WO2017159097A1

WO2017159097A1 - Positioning device, airtight container, and vacuum chamber

Info

Publication number: WO2017159097A1
Application number: PCT/JP2017/003553
Authority: WO
Inventors: 淳宮脇
Original assignee: 国立大学法人東京大学
Priority date: 2016-03-17
Filing date: 2017-02-01
Publication date: 2017-09-21
Also published as: JP2017167007A

Abstract

A positioning device 20 for a vacuum chamber 10 comprises: a first rotary member 210; a first support member 211 which supports the first rotary member 210 so as to be rotatable about a first axis A; a first drive device 215 which rotates the first rotary member 210; a second rotary member 220; a second support member 221 which supports the second rotary member 220 so as to be rotatable about a second axis B, and which is fixed to the first rotary member 210 such that the second axis B intersects with the first axis A so as to be inclined only by a first angle Δ1 with respect to the first axis A; a second drive device 225 which rotates the second rotary member 220; and a third support member 231 which is fixed to the second rotary member 220, and which supports an output part 12 on a third axis τ that passes through an intersection O between the first axis A and the second axis B so as to be inclined only by a second angle Δ2 with respect to the second axis B.

Description

Positioning device, sealed container, and vacuum chamber

The invention of the present disclosure relates to a positioning device that positions an object in a three-dimensional space, a sealed container including the positioning device, and a vacuum chamber.

Conventionally, soft X-ray emission spectroscopy using X-rays is known as a method for investigating the electronic state of a substance, and in recent years, it has been used in various fields due to the advent of high-intensity radiation light sources. It is coming. According to such soft X-ray emission spectroscopy, it is possible to observe the energy dispersion of elementary excitation in a solid by using the momentum conservation law of light scattering. For this reason, in order to capture the emission angle distribution of soft X-ray emission, a large spectroscope is swung during measurement (for example, see Non-Patent Document 1). In the soft X-ray emission spectroscopy system described in Non-Patent Document 1, the spectrometer is mounted on an arm of approximately 15 m that can be swung in a range of 30 ° to 150 ° around a rotation axis extending in a direction perpendicular to the installation surface. And is connected to a light emission emitting portion of a vacuum chamber in which a sample is arranged. Further, the vacuum chamber is provided with a vacuum belt for maintaining the inside of the vacuum chamber in a vacuum state while allowing rotation of the light emitting and emitting portion connected to the spectrometer in a two-dimensional plane.

The vacuum belt of the vacuum chamber described in Non-Patent Document 1 is considered to use a belt-like seal member that is fed from one side and wound on the other side according to the rotation of the emitting portion. Even if the vacuum belt is provided in the vacuum chamber, it may be difficult to maintain a good vacuum inside the vacuum chamber. Moreover, in the vacuum chamber of patent document 1, although the light emission emission part can be rotated in a two-dimensional plane, by making the light emission emission part as a target object positionable in three-dimensional space, soft X-ray It would be possible to increase the range of position adjustment in the entire emission spectroscopic system to further improve the measurement performance.

Accordingly, the invention of the present disclosure is a positioning device capable of accurately positioning an object in a three-dimensional space, and accurately positioning an object in which at least a part is exposed to the outside in a three-dimensional space and having a good internal seal. The main object of the present invention is to provide a sealed container that can be kept in a state, and a vacuum chamber that can accurately position an emission part, at least a portion of which is exposed to the outside, in a three-dimensional space and can keep the inside in a good vacuum state. .

The positioning device of the present disclosure is a positioning device that positions an object in a three-dimensional space, and includes a first rotating member and the first rotating member around a first axis that is a central axis of the first rotating member. A first rotation mechanism including a first support member rotatably supported; a first rotation mechanism that rotates the first rotation member around the first axis with respect to the first support member; and a second rotation. A member and the second rotating member are rotatably supported around a second axis which is a central axis of the second rotating member, and the second axis is inclined by a first angle with respect to the first axis A second support member fixed to the first rotation member so as to intersect the first axis, and a second support member that rotates the second rotation member about the second axis relative to the second support member. A second rotation mechanism including two drive devices, and being fixed to the second rotation member, In which and a third supporting member for supporting the elephant was on the third axis passing through the intersection of the second angle inclined by above said first axis the second axis relative to said second axis.

