WO2019031389A1 - Actuator - Google Patents

Actuator Download PDF

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Publication number
WO2019031389A1
WO2019031389A1 PCT/JP2018/029084 JP2018029084W WO2019031389A1 WO 2019031389 A1 WO2019031389 A1 WO 2019031389A1 JP 2018029084 W JP2018029084 W JP 2018029084W WO 2019031389 A1 WO2019031389 A1 WO 2019031389A1
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WO
WIPO (PCT)
Prior art keywords
movable body
support
wall
actuator according
elastic member
Prior art date
Application number
PCT/JP2018/029084
Other languages
French (fr)
Japanese (ja)
Inventor
亮 森
正明 安藤
直哉 伊佐治
Original Assignee
日本電産サンキョー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2017155030A external-priority patent/JP2019037015A/en
Priority claimed from JP2017155029A external-priority patent/JP2019037014A/en
Priority claimed from JP2017155031A external-priority patent/JP2019034252A/en
Application filed by 日本電産サンキョー株式会社 filed Critical 日本電産サンキョー株式会社
Publication of WO2019031389A1 publication Critical patent/WO2019031389A1/en

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00Bearings for parts moving only linearly
    • F16C29/04Ball or roller bearings
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K33/00Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/16Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with polarised armatures moving in alternate directions by reversal or energisation of a single coil system

Definitions

  • the present invention relates to an actuator that generates vibration.
  • the movable body is supported against the support by a drive mechanism provided with a magnet provided on one of the support and the movable body and a coil provided on the other of the support and the movable body
  • a drive mechanism provided with a magnet provided on one of the support and the movable body and a coil provided on the other of the support and the movable body
  • a visco-elastic member comprising a gel-like member is disposed between the movable body and the support, and the movable body is supported by the support via the visco-elastic member. It is done. Moreover, the resonance at the time of driving a movable body is suppressed by the visco-elastic member.
  • a visco-elastic member made of a gel-like member is disposed between the movable body and the support, and the movable body is supported by the support via the visco-elastic member. While being driven, resonance when driving the movable body is suppressed.
  • a first object of the present invention is to provide an actuator capable of causing a user to experience strong vibration.
  • the support supports the movable body via the visco-elastic member as in the actuator described in Patent Document 1
  • the movable body when an external force is transmitted to the movable body and the movable body is displaced, it is used for the drive mechanism.
  • the spacing between the coil and the magnet fluctuates. Therefore, in the state where the movable body is displaced, it is difficult to properly vibrate the movable body.
  • a second object of the present invention is to provide an actuator capable of vibrating a movable body smoothly.
  • each of the movable body and the support body has a structure in which a plurality of members are arranged in an overlapping manner, and the movable body and the support body intersect in the vibration direction of the movable body.
  • Viscoelastic members are disposed at portions facing in the direction. For this reason, when the opposing distance between the movable body and the support in the portion where the visco-elastic member is disposed varies, the thickness of the visco-elastic member varies, and there is a problem that the characteristics of the actuator vary.
  • a third object of the present invention is to provide an actuator in which a visco-elastic member provided between a movable body and a support exerts a stable function.
  • an actuator to which the first invention is applied includes a support, a movable body, an elastic member connected to the movable body and the support, and the movable body to the support.
  • a drive mechanism for vibrating in the first direction the drive mechanism being from one side in a second direction intersecting the first direction on one side member of the support and the movable body
  • a first magnetic core provided with a plurality of first salient poles projecting toward the other side, and the first magnetic core on the one side member facing the first magnetic core on the other side in the second direction
  • a second magnetic core provided with a plurality of second salient poles projecting from the other side in the second direction toward the one side along the first direction in opposite phase to the first salient pole, and the support
  • an armature provided between the second magnetic core, and the armature is a permanent magnet magnetized along the first direction, and one of the permanent magnet in the first direction.
  • the magnetic flux generated from the armature generates a thrust utilizing a change in magnetic flux density passing through the first magnetic core and the second magnetic core, that is, the drive mechanism operates in the same manner as a linear motor. Therefore, a large thrust can be generated in the movable body. Therefore, the user can feel strong vibration.
  • armature in the armature, a plurality of armature units including the permanent magnet, the first armature core, the second armature core, and a drive coil are disposed along the first direction.
  • the drive mechanism can generate a large thrust on the movable body, the user can experience strong vibration.
  • the first magnetic core and the second magnetic core may be provided on the movable body, and the armature may be provided on the support. According to this aspect, unlike the case where the movable body is provided with the drive coil, power supply to the drive coil is easy.
  • the support body includes a holder portion for holding the armature, and the movable body is a nonmagnetic first wall portion facing the holder portion on one side in the second direction; A nonmagnetic second wall opposed to the other side in the second direction in the holder, and the first magnetic core is disposed so as to overlap a surface of the first wall opposed to the holder It is possible to adopt an aspect in which the second magnetic core is disposed so as to overlap the surface of the second wall facing the holder.
  • the movable body is connected to at least one of the first wall and the second wall and intersects the drive mechanism with the first direction and the second direction.
  • the aspect which has an output member covered from one side of 3 directions is employable. According to this aspect, since the vibration of the movable body can be output through the output member, the user who has touched the output member can feel strong vibration.
  • one end of the first wall in the first direction, the other end of the first wall in the first direction, the first direction of the second wall A guide mechanism for guiding the movable body in the first direction is provided at each of a total of four locations at one end of the second wall and the other end of the second wall in the first direction Can be adopted.
  • the guide mechanism may adopt an aspect including rolling balls supported at both sides in the second direction by the movable body and the support at each of the four locations. .
  • the elastic member is a portion where the movable body and the support body face each other in the first direction on one side in the first direction with respect to the movable body, and the elastic member
  • the aspect by which the said movable body and the said support body are provided in the location which opposes in the said 1st direction by the other side of the said 1st direction is employable.
  • the elastic member may be a visco-elastic member.
  • an actuator to which the second invention is applied includes a support, a movable body, a drive mechanism that causes the movable body to vibrate in a first direction with respect to the support, and the first direction.
  • a guide mechanism provided at a position where the movable body and the support body face each other in a second direction intersecting with the guide body and guiding the movable body in the first direction, the guide mechanism being on the support body side
  • two first rails extending in the first direction in parallel in a third direction intersecting the first direction and the second direction, and in parallel in the third direction on the movable body side. It has two second rails extending in one direction, and rolling balls supported from both sides in the second direction by the two first rails and the two second rails. It is characterized by
  • the rolling balls are supported by the two first rails on the support side and the two second rails on the movable body side.
  • the movable body vibrates smoothly in the first direction while being guided by the guide mechanism.
  • the rolling balls are supported from both sides in the second direction by the two first rails on the support side and the two second rails on the movable body side. Therefore, even if an external force is applied to the movable body, the displacement of the movable body in the second direction and the third direction is suppressed by the guide mechanism. Therefore, even in the state where an external force is applied to the movable body, the movable body can be appropriately vibrated in the first direction.
  • the two first rails and the two second rails each have a convex curved surface for supporting the rolling balls.
  • the aspect which has become can be adopted. According to this aspect, since the contact area between the rolling ball and the support and the contact area between the rolling ball and the movable body are small, the sliding resistance when the movable body vibrates in the first direction is small. Therefore, the movable body can be vibrated smoothly in the first direction.
  • the two first rails and the two second rails may each be in the form of a round bar.
  • the first and second rails each have high strength.
  • round rod shape is meant to include the case of being cylindrical.
  • the guide mechanism includes a guide unit provided with the two first rails, the two second rails, and the rolling balls at one side of the movable body in the second direction. It is possible to adopt an aspect provided at a total of four places, two places separated in one direction, and two places separated in the first direction on the other side of the movable body in the second direction. According to this aspect, the movable body can be properly guided in a stable posture.
  • the drive mechanism may adopt an aspect of being disposed in a space surrounded by the four points when viewed from the third direction.
  • the support includes a holder portion for holding a support-side component for constituting the drive mechanism, and the movable body faces the holder portion on one side in the second direction.
  • a first wall portion and a second wall portion facing the holder portion on the other side in the second direction are provided, and the guide mechanism is an end portion on one side in the first direction of the first wall portion.
  • An end of the other side of the first wall in the first direction, an end of the one side of the second wall in the first direction, and a side of the other side of the second wall in the first direction The aspect provided in a total of four places of an edge part is employable.
  • the movable body has an output member connected to at least one of the first wall and the second wall to cover the drive mechanism from one side in the third direction.
  • the aspect which is carried out can be adopted. According to this aspect, since the vibration of the movable body can be output through the output member, the user who has touched the output member can feel strong vibration.
  • the elastic member is a portion where the movable body and the support body face each other in the first direction on one side in the first direction with respect to the movable body, and the elastic member
  • the aspect by which the said movable body and the said support body are provided in the location which opposes in the said 1st direction by the other side of the said 1st direction is employable.
  • an actuator to which the third invention is applied includes a support, a movable body, a drive mechanism that causes the movable body to vibrate in a first direction with respect to the support, and the movable body A first visco-elastic member provided on a portion facing on one side in the first direction with respect to the support, and a portion on the other side of the first direction facing the support with the movable body And a second viscoelastic member provided.
  • the visco-elastic members are disposed between the movable body and the support, when the movable body is vibrated, the first visco-elasticity is generated. Since the member and the second viscoelastic member exert the damper function, the movable body is less likely to resonate.
  • the first visco-elastic member is disposed in a portion where the movable body is opposed to the support on one side in the first direction, and the second visco-elastic member is configured such that the movable body is in the first direction with respect to the support It is arranged in the opposite part on the other side.
  • the relative position between the movable body and the support varies in the first direction, and the distance between the movable body and the support at the portion where the first viscoelastic member is disposed, and the second viscoelasticity If the distance between one of the movable body and the support at the portion where the member is disposed is increased, the other is narrowed. Therefore, the characteristics combining the characteristics of the first viscoelastic member and the characteristics of the second viscoelastic member are less susceptible to the fluctuation of the above-mentioned interval, and the first and second viscoelastic members are stable. Demonstrate a function.
  • the first visco-elastic member is provided in a portion where the movable body and the end portion on one side of the first direction of the support body face each other in the first direction, and the second visco-elastic member
  • the elastic member may adopt an aspect in which the other ends of the movable body and the support in the first direction are provided in portions facing each other in the first direction.
  • the first viscoelastic member and the second viscoelastic member each adopt an aspect in which the movable body is in contact with the support and the movable body when the movable body vibrates in the first direction. be able to.
  • the visco-elastic members first and second visco-elastic members
  • the resonance of the movable body can be effectively prevented.
  • each of the first viscoelastic member and the second viscoelastic member is compressed in the first direction can be adopted while the drive mechanism is stopped.
  • the visco-elastic members first and second visco-elastic members
  • the first visco-elastic member and the second visco-elastic member constantly exert a force to expand in a predetermined stroke, so that the first visco-elastic member and the second visco-elastic member Demonstrates a stable damper function.
  • the drive mechanism is disposed at a portion where the movable body and the support face each other in a second direction intersecting the first direction
  • the support includes a base member and the base member.
  • a holder portion for holding a support-side component for forming the drive mechanism by protruding from one side in a third direction intersecting the first direction and the second direction, and the first portion relative to the holder portion
  • the movable body is a first wall portion facing the holder portion on one side in the second direction, and the holder portion on the other side in the second direction.
  • the second wall facing each other, and the first convex portion in one of the first directions A third wall facing on the side and a fourth wall facing the second protrusion on the other side in the first direction, and overlapping a surface of the first wall facing the holder
  • a part of the movable body side component for constituting the drive mechanism is disposed, and another part of the movable body side component is disposed so as to overlap the surface of the second wall facing the holder part.
  • the first visco-elastic member is disposed between the first convex portion and the third wall portion
  • the second visco-elastic member is disposed between the second convex portion and the fourth wall portion
  • the movable body is connected to at least one of the first wall portion, the second wall portion, the third wall portion, and the fourth wall portion, and the drive mechanism is provided.
  • the aspect which has an output member which covers from the one side of the said 3rd direction is employable. According to this aspect, since the vibration of the movable body can be output through the output member, the user who has touched the output member can feel strong vibration.
  • a guide mechanism for guiding the movable body in the first direction is provided at each of four positions in total of the one end of the second wall and the other end of the second wall in the first direction.
  • the guide mechanism may adopt an aspect including rolling balls supported at both sides in the second direction by the movable body and the support at each of the four locations. . According to this aspect, even when the movable body is supported by the support via the rolling balls, the movable body vibrates smoothly in the first direction.
  • the magnetic flux generated from the armature generates a thrust utilizing a change in magnetic flux density passing through the first magnetic core and the second magnetic core, that is, the drive mechanism operates in the same manner as a linear motor. Therefore, a large thrust can be generated in the movable body. Therefore, the user can feel strong vibration.
  • the rolling balls are supported by the two first rails on the support side and the two second rails on the movable body side. For this reason, the movable body vibrates in the first direction while being guided by the guide mechanism.
  • the rolling balls are supported from both sides in the second direction by the two first rails on the support side and the two second rails on the movable body side. Therefore, even if an external force is applied to the movable body, the displacement of the movable body in the second direction and the third direction is suppressed by the guide mechanism. Therefore, even in the state where an external force is applied to the movable body, the movable body can be appropriately vibrated in the first direction.
  • the movable body is a damper when the movable body is vibrated. Since the function is exhibited, the movable body is less likely to resonate.
  • the first viscoelastic member is disposed between the movable body and the support on one side in the first direction with respect to the movable body
  • the second viscoelastic member is disposed in the other side in the first direction with respect to the movable body. It is arranged on the side between the movable body and the support.
  • the distance between the movable body and the support on one side in the first direction with respect to the movable body and the distance between the movable body and the support on the other side in the first direction with respect to the movable body vary. Also in the case where one of the intervals is wide, the other interval becomes narrow, so the combined characteristics of the characteristics of the first viscoelastic member and the characteristics of the second viscoelastic member are affected by the variation of the above-mentioned interval. Hardly, the first and second viscoelastic members exert a stable function.
  • FIG. 7 is an exploded perspective view of the support shown in FIG. 6 with the cover removed.
  • FIG. 7 is an exploded perspective view of a movable body shown in FIG. 6 from which a movable body side component for configuring a drive mechanism is removed. It is a perspective view of the drive mechanism shown in FIG. It is a top view of the drive mechanism shown in FIG.
  • first direction X a first direction X
  • second direction Y a second direction Y
  • third direction Z three directions intersecting with each other.
  • the first direction X, the second direction Y, and the third direction Z are directions orthogonal to each other.
  • X1 is attached to one side in the first direction X
  • X2 is attached to the other side in the first direction X
  • Y1 is attached to one side in the second direction Y
  • Y2 is attached to the other side in the second direction Y
  • one side of the third direction Z is attached with Z1 and the other side of the third direction Z is attached with Z2.
  • FIG. 1 is a perspective view of an actuator 1 according to an embodiment of the present invention.
  • FIG. 2 is an XZ sectional view of the actuator 1 shown in FIG.
  • FIG. 3 is a YZ cross-sectional view when the actuator 1 shown in FIG. 1 is cut at a position passing through the drive mechanism 5.
  • FIG. 4 is a YZ sectional view when the actuator 1 shown in FIG. 1 is cut at a position passing through the guide mechanism 8.
  • the actuator 1 of the present embodiment has a rectangular parallelepiped shape in which the dimension in the first direction X is larger than the dimension in the second direction Y and the dimension in the third direction Z as a whole.
  • the actuator 1 includes a support 2 connected to the device main body and a movable body 3 movably supported by the support 2. And the drive mechanism 5 for vibrating the movable body 3 in the first direction X with respect to the support 2.
  • the actuator 1 further includes a guide mechanism 8 for guiding the movable body 3 in the first direction X, and elastic members (first elastic member 91 and second elastic member 92) connected to the support 2 and the movable body 3. Have. Accordingly, the movable body 3 is supported by the support 2 via the guide mechanism 8 and the elastic members (the first elastic member 91 and the second elastic member 92), and vibrates in the first direction X in this state.
  • FIG. 5 is a perspective view of the actuator 1 shown in FIG. 1 with the output member 38 of the movable body 3 removed.
  • 6 is an exploded perspective view in which the support 2 and the movable body 3 are separated in the actuator 1 shown in FIG. 7 is an exploded perspective view of the support 2 shown in FIG. 6 with the cover 25 removed.
  • FIG. 8 is an exploded perspective view of the support 2 shown in FIG. 6 with the support side component 5b for constituting the drive mechanism 5 removed.
  • the support 2 has a plate-like base member 21, a holder portion 22 protruding from the base member 21 on one side Z1 in the third direction Z, and a holder portion 22.
  • the first convex portion 23 protrudes from the base member 21 to the one side Z1 in the third direction Z on one side X1 in one direction X, and the other side from the base member 21 on the other side X2 in the first direction X It has the 2nd convex part 24 projected on one side Z1 of 3 directions Z.
  • the base member 21 is a connecting portion to the device body.
  • the holder portion 22, the first convex portion 23, and the second convex portion 24 are each fixed to the base member 21 from the other side Z2 in the third direction Z by a screw 219 (see FIG. 2 and the like).
  • the holder portion 22 is a portion that holds the support-side component 5 b for configuring the drive mechanism 5.
  • the holder portion 22 is disposed along the first direction X on the columnar portions 221, 222, 223 disposed along the first direction X on one side Y1 in the second direction Y, and on the other side Y2 in the second direction Y.
