WO2018228403A1

WO2018228403A1 - Device for measuring remaining amount of target material

Info

Publication number: WO2018228403A1
Application number: PCT/CN2018/090929
Authority: WO
Inventors: 边松林; 张勋泽; 肖亮; 宣增志; 关召军; 丁文兵; 张方馨
Original assignee: 京东方科技集团股份有限公司; 合肥京东方光电科技有限公司
Priority date: 2017-06-13
Filing date: 2018-06-13
Publication date: 2018-12-20
Also published as: CN107101552B; CN107101552A

Abstract

A device for measuring the remaining amount of a target material, comprising: a main body, which is provided with a plurality of measuring tracks that are arranged along a first direction, wherein each measuring track extends along a second direction, the second direction being perpendicular to the first direction; a plurality of ejector pins, which correspond one-to-one to the plurality of measuring tracks, each ejector pin extending along the second direction, and a first end of each ejector pin being limited within the measuring track corresponding thereto, wherein each ejector pin may move freely along the measuring track and may partly extend out from the measuring track; a plurality of sliding blocks, which correspond one-to-one to the plurality of measuring tracks, wherein each sliding block may be disposed within a measuring track so as to slide along the measuring track corresponding thereto, and each sliding block is limited to a side of a first end of an ejector pin, the static friction between each sliding block and measuring track being greater than the gravity thereof; and a main ruler, which is disposed on the main body and which is provided with scale lines that are arranged along the second direction. The measurement steps for the foregoing device for measuring the remaining amount of a target material are simple, and measurement results are accurate.

Description

Target remaining measuring device

Related application

The present application claims the priority of the Chinese Patent Application No. PCT Application No.

Technical field

The present disclosure relates to the field of vacuum magnetron plating, and in particular to a target remaining measuring device.

Background technique

In the field of thin film transistor (TFT) and liquid crystal display manufacturing, physical vapor deposition technology is often used. The technology generally uses a magnetron sputtering device to bombard a target through an argon (Ar) atom to deposit target particles on the surface of the substrate to achieve deposition. The purpose of film formation. The vertical magnetron sputtering equipment is a commonly used magnetron sputtering equipment. Since the magnet behind the target generates a magnetic field, the rate of film formation can be improved to some extent. The target is ion etched to form a sputtering channel. Once the channel is broken, the target is scrapped, resulting in low target utilization. That is to say, in the magnetron sputtering film formation process, an etched curve is formed on the surface of the target due to the bombardment of ions, that is, an etched region having a non-uniform depth is formed on the surface of the target. When the deepest part of the etch exceeds the thickness of the target, the target may be broken down and cannot be used. Therefore, determining the residual amount of the residual target etching and adjusting the target use period according to the remaining amount of the residual target etching has a positive significance for improving the use efficiency of the target and improving the yield of the product; the residual amount of the residual target etching is Refers to the thickness of the remaining target where the used target is etched most.

As shown in FIG. 1 , the conventional residual target etching amount measuring tool simulates a target etching curve by using a pin 100 having a high friction coefficient; in a specific operation, the pin 100 is perpendicular to the target with a certain force. The surface is pressed against the target. When the pin 100 is removed from the target to be measured, the simulated target etching curve is retained, and then drawn on the coordinate paper along the direction of the pin 100 to draw the pin 100. Etching the curve, and finally using the coordinate paper to read the residual amount of residual target etching, that is, the minimum remaining amount of the target. The measurement is performed by using the above-mentioned residual target etching amount measuring tool, which is cumbersome and time consuming, and the friction coefficient of the pin 100 is reduced after the use of the residual target etching amount measuring tool for a long time, and thus the pin 100 is often provided. Dropping, resulting in too few pin headers 100, resulting in an inaccurate simulated etch curve; in addition, due to the need to draw a simulated etch curve on the coordinate paper for reading, the thickness of the nib itself, the nib and coordinates The paper cannot guarantee the real-time vertical and the contact between the nib and the pin 100 during the drawing process, causing the pin 100 to move, etc., which may cause a large measurement error. In summary, the measurement steps of the above-mentioned residual target etching amount measuring tool are cumbersome, and the measurement result error is large, and thus it is easy to cause the measurement of the remaining amount of the residual target etching to be inaccurate, resulting in too late or too early replacement of the target, too late replacement Targets can cause target breakdown, and too early replacement of target targets can cause target waste.

