WO2019044881A1 - High-frequency-power-source uv lamp monitor, and total organic carbon meter in which same is used - Google Patents

High-frequency-power-source uv lamp monitor, and total organic carbon meter in which same is used Download PDF

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Publication number
WO2019044881A1
WO2019044881A1 PCT/JP2018/031895 JP2018031895W WO2019044881A1 WO 2019044881 A1 WO2019044881 A1 WO 2019044881A1 JP 2018031895 W JP2018031895 W JP 2018031895W WO 2019044881 A1 WO2019044881 A1 WO 2019044881A1
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Prior art keywords
high frequency
lamp
frequency power
monitor
sample
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PCT/JP2018/031895
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French (fr)
Japanese (ja)
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雅人 矢幡
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株式会社島津製作所
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Priority to US16/641,589 priority Critical patent/US20200225293A1/en
Priority to JP2019539565A priority patent/JP6828822B2/en
Priority to CN201880054688.8A priority patent/CN111033250A/en
Priority to EP18850855.0A priority patent/EP3680655A4/en
Publication of WO2019044881A1 publication Critical patent/WO2019044881A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/44—Testing lamps
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/18—Water
    • G01N33/1826—Organic contamination in water
    • G01N33/1846—Total carbon analysis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F23/00—Devices for treating the surfaces of sheets, webs, or other articles in connection with printing
    • B41F23/04—Devices for treating the surfaces of sheets, webs, or other articles in connection with printing by heat drying, by cooling, by applying powders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65F—GATHERING OR REMOVAL OF DOMESTIC OR LIKE REFUSE
    • B65F1/00—Refuse receptacles; Accessories therefor
    • B65F1/14—Other constructional features; Accessories
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/06—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a liquid
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
    • H05B41/14—Circuit arrangements
    • H05B41/26—Circuit arrangements in which the lamp is fed by power derived from dc by means of a converter, e.g. by high-voltage dc
    • H05B41/28—Circuit arrangements in which the lamp is fed by power derived from dc by means of a converter, e.g. by high-voltage dc using static converters
    • H05B41/288—Circuit arrangements in which the lamp is fed by power derived from dc by means of a converter, e.g. by high-voltage dc using static converters with semiconductor devices and specially adapted for lamps without preheating electrodes, e.g. for high-intensity discharge lamps, high-pressure mercury or sodium lamps or low-pressure sodium lamps
    • H05B41/292—Arrangements for protecting lamps or circuits against abnormal operating conditions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
    • G01N31/005—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods investigating the presence of an element by oxidation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A20/00—Water conservation; Efficient water supply; Efficient water use
    • Y02A20/20—Controlling water pollution; Waste water treatment

Definitions

  • the present invention relates to a UV lamp monitor attached to a UV lamp (ultraviolet lamp) and monitoring the lighting state thereof, and a total organic carbon meter (hereinafter referred to as "TOC meter") using the same, more specifically, an excimer lamp
  • the present invention relates to a high frequency power UV lamp monitor attached to a high frequency power UV lamp that emits ultraviolet light using a high frequency power source such as and a TOC meter using the same.
  • the TOC meter which measures with the amount of carbon contained in the organic substance is used.
  • the sample water of the analysis target is irradiated with ultraviolet light to oxidize and decompose the organic matter.
  • a low pressure mercury lamp which is easily available is used as a UV lamp which emits ultraviolet light having a wavelength shorter than 200 nm.
  • the sample water is oxidized by supplying power from the power source to turn on the UV lamp, and the total carbon is generated by the amount of carbon dioxide generated from total carbon (TC) in the sample water Measure the (TC) amount.
  • the ultraviolet light in the oxidized part of the sample leaks to the outside because it is dangerous if the ultraviolet light is exposed to the eyes, or because the generation of harmful ozone due to the ultraviolet light being irradiated to oxygen in the air is prevented.
  • the sample oxidation unit is used as a housing having a sealed structure, and a UV lamp is built in the housing (see Patent Document 1).
  • the UV lamp does not turn on due to a failure or an abnormality even though the power is turned on during the analysis measurement, the oxidation reaction is not performed and the erroneous measurement result will be shown. It is necessary to check if the lamp lights up while the power is on.
  • the lighting state can not be confirmed. Therefore, providing a lighting confirmation window made of a material that transmits visible light and does not transmit ultraviolet light in the case, or the sealed portion (lead wire extraction portion) of the UV lamp tube sealed with ultraviolet radiation gas, It is disclosed that it is made of a resin that shields light and transmits visible light, and this sealed portion is made to project from the housing so that visible light can be seen from the sealed portion when the UV lamp is lit. (See Patent Document 2).
  • a photo sensor for measuring the illuminance of the UV lamp in a housing (see Patent Document 1) of a sample oxidation unit incorporating a UV lamp is a lamp monitor It is carried out as attaching and confirming lighting.
  • the method of forming a window in the housing itself which incorporated a UV lamp, or using resin of the property which shields ultraviolet rays in the sealed part of a UV lamp tube and transmits visible light is the lighting confirmation of the UV lamp
  • the window needs to be sealed and sealed, and in the latter, a UV lamp of a special specification is required.
  • a method in which the UV lamp and the photosensor for lighting confirmation are juxtaposed in a sealed structure is also useful, it is necessary to separately provide a wiring for the photosensor and a driving power supply.
  • a signal indicating light-off may be erroneously transmitted although the UV lamp is normally turned on.
  • an object of the present invention is to provide a high frequency power UV lamp monitor capable of easily performing lighting confirmation of a high frequency power UV lamp built in a casing (sealed container) having a sealed structure.
  • Another object of the present invention is to provide a TOC meter using a high frequency power UV lamp monitor capable of removing mercury with a high frequency power UV lamp not using mercury and performing lighting confirmation by a simple method.
  • the high frequency power UV lamp monitor made to solve the above problems is a high frequency power UV attached to a high frequency power UV lamp that emits ultraviolet light by supplying high frequency energy from a high frequency power source through a feeder line.
  • a lamp monitor comprising: a core member made of a magnetically permeable material annularly attached around the feed line; an induction circuit wound around the core member for extracting high frequency induction current; and a detection element connected to the induction circuit And a detection circuit having
  • the term "high frequency power UV lamp” refers to a lamp in which discharge is performed by supplying high frequency energy having a frequency of 10 kHz or more, and specifically, ultraviolet light having a wavelength shorter than 200 nm by dielectric barrier discharge
  • the “detection element” may be any element as long as it can detect that a high frequency induction current flows in the induction circuit as a signal, and specifically, an LED that can detect it as a light
  • the total organic carbon meter according to the present invention made from another point of view is a total organic carbon meter provided with a sample oxidation unit that oxidizes carbon contained in a sample solution by irradiation with ultraviolet light and converts it into carbon dioxide.