  • the columnar portions 224, 225, and 226 are connected at their root portions by the connecting portions 227 extending in the first direction X
  • the columnar portions 224, 225, 226 are root portions by the connecting portions 228 extending in the first direction X Are linked.
  • the cover 25 is provided at the end of one side Z1 of the columnar portions 221 to 226 in the third direction Z, the end of the one side Z1 of the first convex portion 23, and the end of the one side Z1 of the second convex portion 24. It is fixed by a screw 259.
  • the cover 25 has a flat plate portion 250 covering the holder portion 22, a first side plate portion 251 bent from the end of the first side X1 in the first direction X of the flat plate portion 250 to the other side Z2 in the third direction Z, and a flat plate portion And a second side plate portion 252 bent from the end of the other side X2 of the first direction X 250 to the other side Z2 of the third direction Z.
  • the first side plate portion 251 overlaps the first convex portion 23 from one side X1 in the first direction X
  • the second side plate portion 252 overlaps the second convex portion 24 from the other side X2 in the first direction X.
  • the flat plate portion 250 is formed with holes 250b and 250c in which the rectangular opening 250a, the positioning convex portion 239 of the first convex portion 23, and the positioning convex portion 249 of the second convex portion 24 are fitted.
  • FIG. 9 is an exploded perspective view of the movable body 3 shown in FIG. 6 with the movable body side component 5a for constituting the drive mechanism 5 removed.
  • the movable body 3 has a first wall 31 facing the holder 22 on one side Y1 in the second direction Y, and the holder 22 in the second direction Y.
  • It has the 4th wall 34 which counters by X2.
  • the first wall 31, the second wall 32, the third wall 33, and the fourth wall 34 are respectively formed of separate members, and are connected by screws 391 to form a rectangular frame 30.
  • the movable body 3 includes an output member 38 connected to any one of the first wall 31, the second wall 32, the third wall 33, and the fourth wall 34 to cover the drive mechanism 5.
  • the output member 38 has a rectangular plate shape, and is connected to the end of the first wall 31 and the second wall 32 in the third direction Z on one side Z1 by a screw 392.
  • the output member 38 is connected to only one of the first wall 31 and the second wall 32, or the first wall 31, the second wall 32, the third wall 33, and the fourth wall.
  • the aspect connected to at least one of the parts 34 may be sufficient.
  • cylindrical cylindrical portions 386, 387, 388, 389 project toward the one side Z1 in the third direction Z, and the cylindrical portions 386, 387, 388, 389 contact the output member 38 with a touch panel or the like. Is used to fix the
  • the inner surfaces 310, 320 side facing the holder portion 22 are portions for arranging the movable body side component 5a described later, and the first wall portion 31 and the second wall portion 32
  • the end of the other side Z2 in the third direction Z of the wall portion 32 constitutes bottom plate portions 315, 325 for supporting the movable body side component 5a. Therefore, the first wall 31 and the second wall 32 are made of a nonmagnetic material so as not to magnetically affect the movable body side component 5a.
  • the first wall 31, the second wall 32, the third wall 33, the fourth wall 34, and the output member 38 are all made of nonmagnetic material.
  • shaft portions 316, 317, 326, and 327 are formed on one end Z1 of the third direction Z on both end sides in the first direction X, respectively.
  • the shaft portions 316, 317, 326, 327 are adapted to be fitted into the holes 381, 382, 383, 384 of the output member 38 at the end of the one side Z1 in the third direction Z, respectively.
  • the shaft portions 318 and 328 project from the central portion in the first direction X to the other side Z2 in the third direction Z.
  • the shaft portions 318, 328 contact the base member 21 when the movable body 3 is displaced to the other side Z1 in the third direction Z, and define the movable range of the movable body 3 to the other side Z1 in the third direction Z. doing.
  • the driving mechanism 5 shown in FIGS. 2, 5 and 6 etc. drives the movable body 3 to the one side X1 and the other side X2 in the first direction X with respect to the support 2 to move the movable body 3 in the first direction X Vibrate at. Therefore, in the actuator 1, as shown in FIGS. 4 and 6, the guide mechanism 8 for guiding the movable body 3 in the first direction X at a position where the movable body 3 and the support body 2 face each other in the second direction Y. It is provided.
  • the guide unit 80 having the same configuration separates in the first direction X at one side Y1 of the movable body 3 in the second direction Y, and the second of the movable body 3
  • the other side Y2 of the direction Y is provided at a total of four places separated in the first direction X at two places.
  • the guide mechanism 8 (guide unit 80) is an end of one side X1 of the first wall 31 of the movable body 3 in the first direction X, and the other in the first direction X of the first wall 31.
  • the guide mechanism 8 (guide unit 80) is provided with rolling balls 83 supported from both sides in the second direction Y by the movable body 3 and the support 2 at each of four places. More specifically, the guide mechanism 8 includes two first rails 81 extending in the first direction X in parallel in the third direction Z on the support 2 side, and the third direction Z on the movable body 3 side. Rolling balls supported from both sides in the second direction Y by the two second rails 82 extending in the first direction X and the two first rails 81 and the two second rails 82 in parallel And 83.
  • the two first rails 81 are formed on the side surface of the first protrusion 23 on the side surface of the one side Y1 in the second direction Y, and the side surface of the first protrusion 23 on the other side Y2 of the second direction Y Recessed portion 232, a recessed portion 241 formed on the side surface of one side Y1 in the second direction Y of the second protrusion 24, and a recessed portion formed on the side surface of the other side Y2 in the second direction Y Both ends are fixed at each of 232. Further, in the recessed portions 231, 232, 241, 242, reinforcing convex portions 231a, 232a, 241a, 242a for supporting the two first rails 81 from the side opposite to the rolling balls 83 are formed.
  • the two second rails 82 are a recess 311 formed on the inner surface of the end of one side X1 of the first wall 31 in the first direction X, and the other side X2 of the first wall 31 in the first direction X.
  • Both ends are fixed at each of the concave portions 322 formed on the inner surface of the end of the side X2. Further, in the concave portions 311, 312, 321, 322, reinforcing convex portions 311a, 312a, 321a, 322a for supporting the two second rails 82 from the side opposite to the rolling balls 83 are formed.
  • a first elastic member 91 is provided at a portion where the movable body 3 opposes the support 2 on one side X1 in the first direction X, and the first elastic member
  • a second elastic member 92 is provided at a position where the movable body 3 opposes the support 2 on the other side X2 in the first direction X at a position separated in the first direction X with respect to 91.
  • the first elastic member 91 is provided at a portion where the ends of the movable body 3 and the support 2 on the one side X1 in the first direction X oppose each other in the first direction X.
  • the second elastic member 92 is provided at a portion where the end portions of the movable body 3 and the support 2 on the other side X2 in the first direction X oppose each other in the first direction X.
  • the first elastic member 91 has a third wall 33, which is an end of the movable body 3 on one side X1 in the first direction X, and one side X1 on the one side X of the support 2 in the first direction X. It is provided between the end and the first convex portion 23.
  • the second elastic member 92 is a fourth wall 34 which is an end of the movable body 3 in the other direction X2 in the first direction X, and a second elastic member 92 which is an end of the other side X2 in the first direction X of the support 2. It is provided between the convex portion 24.
  • the first elastic member 91 since the first side plate portion 251 of the cover 25 overlaps the one side X1 in the first direction X of the first convex portion 23, the first elastic member 91 includes the first side plate portion 251 and the third side plate portion 251. It is provided between the wall portion 33. Further, since the second side plate portion 252 of the cover 25 overlaps the other side X2 in the first direction X of the second convex portion 24, the second elastic member 92 includes the second side plate portion 252 and the fourth wall portion It is provided between 34 and.
  • first elastic member 91 and the second elastic member 92 is composed of a spring, a visco-elastic member or the like.
  • first elastic member 91 is a first viscoelastic member 910 such as a gel-like member or rubber.
  • the second elastic member 92 is a second viscoelastic member 920 such as a gel-like member or rubber.
  • the visco-elasticity is a property combining both viscosity and elasticity, and is a property which is remarkably observed in polymer substances such as gel-like members, plastics, rubber and the like. Therefore, various gel-like members can be used as the first viscoelastic member 910 and the second viscoelastic member 920.
  • first viscoelastic member 910 and the second viscoelastic member 920 natural rubber, diene rubber (for example, styrene butadiene rubber, isoprene rubber, butadiene rubber), chloroprene rubber, acrylonitrile butadiene rubber, etc., non-diene
  • diene rubber for example, styrene butadiene rubber, isoprene rubber, butadiene rubber
  • chloroprene rubber acrylonitrile butadiene rubber, etc.
  • non-diene Various rubber materials such as a base rubber (eg, butyl rubber, ethylene / propylene rubber, ethylene / propylene / diene rubber, urethane rubber, silicone rubber, fluororubber, etc.), thermoplastic elastomers and the like and modified materials thereof may be used.
  • a gel-like member is used as the first viscoelastic member 910 and the second viscoelastic member 920. More specifically, the first viscoelastic member 910 and the second viscoelastic member 920 are silicone gels having a penetration of 10 degrees to 110 degrees. The penetration degree is defined in JIS-K-2207 and JIS-K-2220, and the smaller the value, the harder it is.
  • the visco-elastic member has linear or non-linear expansion and contraction characteristics depending on the expansion and contraction direction. For example, when a visco-elastic member is pressed in the thickness direction to be compressed and deformed, it has an expansion and contraction characteristic in which a non-linear component (spring coefficient) is larger than a linear component (spring coefficient). On the other hand, when it is pulled and extended in the thickness direction, it has an expansion and contraction characteristic in which a linear component (spring coefficient) is larger than a non-linear component (spring coefficient).
  • first viscoelastic member 910 and the second viscoelastic member 920 are respectively fixed to the movable body 3 and the support 2 by a method such as adhesion. Therefore, each of the first viscoelastic member 910 and the second viscoelastic member 920 is in contact with the support 2 and the movable body 3 when the movable body 3 vibrates in the first direction X.
  • the first viscoelastic member 910 and the second viscoelastic member 920 are each compressed in the first direction X
  • the first viscoelastic member 910 and the second viscoelastic member 920 are each compressed in the first direction X within a predetermined stroke of the movable body 3.
  • FIG. 10 is a perspective view of the drive mechanism 5 shown in FIG.
  • FIG. 11 is a plan view of the drive mechanism 5 shown in FIG.
  • the drive mechanism 5 has a first protrusion protruding from one side Y1 to the other side Y2 in the second direction Y on one side member of the support 2 and the movable body 3.
  • a plurality of poles 511 are provided along the first direction X, and the second magnetic core 52 is opposed to the first magnetic core 51 on the other side Y2 in the second direction Y.
  • a plurality of second salient poles 521 protruding in the second direction Y from the other side Y2 to the one side Y1 are provided along the first direction X.
  • the second salient pole 521 is in reverse phase to the first salient pole 511. That is, in the first magnetic core 51, the concave portion 512 is formed between the first salient poles 511, and the convex portion formed by the second salient pole 521 in the second magnetic core 52 is formed between the first salient poles 511.
  • the concave portion 512 is opposed to the concave portion 512 in the second direction Y.
  • the concave portion 522 is formed between the second salient poles 521, and the convex portion formed by the first salient pole 511 in the first magnetic core 51 is formed between the second salient poles 521.
  • the concave portion 522 formed is opposed in the second direction Y.
  • the drive mechanism 5 further includes an armature 54 provided between the first magnetic core 51 and the second magnetic core 52 on the other side member of the support 2 and the movable body 3.
  • the armature 54 includes a permanent magnet 56 magnetized in the first direction X, a first armature core 57 overlapping the permanent magnet 56 from the one side X1 in the first direction X, and a permanent magnet 56 in the first direction X
  • a second armature core 58 overlapping from the other side X2 and a drive coil 59 wound so as to pass through the outer surface side of the first armature core 57 and the outer surface side of the second armature core 58 are provided.
  • the drive coil 59 is wound around the insulating bobbin 55, and the first armature core 57 and the second armature core 58 are disposed inside the body of the bobbin 55 in the second direction Y. It consists of core members 57a and 58a inserted from one side Y1 and core members 57b and 58b inserted from the other side Y2 in the second direction Y.
  • armature 54 a plurality of armature units 540 including the permanent magnet 56, the first armature core 57, the second armature core 58, and the drive coil 59 are arranged in the first direction X.
  • armature 54 two armature units 540 are arranged along the first direction X.
  • the one side member is the movable body 3 and the other side member is the support 2. Therefore, the first magnetic core 51 and the second magnetic core 52 are provided on the movable body 3 as the movable body side component 5 a for configuring the drive mechanism 5. More specifically, the first magnetic core 51 and the second magnetic core 52 overlap the inner surfaces 310 and 320 of the first wall portion 31 and the second wall portion 32 of the movable body 3 as the movable body side component 5a. Arranged and fixed.
  • holes 516, 517, 526, and 527 are formed at two places separated in the first direction X, and the first magnetic core 51 and the second magnetic
  • the holes 516, 517, 526, and 527 of the first magnetic core 51 and the second magnetic core 52 are the first wall portion 31 and the second wall portion.
  • the 32 shaft parts 316, 317, 326, 327 are fitted and positioned.
  • the armature 54 (armature unit 540) is provided in the holder portion 22 of the movable body 3 as a support body side component 5b for configuring the drive mechanism 5. More specifically, one armature unit 540 is disposed between the pillars 221 and 224 and the pillars 222 and 225 provided in the holder portion 22, and the pillars 222 and 225 and pillars provided in the holder 22. One armature unit 540 is disposed between the portions 223 and 226.
  • engaging concave portions 571 and 581 to be engaged with the columnar portions 221 to 226 are formed. ing.
  • the first armature core 57 and the second armature core 58 are fixed to the support 2 in a state of being positioned in the first direction X and the second direction Y with respect to the holder portion
  • the end of the one side Z1 in the third direction Z of the daughter unit 540) is located inside the opening 250a of the cover 25.
  • the first salient pole 511 and the second salient pole 521 of the first magnetic core 51 and the second magnetic core 52 are respectively the second armature core 57 of the armature 54 and the second armature core 58 of the second armature core 58.
  • the end face in the direction Y is opposed in the second direction Y via a gap.
  • the drive mechanism 5 linearly drives the movable body 3 to the one side X1 and the other side X2 in the first direction X as in the linear motor. Therefore, since the movable body 3 vibrates in the first direction X, the center of gravity of the actuator 1 vibrates in the first direction X. For this reason, the user who touches the actuator 1 can feel the vibration in the first direction X.
  • the AC waveform applied to the drive coil 59 is adjusted to accelerate the movable body 3 to move to one side X1 in the first direction X and to accelerate the movable body 3 to move to the other side X2 in the first direction X. And the user can feel the vibration having the directivity in the first direction X.
  • the drive mechanism 5 uses the change in magnetic flux density where the magnetic flux generated from the armature 54 passes through the first magnetic core 51 and the second magnetic core 52 to generate thrust. Because the drive mechanism 5 operates in the same manner as a linear motor, it can generate a large thrust on the movable body 3. Therefore, the user can feel strong vibration.
  • a first magnetic core 51 and a second magnetic core 52 are provided on the movable body 3, and an armature 54 is provided on the support 2. Therefore, unlike the case where the movable body 3 is provided with the drive coil 59, power supply to the drive coil 59 is easy.
  • the movable body 3 has an output member 38 that covers the drive mechanism 5 from one side Z1 in the third direction Z, and the output member 38 is exposed. Therefore, since the vibration of the movable body 3 can be output through the output member 38, the user who touches the output member 38 can feel strong vibration.
  • the rolling balls 83 are supported by the two first rails 81 on the support 2 side and the two second rails 82 on the movable body 3 side.
  • the movable body 3 vibrates smoothly in the first direction X while being guided by the guide mechanism 8.
  • the rolling balls 83 are supported from both sides in the second direction Y by the two first rails 81 on the support 2 side and the two second rails 82 on the movable body 3 side. Therefore, even if an external force is applied to the movable body 3, the displacement of the movable body 3 in the second direction Y and the third direction Z is suppressed by the guide mechanism 8. Therefore, even in the state where an external force is applied to the movable body 3, the movable body 3 can be appropriately vibrated in the first direction X.
  • the two first rails 81 and the two second rails 82 each have a convex curved surface for supporting the rolling balls 83, so the rolling ball 823 support 2 side (first rail 81) And the contact area between the rolling ball 83 and the movable body 3 side (second rail 82) are narrow. Therefore, since the sliding resistance when the movable body 3 vibrates in the first direction X is small, the movable body 3 can be vibrated in the first direction X smoothly. Further, since each of the first rail 81 and the second rail 82 has a round bar shape, each of the first rail 81 and the second rail 82 has high strength.
  • the guide mechanism 8 (guide unit 80) is disposed at one side Y1 of the movable body 3 in the second direction Y at two points separated in the first direction X, and in the other side Y2 of the movable body 3 in the second direction Y It is provided in a total of four places of two places separated by X. Therefore, the movable body 3 can be properly guided in a stable posture.
  • the visco-elastic members (the first visco-elastic member 910 and the second visco-elastic member 920) are disposed between the movable body 3 and the support body 2, when the movable body 3 is vibrated, the first viscosity The elastic member 910 and the second viscoelastic member 920 exhibit a damper function. Therefore, the movable body 3 does not easily resonate.
  • the characteristic obtained by combining the characteristic of the first viscoelastic member 910 and the characteristic of the second viscoelastic member 920 is not susceptible to the fluctuation of the above-mentioned interval. Therefore, the first viscoelastic member 910 and the second viscoelastic member 920 exert a stable function.
