WO2018008069A1 - Dispositif et procédé de mesure spectroscopique - Google Patents

Dispositif et procédé de mesure spectroscopique Download PDF

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Publication number
WO2018008069A1
WO2018008069A1 PCT/JP2016/069813 JP2016069813W WO2018008069A1 WO 2018008069 A1 WO2018008069 A1 WO 2018008069A1 JP 2016069813 W JP2016069813 W JP 2016069813W WO 2018008069 A1 WO2018008069 A1 WO 2018008069A1
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Prior art keywords
wavelength
frame image
pixel value
region
spectroscopic measurement
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PCT/JP2016/069813
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English (en)
Japanese (ja)
Inventor
琢也 白戸
柳澤　琢麿
達也 織茂
宏美 矢島
健久 奥山
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パイオニア株式会社
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Priority to JP2018525845A priority Critical patent/JPWO2018008069A1/ja
Priority to PCT/JP2016/069813 priority patent/WO2018008069A1/fr
Publication of WO2018008069A1 publication Critical patent/WO2018008069A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36—Investigating two or more bands of a spectrum by separate detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/51—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters

Definitions

  • the present invention relates to a technical field of a spectroscopic measurement apparatus and a spectroscopic measurement method.
  • a spectral image acquired by imaging light transmitted through an etalon-type optical filter is converted into an optical filter based on information on spectral characteristics corresponding to the wavelength of light transmitted through the optical filter.
  • An apparatus that corrects each wavelength of transmitted light has been proposed (see Patent Document 1).
  • a global shutter system or a rolling shutter system is known as an electronic shutter system for an image sensor.
  • an image is acquired by dividing an image sensor into blocks each composed of one or a plurality of lines and sequentially exposing each block.
  • the rolling shutter method is used as an exposure method for spectroscopic measurement, the imaging time becomes longer than that of the global shutter method.
  • Patent Document 1 a CCD (Charge-Coupled Device) using a global shutter system is mainly used as an image sensor (see paragraph 0015). That is, the technique disclosed in Patent Document 1 does not consider the rolling shutter system.
  • CCD Charge-Coupled Device
  • the present invention has been made in view of the above-described facts, for example, a spectroscopic technique capable of shortening an imaging time in spectroscopic measurement using a method in which an exposure timing is different for each pixel region of an image sensor, such as a rolling shutter method. It is an object to provide a measuring apparatus and method.
  • the spectroscopic measurement apparatus of the present invention continuously changes the wavelength of the extracted light by the filter capable of changing the wavelength of the extracted light, the imaging unit having a plurality of regions, and the filter.
  • a control unit that sequentially exposes the plurality of regions with the extracted light and outputs an output signal that is a basis of a frame image from each of the plurality of regions, and one region of the plurality of regions in one frame image
  • a generation unit that generates a spectral image having a desired wavelength based on a pixel value corresponding to the one region in another frame image different from the one frame image.
  • the spectroscopic measurement method of the present invention is a spectroscopic measurement method in a spectroscopic measurement device including a filter capable of changing the wavelength of extracted light and an imaging unit having a plurality of regions, A control step of sequentially exposing the plurality of regions with the extracted light while continuously changing the wavelength of the extracted light by a filter, and outputting an output signal as a basis of a frame image from each of the plurality of regions; Spectrum of a desired wavelength based on a pixel value corresponding to one region of the plurality of regions in the frame image and a pixel value corresponding to the one region in another frame image different from the one frame image.
  • the spectroscopic measurement apparatus includes a filter capable of changing the wavelength of the extracted light, an imaging unit having a plurality of pixel regions, and a plurality of the extracted light using the extracted light while continuously changing the wavelength of the extracted light using the filter.
  • a control unit that sequentially exposes pixel regions and outputs an output signal that is a basis of a frame image from each of the plurality of regions, a pixel value corresponding to one pixel region among the plurality of pixel regions in one frame image, and one And a generation unit that generates a spectral image having a desired wavelength based on a pixel value corresponding to the one pixel region in another frame image different from the frame image.
  • the wavelength of the extraction light that exposes the imaging unit is continuously changed. For this reason, the exposure wavelength differs for each pixel region. Therefore, the generated frame image does not satisfy the requirement as a spectral image as it is.
  • pixel values for example, obtained when a certain pixel region is exposed with extraction light having a desired wavelength using two frame images (that is, one frame image and another frame image) (for example, Brightness value etc.) is estimated. Then, one spectral image is generated from the pixel values estimated for each pixel region.