Public content

In view of this, an embodiment of the present disclosure provides a target remaining amount measuring device, including:

The main body is provided with a plurality of measuring tracks arranged in sequence along the first direction; each measuring track extends in the second direction, and the second direction is perpendicular to the first direction;

a plurality of thimbles corresponding to the plurality of measurement tracks; each thimble extending in a second direction, and the first end is located in a measurement track corresponding thereto and is limited to a thimble corresponding to the measurement track a first end side; each thimble is free to move along its corresponding measuring track and can partially extend out of the measuring track;

a plurality of sliders corresponding to the plurality of measurement tracks; each slider is slidably disposed in the measurement track along a measurement track corresponding thereto; static friction between each slider and the measurement track The force is greater than its own gravity;

A main ruler is disposed on the main body and is provided with a tick mark arranged in a second direction.

The above target remaining amount measuring device may have the following operational steps:

First, the target remaining amount measuring device is vertically placed above the target to be tested, specifically, the thimble can extend out of one end of the measuring track, that is, the second end of the thimble (opposite the first end) is disposed toward the surface of the residual target Since each thimble is free to move along its corresponding measuring track and its first end is limited to the measuring track, at this time, due to gravity, each thimble will partially extend out of the measuring track and will not detach Measuring the track; subsequently, adjusting the slider in each measuring track to contact the first end of the thimble;

Then, slowly moving the device vertically downward to the second end of the thimble extending out of the measuring track to contact the surface of the residual target, and applying pressure to the target remaining measuring device so that each thimble can be measured along The track moves relatively upwardly. Further, the first end of each thimble can jack up the slider in the corresponding measuring track; since the moving distance of each thimble along the measuring track upward corresponds to the distribution of the surface height of the target, The first ends of the plurality of thimbles are distributed along the etching curve of the target, that is, the sliders jacked up by the first end of the thimble are also distributed along the etching curve of the target;

Finally, the device can be removed from the residual target, at which time the thimble will return to the initial position due to gravity, and each slider will remain stationary due to the static friction between the measuring track, ie At this time, the plurality of sliders will still be distributed along the etching curve of the target; at this time, the number of scales corresponding to the slider at the lowermost end can be read by the main ruler mounted on the main body, and The number of ticks is the minimum of the amount of target etching remaining.

The steps of measuring the amount of the residual target etching are simple, and there is no problem such as a missing thimble or a large measurement structure error caused by a manual drawing etching curve, and the measurement result is relatively accurate.

According to an aspect of the present disclosure, the target remaining amount measuring device further includes: a pair of scales extending in the first direction and slidably mounted on the main body or the main ruler in the second direction.

According to an aspect of the present disclosure, the target remaining amount measuring device further includes: a homing ruler extending in the first direction and slidably mounted on the main body along the plurality of measuring tracks, the homing ruler Provided on a side of the plurality of sliders facing away from the plurality of ejector pins; when the homing ruler slides along the plurality of measurement trajectories, the sliders in each of the measurement trajectories can be pushed toward the thimble.

According to an aspect of the present disclosure, the main body is provided with a track slit that allows the homing ruler to slide along the plurality of measuring tracks; the homing ruler is slidable along the track slit to push each measuring track The inner slider moves toward the ejector pin.

According to an aspect of the present disclosure, the target remaining amount measuring device further includes: a first adjustment knob for driving the alignment ruler to slide in a second direction; and/or for driving the home ruler edge The plurality of second adjustment knobs that measure the track slide.

According to an aspect of the present disclosure, the target remaining amount measuring device further includes: two limiting posts, the two limiting posts are respectively disposed at two ends of the body in the first direction; each limit The column extends in the second direction and is slidably mounted on the main body in the second direction; two locking mechanisms are in one-to-one correspondence with the two limiting posts, and each locking mechanism is used to limit the corresponding The post is relatively fixed to the body.

According to an aspect of the present disclosure, the main ruler is slidably mounted on the main body in a second direction.

