WO2019033293A1 - 一种回音壁模式谐振器及其制备方法 - Google Patents

一种回音壁模式谐振器及其制备方法 Download PDF

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Publication number
WO2019033293A1
WO2019033293A1 PCT/CN2017/097639 CN2017097639W WO2019033293A1 WO 2019033293 A1 WO2019033293 A1 WO 2019033293A1 CN 2017097639 W CN2017097639 W CN 2017097639W WO 2019033293 A1 WO2019033293 A1 WO 2019033293A1
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Prior art keywords
waveguide
fiber
hollow
cavity
end surface
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English (en)
French (fr)
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廖常锐
王义平
林初跑
王英
何俊
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Shenzhen University
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Shenzhen University
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Priority to US16/076,585 priority Critical patent/US11092747B2/en
Priority to PCT/CN2017/097639 priority patent/WO2019033293A1/zh
Publication of WO2019033293A1 publication Critical patent/WO2019033293A1/zh
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29331—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
    • G02B6/29335—Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity
    • G02B6/29338—Loop resonators
    • G02B6/29341—Loop resonators operating in a whispering gallery mode evanescently coupled to a light guide, e.g. sphere or disk or cylinder
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/255—Splicing of light guides, e.g. by fusion or bonding
    • G02B6/2551—Splicing of light guides, e.g. by fusion or bonding using thermal methods, e.g. fusion welding by arc discharge, laser beam, plasma torch
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device

Definitions

  • the invention belongs to the technical field of optical devices, and in particular relates to an whispering gallery mode resonator and a preparation method thereof.
  • the whispering gallery mode resonator limits the light in the cavity through continuous total reflection at the boundary of the dielectric cavity. It has important application prospects in the fields of nonlinear optics, cavity quantum electrodynamics and ultra-high resolution detection.
  • the whispering gallery mode resonator there are mainly four methods for preparing the whispering gallery mode resonator, namely a prism coupling method, a micro-nano fiber coupling method, a fiber tip coupling method, and a plane waveguide coupling method, wherein the whispering wall prepared by the prism coupling method is used.
  • the structure of the mode resonator is complicated, which is not conducive to light integration; the structure of the whispering gallery mode resonator prepared by the micro-nano fiber coupling method is unstable; the structure of the whispering gallery mode resonator prepared by the fiber tip coupling method is complex and unstable;
  • the edgy wall mode resonator prepared by the method is not conducive to light integration.
  • the prepared whispering gallery mode resonator has a complicated structure, structural instability, and is not conducive to light integration.
  • the main object of the present invention is to provide an whispering gallery mode resonator, which aims to solve the problem that the whispering gallery mode resonators which are prepared in the prior art are complicated in structure, unstable in structure, and unfavorable for light integration.
  • the present invention provides an whispering gallery mode resonator, the whispering gallery mode resonator comprising: a hollow core fiber, a waveguide, a waveguide resonator, a first single mode fiber, and a second single mode fiber;
  • the waveguide and the waveguide cavity are located in the hollow fiber;
  • An end surface of the first single-mode optical fiber is connected to an end surface of the hollow fiber by a welding process, and an end surface of the second single-mode fiber is connected to another end surface of the hollow fiber by a welding process;
  • the waveguide includes an input optical waveguide, an inner surface waveguide and an output optical waveguide, and both end faces of the input optical waveguide are respectively connected to an end surface of the core of the first single mode fiber and an end surface of the inner surface waveguide, Both end faces of the output optical waveguide are respectively connected to one end face of the core of the second single mode fiber and the other end face of the inner surface waveguide;
  • the inner surface waveguide has an evanescent field.
  • the material of the hollow core fiber is pure quartz, and a hollow cavity is disposed inside the hollow core fiber.
  • the hollow cavity is a rectangular hollow cavity.
  • the waveguide cavity is a microsphere resonator.
  • the waveguide resonator has a refractive index greater than 1.444.
  • the waveguide cavity is fixed to the inner wall of the rectangular hollow cavity by a weak arc discharge annealing process.
  • the input optical waveguide and the output optical waveguide are S-shaped waveguides which are written by a femtosecond laser direct writing technique.