In such a positioning device, the first and second rotating members are rotated with respect to the first or second supporting member by the first and second driving devices, whereby the first shaft and the second shaft in the extending direction of the third shaft. It becomes possible to accurately position the object on the surface of the spherical crown whose radius of curvature is the length from the intersection with the axis to the object.

In addition, the first angle and the second angle may be the same. Accordingly, the first and second rotating devices are rotated with respect to the first or second supporting member by the first and second driving devices, and thereby the first axis and the second axis in the extending direction of the third axis are The object can be accurately positioned at an arbitrary position on the surface of the spherical crown whose radius of curvature is the length from the intersection point to the object.

Further, the third support member may support the object rotatably around the third axis, and the positioning device may support the object with respect to the third support member. You may further provide the 3rd drive device rotated to the surroundings. As a result, the torsion around the third axis of the object caused by the rotation of the first and second rotating members is eliminated by rotating the object with respect to the third support member by the third driving device. Or the angle of the object around the third axis can be arbitrarily set.

Further, the sealed container according to the present disclosure is a sealed container including any one of the positioning devices described above, and a container body having an open end to which the first support member of the first rotation mechanism is closely joined; A first seal member disposed between the first rotating member and the first support member; and a second seal member disposed between the second rotating member and the second support member, The object is supported by the third support member so that at least a part of the object is exposed to the outside of the sealed container.

In such an airtight container, the first and second rotating members are rotated with respect to the first or second supporting member by the first and second driving devices, so that the object that is at least partially exposed to the outside is moved to the third shaft. It becomes possible to accurately position on the surface of the spherical crown whose radius of curvature is the length from the intersection of the first axis and the second axis in the extending direction to the object. In the positioning device, the first drive device can be disposed outside the first support member, and the second drive device can be disposed outside the second support member. Therefore, it is possible to make the entire sealed container more compact while sufficiently securing the internal volume of the sealed container. Further, in this sealed container, the first support member of the first rotation mechanism is tightly joined to the open end of the container body, and between the first rotation member and the first support member and between the second rotation member and the second support member. Since the 1st or 2nd sealing member is arrange | positioned between these, an inside can be maintained in a favorable sealed state. Further, when the object is rotatably supported around the third axis by the third support member, a third seal member may be disposed between the object and the third support member.

The vacuum chamber of the present disclosure is a vacuum chamber having a radiation light incident portion, a stage that supports a sample irradiated with the radiation light, and a light emission portion that allows light emission from the sample to pass therethrough. And at least one end of the container main body, a first rotating member, and a first rotating member that is closely joined to the open end of the container main body and the first rotating member is a central axis of the first rotating member. A first support member rotatably supported around an axis; a first seal member disposed between the first rotation member and the first support member; and the first rotation member as the first support member. A first rotation mechanism including a first drive device that rotates around the first axis, a second rotation member, and a second axis that is the central axis of the second rotation member. And the second shaft is rotatably supported around A second support member that is tightly joined to the first rotating member so as to be inclined by a first angle with respect to the first axis and intersect the first axis, the second rotating member, and the second A second rotation mechanism including a second seal member disposed between the support member and a second driving device configured to rotate the second rotation member around the second axis with respect to the second support member; The emission part is inclined by a second angle with respect to the second axis so that at least a part of the emission part is exposed to the outside of the sealed container, and passes through the intersection of the first axis and the second axis. A third support member that is coaxial with the third axis and rotatably supported around the third axis, and is tightly joined to the second rotation member, and between the emitting portion and the third support member The arranged third seal member and the emitting portion are rotated around the third axis with respect to the third support member. 3 is intended and a third rotating mechanism including a drive unit.

In such a vacuum chamber, the first and second rotating members are rotated with respect to the first or second supporting member by the first and second driving devices, so that the emitting portion at least a part of which is exposed to the outside is disposed on the third shaft. It becomes possible to accurately position on the surface of the spherical crown whose radius of curvature is the length from the intersection of the first axis and the second axis in the extending direction to the emission part. Further, by rotating the emitting portion with respect to the third support member by the third driving device, torsion around the third axis of the emitting portion caused by the rotation of the first and second rotating members is eliminated. Can do. Further, in this vacuum chamber, the first support member of the first rotation mechanism is tightly joined to the open end of the container body, and the second rotation member and the second support member are between the first rotation member and the first support member. Since the first, second, or third seal member is disposed between the object and the object and the third support member, the inside can be maintained in a good vacuum state. Further, in this vacuum chamber, the first drive device is disposed outside the first support member, the second drive device is disposed outside the second support member, and the third drive device is disposed from the third support member. Can also be arranged on the outside. Therefore, the entire vacuum chamber can be made more compact while sufficiently securing the internal volume of the vacuum chamber.