  • the spectroscopic measurement apparatus changes the wavelength of the extracted light after all the pixel regions of the imaging unit are sequentially exposed with the extracted light having a certain wavelength to generate the spectral image, and the imaging unit uses the extracted light after the change. Compared to the case where all the pixel areas are sequentially exposed to generate another spectral image, it is possible to generate spectral images of a plurality of wavelengths while shortening the imaging time.
  • control unit controls the filter so that the amount of change in wavelength of the extracted light per time required for capturing one frame image is within the full width at half maximum of the wavelength-extraction rate characteristic of the filter.
  • An example of the filter is a Fabry-Perot filter including an actuator.
  • the pixel value corresponding to one pixel area in one frame image is the same as that of the one pixel area when the one pixel area is exposed to the extracted light having the first wavelength whose deviation from the desired wavelength is equal to or smaller than a predetermined value. This is a pixel value based on the output signal.
  • the pixel value corresponding to one pixel area in another frame image is exposed to the extracted light having a second wavelength that is different from the first wavelength and has a deviation from a desired wavelength that is less than or equal to a predetermined value. Pixel value based on the output signal of one pixel region.
  • the other frame image may be a frame temporally adjacent to one frame image.
  • the generation unit uses a timing at which at least a part of the imaging unit is exposed by the extraction light of the desired wavelength as a reference timing, and a deviation from the reference timing of the timing at which one pixel region is exposed by the extraction light of the first wavelength, The pixel value corresponding to one pixel region in one frame image and one pixel in another frame image based on the deviation from the reference timing of the timing at which one pixel region was exposed by the extraction light of the second wavelength Each pixel value corresponding to the region may be weighted.
  • the generation unit may generate a pixel value corresponding to one pixel region in one frame image and another frame image based on the deviation from the desired wavelength of the first wavelength and the deviation from the desired wavelength of the second wavelength.
  • Each of the pixel values corresponding to one pixel area may be weighted.
  • the spectroscopic measurement method is a spectroscopic measurement method in a spectroscopic measurement device including a filter capable of changing the wavelength of extracted light and an imaging unit having a plurality of pixel regions.
  • the spectroscopic measurement method includes a control step of sequentially exposing a plurality of pixel regions with the extracted light while changing the wavelength of the extracted light with a filter, and outputting an output signal that is a basis of a frame image from each of the plurality of regions; Based on a pixel value corresponding to one pixel area among a plurality of pixel areas in one frame image and a pixel value corresponding to one pixel area in another frame image different from the one frame image A generation step of generating a spectral image.
  • the spectroscopic measurement method it is possible to generate spectroscopic images of a plurality of wavelengths while shortening the imaging time, similarly to the spectroscopic measurement device according to the above-described embodiment.
  • the various aspects similar to the various aspects of the spectrometer which concerns on embodiment mentioned above can be taken.
  • FIG. 1 is a block diagram illustrating a configuration of a spectroscopic measurement apparatus according to an embodiment.
  • the spectroscopic measurement apparatus 1 includes a spectroscopic camera 10 and a host computer 30 having a processor 31 and a memory 32.
  • the spectroscopic camera 10 includes a lens 11, a Fabry-Perot filter 12, a drive circuit 20, a rolling shutter type CMOS (Complementary Metal-Oxide-Semiconductor) sensor 13, and an image sensor controller 14.
  • CMOS Complementary Metal-Oxide-Semiconductor
  • the Fabry-Perot filter 12 changes the wavelength of transmitted light according to the gap.
  • the Fabry-Perot filter 12 selectively transmits light having a wavelength corresponding to the gap.
  • there is a wavelength width in the transmitted light of the Fabry-Perot filter 12 but here, for simplicity, the center wavelength of the transmitted wavelength width is referred to as a transmitted wavelength.
  • the Fabry-Perot filter 12 has an actuator 12a.
  • the actuator 12 a is configured to be able to change the gap of the Fabry-Perot filter 12 according to the drive voltage output from the drive circuit 20.
  • the image sensor controller 14 generates a frame image from the output signal of the CMOS sensor 13 and outputs it to the host computer 30.
  • the transmission type Fabry-Perot filter is used as the optical wavelength variable selection filter.
  • the present invention is not limited to this, and various known transmission or reflection type filters can be employed.