  • the sample oxidation unit uses a high frequency power UV lamp that emits ultraviolet light by supplying high frequency energy from a high frequency power source via a feeder, and a high frequency power source for performing lighting confirmation of the high frequency power UV lamp
  • a UV lamp monitor is provided, and the high frequency power UV lamp monitor includes a core member made of a magnetically permeable material attached annularly around the feed line, and an induction circuit wound around the core member to take out high frequency induction current; And a detection element connected to the induction circuit.
  • the high frequency power UV lamp is turned on by supplying high frequency energy from the high frequency power source.
  • the feed line connecting the high frequency power source and the high frequency power source UV lamp a slight deviation in impedance matching occurs, and a common mode current is induced due to that.
  • impedance matching can theoretically be mitigated by incorporating a matching circuit, it is difficult to completely cancel out.
  • the high frequency power source UV lamp since the high frequency power source UV lamp only needs to be turned on, it is not necessary to provide a matching circuit unless the impedance matching is extremely deviated, and induction is performed by supplying high frequency energy without performing matching adjustment. You can get the current.
  • an electromagnetic wave is generated around the feed line by the high frequency energy, and is taken out as a high frequency induction current by the induction circuit wound around the core member around the feed line.
  • the high frequency induction current flows, it can be detected by the detection element connected to the induction circuit, so the lighting confirmation can be performed by this detection element.
  • the high frequency power UV lamp monitor of the present invention the high frequency power UV lamp is detected by detecting the high frequency induction current generated around the feeder outside the container while the high frequency power UV lamp is built in the closed container.
  • the lighting of can be easily confirmed. Therefore, there is no risk that ultraviolet rays enter the eyes of the user, and it is possible to safely check the lighting of the lamp in the closed container without leaking harmful ozone.
  • lighting confirmation can be performed without providing a wiring or a drive power source for separately extracting a signal from the inside of the sealed container to the outside, and a photo sensor etc.
  • the high-frequency power UV lamp monitor of the present invention as a TOC meter, it can be applied to the lighting confirmation of the high-frequency power UV lamp used in the sample oxidation section of the TOC meter. Can be used as a TOC meter.
  • FIG. 4 is a wiring diagram showing a modified embodiment of the detection circuit in FIG. 3A.
  • FIG. 1 is a block diagram showing a TOC meter for on-line measurement using a high frequency power UV lamp monitor according to an embodiment of the present invention.
  • 2 is a view showing the configuration of the sample oxidation unit in the TOC meter of FIG. 1
  • FIG. 3A is a view showing the wiring of a high frequency power UV lamp and a high frequency power UV lamp monitor included in the sample oxidation section.
  • the TOC meter in this example measures total carbon (TC) in the sample solution and inorganic carbon (IC) to calculate the difference. That is, total organic carbon (TOC) can be determined by the following equation (1).
  • TOC TC-IC (1)
  • the TOC meter 10 includes a channel L to which a sample solution is supplied from a sample inlet 11 for on-line measurement, a sample oxidizing unit 12 provided in the middle of the channel L, and a concentration of carbon dioxide And a liquid feed pump 14 such as a tube pump for feeding the sample liquid and passing the inside of the flow path L.
  • the flow path L is a flow path L1 from the sample inlet 11 to the sample oxidation portion 12, a flow path L2 in the sample oxidation portion 12, and a flow path L3 from the sample oxidation portion 12 to the conductivity cell 13 for convenience of description below.
  • the inside of the conductivity cell 13 is a channel L4.
  • the sample oxidation unit 12 incorporates an excimer UV lamp (high frequency power UV lamp) 20 connected to the high frequency power supply 19.
  • the excimer UV lamp 20 has a double tube structure as shown in FIG. 2, and the inner tube 21 is a part of the flow passage L which oxidizes the sample solution and sends it to the conductivity cell 13 (ie, the flow passage L2 ). Further, a rare gas (e.g., xenon) is enclosed in the outer tube 22.
  • Electrodes 22c and 22d are provided on the inner wall 22a and the outer wall 22b of the outer tube 22, respectively, and the electrodes 22c and 22d are connected to a high frequency power supply 19 of 10 kHz to 1000 kHz through a feed line 23. For example, when a high frequency power of 100 kHz is applied from the high frequency power source 19, the ultraviolet rays generated by the dielectric barrier discharge are irradiated toward the inner tube 21.
  • the excimer UV lamp 20 is accommodated in the closed container 24 so that air containing ultraviolet light and harmful ozone does not leak from the inside of the closed container 24 to the outside.
  • a detection circuit 30 for performing lighting confirmation is attached to the power supply line 23 connecting the high frequency power supply 19 and the excimer UV lamp 20 at a position located outside the closed container 24.
  • the detection circuit 30 includes a core member (toroidal core or ferrite core) 31 made of a magnetically permeable material and attached annularly to the outer periphery of the feed line 23, and wound around the core member 31 in a coil shape for extracting high frequency induction current. It comprises an induction circuit 32 and an LED (detection element) 33 connected to the induction circuit 32.
  • the induction circuit 32 is also provided with a rectification diode 34 and a protection resistor 35 for rectification and protection of the LED 33.
  • the sample solution When performing measurement using such a TOC meter 10, first, with the excimer UV lamp 20 turned off, the sample solution is continuously drawn into the flow path L by the liquid feed pump 14 at a constant flow rate, and the entire flow path L is completed. The sample solution is filled in (flow paths L1 to L4). At this time, since the sample liquid which has not been irradiated with the ultraviolet light, ie, the unoxidized sample liquid, flows in the conductivity cell 13 (flow path L4), the amount of carbon dioxide in the sample liquid at this time is ) Is detected by the conductivity cell 13.
  • the liquid feed pump 14 is stopped and the excimer UV lamp 20 is turned on, and ultraviolet irradiation is performed for about one minute in this state.
  • the total carbon (TC) of the sample liquid retained in the inner pipe 21 (flow path L2) of the sample oxidizing unit 12 is oxidized and changed to carbon dioxide.
  • the conductivity cell passage completion time of the sample solution oxidized in the flow passage L2 is from the conductivity cell passage completion time T1 of the unoxidized sample solution in the flow passage L3. Since the time to T2 is substantially determined by the relationship with the volume of the flow paths L2 and L3, the amount of carbon dioxide is continuously detected in the conductivity cell 13 until at least a time T1 and a period including the time T2 around it is elapsed. The peak value of the detection signal of the conductivity cell 13 detected during that time is acquired as a signal of total carbon (TC).
  • TC total carbon
  • the lighting confirmation flow of the excimer UV lamp 20, which is a feature of the present invention will be described.
  • the sample liquid is retained in the inner tube 21 (flow path L2) of the sample oxidizing unit 12, and high frequency power is supplied from the high frequency power supply 19 to discharge the excimer UV lamp 20.
  • an oxidation reaction occurs in all carbon (TC) in the sample liquid and is converted to carbon dioxide.
  • the measurement of the total carbon (TC) concentration is performed without performing the oxidation reaction, and an erroneous measurement result is indicated.
  • the user needs to confirm the lighting of the excimer UV lamp 20 using the detection circuit 30 before measurement.
