WO2018193744A1 - Three-dimensional manufacturing device - Google Patents

Three-dimensional manufacturing device Download PDF

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Publication number
WO2018193744A1
WO2018193744A1 PCT/JP2018/008939 JP2018008939W WO2018193744A1 WO 2018193744 A1 WO2018193744 A1 WO 2018193744A1 JP 2018008939 W JP2018008939 W JP 2018008939W WO 2018193744 A1 WO2018193744 A1 WO 2018193744A1
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WO
WIPO (PCT)
Prior art keywords
region forming
radiation shield
modeling
electron beam
powder material
Prior art date
Application number
PCT/JP2018/008939
Other languages
French (fr)
Japanese (ja)
Inventor
恭諒 丸小
武士 物種
Original Assignee
三菱電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱電機株式会社 filed Critical 三菱電機株式会社
Priority to JP2019513260A priority Critical patent/JP6639735B2/en
Publication of WO2018193744A1 publication Critical patent/WO2018193744A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10Sintering only
    • B22F3/105Sintering only by using electric current other than for infrared radiant energy, laser radiation or plasma ; by ultrasonic bonding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/12Both compacting and sintering
    • B22F3/16Both compacting and sintering in successive or repeated steps
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10Processes of additive manufacturing
    • B29C64/141Processes of additive manufacturing using only solid materials
    • B29C64/153Processes of additive manufacturing using only solid materials using layers of powder being selectively joined, e.g. by selective laser sintering or melting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/295Heating elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00Apparatus for additive manufacturing; Details thereof or accessories therefor
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/25Process efficiency

Definitions

  • the present application relates to a three-dimensional modeling apparatus that manufactures a three-dimensional modeled object by repeating a process of selectively solidifying a powder material made of metal particles, for example.
  • a three-dimensional shaped object is manufactured by irradiating a predetermined area of the powder layer formed of the powder material with a high-energy beam and selectively melting and solidifying the powder material by solidification or sintering.
  • the high energy beam a laser or an electron beam is used.
  • an electron beam it is possible to cope with a high melting point alloy and has a merit that a scanning speed is faster (for example, refer to Non-Patent Document 1).
  • a three-dimensional modeling apparatus an apparatus that irradiates an electron beam onto a material arranged on a work area while supplying a reactive gas has been proposed (for example, see Patent Document 1). Further, a manufacturing apparatus for forming a three-dimensional layered object by repeating the process of modifying the surface by irradiating the latest sintered layer with an electron beam in a rare gas atmosphere has been proposed (for example, Patent Document 2).
  • Non-Patent Document 1 when an electron beam is used to melt and solidify a powder material, the powder material is negatively charged due to the interaction with the electron beam, and the individual powders are coulomb repulsive. Therefore, it is necessary to preheat the powder material of the powder layer to prevent scattering.
  • the preheated powder material has a low electric resistance and is not charged to conduct the charge generated by the interaction with the electron beam, so that the above scattering does not occur. Therefore, in an apparatus for making a three-dimensional object using an electron beam, it has been proposed to raise the temperature of the powder material in advance by changing the beam current (beam output) and beam scanning speed of the electron beam (for example, Patent Document 3).
  • the present application has been made to solve the above-described problems, and provides a three-dimensional modeling apparatus that can easily sufficiently preheat a powder material even when a large three-dimensional model is manufactured. Is.
  • the three-dimensional modeling apparatus disclosed in the present application is a three-dimensional modeling apparatus that manufactures a three-dimensional structure by repeating a process of selectively solidifying a powder material forming a powder layer by irradiation with an electron beam.
  • FIG. 1 is a schematic diagram showing a three-dimensional modeling apparatus in Embodiment 1.
  • FIG. 1 is a perspective view showing an outline of a radiation shield according to Embodiment 1.
  • FIG. 3 is a plan view showing a frame of a radiation shield according to Embodiment 1.
  • FIG. 5 is a diagram for explaining the operation of the three-dimensional modeling apparatus in the first embodiment.
  • 6 is a perspective view of a radiation shield according to a modification of the first embodiment.
  • FIG. It is a perspective view which shows the outline
  • FIG. 1 is a perspective view showing an outline of a radiation shield according to Embodiment 1.
  • FIG. 3 is a plan view showing a frame of a radiation shield according to Embodiment 1.
  • FIG. 5 is a diagram for explaining the operation of the three-dimensional modeling apparatus in the first embodiment.
  • 6 is a perspective view of a radiation shield according to a modification of the first embodiment.
  • FIG. It is
  • FIG. 10 is a schematic diagram showing a three-dimensional modeling apparatus in a fourth embodiment.
  • FIG. 10 is a schematic diagram illustrating a three-dimensional modeling apparatus in a fifth embodiment.
  • FIG. 1 is a schematic diagram illustrating a three-dimensional modeling apparatus according to Embodiment 1.
  • an electron gun 2 that irradiates an electron beam EB1 downward, that is, an electron beam irradiation means, is provided above the vacuum chamber 1, and a ceiling surface 1b of the vacuum chamber 1, that is, a modeling region forming unit, An opening (not shown) through which the electron beam EB1 passes is provided on the opposite surface.
  • the electron gun 2 faces the modeling region forming unit 3 formed on the floor surface 1 a of the vacuum chamber 1, and can irradiate the inside of the modeling region forming unit 3 with the electron beam EB 1.
  • the modeling region forming unit 3 has a square horizontal section of 90 mm ⁇ 90 mm, for example, and the inside thereof becomes a modeling region of a three-dimensional modeled object, and a powder layer 7 made of a powder material is formed.
  • the powder material is a powdery material that solidifies to form a three-dimensional structure, and is irradiated with the electron beam EB1 from the electron gun 2 to be melted or solidified or sintered to become a solidified body 8.
  • the powder material constituting the powder layer 7 is, for example, a powder material of metal particles such as cobalt chromium molybdenum alloy or titanium alloy, but is not limited thereto, and can be melted, solidified or sintered by irradiation with an electron beam. Anything is acceptable.
  • the powder layer 7 is formed by supplying a predetermined amount of powder material while the powder material supply unit 93 moves on and around the modeling region forming unit 3 and laying the powder material in layers inside the modeling region forming unit 3. It is what is done.
  • the powder material supplied by the powder material supply unit 93 is stored in a powder material storage unit 92 that is, for example, a rectangular parallelepiped box.
  • the powder material storage unit 92 drops the powder material and supplies the powder material to the powder material supply unit 93.
  • the position where the modeling region forming unit 3 is provided is not limited to the floor surface 1a, but any surface that faces the electron gun 2.
  • a work table (not shown) may be installed on the floor surface 1a, and the modeling area forming unit 3 may be provided on the upper surface.
  • FIG. 1 shows a state in which the modeling table 5 is lowered from the floor surface 1a by two layers of the powder layer 7, the first powder layer 7 below the broken line, and the second powder above the broken line.
  • Layer 7 The first powder layer 7 is formed thick to cover the periphery of the pedestal 4, but the second and subsequent powder layers 7 are formed with a thickness of about several tens of ⁇ m.
  • the pedestal 4 in a heated state is embedded in the first powder layer 7.
  • the pedestal 4 serves as a base portion of the three-dimensional structure and functions as a preheating member for the powder material.
  • the material of the pedestal 4 is not particularly limited as long as the temperature is raised by irradiation with an electron beam, but a material having a large heat capacity is preferable.
  • a radiation shield 10 that is supported at a predetermined height by a support jig 91 and covers the entire modeling region forming unit 3 is provided above the modeling region forming unit 3.
  • the radiation shield 10 has a trapezoidal shape that expands toward the lower side, that is, closer to the modeling region forming portion 3, and the cross-sectional area in the direction parallel to the floor surface 1a increases toward the lower side.
  • the height at which the radiation shield 10 is installed is not particularly limited as long as it does not hinder the movement of the powder material supply unit 93.
  • the radiation shield 10 is provided with an opening 10c facing the electron gun 2 at the upper end, an opening 10b facing the modeling region forming portion 3 at the lower end, and a hollow portion 10a through which the electron beam EB1 passes from the upper end to the lower end. Therefore, the radiation shield 10 does not prevent the irradiation of the electron beam EB1 from the electron gun 2 to the modeling region forming unit 3.
  • FIG. 2 is a perspective view showing an outline of the radiation shield according to the first embodiment
  • FIG. 3 is a plan view showing an upper frame of the radiation shield
  • FIG. 4 is a metal plate constituting a side portion of the radiation shield. That is, it is a figure which shows a plate-shaped member.
  • the radiation shield 10 is disposed at the upper end of the radiation shield 10, and a first side surface portion 13 and a second side surface portion 14 are arranged on each side of a rectangular frame 12 constituting the upper surface 11 of the radiation shield 10.
  • the first side surface portion 13 and the second side surface portion 14 are each attached to the frame 12 by screws 19 in pairs.
  • the first side surface portion 13 extends downward from the upper surface 11 of the radiation shield 10, that is, in the direction of the modeling region forming portion 3, and is attached to the upper surface 11 at a right angle.
  • the second side surface portion 14 extends downward from the upper surface 11 and is attached to the upper surface 11 at an angle of 45 °.
  • the second side surface portion 14 forms an angle of 45 ° with respect to the upper surface 11 of the radiation shield 10
  • the radiation shield 10 and the hollow portion 10a are shaped to expand downward.
  • the second side surface portion 14 forms an angle of 45 ° with respect to the upper surface 11.
  • the second side surface portion 14 The angle formed with respect to the upper surface 11 is not limited to 45 °, and may be an acute angle.
  • the first side surface portion 13 is attached at a right angle to the upper surface 11, but the first side surface portion 13 may be attached at an acute angle to the upper surface 11 in the same manner as the second side surface portion 14. Good.
  • the frame 12 has an opening 10 c having a size of, for example, 38 mm ⁇ 38 mm formed in the approximate center. Further, the frame 12 is provided with bent portions 12b at both left and right ends in the figure. The bent portion 12b is bent downward at an angle of 45 ° with respect to the upper surface 11, and the second side surface portion 14 is attached to the upper surface side. Also, two screw holes 12c through which the screws 19 pass are formed in the bent portion 12b.
  • the first side surface portion 13 is formed by overlapping the metal plates 131 shown in FIG. 4A in triplicate, and screw holes 13c of the respective metal plates 131 and screw holes formed in the side portions of the frame 12 (not shown). It is attached to the frame 12 with a screw 19 penetrating through.
  • the metal plate 131 has a trapezoidal shape in plan view, and has, for example, an upper side 13a having a length of 47 mm and an angle of 135 ° with the upper side 13a, for example, a hypotenuse 13b having a length of 74 mm.
  • the oblique side 13 b forms an angle of 45 ° downward with respect to the upper surface 11.
  • the second side surface portion 14 is formed by overlapping the metal plates 141 shown in FIG. 4B in a triple manner, and is attached to the frame 12 by screws 19 passing through the screw holes 14c of the respective metal plates 141 and the screw holes 12c of the frame 12. It is attached.
  • the metal plate 141 has a rectangular shape in plan view, and has, for example, a short side 14a having a length of 54 mm and a long side 14b having a length of 74 mm, for example.
  • the material of the metal plate 131 and the metal plate 141 is, for example, SUS304, and the thickness is 0.5 mm to 1 mm.
  • a space of about 2 mm is provided between the metal plate 131 and the metal plate 141 adjacent to each other with a washer or the like interposed therebetween.
  • the number and interval of the metal plates 131 and the metal plates 141 to be stacked are not limited to the above, and the plurality of metal plates 131 and the metal plates 141 may be stacked at intervals.
  • FIG. 5 is a diagram for explaining the operation of the three-dimensional modeling apparatus in the first embodiment.
  • a powder material is spread over the modeling region forming unit 3 to form the first powder layer 7, and then the pedestal 4 is embedded on the upper surface of the first powder layer 7.
  • a preheating electron beam EB2 which is an electron beam having an energy density smaller than that of the electron beam EB1 for melting and solidifying the powder material, as shown in FIG.
  • heat radiation H2 is generated above the pedestal 4, and heat transfer H1 including heat conduction and heat radiation is generated laterally and below the pedestal 4. Since the radiation shield 10 covers the entire modeling region forming unit 3 as described above, most of the upward heat radiation H2 is collected and heated.
  • the heat transfer H1 raises the temperature of the powder layer 7 and the modeling region forming unit 3 surface.
  • the heat radiation H2 to the first powder layer 7 and the base 4 is generated from the heated radiation shield 10 as shown in FIG. .
  • heat transfer H1 to the first powder layer 7 and the pedestal 4 is generated from the surface of the modeling region forming portion 3 that has been heated.
  • the first powder layer 7 is heated by heat transfer H ⁇ b> 1 from the pedestal 4, heat transfer H ⁇ b> 1 from the surface of the modeling region forming unit 3, and heat radiation H ⁇ b> 2 from the radiation shield 10.
  • the second powder layer 7 is formed in the same manner as described above.
  • the first powder layer 7, the surface of the modeling region forming portion 3, and the radiation shield 10 are in a sufficiently heated state, and therefore the first powder layer 7 and Heat transfer H1 is generated from the pedestal 4 to the second powder layer 7, and heat radiation H2 is generated from the radiation shield 10 to the second powder layer 7.
