WO2018088089A1 - Overhead transport vehicle and method for controlling overhead transport vehicle - Google Patents

Overhead transport vehicle and method for controlling overhead transport vehicle Download PDF

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Publication number
WO2018088089A1
WO2018088089A1 PCT/JP2017/036602 JP2017036602W WO2018088089A1 WO 2018088089 A1 WO2018088089 A1 WO 2018088089A1 JP 2017036602 W JP2017036602 W JP 2017036602W WO 2018088089 A1 WO2018088089 A1 WO 2018088089A1
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WO
WIPO (PCT)
Prior art keywords
unit
traveling
article
drive unit
controller
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Application number
PCT/JP2017/036602
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French (fr)
Japanese (ja)
Inventor
陽一 本告
Original Assignee
村田機械株式会社
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Application filed by 村田機械株式会社 filed Critical 村田機械株式会社
Priority to JP2018550074A priority Critical patent/JP6747516B2/en
Publication of WO2018088089A1 publication Critical patent/WO2018088089A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02Storage devices
    • B65G1/04Storage devices mechanical

Definitions

  • the present invention relates to a ceiling transport vehicle and a method for controlling the ceiling transport vehicle.
  • a semiconductor wafer transport container (FOUP) or a reticle Pod for transporting a reticle is transported along a track laid on or near the ceiling.
  • a ceiling transport vehicle is used.
  • the overhead conveyance vehicle includes a traveling unit that travels on a track, and a main body unit below the traveling unit.
  • the main body includes an elevating drive unit that elevates and lowers an article holding unit such as a gripper that holds an article, and a lateral mechanism that projects the elevating drive unit laterally with respect to the main body.
  • the transfer destination of the article by the above-described overhead transporting vehicle is a transfer position (load port) of the processing apparatus, and may be arranged to be shifted below the track and to the side.
  • the lifting drive unit protrudes to the side by the lateral mechanism, and then the article holding unit is lifted by the lifting drive unit with respect to the transfer position.
  • the goods are being transferred.
  • Patent Document 1 describes a stacker crane that houses a pallet as an article on a shelf. This stacker crane has a fork that can be expanded and contracted on the lifting platform, and by performing overlapping operations such as extending and lowering the lifting platform while traveling, the pallet transfer time can be shortened. Yes.
  • the lifting drive unit for driving the lifting platform does not protrude to the side of the track only by lifting the lifting platform. Moreover, the lifting platform does not hold the article in a suspended state.
  • the overhead transport vehicle travels in the vicinity of the ceiling while holding the article in a suspended state, and the lifting drive unit is extended to the transfer position disposed below and on the side of the track. Then, the article is moved up and down. Therefore, in the overhead conveyance vehicle, an overlapping operation different from that of the stacker crane is required in order to shorten the time required for transferring the article.
  • the present invention relates to a ceiling transport vehicle that travels on a ceiling or a track near the ceiling, and can reduce the time required to transfer an article to a transfer position disposed below and on the side of the track. It aims at providing the control method of a car and a ceiling conveyance vehicle.
  • a ceiling transport vehicle includes a traveling unit that travels on a ceiling or a track laid near the ceiling, a main body that is provided below the traveling unit, and an article holding unit that holds an article in a suspended state.
  • An elevating drive unit that elevates and lowers the article holding unit, a traverse mechanism that moves the elevating drive unit between a storage position in which the elevating drive unit is stored in the main body unit, and a protruding position that protrudes laterally from the main body unit, Before the traveling unit stops with respect to the transfer position of the article that is shifted from the lower side to the lateral side, the movement of the elevating drive unit is started toward the projecting position by the lateral ejection mechanism, or the lateral ejection mechanism And a controller for starting the traveling of the traveling unit stopped corresponding to the transfer position before the elevating drive unit returns to the storage position.
  • the controller may instruct the start of driving of the lateral movement mechanism during the traveling of the traveling unit so that the lifting / lowering driving unit is disposed at the protruding position when the traveling unit stops corresponding to the transfer position. Good.
  • the controller may instruct the start of driving of the lateral mechanism toward the retracted position when the traveling unit starts traveling from a position corresponding to the transfer position.
  • it is not necessary to drive the lateral take-out mechanism during traveling.
  • the controller may be configured such that when there is an obstacle that can contact at least one of the projecting lift drive unit, the article holding unit, and the article held by the article holding unit during traveling of the traveling unit, The drive of the lateral mechanism may be instructed within a predetermined range where there is no contact. Further, the controller may instruct the start of driving of the lateral mechanism from the position where the traveling unit has exceeded the obstacle. In addition, the controller moves the transfer position when there is an obstacle that can contact at least one of the lift drive unit, the article holding unit, and the article held by the article holding unit while the running unit is running.
  • the subtraction time is calculated by subtracting the time required for the elevating drive unit at the protruding position to move to the retracted position from the time until the traveling unit stopped at the position corresponding to
  • the driving of the lateral movement mechanism may be started with the position raising / lowering drive section directed toward the storage position, and the start of traveling of the traveling section may be instructed at the timing when the subtraction time has elapsed from the start of driving of the lateral ejection mechanism.
  • the obstacle may be a hanging metal fitting for hanging a structure arranged below the track from the ceiling.
  • the structure may be a storage device on which an article can be placed, and the obstacle may be an article placed on the storage device.
  • the structure may be a storage device on which an article can be placed, and the obstacle may be an article placed on the storage device.
  • the controller has a storage unit that stores information regarding a position at which the protruding operation of the lateral movement mechanism starts during the traveling of the traveling unit or information about a timing at which the traveling unit starts traveling during the storage operation of the lateral mechanism. Also good.
  • the method for controlling a ceiling guided vehicle includes a traveling unit that travels on a ceiling or a track laid near the ceiling, a main body provided below the traveling unit, and an article that holds the article in a suspended state.
  • a control method for the overhead transport vehicle comprising: a laterally extending mechanism toward the projecting position before the traveling unit stops with respect to the transfer position of the article that is shifted from the lower side of the track to the side. Starting the movement of the elevating drive unit, or starting the running of the traveling unit stopped corresponding to the transfer position before the elevating drive unit returns to the storage position by the laterally extending mechanism. .
  • the movement of the lifting drive unit by the laterally extending mechanism can be overlapped with the traveling of the traveling unit. Due to this overlap, it is possible to transfer the article in comparison with the case where the lifting drive unit is laterally moved after the ceiling conveyance vehicle stops or the case where the traveling unit starts running after the lifting drive unit is stored in the main body unit.
  • the time required for loading can be shortened.
  • the controller instructs the start of driving of the lateral movement mechanism during the traveling of the traveling unit so that the lifting drive unit is disposed at the protruding position when the traveling unit stops corresponding to the transfer position.
  • the driving of the horizontal mechanism is started without waiting for the stop of the traveling unit, and when the traveling unit stops corresponding to the transfer position, the movement of the elevating drive unit to the protruding position is completed or almost completed, The time required for transferring the article can be shortened.
  • the controller instructs the start of driving of the lateral drive mechanism by moving the lifting drive unit at the protruding position toward the storage position when the traveling unit starts traveling from the position corresponding to the transfer position, Since the movement of the elevating drive unit to the storage position starts at the same time or almost simultaneously with the start of traveling, the time required to transfer the article by running the traveling unit without waiting for the elevating drive unit to be stored in the main body unit Can be shortened.
  • the controller has an obstacle as described above during traveling of the traveling unit, in the configuration in which the driving of the lateral movement mechanism is not performed during traveling of the traveling unit, the elevating drive unit or the article interferes with the obstacle. Can be prevented.
  • the controller has an obstacle such as that described above while traveling by the traveling unit, in the configuration in which the drive of the lateral movement mechanism is instructed within a predetermined range where there is no contact with the obstacle, the elevating drive unit or the article is obstructed. The time required to transfer the article can be shortened while avoiding interference with an object.
  • the controller instructs the start of driving of the lateral ejection mechanism from the position where the traveling unit has exceeded the obstacle
  • the driving of the lateral ejection mechanism is efficiently started, so that the time required for transferring the article can be reduced.
  • the controller moves up and down at the protruding position from the time until the traveling unit stopped at the position corresponding to the transfer position reaches the obstacle.
  • the subtraction time obtained by subtracting the time required for the drive unit to move to the storage position is obtained, and the drive of the horizontal drive mechanism is started while the lift drive unit at the protruding position is directed to the storage position while the traveling unit is stopped, and drive of the horizontal drive mechanism is started.
  • the travel unit starts to travel at the timing when the subtraction time has elapsed
  • the travel of the travel unit is started at a timing at which the lift drive unit does not come into contact with the obstacle, and waiting for the lift drive unit to return to the storage position. Since the traveling unit is traveled without any problem, the time required for transferring the article can be shortened.
  • the elevating drive unit or the article is the storage device or Interference with the article placed on the storage device can be suppressed.
  • the obstacle is a hanging metal fitting for suspending a structure formed below the track from the ceiling, it is possible to suppress the lifting drive unit or the article from interfering with the hanging metal fitting.
  • the controller includes a storage unit that stores information regarding a position at which the protruding operation of the lateral movement mechanism starts during the traveling of the traveling unit, or information about a timing at which the traveling unit starts traveling during the storage operation of the lateral ejection mechanism. Then, since the operation of the lateral movement mechanism or the traveling of the traveling unit is performed based on the information from the storage unit, it is possible to easily and reliably perform the protrusion of the elevating drive unit or the start of traveling of the traveling unit.
  • movement of an overhead conveyance vehicle system It is a figure which shows an example which performs horizontal storage at the time of a travel start of an overhead conveyance vehicle. It is a figure which shows an example which does not perform horizontal storage at the time of a travel start of an overhead conveyance vehicle. It is a figure which shows an example which performs storing of side loading while driving
  • FIG. 1 is a diagram illustrating an example of a ceiling guided vehicle system 100 according to the embodiment.
  • FIG. 2 is a diagram illustrating a state in which the article 2 is delivered from the ceiling transport vehicle 10 to the buffer unit 32 or from the buffer unit 32 to the ceiling transport vehicle 10.
  • the ceiling transport vehicle system 100 includes a track (running rail) 6, a ceiling transport vehicle 10, and a controller 20.
  • the overhead transport vehicle system 100 is installed, for example, in a semiconductor device manufacturing factory.
  • the article 2 accommodates an article such as a wafer or a reticle used for manufacturing a semiconductor element, for example.
  • the article 2 is, for example, a FOUP, SMIF Pod, or reticle Pod that can purge the inside.
  • 1 and 2 show an example in which the article 2 is a FOUP.
  • the article 2 includes a main body 2a, a lid 2c, and a flange 2g. Articles such as wafers are accommodated in the main body 2a.
  • the lid 2c is detachably provided on one of the side surfaces of the main body 2a.
  • the main body 2a has a plurality of positioning grooves 2d formed radially on the bottom surface side.
  • the ceiling transport vehicle 10 includes a traveling unit 5 and a main body unit 3.
  • the travel unit 5 travels along the track 6 by the driving force of a travel drive unit (not shown).
  • a travel drive unit for example, a transmission motor or a linear motor is used, and the travel drive unit may be mounted on the travel unit 5.
  • the track 6 is laid, for example, from the ceiling 18 of the equipment of the clean room building via a hanging metal fitting, and extends in the X direction in FIG.
  • the traveling unit 5 has traveling wheels 7 arranged so as to be in contact with the track 6.
  • the traveling wheel 7 is connected to, for example, an encoder (not shown). This encoder detects the number of revolutions of the traveling wheel 7 and outputs the detection result to the controller 20.
  • the controller 20 controls a travel drive unit (not shown) based on the detection result of the encoder, and controls the speed or stop position of the ceiling transport vehicle 10. Further, as shown in FIG. 1, the ceiling transport vehicle 10 is attached with a support shaft 9 extending downward from the traveling unit 5.
  • the main body 3 is attached to the lower part of the support shaft 9.
  • the main body 3 includes an article holding unit 13 that holds the article 2, an elevating drive unit 14 that elevates and lowers the article holding unit 13 in the vertical direction (Z direction, vertical direction), and a lateral that moves the elevating drive unit 14 to the side. And a dispensing mechanism 11.
  • the article holding unit 13 hangs and holds the article 2 by holding the flange 2g of the article 2.
  • the article holding part 13 is, for example, a chuck having a claw part 13a that is movable in the horizontal direction.
  • the article holding part 13 is moved up under the flange 2g of the article 2 and the article holding part 13 is lifted to raise the article 2 Is held in a suspended state.
  • the article holding unit 13 is connected to a suspension member 13b such as a wire or a belt.
  • the elevating drive unit 14 is, for example, a hoist, and lowers the article holding unit 13 by feeding the hanging member 13b, and raises the article holding unit 13 by winding the hanging member 13b.
  • the elevating drive unit 14 is controlled by the controller 20 to lower or raise the article holding unit 13 at a predetermined speed.
  • the raising / lowering drive part 14 is controlled by the controller 20, and hold
  • the laterally extending mechanism 11 has, for example, a plurality of movable plates 12 arranged so as to overlap in the vertical direction (Z direction).
  • the movable plate 12 is movable in the Y direction by a Y direction guide (not shown).
  • An elevating drive unit 14 is attached to the lower movable plate 12.
  • the laterally extending mechanism 11 has a Y-direction drive unit such as an electric motor (not shown).
  • the movable plate 12 is slid by the driving force from the Y-direction drive unit, and the elevation drive unit 14 is moved to the protruding position 14P and the storage position 14R. It is possible to move between.
  • the protruding position 14 ⁇ / b> P is a position where the elevating drive unit 14 is protruded from the main body 3 to the side of the track 6 (Y direction).
  • the storage position R is a position below the track 6 where the elevating drive unit 14 is stored in the main body 3.
  • a rotation unit may be provided between the side extending mechanism 11 and the elevating drive unit 14.
  • the rotation unit includes a rotation member and a rotation drive unit.
  • the elevating drive unit 14 can be rotated in the vertical direction (Z direction). is there.
  • the article holding unit 13 (article 2) suspended from the elevating drive unit 14 can be rotated, and the direction of the lid 2c of the article 2 is changed. Can do.
  • movement of such a rotation part is controlled by the controller 20, for example.
  • the controller 20 for example.
  • the main body unit 3 including the above-described lateral extending mechanism 11, the article holding unit 13, and the elevating drive unit 14 moves along the track 6 together with the traveling unit 5.
  • covers 16 are provided on the ⁇ X side and the + X side (the front side and the rear side in the traveling direction) of the main body 3, respectively. Each of the covers 16 is supported by the ceiling transport vehicle 10 via the support shaft 9 and moves together with the traveling unit 5.
  • the ceiling transport vehicle 10 can deliver the article 2 to a storage device such as a load port 31 (see FIG. 1) or a buffer unit 32 (see FIG. 2) of the processing device 30, for example. Further, the ceiling transport vehicle 10 can receive the article 2 from the load port 31 or the buffer unit 32.
  • the load port 31 and the buffer unit 32 are arranged below the lower end of the article 2 held by the article holding unit 13 where the article 2 is placed up to the uppermost position by the elevating drive unit 14. ing.
  • the processing apparatus 30 is, for example, a film forming apparatus, a coater / developer, an exposure apparatus, or an etching apparatus, and performs various processes in the process of manufacturing a device (for example, a semiconductor device).
  • the load port 31 is a place which mounts the container (article 2) which accommodated the target object for processing with the processing apparatus 30, as shown in FIG.
  • the buffer unit 32 is disposed below the track 6 (on the ⁇ Z side) and on the + Y side.
  • the buffer unit 32 may be disposed not only on the + Y side, but also on the ⁇ Y side, and may be disposed on both the + Y side and the ⁇ Y side.
  • the buffer unit 32 is a side track buffer disposed below and on the side of the track 6.
  • the buffer unit 32 has the article holding unit 13 and the elevation drive unit 14 projecting in the Y direction by the laterally extending mechanism 11 and the elevation drive unit 14 is disposed at the projecting position 14P. By lowering, the article 2 held by the article holding unit 13 is arranged at a position where it can be placed.
  • the buffer unit 32 has a frame 33.
  • the frame 33 is held in a state of being suspended from the ceiling 18 by a plurality of suspension fittings 34 and is disposed in the vicinity of the ceiling 18.
  • the frame 33 is arranged extending in the X direction along the track 6.
  • the buffer unit 32 can place one article 2 or a plurality of articles 2.
  • the number of articles 2 placed in one buffer unit 32 can be arbitrarily set.
  • the buffer unit 32 can place a plurality of articles 2, the plurality of articles 2 are placed side by side along the track 6 (in the X direction).
  • the load port 31 and the buffer unit 32 are provided with a plurality of pins 25 for positioning the article 2 placed thereon.
  • a plurality of pins 25 are provided.
  • Each pin 25 is arranged corresponding to the position of a plurality of radial grooves 2d provided on the bottom of the article 2, and can be fitted into the grooves 2d.
  • the article 2 is positioned by fitting the pin 25 into the groove 2 d of the article 2.
  • the shape and the number of the grooves 2d and the pins 25 are not limited to the above-described form, and any configuration that can position the article 2 is applicable.
  • the controller 20 controls the operation of each part of the ceiling transport vehicle 10.
  • the controller 20 controls a lateral movement operation or a storage operation (that is, movement of the elevating drive unit 14) by the lateral ejection mechanism 11, an operation of the traveling unit 5, and the like.
  • the controller 20 can overlap the operation of the traveling unit 5 and the operation of the lateral ejection mechanism 11. Therefore, the controller 20 is a stop position where the overhead conveyance vehicle 10 can transfer the article 2 with respect to the load port 31 or the buffer part 32 that is the transfer position of the article 2 (the lifting drive unit 14 protruding to the protruding position 14P).
  • the lateral drive mechanism 11 can start the movement of the elevating drive unit 14 toward the protruding position 14P.
  • the controller 20 can start the traveling of the traveling unit 5 stopped corresponding to the transfer position before the elevating drive unit 14 returns from the protruding position 14P to the storage position 14R by the laterally extending mechanism 11. it can.
  • the controller 20 can arbitrarily set the control for overlapping the operation of the traveling unit 5 and the operation of the lateral mechanism 11.
  • the controller 20 causes the elevating drive unit 14 to be arranged at the protruding position 14P when the traveling unit 5 stops corresponding to the transfer position (for example, the load port 31 described above, and so on).
  • the transfer position for example, the load port 31 described above, and so on.
  • the controller 20 instructs the lifting drive unit 14 at the projecting position 14P to start the driving of the lateral mechanism 11 toward the storage position 14R. be able to.
