WO2018209957A1 - Sensor main body and regression reflection type photoelectric sensor - Google Patents

Sensor main body and regression reflection type photoelectric sensor Download PDF

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Publication number
WO2018209957A1
WO2018209957A1 PCT/CN2017/118234 CN2017118234W WO2018209957A1 WO 2018209957 A1 WO2018209957 A1 WO 2018209957A1 CN 2017118234 W CN2017118234 W CN 2017118234W WO 2018209957 A1 WO2018209957 A1 WO 2018209957A1
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light
polarized light
angle prism
pyramid
photodetector
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PCT/CN2017/118234
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French (fr)
Chinese (zh)
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张宁
叶立平
谢廷若
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深圳市志奋领科技有限公司
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Publication of WO2018209957A1 publication Critical patent/WO2018209957A1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/344Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using polarisation

Definitions

  • the invention relates to the field of photoelectric technology, in particular to a sensor body and a retroreflective photoelectric sensor.
  • the field that needs retroreflection generally adopts a pyramid array to realize the original return of the beam.
  • the etched grating can be used to distort the pyramid, it is necessary to etch the precise stripe on the three vertical surfaces of the pyramid to meet the requirements of the polarizing.
  • the grating etching angle and density are highly demanded, the process is complicated, and the cost is relatively high. high.
  • Another object of the present invention is to provide a retroreflective photoelectric sensor capable of detecting sensitivity by using orthogonal polarization dual channel detection.
  • a sensor body includes a light emitting element, a light receiving element, and a driving circuit, the light emitting element including a light source and a first collimating lens, the light receiving element including a second collimating lens, a polarization splitter, a first photodetector, and a second photodetector, wherein the first photodetector and the second photodetector are electrically connected to the driving circuit;
  • the light source and the first collimating lens are sequentially disposed coaxially on the light-emitting path, and the second collimating lens and the polarization splitter are coaxially disposed on the light-receiving path, and the polarization splitter is configured to receive the received light.
  • the outgoing light is divided into s-polarized light and p-polarized light
  • the first photodetector is configured to receive p-polarized light and transmit a first photocurrent signal to a driving circuit
  • the second photodetector is configured to receive s-polarized light and transmit the first a photocurrent signal is sent to the driving circuit
  • the driving circuit is configured to determine a magnitude of the differential photocurrent signal and a preset value, wherein the differential photocurrent signal is a difference between the first photocurrent signal and the second photocurrent signal.
  • the polarization splitter comprises a polarization beam splitting prism, a first right angle prism, a second right angle prism, a third right angle prism and a phase compensation plate;
  • the polarization beam splitting prism is used to divide an incident light into p polarization Light and s-polarized light, said p-polarized light sequentially passing through a first right-angle prism and a second right-angle prism; said s-polarized light sequentially passing through a third right-angle prism and a phase compensating plate; said phase compensating plate is used for s-polarized light Phase compensation is performed to cause the s-polarized light to undergo an equal optical path with the p-polarized light.
  • first right angle prism, the second right angle prism and the third right angle prism are all total reflection prisms.
  • the light source is an LED light source.
  • the light source is disposed at a focus of the first collimating lens.
  • a retroreflective photoelectric sensor comprising a sensor body and a retroreflector as described above, the retroreflector comprising a pyramid and a dichroic polarizer disposed on the pyramidal reflecting surface, the pyramid being used
  • the incident natural polarized light transmitted from the sensor body is converted into linearly polarized outgoing light, and the direction of the main axis of the dichroic polarizing plate coincides with the polarization direction of the outgoing polarized light.
  • the dichroic polarizer is glued to the pyramidal reflection surface by optical glue.
  • the material of the pyramid is glass or optical plastic.
  • the retroreflector of the photoelectric sensor of the invention has simple process, low cost, uniform polarization state of the emitted light, high extinction ratio, and the cooperation of the retroreflector and the sensor body improves the detection distance of the photoelectric sensor.
  • Figure 1 is a structural view of a photoelectric sensor of the present invention
  • FIG. 2 is a structural view of an orthogonal polarization splitter of a sensor body of the present invention
  • Figure 3 is a structural view of a retroreflector of the present invention.
  • Figure 4 is the coordinate system of the pyramid
  • Figure 5 is a sectional view of the entrance surface area of the pyramid
  • Figure 6 is an incident view of light
  • Figure 7 is a graph showing the relationship between the reflected amplitude s component and the p component complex amplitude reflectance as a function of incident angle
  • Figure 8 is a graph showing changes in the phase of the reflected light s component and the p component with angle
  • Figure 9 is a schematic diagram of an elliptic equation
  • FIG. 10 is a schematic diagram showing changes in phase difference between the s component and the p component of the reflected light.
  • Reference numerals 1, light source; 2, first collimating lens; 3, retroreflector; 31, polarizing plate; 32, pyramid; 4, second collimating lens; 5, polarization splitter; Splitting prism; 52, first right angle prism; 53, second right angle prism; 54, third right angle prism; 55, phase compensation plate; 6, first photodetector; 7, second photodetector; Circuit; 9, sensor body; 10, transmission optical path.
  • the present invention provides a retroreflective photoelectric sensor including a sensor body 9 and a retroreflector 3, the sensor body 9 including a light emitting element, a light receiving element, and a driving circuit 8, the light emitting element
  • the light source 1 includes a second collimating lens 4, a polarization splitter 5, a first photodetector 6, and a second photodetector 7, the first photodetector Both the 6 and the second photodetectors 7 are electrically connected to the driving circuit 8; the material and thickness of the retroreflector are required to be tourmaline having a thickness greater than 1 mm, or cinchona iodosulfate having a thickness greater than 0.3 mm.
  • the present invention provides a polarization splitter 5 comprising a polarization beam splitting prism 51, a first right angle prism 52, a second right angle prism 53, a third right angle prism 54, and a phase compensation plate 55;
  • the first right angle prism 52, the second right angle prism 53, and the third right angle prism 54 are all total reflection prisms.