  • the present invention also provides a method of fabricating an whispering gallery mode resonator, the method for preparing the whispering gallery mode resonator according to any one of claims 1 to 7, the method comprising:
  • An inner surface waveguide having an evanescent field is written in the hollow core fiber device by the femtosecond laser direct writing technique, wherein an end surface of the inner surface waveguide is connected to an end surface of the input optical waveguide;
  • An output optical waveguide is written inside the hollow core fiber device by the femtosecond laser direct writing technique, wherein an end surface of the output optical waveguide is connected to another end surface of the inner surface waveguide.
  • the step of performing the welding process on the hollow core fiber to obtain the hollow core fiber device comprises:
  • One end surface of the hollow fiber is welded to the first single mode fiber, and the first single mode fiber is cut at a preset length from the fusion point to obtain a hollow fiber with a single mode fiber welded to the end face.
  • the other end surface of the hollow fiber with one end face welded to the single mode fiber and fixed to the waveguide cavity is welded to the second single mode fiber, and the second single mode is at a preset length from the fusion splice point
  • the optical fiber is subjected to a cutting process to obtain the hollow fiber device in which both end faces are fused with a single mode fiber and the waveguide cavity is fixed.
  • the step of fixing the waveguide cavity in the hollow cavity of the hollow fiber comprises:
  • the waveguide cavity is subjected to a weak arc discharge annealing process by the fusion splicer, and the waveguide cavity is fixed in a hollow cavity of the hollow fiber.
  • the whispering gallery mode resonator comprises: a hollow core fiber, a waveguide, a waveguide resonator, a first single mode fiber and a second single mode fiber, and the waveguide and the waveguide cavity are located in the hollow core fiber
  • the first end of the first single-mode fiber is connected to one end surface of the hollow fiber by a welding process
  • one end of the second single-mode fiber is connected to the other end surface of the hollow fiber by a welding process
  • the waveguide includes an input optical waveguide and the inner end.
  • a surface waveguide and an output optical waveguide wherein both end faces of the input optical waveguide are respectively connected to an end surface of the core of the first single mode fiber and an end surface of the inner surface waveguide, and the end faces of the output optical waveguide are respectively respectively connected to the fibers of the second single mode fiber
  • One end face of the core and the other end face of the inner surface waveguide are connected, and the inner surface waveguide has an evanescent field.
  • an end surface of the first single-mode fiber and the second single-mode fiber is connected to both end faces of the hollow fiber by a welding process, and the input optical waveguide is respectively connected with one end of the core of the first single-mode fiber.
  • an end surface of the inner surface waveguide is connected, and the output optical waveguide is respectively connected to one end surface of the core of the second single mode fiber and the other end surface of the inner surface waveguide, and the structure of the whispering gallery mode resonator prepared by the above connection method is more stable and Simple, and the optical coupling between the inner surface waveguide and the waveguide resonator is realized by the evanescent field of the inner surface waveguide, which is advantageous for light integration.
  • FIG. 1 is a plan view showing the structure of an whispering gallery mode resonator according to a first embodiment of the present invention
  • FIG. 2 is a side view showing the structure of an whispering gallery mode resonator according to a first embodiment of the present invention
  • FIG. 3 is a schematic flow chart of a method for preparing a whispering gallery mode resonator according to a second embodiment of the present invention
  • FIG. 4 is a schematic flow chart of the refinement step of step S301 in the embodiment shown in FIG. 3.
  • the method includes: a hollow core fiber 101, a waveguide 102, a waveguide resonator 103, a first single mode fiber 104, and a second single mode fiber 105;
  • the waveguide 102 and the waveguide resonator 103 are located in the hollow fiber 101;
  • An end surface of the first single-mode optical fiber 104 is connected to one end surface of the hollow fiber 101 by a welding process, and an end surface of the second single-mode fiber 105 is connected to the other end surface of the hollow fiber 101 by a welding process;
  • the waveguide 102 includes an input optical waveguide 1021, an inner surface waveguide 1022, and an output optical waveguide 1023.
  • the two end faces of the input optical waveguide 1021 are respectively connected to one end surface of the core 1041 of the first single-mode optical fiber 104 and one end surface of the inner surface waveguide 1022.
  • Both end faces of the output optical waveguide 1023 are respectively connected to one end face of the core 1051 of the second single mode fiber 105 and the other end face of the inner surface waveguide 1022;
  • the inner surface waveguide 1022 has an evanescent field.
  • the first single-mode fiber 104 is composed of a core 1041 and a cladding 1042
  • the second single-mode fiber 105 is composed of a core 1051 and a cladding 1052.