  • the second powder layer 7 is preheated by these heat transfer H1 and heat radiation H2 to a temperature at which the powder material does not scatter even when irradiated with the preheating electron beam EB2. Thereafter, as shown in FIG.
  • the preheating electron beam EB2 is irradiated onto the second powder layer 7, and the two layers are heated to a temperature at which no scattering occurs even when the electron beam EB1 for melting and solidifying the powder material is irradiated. Preheat the powder layer 7 of the eye.
  • the heat transfer H1 from the first powder layer 7 and the pedestal 4 and the heat radiation H2 from the radiation shield 10 are also generated during preheating by the preheating electron beam EB2. That is, the second powder layer 7 is irradiated with the preheating electron beam EB2, in addition to the pedestal 4, the first powder layer 7 and the heat transfer H1 from the surface of the modeling region forming portion 3, and the radiation shield 10. It is also preheated by the heat radiation H2.
  • the electron beam EB1 is selectively irradiated to the powder material of the powder layer 7, and the powder material in a desired range is melted and solidified to be solidified. 8 is generated.
  • the modeling table 5 is further lowered, and the formation of the third and subsequent powder layers 7, preheating and generation of the solidified body are repeated in the same manner as in the case of the second layer.
  • the temperature of the pedestal 4 embedded in the first powder layer 7 is raised by irradiating the preheating electron beam EB2 emitted from the electron gun 2.
  • the pedestal 4 that has been heated in advance with a heater or the like may be embedded in the first powder layer 7.
  • the state in which the heated pedestal 4 is embedded in the first powder layer 7 continues for a certain time or more, and the radiation shield 10 is heated by the heat radiation H2 from the pedestal 4, and the heat from the pedestal 4 is increased.
  • the powder layer 7 may be preheated by the movement H1 and the heat radiation H2 from the radiation shield 10 whose temperature has been raised.
  • the radiation shield 10 is configured such that the first side surface portion 13 and the second side surface portion 14 are stacked with the three metal plates 131 and the metal plates 141 being spaced apart from each other.
  • the thermal resistance between each metal plate 131 and between each metal plate 141 is large. For this reason, the temperature rise of the metal plate 131 and the metal plate 141 closest to the modeling region forming unit 3 is faster than the case where the metal plate 131 and the metal plate 141 are stacked without a gap.
  • the heat capacity of the first side surface portion 13 and the second side surface portion 14 is larger than when only one metal plate is used, and the temperature of the radiation shield 10 is maintained at a high temperature for a longer time.
  • the temperature rise time and the temperature rise rate of the base 4 when the radiation shield 10 was not provided and when the radiation shield 10 was provided were measured.
  • the measurement is performed in a state where the pedestal 4 is embedded in the upper surface of the first powder layer 7 formed inside the modeling region forming unit 3 as in FIG. 5A and attached to the lower portion of the pedestal 4.
  • the temperature at the mounting position of the thermocouple was defined as the temperature of the base 4.
  • the time required to raise the temperature of the pedestal 4 to 850 ° C. is 1200 seconds (temperature increase rate: 0.69 ° C./second), whereas the radiation shield 10 is provided.
  • the radiation shield 10 is provided.
  • the maximum temperature difference when the radiation shield 10 is provided is 160 ° C., and the temperature unevenness is reduced by 90 ° C. This is considered to be because the effect of recovery and reuse of the heat radiation H2 by the radiation shield 10 is large at the end portion where the loss due to the heat radiation H2 is larger than that at the center, and the temperature unevenness is reduced.
  • the radiation shield 10 when raising the temperature of the pedestal 4 has been described here, the same applies to the case where the powder layer 7 is preheated. Since the radiation shield 10 covers the entire modeling region forming unit 3 on which the powder layer 7 is formed, the radiating base 2 and the modeling region forming unit 3 and the heat radiation H2 emitted upward from the surface of the powder layer 7 are generated. In addition to the recovery, the temperature of the recovered heat radiation H2 is raised to generate the heat radiation H2 to the powder layer 7, which contributes to preheating of the powder layer 7 and reduction of temperature unevenness. In particular, when the three-dimensional structure to be manufactured is large and the surface area of the modeling region forming part 3 and the powder layer 7 is large, the upward radiation of heat is also large, so the radiation shield 10 is considered to contribute greatly.
  • the radiation shield 10 Since the heat radiation of the modeling region forming unit 3 and the powder layer 7 is emitted in all directions and there is also heat radiation that leaks from the space between the radiation shield 10, the radiation shield 10 is formed as much as possible in the modeling region forming unit 3. It is preferable to arrange them close to each other. As described above, the height of the radiation shield 10 needs to be in a range in which the powder material supply unit does not hinder the movement of the 93.
  • the radiation shield 10 is replaced by a support member capable of adjusting the height instead of the support jig 91. You may make it the structure which supports.
  • the radiation shield 10 when forming the powder layer 7, the radiation shield 10 is arranged so as not to hinder the movement of the powder material supply unit 93, and in other cases, the radiation shield 10 is arranged as low as possible to form the modeling region forming unit. More heat radiation H2 can be recovered by approaching 3. Further, since the heat radiation H2 from the radiation shield 10 depends on the heat radiation property of the surface, the lower surface of the metal plate 131 and the metal plate 141, that is, the surface facing the modeling region forming portion 3 is subjected to alumite processing so that the radiation shield. The heat dissipation of 10 may be improved.
  • Embodiment 1 even when a large three-dimensional structure is manufactured, sufficient preheating of the powder material can be easily performed. More specifically, the pedestal heated by the preheating electron beam, the heat radiation emitted upward from the surface of the modeling region forming part heated by the heat transfer from the pedestal, by a radiation shield covering the entire modeling region forming part Even when there is a risk of increasing heat loss due to upward heat radiation, especially when manufacturing a large three-dimensional structure for recovery and reuse, the temperature drop of the powder layer due to heat radiation is suppressed. Sufficient preheating of the powder layer is facilitated.
  • the energy density of the preheating electron beam can be made smaller than before. More specifically, in the second and subsequent powder layers, in addition to the preheating electron beam irradiation, heat transfer from the pedestal, the first powder layer and the modeling region forming part surface, and heat from the radiation shield Since it is also preheated by radiation, the energy density of the preheating electron beam can be made smaller than before.
  • sufficient preheating of the powder layer can be performed more stably. More specifically, the heat radiation from the end portion where the loss due to heat radiation is larger is recovered by the radiation shield and reused to reduce the temperature unevenness between the center portion and the end portion. Preheating can be performed more stably. In particular, the larger the three-dimensional structure to be manufactured, the greater the temperature unevenness, and there is a risk that sufficient preheating will not be performed at the end, but sufficient preheating is more stable by reducing the temperature unevenness as described above. Can be done.
  • the time during which the radiation shield contributes to the preheating of the powder layer can be made longer. More specifically, the heat capacity of the first side surface portion and the second side surface portion is increased by overlapping the metal plates constituting the first side surface portion and the second side surface portion of the radiation shield in triplicate. Therefore, the high temperature state of the heated radiation shield can be maintained, and the time that contributes to the preheating of the powder layer by thermal radiation can be made longer.
  • the effect of suppressing the temperature drop of the powder layer by the radiation shield can be obtained earlier.
  • the metal plates constituting the first side surface portion and the second side surface portion of the radiation shield are overlapped with a space between each other, so that the metal plates are brought into contact with each other rather than the metal plates in contact with each other. Since the thermal resistance between the metal plate and the forming area forming part is increased, the temperature rise rate of the metal plate is faster, and the heat radiation from the radiation shield starts earlier, thereby suppressing the temperature drop of the powder layer. It can be obtained earlier.
  • the installation space for the radiation shield can be reduced. More specifically, by attaching the second side surface portion at an angle of 45 ° to the upper surface of the radiation shield, the radiation shield is shaped to expand downward, so that the modeling region forming portion Since the cross-sectional area in the direction parallel to the floor of the vacuum chamber is increased as it is closer, the lower part of the radiation shield is secured while ensuring the cross-sectional area necessary to cover the entire forming area forming part in the lower part, thereby reducing the radiation shield.
  • the installation space can be suppressed.
  • FIG. 6 is a perspective view of a radiation shield according to a modification of the first embodiment.
  • the radiation shield 101 is obtained by forming an opening 101 a corresponding to the hollow portion 10 a of the radiation shield 10 on a flat plate 121 that covers the entire modeling region forming portion 3.
  • the flat plate 121 collects heat radiation from the pedestal 4 and the like and raises the temperature. After the temperature rise, the flat plate 121 generates heat radiation downward to contribute to preheating of the powder layer 7. Since the radiation shield 101 does not have a side surface portion, heat radiation from the pedestal 4 and the like is likely to leak as compared with the radiation shield 10 of the first embodiment, but the configuration is very simple.
  • Embodiment 2 is demonstrated based on FIG.
  • the same or corresponding parts as those in FIGS. 1 to 4 are denoted by the same reference numerals, and the description thereof is omitted.
  • the second embodiment is different from the first embodiment in the shape of the radiation shield.
  • FIG. 7 is a perspective view showing an outline of the radiation shield according to the second embodiment.
  • the radiation shield 20 has rectangular frames 22A to 22C having different sizes arranged in parallel to each other, and the first side surface constituting members 23A to 23C and the second side surface constituting members 24A to 24C are screwed to the respective frames.
  • the first side surface portion 23 and the second side surface portion 24 are configured by being attached by 29 without a gap.
  • a hollow portion (not shown) is formed in the radiation shield 20 from the upper end to the lower end.
  • the smallest frame 22A among the frames 22A to 22C is disposed at the upper end portion of the radiation shield 20 and constitutes the upper surface 21 of the radiation shield 20.
  • a first side surface constituting member 23A and a second side surface constituting member 24A are attached to the frame 22A.
  • the first side surface constituting member 23 ⁇ / b> A extends downward from the upper surface 21 of the radiation shield 20, that is, in the direction of the modeling region forming unit 3, and is attached to the upper surface 21 at a right angle.
  • the second side surface component member 24 ⁇ / b> A extends downward from the upper surface 21 and is attached to the upper surface 21 at an angle of 30 °.
  • the intermediate size frame 22B is disposed below the frame 22A by the height of the first side surface component member 23A, and the first side surface component member 23B and the second side surface component member 24B are attached thereto.
  • the first side surface constituting member 23B is attached at a right angle to the frame 22B
  • the second side surface constituting member 24B is attached at an angle of 45 ° to the frame 22B.
  • the frame 22B is arranged in parallel to the frame 22A and is also parallel to the upper surface 21, the first side surface constituting member 23B is also perpendicular to the upper surface 21, and the second side surface constituting member 24B is The upper surface 21 also forms a 45 ° angle.
  • the largest frame 22C is disposed below the frame 22B by the height of the first side surface constituting member 23B, and the first side surface constituting member 23C and the second side surface constituting member 24C are attached thereto.
  • the first side surface constituting member 23C is attached at a right angle to the frame 22C
  • the second side surface constituting member 24C is attached at an angle of 60 ° to the frame 22C.
  • the frame 22C is arranged in parallel with the frame 22A and is also parallel to the upper surface 21, the first side surface constituting member 23C is also perpendicular to the upper surface 21, and the second side surface constituting member 24C is
  • the upper surface 21 also forms an angle of 60 °.
  • the angles formed by the second side surface constituting members 24A to 24C and the upper surface 21 are 30 °, 45 °, and 60 °, and gradually increase toward the bottom.
  • a bent portion is provided like the frame 12 of the first embodiment, and the upper surface of the bent portion is bent downward.
  • the second side surface constituting members 24A to 24C may be attached to each other.
  • the first side surface constituting members 23A to 23C and the second side surface constituting members 24A to 24C are constituted by three metal plates which are overlapped with each other with a spacing of 2 mm, as in the first embodiment. Yes.
  • the temperature raising time and the temperature raising rate of the base 4 when the radiation shield 20 was provided were measured in the same manner as in the first embodiment.
  • the time required to raise the temperature of the pedestal 4 to 850 ° C. is 610 seconds (temperature increase rate: 1.31 ° C./second), and the radiation shield 10 of the first embodiment is provided. It was confirmed that the time was further shortened by 30 seconds.
  • the maximum temperature difference was 75 ° C., and it was confirmed that the temperature unevenness was further reduced by 85 ° C. compared to the case where the radiation shield 10 was provided.
  • the angle formed between the second side surface component 24C closest to the modeling region forming portion 3 and the upper surface 21 of the radiation shield 20 is 60 °, and the second side surface portion 14 and the upper surface 11 of the radiation shield 10 This is considered to be because it is larger than 45 ° which is an angle formed by. That is, as the angle formed with the upper surface of the radiation shield is larger (closer to the right angle), the heat radiation H2 leaking to the side from the gap between the radiation shield 10 or the radiation shield 20 and the pedestal 4 decreases, and the heat radiation H2 from the pedestal 4 is reduced. It is thought that the rate of temperature increase was further increased because more collection and reuse were possible.