  • a CMOS sensor generally reads signals from one or a plurality of pixels connected to each signal line in order for each signal line (horizontal signal line or vertical signal line) due to its structure.
  • “one or more pixels connected to one signal line” will be referred to as “line” as appropriate.
  • a rolling shutter system that performs exposure for each line is used.
  • the exposure timing and signal readout timing differ for each line.
  • the wavelength of light incident on the CMOS sensor cannot be changed until the exposure of all the lines is completed so that the wavelength when one frame image is captured does not change. Then, when generating a spectral image for a plurality of lights having different wavelengths, the imaging time (measurement time) may be relatively long.
  • CMOS sensor 13 is sequentially exposed for each line while changing the transmission wavelength of the Fabry-Perot filter 12.
  • the processor 31 of the host computer 30 drives the Fabry-Perot filter 12 so that the gap of the Fabry-Perot filter 12 changes continuously based on the “driving voltage-transmission wavelength relational expression” stored in the memory 32 in advance.
  • the circuit 20 is controlled. Then, when the gap of the Fabry-Perot filter 12 changes, the CMOS sensor 13 is sequentially exposed for each line.
  • the drive circuit 20 is controlled so that the transmission wavelength of the Fabry-Perot filter 12 changes to the longer wavelength side with time.
  • frame 1 the exposure wavelength of line 1 (strictly speaking, the center wavelength of exposure) is ⁇ 1,1
  • the exposure wavelength of line 2 is ⁇ 1,2
  • exposure of line c The wavelength is ⁇ 1, c .
  • frame images having different exposure wavelengths are captured (or generated) for each line. 2 and 3, “frame 1” and the like indicate frame image numbers, and “line 1” and the like indicate line numbers.
  • a spectral image of a desired wavelength is generated by performing a spectral image generation process described later based on the obtained frame image. That is, in this embodiment, the imaging time is shortened by generating a spectral image by the spectral image generation processing.
  • the pixel value of line 1 of frame 2 (exactly speaking, “the pixel value of each pixel included in line 1”, hereinafter the same) when exposed with light of wavelengths ⁇ 2 and c is the line of frame 2 1 and a weighted average based on the pixel value of line 1 of frame 3.
  • the pixel value of line 1 when exposed with light of wavelength ⁇ 2, c is wavelength ⁇ 2, if the wavelength difference between wavelength ⁇ 2,1 and wavelength ⁇ 3,1 is smaller than the transmission wavelength width of the filter . This is because it is estimated that the value is between the pixel value of line 1 of frame 2 exposed with light of 1 and the pixel value of line 1 of frame 3 exposed with light of wavelength ⁇ 3,1 .
  • the pixel value of line M in frame 2 when exposed with light of wavelengths ⁇ 2 and c is a weighted average based on the pixel value of line M in frame 2 and the pixel value of line M in frame 1 Is estimated from
  • the pixel value of the line M of the frame 2 when exposed with light of the wavelength ⁇ 2, c is the wavelength if the wavelength difference between the wavelength ⁇ 2, M and the wavelength ⁇ 1, M is smaller than the transmission wavelength width of the filter. It is estimated that the value is between the pixel value of the line M of the frame 2 exposed with the light of ⁇ 2, M and the pixel value of the line M of the frame 1 exposed with the light of the wavelengths ⁇ 1, M. It is.
  • the pixel value in the case of exposure with light of a desired wavelength is estimated by interpolation (that is, interpolation).
  • interpolation that is, interpolation
  • a frame image including a line exposed at the desired wavelength here, frame 2
  • the next frame image here, frame 3
  • a frame image including the line exposed at the desired wavelength and the previous frame image temporally adjacent to the frame image is used. For this reason, at least one frame image before and after the frame image including the line exposed at the desired wavelength is captured.
  • the processor 31 of the host computer 30 generates a spectral image of a desired wavelength based on the estimated pixel value.
  • the “frame 2”, “frame 3”, “wavelength ⁇ 2,1 ”, and “wavelength ⁇ 3,1 ” according to the embodiment are respectively referred to as “one frame image” and “other frame” according to the present invention. It is an example of “image”, “first wavelength”, and “second wavelength”. “Frame 1”, “wavelength ⁇ 2, M ” and “wavelength ⁇ 1, M ” according to the embodiment are respectively “another frame image”, “first wavelength” and “second wavelength” according to the present invention. It is another example.
  • an ideal optical filter transmits only a specific wavelength and does not transmit any other wavelength.