  • the material of the hollow fiber 101 is pure quartz.
  • the core fiber 101 is internally provided with a hollow cavity 1011.
  • the hollow fiber 101 has no core and cladding, and light cannot be transmitted through pure quartz.
  • the hollow cavity 1011 is a rectangular hollow cavity.
  • the waveguide cavity 103 represents a cavity in which light energy can be stored.
  • the waveguide resonator 103 is a microsphere resonator, and the refractive index of the waveguide resonator 103 is greater than 1.444.
  • the size of the microsphere resonator is matched with the size of the rectangular hollow cavity, and the microsphere resonator can be placed into the rectangular hollow. In the cavity, the microsphere resonator can be fixed to the inner wall of the rectangular hollow cavity by weak arc discharge annealing treatment.
  • the center point of the core 1041 of the first single mode fiber 104 and the core 1051 of the second single mode fiber 105 is equal to the center point of the hollow fiber 101 in the YZ plane.
  • the YZ plane is a plane formed by the Y axis and the Z axis in the three-dimensional stereoscopic image.
  • the input optical waveguide 1021 and the output optical waveguide 1023 are S-shaped waveguides written by femtosecond laser direct writing technology, and the inner surface waveguide 1022 is also written by femtosecond laser direct writing technology, and the inner surface waveguide is written. It is linear, and the inner surface waveguide 1022 does not meet the inner surface of the rectangular hollow cavity, and is separated by pure quartz.
  • the waveguide 102 and the pure quartz constitute a core and a cladding structure
  • the light in the first single mode fiber 104 is coupled into the inner surface waveguide 1022 by the input optical waveguide 1021 because the inner surface waveguide 1022 has
  • the evanescent field utilizes the evanescent field of the inner surface waveguide 1022 to effect coupling between the inner surface waveguide 1022 and the waveguide cavity 103, coupling light from the inner surface waveguide 1022 into the waveguide cavity 103, and the light is relayed in the waveguide cavity 103.
  • the whispering gallery mode resonator includes: a hollow core fiber 101, a waveguide 102, a waveguide resonator 103, a first single mode fiber 104, and a second single mode fiber 105.
  • the waveguide 102 and the waveguide resonator 103 are located in the air.
  • one end surface of the first single-mode fiber 104 is connected to one end surface of the hollow fiber 101 by a welding process
  • one end surface of the second single-mode fiber 105 is connected to the other end surface of the hollow fiber 101 by a welding process.
  • the waveguide 102 includes an input optical waveguide 1021, an inner surface waveguide 1022, and an output optical waveguide 1023.
  • the two end faces of the input optical waveguide 1021 are respectively connected to one end surface of the core 1041 of the first single-mode optical fiber 104 and one end surface of the inner surface waveguide 1022.
  • Both end faces of the output optical waveguide 1023 are respectively connected to one end face of the core 1051 of the second single mode fiber 105 and the other end face of the inner surface waveguide 1022, and the inner surface waveguide 1022 has an evanescent field.
  • one end surface of the first single mode fiber 104 and the second single mode fiber 105 are connected to both end faces of the hollow fiber 101 by a welding process, and the input optical waveguide 1021 and the first single mode fiber 104 are respectively One end surface of the core 1041 and one end surface of the inner surface waveguide 1022 are connected, and the output optical waveguide 1023 is respectively connected to one end surface of the core 1051 of the second single mode fiber 105 and the other end surface of the inner surface waveguide 1022 through the above connection manner.
  • the prepared whispering gallery mode resonator structure is more stable and simple, and the optical coupling between the inner surface waveguide 1022 and the waveguide resonator 103 is realized by the evanescent field of the inner surface waveguide 1022, which facilitates light integration.
  • FIG. 3 is a schematic flowchart of a method for preparing a whispering gallery mode resonator according to a second embodiment of the present invention, including:
  • Step S301 performing a welding process on the hollow core fiber 101 to obtain a hollow core fiber device
  • FIG. 4 is a schematic flowchart of the refinement step of step S301 in the second embodiment of the present invention, including:
  • Step S401 welding one end surface of the hollow core fiber 101 to the first single-mode optical fiber 104, and cutting the first single-mode optical fiber 104 at a preset length from the fusion-bonding point to obtain a single-mode optical fiber with a single end face welded.
