WO2018090565A1 - 一种体全息元件及其制作方法和制作系统 - Google Patents

一种体全息元件及其制作方法和制作系统 Download PDF

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Publication number
WO2018090565A1
WO2018090565A1 PCT/CN2017/081984 CN2017081984W WO2018090565A1 WO 2018090565 A1 WO2018090565 A1 WO 2018090565A1 CN 2017081984 W CN2017081984 W CN 2017081984W WO 2018090565 A1 WO2018090565 A1 WO 2018090565A1
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WIPO (PCT)
Prior art keywords
hologram element
volume hologram
volume
substrate
angle
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PCT/CN2017/081984
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English (en)
French (fr)
Inventor
浦东林
陈林森
朱鹏飞
张瑾
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Suzhou University
SVG Optronics Co Ltd
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Suzhou University
SVG Optronics Co Ltd
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/02—Details of features involved during the holographic process; Replication of holograms without interference recording
    • G03H1/024—Hologram nature or properties
    • G03H1/0248—Volume holograms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/32—Holograms used as optical elements

Definitions

  • the invention relates to a volume hologram element, in particular to a pixelated reflector hologram element, a manufacturing method thereof and a manufacturing system.
  • Holography is a professional technique for realizing light field recording and reproduction. It is divided into planar holography and volume holography according to the holographic material.
  • planar holography technology has realized a wide range of commercial applications in the fields of gratings for spectral measurement, embossing holography, etc., and successfully realized digital preparation, which greatly promoted the application range of the technology.
  • Volume holography can be divided into two directions, one is three-dimensional volume holography technology, and the other is volume holographic optical components.
  • Three-dimensional volume holography capable of real-time three-dimensional display, Zebra, USA, invented the digital preparation technology, but subject to the limitations of the practical application of three-dimensional hologram (viewing value), the technology has not been scaled up and applied.
  • volume holographic optical components the current preparation method is to perform interference recording on an optical platform, and the main application is a volume holographic grating.
  • reflector hologram elements have unique high diffraction efficiencies, selective total reflection imaging with specific wavelengths, and transmission optical properties of other wavelengths.
  • U.S. Patent No. 4,218,111 discloses an aircraft holographic head-up display scheme.
  • the research of bulk holographic optical components in many fields such as automotive HUD and augmented reality helmets has once again become a hot spot.
  • the Ph.D. company invented the HUD with holographic elements (PCT/EP2012/054788, WO2012156124A1), which uses holographic optical elements to reduce the space requirements of the heads-up display, but does not apply holographic elements to the windshield.
  • Sony has invented a virtual display device (PCT/JP2005/005761) in which a waveguide type reflector hologram element is employed, and a stack of a plurality of hologram layers is proposed to satisfy parallel beams incident at different frequency bands (wavelengths).
  • US Patent No. 20100186818A1 proposes a light collecting method for a solar cell, which uses a waveguide Bragg grating to collect light and propagate in a waveguide structure, and finally reaches a battery chip, and at the same time utilizes an optimized structure of the volume grating, which can collect various angles. Incident sunlight.
  • the holographic optical device is fabricated by constructing an interference optical path on an optical platform, and exposing it to the holographic recording material at one time to form an overall interference fringe distribution, and completing the preparation of the holographic optical element through subsequent processing.
  • the reliability of the method is poor, resulting in low yield, short-focus, multi-focus and other parameters flexibility, so the ability to expand to more innovative applications is not strong.
  • Zebra's method (Apparatus and method for replicating a hologram using a steerable beam US6266167B1) is to generate object light with a spatial light modulator, interfere with reference light in a fixed direction, for digitizing a three-dimensional hologram, and cannot be used for volume holographic optics. element.
  • the optical holographic optical element is fabricated by using an optical platform, which has several disadvantages:
  • the present invention provides a volume hologram element, a manufacturing method thereof and a manufacturing system thereof, which are formed by performing interference beam adjustment on a volume holographic photosensitive material, pixelized splicing exposure, and finally forming a reflector having complex optical parameters.
  • Holographic optical components The novel volume holographic optical element proposed by the invention will have important application value in the fields of augmented reality, automobile head-up display and the like.
  • a volume hologram element comprising at least one pixelated information layer and at least one substrate layer, the information layer being disposed on the substrate layer.
  • the information layer cross section of the above-described volume hologram element has a pixelated stripe surface, the stripe surface has periodicity, and the stripe surface has an angle with a plane on which the substrate layer is located.
  • the angle between the stripe surface and the plane of the substrate layer is between 0 and 85 degrees.
  • each of the above stripe faces has a period ranging from 130 nm to 5 um.
  • the base material layer is provided with two layers, and the information layer is disposed between the two base material layers.
  • a substrate is further included, and the information layer and the substrate layer are disposed on the substrate.
  • the above-described volume hologram element further includes a protective layer disposed on the other side of the substrate layer and the information layer with respect to the substrate.
  • the above substrate layer is a film or glass.
  • the information layer is any one of a photoholographic material, a dichromate gelatin, a silver halide material or a photorefractive glass substrate.
  • volume hologram material has a thickness of 10 um to 150 um and a sensitization range of 400 nm to 650 nm.
  • the invention also discloses a method for fabricating the above-mentioned volume hologram element, wherein at least two beamlets are respectively incident from two sides of the volume holographic recording material to form an interference region, the volume grating pixel is recorded, and the material and the pixel are stepped and moved through two-dimensional splicing. Recording, the fabrication of a reflector hologram element having a certain width is completed.
  • the incident beam has two angle parameters, one is the angle ⁇ between the incident beam and the normal of the surface of the material, the other is the direction angle ⁇ of the incident beam, and the incident point of the incident path is o, ⁇ and ⁇ .
  • the direction of the incident beam is determined.
  • the incident angle parameters of the first incident beam and the second incident beam are ⁇ 1, ⁇ 1 and ⁇ 2, ⁇ 2, ⁇ 1, ⁇ 1 and ⁇ 2, ⁇ 2, respectively, and the coordinates x and y of the combined raster pixel are formed.
  • Six independent variables are used to quantify the correspondence between these variables according to the pre-designed data rules, and the volume raster pixels are spliced and recorded.
  • volume hologram recording material is any one of a silver salt emulsion, a dichromate gelatin, a photorefractive glass, a photorefractive crystal, or a photopolymer.
  • the invention also discloses a production system of the above-mentioned volume hologram element, and the production system comprises:
  • an optical path structure for realizing the basic functions of reflection, splitting, and beam expanding
  • At least two beam control units for adjusting the angle of the holographic recording beam and maintaining the position of the recording point unchanged during the regulation process
  • the stage is used for placing the volume holographic recording material for stepping motion to realize the pixel splicing function
  • the control unit issues a corresponding control command according to the predetermined data
  • the driving unit receives the instruction of the control unit to implement the driving function.
