WO2018120521A1 - Optical film and manufacturing method therefor - Google Patents

Optical film and manufacturing method therefor Download PDF

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Publication number
WO2018120521A1
WO2018120521A1 PCT/CN2017/080748 CN2017080748W WO2018120521A1 WO 2018120521 A1 WO2018120521 A1 WO 2018120521A1 CN 2017080748 W CN2017080748 W CN 2017080748W WO 2018120521 A1 WO2018120521 A1 WO 2018120521A1
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WO
WIPO (PCT)
Prior art keywords
substrate
layer
dielectric layer
optical film
light
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PCT/CN2017/080748
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French (fr)
Chinese (zh)
Inventor
郭滨刚
Original Assignee
深圳市光科全息技术有限公司
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Application filed by 深圳市光科全息技术有限公司 filed Critical 深圳市光科全息技术有限公司
Priority to JP2019536042A priority Critical patent/JP6760678B2/en
Publication of WO2018120521A1 publication Critical patent/WO2018120521A1/en

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/26Reflecting filters

Definitions

  • the present invention belongs to the technical field of optical films, and in particular, to an optical film and a method for fabricating the same.
  • an optical film is often attached to the surface of the optical device or an optical film is plated, and the light wave or a specific light is realized by the action of the optical film.
  • the strong reflection of wavelength light waves that is, the filtering function of light waves or light waves of a specific wavelength.
  • the anti-blue film is attached to the screen of the mobile phone, and the anti-blue film can reflect the high-energy blue light emitted by the LED light source in the mobile phone, that is, the high-energy blue light is filtered out, and the blue light transmitted by the screen of the mobile phone is greatly reduced, thereby reducing the damage of the blue light to the eyes. .
  • Existing optical films are generally composed of alternating dielectric layers of high and low refractive indices, which can provide strong reflection of light waves of a specific wavelength, but existing optical films are reflecting specific wavelengths.
  • the light wave is often reflected off a part of the light wave of other wavelengths near the specific wavelength light wave, that is, the optical film has a wide filtering bandwidth for the light wave of the specific wavelength, so that the color of the light emitted through the optical film is deviated, and the like. Affect the display effect.
  • An object of the embodiments of the present invention is to provide an optical film and a method for fabricating the same, which are to cope with technical problems such as wide filtering bandwidth of optical films in the prior art.
  • a preferred embodiment of the present invention provides an optical film for reflecting light of a certain wavelength band, comprising: a substrate, a dielectric layer and a granular layer alternately disposed on the substrate; and the granular layer includes a plurality of particles
  • the particle spacing ranges from ⁇ 8 to ⁇ 2
  • the optical thickness of the dielectric layer ranges from ⁇ 2 /8 to ⁇ 2 12
  • the refractive index of the granular layer is greater than or less than The refractive index of the dielectric layer, wherein ⁇ ⁇ ⁇ ⁇ 2 is the center wavelength of the first band of light and the center wavelength of the second band of light, respectively.
  • the center wavelength ⁇ of the first wavelength band and the second wave The center wavelength ⁇ 2 of the segment light is equal.
  • a layer contacting the substrate is the particle layer, and an outermost layer away from the substrate is the particle layer or the dielectric layer.
  • a layer contacting the substrate is the dielectric layer, and an outermost layer away from the substrate is the particle layer or the dielectric layer.
  • the particles have a diameter smaller than ⁇ J4 .
  • the center wavelength ⁇ of the first wavelength band light and the center wavelength of the second wavelength band person 2 range from 100 nanometers to 2000 micrometers.
  • the material used for the particles and the dielectric layer includes magnesium oxide, cerium oxide, zinc sulfide, zinc selenide, gallium arsenide, magnesium fluoride, Calcium fluoride, alumina, SiO x, TiO ⁇ NbO xo
  • the substrate comprises a metal substrate, a glass substrate, a quartz substrate, a rubber substrate or a plastic substrate.
  • a preferred embodiment of the present invention further provides a method of fabricating an optical film, including:
  • a dielectric layer and a particle layer alternately fabricated on the substrate includes a plurality of particles, and the particle spacing ranges from ⁇ 2 /8 to ⁇ 2 /2, and the particle layer
  • the refractive index is greater than or less than the refractive index of the dielectric layer, wherein ⁇ ⁇ ⁇ ⁇ 2 is the center wavelength of the first band of light and the center wavelength of the second band of light, respectively.
  • the method for alternately fabricating the dielectric layer and the particle layer includes a vacuum film forming process, a sol-gel film forming process, and/or a thin film forming process; wherein the vacuum film forming process comprises physical/chemical vapor deposition, evaporation coating, magnetron sputtering coating, ion plating, epitaxial growth; the precision error of the particle spacing is not greater than the particle spacing 5 %; the accuracy error of the optical thickness is not more than 5% of the optical thickness.
  • a preferred embodiment of the present invention provides an optical film and a method of fabricating the same.
  • the optical film has a dielectric layer and a particle layer alternately disposed on a substrate, wherein the particle layer includes a plurality of particles, and
  • the particle spacing ranges from ⁇ to ⁇ ,12, and the optical thickness of the dielectric layer ranges from ⁇ 2 /8 to ⁇ 2/2, and the refractive index of the granular layer is greater than or less than the refractive index of the texture layer, wherein , ⁇ ⁇ ⁇ ⁇ 2 are the center wavelength of the first band light and the center wavelength of the second band light, respectively.
  • the optical film can strongly reflect the light of the first band and the second band at the same time, without affecting the light waves of other bands, that is, the narrow band filtering of the light of the first band and the second band; especially when the first The center wavelength of the band light is equal to the center wavelength of the second band of light, and narrowband filtering of light in a particular band can be achieved.
  • FIG. 1 is a schematic structural view of a first optical film according to a preferred embodiment of the present invention.
  • FIG. 2 is a schematic structural view of a second optical film according to a preferred embodiment of the present invention.
  • FIG. 3 is a schematic structural view of a third optical film according to a preferred embodiment of the present invention.
  • FIG. 4 is a schematic structural view of a fourth optical film according to a preferred embodiment of the present invention.
  • FIG. 1 is a schematic structural view of a first optical film according to a preferred embodiment of the present invention.
  • the optical film in the preferred embodiment can be used to reflect light of a certain wavelength band, and let light of other wavelength bands pass through, that is, filter light of a certain wavelength band, for example, can be attached to the surface of the LED display to reduce the transmission of blue light; It can be used to select the light wave of a specific wavelength band in the light wave and separate it by reflection to obtain the light wave of a specific wavelength band.
  • the specific use of the optical film in the preferred embodiment will not be limited.
  • the optical film in the preferred embodiment includes: a substrate 10, a particle layer 11, and a dielectric layer 12.
  • the portion shown by the broken line in Fig. 1 is the particle layer 11, and the particle layer 11 includes a plurality of particles 111, that is, the particle layer 11 is composed of a plurality of particles 111 distributed on the substrate 10.
  • the particle layer 11 and the dielectric layer 12 are alternately disposed on the substrate 10 as shown in FIG.
  • the first layer in contact with the substrate 10 is a granular layer 11
  • the first dielectric layer 12 is a first dielectric layer 12
  • the first dielectric layer 12 is filled with particles. 111 gaps.
  • On the first dielectric layer 12 is a second granular layer 11, and so on, until a structure as shown in Fig. 1 is formed.
  • L is the particle spacing may be in the range [lambda], / 8 to [lambda], / 2, the range of the optical thickness of the dielectric layer may be a 2/8 to human 2/2, and the refractive index of the particle layer 11 It is larger or smaller than the refractive index of the dielectric layer 12, wherein ⁇ ⁇ ⁇ ⁇ 2 is the center wavelength of the first band light and the center wavelength of the second band light, respectively.
  • d is the physical thickness of the dielectric layer. In the fabrication of the dielectric layer 12, the physical thickness d of the dielectric layer 12 has a tolerance range of plus or minus 5 nm.
  • the accuracy error of the particle pitch is not more than 5% of the particle pitch; the accuracy of the optical thickness is not more than 5% of the optical thickness.
  • the value of the particle spacing L may be greater than the optical thickness of the dielectric layer, or may be smaller than the optical thickness of the dielectric layer, or may be equal to the optical thickness of the dielectric layer, and is not specifically limited herein.
  • the optical film can strongly reflect the center wavelength of the first wavelength light and the center wavelength of the second wavelength light, and does not affect the light waves of other wavelength bands, thereby achieving the effect of narrow band filtering.
  • the particle spacing is taken as human, /4, and the optical thickness of the dielectric layer is taken to be ⁇ 2 /4.
  • the center wavelength ⁇ of the first band of light is equal to the center wavelength ⁇ 2 of the second band of light. That is, the optical film is used for narrowband filtering of light having a center wavelength. For example, when the center wavelength ⁇ of the first band of light and the center wavelength ⁇ 2 of the second band of light are both 440 nm, the optical film will only strongly reflect high-energy blue light having a center wavelength of 440 nm, that is, high-energy blue light. Perform narrowband filtering.
  • the optical film When the optical film is attached to the screen of the mobile phone, when the light emitted by the LED light source in the mobile phone is incident on the optical film, the optical film reflects 90% of the high-energy blue light in the LED light source, that is, filters out most of the high-energy blue light, so that the optical Membrane
  • the transmitted transmitted light contains only a small amount of blue light of about 10%, thereby reducing the damage of high-energy blue light to the eyes.
  • the optical film adopts a structure in which the particle layer 11 and the dielectric layer 12 are alternately arranged, and the particle spacing is 110 nm ( ⁇ , /4), the bandwidth of the optical film for filtering blue light is narrow, thereby avoiding The same color that filters out the blue light also filters out other colors of light, which can reduce the damage of high-energy blue light to the eyes while ensuring the display effect.
  • the center wavelength band light of the first person, and the center wavelength of the light of the second wavelength band may not be equal to 2 In other preferred embodiments.
  • the optical film can realize the central wavelength of light two narrow band filters, for example, the center wavelength of the first wavelength band of the light ⁇ ⁇ 440 nm, the center wavelength band of light of the second person 2 takes 700 nm, so that the optical film can be high-energy blue and red with a strong reflection inch, to achieve narrowband filtering of blue and red light.
  • the center wavelength ⁇ of the first band of light and the center wavelength ⁇ 2 of the second band of light range from 100 nanometers to 2000 micrometers. In practical applications, the first wavelength band may be used.