According to an aspect of the present disclosure, the target remaining amount measuring device further includes a grip fixedly mounted to the main body for gripping.

According to an aspect of the present disclosure, each of the measurement rails includes a rail portion and an end portion at one end of the rail portion, the end portion being provided with an opening that allows the thimble portion to protrude from the measurement rail.

According to an aspect of the present disclosure, each thimble includes a stem portion and a head forming a first end of the thimble; a radial dimension of the head portion is greater than a radial dimension of an end opening of the measuring rail, and is smaller than The inner diameter dimension of the rail portion of the measuring track; the radial dimension of the stem portion is smaller than the radial dimension of the end opening of the measuring rail.

According to an aspect of the present disclosure, the ejector pin has a radial dimension of 0.4 mm or less; the end opening of the measuring rail has a radial dimension of 0.5 mm or less.

DRAWINGS

1 is a schematic structural view of a target remaining amount measuring device of the related art;

2 is a schematic structural view of a target remaining amount measuring device in a state in which all thimbles and sliders are homing according to an embodiment of the present disclosure;

FIG. 3 is a schematic structural diagram of a target remaining amount measuring device according to an embodiment of the present disclosure;

4 is a schematic structural diagram of a target remaining amount measuring device in a reading state after measurement according to an embodiment of the present disclosure;

FIG. 5 is a schematic structural diagram of a target remaining amount measuring device in a process of homing a slider according to an embodiment of the present disclosure;

FIG. 6 is a schematic diagram of a matching structure between each measuring track and a thimble corresponding thereto and a slider in a target remaining amount measuring device according to an embodiment of the present disclosure;

FIG. 7 is a schematic diagram of a matching structure between a plurality of measuring tracks and a home leveling device in a target remaining amount measuring device according to an embodiment of the present disclosure.

detailed description

The technical solutions in the embodiments of the present disclosure are clearly and completely described in the following with reference to the accompanying drawings in the embodiments of the present disclosure. It is obvious that the described embodiments are only a part of the embodiments of the present disclosure, and not all of the embodiments. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments of the present disclosure without departing from the inventive scope are the scope of the disclosure.

Please refer to Figures 2-7.

As shown in FIG. 2 to FIG. 5, a target remaining amount measuring device according to an embodiment of the present disclosure includes:

a main body 1, the main body 1 is provided with a plurality of measuring tracks 10 arranged in a first direction x; each measuring track 10 extends along a second direction y, the second direction y is perpendicular to the first direction x;

a plurality of thimbles 2, one-to-one corresponding to the plurality of measuring rails 10; each of the thimbles 2 extending in the second direction y, and a first end thereof being located in the corresponding measuring rail 10; and each thimble 2 The corresponding measuring track 10 is free to move, and part can extend out of the measuring track 10;

The plurality of sliders 3 are in one-to-one correspondence with the plurality of measuring rails 10; each of the sliders 3 is slidably disposed in the measuring rail 10 along the corresponding measuring rail 10 thereof, and is specifically limited to correspond to the measuring rail 10 The first end side of the thimble 2, as shown in Figures 2-5, the slider 3 is located above the first end of the thimble 2; the static friction between each slider 3 and its corresponding measuring track 10 is greater than its Self gravity

A main rule 4 is disposed on the main body 1 and is provided with a scale line arranged in the second direction y.

It should be noted that, for convenience of description, the end portion of the thimble 2 located in the corresponding measuring rail 10 is referred to as a first end; when the thimble 2 is measured, the measuring rail 10 is extended to contact the target to be tested. One end is called the second end.

First, as shown in FIG. 2, the target remaining amount measuring device is vertically placed above the target to be tested. Specifically, the thimble 2 can extend out of one end of the measuring track 10, that is, the second end of the thimble 2 (with One end is opposite to the residual target surface; since each thimble 2 is free to move longitudinally along its corresponding measuring track 10, and its first end is confined within the measuring track 10, and at this time, due to gravity, each The ejector pins 2 will partially extend out of the measuring track 10 and will not detach from the measuring track 10; subsequently, the slider 3 in each measuring track 10 is adjusted to be in contact with the first end of the thimble 2;

