WO2019027014A1 - 有機デバイスの製造方法及び有機デバイス - Google Patents
有機デバイスの製造方法及び有機デバイス Download PDFInfo
- Publication number
- WO2019027014A1 WO2019027014A1 PCT/JP2018/029110 JP2018029110W WO2019027014A1 WO 2019027014 A1 WO2019027014 A1 WO 2019027014A1 JP 2018029110 W JP2018029110 W JP 2018029110W WO 2019027014 A1 WO2019027014 A1 WO 2019027014A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer
- sealing member
- organic
- organic device
- cutting blade
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 23
- 238000000034 method Methods 0.000 title abstract description 23
- 238000005520 cutting process Methods 0.000 claims abstract description 160
- 238000007789 sealing Methods 0.000 claims abstract description 143
- 239000000758 substrate Substances 0.000 claims abstract description 85
- 239000000463 material Substances 0.000 claims abstract description 49
- 239000000853 adhesive Substances 0.000 claims abstract description 31
- 230000001070 adhesive effect Effects 0.000 claims abstract description 30
- 239000004820 Pressure-sensitive adhesive Substances 0.000 claims abstract description 21
- 239000010410 layer Substances 0.000 claims description 211
- 239000002346 layers by function Substances 0.000 claims description 32
- 239000004020 conductor Substances 0.000 claims description 7
- 238000013459 approach Methods 0.000 claims description 2
- 238000010030 laminating Methods 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 abstract description 4
- 239000002585 base Substances 0.000 description 47
- 238000002347 injection Methods 0.000 description 21
- 239000007924 injection Substances 0.000 description 21
- 239000010408 film Substances 0.000 description 20
- 230000004888 barrier function Effects 0.000 description 17
- -1 polyethylene terephthalate Polymers 0.000 description 16
- 229910052751 metal Inorganic materials 0.000 description 14
- 239000002184 metal Substances 0.000 description 14
- 239000011888 foil Substances 0.000 description 13
- 239000011112 polyethylene naphthalate Substances 0.000 description 13
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 11
- 239000010409 thin film Substances 0.000 description 11
- 229910052782 aluminium Inorganic materials 0.000 description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 9
- 238000000576 coating method Methods 0.000 description 8
- 238000005259 measurement Methods 0.000 description 8
- 229920005989 resin Polymers 0.000 description 8
- 239000011347 resin Substances 0.000 description 8
- 229920002799 BoPET Polymers 0.000 description 7
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 150000004696 coordination complex Chemical class 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 229920005672 polyolefin resin Polymers 0.000 description 6
- 239000004711 α-olefin Substances 0.000 description 6
- 239000004698 Polyethylene Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000002019 doping agent Substances 0.000 description 5
- 230000005525 hole transport Effects 0.000 description 5
- 229910044991 metal oxide Inorganic materials 0.000 description 5
- 150000004706 metal oxides Chemical class 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 5
- 229920000573 polyethylene Polymers 0.000 description 5
- 229920000139 polyethylene terephthalate Polymers 0.000 description 5
- 239000005020 polyethylene terephthalate Substances 0.000 description 5
- 239000004743 Polypropylene Substances 0.000 description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 239000011365 complex material Substances 0.000 description 4
- 229920001577 copolymer Polymers 0.000 description 4
- ZYGHJZDHTFUPRJ-UHFFFAOYSA-N coumarin Chemical compound C1=CC=C2OC(=O)C=CC2=C1 ZYGHJZDHTFUPRJ-UHFFFAOYSA-N 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- 229920001155 polypropylene Polymers 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 229910052725 zinc Inorganic materials 0.000 description 4
- 239000011701 zinc Substances 0.000 description 4
- 229910000838 Al alloy Inorganic materials 0.000 description 3
- 229910052693 Europium Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 3
- 229910052783 alkali metal Inorganic materials 0.000 description 3
- 150000001340 alkali metals Chemical class 0.000 description 3
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 3
- 150000001342 alkaline earth metals Chemical class 0.000 description 3
- 229910052790 beryllium Inorganic materials 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 239000000049 pigment Substances 0.000 description 3
- 239000002985 plastic film Substances 0.000 description 3
- 229920006255 plastic film Polymers 0.000 description 3
- 229920001225 polyester resin Polymers 0.000 description 3
- 239000004645 polyester resin Substances 0.000 description 3
- 239000002861 polymer material Substances 0.000 description 3
- 229920000123 polythiophene Polymers 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 3
- 229910001887 tin oxide Inorganic materials 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- DHKHKXVYLBGOIT-UHFFFAOYSA-N 1,1-Diethoxyethane Chemical compound CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 description 2
- VQGHOUODWALEFC-UHFFFAOYSA-N 2-phenylpyridine Chemical compound C1=CC=CC=C1C1=CC=CC=N1 VQGHOUODWALEFC-UHFFFAOYSA-N 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 2
- 229910000846 In alloy Inorganic materials 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229920012266 Poly(ether sulfone) PES Polymers 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 2
- NRCMAYZCPIVABH-UHFFFAOYSA-N Quinacridone Chemical compound N1C2=CC=CC=C2C(=O)C2=C1C=C1C(=O)C3=CC=CC=C3NC1=C2 NRCMAYZCPIVABH-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 229910052771 Terbium Inorganic materials 0.000 description 2
- 239000011354 acetal resin Substances 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 229960000956 coumarin Drugs 0.000 description 2
- 235000001671 coumarin Nutrition 0.000 description 2
- 125000004122 cyclic group Chemical group 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 239000000975 dye Substances 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000005038 ethylene vinyl acetate Substances 0.000 description 2
- OGPBJKLSAFTDLK-UHFFFAOYSA-N europium atom Chemical compound [Eu] OGPBJKLSAFTDLK-UHFFFAOYSA-N 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 238000007646 gravure printing Methods 0.000 description 2
- 229910003437 indium oxide Inorganic materials 0.000 description 2
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- WCPAKWJPBJAGKN-UHFFFAOYSA-N oxadiazole Chemical compound C1=CON=N1 WCPAKWJPBJAGKN-UHFFFAOYSA-N 0.000 description 2
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 2
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229920001200 poly(ethylene-vinyl acetate) Polymers 0.000 description 2
- 229920006350 polyacrylonitrile resin Polymers 0.000 description 2
- 229920006122 polyamide resin Polymers 0.000 description 2
- 229920000767 polyaniline Polymers 0.000 description 2
- 229920005668 polycarbonate resin Polymers 0.000 description 2
- 239000004431 polycarbonate resin Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- 230000000379 polymerizing effect Effects 0.000 description 2
- 229920000098 polyolefin Polymers 0.000 description 2
- 229920006324 polyoxymethylene Polymers 0.000 description 2
- 229920005990 polystyrene resin Polymers 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 150000004032 porphyrins Chemical class 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 238000009966 trimming Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- NGQSLSMAEVWNPU-YTEMWHBBSA-N 1,2-bis[(e)-2-phenylethenyl]benzene Chemical compound C=1C=CC=CC=1/C=C/C1=CC=CC=C1\C=C\C1=CC=CC=C1 NGQSLSMAEVWNPU-YTEMWHBBSA-N 0.000 description 1
- SHXCHSNZIGEBFL-UHFFFAOYSA-N 1,3-benzothiazole;zinc Chemical compound [Zn].C1=CC=C2SC=NC2=C1 SHXCHSNZIGEBFL-UHFFFAOYSA-N 0.000 description 1
- KLCLIOISYBHYDZ-UHFFFAOYSA-N 1,4,4-triphenylbuta-1,3-dienylbenzene Chemical compound C=1C=CC=CC=1C(C=1C=CC=CC=1)=CC=C(C=1C=CC=CC=1)C1=CC=CC=C1 KLCLIOISYBHYDZ-UHFFFAOYSA-N 0.000 description 1
- UIWLITBBFICQKW-UHFFFAOYSA-N 1h-benzo[h]quinolin-2-one Chemical compound C1=CC=C2C3=NC(O)=CC=C3C=CC2=C1 UIWLITBBFICQKW-UHFFFAOYSA-N 0.000 description 1
- DWYHDSLIWMUSOO-UHFFFAOYSA-N 2-phenyl-1h-benzimidazole Chemical compound C1=CC=CC=C1C1=NC2=CC=CC=C2N1 DWYHDSLIWMUSOO-UHFFFAOYSA-N 0.000 description 1
