WO2018222727A1 - Actionneur piézoélectrique multidimensionnel ayant une plage d'actionnement améliorée - Google Patents

Actionneur piézoélectrique multidimensionnel ayant une plage d'actionnement améliorée Download PDF

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Publication number
WO2018222727A1
WO2018222727A1 PCT/US2018/035150 US2018035150W WO2018222727A1 WO 2018222727 A1 WO2018222727 A1 WO 2018222727A1 US 2018035150 W US2018035150 W US 2018035150W WO 2018222727 A1 WO2018222727 A1 WO 2018222727A1
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WIPO (PCT)
Prior art keywords
actuator
bending
actuation axis
actuation
axis
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PCT/US2018/035150
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English (en)
Inventor
Chris Xu
Najva AKBARI
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Cornell University
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Publication of WO2018222727A1 publication Critical patent/WO2018222727A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/103—Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2046—Cantilevers, i.e. having one fixed end adapted for multi-directional bending displacement
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B1/00—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor
    • A61B1/00163—Optical arrangements
    • A61B1/00172—Optical arrangements with means for scanning

Definitions

  • the piezoelectric effect is the well-known phenomenon occurring in selected materials (known as piezoelectric materials) where the materials deform upon the application of a voltage thereto.
  • piezoelectric materials known as piezoelectric materials
  • the use of a piezoelectric materials to form a bending actuator is also well known.
  • FIG. 1 in one example of such an actuator 10, a bilayer structure is formed with a first layer 12 of piezoelectric material located adjacent a second layer 14 of piezoelectric material, having a width W and a combined thickness T. As shown in FIG.
  • Bending actuators may have other configurations including one or more layers of piezoelectric material. Bending actuators, referred to as composite bending actuators, may have one or more passive layers (e.g., a metal layer or ceramic layer) to tune the bending characteristics of the actuator.
  • piezoelectric actuators can be combined to form a multidimensional piezoelectric actuator 20 by connecting two or actuators 22,24 together with the actuation axes being perpendicular to one another.
  • bending actuators can be operated as scanner by adding functionality to distal end DE of the bending actuator. For example, as shown, if an optical source (not shown) and/or an optical receiver (not shown) is coupled to the free end of a bending actuator, optical scanning can be performed.
  • the substance of U.S. 8,705,184 is hereby incorporated by reference in its entirety.
  • An aspect of the present invention is directed to a piezoelectric actuator, comprising a base, a first piezoelectric bending actuator, a second piezoelectric bending actuator, and a third piezoelectric bending actuator.
  • the first piezoelectric bending actuator has a first actuator first end and a first actuator second end.
  • the first bending actuator is connected to the base at the first actuator first end.
  • the first bending actuator has a first actuation axis.
  • the second piezoelectric bending actuator has a second actuator first end and a second actuator second end.
  • the second bending actuator first end is connected to the first actuator second end.
  • the second bending actuator has a second actuation axis that is non- parallel to the first actuation axis.
  • the first axis and the second axis define a plane.
  • the third piezoelectric bending actuator has a third actuator first end and a third actuator second end.
  • the third bending actuator first end is connected to the second actuator second end.
  • the third bending actuator has a third actuation axis that extends parallel to the plane.
  • a rod is connected between the first bending actuator and the second bending actuator.
  • a rod is connected between the second bending actuator and the third bending actuator.
  • the actuator may further comprise a fourth piezoelectric bending actuator having a fourth actuator first end and a fourth actuator second end.
  • the fourth bending actuator first end is connected to the third bending actuator second end.
  • the fourth bending actuator has a fourth actuation axis that extends parallel to the plane.
  • the fourth actuation axis is non- parallel to the third actuation axis.
  • the first actuation axis and the second actuation axis may be perpendicular to one another.
  • the third actuation axis may be parallel to a first of the first actuation axis and the second actuation axis.
  • the actuator further comprises a fourth piezoelectric bending actuator having a fourth actuator first end and a fourth actuator second end.
  • the fourth bending actuator first end is connected to the third bending actuator second end.
  • the fourth bending actuator has a fourth actuation axis that is parallel to the plane.