  • the polarization beam splitting prism 51 is configured to divide an incident light into p-polarized light and s-polarized light, and the p-polarized light sequentially passes through the first right-angle prism 52 and the second right-angle prism 53; the s-polarized light sequentially passes through A three-corner prism 54 and a phase compensating plate 55 are used for phase compensation of the s-polarized light to cause the s-polarized light and the p-polarized light to undergo an equal optical path.
  • the polarization state of the incident light may be linearly polarized, it may also be elliptically polarized, but after the incident light is reflected by the retroreflector 3, the emitted light projects the polarization into two perpendicular directions, one being horizontal, that is, The y-axis, the other is the vertical direction, that is, the z-axis; the incident beam is divided into vertical linearly polarized light and horizontal linearly polarized light by the polarization beam splitting prism 51; the p-polarized light passes through the first right-angle prism 52 and the second After the total reflection of the right-angle prism 53 is emitted as p-polarized light, the s-polarized light is totally reflected by the third right-angle prism 54 and then phase-compensated by the phase compensating plate 55 so that the s-polarized light and the p-polarized light undergo the same optical path.
  • the light source 1 and the first collimating lens 2 are sequentially disposed coaxially on the light-emitting path, and the second collimating lens 4 and the polarization splitter 5 are sequentially disposed coaxially on the light-receiving path, and the polarization splitter 5
  • the first photodetector 6 is configured to receive p-polarized light and transmit a first photocurrent signal to the driving circuit 8
  • the second photodetecting The device 7 is configured to receive s-polarized light and transmit a first photocurrent signal to the driving circuit 8
  • the driving circuit 8 is configured to determine a magnitude of the differential photocurrent signal and a preset value, where the differential photocurrent signal is the first photocurrent a difference between the signal and the second photocurrent signal
  • the light source 1 is an LED light source
  • the light source 1 is disposed at a focus of the first collimating lens 2.
  • the light emitted by the LED light source is collimated and transmitted through the first collimating lens 2, and transmitted to the retroreflector 3 through the transmission optical path 10, and the incident light is totally reflected in the pyramid 32, and is emitted as Linearly polarized light, the polarization direction of the outgoing light is in the Y-axis direction, and the retroreflected light is concentrated by the second collimating lens 4, enters the polarization splitter 5, and then passes through the polarization splitter 5, and the p-polarized light is concentrated at At the second photodetector 7, the s-polarized light is concentrated in the first photodetector 6, and the threshold value of the driving circuit 8 determines that the current is a differential photocurrent signal;
  • the driving circuit 8 can calculate the ratio of the photocurrents returned by the two channels of the first photodetector 6 and the second photodetector 7 to calculate the ratio of the two-channel photocurrents, and can set a plurality of ratios according to the setting. The ratio of the size to count.
  • the polarization state of the linearly polarized light after the transparent body changes, resulting in different light receiving light currents of the first photodetector 6 and the second photodetector 7 of the two receiving channels.
  • the ratio of the photocurrent of the two channels reflects the angular deflection of the linearly polarized light, and the angular deflection of the linearly polarized light is related to the thickness of the transparent body, so that the transparent body of a specific thickness can be detected by calibrating the ratio of the intensity of the two-channel photocurrent.
  • the difference between the photocurrent intensities of the p-polarized light channel and the s-polarized light channel received by the transparent object of a certain thickness is determined.
  • the counter of the thickness transparent body is incremented by one, and multiple calibrations can be set. The value realizes the function of counting the transparent bodies of different thicknesses on the same production line.
  • the present invention provides a retroreflector 3 applied to a retroreflective photoelectric sensor, comprising a pyramid 32 and a dichroic polarizer 31 disposed on the reflecting surface of the pyramid 32,
  • the pyramid 32 is used to convert incident light transmitted by the sensor body 9 into outgoing light.
  • the dichroic polarizing plate 31 is glued to the reflecting surface of the pyramid 32 by optical glue.
  • the material of the pyramid 32 is glass or optical plastic.
  • the optical axis direction of the dichroic polarizing plate 31 is along the y-axis, thereby ensuring that the polarization state of the retroreflected light is horizontal, that is, along the y-axis.
  • the optimal design of the pyramidal area is obtained.
  • the polarization state of the exiting cone is controlled, so that the polarization state of the outgoing light is uniform.
  • the polarized light has a high extinction ratio, a large effective area, a simple manufacturing process, and low cost.
  • the light is incident on the OAC plane, the incident ray equation (6), the OAC plane equation (2), and the simultaneous equations obtain the coordinates of the incident point:
  • the light is totally internally reflected on the surface of the OAC.
  • the reflected light equation is:
  • the light after total internal reflection is incident on the surface of the OBC, and total internal reflection occurs.
  • the equation of the plane OBC is (1), and the intersection of the line and the plane is:
  • the reflected light above is incident on the OAB plane.
  • the plane equation of OAB is (3).
  • the intersection of the incident light of the OAB plane and the plane is:
  • the reflected light of the OAB plane according to the coordinates of the intersection point, the normal equation, and the law of reflection in the vector form, can obtain the linear equation of the outgoing light as:
  • the light of each incident pyramid can be traced, thereby obtaining the coordinate position relationship between the incident pyramid and the exit pyramid.
  • the positional possibilities of all the exiting pyramids are obtained.
  • the area of the exit surface of the pyramid the R1-R3 is an invalid area, and the light incident in this area cannot reflect the pyramid.
  • the effective area is the hexagonal area in Fig. 5, and the R4 area is incident and will be emitted from R4'.
  • the R5 region is incident, will be emitted from R5', is incident from the R6 region, will be emitted from R6', and is composed of R4R5R6R4'R5'R6' and other hexagons, thereby achieving the optimal area design of the pyramid.
  • 1 is the incident medium
  • 2 is the refractive medium, such as error!
  • the reference source was not found. It is the relationship between the reflected amplitude s component and the p component complex amplitude reflectivity with the incident angle, wrong! The reference source was not found. It is the change of the phase of the reflected light s component and the p component with the angle, so that the additional phase after three times of total reflection can be obtained when the normal incident pyramid is obtained.