  • the temperature drop at the end is further reduced, and the temperature unevenness is also reduced. Conceivable.
  • the radiation shield 20 covers the modeling area formation part 3 whole in which the powder layer 7 is formed, it is thought that the same effect is acquired also when the powder layer 7 is preheated. Others are the same as those in the second embodiment, and the description thereof is omitted.
  • the temperature rise rate during preheating of the powder layer 7 can be further increased, and temperature unevenness can be further reduced. More specifically, the angle formed by the second side surface component member with respect to the upper surface of the radiation shield is increased stepwise to reduce heat radiation leaking between the modeling region forming portion and the radiation shield. Therefore, it is possible to collect and reuse more heat radiation particularly from the end, further increasing the rate of temperature rise and further reducing temperature unevenness.
  • FIG. 8 is a perspective view showing an outline of the radiation shield according to the third embodiment.
  • the radiation shield 30 includes side surfaces 33 that form paraboloids as a whole by arranging frames 32A to 32C having different sizes in parallel to each other and attaching a plurality of side surface members 33A with screws 39 without gaps. Is.
  • a hollow portion (not shown) is formed in the radiation shield 30 from the upper end to the lower end.
  • the smallest frame 32A among the frames 32A to 32C is arranged at the upper end of the radiation shield 30 and constitutes the upper surface 31 of the radiation shield 30.
  • a side surface member 33A is attached to the frame 32A, and the side surface member 33A extends downward from the upper surface 31 of the radiation shield 30, that is, in the direction of the modeling region forming portion 3.
  • the intermediate-sized frame 32B is disposed below the frame 32A by the height of the side surface component 33A, and the side surface component 33B is attached thereto.
  • the largest frame 32C is disposed below the frame 32B by the height of the side surface component 33B, and the side surface component 33C is attached thereto.
  • Each of the side surface constituting members 33A to 33C is composed of three metal plates which are bent so as to form a parabolic surface as a whole of the side surface portion 33 and are overlapped with each other with an interval of 2 mm.
  • the side surface constituting members 33A to 33C are attached so that the lower surface of the side surface portion 33, that is, the surface facing the modeling region forming portion 3 forms a paraboloid. An acute angle is formed, and the angle is larger toward the lower side. For this reason, the angle between the upper surface 31 and the side surface component 33B is larger than that of the side surface member 33B, and the side surface member 33C is larger than the side surface member 33B.
  • Others are the same as those in the second embodiment, and the description thereof is omitted.
  • FIG. 9 is a schematic diagram illustrating a three-dimensional modeling apparatus according to the fourth embodiment.
  • the radiation shield 40 is provided with an opening 40c facing the electron gun 2 at the upper end and an opening 40b facing the modeling region forming unit 3 at the lower end, and a hollow through which the electron beam EB1 passes.
  • the part 40a is formed inside from the upper end to the lower end.
  • the radiation shield 40 has a trapezoidal shape that becomes narrower as viewed from the side, that is, as it is farther from the modeling region forming unit 3, and as it extends upward, it is cut in a direction parallel to the floor surface 1 a. The area is getting smaller. Further, the height of the opening 40b at the lower end is the same as that of the opening 10b of the radiation shield 10, but the side surface of the radiation shield 40 extends above the radiation shield 10 and the height of the opening 40c at the upper end. Is higher than the opening 10 c at the upper end of the radiation shield 10.
  • the distance D2 between the opening 40c at the upper end and the ceiling surface 1b of the vacuum chamber 1 is considered to be an example where the distance D1 between the opening 40b at the lower end and the powder layer 7 is equal to or less. It is done.
  • the height of the opening on the modeling region forming unit side is kept low and provided on the side opposite to the modeling region forming unit.
  • the height of the opening was increased, and the cross-sectional area of the opening on the side opposite to the modeling region forming part was further reduced. For this reason, while maintaining the amount of heat radiation recovered from the modeling region, the recovered heat radiation is prevented from leaking from the opening on the side opposite to the modeling region forming part, and the powder layer is preheated more efficiently. It can be carried out.
  • FIG. 10 is a schematic diagram illustrating a three-dimensional modeling apparatus according to the fifth embodiment.
  • the radiation shield 50 is provided with an opening 50c facing the electron gun 2 at the upper end and an opening 50b facing the modeling region forming unit 3 at the lower end, and a hollow through which the electron beam EB1 passes.
  • the part 50a is formed inside from the upper end to the lower end.
  • the radiation shield 50 has a trapezoidal shape that becomes narrower as viewed from the upper side, that is, as it is farther from the modeling region forming unit 3, and as it extends upward, it is cut in a direction parallel to the floor surface 1 a. The area is getting smaller. Further, the side surface of the radiation shield 50 extends upward from the radiation shield 10, the upper end opening 50 c comes into contact with the ceiling surface 1 b of the vacuum chamber 1, and the gap between the opening 50 c and the ceiling surface 1 b is closed. Yes. Others are the same as those in the first embodiment, and thus the description thereof is omitted.
  • the opening provided on the side opposite to the modeling area forming part is brought into contact with the ceiling surface of the vacuum chamber, and the gap between the opening provided on the side opposite to the modeling area forming part and the ceiling surface is closed. Therefore, while maintaining the amount of heat radiation recovered from the modeling area, the recovered heat radiation is more reliably suppressed from leaking from the opening on the side opposite to the modeling area, and the powder layer is preheated more efficiently. It can be carried out.

Abstract

Provided is a three-dimensional manufacturing device that can easily carry out sufficient preheating of powder material even when manufacturing large three-dimensional objects. A three-dimensional manufacturing device 100 is provided with: an electron gun 2 that irradiates powder material with an electron beam EB1; a manufacturing region forming unit 3 that is provided on the bottom surface 1a of an vacuum chamber 1 and wherein the powder material is spread and a powder layer 7 is formed; a pedestal 4 that is embedded in the powder layer 7 in an increased temperature state and preheats the powder material by thermal migration; and a radiation shield 10 that covers the manufacturing region forming unit 3 and is heated by thermal radiation from the pedestal 4. The powder material is preheated by thermal migration from the manufacturing region forming unit 3 and the radiated heat from the heated radiation shield 10.

Description

三次元造形装置3D modeling equipment
 本願は、例えば金属粒体からなる粉末材料を選択的に固化させる工程を繰り返すことにより三次元形状の造形物を製造する三次元造形装置に関するものである。 The present application relates to a three-dimensional modeling apparatus that manufactures a three-dimensional modeled object by repeating a process of selectively solidifying a powder material made of metal particles, for example.
 粉末材料によって形成された粉末層の所定領域に高エネルギーのビームを照射して、粉末材料を選択的に溶融凝固又は焼結させて固化させる工程を繰り返すことにより三次元形状の造形物を製造するものがある。高エネルギーのビームとしては、レーザー又は電子ビームが用いられるが、電子ビームを用いる場合、高融点合金にも対応可能であり、スキャン速度がより速いというメリットがある(例えば、非特許文献1参照)。このような三次元造形装置としては、従来、反応性ガスを供給しながら作業領域上に配置された材料に電子ビームを照射する装置が提案されていた(例えば、特許文献1参照)。また、希ガス雰囲気中で電子ビームを最新の焼結層に照射して、表面を改質させる工程を繰り返すことで三次元形状の積層造形物を形成する製造装置が提案されていた(例えば、特許文献2参照)。 A three-dimensional shaped object is manufactured by irradiating a predetermined area of the powder layer formed of the powder material with a high-energy beam and selectively melting and solidifying the powder material by solidification or sintering. There is something. As the high energy beam, a laser or an electron beam is used. However, when an electron beam is used, it is possible to cope with a high melting point alloy and has a merit that a scanning speed is faster (for example, refer to Non-Patent Document 1). . As such a three-dimensional modeling apparatus, an apparatus that irradiates an electron beam onto a material arranged on a work area while supplying a reactive gas has been proposed (for example, see Patent Document 1). Further, a manufacturing apparatus for forming a three-dimensional layered object by repeating the process of modifying the surface by irradiating the latest sintered layer with an electron beam in a rare gas atmosphere has been proposed (for example, Patent Document 2).
 一方、非特許文献1に示されているように、粉末材料を溶融凝固するために電子ビームを用いる場合、電子ビームとの相互作用により粉末材料が負に帯電し、個々の粉末同士がクーロン斥力により反発して飛散する虞があるため、粉末層の粉末材料を予熱して飛散を防止する必要がある。予熱された粉末材料は電気抵抗が低下し、電子ビームとの相互作用により生じる電荷を導通させるために帯電しなくなり、上記のような飛散は起きなくなる。そこで、電子ビームを用いて三次元物体を作る装置において、電子ビームのビーム電流(ビーム出力)及びビーム走査速度を変化させることで粉末材料の温度を予め上昇させることが提案されている(例えば、特許文献3)。 On the other hand, as shown in Non-Patent Document 1, when an electron beam is used to melt and solidify a powder material, the powder material is negatively charged due to the interaction with the electron beam, and the individual powders are coulomb repulsive. Therefore, it is necessary to preheat the powder material of the powder layer to prevent scattering. The preheated powder material has a low electric resistance and is not charged to conduct the charge generated by the interaction with the electron beam, so that the above scattering does not occur. Therefore, in an apparatus for making a three-dimensional object using an electron beam, it has been proposed to raise the temperature of the powder material in advance by changing the beam current (beam output) and beam scanning speed of the electron beam (for example, Patent Document 3).
特表2011-506761号公報Special table 2011-506761 gazette 特開2015-30872号公報Japanese Patent Laying-Open No. 2015-30872 特表2010-526694号公報Special table 2010-526694
 しかしながら、特許文献3のように電子ビームのビーム出力等のパラメータを変化させて予熱を行う方法では、製造する三次元造形物の大きさが大きく、粉末層の表面積も大きい場合、粉末層表面からの熱輻射による大きな熱損失のために予熱が不十分となる虞がある。これは、予熱の段階では粉末材料を溶融凝固又は焼結させるような高エネルギーの電子ビームを使用することができずビーム出力に上限があるため、熱輻射による熱損失をビーム出力の調整でカバーすることは困難であるためである。 However, in the method of performing preheating by changing parameters such as the beam output of an electron beam as in Patent Document 3, if the size of the three-dimensional structure to be manufactured is large and the surface area of the powder layer is large, the surface of the powder layer is There is a risk that preheating will be insufficient due to large heat loss due to heat radiation. This is because the high-energy electron beam that melts, solidifies, or sinters the powder material cannot be used in the preheating stage, and the beam output has an upper limit, so heat loss due to heat radiation is covered by adjusting the beam output. This is because it is difficult to do.
 本願は、上述のような問題点を解決するためになされたもので、大型の三次元造形物を製造する場合でも、粉末材料の十分な予熱を容易に行うことができる三次元造形装置を得るものである。 The present application has been made to solve the above-described problems, and provides a three-dimensional modeling apparatus that can easily sufficiently preheat a powder material even when a large three-dimensional model is manufactured. Is.
 本願に開示される三次元造形装置は、粉末層を形成する粉末材料を電子ビームの照射によって選択的に固化させる工程を繰り返すことにより三次元造形物を製造する三次元造形装置であって、粉末材料に電子ビームを照射する電子ビーム照射手段と、電子ビーム照射手段に対向する面に設けられ、粉末材料が敷き詰められて粉末層が形成される造形領域形成部と、昇温した状態で粉末層に埋め込まれ、熱移動により粉末材料を予熱する予熱部材と、造形領域形成部を覆い、予熱部材からの熱輻射により昇温するシールド部材とを備え、粉末材料は、予熱部材からの熱移動及び昇温したシールド部材からの熱輻射により予熱されるものである。 The three-dimensional modeling apparatus disclosed in the present application is a three-dimensional modeling apparatus that manufactures a three-dimensional structure by repeating a process of selectively solidifying a powder material forming a powder layer by irradiation with an electron beam. An electron beam irradiating means for irradiating the material with an electron beam, a modeling region forming portion provided on a surface opposite to the electron beam irradiating means, on which a powder material is spread and a powder layer is formed; Embedded in, and includes a preheating member that preheats the powder material by heat transfer, and a shield member that covers the modeling region forming part and raises the temperature by heat radiation from the preheating member. It is preheated by heat radiation from the shield member whose temperature has been raised.
 本願に開示される三次元造形装置によれば、大型の三次元造形物を製造する場合でも、粉末材料の十分な予熱を容易に行うことができる。 According to the three-dimensional modeling apparatus disclosed in the present application, sufficient preheating of the powder material can be easily performed even when a large three-dimensional model is manufactured.