  • the high frequency energy of the feed line 23 causes electromagnetic waves around the feed line 23. Occurs.
  • the generated electromagnetic waves are taken out as a high frequency induction current by the highly permeable core member 31 and the induction circuit 32 attached to the power supply line 23 at a position outside the closed container 24. Then, when the high frequency induction current flows to the LED 33 through the rectifying diode 34 connected to the induction circuit 32, the LED 33 emits light. Therefore, the lighting of the excimer UV lamp 20 can be confirmed by the lighting of the LED 33.
  • the detection circuit 30 described above may be another detection circuit as long as it is a circuit that extracts and detects an induced current.
  • An example is shown in FIG. 3B.
  • reference numeral 35 denotes a protective resistor
  • reference numeral 36 denotes a capacitor for AC passage
  • reference numeral 37 denotes a protective diode.
  • a resistance element may be used as a detection element to detect a voltage signal. In this case, the detected voltage signal is compared with a threshold voltage set in advance to determine the presence or absence of lighting, and if it is equal to or higher than the threshold value, it is determined that the light is on; May be notified by detection means such as a buzzer.
  • the sample solution passes through the inner tube 21 (flow path L2), so that only the inner tube 21 may be irradiated with ultraviolet light. Therefore, by forming the outer peripheral surface of the outer tube 22 with a material that does not transmit ultraviolet light, or by attaching or covering a material that does not transmit ultraviolet light to the outer tube 22, the outside of the ultraviolet light can be obtained without using the sealed container 24. It can be used safely without the problems of irradiation and harmful ozone generation.
  • the present invention can be used as a lamp monitor of a UV lamp used in a TOC meter.
  • TOC meter total organic carbon meter
  • sample introduction port 12 sample oxidation unit 13 conductivity cell 19 high frequency power supply 20 excimer UV lamp (high frequency power supply UV lamp) 21 inner pipe 22 outer pipe 22c, 22d electrode 23 feeder 24 sealed container 30 detection circuit 31 core member 32 induction circuit 33 LED (detection element) 34 Diode for rectification 35 Protection resistor 36 Capacitor 37 Protection diode

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Abstract

[Problem] To provide a high-frequency-power-source UV lamp monitor with which it is possible to easily confirm the illumination of a UV lamp built into a housing having a hermetically sealed structure. [Solution] A monitor provided as an accessory to a high-frequency-power-source UV lamp 20 that emits ultraviolet rays due to high-frequency energy being supplied from a high-frequency power source 19 via power supply wiring, wherein the monitor comprises a detection circuit that has a core member comprising a magnetically permeable material attached in an annular shape around the power supply wiring, an induction circuit that is wound about the core member and takes out a high-frequency induction current, and a detection element connected to the induction circuit.

Description

高周波電源ＵＶランプモニタおよびこれを用いた全有機炭素計High frequency power UV lamp monitor and total organic carbon meter using the same
　本発明は、ＵＶランプ（紫外線ランプ）に付設され、その点灯状態をモニタリングするＵＶランプモニタおよびこれを用いた全有機炭素計（以下「ＴＯＣ計」と称する）に関し、さらに詳細には、エキシマランプのような高周波電源を用いて紫外線を発光する高周波電源ＵＶランプに付設される高周波電源ＵＶランプモニタおよびこれを用いたＴＯＣ計に関する。 The present invention relates to a UV lamp monitor attached to a UV lamp (ultraviolet lamp) and monitoring the lighting state thereof, and a total organic carbon meter (hereinafter referred to as "TOC meter") using the same, more specifically, an excimer lamp The present invention relates to a high frequency power UV lamp monitor attached to a high frequency power UV lamp that emits ultraviolet light using a high frequency power source such as and a TOC meter using the same.
　排水等の試料水に含まれる有機物を測定する場合に、その有機物に含まれる炭素量で測定するＴＯＣ計が使用されている。湿式酸化法によるＴＯＣ計では、分析対象の試料水に紫外線を照射して有機物を酸化分解する試料酸化部が設けられている。この試料酸化部には、２００ｎｍより短波長の紫外線を発光するＵＶランプとして、入手が容易な低圧水銀ランプが使用されている。 When measuring the organic substance contained in sample water, such as waste water, the TOC meter which measures with the amount of carbon contained in the organic substance is used. In the TOC meter by the wet oxidation method, the sample water of the analysis target is irradiated with ultraviolet light to oxidize and decompose the organic matter. In this sample oxidation part, a low pressure mercury lamp which is easily available is used as a UV lamp which emits ultraviolet light having a wavelength shorter than 200 nm.
　ＵＶランプを使用するＴＯＣ計では、電源から電力を供給してＵＶランプを点灯させることで試料水に酸化反応を生じさせて、試料水中の全炭素（ＴＣ）から発生した二酸化炭素量により全炭素（ＴＣ）量を測定する。このとき、紫外線が眼に直射されると危険であることや、空気中の酸素に紫外線が照射されることによる有害オゾンの発生を防止する等の理由から、試料酸化部の紫外線が外部に漏れないようにするため、例えば、試料酸化部を密閉構造の筐体とし、その筐体内にＵＶランプが内蔵されるようにしている（特許文献１参照）。 In a TOC meter using a UV lamp, the sample water is oxidized by supplying power from the power source to turn on the UV lamp, and the total carbon is generated by the amount of carbon dioxide generated from total carbon (TC) in the sample water Measure the (TC) amount. At this time, the ultraviolet light in the oxidized part of the sample leaks to the outside because it is dangerous if the ultraviolet light is exposed to the eyes, or because the generation of harmful ozone due to the ultraviolet light being irradiated to oxygen in the air is prevented. In order to avoid such a problem, for example, the sample oxidation unit is used as a housing having a sealed structure, and a UV lamp is built in the housing (see Patent Document 1).
　一方、分析測定中に電源が入っているにもかかわらず、故障や異常によってＵＶランプが点灯しない場合には、酸化反応が行われず誤った測定結果を示すことになるため、測定開始前にＵＶランプが電源ＯＮ状態で点灯するかを確認する必要がある。 On the other hand, if the UV lamp does not turn on due to a failure or an abnormality even though the power is turned on during the analysis measurement, the oxidation reaction is not performed and the erroneous measurement result will be shown. It is necessary to check if the lamp lights up while the power is on.
　ところが、上記のような密閉構造の筐体に内蔵されたＵＶランプでは、点灯状態を確認することができない。そのため、筐体に可視光を透過して紫外線を透過しない材料からなる点灯確認窓を設けることや、紫外線放射ガスを封入したＵＶランプ管体の封止部分（リード線取り出し部分）を、紫外線を遮光して可視光を透過する性質の樹脂で形成し、この封止部分を筐体から突出させるようにして、ＵＶランプの点灯時に封止部から可視光を視認できるようにすることが開示されている（特許文献２参照）。 However, with the UV lamp incorporated in the above-described sealed structure, the lighting state can not be confirmed. Therefore, providing a lighting confirmation window made of a material that transmits visible light and does not transmit ultraviolet light in the case, or the sealed portion (lead wire extraction portion) of the UV lamp tube sealed with ultraviolet radiation gas, It is disclosed that it is made of a resin that shields light and transmits visible light, and this sealed portion is made to project from the housing so that visible light can be seen from the sealed portion when the UV lamp is lit. (See Patent Document 2).