Then, as shown in FIG. 3, the device is slowly moved vertically downward until the thimble 2 protrudes out of the second end of the measuring rail 10 to contact the surface of the residual target, and the target remaining measuring device is pressed downward. In order that each thimble 2 can be moved relatively upward along the measuring track 10, the first end of each thimble 2 can lift the slider 3 in its corresponding measuring track 10; since each thimble 2 is along the measuring track 10 The upward moving distance corresponds to the distribution of the surface height of the target. Further, the first ends of the plurality of thimbles 2 are distributed along the etching curve of the target, that is, the slider 3 which is jacked up by the first end of the thimble 2 is also along The etching curve of the target is distributed, that is, the shape of the line of all the sliders 3 corresponds to the shape of the etching curve of the target;

Finally, as shown in FIG. 4, the device can be removed from the residual target, at which time the thimble 2 will be homed due to gravity (ie, partially protruding out of the measuring track 10 and not leaving the measuring track 10). And each slider 3 is kept stationary due to the static friction between it and the measuring rail 10, that is, the shape of the wiring of the plurality of sliders 3 still corresponds to the etching curve of the target. Further, at this time, the number of scales corresponding to the slider 3 located at the lowermost end can be read by the main ruler 4 attached to the main body 1, and the minimum value of the remaining amount of the target etching can be obtained based on the number of scales.

The step of measuring the etch amount of the residual target is simple, and there is no problem that the stylus 2 is missing, or the measurement structure error is large due to the artificial drawing etching curve, and the measurement result is relatively accurate.

As shown in FIG. 2 to FIG. 5, in a specific embodiment, the main body 1 may be a plate-like structure extending along the first direction x and the second direction y;

Further, the main rule 4 is also a plate-like structure extending in the first direction x and the second direction y and overlapping the main body 1, that is, the main ruler 4 can be stacked in a direction perpendicular to the outer surface of the plate-like structure. Placed on the front or rear surface of the body 1;

Alternatively, the main body 1 and the main ruler 4 may be fixed by a transparent adhesive.

Specifically, the main body 1 is prepared by using a transparent material in order to observe the number of ticks corresponding to the slider 3 and the reading slider 3 in the measuring track 10;

Alternatively, the main ruler 4 may also be made of a transparent material so that the number of ticks corresponding to the slider 3 and the reading slider 3 in the measuring track 10 can be observed from either side of the main body 1 or the main ruler 4. .

As shown in FIG. 6, in a specific embodiment, each measuring rail 10 includes a rail portion 11 and an end portion 12 at one end of the rail portion 11, from which the second end of the thimble 2 can be from the end of the rail portion 11. 12 extends out of the track portion 11, i.e., the end portion 12 is provided with an opening 120 that allows the second end of the thimble 2 to extend out of the measuring track 10.

According to an aspect of the present disclosure, the inner diameter a of the rail portion 11 of the measuring rail 10 is 1 mm or less.

According to an aspect of the present disclosure, the diameter b of the opening 120 of the end portion 12 of the measuring rail 10 is less than or equal to 0.5 mm.

As shown in Figure 6, in a particular embodiment, each thimble 2 includes a stem portion 21 and a head portion 22 at one end of the stem portion 21, the head portion 22 forming a first end of the thimble 2; wherein the head portion The diameter c of 22 is larger than the diameter b of the opening 120 of the end portion 12 of the measuring rail 10 and smaller than the inner diameter a of the rail portion 11 of the measuring rail 10; the diameter d of the rod portion 21 is smaller than the diameter of the opening 120 of the end portion 12 of the measuring rail 10 b, so that the thimble 2 can slide along the rail portion 11 during the measurement but does not slip out of the opening 120 of the end portion 12 of the rail 10.

According to an aspect of the present disclosure, the diameter 21 of the stem portion 21 of the thimble 2 is less than or equal to 0.4 mm; the diameter c of the head portion 22 of the thimble 2 is greater than 0.5 mm and less than 1 mm.

As shown in FIG. 2 to FIG. 6 , in a specific embodiment, each slider 3 and its corresponding measuring rail 10 have an interference fit, and the slider 3 has a high friction coefficient design, that is, a slider. The coefficient of friction between the material of the outer periphery of 3 and the material of the inner wall of the measuring rail 10 is large to ensure that the slider 3 does not automatically fall back as the thimble 2 falls when the thimble 2 falls.