実施の形態1における三次元造形装置を示す概略図である。1 is a schematic diagram showing a three-dimensional modeling apparatus in Embodiment 1. FIG. 実施の形態1に係る輻射シールドの概要を示す斜視図である。1 is a perspective view showing an outline of a radiation shield according to Embodiment 1. FIG. 実施の形態1に係る輻射シールドの枠を示す平面図である。3 is a plan view showing a frame of a radiation shield according to Embodiment 1. FIG. 実施の形態1に係る輻射シールドの側面部を構成する金属板を示す図である。It is a figure which shows the metal plate which comprises the side part of the radiation shield which concerns on Embodiment 1. FIG. 実施の形態1における三次元造形装置の動作を説明する図である。FIG. 5 is a diagram for explaining the operation of the three-dimensional modeling apparatus in the first embodiment. 実施の形態1の変形例に係る輻射シールドの斜視図である。6 is a perspective view of a radiation shield according to a modification of the first embodiment. FIG. 実施の形態2に係る輻射シールドの概要を示す斜視図である。It is a perspective view which shows the outline | summary of the radiation shield which concerns on Embodiment 2. FIG. 実施の形態3に係る輻射シールドの概要を示す斜視図である。It is a perspective view which shows the outline | summary of the radiation shield which concerns on Embodiment 3. FIG. 実施の形態4における三次元造形装置を示す概略図である。FIG. 10 is a schematic diagram showing a three-dimensional modeling apparatus in a fourth embodiment. 実施の形態5における三次元造形装置を示す概略図である。FIG. 10 is a schematic diagram illustrating a three-dimensional modeling apparatus in a fifth embodiment.
実施の形態1.
 以下に、実施の形態1を図1から図5に基づいて説明する。図1は、実施の形態1における三次元造形装置を示す概略図である。三次元造形装置100において、真空チャンバ1の上部には、電子ビームEB1を下方に照射する電子銃2、すなわち電子ビーム照射手段が設けられ、真空チャンバ1の天井面1b、すなわち造形領域形成部と対向する面には電子ビームEB1を通す開口(図示なし)が設けられている。電子銃2は、真空チャンバ1の床面1aに形成された造形領域形成部3に対向しており、造形領域形成部3の内部に電子ビームEB1を照射可能である。造形領域形成部3は、例えば90mm×90mmの正方形状の水平断面を持ち、その内部が三次元造形物の造形領域となるもので、粉末材料からなる粉末層7が形成されている。
Embodiment 1 FIG.
The first embodiment will be described below with reference to FIGS. FIG. 1 is a schematic diagram illustrating a three-dimensional modeling apparatus according to Embodiment 1. In the three-dimensional modeling apparatus 100, an electron gun 2 that irradiates an electron beam EB1 downward, that is, an electron beam irradiation means, is provided above the vacuum chamber 1, and a ceiling surface 1b of the vacuum chamber 1, that is, a modeling region forming unit, An opening (not shown) through which the electron beam EB1 passes is provided on the opposite surface. The electron gun 2 faces the modeling region forming unit 3 formed on the floor surface 1 a of the vacuum chamber 1, and can irradiate the inside of the modeling region forming unit 3 with the electron beam EB 1. The modeling region forming unit 3 has a square horizontal section of 90 mm × 90 mm, for example, and the inside thereof becomes a modeling region of a three-dimensional modeled object, and a powder layer 7 made of a powder material is formed.
 粉末材料は、固化して三次元造形物を構成する粉末状の材料であり、電子銃2からの電子ビームEB1が照射されることで溶融凝固又は焼結して固化体8となる。粉末層7を構成する粉末材料は、例えばコバルトクロムモリブデン合金又はチタン合金などの金属粒体の粉末材料であるが、これに限られるものではなく、電子ビームの照射により溶融凝固又は焼結可能なものであればよい。粉末層7は、粉末材料供給部93が造形領域形成部3の上部及び周辺を移動しながら所定量の粉末材料を供給し、造形領域形成部3の内部に粉末材料を層状に敷き詰めることで形成されるものである。粉末材料供給部93が供給する粉末材料は、例えば直方体の箱体である粉末材料収納部92に収納されている。粉末材料収納部92は、粉末材料供給部が下方に来ると粉末材料を落下させ、粉末材料供給部93に粉末材料を供給する。なお、電子銃2から造形領域形成部3に電子ビームEB1を照射できればよいので、造形領域形成部3を設ける位置は床面1aに限られるものではなく、電子銃2に対向する面であればよい。例えば、床面1aに作業台(図示なし)を設置し、その上面に造形領域形成部3を設けてもよい。 The powder material is a powdery material that solidifies to form a three-dimensional structure, and is irradiated with the electron beam EB1 from the electron gun 2 to be melted or solidified or sintered to become a solidified body 8. The powder material constituting the powder layer 7 is, for example, a powder material of metal particles such as cobalt chromium molybdenum alloy or titanium alloy, but is not limited thereto, and can be melted, solidified or sintered by irradiation with an electron beam. Anything is acceptable. The powder layer 7 is formed by supplying a predetermined amount of powder material while the powder material supply unit 93 moves on and around the modeling region forming unit 3 and laying the powder material in layers inside the modeling region forming unit 3. It is what is done. The powder material supplied by the powder material supply unit 93 is stored in a powder material storage unit 92 that is, for example, a rectangular parallelepiped box. When the powder material supply unit comes downward, the powder material storage unit 92 drops the powder material and supplies the powder material to the powder material supply unit 93. Since the electron beam EB1 only needs to be irradiated from the electron gun 2 to the modeling region forming unit 3, the position where the modeling region forming unit 3 is provided is not limited to the floor surface 1a, but any surface that faces the electron gun 2. Good. For example, a work table (not shown) may be installed on the floor surface 1a, and the modeling area forming unit 3 may be provided on the upper surface.
 造形領域形成部3の底部には、上下にスライド可能な造形テーブル5が設けられている。造形テーブル5は、下方に設けられた昇降機構6により昇降するものであり、昇降機構6を操作することにより造形領域形成部3の深さを調整することが可能である。図1は、造形テーブル5が床面1aから粉末層7の2層分だけ下げられた状態を示しており、破線より下が1層目の粉末層7、破線より上が2層目の粉末層7である。なお、1層目の粉末層7は台座4の周囲を覆うために厚めに形成しているが、2層目以降の粉末層7は数十μm程度の厚さで形成している。 At the bottom of the modeling area forming unit 3, a modeling table 5 is provided that can slide up and down. The modeling table 5 is moved up and down by a lifting mechanism 6 provided below, and the depth of the modeling region forming unit 3 can be adjusted by operating the lifting mechanism 6. FIG. 1 shows a state in which the modeling table 5 is lowered from the floor surface 1a by two layers of the powder layer 7, the first powder layer 7 below the broken line, and the second powder above the broken line. Layer 7. The first powder layer 7 is formed thick to cover the periphery of the pedestal 4, but the second and subsequent powder layers 7 are formed with a thickness of about several tens of μm.
 1層目の粉末層7には、昇温した状態の台座4が埋め込まれている。台座4は、三次元造形物の土台部分となるとともに、粉末材料の予熱部材として機能するものである。台座4の材質は、電子ビームの照射により昇温するものであれば特に限られるものではないが、熱容量が大きいものであることが好ましい。 The pedestal 4 in a heated state is embedded in the first powder layer 7. The pedestal 4 serves as a base portion of the three-dimensional structure and functions as a preheating member for the powder material. The material of the pedestal 4 is not particularly limited as long as the temperature is raised by irradiation with an electron beam, but a material having a large heat capacity is preferable.
 造形領域形成部3の上方には、支えジグ91によって所定の高さに支持され、造形領域形成部3全体を覆う輻射シールド10が設けられている。輻射シールド10は側面視において下方ほど、すなわち造形領域形成部3に近いほど広がる台形状をなし、下方ほど床面1aに平行な方向の断面積が大きくなっている。また、輻射シールド10を設置する高さは、粉末材料供給部93の移動を妨げない範囲であれば特に限られるものではない。輻射シールド10は、上端に電子銃2と対向する開口部10cが設けられ、下端に造形領域形成部3と対向する開口部10bが設けられて、電子ビームEB1が通る中空部10aが上端から下端に亘って内部に形成されているため、電子銃2から造形領域形成部3への電子ビームEB1の照射が輻射シールド10に妨げられることはない。 A radiation shield 10 that is supported at a predetermined height by a support jig 91 and covers the entire modeling region forming unit 3 is provided above the modeling region forming unit 3. In the side view, the radiation shield 10 has a trapezoidal shape that expands toward the lower side, that is, closer to the modeling region forming portion 3, and the cross-sectional area in the direction parallel to the floor surface 1a increases toward the lower side. The height at which the radiation shield 10 is installed is not particularly limited as long as it does not hinder the movement of the powder material supply unit 93. The radiation shield 10 is provided with an opening 10c facing the electron gun 2 at the upper end, an opening 10b facing the modeling region forming portion 3 at the lower end, and a hollow portion 10a through which the electron beam EB1 passes from the upper end to the lower end. Therefore, the radiation shield 10 does not prevent the irradiation of the electron beam EB1 from the electron gun 2 to the modeling region forming unit 3.
 図2は、実施の形態1に係る輻射シールドの概要を示す斜視図、図3は、輻射シールドの上部の枠を示す平面図であり、図4は、輻射シールドの側面部を構成する金属板、すなわち板状部材を示す図である。輻射シールド10は、図2に示すように輻射シールド10の上端に配置され、輻射シールド10の上面11を構成する四角形の枠12の各辺に第1の側面部13及び第2の側面部14を隙間なく取り付けたものであり、第1の側面部13及び第2の側面部14は、それぞれ1対ずつネジ19によって枠12に取り付けられている。
 第1の側面部13は、輻射シールド10の上面11から下方、すなわち造形領域形成部3の方向へ延び、上面11に対して直角に取り付けられている。第2の側面部14は、上面11から下方に延び、上面11に対して45°の角をなして取り付けられている。このように、第2の側面部14が輻射シールド10の上面11に対して45°の角をなしているため、輻射シールド10及び中空部10aは、下方に向かって広がる形状となっている。
 なお、実施の形態1では第2の側面部14が上面11に対して45°の角をなしているが、輻射シールド10が下方に向かって広がればよいので、は第2の側面部14が上面11に対してなす角は45°に限らず鋭角であればよい。また、第1の側面部13は上面11に対して直角に取り付けられているが、第1の側面部13も第2の側面部14と同様に上面11に対して鋭角をなして取り付けてもよい。
2 is a perspective view showing an outline of the radiation shield according to the first embodiment, FIG. 3 is a plan view showing an upper frame of the radiation shield, and FIG. 4 is a metal plate constituting a side portion of the radiation shield. That is, it is a figure which shows a plate-shaped member. As shown in FIG. 2, the radiation shield 10 is disposed at the upper end of the radiation shield 10, and a first side surface portion 13 and a second side surface portion 14 are arranged on each side of a rectangular frame 12 constituting the upper surface 11 of the radiation shield 10. The first side surface portion 13 and the second side surface portion 14 are each attached to the frame 12 by screws 19 in pairs.
The first side surface portion 13 extends downward from the upper surface 11 of the radiation shield 10, that is, in the direction of the modeling region forming portion 3, and is attached to the upper surface 11 at a right angle. The second side surface portion 14 extends downward from the upper surface 11 and is attached to the upper surface 11 at an angle of 45 °. Thus, since the second side surface portion 14 forms an angle of 45 ° with respect to the upper surface 11 of the radiation shield 10, the radiation shield 10 and the hollow portion 10a are shaped to expand downward.
In the first embodiment, the second side surface portion 14 forms an angle of 45 ° with respect to the upper surface 11. However, since the radiation shield 10 only needs to expand downward, the second side surface portion 14 The angle formed with respect to the upper surface 11 is not limited to 45 °, and may be an acute angle. In addition, the first side surface portion 13 is attached at a right angle to the upper surface 11, but the first side surface portion 13 may be attached at an acute angle to the upper surface 11 in the same manner as the second side surface portion 14. Good.
 枠12は、図3に示すように例えば38mm×38mmの大きさの開口部10cを略中央に形成している。また枠12には、折り曲げ部12bが図中左右の両端部に設けられている。この折り曲げ部12bは、上面11に対して45°の角をなして下方に折り曲げられ、その上面側に第2の側面部14が取り付けられる。また、折り曲げ部12bにはネジ19が貫通する2つのネジ穴12cが形成されている。
 第1の側面部13は、図4(a)に示す金属板131を3重に重ね合わせ、それぞれの金属板131のネジ穴13cと枠12の側部に形成されたネジ穴(図示なし)を貫通するネジ19により枠12に取り付けられる。金属板131は、平面視台形状であり、例えば長さ47mmの上辺13aと、上辺13aと135°の角をなし、例えば長さ74mmの斜辺13bとを有している。ここで、上辺13aは輻射シールド10の上面11と平行であるので、斜辺13bは上面11に対して下方に45°の角をなす。第2の側面部14は、図4(b)に示す金属板141を3重に重ね合わせ、それぞれの金属板141のネジ穴14cと枠12のネジ穴12cを貫通するネジ19により枠12に取り付けられる。金属板141、は平面視長方形状であり、例えば長さ54mmの短辺14aと、例えば長さ74mmの長辺14bとを有している。金属板131及び金属板141の材質は例えばSUS304であり、厚さは0.5mm~1mmである。金属板131及び金属板141をそれぞれ重ねる際には、ワッシャー等を間に挟んで互いに隣接する金属板131、金属板141の間に厚さ2mm程度の間隔を設ける。なお、重ねる金属板131、金属板141の枚数及び間隔は上記に限られるものではなく、複数の金属板131、金属板141を互いに間隔を空けて重ねればよい。
As shown in FIG. 3, the frame 12 has an opening 10 c having a size of, for example, 38 mm × 38 mm formed in the approximate center. Further, the frame 12 is provided with bent portions 12b at both left and right ends in the figure. The bent portion 12b is bent downward at an angle of 45 ° with respect to the upper surface 11, and the second side surface portion 14 is attached to the upper surface side. Also, two screw holes 12c through which the screws 19 pass are formed in the bent portion 12b.