  • the controller 20 can determine whether there is any trouble in the above overlapping control. For example, when there is an obstacle that can contact at least one of the projecting lift drive unit 14, the article holding unit 13, and the article 2 held by the article holding unit 13 while the running unit 5 is running, During the traveling of the part 5, it is possible to stop driving the laterally extending mechanism 11.
  • the controller 20 has an obstacle that can contact at least one of the raised and lowered drive unit 14, the article holding unit 13, and the article 2 held by the article holding unit 13 while the running unit 5 is traveling. In this case, the driving of the lateral ejection mechanism 11 may be instructed within a predetermined range where there is no contact with an obstacle.
  • the obstacle may be a storage device such as the buffer unit 32 as shown in FIG. 2 or the article 2 placed on such a storage device. Further, as an obstacle, there is a hanging metal fitting 34 or the like for hanging a structure such as a frame 33 constituting the buffer unit 32 from the ceiling. Moreover, as an obstruction, the piping in an installation, the pillar and beam of a building, the processing apparatus 30 (refer FIG. 1) arrange
  • the controller 20 may include a derivation unit 21 and may be connected to the storage unit 22.
  • the deriving unit 21 derives a position where the protruding operation of the elevating drive unit 14 is started by the laterally extending mechanism 11.
  • the deriving unit 21 derives the timing for starting the storing operation for storing the elevating drive unit 14 by the laterally extending mechanism 11.
  • the storage unit 22 stores, for example, position information (map data) of the buffer unit 32 or the like that becomes an obstacle when the elevating drive unit 14 is protruded by the traverse mechanism 11 in the track 6 of the ceiling transport vehicle 10. ing.
  • the obstacle position information stored in the storage unit 22 is managed by, for example, coordinate values.
  • the deriving unit 21 determines the traveling unit 5 based on the time required for the lateral setting mechanism 11 to move between the storage position 14R and the protruding position 14P from the coordinate values of the obstacles stored in the storage unit 22.
  • the position at which the protruding operation of the lateral take-out mechanism 11 starts during the running of the vehicle or the timing at which the running of the running unit 5 starts during the retracting operation of the lateral take-out mechanism 11 is derived.
  • the deriving unit 21 may store the derived result in the storage unit 22. Therefore, the storage unit 22 stores information on the position at which the protruding operation of the lateral mechanism starts during the traveling of the traveling unit 5 or the timing at which the traveling unit 5 starts traveling during the storing operation of the lateral mechanism 11. Yes.
  • the storage unit 22 may store information related to the transfer position of the article 2 such as the load port 31 and the buffer unit 32, for example.
  • the controller 20 detects the distance to the obstacle by a sensor provided in the ceiling transport vehicle 10 and based on the output from this sensor. You may instruct the drive of the horizontal mechanism 11.
  • coordinates related to the obstacle are included in the transport instruction from the upper controller (MCS, MES) to the controller 20, and the controller 20 drives the lateral ejection mechanism 11 based on the obstacle coordinates acquired from the upper controller. You may instruct.
  • the controller 20 has been described by taking, for example, an in-vehicle controller mounted on the traveling unit 5 or the main body unit 3 of the ceiling guided vehicle 10, but is not limited to this configuration.
  • the controller 20 may be a ground controller installed on the ground side.
  • the controller 20 may control the plurality of ceiling transport vehicles 10 in an integrated manner.
  • the storage unit 22 may also be mounted on the traveling unit 5 or the main body unit 3 of the ceiling guided vehicle 10 or may be installed on the ground side together with the controller 20 on the ground side.
  • FIG. 3 is a flowchart showing an example of the operation of the ceiling guided vehicle system 100.
  • the ceiling transport vehicle 10 travels toward the transfer position such as the load port 31 or the buffer unit 32 and the article 2 is transferred from the ceiling transport vehicle 10 to the transfer position will be described.
  • the controller 20 first instructs the transfer position to the ceiling transport vehicle 10 (step S01).
  • step S01 for example, the controller 20 extracts information on the transfer position that is the transport destination of the article 2 from the information on the transfer position stored in the storage unit 22.
  • the controller 20 controls the operation of the traveling unit 5 based on the extracted information, and causes the ceiling transport vehicle 10 to travel to the transfer position.
  • the information regarding the transfer position may be instructed from, for example, a host controller connected to the controller 20.
  • the controller 20 determines whether or not the transfer position is below and on the side of the track 6 (step S02). For example, the controller 20 determines step S02 from the transfer position information extracted from the storage unit 22. When the transfer position is below and to the side of the track 6 (YES in step S20), the deriving unit 21 derives a position at which the raising / lowering driving unit 14 starts the protruding operation by the laterally extending mechanism 11 (step S03).
  • step S03 the derivation unit 21 determines the time required from the start of the protrusion operation to the completion of the protrusion operation based on, for example, the length by which the elevating drive unit 14 protrudes and the protruding speed of the elevating drive unit 14 by the laterally extending mechanism 11. calculate. Subsequently, the derivation unit 21 calculates the travel distance traveled by the travel unit 5 while the required time elapses, for example, based on the calculated required time and the travel speed of the travel unit 5. The deriving unit 21 starts a protruding operation start position P1 (described later) for starting the protruding operation of the elevating drive unit 14 based on the calculated travel distance and a stop position P3 (see FIG. 4 described later) corresponding to the transfer position. (See FIG. 4).
  • the controller 20 determines whether there is an obstacle in the traveling direction of the ceiling transport vehicle 10 between, for example, the calculated protruding operation start position P1 and the transfer position (step S04).
  • the controller 20 determines that there is no obstacle (NO in step S04)
  • the controller 20 starts the protruding operation of the elevating drive unit 14 from the protruding operation start position P1 during the traveling of the traveling unit 5 (step S05).
  • FIG. 4 is a diagram illustrating an example of the operation in step S05.
  • the controller 20 performs the projecting operation while maintaining the traveling of the traveling unit 5 when the overhead traveling vehicle 10 arrives at the projecting operation start position P1 derived by the deriving unit 21 or before reaching the projecting operation start position P1.
  • An instruction to start the protruding operation of the lifting / lowering drive unit 14 by the lateral projection mechanism 11 is issued from the start position P1.
  • the ceiling guided vehicle 10 performs the protruding operation of the elevating drive unit 14 while traveling in the traveling direction at the stage when it reaches the protruding operation start position P1.
  • the ceiling transport vehicle 10 is in the middle of projecting the lifting drive unit 14 toward the projecting position 14P while traveling. It becomes the state of. Thereafter, when the ceiling transport vehicle 10 reaches the stop position P3, the controller 20 stops the operation of the traveling unit 5 to stop the ceiling transport vehicle 10 at the stop position P3. Further, at the timing when the ceiling transport vehicle 10 stops at the stop position P3, the elevating drive unit 14 has reached the protruding position 14P, and the protruding operation has been completed.
  • step S02 when the transfer position is not below and to the side of the track 6 (NO in step S02), the controller 20 does not operate the horizontal mechanism 11 while the overhead traveling vehicle 10 is traveling (step S02). S06).
  • the controller 20 when the transfer position is installed below the track 6, the article 2 can be transferred without moving the elevating drive unit 14 or the like sideways.
  • step S04 when it is determined in step S04 that there is an obstacle in the traveling direction (YES in step S04), the controller 20 does not operate the laterally extending mechanism 11 while the overhead traveling vehicle 10 is traveling (step S06).
  • the controller 20 causes the ceiling transport vehicle 10 to travel without operating the lateral mechanism 11 while the ceiling transport vehicle 10 is traveling.
  • FIG. 5 is a diagram illustrating an example of the operation in step S06.
  • step S04 when the controller 20 determines that there is an obstacle such as the buffer unit 32, the frame 33, the hanging bracket 34, or the article 2 on the buffer unit 32, the ceiling transport vehicle 10 reaches the protruding operation start position P1.
  • an instruction not to perform the protruding operation is given to the ceiling transport vehicle 10.
  • the instruction not to perform the protruding operation may be instructed by the controller 20 or may be realized by not instructing the protruding operation by the controller 20.
  • the overhead traveling vehicle 10 passes the protruding operation start position P1 without performing the protruding operation in a state where the elevating drive unit 14 is disposed at the storage position 14R. After that, the controller 20 stops the overhead conveyance vehicle 10 at the transfer position at the stop position P3, and then causes the elevating drive unit 14 to protrude to the protrusion position 14P by the laterally extending mechanism 11.
  • the controller 20 drives the elevating drive unit 14 to lower the article holding unit 13 (step S07).
  • the controller 20 since the elevating drive unit 14 has reached the protruding position 14P when the ceiling transport vehicle 10 stops at the stop position P3, the controller 20 immediately after the ceiling transport vehicle 10 stops at the stop position P3, The elevating drive unit 14 is driven to lower the article holding unit 13.
  • the horizontal delivery mechanism 11 is driven after the overhead conveyance vehicle 10 stops at the stop position P3, and the elevating drive unit 14 is driven after the elevating drive unit 14 reaches the protruding position 14P to drive the article holding unit. 13 is lowered.
  • the controller 20 stops the driving of the elevating drive unit 14 when the article 2 is lowered to the transfer position (load port 31 or the like), and releases the gripping of the article 2 by the article holding unit 13, thereby transferring the article 2. It is mounted on the mounting position (load port 31 in FIG. 4) (step S08). Thus, the transfer of the article 2 from the ceiling transport vehicle 10 to the transfer position is completed.
  • the controller 20 drives the lifting drive unit 14 to lower the article holding unit 13 to the height of the flange 2g of the article 2 to move the article holding unit 13 down. It is possible to receive the article 2 by driving and gripping the flange 2g.
  • the controller 20 can similarly apply the drive control of the lateral feed mechanism 11 as shown in FIGS. 3 to 5 described above when the overhead conveyance vehicle 10 receives the article 2 at the transfer position.
  • the protruding operation is performed while the overhead traveling vehicle 10 is traveling, and the protruding operation is completed or almost completed when the overhead traveling vehicle 10 stops at the stop position P3. .
  • the traveling of the ceiling conveyance vehicle 10 and the protruding operation of the elevating drive unit 14 can be overlapped, the transfer of the article 2 can be performed as compared with the case where the protruding operation is performed after the ceiling conveying vehicle 10 stops. The time required for loading can be shortened.
  • the raising / lowering drive unit 14 is not projected until the ceiling transport vehicle 10 stops at the stop position P3. For this reason, the ceiling conveyance vehicle 10 passes the side of the obstacle in a state where the elevating drive unit 14 is disposed at the storage position 14R.
  • the elevating drive unit 14 By arranging the elevating drive unit 14 at the storage position 14R, it is possible to avoid the elevating drive unit 14 and the like from interfering with an obstacle.
  • FIG. 6 is a flowchart illustrating another example of the operation of the ceiling guided vehicle system 100.
  • the operation after YES is determined in step S ⁇ b> 04 is different from the flowchart shown in FIG. 3.
  • FIG. 7 shows an example of the operation in FIG.
  • the difference from the operation example in FIG. 3 will be mainly described.
  • step S11 when the controller 20 determines in step S04 that there is an obstacle in the traveling direction (YES in step S04), the deriving unit 21 derives a position exceeding the obstacle as a protruding operation start position ( Step S11).
  • step S11 the derivation unit 21 is between the protrusion operation start position P1 and the stop position P3, as shown in FIG. A position P4 that exceeds the obstacle in the traveling direction is derived as a protruding operation start position.
  • the overhead traveling vehicle 10 passes the side of the obstacle with the lifting drive unit 14 stored in the storage position 14R.
  • the controller 20 starts the protrusion operation of the elevating drive unit 14 while the traveling unit 5 is traveling (step S12). Therefore, as shown in FIG. 7, in the traveling position P5 between the projecting operation start position P4 and the stop position P3, the ceiling drive vehicle 10 projects the lifting drive unit 14 toward the projecting position 14P while traveling. It becomes.
  • the controller 20 When performing the protrusion operation in step S12, the distance between the protrusion operation start position P4 and the stop position P3 is shorter than the distance between the protrusion operation start position P1 and the stop position P3 obtained first. Therefore, before the raising / lowering drive part 14 arrives at the protrusion position 14P, the overhead conveyance vehicle 10 arrives at the stop position P3. In this case, after stopping the ceiling transport vehicle 10 at the stop position P3, the controller 20 continues the protrusion operation until the elevating drive unit 14 reaches the protrusion position 14P (step S13). After the elevating drive unit 14 reaches the protruding position 14P, the controller 20 drives the elevating drive unit 14 to lower the article holding unit 13 (step S14). After step S14, the article 2 is transferred to the transfer position or the article 2 is received, as in step S08 shown in FIG.
  • the raising / lowering driving unit 14 does not project, so that the raising / lowering driving unit 14 interferes with the obstacle. Can be avoided. Further, since the traveling of the ceiling transport vehicle 10 and the protruding operation of the lifting drive unit 14 can be overlapped at a position where the ceiling transport vehicle 10 exceeds the obstacle, the protruding operation is performed after the ceiling transport vehicle 10 stops. Compared with the case where it is performed, the time required to transfer the article 2 can be shortened.
  • FIG. 8 is a flowchart showing another example of the operation of the ceiling guided vehicle system 100.
  • the operation of resuming traveling after the overhead conveyance vehicle 10 holds the article 2 placed at the transfer position such as the load port 31 or the buffer unit 32 by the article holding unit 13, or the overhead conveyance vehicle 10
  • the operation of resuming traveling after transferring the article 2 to the transfer position will be described.
  • the controller 20 drives the elevating drive unit 14 to raise the article holding unit 13 (step S21).
  • the controller 20 has received the information regarding the next moving destination (transfer destination) of the ceiling conveyance vehicle 10 before or after performing step S21.
  • the controller 20 determines whether there is an obstacle in the traveling direction (step S22).
  • the controller 20 may determine whether to determine step S22 when the article holding unit 13 starts to rise, before the raising start, or after the raising start. Therefore, step S21 and step S22 may be simultaneous, or step S22 may be ahead of step S21.
  • the controller 20 calculates the distance traveled by the traveling unit 5 during the storage time until the laterally extending mechanism 11 returns from the protruding position 14P to the storage position 14R, and whether or not there is an obstacle at this travel distance. Judgment is made based on the coordinates of obstacles stored in the storage unit 22.
  • the deriving unit 21 derives the timing for starting the storing operation for storing the elevating drive unit 14 by the laterally extending mechanism 11 (step). S23).
  • step S23 the deriving unit 21 derives the timing so as to start the retracting operation of the elevating drive unit 14 when the traveling unit 5 starts traveling, for example.
  • the controller 20 starts the traveling of the traveling unit 5 and starts the storing operation of the elevating drive unit 14 at the timing derived by the deriving unit 21 (step S24).
  • step S24 may be executed after the raising of the article holding unit 13 by the elevating drive unit 14 is completed, or may be executed while the article holding unit 13 is being raised.
  • FIG. 9 is a diagram illustrating an example of the operation in step S24.
  • the controller 20 instructs the storage operation to start at the timing derived by the deriving unit 21 in step S ⁇ b> 23 (when the traveling unit 5 starts traveling in FIG. 9).
  • the retracting operation of the elevating drive unit 14 is started simultaneously or substantially simultaneously. Therefore, as shown in FIG. 9, at the position P ⁇ b> 6 that has advanced from the stop position P ⁇ b> 3 in the traveling direction, the elevator unit 14 is retracted by the lateral drive mechanism 11 while traveling by the traveling unit 5.
  • the elevating drive unit 14 reaches the storage position 14R, and the storing operation is completed (step S25).
  • the controller 20 causes the overhead conveyance vehicle 10 to travel toward the next stop position, for example.
  • step S26 when it is determined in step S22 that there is an obstacle in the traveling direction (YES in step S22), the controller 20 starts the storing operation while the ceiling transport vehicle 10 is stopped (step S26).
  • FIG. 10 is a diagram illustrating an example of the operation in step S26.
  • the controller 20 moves the elevating drive unit 14 from the protruding position 14P to the storage position 14R by the side feed mechanism 11 in a state where the ceiling transport vehicle 10 is stopped at the stop position P3.
  • the controller 20 causes the traveling unit 5 to start the traveling operation (step S27).
  • the ceiling transport vehicle 10 starts traveling in a state where the elevating drive unit 14 is disposed at the storage position 14R.
  • the storage operation is performed when the ceiling transport vehicle 10 starts to travel, and the storage operation is completed while the ceiling transport vehicle 10 is traveling. Since the traveling of the ceiling transport vehicle 10 and the retracting operation of the elevating drive unit 14 can be overlapped as in the example illustrated in FIG. 9, the traveling is performed after the retracting operation is performed with the ceiling transport vehicle 10 stopped. Compared with the case of starting, the traveling start time of the ceiling guided vehicle 10 can be advanced, and the time required for transferring the article 2 can be shortened.
  • the ceiling transport vehicle 10 when there is an obstacle in the traveling direction of the ceiling transport vehicle 10, the ceiling transport vehicle 10 starts to travel after the storage operation is completed. Passes the side of the obstacle in the state of being placed at the storage position 14R.
  • the elevating drive unit 14 By arranging the elevating drive unit 14 at the storage position 14R, it is possible to avoid the elevating drive unit 14 from interfering with an obstacle.
  • step S22 when it is determined in step S22 that there is an obstacle in the traveling direction, the controller 20 completes the storing operation while the ceiling transport vehicle 10 is stopped.
  • the operation is not limited to this example.
  • the derivation unit 21 sets a timing for starting the storing operation of storing the elevating drive unit 14 by the lateral output mechanism 11 so as not to interfere with the obstacle. It may be derived.
  • FIG. 11 is a diagram illustrating another operation of the ceiling transport vehicle system 100.
  • the derivation unit 21 calculates the distance between the stop position P3 and the position P9 that reaches the obstacle, and calculates the time (traveling time) required for the overhead traveling vehicle 10 to travel this distance.
  • the derivation unit 21 starts the storage operation based on, for example, the distance from the protruding position 14P to the storage position 14R when the lifting drive unit 14 is stored and the storage speed of the lifting drive unit 14 by the lateral ejection mechanism 11. To the time required for the storage operation to complete (storage time).
  • the deriving unit 21 compares the obtained storage time with the traveling time, and when the storage time is shorter, the deriving unit 21 performs the storing operation of the elevating drive unit 14 when the overhead traveling vehicle 10 starts traveling. Further, for example, when the storage time is longer, the deriving unit 21 obtains a time (subtraction time) obtained by subtracting the travel time from the storage time, and subtracts the time from the timing T0 at which the storage operation of the lateral take-out mechanism 11 is started. The timing T1 at which elapses is derived.