  • the preset length can be set according to requirements, for example, 100 ⁇ m, 200 ⁇ m, 300 ⁇ m, 1 cm, 2 cm, and the like.
  • Step S402 fixing the waveguide cavity 103 in the hollow cavity 1011 of the hollow fiber 101;
  • the waveguide resonator 103 is placed in the hollow cavity 1011 of the hollow fiber 101 by using a taper fiber, a microscope, and a micromanipulator, and the waveguide cavity 103 is pushed into the fusion machine by using a taper fiber.
  • the waveguide cavity 103 is subjected to weak arc discharge annealing treatment by a fusion splicer, and the waveguide cavity 103 is fixed in the hollow cavity 1011 of the hollow fiber 101.
  • Step S403 welding another end face of the hollow fiber 101 with a single-mode fiber and a waveguide cavity 103 fixed to the second single-mode fiber 105, and at a preset length from the fusion point, to the second
  • the single mode fiber 105 is subjected to a cutting process to obtain a hollow fiber device in which a single mode fiber is welded to both end faces and the waveguide cavity 103 is fixed.
  • Step S302 writing the input optical waveguide 1021 inside the hollow core fiber device by femtosecond laser direct writing technology
  • Step S303 writing an inner surface waveguide 1022 having an evanescent field in the hollow fiber device by a femtosecond laser direct writing technique, wherein an end surface of the inner surface waveguide 1022 is connected to an end surface of the input optical waveguide 1021.
  • Step S304 writing an output optical waveguide 1023 in the hollow core fiber device by a femtosecond laser direct writing technique, wherein an end surface of the output optical waveguide 1023 is connected to the other end surface of the inner surface waveguide 1022.
  • the hollow core optical fiber 101 is welded to obtain a hollow core optical fiber device, and the input optical waveguide 1021 is written in the hollow core optical fiber device by femtosecond laser direct writing technology, and the femtosecond laser direct writing technology is used in