As shown in FIG. 2 to FIG. 5, in a specific embodiment, the target remaining amount measuring device provided by the embodiment of the present disclosure may further include a pair of scales 5; specifically, the pair of scales 5 are along the first The direction x extends and is slidably mounted on the main rule 4 or the body 1 in the second direction y.

As shown in FIG. 4, when the number of ticks corresponding to the slider 3 is read, the alignment rule 5 can be moved in the second direction y to be aligned with the slider 3, thereby viewing the alignment of the alignment rule 5 The scale of the main ruler 4, thereby obtaining the reading of the slider 3, can ensure the accuracy of the reading, thereby further ensuring the accuracy of the measurement result.

As shown in FIG. 2 to FIG. 5 and FIG. 7 , in a specific embodiment, the target remaining amount measuring device provided by the embodiment of the present disclosure may further include a home ruler 6; specifically, the home ruler 6 Extending in a first direction x and slidably mounted on the body 1 along a plurality of measuring rails 10; the homening ruler 6 is disposed on a side of the plurality of sliders 3 facing away from the plurality of thimbles 2 as it is measured along multiple As the track 10 slides down, the slider 3 within each measuring track 10 can be pushed toward the thimble 2 to home the slider 3 within each measuring track 10.

As shown in FIG. 5, in particular, after the end of the measurement, each slider 3 can be homed by adjusting the home ruler 6, that is, each slider 3 is pushed to the end 12 of the measuring track 10, and with the thimble The first end of the contact is in contact for the next use; at this time, the first end of the slider 3 and the thimble 2 in each measuring track 10 are located at the end 12 of the measuring track 10, ie each measuring track 10 Both the slider 3 and the thimble 2 are in the home state.

As shown in FIG. 7 , in a specific embodiment, the homing rule 6 can be slidably mounted on the main body 1 along a plurality of measuring rails 10 , and can be realized in the following manner: the main body 1 is provided with a track slit 13 . The track slot 13 extends along the plurality of measuring tracks 10, and connects each of the two adjacent measuring tracks 10, and further, the home ruler 6 can pass through each of the measuring tracks 10 through the track gap 13; The home ruler 6 is slidable along the track gap 13 between the plurality of measuring tracks 10 and pushes the slider 3 in each measuring track 10 toward the thimble 2.

As shown in FIG. 2 to FIG. 5, in a specific embodiment, the target remaining amount measuring device provided by the embodiment of the present disclosure may further include two limiting columns 7; specifically, the two limiting columns 7 Separately disposed at two ends of the main body 1 in the first direction x, and each of the limiting posts 7 extends along the second direction y; that is, the two limiting posts 7 are respectively located in the first direction of the plurality of measuring rails 10 The first and last sides of x are arranged in parallel with the thimble 2.

Further, the two limiting posts 7 are used to set a maximum protrusion amount of the plurality of thimbles 2 with respect to the end portions 12 of the plurality of measuring rails 10, the set length and each thimble 2 under the action of gravity The length of the outer extension measuring rail 10 is the same; that is, the one end of the two limiting post 7 with respect to the plurality of measuring rails 10, and the second end of each thimble 2 protrudes out of the measuring rail 10 by gravity. The position of the time is horizontally aligned, in other words, the length of extension of each of the limit posts relative to the end of the measuring track is substantially the same as the length of the thimble that naturally extends out of the measuring track under the force of gravity. Further, when measuring, the target remaining amount measuring device provided by the embodiment of the present disclosure is pressed against the target to the copper back plate of the target column 7 contacting the target material (the copper back plate is used for carrying the target material, and is located away from the target material) When one side of the ejector pin 2), the force can be stopped and the device can be picked up; because at this time, all the thimbles 2 can be ensured to have sufficient contact with the target etching surface, that is, all the thimbles 2 have successfully simulated the target. The distribution of the etching curve of the material; therefore, the positioning of the two limiting columns 7 can make the measurement operation process more convenient and the measurement efficiency can be further improved.

