, and the light receiving positions and the received light amounts of the specularly reflected light spots RB1 to RB3. However, when detecting the light receiving positions of the specularly reflected light spots RB1 to RB3 and the amount of light received, the specularly reflected light spots may not necessarily be scanned. For example, even when the mirrors 16a of the light deflector 16 are fixed at the neutral position, the laser light sources 11a to 11c are individually turned on to detect the light reception positions and the light reception amounts of the regular reflection light spots RB1 to RB3. Good.
　また、図１３Ａ、図１３Ｂには、走査範囲の一部を消灯する場合の制御を示したが、走査範囲の一部のみを点灯させる制御であってもよい。 13A and 13B show the control in the case of turning off part of the scanning range, but it may be control to turn on only part of the scanning range.
　また、上記実施の形態では、正反射光スポットＲＢ１～ＲＢ３の受光位置および受光光量に基づいてレーザ光源を制御する例を示したが、さらに、正反射光スポットＲＢ１～ＲＢ３の受光位置に基づいて光偏向器１６のミラー１６ａを制御するようにしてもよい。たとえば、正反射光スポットＲＢ１～ＲＢ３の何れか１つの受光位置に基づいて、正反射光の移動範囲（ミラー１６ａの振り角）を検出し、正反射光の移動範囲（ミラー１６ａの振り角）が適切となるように、光偏向器１６を制御するようにしてもよい。 In the above embodiment, the laser light source is controlled based on the light receiving positions of the specularly reflected light spots RB1 to RB3 and the received light amounts. However, based on the light receiving positions of the specularly reflected light spots RB1 to RB3. The mirror 16 a of the light deflector 16 may be controlled. For example, the movement range of the regular reflection light (the swing angle of the mirror 16a) is detected based on any one light reception position of the regular reflection light spots RB1 to RB3, and the movement range of the regular reflection light (the swing angle of the mirror 16a) The light deflector 16 may be controlled so as to be appropriate.
　また、上記実施の形態および変更例では、レーザ光のファスト軸がシリンドリカルレンズ１４の収束方向に平行となるように、各レーザ光源が配置されたが、レーザ光源の配置方法は、必ずしもこれに限定されるものではない。たとえば、レーザ光のスロー軸が、シリンドリカルレンズ１４の収束方向に平行となるように、各レーザ光源が配置されてもよい。ただし、波長変換部材１８の入射面１８ａにおいてレーザ光を走査方向により小さく絞るためには、上記実施の形態および変更例のように、レーザ光のファスト軸がシリンドリカルレンズ１４の収束方向に平行となるように、各レーザ光源を配置することが好ましい。 Further, in the above-described embodiment and modifications, each laser light source is arranged such that the fast axis of the laser light is parallel to the convergence direction of the cylindrical lens 14, but the arrangement method of the laser light source is necessarily limited to this. It is not something to be done. For example, each laser light source may be arranged such that the slow axis of the laser light is parallel to the convergence direction of the cylindrical lens 14. However, in order to narrow down the laser light in the scanning direction in the incident surface 18 a of the wavelength conversion member 18, the fast axis of the laser light is parallel to the convergence direction of the cylindrical lens 14 as in the embodiment and the modifications described above. Preferably, each laser light source is arranged.
　また、光源装置２に配置されるレーザ光源の数は、上記実施の形態および変更例に示した数に限られるものではなく、２つまたは５つ以上であってもよい。光学系の構成は、必ずしも、図１Ａ、図１Ｂおよび図１４Ａ、図１４Ｂに示した構成でなくてもよく、波長変換部材１８の入射面１８ａ上において、走査方向に並び且つ互いに離間するように複数のビームスポットを形成可能な限りにおいて、種々の変更が可能である。 Further, the number of laser light sources disposed in the light source device 2 is not limited to the number shown in the above embodiment and the modification, and may be two or five or more. The configuration of the optical system does not necessarily have to be the configuration shown in FIGS. 1A, 1B and 14A, 14B, so that it is aligned in the scanning direction on the incident surface 18a of the wavelength conversion member 18 and separated from each other. Various modifications are possible as long as multiple beam spots can be formed.
　また、集光光学系は、必ずしも、シリンドリカルレンズ１４とシリンドリカルミラー１７に分けられなくともよく、１つのレンズによって走査方向と走査方向に垂直な方向にレーザ光を収束させてもよい。集光光学系を構成するレンズは、フレネルレンズや、回折レンズであってもよい。また、光偏向器１６は、ミラー１６ａを互いに垂直な２軸周りに回動させる構成であってもよい。 Moreover, the condensing optical system does not necessarily have to be divided into the cylindrical lens 14 and the cylindrical mirror 17, and the laser light may be converged in the scanning direction and the direction perpendicular to the scanning direction by one lens. The lens constituting the condensing optical system may be a Fresnel lens or a diffractive lens. In addition, the light deflector 16 may be configured to rotate the mirror 16a about two axes perpendicular to each other.