  • the hollow core fiber device internally writes an inner surface waveguide 1022 having an evanescent field, wherein an end surface of the inner surface waveguide 1022 is connected to one end surface of the input optical waveguide 1021, and is written inside the hollow core fiber device by femtosecond laser direct writing technology.
  • An output optical waveguide 1023 is formed in which one end surface of the output optical waveguide 1023 is connected to the other end surface of the inner surface waveguide 1022.
  • the input optical waveguide 1021, the inner surface waveguide 1022 and the output optical waveguide 1023 are written in the hollow core fiber device by femtosecond laser direct writing technology, and the two end faces of the inner surface waveguide 1022 and the input optical waveguide respectively 1021 and one end face of the second S-type waveguide are connected, the whispering gallery mode resonator structure prepared by the above connection method is more stable and simple, and the inner surface waveguide 1022 and the waveguide cavity are realized by the evanescent field of the inner surface waveguide 1022.
  • Optical coupling between 103 facilitates light integration.

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  • General Physics & Mathematics (AREA)
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Abstract

本发明公开了一种回音壁模式谐振器及其制备方法，包括：空芯光纤、波导、波导谐振腔、第一单模光纤及第二单模光纤，波导及波导谐振腔位于空芯光纤中，第一单模光纤一端面通过熔接处理与空芯光纤一端面相连，第二单模光纤一端面通过熔接处理与空芯光纤另一端面相连，波导包括输入光波导、内表面波导及输出光波导，输入光波导两端面分别与第一单模光纤纤芯的一端面及内表面波导一端面相连接，输出光波导两端面分别与第二单模光纤纤芯的一端面及内表面波导另一端面相连接，内表面波导具有倏逝场，上述连接方式制备的回音壁模式谐振器结构更稳定且简单，并且，利用内表面波导的倏逝场实现内表面波导与波导谐振腔之间的光耦合，有利于光集成。

Description

一种回音壁模式谐振器及其制备方法 技术领域
本发明属于光器件技术领域，尤其涉及一种回音壁模式谐振器及其制备方法。
背景技术
回音壁模式谐振器通过介质腔边界的连续全反射将光限制在谐振腔内，其在非线性光学、腔量子电动力学、超高分辨率检测等领域具有重要的应用前景。
现有技术中，制备回音壁模式谐振器的方法主要有4种，分别是棱镜耦合法、微纳光纤耦合法、光纤尖端耦合法及平面波导耦合法，其中，通过棱镜耦合法制备的回音壁模式谐振器结构复杂，不利于光集成；通过微纳光纤耦合法制备的回音壁模式谐振器结构不稳定；通过光纤尖端耦合法制备的回音壁模式谐振器结构复杂且不稳定；通过平面波导耦合法制备的回音壁模式谐振器不利于光集成。
因此，现有技术中存在着制备的回音壁模式谐振器结构复杂、结构不稳定以及不利于光集成的问题。
 技术问题
本发明的主要目的在于提出一种回音壁模式谐振器，旨在解决现有技术中存在的制备的回音壁模式谐振器结构复杂、结构不稳定以及不利于光集成的问题。
技术解决方案
为实现上述目的，本发明提供一种回音壁模式谐振器，所述回音壁模式谐振器包括：空芯光纤、波导、波导谐振腔、第一单模光纤及第二单模光纤；
所述波导及所述波导谐振腔位于所述空芯光纤中；