- AJWRRBADQOOFSF-UHFFFAOYSA-N C1=CC=C2OC([Zn])=NC2=C1 Chemical compound C1=CC=C2OC([Zn])=NC2=C1 AJWRRBADQOOFSF-UHFFFAOYSA-N 0.000 description 1
- UXYHZIYEDDINQH-UHFFFAOYSA-N C1=CNC2=C3C=NN=C3C=CC2=C1 Chemical compound C1=CNC2=C3C=NN=C3C=CC2=C1 UXYHZIYEDDINQH-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Divinylene sulfide Natural products C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910000861 Mg alloy Inorganic materials 0.000 description 1
- 229920002367 Polyisobutene Polymers 0.000 description 1
- 229920000265 Polyparaphenylene Polymers 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
- XBDYBAVJXHJMNQ-UHFFFAOYSA-N Tetrahydroanthracene Natural products C1=CC=C2C=C(CCCC3)C3=CC2=C1 XBDYBAVJXHJMNQ-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- DGEZNRSVGBDHLK-UHFFFAOYSA-N [1,10]phenanthroline Chemical compound C1=CN=C2C3=NC=CC=C3C=CC2=C1 DGEZNRSVGBDHLK-UHFFFAOYSA-N 0.000 description 1
- ULGYAEQHFNJYML-UHFFFAOYSA-N [AlH3].[Ca] Chemical compound [AlH3].[Ca] ULGYAEQHFNJYML-UHFFFAOYSA-N 0.000 description 1
- GANNOFFDYMSBSZ-UHFFFAOYSA-N [AlH3].[Mg] Chemical compound [AlH3].[Mg] GANNOFFDYMSBSZ-UHFFFAOYSA-N 0.000 description 1
- JFBZPFYRPYOZCQ-UHFFFAOYSA-N [Li].[Al] Chemical compound [Li].[Al] JFBZPFYRPYOZCQ-UHFFFAOYSA-N 0.000 description 1
- JHYLKGDXMUDNEO-UHFFFAOYSA-N [Mg].[In] Chemical compound [Mg].[In] JHYLKGDXMUDNEO-UHFFFAOYSA-N 0.000 description 1
- XHCLAFWTIXFWPH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] XHCLAFWTIXFWPH-UHFFFAOYSA-N 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 229910052792 caesium Inorganic materials 0.000 description 1
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- ZMIGMASIKSOYAM-UHFFFAOYSA-N cerium Chemical compound [Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce] ZMIGMASIKSOYAM-UHFFFAOYSA-N 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- HFXKQSZZZPGLKQ-UHFFFAOYSA-N cyclopentamine Chemical compound CNC(C)CC1CCCC1 HFXKQSZZZPGLKQ-UHFFFAOYSA-N 0.000 description 1
- 229960003263 cyclopentamine Drugs 0.000 description 1
- CUIWZLHUNCCYBL-UHFFFAOYSA-N decacyclene Chemical compound C12=C([C]34)C=CC=C4C=CC=C3C2=C2C(=C34)C=C[CH]C4=CC=CC3=C2C2=C1C1=CC=CC3=CC=CC2=C31 CUIWZLHUNCCYBL-UHFFFAOYSA-N 0.000 description 1
- GDVKFRBCXAPAQJ-UHFFFAOYSA-A dialuminum;hexamagnesium;carbonate;hexadecahydroxide Chemical compound [OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[Mg+2].[Mg+2].[Mg+2].[Mg+2].[Mg+2].[Mg+2].[Al+3].[Al+3].[O-]C([O-])=O GDVKFRBCXAPAQJ-UHFFFAOYSA-A 0.000 description 1
- 150000001993 dienes Chemical class 0.000 description 1
- 238000000469 dry deposition Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- JVZRCNQLWOELDU-UHFFFAOYSA-N gamma-Phenylpyridine Natural products C1=CC=CC=C1C1=CC=NC=C1 JVZRCNQLWOELDU-UHFFFAOYSA-N 0.000 description 1
- 229910021482 group 13 metal Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229920001519 homopolymer Polymers 0.000 description 1
- 229960001545 hydrotalcite Drugs 0.000 description 1
- 229910001701 hydrotalcite Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- LHJOPRPDWDXEIY-UHFFFAOYSA-N indium lithium Chemical compound [Li].[In] LHJOPRPDWDXEIY-UHFFFAOYSA-N 0.000 description 1
- YZASAXHKAQYPEH-UHFFFAOYSA-N indium silver Chemical compound [Ag].[In] YZASAXHKAQYPEH-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000011256 inorganic filler Substances 0.000 description 1
- 229910003475 inorganic filler Inorganic materials 0.000 description 1
- 230000002687 intercalation Effects 0.000 description 1
- 238000009830 intercalation Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 150000002605 large molecules Chemical class 0.000 description 1
- 239000003446 ligand Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- GCICAPWZNUIIDV-UHFFFAOYSA-N lithium magnesium Chemical compound [Li].[Mg] GCICAPWZNUIIDV-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- SJCKRGFTWFGHGZ-UHFFFAOYSA-N magnesium silver Chemical compound [Mg].[Ag] SJCKRGFTWFGHGZ-UHFFFAOYSA-N 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 229910052976 metal sulfide Inorganic materials 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910000476 molybdenum oxide Inorganic materials 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 239000002070 nanowire Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 150000004866 oxadiazoles Chemical class 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- DGBWPZSGHAXYGK-UHFFFAOYSA-N perinone Chemical compound C12=NC3=CC=CC=C3N2C(=O)C2=CC=C3C4=C2C1=CC=C4C(=O)N1C2=CC=CC=C2N=C13 DGBWPZSGHAXYGK-UHFFFAOYSA-N 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- FIZIRKROSLGMPL-UHFFFAOYSA-N phenoxazin-1-one Chemical compound C1=CC=C2N=C3C(=O)C=CC=C3OC2=C1 FIZIRKROSLGMPL-UHFFFAOYSA-N 0.000 description 1
- UOMHBFAJZRZNQD-UHFFFAOYSA-N phenoxazone Natural products C1=CC=C2OC3=CC(=O)C=CC3=NC2=C1 UOMHBFAJZRZNQD-UHFFFAOYSA-N 0.000 description 1
- 229920003227 poly(N-vinyl carbazole) Polymers 0.000 description 1
- 229920000548 poly(silane) polymer Polymers 0.000 description 1
- 229920001197 polyacetylene Polymers 0.000 description 1
- 229920002098 polyfluorene Polymers 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- JEXVQSWXXUJEMA-UHFFFAOYSA-N pyrazol-3-one Chemical compound O=C1C=CN=N1 JEXVQSWXXUJEMA-UHFFFAOYSA-N 0.000 description 1
- 150000003219 pyrazolines Chemical class 0.000 description 1
- JUJWROOIHBZHMG-UHFFFAOYSA-N pyridine Substances C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 125000002943 quinolinyl group Chemical group N1=C(C=CC2=CC=CC=C12)* 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 229910052701 rubidium Inorganic materials 0.000 description 1
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 description 1
- YYMBJDOZVAITBP-UHFFFAOYSA-N rubrene Chemical compound C1=CC=CC=C1C(C1=C(C=2C=CC=CC=2)C2=CC=CC=C2C(C=2C=CC=CC=2)=C11)=C(C=CC=C2)C2=C1C1=CC=CC=C1 YYMBJDOZVAITBP-UHFFFAOYSA-N 0.000 description 1
- KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 150000003384 small molecules Chemical class 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 125000005504 styryl group Chemical group 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 description 1
- IFLREYGFSNHWGE-UHFFFAOYSA-N tetracene Chemical compound C1=CC=CC2=CC3=CC4=CC=CC=C4C=C3C=C21 IFLREYGFSNHWGE-UHFFFAOYSA-N 0.000 description 1
- VLLMWSRANPNYQX-UHFFFAOYSA-N thiadiazole Chemical compound C1=CSN=N1.C1=CSN=N1 VLLMWSRANPNYQX-UHFFFAOYSA-N 0.000 description 1
- 229930192474 thiophene Natural products 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- ODHXBMXNKOYIBV-UHFFFAOYSA-N triphenylamine Chemical compound C1=CC=CC=C1N(C=1C=CC=CC=1)C1=CC=CC=C1 ODHXBMXNKOYIBV-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 1
- 229910001935 vanadium oxide Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/842—Containers
- H10K50/8423—Metallic sealing arrangements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/02—Physical, chemical or physicochemical properties
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/02—Details
- H05B33/04—Sealing arrangements, e.g. against humidity
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/341—Short-circuit prevention
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/842—Containers
- H10K50/8426—Peripheral sealing arrangements, e.g. adhesives, sealants
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/851—Division of substrate
Definitions
- the present invention relates to a method of manufacturing an organic device and an organic device.
- the organic device described in Patent Document 1 includes, on a substrate, an anode layer including at least a first electrode, an organic compound layer including a light emitting layer, a cathode layer including a second electrode, and a sealing member.
- the sealing member has at least one resin substrate and at least one barrier layer.
- the closure base material containing the material which has conductivity may be used as a barrier layer of the above-mentioned sealing member.
- the sealing member includes the sealing base
- the following problems may occur when manufacturing an organic device.
- the sealing member is attached to a plurality of organic device portions so that a part of the first electrode and the second electrode is exposed, and then cut and separated into individual organic devices.