  • the center wavelength ⁇ of the light and the center wavelength ⁇ 2 of the second band light design the pitch of the particles 111 and the thickness of the dielectric layer 12, thereby achieving strong reflection of light of a certain central wavelength or two central wavelengths.
  • the size of the particles 111 should not be too large.
  • the diameter of the particles 111 is smaller than ⁇ , /4, and the sizes of the plurality of particles may not be completely the same.
  • the particle layer 11 consists of only one layer of particles 111, the diameter of the particles 111 is the thickness of the particle layer 11.
  • the materials used for the particles 111 and the dielectric layer 12 include magnesium oxide, cerium oxide, zinc sulfide, zinc selenide, gallium arsenide, magnesium fluoride, calcium fluoride, aluminum oxide, SiO x , TiO x , One or several of NbO x .
  • SiO x is a compound formed of two elements of silicon (Si) and oxygen (0).
  • silicon and oxygen may be generated according to a ratio of non-preset components. Compound. When the formulation is SiO ⁇ , the ratio of silicon to oxygen is ideally 1:1, but when the silicon content is high, the ratio of silicon to oxygen may be higher than 1:1.
  • SiO x a compound formed of silicon and oxygen
  • x represents a composition ratio of oxygen to silicon, such as X being 1.2.
  • TiO NbO x case is similar to SiO x and will not be described here.
  • the particles 111 and the dielectric layer 12 may also be other materials not listed above, and are not particularly limited as long as the refractive index of the particle layer 11 is greater or smaller than the refractive index of the dielectric layer 12.
  • the dielectric layer 12 may be made of zinc sulfide, so that the refractive index of the particle layer 11 Less than the refractive index of the dielectric layer 12.
  • the granular layer 11 may also be made of zinc sulfide, and the dielectric layer 12 may be made of magnesium oxide such that the refractive index of the granular layer 11 is greater than the refractive index of the dielectric layer 12.
  • different layers of the particle layer 11 or different layers of the dielectric layer 12 may also adopt different materials.
  • a part of the particle layer 11 is made of magnesium oxide, and another part of the particle layer 11 is oxidized.
  • a part of the dielectric layer 12 is made of zinc sulfide, and the other part of the dielectric layer 12 is made of zinc selenide, so that the refractive index of the granular layer 11 is smaller than the refractive index of the dielectric layer 12.
  • the specific materials of the particle layer 11 and the dielectric layer 12 can be selected according to actual needs, and are not specifically limited herein.
  • the substrate 10 is a transparent substrate, such as a glass substrate or a quartz substrate, etc., so that light passing through the optical film can be transmitted through the substrate 10, or incident light can be passed through the substrate 10 It is incident into the particle layer 11 and the dielectric layer 12.
  • incident light may be incident from the direction of the substrate 10 to the dielectric layer 12, or may be incident from the dielectric layer 12 to the direction of the substrate 10. The same technical effect can be achieved no matter which direction is incident.
  • the substrate 10 may also be a rubber substrate, a plastic substrate, a metal substrate, etc., and different substrates 10 may be selected according to the practical application of the optical film.
  • the substrate 10 when the optical film is used to reflect a certain wavelength of light in the visible light band, the substrate 10 may be a glass substrate or a quartz substrate; when the optical film is used to reflect a certain wavelength of light in the microwave band, the substrate 10 may be a ceramic substrate or a rubber.
  • Substrate or plastic substrate When the optical film does not need to transmit light waves, the substrate 10 may be a metal substrate.
  • the structure of the optical film shown in FIG. 1 is only one of them, that is, a layer contacting the substrate 10 is a particle layer 11, and an outermost layer away from the substrate 10 is a dielectric layer 12.
  • the structure of the optical film of the present invention may also be other structures such as the structures shown in Figs. 2 to 4.
  • Figures 2, 3 and 4 are schematic views showing the structure of the second, third and fourth optical films respectively provided in accordance with a preferred embodiment of the present invention.
  • one layer contacting the substrate 10 is a particle layer 11, and the outermost layer away from the substrate 10 is also a particle layer 11.
  • one layer contacting the substrate 10 is the dielectric layer 12, and the outermost layer away from the substrate 10 is also the dielectric layer 12.
  • one layer contacting the substrate 10 is a dielectric layer 12, and the outermost layer away from the substrate 10 is a granular layer.
  • FIGS. 1 to 4 only illustrate the approximate positional relationship of the particles 111, and cannot be used for limitation.
  • the specific arrangement of the plurality of particles 111 in the present invention It can be understood that, in the process of actually fabricating the granular layer 11, it is impossible to ensure that the plurality of particles 111 in each of the granular layers 11 are aligned in the same distribution manner, and the plurality of particles 111 in each of the granular layers 11 can be The irregular arrangement is as long as the pitch of the particles 111 is substantially equal.
  • the dielectric layer and the granular layer are alternately disposed on the substrate, wherein the granular layer has a plurality of particles, and the particle spacing ranges from the range of the human to the human, and the optical of the dielectric layer the thickness range of 2 human / human 8 2/2, the refractive index of the particle layer is greater than or less than the refractive index of the substance layer.
  • the optical film can strongly reflect light of one center wavelength or two center wavelengths at the same time, and does not affect the light waves of other wavelength bands, thereby achieving the effect of narrow band filtering.
  • the preferred embodiment provides a method for fabricating an optical film.
  • the optical film produced by the method can be used to reflect light of a certain wavelength band, and let light of other wavelength bands pass through, that is, filter light of a certain wavelength band, for example, It is attached to the surface of the L ED display to reduce the transmission of blue light. It can also be used to select the light wave of a specific wavelength band in the light wave and separate it by reflection to obtain the light wave of a specific wavelength band.
  • the specific use of the optical film will not be limited.
  • the manufacturing method of the optical film comprises:
  • a substrate is selected, which can be selected according to the actual use of the optical film.
  • the substrate may be a glass substrate or a quartz substrate, so that the light passing through the optical film can pass through the substrate, or the incident light can be incident on the particle layer and the medium through the substrate.
  • the substrate when the optical film is used to reflect a certain wavelength of light in the microwave band, the substrate may be a ceramic substrate, a rubber substrate or a plastic substrate; when the optical film does not need to transmit light waves, the substrate may be a metal substrate.
  • the type of the substrate is not specifically limited.
  • the particle layer and the dielectric layer are sequentially alternately deposited by chemical vapor deposition on the substrate, thereby forming alternating dielectric layers and particle layer structures on the substrate.
  • a vacuum film forming process with a controllable size and precision, a sol-gel film forming process, a self-organized film forming process, and a free combination process between the above processes may also be employed.
  • the vacuum film forming process includes physical/chemical vapor deposition, evaporation coating, magnetron sputtering coating, ion plating, epitaxial growth, and the like.
  • the parameters are prepared by precisely controlling the deposition time, deposition speed, etc., and a layer of particles is first deposited on the substrate, the particle layer includes a plurality of particles, and the plurality of particles are distributed On the surface of the substrate, and the particle spacing is controlled in humans to humans, the diameter of the particles is smaller than that of humans, and the size of the particles may be different.
  • it is the center wavelength of the first band of light, and ranges from 100 nanometers to 2000 micrometers.
  • a first layer of the dielectric layer is formed. It will be appreciated that due to the presence of gaps between the particles, the material of the first dielectric layer will fill the voids between the particles.
  • the first dielectric layer is formed by precisely controlling the deposition time, deposition speed, and the like.
  • the range of the optical thickness of the dielectric layer 2 is a human / human 8 2/2, wherein, a center wavelength [lambda] 2 of the second wavelength band of light, [lambda] 2 is in the range 100 nm to 2000 microns.
  • the accuracy error of the particle pitch is not more than 5% of the particle pitch; the accuracy error of the optical thickness is not more than 5% of the optical thickness.
  • a second layer of particles is continuously deposited on the first dielectric layer, and so on, until the last dielectric layer or particle layer is completed, and then, An optical film composed of a substrate and a dielectric layer and a particle layer alternately disposed on the substrate.
  • both the material of the particle and the material of the dielectric layer may be magnesium oxide, cerium oxide, zinc sulfide, zinc selenide, gallium arsenide, magnesium fluoride, calcium fluoride, SiO x , One or more of TiO x , NbO x , alumina , etc., other materials not listed may be used, as long as the refractive index of the particle layer is greater or smaller than the refractive index of the dielectric layer, the specific material There are no restrictions here.
  • the dielectric layer may be made of zinc sulfide such that the refractive index of the particle layer is smaller than the refractive index of the dielectric layer.
  • the granular layer may also be made of zinc sulfide, and the dielectric layer is made of magnesium oxide such that the refractive index of the granular layer is greater than the refractive index of the dielectric layer.
  • different layers of particles or different layers of dielectric layers may also be made of different materials. For example, in the granular layer, some of the granular layers are made of magnesium oxide, and the other part of the granular layer is made of cerium oxide. Similarly, in the dielectric layer, a part of the dielectric layer.
  • the dielectric layer is made of zinc selenide such that the refractive index of the particle layer is smaller than the refractive index of the dielectric layer.
  • the specific materials of the granular layer and the dielectric layer can be selected according to actual needs, and are not specifically limited herein.
  • the optical film may be produced by other steps. For example, taking a substrate, making parameters by controlling the deposition time, deposition rate, etc., depositing a dielectric layer on the substrate, depositing a first particle layer on the first dielectric layer, and then depositing the first granular layer on the first dielectric layer. A second dielectric layer is deposited thereon, wherein the second dielectric layer fills the interstitial spaces in the first granular layer.
  • an optical film consisting of a substrate and a dielectric layer and a particle layer alternately disposed on the substrate will be fabricated.
  • an optical film is formed by alternately forming a dielectric layer and a particle layer on a substrate.
  • the optical film provided by the invention can be produced by the method, and the optical film can strongly reflect light waves of a specific wavelength band, and does not affect other wavelength light waves, and can realize narrow-band filtering.