  • the polarizing plate 31 is placed on the incident surface of the pyramid 32, or the pyramid material is plated on the surface of the pyramid, and the incident light is polarized to the polarizing plate 31 to enter the pyramidal reflection, and the phase is reflected by the total reflection.
  • the pyramid is elliptically polarized light, which passes through the polarizing plate 31 and becomes linearly polarized light, and the detection sensitivity is from 0 to 100%.
  • the material of the polarizing plate 31 is a dichroic dye polarizing material, which is plated on the incident surface of the pyramid 32 by a plating process, or is disposed as an adjustable direction polarizing plate 31 against the pyramid 32.

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Abstract

A sensor main body, comprising a light-emitting element, a light-receiving element, and a driving circuit (8). The light-emitting element comprises a light source (1) and a first collimating lens (2); the light-receiving element comprises a second collimating lens (4), a polarization splitter (5), a first photoelectric detector (6), and a second photoelectric detector (7); both the first photoelectric detector (6) and the second photoelectric detector (7) are electrically connected to the driving circuit. In addition, also disclosed is a regression reflection type photoelectric sensor, comprising the sensor main body and a regression reflector (3). The regression reflector (3) comprises a pyramid (32) and a dichroic polarizer disposed on the reflection surface of the pyramid; the pyramid (32) is used for converting incident light transmitted by the sensor main body to emergent light. The regression reflection type photoelectric sensor of the present invention features a simple process and low costs; the polarization of the emergent light is uniform and the extinction ratio is high; moreover, the cooperation of the regression reflector and the sensor main body improves a detection distance of the photoelectric sensor.

Description

一种传感器主体及回归反射型光电传感器Sensor body and retroreflective photoelectric sensor 技术领域Technical field
本发明涉及一种光电技术领域,尤其涉及一种传感器主体及回归反射型光电传感器。The invention relates to the field of photoelectric technology, in particular to a sensor body and a retroreflective photoelectric sensor.
背景技术Background technique
目前,在工业与消费领域,需要回归反射的领域一般都是采用角锥阵列的方式来实现光束的原路返回。At present, in the field of industrial and consumer, the field that needs retroreflection generally adopts a pyramid array to realize the original return of the beam.
普通角锥出射偏振分布不均匀,于是有人想到了采用旋光效应薄片,但是基于旋光效应的角锥工艺复杂,需要配合相位延迟器来使用,无法利用角锥全部入射面,且出射偏振态分布不均匀,造成体积偏大;在先技术是名称为《旋光保偏角锥》的美国专利,该专利号为US20050264883A1。The polarization distribution of the ordinary pyramid is not uniform, so some people think of using the optical effect sheet, but the pyramid method based on the optical rotation effect is complicated, and it needs to be used with the phase retarder. It is impossible to use all the incident surfaces of the pyramid, and the distribution of the polarization state is not Uniform, resulting in a large volume; the prior art is a U.S. patent entitled "Optical Conformal Cone", which is US20050264883A1.
除了上述的在先技术外,还有角锥阵列回归反射板,其是普通角锥在二维方向的周期性的排列,出射偏振态分布均匀,可以做的很薄,但是其工艺机器复杂,从而造成成本相对很高;且角锥阵列回归反射板反射回的偏振态为椭圆偏振态,由于消光比较低,在功率受限的情况下,无法进行较远距离的探测。In addition to the above prior art, there is a pyramidal array retroreflective sheet, which is a periodic arrangement of ordinary pyramids in a two-dimensional direction, and the output polarization state is evenly distributed, which can be made thin, but the process machine is complicated. Therefore, the cost is relatively high; and the polarization state reflected back by the retroreflective sheeting of the pyramid array is an elliptical polarization state. Due to the low extinction, in the case of limited power, the detection of a long distance cannot be performed.
利用刻蚀光栅的方式虽然可以对角锥起偏,需要对角锥三个垂直表面刻蚀精密条纹以满足起偏要求,对光栅刻蚀角度和密度提出很高的要求,工艺复杂,成本较高。Although the etched grating can be used to distort the pyramid, it is necessary to etch the precise stripe on the three vertical surfaces of the pyramid to meet the requirements of the polarizing. The grating etching angle and density are highly demanded, the process is complicated, and the cost is relatively high. high.
发明内容Summary of the invention
为了克服现有技术的不足,本发明的目的之一在于提供一种传感器主体,其能将回归反射光起偏为线偏振光。In order to overcome the deficiencies of the prior art, it is an object of the present invention to provide a sensor body that can deflect retroreflected light into linearly polarized light.
本发明的目的之二在于提供一种回归反射型光电传感器,其能使用正交偏振双通道探测,提高探测灵敏度。Another object of the present invention is to provide a retroreflective photoelectric sensor capable of detecting sensitivity by using orthogonal polarization dual channel detection.
本发明的目的之一采用如下技术方案实现:One of the objects of the present invention is achieved by the following technical solutions:
一种传感器主体,包括发光元件、受光元件和驱动电路,所述发光元件包括光源和第一准直透镜,所述受光元件包括第二准直透镜、偏振分路器、第一光电探测器和第二光电探测器,所述第一光电探测器和第二光电探测器均与驱动电路电性连接;A sensor body includes a light emitting element, a light receiving element, and a driving circuit, the light emitting element including a light source and a first collimating lens, the light receiving element including a second collimating lens, a polarization splitter, a first photodetector, and a second photodetector, wherein the first photodetector and the second photodetector are electrically connected to the driving circuit;
所述光源与第一准直透镜依次同轴设置于发光路径上,所述第二准直透镜和偏振分路器依次同轴设置于受光路径上,所述偏振分路器用于将接收到的出射光分为s偏振光和p偏振光,所述第一光电探测器用于接收p偏振光并传输第一光电流信号至驱动电路,所述第二光电探测器用于接收s偏振光并传输第一光电流信号至驱动电路;所述驱动电路用于判断差分光电流信号与预设值的大小,所述差分光电流信号为第一光电流信号与第二光电流信号的差值。The light source and the first collimating lens are sequentially disposed coaxially on the light-emitting path, and the second collimating lens and the polarization splitter are coaxially disposed on the light-receiving path, and the polarization splitter is configured to receive the received light. The outgoing light is divided into s-polarized light and p-polarized light, the first photodetector is configured to receive p-polarized light and transmit a first photocurrent signal to a driving circuit, and the second photodetector is configured to receive s-polarized light and transmit the first a photocurrent signal is sent to the driving circuit; the driving circuit is configured to determine a magnitude of the differential photocurrent signal and a preset value, wherein the differential photocurrent signal is a difference between the first photocurrent signal and the second photocurrent signal.