所述第一单模光纤的一端面通过熔接处理与所述空芯光纤的一端面相连，所述第二单模光纤的一端面通过熔接处理与所述空芯光纤的另一端面相连；
所述波导包括输入光波导、内表面波导及输出光波导，所述输入光波导的两端面分别与所述第一单模光纤的纤芯的一端面及所述内表面波导的一端面相连接，所述输出光波导的两端面分别与所述第二单模光纤的纤芯的一端面及所述内表面波导的另一端面相连接；
所述内表面波导具有倏逝场。
进一步地，所述空芯光纤的材料为纯石英，所述空芯光纤内部设有一个空心腔。
进一步地，所述空心腔为矩形空心腔。
进一步地，所述波导谐振腔为微球谐振腔。
进一步地，所述波导谐振腔的折射率大于1.444。
进一步地，所述波导谐振腔通过弱电弧放电退火处理固定于所述矩形空心腔的内壁上。
进一步地，所述输入光波导及所述输出光波导是通过飞秒激光直写技术写制而成的S型波导。
为实现上述目的，本发明还提供一种回音壁模式谐振器的制备方法，所述方法用于制备如权利要求1至7任意一项所述的回音壁模式谐振器，所述方法包括：
对空芯光纤进行熔接处理，得到空芯光纤器件；
通过飞秒激光直写技术在所述空芯光纤器件内部写制输入光波导；
通过所述飞秒激光直写技术在所述空芯光纤器件内部写制具有倏逝场的内表面波导，其中，所述内表面波导的一端面与所述输入光波导的一端面相连接；
通过所述飞秒激光直写技术在所述空芯光纤器件内部写制输出光波导，其中，所述输出光波导的一端面与所述内表面波导的另一端面相连接。
进一步地，所述对空芯光纤进行熔接处理，得到空芯光纤器件的步骤包括：
将空芯光纤的一端面与第一单模光纤进行熔接，且在距离熔接点预置长度处，对所述第一单模光纤进行切断处理，得到一端面熔接有单模光纤的空芯光纤；
将波导谐振腔固定在所述空芯光纤的空心腔中；
将一端面熔接有单模光纤且固定了所述波导谐振腔的空芯光纤的另一端面与第二单模光纤进行熔接，且在距离熔接点预置长度处，对所述第二单模光纤进行切断处理，得到两端面都熔接有单模光纤且固定了所述波导谐振腔的所述空芯光纤器件。
进一步地，所述将波导谐振腔固定在所述空芯光纤的空心腔中的步骤包括：
利用拉锥光纤、显微镜及微操作手仪器将所述波导谐振腔放入所述空芯光纤的空心腔中；
在熔接机中利用拉锥光纤将所述波导谐振腔推入至所述所述空芯光纤的中心位置；
利用所述熔接机对所述波导谐振腔进行弱电弧放电退火处理，将所述波导谐振腔固定在所述空芯光纤的空心腔中。
 有益效果
本发明提出的一种回音壁模式谐振器，回音壁模式谐振器包括：空芯光纤、波导、波导谐振腔、第一单模光纤及第二单模光纤，波导及波导谐振腔位于空芯光纤中，第一单模光纤的一端面通过熔接处理与空芯光纤的一端面相连，第二单模光纤的一端面通过熔接处理与空芯光纤的另一端面相连，波导包括输入光波导、内表面波导及输出光波导，输入光波导的两端面分别与第一单模光纤的纤芯的一端面及内表面波导的一端面相连接，输出光波导的两端面分别与第二单模光纤的纤芯的一端面及内表面波导的另一端面相连接，内表面波导具有倏逝场。与现有技术相比，将第一单模光纤及第二单模光纤的一端面通过熔接处理与空芯光纤的两端面相连，输入光波导分别与第一单模光纤的纤芯的一端面及内表面波导的一端面相连接，输出光波导分别与第二单模光纤的纤芯的一端面及内表面波导的另一端面相连接，通过上述连接方式制备的回音壁模式谐振器结构更稳定且简单，并且，利用内表面波导的倏逝场实现内表面波导与波导谐振腔之间的光耦合，有利于光集成。
附图说明
图1是本发明第一实施例提供的一种回音壁模式谐振器的结构的俯视图；
图2是本发明第一实施例提供的一种回音壁模式谐振器的结构的侧视图；
图3为本发明第二实施例提供的一种回音壁模式谐振器的制备方法的流程示意图；
图4为图3所示的实施例中的步骤S301的细化步骤的流程示意图。
 本发明的实施方式
为使得本发明的发明目的、特征、优点能够更加的明显和易懂，下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而非全部实施例。基于本发明中的实施例，本领域技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
为了说明本发明的技术方案，下面通过具体实施例来进行说明。
为了更好的理解本发明，请参阅图1所示的一种回音壁模式谐振器的结构的俯视图及图2所示的一种回音壁模式谐振器的结构的侧视图，回音壁模式谐振器包括：空芯光纤101、波导102、波导谐振腔103、第一单模光纤104及第二单模光纤105；
波导102及波导谐振腔103位于空芯光纤101中；
第一单模光纤104的一端面通过熔接处理与空芯光纤101的一端面相连，第二单模光纤105的一端面通过熔接处理与空芯光纤101的另一端面相连；
波导102包括输入光波导1021、内表面波导1022及输出光波导1023，输入光波导1021的两端面分别与第一单模光纤104的纤芯1041的一端面及内表面波导1022的一端面相连接，输出光波导1023的两端面分别与第二单模光纤105的纤芯1051的一端面及内表面波导1022的另一端面相连接；