- the cutting blade is made to enter the sealing member.
- the sealing base formed from the material having conductivity is dragged by the cutting blade, and the sealing base contacts with the electrode layer (anode layer, cathode layer).
- the anode layer and the cathode layer may be electrically connected to cause a short circuit. This can cause the organic device to fail and reduce the reliability of the organic device.
- At least a first electrode layer, an organic functional layer, and a second electrode layer are laminated in this order on one main surface of a support substrate extending in one direction.
- a plurality of organic device parts are formed at predetermined intervals in one direction, and a part of each of the first electrode layer and the second electrode layer in each organic device part is exposed and straddles the plurality of organic device parts
- a sealing member having a sealing base containing a material having conductivity and a tacky bond containing a pressure-sensitive adhesive is bonded to the organic device portion, and in the cutting step, the sealing is performed.
- the cutting blade is made to enter from the member side and after being cut Adhesive portion is cut sealing member so as to protrude outward from the sealing substrate.
- the cutting blade in the cutting step, is made to enter from the sealing member side, and the tacky bond portion after being cut protrudes outside the sealing base material Cut the sealing member in the same manner.
- the sticky bonding part even when the sealing base material including the conductive material is shifted by the cutting blade by causing the sticky bonding part to protrude outside the sealing base material, the sticky bonding part
- the first electrode layer and / or the second electrode layer and the sealing member can be prevented from being in contact (electrically connected). Therefore, the first electrode layer and the second electrode layer can be prevented from being electrically connected and short circuited through the sealing base material.
- the decrease in reliability can be suppressed.
- the cutting blade in the cutting step, using a cutting blade having a single-edged structure, is positioned with the surface having a smaller inclination angle with respect to the entering direction of the cutting blade, on the organic device portion side
- the blade may enter the sealing member.
- the cutting blade applies pressure to the sealing member as it enters the sealing member.
- the pressure exerted by the beveled surface of the cutting blade on the sealing member increases.
- the pressure applied by the cutting blade is larger on the surface having a large inclination angle with respect to the traveling direction than on the surface having a small inclination angle.
- the surface side having the large inclination angle due to the pressure applied from the surface side having the large cutting angle.
- the adhesive part in the sealing member located on the side moves to the side with a small inclination angle.
- the tacky bond portion moved to the side having a smaller inclination angle tends to return to the position before the cutting, and as a result, the tacky bond portion protrudes outward beyond the sealing base material. In this manner, the tacky adhesive portion can be protruded to the outer side than the sealing base material.
- An organic device comprises an organic device portion in which at least a first electrode layer, an organic functional layer and a second electrode layer are stacked in this order on a supporting substrate, and a first electrode layer in the organic device portion And a sealing member disposed on the organic device portion such that a portion of each of the second electrode layers is exposed, and the sealing member includes at least a sealing base material including a conductive material.
- the pressure-sensitive adhesive portion containing a pressure-sensitive adhesive is laminated to be configured, and the pressure-sensitive adhesive portion protrudes outward beyond the sealing substrate.
- the adhesive part protrudes outward beyond the sealing base.
- the adhesive part can avoid that a 1st electrode layer and / or a 2nd electrode layer, and a sealing member contact (electrically connect) by a viscous bonding part. Therefore, the first electrode layer and the second electrode layer can be prevented from being electrically connected and short circuited through the sealing base material. As a result, in the organic device, the decrease in reliability can be suppressed.
- the decrease in reliability can be suppressed.
- FIG. 1 is a view showing a cross-sectional configuration of an organic EL element manufactured by the method of manufacturing an organic device according to an embodiment.
- FIG. 2 is a view showing a cross-sectional configuration of the organic EL element.
- FIG. 3 is a flowchart showing a method of manufacturing an organic EL element.
- FIG. 4 is a perspective view showing a state in which a sealing member is attached to the organic device portion.
- FIG. 5 is a diagram for explaining the cutting process.
- FIG. 6 is a diagram for explaining the cutting process.
- FIG. 7 is a view showing a cutting unit.
- FIG. 8 is a view showing the structure of the cutting blade.
- 9 (a), 9 (b) and 9 (c) are diagrams for explaining the cutting process in detail.
- FIG. 10 is a view showing a cutting unit according to a modification.
- FIG. 11 is a diagram showing measurement results.
- FIG. 12 is a diagram showing measurement results.
- an organic EL device (organic device) 1 manufactured by the method of manufacturing an organic device according to the present embodiment includes a support substrate 3 and an anode layer (first electrode layer) 5; The organic functional layer 7, the cathode layer (second electrode layer) 9, and the sealing member 11 are provided.
- the anode layer 5, the organic functional layer 7 and the cathode layer 9 constitute an organic EL unit (organic device unit) 10.
- the organic EL element 1 may be a top emission type device.
- the support substrate 3 is made of a resin having transparency to visible light (light with a wavelength of 400 nm to 800 nm).
- the support substrate 3 is a film-like substrate (a flexible substrate, a substrate having flexibility).
- the thickness of the support substrate 3 is, for example, 30 ⁇ m or more and 500 ⁇ m or less.
- the supporting substrate 3 is a resin, it is preferably 45 ⁇ m or more from the viewpoints of substrate deflection, wrinkles, and elongation during the roll-to-roll method, and 125 ⁇ m or less from the viewpoint of flexibility.
- the support substrate 3 is, for example, a plastic film.
- the material of the support substrate 3 is, for example, polyether sulfone (PES); polyester resin such as polyethylene terephthalate (PET), polyethylene naphthalate (PEN); polyolefin resin such as polyethylene (PE), polypropylene (PP), cyclic polyolefin, etc.
- Polyamide resin polycarbonate resin; polystyrene resin; polyvinyl alcohol resin; saponified ethylene-vinyl acetate copolymer; polyacrylonitrile resin; acetal resin; polyimide resin; epoxy resin and the like.
- the material of the support substrate 3 is preferably a polyester resin or a polyolefin resin because of high heat resistance, low coefficient of linear expansion and low manufacturing cost, and polyethylene terephthalate or polyethylene naphthalate More preferable.
- One of these resins may be used alone, or two or more of these resins may be used in combination.
- a gas barrier layer or a moisture barrier layer may be disposed on one main surface 3 a of the support substrate 3.
- the other main surface 3b of the support substrate 3 is a light emitting surface.
- a light extraction film may be provided on the other main surface 3 b of the support substrate 3.
- the light extraction film may be bonded to the other main surface 3 b of the support substrate 3 by an adhesive layer.
- the support substrate 3 may be thin film glass. When the supporting substrate 3 is a thin film glass, the thickness is preferably 30 ⁇ m or more from the viewpoint of strength and 100 ⁇ m or less from the viewpoint of flexibility.
- the anode layer 5 is disposed on one main surface 3 a of the support substrate 3.
- an electrode layer exhibiting light transparency is used.
- an electrode which shows light transmittance thin films of metal oxides, metal sulfides and metals having high electric conductivity can be used, and thin films having high light transmittance are suitably used.
- a thin film formed of ITO, IZO or tin oxide is suitably used.
- anode layer 5 a transparent conductive film of an organic substance such as polyaniline and a derivative thereof, polythiophene and a derivative thereof may be used.
- an electrode obtained by patterning the above-described metal or metal alloy or the like in a mesh shape or an electrode in which a nanowire containing silver is formed in a network shape may be used.
- the thickness of the anode layer 5 can be determined in consideration of light transmittance, electrical conductivity, and the like.
- the thickness of the anode layer 5 is usually 10 nm to 10 ⁇ m, preferably 20 nm to 1 ⁇ m, and more preferably 50 nm to 200 nm.
- the anode layer 5 may be formed by a dry deposition method such as vacuum deposition, sputtering or ion plating, an inkjet method, a slit coater method, a gravure printing method, a screen printing method, a spray coater method or the like. It can be mentioned.
- the anode layer 5 can be further patterned by photolithography, dry etching, laser trimming or the like. By directly coating the support substrate 3 using a coating method, it is possible to form a pattern without using a photolithography method, a dry etching method, a laser trimming method or the like.
- the organic functional layer 7 is disposed on the main surface (the opposite side of the surface in contact with the support substrate 3) of the anode layer 5 and one main surface 3 a of the support substrate 3.
- the organic functional layer 7 includes a light emitting layer.
- the organic functional layer 7 usually contains a light emitting material which mainly emits fluorescence and / or phosphorescence, or the light emitting material and a dopant material for a light emitting layer which assists the light emitting material.
- the dopant material for the light emitting layer is added, for example, to improve the light emission efficiency or to change the light emission wavelength.
- the light emitting material that emits fluorescence and / or phosphorescence may be a low molecular weight compound or a high molecular weight compound.