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
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Abstract

An optical film and a manufacturing method therefor. The optical film comprises a substrate (10), and dielectric layer (12)s and granular layers (11) alternately arranged on the substrate (10); each granular layer (11) comprises multiple granules (111); a value range of the distance between the granules (111) is from λ1/8 to λ1/2, a value range of the optical thickness of each dielectric layer (12) is from λ2/8 to λ2/2, and the refractive index of the granular layer (11) is greater than or smaller than that of the dielectric layer (12). The optical film can strongly reflect light having one or two center wavelengths, and can implement narrow band filtering without affecting optical waves of other bands.

Description

说明书 发明名称:一种光学膜及其制作方法  Description: An optical film and a method of manufacturing the same
技术领域  Technical field
[0001] 本发明属于光学膜技术领域, 尤其涉及一种光学膜及其制作方法。  [0001] The present invention belongs to the technical field of optical films, and in particular, to an optical film and a method for fabricating the same.
背景技术  Background technique
[0002] 为了增加光学器件对光波或者某一特定波长光波的反射率, 人们往往在光学器 件的表面贴光学膜或者增镀一层光学膜, 通过光学膜的作用来实现对光波或者 某一特定波长光波的强反射, 也就是实现对光波或者某一特定波长光波的滤波 功能。 例如, 在手机屏幕上贴防蓝光膜, 防蓝光膜可以将手机内 LED光源发射的 高能蓝光反射掉, 即将高能蓝光滤掉, 大大减少手机屏幕透射的蓝光, 从而达 到减少蓝光对眼睛伤害的目的。  [0002] In order to increase the reflectivity of an optical device to light waves or light waves of a specific wavelength, an optical film is often attached to the surface of the optical device or an optical film is plated, and the light wave or a specific light is realized by the action of the optical film. The strong reflection of wavelength light waves, that is, the filtering function of light waves or light waves of a specific wavelength. For example, the anti-blue film is attached to the screen of the mobile phone, and the anti-blue film can reflect the high-energy blue light emitted by the LED light source in the mobile phone, that is, the high-energy blue light is filtered out, and the blue light transmitted by the screen of the mobile phone is greatly reduced, thereby reducing the damage of the blue light to the eyes. .
[0003] 现有的光学膜一般由高、 低折射率交替的介质层组合而成, 该光学膜可以起到 对某一特定波长光波的强反射作用, 但是现有的光学膜在反射特定波长光波吋 , 往往会将该特定波长光波附近的其他波长的光波也反射掉一部分, 即该光学 膜对该特定波长光波的滤波带宽较宽, 使得经过光学膜出射的光线色彩有偏差 等问题, 严重影响显示效果。  [0003] Existing optical films are generally composed of alternating dielectric layers of high and low refractive indices, which can provide strong reflection of light waves of a specific wavelength, but existing optical films are reflecting specific wavelengths. The light wave is often reflected off a part of the light wave of other wavelengths near the specific wavelength light wave, that is, the optical film has a wide filtering bandwidth for the light wave of the specific wavelength, so that the color of the light emitted through the optical film is deviated, and the like. Affect the display effect.
技术问题  technical problem
[0004] 本发明实施例的目的在于提供一种光学膜及其制作方法, 以应对现有技术中光 学膜的滤波带宽较宽等技术问题。  An object of the embodiments of the present invention is to provide an optical film and a method for fabricating the same, which are to cope with technical problems such as wide filtering bandwidth of optical films in the prior art.
问题的解决方案  Problem solution
技术解决方案  Technical solution
[0005] 本发明优选实施例提供一种光学膜, 用于反射某一波段的光, 其包括: 基底、 交替设置于所述基底上的介质层和颗粒层; 所述颗粒层包括多个颗粒, 所述颗 粒间距的取值范围为 λ 8至 λ 2, 所述介质层的光学厚度的取值范围为 λ 2/8至 λ 2 12, 且所述颗粒层的折射率大于或小于所述介质层的折射率, 其中, λ ^Πλ 2分别 为第一波段光的中心波长和第二波段光的中心波长。 [0005] A preferred embodiment of the present invention provides an optical film for reflecting light of a certain wavelength band, comprising: a substrate, a dielectric layer and a granular layer alternately disposed on the substrate; and the granular layer includes a plurality of particles The particle spacing ranges from λ 8 to λ 2 , and the optical thickness of the dielectric layer ranges from λ 2 /8 to λ 2 12 , and the refractive index of the granular layer is greater than or less than The refractive index of the dielectric layer, wherein λ ^ Π λ 2 is the center wavelength of the first band of light and the center wavelength of the second band of light, respectively.
[0006] 在本发明优选实施例所述的光学膜中, 所述第一波段光的中心波长 λ ,与第二波 段光的中心波长 λ 2相等。 [0006] In the optical film of the preferred embodiment of the present invention, the center wavelength λ of the first wavelength band and the second wave The center wavelength λ 2 of the segment light is equal.
[0007] 在本发明优选实施例所述的光学膜中, 接触所述基底的一层为所述颗粒层, 远 离所述基底的最外层为所述颗粒层或所述介质层。  In an optical film according to a preferred embodiment of the present invention, a layer contacting the substrate is the particle layer, and an outermost layer away from the substrate is the particle layer or the dielectric layer.
[0008] 在本发明优选实施例所述的光学膜中, 接触所述基底的一层为所述介质层, 远 离所述基底的最外层为所述颗粒层或所述介质层。 In an optical film according to a preferred embodiment of the present invention, a layer contacting the substrate is the dielectric layer, and an outermost layer away from the substrate is the particle layer or the dielectric layer.
[0009] 在本发明优选实施例所述的光学膜中, 所述颗粒的直径小于 λ J4。 In an optical film according to a preferred embodiment of the present invention, the particles have a diameter smaller than λ J4 .
[0010] 在本发明优选实施例所述的光学膜中, 所述第一波段光的中心波长 λ ,和第二波 段光的中心波长人 2的取值范围为 100纳米至 2000微米。 [0010] In the optical film according to a preferred embodiment of the present invention, the center wavelength λ of the first wavelength band light and the center wavelength of the second wavelength band person 2 range from 100 nanometers to 2000 micrometers.
[0011] 在本发明优选实施例所述的光学膜中, 所述颗粒和所述介质层所采用的材料包 括氧化镁、 氧化钇、 硫化锌、 硒化锌、 砷化镓、 氟化镁、 氟化钙、 氧化铝、 SiO x、 TiO ^NbO xo [0011] In the optical film according to a preferred embodiment of the present invention, the material used for the particles and the dielectric layer includes magnesium oxide, cerium oxide, zinc sulfide, zinc selenide, gallium arsenide, magnesium fluoride, Calcium fluoride, alumina, SiO x, TiO ^NbO xo
[0012] 在本发明优选实施例所述的光学膜中, 所述基底包括金属基底、 玻璃基底、 石 英基底、 橡胶基底或塑料基底。  [0012] In the optical film of the preferred embodiment of the invention, the substrate comprises a metal substrate, a glass substrate, a quartz substrate, a rubber substrate or a plastic substrate.
[0013] 本发明优选实施例还提供一种光学膜的制作方法, 其包括: [0013] A preferred embodiment of the present invention further provides a method of fabricating an optical film, including:
[0014] 一基底, 以及 [0014] a substrate, and
[0015] 在所述基底上交替制作的介质层和颗粒层; 所述颗粒层包括多个颗粒, 所述颗 粒间距的取值范围为 λ 2/8至 λ 2/2, 且所述颗粒层的折射率大于或小于所述介质层 的折射率, 其中, λ ^Πλ 2分别为第一波段光的中心波长和第二波段光的中心波 长。 [0015] a dielectric layer and a particle layer alternately fabricated on the substrate; the particle layer includes a plurality of particles, and the particle spacing ranges from λ 2 /8 to λ 2 /2, and the particle layer The refractive index is greater than or less than the refractive index of the dielectric layer, wherein λ ^ Π λ 2 is the center wavelength of the first band of light and the center wavelength of the second band of light, respectively.
[0016] 在本发明优选实施例所述的光学膜的制作方法中, 所述交替制作介质层和颗粒 层所采用的方法包括真空成膜工艺、 溶胶-凝胶薄膜成膜工艺和 /或自组织薄膜成 膜工艺; 其中, 所述真空成膜工艺包括物理 /化学气相沉积、 蒸发镀膜、 磁控溅 射镀膜、 离子镀、 外延生长; 所述颗粒间距的精度误差不大于所述颗粒间距的 5 %; 所述光学厚度的精度误差不大于所述光学厚度的 5%。  [0016] In the method for fabricating an optical film according to a preferred embodiment of the present invention, the method for alternately fabricating the dielectric layer and the particle layer includes a vacuum film forming process, a sol-gel film forming process, and/or a thin film forming process; wherein the vacuum film forming process comprises physical/chemical vapor deposition, evaporation coating, magnetron sputtering coating, ion plating, epitaxial growth; the precision error of the particle spacing is not greater than the particle spacing 5 %; the accuracy error of the optical thickness is not more than 5% of the optical thickness.