  • Each of the first viscoelastic member 910 and the second viscoelastic member 920 is in contact with the support 2 and the movable body 3 when the movable body 3 vibrates in the first direction X. Therefore, since the first viscoelastic member 910 and the second viscoelastic member 920 reliably follow the movement of the movable body 3, the resonance of the movable body 3 can be effectively prevented.
  • the first viscoelastic member 910 and the second viscoelastic member 920 are each compressed in the first direction X. For this reason, since the first viscoelastic member 910 and the second viscoelastic member 920 reliably follow the movement of the movable body 3, the resonance of the movable body 3 can be effectively prevented. In addition, when the movable body 3 vibrates, the first visco-elastic member 910 and the second visco-elastic member 920 always exert a force to tend to expand within a predetermined stroke. The viscoelastic member 920 exhibits a stable damper function.
  • the visco-elastic member when pressed in the thickness direction (axial direction) and compressed and deformed, the visco-elastic member has an expansion and contraction characteristic in which a non-linear component (spring coefficient) is larger than a linear component (spring coefficient).
  • the first viscoelastic member 910 and the second viscoelastic member 920 when it is pulled and extended in the thickness direction (axial direction), it has an expansion and contraction characteristic in which a linear component (spring coefficient) is larger than a non-linear component (spring coefficient). Therefore, as in the present embodiment, when the first viscoelastic member 910 and the second viscoelastic member 920 are in the state of being compressed in the first direction X, the first viscoelastic member 910 and the second viscoelastic member 920 are used. The spring force by the direction of movement becomes constant. Therefore, as in the present embodiment, since the repeatability of the vibration acceleration with respect to the input signal can be improved, it is possible to realize the vibration having a subtle nuance.
  • the present invention is applied to the actuator 1 that drives the movable body 3 only in the first direction X.
  • the present invention is applied to the actuator 1 that drives the movable body 3 in the first direction X and the second direction Y You may

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  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

An actuator, wherein a drive mechanism 5 for causing a mobile body 3 to vibrate in a first direction X has a first magnetic core 51 in which a plurality of first salient poles 511 are provided in the mobile body 3 along the first direction X, and a second magnetic core 52 in which a plurality of second salient poles 521 are provided in the mobile body 3 along the first direction X so as to have a phase opposite that of the first salient poles 511. In a support body 2, an armature 54 comprises a permanent magnet 56 that is magnetized along the first direction X, a first armature core 57 that overlaps the permanent magnet 56 from one side X1 in the first direction X, a second armature core 58 that overlaps the permanent magnet 56 from the other side X2 in the first direction X, and a drive coil 59 that is wound about the first armature core 57 and the second armature core 58.

Description

アクチュエータActuator
  本発明は、振動を発生させるアクチュエータに関するものである。 The present invention relates to an actuator that generates vibration.
 振動を発生させる機器として、支持体および可動体の一方に設けられた磁石と、支持体および可動体の他方に設けられたコイルとを備えた駆動機構によって、可動体を支持体に対して、コイルと磁石との対向方向に対して交差する方向に振動させるアクチュエータが提案されている(特許文献1参照)。 As a device for generating vibration, the movable body is supported against the support by a drive mechanism provided with a magnet provided on one of the support and the movable body and a coil provided on the other of the support and the movable body An actuator that vibrates in a direction intersecting with the opposing direction of the coil and the magnet has been proposed (see Patent Document 1).
 また、特許文献1に記載のアクチュエータにおいて、可動体と支持体との間には、ゲル状部材からなる粘弾性部材が配置されており、可動体は、粘弾性部材を介して支持体に支持されている。また、可動体を駆動した際の共振は、粘弾性部材によって抑制されている。 Further, in the actuator described in Patent Document 1, a visco-elastic member comprising a gel-like member is disposed between the movable body and the support, and the movable body is supported by the support via the visco-elastic member. It is done. Moreover, the resonance at the time of driving a movable body is suppressed by the visco-elastic member.
 さらに、特許文献1に記載のアクチュエータにおいて、可動体と支持体との間には、ゲル状部材からなる粘弾性部材が配置されており、可動体は、粘弾性部材を介して支持体に支持されているとともに、可動体を駆動した際の共振が抑制されている。 Furthermore, in the actuator disclosed in Patent Document 1, a visco-elastic member made of a gel-like member is disposed between the movable body and the support, and the movable body is supported by the support via the visco-elastic member. While being driven, resonance when driving the movable body is suppressed.
特開2016-127789号公報JP, 2016-127789, A
 しかしながら、特許文献1に記載のアクチュエータでは、駆動機構が発生させる推力が小さいため、利用者に大きな振動を体感させることが困難である。 However, in the actuator described in Patent Document 1, it is difficult for the user to experience a large vibration because the thrust generated by the drive mechanism is small.
 以上の問題点に鑑みて、本発明の第一の課題は、利用者に強い振動を体感させることができるアクチュエータを提供することにある。 In view of the above problems, a first object of the present invention is to provide an actuator capable of causing a user to experience strong vibration.
 また、特許文献1に記載のアクチュエータのように、支持体が粘弾性部材を介して可動体を支持している態様では、可動体に外力が伝わって可動体が変位すると、駆動機構に用いたコイルと磁石との間隔が変動する。従って、可動体が変位した状態では可動体を適正に振動させることが困難となる。 Further, in an aspect in which the support supports the movable body via the visco-elastic member as in the actuator described in Patent Document 1, when an external force is transmitted to the movable body and the movable body is displaced, it is used for the drive mechanism. The spacing between the coil and the magnet fluctuates. Therefore, in the state where the movable body is displaced, it is difficult to properly vibrate the movable body.
 以上の問題点に鑑みて、本発明の第二の課題は、可動体をスムーズに振動させることのできるアクチュエータを提供することにある。 In view of the above problems, a second object of the present invention is to provide an actuator capable of vibrating a movable body smoothly.
 さらに、特許文献1に記載のアクチュエータにおいて、可動体および支持体は各々、複数の部材が重ねて配置された構造を有し、かつ、可動体と支持体とが可動体の振動方向に交差する方向で対向する部分に粘弾性部材が配置されている。このため、粘弾性部材が配置されている部分における可動体と支持体との対向距離がばらつくと、粘弾性部材の厚さがばらついてしまい、アクチュエータの特性がばらつくという問題点がある。 Furthermore, in the actuator described in Patent Document 1, each of the movable body and the support body has a structure in which a plurality of members are arranged in an overlapping manner, and the movable body and the support body intersect in the vibration direction of the movable body. Viscoelastic members are disposed at portions facing in the direction. For this reason, when the opposing distance between the movable body and the support in the portion where the visco-elastic member is disposed varies, the thickness of the visco-elastic member varies, and there is a problem that the characteristics of the actuator vary.
 以上の問題点に鑑みて、本発明の第三の課題は、可動体と支持体との間に設けた粘弾性部材が安定した機能を発揮するアクチュエータを提供することにある。 In view of the above problems, a third object of the present invention is to provide an actuator in which a visco-elastic member provided between a movable body and a support exerts a stable function.
 上記問題を解決するために、第一の発明を適用したアクチュエータは、支持体と、可動体と、前記可動体と前記支持体とに接続された弾性部材と、前記可動体を前記支持体に対して前記第1方向に振動させる駆動機構と、を有し、前記駆動機構は、前記支持体および前記可動体のうちの一方側部材において前記第1方向に交差する第2方向の一方側から他方側に向けて突出した第1突極が前記第1方向に沿って複数設けられた第1磁性コアと、前記一方側部材において前記第1磁性コアに前記第2方向の他方側で対向し、前記第2方向の他方側から一方側に向けて突出した第2突極が前記第1突極とは逆位相で前記第1方向に沿って複数設けられた第2磁性コアと、前記支持体および前記可動体のうちの他方側部材において前記第1磁性コアと前記第2磁性コアとの間に設けられた電機子と、を備え、前記電機子は、前記第1方向に沿って着磁された永久磁石と、前記永久磁石に前記第1方向の一方側から重なる第1電機子コアと、前記永久磁石に前記第1方向の他方側から重なる第2電機子コアと、前記第1電機子コアの外面側および前記第2電機子コアの外面側を通るように巻回された駆動コイルと、を備えていることを特徴とする。 In order to solve the above problem, an actuator to which the first invention is applied includes a support, a movable body, an elastic member connected to the movable body and the support, and the movable body to the support. A drive mechanism for vibrating in the first direction, the drive mechanism being from one side in a second direction intersecting the first direction on one side member of the support and the movable body A first magnetic core provided with a plurality of first salient poles projecting toward the other side, and the first magnetic core on the one side member facing the first magnetic core on the other side in the second direction; A second magnetic core provided with a plurality of second salient poles projecting from the other side in the second direction toward the one side along the first direction in opposite phase to the first salient pole, and the support The first magnetic core in the other side member of the body and the movable body And an armature provided between the second magnetic core, and the armature is a permanent magnet magnetized along the first direction, and one of the permanent magnet in the first direction. A first armature core overlapping from the side, a second armature core overlapping the permanent magnet from the other side in the first direction, an outer surface side of the first armature core and an outer surface side of the second armature core And a drive coil wound to pass through.
 第一の発明では、電機子から発生した磁束が第1磁性コアおよび第2磁性コアを通過する磁束密度の変化を利用して推力を発生させる、すなわち、駆動機構は、リニアモータと同様に動作するので、可動体に大きな推力を発生させることができる。それ故、利用者に強い振動を体感させることができる。 In the first invention, the magnetic flux generated from the armature generates a thrust utilizing a change in magnetic flux density passing through the first magnetic core and the second magnetic core, that is, the drive mechanism operates in the same manner as a linear motor. Therefore, a large thrust can be generated in the movable body. Therefore, the user can feel strong vibration.
 第一の発明において、前記電機子では、前記永久磁石、前記第1電機子コア、前記第2電機子コア、および駆動コイルを備えた電機子ユニットが前記第1方向に沿って複数配置されている態様を採用することができる。かかる態様によれば、駆動機構は、可動体に大きな推力を発生させることができるので、利用者により強い振動を体感させることができる。 In the first invention, in the armature, a plurality of armature units including the permanent magnet, the first armature core, the second armature core, and a drive coil are disposed along the first direction. Can be adopted. According to this aspect, since the drive mechanism can generate a large thrust on the movable body, the user can experience strong vibration.
 第一の発明において、前記第1磁性コアおよび前記第2磁性コアは前記可動体に設けられ、前記電機子は、前記支持体に設けられている態様を採用することができる。かかる態様によれば、可動体に駆動コイルを設けた場合と違って、駆動コイルに対する給電が容易である。 In the first invention, the first magnetic core and the second magnetic core may be provided on the movable body, and the armature may be provided on the support. According to this aspect, unlike the case where the movable body is provided with the drive coil, power supply to the drive coil is easy.
 第一の発明において、前記支持体は、前記電機子を保持するホルダ部を備え、前記可動体は、前記ホルダ部に前記第2方向の一方側で対向する非磁性の第1壁部と、前記ホルダ部に前記第2方向の他方側で対向する非磁性の第2壁部と、を備え、前記第1壁部の前記ホルダ部と対向する面に重なるように前記第1磁性コアが配置され、前記第2壁部の前記ホルダ部と対向する面に重なるように前記第2磁性コアが配置されている態様を採用することができる。 In the first invention, the support body includes a holder portion for holding the armature, and the movable body is a nonmagnetic first wall portion facing the holder portion on one side in the second direction; A nonmagnetic second wall opposed to the other side in the second direction in the holder, and the first magnetic core is disposed so as to overlap a surface of the first wall opposed to the holder It is possible to adopt an aspect in which the second magnetic core is disposed so as to overlap the surface of the second wall facing the holder.
 第一の発明において、前記可動体は、前記第1壁部および前記第2壁部のうち少なくとも一方の壁部に連結されて前記駆動機構を前記第1方向および前記第2方向と交差する第3方向の一方側から覆う出力部材を有している態様を採用することができる。かかる態様によれば、出力部材を介して可動体の振動を出力することができるので、出力部材に触れた利用者に強い振動を体感させることができる。 In the first invention, the movable body is connected to at least one of the first wall and the second wall and intersects the drive mechanism with the first direction and the second direction. The aspect which has an output member covered from one side of 3 directions is employable. According to this aspect, since the vibration of the movable body can be output through the output member, the user who has touched the output member can feel strong vibration.
 第一の発明において、前記第1壁部の前記第1方向の一方側の端部、前記第1壁部の前記第1方向の他方側の端部、前記第2壁部の前記第1方向の一方側の端部、前記第2壁部の前記第1方向の他方側の端部の計4個所の各々に、前記可動体を前記第1方向にガイドするガイド機構が設けられている態様を採用することができる。 In the first invention, one end of the first wall in the first direction, the other end of the first wall in the first direction, the first direction of the second wall A guide mechanism for guiding the movable body in the first direction is provided at each of a total of four locations at one end of the second wall and the other end of the second wall in the first direction Can be adopted.
 第一の発明において、前記ガイド機構は、前記4個所の各々に前記可動体と前記支持体とによって前記第2方向の両側から支持された転動ボールを備えている態様を採用することができる。 In the first invention, the guide mechanism may adopt an aspect including rolling balls supported at both sides in the second direction by the movable body and the support at each of the four locations. .
 第一の発明において、前記弾性部材は、前記可動体に対して前記第1方向の一方側で前記可動体と前記支持体とが前記第1方向で対向する個所と、前記可動体に対して前記第1方向の他方側で前記可動体と前記支持体とが前記第1方向で対向する個所に設けられている態様を採用することができる。 In the first invention, the elastic member is a portion where the movable body and the support body face each other in the first direction on one side in the first direction with respect to the movable body, and the elastic member The aspect by which the said movable body and the said support body are provided in the location which opposes in the said 1st direction by the other side of the said 1st direction is employable.
 第一の発明において、前記弾性部材は、粘弾性部材である態様を採用することができる。 In the first invention, the elastic member may be a visco-elastic member.
 上記問題を解決するために、第二の発明を適用したアクチュエータは、支持体と、可動体と、前記可動体を前記支持体に対して第1方向に振動させる駆動機構と、前記第1方向と交差する第2方向で前記可動体と前記支持体とが対向する個所に設けられ、前記可動体を前記第1方向にガイドするガイド機構と、を有し、前記ガイド機構は、前記支持体側で前記第1方向および前記第2方向と交差する第3方向で並列して前記第1方向に延在する2本の第1レールと、前記可動体側で前記第3方向で並列して前記第1方向に延在する2本の第2レールと、前記2本の第1レールおよび前記2本の第2レールによって前記第2方向の両側から支持された転動ボールと、を備えていることを特徴とする。 In order to solve the above problems, an actuator to which the second invention is applied includes a support, a movable body, a drive mechanism that causes the movable body to vibrate in a first direction with respect to the support, and the first direction. A guide mechanism provided at a position where the movable body and the support body face each other in a second direction intersecting with the guide body and guiding the movable body in the first direction, the guide mechanism being on the support body side And two first rails extending in the first direction in parallel in a third direction intersecting the first direction and the second direction, and in parallel in the third direction on the movable body side. It has two second rails extending in one direction, and rolling balls supported from both sides in the second direction by the two first rails and the two second rails. It is characterized by
 第二の発明において、ガイド機構では、支持体側の2本の第1レールと可動体側の2本の第2レールとによって転動ボールが支持されている。このため、可動体は、ガイド機構にガイドされながら第1方向にスムーズに振動する。ここで、転動ボールは、支持体側の2本の第1レールと可動体側の2本の第2レールとによって第2方向の両側から支持されている。このため、可動体に外力が加わっても、可動体の第2方向および第3方向への変位がガイド機構によって抑制される。従って、可動体に外力が加わった状態でも、可動体を第1方向に適正に振動させることができる。 In the second invention, in the guide mechanism, the rolling balls are supported by the two first rails on the support side and the two second rails on the movable body side. Thus, the movable body vibrates smoothly in the first direction while being guided by the guide mechanism. Here, the rolling balls are supported from both sides in the second direction by the two first rails on the support side and the two second rails on the movable body side. Therefore, even if an external force is applied to the movable body, the displacement of the movable body in the second direction and the third direction is suppressed by the guide mechanism. Therefore, even in the state where an external force is applied to the movable body, the movable body can be appropriately vibrated in the first direction.
 第二の発明において、前記第1方向に直交する面で切断したとき、前記2本の第1レール、および前記2本の第2レールは各々、前記転動ボールを支持する面が凸曲面になっている態様を採用することができる。かかる態様によれば、転動ボールと支持体側との接触面積や、転動ボールと可動体側との接触面積が狭いので、可動体が第1方向に振動する際の摺動抵抗が小さい。従って、可動体をスムーズに第1方向で振動させることができる。 In a second invention, when cut by a plane orthogonal to the first direction, the two first rails and the two second rails each have a convex curved surface for supporting the rolling balls. The aspect which has become can be adopted. According to this aspect, since the contact area between the rolling ball and the support and the contact area between the rolling ball and the movable body are small, the sliding resistance when the movable body vibrates in the first direction is small. Therefore, the movable body can be vibrated smoothly in the first direction.