The first side surface portion 13 is formed by overlapping the metal plates 131 shown in FIG. 4A in triplicate, and screw holes 13c of the respective metal plates 131 and screw holes formed in the side portions of the frame 12 (not shown). It is attached to the frame 12 with a screw 19 penetrating through. The metal plate 131 has a trapezoidal shape in plan view, and has, for example, an upper side 13a having a length of 47 mm and an angle of 135 ° with the upper side 13a, for example, a hypotenuse 13b having a length of 74 mm. Here, since the upper side 13 a is parallel to the upper surface 11 of the radiation shield 10, the oblique side 13 b forms an angle of 45 ° downward with respect to the upper surface 11. The second side surface portion 14 is formed by overlapping the metal plates 141 shown in FIG. 4B in a triple manner, and is attached to the frame 12 by screws 19 passing through the screw holes 14c of the respective metal plates 141 and the screw holes 12c of the frame 12. It is attached. The metal plate 141 has a rectangular shape in plan view, and has, for example, a short side 14a having a length of 54 mm and a long side 14b having a length of 74 mm, for example. The material of the metal plate 131 and the metal plate 141 is, for example, SUS304, and the thickness is 0.5 mm to 1 mm. When the metal plate 131 and the metal plate 141 are stacked, a space of about 2 mm is provided between the metal plate 131 and the metal plate 141 adjacent to each other with a washer or the like interposed therebetween. Note that the number and interval of the metal plates 131 and the metal plates 141 to be stacked are not limited to the above, and the plurality of metal plates 131 and the metal plates 141 may be stacked at intervals.
 次に、動作について説明する。図5は、実施の形態1における三次元造形装置の動作を説明する図である。造形領域形成部3に粉末材料を敷き詰めて1層目の粉末層7を形成した後、1層目の粉末層7の上面に台座4を埋め込む。この台座4に対し、粉末材料を溶融凝固させる電子ビームEB1よりもエネルギー密度が小さい電子ビームである予熱用電子ビームEB2を照射して台座4を昇温させると、図5(a)に示すように台座4の上方には熱輻射H2が発生するとともに、台座4の側方及び下方には熱伝導及び熱輻射からなる熱移動H1が発生する。輻射シールド10は、上述したように造形領域形成部3全体を覆っているため、上方への熱輻射H2の大部分を回収し昇温する。熱移動H1は、粉末層7及び造形領域形成部3表面を昇温させる。 Next, the operation will be described. FIG. 5 is a diagram for explaining the operation of the three-dimensional modeling apparatus in the first embodiment. A powder material is spread over the modeling region forming unit 3 to form the first powder layer 7, and then the pedestal 4 is embedded on the upper surface of the first powder layer 7. When the pedestal 4 is heated by irradiating the pedestal 4 with a preheating electron beam EB2, which is an electron beam having an energy density smaller than that of the electron beam EB1 for melting and solidifying the powder material, as shown in FIG. In addition, heat radiation H2 is generated above the pedestal 4, and heat transfer H1 including heat conduction and heat radiation is generated laterally and below the pedestal 4. Since the radiation shield 10 covers the entire modeling region forming unit 3 as described above, most of the upward heat radiation H2 is collected and heated. The heat transfer H1 raises the temperature of the powder layer 7 and the modeling region forming unit 3 surface.
 輻射シールド10及び造形領域形成部3表面が昇温すると、図5(b)に示すように昇温した輻射シールド10からは1層目の粉末層7及び台座4への熱輻射H2が発生する。また、昇温した造形領域形成部3表面からは1層目の粉末層7及び台座4への熱移動H1が発生する。1層目の粉末層7は、台座4からの熱移動H1、造形領域形成部3表面からの熱移動H1、及び輻射シールド10からの熱輻射H2によって昇温する。 When the surface of the radiation shield 10 and the modeling region forming part 3 is heated, the heat radiation H2 to the first powder layer 7 and the base 4 is generated from the heated radiation shield 10 as shown in FIG. . Further, heat transfer H1 to the first powder layer 7 and the pedestal 4 is generated from the surface of the modeling region forming portion 3 that has been heated. The first powder layer 7 is heated by heat transfer H <b> 1 from the pedestal 4, heat transfer H <b> 1 from the surface of the modeling region forming unit 3, and heat radiation H <b> 2 from the radiation shield 10.
 1層目の粉末層7の昇温後、図5(c)に示すように造形テーブル5及び1層目の粉末層7を昇降機構6により降下させてスペースを形成し、1層目の場合と同様にして2層目の粉末層7を形成する。2層目の粉末層7を形成するとき、1層目の粉末層7、造形領域形成部3表面、及び輻射シールド10は十分に昇温した状態であるため、1層目の粉末層7及び台座4から2層目の粉末層7へ熱移動H1が発生し、輻射シールド10から2層目の粉末層7へ熱輻射H2が発生する。2層目の粉末層7は、これらの熱移動H1及び熱輻射H2により、予熱用電子ビームEB2が照射されても粉末材料の飛散が起こらない温度まで予熱される。その後、図5(d)に示すように予熱用電子ビームEB2を2層目の粉末層7に照射し、粉末材料を溶融凝固させる電子ビームEB1が照射されても飛散が起こらない温度まで2層目の粉末層7を予熱する。1層目の粉末層7及び台座4からの熱移動H1、及び輻射シールド10からの熱輻射H2は、予熱用電子ビームEB2による予熱が行われる間も発生している。すなわち、2層目の粉末層7は、予熱用電子ビームEB2の照射に加え、台座4、1層目の粉末層7及び造形領域形成部3表面からの熱移動H1、及び輻射シールド10からの熱輻射H2によっても予熱される。 After the temperature of the first powder layer 7 is increased, the modeling table 5 and the first powder layer 7 are lowered by the lifting mechanism 6 to form a space as shown in FIG. The second powder layer 7 is formed in the same manner as described above. When forming the second powder layer 7, the first powder layer 7, the surface of the modeling region forming portion 3, and the radiation shield 10 are in a sufficiently heated state, and therefore the first powder layer 7 and Heat transfer H1 is generated from the pedestal 4 to the second powder layer 7, and heat radiation H2 is generated from the radiation shield 10 to the second powder layer 7. The second powder layer 7 is preheated by these heat transfer H1 and heat radiation H2 to a temperature at which the powder material does not scatter even when irradiated with the preheating electron beam EB2. Thereafter, as shown in FIG. 5 (d), the preheating electron beam EB2 is irradiated onto the second powder layer 7, and the two layers are heated to a temperature at which no scattering occurs even when the electron beam EB1 for melting and solidifying the powder material is irradiated. Preheat the powder layer 7 of the eye. The heat transfer H1 from the first powder layer 7 and the pedestal 4 and the heat radiation H2 from the radiation shield 10 are also generated during preheating by the preheating electron beam EB2. That is, the second powder layer 7 is irradiated with the preheating electron beam EB2, in addition to the pedestal 4, the first powder layer 7 and the heat transfer H1 from the surface of the modeling region forming portion 3, and the radiation shield 10. It is also preheated by the heat radiation H2.
 2層目の粉末層7の予熱後、図5(e)に示すように電子ビームEB1を粉末層7の粉末材料に選択的に照射し、所望の範囲の粉末材料を溶融凝固させて固化体8を生成する。固化体8の生成後、造形テーブル5をさらに降下させ、2層目の場合と同様にして3層目以降の粉末層7の形成、予熱及び固化体の生成を繰り返す。 After preheating the second powder layer 7, as shown in FIG. 5 (e), the electron beam EB1 is selectively irradiated to the powder material of the powder layer 7, and the powder material in a desired range is melted and solidified to be solidified. 8 is generated. After the formation of the solidified body 8, the modeling table 5 is further lowered, and the formation of the third and subsequent powder layers 7, preheating and generation of the solidified body are repeated in the same manner as in the case of the second layer.
 なお、実施の形態1では電子銃2から照射される予熱用電子ビームEB2を照射することで1層目の粉末層7に埋め込まれた台座4を昇温させたが、台座4の昇温手段はこれに限られるものではない。例えば、ヒーター等で予め昇温した状態の台座4を1層目の粉末層7に埋め込んでもよい。要は、昇温した台座4が1層目の粉末層7に埋め込まれた状態が一定時間以上継続して、台座4からの熱輻射H2によって輻射シールド10が昇温し、台座4からの熱移動H1と昇温した輻射シールド10からの熱輻射H2によって、粉末層7が予熱されればよい。 In the first embodiment, the temperature of the pedestal 4 embedded in the first powder layer 7 is raised by irradiating the preheating electron beam EB2 emitted from the electron gun 2. Is not limited to this. For example, the pedestal 4 that has been heated in advance with a heater or the like may be embedded in the first powder layer 7. In short, the state in which the heated pedestal 4 is embedded in the first powder layer 7 continues for a certain time or more, and the radiation shield 10 is heated by the heat radiation H2 from the pedestal 4, and the heat from the pedestal 4 is increased. The powder layer 7 may be preheated by the movement H1 and the heat radiation H2 from the radiation shield 10 whose temperature has been raised.
 輻射シールド10は、上述したように第1の側面部13及び第2の側面部14がそれぞれ3枚の金属板131、金属板141を互いに間隔を空けて重ねられることで構成されているため、それぞれの金属板131の間、及びそれぞれの金属板141の間における熱抵抗が大きい。このため、間隔を空けずに金属板131、金属板141を重ねた場合よりも造形領域形成部3に最も近い金属板131及び金属板141の温度上昇が速くなっている。また、金属板1枚のみで構成した場合よりも第1の側面部13及び第2の側面部14の熱容量が大きくなり、輻射シールド10の温度がより長時間高温に維持される。 As described above, the radiation shield 10 is configured such that the first side surface portion 13 and the second side surface portion 14 are stacked with the three metal plates 131 and the metal plates 141 being spaced apart from each other. The thermal resistance between each metal plate 131 and between each metal plate 141 is large. For this reason, the temperature rise of the metal plate 131 and the metal plate 141 closest to the modeling region forming unit 3 is faster than the case where the metal plate 131 and the metal plate 141 are stacked without a gap. In addition, the heat capacity of the first side surface portion 13 and the second side surface portion 14 is larger than when only one metal plate is used, and the temperature of the radiation shield 10 is maintained at a high temperature for a longer time.
 粉末層7の予熱に対する輻射シールド10の寄与を調べるため、輻射シールド10を設けない場合と設けた場合の台座4の昇温時間及び昇温速度を測定した。測定は、図5(a)と同様に造形領域形成部3の内部に形成された1層目の粉末層7の上面に台座4を埋め込んだ状態で行い、台座4の下部に取り付けたシース型熱電対の取り付け位置の温度を台座4の温度とした。輻射シールド10を設けない場合、台座4の温度を850℃まで昇温させるために要する時間は1200秒(昇温速度:0.69℃/秒)であるのに対し、輻射シールド10を設けた場合は640秒(昇温速度:1.21℃/秒)であった。このように昇温時間及び昇温速度に差が生じるのは、輻射シールド10がなければ上方への熱輻射により熱損失となるエネルギーを輻射シールド10により回収、再利用しているためと考えられる。 In order to investigate the contribution of the radiation shield 10 to the preheating of the powder layer 7, the temperature rise time and the temperature rise rate of the base 4 when the radiation shield 10 was not provided and when the radiation shield 10 was provided were measured. The measurement is performed in a state where the pedestal 4 is embedded in the upper surface of the first powder layer 7 formed inside the modeling region forming unit 3 as in FIG. 5A and attached to the lower portion of the pedestal 4. The temperature at the mounting position of the thermocouple was defined as the temperature of the base 4. When the radiation shield 10 is not provided, the time required to raise the temperature of the pedestal 4 to 850 ° C. is 1200 seconds (temperature increase rate: 0.69 ° C./second), whereas the radiation shield 10 is provided. In this case, it was 640 seconds (temperature increase rate: 1.21 ° C./second). The difference between the temperature raising time and the temperature raising speed is considered to be because, if there is no radiation shield 10, energy that causes heat loss due to upward heat radiation is collected and reused by the radiation shield 10. .