  • the fourth actuation axis is non-parallel to the third actuation axis.
  • the fourth actuation axis is parallel to a second of the first actuation axis and the second actuation axis.
  • the first actuation axis and the second actuation axis may be perpendicular to one another.
  • the actuator further comprises a fiber optic connected to the fourth piezoelectric bending actuator, whereby the actuator forms an optical scanner.
  • the first bending actuator has a first length
  • the second actuator has a second length
  • the third actuator has a third length
  • at least one of the first length and the second length is greater than the third length
  • the at least one of the first length and the second length is at least twenty percent greater than the third length.
  • the actuator further comprises a fourth piezoelectric bending actuator having a fourth actuator first end and a fourth actuator second end.
  • the fourth bending actuator first end is connected to the third bending actuator second end.
  • the fourth bending actuator has a fourth actuation axis that extends parallel to the plane, and the fourth actuation axis is non-parallel to the third actuation axis.
  • the first actuation axis and the second actuation axis may be perpendicular to one another.
  • the third actuation axis may be parallel to a first of the first actuation axis and the second actuation axis.
  • the second bending actuator first end may be directly connected to the first bending actuator second end, and the third bending actuator first end is directly connected to the second bending actuator second end.
  • Another aspect of the invention is directed to an actuator comprising a base, a first piezoelectric bending actuator, a second piezoelectric bending actuator, and a third piezoelectric bending actuator.
  • the first piezoelectric bending actuator has a first actuator first end and a first actuator second end.
  • the first bending actuator is connected to the base at the first actuator first end.
  • the first bending actuator has a first actuation axis.
  • the second piezoelectric bending actuator has a second actuator first end and a second actuator second end.
  • the second bending actuator first end is connected to the first actuator second end.
  • the second bending actuator has a second actuation axis that is non-parallel to the first actuation axis.
  • the first axis and the second axis define a plane.
  • the third piezoelectric bending actuator has a third actuator first end and a third actuator second end.
  • the third bending actuator first end is connected to the second actuator second end.
  • the third bending actuator has a third actuation axis that extends through the plane.
  • the third actuation axis extends
  • the first actuation axis, the second actuation axis and the third actuation axis are mutually perpendicular.
  • the actuator further comprises a fiber optic connected to the third piezoelectric bending actuator, whereby the actuator forms an optical scanner.
  • proximal refers to a location that is in a location tending toward a base of an actuator; and the term “distal” refers to a location tending away from a base (toward a functional end) of an actuator.
  • a bending actuator has a proximal end PE nearer to a base, and a distal end DE further from the base.
  • rod refers to a thin straight bar. A rod need not have any particular cross-sectional shape.
  • FIG. 1 illustrates an example of a piezoelectric bending actuator having a bilayer structure
  • FIG. 2 illustrates a multidimensional piezoelectric actuator comprising two piezoelectric bending actuators
  • FIG. 3 is a schematic illustration of an example of an optical scanner according to aspects of the present invention, having a course actuation module and a fine actuation module;
  • FIG. 4 is schematic illustration of larger area of a cross section of a brain and multiple smaller areas that are scannable using a scanner according to aspects of the present invention, the larger area being accessible using the course actuation while the smaller areas, disposed within the larger area, are scannable using a fine scanning module of the scanner;
  • FIG. 5 is a schematic illustration of an example of an embodiment of an actuator including a rod to increase a scanning range, according to aspects of the present invention.
  • FIG. 6 is a schematic illustration of an example of an optical scanner providing three-dimensional (3D) scanning capability, according to aspects of the present invention.
  • aspects of the invention are directed to multidimensional actuators having a course actuation module and a fine actuation module.
  • Each module has one or more piezoelectric bending actuators, each bending actuator scans in a given direction.
  • An actuator may have a base that provides a reference location about which the actuator moves.
  • the course actuation module is connected between the base and the fine actuation module.
  • actuation of the course actuator can move a functional feature disposed at a distal end of fine actuation module over a greater range than the fine actuation module; however, fine actuation module operates with a smaller moment of inertia than the course actuation arm and therefore can move the functional feature faster (but over a smaller range).