Of course, in order to ensure that the limiting post 7 can contact the copper backing plate of the target, the set length of the two limiting posts 7 with respect to the end 12 of the plurality of measuring rails 10 needs to be greater than or equal to the initial of the target. Thickness, specifically, target initial thickness data will be reflected in the technical report of each set of targets. Before the machine is installed, the initial thickness of each set of targets should be doubled to ensure that the limit column 7 is relative to The length of the end 12 of the plurality of measuring rails 10 is greater than or equal to the initial thickness of the target.

As shown in FIG. 2 to FIG. 5, optionally, each of the limiting posts 7 is slidably mounted on the main body 1 in the second direction y, that is, each of the limiting posts 7 can be opposite to the main body 1 along the extending direction thereof. The telescopic adjustment is made such that the length of the limiting post 7 is adjustable to be suitable for the target to be tested having different initial thicknesses, and can be retracted when not in use for storage.

Further, the target remaining amount measuring device provided by the embodiment of the present disclosure may further include two locking mechanisms corresponding to the two limiting posts 7 in one-to-one relationship, and the limiting post 7 is telescopically adjusted relative to the main body 1 in the extending direction thereof. Thereafter, the limit post 7 and the main body 1 can be locked by a locking mechanism for measurement.

According to the above arrangement, the target remaining amount measuring device provided by the embodiment of the present disclosure can be retracted from the end portion of the measuring rail 10 with respect to the end portion 12 of the measuring rail 10 when the target remaining amount measuring device is not in use, and the thimble 2 can also be Retracted into the respective measuring track 10, so that the volume of the entire device is greatly reduced, which is convenient for storage;

As shown in Fig. 2, before using the device for measurement, the device can be placed vertically so that all the thimbles 2 naturally extend out of their measurement track 10 under the force of gravity, and the slider 3 is returned to the position by the home ruler 6. Or, the slider 3 and the thimble 2 are homaged directly by the homing ruler 6 (it is to be noted that the state in which the thimble 2 is homing is the same as the state in which the thimble 2 is placed vertically when the device is placed, that is, all are extended The track 10 is measured and the first end is constrained by the end 12 of the measuring track 10 so as not to detach from the measuring track 10); then, the two limiting posts 7 are adjusted to slide in the second direction y to be relative to the measuring track The one end of the end portion 12 of the 10 is horizontally aligned with the one end (second end) of the ejector pin 2 which protrudes from the measuring rail 10, and then the measuring operation is performed.

As shown in FIG. 2 to FIG. 5, in a specific embodiment, the target remaining amount measuring apparatus provided by the embodiment of the present disclosure may further include at least one of the following:

a first adjusting knob 51 for driving the aligning ruler 5 to slide in the second direction y with respect to the main ruler 4;

a second adjustment knob 61 for driving the home ruler 6 to slide along the plurality of measurement rails 10; and

A third adjusting button (not shown) for driving the two limiting posts 7 to respectively extend and slide in the second direction y with respect to the main body 1.

Alternatively, the first adjustment knob 51, the second adjustment knob 61, and the third adjustment knob may be disposed at a side edge of the main ruler 4 in the x direction or at a side edge of the plurality of measurement rails 10 in the x direction.

As shown in FIG. 2 to FIG. 5, in a specific embodiment, in the target remaining amount measuring device provided by the embodiment of the present disclosure, the main ruler 4 is slidably mounted on the main body 1 in the second direction y; Before the measurement is performed by using the target remaining amount measuring device provided by the embodiment of the present disclosure, all the sliders 3 can be returned by using the homing ruler 6, and then the main ruler 4 is moved to make the zero-cut line and all the sliders. 3 aligning, so that all the readings of the slider 3 are zeroed; further, the residual target etching margin information can be directly obtained through the reading on the main ruler 4 after the measurement is taken, that is, the residual target etching residue can be directly read out. Quantity to further increase the measurement speed.

As shown in FIG. 2 to FIG. 5, in a specific embodiment, the target remaining amount measuring device provided by the embodiment of the present disclosure may further include a handle 8 fixedly mounted on the main body 1 for the user to hold. Optionally, the handle 8 is mounted to one end of the plurality of measuring rails 10 away from the end 12, and the grip 8 extends in the first direction x.

