WO2018191860A1 - Procédé et dispositif de fabrication d'un capteur de pression d'air à film mince sur face d'extrémité de fibre optique - Google Patents

Procédé et dispositif de fabrication d'un capteur de pression d'air à film mince sur face d'extrémité de fibre optique Download PDF

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Publication number
WO2018191860A1
WO2018191860A1 PCT/CN2017/080877 CN2017080877W WO2018191860A1 WO 2018191860 A1 WO2018191860 A1 WO 2018191860A1 CN 2017080877 W CN2017080877 W CN 2017080877W WO 2018191860 A1 WO2018191860 A1 WO 2018191860A1
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Prior art keywords
film
hot air
fiber
module
generating module
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PCT/CN2017/080877
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English (en)
Chinese (zh)
Inventor
何俊
王义平
张哲�
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深圳大学
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Application filed by 深圳大学 filed Critical 深圳大学
Priority to PCT/CN2017/080877 priority Critical patent/WO2018191860A1/fr
Publication of WO2018191860A1 publication Critical patent/WO2018191860A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means

Definitions

  • the invention belongs to the field of optical fiber sensing, and in particular relates to a preparation method and a preparation device for a fiber end face film type air pressure sensor.
  • the fiber optic sensor is compact, anti-electromagnetic interference and easy to network. It has been widely used in building structures and environmental monitoring.
  • Fiber-optic end face film type FPI Fabry-Perot Interferometer
  • the fiber end face film type FPI is coated with a film on the flat fiber end face. After the irradiation light is incident on the fiber, the two beams reflected at the interface between the fiber and the film, the film and the air form an FPI.
  • the existing fiber end face film FPI manufacturing methods include: solution dipping method, spin coating method, ultraviolet glue curing method and the like.
  • the solution dipping method and the spin coating method are complicated.
  • the solution dipping method requires a solution to be prepared in advance, and then the flat fiber end face is immersed in the solution, and then taken out, air-dried and solidified to form an end cap.
  • Spin coating requires special spin coating equipment and requires precise process control.
  • the UV glue curing method requires special glue, and since the UV modulus is relatively large after curing, the UV adhesive end cap FPI pressure sensitivity reported recently is relatively low (about 1 nm/MPa).
  • the prior art does not provide a fabrication method that simultaneously satisfies the high sensitivity of the device and is simple and low-cost, and needs improvement.
  • the technical problem to be solved by the present invention is to provide a method and a device for preparing a fiber end face film type air pressure sensor, which aim to solve the problem that the prior art does not provide a method for simultaneously satisfying high sensitivity and simple and low cost of the device.
  • the invention is realized by the invention, comprising a light source module, a fiber coupler, a spectrum acquisition and analysis module, a conductive fiber, a film and a hot air generating module, wherein;
  • An output port of the light source module is connected to the first port of the fiber coupler for generating illumination light of a preset wavelength, and transmitting the illumination light to the fiber coupler through the output port;
  • a second port of the fiber coupler is coupled to an input port of the conductive fiber, and a third port of the fiber coupler is coupled to an input port of the spectral acquisition and analysis module for coupling the illumination light, and Transmitting the coupled illumination light to the conductive fiber;
  • An end surface of the output port of the conductive fiber is wrapped with the film, and the coupled illumination light is transmitted to the film for reflection, and the reflected light of the film is collected and sent to the fiber coupler to Transmitting the reflected light to the spectral acquisition and analysis module by the fiber coupler;
  • An output port of the spectral acquisition and analysis module is coupled to an input port of the hot air generating module for passing a preset film according to a wavelength of light of the reflected light and a free spectral width of the reflected light
  • the thickness calculation formula calculates the thickness of the film, compares the thickness of the film with a preset film thickness, generates a control signal according to the comparison result, and sends the control signal to the hot air generation module;
  • the hot air generating module is configured to generate hot air corresponding to temperature and wind speed according to the control signal, wherein the hot air acts on the surface of the film to control the thickness of the film to a preset film thickness, and The film is attached to the end face of the output port of the conductive fiber.