  • the controller 20 starts the storage operation in a state in which the overhead conveyance vehicle 10 is stopped at the stop position P3, and instructs the start of traveling at the timing T1 when the subtraction time described above has elapsed from the timing T0 at the start of the storage operation.
  • the overhead traveling vehicle 10 starts the storing operation of the elevating drive unit 14 by the laterally extending mechanism 11 while stopping at the stop position P3, and the traveling unit 5 travels while continuing the storing operation at the timing T1.
  • the retracting operation of the elevating drive unit 14 by the lateral drive mechanism 11 is performed at the travel position P8 that is an intermediate position between the stop position P3 and the position P9.
  • the retracting operation of the elevating drive unit 14 is completed. Therefore, even when there is an obstacle in the traveling direction, the traveling of the ceiling transport vehicle 10 and the retracting operation of the elevating drive unit 14 can be partially overlapped.
  • the traveling start time of the ceiling transport vehicle 10 can be advanced while avoiding the lifting drive unit 14 from interfering with an obstacle, and the time required to transfer the article 2 can be shortened.
  • FIG. 12 is a diagram illustrating another operation of the ceiling transport vehicle system 100.
  • the buffer unit (storage device) 32 shown in FIG. 12 a plurality of articles 2 can be placed side by side between the + X side and ⁇ X side hanging brackets 34 along the traveling direction of the ceiling transport vehicle 10.
  • the ceiling transport vehicle 10 stops at the stop position P10 and transfers the article 2 to the front side ( ⁇ X side) of the buffer unit 32 in the traveling direction of the ceiling transport vehicle 10.
  • the controller 20 determines whether the article 2 is placed on the front side (+ X side) of the traveling direction of the ceiling transport vehicle 10 of the buffer unit 32, and when the article 2 is placed, Assuming that the article 2 is an obstacle, similarly to FIG. 10, assuming that there is an obstacle (article 2) in the traveling direction of the ceiling transport vehicle 10, the traveling of the ceiling transport vehicle 10 is started after the storage operation is completed.
  • the derivation unit 21 reaches the stop position P10 and the hanging bracket 34 that is an obstacle.
  • the distance to P11 is calculated, and the time (traveling time) required for the overhead traveling vehicle 10 to travel this distance is calculated.
  • the derivation unit 21 calculates the time (storage time) required from the start of the storage operation of the elevating drive unit 14 to the completion of the storage operation.
  • the derivation unit 21 obtains a time (subtraction time) obtained by subtracting the traveling time from the storage time, and derives a timing T2 at which the subtraction time has elapsed from the timing T0 at which the lateral movement mechanism 11 starts the storage operation.
  • the controller 20 starts the storage operation in a state where the overhead conveyance vehicle 10 is stopped at the stop position P10, and instructs the start of traveling at the timing T2 when the above-described subtraction time has elapsed from the timing T0 at the start of the storage operation.
  • the overhead traveling vehicle 10 starts the retracting operation of the elevating drive unit 14 by the laterally extending mechanism 11 while stopping at the stop position P3, and the traveling unit 5 travels while continuing the storing operation at the timing T2.
  • the retracting operation of the elevating drive unit 14 by the lateral take-out mechanism 11 is performed in the intermediate position between the stop position P10 and the position P11.
  • the retracting operation of the elevating drive unit 14 is completed. Therefore, even after the article 2 is transferred to the buffer unit 32, the traveling of the ceiling transport vehicle 10 and the storing operation of the elevating drive unit 14 can be partially overlapped.
  • the traveling start time of the ceiling transport vehicle 10 can be shortened while avoiding the lifting drive unit 14 from interfering with the hanging bracket 34, and the time required for transferring the article 2 can be shortened.
  • 12 shows a form in which two articles 2 are placed in the buffer unit 32, but the same applies to a form in which three or more articles 2 are placed side by side as the buffer part 32. .
  • FIG. 13 is a diagram showing another example of the ceiling guided vehicle system 200.
  • members similar to those in the above-described embodiment are denoted by the same reference numerals, and description thereof is omitted or simplified.
  • the tracks 6 and 6A are provided in two upper and lower stages, and are arranged in two rows (in the Y direction).
  • the overhead transport vehicle 10 can travel on the tracks 6 and 6A.
  • the upper two rows of tracks 6 and 6A are attached to the ceiling 18 respectively.
  • the lower track 6 ⁇ / b> A is attached to a frame 132 that is suspended from the ceiling 18 by a suspension fitting 134.
  • the frame 132 is a structure disposed below the track 6.
  • the buffer unit 32 is provided by suspending a frame 33 that is a structure from a frame 132 via a hanging metal fitting 34.
  • the frame 33 is suspended from the ceiling by the suspension fitting 134, the frame 132, and the suspension fitting 34.
  • the overhead transport vehicle system 200 has a controller 120 that controls each part in an integrated manner.
  • the controller 120 may be installed on the ground or mounted on each ceiling transport vehicle 10.
  • the controller 120 determines whether or not the raising / lowering drive unit 14 is allowed to project or retract during the traveling of the overhead conveyance vehicle 10.
  • the controller 120 acquires information related to the obstacle as in the case of the controller 20 described above.
  • the ceiling transport vehicle 10 traveling on the upper track 6 is suspended as an obstacle. 134 exists.
  • the ceiling transport vehicle 10 traveling on the lower and left ( ⁇ Y side) track 6A is the same as the ceiling transport system 100 in that the suspension bracket 34 of the buffer 32 becomes an obstacle as an obstacle.
  • the controller 120 can determine whether the suspension fitting 34, the article 2 on the buffer 32, and the suspension fitting 134 are obstacles. Therefore, for the ceiling transport vehicle 10 traveling on the upper two rows of tracks 6, at the position where the suspension metal fitting 134 is provided, the controller 120, for example, protrudes or retracts the lifting drive unit 14 while the ceiling transport vehicle 10 travels. Is controlled so as not to overlap.
  • the controller 120 has no obstacles such as the hanging brackets 34, 134. It is possible to overlap the protruding or retracting operations.
  • the controller 120 for the ceiling transport vehicle 10 that travels on the lower and left ( ⁇ Y side) track 6A, at the position where the suspension bracket 34 is provided, the controller 120, for example, moves the elevating drive unit 14 while the ceiling transport vehicle 10 is traveling. Control so that the protruding or retracting operations do not overlap. In the configuration as shown in FIG. 13, for the overhead transport vehicle 10 traveling on the upper track 6, the hanging bracket 134 becomes an obstacle, and thus the overlapping control described above may be uniformly executed.
  • the controller 20 determines whether there is an obstacle (for example, step S04 in FIG. 3 or step S22 in FIG. 8).
  • the above overlapping control may be executed uniformly without performing the above.
  • the movement of the elevating drive unit 14 by the laterally extending mechanism 11 is overlapped with the travel of the traveling unit 5. be able to.
  • the traveling unit 5 is started to travel after the lifting drive unit 14 is stored in the main body unit 3. The time required for transferring the article 2 can be shortened.

Abstract

[Problem] To provide an overhead transport vehicle configured so as to reduce time required for transferring an article to a position to which the article is to be transferred, the position being located below a track on a side thereof; and a method for controlling the overhead transport vehicle. [Solution] This overhead transport vehicle 10 is provided with: a traveling section 5 traveling on a track 6; a body section 3 provided to the underside of the traveling section 5; an article holding section 13 for holding an article while suspending the article; a vertically driving section 14 for vertically moving the article holding section 13; a traverse mechanism 11 for moving the vertically driving section 14 between a stowed position 14R and a protruding position 14P; and a controller 20 for either actuating the traverse mechanism 11, causing the vertically driving section 14 to start moving toward the protruding position 14P before the traveling section 5 stops relative to a position (31, 32) to which the article is to be transferred, the position (31, 32) being located offset laterally from a position below the track 6, or actuating the traverse mechanism 11, causing the traveling section 5 stopped corresponding to the position (31, 32) to start traveling before the vertically driving section 14 returns to the stowed position 14R.

Description

天井搬送車、及び天井搬送車の制御方法Ceiling transport vehicle and control method of ceiling transport vehicle
 本発明は、天井搬送車、及び天井搬送車の制御方法に関する。 The present invention relates to a ceiling transport vehicle and a method for controlling the ceiling transport vehicle.
 半導体製造工場等の製造工場では、例えば、半導体ウエハの搬送容器(FOUP)またはレチクル搬送用のレチクルPodなどの物品を搬送するため、天井または天井近傍に敷設された軌道(レール)に沿って走行する天井搬送車が用いられている。天井搬送車は、軌道を走行する走行部と、走行部の下側に本体部とを備えている。本体部は、物品を保持するグリッパなどの物品保持部を昇降させる昇降駆動部と、昇降駆動部を本体部に対して走行方向の側方に突出させる横出し機構を備える。 In a manufacturing factory such as a semiconductor manufacturing factory, for example, a semiconductor wafer transport container (FOUP) or a reticle Pod for transporting a reticle is transported along a track laid on or near the ceiling. A ceiling transport vehicle is used. The overhead conveyance vehicle includes a traveling unit that travels on a track, and a main body unit below the traveling unit. The main body includes an elevating drive unit that elevates and lowers an article holding unit such as a gripper that holds an article, and a lateral mechanism that projects the elevating drive unit laterally with respect to the main body.
 上記の天井搬送車による物品の移載先は、処理装置の移載位置(ロードポート)などであり、軌道の下方かつ側方にずれて配置されている場合がある。天井搬送車は、移載位置に対応して停止した後、横出し機構によって昇降駆動部を側方に突出させ、続いて昇降駆動部により物品保持部を昇降させることにより移載位置に対して物品の移載を行っている。このような天井搬送車においては、物品の移載に要する時間を短縮することが求められている。特許文献1には、物品であるパレットを棚に収容するスタッカクレーンが記載されている。このスタッカクレーンは、昇降台に伸縮可能なフォークを有しており、走行中に昇降台を昇降させながらフォークを伸縮させるといったオーバーラップした動作を行うことで、パレットの移載時間を短縮している。 The transfer destination of the article by the above-described overhead transporting vehicle is a transfer position (load port) of the processing apparatus, and may be arranged to be shifted below the track and to the side. After the ceiling transport vehicle stops corresponding to the transfer position, the lifting drive unit protrudes to the side by the lateral mechanism, and then the article holding unit is lifted by the lifting drive unit with respect to the transfer position. The goods are being transferred. In such a ceiling transport vehicle, it is required to shorten the time required to transfer the article. Patent Document 1 describes a stacker crane that houses a pallet as an article on a shelf. This stacker crane has a fork that can be expanded and contracted on the lifting platform, and by performing overlapping operations such as extending and lowering the lifting platform while traveling, the pallet transfer time can be shortened. Yes.
特開2002-114320号公報JP 2002-114320 A
 しかしながら、特許文献1のスタッカクレーンは、昇降台が昇降するだけで昇降台を駆動するための昇降駆動部が軌道の側方に突出しない。しかも、昇降台が物品を吊り下げた状態で保持していない。このスタッカクレーンに対して、天井搬送車は、物品を吊り下げた状態で保持しつつ天井近傍を走行し、軌道の下方かつ側方に配置された移載位置に対して昇降駆動部を横出しして物品を昇降させている。従って、天井搬送車においては、物品の移載に要する時間を短縮するため、スタッカクレーンと異なるオーバーラップした動作が必要となる。 However, in the stacker crane of Patent Document 1, the lifting drive unit for driving the lifting platform does not protrude to the side of the track only by lifting the lifting platform. Moreover, the lifting platform does not hold the article in a suspended state. With respect to this stacker crane, the overhead transport vehicle travels in the vicinity of the ceiling while holding the article in a suspended state, and the lifting drive unit is extended to the transfer position disposed below and on the side of the track. Then, the article is moved up and down. Therefore, in the overhead conveyance vehicle, an overlapping operation different from that of the stacker crane is required in order to shorten the time required for transferring the article.
 本発明は、天井または天井近傍の軌道を走行する天井搬送車において、軌道の下方かつ側方に配置された移載位置に対して物品の移載に要する時間を短縮することが可能な天井搬送車、及び天井搬送車の制御方法を提供することを目的とする。 The present invention relates to a ceiling transport vehicle that travels on a ceiling or a track near the ceiling, and can reduce the time required to transfer an article to a transfer position disposed below and on the side of the track. It aims at providing the control method of a car and a ceiling conveyance vehicle.
 本発明に係る天井搬送車は、天井または天井近傍に敷設された軌道を走行する走行部と、走行部の下側に設けられる本体部と、物品を吊り下げた状態で保持する物品保持部と、物品保持部を昇降させる昇降駆動部と、昇降駆動部を、本体部内に格納する格納位置と、本体部から軌道の側方に突出する突出位置との間で移動させる横出し機構と、軌道の下方から側方にずれて配置された物品の移載位置に対して走行部が停止する前に、横出し機構により突出位置に向けて昇降駆動部の移動を開始させ、または、横出し機構により昇降駆動部が格納位置に戻る前に、移載位置に対応して停止している走行部の走行を開始させるコントローラと、を備える。 A ceiling transport vehicle according to the present invention includes a traveling unit that travels on a ceiling or a track laid near the ceiling, a main body that is provided below the traveling unit, and an article holding unit that holds an article in a suspended state. An elevating drive unit that elevates and lowers the article holding unit, a traverse mechanism that moves the elevating drive unit between a storage position in which the elevating drive unit is stored in the main body unit, and a protruding position that protrudes laterally from the main body unit, Before the traveling unit stops with respect to the transfer position of the article that is shifted from the lower side to the lateral side, the movement of the elevating drive unit is started toward the projecting position by the lateral ejection mechanism, or the lateral ejection mechanism And a controller for starting the traveling of the traveling unit stopped corresponding to the transfer position before the elevating drive unit returns to the storage position.
 また、コントローラは、走行部が移載位置に対応して停止した時点で昇降駆動部が突出位置に配置されているように、走行部の走行中に横出し機構の駆動開始を指示してもよい。また、コントローラは、走行部が移載位置に対応した位置から走行を開始する時点で、突出位置の昇降駆動部を格納位置に向けて横出し機構の駆動開始を指示してもよい。また、コントローラは、走行部の走行中に、突出した状態の昇降駆動部、物品保持部、及び物品保持部に保持された物品の少なくとも1つが接触可能な障害物が存在する場合、走行部の走行中において横出し機構の駆動を実行しなくてもよい。 Further, the controller may instruct the start of driving of the lateral movement mechanism during the traveling of the traveling unit so that the lifting / lowering driving unit is disposed at the protruding position when the traveling unit stops corresponding to the transfer position. Good. In addition, the controller may instruct the start of driving of the lateral mechanism toward the retracted position when the traveling unit starts traveling from a position corresponding to the transfer position. In addition, when there is an obstacle that can contact at least one of the protruding lift drive unit, the article holding unit, and the article held by the article holding unit while the running unit is running, It is not necessary to drive the lateral take-out mechanism during traveling.
 また、コントローラは、走行部の走行中に、突出した状態の昇降駆動部、物品保持部、及び物品保持部に保持された物品の少なくとも1つが接触可能な障害物が存在する場合、障害物との接触がない所定範囲において横出し機構の駆動を指示してもよい。また、コントローラは、走行部が障害物を超えた位置から横出し機構の駆動開始を指示してもよい。また、コントローラは、走行部の走行中に、突出した状態の昇降駆動部、物品保持部、及び物品保持部に保持された物品の少なくとも1つが接触可能な障害物が存在する場合、移載位置に対応した位置に停止している走行部が障害物に達するまでの時間から、突出位置にある昇降駆動部が格納位置まで移動する時間を減算した減算時間を求め、走行部の停止中に突出位置の昇降駆動部を格納位置に向けて横出し機構の駆動を開始させ、横出し機構の駆動開始から減算時間が経過したタイミングで走行部の走行開始を指示してもよい。 In addition, the controller may be configured such that when there is an obstacle that can contact at least one of the projecting lift drive unit, the article holding unit, and the article held by the article holding unit during traveling of the traveling unit, The drive of the lateral mechanism may be instructed within a predetermined range where there is no contact. Further, the controller may instruct the start of driving of the lateral mechanism from the position where the traveling unit has exceeded the obstacle. In addition, the controller moves the transfer position when there is an obstacle that can contact at least one of the lift drive unit, the article holding unit, and the article held by the article holding unit while the running unit is running. The subtraction time is calculated by subtracting the time required for the elevating drive unit at the protruding position to move to the retracted position from the time until the traveling unit stopped at the position corresponding to The driving of the lateral movement mechanism may be started with the position raising / lowering drive section directed toward the storage position, and the start of traveling of the traveling section may be instructed at the timing when the subtraction time has elapsed from the start of driving of the lateral ejection mechanism.
 また、障害物は、軌道の下方に配置される構造物を天井から吊り下げるための吊り下げ金具であってもよい。また、構造物は、物品を載置可能な保管装置であり、障害物は、保管装置に載置された物品であってもよい。また、構造物は、物品を載置可能な保管装置であり、障害物は、保管装置に載置された物品であってもよい。また、コントローラは、走行部の走行中に横出し機構の突出動作開始する位置、または、横出し機構の格納動作中に走行部の走行を開始するタイミングに関する情報を記憶する記憶部を有してもよい。 Also, the obstacle may be a hanging metal fitting for hanging a structure arranged below the track from the ceiling. Further, the structure may be a storage device on which an article can be placed, and the obstacle may be an article placed on the storage device. Further, the structure may be a storage device on which an article can be placed, and the obstacle may be an article placed on the storage device. In addition, the controller has a storage unit that stores information regarding a position at which the protruding operation of the lateral movement mechanism starts during the traveling of the traveling unit or information about a timing at which the traveling unit starts traveling during the storage operation of the lateral mechanism. Also good.