发明的有益效果  Advantageous effects of the invention
有益效果  Beneficial effect
[0017] 与现有技术相比, 本发明优选实施例提供一种光学膜及其制作方法。 该光学膜 通过在基底上交替设置介质层和颗粒层, 其中, 颗粒层包括多个颗粒, 且所述 颗粒间距的取值范围为 λ 至 λ ,12, 所述介质层的光学厚度的取值范围为 λ 2/8至 λ 2/2, 粒层的折射率大于或小于质层的折射率, 其中, λ ^Πλ 2分别为第一波段光 的中心波长和第二波段光的中心波长。 该光学膜可以同吋对第一波段和第二波 段的光进行强反射, 而不对其他波段光波产生影响, 即同吋对第一波段和第二 波段的光进行窄带滤波; 尤其是当第一波段光的中心波长与第二波段光的中心 波长相等吋, 可以实现对一个特定波段的光的窄带滤波。 [0017] Compared with the prior art, a preferred embodiment of the present invention provides an optical film and a method of fabricating the same. The optical film has a dielectric layer and a particle layer alternately disposed on a substrate, wherein the particle layer includes a plurality of particles, and The particle spacing ranges from λ to λ,12, and the optical thickness of the dielectric layer ranges from λ 2 /8 to λ 2/2, and the refractive index of the granular layer is greater than or less than the refractive index of the texture layer, wherein , λ ^ Π λ 2 are the center wavelength of the first band light and the center wavelength of the second band light, respectively. The optical film can strongly reflect the light of the first band and the second band at the same time, without affecting the light waves of other bands, that is, the narrow band filtering of the light of the first band and the second band; especially when the first The center wavelength of the band light is equal to the center wavelength of the second band of light, and narrowband filtering of light in a particular band can be achieved.
对附图的简要说明  Brief description of the drawing
附图说明  DRAWINGS
[0018] 为了更清楚地说明本发明实施例中的技术方案, 下面将对实施例或现有技术描 述中所需要使用的附图作简单地介绍, 显而易见地, 下面描述中的附图仅仅是 本发明的一些实施例, 对于本领域普通技术人员来讲, 在不付出创造性劳动性 的前提下, 还可以根据这些附图获得其他的附图。  [0018] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings to be used in the embodiments or the prior art description will be briefly described below. Obviously, the drawings in the following description are merely Some embodiments of the present invention may also be used to obtain other drawings based on these drawings without departing from the skilled artisan.
[0019] 图 1是本发明优选实施例提供的第一种光学膜的结构示意图; 1 is a schematic structural view of a first optical film according to a preferred embodiment of the present invention;
[0020] 图 2是本发明优选实施例提供的第二种光学膜的结构示意图; 2 is a schematic structural view of a second optical film according to a preferred embodiment of the present invention;
[0021] 图 3是本发明优选实施例提供的第三种光学膜的结构示意图; 3 is a schematic structural view of a third optical film according to a preferred embodiment of the present invention;
[0022] 图 4是本发明优选实施例提供的第四种光学膜的结构示意图。 4 is a schematic structural view of a fourth optical film according to a preferred embodiment of the present invention.
本发明的实施方式 Embodiments of the invention
[0023] 以下描述中, 为了说明而不是为了限定, 提出了诸如特定系统结构、 接口、 技 术之类的具体细节, 以便透切理解本发明实施例。 然而, 本领域的技术人员应 当清楚, 在没有这些具体细节的其它实施例中也可以实现本发明。 在其它情况 中, 省略对众所周知的系统、 装置、 电路以及方法的详细说明, 以免不必要的 细节妨碍本发明的描述。  [0023] In the following description, for purposes of illustration and description However, it will be apparent to those skilled in the art that the present invention may be practiced in other embodiments without these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to obscure the description of the invention.
[0024] 需要说明的是, 在本说明书所涉及的附图中, 相同的部件将采用相同的标号。  [0024] It should be noted that in the drawings referred to in the present specification, the same components will be denoted by the same reference numerals.
[0025] 实施例一  [0025] Embodiment 1
[0026] 请参见图 1, 图 1为本发明优选实施例提供的第一种光学膜的结构示意图。 本优 选实施例中的光学膜可以用于反射某波段的光, 而让其他波段的光透过, 即将 某波段的光过滤掉, 例如可以贴在 LED显示器表面起到减少蓝光透射的作用; 也 可以用于将光波中某特定波段的光波选择出来, 并通过反射进行分离, 从而获 得某特定波段的光波。 在此, 将不对本优选实施例中的光学膜的具体用途做限 制。 Please refer to FIG. 1. FIG. 1 is a schematic structural view of a first optical film according to a preferred embodiment of the present invention. The optical film in the preferred embodiment can be used to reflect light of a certain wavelength band, and let light of other wavelength bands pass through, that is, filter light of a certain wavelength band, for example, can be attached to the surface of the LED display to reduce the transmission of blue light; It can be used to select the light wave of a specific wavelength band in the light wave and separate it by reflection to obtain the light wave of a specific wavelength band. Here, the specific use of the optical film in the preferred embodiment will not be limited.
[0027] 本优选实施例中的光学膜包括: 基底 10、 颗粒层 11和介质层 12。 图 1虚线框所 示的部分为颗粒层 11, 颗粒层 11包括多个颗粒 111, 即颗粒层 11由分布在基底 10 上的多个颗粒 111组成。  The optical film in the preferred embodiment includes: a substrate 10, a particle layer 11, and a dielectric layer 12. The portion shown by the broken line in Fig. 1 is the particle layer 11, and the particle layer 11 includes a plurality of particles 111, that is, the particle layer 11 is composed of a plurality of particles 111 distributed on the substrate 10.
[0028] 具体地, 颗粒层 11与介质层 12交替地设置在基底 10上, 如图 1所示。 在基底 10 至介质层 12的方向上, 与基底 10接触的第一层为颗粒层 11, 在第一层颗粒层 11 上为第一层介质层 12, 且第一层介质层 12填满颗粒 111间的间隙。 在第一层介质 层 12上为第二层颗粒层 11, 以此类推, 直至形成如图 1所示的结构。  [0028] Specifically, the particle layer 11 and the dielectric layer 12 are alternately disposed on the substrate 10 as shown in FIG. In the direction of the substrate 10 to the dielectric layer 12, the first layer in contact with the substrate 10 is a granular layer 11, the first dielectric layer 12 is a first dielectric layer 12, and the first dielectric layer 12 is filled with particles. 111 gaps. On the first dielectric layer 12 is a second granular layer 11, and so on, until a structure as shown in Fig. 1 is formed.
[0029] 颗粒间距 L的取值范围可以为 λ ,/8至 λ ,/2, 介质层的光学厚度的取值范围可以为 入2/8至人2/2, 且颗粒层 11的折射率大于或小于介质层 12的折射率, 其中, λ ^Πλ 2 分别为第一波段光的中心波长和第二波段光的中心波长。 图 1中, d为介质层的 物理厚度, 在制作介质层 12吋, 介质层 12的物理厚度 d的公差范围为正负 5纳米 [0029] L is the particle spacing may be in the range [lambda], / 8 to [lambda], / 2, the range of the optical thickness of the dielectric layer may be a 2/8 to human 2/2, and the refractive index of the particle layer 11 It is larger or smaller than the refractive index of the dielectric layer 12, wherein λ ^ Π λ 2 is the center wavelength of the first band light and the center wavelength of the second band light, respectively. In Figure 1, d is the physical thickness of the dielectric layer. In the fabrication of the dielectric layer 12, the physical thickness d of the dielectric layer 12 has a tolerance range of plus or minus 5 nm.
[0030] 在一实施例中, 颗粒间距的精度误差不大于颗粒间距的 5%; 光学厚度的精度 误差不大于光学厚度的 5%。 [0030] In one embodiment, the accuracy error of the particle pitch is not more than 5% of the particle pitch; the accuracy of the optical thickness is not more than 5% of the optical thickness.
[0031] 在实际应用过程中, 颗粒间距 L的值可以大于介质层的光学厚度, 也可以小于 介质层的光学厚度, 亦可以等于介质层的光学厚度, 在此不做具体限制。 该光 学膜可以同吋对第一波段光的中心波长和第二波段光的中心波长的光进行强反 射, 同吋, 不对其他波段光波产生影响, 从而可以实现窄带滤波的效果。 在一 优选实施例中, 颗粒间距取值为人,/4, 介质层的光学厚度取值为 λ 2/4。 [0031] In practical applications, the value of the particle spacing L may be greater than the optical thickness of the dielectric layer, or may be smaller than the optical thickness of the dielectric layer, or may be equal to the optical thickness of the dielectric layer, and is not specifically limited herein. The optical film can strongly reflect the center wavelength of the first wavelength light and the center wavelength of the second wavelength light, and does not affect the light waves of other wavelength bands, thereby achieving the effect of narrow band filtering. In a preferred embodiment, the particle spacing is taken as human, /4, and the optical thickness of the dielectric layer is taken to be λ 2 /4.