  • the preparation device further includes a fiber cutter for cutting the end surface of the output port of the conductive fiber, the fiber cutter being a mechanical fiber cutter or a femtosecond laser cutter.
  • the light source module is a light source module that generates a broadband light source
  • the broadband light source includes a stimulated spontaneous radiation light source or a super continuous light source.
  • the fiber coupler includes at least three ports, and the fiber coupler is one of a tree fiber coupler, a star fiber coupler, or a fiber circulator.
  • the spectral acquisition and analysis module is one of a diffraction grating spectrometer, a prism spectrometer, an interference spectrometer or a micro spectrometer.
  • the film is a polymer film including any one of a polyvinyl chloride film, a polyethylene film, a nylon film, or a mylar film.
  • the hot air generating module is a plastic welding torch with adjustable temperature and wind speed.
  • the invention also provides a preparation method of an optical fiber end face film type air pressure sensor, comprising:
  • the hot air acts on the surface of the film to fix the film on the end face of the output port of the conductive fiber;
  • the hot air generating module is turned off to cool and solidify the film to obtain a preset fiber end face film type air pressure sensor.
  • the initializing the temperature and the wind speed of the hot air generated by the hot air generating module includes:
  • the initial temperature of the hot air generated by the hot air generating module is set to a temperature matching the melting point of the material of the film, and the wind speed of the hot air generated by the hot air generating module is set to zero.
  • the method further includes:
  • the spectral acquisition and analysis module calculates the thickness of the current film according to a preset film thickness calculation formula and a light wavelength of the reflected light;
  • the wind speed if equal, sends a shutdown signal to the hot air generating module;
  • the shutting down the hot air generating module includes:
  • the hot air generating module After receiving the shutdown signal, the hot air generating module performs a closing operation.
  • the present invention has the beneficial effects that the preparation device and the preparation method provided by the embodiments of the present invention can control the hot air generated by the hot air generating module according to the thickness of the film, thereby further controlling the thickness of the film and obtaining the preset.
  • the film thickness is finally obtained as a preset fiber end face film type air pressure sensor.
  • the thickness of the film is precisely controlled by the hot air generated by the hot air generating module, and the manufactured fiber end face film type air pressure sensor has high precision, and the manufacturing method is simple and the cost is low.
  • FIG. 1 is a schematic structural view of an optical fiber end face film type air pressure sensor according to an embodiment of the present invention
  • FIG. 2 is a schematic structural view of a device for preparing an optical fiber end face film type air pressure sensor according to an embodiment of the present invention
  • FIG. 3 is a flow chart of a method for preparing an optical fiber end face film type air pressure sensor according to an embodiment of the present invention
  • FIG. 4 is a physical flow chart of a method for preparing an optical fiber end face film type air pressure sensor according to an embodiment of the present invention
  • FIG. 5 is a reflection spectrum of an optical fiber end face film type air pressure sensor according to an embodiment of the present invention, and a fiber end face thin film microscope image corresponding to a reflection spectrum;
  • FIGS 6a to 6d are diagrams showing the air pressure of the optical fiber end face film type air pressure sensor according to an embodiment of the present invention. The device and test results should be tested.
  • the fiber optic sensor is compact and sensitive, and is widely used in engineering technology.
  • the fiber end face FPI air pressure sensor relies on making a micron-scale FP cavity on the fiber end face, so that the incident light is at the interface between the conductive fiber and the FP cavity (Fabry-perot Cavity) (interface I), FP.
  • the cavity interface and the air interface (interface II) are reflected, and the two reflected light interfere with white light and conduct back to the conducting fiber, so that white light interference fringes appear in the reflection spectrum of the conducting fiber, as shown in FIG.
  • the FP cavity material is subjected to pressure deformation, the cavity length L changes, and the interference fringes drift.
  • the detected light intensity can be expressed as:
  • I 1 , I 2 are the light intensities reflected back to the single mode fiber by interfaces I and II, respectively, ⁇ is the wavelength of light, and n is the effective refractive index of the cavity material. Is the initial phase difference between the two reflected lights.