  • the above light source is a laser.
  • the beam steering unit comprises an optical component and a precision moving component, and the angle between the incident beam and the normal of the surface of the material and the direction angle of the incident beam are adjusted, and the position and the rotation angle of the optical component on the optical path are driven to record Interfering fringe faces of different orientations are formed inside the face pixels.
  • the body hologram element provided by the invention, the manufacturing method thereof and the manufacturing system thereof perform interference beam control through a specially designed opto-mechatronic system, and perform pixelized splicing exposure on the volume holographic photographic material, and after subsequent processing, the final composition is complicated.
  • the pixelated reflector holographic optical element with optical parameters the present invention proposes a novel volume holographic optical element, which will have important application value in the fields of augmented reality, automobile head-up display and the like.
  • a digital reflection holographic interference direct writing system is established. Through the coherent light beam with adjustable angle and direction, a pixelated interference fringe surface distribution and a pixelated array distribution with different periods and orientations are formed inside the volume holographic material to form a reflector hologram element.
  • the present invention has the following advantages: designing a specified reflective imaging function, having higher uniformity, shorter focal length, larger format, one or more imaging focus, one or more color reflection imaging, Coaxial or off-axis reflection imaging and simultaneous transmission of other wavelengths of light, almost full reflection imaging efficiency for specific wavelengths and almost full transmission of other wavelengths.
  • FIG. 1 is a schematic view of a pixel structure reflector hologram element according to an embodiment of the present invention.
  • FIG. 2 is a schematic cross-sectional view of a reflector hologram element in accordance with an embodiment of the present invention.
  • FIG. 3 is a schematic structural view of a pixelated reflector hologram element according to an embodiment of the present invention.
  • FIG. 4 is a schematic structural view of a pixelated reflector hologram element according to another embodiment of the present invention.
  • FIG. 5 is a schematic structural diagram of a pixelated reflector hologram element according to another embodiment of the present invention.
  • FIG. 6 is a schematic structural diagram of a pixelated reflector hologram element according to another embodiment of the present invention.
  • Figure 7 is a schematic view 1 showing the incidence of a light beam in an embodiment of the present invention.
  • Figure 8 is a schematic view 2 showing the incidence of a light beam in an embodiment of the present invention.
  • Figure 9 is a schematic view 3 showing the incidence of a light beam in an embodiment of the present invention.
  • Figure 10 is a schematic view 4 of the incidence of a light beam in an embodiment of the present invention.
  • Figure 11 is a schematic view 5 showing the incidence of a light beam in an embodiment of the present invention.
  • FIG. 12 is a pixelated reflector holographic production system according to an embodiment of the present invention. Schematic diagram of the structure.
  • FIG. 13 is a schematic structural diagram of a pixilated reflector holographic manufacturing system according to another embodiment of the present invention.
  • FIG. 14 is a schematic structural diagram of a pixelated reflector holography system according to another embodiment of the present invention.
  • Figure 15 is a schematic view showing the incidence of a lower body hologram recording material according to an embodiment of the present invention.
  • Figure 16 is a schematic view showing the incidence of a lower body hologram recording material according to another embodiment of the present invention.
  • Figure 17 is a schematic view showing the incidence of a lower body hologram recording material according to another embodiment of the present invention.
  • FIG. 18 is a schematic diagram of light modulation of a pixelated reflector hologram element according to an embodiment of the present invention.
  • FIG. 19 is a schematic diagram of light modulation of a sub-pixelized reflector hologram element according to an embodiment of the present invention.
  • FIG. 20 is a schematic diagram of light modulation of a sub-pixelized reflector hologram element according to another embodiment of the present invention.
  • FIG. 21 is a schematic diagram of human eye retinal imaging of a lower body holographic optical element according to an embodiment of the present invention.
  • FIG. 22 is a schematic diagram of human eye retinal imaging of a lower body holographic optical element according to another embodiment of the present invention.
  • FIG. 23 is a schematic diagram of human eye retinal imaging of a lower body holographic optical element according to another embodiment of the present invention.
  • This embodiment mainly describes a pixelated reflector hologram element that forms a reflective image having the above-described functions and a transmissive function of the front light.
  • the pixelated reflector hologram element is composed of a substrate and a volume holographic information layer on the substrate, and a reflective holographic pixel array inside the information layer, the pixel unit contains a series of interference fringe faces, and the interference fringe faces are parallel or opposite to the substrate surface. Having an angle, these arrays
  • the distributed pixel units with different parameters can not only realize the functions of the traditional volume hologram elements, but also realize the adjustment of optical parameters such as complex focal length and multi-focus. The variation and distribution of the angles depend on the imaging characteristics of the reflector hologram elements.
  • the invention simultaneously proposes a method for preparing the above-mentioned pixelated reflector hologram element, and establishes a digital reflection holographic interference direct writing system, and forms a pixelated interference fringe with different periods and orientations inside the volume holographic material through a coherent light beam whose angle and direction can be adjusted.
  • the surface distribution and the pixelated array distribution form a reflector hologram element.
  • hologram element structure and preparation method the following advantages are obtained: designing a specified reflection imaging function, having higher uniformity, shorter focal length, larger format, one or more imaging focus, one or more color reflections Imaging, coaxial or off-axis reflection imaging and simultaneous transmission of other wavelengths of light, almost full-reflection imaging efficiency for specific wavelengths and almost full transmission of other wavelengths, provides flexibility for reflector holographic component design and application.
  • the present embodiment proposes a structure of a pixelated volume hologram element.
  • the entire reflector hologram element is formed by an array of pixelated stripe faces, each of which has a specific period and has a plane with the substrate. A certain angle.
  • Each pixel is a reflection Bragg grating with a light modulation function that satisfies the volume holographic Bragg condition.
  • the period and angle parameters of each stripe surface are pixel quantized according to the specific use requirement parameters of the volume hologram element.
  • the combination of these array gratings satisfies the body.
  • the overall use requirements of holographic components are a reflection Bragg grating with a light modulation function that satisfies the volume holographic Bragg condition.
  • the reflector hologram element is composed of a substrate layer and an information layer.
  • the substrate is preferably a polyester film having good optical transmission, generally >92%.
  • the substrate can also be selected from optical glass.
  • the substrate is preferably glass and has a good waveguide function.
  • the information layer raw material is any one of a photoholographic material, a dichromate gelatin, a silver halide material or a photorefractive glass substrate. It is preferably a photopolymer material having a photosensitive layer thickness of 10 um to 150 um and a sensitization range of 400 nm to 650 nm.