 第二の発明において、前記2本の第1レール、および前記2本の第2レールは各々、丸棒状である態様を採用することができる。かかる態様によれば、第1レールおよび第2レールは各々、大きな強度を有することになる。なお、本発明における「丸棒状」とは円筒状である場合も含む意味である。 In a second aspect of the invention, the two first rails and the two second rails may each be in the form of a round bar. According to this aspect, the first and second rails each have high strength. In the present invention, "round rod shape" is meant to include the case of being cylindrical.
 v発明において、前記ガイド機構は、前記2本の第1レール、前記2本の第2レール、および前記転動ボールを備えたガイドユニットを前記可動体の前記第2方向の一方側において前記第1方向で離間する2個所、および前記可動体の前記第2方向の他方側において前記第1方向で離間する2個所の計4個所に備えている態様を採用することができる。かかる態様によれば、可動体を安定した姿勢で適正にガイドすることができる。 In the v invention, the guide mechanism includes a guide unit provided with the two first rails, the two second rails, and the rolling balls at one side of the movable body in the second direction. It is possible to adopt an aspect provided at a total of four places, two places separated in one direction, and two places separated in the first direction on the other side of the movable body in the second direction. According to this aspect, the movable body can be properly guided in a stable posture.
 第二の発明において、前記駆動機構は、前記第3方向からみたとき、前記4個所で囲まれた空間内に配置されている態様を採用することができる。 In the second invention, the drive mechanism may adopt an aspect of being disposed in a space surrounded by the four points when viewed from the third direction.
 第二の発明において、前記支持体は、前記駆動機構を構成するための支持体側構成要素を保持するホルダ部を備え、前記可動体は、前記ホルダ部に前記第2方向の一方側で対向する第1壁部と、前記ホルダ部に前記第2方向の他方側で対向する第2壁部と、を備え、前記ガイド機構は、前記第1壁部の前記第1方向の一方側の端部、前記第1壁部の前記第1方向の他方側の端部、前記第2壁部の前記第1方向の一方側の端部、および前記第2壁部の前記第1方向の他方側の端部の計4個所に設けられている態様を採用することができる。 In the second invention, the support includes a holder portion for holding a support-side component for constituting the drive mechanism, and the movable body faces the holder portion on one side in the second direction. A first wall portion and a second wall portion facing the holder portion on the other side in the second direction are provided, and the guide mechanism is an end portion on one side in the first direction of the first wall portion. An end of the other side of the first wall in the first direction, an end of the one side of the second wall in the first direction, and a side of the other side of the second wall in the first direction The aspect provided in a total of four places of an edge part is employable.
 第二の発明において、前記可動体は、前記第1壁部および前記第2壁部のうち少なくとも一方の壁部に連結されて前記駆動機構を前記第3方向の一方側から覆う出力部材を有している態様を採用することができる。かかる態様によれば、出力部材を介して可動体の振動を出力することができるので、出力部材に触れた利用者に強い振動を体感させることができる。 In the second invention, the movable body has an output member connected to at least one of the first wall and the second wall to cover the drive mechanism from one side in the third direction. The aspect which is carried out can be adopted. According to this aspect, since the vibration of the movable body can be output through the output member, the user who has touched the output member can feel strong vibration.
 第二の発明において、前記可動体と前記支持体とに接続された弾性部材が設けられている態様を採用することができる。 In the second invention, an aspect in which an elastic member connected to the movable body and the support is provided can be adopted.
 第二の発明において、前記弾性部材は、前記可動体に対して前記第1方向の一方側で前記可動体と前記支持体とが前記第1方向で対向する個所と、前記可動体に対して前記第1方向の他方側で前記可動体と前記支持体とが前記第1方向で対向する個所に設けられている態様を採用することができる。 In the second invention, the elastic member is a portion where the movable body and the support body face each other in the first direction on one side in the first direction with respect to the movable body, and the elastic member The aspect by which the said movable body and the said support body are provided in the location which opposes in the said 1st direction by the other side of the said 1st direction is employable.
 上記問題を解決するために、第三の発明を適用したアクチュエータは、支持体と、可動体と、前記可動体を前記支持体に対して第1方向で振動させる駆動機構と、前記可動体が前記支持体に対して前記第1方向の一方側で対向する部分に設けられた第1粘弾性部材と、前記可動体が前記支持体に対して前記第1方向の他方側で対向する部分に設けられた第2粘弾性部材と、を有することを特徴とする。 In order to solve the above problems, an actuator to which the third invention is applied includes a support, a movable body, a drive mechanism that causes the movable body to vibrate in a first direction with respect to the support, and the movable body A first visco-elastic member provided on a portion facing on one side in the first direction with respect to the support, and a portion on the other side of the first direction facing the support with the movable body And a second viscoelastic member provided.
 第三の発明では、可動体と支持体との間に粘弾性部材(第1粘弾性部材および第2粘弾性部材)が配置されているため、可動体を振動させた際、第1粘弾性部材および第2粘弾性部材がダンパ機能を発揮するので、可動体が共振しにくい。また、第1粘弾性部材は、可動体が支持体に対して第1方向の一方側で対向する部分に配置され、第2粘弾性部材は、可動体が支持体に対して第1方向の他方側で対向する部分に配置されている。このため、可動体と支持体との相対的な位置が第1方向で変動して、第1粘弾性部材が配置されている部分での可動体と支持体との間隔、および第2粘弾性部材が配置されている部分での可動体と支持体との間隔のうちの一方の間隔が広くなった場合には、他方の間隔が狭くなる。従って、第1粘弾性部材の特性と第2粘弾性部材の特性とを合成した特性は、上記の間隔の変動の影響を受けにくく、第1粘弾性部材および第2粘弾性部材は、安定した機能を発揮する。 In the third invention, since the visco-elastic members (the first visco-elastic member and the second visco-elastic member) are disposed between the movable body and the support, when the movable body is vibrated, the first visco-elasticity is generated. Since the member and the second viscoelastic member exert the damper function, the movable body is less likely to resonate. The first visco-elastic member is disposed in a portion where the movable body is opposed to the support on one side in the first direction, and the second visco-elastic member is configured such that the movable body is in the first direction with respect to the support It is arranged in the opposite part on the other side. Therefore, the relative position between the movable body and the support varies in the first direction, and the distance between the movable body and the support at the portion where the first viscoelastic member is disposed, and the second viscoelasticity If the distance between one of the movable body and the support at the portion where the member is disposed is increased, the other is narrowed. Therefore, the characteristics combining the characteristics of the first viscoelastic member and the characteristics of the second viscoelastic member are less susceptible to the fluctuation of the above-mentioned interval, and the first and second viscoelastic members are stable. Demonstrate a function.
 第三の発明において、前記第1粘弾性部材は、前記可動体および前記支持体の前記第1方向の一方側の端部同士が前記第1方向で対向する部分に設けられ、前記第2粘弾性部材は、前記可動体および前記支持体の前記第1方向の他方側の端部同士が前記第1方向で対向する部分に設けられている態様を採用することができる。 In the third invention, the first visco-elastic member is provided in a portion where the movable body and the end portion on one side of the first direction of the support body face each other in the first direction, and the second visco-elastic member The elastic member may adopt an aspect in which the other ends of the movable body and the support in the first direction are provided in portions facing each other in the first direction.
 第三の発明において、前記第1粘弾性部材および前記第2粘弾性部材は各々、前記可動体が前記第1方向に振動する際、前記支持体および前記可動体に接している態様を採用することができる。かかる態様によれば、粘弾性部材(第1粘弾性部材および第2粘弾性部材)は、可動体の移動に確実に追従する。従って、可動体の共振を効果的に防止することができる。 In the third invention, the first viscoelastic member and the second viscoelastic member each adopt an aspect in which the movable body is in contact with the support and the movable body when the movable body vibrates in the first direction. be able to. According to this aspect, the visco-elastic members (first and second visco-elastic members) reliably follow the movement of the movable body. Therefore, the resonance of the movable body can be effectively prevented.
 前記駆動機構が停止している期間、前記第1粘弾性部材および前記第2粘弾性部材は各々、前記第1方向で圧縮された状態にある態様を採用することができる。かかる態様によれば、粘弾性部材(第1粘弾性部材および第2粘弾性部材)は、可動体の移動に確実に追従する。従って、可動体の共振を効果的に防止することができる。また、可動体が振動した際、所定のストローク内では、第1粘弾性部材および第2粘弾性部材が常に膨張しようとする力を発揮するので、第1粘弾性部材および第2粘弾性部材が安定したダンパ機能を発揮する。 The aspect in which each of the first viscoelastic member and the second viscoelastic member is compressed in the first direction can be adopted while the drive mechanism is stopped. According to this aspect, the visco-elastic members (first and second visco-elastic members) reliably follow the movement of the movable body. Therefore, the resonance of the movable body can be effectively prevented. Further, when the movable body vibrates, the first visco-elastic member and the second visco-elastic member constantly exert a force to expand in a predetermined stroke, so that the first visco-elastic member and the second visco-elastic member Demonstrates a stable damper function.
 第三の発明において、前記駆動機構は、前記第1方向と交差する第2方向で前記可動体と前記支持体とが対向する部分に配置され、前記支持体は、ベース部材と、前記ベース部材から前記第1方向および前記第2方向と交差する第3方向の一方側に突出して前記駆動機構を構成するための支持体側構成要素を保持するホルダ部と、前記ホルダ部に対して前記第1方向の一方側で前記ベース部材から前記第3方向の一方側に突出した第1凸部と、前記ホルダ部に対して前記第1方向の他方側で前記ベース部材から前記第3方向の一方側に突出した第2凸部と、を有し、前記可動体は、前記ホルダ部に前記第2方向の一方側で対向する第1壁部と、前記ホルダ部に前記第2方向の他方側で対向する第2壁部と、前記第1凸部に前記第1方向の一方側で対向する第3壁部と、前記第2凸部に前記第1方向の他方側で対向する第4壁部と、を備え、前記第1壁部の前記ホルダ部と対向する面に重なるように前記駆動機構を構成するための可動体側構成要素の一部が配置され、前記第2壁部の前記ホルダ部と対向する面に重なるように前記可動体側構成要素の他の一部が配置され、前記第1凸部と前記第3壁部との間に前記第1粘弾性部材が配置され、前記第2凸部と前記第4壁部との間に前記第2粘弾性部材が配置されている態様を採用することができる。 In the third invention, the drive mechanism is disposed at a portion where the movable body and the support face each other in a second direction intersecting the first direction, and the support includes a base member and the base member. A holder portion for holding a support-side component for forming the drive mechanism by protruding from one side in a third direction intersecting the first direction and the second direction, and the first portion relative to the holder portion A first protrusion projecting from the base member to one side in the third direction on one side of the direction, and one side in the third direction from the base member on the other side in the first direction with respect to the holder portion The movable body is a first wall portion facing the holder portion on one side in the second direction, and the holder portion on the other side in the second direction. The second wall facing each other, and the first convex portion in one of the first directions A third wall facing on the side and a fourth wall facing the second protrusion on the other side in the first direction, and overlapping a surface of the first wall facing the holder And a part of the movable body side component for constituting the drive mechanism is disposed, and another part of the movable body side component is disposed so as to overlap the surface of the second wall facing the holder part. And the first visco-elastic member is disposed between the first convex portion and the third wall portion, and the second visco-elastic member is disposed between the second convex portion and the fourth wall portion The embodiment which has been described can be adopted.
 第三の発明において、前記可動体は、前記第1壁部、前記第2壁部、前記第3壁部、および前記第4壁部のうちの少なくとも1つの壁部に連結されて前記駆動機構を前記第3方向の一方側から覆う出力部材を有している態様を採用することができる。かかる態様によれば、出力部材を介して可動体の振動を出力することができるので、出力部材に触れた利用者に強い振動を体感させることができる。 In the third invention, the movable body is connected to at least one of the first wall portion, the second wall portion, the third wall portion, and the fourth wall portion, and the drive mechanism is provided. The aspect which has an output member which covers from the one side of the said 3rd direction is employable. According to this aspect, since the vibration of the movable body can be output through the output member, the user who has touched the output member can feel strong vibration.
 第三の発明において、前記第1壁部の前記第1方向の一方側の端部、前記第1壁部の前記第1方向の他方側の端部、前記第2壁部の前記第1方向の一方側の端部、および前記第2壁部の前記第1方向の他方側の端部の計4個所の各々に、前記可動体を前記第1方向にガイドするガイド機構が設けられている態様を採用することができる。 In a third invention, an end on one side in the first direction of the first wall, an end on the other side in the first direction of the first wall, the first direction in the second wall A guide mechanism for guiding the movable body in the first direction is provided at each of four positions in total of the one end of the second wall and the other end of the second wall in the first direction. Aspects can be employed.
 第三の発明において、前記ガイド機構は、前記4個所の各々に前記可動体と前記支持体とによって前記第2方向の両側から支持された転動ボールを備えている態様を採用することができる。かかる態様によれば、可動体が支持体に転動ボールを介して支持された状態にあっても、可動体は、第1方向にスムーズに振動する。 In the third invention, the guide mechanism may adopt an aspect including rolling balls supported at both sides in the second direction by the movable body and the support at each of the four locations. . According to this aspect, even when the movable body is supported by the support via the rolling balls, the movable body vibrates smoothly in the first direction.
 第一の発明では、電機子から発生した磁束が第1磁性コアおよび第2磁性コアを通過する磁束密度の変化を利用して推力を発生させる、すなわち、駆動機構は、リニアモータと同様に動作するので、可動体に大きな推力を発生させることができる。それ故、利用者に強い振動を体感させることができる。 In the first invention, the magnetic flux generated from the armature generates a thrust utilizing a change in magnetic flux density passing through the first magnetic core and the second magnetic core, that is, the drive mechanism operates in the same manner as a linear motor. Therefore, a large thrust can be generated in the movable body. Therefore, the user can feel strong vibration.
 第二の発明において、ガイド機構では、支持体側の2本の第1レールと可動体側の2本の第2レールとによって転動ボールが支持されている。このため、可動体は、ガイド機構にガイドされながら第1方向に振動する。ここで、転動ボールは、支持体側の2本の第1レールと可動体側の2本の第2レールとによって第2方向の両側から支持されている。このため、可動体に外力が加わっても、可動体の第2方向および第3方向への変位がガイド機構によって抑制される。従って、可動体に外力が加わった状態でも、可動体を第1方向に適正に振動させることができる。 In the second invention, in the guide mechanism, the rolling balls are supported by the two first rails on the support side and the two second rails on the movable body side. For this reason, the movable body vibrates in the first direction while being guided by the guide mechanism. Here, the rolling balls are supported from both sides in the second direction by the two first rails on the support side and the two second rails on the movable body side. Therefore, even if an external force is applied to the movable body, the displacement of the movable body in the second direction and the third direction is suppressed by the guide mechanism. Therefore, even in the state where an external force is applied to the movable body, the movable body can be appropriately vibrated in the first direction.
 第三の発明では、可動体と支持体との間に粘弾性部材(第1粘弾性部材および第2粘弾性部材)が配置されているため、可動体を振動させた際、可動体がダンパ機能を発揮するので、可動体が共振しにくい。また、第1粘弾性部材は、可動体に対して第1方向の一方側で可動体と支持体との間に配置され、第2粘弾性部材は、可動体に対して第1方向の他方側で可動体と支持体との間に配置されている。このため、可動体に対して第1方向の一方側での可動体と支持体との間隔や、可動体に対して第1方向の他方側での可動体と支持体との間隔がばらついても、一方の間隔が広い場合には、他方の間隔が狭くなるので、第1粘弾性部材の特性と第2粘弾性部材の特性とを合成した特性は、上記の間隔の変動の影響を受けにくく、第1粘弾性部材および第2粘弾性部材は、安定した機能を発揮する。 In the third invention, since the visco-elastic members (the first visco-elastic member and the second visco-elastic member) are disposed between the movable body and the support, the movable body is a damper when the movable body is vibrated. Since the function is exhibited, the movable body is less likely to resonate. In addition, the first viscoelastic member is disposed between the movable body and the support on one side in the first direction with respect to the movable body, and the second viscoelastic member is disposed in the other side in the first direction with respect to the movable body. It is arranged on the side between the movable body and the support. Therefore, the distance between the movable body and the support on one side in the first direction with respect to the movable body and the distance between the movable body and the support on the other side in the first direction with respect to the movable body vary. Also in the case where one of the intervals is wide, the other interval becomes narrow, so the combined characteristics of the characteristics of the first viscoelastic member and the characteristics of the second viscoelastic member are affected by the variation of the above-mentioned interval. Hardly, the first and second viscoelastic members exert a stable function.
本発明の実施形態に係るアクチュエータの斜視図である。It is a perspective view of an actuator concerning an embodiment of the present invention. 図1に示すアクチュエータのXZ断面図である。It is XZ sectional drawing of the actuator shown in FIG. 図1に示すアクチュエータを駆動機構を通る位置で切断したときのYZ断面図である。It is YZ sectional drawing when the actuator shown in FIG. 1 is cut | disconnected in the position which passes a drive mechanism. 図1に示すアクチュエータをガイド機構を通る位置で切断したときのYZ断面図である。It is YZ sectional drawing when the actuator shown in FIG. 1 is cut | disconnected in the position which passes a guide mechanism. 図1に示すアクチュエータから可動体の出力部材を外した状態の斜視図である。It is a perspective view in the state where the output member of the movable body was removed from the actuator shown in FIG. 図1に示すアクチュエータにおいて支持体と可動体とを分離した分解斜視図である。It is the disassembled perspective view which isolate | separated the support body and the movable body in the actuator shown in FIG. 図6に示す支持体からカバーを外した状態の分解斜視図である。FIG. 7 is an exploded perspective view of the support shown in FIG. 6 with the cover removed. 図6に示す支持体から駆動機構を構成するための支持体側構成要素を外した状態の分解斜視図である。It is a disassembled perspective view of the state which removed the support body side component for comprising a drive mechanism from the support body shown in FIG. 図6に示す可動体から駆動機構を構成するための可動体側構成要素を外した状態の分解斜視図である。FIG. 7 is an exploded perspective view of a movable body shown in FIG. 6 from which a movable body side component for configuring a drive mechanism is removed. 図8に示す駆動機構の斜視図である。It is a perspective view of the drive mechanism shown in FIG. 図10に示す駆動機構の平面図である。It is a top view of the drive mechanism shown in FIG.