进一步地,所述偏振分路器包括偏振分束棱镜、第一直角棱镜、第二直角棱镜、第三直角棱镜和相位补偿板;所述偏振分束棱镜用于将一入射光分为p偏振光和s偏振光,所述p偏振光依次通过第一直角棱镜和第二直角棱镜;所述s偏振光依次通过第三直角棱镜和相位补偿板;所述相位补偿板用于对s偏振光进行相位补偿以使s偏振光与p偏振光经历相等光程。通过正交双通道的偏振探测,消除了共模噪声的影响,提高探测信噪比。Further, the polarization splitter comprises a polarization beam splitting prism, a first right angle prism, a second right angle prism, a third right angle prism and a phase compensation plate; the polarization beam splitting prism is used to divide an incident light into p polarization Light and s-polarized light, said p-polarized light sequentially passing through a first right-angle prism and a second right-angle prism; said s-polarized light sequentially passing through a third right-angle prism and a phase compensating plate; said phase compensating plate is used for s-polarized light Phase compensation is performed to cause the s-polarized light to undergo an equal optical path with the p-polarized light. Through the orthogonal dual-channel polarization detection, the influence of common mode noise is eliminated, and the detection signal-to-noise ratio is improved.
进一步地,所述第一直角棱镜、第二直角棱镜和第三直角棱镜均为全反射棱镜。Further, the first right angle prism, the second right angle prism and the third right angle prism are all total reflection prisms.
进一步地,所述光源为LED光源。Further, the light source is an LED light source.
进一步地,所述光源设置于第一准直透镜的焦点处。Further, the light source is disposed at a focus of the first collimating lens.
本发明的目的之二采用如下技术方案实现:The second object of the present invention is achieved by the following technical solutions:
一种回归反射型光电传感器,包括如上所描述的传感器主体和回归反射器,所述回归反射器包括角锥和设置于角锥反射面上的二向色性偏振片,所述角锥用于将传感器主体传输的入射自然偏振光转换为线偏振出射光,二向色性的偏振片主轴方向与出射线偏振光的偏振方向一致。A retroreflective photoelectric sensor comprising a sensor body and a retroreflector as described above, the retroreflector comprising a pyramid and a dichroic polarizer disposed on the pyramidal reflecting surface, the pyramid being used The incident natural polarized light transmitted from the sensor body is converted into linearly polarized outgoing light, and the direction of the main axis of the dichroic polarizing plate coincides with the polarization direction of the outgoing polarized light.
进一步地,所述二向色性偏振片通过光学胶水胶合于角锥反射面上。Further, the dichroic polarizer is glued to the pyramidal reflection surface by optical glue.
进一步地,所述角锥的材料为玻璃或者光学塑料。Further, the material of the pyramid is glass or optical plastic.
相比现有技术,本发明的有益效果在于:Compared with the prior art, the beneficial effects of the present invention are:
本发明的光电传感器的回归反射器工艺简单、成本低、出射光的偏振态均匀、消光比高,并且该回归反射器与传感器主体的配合提高了该光电传感器的探测距离。The retroreflector of the photoelectric sensor of the invention has simple process, low cost, uniform polarization state of the emitted light, high extinction ratio, and the cooperation of the retroreflector and the sensor body improves the detection distance of the photoelectric sensor.
附图说明DRAWINGS
图1为本发明的光电传感器的结构图;Figure 1 is a structural view of a photoelectric sensor of the present invention;
图2为本发明的传感器主体的正交偏振分路器的结构图;2 is a structural view of an orthogonal polarization splitter of a sensor body of the present invention;
图3为本发明的回归反射器的结构图;Figure 3 is a structural view of a retroreflector of the present invention;
图4为角锥的坐标系;Figure 4 is the coordinate system of the pyramid;
图5为角锥的入射面区域划分图;Figure 5 is a sectional view of the entrance surface area of the pyramid;
图6为光的入射图;Figure 6 is an incident view of light;
图7为反射光s分量与p分量复振幅反射率随入射角度的关系图;Figure 7 is a graph showing the relationship between the reflected amplitude s component and the p component complex amplitude reflectance as a function of incident angle;
图8为反射光s分量与p分量相位随角度的变化图;Figure 8 is a graph showing changes in the phase of the reflected light s component and the p component with angle;
图9为椭圆方程的示意图;Figure 9 is a schematic diagram of an elliptic equation;
图10为反射光s分量与p分量相位差变化示意图。FIG. 10 is a schematic diagram showing changes in phase difference between the s component and the p component of the reflected light.
附图标记:1、光源;2、第一准直透镜;3、回归反射器;31、偏振片;32、角锥;4、第二准直透镜;5、偏振分路器;51、偏振分束棱镜;52、第一直角棱镜;53、第二直角棱镜;54、第三直角棱镜;55、相位补偿板;6、第一光电探测器;7、第二光电探测器;8、驱动电路;9、传感器主体;10、传输光路。Reference numerals: 1, light source; 2, first collimating lens; 3, retroreflector; 31, polarizing plate; 32, pyramid; 4, second collimating lens; 5, polarization splitter; Splitting prism; 52, first right angle prism; 53, second right angle prism; 54, third right angle prism; 55, phase compensation plate; 6, first photodetector; 7, second photodetector; Circuit; 9, sensor body; 10, transmission optical path.
具体实施方式detailed description
下面,结合附图以及具体实施方式,对本发明做进一步描述,需要说明的是,在不相冲突的前提下,以下描述的各实施例之间或各技术特征之间可以任意组合形成新的实施例。The present invention will be further described in conjunction with the accompanying drawings and specific embodiments. It should be noted that, without conflict, the embodiments described below may be arbitrarily combined to form a new embodiment. .