  • the reflector hologram element is generally used in combination with a hard glass substrate or the like.
  • Such reflector hologram elements are typically used in conjunction with a transparent substrate that modulates a particular narrowband wavelength range, and other light is transparent.
  • This device has a total transmission in the visible region of greater than 70%.
  • the angle between the interference fringe surface inside the pixel and the plane of the substrate varies from 0 degrees to 85 degrees.
  • the minimum periodic interval of the interference fringe surface is one-half of the wavelength of the recording light.
  • the period of the fringe surface ranges from 130 nm to 300 nm, and the corresponding wavelength range is 263 nm to 632.8 nm.
  • the reflection holography has good wavelength selectivity and angle selection. Properties, the spectral bandwidth in the visible range is 2nm-30nm. In general, the diffraction efficiency of a reflective hologram element under conditions of reproduction is >90%.
  • the film has a pixelated monochrome reflection imaging function and can also have a pixelated color reflection imaging function;
  • the pixels are arranged to form an element, and the internal interference fringe surface of the pixel has a dimension of 130 nm to 5 ⁇ m.
  • the reflective hologram element is composed of a pixel array. According to the design, the arrangement of pixels with different angles of variation can form different reflection imaging characteristics and transmission characteristics, such as having a reflection imaging function for a specific wavelength, and transmitting the imaging lens at the same time.
  • the focal ratio is 1/F ⁇ 1/1 to 1/100.
  • the size of the pixel is generally from 10 ⁇ m to 1 mm according to the modulation accuracy of the actual demand.
  • the volume holographic optical element of this embodiment can be divided into two types according to practical applications, the first type is an air incident type, and the second type is a waveguide incident type.
  • incident light is incident on the volume holographic optical element in the air, and the incident light is modulated and diffracted.
  • the first solution is as shown in FIG. 3.
  • the information layer can be in direct contact with the incident light, and the substrate, the substrate layer and the information layer are laminated.
  • the second scheme is shown in FIG. 4, which is based on the first scheme, that is, the protective layer is added, that is, the surface of the substrate, the substrate layer and the information layer is provided with a protective layer, a substrate, a substrate layer, a photosensitive layer, The protective layers are laminated in such a way that the protective layer is in direct contact with the incident light.
  • the photosensitive layer is bonded to the substrate, and the substrate, the information layer, and the substrate layer are sequentially laminated, and the substrate layer is in contact with incident light.
  • the air-incident type volume hologram optical element can be used in the field of automotive augmented reality HUD and the like.
  • the incident light is incident through the waveguide in the substrate.
  • the incident angle is large, generally greater than 42 degrees, as shown in FIG.
  • the waveguide mode has a compact optical path and is suitable for near-eye displays such as AR glasses and helmets.
  • the substrate layer may be specifically provided with two layers, and the information layer It is disposed between the two substrate layers.
  • the present invention proposes a novel dual-beam interference direct writing system, in which two beams of light are respectively incident on both sides of the recording material, and pixelated interference is performed inside the material to form a pixelated Bragg grating, relative to the normal direction of the material surface, two The angle between the incident light and the normal line and the direction angle of the incident light are respectively adjustable, thereby realizing the controllable period of the pixelized body grating and the grating direction.
  • the interference direct writing system is spliced by pixels according to a predetermined data format. Method, the preparation of a volume holographic optical element is completed.
  • the specific instructions are as follows:
  • interference fringes or latent images of interference fringes are formed inside the volume hologram recording material according to the specific process requirements of the recording material.
  • Such bulk holographic recording materials mainly include silver salt emulsion, dichromated gelatin, photorefractive glass, photorefractive crystal, photopolymer.
  • the interference fringes are in a sheet shape, and the contents of the volume holographic material are layered, and the schematic diagram is as shown in the following figure.
  • the period d of the interference fringe, the angle of the double beam 2 ⁇ , the laser wavelength ⁇ , and n are the refractive indices of the medium, satisfying the following relationship:
  • the present invention proposes a pixelized reflector holographic fabrication scheme, specifically by two beamlets (beam 1 and beam 2), respectively incident on both sides of the volume holographic recording material to form an interference region, recording
  • the body grating pixel, the material and the interference pixel are stepped and moved, and the two-dimensional splicing and recording are performed to complete the fabrication of the reflector hologram element having a certain width.
  • beam 1 and beam 2 are not symmetrical and have different angles of incidence.
  • the angle of incidence of the beam is as follows.
  • the incident beam has two angle parameters, one is the angle ⁇ between the incident beam and the normal of the material surface, the other is the direction angle ⁇ of the incident beam, and the incident point of the incident path is o.
  • the two parameters ⁇ and ⁇ determine the direction of the incident beam.
  • incident angle parameters of incident beam 1 and incident beam 2 are ⁇ 1, ⁇ 1 and ⁇ 2, ⁇ 2, respectively. These four parameters determine the period and grating direction of the pixel body grating. These four variables are independently adjusted to realize the pixel body grating. Arbitrary regulation.
  • volume grating pixels are spliced and recorded, and the preparation scheme of the digital reflector grating element is formed.
  • ⁇ 1, ⁇ 1 and ⁇ 2 are fixed values, that is, equivalent to two parallel light interferences, and a reflector holographic grating is prepared to have a narrow band reflection function.
  • ⁇ 1, ⁇ 1 and ⁇ 2, ⁇ 2 are the corresponding quantized values of the point source and the xy coordinate, and a reflector hologram lens is prepared, and has a narrowband band reflection and imaging function.
  • ⁇ 1, ⁇ 1 and ⁇ 2, ⁇ 2 are multi-point light sources or corresponding quantized values of line sources and xy coordinates, and a multifocal or gradual focus reflection holographic lens is prepared.
  • ⁇ 1 and ⁇ 1 are physical light quantization, and ⁇ 2 and ⁇ 2 are parallel light, a digital reflection hologram will be prepared.
  • the present invention proposes a universal preparation system for the digital reflector holographic optical element, which is mainly composed of the following parts:
  • a laser which is a monochromatic light source with a certain coherence length, needs to meet the conditions of holographic exposure.
  • the types of lasers of this type generally include an argon ion gas laser, a gas barrier laser, a single longitudinal mode semiconductor laser, and the like.
  • the external light path is an optical path structure that realizes basic functions such as reflection, splitting, and beam expansion.
  • the beam 1 control unit and the beam 2 control unit are the core components of the system, and the control unit can adjust the ⁇ and ⁇ values of the holographic recording beam, and keep the position of the recording point unchanged during the regulation process.
  • the control unit can be composed of optical parts and precision moving parts to achieve ⁇ and ⁇ value adjustment.