　また、上記の特許文献に記載された点灯確認方法以外にも、例えばＵＶランプを内蔵した試料酸化部の筐体（特許文献１参照）内に、ＵＶランプの照度を測定するフォトセンサをランプモニタとして取り付けて点灯確認することが実施されている。 In addition to the lighting confirmation method described in the above-mentioned patent documents, for example, a photo sensor for measuring the illuminance of the UV lamp in a housing (see Patent Document 1) of a sample oxidation unit incorporating a UV lamp is a lamp monitor It is carried out as attaching and confirming lighting.
特開２００７－０４０７２９号公報JP, 2007-040729, A 特開２０１０－２６６２２２号公報JP, 2010-266222, A
　ＵＶランプを内蔵した筐体自体に窓を形成したり、ＵＶランプ管体の封止部分に紫外線を遮光して可視光を透過する性質の樹脂を使用したりする方法は、ＵＶランプの点灯確認方法としては有用だが、前者では窓を密封してシール構造とする必要があり、後者では特別仕様のＵＶランプが必要となる。
　また、密閉構造の筐体内にＵＶランプと点灯確認用のフォトセンサとを並置する方法も有用ではあるが、フォトセンサ用の配線や駆動電源を別途設ける必要が生じる。さらに、フォトセンサの故障時には、ＵＶランプが正常に点灯しているにもかかわらず消灯を示す信号を誤って発信してしまうおそれもある。 The method of forming a window in the housing itself which incorporated a UV lamp, or using resin of the property which shields ultraviolet rays in the sealed part of a UV lamp tube and transmits visible light is the lighting confirmation of the UV lamp Although useful as a method, in the former, the window needs to be sealed and sealed, and in the latter, a UV lamp of a special specification is required.
Further, although a method in which the UV lamp and the photosensor for lighting confirmation are juxtaposed in a sealed structure is also useful, it is necessary to separately provide a wiring for the photosensor and a driving power supply. Furthermore, at the time of failure of the photo sensor, there is also a possibility that a signal indicating light-off may be erroneously transmitted although the UV lamp is normally turned on.
　一方、ＴＯＣ計のＵＶランプには、上述した構造上の問題とは別に、脱水銀という環境面への配慮から、従来の低圧水銀ランプに代えて、水銀を用いないＵＶランプを使用することが望ましい。なお、２００ｎｍ以下の紫外線を得ることができ、しかも水銀不使用のＵＶランプとしては、キセノンアークランプを使用することが考えられるが、キセノンアークランプにより脱水銀を達成したとしても、密閉された筐体内のＵＶランプにおける点灯確認時の問題は解決できない。 On the other hand, it is possible to use a mercury-free UV lamp instead of the conventional low-pressure mercury lamp for the environmental consideration of mercury removal, apart from the above-mentioned structural problems, for the UV lamp of TOC meter desirable. In addition, although it is possible to use a xenon arc lamp as a UV lamp which can obtain ultraviolet rays of 200 nm or less and which does not use mercury, it is possible to use a sealed case even if mercury removal is achieved by the xenon arc lamp. The problem at the time of lighting confirmation in the UV lamp in the body can not be solved.
　そこで本発明は、密閉構造の筐体（密閉容器）に内蔵された高周波電源ＵＶランプの点灯確認を簡単に行うことができる高周波電源ＵＶランプモニタを提供することを目的とする。さらに、水銀不使用の高周波電源ＵＶランプによって脱水銀を図るとともに、簡単な方法で点灯確認を行うことができる高周波電源ＵＶランプモニタを用いたＴＯＣ計を提供することを目的とする。 Therefore, an object of the present invention is to provide a high frequency power UV lamp monitor capable of easily performing lighting confirmation of a high frequency power UV lamp built in a casing (sealed container) having a sealed structure. Another object of the present invention is to provide a TOC meter using a high frequency power UV lamp monitor capable of removing mercury with a high frequency power UV lamp not using mercury and performing lighting confirmation by a simple method.
　上記課題を解決するためになされた本発明に係る高周波電源ＵＶランプモニタは、給電線を介して高周波電源から高周波エネルギーを供給することにより紫外線を発光する高周波電源ＵＶランプに付設される高周波電源ＵＶランプモニタであって、前記給電線の周囲に環状に取り付けられる透磁性材料からなるコア部材と、前記コア部材に巻回され高周波誘導電流を取り出す誘導回路と、前記誘導回路に接続される検出素子とを有する検出回路を備えるようにしてある。
　ここで、「高周波電源ＵＶランプ」とは、周波数が１０ｋＨｚ以上の高周波エネルギーが供給されることにより放電が行われるランプを言い、具体的には、誘電体バリア放電により２００ｎｍよりも短波長の紫外線を発光するエキシマランプやキセノンフラッシュランプ等が該当する。
　また、「検出素子」は、誘導回路に高周波誘導電流が流れたことを信号として検知できる素子であればよく、具体的には発光信号として検知できるＬＥＤが望ましい。 The high frequency power UV lamp monitor according to the present invention made to solve the above problems is a high frequency power UV attached to a high frequency power UV lamp that emits ultraviolet light by supplying high frequency energy from a high frequency power source through a feeder line. A lamp monitor, comprising: a core member made of a magnetically permeable material annularly attached around the feed line; an induction circuit wound around the core member for extracting high frequency induction current; and a detection element connected to the induction circuit And a detection circuit having
Here, the term "high frequency power UV lamp" refers to a lamp in which discharge is performed by supplying high frequency energy having a frequency of 10 kHz or more, and specifically, ultraviolet light having a wavelength shorter than 200 nm by dielectric barrier discharge For example, an excimer lamp or a xenon flash lamp that emits
Further, the “detection element” may be any element as long as it can detect that a high frequency induction current flows in the induction circuit as a signal, and specifically, an LED that can detect it as a light emission signal is desirable.
　また、別の観点からなされた本発明に係る全有機炭素計は、試料液中に含まれる炭素を紫外線の照射により酸化して二酸化炭素に変換する試料酸化部を備えた全有機炭素計であって、前記試料酸化部は、給電線を介して高周波電源から高周波エネルギーを供給することにより紫外線を発光する高周波電源ＵＶランプが用いられるとともに、前記高周波電源ＵＶランプの点灯確認を行うための高周波電源ＵＶランプモニタが設けられ、前記高周波電源ＵＶランプモニタは、前記給電線の周囲に環状に取り付けられる透磁性材料からなるコア部材と、前記コア部材に巻回され高周波誘導電流を取り出す誘導回路と、前記誘導回路に接続される検出素子とを備えるようにしている。 Further, the total organic carbon meter according to the present invention made from another point of view is a total organic carbon meter provided with a sample oxidation unit that oxidizes carbon contained in a sample solution by irradiation with ultraviolet light and converts it into carbon dioxide. The sample oxidation unit uses a high frequency power UV lamp that emits ultraviolet light by supplying high frequency energy from a high frequency power source via a feeder, and a high frequency power source for performing lighting confirmation of the high frequency power UV lamp A UV lamp monitor is provided, and the high frequency power UV lamp monitor includes a core member made of a magnetically permeable material attached annularly around the feed line, and an induction circuit wound around the core member to take out high frequency induction current; And a detection element connected to the induction circuit.