 本発明に係る天井搬送車の制御方法は、天井または天井近傍に敷設された軌道を走行する走行部と、走行部の下側に設けられる本体部と、物品を吊り下げた状態で保持する物品保持部と、物品保持部を昇降させる昇降駆動部と、昇降駆動部を、本体部内に格納する格納位置と、本体部から軌道の側方に突出する突出位置との間で移動させる横出し機構と、を備える天井搬送車の制御方法であって、軌道の下方から側方にずれて配置された物品の移載位置に対して走行部が停止する前に、横出し機構により突出位置に向けて昇降駆動部の移動を開始させること、または、横出し機構により昇降駆動部が格納位置に戻る前に、移載位置に対応して停止している走行部の走行を開始させること、を含む。 The method for controlling a ceiling guided vehicle according to the present invention includes a traveling unit that travels on a ceiling or a track laid near the ceiling, a main body provided below the traveling unit, and an article that holds the article in a suspended state. A holding unit, an elevating drive unit that elevates and lowers the article holding unit, and a lateral movement mechanism that moves the elevating drive unit between a storage position for storing the elevating drive unit in the main body unit and a protruding position protruding from the main body side of the track. A control method for the overhead transport vehicle comprising: a laterally extending mechanism toward the projecting position before the traveling unit stops with respect to the transfer position of the article that is shifted from the lower side of the track to the side. Starting the movement of the elevating drive unit, or starting the running of the traveling unit stopped corresponding to the transfer position before the elevating drive unit returns to the storage position by the laterally extending mechanism. .
 本発明に係る天井搬送車又は天井搬送車の制御方法では、横出し機構による昇降駆動部の移動を、走行部の走行とオーバーラップさせることができる。このオーバーラップにより、天井搬送車が停止した後に昇降駆動部の横出しを行う場合、または、昇降駆動部を本体部に格納した後に走行部の走行を開始する場合と比較して、物品の移載に要する時間を短縮できる。 In the overhead conveyance vehicle or the method for controlling the overhead conveyance vehicle according to the present invention, the movement of the lifting drive unit by the laterally extending mechanism can be overlapped with the traveling of the traveling unit. Due to this overlap, it is possible to transfer the article in comparison with the case where the lifting drive unit is laterally moved after the ceiling conveyance vehicle stops or the case where the traveling unit starts running after the lifting drive unit is stored in the main body unit. The time required for loading can be shortened.
 また、コントローラが、走行部が移載位置に対応して停止した時点で昇降駆動部が突出位置に配置されているように、走行部の走行中に横出し機構の駆動開始を指示する構成では、走行部の停止を待つことなく横だし機構の駆動を開始させ、走行部が移載位置に対応して停止した段階で、突出位置への昇降駆動部の移動が完了またはほぼ完了するため、物品の移載に要する時間を短縮できる。また、コントローラにより、走行部が移載位置に対応した位置から走行を開始する時点で、突出位置の昇降駆動部を格納位置に向けて横出し機構の駆動開始を指示する構成では、走行部の走行開始と同時またはほぼ同時に、格納位置への昇降駆動部の移動を開始するので、昇降駆動部の本体部への格納を待つことなく走行部を走行させることにより、物品の移載に要する時間を短縮できる。 Further, in the configuration in which the controller instructs the start of driving of the lateral movement mechanism during the traveling of the traveling unit so that the lifting drive unit is disposed at the protruding position when the traveling unit stops corresponding to the transfer position. The driving of the horizontal mechanism is started without waiting for the stop of the traveling unit, and when the traveling unit stops corresponding to the transfer position, the movement of the elevating drive unit to the protruding position is completed or almost completed, The time required for transferring the article can be shortened. In the configuration in which the controller instructs the start of driving of the lateral drive mechanism by moving the lifting drive unit at the protruding position toward the storage position when the traveling unit starts traveling from the position corresponding to the transfer position, Since the movement of the elevating drive unit to the storage position starts at the same time or almost simultaneously with the start of traveling, the time required to transfer the article by running the traveling unit without waiting for the elevating drive unit to be stored in the main body unit Can be shortened.
 また、コントローラが、走行部の走行中に、上記した障害物が存在する場合、走行部の走行中において横出し機構の駆動を実行しない構成では、昇降駆動部あるいは物品等が障害物に干渉することを防止できる。また、コントローラが、走行部の走行中に、上記した障害物が存在する場合、障害物との接触がない所定範囲において横出し機構の駆動を指示する構成では、昇降駆動部あるいは物品等が障害物に干渉することを回避しつつ、物品の移載に要する時間を短縮できる。また、コントローラが、走行部が障害物を超えた位置から横出し機構の駆動開始を指示する構成では、効率よく横出し機構の駆動を開始するので、物品の移載に要する時間を削減できる。また、コントローラが、走行部の走行中に、上記した障害物が存在する場合、移載位置に対応した位置に停止している走行部が障害物に達するまでの時間から、突出位置にある昇降駆動部が格納位置まで移動する時間を減算した減算時間を求め、走行部の停止中に突出位置の昇降駆動部を格納位置に向けて横出し機構の駆動を開始させ、横出し機構の駆動開始から減算時間が経過したタイミングで走行部の走行開始を指示する構成では、昇降駆動部が障害物に接触しないタイミングで走行部の走行を開始させ、昇降駆動部が格納位置まで戻ることを待つことなく走行部を走行させるので、物品の移載に要する時間を短縮できる。 Further, when the controller has an obstacle as described above during traveling of the traveling unit, in the configuration in which the driving of the lateral movement mechanism is not performed during traveling of the traveling unit, the elevating drive unit or the article interferes with the obstacle. Can be prevented. In addition, when the controller has an obstacle such as that described above while traveling by the traveling unit, in the configuration in which the drive of the lateral movement mechanism is instructed within a predetermined range where there is no contact with the obstacle, the elevating drive unit or the article is obstructed. The time required to transfer the article can be shortened while avoiding interference with an object. Further, in the configuration in which the controller instructs the start of driving of the lateral ejection mechanism from the position where the traveling unit has exceeded the obstacle, the driving of the lateral ejection mechanism is efficiently started, so that the time required for transferring the article can be reduced. In addition, when the controller has an obstacle as described above while the traveling unit is traveling, the controller moves up and down at the protruding position from the time until the traveling unit stopped at the position corresponding to the transfer position reaches the obstacle. The subtraction time obtained by subtracting the time required for the drive unit to move to the storage position is obtained, and the drive of the horizontal drive mechanism is started while the lift drive unit at the protruding position is directed to the storage position while the traveling unit is stopped, and drive of the horizontal drive mechanism is started. In the configuration in which the travel unit starts to travel at the timing when the subtraction time has elapsed, the travel of the travel unit is started at a timing at which the lift drive unit does not come into contact with the obstacle, and waiting for the lift drive unit to return to the storage position. Since the traveling unit is traveled without any problem, the time required for transferring the article can be shortened.
 また、障害物が、天井から吊り下げられた状態で配置されて物品を載置可能な保管装置、または保管装置に載置された物品である例では、昇降駆動部あるいは物品等が保管装置または保管装置に載置された物品に干渉することを抑制できる。また、障害物が、軌道の下方に形成される構造物を天井から吊り下げるための吊り金具である例では、昇降駆動部あるいは物品等が吊り金具に干渉することを抑制できる。また、コントローラが、走行部の走行中に横出し機構の突出動作を開始する位置、または、横出し機構の格納動作中に走行部の走行を開始するタイミングに関する情報を記憶する記憶部を有する構成では、記憶部からの情報に基づいて横出し機構の動作または走行部の走行を行うので、昇降駆動部の突出あるいは走行部の走行開始を容易かつ確実に行うことができる。 Further, in an example in which the obstacle is a storage device that is placed in a state of being suspended from the ceiling and can place an article, or an article that is placed on the storage device, the elevating drive unit or the article is the storage device or Interference with the article placed on the storage device can be suppressed. Further, in the example in which the obstacle is a hanging metal fitting for suspending a structure formed below the track from the ceiling, it is possible to suppress the lifting drive unit or the article from interfering with the hanging metal fitting. In addition, the controller includes a storage unit that stores information regarding a position at which the protruding operation of the lateral movement mechanism starts during the traveling of the traveling unit, or information about a timing at which the traveling unit starts traveling during the storage operation of the lateral ejection mechanism. Then, since the operation of the lateral movement mechanism or the traveling of the traveling unit is performed based on the information from the storage unit, it is possible to easily and reliably perform the protrusion of the elevating drive unit or the start of traveling of the traveling unit.
実施形態に係る天井搬送車システムの一例を示す図である。It is a figure which shows an example of the overhead conveyance vehicle system which concerns on embodiment. 天井搬送車からバッファ部に物品を移載する一例を示す図である。It is a figure which shows an example which transfers articles | goods from a ceiling conveyance vehicle to a buffer part. 天井搬送車システムの動作の一例を示すフローチャートである。It is a flowchart which shows an example of operation | movement of an overhead conveyance vehicle system. 天井搬送車の走行中に横出しを行う一例を示す図である。It is a figure which shows an example which carries out a horizontal extension during driving | running | working of an overhead conveyance vehicle. 天井搬送車の走行中に横出しを行わない一例を示す図である。It is a figure which shows an example which does not perform a horizontal extension during driving | running | working of an overhead conveyance vehicle. 天井搬送車システムの動作の他の例を示すフローチャートである。It is a flowchart which shows the other example of operation | movement of an overhead conveyance vehicle system. 天井搬送車の走行中に横出しを行う他の例を示す図である。It is a figure which shows the other example which carries out a horizontal extension during driving | running | working of an overhead conveyance vehicle. 天井搬送車システムの動作の他の例を示すフローチャートである。It is a flowchart which shows the other example of operation | movement of an overhead conveyance vehicle system. 天井搬送車の走行開始時に横出しの格納を行う一例を示す図である。It is a figure which shows an example which performs horizontal storage at the time of a travel start of an overhead conveyance vehicle. 天井搬送車の走行開始時に横出しの格納を行わない一例を示す図である。It is a figure which shows an example which does not perform horizontal storage at the time of a travel start of an overhead conveyance vehicle. 天井搬送車の走行中に横出しの格納を行う一例を示す図である。It is a figure which shows an example which performs storing of side loading while driving | running | working an overhead conveyance vehicle. 天井搬送車の走行中に横出しの格納を行う他の例を示す図である。It is a figure which shows the other example which performs storing of side loading during driving | running | working of an overhead conveyance vehicle. 他の実施形態に係る天井搬送車システムの一例を示す図である。It is a figure which shows an example of the overhead conveyance vehicle system which concerns on other embodiment.
 以下、本発明の実施形態について図面を参照しながら説明する。ただし、本発明は、以下に説明する実施形態に限定されない。また、図面においては実施形態を説明するため、一部分を大きくまたは強調して記載するなど適宜縮尺を変更して表現している。以下の各図において、XYZ座標系を用いて図中の方向を説明する。このXYZ座標系においては、水平面に平行な平面をXY平面とする。また、XY平面に垂直な方向はZ方向と表記する。X方向、Y方向及びZ方向のそれぞれは、図中の矢印の方向が+方向であり、矢印の方向とは反対の方向が-方向であるとして説明する。また、本実施形態では、天井搬送車10の走行方向をX方向として説明している。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the present invention is not limited to the embodiments described below. Further, in the drawings, in order to describe the embodiment, the scale is appropriately changed and expressed by partially enlarging or emphasizing the description. In the following drawings, directions in the drawings will be described using an XYZ coordinate system. In this XYZ coordinate system, a plane parallel to the horizontal plane is defined as an XY plane. A direction perpendicular to the XY plane is expressed as a Z direction. In each of the X direction, the Y direction, and the Z direction, the direction of the arrow in the figure is the + direction, and the direction opposite to the direction of the arrow is the − direction. In the present embodiment, the traveling direction of the ceiling transport vehicle 10 is described as the X direction.
 図1は、実施形態に係る天井搬送車システム100の一例を示す図である。図2は、天井搬送車10からバッファ部32に、またはバッファ部32から天井搬送車10に物品2を受け渡す状態を示す図である。天井搬送車システム100は、軌道(走行レール)6と、天井搬送車10と、コントローラ20と、を備える。天井搬送車システム100は、例えば、半導体デバイスの製造工場などに設置される。 FIG. 1 is a diagram illustrating an example of a ceiling guided vehicle system 100 according to the embodiment. FIG. 2 is a diagram illustrating a state in which the article 2 is delivered from the ceiling transport vehicle 10 to the buffer unit 32 or from the buffer unit 32 to the ceiling transport vehicle 10. The ceiling transport vehicle system 100 includes a track (running rail) 6, a ceiling transport vehicle 10, and a controller 20. The overhead transport vehicle system 100 is installed, for example, in a semiconductor device manufacturing factory.
 物品2は、例えば、半導体素子の製造に用いられるウエハ、あるいはレチクルなどの物品を収容する。物品2は、例えば、内部をパージ可能なFOUP、SMIF Pod、レチクルPodなどである。図1及び図2には、物品2がFOUPである例を示している。物品2は、本体部2aと、蓋2cと、フランジ2gとを備える。ウエハなどの物品は、本体部2aの内部に収容される。蓋2cは、本体部2aの側面の1つに着脱可能に設けられる。本体部2aは、その底面側に、放射状に形成された複数の位置決め用の溝部2dが形成されている。 The article 2 accommodates an article such as a wafer or a reticle used for manufacturing a semiconductor element, for example. The article 2 is, for example, a FOUP, SMIF Pod, or reticle Pod that can purge the inside. 1 and 2 show an example in which the article 2 is a FOUP. The article 2 includes a main body 2a, a lid 2c, and a flange 2g. Articles such as wafers are accommodated in the main body 2a. The lid 2c is detachably provided on one of the side surfaces of the main body 2a. The main body 2a has a plurality of positioning grooves 2d formed radially on the bottom surface side.
 天井搬送車10は、図1に示すように、走行部5と、本体部3とを備える。走行部5は、不図示の走行駆動部の駆動力によって軌道6に沿って走行する。走行駆動部としては、例えば伝送モータあるいはリニアモータが用いられ、走行部5に搭載されてもよい。軌道6は、例えば、クリーンルーム棟の設備の天井18から吊り金具を介して敷設され、図1ではX方向に延びている。 As shown in FIG. 1, the ceiling transport vehicle 10 includes a traveling unit 5 and a main body unit 3. The travel unit 5 travels along the track 6 by the driving force of a travel drive unit (not shown). As the travel drive unit, for example, a transmission motor or a linear motor is used, and the travel drive unit may be mounted on the travel unit 5. The track 6 is laid, for example, from the ceiling 18 of the equipment of the clean room building via a hanging metal fitting, and extends in the X direction in FIG.
 走行部5は、軌道6に接するように配置された走行輪7を有する。走行輪7は、例えば、エンコーダ(図示せず)などに接続される。このエンコーダは、走行輪7の回転数などを検出し、その検出結果をコントローラ20に出力する。コントローラ20は、エンコーダの検出結果に基づいて不図示の走行駆動部を制御し、天井搬送車10の速度あるいは停止位置の制御を行う。また、天井搬送車10は、図1に示すように、走行部5から下方に延びる支持軸9が取り付けられている。支持軸9の下部には本体部3が取り付けられている。 The traveling unit 5 has traveling wheels 7 arranged so as to be in contact with the track 6. The traveling wheel 7 is connected to, for example, an encoder (not shown). This encoder detects the number of revolutions of the traveling wheel 7 and outputs the detection result to the controller 20. The controller 20 controls a travel drive unit (not shown) based on the detection result of the encoder, and controls the speed or stop position of the ceiling transport vehicle 10. Further, as shown in FIG. 1, the ceiling transport vehicle 10 is attached with a support shaft 9 extending downward from the traveling unit 5. The main body 3 is attached to the lower part of the support shaft 9.
 本体部3は、物品2を保持する物品保持部13と、物品保持部13を上下方向(Z方向、鉛直方向)に昇降させる昇降駆動部14と、昇降駆動部14を側方に移動させる横出し機構11と、を有する。物品保持部13は、物品2のフランジ2gを把持することにより、物品2を吊り下げて保持する。物品保持部13は、例えば、水平方向に移動可能な爪部13aを有するチャックであり、爪部13aを物品2のフランジ2gの下方に進入させ、物品保持部13を上昇させることで、物品2を吊り下げた状態で保持する。物品保持部13は、ワイヤあるいはベルトなどの吊り下げ部材13bと接続されている。 The main body 3 includes an article holding unit 13 that holds the article 2, an elevating drive unit 14 that elevates and lowers the article holding unit 13 in the vertical direction (Z direction, vertical direction), and a lateral that moves the elevating drive unit 14 to the side. And a dispensing mechanism 11. The article holding unit 13 hangs and holds the article 2 by holding the flange 2g of the article 2. The article holding part 13 is, for example, a chuck having a claw part 13a that is movable in the horizontal direction. The article holding part 13 is moved up under the flange 2g of the article 2 and the article holding part 13 is lifted to raise the article 2 Is held in a suspended state. The article holding unit 13 is connected to a suspension member 13b such as a wire or a belt.
 昇降駆動部14は、例えばホイストであり、吊り下げ部材13bを繰り出すことにより物品保持部13を下降させ、また、吊り下げ部材13bを巻き取ることにより物品保持部13を上昇させる。昇降駆動部14は、コントローラ20に制御されて所定の速度で物品保持部13を下降あるいは上昇させる。また、昇降駆動部14は、コントローラ20に制御されて物品保持部13を目標の高さに保持する。 The elevating drive unit 14 is, for example, a hoist, and lowers the article holding unit 13 by feeding the hanging member 13b, and raises the article holding unit 13 by winding the hanging member 13b. The elevating drive unit 14 is controlled by the controller 20 to lower or raise the article holding unit 13 at a predetermined speed. Moreover, the raising / lowering drive part 14 is controlled by the controller 20, and hold | maintains the articles | goods holding part 13 at target height.
 横出し機構11は、例えば、上下方向(Z方向)に重ねて配置された複数の可動板12を有する。可動板12は、不図示のY方向ガイドによってY方向に移動可能である。下側の可動板12には、昇降駆動部14が取り付けられている。横出し機構11は、不図示の電動モータ等のY方向駆動部を有し、このY方向駆動部からの駆動力によって可動板12をスライドさせ、昇降駆動部14を突出位置14Pと格納位置14Rとの間で移動可能である。突出位置14Pは、本体部3から軌道6の側方(Y方向)に昇降駆動部14を突出させた位置である。格納位置Rは、軌道6の下方であって本体部3内に昇降駆動部14を格納した位置である。 The laterally extending mechanism 11 has, for example, a plurality of movable plates 12 arranged so as to overlap in the vertical direction (Z direction). The movable plate 12 is movable in the Y direction by a Y direction guide (not shown). An elevating drive unit 14 is attached to the lower movable plate 12. The laterally extending mechanism 11 has a Y-direction drive unit such as an electric motor (not shown). The movable plate 12 is slid by the driving force from the Y-direction drive unit, and the elevation drive unit 14 is moved to the protruding position 14P and the storage position 14R. It is possible to move between. The protruding position 14 </ b> P is a position where the elevating drive unit 14 is protruded from the main body 3 to the side of the track 6 (Y direction). The storage position R is a position below the track 6 where the elevating drive unit 14 is stored in the main body 3.