  • a variable-scale Fourier transform system and a projection system including phase-phase optical elements may be used to form a modulatable ray angle optical device. By driving the position and rotation angle of the phase optical element on the optical path, interference fringe faces of different orientations are formed inside the recording surface pixels.
  • the hollow stage and the motion platform are used to place the volume holographic recording material for XY stepping motion for pixel stitching.
  • the control unit which is the control center of the system, issues corresponding control commands according to predetermined data (such as ⁇ 1, ⁇ 1, ⁇ 2, ⁇ 2, x, y6 independent variables).
  • the driving unit receives the instruction of the control unit and drives components such as a laser and a motor.
  • the preparation system can be simplified as a single beam structure as follows.
  • a specular reflection device is placed between the holographic material and the stage.
  • the reflective device may be a reflective film or a mirror. The incident beam and the reflected beam interfere with each other, and the structure of the body grating is parallel to the surface of the material.
  • the laser uses a combination of a plurality of different wavelengths to prepare a reflector hologram element suitable for multiple wavelengths, for example, a combination of red, green, and blue three-color lasers to realize full-color volume holography. Preparation of components.
  • volume holographic materials all have multiplexed recording characteristics and have powerful information storage capability. Therefore, the splicing scheme of the reflector holographic pixels can make full use of this characteristic to perform angle and wavelength multiplexing recording.
  • the present invention proposes to use a direct matching method of index matching to satisfy the fabrication requirements of a waveguide type device.
  • the angle of refraction inside the recording material is limited; as shown in Fig. 16, the refractive index of the matching liquid is the same as or similar to the refractive index of the volume hologram recording material, and the incident beam can be The full holographic angle is entered into the volume hologram recording material to realize the fringe surface recording which satisfies the incident condition of the waveguide.
  • the two beams on both sides of the material are recorded, one beam should use the index matching scheme, and the other beam can be used without the index matching scheme.
  • the traditional reflector hologram element has a single regular interference fringe surface, which has only one viewing angle for imaging applications. If the reflector hologram element has multiple reflection viewing angles, for 3D and increase The perspective is important.
  • the digital reflector holographic scheme makes it possible to produce multi-view reflector hologram elements.
  • the invention proposes to adopt a multi-beam interference method to prepare a reflector holographic pixel with multiple viewing angles, in particular, after one beam of light passes through one of the beam steering units, it can be divided into multiple beams to illuminate the recording material and multi-beam with another beam of light. Interference, resulting in a multi-striped surface distribution. As shown in Figure 17.
  • a beam splitting device such as a Daman grating or a binary optics can be used, and the Fourier optical system is used, and finally the multi-beam is concentrated on the recording material.
  • Reflective hologram element As shown in Fig. 18, the structure of the pixel arrangement and the internal interference fringe surface are arranged in accordance with the distribution of the hologram lens to form a reflection holographic lens having selective imaging characteristics, and the focal length of the lens depends on the maximum angular change of the interference optical system.
  • Reflective hologram elements As shown in FIG. 19, according to the sub-pixel array arrangement, the structure distribution of each set of sub-pixel arrays is arranged according to the above requirements, and a multifocal lens having different focal lengths is formed, and the position and angle of the focus can be set according to requirements.
  • Reflective hologram elements as shown in FIG. 20, arranged in a sub-pixel array, wherein the structure distribution of a part of the sub-pixel arrays is arranged according to the above requirements, and the structure distribution of the other sub-pixel arrays may be blank to form a lens having sampling characteristics. The contrast of the reflected image and the transmitted landscape can be adjusted.
  • the application of the reflective hologram element in the head-up display as shown in Fig. 21, it is attached to the windshield in the form of a film, and the projection optical image from below or above is selectively reflected and imaged to form a virtual image on the driver's glasses.
  • the front view is fully transmissive.
  • the holographic optical system compared with the traditional liquid crystal lens system, the holographic optical system has low light energy loss, and adopts a small power light source, which is expected to achieve 10,000 nit high-intensity image output; multi-focus imaging film can be designed to achieve different distances in front of the driver The projection of the large-angle image is expected to reach 30 degrees or more, thus realizing the augmented reality HUD, the projection information and the physical fusion.
  • the glass lenses are attached to a single or multi-layer film, and the micro-projection optical image from above is selectively reflected through the waveguide to the human retina.
  • a virtual image is formed on the front, and the front scene is fully transmissive.
  • the waveguide type optical system has the advantages of compact structure, and has an important application prospect in augmented reality glasses or helmets.
  • the optical image projection enters the waveguide structure, is diffracted on the reflector hologram element, and enters through the waveguide. Human eyes.
  • the projected light entering the waveguide is described by a volume hologram coupling scheme, and other schemes such as prism coupling can also be used.
  • the preparation of a waveguide type device using the above immersion direct writing scheme is a preferred method.

