WO2018038005A1 - Système d'alimentation en liquide - Google Patents

Système d'alimentation en liquide Download PDF

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Publication number
WO2018038005A1
WO2018038005A1 PCT/JP2017/029592 JP2017029592W WO2018038005A1 WO 2018038005 A1 WO2018038005 A1 WO 2018038005A1 JP 2017029592 W JP2017029592 W JP 2017029592W WO 2018038005 A1 WO2018038005 A1 WO 2018038005A1
Authority
WO
WIPO (PCT)
Prior art keywords
bellows
shaft
cylindrical member
supply system
liquid supply
Prior art date
Application number
PCT/JP2017/029592
Other languages
English (en)
Japanese (ja)
Inventor
森　浩一
Original Assignee
イーグル工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by イーグル工業株式会社 filed Critical イーグル工業株式会社
Priority to KR1020197004204A priority Critical patent/KR20190026900A/ko
Priority to US16/327,087 priority patent/US20190211816A1/en
Priority to EP17843487.4A priority patent/EP3505760A4/fr
Priority to CN201780050106.4A priority patent/CN109563826B/zh
Priority to JP2018535635A priority patent/JPWO2018038005A1/ja
Publication of WO2018038005A1 publication Critical patent/WO2018038005A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/084—Machines, pumps, or pumping installations having flexible working members having tubular flexible members the tubular member being deformed by stretching or distortion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/088—Machines, pumps, or pumping installations having flexible working members having tubular flexible members with two or more tubular flexible members in series
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/11—Kind or type liquid, i.e. incompressible