- Examples of the organic substance constituting the organic functional layer 7 include light emitting materials which emit fluorescence and / or phosphorescence such as the following dye materials, metal complex materials and polymer materials, or dopant materials for the light emitting layer described below. be able to.
- pigment materials include cyclopentamine and its derivatives, tetraphenylbutadiene and its derivatives, triphenylamine and its derivatives, oxadiazole and its derivatives, pyrazoloquinoline and its derivatives, distyrylbenzene and its derivatives, distyryl Arylene and its derivative, pyrrole and its derivative, thiophene compound, pyridine compound, perinone and its derivative, perylene and its derivative, oligothiophene and its derivative, oxadiazole dimer, pyrazoline dimer, quinacridone and its derivative, coumarin and its derivative Etc. can be mentioned.
- Metal complex material As a metal complex material, for example, rare earth metals such as Tb, Eu, Dy, etc., or Al, Zn, Be, Pt, Ir etc. as central metals, and oxadiazole, thiadiazole, phenylpyridine, phenylbenzimidazole, quinoline structure
- the metal complex etc. which have etc. as a ligand can be mentioned.
- metal complexes having light emission from a triplet excited state such as iridium complex and platinum complex, aluminum quinolinol complex, benzoquinolinol beryllium complex, benzoxazolyl zinc complex, benzothiazole zinc complex, azomethyl zinc complex, A porphyrin zinc complex, a phenanthroline europium complex, etc. can be mentioned.
- Polymer material examples include polyparaphenylene vinylene and derivatives thereof, polythiophene and derivatives thereof, polyparaphenylene and derivatives thereof, polysilane and derivatives thereof, polyacetylene and derivatives thereof, polyfluorene and derivatives thereof, polyvinylcarbazole and derivatives thereof, A pigment material or a material obtained by polymerizing a metal complex material can be mentioned.
- dopant material for light emitting layer examples include perylene and its derivatives, coumarin and its derivatives, rubrene and its derivatives, quinacridone and its derivatives, squalium and its derivatives, porphyrin and its derivatives, styryl dyes, tetracene and its derivatives, pyrazolone and its derivatives Derivatives, decacyclene and its derivatives, phenoxazone and its derivatives, etc. can be mentioned.
- the thickness of the organic functional layer 7 is usually about 2 nm to 200 nm.
- the organic functional layer 7 is formed, for example, by a coating method using a coating liquid (for example, an ink) containing the light emitting material as described above.
- the solvent of the coating solution containing the light emitting material is not limited as long as it dissolves the light emitting material.
- the light emitting material as described above may be formed by vacuum evaporation.
- the cathode layer 9 is disposed on the main surface (the opposite side of the surface in contact with the anode layer 5) of the organic functional layer 7 and one main surface 3 a of the support substrate 3.
- a material of the cathode layer 9 for example, an alkali metal, an alkaline earth metal, a transition metal, a periodic table group 13 metal or the like can be used.
- the material of the cathode layer 9 for example, lithium, sodium, potassium, rubidium, cesium, beryllium, magnesium, calcium, strontium, barium, aluminum, scandium, vanadium, zinc, yttrium, indium, cerium, samarium, Metals such as europium, terbium, ytterbium, alloys of two or more of the metals, one or more of the metals, gold, silver, platinum, copper, manganese, titanium, cobalt, nickel, tungsten, tin Alloys with one or more of these, or graphite or graphite intercalation compounds, etc. are used.
- alloys include magnesium-silver alloy, magnesium-indium alloy, magnesium-aluminium alloy, indium-silver alloy, lithium-aluminium alloy, lithium-magnesium alloy, lithium-indium alloy, calcium-aluminium alloy, etc. it can.
- a transparent conductive electrode formed of a conductive metal oxide or a conductive organic substance can be used as the cathode layer 9.
- the conductive metal oxide include indium oxide, zinc oxide, tin oxide, ITO, IZO and the like
- examples of the conductive organic substance include polyaniline and its derivatives, polythiophene and its derivatives, etc. it can.
- the cathode layer 9 may be composed of a laminate in which two or more layers are stacked. In some cases, an electron injection layer described later may be used as the cathode layer 9.
- the thickness of the cathode layer 9 is set in consideration of the electrical conductivity and the durability.
- the thickness of the cathode layer 9 is usually 10 nm to 10 ⁇ m, preferably 20 nm to 1 ⁇ m, and more preferably 50 nm to 500 nm.
- the method for forming the cathode layer 9 includes, for example, coating methods such as inkjet method, slit coater method, gravure printing method, screen printing method, spray coating method, vacuum evaporation method, sputtering method, lamination method of thermally pressing metal thin film, etc. And vacuum evaporation or sputtering is preferred.
- the sealing member 11 is disposed on the top of the organic EL element 1 so as to cover at least the organic functional layer 7.
- the sealing member 11 has a tacky adhesive section 17 and a sealing base material 19.
- the sealing member 11 may have a tacky-adhesive portion 17, a barrier layer 18, and a sealing base 19.
- the sealing member 11 includes the adhesive and bonding portion 17, the barrier layer 18, and the sealing base 19.
- the layers are stacked in order.
- the adhesive part 17 is used to adhere the barrier layer 18 and the sealing base 19 to the anode layer 5, the organic functional layer 7 and the cathode layer 9 in the above configuration.
- the adhesive part 17 is a pressure sensitive adhesive.
- the pressure sensitive adhesive preferably contains an ⁇ -olefin resin and a tackifier.
- the ⁇ -olefin resin and tackifier are not particularly limited, and conventionally known ones can be used.
- Examples of the ⁇ -olefin resin include homopolymers or copolymers of polyethylene, polyisobutylene and the like.
- the copolymer a copolymer obtained by polymerizing two or more ⁇ -olefins, ⁇ -olefin and a monomer other than ⁇ -olefin (for example, styrene, non-conjugated diene, etc.) are polymerized And copolymers obtained by
- the pressure sensitive adhesive may contain an additive.
- the additive include hygroscopic metal oxides (for example, calcium oxide, calcined hydrotalcite and the like), and inorganic fillers other than hygroscopic metal oxides (for example, silica, mica, talc and the like).
- the barrier layer 18 or the sealing base 19 has a gas barrier function, in particular, a moisture barrier function.
- the barrier layer 18 may be, for example, a film formed of silicon oxide (SiO x ), aluminum oxide (Al 2 O x ) or titanium oxide (TiO x ).
- the sealing substrate 19 contains a conductive material.
- the sealing base 19 includes, for example, a metal foil. As a metal foil, copper, aluminum or stainless steel is preferable from the viewpoint of barrier properties. The thickness of the metal foil is preferably as large as possible from the viewpoint of suppressing pinholes, but is preferably 10 ⁇ m to 50 ⁇ m from the viewpoint of flexibility. When the sealing base 19 includes a metal foil, the barrier layer 18 may be omitted.
- the sealing substrate 19 may be formed of only a metal foil, or may be formed of a plurality of layers including the metal foil.
- a plastic film is adhered to the surface of the sealing base 19 opposite to the surface on which the barrier layer 18 or the adhesive part 17 is formed. It may be done.
- a plastic film to be adhered for example, polyethersulfone (PES); polyester resin such as polyethylene terephthalate (PET), polyethylene naphthalate (PEN); polyolefin resin such as polyethylene (PE), polypropylene (PP), cyclic polyolefin etc.
- Polyamide resin polycarbonate resin; polystyrene resin; polyvinyl alcohol resin; saponified ethylene-vinyl acetate copolymer; polyacrylonitrile resin; acetal resin; polyimide resin; epoxy resin and the like.
- the adhesive part 17 protrudes more than the sealing base 19.
- the pressure-sensitive adhesive portion 17 has projecting portions 17a and 17b.
- the protrusions 17a and 17b are adhesively attached in the second direction (left and right direction in FIG. 2) orthogonal to the first direction (left and right direction in FIG. 1) in which the exposed portions of the anode layer 5 and the cathode layer 9 are disposed. It is provided in the wearing part 17.
- the protrusions 17 a and 17 b protrude outward in the second direction with respect to the end surface of the sealing base 19. The amount of protrusion of the protrusions 17a and 17b is appropriately set.
- a roll-to-roll method may be employed from the substrate drying step S01 to the bonding step S05 shown in FIG. 3.
- the supporting substrate 3 is heated and dried (substrate drying step S01).
- the anode layer 5 is formed on one of the main surfaces 3a of the dried supporting substrate 3 (anode layer forming step (forming step) S02).
- the anode layer 5 can be formed by the formation method exemplified in the description of the anode layer 5.
- a plurality of anode layers 5 are formed on the support substrate 3 at predetermined intervals in the longitudinal direction of the support substrate 3 and at predetermined intervals in the width direction of the support substrate 3 (the other direction orthogonal to one direction). To form a plurality (two in the present embodiment).
- the organic functional layer 7 is formed on the anode layer 5 (organic functional layer forming step (forming step) S03).