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Abstract

一种体全息元件，包括至少一像素化的信息层和至少一基材层，信息层设置于基材层上，或者信息层设置于相邻的两基材层之间。从体全息元件的剖面看，信息层具有阵列分布的像素化的条纹面，每个像素内部的条纹面具有周期性，并且与基材平面具有夹角，每个像素为反射布拉格体光栅。一种像素化反射体全息元件的制作方法和制作系统，通过干涉光束调控、在体全息记录材料的感光层上进行像素化拼接曝光，经后续化学或物理处理，构成复杂光学参数的像素化的反射体全息光学元件。

Description

一种体全息元件及其制作方法和制作系统
本申请要求于2016年11月16日提交中国专利局、申请号为201611033273.1、发明名称为“一种体全息元件及其制作方法和制作系统”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本发明涉及一种体全息元件，具体涉及一种像素化反射体全息元件及其制作方法和制作系统。
背景技术
全息(Holography)是一种实现光场记录和再现的专业技术，按照全息材料的不同，分为平面全息和体全息技术。
近20-30年，平面全息技术在光谱测量用光栅、模压全息等领域实现了广泛的商业化应用，并成功实现了数字化制备，极大推进了该技术的应用范围。
体全息技术可以分为两个方向，一是三维体全息照相技术，二是体全息光学元件。
三维体全息照相技术：能够实现逼真的三维显示，美国Zebra公司，发明了数字化制备技术，但受制于三维全息图实际应用的局限性(观赏价值)，该技术并没有规模化推广和应用。
体全息光学元件，当前的制备方法是在光学平台上进行干涉记录，主要应用是体全息光栅。特别是反射体全息元件，具有独特的高衍射效率、具有特定波长的选择性全反射成像和其他波长的透射光学特性。
早在1978年，美国专利US4218111就披露了飞机全息抬头显示方案。近年来，体全息光学元件在汽车HUD、增强现实头盔等多领域应用的研究，使之再度成为了热点。
博士公司发明了具有全息元件的HUD(PCT/EP2012/054788，WO2012156124A1)，利用全息光学元件来降低抬头显示器的空间需求，但并未将全息元件应用在挡风玻璃上。
德尔福(Delphi)公司提出了一种采用反射体位相光栅(RVPG)的汽 车HUD结构，描述了用模压的方法制备反射体位相光栅(EP2469324A1)。
索尼公司发明了虚拟显示装置(PCT/JP2005/005761)，其中采用波导型反射体全息元件，提出采用多个全息层的叠置体形式，满足不同频带(波长)入射的平行光束。
美国专利US20140168735A1，提出了一种具有角度复用结构体光栅的波导型近眼显示方案，可扩大视场角。
美国专利US20100186818A1，提出了一种太阳能电池的光收集方法，利用波导布拉格体光栅进行光线收集和在波导结构中传播，最后达到电池芯片，同时利用体光栅的优化结构，该方法可以收集多种角度入射的太阳光。
所以，反射体全息光学元件在光场调制方面的特殊优点，已经在飞机平显系统推广应用，并且随着反射体全息元件技术的进一步创新，将尤其适用于汽车抬头显示器(Head Up Display)、增强现实显示(Augmented Reality Display)和虚拟现实显示等领域然而，上述现有技术均未涉及反射体全息元件的具体实现方法。
现有技术中的全息光学器件的制作，都采用在光学平台上搭建干涉光路，在全息记录材料上一次性曝光，形成整体干涉条纹分布，经后续工艺处理，完成全息光学元件的制备。但是该方法可靠性差，造成制作的良率低，短焦、多焦点等参数灵活性方面也具有局限性，所以向更多的创新应用拓展能力不强。
发明专利US20090304331，US7792003B2，CN102652384A描述了制作体全息光栅的方法，但都是针对特定器件的方法，这些方法不具有通用性。
在体全息数字化制备技术方面，
Zebra公司的方法(Apparatus and method for replicating a hologram using a steerable beam US6266167B1)是用空间光调制器产生物光，与固定方向的参考光干涉，用于数字化三维全息图，并不能用于体全息光学元件。
上海大学提出了“一种大幅面数字化全息打印装置和方法”(201510637022.3)，属于全息3D显示领域，与Zebra公司的方法属于同一领域。
在体全息元件领域，目前未见提出像素化体全息元件的相关方案，现有技术中用光学平台制作体全息光学元件，具有几个方面的缺点：
1)受光源功率和光学系统口径的限制，幅面无法做大，一般都在200mm以下幅面；
2)光学平台干涉制作，需要长时间曝光，稳定性不足，成品率低；
3)受光路中光学器件尺寸、焦距等参数的限制，全息光学元件的参数调控困难；
4)传统光路的元器件固定，全息记录过程不易变化，所以制备短焦距、多焦点、渐变焦距、多波长等特殊的全息光学元件难度更大。
上述问题限制了体全息元件的应用，使其优越性得不到充分发挥。
发明内容
为了解决上述技术问题，本发明提供了一种体全息元件及其制作方法和制作系统，通过在体全息感光材料上进行干涉光束调控，像素化拼接曝光制作，最终构成具有复杂光学参数的反射体全息光学元件。本发明提出的这种新型体全息光学元件，将在增强现实、汽车抬头显示等领域具有重要应用价值。
为了达到上述目的，本发明的技术方案如下：
一种体全息元件，包括至少一像素化的信息层和至少一基材层，信息层设置于上述基材层上。
进一步地，上述体全息元件的信息层剖面具有像素化的条纹面，条纹面具有周期性，并且条纹面与基材层所在的平面具有夹角。
进一步地，上述条纹面与基材层所在的平面的夹角为0-85度之间。
进一步地，每个上述条纹面的周期范围为130nm～5um。
进一步地，上述基材层设置有两层，上述信息层设置于两上述基材层之间。
进一步地，还包括基片，上述信息层和上述基材层设置于基片上。
进一步地，上述体全息元件还包括保护层，保护层设置于基材层和信息层相对于基片的另一侧。
进一步地，上述基材层为薄膜或玻璃。
进一步地，上述信息层为光致聚合物、重铬酸明胶、卤化银材料或者光折变玻璃基片的任意一种体全息材料。
进一步地，上述体全息材料的厚度10um-150um，可感光范围400nm-650nm。
本发明还公开了一种上述体全息元件制作方法，通过至少两束细光束从体全息记录材料的两面分别入射，形成干涉区域，记录体光栅像素，材料与像素步进移动，通过二维拼接记录，完成具有一定幅面的反射体全息元件制作。