 なお、横出し機構11と昇降駆動部14との間に不図示の回動部が設けられてもよい。この回動部は、例えば、回動部材と回動駆動部とを有し、この回転駆動部を駆動することにより、昇降駆動部14を上下方向(Z方向)の軸周り方向に回転可能である。回動部によって昇降駆動部14を回転させることにより、昇降駆動部14に吊り下げられた物品保持部13(物品2)を回転させることが可能であり、物品2の蓋2cの向きを変えることができる。なお、このような回動部の動作は、例えば、コントローラ20によって制御される。また、天井搬送車10において、上記した回動部を備えるか否かは任意であり、回動部を備えなくてもよい。 It should be noted that a rotation unit (not shown) may be provided between the side extending mechanism 11 and the elevating drive unit 14. For example, the rotation unit includes a rotation member and a rotation drive unit. By driving the rotation drive unit, the elevating drive unit 14 can be rotated in the vertical direction (Z direction). is there. By rotating the elevating drive unit 14 by the rotating unit, the article holding unit 13 (article 2) suspended from the elevating drive unit 14 can be rotated, and the direction of the lid 2c of the article 2 is changed. Can do. In addition, operation | movement of such a rotation part is controlled by the controller 20, for example. Moreover, in the ceiling conveyance vehicle 10, it is arbitrary whether the above-mentioned rotation part is provided, and it is not necessary to provide a rotation part.
 上述した横出し機構11、物品保持部13、及び昇降駆動部14を備える本体部3は、走行部5と一体となって軌道6に沿って移動する。また、本体部3の-X側及び+X側(走行方向の前側及び後ろ側)には、それぞれ、カバー16が設けられる。カバー16は、それぞれ、支持軸9を介して天井搬送車10に支持されており、走行部5と一体となって移動する。 The main body unit 3 including the above-described lateral extending mechanism 11, the article holding unit 13, and the elevating drive unit 14 moves along the track 6 together with the traveling unit 5. In addition, covers 16 are provided on the −X side and the + X side (the front side and the rear side in the traveling direction) of the main body 3, respectively. Each of the covers 16 is supported by the ceiling transport vehicle 10 via the support shaft 9 and moves together with the traveling unit 5.
 天井搬送車10は、例えば、処理装置30のロードポート31(図1参照)、あるいはバッファ部32(図2参照)等の保管装置に対して物品2を渡すことができる。また、天井搬送車10は、ロードポート31あるいはバッファ部32等から物品2を受け取ることができる。なお、ロードポート31及びバッファ部32は、物品2を載置する部分が、昇降駆動部14により最上位置まで上昇している物品保持部13に保持される物品2の下端よりも下方に配置されている。ここで、処理装置30は、例えば、成膜装置、コーター・ディベロッパ、露光装置、またはエッチング装置などであり、デバイス(例、半導体デバイス)を製造する過程で各種処理を施す。また、ロードポート31は、図1に示すように、処理装置30で処理するための対象物を収容した容器(物品2)を載置する箇所である。 The ceiling transport vehicle 10 can deliver the article 2 to a storage device such as a load port 31 (see FIG. 1) or a buffer unit 32 (see FIG. 2) of the processing device 30, for example. Further, the ceiling transport vehicle 10 can receive the article 2 from the load port 31 or the buffer unit 32. In addition, the load port 31 and the buffer unit 32 are arranged below the lower end of the article 2 held by the article holding unit 13 where the article 2 is placed up to the uppermost position by the elevating drive unit 14. ing. Here, the processing apparatus 30 is, for example, a film forming apparatus, a coater / developer, an exposure apparatus, or an etching apparatus, and performs various processes in the process of manufacturing a device (for example, a semiconductor device). Moreover, the load port 31 is a place which mounts the container (article 2) which accommodated the target object for processing with the processing apparatus 30, as shown in FIG.
 また、バッファ部32は、図2に示すように、軌道6の下方(-Z側)かつ+Y側の側方に配置される。このバッファ部32は、+Y側に配置されるだけでなく、-Y側に配置されてもよく、また、+Y側及び-Y側の両側に配置されてもよい。バッファ部32は、軌道6の下方かつ側方に配置されるサイドトラックバッファである。バッファ部32は、横出し機構11により物品保持部13及び昇降駆動部14をY方向に突出させて突出位置14Pに昇降駆動部14を配置した状態で、昇降駆動部14により物品保持部13を下降させることにより、物品保持部13に保持した物品2を載置可能な位置に配置される。 Further, as shown in FIG. 2, the buffer unit 32 is disposed below the track 6 (on the −Z side) and on the + Y side. The buffer unit 32 may be disposed not only on the + Y side, but also on the −Y side, and may be disposed on both the + Y side and the −Y side. The buffer unit 32 is a side track buffer disposed below and on the side of the track 6. The buffer unit 32 has the article holding unit 13 and the elevation drive unit 14 projecting in the Y direction by the laterally extending mechanism 11 and the elevation drive unit 14 is disposed at the projecting position 14P. By lowering, the article 2 held by the article holding unit 13 is arranged at a position where it can be placed.
 バッファ部32は、フレーム33を有する。フレーム33は、複数の吊り金具34により天井18から吊り下げられた状態で保持され、天井18の近傍に配置される。フレーム33は、軌道6に沿ってX方向に延びて配置される。バッファ部32は、1つの物品2または複数の物品2を載置可能である。1つのバッファ部32において載置する物品2の数は任意に設定可能である。なお、バッファ部32が複数の物品2を載置可能である場合、複数の物品2は、軌道6に沿って(X方向に)並んで載置される。 The buffer unit 32 has a frame 33. The frame 33 is held in a state of being suspended from the ceiling 18 by a plurality of suspension fittings 34 and is disposed in the vicinity of the ceiling 18. The frame 33 is arranged extending in the X direction along the track 6. The buffer unit 32 can place one article 2 or a plurality of articles 2. The number of articles 2 placed in one buffer unit 32 can be arbitrarily set. When the buffer unit 32 can place a plurality of articles 2, the plurality of articles 2 are placed side by side along the track 6 (in the X direction).
 ロードポート31及びバッファ部32には、図1及び図2に示すように、載置した物品2を位置決めする複数のピン25が設けられる。ピン25は、例えば、3個設けられる。それぞれのピン25は、物品2の底部に備える放射状の複数の溝部2dの位置に対応して配置され、この溝部2dに嵌まり込むことが可能である。物品2は、ロードポート31及びバッファ部32に載置される際、物品2の溝部2dにピン25が嵌まり込むことで、位置決めされる。なお、溝部2d及びピン25の形状および個数は、上記した形態に限定されず、物品2を位置決め可能な任意の構成が適用可能である。 As shown in FIGS. 1 and 2, the load port 31 and the buffer unit 32 are provided with a plurality of pins 25 for positioning the article 2 placed thereon. For example, three pins 25 are provided. Each pin 25 is arranged corresponding to the position of a plurality of radial grooves 2d provided on the bottom of the article 2, and can be fitted into the grooves 2d. When the article 2 is placed on the load port 31 and the buffer portion 32, the article 2 is positioned by fitting the pin 25 into the groove 2 d of the article 2. In addition, the shape and the number of the grooves 2d and the pins 25 are not limited to the above-described form, and any configuration that can position the article 2 is applicable.
 コントローラ20は、天井搬送車10の各部の動作を制御する。例えば、コントローラ20は、横出し機構11による横出し動作あるいは格納動作(すなわち昇降駆動部14の移動)、及び、走行部5の動作などを制御する。また、コントローラ20は、走行部5の動作と、横出し機構11の動作とをオーバーラップさせることができる。したがって、コントローラ20は、物品2の移載位置であるロードポート31又はバッファ部32に対して天井搬送車10が物品2を移載可能である停止位置(突出位置14Pに突出した昇降駆動部14がロードポート31又はバッファ部32の直上となる停止位置)に走行部5が停止する前に、横出し機構11により昇降駆動部14の突出位置14Pに向けた移動を開始させることができる。また、コントローラ20は、横出し機構11により昇降駆動部14が突出位置14Pから格納位置14Rに戻る前に、この移載位置に対応して停止している走行部5の走行を開始させることができる。 The controller 20 controls the operation of each part of the ceiling transport vehicle 10. For example, the controller 20 controls a lateral movement operation or a storage operation (that is, movement of the elevating drive unit 14) by the lateral ejection mechanism 11, an operation of the traveling unit 5, and the like. In addition, the controller 20 can overlap the operation of the traveling unit 5 and the operation of the lateral ejection mechanism 11. Therefore, the controller 20 is a stop position where the overhead conveyance vehicle 10 can transfer the article 2 with respect to the load port 31 or the buffer part 32 that is the transfer position of the article 2 (the lifting drive unit 14 protruding to the protruding position 14P). Before the traveling unit 5 stops at the stop position immediately above the load port 31 or the buffer unit 32, the lateral drive mechanism 11 can start the movement of the elevating drive unit 14 toward the protruding position 14P. In addition, the controller 20 can start the traveling of the traveling unit 5 stopped corresponding to the transfer position before the elevating drive unit 14 returns from the protruding position 14P to the storage position 14R by the laterally extending mechanism 11. it can.
 コントローラ20によって、走行部5の動作と、横出し機構11の動作とをオーバーラップさせる制御は任意に設定可能である。例えば、コントローラ20は、走行部5が移載位置(例えば、上記したロードポート31など、以下同様である)に対応して停止した際に昇降駆動部14が突出位置14Pに配置されるように、走行部5の走行中に横出し機構11の駆動開始を指示することができる。また、コントローラ20は、走行部5が移載位置に対応した位置から走行を開始する際に、突出位置14Pの昇降駆動部14を格納位置14Rに向けて横出し機構11の駆動開始を指示することができる。 The controller 20 can arbitrarily set the control for overlapping the operation of the traveling unit 5 and the operation of the lateral mechanism 11. For example, the controller 20 causes the elevating drive unit 14 to be arranged at the protruding position 14P when the traveling unit 5 stops corresponding to the transfer position (for example, the load port 31 described above, and so on). During the traveling of the traveling unit 5, it is possible to instruct the start of the lateral feed mechanism 11. In addition, when the traveling unit 5 starts traveling from the position corresponding to the transfer position, the controller 20 instructs the lifting drive unit 14 at the projecting position 14P to start the driving of the lateral mechanism 11 toward the storage position 14R. be able to.
 また、コントローラ20は、上記したオーバーラップさせる制御において、支障がないかを判断可能である。例えば、走行部5の走行中に、突出した状態の昇降駆動部14、物品保持部13、及び物品保持部13に保持された物品2の少なくとも1つが接触可能な障害物が存在する場合、走行部5の走行中において横出し機構11の駆動を実行しなくすることができる。また、コントローラ20は、走行部5の走行中に、突出した状態の昇降駆動部14、物品保持部13、及び物品保持部13に保持された物品2の少なくとも1つが接触可能な障害物が存在する場合、障害物との接触がない所定範囲において横出し機構11の駆動を指示してもよい。 Further, the controller 20 can determine whether there is any trouble in the above overlapping control. For example, when there is an obstacle that can contact at least one of the projecting lift drive unit 14, the article holding unit 13, and the article 2 held by the article holding unit 13 while the running unit 5 is running, During the traveling of the part 5, it is possible to stop driving the laterally extending mechanism 11. In addition, the controller 20 has an obstacle that can contact at least one of the raised and lowered drive unit 14, the article holding unit 13, and the article 2 held by the article holding unit 13 while the running unit 5 is traveling. In this case, the driving of the lateral ejection mechanism 11 may be instructed within a predetermined range where there is no contact with an obstacle.
 この場合、障害物としては、図2に示すようなバッファ部32等の保管装置、あるいは、このような保管装置に載置された物品2が挙げられる。また、障害物として、バッファ部32を構成するフレーム33等の構造物を天井から吊り下げるための吊り金具34等が挙げられる。また、障害物としては、設備内の配管、または建屋の柱及び梁、設備内に配置された処理装置30(図1参照)なども含まれる。 In this case, the obstacle may be a storage device such as the buffer unit 32 as shown in FIG. 2 or the article 2 placed on such a storage device. Further, as an obstacle, there is a hanging metal fitting 34 or the like for hanging a structure such as a frame 33 constituting the buffer unit 32 from the ceiling. Moreover, as an obstruction, the piping in an installation, the pillar and beam of a building, the processing apparatus 30 (refer FIG. 1) arrange | positioned in an installation, etc. are contained.
 コントローラ20は、図1に示すように、導出部21を備え、記憶部22に接続されてもよい。導出部21は、横出し機構11により昇降駆動部14の突出動作を開始する位置を導出する。また、導出部21は、横出し機構11により昇降駆動部14を格納する格納動作を開始するタイミングを導出する。記憶部22は、例えば、天井搬送車10の軌道6において、横出し機構11により昇降駆動部14を突出させた際に障害物となるバッファ部32等の位置情報(マップデータ)などが記憶されている。記憶部22に記憶されている障害物の位置情報は、例えば、座標値等により管理されている。 As shown in FIG. 1, the controller 20 may include a derivation unit 21 and may be connected to the storage unit 22. The deriving unit 21 derives a position where the protruding operation of the elevating drive unit 14 is started by the laterally extending mechanism 11. In addition, the deriving unit 21 derives the timing for starting the storing operation for storing the elevating drive unit 14 by the laterally extending mechanism 11. The storage unit 22 stores, for example, position information (map data) of the buffer unit 32 or the like that becomes an obstacle when the elevating drive unit 14 is protruded by the traverse mechanism 11 in the track 6 of the ceiling transport vehicle 10. ing. The obstacle position information stored in the storage unit 22 is managed by, for example, coordinate values.
 導出部21は、記憶部22に記憶されている障害物の座標値等から、横出し機構11が格納位置14Rと突出位置14Pとの間を移動するのに要する時間に基づいて、走行部5の走行中に横出し機構11の突出動作開始する位置、または、横出し機構11の格納動作中に走行部5の走行を開始するタイミングなどを導出する。導出部21は、導出した結果を記憶部22に記憶させてもよい。したがって、記憶部22は、走行部5の走行中に横出し機構の突出動作開始する位置、または、横出し機構11の格納動作中に走行部5の走行を開始するタイミングに関する情報を記憶している。また、記憶部22は、例えば、ロードポート31、バッファ部32等、物品2の移載位置に関する情報を記憶してもよい。また、コントローラ20は、バッファ部32等の位置情報(マップデータ)を用いる他に、天井搬送車10に設けられたセンサによって障害物までの距離等を検出し、このセンサからの出力に基づいて横出し機構11の駆動を指示してもよい。また、上位コントローラ(MCS,MES)からコントローラ20への搬送指示に障害物に関する座標を含ませておき、コントローラ20は、上位コントローラから取得した障害物の座標に基づいて横出し機構11の駆動を指示してもよい。 The deriving unit 21 determines the traveling unit 5 based on the time required for the lateral setting mechanism 11 to move between the storage position 14R and the protruding position 14P from the coordinate values of the obstacles stored in the storage unit 22. The position at which the protruding operation of the lateral take-out mechanism 11 starts during the running of the vehicle or the timing at which the running of the running unit 5 starts during the retracting operation of the lateral take-out mechanism 11 is derived. The deriving unit 21 may store the derived result in the storage unit 22. Therefore, the storage unit 22 stores information on the position at which the protruding operation of the lateral mechanism starts during the traveling of the traveling unit 5 or the timing at which the traveling unit 5 starts traveling during the storing operation of the lateral mechanism 11. Yes. The storage unit 22 may store information related to the transfer position of the article 2 such as the load port 31 and the buffer unit 32, for example. In addition to using the position information (map data) of the buffer unit 32 and the like, the controller 20 detects the distance to the obstacle by a sensor provided in the ceiling transport vehicle 10 and based on the output from this sensor. You may instruct the drive of the horizontal mechanism 11. In addition, coordinates related to the obstacle are included in the transport instruction from the upper controller (MCS, MES) to the controller 20, and the controller 20 drives the lateral ejection mechanism 11 based on the obstacle coordinates acquired from the upper controller. You may instruct.
 本実施形態において、コントローラ20は、例えば、天井搬送車10の走行部5または本体部3に搭載される車載コントローラを例に挙げて説明しているが、この構成に限定されない。例えば、コントローラ20として、地上側に設置された地上コントローラであってもよい。地上コントローラの場合、複数の天井搬送車10を統括的に制御するようなコントローラ20であってもよい。また、記憶部22についても、天井搬送車10の走行部5または本体部3に搭載されてもよく、地上側のコントローラ20とともに地上側に設置されてもよい。 In the present embodiment, the controller 20 has been described by taking, for example, an in-vehicle controller mounted on the traveling unit 5 or the main body unit 3 of the ceiling guided vehicle 10, but is not limited to this configuration. For example, the controller 20 may be a ground controller installed on the ground side. In the case of a ground controller, the controller 20 may control the plurality of ceiling transport vehicles 10 in an integrated manner. Further, the storage unit 22 may also be mounted on the traveling unit 5 or the main body unit 3 of the ceiling guided vehicle 10 or may be installed on the ground side together with the controller 20 on the ground side.
 次に、天井搬送車システム100の動作を説明する。図3は、天井搬送車システム100の動作の一例を示すフローチャートである。以下の例では、天井搬送車10がロードポート31またはバッファ部32等の移載位置に向けて走行し、天井搬送車10から移載位置に物品2を移載する動作について説明する。 Next, the operation of the ceiling guided vehicle system 100 will be described. FIG. 3 is a flowchart showing an example of the operation of the ceiling guided vehicle system 100. In the following example, an operation in which the ceiling transport vehicle 10 travels toward the transfer position such as the load port 31 or the buffer unit 32 and the article 2 is transferred from the ceiling transport vehicle 10 to the transfer position will be described.
 図3に示すように、コントローラ20は、まず、天井搬送車10に移載位置を指示する(ステップS01)。ステップS01において、コントローラ20は、例えば、記憶部22に記憶された移載位置に関する情報から、物品2の搬送先である移載位置の情報を抽出する。コントローラ20は、抽出した情報に基づいて走行部5の動作を制御し、天井搬送車10を移載位置に走行させる。なお、移載位置に関する情報は、例えば、コントローラ20に接続された上位コントローラから指示されてもよい。 As shown in FIG. 3, the controller 20 first instructs the transfer position to the ceiling transport vehicle 10 (step S01). In step S01, for example, the controller 20 extracts information on the transfer position that is the transport destination of the article 2 from the information on the transfer position stored in the storage unit 22. The controller 20 controls the operation of the traveling unit 5 based on the extracted information, and causes the ceiling transport vehicle 10 to travel to the transfer position. Note that the information regarding the transfer position may be instructed from, for example, a host controller connected to the controller 20.