- the organic functional layer 7 can be formed by the formation method exemplified in the description of the organic functional layer 7.
- the cathode layer 9 is formed on the organic functional layer 7 (a cathode layer forming step (forming step) S04).
- the cathode layer 9 can be formed by the forming method exemplified in the description of the cathode layer 9.
- a plurality of organic EL units 10 are formed on the support substrate 3 at predetermined intervals in the longitudinal direction of the support substrate 3 (Y direction in FIG. 3), A plurality of (two in the present embodiment) are formed at predetermined intervals in the width direction (X direction in FIG. 3) of the support substrate 3. That is, two rows of the organic EL units 10 are formed along the longitudinal direction of the support substrate 3.
- the sealing member 11 is bonded (bonding step S05).
- the sealing member 11 has a predetermined width and extends in the longitudinal direction of the support substrate 3. Specifically, as shown in FIG. 4, the sealing member 11 has a width set so that a part of each of the anode layer 5 and the cathode layer 9 is exposed, and has a band shape.
- the sealing member 11 has flexibility.
- the adhesive member 17 is provided on one surface of the sealing base 19 of the sealing member 11.
- the sealing member 11 may be cut in a band shape after the adhesive part 17 is formed on one surface of the sealing base material 19 via the barrier layer 18, or the sealing base material 19 is cut in a band shape. After that, the adhesive portion 17 may be formed on one surface of the sealing base 19 via the barrier layer 18.
- the sealing member 11 is attached on the organic EL unit 10 so that a part of the anode layer 5 and a part of the cathode layer 9 are exposed. Specifically, the sealing member 11 is attached along one direction across the plurality of organic EL units 10.
- the organic EL unit 10 formed on the support substrate 3 and the sealing member 11 are bonded together while transporting the support substrate 3.
- the support substrate 3 and the sealing member 11 pass between rollers (not shown). Thereby, the pressure is applied to the support substrate 3 and the sealing member 11 by the roller. Thereby, the adhesive part 17 and the organic electroluminescent part 10 contact
- bonding the organic EL unit 10 and the sealing member 11 it is preferable to be performed in an environment with a low water concentration, and it is particularly preferable to be performed in a nitrogen atmosphere.
- the plurality of organic EL units 10 to which the sealing member 11 is bonded are singulated (cutting step S06).
- the support substrate 3 and the sealing member 11 are cut along the cutting line L, and the plurality of organic EL units 10 to which the sealing member 11 is bonded are singulated Do.
- the support substrate 3 is supported by the support 100, and the support substrate 3 is cut by the cutting blade B.
- FIG. 5 is a view of a cross section along the X direction in FIG. 4 as viewed from the Y direction, and shows a cross section at a position including the anode layer 5 and the organic functional layer 7.
- FIG. 6 is a view of a cross section along the X direction in FIG. 4 as viewed from the Y direction, and shows a cross section at a position not including the anode layer 5 and the organic functional layer 7.
- the cutting blade B is provided in the cutting unit 50.
- the cutting unit 50 includes a cutting blade B, a holding unit (base) 52 that holds the cutting blade B, and elastic members 54 and 55.
- the holding portion 52 is, for example, a plate member such as a veneer board.
- the cutting blade B has a shape corresponding to the cutting line L, and has a frame shape. In the present embodiment, the cutting blade B is integrally provided with four blade members.
- the cutting blade B is held by the holding portion 52, for example, by embedding the end portion of the cutting blade B on the holding portion 52 side in the holding portion 52.
- the cutting blade B is a blade cut out by cutting a part of the holding portion 52 using an NC (numerical control) processing machine, and the cutting blade B and the holding portion 52 are integrated. It may be In this case, the cutting blade B and the holding portion 52 can be the same material.
- the cutting blade B has a single-edged structure.
- the structure of one blade is a structure in which one blade surface and the other blade surface are inclined, and the other blade surface has a smaller inclination angle than one blade surface.
- the cutting blade B has a first blade surface Ba and a second blade surface Bb.
- the first blade surface Ba forms an inclination angle ⁇ 1 with respect to a straight line along the height direction of the cutting blade B.
- the second blade surface Bb forms an inclination angle ⁇ 2 with respect to a straight line along the height direction of the cutting blade B.
- the inclination angle ⁇ 1 of the first blade surface Ba is larger than the inclination angle ⁇ 2 of the second blade surface Bb.
- the inclination angle ⁇ 2 of the second blade surface Bb is smaller than the inclination angle ⁇ 1 of the first blade surface Ba.
- the inclination angle ⁇ 1 is preferably larger than 15 °, and preferably 30 ° or more. More preferable.
- the inclination angle ⁇ 1 is preferably smaller than 50 °, and more preferably 40 ° or less.
- the inclination angle ⁇ 2 is preferably 0 ° or more and smaller than 15 °.
- the first blade surface Ba of the cutting blade B forms an inclination angle ⁇ 1 of about 40 ° with respect to a straight line along the height direction of the cutting blade B.
- the second blade surface Bb forms an inclination angle ⁇ 2 of about 1 ° with respect to a straight line along the height direction of the cutting blade B. That is, the second blade surface Bb of the cutting blade B has a smaller inclination angle than the first blade surface Ba with respect to the direction in which the cutting blade B enters.
- both the first blade surface Ba and the second blade surface Bb are inclined.
- both the first blade surface Ba and the second blade surface Bb receive pressure.
- part of the pressure received by the first blade surface Ba can be offset by the pressure received by the second blade surface Bb with respect to the sealing member 11. Therefore, the cutting blade B can be made to enter straight.
- the sealing member 11 can be cut with high accuracy.
- the cutting blade B is disposed such that the second blade surface Bb faces inward.
- the second blade surfaces Bb are arranged to face each other.
- the second blade surface Bb is disposed to face the elastic member 54 (the first blade surface Ba to face the elastic member 55).
- Examples of the elastic members 54 and 55 include rubber and sponge.
- the elastic members 54 and 55 are fixed to the holding portion 52.
- the elastic members 54 and 55 are disposed in a pair facing the position where the cutting blade B is interposed therebetween.
- a plurality of sets of elastic members 54 and 55 are provided (here, 10 sets) at predetermined intervals.
- the tip end of the elastic members 54 and 55 protrudes more than the tip (cutting edge) of the cutting blade B, as shown in FIG. .
- FIGS. 9A to 9C the form in which the support substrate 3 is cut will be described as an example.
- the cutting blade B is positioned at the cutting point.
- the elastic members 54 and 55 in which the tip portion protrudes from the cutting blade B hold the support substrate 3.
- FIG. 9 (b) when the cutting blade B is made to enter the support substrate 3, the elastic members 54 and 55 are sandwiched between the support substrate 3 and the holding portion 52 and pressed by the holding portion 52. Shrink with. Then, as shown in FIG.
- the support substrate 3 on which the plurality of organic EL units 10 are formed is supported by the support 100.
- the cutting blade B of the cutting part 50 is made to approach from the one side principal surface 3a side of the support substrate 3, and the area
- the cutting blade B enters the sealing member 11 so that the second blade surface Bb faces the organic EL unit 10 side (the side on which the organic EL unit 10 is formed).
- the cutting blade B is advanced to a position where the tip thereof reaches the other main surface 3 b of the support substrate 3.
- the pressure applied from the side of the first blade surface Ba of the cutting blade B moves the adhesive part located on the side of the first blade surface Ba to the side of the second blade surface Bb.
- the tacky bond portion moved to the second blade surface Bb side tries to return to the position before the cutting, whereby the tacky bond portion 17 is outside the sealing base 19. Stand out.
- the plurality of organic EL units 10 to which the sealing member 11 is bonded are singulated.
- the organic EL element 1 shown in FIG. 1 and FIG. 2 is manufactured.
- the cutting blade B is made to enter from the sealing member 11 side, and the adhesive portion 17 after being cut is The sealing member 11 is cut so as to protrude outside the sealing base 19.
- the adhesive part 17 can prevent the anode layer 5 and / or the cathode layer 9 and the sealing member 11 from contacting (electrically connecting). Therefore, the anode layer 5 and the cathode layer 9 can be prevented from being electrically connected and short circuited through the sealing base 19.
- the decrease in reliability can be suppressed.
- the second cutting blade B has a small inclination angle with respect to the entering direction of the cutting blade B.
- the blade surface Bb is positioned on the organic EL unit 10 side, and the cutting blade B is made to enter the sealing member 11.
- the cutting blade B applies pressure to the sealing member 11 when entering the sealing member 11.
- the pressure applied to the sealing member 11 by the inclined surface of the cutting blade B increases.
- the pressure applied by the cutting blade B is greater at the first blade surface Ba with respect to the advancing direction than at the second blade surface Bb with a smaller tilt angle.
- the adhesive part in the sealing member 11 positioned on the first blade surface Ba side moves to the second blade surface Bb side.