进一步地，入射的光束有两个角度参数，一是入射光束与材料表面法线的夹角θ，二是入射光束的方向角α，入射光路的入射点为o，θ和α这两个参数确定了入射光束的方向，第一入射光束和第二入射光束的入射角度参数分别为θ1、α1和θ2、α2，θ1、α1和θ2、α2，结合体光栅像素的坐标x、y，形成了六个独立变量，根据预先设计的数据规律量化这些变量之间的对应关系，将体光栅像素拼接记录。
进一步地，上述体全息记录材料为银盐乳剂、重铬酸盐明胶、光折变玻璃、光折变晶体或光致聚合物的任意一种。
本发明还公开了一种上述体全息元件的制作系统，制作系统包括：
光源；
外光路，用于实现反射、分束、扩束基本功能的光路结构；
至少两光束调控单元，用于实现全息记录光束的角度的调节，并且在调控过程中保持记录点位置不变；
载物台，用于放置体全息记录材料，作步进运动，实现像素拼接功能；
控制单元，根据预先给定的数据，发出相应的调控指令；
驱动单元，接收控制单元的指令，实现驱动作用。
进一步地，上述光源为激光器。
进一步地，上述光束调控单元包括光学零件和精密运动零件，实现入射光束与材料表面法线的夹角和入射光束的方向角的调节，通过驱动位相光学元件在光路上位置和旋转角度，在记录面像素内部形成不同取向的干涉条纹面。
本发明提供的体全息元件及其制作方法和制作系统，通过专门设计的光机电一体化系统，进行干涉光束调控，在体全息感光材料上进行像素化拼接曝光，经后续处理，最终构成具有复杂光学参数的像素化反射体全息光学元件，本发明提出了一种新的体全息光学元件，将在增强现实、汽车抬头显示等领域具有重要应用价值。建立数字化反射全息干涉直写系统，通过角度和方向可调控的相干光束，在体全息材料内部形成具有不同周期和取向的像素化干涉条纹面分布和像素化阵列分布，构成反射体全息元件。通过上述技术手段，本发明具有如下优点：设计指定的反射成像功能、可以有更高的均匀性、更短焦距、更大幅面，一个及以上的成像焦点、一种及以上的颜色反射成像、可以同轴也可离轴反射成像和同时其他波长光全透射，几乎对特定波长的全反射成像效率和其它波长的几乎全透射功能。
附图说明
图1为本发明实施例中像素结构反射体全息元件示意图。
图2为本发明实施例中反射体全息元件剖面示意图。
图3为本发明实施例中一种实施方式下像素化反射体全息元件的结构示意图。
图4为本发明实施例中另一种实施方式下像素化反射体全息元件的结构示意图。
图5为本发明实施例中另一种实施方式下像素化反射体全息元件的结构示意图。
图6为本发明实施例中另一种实施方式下像素化反射体全息元件的结构示意图。
图7为本发明实施例中光束的入射示意图1。
图8为本发明实施例中光束的入射示意图2。
图9为本发明实施例中光束的入射示意图3。
图10为本发明实施例中光束的入射示意图4。
图11为本发明实施例中光束的入射示意图5。
图12为本发明实施例中一种实施方式下像素化反射体全息制作系统 的结构示意图。
图13为本发明实施例中另一种实施方式下像素化反射体全息制作系统的结构示意图。
图14为本发明实施例中另一种实施方式下像素化反射体全息制作系统的结构示意图。
图15为本发明实施例中一种实施方式下体全息记录材料的入射示意图。
图16为本发明实施例中另一种实施方式下体全息记录材料的入射示意图。
图17为本发明实施例中另一种实施方式下体全息记录材料的入射示意图。
图18为本发明实施例中像素化反射体全息元件的光线调制示意图。
图19为本发明实施例中一种实施方式下亚像素化反射体全息元件的光线调制示意图。
图20为本发明实施例中另一种实施方式下亚像素化反射体全息元件的光线调制示意图。
图21为本发明实施例中一种实施方式下体全息光学元件的人眼视网膜成像示意图。
图22为本发明实施例中另一种实施方式下体全息光学元件的人眼视网膜成像示意图。
图23为本发明实施例中另一种实施方式下体全息光学元件的人眼视网膜成像示意图。
具体实施方式
下面结合附图详细说明本发明的优选实施方式。
本实施例主要描述了一种像素化反射体全息元件，形成具有上述功能的反射成像和前方光的透射功能。该像素化反射体全息元件由基材、基材上的体全息信息层组成，在信息层内部的反射全息像素阵列，像素单元中含有一系列干涉条纹面，干涉条纹面平行或与基材表面有夹角，这些阵列 分布的、具有不同参数的像素单元，不但可以实现传统体全息元件的功能，还可实现复杂焦距、多焦点等光学参数的调控，夹角变化和分布取决于反射体全息元件的成像特性需求。
本发明同时提出上述像素化反射体全息元件的制备方法，建立数字化反射全息干涉直写系统，通过角度和方向可调控的相干光束，在体全息材料内部形成具有不同周期和取向的像素化干涉条纹面分布和像素化阵列分布，构成反射体全息元件。
通过上述全息元件结构和制备方法，具有如下优点：设计指定的反射成像功能、可以有更高的均匀性、更短焦距、更大幅面，一个及以上的成像焦点、一种及以上的颜色反射成像、可以同轴也可离轴反射成像和同时其他波长光全透射，几乎对特定波长的全反射成像效率和其它波长的几乎全透射功能，给反射体全息元件设计和应用带来灵活性。
下面将通过具体实施例，加以详细描述。
1)像素化反射体全息元件结构
如图1-2所示，本实施例提出像素化体全息元件的结构，整个反射体全息元件由阵列像素化的条纹面构成，每个像素条纹面具有特定的周期，并且与基片平面呈一定的角度。
每个像素即反射布拉格光栅，具有满足体全息布拉格条件的光线调制功能，每个条纹面的周期和角度参数根据体全息元件的具体使用需求参数进行像素量化计算，这些阵列光栅的组合，满足体全息元件的总体使用要求。
反射体全息元件由基材层和信息层组成。
基材优选聚酯薄膜，具有良好的光学透过率，一般地>92％。
基材也可以选择光学玻璃，在波导应用时，基材优选是玻璃，具有良好的波导功能。
信息层原材料为光致聚合物材料、重铬酸明胶、卤化银材料或者光折变玻璃基片的任意一种体全息感光材料。优选为光致聚合物材料，感光层厚度10um-150um，可感光范围400nm-650nm。
如果基材为软性薄膜基材，反射体全息元件一般会与硬质的玻璃基片等贴合使用。
该类反射体全息元件一般与透明基片贴合使用，反射体全息元件对特定的窄带波长范围进行调制，其他光透明，这种器件具有在可见光区的总透过率大于70％。一般地，像素内部的干涉条纹面与基片平面的夹角变化范围：0度-85度。干涉条纹面的最小周期间隔为记录光波长的二分之一，一般地，条纹面的周期范围130nm～300nm,对应的波长范围：263nm-632.8nm，反射全息具有良好的波长选择性和角度选择性，在可见光范围内的光谱带宽2nm-30nm。一般地，在满足再现条件下的反射全息元件的衍射效率>90％.。这种薄膜具有像素化单色反射成像功能、也可具有像素化彩色反射成像功能；
像素排列形成元件，像素内部干涉条纹面的尺度在130纳米～5微米。具有单一反射成像焦点、也可多个反射焦点(视点)；