 また、台座4の温度が850℃に達するまでの台座4の中心部と台座4の端部の表面温度の履歴をとり、中心部と端部の温度差を測定した結果、輻射シールド10を設けない場合の最大温度差が250℃であるのに対し、輻射シールド10を設けた場合の最大温度差は160℃であり、温度ムラが90℃低減されていた。これは、中心部よりも熱輻射H2による損失が大きい端部において、輻射シールド10による熱輻射H2の回収、再利用による効果が大きく、温度ムラが低減されたと考えられる。 Further, as a result of measuring the temperature difference between the center portion and the end portion of the pedestal 4 until the temperature of the pedestal 4 reaches 850 ° C. and measuring the temperature difference between the center portion and the end portion, the radiation shield 10 is provided. The maximum temperature difference when the radiation shield 10 is provided is 160 ° C., and the temperature unevenness is reduced by 90 ° C. This is considered to be because the effect of recovery and reuse of the heat radiation H2 by the radiation shield 10 is large at the end portion where the loss due to the heat radiation H2 is larger than that at the center, and the temperature unevenness is reduced.
 なお、ここでは台座4を昇温させる場合の輻射シールド10の寄与について説明したが、粉末層7を予熱する場合も同様である。輻射シールド10は、粉末層7が形成される造形領域形成部3全体を覆っているため、昇温した台座4及び造形領域形成部3、粉末層7の表面から上方に発せられる熱輻射H2を回収するとともに、回収した熱輻射H2により昇温することで粉末層7への熱輻射H2を発生させ、粉末層7の予熱及び温度ムラの低減に寄与する。特に、製造する三次元造形物が大きく造形領域形成部3及び粉末層7の表面積が大きい場合は、上方への熱輻射も大きくなるため、輻射シールド10の寄与も大きいと考えられる。 In addition, although the contribution of the radiation shield 10 when raising the temperature of the pedestal 4 has been described here, the same applies to the case where the powder layer 7 is preheated. Since the radiation shield 10 covers the entire modeling region forming unit 3 on which the powder layer 7 is formed, the radiating base 2 and the modeling region forming unit 3 and the heat radiation H2 emitted upward from the surface of the powder layer 7 are generated. In addition to the recovery, the temperature of the recovered heat radiation H2 is raised to generate the heat radiation H2 to the powder layer 7, which contributes to preheating of the powder layer 7 and reduction of temperature unevenness. In particular, when the three-dimensional structure to be manufactured is large and the surface area of the modeling region forming part 3 and the powder layer 7 is large, the upward radiation of heat is also large, so the radiation shield 10 is considered to contribute greatly.
 造形領域形成部3及び粉末層7の熱輻射は全方向に発せられるものであり、輻射シールド10との間の間隔から漏れてしまう熱輻射もあるため、輻射シールド10はできるだけ造形領域形成部3に近づけて配置することが好ましい。上述したように、輻射シールド10の高さは粉末材料供給部が93の移動を妨げない範囲にする必要があるが、例えば支えジグ91に替えて高さ調整が可能な支持部材により輻射シールド10を支持する構成にしてもよい。この場合、粉末層7を形成するときは粉末材料供給部93の移動を妨げないように輻射シールド10を高く配置し、それ以外のときは輻射シールド10をできるだけ下方に配置して造形領域形成部3に近づけることでより多くの熱輻射H2を回収できる。
 また、輻射シールド10からの熱輻射H2は、表面の放熱性に依るため、金属板131及び金属板141の下表面、すなわち造形領域形成部3と対向する面にアルマイト加工処理を施して輻射シールド10の放熱性を高めても良い。
Since the heat radiation of the modeling region forming unit 3 and the powder layer 7 is emitted in all directions and there is also heat radiation that leaks from the space between the radiation shield 10, the radiation shield 10 is formed as much as possible in the modeling region forming unit 3. It is preferable to arrange them close to each other. As described above, the height of the radiation shield 10 needs to be in a range in which the powder material supply unit does not hinder the movement of the 93. For example, the radiation shield 10 is replaced by a support member capable of adjusting the height instead of the support jig 91. You may make it the structure which supports. In this case, when forming the powder layer 7, the radiation shield 10 is arranged so as not to hinder the movement of the powder material supply unit 93, and in other cases, the radiation shield 10 is arranged as low as possible to form the modeling region forming unit. More heat radiation H2 can be recovered by approaching 3.
Further, since the heat radiation H2 from the radiation shield 10 depends on the heat radiation property of the surface, the lower surface of the metal plate 131 and the metal plate 141, that is, the surface facing the modeling region forming portion 3 is subjected to alumite processing so that the radiation shield. The heat dissipation of 10 may be improved.
 実施の形態1によれば、大型の三次元造形物を製造する場合でも、粉末材料の十分な予熱を容易に行うことができる。より具体的には、予熱用電子ビームにより昇温した台座、台座からの熱移動により昇温した造形領域形成部の表面から上方に発せられる熱輻射を、造形領域形成部全体を覆う輻射シールドによって回収、再利用するため、特に大型の三次元造形物を製造する場合のように、上方への熱輻射による熱損失が大きくなる虞がある場合でも、熱輻射による粉末層の温度低下が抑制され、粉末層の十分な予熱が容易となっている。 According to Embodiment 1, even when a large three-dimensional structure is manufactured, sufficient preheating of the powder material can be easily performed. More specifically, the pedestal heated by the preheating electron beam, the heat radiation emitted upward from the surface of the modeling region forming part heated by the heat transfer from the pedestal, by a radiation shield covering the entire modeling region forming part Even when there is a risk of increasing heat loss due to upward heat radiation, especially when manufacturing a large three-dimensional structure for recovery and reuse, the temperature drop of the powder layer due to heat radiation is suppressed. Sufficient preheating of the powder layer is facilitated.
 また、2層目以降の粉末層の予熱において、予熱用電子ビームのエネルギー密度を従来よりも小さくすることができる。より具体的には、2層目以降の粉末層は、予熱用電子ビームの照射に加え、台座、1層目以前の粉末層及び造形領域形成部表面からの熱移動、及び輻射シールドからの熱輻射によっても予熱されるため、予熱用電子ビームのエネルギー密度を従来よりも小さくすることができる Also, in the preheating of the second and subsequent powder layers, the energy density of the preheating electron beam can be made smaller than before. More specifically, in the second and subsequent powder layers, in addition to the preheating electron beam irradiation, heat transfer from the pedestal, the first powder layer and the modeling region forming part surface, and heat from the radiation shield Since it is also preheated by radiation, the energy density of the preheating electron beam can be made smaller than before.
 また、粉末層の十分な予熱をより安定的に行うことができる。より具体的には、熱輻射による損失がより大きい端部からの熱輻射を輻射シールドにより回収、再利用することで中心部と端部との間の温度ムラを低減するため、粉末層の十分な予熱をより安定的に行うことができる。特に、製造する三次元造形物が大きくなるほど温度ムラが大きくなり、端部において十分な予熱がなされない虞が高まるが、上記のように温度ムラを低減することで、十分な予熱をより安定的に行うことができる。 Moreover, sufficient preheating of the powder layer can be performed more stably. More specifically, the heat radiation from the end portion where the loss due to heat radiation is larger is recovered by the radiation shield and reused to reduce the temperature unevenness between the center portion and the end portion. Preheating can be performed more stably. In particular, the larger the three-dimensional structure to be manufactured, the greater the temperature unevenness, and there is a risk that sufficient preheating will not be performed at the end, but sufficient preheating is more stable by reducing the temperature unevenness as described above. Can be done.
 また、輻射シールドが粉末層の予熱に寄与する時間をより長くすることができる。より具体的には、輻射シールドの第1の側面部及び第2の側面部を構成する金属板を3重に重ね合わせることにより、第1の側面部及び第2の側面部の熱容量を大きくしているため、昇温した輻射シールドの高温状態を維持し、熱輻射により粉末層の予熱に寄与する時間をより長くすることができる。 Also, the time during which the radiation shield contributes to the preheating of the powder layer can be made longer. More specifically, the heat capacity of the first side surface portion and the second side surface portion is increased by overlapping the metal plates constituting the first side surface portion and the second side surface portion of the radiation shield in triplicate. Therefore, the high temperature state of the heated radiation shield can be maintained, and the time that contributes to the preheating of the powder layer by thermal radiation can be made longer.
 また、輻射シールドによる粉末層の温度低下抑制の効果をより早期に得ることができる。より具体的には、輻射シールドの第1の側面部及び第2の側面部を構成する金属板を互いに間隔を空けて重ね合わせることにより、金属板を接触させて重ね合わせた場合よりも金属板間の熱抵抗を大きくしているため、造形領域形成部に最も近い金属板の昇温速度がより速くなり、輻射シールドからの熱輻射がより早く始まって、粉末層の温度低下抑制の効果をより早期に得ることができる。 Also, the effect of suppressing the temperature drop of the powder layer by the radiation shield can be obtained earlier. More specifically, the metal plates constituting the first side surface portion and the second side surface portion of the radiation shield are overlapped with a space between each other, so that the metal plates are brought into contact with each other rather than the metal plates in contact with each other. Since the thermal resistance between the metal plate and the forming area forming part is increased, the temperature rise rate of the metal plate is faster, and the heat radiation from the radiation shield starts earlier, thereby suppressing the temperature drop of the powder layer. It can be obtained earlier.
 また、輻射シールドの設置スペースを抑制することができる。より具体的には、第2の側面部を輻射シールドの上面に対して45°の角をなして取り付けたことにより、輻射シールドを下方に向かって広がる形状とすることで、造形領域形成部に近いほど真空チャンバの床面と平行な方向の断面積を大きくしたため、下方については造形領域形成部全体を覆うために必要な断面積を確保しつつ、輻射シールドの上部は小さくすることで輻射シールドの設置スペースを抑制することができる。 Also, the installation space for the radiation shield can be reduced. More specifically, by attaching the second side surface portion at an angle of 45 ° to the upper surface of the radiation shield, the radiation shield is shaped to expand downward, so that the modeling region forming portion Since the cross-sectional area in the direction parallel to the floor of the vacuum chamber is increased as it is closer, the lower part of the radiation shield is secured while ensuring the cross-sectional area necessary to cover the entire forming area forming part in the lower part, thereby reducing the radiation shield. The installation space can be suppressed.
 ここで、実施の形態1の変形例について説明する。図6は、実施の形態1の変形例に係る輻射シールドの斜視図である。輻射シールド101は、造形領域形成部3全体を覆う平板121に輻射シールド10の中空部10aに相当する開口部101aを形成したものである。平板121は、台座4などからの熱輻射を回収して昇温し、昇温後は下方に熱輻射を発生させることで粉末層7の予熱に寄与する。輻射シールド101は、側面部がないために実施の形態1の輻射シールド10と比べて台座4などからの熱輻射が漏れやすくなっているが、構成が非常に簡単である。 Here, a modification of the first embodiment will be described. FIG. 6 is a perspective view of a radiation shield according to a modification of the first embodiment. The radiation shield 101 is obtained by forming an opening 101 a corresponding to the hollow portion 10 a of the radiation shield 10 on a flat plate 121 that covers the entire modeling region forming portion 3. The flat plate 121 collects heat radiation from the pedestal 4 and the like and raises the temperature. After the temperature rise, the flat plate 121 generates heat radiation downward to contribute to preheating of the powder layer 7. Since the radiation shield 101 does not have a side surface portion, heat radiation from the pedestal 4 and the like is likely to leak as compared with the radiation shield 10 of the first embodiment, but the configuration is very simple.
実施の形態2.
 以下に、実施の形態2を図7に基づいて説明する。なお、図1から図4と同一又は相当部分については同一の符号を付し、その説明を省略する。実施の形態2は、輻射シールドの形状が実施の形態1と異なる。図7は、実施の形態2に係る輻射シールドの概要を示す斜視図である。輻射シールド20は、互いに大きさの異なる四角形の枠22A~22Cを互いに平行に配置し、それぞれの枠に対して第1の側面構成部材23A~23C及び第2の側面構成部材24A~24Cをネジ29により隙間なく取り付けることで第1の側面部23及び第2の側面部24を構成したものである。輻射シールド20の内部には、上端から下端に亘って中空部(図示なし)が形成されている。
Embodiment 2. FIG.
Below, Embodiment 2 is demonstrated based on FIG. The same or corresponding parts as those in FIGS. 1 to 4 are denoted by the same reference numerals, and the description thereof is omitted. The second embodiment is different from the first embodiment in the shape of the radiation shield. FIG. 7 is a perspective view showing an outline of the radiation shield according to the second embodiment. The radiation shield 20 has rectangular frames 22A to 22C having different sizes arranged in parallel to each other, and the first side surface constituting members 23A to 23C and the second side surface constituting members 24A to 24C are screwed to the respective frames. The first side surface portion 23 and the second side surface portion 24 are configured by being attached by 29 without a gap. A hollow portion (not shown) is formed in the radiation shield 20 from the upper end to the lower end.