 図面を参照して、第一の発明、第二の発明および第三の発明の実施の形態を説明する。なお、第1の発明から第三の発明の実施の形態とは同じ実施の形態である。そこで、本発明の実施の形態を説明する。なお、以下の説明において、互いに交差する3つの方向を各々、第1方向X、第2方向Yおよび第3方向Zとして説明する。また、第1方向X、第2方向Yおよび第3方向Zは、互いに直交する方向である。また、第1方向Xの一方側にX1を付し、第1方向Xの他方側にX2を付し、第2方向Yの一方側にY1を付し、第2方向Yの他方側にY2を付し、第3方向Zの一方側にZ1を付し、第3方向Zの他方側にZ2を付して説明する。 Embodiments of the first invention, the second invention and the third invention will be described with reference to the drawings. The present invention is the same as the embodiments of the first to third inventions. Therefore, an embodiment of the present invention will be described. In the following description, three directions intersecting with each other will be described as a first direction X, a second direction Y, and a third direction Z, respectively. The first direction X, the second direction Y, and the third direction Z are directions orthogonal to each other. In addition, X1 is attached to one side in the first direction X, X2 is attached to the other side in the first direction X, Y1 is attached to one side in the second direction Y, Y2 is attached to the other side in the second direction Y In the description, one side of the third direction Z is attached with Z1 and the other side of the third direction Z is attached with Z2.
(全体構成)
 図1は、本発明の実施形態に係るアクチュエータ1の斜視図である。図2は、図1に示すアクチュエータ1のXZ断面図である。図3は、図1に示すアクチュエータ1を駆動機構5を通る位置で切断したときのYZ断面図である。図4は、図1に示すアクチュエータ1をガイド機構8を通る位置で切断したときのYZ断面図である。
(overall structure)
FIG. 1 is a perspective view of an actuator 1 according to an embodiment of the present invention. FIG. 2 is an XZ sectional view of the actuator 1 shown in FIG. FIG. 3 is a YZ cross-sectional view when the actuator 1 shown in FIG. 1 is cut at a position passing through the drive mechanism 5. FIG. 4 is a YZ sectional view when the actuator 1 shown in FIG. 1 is cut at a position passing through the guide mechanism 8.
 図1に示すように、本形態のアクチュエータ1は、全体として、第1方向Xの寸法が第2方向Yの寸法および第3方向Zの寸法より大きい直方体形状を有している。また、図2、図3および図4等を参照して以下に説明するように、アクチュエータ1は、機器本体に連結される支持体2と、支持体2に移動可能に支持された可動体3と、可動体3を支持体2に対して第1方向Xに振動させる駆動機構5とを有している。また、アクチュエータ1は、可動体3を第1方向Xにガイドするガイド機構8と、支持体2と可動体3とに接続された弾性部材(第1弾性部材91および第2弾性部材92)を有している。従って、可動体3は、ガイド機構8および弾性部材(第1弾性部材91および第2弾性部材92)を介して支持体2に支持され、この状態で第1方向Xに振動する。 As shown in FIG. 1, the actuator 1 of the present embodiment has a rectangular parallelepiped shape in which the dimension in the first direction X is larger than the dimension in the second direction Y and the dimension in the third direction Z as a whole. In addition, as described below with reference to FIGS. 2, 3 and 4 etc., the actuator 1 includes a support 2 connected to the device main body and a movable body 3 movably supported by the support 2. And the drive mechanism 5 for vibrating the movable body 3 in the first direction X with respect to the support 2. The actuator 1 further includes a guide mechanism 8 for guiding the movable body 3 in the first direction X, and elastic members (first elastic member 91 and second elastic member 92) connected to the support 2 and the movable body 3. Have. Accordingly, the movable body 3 is supported by the support 2 via the guide mechanism 8 and the elastic members (the first elastic member 91 and the second elastic member 92), and vibrates in the first direction X in this state.
(支持体2の構成)
 図5は、図1に示すアクチュエータ1から可動体3の出力部材38を外した状態の斜視図である。図6は、図1に示すアクチュエータ1において支持体2と可動体3とを分離した分解斜視図である。図7は、図6に示す支持体2からカバー25を外した状態の分解斜視図である。図8は、図6に示す支持体2から駆動機構5を構成するための支持体側構成要素5bを外した状態の分解斜視図である。
(Structure of Support 2)
FIG. 5 is a perspective view of the actuator 1 shown in FIG. 1 with the output member 38 of the movable body 3 removed. 6 is an exploded perspective view in which the support 2 and the movable body 3 are separated in the actuator 1 shown in FIG. 7 is an exploded perspective view of the support 2 shown in FIG. 6 with the cover 25 removed. FIG. 8 is an exploded perspective view of the support 2 shown in FIG. 6 with the support side component 5b for constituting the drive mechanism 5 removed.
 図2~図8に示すように、支持体2は、板状のベース部材21と、ベース部材21から第3方向Zの一方側Z1に突出したホルダ部22と、ホルダ部22に対して第1方向Xの一方側X1でベース部材21から第3方向Zの一方側Z1に突出した第1凸部23と、ホルダ部22に対して第1方向Xの他方側X2でベース部材21から第3方向Zの一方側Z1に突出した第2凸部24とを有している。ベース部材21は、機器本体への連結部である。ホルダ部22、第1凸部23、および第2凸部24は各々、ベース部材21に第3方向Zの他方側Z2からネジ219(図2等参照)によって固定されている。 As shown in FIGS. 2 to 8, the support 2 has a plate-like base member 21, a holder portion 22 protruding from the base member 21 on one side Z1 in the third direction Z, and a holder portion 22. The first convex portion 23 protrudes from the base member 21 to the one side Z1 in the third direction Z on one side X1 in one direction X, and the other side from the base member 21 on the other side X2 in the first direction X It has the 2nd convex part 24 projected on one side Z1 of 3 directions Z. The base member 21 is a connecting portion to the device body. The holder portion 22, the first convex portion 23, and the second convex portion 24 are each fixed to the base member 21 from the other side Z2 in the third direction Z by a screw 219 (see FIG. 2 and the like).
 ホルダ部22は、駆動機構5を構成するための支持体側構成要素5bを保持する部分である。ホルダ部22は、第2方向Yの一方側Y1で第1方向Xに沿って配置された柱状部221、222、223と、第2方向Yの他方側Y2で第1方向Xに沿って配置された柱状部224、225、226とを備えている。柱状部221、222、223は、第1方向Xに延在する連結部227によって根元部分が連結され、柱状部224、225、226は、第1方向Xに延在する連結部228によって根元部分が連結されている。 The holder portion 22 is a portion that holds the support-side component 5 b for configuring the drive mechanism 5. The holder portion 22 is disposed along the first direction X on the columnar portions 221, 222, 223 disposed along the first direction X on one side Y1 in the second direction Y, and on the other side Y2 in the second direction Y. And the columnar portions 224, 225, and 226. The columnar portions 221, 222, 223 are connected at their root portions by the connecting portions 227 extending in the first direction X, and the columnar portions 224, 225, 226 are root portions by the connecting portions 228 extending in the first direction X Are linked.
 柱状部221~226の第3方向Zの一方側Z1の端部、第1凸部23の一方側Z1の端部、および第2凸部24の一方側Z1の端部には、カバー25がネジ259によって固定されている。カバー25は、ホルダ部22を覆う平板部250と、平板部250の第1方向Xの一方側X1の端部から第3方向Zの他方側Z2に屈曲した第1側板部251と、平板部250の第1方向Xの他方側X2の端部から第3方向Zの他方側Z2に屈曲した第2側板部252とを有している。第1側板部251は、第1凸部23に第1方向Xの一方側X1から重なり、第2側板部252は、第2凸部24に第1方向Xの他方側X2から重なっている。平板部250には、矩形の開口部250aと、第1凸部23の位置決め凸部239、および第2凸部24の位置決め凸部249が嵌る穴250b、250cが形成されている。 The cover 25 is provided at the end of one side Z1 of the columnar portions 221 to 226 in the third direction Z, the end of the one side Z1 of the first convex portion 23, and the end of the one side Z1 of the second convex portion 24. It is fixed by a screw 259. The cover 25 has a flat plate portion 250 covering the holder portion 22, a first side plate portion 251 bent from the end of the first side X1 in the first direction X of the flat plate portion 250 to the other side Z2 in the third direction Z, and a flat plate portion And a second side plate portion 252 bent from the end of the other side X2 of the first direction X 250 to the other side Z2 of the third direction Z. The first side plate portion 251 overlaps the first convex portion 23 from one side X1 in the first direction X, and the second side plate portion 252 overlaps the second convex portion 24 from the other side X2 in the first direction X. The flat plate portion 250 is formed with holes 250b and 250c in which the rectangular opening 250a, the positioning convex portion 239 of the first convex portion 23, and the positioning convex portion 249 of the second convex portion 24 are fitted.
(可動体3の構成)
 図9は、図6に示す可動体3から駆動機構5を構成するための可動体側構成要素5aを外した状態の分解斜視図である。図2~図6、および図9に示すように、可動体3は、ホルダ部22に第2方向Yの一方側Y1で対向する第1壁部31と、ホルダ部22に第2方向Yの他方側Y2で対向する第2壁部32と、第1凸部23に第1方向Xの一方側X1で対向する第3壁部33と、第2凸部24に第1方向Xの他方側X2で対向する第4壁部34とを備えている。第1壁部31、第2壁部32、第3壁部33、および第4壁部34は各々、別部材からなり、ネジ391によって連結されて、四角形の枠体30を構成している。
(Configuration of movable body 3)
FIG. 9 is an exploded perspective view of the movable body 3 shown in FIG. 6 with the movable body side component 5a for constituting the drive mechanism 5 removed. As shown in FIGS. 2 to 6 and 9, the movable body 3 has a first wall 31 facing the holder 22 on one side Y1 in the second direction Y, and the holder 22 in the second direction Y. The second wall 32 opposed on the other side Y2, the third wall 33 opposed to the first convex 23 on the one side X1 in the first direction X, and the other side of the second convex 24 in the first direction X It has the 4th wall 34 which counters by X2. The first wall 31, the second wall 32, the third wall 33, and the fourth wall 34 are respectively formed of separate members, and are connected by screws 391 to form a rectangular frame 30.
 可動体3は、第1壁部31、第2壁部32、第3壁部33、および第4壁部34のいずれかに連結されて駆動機構5を覆う出力部材38を有している。本形態において、出力部材38は四角形の板状であり、第1壁部31および第2壁部32の第3方向Zの一方側Z1の端部にネジ392によって連結されている。なお、出力部材38は、第1壁部31および第2壁部32の一方のみに連結されている態様や、第1壁部31、第2壁部32、第3壁部33および第4壁部34の少なくとも1つに連結されている態様であってもよい。出力部材38では、第3方向Zの一方側Z1に向けて円筒状の筒部386、387、388、389が突出しており、筒部386、387、388、389は、出力部材38にタッチパネル等を固定する際に利用される。 The movable body 3 includes an output member 38 connected to any one of the first wall 31, the second wall 32, the third wall 33, and the fourth wall 34 to cover the drive mechanism 5. In this embodiment, the output member 38 has a rectangular plate shape, and is connected to the end of the first wall 31 and the second wall 32 in the third direction Z on one side Z1 by a screw 392. The output member 38 is connected to only one of the first wall 31 and the second wall 32, or the first wall 31, the second wall 32, the third wall 33, and the fourth wall. The aspect connected to at least one of the parts 34 may be sufficient. In the output member 38, cylindrical cylindrical portions 386, 387, 388, 389 project toward the one side Z1 in the third direction Z, and the cylindrical portions 386, 387, 388, 389 contact the output member 38 with a touch panel or the like. Is used to fix the
 第1壁部31および第2壁部32において、ホルダ部22と対向する内面310、320側は、後述する可動体側構成要素5aを配置する部分になっており、第1壁部31および第2壁部32の第3方向Zの他方側Z2の端部は、可動体側構成要素5aを支持する底板部315、325を構成している。従って、第1壁部31および第2壁部32は、可動体側構成要素5aに磁気的な影響を及ぼさないように、非磁性材料によって構成されている。本形態において、第1壁部31、第2壁部32、第3壁部33、第4壁部34、および出力部材38が全て非磁性材料によって構成されている。 In the first wall portion 31 and the second wall portion 32, the inner surfaces 310, 320 side facing the holder portion 22 are portions for arranging the movable body side component 5a described later, and the first wall portion 31 and the second wall portion 32 The end of the other side Z2 in the third direction Z of the wall portion 32 constitutes bottom plate portions 315, 325 for supporting the movable body side component 5a. Therefore, the first wall 31 and the second wall 32 are made of a nonmagnetic material so as not to magnetically affect the movable body side component 5a. In the present embodiment, the first wall 31, the second wall 32, the third wall 33, the fourth wall 34, and the output member 38 are all made of nonmagnetic material.
 底板部315、325では、第1方向Xの両端側の各々に第3方向Zの一方側Z1に突出した軸部316、317、326、327が形成されている。軸部316、317、326、327は各々、第3方向Zの一方側Z1の端部が、出力部材38の穴381、382、383、384に嵌るようになっている。また、第1壁部31および第2壁部32の底面では、第1方向Xの中央部から第3方向Zの他方側Z2に軸部318、328が突出している。軸部318、328は、可動体3が第3方向Zの他方側Z1に変位した際にベース部材21と当接して、可動体3の第3方向Zの他方側Z1への可動範囲を規定している。 In the bottom plate portions 315 and 325, shaft portions 316, 317, 326, and 327 are formed on one end Z1 of the third direction Z on both end sides in the first direction X, respectively. The shaft portions 316, 317, 326, 327 are adapted to be fitted into the holes 381, 382, 383, 384 of the output member 38 at the end of the one side Z1 in the third direction Z, respectively. Further, at the bottom surfaces of the first wall 31 and the second wall 32, the shaft portions 318 and 328 project from the central portion in the first direction X to the other side Z2 in the third direction Z. The shaft portions 318, 328 contact the base member 21 when the movable body 3 is displaced to the other side Z1 in the third direction Z, and define the movable range of the movable body 3 to the other side Z1 in the third direction Z. doing.
(ガイド機構8の構成)
 図2、図5および図6等に示す駆動機構5は、可動体3を支持体2に対して第1方向Xの一方側X1および他方側X2に駆動して可動体3を第1方向Xで振動させる。従って、アクチュエータ1では、図4および図6に示すように、第2方向Yで可動体3と支持体2とが対向する個所に、可動体3を第1方向Xにガイドするガイド機構8が設けられている。
(Configuration of guide mechanism 8)
The driving mechanism 5 shown in FIGS. 2, 5 and 6 etc. drives the movable body 3 to the one side X1 and the other side X2 in the first direction X with respect to the support 2 to move the movable body 3 in the first direction X Vibrate at. Therefore, in the actuator 1, as shown in FIGS. 4 and 6, the guide mechanism 8 for guiding the movable body 3 in the first direction X at a position where the movable body 3 and the support body 2 face each other in the second direction Y. It is provided.
 ガイド機構8を構成するにあたって、本形態では、同一構成のガイドユニット80が、可動体3の第2方向Yの一方側Y1において第1方向Xで離間する2個所、および可動体3の第2方向Yの他方側Y2において第1方向Xで離間する2個所の計4個所に設けられている。より具体的には、ガイド機構8(ガイドユニット80)は、可動体3の第1壁部31の第1方向Xの一方側X1の端部、第1壁部31の第1方向Xの他方側X2の端部、第2壁部32の第1方向Xの一方側X1の端部、および第2壁部32の第1方向Xの他方側X2の端部の計4個所に設けられている。 In configuring the guide mechanism 8, in the present embodiment, the guide unit 80 having the same configuration separates in the first direction X at one side Y1 of the movable body 3 in the second direction Y, and the second of the movable body 3 The other side Y2 of the direction Y is provided at a total of four places separated in the first direction X at two places. More specifically, the guide mechanism 8 (guide unit 80) is an end of one side X1 of the first wall 31 of the movable body 3 in the first direction X, and the other in the first direction X of the first wall 31. Provided at a total of four locations at the end of the side X2, the end of one side X1 of the second wall 32 in the first direction X, and the end of the other side X2 of the second wall 32 in the first direction X There is.
 ここで、ガイド機構8(ガイドユニット80)は、4個所の各々に可動体3と支持体2とによって第2方向Yの両側から支持された転動ボール83を備えている。より具体的には、ガイド機構8は、支持体2側において第3方向Zで並列して第1方向Xに延在する2本の第1レール81と、可動体3側において第3方向Zで並列して第1方向Xに延在する2本の第2レール82と、2本の第1レール81および2本の第2レール82によって第2方向Yの両側から支持された転動ボール83とを備えている。 Here, the guide mechanism 8 (guide unit 80) is provided with rolling balls 83 supported from both sides in the second direction Y by the movable body 3 and the support 2 at each of four places. More specifically, the guide mechanism 8 includes two first rails 81 extending in the first direction X in parallel in the third direction Z on the support 2 side, and the third direction Z on the movable body 3 side. Rolling balls supported from both sides in the second direction Y by the two second rails 82 extending in the first direction X and the two first rails 81 and the two second rails 82 in parallel And 83.