  • the actual Fabry-Perot filter has a wide transmission wavelength, and the center wavelength of the transmission wavelength is called the transmission center wavelength.
  • the pixel value of the frame image obtained without changing the transmission wavelength of the filter is simply obtained by multiplying and integrating the filter transmittance and the spectrum of the subject (see the lowermost stage in FIG. 4). (Strictly speaking, pixel quantization efficiency, exposure time, amplifier gain, etc. are also multiplied, but are ignored here)
  • the horizontal axis is plotted as the frame number
  • the vertical axis is plotted as the pixel value of the frame.
  • the spectrum of the subject (see the bottom row in FIG. 5) obtained by the spectroscopic measurement device matches the spectrum of the subject (see the middle row in FIG. 5).
  • an actual Fabry-Perot filter a sudden change in a range narrower than the transmission wavelength width of the filter is “smoothed”, and the spectrum of the subject obtained by the spectrometer is as shown on the right side of the lowermost stage in FIG.
  • the pixel value of the frame image does not change abruptly (in other words, discontinuously) with respect to the wavelength change of about the transmission wavelength width of the Fabry-Perot filter 12. Therefore, the pixel value when exposed with light having a desired wavelength can be estimated from the pixel value when exposed with light having a wavelength near the desired wavelength.
  • the transmission wavelength of the Fabry-Perot filter 12 continuously changes during imaging of one frame image as in this embodiment, if the amount of change is about the transmission wavelength width of the Fabry-Perot filter 12, one frame Substantially the same pixel value can be obtained as when the transmission wavelength does not change during image capture. This is because the transmittance spectrum of the Fabry-Perot filter 12 has a substantially symmetrical shape with respect to the transmission center wavelength.
  • the processor 31 of the host computer 30 of the spectroscopic measurement apparatus 1 is preferably configured so that the amount of change in the transmission wavelength of the Fabry-Perot filter 12 during the imaging of one frame image is equal to or smaller than the transmission wavelength width of the Fabry-Perot filter 12. Controls the gap of the Fabry-Perot filter 12 via the drive circuit 20 so that it is within the full width at half maximum of the transmission wavelength width.
  • the “transmission wavelength width of the Fabry-Perot filter 12” is an example of the “filter wavelength-extraction rate characteristic” according to the present invention.
  • Weighted average examples include (1) weighted average based on line numbers and (2) weighted average based on wavelength.
  • the line number can be referred to as exposure timing.
  • the wavelength of the light transmitted through the Fabry-Perot filter 12 changes at a constant rate (that is, changes linearly) as shown in the lower part of FIG. For this reason, the line number (and exposure timing) and the wavelength of transmitted light are closely related.
  • CMOS sensor 13 has M lines in total.
  • the numbers given to the lines are 1 to M (see FIG. 2).
  • m (1 ⁇ m ⁇ M) be a number assigned to a line exposed with light of a desired wavelength
  • y (1 ⁇ y ⁇ M) be a number assigned to a line for estimating a pixel value.
  • the number given to the frame image including the pixel value of the line exposed with light of a desired wavelength is assumed to be i.
  • the pixel value of the line y in the frame i is I i, y
  • the pixel value of the line y in the frame i + 1 is I i + 1, y
  • the pixel value of the line y in the frame i ⁇ 1 is I i ⁇ 1, y
  • the exposure wavelength of line y in frame i is ⁇ i, y
  • the pixel value is I i, y
  • the exposure wavelength of line y in frame i + 1 is ⁇ i + 1, y
  • the pixel value is I i + 1, y.
  • the estimated pixel value I ′ i, y of the line y is I ′ i, y + ( ⁇ i, y ⁇ i, m ) / ( ⁇ i, y ⁇ i ⁇ 1, y ) ⁇ (I i ⁇ 1, y ⁇ I i, y ) It can be expressed.
  • a wavelength range that is, a wavelength range of spectral image data that the user desires to acquire
  • the processor 31 of the host computer 30 are specified by the amount necessary for interpolation (ie, estimation of pixel values) based on the exposure timing difference of the pixel region (ie, line) of the CMOS sensor 13 and the amount of change in the transmission wavelength of the Fabry-Perot filter 12 per time.
  • the corrected wavelength range is corrected (step S102).