　本発明によれば、高周波電源から高周波エネルギーが供給されることで高周波電源ＵＶランプが点灯する。このとき、高周波電源と高周波電源ＵＶランプとを接続する給電線にはインピーダンスマッチングのずれが多少発生し、その影響でコモンモード電流が誘導される。インピーダンスマッチングは、理論的にはマッチング整合回路を組み込むことにより軽減することができるものの、完全に打ち消すことは困難である。また、本発明では高周波電源ＵＶランプが点灯しさえすればよいので、極端にインピーダンスマッチングがずれていなければマッチング整合回路を設ける必要はなく、マッチング調整を行わずに高周波エネルギーを供給することで誘導電流を得ることができる。
　このようにすることで、高周波エネルギーによって給電線の周囲に電磁波が発生し、給電線の周囲のコア部材に巻回された誘導回路によって高周波誘導電流として取り出すことになる。このとき、高周波誘導電流が流れていれば誘導回路に接続される検出素子で検出できるため、この検出素子により点灯確認を行うことができる。 According to the present invention, the high frequency power UV lamp is turned on by supplying high frequency energy from the high frequency power source. At this time, in the feed line connecting the high frequency power source and the high frequency power source UV lamp, a slight deviation in impedance matching occurs, and a common mode current is induced due to that. Although impedance matching can theoretically be mitigated by incorporating a matching circuit, it is difficult to completely cancel out. Further, in the present invention, since the high frequency power source UV lamp only needs to be turned on, it is not necessary to provide a matching circuit unless the impedance matching is extremely deviated, and induction is performed by supplying high frequency energy without performing matching adjustment. You can get the current.
By doing this, an electromagnetic wave is generated around the feed line by the high frequency energy, and is taken out as a high frequency induction current by the induction circuit wound around the core member around the feed line. At this time, if the high frequency induction current flows, it can be detected by the detection element connected to the induction circuit, so the lighting confirmation can be performed by this detection element.
　本発明の高周波電源ＵＶランプモニタによれば、高周波電源ＵＶランプを密閉容器に内蔵したまま、容器外の給電線の周囲に発生する高周波誘導電流を検出素子で検出することにより、高周波電源ＵＶランプの点灯を容易に確認することができる。したがって、紫外線がユーザの眼に入る危険性がなく、また有害オゾンを漏出させることもなく安全に密閉容器内のランプの点灯確認を行うことができる。
　また、本発明の高周波電源ＵＶランプモニタによれば、密閉容器内から外部へ信号を取り出すための配線や駆動電源が別途必要なフォトセンサ等を設けることなく点灯確認を行うことができる。
　さらに、本発明の高周波電源ＵＶランプモニタを用いたＴＯＣ計とすることにより、ＴＯＣ計の試料酸化部に用いられる高周波電源ＵＶランプの点灯確認に適用することができ、しかも環境負荷の大きい水銀ランプを使用しないＴＯＣ計とすることができる。 According to the high frequency power UV lamp monitor of the present invention, the high frequency power UV lamp is detected by detecting the high frequency induction current generated around the feeder outside the container while the high frequency power UV lamp is built in the closed container. The lighting of can be easily confirmed. Therefore, there is no risk that ultraviolet rays enter the eyes of the user, and it is possible to safely check the lighting of the lamp in the closed container without leaking harmful ozone.
Further, according to the high frequency power UV lamp monitor of the present invention, lighting confirmation can be performed without providing a wiring or a drive power source for separately extracting a signal from the inside of the sealed container to the outside, and a photo sensor etc.
Furthermore, by using the high-frequency power UV lamp monitor of the present invention as a TOC meter, it can be applied to the lighting confirmation of the high-frequency power UV lamp used in the sample oxidation section of the TOC meter. Can be used as a TOC meter.
本発明に係る高周波電源ＵＶランプモニタを用いたＴＯＣ計を示す構成図。The block diagram which shows the TOC meter which used the high frequency electric-power UV lamp monitor which concerns on this invention. 図１の試料酸化部の構成を示す図。The figure which shows the structure of the sample oxidation part of FIG. 図１の試料酸化部における高周波電源ＵＶランプとモニタの配線図。The wiring diagram of the high frequency power-supply UV lamp and monitor in the sample oxidation part of FIG. 図３Ａにおける検出回路の変形実施例を示す配線図。FIG. 4 is a wiring diagram showing a modified embodiment of the detection circuit in FIG. 3A.
　以下、本発明に係る高周波電源ＵＶランプモニタをＴＯＣ計に適用した場合の実施例について図面を用いて説明する。図１は、本発明の一実施形態である高周波電源ＵＶランプモニタを用いたオンライン測定用のＴＯＣ計を示す構成図である。また、図２は図１のＴＯＣ計における試料酸化部の構成を示す図であり、図３Ａは試料酸化部に含まれる高周波電源ＵＶランプおよび高周波電源ＵＶランプモニタの配線を示す図である。 An embodiment in which the high frequency power UV lamp monitor according to the present invention is applied to a TOC meter will be described below with reference to the drawings. FIG. 1 is a block diagram showing a TOC meter for on-line measurement using a high frequency power UV lamp monitor according to an embodiment of the present invention. 2 is a view showing the configuration of the sample oxidation unit in the TOC meter of FIG. 1, and FIG. 3A is a view showing the wiring of a high frequency power UV lamp and a high frequency power UV lamp monitor included in the sample oxidation section.
　本実施例におけるＴＯＣ計では、試料液中の全炭素（ＴＣ）と、無機炭素（ＩＣ）とを測定し、差分を算出する。すなわち、次式（１）により全有機炭素（ＴＯＣ）を求めることができる。
　　ＴＯＣ＝ＴＣ－ＩＣ　・・・（１） The TOC meter in this example measures total carbon (TC) in the sample solution and inorganic carbon (IC) to calculate the difference. That is, total organic carbon (TOC) can be determined by the following equation (1).