[0032] 在一优选实施例中, 第一波段光的中心波长 λ ,与第二波段光的中心波长 λ 2相等 。 也就是说, 该光学膜用于对中心波长为的光进行窄带滤波。 例如, 当第一波 段光的中心波长 λ ,与第二波段光的中心波长 λ 2均取 440纳米吋, 该光学膜将仅对 中心波长为 440纳米的高能蓝光进行强反射, 即对高能蓝光进行窄带滤波。 当将 该光学膜贴于手机屏幕上, 当手机内 LED光源发射的光入射到光学膜吋, 光学膜 将 LED光源中 90%的高能蓝光反射, 即过滤掉绝大部分高能蓝光, 使得从光学膜 出射的透射光中仅仅含有 10%左右的少量蓝光, 从而减小高能蓝光对眼睛的伤害 。 同吋, 由于该光学膜采用了颗粒层 11与介质层 12交替排布的结构, 并且颗粒 间距为 110纳米 (λ ,/4) , 使得该光学膜滤掉蓝光的带宽很窄, 从而避免在滤掉 蓝光的同吋将其他颜色的光也滤掉, 在保证显示效果的情况下, 可以减少高能 蓝光对眼睛的伤害。 [0032] In a preferred embodiment, the center wavelength λ of the first band of light is equal to the center wavelength λ 2 of the second band of light. That is, the optical film is used for narrowband filtering of light having a center wavelength. For example, when the center wavelength λ of the first band of light and the center wavelength λ 2 of the second band of light are both 440 nm, the optical film will only strongly reflect high-energy blue light having a center wavelength of 440 nm, that is, high-energy blue light. Perform narrowband filtering. When the optical film is attached to the screen of the mobile phone, when the light emitted by the LED light source in the mobile phone is incident on the optical film, the optical film reflects 90% of the high-energy blue light in the LED light source, that is, filters out most of the high-energy blue light, so that the optical Membrane The transmitted transmitted light contains only a small amount of blue light of about 10%, thereby reducing the damage of high-energy blue light to the eyes. At the same time, since the optical film adopts a structure in which the particle layer 11 and the dielectric layer 12 are alternately arranged, and the particle spacing is 110 nm (λ, /4), the bandwidth of the optical film for filtering blue light is narrow, thereby avoiding The same color that filters out the blue light also filters out other colors of light, which can reduce the damage of high-energy blue light to the eyes while ensuring the display effect.
[0033] 当然, 在其他优选实施例中, 第一波段光的中心波长人,与第二波段光的中心波 长入2也可以不相等。 当第一波段光的中心波长 λ ,与第二波段光的中心波长人2不 相等吋, 该光学膜可以实现对两个中心波长的光进行窄带滤波, 例如第一波段 光的中心波长 λ ^440纳米, 第二波段光的中心波长人2取700纳米, 这样该光学 膜就可以同吋对高能蓝光和红光进行强反射, 实现对蓝光和红光的窄带滤波。 [0033] Of course, in this embodiment, the center wavelength band light of the first person, and the center wavelength of the light of the second wavelength band may not be equal to 2 In other preferred embodiments. When the center wavelength λ of light of the first wavelength band, the center wavelength band of the second person is not equal to 2 inches of light, the optical film can realize the central wavelength of light two narrow band filters, for example, the center wavelength of the first wavelength band of the light ^ λ 440 nm, the center wavelength band of light of the second person 2 takes 700 nm, so that the optical film can be high-energy blue and red with a strong reflection inch, to achieve narrowband filtering of blue and red light.
[0034] 在一优选实施例中, 第一波段光的中心波长 λ ,和第二波段光的中心波长 λ 2的取 值范围为 100纳米至 2000微米, 在实际应用中, 可以根据第一波段光的中心波长 λ ,和第二波段光的中心波长 λ 2的大小设计颗粒 111的间距以及介质层 12的厚度, 从而实现对某一个中心波长或两个中心波长的光的强反射。 同吋, 颗粒 111的尺 寸不能过大, 一般颗粒 111的直径小于 λ ,/4, 且多个颗粒的大小也可以不完全相 同。 当颗粒层 11仅由一层颗粒 111组成吋, 颗粒 111的直径即为颗粒层 11的厚度 [0034] In a preferred embodiment, the center wavelength λ of the first band of light and the center wavelength λ 2 of the second band of light range from 100 nanometers to 2000 micrometers. In practical applications, the first wavelength band may be used. The center wavelength λ of the light and the center wavelength λ 2 of the second band light design the pitch of the particles 111 and the thickness of the dielectric layer 12, thereby achieving strong reflection of light of a certain central wavelength or two central wavelengths. In the same way, the size of the particles 111 should not be too large. Generally, the diameter of the particles 111 is smaller than λ, /4, and the sizes of the plurality of particles may not be completely the same. When the particle layer 11 consists of only one layer of particles 111, the diameter of the particles 111 is the thickness of the particle layer 11.
[0035] 另外, 颗粒 111和介质层 12所采用的材料包括氧化镁、 氧化钇、 硫化锌、 硒化 锌、 砷化镓、 氟化镁、 氟化钙、 氧化铝、 SiO x、 TiO x、 NbO x中的一种或几种。 需要说明的是, SiO x为由硅 (Si) 和氧 (0) 两种元素形成的化合物, 例如, 在 采用化学气相沉积工艺制作该化合物过程中, 硅和氧可能按照非预设成分比例 生成化合物。 当制剂为 SiO吋, 理想情况下, 硅和氧的成分比例是 1:1, 但当硅含 量较多吋, 硅和氧的成分比例可能会高于 1:1。 因此, 可将由硅和氧生成的化合 物简写成 SiO x, x表示氧与硅的成分比值, 如 X为 1.2。 TiO NbO x 情况与 SiO x类似, 在此不再赘述。 [0035] In addition, the materials used for the particles 111 and the dielectric layer 12 include magnesium oxide, cerium oxide, zinc sulfide, zinc selenide, gallium arsenide, magnesium fluoride, calcium fluoride, aluminum oxide, SiO x , TiO x , One or several of NbO x . It should be noted that SiO x is a compound formed of two elements of silicon (Si) and oxygen (0). For example, in the process of fabricating the compound by chemical vapor deposition, silicon and oxygen may be generated according to a ratio of non-preset components. Compound. When the formulation is SiO吋, the ratio of silicon to oxygen is ideally 1:1, but when the silicon content is high, the ratio of silicon to oxygen may be higher than 1:1. Therefore, a compound formed of silicon and oxygen can be abbreviated as SiO x , and x represents a composition ratio of oxygen to silicon, such as X being 1.2. The TiO NbO x case is similar to SiO x and will not be described here.
[0036] 当然, 颗粒 111和介质层 12也可以采用其他上述未列出的材料, 在此不做具体 限制, 只要满足颗粒层 11的折射率大于或小于介质层 12的折射率即可。 例如, 当颗粒层 11采用氧化镁吋, 介质层 12可以采用硫化锌, 使得颗粒层 11的折射率 小于介质层 12的折射率。 当然, 颗粒层 11也可以采用硫化锌, 而介质层 12采用 氧化镁, 使得颗粒层 11的折射率大于介质层 12的折射率。 [0036] Of course, the particles 111 and the dielectric layer 12 may also be other materials not listed above, and are not particularly limited as long as the refractive index of the particle layer 11 is greater or smaller than the refractive index of the dielectric layer 12. For example, when the particle layer 11 is made of magnesium oxide, the dielectric layer 12 may be made of zinc sulfide, so that the refractive index of the particle layer 11 Less than the refractive index of the dielectric layer 12. Of course, the granular layer 11 may also be made of zinc sulfide, and the dielectric layer 12 may be made of magnesium oxide such that the refractive index of the granular layer 11 is greater than the refractive index of the dielectric layer 12.
[0037] 当然, 不同层颗粒层 11或者不同层介质层 12也可以采用不同的材料, 例如, 图 1中的颗粒层 11中, 有一部分颗粒层 11采用氧化镁, 另一部分颗粒层 11采用氧化 钇, 同理, 介质层 12中, 一部分介质层 12采用硫化锌, 另一部分介质层 12采用 硒化锌, 从而使得颗粒层 11的折射率均小于介质层 12的折射率。 颗粒层 11和介 质层 12的具体材质可以根据实际需要选定, 在此不做具体限制。  [0037] Of course, different layers of the particle layer 11 or different layers of the dielectric layer 12 may also adopt different materials. For example, in the particle layer 11 in FIG. 1, a part of the particle layer 11 is made of magnesium oxide, and another part of the particle layer 11 is oxidized. Similarly, in the dielectric layer 12, a part of the dielectric layer 12 is made of zinc sulfide, and the other part of the dielectric layer 12 is made of zinc selenide, so that the refractive index of the granular layer 11 is smaller than the refractive index of the dielectric layer 12. The specific materials of the particle layer 11 and the dielectric layer 12 can be selected according to actual needs, and are not specifically limited herein.