  • FIG. 3 is a schematic illustration of an example of an optical scanner 100 according to aspects of the present invention having a course actuation module 130 and a fine actuation module 140.
  • Scanner 100 comprises a multidimensional actuator 110 and a fiber optic 120.
  • Actuator 110 comprises a base 102, a first piezoelectric bending actuator 104, a second piezoelectric bending actuator 106 and a third piezoelectric bending actuator 108.
  • Base 102 is a structure to which the remaining components of an actuator are attached. Typically, a bending actuator of actuator 1 10 is fixed to the base at a location L. The first bending actuator 104 bends about location L.
  • First piezoelectric bending actuator 104 has a first actuator first end 104ei and a first actuator second end 104e2. First bending actuator 104 is connected to base 102 at the first actuator first end 104ei. First bending actuator 104 has a first actuation axis A 1 .
  • Second piezoelectric bending actuator 106 has a second actuator first end 106ei and a second actuator second end 106e2. Second bending actuator first end 106ei is connected to the first actuator second end 104e2. Second bending actuator 106 has a second actuation axis A 2 that is non-parallel to the first actuation axis A 1 . First axis A 1 and second axis A 2 defining a plane P.
  • a plane defined by the first actuation axis and the second actuation axis is any plane where one or both the first actuation axis and the second actuation axis are translated while maintaining the direction of the axis (or axes), to a location where the first actuation axis and the second actuation axis intersect.
  • Third piezoelectric bending actuator 108 has a third actuator first end 108ei and a third actuator second end 108e 2 .
  • Third bending actuator first end 108ei is connected to the second actuator second end 106e 2 .
  • Third bending actuator 108 has a third actuation axis A 3 that extends parallel to plane P.
  • Actuator 1 10 includes an, optional, fourth piezoelectric bending actuator 109 having a fourth actuator first end 109ei and a fourth actuator second end 109e 2 .
  • Fourth bending actuator first end 109ei is connected to the third bending actuator second end 108e 2 .
  • Fourth bending actuator 109 has a fourth actuation axis A 4 that extends parallel to plane P.
  • the fourth actuation axis A 4 is non-parallel to the third actuation axis A 3 .
  • a bending actuator may be made of any suitable piezoelectric material (e.g., Lead Zirconate Titanate).
  • a bending actuator is rod-shaped, with the length from first end to the second end of the bending actuator being longer than the cross sectional dimensions of the bending actuator, and often several times longer (e.g., 2, 3, 4 or more times as long).
  • actuator 110 includes one or more voltage generators to produce the voltages needed to actuate each of bending actuators 104, 106, 108 and 109.
  • the voltages are applied to the bending actuators in a conventional manner.
  • the voltages may be in the form of an oscillating signal, a direct current bias or a combination of both.
  • the signals applied to the bending actuators 104, 106 of the course actuation module 130 will have time periods with a fixed DC biasing voltage to cause the functional end of the actuator (i.e., distal end DE) to locate proximate a given location in a larger area LA (shown in FIG. 4), and the signals applied to the bending actuators 108, 109 of the fine actuation module 140 will be oscillatory to achieves scanning of a relatively small area (e.g., area SAi shown in FIG. 4).
  • FIG. 4 is schematic illustration of larger area LA of a cross section of a brain that is scannable using a course scanning module of a scanner according to aspects of the present invention, and having smaller areas SA 1; SA 2 , SA 3 disposed within large area LA, that are scannable using a fine scanning module of the scanner.
  • the course actuation module can position the functional end of an actuator proximate a first location in large area LA and the fine actuation module can scan a first, relatively small area SA 1 proximate the first location.
  • the course actuation module can position the functional end proximate one or more additional locations in large area LA and the fine actuation module can scan a second, relatively small area SA 2 proximate the second location.
  • scanning of the small area can be achieved in an x -y partem as shown, voltages may be applied to the bending actuators of the fine actuation module to achieve any suitable scanning pattern.
  • fourth piezoelectric bending actuator 109 is optional.
  • one of the first actuator 104 and the second actuator 106 having a scan axis that is non-parallel to third actuator 108 may be operated to provide the functionality of omitted bending actuator 109.