TOC = TC-IC (1)
　図１に示すように、ＴＯＣ計１０は、オンライン測定用の試料導入口１１から試料液が供給される流路Ｌと、流路Ｌの途中に設けられた試料酸化部１２および二酸化炭素の濃度を導電率センサで検出する導電率セル１３と、試料液を送液して流路Ｌ内を通過させるチューブポンプ等の送液ポンプ１４とを備えている。
　流路Ｌは、以下において説明の便宜上、試料導入口１１から試料酸化部１２までを流路Ｌ１、試料酸化部１２内を流路Ｌ２、試料酸化部１２から導電率セル１３までを流路Ｌ３、導電率セル１３内を流路Ｌ４とする。 As shown in FIG. 1, the TOC meter 10 includes a channel L to which a sample solution is supplied from a sample inlet 11 for on-line measurement, a sample oxidizing unit 12 provided in the middle of the channel L, and a concentration of carbon dioxide And a liquid feed pump 14 such as a tube pump for feeding the sample liquid and passing the inside of the flow path L.
The flow path L is a flow path L1 from the sample inlet 11 to the sample oxidation portion 12, a flow path L2 in the sample oxidation portion 12, and a flow path L3 from the sample oxidation portion 12 to the conductivity cell 13 for convenience of description below. The inside of the conductivity cell 13 is a channel L4.
　試料酸化部１２には高周波電源１９に接続されるエキシマＵＶランプ（高周波電源ＵＶランプ）２０が内蔵されている。
　エキシマＵＶランプ２０は、図２に示すように二重管構造となっており、その内側管２１は、試料液を酸化させて導電率セル１３に送り出す流路Ｌの一部（すなわち流路Ｌ２）となっている。また、外側管２２内部には希ガス（例えばキセノン）が封入されている。外側管２２の内壁２２ａと外壁２２ｂにはそれぞれ電極２２ｃ、２２ｄが設けられており、電極２２ｃ、２２ｄは給電線２３を介して１０ｋＨｚ～１０００ｋＨｚの高周波電源１９に接続されている。例えば、高周波電源１９から１００ｋＨｚの高周波電力を印加すると、誘電体バリア放電により生じた紫外線が内側管２１に向けて照射されるようにしてある。 The sample oxidation unit 12 incorporates an excimer UV lamp (high frequency power UV lamp) 20 connected to the high frequency power supply 19.
The excimer UV lamp 20 has a double tube structure as shown in FIG. 2, and the inner tube 21 is a part of the flow passage L which oxidizes the sample solution and sends it to the conductivity cell 13 (ie, the flow passage L2 ). Further, a rare gas (e.g., xenon) is enclosed in the outer tube 22. Electrodes 22c and 22d are provided on the inner wall 22a and the outer wall 22b of the outer tube 22, respectively, and the electrodes 22c and 22d are connected to a high frequency power supply 19 of 10 kHz to 1000 kHz through a feed line 23. For example, when a high frequency power of 100 kHz is applied from the high frequency power source 19, the ultraviolet rays generated by the dielectric barrier discharge are irradiated toward the inner tube 21.
　このエキシマＵＶランプ２０は密閉容器２４に収容されており、密閉容器２４内から外部へ紫外線や有害オゾンを含む空気が漏れないようにしてある。 The excimer UV lamp 20 is accommodated in the closed container 24 so that air containing ultraviolet light and harmful ozone does not leak from the inside of the closed container 24 to the outside.
　また、高周波電源１９とエキシマＵＶランプ２０とを接続する給電線２３には、密閉容器２４の外側に位置する箇所に、点灯確認を行うための検出回路３０が取り付けられている。検出回路３０は、透磁性材料からなり給電線２３の外周へ環状に取り付けられるコア部材（トロイダルコアあるいはフェライトコア）３１と、コア部材３１に対しコイル状に巻回され高周波誘導電流を取り出すための誘導回路３２と、誘導回路３２に接続されるＬＥＤ（検出素子）３３から構成される。なお、誘導回路３２には、整流とＬＥＤ３３の保護のため、整流用ダイオード３４と保護抵抗３５も設けられている。 In addition, a detection circuit 30 for performing lighting confirmation is attached to the power supply line 23 connecting the high frequency power supply 19 and the excimer UV lamp 20 at a position located outside the closed container 24. The detection circuit 30 includes a core member (toroidal core or ferrite core) 31 made of a magnetically permeable material and attached annularly to the outer periphery of the feed line 23, and wound around the core member 31 in a coil shape for extracting high frequency induction current. It comprises an induction circuit 32 and an LED (detection element) 33 connected to the induction circuit 32. The induction circuit 32 is also provided with a rectification diode 34 and a protection resistor 35 for rectification and protection of the LED 33.
　このようなＴＯＣ計１０を用いて測定を行うときには、まず、エキシマＵＶランプ２０を消灯した状態で、送液ポンプ１４で流路Ｌに試料液を一定の流速で吸引し続け、流路Ｌ全体（流路Ｌ１～Ｌ４）に試料液を充填する。このとき、導電率セル１３（流路Ｌ４）には紫外線が照射されていない試料液、すなわち未酸化の試料液が流れているので、このときの試料液中の二酸化炭素量を無機炭素（ＩＣ）の信号として導電率セル１３により検出する。 When performing measurement using such a TOC meter 10, first, with the excimer UV lamp 20 turned off, the sample solution is continuously drawn into the flow path L by the liquid feed pump 14 at a constant flow rate, and the entire flow path L is completed. The sample solution is filled in (flow paths L1 to L4). At this time, since the sample liquid which has not been irradiated with the ultraviolet light, ie, the unoxidized sample liquid, flows in the conductivity cell 13 (flow path L4), the amount of carbon dioxide in the sample liquid at this time is ) Is detected by the conductivity cell 13.
　続いて、送液ポンプ１４を停止してエキシマＵＶランプ２０を点灯させ、この状態で紫外線照射を１分程度行う。これにより、試料酸化部１２の内側管２１（流路Ｌ２）内に滞留する試料液の全炭素（ＴＣ）が酸化されて二酸化炭素に変化する。
　その後、エキシマＵＶランプ２０を消灯し、送液ポンプ１４により一定の流速で試料液の吸引を再開すると、試料酸化部１２と導電率セル１３との間の流路Ｌ３内の試料液（未酸化試料液）がしばらく導電率セル１３内を流れた後に、試料酸化部１２（流路Ｌ２）で酸化された試料液が導電率セル１３に到達する。このときの二酸化炭素量を全炭素（ＴＣ）として検出する。 Subsequently, the liquid feed pump 14 is stopped and the excimer UV lamp 20 is turned on, and ultraviolet irradiation is performed for about one minute in this state. Thereby, the total carbon (TC) of the sample liquid retained in the inner pipe 21 (flow path L2) of the sample oxidizing unit 12 is oxidized and changed to carbon dioxide.
Thereafter, when the excimer UV lamp 20 is turned off and suction of the sample solution is resumed by the liquid feed pump 14 at a constant flow rate, the sample solution in the flow path L3 between the sample oxidizing unit 12 and the conductivity cell 13 (unoxidized After the sample solution has flowed in the conductivity cell 13 for a while, the sample solution oxidized in the sample oxidizing unit 12 (flow path L2) reaches the conductivity cell 13. The amount of carbon dioxide at this time is detected as total carbon (TC).