内表面波导1022具有倏逝场。
在本发明实施例中，第一单模光纤104由纤芯1041和包层1042组成，第二单模光纤105由纤芯1051和包层1052组成，空芯光纤101的材料为纯石英，空芯光纤101内部设有一个空心腔1011，空芯光纤101没有纤芯和包层，光不可以透过纯石英传输。
进一步地，空心腔1011为矩形空心腔。
在本发明实施例中，波导谐振腔103表示一个可以存储光能的空腔。
进一步地，波导谐振腔103为微球谐振腔，波导谐振腔103的折射率大于1.444，其中，微球谐振腔的大小与矩形空心腔的大小相匹配，微球谐振腔可以恰好放入矩形空心腔中，微球谐振腔可以通过弱电弧放电退火处理固定于矩形空心腔的内壁上。
其中，通过图2可以看出，第一单模光纤104的纤芯1041和第二单模光纤105的纤芯1051的中心点与空芯光纤101的中心点在YZ平面上等高。
其中，YZ平面是三维立体图像中Y轴和Z轴构成的平面。
进一步地，输入光波导1021及输出光波导1023是通过飞秒激光直写技术写制而成的S型波导，内表面波导1022也是通过飞秒激光直写技术写制而成的，内表面波导是直线型的，内表面波导1022没有与矩形空心腔的内表面相接处，之间隔有纯石英。
在本发明实施例中，波导102与纯石英构成了纤芯和包层结构，利用输入光波导1021将第一单模光纤104中的光耦合至内表面波导1022中，因内表面波导1022具有倏逝场，利用内表面波导1022的倏逝场实现内表面波导1022与波导谐振腔103之间的耦合，将光从内表面波导1022耦合至波导谐振腔103中，光在波导谐振腔103中转几圈，一部分光会留在波导谐振腔103，剩下的光会回到内表面波导中，再利用输出光波导1023将回到内表面波导1023的光耦合至第二单模光纤105中。
在本发明实施例中，回音壁模式谐振器包括：空芯光纤101、波导102、波导谐振腔103、第一单模光纤104及第二单模光纤105，波导102及波导谐振腔103位于空芯光纤101中，第一单模光纤104的一端面通过熔接处理与空芯光纤101的一端面相连，第二单模光纤105的一端面通过熔接处理与空芯光纤101的另一端面相连，波导102包括输入光波导1021、内表面波导1022及输出光波导1023，输入光波导1021的两端面分别与第一单模光纤104的纤芯1041的一端面及内表面波导1022的一端面相连接，输出光波导1023的两端面分别与第二单模光纤105的纤芯1051的一端面及内表面波导1022的另一端面相连接，内表面波导1022具有倏逝场。与现有技术相比，将第一单模光纤104及第二单模光纤105的一端面通过熔接处理与空芯光纤101的两端面相连，输入光波导1021分别与第一单模光纤104的纤芯1041的一端面及内表面波导1022的一端面相连接，输出光波导1023分别与第二单模光纤105的纤芯1051的一端面及内表面波导1022的另一端面相连接，通过上述连接方式制备的回音壁模式谐振器结构更稳定且简单，并且，利用内表面波导1022的倏逝场实现内表面波导1022与波导谐振腔103之间的光耦合，有利于光集成。
请参阅图3，为本发明第二实施例提供的一种回音壁模式谐振器的制备方法的流程示意图，包括：
步骤S301、对空芯光纤101进行熔接处理，得到空芯光纤器件；
进一步地，请参阅图4，为本发明第二实施例中的步骤S301的细化步骤的流程示意图，包括：
步骤S401、将空芯光纤101的一端面与第一单模光纤104进行熔接，且在距离熔接点预置长度处，对第一单模光纤104进行切断处理，得到一端面熔接有单模光纤的空芯光纤101；
其中，预置长度可以根据需求进行设定，例如，100μm、200μm、300μm、1cm、2cm等等。
步骤S402、将波导谐振腔103固定在空芯光纤101的空心腔1011中；
在本发明实施例中，利用拉锥光纤、显微镜及微操作手仪器将波导谐振腔103放入空芯光纤101的空心腔1011中，在熔接机中利用拉锥光纤将波导谐振腔103推入至空芯光纤101的中心位置，利用熔接机对波导谐振腔103进行弱电弧放电退火处理，将波导谐振腔103固定在空芯光纤101的空心腔1011中。
步骤S403、将一端面熔接有单模光纤且固定了波导谐振腔103的空芯光纤101的另一端面与第二单模光纤105进行熔接，且在距离熔接点预置长度处，对第二单模光纤105进行切断处理，得到两端面都熔接有单模光纤且固定了波导谐振腔103的空芯光纤器件。
步骤S302、通过飞秒激光直写技术在空芯光纤器件内部写制输入光波导1021；
步骤S303、通过飞秒激光直写技术在空芯光纤器件内部写制具有倏逝场的内表面波导1022，其中，内表面波导1022的一端面与输入光波导1021的一端面相连接；
步骤S304、通过飞秒激光直写技术在空芯光纤器件内部写制输出光波导1023，其中，输出光波导1023的一端面与内表面波导1022的另一端面相连接。