如图1所示,本发明提供了一种回归反射型光电传感器,该光电传感器包括传感器主体9和回归反射器3,该传感器主体9包括发光元件、受光元件和驱动电路8,所述发光元件包括光源1和第一准直透镜2,所述受光元件包括第二准直透镜4、偏振分路器5、第一光电探测器6和第二光电探测器7,所述第一光电探测器6和第二光电探测器7均与驱动电路8电性连接;回归反射器的材料与厚度的要求为大于1mm厚度的电气石,或者大于0.3mm厚度的碘硫酸金鸡纳。As shown in FIG. 1, the present invention provides a retroreflective photoelectric sensor including a sensor body 9 and a retroreflector 3, the sensor body 9 including a light emitting element, a light receiving element, and a driving circuit 8, the light emitting element The light source 1 includes a second collimating lens 4, a polarization splitter 5, a first photodetector 6, and a second photodetector 7, the first photodetector Both the 6 and the second photodetectors 7 are electrically connected to the driving circuit 8; the material and thickness of the retroreflector are required to be tourmaline having a thickness greater than 1 mm, or cinchona iodosulfate having a thickness greater than 0.3 mm.
如图2所示,本发明提供了一种偏振分路器5,其包括偏振分束棱镜51、第一直角棱镜52、第二直角棱镜53、第三直角棱镜54和相位补偿板55;所述第一直角棱镜52、第二直角棱镜53和第三直角棱镜54均为全反射棱镜。所述偏振分束棱镜51用于将一入射光分为p偏振光和s偏振光,所述p偏振光依次通过第一直角棱镜52和第二直角棱镜53;所述s偏振光依次通过第三直角棱镜54和相位补偿板55;所述相位补偿板55用于对s偏振光进行相位补偿以使s偏振光与p偏振光经历相等光程。As shown in FIG. 2, the present invention provides a polarization splitter 5 comprising a polarization beam splitting prism 51, a first right angle prism 52, a second right angle prism 53, a third right angle prism 54, and a phase compensation plate 55; The first right angle prism 52, the second right angle prism 53, and the third right angle prism 54 are all total reflection prisms. The polarization beam splitting prism 51 is configured to divide an incident light into p-polarized light and s-polarized light, and the p-polarized light sequentially passes through the first right-angle prism 52 and the second right-angle prism 53; the s-polarized light sequentially passes through A three-corner prism 54 and a phase compensating plate 55 are used for phase compensation of the s-polarized light to cause the s-polarized light and the p-polarized light to undergo an equal optical path.
由于入射光的偏振态可能为线性偏振,也可能为椭圆偏振,但是入射光经过回归反射器3进行反射之后,该出射光将偏振投影到两个垂直的方向,一个是水平方向,也即是y轴,另一个为垂直方向,也即是z轴;由偏振分束棱镜51将入射光分为垂直的线偏振光以及水平的线偏振光;p偏振光经过第一直角棱镜52以及第二直角棱镜53的全反射之后出射为p偏振光,s偏振光经过第三直角棱镜54进行全反射之后,由相位补偿板55进行相位补偿,使得s偏振光与p偏振光经历相同的光程。Since the polarization state of the incident light may be linearly polarized, it may also be elliptically polarized, but after the incident light is reflected by the retroreflector 3, the emitted light projects the polarization into two perpendicular directions, one being horizontal, that is, The y-axis, the other is the vertical direction, that is, the z-axis; the incident beam is divided into vertical linearly polarized light and horizontal linearly polarized light by the polarization beam splitting prism 51; the p-polarized light passes through the first right-angle prism 52 and the second After the total reflection of the right-angle prism 53 is emitted as p-polarized light, the s-polarized light is totally reflected by the third right-angle prism 54 and then phase-compensated by the phase compensating plate 55 so that the s-polarized light and the p-polarized light undergo the same optical path.
所述光源1与第一准直透镜2依次同轴设置于发光路径上,所述第二准直透镜4和偏振分路器5依次同轴设置于受光路径上,所述偏振分路器5用于将接收到的出射光分为s偏振光和p偏振光,所述第一光电探测器6用于接收p偏振光并传输第一光电流信号至驱动电路8,所述第二光电探测器7用于接收s偏振光并传输第一光电流信号至驱动电路8;所述驱动电路8用于判断差分光电流信号与预设值的大小,所述差分光电流信号为第一光电流信号与第二光电流信号的差值;所述光源1为LED光源;且所述光源1设置于第一准直透镜2的焦点处。The light source 1 and the first collimating lens 2 are sequentially disposed coaxially on the light-emitting path, and the second collimating lens 4 and the polarization splitter 5 are sequentially disposed coaxially on the light-receiving path, and the polarization splitter 5 For dividing the received outgoing light into s-polarized light and p-polarized light, the first photodetector 6 is configured to receive p-polarized light and transmit a first photocurrent signal to the driving circuit 8, the second photodetecting The device 7 is configured to receive s-polarized light and transmit a first photocurrent signal to the driving circuit 8; the driving circuit 8 is configured to determine a magnitude of the differential photocurrent signal and a preset value, where the differential photocurrent signal is the first photocurrent a difference between the signal and the second photocurrent signal; the light source 1 is an LED light source; and the light source 1 is disposed at a focus of the first collimating lens 2.