 次に、コントローラ20は、移載位置が軌道6の下方かつ側方か否かを判断する(ステップS02)。コントローラ20は、例えば、記憶部22抽出した移載位置の情報からステップS02を判断する。移載位置が軌道6の下方かつ側方である場合(ステップS20のYES)、導出部21は、横出し機構11により昇降駆動部14の突出動作を開始する位置を導出する(ステップS03)。 Next, the controller 20 determines whether or not the transfer position is below and on the side of the track 6 (step S02). For example, the controller 20 determines step S02 from the transfer position information extracted from the storage unit 22. When the transfer position is below and to the side of the track 6 (YES in step S20), the deriving unit 21 derives a position at which the raising / lowering driving unit 14 starts the protruding operation by the laterally extending mechanism 11 (step S03).
 ステップS03において、導出部21は、例えば、昇降駆動部14を突出させる長さと、横出し機構11による昇降駆動部14の突出速度とに基づいて、突出動作開始から突出動作完了までの所要時間を算出する。続いて、導出部21は、例えば、算出した所要時間と、走行部5の走行速度とに基づいて、所要時間が経過する間に走行部5が走行する走行距離を算出する。導出部21は、算出した走行距離と、移載位置に対応する停止位置P3(後述する図4参照)とに基づいて、昇降駆動部14の突出動作を開始する突出動作開始位置P1(後述する図4参照)を導出する。 In step S03, the derivation unit 21 determines the time required from the start of the protrusion operation to the completion of the protrusion operation based on, for example, the length by which the elevating drive unit 14 protrudes and the protruding speed of the elevating drive unit 14 by the laterally extending mechanism 11. calculate. Subsequently, the derivation unit 21 calculates the travel distance traveled by the travel unit 5 while the required time elapses, for example, based on the calculated required time and the travel speed of the travel unit 5. The deriving unit 21 starts a protruding operation start position P1 (described later) for starting the protruding operation of the elevating drive unit 14 based on the calculated travel distance and a stop position P3 (see FIG. 4 described later) corresponding to the transfer position. (See FIG. 4).
 続いて、コントローラ20は、天井搬送車10の走行方向において、例えば、算出した突出動作開始位置P1から移載位置までの間に、障害物があるか否かを判断する(ステップS04)。コントローラ20は、障害物がないと判断した場合(ステップS04のNO)、走行部5の走行中に、突出動作開始位置P1から昇降駆動部14の突出動作を開始させる(ステップS05)。 Subsequently, the controller 20 determines whether there is an obstacle in the traveling direction of the ceiling transport vehicle 10 between, for example, the calculated protruding operation start position P1 and the transfer position (step S04). When the controller 20 determines that there is no obstacle (NO in step S04), the controller 20 starts the protruding operation of the elevating drive unit 14 from the protruding operation start position P1 during the traveling of the traveling unit 5 (step S05).
 図4は、ステップS05の動作の一例を示す図である。図4に示すように、コントローラ20は、導出部21で導出した突出動作開始位置P1に天井搬送車10が到達した際、あるいは到達する前に、走行部5の走行を維持したまま、突出動作開始位置P1から横出し機構11による昇降駆動部14の突出動作開始指示を行う。この指示により、天井搬送車10は、突出動作開始位置P1に達した段階で、走行方向に走行しながら昇降駆動部14の突出動作を行う。 FIG. 4 is a diagram illustrating an example of the operation in step S05. As shown in FIG. 4, the controller 20 performs the projecting operation while maintaining the traveling of the traveling unit 5 when the overhead traveling vehicle 10 arrives at the projecting operation start position P1 derived by the deriving unit 21 or before reaching the projecting operation start position P1. An instruction to start the protruding operation of the lifting / lowering drive unit 14 by the lateral projection mechanism 11 is issued from the start position P1. By this instruction, the ceiling guided vehicle 10 performs the protruding operation of the elevating drive unit 14 while traveling in the traveling direction at the stage when it reaches the protruding operation start position P1.
 したがって、図4に示すように、突出動作開始位置P1と停止位置P3との間の走行位置P2では、天井搬送車10は、走行しながら突出位置14Pに向けて昇降駆動部14を突出させる途中の状態となる。その後、コントローラ20は、天井搬送車10が停止位置P3に到達した場合、走行部5の動作を停止させることで、天井搬送車10を停止位置P3に停止させる。また、天井搬送車10が停止位置P3に停止したタイミングで、昇降駆動部14が突出位置14Pに到達しており、突出動作が完了した状態となっている。 Therefore, as shown in FIG. 4, at the traveling position P2 between the projecting operation start position P1 and the stop position P3, the ceiling transport vehicle 10 is in the middle of projecting the lifting drive unit 14 toward the projecting position 14P while traveling. It becomes the state of. Thereafter, when the ceiling transport vehicle 10 reaches the stop position P3, the controller 20 stops the operation of the traveling unit 5 to stop the ceiling transport vehicle 10 at the stop position P3. Further, at the timing when the ceiling transport vehicle 10 stops at the stop position P3, the elevating drive unit 14 has reached the protruding position 14P, and the protruding operation has been completed.
 また、図3のステップS02において移載位置が軌道6の下方かつ側方ではない場合(ステップS02のNO)、コントローラ20は、天井搬送車10の走行中に横出し機構11を動作させない(ステップS06)。例えば、移載位置が軌道6の下方に設置されている場合は、昇降駆動部14等を横出しせずに物品2の移載が可能である。また、ステップS04において走行方向に障害物があると判断した場合(ステップS04のYES)、コントローラ20は、天井搬送車10の走行中に横出し機構11を動作させない(ステップS06)。コントローラ20は、天井搬送車10の走行中に横出し機構11を動作させることなく、天井搬送車10を走行させることになる。 3, when the transfer position is not below and to the side of the track 6 (NO in step S02), the controller 20 does not operate the horizontal mechanism 11 while the overhead traveling vehicle 10 is traveling (step S02). S06). For example, when the transfer position is installed below the track 6, the article 2 can be transferred without moving the elevating drive unit 14 or the like sideways. Further, when it is determined in step S04 that there is an obstacle in the traveling direction (YES in step S04), the controller 20 does not operate the laterally extending mechanism 11 while the overhead traveling vehicle 10 is traveling (step S06). The controller 20 causes the ceiling transport vehicle 10 to travel without operating the lateral mechanism 11 while the ceiling transport vehicle 10 is traveling.
 図5は、ステップS06の動作の一例を示す図である。ステップS04において、コントローラ20は、バッファ部32、フレーム33、吊り金具34、またはバッファ部32上の物品2等の障害物があると判断した場合、天井搬送車10が突出動作開始位置P1に到達する際あるいは到達する前に(すなわち、到達するまでに)、天井搬送車10に対して突出動作を行わない指示を与える。なお、突出動作を行わない指示は、コントローラ20が指示してもよく、またコントローラ20により突出動作を指示しないことにより実現されてもよい。 FIG. 5 is a diagram illustrating an example of the operation in step S06. In step S04, when the controller 20 determines that there is an obstacle such as the buffer unit 32, the frame 33, the hanging bracket 34, or the article 2 on the buffer unit 32, the ceiling transport vehicle 10 reaches the protruding operation start position P1. When or before reaching (that is, before reaching), an instruction not to perform the protruding operation is given to the ceiling transport vehicle 10. The instruction not to perform the protruding operation may be instructed by the controller 20 or may be realized by not instructing the protruding operation by the controller 20.
 この指示(あるいは不指示)により、天井搬送車10は、昇降駆動部14を格納位置14Rに配置した状態で、突出動作を行うことなく突出動作開始位置P1を通過する。その後、コントローラ20は、停止位置P3で天井搬送車10を移載位置で停止させた後に、横出し機構11により昇降駆動部14を突出位置14Pに突出させる。 In response to this instruction (or non-instruction), the overhead traveling vehicle 10 passes the protruding operation start position P1 without performing the protruding operation in a state where the elevating drive unit 14 is disposed at the storage position 14R. After that, the controller 20 stops the overhead conveyance vehicle 10 at the transfer position at the stop position P3, and then causes the elevating drive unit 14 to protrude to the protrusion position 14P by the laterally extending mechanism 11.
 次に、コントローラ20は、走行部5の動作を停止させた後、昇降駆動部14を駆動させて物品保持部13を下降させる(ステップS07)。図4においては、停止位置P3に天井搬送車10が停止した段階で、昇降駆動部14が突出位置14Pに達しているため、コントローラ20は、停止位置P3に天井搬送車10が停止した直後、昇降駆動部14を駆動させて物品保持部13を下降させる。また、図5においては、停止位置P3に天井搬送車10が停止した後に横出し機構11を駆動し、昇降駆動部14が突出位置14Pに達した後に昇降駆動部14を駆動させて物品保持部13を下降させる。 Next, after stopping the operation of the traveling unit 5, the controller 20 drives the elevating drive unit 14 to lower the article holding unit 13 (step S07). In FIG. 4, since the elevating drive unit 14 has reached the protruding position 14P when the ceiling transport vehicle 10 stops at the stop position P3, the controller 20 immediately after the ceiling transport vehicle 10 stops at the stop position P3, The elevating drive unit 14 is driven to lower the article holding unit 13. Further, in FIG. 5, the horizontal delivery mechanism 11 is driven after the overhead conveyance vehicle 10 stops at the stop position P3, and the elevating drive unit 14 is driven after the elevating drive unit 14 reaches the protruding position 14P to drive the article holding unit. 13 is lowered.
 コントローラ20は、物品2が移載位置(ロードポート31など)に下降した段階で昇降駆動部14の駆動を停止し、物品保持部13による物品2の把持を解放することにより、物品2を移載位置(図4ではロードポート31)に載置する(ステップS08)。以上により、天井搬送車10から移載位置への物品2の移載が完了する。なお、天井搬送車10が移載位置の物品2を受け取る場合、コントローラ20は、昇降駆動部14を駆動して物品保持部13を物品2のフランジ2gの高さまで下降させ、物品保持部13を駆動してフランジ2gを把持することにより物品2を受け取ることが可能である。なお、コントローラ20は、天井搬送車10が移載位置の物品2を受け取る際に、上記した図3から図5に示すような横出し機構11の駆動の制御を同様に適用することができる。 The controller 20 stops the driving of the elevating drive unit 14 when the article 2 is lowered to the transfer position (load port 31 or the like), and releases the gripping of the article 2 by the article holding unit 13, thereby transferring the article 2. It is mounted on the mounting position (load port 31 in FIG. 4) (step S08). Thus, the transfer of the article 2 from the ceiling transport vehicle 10 to the transfer position is completed. When the ceiling transport vehicle 10 receives the article 2 at the transfer position, the controller 20 drives the lifting drive unit 14 to lower the article holding unit 13 to the height of the flange 2g of the article 2 to move the article holding unit 13 down. It is possible to receive the article 2 by driving and gripping the flange 2g. It should be noted that the controller 20 can similarly apply the drive control of the lateral feed mechanism 11 as shown in FIGS. 3 to 5 described above when the overhead conveyance vehicle 10 receives the article 2 at the transfer position.
 図4に示すように、走行方向に障害物が無い場合、天井搬送車10の走行中に突出動作が行われ、天井搬送車10が停止位置P3で停止した時に突出動作が完了またはほぼ完了する。このように、天井搬送車10の走行と昇降駆動部14の突出動作とをオーバーラップさせることができるため、天井搬送車10が停止した後に突出動作が行われる場合に比べて、物品2の移載に要する時間を短縮できる。 As shown in FIG. 4, when there is no obstacle in the traveling direction, the protruding operation is performed while the overhead traveling vehicle 10 is traveling, and the protruding operation is completed or almost completed when the overhead traveling vehicle 10 stops at the stop position P3. . As described above, since the traveling of the ceiling conveyance vehicle 10 and the protruding operation of the elevating drive unit 14 can be overlapped, the transfer of the article 2 can be performed as compared with the case where the protruding operation is performed after the ceiling conveying vehicle 10 stops. The time required for loading can be shortened.
 また、図5に示すように、走行方向に障害物がある場合、天井搬送車10が停止位置P3で停止するまで昇降駆動部14の突出動作が行われない。このため、天井搬送車10は、昇降駆動部14が格納位置14Rに配置された状態で障害物の側方を通過する。昇降駆動部14が格納位置14Rに配置されることにより、昇降駆動部14等が障害物に干渉することを回避できる。 Further, as shown in FIG. 5, when there is an obstacle in the traveling direction, the raising / lowering drive unit 14 is not projected until the ceiling transport vehicle 10 stops at the stop position P3. For this reason, the ceiling conveyance vehicle 10 passes the side of the obstacle in a state where the elevating drive unit 14 is disposed at the storage position 14R. By arranging the elevating drive unit 14 at the storage position 14R, it is possible to avoid the elevating drive unit 14 and the like from interfering with an obstacle.
 続いて、天井搬送車システム100の他の動作について説明する。図6は、天井搬送車システム100の動作の他の例を示すフローチャートである。図6では、ステップS04でYESと判断された以降の動作が図3に示すフローチャートと異なっている。図7は、図6における動作の一例を示している。以下、図3における動作例との相違点を中心に説明する。 Subsequently, another operation of the ceiling guided vehicle system 100 will be described. FIG. 6 is a flowchart illustrating another example of the operation of the ceiling guided vehicle system 100. In FIG. 6, the operation after YES is determined in step S <b> 04 is different from the flowchart shown in FIG. 3. FIG. 7 shows an example of the operation in FIG. Hereinafter, the difference from the operation example in FIG. 3 will be mainly described.
 図6に示すように、コントローラ20がステップS04において走行方向に障害物があると判断した場合(ステップS04のYES)、導出部21は、障害物を超える位置を突出動作開始位置として導出する(ステップS11)。ステップS11において、導出部21は、記憶部22に記憶されている障害物の座標値等に基づいて、図7に示すように、突出動作開始位置P1と停止位置P3との間であって、走行方向に障害物を超えた位置P4を突出動作開始位置として導出する。この場合、障害物の側方の位置P1では突出動作が開始されないため、天井搬送車10は、昇降駆動部14が格納位置14Rに格納された状態で障害物の側方を通過する。 As illustrated in FIG. 6, when the controller 20 determines in step S04 that there is an obstacle in the traveling direction (YES in step S04), the deriving unit 21 derives a position exceeding the obstacle as a protruding operation start position ( Step S11). In step S11, the derivation unit 21 is between the protrusion operation start position P1 and the stop position P3, as shown in FIG. A position P4 that exceeds the obstacle in the traveling direction is derived as a protruding operation start position. In this case, since the protruding operation is not started at the position P1 on the side of the obstacle, the overhead traveling vehicle 10 passes the side of the obstacle with the lifting drive unit 14 stored in the storage position 14R.
 また、突出動作開始位置P4と停止位置P3との間には、障害物がない。したがって、上記したステップS11で求めた突出動作開始位置P4に天井搬送車10が到達した場合、コントローラ20は、走行部5の走行中に昇降駆動部14の突出動作を開始させる(ステップS12)。したがって、図7に示すように、突出動作開始位置P4と停止位置P3との間の走行位置P5では、天井搬送車10が走行しながら突出位置14Pに向けて昇降駆動部14を突出している状態となる。 Also, there is no obstacle between the protruding operation start position P4 and the stop position P3. Therefore, when the overhead conveyance vehicle 10 reaches the protrusion operation start position P4 obtained in step S11 described above, the controller 20 starts the protrusion operation of the elevating drive unit 14 while the traveling unit 5 is traveling (step S12). Therefore, as shown in FIG. 7, in the traveling position P5 between the projecting operation start position P4 and the stop position P3, the ceiling drive vehicle 10 projects the lifting drive unit 14 toward the projecting position 14P while traveling. It becomes.
 ステップS12において突出動作を行う場合、突出動作開始位置P4と停止位置P3との距離は、最初に求めた突出動作開始位置P1と停止位置P3との距離よりも短くなる。したがって、昇降駆動部14が突出位置14Pに到達する前に、天井搬送車10が停止位置P3に到達する。この場合、コントローラ20は、停止位置P3で天井搬送車10を停止させた後、昇降駆動部14が突出位置14Pに到達するまで突出動作を継続して行わせる(ステップS13)。昇降駆動部14が突出位置14Pに到達した後、コントローラ20は、昇降駆動部14を駆動させて物品保持部13を下降させる(ステップS14)。このステップS14の後、図3に示すステップS08のように、物品2の移載位置への移載、または物品2の受け取りを行う。 When performing the protrusion operation in step S12, the distance between the protrusion operation start position P4 and the stop position P3 is shorter than the distance between the protrusion operation start position P1 and the stop position P3 obtained first. Therefore, before the raising / lowering drive part 14 arrives at the protrusion position 14P, the overhead conveyance vehicle 10 arrives at the stop position P3. In this case, after stopping the ceiling transport vehicle 10 at the stop position P3, the controller 20 continues the protrusion operation until the elevating drive unit 14 reaches the protrusion position 14P (step S13). After the elevating drive unit 14 reaches the protruding position 14P, the controller 20 drives the elevating drive unit 14 to lower the article holding unit 13 (step S14). After step S14, the article 2 is transferred to the transfer position or the article 2 is received, as in step S08 shown in FIG.
 図7に示すように、天井搬送車10が障害物の側方の位置を通過する際には昇降駆動部14の突出動作が行われないため、昇降駆動部14が障害物に干渉することを回避できる。また、天井搬送車10が障害物を超えた位置で、天井搬送車10の走行と昇降駆動部14の突出動作とをオーバーラップさせることができるため、天井搬送車10が停止した後に突出動作が行われる場合に比べて、物品2の移載に要する時間を短縮できる。 As shown in FIG. 7, when the overhead traveling vehicle 10 passes the position on the side of the obstacle, the raising / lowering driving unit 14 does not project, so that the raising / lowering driving unit 14 interferes with the obstacle. Can be avoided. Further, since the traveling of the ceiling transport vehicle 10 and the protruding operation of the lifting drive unit 14 can be overlapped at a position where the ceiling transport vehicle 10 exceeds the obstacle, the protruding operation is performed after the ceiling transport vehicle 10 stops. Compared with the case where it is performed, the time required to transfer the article 2 can be shortened.