　また、波長変換部材１８の蛍光体層２０３に含まれる蛍光体粒子２０３ａの種類は、必ずしも１種類でなくてもよく、たとえば、レーザ光源１１ａ～１１ｄからのレーザ光によって互いに異なる波長の蛍光を生じる複数種類の蛍光体粒子２０３ａが蛍光体層２０３に含まれてもよい。この場合、各種類の蛍光体粒子２０３ａから生じた蛍光の拡散光と、これら蛍光体粒子２０３ａによって波長変換されなかったレーザ光の拡散光とによって、所定の色の光が生成される。波長変換部材１８は、反射型に限らず、透過型であってもよい。 Further, the type of phosphor particles 203a contained in the phosphor layer 203 of the wavelength conversion member 18 is not necessarily limited to one type, and for example, the laser beams from the laser light sources 11a to 11d produce fluorescence of different wavelengths. Plural kinds of phosphor particles 203 a may be included in the phosphor layer 203. In this case, light of a predetermined color is generated by the diffused light of the fluorescent light generated from the phosphor particles 203a of each type and the diffused light of the laser light which is not wavelength-converted by the phosphor particles 203a. The wavelength conversion member 18 is not limited to the reflection type, and may be a transmission type.
　また、レーザ光の走査方向は、必ずしも水平方向でなくてもよく、必要とされる照射条件によっては鉛直方向がレーザ光の走査方向であってもよい。 The scanning direction of the laser light may not necessarily be the horizontal direction, and the vertical direction may be the scanning direction of the laser light depending on the required irradiation conditions.
　この他、本開示の実施の形態は、請求の範囲に示された技術的思想の範囲内において、適宜、種々の変更が可能である。 Besides the above, the embodiment of the present disclosure can be variously modified as appropriate within the scope of the technical idea shown in the claims.
　本開示に係る光源装置および投光装置によれば、配光にムラが生じることを抑制しつつ、各レーザ光源の出力を円滑に制御することができる。そのため、本開示に係る光源装置および投光装置は、たとえば、車両用前照灯の光源装置として利用することができ、産業上有用である。 According to the light source device and the light projecting device according to the present disclosure, the outputs of the respective laser light sources can be smoothly controlled while suppressing the occurrence of unevenness in light distribution. Therefore, the light source device and the light projecting device according to the present disclosure can be used, for example, as a light source device of a vehicle headlamp, and is industrially useful.
　１　投光装置
　２　光源装置
　３　投射光学系
　１１ａ～１１ｄ　レーザ光源
　１３ａ～１３ｄ、２３　反射プリズム
　１４　シリンドリカルレンズ（光学系）
　１６　光偏向器
　１６ａ　ミラー
　１７　シリンドリカルミラー（光学系）
　１８　波長変換部材
　１８ａ　入射面
　１９　位置検出器
　３０１　コントローラ DESCRIPTION OF SYMBOLS 1 light projection apparatus 2 light source device 3 projection optical system 11a-11d laser light source 13a-13d, 23 reflection prism 14 cylindrical lens (optical system)
16 light deflector 16a mirror 17 cylindrical mirror (optical system)
18 wavelength conversion member 18 a incident surface 19 position detector 301 controller

Claims (10)

  1. 複数のレーザ光源と、
    前記複数のレーザ光源から出射されたレーザ光が入射する入射面を備え、前記レーザ光を、前記レーザ光の波長とは異なる波長の光に変換するとともに前記光を拡散させる波長変換部材と、
    前記レーザ光を前記入射面上において走査させる光偏向器と、
    前記複数のレーザ光源から出射された複数のレーザ光により、前記入射面上において、前記走査方向に並び、且つ少なくとも１つのスポットが他のスポットと離間するように複数のビームスポットを形成する光学系と、
    前記入射面において正反射した前記複数のレーザ光の正反射光を、前記入射面上の走査範囲に対して受光して、受光位置および受光光量に応じた検出信号を出力する位置検出器と、
    前記位置検出器からの検出信号に基づいて前記複数のレーザ光源を制御するコントローラと、を備える、
    ことを特徴とする光源装置。     With multiple laser light sources,
    A wavelength conversion member provided with an incident surface on which laser light emitted from the plurality of laser light sources is incident, and converting the laser light into light of a wavelength different from that of the laser light and diffusing the light;
    An optical deflector for scanning the laser beam on the incident surface;
    An optical system that forms a plurality of beam spots on the incident surface so as to align at least one spot with another spot on the incident surface by a plurality of laser beams emitted from the plurality of laser light sources When,
    A position detector which receives specularly reflected light of the plurality of laser beams specularly reflected on the incident surface with respect to a scanning range on the incident surface, and outputs a detection signal according to a light receiving position and a received light amount;
    A controller that controls the plurality of laser light sources based on a detection signal from the position detector.