Definitions

  • the present invention relates to a liquid supply system including a bellows.
  • a technique using a bellows is known to form a sealed space between a reciprocating shaft and a cylindrical member through which the shaft is inserted.
  • one end of the bellows is fixed to the shaft, and the other end is fixed to the cylindrical member.
  • the shaft and the cylindrical member may rotate slightly relative to each other due to the system mechanism.
  • the bellows may be twisted to cause twisting and buckling.
  • the smaller the diameter of the bellows the more likely to be twisted and buckled.
  • stress is concentrated locally, and the fatigue life of the bellows may be shortened.
  • An object of the present invention is to provide a liquid supply system in which the occurrence of twisting of the bellows is suppressed.
  • the present invention employs the following means in order to solve the above problems.
  • the liquid supply system of the present invention is A container, A shaft arranged from the exterior to the interior of the container and configured to reciprocate by a drive source; A cylindrical member provided inside the container and through which the shaft is inserted; A first bellows fixed to the shaft and extending and contracting as the shaft reciprocates; A second bellows that expands and contracts with the reciprocating movement of the shaft, forms a pump chamber with the first bellows, and has an outer diameter smaller than the outer diameter of the first bellows; A liquid supply system comprising: One end side of the second bellows is fixed to one side of the shaft and the cylindrical member, The other end of the second bellows is positioned in a state in which movement in the circumferential direction is allowed with respect to the other side of the shaft and the cylindrical member.
  • one end side of the second bellows is fixed to one side of the shaft and the cylindrical member, whereas the other end side is the other of the shaft and the cylindrical member. It is positioned in a state in which movement in the circumferential direction is allowed with respect to the side. Therefore, even if the shaft and the cylindrical member rotate relatively, the second bellows can be prevented from being twisted, and the fluid in the pump chamber can be prevented from leaking due to the second bellows breaking. .
  • a seal portion is provided at the other end of the second bellows, and the seal portion seals the fluid by contacting the other side of the shaft and the cylindrical member,
  • the area of the seal part may be formed larger than the effective area of the second bellows.
  • a third bellows that expands and contracts with the reciprocating movement of the shaft and forms a sealed space between the cylindrical member and the second bellows is provided, and the liquid sent from the pump chamber is contained in the sealed space. It is good that a part is supplied.
  • a region opposite to the pump chamber is formed as a sealed space with respect to the seal portion, and the fluid discharged from the pump is supplied to the sealed space. Therefore, the pressure on the sealed space side can always be higher than the pressure on the pump chamber side in the seal portion, and the sealed state can be maintained while preventing the second bellows from being twisted.
  • One end side of the third bellows is fixed to one side of the shaft and the cylindrical member,
  • the other end side of the third bellows may be positioned in a state in which movement in the circumferential direction is allowed with respect to the other side of the shaft and the cylindrical member.
  • the occurrence of twisting of the bellows can be suppressed.
  • FIG. 1 is a schematic configuration diagram showing a usage state of a liquid supply system according to an embodiment of the present invention.
  • FIG. 2 is a schematic cross-sectional view showing the sealing structure according to the first embodiment of the present invention.
  • FIG. 3 is a schematic cross-sectional view showing a sealing structure according to Embodiment 2 of the present invention.
  • FIG. 4 is a schematic cross-sectional view showing a sealing structure according to Embodiment 3 of the present invention.
  • FIG. 5 is a schematic cross-sectional view showing a sealing structure according to Embodiment 4 of the present invention.
  • FIG. 6 is a schematic configuration diagram showing a usage state of the liquid supply system according to the modified example of the present invention.
  • liquid supply system With reference to FIG. 1, the overall configuration and usage method of a liquid supply system 100 (circulator) according to an embodiment of the present invention will be described.
  • the ultra-low temperature liquid L is supplied to the cooled apparatus 500 in which the superconducting coil 520 is provided inside the resin container 510
  • Specific examples of the ultra-low temperature liquid L include liquid nitrogen, liquid helium, and liquid argon.
  • the liquid supply system 100 includes a container (first container 110) in which ultra-low temperature liquid L is stored, a second container 120 disposed in the liquid L stored in the first container 110, and the interior of the second container 120. And a first bellows 130 disposed so as to enter.
  • the first pump chamber P ⁇ b> 1 is configured by a region outside the first bellows 130 in the second container 120.
  • the inside of the first bellows 130 is also a sealed space, and this sealed space is the second pump chamber P2.
  • the first bellows 130 is made of metal.
  • the inside of the first container 110 may be evacuated without containing the liquid. However, in that case, a return passage (return passage K2 described later) for returning the fluid into the first container 110 and an intake port (first inlet 121 and second suction described later) for sucking liquid into the second container 120. Port 123).
  • the second container 120 includes a first suction port 121 that sucks the liquid L in the first container 110 into the first pump chamber P1, and the sucked liquid L from the first pump chamber P1 to the outside of the system. There is provided a first outlet 122 for feeding to a supply passage (supply pipe) K1 that communicates. Further, the second container 120 has a second suction port 123 for sucking the liquid L in the first container 110 into the second pump chamber P2, and the sucked liquid L from the second pump chamber P2 to the supply passage K1. A second delivery outlet 124 for delivery is also provided.