- the tacky bond portion moved to the second blade surface Bb side tries to return to the position before the cutting, and as a result, the tacky bond portion 17 is outside the sealing base 19. Stand out. In this manner, the adhesive part 17 can be protruded to the outside of the sealing base 19.
- the adhesive part 17 protrudes outside the sealing base 19.
- the sealing base 19 including the conductive material is dragged by the cutting blade B because the adhesive part 17 protrudes outside the sealing base 19.
- the contact (electrical connection) between the anode layer 5 and / or the cathode layer 9 and the sealing member 11 can be avoided. Therefore, the anode layer 5 and the cathode layer 9 can be prevented from being electrically connected and short circuited through the sealing base 19. As a result, in the organic EL element 1, the decrease in reliability can be suppressed.
- positioned between the anode layer 5 and the cathode layer 9 was illustrated.
- the configuration of the organic functional layer 7 is not limited to this.
- the organic functional layer 7 may have the following configuration.
- A (anode layer) / light emitting layer / (cathode layer)
- B (anode layer) / hole injection layer / light emitting layer / (cathode layer)
- C (anode layer) / hole injection layer / light emitting layer / electron injection layer / (cathode layer)
- D (anode layer) / hole injection layer / light emitting layer / electron transport layer / electron injection layer / (cathode layer)
- E (anode layer) / hole injection layer / hole transport layer / light emitting layer / (cathode layer)
- F (anode layer) / hole injection layer / hole transport layer / light emitting layer / electron injection layer / (cathode layer)
- G (anode layer) / hole injection layer / hole transport layer / light emitting layer / electron injection layer / (cathode layer)
- H (anode layer) / light emitting layer / electron
- the materials of the hole injection layer, the hole transport layer, the electron transport layer, and the electron injection layer can be known materials.
- Each of the hole injection layer, the hole transport layer, the electron transport layer, and the electron injection layer can be formed, for example, by a coating method in the same manner as the organic functional layer 7.
- the electron injection layer may contain an alkali metal or alkaline earth metal, or an oxide or fluoride of an alkali metal or alkaline earth metal.
- a film formation method of the electron injection layer a coating method, a vacuum evaporation method and the like can be mentioned.
- the thickness of the electron injection layer is preferably 0.5 nm to 20 nm.
- the electron injecting layer is preferably a thin film from the viewpoint of suppressing an increase in drive voltage of the organic EL element 1 particularly when the insulating property is strong, and the thickness thereof is, for example, 0.5 nm to 10 nm. Is preferable, and from the viewpoint of electron injection property, 2 nm to 7 nm is preferable.
- the organic EL element 1 may have a single layer organic functional layer 7 or may have two or more organic functional layers 7. Assuming that the laminated structure disposed between the anode layer 5 and the cathode layer 9 in any one of the layer configurations (a) to (i) is “structural unit A”, the organic function of two layers As a structure of the organic EL element which has the layer 7, the layer structure shown to following (j) can be mentioned, for example.
- the layer configurations of two (structural unit A) may be the same as or different from each other.
- the charge generation layer is a layer that generates holes and electrons by applying an electric field.
- Examples of the charge generation layer include thin films formed of vanadium oxide, ITO, molybdenum oxide, and the like.
- (structural unit B) x represents a laminate in which (structural units B) are stacked in x stages.
- the layer configuration of plural (structural unit B) may be the same or different.
- a plurality of organic functional layers 7 may be directly stacked to form an organic EL element without providing a charge generation layer.
- the form which forms the anode layer 5 on the support substrate 3 was demonstrated as an example.
- a roll in which the anode layer 5 is previously formed on the support substrate 3 may be used.
- the embodiment in which the step of heating and drying the support substrate 3 is performed is described as an example.
- the drying process of the support substrate 3 may not necessarily be performed.
- the form which uses the cutting part 50 in cutting process S06 was demonstrated to an example.
- the cutting blade used in the cutting step S06 may not include the elastic members 54 and 55. That is, the cutting blade may be used alone.
- the mode using the cutting unit 50 shown in FIG. 7 has been described as an example.
- the cutting unit may be configured as shown in FIG.
- the cutting unit 50A includes a cutting blade B, a holding unit 52, and elastic members 54A and 55A.
- the cutting unit 50A is different from the cutting unit 50 in the configuration of the elastic members 54A and 55A.
- the elastic members 54A and 55A are disposed to face each other at a position where the cutting blade B is interposed therebetween.
- the elastic members 54A are located outside the cutting blade B, and a plurality of (here, eight) elastic members are provided at predetermined intervals.
- the elastic member 55A is disposed inside the frame-shaped cutting blade B, and has a shape (rectangular shape) along the cutting blade B.
- the tip end of the elastic members 54A, 55A protrudes from the tip of the cutting blade B, as shown in FIG.
- the elastic members 54, 55 (54A, 55A) are described as an example in which the elastic members 54, 55 (54A, 55A) are disposed in a pair facing the position sandwiching the cutting blade B.
- the elastic member may be disposed only on one blade surface side.
- the elastic member is an inner side of the frame in that the film can be discharged from the inside of the frame when cutting.
- only the elastic member 54 or the elastic member 54A may be disposed.
- a plurality of organic EL units 10 are formed on the support substrate 3 at predetermined intervals in the longitudinal direction (Y direction in FIG. 4) of the support substrate 3 and supported.
- substrate 3 was demonstrated as an example. That is, an embodiment in which the organic EL units 10 are formed in two rows (plural rows) on the support substrate 3 has been described as an example. However, at least one row of the organic EL units 10 may be formed on the support substrate 3.
- the anode layer is exemplified as the first electrode layer and the cathode layer is exemplified as the second electrode layer, but the first electrode layer may be a cathode layer and the second electrode layer may be an anode layer. . That is, the cathode layer may be disposed on the support substrate side.
- the organic EL element was demonstrated to an example as an organic device.
- the organic device may be an organic thin film transistor, an organic photodetector, an organic thin film solar cell or the like.
- Example 1 A PET film having a thickness of 38 ⁇ m was bonded to an aluminum foil (JIS 1N30: hard) having a thickness of 30 ⁇ m, and then an olefin pressure-sensitive adhesive was applied to a thickness of 30 ⁇ m on the exposed surface of the aluminum foil.
- An aluminum foil coated with the above-mentioned adhesive is pasted onto a sputtered film-forming surface of a 100 ⁇ m thick PEN film on which a copper sputtered film is formed, and a PET film, aluminum foil, pressure-sensitive adhesive, copper sputtered A laminate in which the membrane and the PEN film were laminated was obtained.
- the PET film and the aluminum foil correspond to the sealing substrate 19
- the copper sputter film corresponds to the cathode layer 9
- the PEN film corresponds to the support substrate 3.
- the cutting blade has a single-edged structure, and is cut by an NC processing machine so that the blade height is 1.3 mm and the apex angle (an angle formed by the first blade surface Ba and the second blade surface Bb) is 30 °.
- the surface was coated by plating.
- the elastic members 54A and 55A select a material that presses the surface of the film at approximately 1.3 kg / cm 2 when the holding portion 52 comes closest to the PET film at the time of cutting the laminate. .
- the laminate was cut with a cutting blade. Specifically, the cutting blade was advanced in the order of PET film, aluminum foil, pressure-sensitive adhesive and PEN film to cut the laminate.
- the cross section of the laminate was measured with a double scan high precision laser measurement device (product name: LT-9000, manufactured by Keyence Corporation).
- the cross section of the laminate measured the cross section on the side of the one blade.
- the measurement results are shown in FIG.
- the horizontal axis indicates the position ( ⁇ m), and the vertical axis indicates the height ( ⁇ m).
- "0" is one surface position of the PEN film to which the pressure sensitive adhesive is not bonded.
- the pressure-sensitive adhesive protrudes about 20 ⁇ m with respect to the cross section of the PEN film after cutting the laminate.
- the amount of protrusion of the pressure-sensitive adhesive was smaller than that of the single-edged blade. Therefore, it was found that the pressure sensitive adhesive can be more reliably protruded to the outside than the PEN film by cutting the laminate using a single blade as the cutting blade.
- Example 2 As in Example 1, a laminate in which a PET film, an aluminum foil, a pressure sensitive adhesive and a PEN film were laminated was obtained.
- the cutting blade has a single-edged structure, and is cut by an NC processing machine so that the blade height is 1.3 mm and the apex angle (the angle formed by the first blade surface Ba and the second blade surface Bb) is 40 °.
- the surface was coated by plating.
- the elastic members 54A and 55A select a material that presses the surface of the film at approximately 1.3 kg / cm 2 when the holding portion 52 comes closest to the PET film at the time of cutting the laminate. .
- the laminate was cut under the same conditions as in Example 1.
- the cross section of the laminate was measured with a double scan high precision laser measurement device (product name: LT-9000, manufactured by Keyence Corporation).