  • second actuator 106 could be operated with a DC bias to select a location within area LA, and oscillating signal to provide a component of the scanning pattern in the manner shown in FIG. 4.
  • first actuator 104 and the second actuator 106 operate in a relatively slow manner, and the primary function of the first actuator and the second actuator is to provide scanning range, it is advantageous if at least one of length Li of first actuator 104 and second length L 2 of the second actuator 106 is greater than length L 3 of third actuator 108 and/or length L 4 of fourth actuator 109.
  • the length of the first actuator or second actuator may be at least 10%, 20% or 50% longer than the length of the third actuator and/or the fourth actuator.
  • first actuation axis A i and second actuation axis A 2 are perpendicular to one another which can be used to achieve a conventional x - y movement/scanning partem.
  • first actuator and the second actuator can be arranged to achieve any suitable angular relationship between first actuation axis A 1 and second actuation axis A 2 .
  • the voltage signals applied to the actuators 104, 106, and the angular relationship between the actuation axes Ai A 2 can be selected to achieve a desired movement/scanning pattern.
  • the third actuation axis A3 and fourth actuation axis A 4 are perpendicular to one another which can be used to achieve a
  • the third actuator and the fourth actuator can be arranged to achieve any suitable angular relationship between third actuation axis A 3 and fourth actuation axis A 4 .
  • the voltage signals applied to the actuators 108, 109, and the angular relationship between the actuation axes A 3i A 4 can be selected to achieve a desired scanning pattern.
  • the third actuation axis A 3 is parallel to a first of the first actuation axis A 1 and the second actuation axis A 2 and the fourth actuation axis A 4 is parallel to a second of the first actuation axis Ai and the second actuation axis A 2 . Accordingly, in the illustrated embodiment, both the course scanning module and the fine scanning module achieve a conventional scanning pattern.
  • First bending actuator 104 may be connected to base 102 and the second bending actuator 106 is connected to first bending actuator 106 using any suitable adhesive (e.g., a glue) or mechanical connector.
  • second bending actuator first end 106ei is directly connected to first bending actuator second end 104e2
  • the third bending actuator first end 108ei is directly connected to the second bending actuator second end 106e2, with nothing between said components other than, perhaps, adhesive.
  • actuator 1 10 is illustrated as an optical scanner (i.e., imaging and/or illuminating), it will be appreciated that an actuator according to aspects of the present invention may be used to achieve any suitable functionality by providing a suitable operative element at the functional end and/or another suitable location on a bending actuator. Any suitable fastening technique (e.g., adhesive or mechanical connection) may be used to form a connection.
  • Any suitable fastening technique e.g., adhesive or mechanical connection
  • a lens 122 on the distal end of fiber 120.
  • the lens focuses the beam of light out of the fiber to decrease of the illumination spot size and/or to decrease the spot size of the light gathered into the fiber optic, thereby improving the resolution of the scanner. It will be appreciated that, in some embodiments, by using such a fiber lens, the need to use optics external to the fiber to de- magnify the beam of light output from the fiber or decrease the spot size of the light gathered by the fiber may be eliminated. It will also be appreciated that, in some embodiments, such demagnification using external optics may result in an undesirable decrease in scan range of a scanner.
  • a scanning range achievable by a bending actuator is increased while only requiring a relatively small increase in the moment of inertia of the bending actuator (i. e., less than the increase that would result from increasing the length of a piezoelectric material to attain the increased scanning range).
  • a light weight rod is added between one or more bending actuators and the distal end of the actuator.
  • FIG. 5 is a schematic illustration of an example of an embodiment of an actuator 500 including a rod 550 to increase a scanning range of the actuator.
  • actuator 500 comprises a rod 550 connected between second bending actuator 106 and third bending actuator 108.
  • a suitable rod has a rigidity suitable for moving distal end DE to perform any function the actuator is to designed to perform (e.g., optical scanning), and have a suitable weight.
  • the weight of the rod is typically less than the weight of an equal length of piezoelectric material that would be used to achieve the scanning range.
  • the rod may be made of carbon fiber or a magnesium alloy.
  • rod 550 increases the scanning range of any bending actuator that is located proximal to the rod (e.g., bending actuators 104 and 106). In actuator 500, the scanning range is increased relative to a same actuator without rod.