  • the first suction port 121 and the second suction port 123 are respectively provided with one-way valves 121a and 123a, and the first and second delivery ports 122 and 124 are also provided with one-way valves 122a and 124a, respectively. Is provided.
  • a metal shaft 150 configured to reciprocate by a linear actuator 140 as a drive source is disposed so as to reach from the outside to the inside of the first container 110.
  • the tip of the shaft 150 is fixed to the tip of the first bellows 130.
  • the first bellows 130 expands and contracts as the shaft 150 reciprocates.
  • a buffer structure 160 for buffering fluctuations (pulsations) in the pressure of the liquid L supplied through the supply passage K1 is provided around the shaft 150.
  • the buffer structure 160 is provided inside the first container 110 and has a cylindrical (preferably cylindrical) cylindrical member 161 into which the shaft 150 is inserted, and a lower end portion and an upper end portion of the cylindrical member 161, respectively.
  • a second bellows 200 and a third bellows 300 are provided.
  • the second bellows 200 and the third bellows 300 are both made of metal.
  • the first bellows 130 is fixed to the shaft 150 at a position farthest from the drive source side (linear actuator 140 side).
  • the second bellows 200 is configured to expand and contract as the shaft 150 reciprocates and to form a sealed space with the first bellows 130. This sealed space corresponds to the second pump chamber P2 described above. Further, the outer diameter of the second bellows 200 is configured to be smaller than the outer diameter of the first bellows 130.
  • the third bellows 300 is also configured to expand and contract as the shaft 150 reciprocates, and the outer diameter of the third bellows 300 is also smaller than the outer diameter of the first bellows 130.
  • the cylindrical member 161, the second bellows 200, and the third bellows 300 form a sealed space R.
  • a layer of liquid L and a layer of gas G in which the liquid L is vaporized are formed.
  • a branch passage K3 branched from the supply passage K1 is provided so as to be connected to the sealed space R.
  • the pressure of the liquid L supplied through the supply passage K1 is also applied in the sealed space R, the gas inside the sealed space R functions as a damper, and the pressure of the liquid L supplied through the supply passage K1 is reduced.
  • Variation (pulsation) can be buffered. That is, the inside of the sealed space R is a damper chamber.
  • the buffer structure 160 is provided with a safety valve 162 near the third bellows 300 for releasing the internal pressure to the outside when the pressure in the sealed space R exceeds a predetermined value. .
  • a safety valve 162 near the third bellows 300 for releasing the internal pressure to the outside when the pressure in the sealed space R exceeds a predetermined value.
  • the second bellows 200 is provided on the upper end side of the first bellows 130 as described above so that the inside of the first bellows 130 becomes a sealed space. As described above, this sealed space is the second pump chamber P2.
  • the liquid L is sent from the second pump chamber P2 to the supply passage K1 through the second delivery port 124, and the liquid L is delivered through the first suction port 121. It is sucked into the first pump chamber P1.
  • the liquid L is sucked into the second pump chamber P2 through the second suction port 123, and the liquid L is discharged from the first pump chamber P1 through the first outlet 122. It is sent out to the supply passage K1.
  • the liquid L is delivered to the supply passage K1 when the bellows 130 is contracted and expanded.
  • the liquid L is supplied to the apparatus 500 to be cooled through the supply passage K ⁇ b> 1 by repeating the expansion and contraction operation of the first bellows 130.
  • a return passage (return pipe) K2 that connects the liquid supply system 100 and the cooled device 500 is also provided, and the liquid L returns to the liquid supply system 100 by the amount supplied to the cooled device 500.
  • a cooler 400 that cools the liquid L to an ultra-low temperature state is provided in the middle of the supply passage K1. With such a configuration, the liquid L cooled to an ultra-low temperature by the cooler 400 circulates between the liquid supply system 100 and the cooled apparatus 500.
  • the shaft 150 and the cylindrical member 161 may slightly rotate due to the system mechanism. Therefore, in particular, in the second bellows 200 and the third bellows 300 having a small diameter, there is a possibility that torsional buckling may occur. Therefore, the liquid supply system 100 according to the present embodiment employs a structure in which the second bellows 200 and the third bellows 300 are less likely to be twisted and buckled.
  • one end side of the second bellows 200 is fixed to one side of the shaft 150 and the cylindrical member 161.
  • the other end side of the second bellows 200 is positioned in a state in which movement in the circumferential direction is allowed with respect to the other side of the shaft 150 and the cylindrical member 161. Therefore, even if the shaft 150 and the cylindrical member 161 rotate relatively, the second bellows 200 is prevented from being twisted.
  • one end side of the third bellows 300 is fixed to one side of the shaft 150 and the cylindrical member 161.
  • the other end side of the third bellows 300 is positioned in a state in which movement in the circumferential direction is allowed with respect to the other side of the shaft 150 and the cylindrical member 161. Therefore, even if the shaft 150 and the tubular member 161 rotate relatively, the third bellows 300 is prevented from being twisted.
  • Example 1 With reference to FIG. 2, the sealing structure which concerns on Example 1 of this invention is demonstrated.
  • FIG. 2 is a schematic cross-sectional view showing the sealing structure according to the first embodiment of the present invention.
  • one end of the second bellows 200 is fixed to the outward flange portion 151 provided on the shaft 150.
  • a metal valve body 210 is fixed to the other end of the second bellows 200.
  • the tubular member 161 is provided with an inward flange portion 161a.