    A light source device characterized by
  2. 複数のレーザ光源と、
    前記複数のレーザ光源から出射されたレーザ光が入射する入射面を備え、前記レーザ光を、前記レーザ光の波長とは異なる波長の光に変換するとともに前記光を拡散させる波長変換部材と、
    前記レーザ光を前記入射面上において走査させる光偏向器と、
    前記複数のレーザ光源から出射された複数のレーザ光により、前記入射面上において、前記走査方向に並び且つ互いに離間するように複数のビームスポットを形成する光学系と、
    前記入射面において正反射した前記複数のレーザ光の正反射光を、前記入射面上の走査範囲に対して受光して、受光位置および受光光量に応じた検出信号を出力する位置検出器と、
    前記位置検出器からの検出信号に基づいて前記複数のレーザ光源を制御するコントローラと、を備える、
    ことを特徴とする光源装置。     With multiple laser light sources,
    A wavelength conversion member provided with an incident surface on which laser light emitted from the plurality of laser light sources is incident, and converting the laser light into light of a wavelength different from that of the laser light and diffusing the light;
    An optical deflector for scanning the laser beam on the incident surface;
    An optical system for forming a plurality of beam spots on the incident surface so as to be aligned in the scanning direction and separated from each other by a plurality of laser beams emitted from the plurality of laser light sources;
    A position detector which receives specularly reflected light of the plurality of laser beams specularly reflected on the incident surface with respect to a scanning range on the incident surface, and outputs a detection signal according to a light receiving position and a received light amount;
    A controller that controls the plurality of laser light sources based on a detection signal from the position detector.
    A light source device characterized by
  3. 請求項１または２に記載の光源装置において、
    前記コントローラは、前記複数のレーザ光源をそれぞれ単独で駆動させて、前記位置検出器から前記検出信号を取得する、
    ことを特徴とする光源装置。     In the light source device according to claim 1 or 2,
    The controller individually drives the plurality of laser light sources to obtain the detection signal from the position detector.
    A light source device characterized by
  4. 請求項３に記載の光源装置において、
    前記コントローラは、前記光源装置の起動時に、前記複数のレーザ光源をそれぞれ単独で駆動させて前記検出信号を取得する制御を実行する、
    ことを特徴とする光源装置。     In the light source device according to claim 3,
    The controller executes control for individually driving the plurality of laser light sources and acquiring the detection signal when the light source device is activated.
    A light source device characterized by
  5. 請求項３または４に記載の光源装置において、
    前記コントローラは、前記光源装置の起動後の所定のタイミングにおいて、前記複数のレーザ光源をそれぞれ単独で駆動させて前記検出信号を取得する制御を実行する、
    ことを特徴とする光源装置。     In the light source device according to claim 3 or 4,
    The controller executes control to individually drive the plurality of laser light sources and acquire the detection signal at a predetermined timing after activation of the light source device.
    A light source device characterized by
  6. 請求項５に記載の光源装置において、
    前記コントローラは、前記光源装置の起動後所定の周期ごとに、前記複数のレーザ光源をそれぞれ単独で駆動させて前記検出信号を取得する制御を実行する、
    ことを特徴とする光源装置。     In the light source device according to claim 5,
    The controller executes control for independently driving the plurality of laser light sources and acquiring the detection signal at predetermined cycles after activation of the light source device.
    A light source device characterized by
  7. 請求項１ないし６の何れか一項に記載の光源装置において、
    前記コントローラは、前記位置検出器からの前記検出信号に基づいて、前記波長変換部材から所定の配光パターンで前記光が生じるように、前記複数のレーザ光源を制御する、
    ことを特徴とする光源装置。     The light source device according to any one of claims 1 to 6.
    The controller controls the plurality of laser light sources such that the light is generated in a predetermined light distribution pattern from the wavelength conversion member based on the detection signal from the position detector.
    A light source device characterized by
  8. 請求項７に記載の光源装置において、
    前記コントローラは、前記波長変換部材に対する走査範囲の一部の範囲において発光を停止させる制御を行う場合、前記各レーザ光源の消灯がそれぞれ前記発光を停止させる前記一部の範囲に整合するように、前記複数のレーザ光源を制御する、
    ことを特徴とする光源装置。     In the light source device according to claim 7,
    When the controller performs control to stop light emission in a partial range of the scanning range for the wavelength conversion member, the turn-off of each of the laser light sources is matched with the partial range to stop the light emission, respectively. Control the plurality of laser light sources,
    A light source device characterized by
  9. 請求項８に記載の光源装置において、
    前記コントローラは、前記位置検出器からの検出信号に基づいて、前記位置検出器の受光面上における前記正反射光の間隔を取得し、取得した前記間隔に基づいて、前記複数のレーザ光源の消灯タイミングを設定する、
    ことを特徴とする光源装置。     In the light source device according to claim 8,
    The controller acquires an interval of the regularly reflected light on the light receiving surface of the position detector based on a detection signal from the position detector, and turns off the plurality of laser light sources based on the acquired interval. Set the timing,
    A light source device characterized by
  10. 請求項１ないし９の何れか一項に記載の光源装置と、
    前記波長変換部材により拡散された光を投射する投射光学系と、を備える、
    ことを特徴とする投光装置。     A light source device according to any one of claims 1 to 9,
    A projection optical system that projects the light diffused by the wavelength conversion member;
    A light projecting device characterized by
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