 枠22A~22Cのうちの最も小さい枠22Aは、輻射シールド20の上端部に配置され、輻射シールド20の上面21を構成する。枠22Aには第1の側面構成部材23A及び第2の側面構成部材24Aが取り付けられている。第1の側面構成部材23Aは、輻射シールド20の上面21から下方、すなわち造形領域形成部3の方向へ延び、上面21に対して直角に取り付けられている。第2の側面構成部材24Aは、上面21から下方に延び、上面21に対して30°の角をなして取り付けられている。
 中間の大きさの枠22Bは、枠22Aから第1の側面構成部材23Aの高さだけ下方に配置され、第1の側面構成部材23B及び第2の側面構成部材24Bが取り付けられている。第1の側面構成部材23Bは、枠22Bに対して直角に取り付けられ、第2の側面構成部材24Bは、枠22Bに対して45°の角をなして取り付けられている。ここで、枠22Bは枠22Aと平行に配置されており、上面21とも平行であるので、第1の側面構成部材23Bは上面21に対しても直角をなし、第2の側面構成部材24Bは上面21に対しても45°の角をなしている。
 最も大きい枠22Cは、枠22Bから第1の側面構成部材23Bの高さだけ下方に配置され、第1の側面構成部材23C及び第2の側面構成部材24Cが取り付けられている。第1の側面構成部材23Cは、枠22Cに対して直角に取り付けられ、第2の側面構成部材24Cは、枠22Cに対して60°の角をなして取り付けられている。ここで、枠22Cは枠22Aと平行に配置されており、上面21とも平行であるので、第1の側面構成部材23Cは上面21に対しても直角をなし、第2の側面構成部材24Cは上面21に対しても60°の角をなしている。
 上記のように、実施の形態2では、第2の側面構成部材24A~24Cが上面21となす角度が、30°、45°、60°と、下方に向かうほど段階的に大きくなっている。
The smallest frame 22A among the frames 22A to 22C is disposed at the upper end portion of the radiation shield 20 and constitutes the upper surface 21 of the radiation shield 20. A first side surface constituting member 23A and a second side surface constituting member 24A are attached to the frame 22A. The first side surface constituting member 23 </ b> A extends downward from the upper surface 21 of the radiation shield 20, that is, in the direction of the modeling region forming unit 3, and is attached to the upper surface 21 at a right angle. The second side surface component member 24 </ b> A extends downward from the upper surface 21 and is attached to the upper surface 21 at an angle of 30 °.
The intermediate size frame 22B is disposed below the frame 22A by the height of the first side surface component member 23A, and the first side surface component member 23B and the second side surface component member 24B are attached thereto. The first side surface constituting member 23B is attached at a right angle to the frame 22B, and the second side surface constituting member 24B is attached at an angle of 45 ° to the frame 22B. Here, since the frame 22B is arranged in parallel to the frame 22A and is also parallel to the upper surface 21, the first side surface constituting member 23B is also perpendicular to the upper surface 21, and the second side surface constituting member 24B is The upper surface 21 also forms a 45 ° angle.
The largest frame 22C is disposed below the frame 22B by the height of the first side surface constituting member 23B, and the first side surface constituting member 23C and the second side surface constituting member 24C are attached thereto. The first side surface constituting member 23C is attached at a right angle to the frame 22C, and the second side surface constituting member 24C is attached at an angle of 60 ° to the frame 22C. Here, since the frame 22C is arranged in parallel with the frame 22A and is also parallel to the upper surface 21, the first side surface constituting member 23C is also perpendicular to the upper surface 21, and the second side surface constituting member 24C is The upper surface 21 also forms an angle of 60 °.
As described above, in the second embodiment, the angles formed by the second side surface constituting members 24A to 24C and the upper surface 21 are 30 °, 45 °, and 60 °, and gradually increase toward the bottom.
 第2の側面構成部材24A~24Cを枠22A~枠22Cに対して鋭角をなして取り付けるためには、実施の形態1の枠12のように折り曲げ部を設け、下方に折り曲げた折り曲げ部の上面にそれぞれの第2の側面構成部材24A~24Cを取り付ければよい。また、第1の側面構成部材23A~23C及び第2の側面構成部材24A~24Cは、実施の形態1と同様に、互いに2mmの間隔を空けて重ね合わされた3枚の金属板により構成されている。 In order to attach the second side surface constituting members 24A to 24C to the frames 22A to 22C at an acute angle, a bent portion is provided like the frame 12 of the first embodiment, and the upper surface of the bent portion is bent downward. The second side surface constituting members 24A to 24C may be attached to each other. Further, the first side surface constituting members 23A to 23C and the second side surface constituting members 24A to 24C are constituted by three metal plates which are overlapped with each other with a spacing of 2 mm, as in the first embodiment. Yes.
 粉末層7の予熱に対する輻射シールド20の寄与を調べるため、実施の形態1と同様にして輻射シールド20を設けた場合の台座4の昇温時間及び昇温速度を測定した。輻射シールド20を設けた場合、台座4の温度を850℃まで昇温させるために要する時間は610秒(昇温速度:1.31℃/秒)となり、実施の形態1の輻射シールド10を設けた場合よりもさらに30秒の短縮が確かめられた。また、温度ムラについては、最大温度差が75℃となり、輻射シールド10を設けた場合よりもさらに85℃の温度ムラ低減が確かめられた。これは、最も造形領域形成部3に最も近い第2の側面構成部材24Cと輻射シールド20の上面21とがなす角度が60°であり、輻射シールド10の第2の側面部14と上面11とがなす角度である45°よりも大きいためと考えられる。すなわち、輻射シールドの上面となす角度が大きいほど(直角に近いほど)輻射シールド10又は輻射シールド20と台座4の隙間から側方に漏れる熱輻射H2が減少し、台座4からの熱輻射H2をより多く回収、再利用できるために昇温速度をさらに高めたと考えられる。また、側方に漏れる熱輻射H2は、台座4の中心部からよりも端部から発せられているものが多いと考えられるため、端部の温度低下がさらに低減され、温度ムラも低減されたと考えられる。
 なお、輻射シールド20は粉末層7が形成される造形領域形成部3全体を覆っているため、同様の効果は粉末層7を予熱する場合にも得られると考えられる。
 その他については実施の形態2と同様であるので、その説明を省略する。
In order to investigate the contribution of the radiation shield 20 to the preheating of the powder layer 7, the temperature raising time and the temperature raising rate of the base 4 when the radiation shield 20 was provided were measured in the same manner as in the first embodiment. When the radiation shield 20 is provided, the time required to raise the temperature of the pedestal 4 to 850 ° C. is 610 seconds (temperature increase rate: 1.31 ° C./second), and the radiation shield 10 of the first embodiment is provided. It was confirmed that the time was further shortened by 30 seconds. As for temperature unevenness, the maximum temperature difference was 75 ° C., and it was confirmed that the temperature unevenness was further reduced by 85 ° C. compared to the case where the radiation shield 10 was provided. This is because the angle formed between the second side surface component 24C closest to the modeling region forming portion 3 and the upper surface 21 of the radiation shield 20 is 60 °, and the second side surface portion 14 and the upper surface 11 of the radiation shield 10 This is considered to be because it is larger than 45 ° which is an angle formed by. That is, as the angle formed with the upper surface of the radiation shield is larger (closer to the right angle), the heat radiation H2 leaking to the side from the gap between the radiation shield 10 or the radiation shield 20 and the pedestal 4 decreases, and the heat radiation H2 from the pedestal 4 is reduced. It is thought that the rate of temperature increase was further increased because more collection and reuse were possible. Moreover, since it is considered that the heat radiation H2 leaking to the side is emitted from the end rather than from the center of the base 4, the temperature drop at the end is further reduced, and the temperature unevenness is also reduced. Conceivable.
In addition, since the radiation shield 20 covers the modeling area formation part 3 whole in which the powder layer 7 is formed, it is thought that the same effect is acquired also when the powder layer 7 is preheated.
Others are the same as those in the second embodiment, and the description thereof is omitted.
 実施の形態2によれば、実施の形態1と同様の効果を得ることができる。 According to the second embodiment, the same effect as in the first embodiment can be obtained.
 また、粉末層7の予熱時の昇温速度をさらに高めるとともに、温度ムラをさらに低減することができる。より具体的には、第2の側面構成部材が輻射シールドの上面に対してなす角度が段階的に大きくなる形状とし、造形領域形成部と輻射シールドとの間から漏れる熱輻射をより少なくしているため、特に端部からの熱輻射をより多く回収、再利用することでき、昇温速度をさらに高めるとともに、温度ムラをさらに低減することができる。 Further, the temperature rise rate during preheating of the powder layer 7 can be further increased, and temperature unevenness can be further reduced. More specifically, the angle formed by the second side surface component member with respect to the upper surface of the radiation shield is increased stepwise to reduce heat radiation leaking between the modeling region forming portion and the radiation shield. Therefore, it is possible to collect and reuse more heat radiation particularly from the end, further increasing the rate of temperature rise and further reducing temperature unevenness.
実施の形態3.
 以下に、実施の形態3を図8に基づいて説明する。なお、図1から図4と同一又は相当部分については同一の符号を付し、その説明を省略する。実施の形態3は、輻射シールドの形状が実施の形態1及び実施の形態2と異なる。図8は、実施の形態3に係る輻射シールドの概要を示す斜視図である。輻射シールド30は、互いに大きさの異なる枠32A~32Cを互いに平行に配置し、複数の側面構成部材33Aをネジ39により隙間なく取り付けることで全体として放物面を形成する側面部33を構成したものである。輻射シールド30の内部には、上端から下端に亘って中空部(図示なし)が形成されている。
Embodiment 3 FIG.
The third embodiment will be described below with reference to FIG. The same or corresponding parts as those in FIGS. 1 to 4 are denoted by the same reference numerals, and the description thereof is omitted. The third embodiment is different from the first and second embodiments in the shape of the radiation shield. FIG. 8 is a perspective view showing an outline of the radiation shield according to the third embodiment. The radiation shield 30 includes side surfaces 33 that form paraboloids as a whole by arranging frames 32A to 32C having different sizes in parallel to each other and attaching a plurality of side surface members 33A with screws 39 without gaps. Is. A hollow portion (not shown) is formed in the radiation shield 30 from the upper end to the lower end.
 枠32A~32Cのうちの最も小さい枠32Aは、輻射シールド30の上端部に配置され、輻射シールド30の上面31を構成する。枠32Aには側面構成部材33Aが取り付けられており、側面構成部材33Aは、輻射シールド30の上面31から下方、すなわち造形領域形成部3の方向へ延びている。中間の大きさの枠32Bは、枠32Aから側面構成部材33Aの高さだけ下方に配置され、側面構成部材33Bが取り付けられている。最も大きい枠32Cは、枠32Bから側面構成部材33Bの高さだけ下方に配置され、側面構成部材33Cが取り付けられている。それぞれの側面構成部材33A~33Cは、側面部33全体として放物面を形成するように曲げられ、互いに2mmの間隔を空けて重ね合わされた3枚の金属板から構成されている。側面構成部材33A~33Cは、側面部33の下面、すなわち造形領域形成部3と対向する面が放物面を構成するように取り付けるため、いずれの側面構成部材33A~33Cも上面31に対して鋭角をなしており、その角度は下方ほど大きい。このため、上面31となす角度は側面構成部材33Aよりも側面構成部材33Bの方が大きく、側面構成部材33Bよりも側面構成部材33Cの方が大きい。その他については実施の形態2と同様であるので、その説明を省略する。 The smallest frame 32A among the frames 32A to 32C is arranged at the upper end of the radiation shield 30 and constitutes the upper surface 31 of the radiation shield 30. A side surface member 33A is attached to the frame 32A, and the side surface member 33A extends downward from the upper surface 31 of the radiation shield 30, that is, in the direction of the modeling region forming portion 3. The intermediate-sized frame 32B is disposed below the frame 32A by the height of the side surface component 33A, and the side surface component 33B is attached thereto. The largest frame 32C is disposed below the frame 32B by the height of the side surface component 33B, and the side surface component 33C is attached thereto. Each of the side surface constituting members 33A to 33C is composed of three metal plates which are bent so as to form a parabolic surface as a whole of the side surface portion 33 and are overlapped with each other with an interval of 2 mm. The side surface constituting members 33A to 33C are attached so that the lower surface of the side surface portion 33, that is, the surface facing the modeling region forming portion 3 forms a paraboloid. An acute angle is formed, and the angle is larger toward the lower side. For this reason, the angle between the upper surface 31 and the side surface component 33B is larger than that of the side surface member 33B, and the side surface member 33C is larger than the side surface member 33B. Others are the same as those in the second embodiment, and the description thereof is omitted.
 実施の形態3によれば、実施の形態2と同様の効果を得ることができる。 According to the third embodiment, the same effect as in the second embodiment can be obtained.
実施の形態4.
 以下に、実施の形態4を図9に基づいて説明する。なお、図1から図8と同一又は相当部分については同一の符号を付し、その説明を省略する。図9は、実施の形態4における三次元造形装置を示す概略図である。三次元造形装置200において、輻射シールド40は上端に電子銃2に対向する開口部40cが設けられ、下端に造形領域形成部3に対向する開口部40bが設けられて、電子ビームEB1が通る中空部40aが上端から下端に亘って内部に形成されている。輻射シールド40は、実施の形態1の輻射シールド10と同様に、側面視において上方ほど、すなわち造形領域形成部3から遠いほど狭くなる台形状をなし、上方ほど床面1aに平行な方向の断面積が小さくなっている。また、下端の開口部40bの高さは輻射シールド10の開口部10bと同様であるが、輻射シールド40は、側面が輻射シールド10よりも上方に延びており、上端の開口部40cの高さが輻射シールド10の上端の開口部10cよりも高くなっている。より具体的には、上端の開口部40cと真空チャンバ1の天井面1bとの間の距離D2が、下端の開口部40bと粉末層7との間の距離D1以下とすることが一例として考えられる。開口部40cと真空チャンバ1の天井1b面との間の距離D2が小さいほど開口部40cが高くなり、開口部40cの断面積が小さくなるので、距離D2は、できるだけ小さい方が望ましい。その他については実施の形態1と同様であるので、説明を省略する。
Embodiment 4 FIG.