  • start wavelength lambda stt is, the wavelength lambda Stt' a wavelength shorter than said start wavelength lambda stt, end wavelength lambda end The is, the wavelength lambda End' a longer wavelength than the end wavelength lambda end
  • modified Is done The extent to which the initially designated wavelength range is corrected (or expanded) may be set as appropriate. It is desirable to modify the wavelength range so that at least one more frame can be captured than the number of frames that can be imaged in the initially designated wavelength range.
  • the processor 31 of the host computer 30 drives the Fabry-Perot filter 12 so that the transmission wavelength of the Fabry-Perot filter 12 becomes the wavelength ⁇ stt ′ based on the “drive voltage-transmission wavelength relational expression” stored in the memory 32.
  • the actuator 12a is controlled via the circuit 20 (step S103).
  • the processor 31 starts changing the drive voltage output from the drive circuit 20 so that the transmission wavelength of the Fabry-Perot filter 12 changes toward the wavelength ⁇ end ′ (step S104).
  • the processor 31 changes the gap Fabry-Perot filter 12, transmission wavelength, it increased gradually toward the wavelength lambda End' from the wavelength ⁇ stt'.
  • the processing in steps S105 to S107 is performed. That is, the processor 31 acquires a frame image captured by the CMOS sensor 13 via the image sensor controller 16 (step S105). Subsequently, the processor 31 acquires information on the current transmission wavelength of the Fabry-Perot filter 12 (step S106).
  • the “transmission wavelength information” may be a value of the transmission wavelength itself, or may be a value of a driving voltage associated with the transmission wavelength, for example. That is, the “transmission wavelength information” means information indicating the transmission wavelength directly or indirectly.
  • the processor 31 determines whether or not to end the image pickup), the current transmission wavelength indicated by the information of the transmission wavelengths, determines whether the equal wavelength lambda End' (Step S107) . In this determination, when it is determined that the current transmission wavelength is not equal to the wavelength ⁇ end ′ (step S107: No), the processor 31 performs the process of step S105 again.
  • step S107 when it is determined in step S107 that the current wavelength is equal to the wavelength ⁇ end ′ (step S107: Yes), the processor 31 stops changing the drive voltage output from the drive circuit 20 (step S107). S108).
  • the processor 31 refers to the “spectral image generation program” stored in the memory 32 and performs a spectral image generation process (step S2).
  • the spectral image generation processing will be described with reference to the flowchart of FIG.
  • a frame image with a number assigned to a frame image of 1 to Nfrm among a plurality of temporally continuous frame images acquired in the process of step S105 is a processing target.
  • the number of lines of the CMOS sensor 13 is “Height”, and the number of pixels included in one line is “Width”.
  • one frame image includes “Width ⁇ Height” pixels.
  • the desired wavelength is the exposure wavelength when the pixel value of the line m (1 ⁇ m ⁇ Height) of each frame image is acquired.
  • the line m may be set in advance as a fixed value by the manufacturer, or may be set by the user.
  • the variable relating to the frame image is “i” (1 ⁇ i ⁇ Nfrm)
  • the variable relating to the line is “y” (1 ⁇ y ⁇ Height)
  • the variable relating to the pixels included in one line is “ x ′′ (1 ⁇ x ⁇ Width).
  • the processor 31 sets the variable i to “1” which is an initial value (step S201).
  • the processor 31 sets the variable y to “1” which is an initial value (step S202).
  • the processor 31 calculates a weight W (y) corresponding to the current line y (step S203). For the specific weight W (y), see the above “weighted average”. However, the constant “M” in “weighted average” is read as “Height”.
  • the processor 31 sets the variable x to “1” which is an initial value (step S204). Next, the processor 31 determines whether or not the value of the variable y is smaller than m (step S205).
  • step S205 If it is determined in step S205 that the value of the variable y is smaller than m (step S205: Yes), the processor 31 sets the pixel value of the pixel x of the line y of the frame i to the wavelength ⁇ i, of the frame i. the pixel value of the pixel x of the line y, which is exposed to light of y, replaced with the weighted average value of the pixel value of the frame i + 1 of the wavelength lambda i + 1, y of a pixel x in the line y, which is exposed to light (step S206 ).
  • step S205 when it is determined in step S205 that the value of the variable y is not smaller than m (step S205: No), the processor 31 determines whether the value of the variable y is larger than m (step S207). ).