反射全息元件由像素阵列构成，根据设计，通过不同夹角变化的像素的排列可形成不同反射成像特性和透射特性，如对特定波长具有反射成像功能，同时对其他波长全透射，反射成像透镜的焦比1/F<1/1～1/100。
像素的尺寸根据实际需求的调制精度，一般从10μm至1mm。
如图3-6所示，本实施例体全息光学元件，根据实际应用情况，可以分成两类，第一类是空气入射型，第二类是波导入射型。
空气入射型，入射光线在空气中入射到体全息光学元件，入射光线受到调制衍射。
在具体使用时，可以有三种实施方案，第一种方案是如图3示，信息层可与入射光直接接触，基片、基材层、信息层以此层叠。第二种方案如图4所示，是在第一种方案的基础上增加保护层，即基片、基材层、信息层的表面设置有保护层，基片、基材层、感光层、保护层以此层叠，保护层与入射光线直接接触。第三种方案是如图5所示，感光层与基片贴合，基片、信息层、基材层依次层叠，基材层与入射光线接触。在基片为透明的情况下，空气入射型体全息光学元件可用于汽车增强现实HUD等领域。
波导入射型，入射光在基片中通过波导传播方式入射，这种情况入射角度较大，一般大于42度，如图6所示。在具体应用时，波导方式的光路结构紧凑，适合近眼显示如AR眼镜、头盔等应用。
在本发明的其他实施例中，基材层具体可以选择设置有两层，信息层 设置于两基材层之间。
2)数字化体全息元件记录方法与系统
同时，本发明提出一种新型的双光束干涉直写系统，两束光在记录材料两面分别入射，在材料内部进行像素化干涉，形成像素化布拉格体光栅，相对于材料表面法线方向，两入射光与法线的夹角、入射光的方向角都分别可调节，从而实现了像素化体光栅周期和光栅方向的可调控，该干涉直写系统，根据预定的数据格式，通过像素拼接的方法，完成体全息光学元件的制备。具体说明如下：
(1)体全息记录的原理
如图7-8所示，两束相干激光分别从材料的两边入射到记录材料上，在体全息记录材料内部将形成干涉条纹(或者是干涉条纹的潜影，根据记录材料的具体工艺要求)，这类体全息记录材料主要有银盐乳剂、重铬酸盐明胶、光折变玻璃、光折变晶体、光致聚合物。在空间上，干涉条纹呈页状，在体全息材料内容分层分布，示意图如下图所示。干涉条纹的周期d、双光束夹角2θ、激光波长λ，n为介质折射率，满足以下关系：
2·n·d·sinθ＝λ
(2)本发明双光束干涉方案
如图9-11所示，本发明提出像素化的反射体全息制作方案，具体是通过两束细光束(光束1和光束2)，从体全息记录材料的两面分别入射，形成干涉区域，记录体光栅像素，材料与干涉像素步进移动，通过二维拼接记录，完成具有一定幅面的反射体全息元件制作。
一般来说，光束1和光束2不具有对称性，具备不同的入射角度参数，光束入射角度说明如下。
入射的光束有两个角度参数，一是入射光束与材料表面法线的夹角θ，二是入射光束的方向角α，入射光路的入射点为o。θ和α这两个参数确定了入射光束的方向。
入射光束1和入射光束2的入射角度参数分别为θ1、α1和θ2、α2，这4个参数的决定了像素体光栅的周期和光栅方向，这四个变量独立调节，就实现了像素体光栅的任意调控。
θ1、α1和θ2、α2，结合体光栅像素的位置坐标x、y，形成了6 个独立变量，根据预先设计的数据规律量化这些变量之间的对应关系，将体光栅像素拼接记录，就形成了数字化反射体光栅元件的制备方案。
特殊的，如θ1、α1和θ2、α2均为固定值，即相当于两束平行光干涉，制备形成反射体全息光栅，具有窄带波段反射功能。
如θ1、α1和θ2、α2为点光源与xy坐标的对应量化值，制备形成反射体全息透镜，同时具备窄带波段反射和成像功能。
如θ1、α1和θ2、α2为多点光源或者线光源与xy坐标的对应量化值，制备形成多焦点或者渐变焦点反射全息透镜。
如θ1、α1为实物的物光量化，θ2、α2为平行光，将制备形成数字化的反射全息图。
(3)数字化体全息光学元件制备系统
如图12所示，为了实现上述6个独立变量的控制，本发明提出了数字化反射体全息光学元件的通用制备系统，主要由以下几个部分组成：
激光器，为具有一定相干长度的单色光源，需要满足全息曝光的条件。这一类激光器的类型一般有氩离子气体激光器、氦隔气体激光器、单纵模半导体激光器等。
外光路，为实现反射、分束、扩束等基本功能的光路结构。
光束1调控单元、光束2调控单元，为本系统的核心组成部分，该调控单元可以实现全息记录光束的θ和α值调节，并且在调控过程中保持记录点位置不变。该调控单元可由光学零件和精密运动零件组成，实现θ和α值调节。具体技术方案这里不做详细描述，可采用含有位相光学元件的变标度傅里叶变换系统和投影系统组成可调制光线角度光学装置。通过驱动位相光学元件在光路上位置和旋转角度，在记录面像素上内部形成不同取向的干涉条纹面。
镂空载物台和运动平台，用于放置体全息记录材料，作XY步进运动，用于实现像素拼接功能。
控制单元，为系统的控制中心，根据预先给定的(如θ1、α1、θ2、α2、x、y6个独立变量)数据，发出相应的调控指令。
驱动单元，接收控制单元的指令，驱动激光器、电机等部件。
上述部分，结合控制软件，组成完整的数字化体全息光学元件制备系 统。在使用时，平台移动、光束调制、激光控制协调工作，进行像素化直写曝光，若干像素组合构成了数字化反射体全息元件。
(4)其他光刻系统结构
如图13所示，如果θ1、α1、θ2、α2四个变量中，θ1＝θ2、α1＝α2，属于对称结构的反射体全息光学元件，可以制备系统可以简化为如下单光束结构，在体全息材料和载物台之间放置一镜面反射器件，这种反射器件可以是反射膜或者反射镜，入射光束和反射光束形成干涉，其体光栅的结构与材料表面平行。
如图14所示，更加一般的情况，激光器采用多个不同波长的组合，可以制备适用于多波长的反射体全息元件，例如，红、绿、蓝三色激光器的组合，实现全彩色体全息元件的制备。
需要指出的是，体全息材料都具备复用记录特性，具有强大的信息存储能力，所以反射体全息像素的拼接方案，可以充分利用该特性，做角度和波长复用记录。
折射率匹配的浸入式直写方式：(制作波导型器件)
我们知道，由折射定律的限定(n1/n2＝sin(θ2)/sin(θ1)，n1为光疏介质，n2为光密介质，θ1为入射角，θ2为折射角)，当光由光疏介质进入光密介质时，折射角不会超过全反射角，所以上述直写系统在空气中进行器件制备时，器件的条纹面空间频率受到了限制，不能够满足波导型反射全息器件的要求。
鉴于上述情况，本发明提出，采用折射率匹配的直写方式来满足波导型器件的制作要求。如图15所示，入射光束无折射率匹配时，在记录材料内部的折射角有限制；如图16所示，匹配液体的折射率与体全息记录材料的折射率相同或相近，入射光束可以超过全反射角进入体全息记录材料，实现可以满足波导入射条件的条纹面记录。根据实际波导器件的使用情况，记录材料两边的双光束，一束应使用折射率匹配方案，另一束可不使用折射率匹配方案。
多衍射视角的反射体全息元件的直写方式：