It should be noted that, according to the principle of residual target remaining measurement, the measurement operating conditions of all the sliders need to be consistent in each measurement, and therefore, the ends of the plurality of measurement tracks need to be aligned in the first direction; The lengths of the multiple thimbles are also exactly the same; and the matching arrangement between each measuring track and its corresponding thimble and slider is also identical.

It will be apparent to those skilled in the art that various modifications and changes can be made in the embodiments of the present disclosure without departing from the spirit and scope of the disclosure. Thus, it is intended that the present invention cover the modifications and the modifications

Claims

A target remaining amount measuring device includes:

a body having a plurality of measurement tracks arranged in sequence along the first direction; each measurement track extending in a second direction, the second direction being perpendicular to the first direction;

a plurality of thimbles, one-to-one corresponding to the plurality of measurement tracks; each thimble extending in a second direction, and a first end of each thimble is located in a corresponding measurement track; each thimble can be measured along its corresponding The track is free to move and partially protrudes from the measuring track;

a plurality of sliders corresponding to the plurality of measurement tracks; each slider is slidably disposed in the measurement track along a measurement track corresponding thereto and is limited to a thimble corresponding to the measurement track a first end side; a static friction between each slider and the measuring track is greater than its own gravity;

A main ruler is disposed on the main body and is provided with a tick mark arranged in a second direction.
The target remaining amount measuring device according to claim 1, further comprising:

A pair of scales extending in the first direction and slidably mounted on the body or the main ruler in the second direction.
The target remaining amount measuring device according to claim 1, further comprising:

a homing ruler extending in the first direction and slidably mounted in the main body along a plurality of measuring tracks, the locating ruler being disposed on a side of the plurality of sliding blocks facing away from the plurality of thimbles; When the home ruler slides along a plurality of measurement tracks, the slider within each measurement track can be pushed toward the thimble.
The target remaining amount measuring device according to claim 3, wherein

The main body is provided with a track gap allowing the homing ruler to slide along the plurality of measuring tracks;

The homing ruler is slidable along the track slit to urge the slider within each measurement track to move toward the thimble.
The target remaining amount measuring device according to claim 3, further comprising at least one of the following:

a first adjustment button for driving the alignment ruler to slide in the second direction; and

a second adjustment knob for driving the home ruler to slide along the plurality of measurement tracks.
The target remaining amount measuring device according to claim 1, further comprising:

Two limiting pillars respectively disposed at two ends of the main body in the first direction; each of the limiting pillars extending in the second direction and slidably mounted in the second direction On the body.
The target remaining amount measuring device according to claim 6, wherein the extension length of each of the limit posts relative to the end of the measurement track is substantially the same as the length of the ejector pin naturally extending out of the measurement track by gravity.
The target remaining amount measuring device according to claim 6, further comprising:

Two locking mechanisms are in one-to-one correspondence with the two limiting posts, and each locking mechanism is configured to fix the corresponding limiting post with the main body.
The target remaining amount measuring device according to any one of claims 1 to 8, wherein the main ruler is slidably attached to the main body in a second direction.
The target remaining amount measuring device according to any one of claims 1 to 8, further comprising a grip fixedly attached to the main body for gripping.
The target remaining amount measuring device according to any one of claims 1 to 8, wherein

Each measurement track includes a track portion and an end at one end of the track portion, the end portion being provided with an opening that allows the thimble portion to extend out of the measurement track.
The target remaining amount measuring device according to claim 11, wherein

Each thimble includes a stem portion and a head forming a first end of the thimble; a radial dimension of the head portion is greater than a radial dimension of an end opening of the measuring rail and less than a rail portion of the measuring rail The inner diameter dimension; the radial dimension of the stem portion is smaller than the radial dimension of the end opening of the measuring rail.
The target remaining amount measuring device according to claim 12, wherein

The rod portion has a radial dimension of 0.4 mm or less;

The radial extent of the end opening of the measuring track is less than or equal to 0.5 mm.
The target remaining amount measuring device according to claim 7, wherein

The length of each of the limiting posts extending relative to the end of the measuring track is greater than or equal to the initial thickness of the target to be tested.