本实施例的工作原理:LED光源发射的光通过第一准直透镜2后准直发射,通过传输光路10传输至回归反射器3,该入射光线在角锥32内进行全反射后,出射为线偏振光,出射光的偏振方向为Y轴方向,回归反射光线经过第二准直透镜4会聚后,进入偏振分路器5内,然后通过偏振分路器5,p偏振光会被会聚在第二光电探测器7处,s偏振光会被会聚在第一光电探测器6内,驱动电路8的阈值判断电流为差分光电流信号;The working principle of the embodiment: the light emitted by the LED light source is collimated and transmitted through the first collimating lens 2, and transmitted to the retroreflector 3 through the transmission optical path 10, and the incident light is totally reflected in the pyramid 32, and is emitted as Linearly polarized light, the polarization direction of the outgoing light is in the Y-axis direction, and the retroreflected light is concentrated by the second collimating lens 4, enters the polarization splitter 5, and then passes through the polarization splitter 5, and the p-polarized light is concentrated at At the second photodetector 7, the s-polarized light is concentrated in the first photodetector 6, and the threshold value of the driving circuit 8 determines that the current is a differential photocurrent signal;
驱动电路8可以通过记录处理第一光电探测器6和第二光电探测器7双通道返回的光电流的大小,来计算双通道光电流打下偶的比值,可以设置多个比 值,并根据设定的比值大小来进行计数。The driving circuit 8 can calculate the ratio of the photocurrents returned by the two channels of the first photodetector 6 and the second photodetector 7 to calculate the ratio of the two-channel photocurrents, and can set a plurality of ratios according to the setting. The ratio of the size to count.
由于采用了正交偏振分路器,经过透明体后线偏振光的偏振态会发生改变,导致两个接收通道第一光电探测器6与第二光电探测器7的光强接收光电流不同,双通道的光电流之比反映了线偏振光的角度偏转,线偏振光的角度偏转与透明体的厚度相关,因此可以通过标定双通道光电流强度之比来检测特定厚度的透明体。Due to the use of the orthogonal polarization splitter, the polarization state of the linearly polarized light after the transparent body changes, resulting in different light receiving light currents of the first photodetector 6 and the second photodetector 7 of the two receiving channels. The ratio of the photocurrent of the two channels reflects the angular deflection of the linearly polarized light, and the angular deflection of the linearly polarized light is related to the thickness of the transparent body, so that the transparent body of a specific thickness can be detected by calibrating the ratio of the intensity of the two-channel photocurrent.
通过标定,确定特定厚度透明物体接收到的p偏振光通道与s偏振光通道的光电流强度之差,当达到此阈值的时候,则厚度透明体的计数器加一,可以通过设定多个标定值,实现在同一条产线针对不同厚度透明体进行计数的功能。By calibration, the difference between the photocurrent intensities of the p-polarized light channel and the s-polarized light channel received by the transparent object of a certain thickness is determined. When the threshold is reached, the counter of the thickness transparent body is incremented by one, and multiple calibrations can be set. The value realizes the function of counting the transparent bodies of different thicknesses on the same production line.
如图3所示,本发明提供了一种回归反射器3,其应用于回归反射型光电传感器,包括角锥32和设置于角锥32反射面上的二向色性偏振片31,所述角锥32用于将传感器主体9传输的入射光转换为出射光。所述二向色性偏振片31通过光学胶水胶合于角锥32反射面上。所述角锥32的材料为玻璃或者光学塑料。该二向色性偏振片31的光轴方向沿y轴,从而保证回归反射光偏振态为水平方向,也即是沿着y轴。As shown in FIG. 3, the present invention provides a retroreflector 3 applied to a retroreflective photoelectric sensor, comprising a pyramid 32 and a dichroic polarizer 31 disposed on the reflecting surface of the pyramid 32, The pyramid 32 is used to convert incident light transmitted by the sensor body 9 into outgoing light. The dichroic polarizing plate 31 is glued to the reflecting surface of the pyramid 32 by optical glue. The material of the pyramid 32 is glass or optical plastic. The optical axis direction of the dichroic polarizing plate 31 is along the y-axis, thereby ensuring that the polarization state of the retroreflected light is horizontal, that is, along the y-axis.
根据光线追迹理论,获得角锥最优面积设计,通过在角锥的入射面镀一层二向色性材料薄膜,实现对出射角锥偏振态的控制,从而使得出射光偏振态均匀,线偏振光出射消光比高,有效面积大,制造工艺简单,成本低。According to the ray tracing theory, the optimal design of the pyramidal area is obtained. By coating a thin layer of dichroic material on the incident surface of the pyramid, the polarization state of the exiting cone is controlled, so that the polarization state of the outgoing light is uniform. The polarized light has a high extinction ratio, a large effective area, a simple manufacturing process, and low cost.
如图4所示的角锥的坐标系,该角锥的四个平面以及平面的单位法向量为:The coordinate system of the pyramid shown in Figure 4, the four planes of the pyramid and the unit normal vector of the plane are:
Figure PCTCN2017118234-appb-000001
Figure PCTCN2017118234-appb-000001
Figure PCTCN2017118234-appb-000002
Figure PCTCN2017118234-appb-000002
Figure PCTCN2017118234-appb-000003
Figure PCTCN2017118234-appb-000003
Figure PCTCN2017118234-appb-000004
Figure PCTCN2017118234-appb-000004
光线与每个平面交点的坐标范围约束为:The coordinate range of the intersection of the ray and each plane is constrained as:
Figure PCTCN2017118234-appb-000005
Figure PCTCN2017118234-appb-000005
在ABC面光线垂直入射,光线的入射点为(x 0,y 0,z 0),方向向量为
Figure PCTCN2017118234-appb-000006
直线方程为:
When the ABC surface ray is incident perpendicularly, the incident point of the ray is (x 0 , y 0 , z 0 ), and the direction vector is
Figure PCTCN2017118234-appb-000006
The straight line equation is:
Figure PCTCN2017118234-appb-000007
Figure PCTCN2017118234-appb-000007
光线入射到OAC平面反射,入射光线方程(6),OAC平面方程(2),联立方程得到入射点坐标:The light is incident on the OAC plane, the incident ray equation (6), the OAC plane equation (2), and the simultaneous equations obtain the coordinates of the incident point:
Figure PCTCN2017118234-appb-000008
Figure PCTCN2017118234-appb-000008
根据矢量形式的光线反射公式,入射光线矢量
Figure PCTCN2017118234-appb-000009
出射光线矢量
Figure PCTCN2017118234-appb-000010
入射平面单位法向量