　より具体的には、一定の流速で試料液を吸引すると、流路Ｌ３の未酸化試料液の導電率セル通過完了時間Ｔ１から、流路Ｌ２で酸化された試料液の導電率セル通過完了時間Ｔ２までが、流路Ｌ２、Ｌ３の容積との関係によりほぼ定まることから、少なくとも時間Ｔ１から時間Ｔ２を中心としてその前後を含む期間が経過するまで導電率セル１３で二酸化炭素量を検出し続け、その間に検出した導電率セル１３の検出信号のピーク値を全炭素（ＴＣ）の信号として取得する。 More specifically, when the sample solution is sucked at a constant flow rate, the conductivity cell passage completion time of the sample solution oxidized in the flow passage L2 is from the conductivity cell passage completion time T1 of the unoxidized sample solution in the flow passage L3. Since the time to T2 is substantially determined by the relationship with the volume of the flow paths L2 and L3, the amount of carbon dioxide is continuously detected in the conductivity cell 13 until at least a time T1 and a period including the time T2 around it is elapsed. The peak value of the detection signal of the conductivity cell 13 detected during that time is acquired as a signal of total carbon (TC).
　そして、直前に取得した無機炭素（ＩＣ）および全炭素（ＴＣ）の値から、式（１）に基づいて全有機炭素（ＴＯＣ）濃度を算出する。以上で１回目の測定が完了する。 Then, from the values of inorganic carbon (IC) and total carbon (TC) acquired immediately before, the total organic carbon (TOC) concentration is calculated based on Formula (1). This completes the first measurement.
　続いて、１回目の測定完了後も送液ポンプ１４で試料液を吸引し続けると、導電率セル１３を含む全ての流路Ｌ（Ｌ１～Ｌ４）は、未酸化試料液に置換される。
　したがって、上記の測定フローを繰り返すことで、継続して２回目以降の全有機炭素（ＴＯＣ）濃度の測定を行うことができる。 Subsequently, when the sample solution is continuously sucked by the liquid feed pump 14 even after the first measurement is completed, all the channels L (L1 to L4) including the conductivity cell 13 are replaced with the unoxidized sample solution.
Therefore, by repeating the above-described measurement flow, it is possible to continuously measure the second and subsequent total organic carbon (TOC) concentrations.
　次に、本発明の特徴であるエキシマＵＶランプ２０の点灯確認フローについて説明する。
　全炭素（ＴＣ）濃度の測定を行うときには、試料酸化部１２の内側管２１（流路Ｌ２）内に試料液を滞留させるとともに、高周波電源１９から高周波電力を供給してエキシマＵＶランプ２０を放電させる。そして、エキシマＵＶランプ２０から照射される紫外線の作用により、試料液中の全炭素（ＴＣ）に酸化反応が生じて二酸化炭素に変換される。
　しかしながら、エキシマＵＶランプ２０の故障や不具合等により紫外線が照射されない場合には、酸化反応が行われないまま全炭素（ＴＣ）濃度の測定が行われることになり、誤った測定結果が示されるため、ユーザは測定前に検出回路３０を用いてエキシマＵＶランプ２０の点灯確認を行う必要がある。 Next, the lighting confirmation flow of the excimer UV lamp 20, which is a feature of the present invention, will be described.
When measuring the total carbon (TC) concentration, the sample liquid is retained in the inner tube 21 (flow path L2) of the sample oxidizing unit 12, and high frequency power is supplied from the high frequency power supply 19 to discharge the excimer UV lamp 20. Let Then, due to the action of ultraviolet light emitted from the excimer UV lamp 20, an oxidation reaction occurs in all carbon (TC) in the sample liquid and is converted to carbon dioxide.
However, when ultraviolet light is not irradiated due to a failure or a defect of the excimer UV lamp 20, the measurement of the total carbon (TC) concentration is performed without performing the oxidation reaction, and an erroneous measurement result is indicated. The user needs to confirm the lighting of the excimer UV lamp 20 using the detection circuit 30 before measurement.
　すなわち、試料酸化部１２における紫外線照射では、高周波電源１９から給電線２３を介してエキシマＵＶランプ２０に高周波エネルギーが供給されているが、給電線２３には高周波エネルギーによって給電線２３の周囲に電磁波が発生する。発生した電磁波は、給電線２３における密閉容器２４の外側の位置に取り付けられた透磁性の高いコア部材３１および誘導回路３２によって、高周波誘導電流として取り出される。そしてこの高周波誘導電流が、誘導回路３２に接続された整流用ダイオード３４を介してＬＥＤ３３に流れることでＬＥＤ３３が発光する。したがって、ＬＥＤ３３の点灯によりエキシマＵＶランプ２０の点灯を確認することができる。 That is, although high frequency energy is supplied from the high frequency power supply 19 to the excimer UV lamp 20 through the feed line 23 in the ultraviolet irradiation in the sample oxidation unit 12, the high frequency energy of the feed line 23 causes electromagnetic waves around the feed line 23. Occurs. The generated electromagnetic waves are taken out as a high frequency induction current by the highly permeable core member 31 and the induction circuit 32 attached to the power supply line 23 at a position outside the closed container 24. Then, when the high frequency induction current flows to the LED 33 through the rectifying diode 34 connected to the induction circuit 32, the LED 33 emits light. Therefore, the lighting of the excimer UV lamp 20 can be confirmed by the lighting of the LED 33.
　以上、本発明の実施例について具体的に説明したが、本発明は必ずしも上記の実施形態のみに限定されるものではなく、本発明の趣旨を逸脱しない範囲で適宜修正、変更できることは言うまでもない。以下にその変形実施例について説明する。 As mentioned above, although the Example of this invention was described concretely, this invention is not necessarily limited only to said embodiment, It can not be overemphasized that it can modify | modify and change suitably in the range which does not deviate from the meaning of this invention. The modified embodiment will be described below.
　上記の検出回路３０は、誘導電流を取り出して検出する回路でさえあれば他の検出回路であってもよい。例として図３Ｂに示す。図３Ｂの検出回路３０’における符号３５は保護抵抗、符号３６は交流通過用のコンデンサ、符号３７は保護用ダイオードを示している。
　また、上述した実施形態において、抵抗素子を検出素子として使用し、電圧信号を検出するようにしてもよい。この場合、検出された電圧信号を、点灯の有無を判定するために予め設定した閾値電圧と比較して、閾値以上であれば点灯、閾値未満であれば消灯と判定するようにして、判定結果をブザー等の検知手段で知らせるようにしてもよい。 The detection circuit 30 described above may be another detection circuit as long as it is a circuit that extracts and detects an induced current. An example is shown in FIG. 3B. In the detection circuit 30 'of FIG. 3B, reference numeral 35 denotes a protective resistor, reference numeral 36 denotes a capacitor for AC passage, and reference numeral 37 denotes a protective diode.
Further, in the above-described embodiment, a resistance element may be used as a detection element to detect a voltage signal. In this case, the detected voltage signal is compared with a threshold voltage set in advance to determine the presence or absence of lighting, and if it is equal to or higher than the threshold value, it is determined that the light is on; May be notified by detection means such as a buzzer.