- the cross section of the laminate measured the cross section on the side of the one blade.
- the measurement results are shown in FIG. In FIG. 12, the horizontal axis indicates position ( ⁇ m), and the vertical axis indicates height ( ⁇ m). In the horizontal axis, "0" is one surface position of the PEN film to which the pressure sensitive adhesive is not bonded.
- the pressure sensitive adhesive protruded about 20 ⁇ m with respect to the cross section of the PEN film.
- SYMBOLS 1 organic EL element (organic device), 3 ... support substrate, 3a ... one main surface, 5 ... anode layer (1st electrode layer), 7 ... organic functional layer, 9 ... cathode layer (2nd electrode layer), 11: Sealing member, 17: adhesive bond portion, 19: sealing base material, B: cutting blade, Ba: first blade surface, Bb: second blade surface.
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
Description
支持基板3は、可視光(波長400nm~800nmの光)に対して透光性を有する樹脂から構成されている。支持基板3は、フィルム状の基板(フレキシブル基板、可撓性を有する基板)である。支持基板3の厚さは、例えば、30μm以上500μm以下である。支持基板3が樹脂の場合は、ロールツーロール方式の連続時の基板ヨレ、シワ、及び伸びの観点からは45μm以上、可撓性の観点からは125μm以下が好ましい。
陽極層5は、支持基板3の一方の主面3a上に配置されている。陽極層5には、光透過性を示す電極層が用いられる。光透過性を示す電極としては、電気伝導度の高い金属酸化物、金属硫化物及び金属等の薄膜を用いることができ、光透過率の高い薄膜が好適に用いられる。例えば酸化インジウム、酸化亜鉛、酸化スズ、インジウム錫酸化物(Indium Tin Oxide:略称ITO)、インジウム亜鉛酸化物(Indium Zinc Oxide:略称IZO)、金、白金、銀、銅等から形成される薄膜が用いられ、これらの中でもITO、IZO、又は酸化スズから形成される薄膜が好適に用いられる。
有機機能層7は、陽極層5の主面(支持基板3に接する面の反対側)及び支持基板3の一方の主面3a上に配置されている。有機機能層7は、発光層を含んでいる。有機機能層7は、通常、主として蛍光及び/又はりん光を発光する発光材料、或いは該発光材料とこれを補助する発光層用ドーパント材料を含む。発光層用ドーパント材料は、例えば発光効率を向上させたり、発光波長を変化させたりするために加えられる。蛍光及び/又はりん光を発光する発光材料は、低分子化合物であってもよいし、高分子化合物であってもよい。有機機能層7を構成する有機物としては、例えば下記の色素材料、金属錯体材料、高分子材料等の蛍光及び/又はりん光を発光する発光材料、又は、下記の発光層用ドーパント材料等を挙げることができる。
色素材料としては、例えばシクロペンダミン及びその誘導体、テトラフェニルブタジエン及びその誘導体、トリフェニルアミン及びその誘導体、オキサジアゾール及びその誘導体、ピラゾロキノリン及びその誘導体、ジスチリルベンゼン及びその誘導体、ジスチリルアリーレン及びその誘導体、ピロール及びその誘導体、チオフェン化合物、ピリジン化合物、ペリノン及びその誘導体、ペリレン及びその誘導体、オリゴチオフェン及びその誘導体、オキサジアゾールダイマー、ピラゾリンダイマー、キナクリドン及びその誘導体、クマリン及びその誘導体等を挙げることができる。
金属錯体材料としては、例えばTb、Eu、Dy等の希土類金属、又はAl、Zn、Be、Pt、Ir等を中心金属に有し、オキサジアゾール、チアジアゾール、フェニルピリジン、フェニルベンゾイミダゾール、キノリン構造等を配位子に有する金属錯体等を挙げることができる。金属錯体としては、例えばイリジウム錯体、白金錯体等の三重項励起状態からの発光を有する金属錯体、アルミニウムキノリノール錯体、ベンゾキノリノールベリリウム錯体、ベンゾオキサゾリル亜鉛錯体、ベンゾチアゾール亜鉛錯体、アゾメチル亜鉛錯体、ポルフィリン亜鉛錯体、フェナントロリンユーロピウム錯体等を挙げることができる。
高分子材料としては、例えばポリパラフェニレンビニレン及びその誘導体、ポリチオフェン及びその誘導体、ポリパラフェニレン及びその誘導体、ポリシラン及びその誘導体、ポリアセチレン及びその誘導体、ポリフルオレン及びその誘導体、ポリビニルカルバゾール及びその誘導体、上記色素材料、又は金属錯体材料を高分子化した材料等を挙げることができる。
発光層用ドーパント材料としては、例えばペリレン及びその誘導体、クマリン及びその誘導体、ルブレン及びその誘導体、キナクリドン及びその誘導体、スクアリウム及びその誘導体、ポルフィリン及びその誘導体、スチリル色素、テトラセン及びその誘導体、ピラゾロン及びその誘導体、デカシクレン及びその誘導体、フェノキサゾン及びその誘導体等を挙げることができる。
陰極層9は、有機機能層7の主面(陽極層5に接する面の反対側)及び支持基板3の一方の主面3a上に配置されている。陰極層9の材料としては、例えばアルカリ金属、アルカリ土類金属、遷移金属及び周期表第13族金属等を用いることができる。陰極層9の材料としては、具体的には、例えばリチウム、ナトリウム、カリウム、ルビジウム、セシウム、ベリリウム、マグネシウム、カルシウム、ストロンチウム、バリウム、アルミニウム、スカンジウム、バナジウム、亜鉛、イットリウム、インジウム、セリウム、サマリウム、ユーロピウム、テルビウム、イッテルビウム等の金属、前記金属のうちの2種以上の合金、前記金属のうちの1種以上と、金、銀、白金、銅、マンガン、チタン、コバルト、ニッケル、タングステン、錫のうちの1種以上との合金、又はグラファイト若しくはグラファイト層間化合物等が用いられる。合金の例としては、マグネシウム-銀合金、マグネシウム-インジウム合金、マグネシウム-アルミニウム合金、インジウム-銀合金、リチウム-アルミニウム合金、リチウム-マグネシウム合金、リチウム-インジウム合金、カルシウム-アルミニウム合金等を挙げることができる。
封止部材11は、少なくとも有機機能層7を覆うように有機EL素子1において最上部に配置されている。封止部材11は、粘接着部17と、封止基材19と、を有している。封止部材11は、粘接着部17と、バリア層18と、封止基材19と、を有していてもよい。封止部材11が、粘接着部17、バリア層18及び封止基材19を有している場合、封止部材11は、粘接着部17、バリア層18及び封止基材19の順番で積層されている。粘接着部17は、前記構成においては、バリア層18及び封止基材19を陽極層5、有機機能層7及び陰極層9に接着させるために用いられる。
続いて、上記構成を有する有機EL素子1の製造方法について説明する。
(a)(陽極層)/発光層/(陰極層)
(b)(陽極層)/正孔注入層/発光層/(陰極層)
(c)(陽極層)/正孔注入層/発光層/電子注入層/(陰極層)
(d)(陽極層)/正孔注入層/発光層/電子輸送層/電子注入層/(陰極層)
(e)(陽極層)/正孔注入層/正孔輸送層/発光層/(陰極層)
(f)(陽極層)/正孔注入層/正孔輸送層/発光層/電子注入層/(陰極層)
(g)(陽極層)/正孔注入層/正孔輸送層/発光層/電子輸送層/電子注入層/(陰極層)
(h)(陽極層)/発光層/電子注入層/(陰極層)
(i)(陽極層)/発光層/電子輸送層/電子注入層/(陰極層)
ここで、記号「/」は、記号「/」を挟む各層が隣接して積層されていることを示す。上記(a)に示す構成は、上記実施形態における有機EL素子1の構成を示している。
(j)陽極層/(構造単位A)/電荷発生層/(構造単位A)/陰極層
(k)陽極層/(構造単位B)x/(構造単位A)/陰極層
厚み38μmのPETフィルムを、厚さ30μmのアルミ箔(JIS 1N30:硬質)に接着した後、アルミ箔の露出した面にオレフィン系感圧接着剤を30μmの厚みで塗布した。銅スパッタ膜が成膜された厚さ100μmのPENフィルムのスパッタ膜成膜面上に、上記接着剤を塗布したアルミ箔を貼合して、PETフィルム、アルミ箔、感圧接着剤、銅スパッタ膜及びPENフィルムが積層された積層体を得た。当該積層体において、PETフィルム及びアルミ箔は封止基材19に相当し、銅スパッタ膜は陰極層9に相当し、PENフィルムは支持基板3に相当する。
実施例1と同様に、PETフィルム、アルミ箔、感圧接着剤及びPENフィルムが積層された積層体を得た。
Claims (3)
- 一方向に延在する支持基板の一方の主面上に、少なくとも第1電極層、有機機能層及び第2電極層をこの順番で積層した有機デバイス部を、前記一方向において所定の間隔をあけて複数形成する形成工程と、
各前記有機デバイス部における前記第1電極層及び前記第2電極層それぞれの一部が露出し且つ複数の前記有機デバイス部に跨がるように、前記一方向に延在する封止部材を前記一方向に沿って貼り合わせる貼合工程と、
前記封止部材が貼合された複数の前記有機デバイス部を個片化する裁断工程と、を含み、
前記貼合工程では、導電性を有する材料を含む封止基材と、感圧接着剤を含む粘接着部とを有する前記封止部材を前記有機デバイス部に貼り合わせ、
前記裁断工程では、前記封止部材側から裁断刃を進入させると共に、裁断された後の前記粘接着部が前記封止基材よりも外側に突出するように前記封止部材を裁断する、有機デバイスの製造方法。 - 前記裁断工程では、片刃の構造を有する前記裁断刃を用い、前記裁断刃において当該裁断刃の進入方向に対して傾斜角度が小さい方の面を前記有機デバイス部側に位置させて、前記裁断刃を前記封止部材に進入させる、請求項1に記載の有機デバイスの製造方法。
- 支持基板上に、少なくとも第1電極層、有機機能層及び第2電極層がこの順番で積層された有機デバイス部と、
前記有機デバイス部における前記第1電極層及び前記第2電極層それぞれの一部が露出するように、前記有機デバイス部上に配置された封止部材と、を備え、
前記封止部材は、少なくとも、導電性を有する材料を含む封止基材と、感圧接着剤を含む粘接着部とが積層されて構成されており、