[0038] 在本优选实施例中, 基底 10为透明的基底, 例如为玻璃基底或石英基底等, 从 而可以使得经过光学膜后的光可以透过基底 10, 或者可以使得入射光通过基底 1 0入射至颗粒层 11和介质层 12中。 在使用该光学膜吋, 入射光可以从基底 10至介 质层 12的方向入射, 也可以从介质层 12至基底 10的方向入射。 无论从哪个方向 入射, 均能达到相同的技术效果。  [0038] In the preferred embodiment, the substrate 10 is a transparent substrate, such as a glass substrate or a quartz substrate, etc., so that light passing through the optical film can be transmitted through the substrate 10, or incident light can be passed through the substrate 10 It is incident into the particle layer 11 and the dielectric layer 12. In the use of the optical film 入射, incident light may be incident from the direction of the substrate 10 to the dielectric layer 12, or may be incident from the dielectric layer 12 to the direction of the substrate 10. The same technical effect can be achieved no matter which direction is incident.
[0039] 当然, 在其他实施例中, 基底 10也可以为橡胶基底、 塑料基底和金属基底等, 可以根据光学膜的实际应用来选择不同的基底 10。 例如, 当光学膜用于反射可 见光波段的某一波长光波吋, 基底 10可以为玻璃基底或石英基底; 当光学膜用 于反射微波波段的某一波长光波吋, 基底 10可以为陶瓷基底、 橡胶基底或塑料 基底; 当光学膜无需透射光波吋, 基底 10可以为金属基底。  [0039] Of course, in other embodiments, the substrate 10 may also be a rubber substrate, a plastic substrate, a metal substrate, etc., and different substrates 10 may be selected according to the practical application of the optical film. For example, when the optical film is used to reflect a certain wavelength of light in the visible light band, the substrate 10 may be a glass substrate or a quartz substrate; when the optical film is used to reflect a certain wavelength of light in the microwave band, the substrate 10 may be a ceramic substrate or a rubber. Substrate or plastic substrate; When the optical film does not need to transmit light waves, the substrate 10 may be a metal substrate.
[0040] 需要说明的是, 图 1中所示的光学膜的结构仅仅是其中的一种, 即接触基底 10 的一层为颗粒层 11, 远离基底 10的最外层为介质层 12。 本发明的光学膜的结构 还可以为其他的结构, 例如图 2至图 4中所示的结构。 请参见图 2至图 4, 图 2、 图 3和图 4分别为本发明优选实施例提供的第二种、 第三种和第四种光学膜的结构 示意图。  It should be noted that the structure of the optical film shown in FIG. 1 is only one of them, that is, a layer contacting the substrate 10 is a particle layer 11, and an outermost layer away from the substrate 10 is a dielectric layer 12. The structure of the optical film of the present invention may also be other structures such as the structures shown in Figs. 2 to 4. Referring to Figures 2 to 4, Figures 2, 3 and 4 are schematic views showing the structure of the second, third and fourth optical films respectively provided in accordance with a preferred embodiment of the present invention.
[0041] 在图 2所示的第二种光学膜的结构中, 接触基底 10的一层为颗粒层 11, 远离基 底 10的最外层也为颗粒层 11。 在图 3所示的第三种光学膜的结构中, 接触基底 10 的一层为介质层 12, 远离基底 10的最外层也为介质层 12。 在图 4所示的第四种光 学膜的结构中, 接触基底 10的一层为介质层 12, 远离基底 10的最外层为颗粒层 1 1 =  In the structure of the second optical film shown in FIG. 2, one layer contacting the substrate 10 is a particle layer 11, and the outermost layer away from the substrate 10 is also a particle layer 11. In the structure of the third optical film shown in Fig. 3, one layer contacting the substrate 10 is the dielectric layer 12, and the outermost layer away from the substrate 10 is also the dielectric layer 12. In the structure of the fourth optical film shown in Fig. 4, one layer contacting the substrate 10 is a dielectric layer 12, and the outermost layer away from the substrate 10 is a granular layer.
[0042] 需要说明的是, 图 1至图 4仅仅示意出颗粒 111的大致位置关系, 不能用于限定 本发明中多个颗粒 111的具体排布方式。 可以理解的是, 在实际制作该颗粒层 11 的过程中, 不可能保证每层颗粒层 11中多个颗粒 111均采用同样的分布方式整齐 排列, 每层颗粒层 11中的多个颗粒 111可以不规则排布, 只要满足颗粒 111的间 距基本相等即可。 [0042] It should be noted that FIGS. 1 to 4 only illustrate the approximate positional relationship of the particles 111, and cannot be used for limitation. The specific arrangement of the plurality of particles 111 in the present invention. It can be understood that, in the process of actually fabricating the granular layer 11, it is impossible to ensure that the plurality of particles 111 in each of the granular layers 11 are aligned in the same distribution manner, and the plurality of particles 111 in each of the granular layers 11 can be The irregular arrangement is as long as the pitch of the particles 111 is substantially equal.
[0043] 本优选实施例中的光学膜, 通过在基底上交替设置介质层和颗粒层, 其中, 颗 粒层有多个颗粒组成, 颗粒间距的取值范围为人^至人 ,^ 介质层的光学厚度的 取值范围为人2/8至人2/2, 颗粒层的折射率大于或小于质层的折射率。 该光学膜可 以同吋对一个中心波长或两个中心波长的光进行强反射, 同吋, 不对其他波段 光波产生影响, 从而可以实现窄带滤波的效果。 [0043] In the optical film of the preferred embodiment, the dielectric layer and the granular layer are alternately disposed on the substrate, wherein the granular layer has a plurality of particles, and the particle spacing ranges from the range of the human to the human, and the optical of the dielectric layer the thickness range of 2 human / human 8 2/2, the refractive index of the particle layer is greater than or less than the refractive index of the substance layer. The optical film can strongly reflect light of one center wavelength or two center wavelengths at the same time, and does not affect the light waves of other wavelength bands, thereby achieving the effect of narrow band filtering.
[0044] 实施例二 [0044] Embodiment 2
[0045] 本优选实施例提供一种光学膜的制作方法, 该方法制作的光学膜可以用于反射 某波段的光, 而让其他波段的光透过, 即将某波段的光过滤掉, 例如可以贴在 L ED显示器表面起到减少蓝光透射的作用; 也可以用于将光波中某特定波段的光 波选择出来, 并通过反射进行分离, 从而获得某特定波段的光波。 在此, 将不 对该光学膜的具体用途做限制。  [0045] The preferred embodiment provides a method for fabricating an optical film. The optical film produced by the method can be used to reflect light of a certain wavelength band, and let light of other wavelength bands pass through, that is, filter light of a certain wavelength band, for example, It is attached to the surface of the L ED display to reduce the transmission of blue light. It can also be used to select the light wave of a specific wavelength band in the light wave and separate it by reflection to obtain the light wave of a specific wavelength band. Here, the specific use of the optical film will not be limited.
[0046] 该光学膜的制作方法包括:  [0046] The manufacturing method of the optical film comprises:
[0047] 一基底, 以及  [0047] a substrate, and
[0048] 在所述基底上交替制作的介质层和颗粒层, 所述颗粒层包括多个颗粒, 所述颗 粒间距的取值范围为 λ 8至 λ 2, 所述介质层的光学厚度的取值范围为 λ 2/8至 λ 2 12, 且所述颗粒层的折射率大于或小于所述介质层的折射率, 其中, λ ^Πλ 2分别 为第一波段光的中心波长和第二波段光的中心波长。 [0048] a dielectric layer and a particle layer alternately fabricated on the substrate, the particle layer comprising a plurality of particles, the particle spacing ranges from λ 8 to λ 2 , and the optical thickness of the dielectric layer is taken The value ranges from λ 2 /8 to λ 2 12 , and the refractive index of the particle layer is greater than or less than the refractive index of the dielectric layer, wherein λ ^ Π λ 2 is the center wavelength and the second wavelength of the first band of light, respectively The center wavelength of the light.
[0049] 下面将详细地介绍该光学膜的制作方法。  [0049] The method of fabricating the optical film will be described in detail below.
[0050] 首先选择一基底, 该基底可以根据光学膜的实际使用情况来选择。 当光学膜用 于反射可见光波段的某波长光波吋, 基底可以为玻璃基底或石英基底, 这样可 以使得经过光学膜后的光可以透过基底, 或者可以使得入射光通过基底入射至 颗粒层和介质层中; 当光学膜用于反射微波波段的某波长光波吋, 基底可以为 陶瓷基底、 橡胶基底或塑料基底; 当光学膜无需透射光波吋, 基底可以为金属 基底。 在此, 不对基底的种类进行具体限制。 [0051] 其次, 在基底上通过化学气相沉积法依次交替地沉积颗粒层和介质层, 从而在 基底上形成交替放置的介质层和颗粒层结构。 当然, 在其他实施例中, 也可以 采用尺寸制作精度可控的真空成膜工艺、 溶胶-凝胶薄膜成膜工艺、 自组织薄膜 成膜工艺及上述工艺的几种工艺之间的自由组合工艺; 其中, 所述真空成膜工 艺包括物理 /化学气相沉积、 蒸发镀膜、 磁控溅射镀膜、 离子镀、 外延生长等。 [0050] First, a substrate is selected, which can be selected according to the actual use of the optical film. When the optical film is used to reflect a certain wavelength of light in the visible light band, the substrate may be a glass substrate or a quartz substrate, so that the light passing through the optical film can pass through the substrate, or the incident light can be incident on the particle layer and the medium through the substrate. In the layer; when the optical film is used to reflect a certain wavelength of light in the microwave band, the substrate may be a ceramic substrate, a rubber substrate or a plastic substrate; when the optical film does not need to transmit light waves, the substrate may be a metal substrate. Here, the type of the substrate is not specifically limited. [0051] Next, the particle layer and the dielectric layer are sequentially alternately deposited by chemical vapor deposition on the substrate, thereby forming alternating dielectric layers and particle layer structures on the substrate. Of course, in other embodiments, a vacuum film forming process with a controllable size and precision, a sol-gel film forming process, a self-organized film forming process, and a free combination process between the above processes may also be employed. The vacuum film forming process includes physical/chemical vapor deposition, evaporation coating, magnetron sputtering coating, ion plating, epitaxial growth, and the like.