  • rod 550 may be connected between the first bending actuator 104 and the second bending actuator 106. In such an actuator, only the scanning range of bending actuator 104 is increased relative to a same actuator without a rod.
  • actuator 500 may include an optional fourth piezoelectric bending actuator (not shown). Also as described above, first actuation axis A 1; second actuation axis A 2 , third actuation axis A 3 , and the fourth actuation axis can have any orientation relative to one another (e.g., parallel or perpendicular to one another).
  • a fiber optic 120 is connected to the fourth piezoelectric bending actuator to form an optical scanner.
  • FIG. 6 is a schematic illustration of an example of an optical scanner 600 according to aspects of the present invention providing three-dimensional (3D) scanning capability.
  • Scanner 600 comprises a multidimensional actuator 610 and a fiber optic 120.
  • scanner 600 comprises an actuator 610 comprising a base 102, a first piezoelectric bending actuator 104, a second piezoelectric bending actuator 106 and a third piezoelectric bending actuator 608.
  • the third bending actuator 608 has a third actuation axis A 3 that extends through a plane P formed by axis Ai and A 2 .
  • third actuation axis A 3 extends perpendicular to plane P, and the first actuation axis A 1; second actuation axis A 2 and the third actuation axis A 3 are mutually perpendicular.
  • a fiber optic 120 is connected to the third piezoelectric bending actuator 608, whereby the actuator forms an optical scanner.
  • the actuator forms an optical scanner.
  • other functionality may be provide on the actuator.
  • the scanner operates as a mesoscope having relatively small size and low cost. It will be appreciated that such a design can be pre-assembled, portable and not require re-alignment on site. It will be appreciated that designs as described herein are unaffected by magnetic fields and are therefore MRI-compatible, thereby enabling new forms of multi-modal imaging. In some embodiments, designs as described herein provide a mesoscope with a field of view as large as ⁇ 5 mm, and have sub- ⁇ spatial resolution.
  • the scanner operates as an endoscope having relatively small size and low cost.
  • the fiber optic is an air core, photonic bandgap fiber (PBGF) to deliver excitation light for imaging of tissue (e.g., an animal brain, such as a zebra fish brain).
  • PBGF photonic bandgap fiber
  • a system may include several fibers designed for various excitation wavelengths, the fibers being glued together to form a fiber array with a width and thickness of 1.0 mm and 250 ⁇ , respectively. Further details of such a fiber array are given in U. S. 8,705, 184.
  • the bending actuators are a bimorph structure including two layers of PZT material of equal thickness.
  • the thickness and the overhang length of bending actuators are designed so that its lowest mechanical resonant frequency is approximately 4.0 KHz, allowing a bi-directional line-scan rate at approximately 8 kHz.
  • the combined transmission range of 4 or 5 of these fibers will essentially cover all useful wavelengths for two-photon and three-photon imaging.
  • the proximal bending actuators (i.e., the course actuation module) of the tandem, piezo-fiber scanner (PFS) are two piezo bending actuators made of thicker and wider materials than the bending actuators of the fine actuation module, to generate larger bending forces.
  • a rod comprising a thin- walled square tube made of high-modulus carbon fiber composite material is used to form a connecting rod.
  • carbon fiber materials have much higher elastic modulus than piezo materials, and have a density of approximately 1.5 g/cm 3 (approximately 20% of the density of piezoelectric material PZT).
  • the mass of the optical fiber is negligible (approximately 34 mg/m)
  • the combined mass of the fine actuation module and the carbon tube is less than 0.25 gram, ensuring the targeted re-positioning time of -10 ms with ample margin.
  • Example design parameters are as follows -
  • *Values are determined by measuring deflection while only the identified bending actuator is operated, and with an optical fiber overhang beyond the distal end of the last bending actuator about 10mm (e.g., bending actuator 109 in FIG. 3)
  • This deflection indicates the movement of the fiber optic at resonance, and includes deflection resulting from deflection of the distal end of the last bending actuator (e.g., bending actuator 109 in FIG. 3)
  • the scan engine covers a large FOV of 3.8 mm (i.e., (71 + 72) / 3) by 3.2 mm (i.e., (XI + 0.6 * X2) 13 ).