The emission unit may be connected to a spectroscope via a bellows, and the spectroscope rotates around a rotation axis extending in a direction orthogonal to both the incident direction of the radiated light and the first axis. May be allowed. As described above, since the vacuum chamber of the present disclosure can be easily made compact, the measurement efficiency of the spectrometer is reduced by shortening the distance from the light emission point of the sample to the spectrometer, thereby increasing the capture angle. Can be improved.

Further, the first, second and third rotation mechanisms may be hollow type rotation introduction machines.

It is a schematic block diagram which shows the use condition of the vacuum chamber of this indication. It is sectional drawing which shows the vacuum chamber of this indication. It is a top view which shows the vacuum chamber of this indication. It is explanatory drawing which shows the rotation angle of the 1st and 2nd rotation member in the vacuum chamber of this indication, and an emission part. It is explanatory drawing which shows the azimuth and elevation angle of the point on the spherical crown centering on the intersection of the 1st axis | shaft and 2nd axis | shaft in the vacuum chamber of this indication.

Next, embodiments for carrying out the invention of the present disclosure will be described with reference to the drawings.

FIG. 1 is a schematic configuration diagram illustrating a use state of a vacuum chamber according to the present disclosure, and FIG. 2 is a cross-sectional view illustrating a vacuum chamber 10. A vacuum chamber 10 shown in the figure has an incident part 11 for radiated light and an output part 12 for allowing light emitted from the sample irradiated with the radiated light to pass through. A soft X-ray emission spectroscopic system 1 for examining the electronic state of liquid and solid is configured. The high-intensity radiant light source 2 generates radiated light by accelerating electrons to a speed substantially equal to that of light by an accelerator and changing the traveling direction of electrons (electron beam) by a deflecting electromagnet or an insertion light source.

The eyelid spectroscope 3 has a detector such as a diffraction grating or a CCD (not shown). The spectroscope 3 of the present embodiment is parallel to the installation direction of the soft X-ray emission spectroscopic system 1 orthogonal to the incident direction (X-axis direction in FIG. 2) of the radiated light from the high-intensity radiation source 2 Rotating shaft 3a (an axis extending in the Z-axis direction through point O in FIG. 2) defined on one end side in the longitudinal direction so as to be orthogonal to both the direction extending in the direction (Y-axis and vertical axis direction in FIG. 2) Can be turned (rotated) in the forward and reverse directions within a predetermined range around the.

As shown in FIGS. 1 and 2, the vacuum chamber 10 includes a container body 15 having an incident portion 11 for emitted light and an emission portion 12 for light emission connected to the spectroscope 3 through a bellows 4 in a three-dimensional space. And a positioning device 20 for positioning. In the present embodiment, the container body 15 is formed in a cylindrical shape from a metal such as stainless steel, and has an annular flange portion 15f to which the lid body 15c is fixed through a plurality of sealing members such as bolts and O-rings. . The vacuum chamber 10 has the installation surface such that the axis of the container body 15 is orthogonal to the incident direction of the radiated light from the high-intensity radiation light source 2 (X-axis direction in FIG. 2) and extends in parallel with the installation surface. Fixed against. Thereby, the flange part 15f and the lid 15c of the container main body 15 are perpendicular to the installation surface.

In addition, a stage 17 (see FIG. 1) that supports the sample S irradiated with the radiated light from the high-intensity radiant light source 2 incident on the incident portion 11 is disposed inside the container body 15. The stage 17 is arranged so that the irradiation point (light emission point) of the radiated light on the sample S supported on the stage 17 substantially intersects with the rotation axis 3a of the spectrometer 3 (so as to substantially coincide with the point O in FIG. 2). A) in the vacuum chamber 10; Furthermore, a vacuum pump (not shown) for sucking the air inside the container body 15 is connected to the container body 15, and the inside of the container body 15 is kept in an ultrahigh vacuum state during measurement by the soft X-ray emission spectroscopy system 1. It is. As shown in FIG. 2, the positioning device 20 includes a first rotation mechanism 21, a second rotation mechanism 22, and a third rotation mechanism 23, all of which are hollow rotation introduction machines.