  • An end face on the sealed space R side of the inward flange portion 161a is a valve seat 161a1.
  • An annular protrusion 211 serving as a seal portion is provided on the valve seat 161a1 side of the valve body 210. When the annular protrusion 211 is seated on the valve seat 161a1, the valve is closed.
  • one end side of the second bellows 200 is fixed to the shaft 150.
  • the valve body 210 provided at the other end of the second bellows 200 is configured to be slidable in the rotational direction with respect to the valve seat 161a1. That is, the other end side of the second bellows 200 is positioned in a state where movement in the circumferential direction is allowed with respect to the tubular member 161. Therefore, even if the shaft 150 and the cylindrical member 161 rotate relatively, the second bellows 200 is prevented from being twisted.
  • the valve body 210 or the surface of the valve seat 161a1 is lubricated with PTFE coating or the like so that the valve body 210 and the valve seat 161a1 can easily slide.
  • the portion that separates the inside and the outside of the second bellows 200 by the fixing portion between the other end of the second bellows 200 and the valve body 210 is circular, and the valve body 210 is in contact with the valve seat 161a1.
  • the tip of the annular projection 211 as a sealing portion is also circular.
  • the diameter D2 of the circle of the seal portion is designed to be larger than the effective diameter D1 of the second bellows 200. That is, the area of the seal portion is designed to be larger than the effective area of the second bellows 200. Thereby, the sealing performance can be stably obtained by the valve body 210. This point will be described in more detail.
  • the inner side of the second bellows 200 constitutes a second pump chamber P2, and the outer side of the second bellows 200 constitutes a damper chamber (sealed space R). Since the fluid pressure PX in the second pump chamber P2 is the pump chamber, the internal pressure fluctuates, and the maximum pressure is the discharge pressure in the liquid supply system. On the other hand, the fluid pressure PY in the damper chamber is almost maintained at the discharge pressure because the pressure of the fluid supplied from the first pump chamber P1 and the second pump chamber P2 acts. That is, PY ⁇ PX is always maintained.
  • Example 2 With reference to FIG. 3, the sealing structure which concerns on Example 2 of this invention is demonstrated. Also in this embodiment, a specific example of a sealing structure including the second bellows 200 is shown.
  • FIG. 3 is a schematic cross-sectional view showing a sealing structure according to Embodiment 2 of the present invention.
  • one end side of the second bellows 200 is fixed to the inward flange portion 161b provided in the tubular member 161. More specifically, a flat metal annular member 230 is fixed to one end of the second bellows 200, and the annular member 230 is fixed to the inward flange portion 161b.
  • a metal valve body 220 is fixed to the other end of the second bellows 200.
  • the shaft 150 is provided with an outward flange portion 152.
  • An end face of the outward flange portion 152 on the second pump chamber P2 side is a valve seat 152a.
  • An annular protrusion 221 is provided as a seal portion on the valve seat 152a side of the valve body 220. When the annular protrusion 221 is seated on the valve seat 152a, the valve is closed.
  • one end side of the second bellows 200 is fixed to the cylindrical member 161.
  • the valve body 220 provided at the other end of the second bellows 200 is configured to be slidable in the rotational direction with respect to the valve seat 152a. That is, the other end side of the second bellows 200 is positioned in a state in which movement in the circumferential direction is allowed with respect to the shaft 150. Therefore, even if the shaft 150 and the cylindrical member 161 rotate relatively, the second bellows 200 is prevented from being twisted.
  • the portion that separates the inside and the outside of the second bellows 200 by the fixing portion between the other end of the second bellows 200 and the valve body 220 is circular, and the valve body 220 is in contact with the valve seat 152a.
  • the tip of the annular protrusion 221 serving as a sealing portion is also circular.
  • the diameter D4 of the circle of the seal portion is designed to be larger than the effective diameter D3 of the second bellows 200.
  • Example 3 With reference to FIG. 4, the sealing structure which concerns on Example 3 of this invention is demonstrated. Also in this embodiment, a specific example of a sealing structure including the second bellows 200 is shown.
  • FIG. 4 is a schematic cross-sectional view showing a sealing structure according to Embodiment 3 of the present invention.
  • one end of the second bellows 200 is fixed to the outward flange portion 153 provided on the shaft 150.
  • a metal seal holding member 240 is fixed to the other end of the second bellows 200.
  • the seal holding member 240 has a configuration in which an annular groove 241 is formed on the outer peripheral surface side of an annular member having a rectangular cross section.
  • a seal ring 250 that exhibits a self-seal function is attached to the annular groove 241.
  • a portion of the annular groove 241 where the seal ring 250 is in close contact corresponds to a seal portion. That is, the part seals the fluid by contacting the seal ring 250 on the cylindrical member 161 side.
  • a V-ring having a V-shaped cross section is shown as an example of the seal ring 250.
  • the seal ring 250 is not limited to the V-ring, and various seal rings that exhibit a self-sealing function, such as a U-ring having a U-shaped section and a D-ring having a D-shaped section, can be applied.
  • a thin metal or the like can be applied in addition to a resin such as PTFE or PI.
  • the cylindrical member 161 is provided with an inward flange portion 161c.
  • the inward flange portion 161c and the seal holding member 240 are not fixed. That is, the seal holding member 240 is configured to be slidable with respect to the inward flange portion 161c.
  • the seal ring 250 and the inner peripheral surface of the cylindrical member 161 are also slidable.
  • one end side of the second bellows 200 is fixed to the shaft 150.