  • an embodiment of the present invention provides an optical fiber end face film type air pressure sensor as shown in FIG. 2, including a light source module 10, a fiber coupler 20, a spectrum acquisition and analysis module 60, a conductive fiber 30, a film 40, and hot air generation.
  • Module 50 wherein;
  • the output port a1 of the light source module 10 is connected to the first port b1 of the fiber coupler 20 for generating the preset wavelength of illumination light, and the illumination light is sent to the fiber coupler 20 through the output port;
  • the second port b2 of the fiber coupler 20 is connected to the input port c1 of the conductive fiber 30, and the third port b3 of the fiber coupler 20 is connected to the input port d1 of the spectrum acquisition and analysis module 60 for coupling the illumination light, and Transmitting the coupled illumination light to the conductive fiber 30;
  • the end face of the output port c2 of the conductive fiber 30 is wrapped with a film 40 for conducting the coupled illumination light to the film 40 for reflection, and the reflected light of the collection film 40 is sent to the fiber coupler 20 for passing through the fiber coupler. 20 transmitting the reflected light to the spectral acquisition and analysis module 60;
  • the output port d2 of the spectral acquisition and analysis module 60 is connected to the input port e1 of the hot air generating module 50 for calculating the optical wavelength of the reflected light and the free spectral width of the reflected light by a preset film thickness calculation formula.
  • the thickness of the film is compared with the thickness of the film, and a control signal is generated based on the comparison result and sent to the hot air generation module 50.
  • a hot air generating module 50 configured to generate hot air corresponding to temperature and wind speed according to the control signal, the hot air acting on the surface of the film to control the thickness of the film to a preset film thickness, and The film is fixed to the end face of the output port c2 of the conductive fiber 30.
  • the hot air generating module 50 is initialized before the preparation is performed, and the initialization process is: the hot air generating module 50 is produced.
  • the initial temperature of the raw hot air is set to a temperature matching the melting point of the material of the film, and the wind speed of the hot air generated by the hot air generating module is set to 0, that is, the initial hot air temperature generated by the hot air generating module 50 is based on different films.
  • the melting point of the material is set so that it is suitable for many types of films.
  • the preparation device provided by the embodiment of the present invention further includes a fiber cutter that acts on the output port c2 of the conductive fiber 30.
  • the fiber cutter can be a mechanical fiber cutter, a femtosecond laser cutter, and the like.
  • the light source module 10 is a light source module that generates a broadband light source, and the broadband light source includes a stimulated spontaneous radiation light source or a super continuous light source.
  • the fiber coupler 20 includes at least three ports, and the fiber coupler 20 may be one of a tree fiber coupler, a star fiber coupler, or a fiber circulator.
  • the spectral acquisition and analysis module 60 can be one of a diffraction grating spectrometer, a prism spectrometer, an interference spectrometer, or a micro spectrometer.
  • the film 40 is a polymer film including any one of a polyvinyl chloride (PVC) film, a polyethylene (PE) film, a nylon film (PA), or a polyester film (PET).
  • the hot air generating module 50 can generate an air flow with adjustable temperature and wind speed, and can be a plastic welding torch with adjustable temperature and wind speed. Plastic torch with adjustable temperature and wind speed.
  • the conductive fiber 30 can be any of a conventional single mode fiber, a photonic crystal fiber, or other specialty fiber.
  • the spectral acquisition and analysis module 60 can calculate the thickness of the thin film 40 according to the free spectral range of the spectrum of the reflected light (FSR: Free Spectrum Range), and generate a feedback signal, which is transmitted to the hot air generating module 50 to control the hot air.
  • the generating module 50 generates hot air corresponding to the wind speed, Further, the effect of controlling the thickness of the film 40 is achieved.
  • the thickness of film 40 can be expressed as a function of FSR:
  • ⁇ is the wavelength of light
  • n is the optically effective refractive index of the film
  • L is the thickness of film 40.
  • the hot air generating module 50 is controlled by the feedback signal generated by the spectrum generating module 60.
  • the wind speed of the hot air generating module 50 is automatically increased, and the thickness of the film 40 is increased.