Below, Embodiment 4 is demonstrated based on FIG. 1 to 8 are assigned the same reference numerals, and descriptions thereof are omitted. FIG. 9 is a schematic diagram illustrating a three-dimensional modeling apparatus according to the fourth embodiment. In the three-dimensional modeling apparatus 200, the radiation shield 40 is provided with an opening 40c facing the electron gun 2 at the upper end and an opening 40b facing the modeling region forming unit 3 at the lower end, and a hollow through which the electron beam EB1 passes. The part 40a is formed inside from the upper end to the lower end. As with the radiation shield 10 of the first embodiment, the radiation shield 40 has a trapezoidal shape that becomes narrower as viewed from the side, that is, as it is farther from the modeling region forming unit 3, and as it extends upward, it is cut in a direction parallel to the floor surface 1 a. The area is getting smaller. Further, the height of the opening 40b at the lower end is the same as that of the opening 10b of the radiation shield 10, but the side surface of the radiation shield 40 extends above the radiation shield 10 and the height of the opening 40c at the upper end. Is higher than the opening 10 c at the upper end of the radiation shield 10. More specifically, the distance D2 between the opening 40c at the upper end and the ceiling surface 1b of the vacuum chamber 1 is considered to be an example where the distance D1 between the opening 40b at the lower end and the powder layer 7 is equal to or less. It is done. The smaller the distance D2 between the opening 40c and the ceiling 1b surface of the vacuum chamber 1, the higher the opening 40c and the smaller the cross-sectional area of the opening 40c. Therefore, the distance D2 is preferably as small as possible. Others are the same as those in the first embodiment, and thus the description thereof is omitted.
 実施の形態4によれば、実施の形態1と同様の効果を得ることができる。 According to the fourth embodiment, the same effect as in the first embodiment can be obtained.
 また、上方ほど断面積が小さくなる台形状の輻射シールドにおいて側面を上方に延ばしたことにより、造形領域形成部側の開口部の高さを低く保ちつつ、造形領域形成部と反対側に設けられた開口部の高さを高くし、造形領域形成部と反対側の開口部の断面積をより小さくした。このため、造形領域から回収する熱輻射の量を維持しつつ、回収された熱輻射が造形領域形成部と反対側の開口部から漏れ出ることを抑制し、より効率的に粉末層の予熱を行うことができる。 Further, by extending the side surface upward in the trapezoidal radiation shield whose cross-sectional area becomes smaller toward the upper side, the height of the opening on the modeling region forming unit side is kept low and provided on the side opposite to the modeling region forming unit. The height of the opening was increased, and the cross-sectional area of the opening on the side opposite to the modeling region forming part was further reduced. For this reason, while maintaining the amount of heat radiation recovered from the modeling region, the recovered heat radiation is prevented from leaking from the opening on the side opposite to the modeling region forming part, and the powder layer is preheated more efficiently. It can be carried out.
実施の形態5.
 以下に、実施の形態5を図10に基づいて説明する。なお、図1から図9と同一又は相当部分については同一の符号を付し、その説明を省略する。実施の形態5は、輻射シールドの側面を実施の形態4よりもさらに上方に延ばしたものである。図10は、実施の形態5における三次元造形装置を示す概略図である。三次元造形装置300において、輻射シールド50は上端に電子銃2に対向する開口部50cが設けられ、下端に造形領域形成部3に対向する開口部50bが設けられて、電子ビームEB1が通る中空部50aが上端から下端に亘って内部に形成されている。輻射シールド50は、実施の形態1の輻射シールド10と同様に、側面視において上方ほど、すなわち造形領域形成部3から遠いほど狭くなる台形状をなし、上方ほど床面1aに平行な方向の断面積が小さくなっている。また、輻射シールド50の側面は輻射シールド10よりも上方に延び、上端の開口部50cが真空チャンバ1の天井面1bに当接し、開口部50cと天井面1bの間の隙間が塞がれている。その他については実施の形態1と同様であるので、説明を省略する。
Embodiment 5 FIG.
Below, Embodiment 5 is demonstrated based on FIG. The same or corresponding parts as those in FIGS. 1 to 9 are denoted by the same reference numerals, and the description thereof is omitted. In the fifth embodiment, the side surface of the radiation shield extends further upward than in the fourth embodiment. FIG. 10 is a schematic diagram illustrating a three-dimensional modeling apparatus according to the fifth embodiment. In the three-dimensional modeling apparatus 300, the radiation shield 50 is provided with an opening 50c facing the electron gun 2 at the upper end and an opening 50b facing the modeling region forming unit 3 at the lower end, and a hollow through which the electron beam EB1 passes. The part 50a is formed inside from the upper end to the lower end. As with the radiation shield 10 of the first embodiment, the radiation shield 50 has a trapezoidal shape that becomes narrower as viewed from the upper side, that is, as it is farther from the modeling region forming unit 3, and as it extends upward, it is cut in a direction parallel to the floor surface 1 a. The area is getting smaller. Further, the side surface of the radiation shield 50 extends upward from the radiation shield 10, the upper end opening 50 c comes into contact with the ceiling surface 1 b of the vacuum chamber 1, and the gap between the opening 50 c and the ceiling surface 1 b is closed. Yes. Others are the same as those in the first embodiment, and thus the description thereof is omitted.
 実施の形態5によれば、実施の形態4と同様の効果を得ることができる。 According to the fifth embodiment, the same effect as in the fourth embodiment can be obtained.
 また、造形領域形成部と反対側に設けられた開口部を真空チャンバの天井面に当接させ、造形領域形成部と反対側に設けられた開口部と天井面との間の隙間を塞いだので、造形領域から回収する熱輻射の量を維持しつつ、回収された熱輻射が造形領域と反対側の開口部から漏れ出ることをより確実に抑制し、さらに効率的に粉末層の予熱を行うことができる。 Also, the opening provided on the side opposite to the modeling area forming part is brought into contact with the ceiling surface of the vacuum chamber, and the gap between the opening provided on the side opposite to the modeling area forming part and the ceiling surface is closed. Therefore, while maintaining the amount of heat radiation recovered from the modeling area, the recovered heat radiation is more reliably suppressed from leaking from the opening on the side opposite to the modeling area, and the powder layer is preheated more efficiently. It can be carried out.
 本願は、様々な例示的な実施の形態及び実施例が記載されているが、1つ、または複数の実施の形態に記載された様々な特徴、態様、及び機能は特定の実施の形態の適用に限られるのではなく、単独で、または様々な組み合わせで実施の形態に適用可能である。
従って、例示されていない無数の変形例が、本願に開示される技術の範囲内において想定される。例えば、少なくとも1つの構成要素を変形する場合、追加する場合または省略する場合、さらには、少なくとも1つの構成要素を抽出し、他の実施の形態の構成要素と組み合わせる場合が含まれるものとする。
Although this application describes various exemplary embodiments and examples, various features, aspects, and functions described in one or more embodiments may be applied to particular embodiments. The present invention is not limited to this, and can be applied to the embodiments alone or in various combinations.
Accordingly, innumerable modifications not illustrated are envisaged within the scope of the technology disclosed in the present application. For example, the case where at least one component is deformed, the case where the component is added or omitted, the case where the at least one component is extracted and combined with the component of another embodiment are included.
1 真空チャンバ、1a 床面、1b 天井面、2 電子銃、3 造形領域形成部、4 台座(予熱部材)、7 粉末層、10、101、20、30、40、50 輻射シールド、10a、40a、50a 中空部、10b、10c、101a、40b、40c、50b、50c 開口部、11、21、31 上面、13、23 第1の側面部、23A~23C 第1の側面構成部材、14、24 第2の側面部、24A~24C 第2の側面構成部材、33 側面部、33A~33C 側面構成部材、131、141 金属板、100、200、300 三次元造形装置、EB1 電子ビーム、EB2 予熱用電子ビーム、H1 熱移動、H2 熱輻射 1 vacuum chamber, 1a floor surface, 1b ceiling surface, 2 electron gun, 3 modeling area forming part, 4 pedestal (preheating member), 7 powder layer, 10, 101, 20, 30, 40, 50 radiation shield, 10a, 40a , 50a hollow portion, 10b, 10c, 101a, 40b, 40c, 50b, 50c opening portion, 11, 21, 31 upper surface, 13, 23 first side surface portion, 23A to 23C first side surface constituting member, 14, 24 Second side part, 24A-24C Second side constituent member, 33 side part, 33A-33C side constituent member, 131, 141 metal plate, 100, 200, 300 three-dimensional modeling apparatus, EB1 electron beam, EB2 preheating Electron beam, H1 heat transfer, H2 heat radiation

Claims (9)

  1.  粉末層を形成する粉末材料を電子ビームの照射によって選択的に固化させる工程を繰り返すことにより三次元造形物を製造する三次元造形装置であって、
     前記粉末材料に電子ビームを照射する電子ビーム照射手段と、
     前記電子ビーム照射手段に対向する面に設けられ、前記粉末材料の粉末層が形成される造形領域形成部と、
     昇温した状態で前記粉末層に埋め込まれ、熱移動により前記粉末材料を予熱する予熱部材と、
     前記造形領域形成部を覆い、前記予熱部材からの熱輻射により昇温するシールド部材とを備え、
    前記粉末材料は、前記予熱部材からの熱移動及び昇温した前記シールド部材からの熱輻射により予熱されることを特徴とする三次元造形装置。
    A three-dimensional modeling apparatus for manufacturing a three-dimensional structure by repeating a step of selectively solidifying a powder material forming a powder layer by irradiation with an electron beam,
    An electron beam irradiation means for irradiating the powder material with an electron beam;
    A modeling region forming portion provided on a surface facing the electron beam irradiation means, and a powder layer of the powder material is formed;
    A preheating member that is embedded in the powder layer in a heated state and preheats the powder material by heat transfer;
    A cover member that covers the modeling region forming part and that is heated by heat radiation from the preheating member;
    The three-dimensional modeling apparatus, wherein the powder material is preheated by heat transfer from the preheating member and heat radiation from the heated shield member.
  2.  前記予熱部材は、前記電子ビーム照射手段が照射する予熱用電子ビームにより昇温することを特徴とする請求項1に記載の三次元造形装置。 The three-dimensional modeling apparatus according to claim 1, wherein the temperature of the preheating member is raised by a preheating electron beam irradiated by the electron beam irradiation means.
  3.  前記シールド部材は、前記造形領域形成部に近いほど前記造形領域形成部が設けられた面と平行な方向の断面積が大きいことを特徴とする請求項1または2に記載の三次元造形装置。 The three-dimensional modeling apparatus according to claim 1 or 2, wherein the shield member has a larger cross-sectional area in a direction parallel to a surface on which the modeling region forming unit is provided, as it is closer to the modeling region forming unit.
  4.  前記シールド部材は、前記造形領域形成部の方向に延び、前記シールド部材の上面に対して鋭角をなす側面部を備えたことを特徴とする請求項1から3のいずれか1項に記載の三次元造形装置。 The tertiary according to any one of claims 1 to 3, wherein the shield member includes a side surface portion extending in a direction of the modeling region forming portion and forming an acute angle with respect to an upper surface of the shield member. Original modeling device.
  5.  前記側面部は、互いに間隔を空けて重ねられた複数枚の板状部材であることを特徴とする請求項4に記載の三次元造形装置。 5. The three-dimensional modeling apparatus according to claim 4, wherein the side surface portion is a plurality of plate-like members that are stacked with a space therebetween.
  6.  前記板状部材は、3重に重ねられていることを特徴とする請求項5に記載の三次元造形装置。 The three-dimensional modeling apparatus according to claim 5, wherein the plate-like members are stacked in a triple manner.
  7.  前記側面部は、前記造形領域形成部に近いほど前記鋭角の角度が大きいことを特徴とする請求項4から6のいずれか1項に記載の三次元造形装置。 The 3D modeling apparatus according to any one of claims 4 to 6, wherein the acute angle is larger as the side surface portion is closer to the modeling region forming unit.
  8.  前記側面部は、前記造形領域形成部に対向する面が放物面であることを特徴とする請求項4から7のいずれか1項に記載の三次元造形装置。 The three-dimensional modeling apparatus according to any one of claims 4 to 7, wherein a surface of the side surface portion facing the modeling region forming unit is a parabolic surface.
  9.  前記シールド部材は、前記造形領域形成部と反対側に設けられた開口部が前記造形領域形成部と対向する面に当接していることを特徴とする請求項4から8のいずれか1項に記載の三次元造形装置。 9. The shield member according to any one of claims 4 to 8, wherein an opening provided on a side opposite to the modeling region forming portion is in contact with a surface facing the modeling region forming portion. The three-dimensional modeling apparatus described.
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