Figure PCTCN2017118234-appb-000011
的方向定义如下:
Light ray reflection formula based on vector form, incident ray vector
Figure PCTCN2017118234-appb-000009
Exit ray vector
Figure PCTCN2017118234-appb-000010
Incident plane unit normal vector
Figure PCTCN2017118234-appb-000011
The direction is defined as follows:
Figure PCTCN2017118234-appb-000012
Figure PCTCN2017118234-appb-000012
光线在OAC表面发生全内反射,反射后的光线方程为:The light is totally internally reflected on the surface of the OAC. The reflected light equation is:
Figure PCTCN2017118234-appb-000013
Figure PCTCN2017118234-appb-000013
经过全内反射后的光线,入射到OBC表面,发生全内反射,平面OBC的方程为(1),直线与平面的交点为:The light after total internal reflection is incident on the surface of the OBC, and total internal reflection occurs. The equation of the plane OBC is (1), and the intersection of the line and the plane is:
Figure PCTCN2017118234-appb-000014
Figure PCTCN2017118234-appb-000014
根据矢量形式的反射定律,得到经过OBC反射后的光线方程为:According to the reflection law of the vector form, the equation of the light after the OBC reflection is obtained as follows:
Figure PCTCN2017118234-appb-000015
Figure PCTCN2017118234-appb-000015
上面经过反射的光线入射OAB平面,OAB的平面方程为(3),OAB平面入射光线与该平面的交点为:The reflected light above is incident on the OAB plane. The plane equation of OAB is (3). The intersection of the incident light of the OAB plane and the plane is:
Figure PCTCN2017118234-appb-000016
Figure PCTCN2017118234-appb-000016
OAB平面的反射光线,根据交点坐标、法线方程、矢量形式的反射定律可以得到出射光线的直线方程为:The reflected light of the OAB plane, according to the coordinates of the intersection point, the normal equation, and the law of reflection in the vector form, can obtain the linear equation of the outgoing light as:
Figure PCTCN2017118234-appb-000017
Figure PCTCN2017118234-appb-000017
出射光线经过ABC平面最终出射角锥,根据上面反射光线与ABC平面方程(4),最终可以得到出射角锥的坐标为:The exiting ray passes through the ABC plane and finally exits the pyramid. According to the above reflected ray and the ABC plane equation (4), the coordinates of the exiting pyramid are finally obtained:
Figure PCTCN2017118234-appb-000018
Figure PCTCN2017118234-appb-000018
根据上述理论推导,可以追迹每一条入射角锥的光线,从而获得入射角锥与出射角锥的坐标位置关系。According to the above theoretical derivation, the light of each incident pyramid can be traced, thereby obtaining the coordinate position relationship between the incident pyramid and the exit pyramid.
如图5所示,并根据对称性,考虑所有入射角锥的位置可能性,得到所有出射角锥的位置可能性。关于角锥入社出射面区域划分,其中R1-R3为无效区域,此区域的光入射无法反射出角锥,有效区域为图5中的六角形区域,其中R4区域入射,将从R4’出射,R5区域入射,将从R5’出射,从R6区域入射,将从R6’出射,由R4R5R6R4’R5’R6’组成等六边形,从而实现角锥的最优面积设计。As shown in Fig. 5, and depending on the symmetry, considering the positional possibilities of all incident pyramids, the positional possibilities of all the exiting pyramids are obtained. Regarding the area of the exit surface of the pyramid, the R1-R3 is an invalid area, and the light incident in this area cannot reflect the pyramid. The effective area is the hexagonal area in Fig. 5, and the R4 area is incident and will be emitted from R4'. The R5 region is incident, will be emitted from R5', is incident from the R6 region, will be emitted from R6', and is composed of R4R5R6R4'R5'R6' and other hexagons, thereby achieving the optimal area design of the pyramid.
如错误!未找到引用源。所示,反射光的振幅反射率有As wrong! The reference source was not found. As shown, the amplitude reflectance of the reflected light has
Figure PCTCN2017118234-appb-000019
Figure PCTCN2017118234-appb-000019
其中,1为入射介质,2为折射介质,如错误!未找到引用源。是反射光s分量与p分量复振幅反射率随入射角度的关系,错误!未找到引用源。是反射光s分量与p分量相位随角度的变化,从而可以得到正入射角锥时,三次全反射后的附加相位。Among them, 1 is the incident medium, 2 is the refractive medium, such as error! The reference source was not found. It is the relationship between the reflected amplitude s component and the p component complex amplitude reflectivity with the incident angle, wrong! The reference source was not found. It is the change of the phase of the reflected light s component and the p component with the angle, so that the additional phase after three times of total reflection can be obtained when the normal incident pyramid is obtained.
正入射时,全反射导致附加相位,正入射角锥棱镜时,三个反射面的入射角固定,角度为54.74度
Figure PCTCN2017118234-appb-000020
正入射时,每反射一次,p光与s光相位差增加0.768rad(44度)。进行三次全反射后,最终附加相位2.304rad,若入射线偏振光,出射为椭圆偏振光。
At normal incidence, total reflection results in an additional phase. When the angle prism is incident, the angle of incidence of the three reflecting surfaces is fixed at an angle of 54.74 degrees.
Figure PCTCN2017118234-appb-000020
At normal incidence, the phase difference between p-light and s-light is increased by 0.768 rad (44 degrees) for each reflection. After three times of total reflection, the final phase is 2.304 rad, and if the ray is polarized, it is emitted as elliptically polarized light.
如错误!未找到引用源。一般形式的椭圆偏振光的椭圆方程示意图,其表达式为As wrong! The reference source was not found. Schematic diagram of an elliptic equation of general form of elliptically polarized light, the expression of which is
Figure PCTCN2017118234-appb-000021
Figure PCTCN2017118234-appb-000021
如错误!未找到引用源。为s分量与p分量相位差改变时,偏振态的改变过程,除特殊的0,pi相位外,均为椭圆偏振形式。当相位角度为
Figure PCTCN2017118234-appb-000022
的范围时,为椭圆偏振光,探测灵敏度取决于椭圆偏振光的长轴与短轴比例。
As wrong! The reference source was not found. When the phase difference between the s component and the p component is changed, the change process of the polarization state, except for the special 0, pi phase, is an elliptically polarized form. When the phase angle is
Figure PCTCN2017118234-appb-000022
The range is elliptically polarized, and the detection sensitivity depends on the ratio of the long axis to the short axis of the elliptically polarized light.