在本发明实施例中，对空芯光纤101进行熔接处理，得到空芯光纤器件，通过飞秒激光直写技术在空芯光纤器件内部写制输入光波导1021，通过飞秒激光直写技术在空芯光纤器件内部写制具有倏逝场的内表面波导1022，其中，内表面波导1022的一端面与输入光波导1021的一端面相连接，通过飞秒激光直写技术在空芯光纤器件内部写制输出光波导1023，其中，输出光波导1023的一端面与内表面波导1022的另一端面相连接。与现有技术相比，通过飞秒激光直写技术在空芯光纤器件内部写制输入光波导1021、内表面波导1022及输出光波导1023，内表面波导1022的两个端面分别与输入光波导1021及第二S型波导的一个端面相连接，通过上述连接方式制备的回音壁模式谐振器结构更稳定且简单，并且，利用内表面波导1022的倏逝场实现内表面波导1022与波导谐振腔103之间的光耦合，有利于光集成。
在本申请所提供的几个实施例中，应该理解到，所揭露的装置和方法，可以通过其它的方式实现。
需要说明的是，对于前述的各方法实施例，为了简便描述，故将其都表述为一系列的动作组合，但是本领域技术人员应该知悉，本发明并不受所描述的动作顺序的限制，因为依据本发明，某些步骤可以采用其它顺序或者同时进行。其次，本领域技术人员也应该知悉，说明书中所描述的实施例均属于优选实施例，所涉及的动作和模块并不一定都是本发明所必须的。
在上述实施例中，对各个实施例的描述都各有侧重，某个实施例中没有详述的部分，可以参见其它实施例的相关描述。
以上为对本发明所提供的一种回音壁模式谐振器及其制备方法的描述，对于本领域的技术人员，依据本发明实施例的思想，在具体实施方式及应用范围上均会有改变之处，综上，本说明书内容不应理解为对本发明的限制。

Claims (10)

  1. 一种回音壁模式谐振器，其特征在于，所述回音壁模式谐振器包括：空芯光纤、波导、波导谐振腔、第一单模光纤及第二单模光纤；
    所述波导及所述波导谐振腔位于所述空芯光纤中；
    所述第一单模光纤的一端面通过熔接处理与所述空芯光纤的一端面相连，所述第二单模光纤的一端面通过熔接处理与所述空芯光纤的另一端面相连；
    所述波导包括输入光波导、内表面波导及输出光波导，所述输入光波导的两端面分别与所述第一单模光纤的纤芯的一端面及所述内表面波导的一端面相连接，所述输出光波导的两端面分别与所述第二单模光纤的纤芯的一端面及所述内表面波导的另一端面相连接；
    所述内表面波导具有倏逝场。
  2. 根据权利要求1所述的回音壁模式谐振器，其特征在于，所述空芯光纤的材料为纯石英，所述空芯光纤内部设有一个空心腔。
  3. 根据权利要求2所述的回音壁模式谐振器，其特征在于，所述空心腔为矩形空心腔。
  4. 根据权利要求1所述的回音壁模式谐振器，其特征在于，所述波导谐振腔为微球谐振腔。
  5. 根据权利要求1所述的回音壁模式谐振器，其特征在于，所述波导谐振腔的折射率大于1.444。
  6. 根据权利要求1所述的回音壁模式谐振器，其特征在于，所述波导谐振腔通过弱电弧放电退火处理固定于所述矩形空心腔的内壁上。
  7. 根据权利要求1至6任意一项所述的回音壁模式谐振器，其特征在于，所述输入光波导及所述输出光波导是通过飞秒激光直写技术写制而成的S型波导。
  8. 一种回音壁模式谐振器的制备方法，其特征在于，所述方法用于制备如权利要求1至7任意一项所述的回音壁模式谐振器，所述方法包括：
    对空芯光纤进行熔接处理，得到空芯光纤器件；
    通过飞秒激光直写技术在所述空芯光纤器件内部写制输入光波导；
    通过所述飞秒激光直写技术在所述空芯光纤器件内部写制具有倏逝场的内表面波导，其中，所述内表面波导的一端面与所述输入光波导的一端面相连接；
    通过所述飞秒激光直写技术在所述空芯光纤器件内部写制输出光波导，其中，所述输出光波导的一端面与所述内表面波导的另一端面相连接。
  9. 根据权利要求8所述的方法，其特征在于，所述对空芯光纤进行熔接处理，得到空芯光纤器件的步骤包括：
    将空芯光纤的一端面与第一单模光纤进行熔接，且在距离熔接点预置长度处，对所述第一单模光纤进行切断处理，得到一端面熔接有单模光纤的空芯光纤；
    将波导谐振腔固定在所述空芯光纤的空心腔中；
    将一端面熔接有单模光纤且固定了所述波导谐振腔的空芯光纤的另一端面与第二单模光纤进行熔接，且在距离熔接点预置长度处，对所述第二单模光纤进行切断处理，得到两端面都熔接有单模光纤且固定了所述波导谐振腔的所述空芯光纤器件。
  10. 根据权利要求9所述的方法，其特征在于，所述将波导谐振腔固定在所述空芯光纤的空心腔中的步骤包括：
    利用拉锥光纤、显微镜及微操作手仪器将所述波导谐振腔放入所述空芯光纤的空心腔中；
    在熔接机中利用拉锥光纤将所述波导谐振腔推入至所述所述空芯光纤的中心位置；
    利用所述熔接机对所述波导谐振腔进行弱电弧放电退火处理，将所述波导谐振腔固定在所述空芯光纤的空心腔中。
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