  • the thickness of the film 40 is then reduced and then reciprocated until the thickness of the film 40 reaches a predetermined film thickness.
  • FIG. 3 is a diagram of a method for fabricating an optical fiber end face film type air pressure sensor according to an embodiment of the present invention, comprising:
  • the hot air generating module is turned on, and a temperature and a wind speed of the hot air generated by the hot air generating module are initialized, so that the hot air generating module generates a hot air corresponding to the temperature and the wind speed according to the control signal sent by the spectrum collecting and analyzing module.
  • the hot air acts on the surface of the film to secure the film to the end face of the output port of the conductive fiber.
  • the hot air generating module is turned off to cool and solidify the film to obtain a preset fiber end face film type air pressure sensor.
  • a PVC (polyvinyl chloride) plastic wrap film is selected as a film for forming an FP cavity, a common single mode fiber is used as a conductive fiber, and a mechanical fiber cutter is used as a fiber cutting device.
  • a low-bias full-broadband mobile phone self-radiating light source (ASE, Amplified Spontaneous Emission) is used as a light source module, an optical spectrometer (OSA) and manual operation are used as a spectrum generating module, and an adjustable hot air plastic welding torch is used as a hot air generating module.
  • the first port b1 of the fiber coupler is connected to the output port a1 of the light source module
  • the second port b2 of the fiber coupler is connected to the input port c1 of the ordinary single mode fiber
  • the third port b3 is connected to the input port d1 of the spectrometer.
  • FIG. 4 shows the physical connection provided by the embodiment, wherein the light emitted by the light source is transmitted through the single mode fiber and reflected on the end face of the single mode fiber, and the reflected light is input to the spectrometer through the 3 dB fiber coupler.
  • the end face of the single-mode fiber is cut flat using a mechanical fiber cutter.
  • the intensity of the reflected signal on the spectrometer can be observed to be enhanced, because the interface reflection is enhanced after the fiber end face is flattened, and The reflected light is more easily coupled into the conducting fiber and transmitted to the spectrometer, but there is no periodic intensity distribution because only one interface of the reflected light is conducted into the spectrometer.
  • the PVC wrap film covering the end face of the single-mode fiber was manually adjusted while observing the reflection spectrum.
  • the reflection spectrum exhibits a periodic interference spectrum with a high contrast ratio
  • the position of the fixed wrap film does not move.
  • the hot air plastic welding torch is turned on, the tuyere is facing the end face of the fiber, and the temperature is adjusted to melt the PVC cling film.
  • the thickness of the wrapped film on the end face of the single-mode fiber is calculated according to the interference spectrum FSR observed on the spectrometer.
  • the wind speed of the hot-air plastic welding torch is increased. It is known that when the thickness of the film calculated by the reflectance spectrum of the spectrometer reaches a predetermined thickness, the hot air plastic torch is turned off. The PVC cling film is gradually cooled and solidified on the end face of the fiber to form a stable FPI.
  • Fig. 5 shows four different film thickness air pressure sensors of the fiber end face fabricated by the above method, and corresponding reflection spectra. It can be seen that the FPI spectrum of the fiber end face film prepared by this method has high contrast and the film thickness can be controlled.
  • FIG. 5 shows a manual commercial gas generating device with a high precision digital barometric pressure meter built into the air chamber.
  • the fiber optic sensor is sealed in the air chamber using AB curing glue.
  • the air pressure test is performed, and the whole test is performed at room temperature (25 ° C).
  • the air pressure reaches the set value use the air pressure fine adjustment knob to adjust the air pressure to the set value.
  • the boost interval is 10KPa. After the air pressure reaches the set value, keep the air pressure constant for 5 minutes, after ten minutes.
  • Figure 6b shows the drift of the wavelength with an air pressure at an interference minimum near 1565 nm. It can be seen that as the gas pressure rises from 0 to 60 KPa, the spectrum drifts toward the short-wave direction.
  • the same method is used for depressurization, and the spectrum is drifted in the long-wave direction as the pressure is lowered, as shown in Fig. 6c.
  • the high sensitivity of the fiber-optic sensor device is -66.07 nm/M Pa, as shown in Fig. 6d. So far, the present embodiment has verified the simplicity and reliability of the proposed fiber end face film type air pressure sensor manufacturing apparatus and method.