　また、上記の実施形態で用いたエキシマＵＶランプ２０では、試料液は内側管２１（流路Ｌ２）を通過することになるため、内側管２１にのみ紫外線を照射すればよい。したがって、紫外線を透過しない材料で外側管２２の外周面を形成したり、外側管２２に対して紫外線を透過しない材料を付着させたり覆ったりすることで、密閉容器２４を用いることなく紫外線の外部照射や有害オゾン発生の問題をなくして、安全に使用することができる。 Further, in the excimer UV lamp 20 used in the above-described embodiment, the sample solution passes through the inner tube 21 (flow path L2), so that only the inner tube 21 may be irradiated with ultraviolet light. Therefore, by forming the outer peripheral surface of the outer tube 22 with a material that does not transmit ultraviolet light, or by attaching or covering a material that does not transmit ultraviolet light to the outer tube 22, the outside of the ultraviolet light can be obtained without using the sealed container 24. It can be used safely without the problems of irradiation and harmful ozone generation.
　本発明は、ＴＯＣ計に使用されるＵＶランプのランプモニタとして利用することができる。 The present invention can be used as a lamp monitor of a UV lamp used in a TOC meter.
１０　ＴＯＣ計（全有機炭素計）
１１　試料導入口
１２　試料酸化部
１３　導電率セル
１９　高周波電源
２０　エキシマＵＶランプ（高周波電源ＵＶランプ）
２１　内側管
２２　外側管
２２ｃ、２２ｄ　電極
２３　給電線
２４　密閉容器
３０　検出回路
３１　コア部材
３２　誘導回路
３３　ＬＥＤ（検出素子）
３４　整流用ダイオード
３５　保護抵抗
３６　コンデンサ
３７　保護用ダイオード 10 TOC meter (total organic carbon meter)
11 sample introduction port 12 sample oxidation unit 13 conductivity cell 19 high frequency power supply 20 excimer UV lamp (high frequency power supply UV lamp)
21 inner pipe 22 outer pipe 22c, 22d electrode 23 feeder 24 sealed container 30 detection circuit 31 core member 32 induction circuit 33 LED (detection element)
34 Diode for rectification 35 Protection resistor 36 Capacitor 37 Protection diode

Claims (3)

  1. 　給電線を介して高周波電源から高周波エネルギーを供給することにより紫外線を発光する高周波電源ＵＶランプに付設される高周波電源ＵＶランプモニタであって、
    　前記給電線の周囲に環状に取り付けられる透磁性材料からなるコア部材と、前記コア部材に巻回され高周波誘導電流を取り出す誘導回路と、前記誘導回路に接続される検出素子とを有する検出回路を備えた高周波電源ＵＶランプモニタ。     A high frequency power supply UV lamp monitor attached to a high frequency power supply UV lamp that emits ultraviolet light by supplying high frequency energy from a high frequency power supply via a feeder.
    A detection circuit having a core member made of a magnetically permeable material annularly attached around the feed line, an induction circuit wound around the core member and extracting high frequency induction current, and a detection element connected to the induction circuit; Equipped with high frequency power UV lamp monitor.
  2. 　前記検出素子がＬＥＤである請求項１に記載の高周波電源ＵＶランプモニタ。 The high frequency power UV lamp monitor according to claim 1, wherein the detection element is an LED.
  3. 　試料液中に含まれる炭素を紫外線の照射により酸化して二酸化炭素に変換する試料酸化部を備えた全有機炭素計であって、
    　前記試料酸化部は、給電線を介して高周波電源から高周波エネルギーを供給することにより紫外線を発光する高周波電源ＵＶランプが用いられるとともに、前記高周波電源ＵＶランプの点灯確認を行うための高周波電源ＵＶランプモニタが設けられ、
    　前記高周波電源ＵＶランプモニタは、前記給電線の周囲に環状に取り付けられる透磁性材料からなるコア部材と、前記コア部材に巻回され高周波誘導電流を取り出す誘導回路と、前記誘導回路に接続される検出素子とを有する検出回路を備えた全有機炭素計。     A total organic carbon meter comprising a sample oxidation unit that oxidizes carbon contained in a sample solution by irradiation with ultraviolet light and converts it into carbon dioxide,
    The sample oxidation unit uses a high frequency power UV lamp that emits ultraviolet light by supplying high frequency energy from a high frequency power source through a feeder, and a high frequency power UV lamp for performing lighting confirmation of the high frequency power UV lamp A monitor is provided
    The high frequency power UV lamp monitor is connected to a core member made of a magnetically permeable material annularly attached around the feed line, an induction circuit wound around the core member for extracting high frequency induction current, and the induction circuit A total organic carbon meter comprising a detection circuit having a detection element.
PCT/JP2018/031895 2017-09-04 2018-08-29 High-frequency-power-source uv lamp monitor, and total organic carbon meter in which same is used WO2019044881A1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6444474B1 (en) * 1998-04-22 2002-09-03 Eltron Research, Inc. Microfluidic system for measurement of total organic carbon
JP2007040729A (en) 2005-08-01 2007-02-15 Shimadzu Corp Total organocarbon meter
JP2008008848A (en) * 2006-06-30 2008-01-17 Kobe Steel Ltd Ultraviolet radiation monitoring system and ultraviolet irradiation device
JP2010266222A (en) 2009-05-12 2010-11-25 Shimadzu Corp Ultraviolet irradiation device, and whole organic carbon measuring apparatus using the same

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5750073A (en) * 1990-03-02 1998-05-12 Sievers Instruments, Inc. Reagentless oxidation reactor in a carbon measuring system
JP2854797B2 (en) * 1994-02-22 1999-02-03 中国電力株式会社 Electric wire sign light
JP3268447B2 (en) * 1999-06-02 2002-03-25 独立行政法人産業技術総合研究所 Photoreaction device with built-in photoreaction tube
JP2004158373A (en) * 2002-11-08 2004-06-03 Orc Mfg Co Ltd Excimer lamp
CN100550279C (en) * 2002-12-06 2009-10-14 株式会社Orc制作所 Excited quasi-molecular lampbulb
US8747753B2 (en) * 2008-08-18 2014-06-10 Sanuvox Technologies Inc. Controller for UV light purification system
US20120039750A1 (en) * 2009-04-24 2012-02-16 Shimadzu Corporation Total organic carbon meter provided with system blank function

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6444474B1 (en) * 1998-04-22 2002-09-03 Eltron Research, Inc. Microfluidic system for measurement of total organic carbon
JP2007040729A (en) 2005-08-01 2007-02-15 Shimadzu Corp Total organocarbon meter
JP2008008848A (en) * 2006-06-30 2008-01-17 Kobe Steel Ltd Ultraviolet radiation monitoring system and ultraviolet irradiation device
JP2010266222A (en) 2009-05-12 2010-11-25 Shimadzu Corp Ultraviolet irradiation device, and whole organic carbon measuring apparatus using the same

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP3680655A4 *

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