CN111780873A - Prism type interference measuring device - Google Patents

Prism type interference measuring device Download PDF

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Publication number
CN111780873A
CN111780873A CN202010660204.3A CN202010660204A CN111780873A CN 111780873 A CN111780873 A CN 111780873A CN 202010660204 A CN202010660204 A CN 202010660204A CN 111780873 A CN111780873 A CN 111780873A
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CN
China
Prior art keywords
light
prism
incident
plane
emergent
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Pending
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CN202010660204.3A
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Chinese (zh)
Inventor
刘庆纲
刘睿旭
朗垚璞
郭昊
魏旭明
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Tianjin University
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Tianjin University
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Priority to CN202010660204.3A priority Critical patent/CN111780873A/en
Publication of CN111780873A publication Critical patent/CN111780873A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00Measuring polarisation of light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00Measuring polarisation of light
    • G01J4/04Polarimeters using electric detection means

Abstract

The invention discloses an optical interference measuring device, and belongs to the technical field of optical interference measurement. The device comprises a prism-type light path structure, a polaroid and a photoelectric receiver, and can realize the modulation of interference light intensity by using an external electric field. The invention has the following effective benefits: the two prisms with special designs form a prism-shaped group structure, each functional surface of the prism group with integrated structure design does not need to adjust the posture by an external adjusting mechanism, emergent light can form a stable light interference signal after passing through a polaroid, and an external electric field can be carried out to carry out interference signal modulation, so that common-path and high-stability interference measurement of polarization components and changes of incident light signals is realized.