  • the seal holding member 240 provided at the other end of the second bellows 200 is configured to be slidable in the rotational direction with respect to the inward flange portion 161c of the cylindrical member 161.
  • the seal ring 250 and the inner peripheral surface of the cylindrical member 161 are also slidable. That is, the other end side of the second bellows 200 is positioned in a state where movement in the circumferential direction is allowed with respect to the tubular member 161. Therefore, even if the shaft 150 and the cylindrical member 161 rotate relatively, the second bellows 200 is prevented from being twisted.
  • lubrication treatment such as PTFE coating or silver plating is performed on the surface of the seal ring 250 or the inner peripheral surface of the cylindrical member 161 so that the seal ring 250 and the inner peripheral surface of the cylindrical member 161 can easily slide. Is preferable.
  • the portion that separates the inside and the outside of the second bellows 200 by the fixing portion between the other end of the second bellows 200 and the seal holding member 240 is circular.
  • the inner diameter D6 of the annular groove 241 formed in the seal holding member 240 is designed to be larger than the effective diameter D5 of the second bellows 200. Thereby, it can suppress that the seal holding member 240 leaves
  • one end side of the second bellows 200 is fixed with respect to the shaft 150, and the other end side of the second bellows 200 is positioned with respect to the cylindrical member 161 being allowed to move in the circumferential direction. Showed the case. However, one end side of the second bellows 200 is fixed to the cylindrical member 161, and a seal holding member that holds a seal ring having a self-function is provided at the other end of the second bellows 200. It can also be configured to be slidable with respect to 150.
  • Example 4 With reference to FIG. 5, the sealing structure based on Example 4 of this invention is demonstrated. In this embodiment, a specific example of a sealing structure including the third bellows 300 is shown.
  • FIG. 5 is a schematic cross-sectional view showing a sealing structure according to Embodiment 4 of the present invention.
  • one end side of the third bellows 300 is fixed to the cylindrical member 161. More specifically, one end of each of the cylindrical member 161 and the third bellows 300 is directly fixed to the first container 110, so that one end of the third bellows 300 is fixed to the cylindrical member 161. Is fixed.
  • a metal seal holding member 310 is fixed to the other end of the third bellows 300.
  • the seal holding member 310 has a configuration in which an outward flange portion 311 is provided on one end side of the cylindrical member, and an annular groove 312 is provided on the inner peripheral surface of the other end side of the cylindrical member.
  • the other end of the third bellows 300 is fixed to the outward flange portion 311 of the seal holding member 310.
  • a rubber-like elastic seal ring 320 is mounted in the annular groove 312 of the seal holding member 310.
  • an O-ring having a circular cross section is shown as an example of the seal ring 320.
  • the seal ring 320 is not limited to the O-ring, and various seal rings such as a square ring having a rectangular cross section can be applied. Further, since the seal ring 320 is in an environment exposed to the atmosphere, there is no particular problem even if a rubber material is used.
  • the shaft 150 has a large diameter portion 154 on the inner side of the first container 110 and a small diameter portion 155 on the outer side (atmosphere side) of the first container 110.
  • the small-diameter portion 155 is inserted through the cylindrical seal holding member 310.
  • the seal holding member 310 is arranged so that the step surface between the large diameter portion 154 and the small diameter portion 155 and the end surface of the outward flange portion 311 face each other.
  • a gap is provided between the step surface and the end surface of the outward flange portion 311. In addition, even if this level
  • the seal holding member 310 is positioned with respect to the shaft 150 by a restraining force with respect to the shaft 150 (small diameter portion 155) by the seal ring 320.
  • the seal holding member 310 also reciprocates integrally with the shaft 150, and the third bellows 300 expands and contracts.
  • the shaft 150 rotates relative to the tubular member 161, the shaft 150 and the seal ring 320 are allowed to slide.
  • one end side of the third bellows 300 is fixed to the cylindrical member 161.
  • the seal holding member 310 provided at the other end of the third bellows 300 is rotatable with respect to the shaft 150. That is, the other end side of the third bellows 300 is positioned in a state in which movement in the circumferential direction is allowed with respect to the shaft 150. Therefore, even if the shaft 150 and the tubular member 161 rotate relatively, the third bellows 300 is prevented from being twisted.
  • the surface of the seal ring 320 or the shaft 150 be lubricated such as PTFE coating so that the seal ring 320 and the shaft 150 can easily slide.
  • FIG. 6 is a schematic configuration diagram showing a usage state of a liquid supply system according to a modification of the present invention. Since the basic configuration is the same as that of the liquid supply system shown in FIG. 1, the same configuration is denoted by the same reference numeral, and the description thereof is omitted.
  • the liquid supply system 100 shown in FIG. 6 is provided with a fourth bellows 135 that is fixed to the shaft 150 and expands and contracts as the shaft 150 reciprocates similarly to the first bellows 130 inside the second container 120. Yes.
  • a first pump chamber P1 is formed between the outside of the fourth bellows 135 and the second container 120, and a second pump chamber is formed between the outside of the first bellows 130, the second container 120, and the second bellows 200.
  • P2 is formed.
  • the sealing structures shown in the first to fourth embodiments can be applied.
  • the liquid may not be stored in the first container 110 and may be in a vacuum. In this case, however, the return path K2 for returning the fluid into the first container 110 and the suction ports (first suction port 121 and second suction port 123) for sucking liquid into the second container 120 are connected. .