[0052] 具体地, 在本优选实施例中, 通过精准控制沉积吋间、 沉积速度等制成参数, 在基底上先沉积一层颗粒层, 该颗粒层包括多个颗粒, 多个颗粒分布在基底表 面上, 且颗粒间距控制在人^至人^, 颗粒的直径小于人^, 颗粒的大小可以不 同。 其中, 为第一波段光的中心波长, 的取值范围为 100纳米至 2000微米。  [0052] Specifically, in the preferred embodiment, the parameters are prepared by precisely controlling the deposition time, deposition speed, etc., and a layer of particles is first deposited on the substrate, the particle layer includes a plurality of particles, and the plurality of particles are distributed On the surface of the substrate, and the particle spacing is controlled in humans to humans, the diameter of the particles is smaller than that of humans, and the size of the particles may be different. Wherein, it is the center wavelength of the first band of light, and ranges from 100 nanometers to 2000 micrometers.
[0053] 在制作完第一层颗粒层后, 再制作第一层介质层。 可以理解的是, 由于颗粒之 间存在间隙, 因此第一层介质层的材料会填充在颗粒之间的空隙中。 通过精准 控制沉积吋间、 沉积速度等制成参数, 形成第一层介质层。 一般地, 介质层的 光学厚度的取值范围为人2/8至人2/2, 其中, λ 2为第二波段光的中心波长, λ 2的取 值范围为 100纳米至 2000微米。 [0053] After the first layer of particles is formed, a first layer of the dielectric layer is formed. It will be appreciated that due to the presence of gaps between the particles, the material of the first dielectric layer will fill the voids between the particles. The first dielectric layer is formed by precisely controlling the deposition time, deposition speed, and the like. Generally, the range of the optical thickness of the dielectric layer 2 is a human / human 8 2/2, wherein, a center wavelength [lambda] 2 of the second wavelength band of light, [lambda] 2 is in the range 100 nm to 2000 microns.
[0054] 在本发明实施例中, 颗粒间距的精度误差不大于颗粒间距的 5%; 光学厚度的 精度误差不大于光学厚度的 5%。  In the embodiment of the present invention, the accuracy error of the particle pitch is not more than 5% of the particle pitch; the accuracy error of the optical thickness is not more than 5% of the optical thickness.
[0055] 在制作完成第一层介质层后, 在第一层介质层上继续沉积第二层颗粒层, 以此 类推, 直至最后一层介质层或颗粒层制作完成, 此吋, 将制作出由基底和交替 地设置在基底上的介质层和颗粒层组成的光学膜。  [0055] after the first dielectric layer is completed, a second layer of particles is continuously deposited on the first dielectric layer, and so on, until the last dielectric layer or particle layer is completed, and then, An optical film composed of a substrate and a dielectric layer and a particle layer alternately disposed on the substrate.
[0056] 在制作光学膜的过程中, 颗粒的材料和介质层的材料均可以采用氧化镁、 氧化 钇、 硫化锌、 硒化锌、 砷化镓、 氟化镁、 氟化钙、 SiO x、 TiO x、 NbO x、 氧化铝 等多种材质中的一种或几种, 也可以采用未列出的其他材质, 只要满足颗粒层 的折射率大于或小于介质层的折射率即可, 具体材质在此不做限制。 例如, 当 颗粒层采用氧化镁吋, 介质层可以采用硫化锌, 使得颗粒层的折射率小于介质 层的折射率。 当然, 颗粒层也可以采用硫化锌, 而介质层采用氧化镁, 使得颗 粒层的折射率大于介质层的折射率。 另外, 不同层颗粒层或者不同层介质层也 可以采用不同的材料, 例如, 颗粒层中, 有一部分颗粒层采用氧化镁, 另一部 分颗粒层采用氧化钇, 同理, 介质层中, 一部分介质层采用硫化锌, 另一部分 介质层采用硒化锌, 从而使得颗粒层的折射率均小于介质层的折射率。 颗粒层 和介质层的具体材质可以根据实际需要选定, 在此不做具体限制。 [0056] In the process of fabricating the optical film, both the material of the particle and the material of the dielectric layer may be magnesium oxide, cerium oxide, zinc sulfide, zinc selenide, gallium arsenide, magnesium fluoride, calcium fluoride, SiO x , One or more of TiO x , NbO x , alumina , etc., other materials not listed may be used, as long as the refractive index of the particle layer is greater or smaller than the refractive index of the dielectric layer, the specific material There are no restrictions here. For example, when the particle layer is made of magnesium oxide, the dielectric layer may be made of zinc sulfide such that the refractive index of the particle layer is smaller than the refractive index of the dielectric layer. Of course, the granular layer may also be made of zinc sulfide, and the dielectric layer is made of magnesium oxide such that the refractive index of the granular layer is greater than the refractive index of the dielectric layer. In addition, different layers of particles or different layers of dielectric layers may also be made of different materials. For example, in the granular layer, some of the granular layers are made of magnesium oxide, and the other part of the granular layer is made of cerium oxide. Similarly, in the dielectric layer, a part of the dielectric layer. Using zinc sulfide, another part The dielectric layer is made of zinc selenide such that the refractive index of the particle layer is smaller than the refractive index of the dielectric layer. The specific materials of the granular layer and the dielectric layer can be selected according to actual needs, and are not specifically limited herein.
[0057] 另外, 需要说明的是, 上述的制作方法仅仅是光学膜制作方法中的一种, 在其 他实施例中, 光学膜也可以采用其他的步骤进行制作。 例如, 取一基底, 通过 控制沉积吋间、 沉积速度等制成参数, 在基底上先沉积一层介质层, 在第一层 介质层上沉积第一层颗粒层, 再在第一层颗粒层上沉积第二层介质层, 其中第 二层介质层填充第一层颗粒层中颗粒间隙。 依此类推, 直至最后一层颗粒层或 介质层制作完成, 此吋, 将制作出由基底和交替地设置在基底上的介质层和颗 粒层组成的光学膜。  Further, it should be noted that the above-described production method is only one of the methods for producing an optical film, and in other embodiments, the optical film may be produced by other steps. For example, taking a substrate, making parameters by controlling the deposition time, deposition rate, etc., depositing a dielectric layer on the substrate, depositing a first particle layer on the first dielectric layer, and then depositing the first granular layer on the first dielectric layer. A second dielectric layer is deposited thereon, wherein the second dielectric layer fills the interstitial spaces in the first granular layer. By analogy, until the final layer of particles or dielectric layer is completed, an optical film consisting of a substrate and a dielectric layer and a particle layer alternately disposed on the substrate will be fabricated.
[0058] 本优选实施例中的制作方法, 通过在基底上交替地制作介质层和颗粒层, 从而 形成一光学膜。 该方法制作过程简单, 可以制作出本发明提供的光学膜, 其中 , 该光学膜可以对某特定波段的光波进行强反射, 同吋, 不对其他波段光波产 生影响, 可以实现窄带滤波。  [0058] In the manufacturing method of the preferred embodiment, an optical film is formed by alternately forming a dielectric layer and a particle layer on a substrate. The optical film provided by the invention can be produced by the method, and the optical film can strongly reflect light waves of a specific wavelength band, and does not affect other wavelength light waves, and can realize narrow-band filtering.
[0059] 以上所述实施例仅用以说明本发明的技术方案, 而非对其限制; 尽管参照前述 实施例对本发明进行了详细的说明, 本领域的普通技术人员应当理解: 其依然 可以对前述各实施例所记载的技术方案进行修改, 或者对其中部分技术特征进 行等同替换; 而这些修改或者替换, 并不使相应技术方案的本质脱离本发明实 施例各实施例技术方案的精神和范围。  The above described embodiments are merely illustrative of the technical solutions of the present invention, and are not intended to be limiting; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art will understand that The technical solutions described in the foregoing embodiments are modified, or some of the technical features are equivalently replaced; and the modifications or substitutions do not deviate from the spirit and scope of the technical solutions of the embodiments of the present invention. .