 続いて、天井搬送車システム100の他の動作について説明する。図8は、天井搬送車システム100の動作の他の例を示すフローチャートである。以下の例では、天井搬送車10がロードポート31あるいはバッファ部32等の移載位置に載置された物品2を物品保持部13で保持した後に走行を再開する動作、または、天井搬送車10が移載位置に物品2を移載した後に走行を再開する動作について説明する。 Subsequently, another operation of the ceiling guided vehicle system 100 will be described. FIG. 8 is a flowchart showing another example of the operation of the ceiling guided vehicle system 100. In the following example, the operation of resuming traveling after the overhead conveyance vehicle 10 holds the article 2 placed at the transfer position such as the load port 31 or the buffer unit 32 by the article holding unit 13, or the overhead conveyance vehicle 10 The operation of resuming traveling after transferring the article 2 to the transfer position will be described.
 図8に示すように、コントローラ20は、昇降駆動部14を駆動させて物品保持部13を上昇させる(ステップS21)。なお、コントローラ20は、ステップS21を実行する前または後に天井搬送車10の次の移動先(移載先)に関する情報を受け取っている。続いて、コントローラ20は、走行方向に障害物があるか否かを判断する(ステップS22)。コントローラ20は、ステップS22を判断するタイミングとして、物品保持部13の上昇開始時または上昇開始前または上昇開始後のいずれであってもよい。したがって、ステップS21とステップS22とは、同時であってもよいし、ステップS22がステップS21より先であってもよい。 As shown in FIG. 8, the controller 20 drives the elevating drive unit 14 to raise the article holding unit 13 (step S21). In addition, the controller 20 has received the information regarding the next moving destination (transfer destination) of the ceiling conveyance vehicle 10 before or after performing step S21. Subsequently, the controller 20 determines whether there is an obstacle in the traveling direction (step S22). The controller 20 may determine whether to determine step S22 when the article holding unit 13 starts to rise, before the raising start, or after the raising start. Therefore, step S21 and step S22 may be simultaneous, or step S22 may be ahead of step S21.
 コントローラ20は、例えば、横出し機構11が突出位置14Pから格納位置14Rに戻るまでの格納時間において走行部5が走行する距離を算出し、この走行距離において障害物が存在するか否かを、記憶部22に記憶されている障害物の座標値等から判断する。コントローラ20は、走行方向に障害物が無いと判断した場合(ステップS22のNO)、導出部21は、横出し機構11により昇降駆動部14を格納する格納動作を開始するタイミングを導出する(ステップS23)。 For example, the controller 20 calculates the distance traveled by the traveling unit 5 during the storage time until the laterally extending mechanism 11 returns from the protruding position 14P to the storage position 14R, and whether or not there is an obstacle at this travel distance. Judgment is made based on the coordinates of obstacles stored in the storage unit 22. When the controller 20 determines that there is no obstacle in the traveling direction (NO in step S22), the deriving unit 21 derives the timing for starting the storing operation for storing the elevating drive unit 14 by the laterally extending mechanism 11 (step). S23).
 ステップS23において、導出部21は、例えば、走行部5の走行開始時に昇降駆動部14の格納動作を開始するようにタイミングを導出する。コントローラ20は、走行部5の走行を開始させるともに、導出部21によって導出したタイミングで昇降駆動部14の格納動作を開始させる(ステップS24)。なお、ステップS24は、昇降駆動部14による物品保持部13の上昇が完了した後に実行されてもよいし、物品保持部13の上昇途中で実行されてもよい。 In step S23, the deriving unit 21 derives the timing so as to start the retracting operation of the elevating drive unit 14 when the traveling unit 5 starts traveling, for example. The controller 20 starts the traveling of the traveling unit 5 and starts the storing operation of the elevating drive unit 14 at the timing derived by the deriving unit 21 (step S24). Note that step S24 may be executed after the raising of the article holding unit 13 by the elevating drive unit 14 is completed, or may be executed while the article holding unit 13 is being raised.
 図9は、ステップS24の動作の一例を示す図である。図9に示すように、コントローラ20は、ステップS23で導出部21が導出したタイミング(図9では走行部5の走行開始時)に格納動作を開始するように指示する。この指示により、天井搬送車10が停止位置P3から走行方向(+X方向)に走行開始すると同時またはほぼ同時に、昇降駆動部14の格納動作が開始される。したがって、図9に示すように、停止位置P3から走行方向に進んだ位置P6では、走行部5により走行しつつ、横出し機構11による昇降駆動部14の格納動作が行われている。 FIG. 9 is a diagram illustrating an example of the operation in step S24. As shown in FIG. 9, the controller 20 instructs the storage operation to start at the timing derived by the deriving unit 21 in step S <b> 23 (when the traveling unit 5 starts traveling in FIG. 9). By this instruction, when the overhead traveling vehicle 10 starts traveling in the traveling direction (+ X direction) from the stop position P3, the retracting operation of the elevating drive unit 14 is started simultaneously or substantially simultaneously. Therefore, as shown in FIG. 9, at the position P <b> 6 that has advanced from the stop position P <b> 3 in the traveling direction, the elevator unit 14 is retracted by the lateral drive mechanism 11 while traveling by the traveling unit 5.
 その後、走行部5による走行中に昇降駆動部14が格納位置14Rに到達し、格納動作が完了する(ステップS25)。格納動作が完了した後、コントローラ20は、例えば、次の停止位置へ向けて天井搬送車10を走行させる。 Thereafter, during the traveling by the traveling unit 5, the elevating drive unit 14 reaches the storage position 14R, and the storing operation is completed (step S25). After the storing operation is completed, the controller 20 causes the overhead conveyance vehicle 10 to travel toward the next stop position, for example.
 また、上記のステップS22において走行方向に障害物があると判断した場合(ステップS22のYES)、コントローラ20は、天井搬送車10の停止中に格納動作を開始させる(ステップS26)。図10は、ステップS26の動作の一例を示す図である。図10に示すように、コントローラ20は、天井搬送車10が停止位置P3で停止している状態で、横出し機構11により昇降駆動部14を突出位置14Pから格納位置14Rに移動させる。格納動作が完了した後、コントローラ20は、走行部5に走行動作を開始させる(ステップS27)。天井搬送車10は、昇降駆動部14を格納位置14Rに配置した状態で走行を開始する。 Further, when it is determined in step S22 that there is an obstacle in the traveling direction (YES in step S22), the controller 20 starts the storing operation while the ceiling transport vehicle 10 is stopped (step S26). FIG. 10 is a diagram illustrating an example of the operation in step S26. As shown in FIG. 10, the controller 20 moves the elevating drive unit 14 from the protruding position 14P to the storage position 14R by the side feed mechanism 11 in a state where the ceiling transport vehicle 10 is stopped at the stop position P3. After the storing operation is completed, the controller 20 causes the traveling unit 5 to start the traveling operation (step S27). The ceiling transport vehicle 10 starts traveling in a state where the elevating drive unit 14 is disposed at the storage position 14R.
 図9に示すように、天井搬送車10の走行方向に障害物が無い場合、天井搬送車10の走行開始時に格納動作が行われ、天井搬送車10の走行中に格納動作が完了する。図9に示す例のように、天井搬送車10の走行と昇降駆動部14の格納動作とをオーバーラップさせることができるため、天井搬送車10が停止した状態で格納動作を行ってから走行を開始する場合に比べて、天井搬送車10の走行開始時間を早めることができ、物品2の移載に要する時間を短縮できる。 As shown in FIG. 9, when there is no obstacle in the traveling direction of the ceiling transport vehicle 10, the storage operation is performed when the ceiling transport vehicle 10 starts to travel, and the storage operation is completed while the ceiling transport vehicle 10 is traveling. Since the traveling of the ceiling transport vehicle 10 and the retracting operation of the elevating drive unit 14 can be overlapped as in the example illustrated in FIG. 9, the traveling is performed after the retracting operation is performed with the ceiling transport vehicle 10 stopped. Compared with the case of starting, the traveling start time of the ceiling guided vehicle 10 can be advanced, and the time required for transferring the article 2 can be shortened.
 また、図10に示すように、天井搬送車10の走行方向に障害物がある場合、格納動作の完了後に天井搬送車10の走行を開始するため、天井搬送車10は、昇降駆動部14が格納位置14Rに配置された状態で障害物の側方を通過する。昇降駆動部14が格納位置14Rに配置されることにより、昇降駆動部14が障害物に干渉することを回避できる。 In addition, as shown in FIG. 10, when there is an obstacle in the traveling direction of the ceiling transport vehicle 10, the ceiling transport vehicle 10 starts to travel after the storage operation is completed. Passes the side of the obstacle in the state of being placed at the storage position 14R. By arranging the elevating drive unit 14 at the storage position 14R, it is possible to avoid the elevating drive unit 14 from interfering with an obstacle.
 なお、図10に示す動作では、ステップS22において、走行方向に障害物があると判断した場合、コントローラ20が天井搬送車10の停止中に格納動作を完了させているが、この例に限定されない。例えば、ステップS22において、走行方向に障害物があると判断した場合、導出部21は、障害物に干渉しないように、横出し機構11により昇降駆動部14を格納する格納動作を開始するタイミングを導出するようにしてもよい。 In the operation illustrated in FIG. 10, when it is determined in step S22 that there is an obstacle in the traveling direction, the controller 20 completes the storing operation while the ceiling transport vehicle 10 is stopped. However, the operation is not limited to this example. . For example, when it is determined in step S22 that there is an obstacle in the traveling direction, the derivation unit 21 sets a timing for starting the storing operation of storing the elevating drive unit 14 by the lateral output mechanism 11 so as not to interfere with the obstacle. It may be derived.
 図11は、天井搬送車システム100の他の動作を示す図である。図11に示すように、導出部21は、停止位置P3と障害物に達する位置P9との距離を算出し、天井搬送車10がこの距離を走行する場合に要する時間(走行時間)を算出する。また、導出部21は、例えば、昇降駆動部14を格納させる際の突出位置14Pから格納位置14Rまでの距離と、横出し機構11による昇降駆動部14の格納速度とに基づいて、格納動作開始から格納動作完了までに要する時間(格納時間)を算出する。 FIG. 11 is a diagram illustrating another operation of the ceiling transport vehicle system 100. As shown in FIG. 11, the derivation unit 21 calculates the distance between the stop position P3 and the position P9 that reaches the obstacle, and calculates the time (traveling time) required for the overhead traveling vehicle 10 to travel this distance. . In addition, the derivation unit 21 starts the storage operation based on, for example, the distance from the protruding position 14P to the storage position 14R when the lifting drive unit 14 is stored and the storage speed of the lifting drive unit 14 by the lateral ejection mechanism 11. To the time required for the storage operation to complete (storage time).
 導出部21は、例えば、求めた格納時間と走行時間とを比較し、格納時間の方が短い場合には、天井搬送車10の走行開始時に昇降駆動部14の格納動作を行わせる。また、導出部21は、例えば、格納時間の方が長い場合には、格納時間から走行時間を減算した時間(減算時間)を求め、横出し機構11の格納動作を開始するタイミングT0から減算時間が経過したタイミングT1を導出する。コントローラ20は、天井搬送車10を停止位置P3で停止させた状態で格納動作を開始させ、格納動作開始時のタイミングT0から上記した減算時間が経過したタイミングT1で走行開始を指示する。 For example, the deriving unit 21 compares the obtained storage time with the traveling time, and when the storage time is shorter, the deriving unit 21 performs the storing operation of the elevating drive unit 14 when the overhead traveling vehicle 10 starts traveling. Further, for example, when the storage time is longer, the deriving unit 21 obtains a time (subtraction time) obtained by subtracting the travel time from the storage time, and subtracts the time from the timing T0 at which the storage operation of the lateral take-out mechanism 11 is started. The timing T1 at which elapses is derived. The controller 20 starts the storage operation in a state in which the overhead conveyance vehicle 10 is stopped at the stop position P3, and instructs the start of traveling at the timing T1 when the subtraction time described above has elapsed from the timing T0 at the start of the storage operation.
 図11に示すように、天井搬送車10は、停止位置P3に停止中に横出し機構11による昇降駆動部14の格納動作を開始し、タイミングT1で格納動作を継続しながら走行部5の走行を開始させる。なお、図11に示すように、停止位置P3と位置P9との中間位置である走行位置P8では、横出し機構11による昇降駆動部14の格納動作を行っている。また、天井搬送車10が障害物に達する位置P9に到達した段階では、昇降駆動部14の格納動作が完了している。したがって、走行方向に障害物がある場合においても、天井搬送車10の走行と昇降駆動部14の格納動作とを一部オーバーラップさせることができる。この例により、昇降駆動部14が障害物に干渉することを回避しつつ、天井搬送車10の走行開始時間を早めることができ、物品2の移載に要する時間を短縮できる。 As shown in FIG. 11, the overhead traveling vehicle 10 starts the storing operation of the elevating drive unit 14 by the laterally extending mechanism 11 while stopping at the stop position P3, and the traveling unit 5 travels while continuing the storing operation at the timing T1. To start. As shown in FIG. 11, at the travel position P8 that is an intermediate position between the stop position P3 and the position P9, the retracting operation of the elevating drive unit 14 by the lateral drive mechanism 11 is performed. In addition, when the ceiling transport vehicle 10 reaches the position P9 where the obstacle reaches the obstacle, the retracting operation of the elevating drive unit 14 is completed. Therefore, even when there is an obstacle in the traveling direction, the traveling of the ceiling transport vehicle 10 and the retracting operation of the elevating drive unit 14 can be partially overlapped. According to this example, the traveling start time of the ceiling transport vehicle 10 can be advanced while avoiding the lifting drive unit 14 from interfering with an obstacle, and the time required to transfer the article 2 can be shortened.
 図12は、天井搬送車システム100の他の動作を示す図である。なお、図12に示すバッファ部(保管装置)32は、天井搬送車10の走行方向に沿って、+X側及び-X側の吊り金具34の間に複数の物品2を並べて載置可能である。図12に示すように、天井搬送車10は、停止位置P10に停止してバッファ部32の、天井搬送車10の走行方向の手前側(-X側)に対して物品2の移載を行う。このとき、コントローラ20は、バッファ部32の、天井搬送車10の走行方向の先側(+X側)に物品2が載置されているかを判断し、物品2が載置されている場合は、この物品2が障害物であるとして、図10と同様に、天井搬送車10の走行方向に障害物(物品2)があるとして、格納動作の完了後に天井搬送車10の走行を開始させる。 FIG. 12 is a diagram illustrating another operation of the ceiling transport vehicle system 100. In the buffer unit (storage device) 32 shown in FIG. 12, a plurality of articles 2 can be placed side by side between the + X side and −X side hanging brackets 34 along the traveling direction of the ceiling transport vehicle 10. . As shown in FIG. 12, the ceiling transport vehicle 10 stops at the stop position P10 and transfers the article 2 to the front side (−X side) of the buffer unit 32 in the traveling direction of the ceiling transport vehicle 10. . At this time, the controller 20 determines whether the article 2 is placed on the front side (+ X side) of the traveling direction of the ceiling transport vehicle 10 of the buffer unit 32, and when the article 2 is placed, Assuming that the article 2 is an obstacle, similarly to FIG. 10, assuming that there is an obstacle (article 2) in the traveling direction of the ceiling transport vehicle 10, the traveling of the ceiling transport vehicle 10 is started after the storage operation is completed.
 また、コントローラ20が、バッファ部32の下流側(+X側)に物品2が載置されていないと判断した場合、導出部21は、停止位置P10と、障害物である吊り金具34に達する位置P11との距離を算出し、天井搬送車10がこの距離を走行する場合に要する時間(走行時間)を算出する。また、導出部21は、図11と同様に、昇降駆動部14の格納動作開始から格納動作完了までに要する時間(格納時間)を算出する。 In addition, when the controller 20 determines that the article 2 is not placed on the downstream side (+ X side) of the buffer unit 32, the derivation unit 21 reaches the stop position P10 and the hanging bracket 34 that is an obstacle. The distance to P11 is calculated, and the time (traveling time) required for the overhead traveling vehicle 10 to travel this distance is calculated. Similarly to FIG. 11, the derivation unit 21 calculates the time (storage time) required from the start of the storage operation of the elevating drive unit 14 to the completion of the storage operation.
 導出部21は、格納時間から走行時間を減算した時間(減算時間)を求め、横出し機構11の格納動作を開始するタイミングT0から減算時間が経過したタイミングT2を導出する。コントローラ20は、天井搬送車10を停止位置P10で停止させた状態で格納動作を開始させ、格納動作開始時のタイミングT0から上記した減算時間が経過したタイミングT2で走行開始を指示する。 The derivation unit 21 obtains a time (subtraction time) obtained by subtracting the traveling time from the storage time, and derives a timing T2 at which the subtraction time has elapsed from the timing T0 at which the lateral movement mechanism 11 starts the storage operation. The controller 20 starts the storage operation in a state where the overhead conveyance vehicle 10 is stopped at the stop position P10, and instructs the start of traveling at the timing T2 when the above-described subtraction time has elapsed from the timing T0 at the start of the storage operation.
 図12に示すように、天井搬送車10は、停止位置P3に停止中に横出し機構11による昇降駆動部14の格納動作を開始し、タイミングT2で格納動作を継続しながら走行部5の走行を開始させる。なお、図12に示すように、停止位置P10と位置P11との中間位置では、横出し機構11による昇降駆動部14の格納動作を行っている。また、天井搬送車10が吊り金具34に達する位置P11に到達した段階では、昇降駆動部14の格納動作が完了している。したがって、バッファ部32に対する物品2の移載後においても、天井搬送車10の走行と昇降駆動部14の格納動作とを一部オーバーラップさせることができる。この例により、昇降駆動部14が吊り金具34に干渉することを回避しつつ、天井搬送車10の走行開始時間を早めることができ、物品2の移載に要する時間を短縮できる。なお、図12では、バッファ部32に2個の物品2を載置する形態を示しているが、バッファ部32として物品2を3個以上並べて載置する形態であっても上記と同様である。 As shown in FIG. 12, the overhead traveling vehicle 10 starts the retracting operation of the elevating drive unit 14 by the laterally extending mechanism 11 while stopping at the stop position P3, and the traveling unit 5 travels while continuing the storing operation at the timing T2. To start. In addition, as shown in FIG. 12, in the intermediate position between the stop position P10 and the position P11, the retracting operation of the elevating drive unit 14 by the lateral take-out mechanism 11 is performed. In addition, at the stage where the ceiling transport vehicle 10 reaches the position P11 where it reaches the hanging bracket 34, the retracting operation of the elevating drive unit 14 is completed. Therefore, even after the article 2 is transferred to the buffer unit 32, the traveling of the ceiling transport vehicle 10 and the storing operation of the elevating drive unit 14 can be partially overlapped. According to this example, the traveling start time of the ceiling transport vehicle 10 can be shortened while avoiding the lifting drive unit 14 from interfering with the hanging bracket 34, and the time required for transferring the article 2 can be shortened. 12 shows a form in which two articles 2 are placed in the buffer unit 32, but the same applies to a form in which three or more articles 2 are placed side by side as the buffer part 32. .