Abstract

L'invention concerne un dispositif de fabrication d'un capteur de pression d'air à film mince sur face d'extrémité de fibre optique, comprenant un module source de lumière (10), un coupleur de fibre optique (20), un module d'acquisition et d'analyse spectrales (60), une fibre optique conductrice (30), un film mince (40) et un module de production d'air chaud (50). Un port de sortie du module source de lumière (10) est connecté à un premier port du coupleur de fibre optique (20). Un deuxième port du coupleur de fibre optique (20) est connecté à un port d'entrée de la fibre optique conductrice (30) et un troisième port du coupleur de fibre optique (20) est connecté à un port d'entrée du module d'acquisition et d'analyse spectrales (60). Le film mince (40) se trouve sur la face d'extrémité d'un port de sortie de la fibre optique conductrice (30). Un port de sortie du module d'acquisition et d'analyse spectrales (60) est connecté à un port d'entrée du module de production d'air chaud (50). L'épaisseur du film mince (40) est contrôlée avec précision au moyen de l'air chaud produit par le module de production d'air chaud (50) et le capteur de pression d'air à film mince sur face d'extrémité de fibre optique fabriqué présente une précision élevée. De plus, le procédé de fabrication est simple et peu coûteux. L'invention concerne en outre un procédé de fabrication d'un capteur de pression d'air à film mince sur face d'extrémité de fibre optique.
PCT/CN2017/080877 2017-04-18 2017-04-18 Procédé et dispositif de fabrication d'un capteur de pression d'air à film mince sur face d'extrémité de fibre optique WO2018191860A1 (fr)

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PCT/CN2017/080877 WO2018191860A1 (fr) 2017-04-18 2017-04-18 Procédé et dispositif de fabrication d'un capteur de pression d'air à film mince sur face d'extrémité de fibre optique

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PCT/CN2017/080877 WO2018191860A1 (fr) 2017-04-18 2017-04-18 Procédé et dispositif de fabrication d'un capteur de pression d'air à film mince sur face d'extrémité de fibre optique

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Citations (8)

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Publication number Priority date Publication date Assignee Title
CN1616939A (zh) * 2003-11-14 2005-05-18 中国科学院电子学研究所 聚合材料气压传感器芯片
CN101692016A (zh) * 2009-07-17 2010-04-07 东南大学 一种与cmos工艺兼容的气压传感器及其制备工艺
JP2010096505A (ja) * 2008-10-14 2010-04-30 Nippon Ceramic Co Ltd 微気圧センサおよび微気圧センサ製造方法
CN101852668A (zh) * 2010-06-21 2010-10-06 东南大学 微机械气压传感器芯片的封装结构及其制备方法
CN103011057A (zh) * 2012-12-03 2013-04-03 东南大学 一种微电子机械系统电容式气压传感器的制备方法
CN106586942A (zh) * 2016-12-27 2017-04-26 河海大学常州校区 一种微电子气压传感器及其制备方法
CN106895942A (zh) * 2017-04-18 2017-06-27 深圳大学 一种光纤端面薄膜型气压传感器的制备方法及制备装置
CN107101992A (zh) * 2017-06-01 2017-08-29 中国农业大学 一种d型光纤表面增强拉曼探针的制备方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1616939A (zh) * 2003-11-14 2005-05-18 中国科学院电子学研究所 聚合材料气压传感器芯片
JP2010096505A (ja) * 2008-10-14 2010-04-30 Nippon Ceramic Co Ltd 微気圧センサおよび微気圧センサ製造方法
CN101692016A (zh) * 2009-07-17 2010-04-07 东南大学 一种与cmos工艺兼容的气压传感器及其制备工艺
CN101852668A (zh) * 2010-06-21 2010-10-06 东南大学 微机械气压传感器芯片的封装结构及其制备方法
CN103011057A (zh) * 2012-12-03 2013-04-03 东南大学 一种微电子机械系统电容式气压传感器的制备方法
CN106586942A (zh) * 2016-12-27 2017-04-26 河海大学常州校区 一种微电子气压传感器及其制备方法
CN106895942A (zh) * 2017-04-18 2017-06-27 深圳大学 一种光纤端面薄膜型气压传感器的制备方法及制备装置
CN107101992A (zh) * 2017-06-01 2017-08-29 中国农业大学 一种d型光纤表面增强拉曼探针的制备方法

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