Claims

权利要求书 Claim
一种光学膜, 用于反射某波段的光, 其特征在于, 包括: 基底、 交替 设置于所述基底上的介质层和颗粒层; 所述颗粒层包括多个颗粒, 所 述颗粒间距的取值范围为 λ 至 λ J2, 所述介质层的光学厚度的取值 范围为 λ 2/8至 λ 2/2, 且所述颗粒层的折射率大于或小于所述介质层的 折射率, 其中, λ ^Πλ 2分别为第一波段光的中心波长和第二波段光的 中心波长。 An optical film for reflecting light of a certain wavelength band, comprising: a substrate, a dielectric layer and a particle layer alternately disposed on the substrate; the particle layer comprises a plurality of particles, and the spacing of the particles is taken The value ranges from λ to λ J2, and the optical thickness of the dielectric layer ranges from λ 2 /8 to λ 2 /2, and the refractive index of the granular layer is greater than or less than the refractive index of the dielectric layer, wherein , λ ^ Π λ 2 are the center wavelength of the first band light and the center wavelength of the second band light, respectively.
根据权利要求 1所述的光学膜, 其特征在于, 所述第一波段光的中心 波长 λ ,与第二波段光的中心波长 λ 2相等。 The optical film according to claim 1, wherein a center wavelength λ of the first wavelength band light is equal to a center wavelength λ 2 of the second wavelength band light.
根据权利要求 1所述的光学膜, 其特征在于, 接触所述基底的一层为 所述颗粒层, 远离所述基底的最外层为所述颗粒层或所述介质层。 根据权利要求 1所述的光学膜, 其特征在于, 接触所述基底的一层为 所述介质层, 远离所述基底的最外层为所述颗粒层或所述介质层。 根据权利要求 1所述的光学膜, 其特征在于, 所述颗粒的直径小于 /4。 The optical film according to claim 1, wherein a layer contacting the substrate is the particle layer, and an outermost layer away from the substrate is the particle layer or the dielectric layer. The optical film according to claim 1, wherein a layer contacting the substrate is the dielectric layer, and an outermost layer remote from the substrate is the particle layer or the dielectric layer. The optical film according to claim 1, wherein the particles have a diameter of less than /4.
根据权利要求 5所述的光学膜, 其特征在于, 所述第一波段光的中心 波长 λ ,和第二波段光的中心波长 λ 2的取值范围为 100纳米至 2000微米 根据权利要求 1所述的光学膜, 其特征在于, 所述颗粒和所述介质层 所采用的材料包括氧化镁、 氧化钇、 硫化锌、 硒化锌、 砷化镓、 氟化 镁、 氟化钙、 氧化铝、 SiO x、 110 !4和/或^0 !4The optical film according to claim 5, wherein a center wavelength λ of the first wavelength band light and a center wavelength λ 2 of the second wavelength band light have a value ranging from 100 nm to 2000 μm according to claim 1. The optical film according to the invention, wherein the material used for the particles and the dielectric layer comprises magnesium oxide, cerium oxide, zinc sulfide, zinc selenide, gallium arsenide, magnesium fluoride, calcium fluoride, aluminum oxide, SiO x , 110 !4 and / or ^0 !4 .
根据权利要求 1所述的光学膜, 其特征在于, 所述基底包括金属基底The optical film according to claim 1, wherein the substrate comprises a metal substrate
、 玻璃基底、 石英基底、 橡胶基底或塑料基底。 , glass substrate, quartz substrate, rubber substrate or plastic substrate.
一种光学膜的制作方法, 其特征在于, 包括: A method for fabricating an optical film, comprising:
一基底, 以及 a substrate, and
在所述基底上交替制作的介质层和颗粒层; 所述颗粒层包括多个颗粒 , 所述颗粒间距的取值范围为 至 J2, 所述介质层的光学厚度的 取值范围为 λ 2/8至 λ 2/2, 且所述颗粒层的折射率大于或小于所述介质 层的折射率, 其中, λ ^Πλ 2分别为第一波段光的中心波长和第二波段 光的中心波长。 a dielectric layer and a granular layer alternately formed on the substrate; the granular layer comprises a plurality of particles, the particle spacing ranges from J2, and the optical thickness of the dielectric layer ranges from λ 2 / 8 to λ 2 /2, and the refractive index of the particle layer is greater than or less than the medium The refractive index of the layer, wherein λ ^ Π λ 2 is the center wavelength of the light of the first wavelength band and the center wavelength of the light of the second wavelength band, respectively.
[权利要求 10] 根据权利要求 9所述的光学膜的制作方法, 其特征在于, 所述交替制 作介质层和颗粒层所采用的方法包括真空成膜工艺、 溶胶-凝胶薄膜 成膜工艺和 /或自组织薄膜成膜工艺; 其中, 所述真空成膜工艺包括 物理 /化学气相沉积、 蒸发镀膜、 磁控溅射镀膜、 离子镀、 外延生长 ; 所述颗粒间距的精度误差不大于所述颗粒间距的 5% ; 所述光学厚 度的精度误差不大于所述光学厚度的 5%。  [Claim 10] The method for fabricating an optical film according to claim 9, wherein the method of alternately fabricating the dielectric layer and the particle layer comprises a vacuum film forming process, a sol-gel film forming process, and And a self-organizing film forming process; wherein the vacuum film forming process comprises physical/chemical vapor deposition, evaporation coating, magnetron sputtering coating, ion plating, epitaxial growth; the precision error of the particle spacing is not greater than 5% of the particle pitch; the optical thickness has an accuracy error of no more than 5% of the optical thickness.
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Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107144901B (en) * 2017-06-19 2020-04-07 深圳市光科全息技术有限公司 Optical slurry film preparation method and optical film
CN108134006A (en) * 2018-01-18 2018-06-08 深圳市光科全息技术有限公司 A kind of LED light encapsulating structure
CN108198931A (en) * 2018-02-01 2018-06-22 深圳市光科全息技术有限公司 A kind of flourescent sheet
KR102472773B1 (en) * 2018-02-28 2022-11-30 산텐 세이야꾸 가부시키가이샤 Ophthalmic composition containing diquafosol and a cationic polymer
CN110889478A (en) * 2019-11-12 2020-03-17 深圳市光科全息技术有限公司 Infrared scattering film, preparation method thereof, infrared scattering commodity and identification system
CN111323960A (en) * 2020-04-07 2020-06-23 Tcl华星光电技术有限公司 Light-transmitting substrate and display device
CN114690289B (en) * 2022-03-18 2024-06-14 Tcl华星光电技术有限公司 Optical film layer, manufacturing method thereof, polaroid and display panel

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1492616A (en) * 2002-10-23 2004-04-28 鸿富锦精密工业(深圳)有限公司 Film filter
CN101269917A (en) * 2007-03-21 2008-09-24 鸿富锦精密工业(深圳)有限公司 Glass with low radiation
US20090015908A1 (en) * 2007-07-13 2009-01-15 Toyoda Gosei., Ltd. Infrared reflective member, and infrared reflective device and method of making same
CN102998726A (en) * 2011-09-09 2013-03-27 三星电子株式会社 Photonic crystal structure, method of manufacturing the photonic crystal structure, reflective color filter, and display apparatus
US20150116856A1 (en) * 2013-10-31 2015-04-30 Korea Institute Of Science And Technology Plasmonic nano-color coating layer and method for fabricating the same
CN105874896A (en) * 2013-11-04 2016-08-17 材料视觉有限公司 Heat shielding system using particulates

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006517674A (en) * 2002-12-20 2006-07-27 ミネルバ バイオテクノロジーズ コーポレーション Optical devices and methods comprising nanoparticles
GB201117480D0 (en) * 2011-10-10 2011-11-23 Palikaras George Filter
CN206584065U (en) * 2016-12-26 2017-10-24 深圳市光科全息技术有限公司 A kind of optical film

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1492616A (en) * 2002-10-23 2004-04-28 鸿富锦精密工业(深圳)有限公司 Film filter
CN101269917A (en) * 2007-03-21 2008-09-24 鸿富锦精密工业(深圳)有限公司 Glass with low radiation
US20090015908A1 (en) * 2007-07-13 2009-01-15 Toyoda Gosei., Ltd. Infrared reflective member, and infrared reflective device and method of making same
CN102998726A (en) * 2011-09-09 2013-03-27 三星电子株式会社 Photonic crystal structure, method of manufacturing the photonic crystal structure, reflective color filter, and display apparatus
US20150116856A1 (en) * 2013-10-31 2015-04-30 Korea Institute Of Science And Technology Plasmonic nano-color coating layer and method for fabricating the same
CN105874896A (en) * 2013-11-04 2016-08-17 材料视觉有限公司 Heat shielding system using particulates

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