  • the length and thickness of the materials are chosen to have resonant frequencies at 300 Hz or higher, with the resonant axis, X2, having a resonant frequency well above 25 kHz.
  • the thickness and width of the materials are selected for generating sufficient fiber optic tip deflection and blocking force.
  • the system provides Yl, XI, and Y2 scan range values of 10 mm, 8 mm, and 3.5, respectively.
  • the 3.8 mm by 3.2 mm FOV is designed for imaging adult zebrafish brain, and that a larger FOV is possible by adjusting the design parameters.
  • the bending actuators XI, Yl and Y2 are driven linearly (i.e., not at a resonant frequency) by voltages applied thereto; and bending actuator X2 is driven resonantly using a sinusoidal signal, to achieve an increased scan range.
  • the scanner operates as an endoscope having relatively small size and low cost.
  • the fiber optic is an air core, photonic bandgap fiber (PBGF) to deliver excitation light for imaging of tissue (e.g., an animal brain, such as a zebra fish brain).
  • PBGF photonic bandgap fiber
  • a system may include several fibers designed for various excitation wavelengths, the fibers being glued together to form a fiber array with a width and thickness of 1.0 mm and 250 ⁇ , respectively. Further details of such a fiber array are given in U. S. 8,705, 184.
  • the bending actuators of the course actuation module are a trimorph structure including two PZT layer that are 0.27 mm thick sandwiching a carbon fiber layer that is 0.24 mm thick; and the fine actuators are a bimorph structure including two layers of PZT material of equal thickness.
  • the thickness and the overhang length of bending actuators are designed so that its lowest mechanical resonant frequency is approximately 2.0 KHz, allowing a bi-directional line-scan rate at approximately 8 kHz.
  • the combined transmission range of 4 or 5 of these fibers will essentially cover all useful wavelengths for two-photon and three-photon imaging.
  • the proximal bending actuators (i.e., the course actuation module) of the tandem, piezo-fiber scanner (PFS) are two piezo benders made of thicker and wider materials than the bending actuators of the fine actuation module, to generate larger force.
  • a rod comprising a thin- walled square tube made of high-modulus carbon fiber composite material is used to form a connecting rod.
  • carbon fiber materials have much higher elastic modulus than piezo materials, and have a density of approximately 1.5 g/cm 3 (approximately 20% of the density of piezoelectric material PZT).
  • Example design parameters are as follows -
  • *Values are determined by measuring deflection while only the identified bending actuator is operated, and with an optical fiber overhang beyond the distal end of the last bending actuator about 10mm (e.g., bending actuator 109 in FIG. 3)
  • This deflection indicates the movement of the fiber optic at resonance, and includes deflection resulting from deflection of the distal end of the last bending actuator (e.g., bending actuator 109 in FIG. 3)
  • the scan engine covers a large FOV of 2.3 mm (i.e., (71 + 72) / 3) by 1.7 mm (i.e., (XI + 0.6 * X2) 13 ).
  • the length and thickness of the materials are chosen to have resonant frequencies at 250 Hz or higher, with the resonant axis, X2, having a resonant frequency well above 25 kHz.
  • the thickness and width of the materials are selected for generating sufficient fiber optic tip deflection and blocking force.
  • the system provides Yl, XI, and Y2 scan range values of 5.6 mm, 4.1 mm, and 1.2, respectively. It is to be appreciated that the 2.3 mm by 1.7 mm FOV is designed for imaging adult zebrafish brain, and that a larger FOV is possible by adjusting the design parameters.
  • the bending actuators XI, Yl and Y2 are driven linearly (i.e., not at a resonant frequency) by voltages applied thereto; and bending actuator X2 is driven resonantly using a sinusoidal signal, to achieve an increased scan range.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

L'invention concerne un actionneur piézoélectrique comprenant une base, un premier actionneur de flexion piézoélectrique relié à la base ayant un premier axe d'actionnement, un second actionneur de flexion piézoélectrique ayant un second axe d'actionnement qui est non parallèle au premier axe d'actionnement, le premier axe et le second axe définissant un plan et un troisième actionneur de flexion piézoélectrique ayant un troisième axe d'actionnement. Le troisième axe d'actionnement peut s'étendre parallèlement à un plan formé par le premier axe d'actionnement et le second axe d'actionnement, de telle sorte que les actionneurs de flexion constituent un module d'actionnement de course et un module d'actionnement fin. L'actionneur peut comprendre une fibre optique pour former un scanner optique. L'actionneur peut comprendre une tige pour améliorer la plage d'actionnement. Les actionneurs de flexion peuvent former un scanner 3D.