 2本の第1レール81は、第1凸部23の第2方向Yの一方側Y1の側面に形成された凹部231、第1凸部23の第2方向Yの他方側Y2の側面に形成された凹部232、第2凸部24の第2方向Yの一方側Y1の側面に形成された凹部241、および第2凸部24において第2方向Yの他方側Y2の側面に形成された凹部232の各々で両端が固定されている。また、凹部231、232、241、242には、2本の第1レール81を転動ボール83とは反対側から支持する補強用凸部231a、232a、241a、242aが形成されている。 The two first rails 81 are formed on the side surface of the first protrusion 23 on the side surface of the one side Y1 in the second direction Y, and the side surface of the first protrusion 23 on the other side Y2 of the second direction Y Recessed portion 232, a recessed portion 241 formed on the side surface of one side Y1 in the second direction Y of the second protrusion 24, and a recessed portion formed on the side surface of the other side Y2 in the second direction Y Both ends are fixed at each of 232. Further, in the recessed portions 231, 232, 241, 242, reinforcing convex portions 231a, 232a, 241a, 242a for supporting the two first rails 81 from the side opposite to the rolling balls 83 are formed.
 2本の第2レール82は、第1壁部31の第1方向Xの一方側X1の端部の内面に形成された凹部311、第1壁部31の第1方向Xの他方側X2の端部の内面に形成された凹部312、第2壁部32の第1方向Xの一方側X1の端部の内面に形成された凹部321、および第2壁部32の第1方向Xの他方側X2の端部の内面に形成された凹部322の各々で両端が固定されている。また、凹部311、312、321、322には、2本の第2レール82を転動ボール83とは反対側から支持する補強用凸部311a、312a、321a、322aが形成されている。 The two second rails 82 are a recess 311 formed on the inner surface of the end of one side X1 of the first wall 31 in the first direction X, and the other side X2 of the first wall 31 in the first direction X. A recess 312 formed on the inner surface of the end, a recess 321 formed on the inner surface of the end of one side X1 of the second wall 32 in the first direction X, and the other in the first direction X of the second wall 32 Both ends are fixed at each of the concave portions 322 formed on the inner surface of the end of the side X2. Further, in the concave portions 311, 312, 321, 322, reinforcing convex portions 311a, 312a, 321a, 322a for supporting the two second rails 82 from the side opposite to the rolling balls 83 are formed.
(粘弾性部材の構成)
 図2および図6に示すように、アクチュエータ1では、可動体3が支持体2に対して第1方向Xの一方側X1で対向する部分に第1弾性部材91が設けられ、第1弾性部材91に対して第1方向Xで離間する位置において可動体3が支持体2に対して第1方向Xの他方側X2で対向する部分に第2弾性部材92が設けられている。
(Configuration of visco-elastic member)
As shown in FIGS. 2 and 6, in the actuator 1, a first elastic member 91 is provided at a portion where the movable body 3 opposes the support 2 on one side X1 in the first direction X, and the first elastic member A second elastic member 92 is provided at a position where the movable body 3 opposes the support 2 on the other side X2 in the first direction X at a position separated in the first direction X with respect to 91.
 本形態において、第1弾性部材91は、可動体3および支持体2の第1方向Xの一方側X1の端部同士が第1方向Xで対向する部分に設けられている。第2弾性部材92は、可動体3および支持体2の第1方向Xの他方側X2の端部同士が第1方向Xで対向する部分に設けられている。より具体的には、第1弾性部材91は、可動体3の第1方向Xの一方側X1の端部である第3壁部33と、支持体2の第1方向Xの一方側X1の端部である第1凸部23との間に設けられている。第2弾性部材92は、可動体3の第1方向Xの他方側X2の端部である第4壁部34と、支持体2の第1方向Xの他方側X2の端部である第2凸部24との間に設けられている。 In the present embodiment, the first elastic member 91 is provided at a portion where the ends of the movable body 3 and the support 2 on the one side X1 in the first direction X oppose each other in the first direction X. The second elastic member 92 is provided at a portion where the end portions of the movable body 3 and the support 2 on the other side X2 in the first direction X oppose each other in the first direction X. More specifically, the first elastic member 91 has a third wall 33, which is an end of the movable body 3 on one side X1 in the first direction X, and one side X1 on the one side X of the support 2 in the first direction X. It is provided between the end and the first convex portion 23. The second elastic member 92 is a fourth wall 34 which is an end of the movable body 3 in the other direction X2 in the first direction X, and a second elastic member 92 which is an end of the other side X2 in the first direction X of the support 2. It is provided between the convex portion 24.
 本形態では、第1凸部23の第1方向Xの一方側X1には、カバー25の第1側板部251が重なっているため、第1弾性部材91は、第1側板部251と第3壁部33との間に設けられている。また、第2凸部24の第1方向Xの他方側X2には、カバー25の第2側板部252が重なっているため、第2弾性部材92は、第2側板部252と第4壁部34との間に設けられている。 In this embodiment, since the first side plate portion 251 of the cover 25 overlaps the one side X1 in the first direction X of the first convex portion 23, the first elastic member 91 includes the first side plate portion 251 and the third side plate portion 251. It is provided between the wall portion 33. Further, since the second side plate portion 252 of the cover 25 overlaps the other side X2 in the first direction X of the second convex portion 24, the second elastic member 92 includes the second side plate portion 252 and the fourth wall portion It is provided between 34 and.
 第1弾性部材91および第2弾性部材92は各々、バネや粘弾性部材等から構成されている。本形態において、第1弾性部材91は、ゲル状部材やゴム等の第1粘弾性部材910である。第2弾性部材92は、ゲル状部材やゴム等の第2粘弾性部材920である。粘弾性とは、粘性と弾性の両方を合わせた性質のことであり、ゲル状部材、プラスチック、ゴム等の高分子物質に顕著に見られる性質である。従って、第1粘弾性部材910および第2粘弾性部材920として、各種ゲル状部材を用いることができる。また、第1粘弾性部材910および第2粘弾性部材920として、天然ゴム、ジエン系ゴム(例えば、スチレン・ブタジエンゴム、イソプレンゴム、ブタジエンゴム)、クロロプレンゴム、アクリロニトリル・ブタジエンゴム等)、非ジエン系ゴム(例えば、ブチルゴム、エチレン・プロピレンゴム、エチレン・プロピレン・ジエンゴム、ウレタンゴム、シリコーンゴム、フッ素ゴム等)、熱可塑性エラストマー等の各種ゴム材料及びそれらの変性材料を用いてもよい。 Each of the first elastic member 91 and the second elastic member 92 is composed of a spring, a visco-elastic member or the like. In the present embodiment, the first elastic member 91 is a first viscoelastic member 910 such as a gel-like member or rubber. The second elastic member 92 is a second viscoelastic member 920 such as a gel-like member or rubber. The visco-elasticity is a property combining both viscosity and elasticity, and is a property which is remarkably observed in polymer substances such as gel-like members, plastics, rubber and the like. Therefore, various gel-like members can be used as the first viscoelastic member 910 and the second viscoelastic member 920. In addition, as the first viscoelastic member 910 and the second viscoelastic member 920, natural rubber, diene rubber (for example, styrene butadiene rubber, isoprene rubber, butadiene rubber), chloroprene rubber, acrylonitrile butadiene rubber, etc., non-diene Various rubber materials such as a base rubber (eg, butyl rubber, ethylene / propylene rubber, ethylene / propylene / diene rubber, urethane rubber, silicone rubber, fluororubber, etc.), thermoplastic elastomers and the like and modified materials thereof may be used.
 本形態において、第1粘弾性部材910および第2粘弾性部材920として、ゲル状部材が用いられている。より具体的には、第1粘弾性部材910および第2粘弾性部材920は、針入度が10度から110度であるシリコーン系ゲルである。針入度とは、JIS-K-2207やJIS-K-2220で規定されており、この値が小さい程、硬いことを意味する。粘弾性部材は、その伸縮方向によって、線形あるいは非線形の伸縮特性を備える。例えば、粘弾性部材は、その厚さ方向に押圧されて圧縮変形する際は、線形の成分(バネ係数)よりも非線形の成分(バネ係数)が大きい伸縮特性を備える。これに対して、厚さ方向に引っ張られて伸びる場合は、非線形の成分(バネ係数)よりも線形の成分(バネ係数)が大きい伸縮特性を備える。 In the present embodiment, a gel-like member is used as the first viscoelastic member 910 and the second viscoelastic member 920. More specifically, the first viscoelastic member 910 and the second viscoelastic member 920 are silicone gels having a penetration of 10 degrees to 110 degrees. The penetration degree is defined in JIS-K-2207 and JIS-K-2220, and the smaller the value, the harder it is. The visco-elastic member has linear or non-linear expansion and contraction characteristics depending on the expansion and contraction direction. For example, when a visco-elastic member is pressed in the thickness direction to be compressed and deformed, it has an expansion and contraction characteristic in which a non-linear component (spring coefficient) is larger than a linear component (spring coefficient). On the other hand, when it is pulled and extended in the thickness direction, it has an expansion and contraction characteristic in which a linear component (spring coefficient) is larger than a non-linear component (spring coefficient).
 ここで、第1粘弾性部材910および第2粘弾性部材920は各々、可動体3および支持体2に接着等の方法で固定されている。このため、第1粘弾性部材910および第2粘弾性部材920は各々、可動体3が第1方向Xに振動する際、支持体2および可動体3に接している。また、駆動機構5が停止している期間(可動体3の振動が停止している期間)、第1粘弾性部材910および第2粘弾性部材920は各々、第1方向Xで圧縮された状態にあり、可動体3の所定のストローク内では、第1粘弾性部材910および第2粘弾性部材920は各々、第1方向Xで圧縮された状態にある。 Here, the first viscoelastic member 910 and the second viscoelastic member 920 are respectively fixed to the movable body 3 and the support 2 by a method such as adhesion. Therefore, each of the first viscoelastic member 910 and the second viscoelastic member 920 is in contact with the support 2 and the movable body 3 when the movable body 3 vibrates in the first direction X. Further, while the drive mechanism 5 is stopped (period in which the vibration of the movable body 3 is stopped), the first viscoelastic member 910 and the second viscoelastic member 920 are each compressed in the first direction X The first viscoelastic member 910 and the second viscoelastic member 920 are each compressed in the first direction X within a predetermined stroke of the movable body 3.
(駆動機構5の構成)
 図10は、図8に示す駆動機構5の斜視図である。図11は、図10に示す駆動機構5の平面図である。図10および図11に示すように、駆動機構5は、支持体2および可動体3のうちの一方側部材に、第2方向Yの一方側Y1から他方側Y2に向けて突出した第1突極511が第1方向Xに沿って複数設けられた第1磁性コア51と、第1磁性コア51に第2方向Yの他方側Y2で対向する第2磁性コア52とを有している。第2磁性コア52では、第2方向Yの他方側Y2から一方側Y1に向けて突出した第2突極521が第1方向Xに沿って複数設けられている。ここで、第2突極521は、第1突極511とは逆位相である。すなわち、第1磁性コア51において、第1突極511の間は凹部512になっており、第2磁性コア52において第2突極521が形成する凸部は、第1突極511の間に形成された凹部512に第2方向Yで対向している。また、第2磁性コア52において、第2突極521の間は凹部522になっており、第1磁性コア51において第1突極511が形成する凸部は、第2突極521の間に形成された凹部522に第2方向Yで対向している。
(Configuration of drive mechanism 5)
FIG. 10 is a perspective view of the drive mechanism 5 shown in FIG. FIG. 11 is a plan view of the drive mechanism 5 shown in FIG. As shown in FIGS. 10 and 11, the drive mechanism 5 has a first protrusion protruding from one side Y1 to the other side Y2 in the second direction Y on one side member of the support 2 and the movable body 3. A plurality of poles 511 are provided along the first direction X, and the second magnetic core 52 is opposed to the first magnetic core 51 on the other side Y2 in the second direction Y. In the second magnetic core 52, a plurality of second salient poles 521 protruding in the second direction Y from the other side Y2 to the one side Y1 are provided along the first direction X. Here, the second salient pole 521 is in reverse phase to the first salient pole 511. That is, in the first magnetic core 51, the concave portion 512 is formed between the first salient poles 511, and the convex portion formed by the second salient pole 521 in the second magnetic core 52 is formed between the first salient poles 511. The concave portion 512 is opposed to the concave portion 512 in the second direction Y. Further, in the second magnetic core 52, the concave portion 522 is formed between the second salient poles 521, and the convex portion formed by the first salient pole 511 in the first magnetic core 51 is formed between the second salient poles 521. The concave portion 522 formed is opposed in the second direction Y.
 また、駆動機構5は、支持体2および可動体3のうちの他方側部材に、第1磁性コア51と第2磁性コア52との間に設けられた電機子54を備えている。電機子54は、第1方向Xで着磁された永久磁石56と、永久磁石56に第1方向Xの一方側X1から重なる第1電機子コア57と、永久磁石56に第1方向Xの他方側X2から重なる第2電機子コア58と、第1電機子コア57の外面側および第2電機子コア58の外面側を通るように巻回された駆動コイル59とを備えている。本形態において、駆動コイル59は、絶縁性のボビン55に巻回されており、第1電機子コア57および第2電機子コア58は、ボビン55の胴部の内側に、第2方向Yの一方側Y1から挿入されたコア部材57a、58aと第2方向Yの他方側Y2から挿入されたコア部材57b、58bとからなる。 The drive mechanism 5 further includes an armature 54 provided between the first magnetic core 51 and the second magnetic core 52 on the other side member of the support 2 and the movable body 3. The armature 54 includes a permanent magnet 56 magnetized in the first direction X, a first armature core 57 overlapping the permanent magnet 56 from the one side X1 in the first direction X, and a permanent magnet 56 in the first direction X A second armature core 58 overlapping from the other side X2 and a drive coil 59 wound so as to pass through the outer surface side of the first armature core 57 and the outer surface side of the second armature core 58 are provided. In the present embodiment, the drive coil 59 is wound around the insulating bobbin 55, and the first armature core 57 and the second armature core 58 are disposed inside the body of the bobbin 55 in the second direction Y. It consists of core members 57a and 58a inserted from one side Y1 and core members 57b and 58b inserted from the other side Y2 in the second direction Y.
 電機子54では、永久磁石56、第1電機子コア57、第2電機子コア58、および駆動コイル59を備えた電機子ユニット540が第1方向Xに沿って複数配置されている。本形態において、電機子54では、電機子ユニット540が第1方向Xに沿って2つ配置されている。 In the armature 54, a plurality of armature units 540 including the permanent magnet 56, the first armature core 57, the second armature core 58, and the drive coil 59 are arranged in the first direction X. In the present embodiment, in the armature 54, two armature units 540 are arranged along the first direction X.
 本形態において、一方側部材は可動体3であり、他方側部材は支持体2である。従って、第1磁性コア51および第2磁性コア52は、駆動機構5を構成するための可動体側構成要素5aとして、可動体3に設けられている。より具体的には、第1磁性コア51および第2磁性コア52は、可動体側構成要素5aとして、可動体3の第1壁部31および第2壁部32の内面310、320に重なるように配置され、固定されている。ここで、第1磁性コア51および第2磁性コア52には、第1方向Xで離間する2個所に穴516、517、526、527が形成されており、第1磁性コア51および第2磁性コア52を第1壁部31および第2壁部32に固定する際、第1磁性コア51および第2磁性コア52の穴516、517、526、527に第1壁部31および第2壁部32の軸部316、317、326、327が嵌って位置決めされる。 In the present embodiment, the one side member is the movable body 3 and the other side member is the support 2. Therefore, the first magnetic core 51 and the second magnetic core 52 are provided on the movable body 3 as the movable body side component 5 a for configuring the drive mechanism 5. More specifically, the first magnetic core 51 and the second magnetic core 52 overlap the inner surfaces 310 and 320 of the first wall portion 31 and the second wall portion 32 of the movable body 3 as the movable body side component 5a. Arranged and fixed. Here, in the first magnetic core 51 and the second magnetic core 52, holes 516, 517, 526, and 527 are formed at two places separated in the first direction X, and the first magnetic core 51 and the second magnetic When the core 52 is fixed to the first wall portion 31 and the second wall portion 32, the holes 516, 517, 526, and 527 of the first magnetic core 51 and the second magnetic core 52 are the first wall portion 31 and the second wall portion. The 32 shaft parts 316, 317, 326, 327 are fitted and positioned.