传统反射体全息元件内部为单一规律的干涉条纹面，在作成像应用时只有一个视角，如果反射体全息元件具有多个反射视角，对于3D和增大 视角具有重要意义。数字化反射体全息制作方案，使制作多视角反射体全息元件成为可能。
本发明提出采用多光束干涉的方法制备具有多视角的反射体全息像素，具体是一束光通过其中一个光束调控单元后，可以分成多束照射到记录材料上，与另外一束光进行多光束干涉，从而形成多条纹面分布。如图17所示。
多光束的具体实现手段，可以采用达曼光栅、二元光学等分束器件，配合傅里叶光学系统，最后多光束会聚到记录材料上。
3)像素化体全息元件应用实施例：
反射全息元件：如图18所示，像素排列和内部干涉条纹面的结构按照全息透镜的分布排列，形成具有选择成像特性的反射全息透镜，透镜的焦距取决于干涉光学系统的最大角度变化。
反射全息元件：如图19所示，按照亚像素阵列排列，每组亚像素阵列的结构分布按照上述要求排列，形成具有不同焦距的多焦点透镜，焦点的位置和角度，可以根据要求设定。
反射全息元件：如图20所示，按照亚像素阵列排列，其中部分亚像素阵列的结构分布按照上述要求排列，其他亚像素阵列的结构分布可以空白，形成具有具有抽样特点的透镜。可调整反射图像的亮度与透射景观的对比度。
反射全息元件在抬头显示器的应用：如图21所示，以薄膜形式贴合在挡风玻璃上，将来自下方或者上方的投影光学图像选择性反射成像，在驾驶员的眼镜上形成虚像，汽车前方的景象全透射。
全息HUD的优点：与传统液晶透镜系统相比，全息光学系统的光能损失小，采用小功率光源，预期能够实现10000nit高亮度图像的输出；可以设计多焦点成像薄膜，实现驾驶员前方不同距离的投影；实现大视角图像，预期达到30度以上，从而真正实现增强现实HUD，投射信息与实物融合。
反射全息元件在增强现实头盔上的应用：如图22所示，以单层或多层薄膜形式贴合玻璃镜片上，将来自上方的微投影光学图像通过波导形成选择性反射，在人眼视网膜上形成虚像，前方景象全透射。
如图23所示，波导应用，波导型光学系统，具有结构紧凑的优点，在增强现实眼镜或头盔具有重要应用前景，光学图像投影进入波导结构，在反射体全息元件上衍射，透过波导进入人眼。附图投影光线进入波导采用了体全息元件耦合方案描述，实际也可使用棱镜耦合等其他方案。波导型器件的制备，使用上述的浸入式直写方案是优选方法。
以上所述的仅是本发明的优选实施方式，应当指出，对于本领域的普通技术人员来说，在不脱离本发明创造构思的前提下，还可以做出若干变形和改进，这些都属于本发明的保护范围。

Claims (16)

  1. 一种体全息元件，其特征在于，包括至少一像素化的信息层和至少一基材层，所述信息层设置于所述基材层上。
  2. 根据权利要求1所述的体全息元件，其特征在于，所述体全息元件的信息层剖面具有像素化的条纹面，所述条纹面具有周期性，并且条纹面与基材层所在的平面具有夹角。
  3. 根据权利要求2所述的体全息元件，其特征在于，所述条纹面与基材层所在的平面的夹角为0-85度之间。
  4. 根据权利要求2所述的体全息元件，其特征在于，每个所述条纹面的周期范围为130nm～5umm。
  5. 根据权利要求1所述的体全息元件，其特征在于，所述基材层设置有两层，所述信息层设置于两所述基材层之间。
  6. 根据权利要求1所述的体全息元件，其特征在于，还包括基片，所述信息层和所述基材层设置于所述基片上。
  7. 根据权利要求6所述的体全息元件，其特征在于，所述体全息元件还包括保护层，所述保护层设置于基材层和信息层相对于基片的另一侧。
  8. 根据权利要求1所述的体全息元件，其特征在于，所述基材层为薄膜或玻璃。
  9. 根据权利要求1所述的体全息元件，其特征在于，所述信息层为光致聚合物、重铬酸明胶、卤化银材料或者光折变玻璃基片的任意一种全息感光材料。
  10. 根据权利要求9所述的体全息元件，其特征在于，所述信息层的厚度10um-150um，其体全息记录材料的可感光范围400nm-650nm。
  11. 一种如权利要求1所述的体全息元件制作方法，其特征在于，通过至少两束细光束从体全息记录材料的两面分别入射，形成干涉区域，记录体光栅像素，材料与像素步进移动，通过二维拼接记录，完成具有一定幅面的反射体全息元件制作。
  12. 根据权利要求11所述的体全息元件制作方法，其特征在于，入射的光束有两个角度参数，一是入射光束与材料表面法线的夹角θ，二是入 射光束的方向角α，入射光路的入射点为o，θ和α这两个参数确定了入射光束的方向，第一入射光束和第二入射光束的入射角度参数分别为θ1、α1和θ2、α2，θ1、α1和θ2、α2，结合体光栅像素的坐标x、y，形成了六个独立变量，根据预先设计的数据规律量化这些变量之间的对应关系，将体光栅像素拼接记录。
  13. 根据权利要求11所述的体全息元件制作方法，其特征在于，所述体全息记录材料为银盐乳剂、重铬酸盐明胶、光折变玻璃、光折变晶体或光致聚合物的任意一种。
  14. 一种如权利要求1所述体全息元件的制作系统，其特征在于，包括：
    光源；
    外光路，用于实现反射、分束、扩束基本功能的光路结构；
    至少两光束调控单元，用于实现全息记录光束的角度的调节，并且在调控过程中保持记录点位置不变；
    载物台，用于放置体全息记录材料，作步进运动，实现像素拼接功能；
    控制单元，根据预先给定的数据，发出相应的调控指令；
    驱动单元，接收控制单元的指令，实现驱动作用。
  15. 根据权利要求14所述的体全息元件制作系统，其特征在于，所述光源为激光器。
  16. 根据权利要求14所述的体全息元件制作系统，其特征在于，所述光束调控单元包括光学零件和精密运动零件，实现入射光束与材料表面法线的夹角和入射光束的方向角的调节，通过驱动位相光学元件在光路上位置和旋转角度，在记录面像素内部形成不同取向的干涉条纹面。
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CN106406061A (zh) * 2016-11-16 2017-02-15 苏州苏大维格光电科技股份有限公司 一种体全息元件及其制作方法和制作系统

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CN114690298A (zh) * 2022-03-21 2022-07-01 同济大学 一种基于拼接原子光刻技术的大面积自溯源光栅制备方法
CN114690298B (zh) * 2022-03-21 2024-03-26 同济大学 一种基于拼接原子光刻技术的大面积自溯源光栅制备方法

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