Description

Prism type interference measuring device
Technical Field
The invention belongs to the technical field of optical interference measurement, and particularly relates to a prism-type interference measurement device. Method for implementing light polarization interferometry.
Background
The optical interferometry is the category that is developed first and is also widely used in interferometry, and commonly used interferometry structures such as michelson structures, mach-zehnder structures, and fizeau structures have high sensitivity and accuracy in measuring various parameters. The mach-zehnder structure is a commonly used interference structure, and can be used to observe the relative phase shift change generated by the medium after the light beam emitted from a single light source is split into two beams and passes through different paths, but at least two polarization beam splitters and two reflectors are required, and the mutual relationship of the 4 components needs to be adjusted by using an adjusting device. Because two beams of light interfered by the method need to pass through different paths and media, the problems that the position relation between optical elements of the structure is difficult to adjust, the non-common optical path design of the two beams of light is easy to introduce additional optical path change and external interference caused by different environments and the like can be caused. In view of the above, the present invention utilizes an integrated design to form a common-path stable interference method and apparatus without an intermediate adjustment device.
Disclosure of Invention
The technical problem to be solved by the invention is to provide a measuring device capable of forming an incident polarized light component of a common-path stable interference structure without an intermediate adjusting device.
In order to solve the technical problems, the invention adopts the technical scheme that: a prism-type interference measuring device comprises incident light, a prism-type light path structure, a polaroid P3 and a photoelectric receiver C1, wherein the prism-type light path structure is formed by a pair of 45-degree isosceles trapezoid prisms P1 and P2 in a way that the long bottom surfaces are in butt joint and the middle of the butt joint surface is plated with a multilayer dielectric film interface, the side surfaces of the isosceles trapezoid prisms P1 and P2 are anti-reflection film plated light incoming/outgoing planes, and the incident light B isinThe polarized light beam B2 which is vertically incident and is split at the interface 3 after passing through the incident light plane to form a polarized light beam B1 which vibrates vertical to the XOZ plane and a polarized light beam B1 which vibrates parallel to the XOZ plane, wherein the polarized light beam B2 which vibrates vertical to the XOZ plane and the polarized light beam B1 which vibrates parallel to the XOZ plane are respectively reflected by the short bottom surface and then converged at the interface to form emergent light Bout(ii) a The emergent light BoutForming an interference signal after passing through a polaroid P3, wherein the interference signal is received by a photoelectric receiving device C1; the light receiving planes of the polaroid P3 and the photoelectric receiver C1 are perpendicular to the emergent light BoutAnd is disposed in the emergent light BoutOn the extension line of (a).
The height of the isosceles trapezoid prism is a, the width of the isosceles trapezoid prism is b, a,The sizes of the b are all larger than the diameter of the light spot; the multilayer dielectric film interface has a long side length of 4 a; the plane of the polarizing plate P3 is perpendicular to the emergent light BoutAnd the polarization direction of the polaroid P3 is a polarization included angle β, β ≠ 0 °, 90 ° and multiples thereof.
The inclined plane of the waist of the 45-degree isosceles trapezoid prism is an incident light plane or an emergent light plane, the incident light Bin is incident from the incident light plane or is incident from the emergent light plane corresponding to the same prism, and the emergent light Bout is emergent from the emergent light plane or is emergent from the incident light plane corresponding to the same prism.
The isosceles trapezoid prism material is optical glass, quartz or electro-optical material with refractive index greater than that of air.
The prism of the electro-optic material is plated with a transparent electrode E on an incident/emergent light plane, phases of two paths of polarized light entering the prism are modulated simultaneously or respectively through an external electric field, then interference light signals with light intensity modulated periodically are formed through a polaroid P3, and the interference signals are received by a photoelectric receiving device C1.
The incident light is linearly polarized light or elliptically polarized light or unpolarized light, and an angle is formed between the polarization direction of the linearly polarized light and the XOZ plane; the polarized light beam B2 oscillating perpendicular to the XOZ plane and the polarized light beam B1 oscillating parallel to the XOZ plane have the same optical path within the prism.
The multilayer dielectric film interface provides a spectral ratio to incident light.
The multilayer dielectric film interface has a 1:1 or 1:2 or 1:3 ratio to incident light.
The invention has the beneficial effects that: the prism-type group structure is formed by two specially designed prisms, the posture of each functional surface of the prism structure designed in an integrated structure is not required to be adjusted by an external adjusting mechanism, the emergent light can form a stable light interference signal after passing through a polaroid, and an external electric field can be used for carrying out interference signal modulation, so that common-path and high-stability interference measurement on the polarization component and the change of the incident light signal is realized.
Drawings
FIG. 1 is a schematic plan view of a prismatic structure of the present invention;
FIG. 2 is a three-dimensional schematic of a prismatic structure of the present invention;
FIG. 3 is a schematic plan view of an electrode-carrying prismatic structure of the present invention;
FIG. 4 is a schematic view of an interferometric system of the invention.
In the figure:
p1, first isosceles trapezoidal prism
P2, second isosceles trapezoid prism
101, 103, 201, 203, light incident/emergent plane coated with antireflection film
3. Dielectric film interface
P3 polarizer
C1, photoelectric receiving device
Theta, incident angle beta, polarization angle
B1 polarized light beam vibrating parallel to XOZ plane
B2 polarized light beam vibrating perpendicular to XOZ plane
a. Height b and width of prism
Detailed Description
The invention is described in further detail below with reference to the following figures and detailed description:
the prism type interference measuring device adopts an integrated design method to integrate 2 specially designed prisms, an interference system device is formed by an additional polaroid and a photoelectric receiver, and the modulation of interference light intensity is realized by utilizing an external electric field. Each functional surface of the prism group with integrated structure design does not need to adjust the posture by means of an external adjusting mechanism, the emergent light can form a stable light interference signal after passing through the polaroid, and an external electric field can be used for carrying out interference signal modulation, so that common-path and high-stability interference measurement on the polarization component and the change of the polarization component of an incident light signal is realized.
Example 1
As shown in fig. 1 to 4, a prism-type interferometry device is an interferometry system consisting of incident light, a prism interference structure, a polarizing plate and a photoreceiver; incident light containing different polarization components, which may be linearly polarized light, elliptically polarized light, or unpolarized light, is incident perpendicularly to the face 201 of the prism structure.
The incident light having entered the isosceles trapezoidal prisms is incident on the interface 3 of the first isosceles trapezoidal prism P1 and the second isosceles trapezoidal prism P2 at the incident angle θ, and then is divided into a polarized light beam B1 vibrating parallel to the XOZ plane, which is the incident light B, passing through the interface 3 and a polarized light beam B2 vibrating perpendicular to the XOZ plane, which is reflected by the interface 3inAnd the emergent light BoutThe plane of the plane.
The polarized light beam B1 vibrating parallel to the XOZ plane and the polarized light beam B2 vibrating perpendicular to the XOZ plane are reflected by the incident surfaces 102 and 202 of the isosceles trapezoid prism respectively and then converged to the prism interface 3, and the converged light is emitted through the emergent surface 203 of the isosceles trapezoid prism; similarly, the incident light may enter from the incident surface 101 of the isosceles trapezoidal prism, and the condensed light may exit from the exit surface 103 of the isosceles trapezoidal prism.
The height of the isosceles trapezoid prism is a, the width of the isosceles trapezoid prism is b, the size of the isosceles trapezoid prism is 1 time or more of the diameter of a light spot, and the length of the long side of the interface of the multilayer dielectric film is 4 a; the plane of the polaroid is perpendicular to the emergent light BoutAnd the polarization direction of the polaroid is a polarization included angle β, β is not equal to 0 degree, 90 degrees and multiples thereof.
The light receiving planes of the polarizing plate P3 and the photoelectric receiver C1 are perpendicular to the outgoing light BoutArranged on the extension line of the emergent light; the emergent light of the isosceles trapezoid prism structure is decomposed into polarized light in different polarization directions when passing through the polaroid P3; an interference signal is formed between the polarization components passing through the P3 and is received by the C1 photoelectric receiver.
Example 2
The prisms are made of electro-optic materials, transparent electrodes E101 and E102 or E201 and E202 are plated on the symmetrical surfaces of the first isosceles trapezoid prisms P1 and P2, namely the inclined surfaces where the waists are located, the electrodes can receive external electric field modulation signals to respectively perform phase modulation on light of light paths of polarized light beams B1 and B2, and when the converged emergent light passes through P3, interference signals with periodically modulated light intensity are formed among polarization components of the converged emergent light.
The rest is the same as in example 1.
Prism in/out of electro-optic materialThe emitting light plane is plated with a transparent electrode E, the phases of two paths of polarized light of the incident prism are simultaneously or respectively modulated by an external electric field, then interference light signals with periodically modulated light intensity are formed by a polaroid, and the interference signals are received by a photoelectric receiving device. The purpose of using the electro-optical material prism is to realize the light intensity modulation and the phase modulation of an external field, and the interface of the isosceles trapezoid prism is used for transmitting incident light BinAfter the optical signals are divided into two optical paths, because the materials of the two optical paths are electro-optic materials, the refractive indexes of the electro-optic materials change along with the size of an electric signal externally applied to a transparent electrode plated on the end face of the prism, the phase of the signal changes due to the change of the refractive index of light, when the signals of the two optical paths are converged at the output end, the synthesized optical signal is an optical signal with the intensity changing, namely the change of the electric signal is converted into the change of the optical signal, and the modulation of the light intensity is realized; the emergent light is decomposed into polarization components with different polarization directions when passing through the polarizing plate, and the polarization components passing through form light interference signals which are received by a photoelectric receiver such as a CCD.