 また、電機子54(電機子ユニット540)は、駆動機構5を構成するための支持体側構成要素5bとして、可動体3のホルダ部22に設けられている。より具体的には、ホルダ部22に設けた柱状部221、224と柱状部222、225との間に電機子ユニット540が1つ配置され、ホルダ部22に設けた柱状部222、225と柱状部223、226との間に電機子ユニット540が1つ配置される。ここで、第1電機子コア57および第2電機子コア58の永久磁石56とは反対側の面(外面)には、柱状部221~226と係合する係合凹部571、581が形成されている。従って、第1電機子コア57および第2電機子コア58は、ホルダ部22に対して第1方向Xおよび第2方向Yで位置決めされた状態で支持体2に固定され、電機子54(電機子ユニット540)の第3方向Zの一方側Z1の端部は、カバー25の開口部250aの内側に位置する。 Further, the armature 54 (armature unit 540) is provided in the holder portion 22 of the movable body 3 as a support body side component 5b for configuring the drive mechanism 5. More specifically, one armature unit 540 is disposed between the pillars 221 and 224 and the pillars 222 and 225 provided in the holder portion 22, and the pillars 222 and 225 and pillars provided in the holder 22. One armature unit 540 is disposed between the portions 223 and 226. Here, on the surface (outer surface) opposite to the permanent magnet 56 of the first armature core 57 and the second armature core 58, engaging concave portions 571 and 581 to be engaged with the columnar portions 221 to 226 are formed. ing. Therefore, the first armature core 57 and the second armature core 58 are fixed to the support 2 in a state of being positioned in the first direction X and the second direction Y with respect to the holder portion The end of the one side Z1 in the third direction Z of the daughter unit 540) is located inside the opening 250a of the cover 25.
 この状態で、第1磁性コア51および第2磁性コア52の第1突極511および第2突極521は各々、電機子54の第1電機子コア57および第2電機子コア58の第2方向Yの端面に隙間を介して第2方向Yで対向する。このようにして、駆動機構5が構成された際、第3方向Zからみたとき、ガイド機構8(ガイドユニット80)が配置された4個所で囲まれた空間内に駆動機構5が構成される。本形態では、支持体2の全体が非磁性材料からなる。 In this state, the first salient pole 511 and the second salient pole 521 of the first magnetic core 51 and the second magnetic core 52 are respectively the second armature core 57 of the armature 54 and the second armature core 58 of the second armature core 58. The end face in the direction Y is opposed in the second direction Y via a gap. Thus, when the drive mechanism 5 is configured, when viewed in the third direction Z, the drive mechanism 5 is configured in the space surrounded by the four places where the guide mechanism 8 (guide unit 80) is disposed. . In the present embodiment, the entire support 2 is made of a nonmagnetic material.
(基本動作)
 本形態のアクチュエータ1において、駆動コイル59に交流を印加すると、駆動機構5はリニアモータと同様、可動体3を第1方向Xの一方側X1および他方側X2に直線駆動する。従って、可動体3は、第1方向Xに振動するため、アクチュエータ1における重心が第1方向Xに振動する。このため、アクチュエータ1に触れた利用者は、第1方向Xの振動を体感することができる。その際、駆動コイル59に印加する交流波形を調整して、可動体3が第1方向Xの一方側X1に移動する加速度と、可動体3が第1方向Xの他方側X2に移動する加速度とを相違させれば、利用者は、第1方向Xにおいて方向性を有する振動を体感することができる。
(basic action)
In the actuator 1 of the present embodiment, when an alternating current is applied to the drive coil 59, the drive mechanism 5 linearly drives the movable body 3 to the one side X1 and the other side X2 in the first direction X as in the linear motor. Therefore, since the movable body 3 vibrates in the first direction X, the center of gravity of the actuator 1 vibrates in the first direction X. For this reason, the user who touches the actuator 1 can feel the vibration in the first direction X. At this time, the AC waveform applied to the drive coil 59 is adjusted to accelerate the movable body 3 to move to one side X1 in the first direction X and to accelerate the movable body 3 to move to the other side X2 in the first direction X. And the user can feel the vibration having the directivity in the first direction X.
 本形態では、出力部材38が露出した状態にあるため、利用者が出力部材38に触れれば、可動体3の振動を直接、体感することができる。 In this embodiment, since the output member 38 is exposed, if the user touches the output member 38, it is possible to directly feel the vibration of the movable body 3.
(本形態の主な効果)
 つぎに本形態の主な効果を説明するが、上述したとおり、第一の発明、第二の発明および第三の発明の実施の形態は同じ実施の形態である。
 以上説明したように、本形態のアクチュエータ1において、駆動機構5は、電機子54から発生した磁束が第1磁性コア51および第2磁性コア52を通過する磁束密度の変化を利用して推力を発生させる、すなわち、駆動機構5は、リニアモータと同様に動作するので、可動体3に大きな推力を発生させることができる。それ故、利用者に強い振動を体感させることができる。
(Main effects of this form)
Next, the main effects of the present embodiment will be described, but as described above, the embodiments of the first invention, the second invention and the third invention are the same embodiment.
As described above, in the actuator 1 of the present embodiment, the drive mechanism 5 uses the change in magnetic flux density where the magnetic flux generated from the armature 54 passes through the first magnetic core 51 and the second magnetic core 52 to generate thrust. Because the drive mechanism 5 operates in the same manner as a linear motor, it can generate a large thrust on the movable body 3. Therefore, the user can feel strong vibration.
 第1磁性コア51および第2磁性コア52が可動体3に設けられ、電機子54が支持体2に設けられている。このため、可動体3に駆動コイル59を設けた場合と違って、駆動コイル59に対する給電が容易である。 A first magnetic core 51 and a second magnetic core 52 are provided on the movable body 3, and an armature 54 is provided on the support 2. Therefore, unlike the case where the movable body 3 is provided with the drive coil 59, power supply to the drive coil 59 is easy.
 可動体3は、駆動機構5を第3方向Zの一方側Z1から覆う出力部材38を有しており、出力部材38が露出している。従って、出力部材38を介して可動体3の振動を出力することができるので、出力部材38に触れた利用者に強い振動を体感させることができる。 The movable body 3 has an output member 38 that covers the drive mechanism 5 from one side Z1 in the third direction Z, and the output member 38 is exposed. Therefore, since the vibration of the movable body 3 can be output through the output member 38, the user who touches the output member 38 can feel strong vibration.
 また、ガイド機構8では、支持体2側の2本の第1レール81と可動体3側の2本の第2レール82とによって転動ボール83が支持されている。このため、可動体3は、ガイド機構8にガイドされながら第1方向Xにスムーズに振動する。ここで、転動ボール83は、支持体2側の2本の第1レール81と可動体3側の2本の第2レール82とによって第2方向Yの両側から支持されている。このため、可動体3に外力が加わっても、可動体3の第2方向Yおよび第3方向Zへの変位がガイド機構8によって抑制される。従って、可動体3に外力が加わった状態でも、可動体3を第1方向Xに適正に振動させることができる。 In the guide mechanism 8, the rolling balls 83 are supported by the two first rails 81 on the support 2 side and the two second rails 82 on the movable body 3 side. Thus, the movable body 3 vibrates smoothly in the first direction X while being guided by the guide mechanism 8. Here, the rolling balls 83 are supported from both sides in the second direction Y by the two first rails 81 on the support 2 side and the two second rails 82 on the movable body 3 side. Therefore, even if an external force is applied to the movable body 3, the displacement of the movable body 3 in the second direction Y and the third direction Z is suppressed by the guide mechanism 8. Therefore, even in the state where an external force is applied to the movable body 3, the movable body 3 can be appropriately vibrated in the first direction X.
 2本の第1レール81、および2本の第2レール82は各々、転動ボール83を支持する面が凸曲面になっているため、転動ボール823支持体2側(第1レール81)との接触面積や、転動ボール83と可動体3側(第2レール82)との接触面積が狭い。従って、可動体3が第1方向Xに振動する際の摺動抵抗が小さいので、可動体3をスムーズに第1方向Xで振動させることができる。また、第1レール81、および第2レール82は各々、丸棒状であるため、第1レール81および第2レール82は各々、大きな強度を有する。 The two first rails 81 and the two second rails 82 each have a convex curved surface for supporting the rolling balls 83, so the rolling ball 823 support 2 side (first rail 81) And the contact area between the rolling ball 83 and the movable body 3 side (second rail 82) are narrow. Therefore, since the sliding resistance when the movable body 3 vibrates in the first direction X is small, the movable body 3 can be vibrated in the first direction X smoothly. Further, since each of the first rail 81 and the second rail 82 has a round bar shape, each of the first rail 81 and the second rail 82 has high strength.
 ガイド機構8(ガイドユニット80)は、可動体3の第2方向Yの一方側Y1において第1方向Xで離間する2個所、および可動体3の第2方向Yの他方側Y2において第1方向Xで離間する2個所の計4個所に設けられている。従って、可動体3を安定した姿勢で適正にガイドすることができる。 The guide mechanism 8 (guide unit 80) is disposed at one side Y1 of the movable body 3 in the second direction Y at two points separated in the first direction X, and in the other side Y2 of the movable body 3 in the second direction Y It is provided in a total of four places of two places separated by X. Therefore, the movable body 3 can be properly guided in a stable posture.
 また、可動体3と支持体2との間に粘弾性部材(第1粘弾性部材910および第2粘弾性部材920)が配置されているため、可動体3を振動させた際、第1粘弾性部材910および第2粘弾性部材920がダンパ機能を発揮する。従って、可動体3が共振しにくい。また、第1粘弾性部材910は、可動体3が支持体2に対して第1方向Xの一方側X1で対向する部分に配置され、第2粘弾性部材920は、可動体3が支持体2に対して第1方向Xの他方側X2で対向する部分に配置されている。このため、可動体3と支持体2との相対的な位置が第1方向Xで変動して、第1粘弾性部材910が配置されている部分での可動体3と支持体2との間隔、および第2粘弾性部材920が配置されている部分での可動体3と支持体2との間隔のうちの一方の間隔が広くなった場合には、他方の間隔が狭くなる。従って、第1粘弾性部材910の特性と第2粘弾性部材920の特性とを合成した特性は、上記の間隔の変動の影響を受けにくい。それ故、第1粘弾性部材910および第2粘弾性部材920は、安定した機能を発揮する。 Further, since the visco-elastic members (the first visco-elastic member 910 and the second visco-elastic member 920) are disposed between the movable body 3 and the support body 2, when the movable body 3 is vibrated, the first viscosity The elastic member 910 and the second viscoelastic member 920 exhibit a damper function. Therefore, the movable body 3 does not easily resonate. In addition, the first viscoelastic member 910 is disposed at a portion where the movable body 3 is opposed to the support 2 on the one side X1 in the first direction X, and the second viscoelastic member 920 has the movable body 3 as a support It is arrange | positioned in the part which opposes by the other side X2 of 1st direction X with respect to 2. FIG. Therefore, the relative position between the movable body 3 and the support 2 fluctuates in the first direction X, and the distance between the movable body 3 and the support 2 at the portion where the first viscoelastic member 910 is disposed. When one of the distances between the movable body 3 and the support 2 at the portion where the second viscoelastic member 920 is disposed becomes wide, the other distance becomes narrow. Therefore, the characteristic obtained by combining the characteristic of the first viscoelastic member 910 and the characteristic of the second viscoelastic member 920 is not susceptible to the fluctuation of the above-mentioned interval. Therefore, the first viscoelastic member 910 and the second viscoelastic member 920 exert a stable function.
 第1粘弾性部材910および第2粘弾性部材920は各々、可動体3が第1方向Xに振動する際、支持体2および可動体3に接している。従って、第1粘弾性部材910および第2粘弾性部材920は、可動体3の移動に確実に追従するので、可動体3の共振を効果的に防止することができる。 Each of the first viscoelastic member 910 and the second viscoelastic member 920 is in contact with the support 2 and the movable body 3 when the movable body 3 vibrates in the first direction X. Therefore, since the first viscoelastic member 910 and the second viscoelastic member 920 reliably follow the movement of the movable body 3, the resonance of the movable body 3 can be effectively prevented.
 また、駆動機構5が停止している期間、第1粘弾性部材910および第2粘弾性部材920は各々、第1方向Xで圧縮された状態にある。このため、第1粘弾性部材910および第2粘弾性部材920は、可動体3の移動に確実に追従するので、可動体3の共振を効果的に防止することができる。また、可動体3が振動した際、所定のストローク内では、第1粘弾性部材910および第2粘弾性部材920が常に伸長しようとする力を発揮するので、第1粘弾性部材910および第2粘弾性部材920が安定したダンパ機能を発揮する。すなわち、粘弾性部材は、その厚さ方向(軸方向)に押圧されて圧縮変形する際は、線形の成分(バネ係数)よりも非線形の成分(バネ係数)が大きい伸縮特性を備える。これに対して、厚さ方向(軸方向)に引っ張られて伸びる場合は、非線形の成分(バネ係数)よりも線形の成分(バネ係数)が大きい伸縮特性を備える。それ故、本形態のように、第1粘弾性部材910および第2粘弾性部材920が第1方向Xで圧縮された状態にある場合、第1粘弾性部材910および第2粘弾性部材920では、運動方向によるバネ力が一定となる。それ故、本形態のように、入力信号に対する振動加速度の再現性を向上することができるので、微妙なニュアンスをもった振動を実現することができる。 Further, while the drive mechanism 5 is at rest, the first viscoelastic member 910 and the second viscoelastic member 920 are each compressed in the first direction X. For this reason, since the first viscoelastic member 910 and the second viscoelastic member 920 reliably follow the movement of the movable body 3, the resonance of the movable body 3 can be effectively prevented. In addition, when the movable body 3 vibrates, the first visco-elastic member 910 and the second visco-elastic member 920 always exert a force to tend to expand within a predetermined stroke. The viscoelastic member 920 exhibits a stable damper function. That is, when pressed in the thickness direction (axial direction) and compressed and deformed, the visco-elastic member has an expansion and contraction characteristic in which a non-linear component (spring coefficient) is larger than a linear component (spring coefficient). On the other hand, when it is pulled and extended in the thickness direction (axial direction), it has an expansion and contraction characteristic in which a linear component (spring coefficient) is larger than a non-linear component (spring coefficient). Therefore, as in the present embodiment, when the first viscoelastic member 910 and the second viscoelastic member 920 are in the state of being compressed in the first direction X, the first viscoelastic member 910 and the second viscoelastic member 920 are used. The spring force by the direction of movement becomes constant. Therefore, as in the present embodiment, since the repeatability of the vibration acceleration with respect to the input signal can be improved, it is possible to realize the vibration having a subtle nuance.
(他の実施形態)
 上記実施形態では、可動体3を第1方向Xのみに駆動するアクチュエータ1に本発明を適用したが、可動体3を第1方向Xおよび第2方向Yに駆動するアクチュエータ1に本発明を適用してもよい。
(Other embodiments)
In the above embodiment, the present invention is applied to the actuator 1 that drives the movable body 3 only in the first direction X. However, the present invention is applied to the actuator 1 that drives the movable body 3 in the first direction X and the second direction Y You may
 X…第1方向、Y…第2方向、Z…第3方向、1…アクチュエータ、2…支持体、3…可動体、5…駆動機構、5a…可動体側構成要素、5b…支持体側構成要素、8…ガイド機構、21…ベース部材、22…ホルダ部、23…第1凸部、24…第2凸部、25…カバー、30…枠体、31…第1壁部、32…第2壁部、33…第3壁部、34…第4壁部、38…出力部材、51…第1磁性コア、52…第2磁性コア、54…電機子、55…ボビン、56…永久磁石、57…第1電機子コア、58…第2電機子コア、59…駆動コイル、80…ガイドユニット、81…第1レール、82…第2レール、83…転動ボール、91…第1弾性部材、92…第2弾性部材、221~226…柱状部、250…平板部、250a…開口部、251…第1側板部、252…第2側板部、310、320…内面、315、325…底板部、316、317、318、326、327、328…軸部、511…第1突極、521…第2突極、540…電機子ユニット、571、581…係合凹部、910…第1粘弾性部材、920…第2粘弾性部材 X ... 1st direction, Y ... 2nd direction, Z ... 3rd direction, 1 ... actuator, 2 ... support body, 3 ... movable body, 5 ... drive mechanism, 5a ... movable body side component, 5b ... support body side component 8, 8: guide mechanism, 21: base member, 22: holder portion, 23: first convex portion, 24: second convex portion, 25: cover, 30: frame body, 31: first wall portion, 32: second portion Wall part 33: Third wall part 34: Fourth wall part 38: Output member 51: First magnetic core 52: Second magnetic core 54: Armature 55: Bobbin 56: Permanent magnet DESCRIPTION OF SYMBOLS 57 ... 1st armature core, 58 ... 2nd armature core, 59 ... Drive coil, 80 ... Guide unit, 81 ... 1st rail, 82 ... 2nd rail, 83 ... Rolling ball, 91 ... 1st elastic member , 92: second elastic member, 221 to 226, columnar portion, 250: flat plate portion, 250a: opening, 251, ... 1 side plate portion 252: second side plate portion 310, 320: inner surface 315, 325: bottom plate portion 316, 317, 318, 326, 327, 328: shaft portion 511: first salient pole, 521: second Salient pole, 540 ... armature unit, 571, 581 ... engagement recess, 910 ... first visco-elastic member, 920 ... second visco-elastic member

Claims (26)

  1.  支持体と、
     可動体と、
     前記可動体と前記支持体とに接続された弾性部材と、
     前記可動体を前記支持体に対して前記第1方向に振動させる駆動機構と、
     を有し、
     前記駆動機構は、前記支持体および前記可動体のうちの一方側部材において前記第1方向に交差する第2方向の一方側から他方側に向けて突出した第1突極が前記第1方向に沿って複数設けられた第1磁性コアと、前記一方側部材において前記第1磁性コアに前記第2方向の他方側で対向し、前記第2方向の他方側から一方側に向けて突出した第2突極が前記第1突極とは逆位相で前記第1方向に沿って複数設けられた第2磁性コアと、前記支持体および前記可動体のうちの他方側部材において前記第1磁性コアと前記第2磁性コアとの間に設けられた電機子と、を備え、
     前記電機子は、前記第1方向で着磁された永久磁石と、前記永久磁石に前記第1方向の一方側から重なる第1電機子コアと、前記永久磁石に前記第1方向の他方側から重なる第2電機子コアと、前記第1電機子コアの外面側および前記第2電機子コアの外面側を通るように巻回された駆動コイルと、を備えていることを特徴とするアクチュエータ。
    A support,
    Movable body,
    An elastic member connected to the movable body and the support;
    A drive mechanism that vibrates the movable body in the first direction with respect to the support;
    Have
    The driving mechanism is configured such that a first salient pole, which protrudes from one side in a second direction intersecting the first direction in one side member of the support and the movable body, to the other side in the first direction A plurality of first magnetic cores provided along the first side, and the one side member faces the first magnetic core on the other side in the second direction and protrudes from the other side in the second direction toward the one side In the second magnetic core in which two salient poles are provided in a phase opposite to the first salient pole along the first direction, and in the other side member of the support and the movable body, the first magnetic core And an armature provided between the second magnetic core and the second magnetic core,
    The armature includes a permanent magnet magnetized in the first direction, a first armature core overlapping the permanent magnet from one side in the first direction, and a permanent magnet from the other side in the first direction. An actuator comprising: an overlapping second armature core; and a drive coil wound so as to pass through the outer surface side of the first armature core and the outer surface side of the second armature core.