前記粘接着部は、前記封止基材よりも外側に突出している、有機デバイス。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16/635,033 US20200243803A1 (en) | 2017-08-02 | 2018-08-02 | Method for manufacturing organic device, and organic device |
EP18841529.3A EP3664580A4 (en) | 2017-08-02 | 2018-08-02 | ORGANIC DEVICE AND ORGANIC DEVICE MANUFACTURING PROCESS |
KR1020207005108A KR20200036885A (ko) | 2017-08-02 | 2018-08-02 | 유기 디바이스의 제조 방법 및 유기 디바이스 |
JP2019534586A JPWO2019027014A1 (ja) | 2017-08-02 | 2018-08-02 | 有機デバイスの製造方法及び有機デバイス |
CN201880049596.0A CN110945968A (zh) | 2017-08-02 | 2018-08-02 | 有机器件的制造方法及有机器件 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017150139 | 2017-08-02 | ||
JP2017-150139 | 2017-08-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2019027014A1 true WO2019027014A1 (ja) | 2019-02-07 |
Family
ID=65232832
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2018/029110 WO2019027014A1 (ja) | 2017-08-02 | 2018-08-02 | 有機デバイスの製造方法及び有機デバイス |
Country Status (6)
Country | Link |
---|---|
US (1) | US20200243803A1 (ja) |
EP (1) | EP3664580A4 (ja) |
JP (1) | JPWO2019027014A1 (ja) |
KR (1) | KR20200036885A (ja) |
CN (1) | CN110945968A (ja) |
WO (1) | WO2019027014A1 (ja) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007073332A (ja) | 2005-09-07 | 2007-03-22 | Konica Minolta Holdings Inc | 有機エレクトロルミネッセンスパネル、有機エレクトロルミネッセンスパネルの製造方法 |
JP2008077855A (ja) * | 2006-09-19 | 2008-04-03 | Konica Minolta Holdings Inc | 有機エレクトロルミネッセンスパネル、有機エレクトロルミネッセンスパネルの製造方法 |
JP2010170776A (ja) * | 2009-01-21 | 2010-08-05 | Konica Minolta Holdings Inc | 有機エレクトロニクス素子およびその製造方法 |
WO2015016082A1 (ja) * | 2013-07-29 | 2015-02-05 | コニカミノルタ株式会社 | 有機エレクトロルミネッセンス素子の製造方法、製造装置及び有機エレクトロルミネッセンス素子 |
WO2016103889A1 (ja) * | 2014-12-25 | 2016-06-30 | コニカミノルタ株式会社 | 有機エレクトロルミネッセンス素子の製造方法及び有機エレクトロルミネッセンス素子 |
JP2017052964A (ja) * | 2008-12-03 | 2017-03-16 | テーザ・ソシエタス・ヨーロピア | 電子的装置のカプセル化方法 |
JP6393362B1 (ja) * | 2017-04-25 | 2018-09-19 | 住友化学株式会社 | 有機デバイスの製造方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010067721A1 (ja) * | 2008-12-10 | 2010-06-17 | コニカミノルタホールディングス株式会社 | 有機エレクトロルミネッセンス素子の製造方法、有機エレクトロルミネッセンス素子 |
US20100167002A1 (en) * | 2008-12-30 | 2010-07-01 | Vitex Systems, Inc. | Method for encapsulating environmentally sensitive devices |
-
2018
- 2018-08-02 EP EP18841529.3A patent/EP3664580A4/en not_active Withdrawn
- 2018-08-02 US US16/635,033 patent/US20200243803A1/en not_active Abandoned
- 2018-08-02 CN CN201880049596.0A patent/CN110945968A/zh active Pending
- 2018-08-02 WO PCT/JP2018/029110 patent/WO2019027014A1/ja unknown
- 2018-08-02 KR KR1020207005108A patent/KR20200036885A/ko unknown
- 2018-08-02 JP JP2019534586A patent/JPWO2019027014A1/ja active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007073332A (ja) | 2005-09-07 | 2007-03-22 | Konica Minolta Holdings Inc | 有機エレクトロルミネッセンスパネル、有機エレクトロルミネッセンスパネルの製造方法 |
JP2008077855A (ja) * | 2006-09-19 | 2008-04-03 | Konica Minolta Holdings Inc | 有機エレクトロルミネッセンスパネル、有機エレクトロルミネッセンスパネルの製造方法 |
JP2017052964A (ja) * | 2008-12-03 | 2017-03-16 | テーザ・ソシエタス・ヨーロピア | 電子的装置のカプセル化方法 |
JP2010170776A (ja) * | 2009-01-21 | 2010-08-05 | Konica Minolta Holdings Inc | 有機エレクトロニクス素子およびその製造方法 |
WO2015016082A1 (ja) * | 2013-07-29 | 2015-02-05 | コニカミノルタ株式会社 | 有機エレクトロルミネッセンス素子の製造方法、製造装置及び有機エレクトロルミネッセンス素子 |
WO2016103889A1 (ja) * | 2014-12-25 | 2016-06-30 | コニカミノルタ株式会社 | 有機エレクトロルミネッセンス素子の製造方法及び有機エレクトロルミネッセンス素子 |
JP6393362B1 (ja) * | 2017-04-25 | 2018-09-19 | 住友化学株式会社 | 有機デバイスの製造方法 |
Non-Patent Citations (1)
Title |
---|
See also references of EP3664580A4 |
Also Published As
Publication number | Publication date |
---|---|
EP3664580A1 (en) | 2020-06-10 |
CN110945968A (zh) | 2020-03-31 |
EP3664580A4 (en) | 2021-02-24 |
JPWO2019027014A1 (ja) | 2020-08-20 |
US20200243803A1 (en) | 2020-07-30 |
KR20200036885A (ko) | 2020-04-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2017057241A1 (ja) | 有機el素子及び有機el素子の製造方法 | |
JP6393362B1 (ja) | 有機デバイスの製造方法 | |
JP6284670B1 (ja) | 有機デバイスの製造方法 | |
JP6744130B2 (ja) | 有機デバイスの製造方法 | |
WO2019027014A1 (ja) | 有機デバイスの製造方法及び有機デバイス | |
JP6559758B2 (ja) | 電子デバイスの製造方法 | |
US11108028B2 (en) | Manufacturing method for organic electronic device | |
JP6647237B2 (ja) | 有機el素子及び有機el素子の製造方法 | |
JP6375016B1 (ja) | 電極付き基板、積層基板及び有機デバイスの製造方法 | |
JP6129938B1 (ja) | 有機デバイスの製造方法及び有機デバイス用基板 | |
WO2017154575A1 (ja) | 有機デバイスの製造方法 | |
WO2017130955A1 (ja) | 有機el素子 | |
JP6097369B1 (ja) | パターンの製造方法 | |
CN108029176B (zh) | 有机电子设备的制造方法及密封构件的制造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 18841529 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2019534586 Country of ref document: JP Kind code of ref document: A |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
ENP | Entry into the national phase |
Ref document number: 20207005108 Country of ref document: KR Kind code of ref document: A |
|
ENP | Entry into the national phase |
Ref document number: 2018841529 Country of ref document: EP Effective date: 20200302 |