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Sealing Devices (AREA)

Abstract

L'invention concerne un système d'alimentation en liquide qui permet d'empêcher la torsion d'un soufflet. Le système d'alimentation en liquide est pourvu : d'un premier soufflet (130) fixé à un arbre (150) et qui s'étend et se contracte lors du mouvement alternatif de l'arbre (150) ; d'un second soufflet (200) qui s'étend et se contracte lors du mouvement alternatif de l'arbre (150), qui forme une chambre de pompe entre le second soufflet (200) et le premier soufflet (130), et dont le diamètre externe est plus petit que le premier soufflet (130). Le système d'alimentation en liquide est caractérisé en ce qu'une extrémité du second soufflet (200) est fixée à l'arbre (150) ou à un élément cylindrique (161) et l'autre extrémité du second soufflet (200) est positionnée par rapport à l'autre parmi l'arbre (150) et l'élément cylindrique (161), pouvant en même temps se déplacer dans la direction circonférentielle.
PCT/JP2017/029592 2016-08-23 2017-08-18 Système d'alimentation en liquide WO2018038005A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020197004204A KR20190026900A (ko) 2016-08-23 2017-08-18 액체 공급 시스템
US16/327,087 US20190211816A1 (en) 2016-08-23 2017-08-18 Liquid supply system
EP17843487.4A EP3505760A4 (fr) 2016-08-23 2017-08-18 Système d'alimentation en liquide
CN201780050106.4A CN109563826B (zh) 2016-08-23 2017-08-18 液体供给系统
JP2018535635A JPWO2018038005A1 (ja) 2016-08-23 2017-08-18 液体供給システム

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JP2016162907 2016-08-23
JP2016-162907 2016-08-23

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WO2018038005A1 true WO2018038005A1 (fr) 2018-03-01

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US (1) US20190211816A1 (fr)
EP (1) EP3505760A4 (fr)
JP (1) JPWO2018038005A1 (fr)
KR (1) KR20190026900A (fr)
CN (1) CN109563826B (fr)
WO (1) WO2018038005A1 (fr)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0229386U (fr) * 1988-08-13 1990-02-26
WO2012124363A1 (fr) * 2011-03-15 2012-09-20 イーグル工業株式会社 Système d'alimentation en liquide

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1653445A1 (de) * 1967-06-14 1971-07-22 Erich Goldbecker Doppeltwirkende Pumpe
US4836756A (en) * 1986-08-28 1989-06-06 Nippon Pillar Packing Co., Ltd. Pneumatic pumping device
JPH067890B2 (ja) * 1987-02-04 1994-02-02 倉敷紡績株式会社 循環▲ろ▼過システムのモニタ装置
EP3159583B1 (fr) * 2012-10-04 2020-09-09 Eagle Industry Co., Ltd. Joint mécanique

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0229386U (fr) * 1988-08-13 1990-02-26
WO2012124363A1 (fr) * 2011-03-15 2012-09-20 イーグル工業株式会社 Système d'alimentation en liquide

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP3505760A4 *

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US20190211816A1 (en) 2019-07-11
JPWO2018038005A1 (ja) 2019-06-20
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EP3505760A4 (fr) 2020-01-22
EP3505760A1 (fr) 2019-07-03
CN109563826A (zh) 2019-04-02

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