 図13は、天井搬送車システム200の他の例を示す図である。なお、図13において、上記した実施形態と同様の部材には同様の符号を付してその説明を省略または簡略化する。図13に示すように、天井搬送車システム200は、軌道6、6Aが上下2段に設けられており、かつ2列に並んで(Y方向に並んで)配置されている。天井搬送車10は、各軌道6、6Aを走行可能である。 FIG. 13 is a diagram showing another example of the ceiling guided vehicle system 200. In FIG. 13, members similar to those in the above-described embodiment are denoted by the same reference numerals, and description thereof is omitted or simplified. As shown in FIG. 13, in the ceiling guided vehicle system 200, the tracks 6 and 6A are provided in two upper and lower stages, and are arranged in two rows (in the Y direction). The overhead transport vehicle 10 can travel on the tracks 6 and 6A.
 上段2列の軌道6、6Aは、それぞれ天井18に取り付けられる。下段の軌道6Aは、吊り金具134によって天井18に吊り下げられたフレーム132に取り付けられる。フレーム132は、軌道6の下方に配置された構造物である。また、バッファ部32は、フレーム132から吊り金具34を介して構造物であるフレーム33が吊り下げられて設けられる。フレーム33は、吊り金具134、フレーム132、及び吊り金具34により天井から吊り下げられている。 The upper two rows of tracks 6 and 6A are attached to the ceiling 18 respectively. The lower track 6 </ b> A is attached to a frame 132 that is suspended from the ceiling 18 by a suspension fitting 134. The frame 132 is a structure disposed below the track 6. The buffer unit 32 is provided by suspending a frame 33 that is a structure from a frame 132 via a hanging metal fitting 34. The frame 33 is suspended from the ceiling by the suspension fitting 134, the frame 132, and the suspension fitting 34.
 また、天井搬送車システム200は、各部を統括的に制御するコントローラ120を有する。コントローラ120は、地上に設置されてもよいし、各天井搬送車10に搭載されてもよい。コントローラ120は、上記したコントローラ20と同様に、天井搬送車10の走行中に昇降駆動部14の突出又は格納の動作を行わせるか否かを判断する。また、コントローラ120は、上記したコントローラ20と同様に、障害物に関する情報を取得するが、この天井搬送車システム200では、上段の軌道6を走行する天井搬送車10おいて、障害物として吊り金具134が存在する。なお、下段かつ左側(-Y側)の軌道6Aを走行する天井搬送車10において、障害物としてバッファ部32の吊り金具34が障害物となる点は天井搬送車システム100と同様である。 Also, the overhead transport vehicle system 200 has a controller 120 that controls each part in an integrated manner. The controller 120 may be installed on the ground or mounted on each ceiling transport vehicle 10. Similarly to the controller 20 described above, the controller 120 determines whether or not the raising / lowering drive unit 14 is allowed to project or retract during the traveling of the overhead conveyance vehicle 10. In addition, the controller 120 acquires information related to the obstacle as in the case of the controller 20 described above. However, in the ceiling transport vehicle system 200, the ceiling transport vehicle 10 traveling on the upper track 6 is suspended as an obstacle. 134 exists. It should be noted that the ceiling transport vehicle 10 traveling on the lower and left (−Y side) track 6A is the same as the ceiling transport system 100 in that the suspension bracket 34 of the buffer 32 becomes an obstacle as an obstacle.
 コントローラ120は、吊り金具34、バッファ部32上の物品2、吊り金具134について、障害物となるかを判断することができる。したがって、上段2列の軌道6を走行する天井搬送車10について、吊り金具134が設けられる位置では、コントローラ120は、例えば、天井搬送車10の走行中に昇降駆動部14の突出又は格納の動作をオーバーラップさせないように制御する。 The controller 120 can determine whether the suspension fitting 34, the article 2 on the buffer 32, and the suspension fitting 134 are obstacles. Therefore, for the ceiling transport vehicle 10 traveling on the upper two rows of tracks 6, at the position where the suspension metal fitting 134 is provided, the controller 120, for example, protrudes or retracts the lifting drive unit 14 while the ceiling transport vehicle 10 travels. Is controlled so as not to overlap.
 また、下段かつ右側(+Y側)の軌道6Aを走行する天井搬送車10について、コントローラ120は、吊り金具34、134等の障害物がないため、天井搬送車10の走行中に昇降駆動部14の突出又は格納の動作をオーバーラップさせることが可能となる。また、下段かつ左側(-Y側)の軌道6Aを走行する天井搬送車10について、吊り金具34が設けられる位置では、コントローラ120は、例えば、天井搬送車10の走行中に昇降駆動部14の突出又は格納の動作をオーバーラップさせないように制御する。なお、図13に示すような構成において、上側の軌道6を走行する天井搬送車10については、吊り金具134が障害物となるため、上記したオーバーラップさせる制御を一律に非実行としてもよい。また、下側の軌道6A(+Y側の軌道6A)を走行する天井搬送車10Aについては、ロードポート31が設けられた側(+Y側)に吊り金具34、134等の障害物がないため、ロードポート31が設けられた側への昇降駆動部14の突出または格納の動作については、コントローラ20により、障害物があるか否かの判断(例えば、図3のステップS04または図8のステップS22)をすることなく、上記したオーバーラップさせる制御を一律に実行するようにしてもよい。 Further, with respect to the ceiling transport vehicle 10 that travels on the lower and right (+ Y side) track 6A, the controller 120 has no obstacles such as the hanging brackets 34, 134. It is possible to overlap the protruding or retracting operations. In addition, for the ceiling transport vehicle 10 that travels on the lower and left (−Y side) track 6A, at the position where the suspension bracket 34 is provided, the controller 120, for example, moves the elevating drive unit 14 while the ceiling transport vehicle 10 is traveling. Control so that the protruding or retracting operations do not overlap. In the configuration as shown in FIG. 13, for the overhead transport vehicle 10 traveling on the upper track 6, the hanging bracket 134 becomes an obstacle, and thus the overlapping control described above may be uniformly executed. In addition, for the overhead traveling vehicle 10A traveling on the lower track 6A (+ Y side track 6A), there is no obstacle such as the hanging brackets 34, 134 on the side where the load port 31 is provided (+ Y side). With respect to the operation of projecting or retracting the ascending / descending drive unit 14 to the side where the load port 31 is provided, the controller 20 determines whether there is an obstacle (for example, step S04 in FIG. 3 or step S22 in FIG. 8). The above overlapping control may be executed uniformly without performing the above.
 このように、本実施形態に係る天井搬送車システム100、200または天井搬送車10の制御方法によれば、横出し機構11による昇降駆動部14の移動を、走行部5の走行とオーバーラップさせることができる。この例により、天井搬送車10が停止した後に昇降駆動部14の横出しを行う場合、または、昇降駆動部14を本体部3に格納した後に走行部5の走行を開始する場合と比較して、物品2の移載に要する時間を短縮できる。 As described above, according to the control method of the ceiling transport vehicle system 100, 200 or the ceiling transport vehicle 10 according to the present embodiment, the movement of the elevating drive unit 14 by the laterally extending mechanism 11 is overlapped with the travel of the traveling unit 5. be able to. According to this example, compared to the case where the lifting drive unit 14 is laterally moved after the ceiling conveyance vehicle 10 is stopped, or the traveling unit 5 is started to travel after the lifting drive unit 14 is stored in the main body unit 3. The time required for transferring the article 2 can be shortened.
 以上、実施形態について説明したが、本発明は、上述した説明に限定されなく、本発明の要旨を逸脱しない範囲において種々の変更が可能である。例えば、上記した実施形態において、天井搬送車10の構成は一例であって、天井18近傍を走行して物品2を搬送可能であり、かつ、物品2を昇降する昇降駆動部14を横出しすることが可能な任意の構成が適用可能である。また、法令で許容される限りにおいて、日本特許出願である特願2016-217839、及び本明細書で引用した全ての文献、の内容を援用して本文の記載の一部とする。 As mentioned above, although embodiment was described, this invention is not limited to description mentioned above, A various change is possible in the range which does not deviate from the summary of this invention. For example, in the above-described embodiment, the configuration of the ceiling transport vehicle 10 is only an example, and the elevator 2 that travels in the vicinity of the ceiling 18 can transport the article 2 and moves the article 2 up and down is set sideways. Any possible configuration is applicable. In addition, to the extent permitted by law, the contents of Japanese Patent Application No. 2016-217839, which is a Japanese patent application, and all the references cited in this specification are incorporated herein by reference.
 P1、P4・・・突出動作開始位置
 P3・・・停止位置
 2・・・物品
 3・・・本体部
 5・・・走行部
 6・・・軌道
 10・・・天井搬送車
 11・・・横出し機構
 13・・・物品保持部
 14・・・昇降駆動部
 14P・・・突出位置
 14R・・・格納位置
 18・・・天井
 20、120・・・コントローラ
 21・・・導出部
 22・・・記憶部
 30・・・処理装置
 31・・・ロードポート(移載位置)
 32・・・バッファ部(保管装置)
 33、132・・・フレーム(構造物)
 34、134・・・吊り金具
 100、200・・・天井搬送車システム
P1, P4 ... Projection operation start position P3 ... Stop position 2 ... Article 3 ... Body part 5 ... Traveling part 6 ... Track 10 ... Ceiling transport car 11 ... Horizontal Unloading mechanism 13 ... Article holding part 14 ... Elevating drive part 14P ... Projection position 14R ... Storage position 18 ... Ceiling 20, 120 ... Controller 21 ... Deriving part 22 ... Storage unit 30 ... Processing device 31 ... Load port (transfer position)
32 ... Buffer unit (storage device)
33, 132 ... Frame (structure)
34, 134 ... Suspension metal fittings 100, 200 ... Ceiling carrier system

Claims (11)

  1.  天井または天井近傍に敷設された軌道を走行する走行部と、
     前記走行部の下側に設けられる本体部と、
     物品を吊り下げた状態で保持する物品保持部と、
     前記物品保持部を昇降させる昇降駆動部と、
     前記昇降駆動部を、前記本体部内に格納する格納位置と、前記本体部から前記軌道の側方に突出する突出位置との間で移動させる横出し機構と、
     前記軌道の下方から側方にずれて配置された物品の移載位置に対して前記走行部が停止する前に、前記横出し機構により前記突出位置に向けて前記昇降駆動部の移動を開始させ、または、前記横出し機構により前記昇降駆動部が前記格納位置に戻る前に、前記移載位置に対応して停止している前記走行部の走行を開始させるコントローラと、を備える、天井搬送車。
    A traveling unit that travels on a track laid on or near the ceiling; and
    A main body provided on the lower side of the traveling unit;
    An article holding unit for holding the article in a suspended state;
    An elevating drive unit for elevating the article holding unit;
    A lateral movement mechanism for moving the elevating drive unit between a storage position for storing the elevating drive unit in the main body unit and a projecting position projecting to the side of the track from the main body unit;
    Before the traveling unit stops with respect to the transfer position of the article arranged to be shifted laterally from the lower side of the track, the lateral drive mechanism starts the movement of the elevating drive unit toward the protruding position. Or a controller that starts the traveling of the traveling unit stopped corresponding to the transfer position before the elevating drive unit returns to the retracted position by the laterally extending mechanism. .
  2.  前記コントローラは、前記走行部が前記移載位置に対応して停止した時点で前記昇降駆動部が前記突出位置に配置されているように、前記走行部の走行中に前記横出し機構の駆動開始を指示する、請求項1に記載の天井搬送車。 The controller starts driving the lateral mechanism during the traveling of the traveling unit so that the elevating drive unit is disposed at the protruding position when the traveling unit stops corresponding to the transfer position. The overhead conveyance vehicle according to claim 1, wherein
  3.  前記コントローラは、前記走行部が前記移載位置に対応した位置から走行を開始する時点で、前記突出位置の前記昇降駆動部を前記格納位置に向けて前記横出し機構の駆動開始を指示する、請求項1に記載の天井搬送車。 The controller instructs the start of driving of the lateral mechanism toward the retracted position when the traveling unit starts traveling from a position corresponding to the transfer position, with the elevation driving unit at the protruding position toward the storage position. The overhead conveyance vehicle according to claim 1.
  4.  前記コントローラは、前記走行部の走行中に、突出した状態の前記昇降駆動部、前記物品保持部、及び前記物品保持部に保持された物品の少なくとも1つが接触可能な障害物が存在する場合、前記走行部の走行中において前記横出し機構の駆動を実行しない、請求項1から請求項3のいずれか1項に記載の天井搬送車。 When there is an obstacle that can contact at least one of the raised and lowered drive unit, the article holding unit, and the article held by the article holding unit in a projecting state while the controller is running, The overhead conveyance vehicle according to any one of claims 1 to 3, wherein the lateral drive mechanism is not driven while the traveling unit is traveling.
  5.  前記コントローラは、前記走行部の走行中に、突出した状態の前記昇降駆動部、前記物品保持部、及び前記物品保持部に保持された物品の少なくとも1つが接触可能な障害物が存在する場合、前記障害物との接触がない所定範囲において前記横出し機構の駆動を指示する、請求項1から請求項3のいずれか1項に記載の天井搬送車。 When there is an obstacle that can contact at least one of the raised and lowered drive unit, the article holding unit, and the article held by the article holding unit in a projecting state while the controller is running, The overhead conveyance vehicle of any one of Claims 1-3 which instruct | indicates the drive of the said horizontal extension mechanism in the predetermined range which does not contact with the said obstruction.
  6.  前記コントローラは、前記走行部が前記障害物を超えた位置から前記横出し機構の駆動開始を指示する、請求項5に記載の天井搬送車。 The overhead conveyance vehicle according to claim 5, wherein the controller instructs the start of driving of the laterally extending mechanism from a position where the traveling unit exceeds the obstacle.
  7.  前記コントローラは、前記走行部の走行中に、突出した状態の前記昇降駆動部、前記物品保持部、及び前記物品保持部に保持された物品の少なくとも1つが接触可能な障害物が存在する場合、前記移載位置に対応した位置に停止している前記走行部が前記障害物に達するまでの時間から、前記突出位置にある前記昇降駆動部が前記格納位置まで移動する時間を減算した減算時間を求め、前記走行部の停止中に前記突出位置の前記昇降駆動部を前記格納位置に向けて前記横出し機構の駆動を開始させ、前記横出し機構の駆動開始から前記減算時間が経過したタイミングで前記走行部の走行開始を指示する、請求項1から請求項3のいずれか1項に記載の天井搬送車。 When there is an obstacle that can contact at least one of the raised and lowered drive unit, the article holding unit, and the article held by the article holding unit in a projecting state while the controller is running, A subtraction time obtained by subtracting the time for the elevating drive unit at the protruding position to move to the storage position from the time until the traveling unit stopped at the position corresponding to the transfer position reaches the obstacle. The drive of the lateral drive mechanism is started while the traveling drive unit is stopped while the elevation drive unit at the protruding position is directed toward the retracted position, and the subtraction time has elapsed from the start of the drive of the horizontal drive mechanism. The overhead conveyance vehicle of any one of Claims 1-3 which instruct | indicates the driving | running | working start of the said driving | running | working part.
  8.  前記障害物は、前記軌道の下方に配置される構造物を天井から吊り下げるための吊り下げ金具である、請求項4から請求項7のいずれか1項に記載の天井搬送車。 The ceiling transport vehicle according to any one of claims 4 to 7, wherein the obstacle is a hanging metal fitting for suspending a structure disposed below the track from the ceiling.
  9.  前記構造物は、物品を載置可能な保管装置であり、
     前記障害物は、前記保管装置に載置された物品である、請求項8に記載の天井搬送車。
    The structure is a storage device on which an article can be placed,
    The overhead conveyance vehicle according to claim 8, wherein the obstacle is an article placed on the storage device.
  10.  前記コントローラは、前記走行部の走行中に前記横出し機構の突出動作を開始する位置、または、前記横出し機構の格納動作中に前記走行部の走行を開始するタイミングに関する情報を記憶する記憶部を有する、請求項1から請求項9のいずれか1項に記載の天井搬送車。 The controller stores information relating to a position at which the protruding operation of the lateral mechanism starts during the traveling of the traveling unit, or information regarding a timing at which the traveling unit starts traveling during the storing operation of the lateral mechanism. The overhead conveyance vehicle of any one of Claims 1-9 which has these.
  11.  天井または天井近傍に敷設された軌道を走行する走行部と、
     前記走行部の下側に設けられる本体部と、
     物品を吊り下げた状態で保持する物品保持部と、
     前記物品保持部を昇降させる昇降駆動部と、
     前記昇降駆動部を、前記本体部内に格納する格納位置と、前記本体部から前記軌道の側方に突出する突出位置との間で移動させる横出し機構と、を備える天井搬送車の制御方法であって、
     前記軌道の下方から側方にずれて配置された物品の移載位置に対して前記走行部が停止する前に、前記横出し機構により前記突出位置に向けて前記昇降駆動部の移動を開始させること、または、前記横出し機構により前記昇降駆動部が前記格納位置に戻る前に、前記移載位置に対応して停止している前記走行部の走行を開始させること、を含む、天井搬送車の制御方法。
    A traveling unit that travels on a track laid on or near the ceiling; and
    A main body provided on the lower side of the traveling unit;
    An article holding unit for holding the article in a suspended state;
    An elevating drive unit for elevating the article holding unit;
    A control method for a ceiling transport vehicle comprising: a lifting mechanism that moves the elevating drive unit between a storage position for storing the elevating drive unit in the main body and a protruding position that protrudes from the main body to the side of the track. There,
    Before the traveling unit stops with respect to the transfer position of the article that is shifted from the lower side of the track to the side, the lateral drive mechanism starts the movement of the lifting drive unit toward the protruding position. Or starting the traveling of the traveling unit stopped corresponding to the transfer position before the elevating drive unit returns to the retracted position by the laterally extending mechanism. Control method.
PCT/JP2017/036602 2016-11-08 2017-10-10 Overhead transport vehicle and method for controlling overhead transport vehicle WO2018088089A1 (en)

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