  • step S207 determines the pixel value of the pixel x of the line y of the frame i as the wavelength ⁇ i, of the frame i. the pixel value of the pixel x of the line y, which is exposed to light of y, the weighted average of the pixel values of the frame i-1 of the wavelength lambda i-1, y pixel x of the line y, which is exposed to light Replace (step S208).
  • step S207 determines whether or not the value of the variable x is equal to Width (step S209). That is, in step S209, it is determined whether or not pixel value replacement has been completed for all pixels included in the line y.
  • step S209 When it is determined in step S209 that the value of the variable x is not equal to Width (step S209: No), the processor 31 sets the value of the variable x to x + 1 (that is, increments) (step S212). The process of step S205 is performed.
  • step S209 determines whether the value of the variable x is equal to Width (step S209: Yes).
  • the processor 31 determines whether the value of the variable y is equal to Height (step s210). . That is, in step S210, it is determined whether or not pixel value replacement has been completed for all lines included in frame i.
  • step S210 When it is determined in step S210 that the value of the variable y is not equal to Height (step S210: No), the processor 31 sets the value of the variable y to y + 1 (ie, increments) (step S213). The process of step S203 is performed.
  • step S210 determines whether the value of variable i is equal to Nfrm (step S211). . That is, in step S211, it is determined whether or not pixel value replacement has been completed for all processing target frame images.
  • step S211 When it is determined in step S211 that the value of the variable i is not equal to Nfrm (step S211: No), the processor 31 sets the value of the variable i to i + 1 (that is, increments) (step S214). The process of step S202 is performed. On the other hand, when it is determined in step S211 that the value of the variable i is equal to Nfrm (step S211: Yes), the processor 31 performs the process of step S109 in the flowchart of FIG.
  • the processor 31 stores the spectral image generated in the spectral image generation processing (that is, the frame image in which pixel values are replaced), for example, a storage device such as the memory 32. And the process ends (step S109).
  • each pixel region (that is, each line) of the CMOS sensor 13 is sequentially exposed to the transmitted light while changing the wavelength of the transmitted light of the Fabry-Perot filter 12. For this reason, the spectroscopic measurement apparatus 1 changes the wavelength of the transmitted light by changing the gap of the Fabry-Perot filter 12 after all the pixel regions of the CMOS sensor 13 are exposed by the transmitted light of a certain wavelength.
  • the imaging time can be shortened compared to the case where all the pixel areas of the CMOS sensor 13 are exposed by the transmitted light later.
  • the spectroscopic measurement device 1 two frame images that are temporally adjacent to each other are used for pixel value estimation. With this configuration, it is possible to improve estimation accuracy compared to a case where two frame images that are not temporally adjacent are used for pixel value estimation. Note that three or more frame images may be used for estimating the pixel value.
  • the “Fabry-Perot filter 12”, “CMOS sensor 13”, and “processor 31” according to the embodiment are examples of the “filter”, “imaging unit”, and “generation unit” according to the present invention, respectively.
  • the “sensor controller 14” and the “drive circuit 20” are examples of the “control unit” according to the present invention.

Abstract

L'invention concerne un dispositif de mesure spectroscopique (1) qui comporte : un filtre (12) apte à modifier la longueur d'onde de la lumière extraite, une unité d'imagerie (14) ayant une pluralité de zones de pixels, une unité de commande (16, 20) pour exposer séquentiellement la pluralité de zones de pixels à la lumière extraite tout en changeant successivement la longueur d'onde de la lumière extraite à l'aide du filtre et servant à produire des signaux de sortie servant de base à une image de trame provenant de la pluralité de zones de pixels, et une unité de génération (31) pour générer une image spectroscopique pour une longueur d'onde désirée sur la base d'une valeur de pixel correspondant à une zone de pixel parmi la pluralité de zones de pixel dans une image de trame et d'une valeur de pixel correspondant à la zone de pixel dans une autre image de trame différente de la première image de trame.
PCT/JP2016/069813 2016-07-04 2016-07-04 Dispositif et procédé de mesure spectroscopique WO2018008069A1 (fr)

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JP2015525351A (ja) * 2012-07-05 2015-09-03 レイセオン カンパニー イメージの残差分析のためのシステム及び方法
JP2015125083A (ja) * 2013-12-27 2015-07-06 セイコーエプソン株式会社 光学モジュール、電子機器、及び光学モジュールの駆動方法
JP2016085140A (ja) * 2014-10-27 2016-05-19 セイコーエプソン株式会社 光学モジュール、電子機器、及び光学モジュールの駆動方法

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