PCT/US2018/035150 2017-05-31 2018-05-30 Actionneur piézoélectrique multidimensionnel ayant une plage d'actionnement améliorée WO2018222727A1 (fr)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112198657A (zh) * 2019-07-08 2021-01-08 原子能和替代能源委员会 移动式相控光栅扫描仪
CN112563405A (zh) * 2020-12-02 2021-03-26 联合微电子中心有限责任公司 压力传感器单元以及多维压力传感器及其制造方法
WO2021243397A1 (fr) * 2020-06-02 2021-12-09 The Commonwealth Of Australia Procédé et appareil pour déplacer une pointe de fibre
EP3933485A1 (fr) * 2020-07-01 2022-01-05 Commissariat À L'Énergie Atomique Et Aux Énergies Alternatives Scanner optique
EP3933483A1 (fr) * 2020-07-01 2022-01-05 Commissariat à l'énergie atomique et aux énergies alternatives Scanner optique
EP3933484A1 (fr) * 2020-07-01 2022-01-05 Commissariat à l'énergie atomique et aux énergies alternatives Scanner optique

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CN112198657A (zh) * 2019-07-08 2021-01-08 原子能和替代能源委员会 移动式相控光栅扫描仪
EP3764148A1 (fr) * 2019-07-08 2021-01-13 Commissariat à l'énergie atomique et aux énergies alternatives Scanner à réseau optique à commande de phase mobile
FR3098606A1 (fr) * 2019-07-08 2021-01-15 Commissariat A L'energie Atomique Et Aux Energies Alternatives Scanner a reseau optique a commande de phase mobile
US11209642B2 (en) 2019-07-08 2021-12-28 Commissariat A L'energie Atomique Et Aux Energies Alternatives Movable phased optical grating scanner
US20230213753A1 (en) * 2020-06-02 2023-07-06 The Commonwealth Of Australia Method and apparatus for moving a fibre tip
WO2021243397A1 (fr) * 2020-06-02 2021-12-09 The Commonwealth Of Australia Procédé et appareil pour déplacer une pointe de fibre
EP3933484A1 (fr) * 2020-07-01 2022-01-05 Commissariat à l'énergie atomique et aux énergies alternatives Scanner optique
EP3933483A1 (fr) * 2020-07-01 2022-01-05 Commissariat à l'énergie atomique et aux énergies alternatives Scanner optique
EP3933485A1 (fr) * 2020-07-01 2022-01-05 Commissariat À L'Énergie Atomique Et Aux Énergies Alternatives Scanner optique
US20220003987A1 (en) * 2020-07-01 2022-01-06 Commissariat A L'energie Atomique Et Aux Energies Alternatives Optical scanner
FR3112218A1 (fr) * 2020-07-01 2022-01-07 Commissariat A L'energie Atomique Et Aux Energies Alternatives Scanner optique
FR3112217A1 (fr) * 2020-07-01 2022-01-07 Commissariat A L'energie Atomique Et Aux Energies Alternatives Scanner optique
FR3112216A1 (fr) * 2020-07-01 2022-01-07 Commissariat A L'energie Atomique Et Aux Energies Alternatives Scanner optique
US11624874B2 (en) 2020-07-01 2023-04-11 Commissariat A L'energie Atomique Et Aux Energies Alternatives Optical scanner
US11835712B2 (en) 2020-07-01 2023-12-05 Commissariat A L'energie Atomique Et Aux Energies Alternatives Optical scanner
CN112563405A (zh) * 2020-12-02 2021-03-26 联合微电子中心有限责任公司 压力传感器单元以及多维压力传感器及其制造方法

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