在角锥32的入射面紧贴放置偏振片31,或者将角锥材料镀到角锥表面,入 射光到偏振片31起偏为线偏振光,进入角锥反射,由于全反射附加相位,出射角锥为椭圆偏振光,通过偏振片31后又变为线偏振光,探测灵敏度从0-100%。偏振片31的材料为二向色性染料偏振材料,通过镀膜的工艺镀在角锥32入射面表面,或者作为可调节方向的偏振片31紧贴角锥32设置。The polarizing plate 31 is placed on the incident surface of the pyramid 32, or the pyramid material is plated on the surface of the pyramid, and the incident light is polarized to the polarizing plate 31 to enter the pyramidal reflection, and the phase is reflected by the total reflection. The pyramid is elliptically polarized light, which passes through the polarizing plate 31 and becomes linearly polarized light, and the detection sensitivity is from 0 to 100%. The material of the polarizing plate 31 is a dichroic dye polarizing material, which is plated on the incident surface of the pyramid 32 by a plating process, or is disposed as an adjustable direction polarizing plate 31 against the pyramid 32.
上述实施方式仅为本发明的优选实施方式,不能以此来限定本发明保护的范围,本领域的技术人员在本发明的基础上所做的任何非实质性的变化及替换均属于本发明所要求保护的范围。The above embodiments are merely preferred embodiments of the present invention, and the scope of the present invention is not limited thereto, and any insubstantial changes and substitutions made by those skilled in the art based on the present invention belong to the present invention. The scope of the claim.

Claims (7)

  1. 一种传感器主体,包括发光元件、受光元件和驱动电路,所述发光元件包括光源和第一准直透镜,其特征在于,所述受光元件包括第二准直透镜、偏振分路器、第一光电探测器和第二光电探测器,所述第一光电探测器和第二光电探测器均与驱动电路电性连接;A sensor body comprising a light-emitting element, a light-receiving element and a driving circuit, the light-emitting element comprising a light source and a first collimating lens, wherein the light-receiving element comprises a second collimating lens, a polarization splitter, a first a photodetector and a second photodetector, wherein the first photodetector and the second photodetector are electrically connected to the driving circuit;
    所述光源与第一准直透镜依次同轴设置于发光路径上,所述第二准直透镜和偏振分路器依次同轴设置于受光路径上,所述偏振分路器用于将接收到的出射光分为s偏振光和p偏振光,所述第一光电探测器用于接收p偏振光并传输第一光电流信号至驱动电路,所述第二光电探测器用于接收s偏振光并传输第二光电流信号至驱动电路;所述驱动电路用于判断差分光电流信号与预设值的大小,所述差分光电流信号为第一光电流信号与第二光电流信号的差值。The light source and the first collimating lens are sequentially disposed coaxially on the light-emitting path, and the second collimating lens and the polarization splitter are coaxially disposed on the light-receiving path, and the polarization splitter is configured to receive the received light. The outgoing light is divided into s-polarized light and p-polarized light, the first photodetector is configured to receive p-polarized light and transmit a first photocurrent signal to a driving circuit, and the second photodetector is configured to receive s-polarized light and transmit the first The two photocurrent signals are sent to the driving circuit; the driving circuit is configured to determine a magnitude of the differential photocurrent signal and the preset value, and the differential photocurrent signal is a difference between the first photocurrent signal and the second photocurrent signal.
  2. 如权利要求1所述的传感器主体,其特征在于,所述偏振分路器包括偏振分束棱镜、第一直角棱镜、第二直角棱镜、第三直角棱镜和相位补偿板;所述偏振分束棱镜用于将一入射光分为p偏振光和s偏振光,所述p偏振光依次通过第一直角棱镜和第二直角棱镜;所述s偏振光依次通过第三直角棱镜和相位补偿板;所述相位补偿板用于对s偏振光进行相位补偿以使s偏振光与p偏振光经历相等光程。The sensor body according to claim 1, wherein said polarization splitter comprises a polarization beam splitting prism, a first right angle prism, a second right angle prism, a third right angle prism, and a phase compensation plate; said polarization splitting The prism is configured to divide an incident light into p-polarized light and s-polarized light, and the p-polarized light sequentially passes through the first right-angle prism and the second right-angle prism; the s-polarized light sequentially passes through the third right-angle prism and the phase compensation plate; The phase compensator is used to phase compensate s-polarized light such that s-polarized light and p-polarized light experience an equal optical path.
  3. 如权利要求2所述的传感器主体,其特征在于,所述第一直角棱镜、第二直角棱镜和第三直角棱镜均为全反射棱镜。The sensor body according to claim 2, wherein said first right angle prism, said second right angle prism, and said third right angle prism are all total reflection prisms.
  4. 如权利要求1所述的传感器主体,其特征在于,所述光源为LED光源。The sensor body of claim 1 wherein said light source is an LED light source.
  5. 如权利要求1所述的传感器主体,其特征在于,所述光源设置于第一准直透镜的焦点处。The sensor body of claim 1 wherein said light source is disposed at a focus of said first collimating lens.
  6. 一种回归反射型光电传感器,其特征在于,包括如权利要求1所述的传感器主体和回归反射器,所述回归反射器包括角锥和设置于角锥反射面上的二向色性偏振片,所述角锥用于将传感器主体传输的入射光转换为出射光。A retroreflective photoelectric sensor comprising the sensor body according to claim 1 and a retroreflector, the retroreflector comprising a pyramid and a dichroic polarizer disposed on the pyramid reflecting surface The pyramid is used to convert incident light transmitted by the sensor body into outgoing light.
  7. 如权利要求6所述的回归反射型光电传感器,其特征在于,所述预设厚度的二向色性偏振片通过光学胶水胶合于角锥反射面上。The retroreflective photoelectric sensor according to claim 6, wherein the predetermined thickness of the dichroic polarizer is glued to the pyramidal reflection surface by optical glue.
PCT/CN2017/118234 2017-05-18 2017-12-25 Sensor main body and regression reflection type photoelectric sensor WO2018209957A1 (en)

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