  2.  前記電機子では、前記永久磁石、前記第1電機子コア、前記第2電機子コア、および駆動コイルを備えた電機子ユニットが前記第1方向に沿って複数配置されていることを特徴とする請求項1に記載のアクチュエータ。 In the armature, a plurality of armature units including the permanent magnet, the first armature core, the second armature core, and a drive coil are disposed along the first direction. The actuator according to claim 1.
  3.  前記第1磁性コアおよび前記第2磁性コアは前記可動体に設けられ、
     前記電機子は、前記支持体に設けられていることを特徴とする請求項1または2に記載のアクチュエータ。
    The first magnetic core and the second magnetic core are provided on the movable body,
    The actuator according to claim 1, wherein the armature is provided on the support.
  4.  前記支持体は、前記電機子を保持するホルダ部を備え、
     前記可動体は、前記ホルダ部に前記第2方向の一方側で対向する非磁性の第1壁部と、
    前記ホルダ部に前記第2方向の他方側で対向する非磁性の第2壁部と、を備え、
     前記第1壁部の前記ホルダ部と対向する面に重なるように前記第1磁性コアが配置され、
     前記第2壁部の前記ホルダ部と対向する面に重なるように前記第2磁性コアが配置されていることを特徴とする請求項3に記載のアクチュエータ。
    The support comprises a holder portion for holding the armature,
    The movable body is a nonmagnetic first wall facing the holder on one side in the second direction;
    The holder portion includes a nonmagnetic second wall opposed on the other side in the second direction;
    The first magnetic core is disposed so as to overlap the surface of the first wall facing the holder.
    The actuator according to claim 3, wherein the second magnetic core is disposed so as to overlap a surface of the second wall facing the holder.
  5.  前記可動体は、前記第1壁部および前記第2壁部のうち少なくとも一方の壁部に連結されて前記駆動機構を前記第1方向および前記第2方向と交差する第3方向の一方側から覆う出力部材を有していることを特徴とする請求項4に記載のアクチュエータ。 The movable body is connected to at least one of the first wall and the second wall and is connected to at least one of the first wall and the second wall from the one side in a third direction intersecting the first direction and the second direction. The actuator according to claim 4, further comprising a covering output member.
  6.  前記第1壁部の前記第1方向の一方側の端部、前記第1壁部の前記第1方向の他方側の端部、前記第2壁部の前記第1方向の一方側の端部、前記第2壁部の前記第1方向の他方側の端部の計4個所の各々に、前記可動体を前記第1方向にガイドするガイド機構が設けられていることを特徴とする請求項4または5に記載のアクチュエータ。 One end of the first wall in the first direction, the other end of the first wall in the first direction, and one end of the second wall in the first direction A guide mechanism for guiding the movable body in the first direction is provided at each of four places in total at the other end of the second wall in the first direction on the other side. The actuator according to 4 or 5.
  7.  前記ガイド機構は、前記4個所の各々に前記可動体と前記支持体とによって前記第2方向の両側から支持された転動ボールを備えていることを特徴とする請求項6に記載のアクチュエータ。 The actuator according to claim 6, wherein the guide mechanism comprises rolling balls supported at both sides in the second direction by the movable body and the support at each of the four locations.
  8.  前記弾性部材は、前記可動体に対して前記第1方向の一方側で前記可動体と前記支持体とが前記第1方向で対向する個所と、前記可動体に対して前記第1方向の他方側で前記可動体と前記支持体とが前記第1方向で対向する個所に設けられていることを特徴とする請求項3に記載のアクチュエータ。 The elastic member is a portion where the movable body and the support body face in the first direction on one side in the first direction with respect to the movable body, and the other in the first direction with respect to the movable body. The actuator according to claim 3, wherein the movable body and the support body are provided on the side facing each other in the first direction.
  9.  前記弾性部材は、粘弾性部材であることを特徴とする請求項8に記載のアクチュエータ。 The actuator according to claim 8, wherein the elastic member is a visco-elastic member.
  10.  支持体と、
     可動体と、
     前記可動体を前記支持体に対して第1方向に振動させる駆動機構と、
     前記第1方向と交差する第2方向で前記可動体と前記支持体とが対向する個所に設けられ、前記可動体を前記第1方向にガイドするガイド機構と、
     を有し、
     前記ガイド機構は、前記支持体側で前記第1方向および前記第2方向と交差する第3方向で並列して前記第1方向に延在する2本の第1レールと、前記可動体側で前記第3方向で並列して前記第1方向に延在する2本の第2レールと、前記2本の第1レールおよび前記2本の第2レールによって前記第2方向の両側から支持された転動ボールと、を備えていることを特徴とするアクチュエータ。
    A support,
    Movable body,
    A drive mechanism for vibrating the movable body in a first direction with respect to the support;
    A guide mechanism provided at a position where the movable body and the support body face each other in a second direction intersecting the first direction, and guiding the movable body in the first direction;
    Have
    The guide mechanism includes two first rails extending in the first direction in parallel in a third direction intersecting the first direction and the second direction on the support side, and the second guide mechanism on the movable body side Rolling supported from both sides in the second direction by the two second rails extending in the first direction in parallel in three directions, the two first rails, and the two second rails And a ball.
  11.  前記第1方向に直交する面で切断したとき、前記2本の第1レール、および前記2本の第2レールは各々、前記転動ボールを支持する面が凸曲面になっていることを特徴とする請求項10に記載のアクチュエータ。 When cut by a plane perpendicular to the first direction, the two first rails and the two second rails each have a convex curved surface for supporting the rolling balls. The actuator according to claim 10, wherein
  12.  前記2本の第1レール、および前記2本の第2レールは各々、丸棒状であることを特徴とする請求項11に記載のアクチュエータ。 The actuator according to claim 11, wherein the two first rails and the two second rails are each in a round bar shape.
  13.  前記ガイド機構は、前記2本の第1レール、前記2本の第2レール、および前記転動ボールを備えたガイドユニットを、前記可動体の前記第2方向の一方側において前記第1方向で離間する2個所、および前記可動体の前記第2方向の他方側において前記第1方向で離間する2個所の計4個所に備えていることを特徴とする請求項10から12までの何れか一項に記載のアクチュエータ。 The guide mechanism includes a guide unit including the two first rails, the two second rails, and the rolling balls in one side of the movable body in the second direction. 13. The apparatus according to any one of claims 10 to 12, characterized in that it is provided at a total of four places, two places apart and two places separated in the first direction on the other side of the second direction of the movable body. The actuator according to the item.
  14.  前記駆動機構は、前記第3方向からみたとき、前記4個所で囲まれた空間内に配置されていることを特徴とする請求項13に記載のアクチュエータ。 The actuator according to claim 13, wherein the drive mechanism is disposed in the space surrounded by the four points when viewed in the third direction.
  15.  前記支持体は、前記駆動機構を構成するための支持体側構成要素を保持するホルダ部を備え、
     前記可動体は、前記ホルダ部に前記第2方向の一方側で対向する第1壁部と、前記ホルダ部に前記第2方向の他方側で対向する第2壁部と、を備え、
     前記ガイド機構は、前記第1壁部の前記第1方向の一方側の端部、前記第1壁部の前記第1方向の他方側の端部、前記第2壁部の前記第1方向の一方側の端部、および前記第2壁部の前記第1方向の他方側の端部の計4個所に設けられていることを特徴とする請求項14に記載のアクチュエータ。
    The support includes a holder for holding a support-side component for configuring the drive mechanism,
    The movable body includes a first wall facing the holder on one side in the second direction, and a second wall facing the holder on the other side in the second direction,
    The guide mechanism includes an end on one side of the first wall in the first direction, an end on the other side in the first direction of the first wall, and the first direction of the second wall. The actuator according to claim 14, wherein the actuator is provided at four locations in total: one end and the other end of the second wall in the first direction.
  16.  前記可動体は、前記第1壁部および前記第2壁部のうち少なくとも一方の壁部に連結されて前記駆動機構を前記第3方向の一方側から覆う出力部材を有していることを特徴とする請求項15に記載のアクチュエータ。 The movable body has an output member connected to at least one of the first wall portion and the second wall portion to cover the drive mechanism from one side in the third direction. The actuator according to claim 15, wherein
  17.  前記可動体と前記支持体とに接続された弾性部材が設けられていることを特徴とする請求項13に記載のアクチュエータ。 The actuator according to claim 13, further comprising an elastic member connected to the movable body and the support.
  18.  前記弾性部材は、前記可動体に対して前記第1方向の一方側で前記可動体と前記支持体とが前記第1方向で対向する個所と、前記可動体に対して前記第1方向の他方側で前記可動体と前記支持体とが前記第1方向で対向する個所に設けられていることを特徴とする請求項17に記載のアクチュエータ。 The elastic member is a portion where the movable body and the support body face in the first direction on one side in the first direction with respect to the movable body, and the other in the first direction with respect to the movable body. 18. The actuator according to claim 17, wherein the movable body and the support are provided on the side facing each other in the first direction.
  19.  支持体と、
     可動体と、
     前記可動体を前記支持体に対して第1方向で振動させる駆動機構と、
     前記可動体が前記支持体に対して前記第1方向の一方側で対向する部分に設けられた第1粘弾性部材と、
     前記可動体が前記支持体に対して前記第1方向の他方側で対向する部分に設けられた第2粘弾性部材と、
     を有することを特徴とするアクチュエータ。
    A support,
    Movable body,
    A drive mechanism for vibrating the movable body in a first direction with respect to the support;
    A first visco-elastic member provided at a portion where the movable body is opposed to the support on one side in the first direction;
    A second visco-elastic member provided at a portion where the movable body is opposed to the support on the other side in the first direction;
    An actuator characterized by having.
  20.  前記第1粘弾性部材は、前記可動体および前記支持体の前記第1方向の一方側の端部同士が前記第1方向で対向する部分に設けられ、
     前記第2粘弾性部材は、前記可動体および前記支持体の前記第1方向の他方側の端部同士が前記第1方向で対向する部分に設けられていることを特徴とする請求項19に記載のアクチュエータ。
    The first visco-elastic member is provided at a portion where the end portions on one side of the movable body and the support in the first direction face each other in the first direction,
    20. The apparatus according to claim 19, wherein the second visco-elastic member is provided at a portion where the movable body and the other end of the support in the first direction face each other in the first direction. Actuator described.
  21.  前記第1粘弾性部材および前記第2粘弾性部材は各々、前記可動体が前記第1方向に振動する際、前記支持体および前記可動体に接していることを特徴とする請求項19または20に記載のアクチュエータ。 The first and second visco-elastic members are each in contact with the support and the movable body when the movable body vibrates in the first direction. The actuator described in.
  22.  前記駆動機構が停止している期間、前記第1粘弾性部材および前記第2粘弾性部材は各々、前記第1方向で圧縮された状態にあることを特徴とする請求項21に記載のアクチュエータ。 The actuator according to claim 21, wherein the first visco-elastic member and the second visco-elastic member are each compressed in the first direction while the drive mechanism is stopped.
  23.  前記駆動機構は、前記第1方向と交差する第2方向で前記可動体と前記支持体とが対向する部分に配置され、
     前記支持体は、ベース部材と、前記ベース部材から前記第1方向および前記第2方向と交差する第3方向の一方側に突出して前記駆動機構を構成するための支持体側構成要素を保持するホルダ部と、前記ホルダ部に対して前記第1方向の一方側で前記ベース部材から前記第3方向の一方側に突出した第1凸部と、前記ホルダ部に対して前記第1方向の他方側で前記ベース部材から前記第3方向の一方に突出した第2凸部と、を有し、
     前記可動体は、前記ホルダ部に前記第2方向の一方側で対向する第1壁部と、前記ホルダ部に前記第2方向の他方側で対向する第2壁部と、前記第1凸部に前記第1方向の一方側で対向する第3壁部と、前記第2凸部に前記第1方向の他方側で対向する第4壁部と、を備え、
     前記第1壁部の前記ホルダ部と対向する面に重なるように前記駆動機構を構成するための可動体側構成要素の一部が配置され、前記第2壁部の前記ホルダ部と対向する面に重なるように前記可動体側構成要素の他の一部が配置され、前記第1凸部と前記第3壁部との間に前記第1粘弾性部材が配置され、前記第2凸部と前記第4壁部との間に前記第2粘弾性部材が配置されていることを特徴とする請求項21までの何れか一項に記載のアクチュエータ。
    The driving mechanism is disposed at a portion where the movable body and the support body face in a second direction intersecting the first direction.
    The holder for holding the support member for forming the drive mechanism by projecting the base member and one side of a third direction intersecting the first direction and the second direction from the base member Portion, a first convex portion projecting from the base member to one side in the third direction on one side in the first direction with respect to the holder portion, and the other side in the first direction with respect to the holder portion And a second convex portion protruding from the base member in one of the third directions,
    The movable body has a first wall facing the holder on one side in the second direction, a second wall facing the holder on the other side in the second direction, and the first protrusion. A third wall facing one side in the first direction, and a fourth wall facing the second protrusion on the other side in the first direction,
    A part of the movable-body-side component for configuring the drive mechanism is disposed to overlap the surface of the first wall facing the holder, and the surface of the second wall facing the holder is provided. The other part of the movable body side component is disposed so as to overlap, the first viscoelastic member is disposed between the first convex portion and the third wall portion, and the second convex portion and the second convex portion 22. An actuator according to any one of the preceding claims, characterized in that the second visco-elastic member is arranged between the four walls.
  24.  前記可動体は、前記第1壁部、前記第2壁部、前記第3壁部、および前記第4壁部のうちの少なくとも1つの壁部に連結されて前記駆動機構を前記第3方向の一方側から覆う出力部材を有していることを特徴とする請求項23に記載のアクチュエータ。 The movable body is connected to at least one wall of the first wall, the second wall, the third wall, and the fourth wall so that the driving mechanism can move in the third direction. The actuator according to claim 23, further comprising an output member that covers from one side.
  25.  前記第1壁部の前記第1方向の一方側の端部、前記第1壁部の前記第1方向の他方側の端部、前記第2壁部の前記第1方向の一方側の端部、および前記第2壁部の前記第1方向の他方側の端部の計4個所の各々に、前記可動体を前記第1方向にガイドするガイド機構が設けられていることを特徴とする請求項23または24に記載のアクチュエータ。 One end of the first wall in the first direction, the other end of the first wall in the first direction, and one end of the second wall in the first direction And a guide mechanism for guiding the movable body in the first direction is provided at each of four places in total at the other end of the second wall in the first direction on the other side. Item 25. The actuator according to item 23 or 24.
  26.  前記ガイド機構は、前記4個所の各々に前記可動体と前記支持体とによって前記第2方向の両側から支持された転動ボールを備えていることを特徴とする請求項25に記載のアクチュエータ。 26. The actuator according to claim 25, wherein the guide mechanism comprises rolling balls supported on both sides in the second direction by the movable body and the support at each of the four locations.
PCT/JP2018/029084 2017-08-10 2018-08-02 Actuator WO2019031389A1 (en)

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JP2017155030A JP2019037015A (en) 2017-08-10 2017-08-10 Actuator
JP2017155029A JP2019037014A (en) 2017-08-10 2017-08-10 Actuator
JP2017-155031 2017-08-10
JP2017-155030 2017-08-10
JP2017155031A JP2019034252A (en) 2017-08-10 2017-08-10 Actuator
JP2017-155029 2017-08-10

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06280868A (en) * 1993-03-23 1994-10-07 Origin Electric Co Ltd Limited linear bearing
JP2016127789A (en) * 2014-12-26 2016-07-11 日本電産サンキョー株式会社 Actuator
WO2017130936A1 (en) * 2016-01-29 2017-08-03 日本電産サンキョー株式会社 Actuator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06280868A (en) * 1993-03-23 1994-10-07 Origin Electric Co Ltd Limited linear bearing
JP2016127789A (en) * 2014-12-26 2016-07-11 日本電産サンキョー株式会社 Actuator
WO2017130936A1 (en) * 2016-01-29 2017-08-03 日本電産サンキョー株式会社 Actuator

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