Claims (8)

1. A prism-type interferometry device comprising incident light, a prism-type optical path structure formed by a pair of 45-degree isosceles trapezoidal prisms (P1, P2) with their long bottom surfaces in contact and a multilayer dielectric film interface (3) plated in the middle of their contact surfaces, a polarizing plate (P3), and a photoelectric receiver (C1), wherein the side surfaces of the isosceles trapezoidal prisms (P1, P2) are antireflection film-plated incident/exit light planes (101, 103, 201, 203), and the incident light B is incident lightinThe polarized light beam (B2) which is vertically incident and passes through the incident light plane and then is split at the interface (3) to form a polarized light beam (B1) vibrating perpendicular to the XOZ plane and a polarized light beam (B1) vibrating parallel to the XOZ plane, wherein the polarized light beam (B2) vibrating perpendicular to the XOZ plane and the polarized light beam (B1) vibrating parallel to the XOZ plane are respectively reflected by the short bottom surfaces (102, 202) and then converged at the interface (3) to form emergent light Bout(ii) a The emergent light BoutForming an interference signal after passing through a polaroid (P3), wherein the interference signal is received by a photoelectric receiving device (C1); the light receiving planes of the polaroid (P3) and the photoelectric receiver (C1) are perpendicular to the emergent light BoutAnd is disposed in the emergent light BoutIs not limited toOn the long line.
2. The prism-type interferometry device according to claim 1, wherein the isosceles trapezoid prism has a height a and a width b, and both the a and b are larger than the spot diameter; the multilayer dielectric film interface has a long side length of 4 a; the plane of the polarizing plate (P3) is perpendicular to the emergent light BoutAnd the polarization direction of the polaroid (P3) is a polarization included angle β, β ≠ 0 °, 90 ° and multiples thereof.
3. The prism-type interferometry device according to claim 1, wherein the inclined plane on which the waist of the 45-degree isosceles trapezoid prism is located is an incident light plane or an emergent light plane (101, 201, 103, 203), the incident light Bin is incident from the incident light plane or the emergent light plane corresponding to the same prism is incident, and the emergent light Bout is emergent from the emergent light plane or the incident light plane corresponding to the same prism is emergent.
4. The prism-type interferometry device of claim 1, wherein the isosceles trapezoid prism material is an optical glass, quartz, electro-optical material with refractive index greater than that of air.
5. The prism-type interferometry device according to claim 4, wherein the prism of the electro-optical material is coated with a transparent electrode E on the light incident/emergent planes (E101, E102, E201, E202), and the phase of two polarized lights incident on the prism is modulated simultaneously or respectively by an external electric field, and then an interference light signal with periodically modulated light intensity is formed by the polarizer (P3), and the interference signal is received by the photoreceiving device (C1).
6. The prism-type interferometry device according to claim 1, wherein the incident light is linearly polarized light or elliptically polarized light or unpolarized light, and an angle is formed between the polarization direction of the linearly polarized light and an XOZ plane; the polarized light beam (B2) vibrating perpendicular to the XOZ plane and the polarized light beam (B1) vibrating parallel to the XOZ plane have the same optical path length in the prism.
7. A prism-type interferometry device according to claim 1, wherein said multilayer dielectric film interface provides a spectral ratio for incident light.
8. A prism-type interferometry device according to claim 7, wherein said multilayer dielectric film interface has an incident light ratio of 1:1, or 1:2, or 1: 3.
CN202010660204.3A 2020-07-10 2020-07-10 Prism type interference measuring device Pending CN111780873A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112834037A (en) * 2020-12-30 2021-05-25 中国科学院西安光学精密机械研究所 Coherent dispersion spectrum imaging method and device for realizing large optical path difference and high stability

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006071754A (en) * 2004-08-31 2006-03-16 Pentax Corp Polarized beam splitter and its manufacturing method
CN101185020A (en) * 2005-06-20 2008-05-21 日本电信电话株式会社 Electro-optical element
CN102411161A (en) * 2011-12-09 2012-04-11 中国科学院上海光学精密机械研究所 Wire polarizer
CN104820292A (en) * 2015-05-15 2015-08-05 南开大学 Naked-eye three-dimensional display method and device based on parallax error
CN105675150A (en) * 2016-01-15 2016-06-15 中国科学技术大学 Method for real-time detection of diffraction phase of structure light field
CN106052874A (en) * 2016-06-27 2016-10-26 中国科学院西安光学精密机械研究所 Interference imaging spectrometer and interferometer
CN106091953A (en) * 2016-07-19 2016-11-09 天津大学 A kind of SPR phase measuring method for measuring nanoscale double-layer metal film thickness
CN108761624A (en) * 2018-09-03 2018-11-06 中国科学院武汉物理与数学研究所 The wedge-shaped polarization splitting prism of big incidence field angle and ultrahigh extinction ratio
CN208060025U (en) * 2018-04-16 2018-11-06 西北工业大学 Realize the light path of two width interference patterns of the polarization state and phase that measure arbitrary beam
CN110137783A (en) * 2019-05-21 2019-08-16 苏州十一方生物科技有限公司 A kind of intensity modulated Terahertz parameter source device

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006071754A (en) * 2004-08-31 2006-03-16 Pentax Corp Polarized beam splitter and its manufacturing method
CN101185020A (en) * 2005-06-20 2008-05-21 日本电信电话株式会社 Electro-optical element
CN102411161A (en) * 2011-12-09 2012-04-11 中国科学院上海光学精密机械研究所 Wire polarizer
CN104820292A (en) * 2015-05-15 2015-08-05 南开大学 Naked-eye three-dimensional display method and device based on parallax error
CN105675150A (en) * 2016-01-15 2016-06-15 中国科学技术大学 Method for real-time detection of diffraction phase of structure light field
CN106052874A (en) * 2016-06-27 2016-10-26 中国科学院西安光学精密机械研究所 Interference imaging spectrometer and interferometer
CN106091953A (en) * 2016-07-19 2016-11-09 天津大学 A kind of SPR phase measuring method for measuring nanoscale double-layer metal film thickness
CN208060025U (en) * 2018-04-16 2018-11-06 西北工业大学 Realize the light path of two width interference patterns of the polarization state and phase that measure arbitrary beam
CN108761624A (en) * 2018-09-03 2018-11-06 中国科学院武汉物理与数学研究所 The wedge-shaped polarization splitting prism of big incidence field angle and ultrahigh extinction ratio
CN110137783A (en) * 2019-05-21 2019-08-16 苏州十一方生物科技有限公司 A kind of intensity modulated Terahertz parameter source device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112834037A (en) * 2020-12-30 2021-05-25 中国科学院西安光学精密机械研究所 Coherent dispersion spectrum imaging method and device for realizing large optical path difference and high stability

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Application publication date: 20201016