As shown in FIG. 2, the first rotating mechanism 21 includes a first rotating member 210 formed in a ring shape with a metal such as stainless steel, and a first support formed in a short cylindrical shape (cylindrical shape) with a metal such as stainless steel. A member 211 and a first driving device 215 are included. The first rotating member 210 includes a short cylindrical tubular portion 210a, an annular flange portion 210b extending radially outward from one end of the tubular portion 210a, and the surface of the flange portion 210b (in FIG. 2). And a shell portion 210c joined (fixed) closely (without a gap) by welding on the upper surface. In the present embodiment, the shell portion 210c of the first rotating member 210 is a first spherical plane that is perpendicular to the diameter of the thin spherical shell and a second plane that is inclined by a first angle Δ1 with respect to the first plane. When cut, it has the same shape as the portion sandwiched between the first and second planes. And as shown in FIG. 2, the open end of the large diameter of the shell part 210c is joined to the outer periphery of the flange part 210b. However, the first rotating member 210 (the cylindrical portion 210a and the flange portion 210b) and the shell portion 210c may be integrally formed by, for example, casting.

The first support member 211 has an inner diameter slightly larger than the outer diameter of the cylindrical portion 210a of the first rotating member 210, and an open end 15e opposite to the flange portion 15f of the container body 15 described above (FIG. 2). (See)) and is joined (fixed) densely (without a gap) by welding. Furthermore, two annular grooves in which O-rings (first seal members) 213 are respectively arranged are formed on the inner peripheral surface of the first support member 211 at intervals in the axial direction.

The first drive device 215 includes a first drive motor (stepping motor) M1 and a worm gear mechanism 216 including a worm (screw gear) 217 and a worm wheel (helical gear) 218, as shown in FIG. The worm 217 of the worm gear mechanism 216 is coupled to rotate integrally with the rotor of the first drive motor M1. The worm wheel 218 is fixed coaxially to the first rotating member 210 via a plurality of bolts on the back surface (lower surface in FIG. 2) of the flange portion 210b of the first rotating member 210. As can be seen from FIGS. 2 and 3, the components of the first driving device 215 are disposed outside the vacuum chamber 10, that is, outside the O-ring 213 and the first support member 211.

As shown in FIG. 2, the cylindrical portion 210 a of the first rotating member 210 is fitted coaxially in the first support member 211. In addition, a bearing 214 which is a ball bearing in the present embodiment is disposed between the inner peripheral surface of the worm wheel 218 fixed to the flange portion 210b of the first rotating member 210 and the outer peripheral surface of the first support member 211. Is done. As shown in FIG. 2, the bearing 214 is held by a first support member 211 and an annular first fixing member 211r fixed to the first support member 211 via a plurality of bolts (not shown). Accordingly, the first rotating member 210 is supported by the first support member 211 so as to be rotatable around the first shaft rod that is the central axis of the first rotating member 210. Then, by rotating the worm 217 by the first drive motor M1 of the first drive device 215, the first rotation member 210 is moved with respect to the first support member 211 and the container body 15 via the worm 217 and the worm wheel 218. It can be rotated around the first shaft rod. In the present embodiment, the first driving device 215 can freely rotate the first rotating member 210 with respect to the first support member 211 in both the forward direction and the reverse direction around the first shaft rod. It is configured.

Further, in the present embodiment, the first support member is disposed in a narrow space defined between the first rotating member 210 and the first support member 211 in the radial direction and between the two O-rings 213 in the axial direction. An auxiliary vacuum pump different from the vacuum pump is connected through a suction passage (not shown) formed in 211. Thus, the space is evacuated (roughly evacuated) by the auxiliary vacuum pump, so that air can be satisfactorily introduced into the container body 15 through the gap between the first rotating member 210 and the first support member 211. It becomes possible to suppress.

As shown in FIG. 2, the second rotating mechanism 22 includes a second rotating member 220 formed of a metal such as stainless steel, and a second support member 221 formed of a metal such as stainless steel in a short cylindrical shape (cylindrical shape). And a second driving device 225. The 2nd rotation member 220 has the short cylindrical cylindrical part 220a and the disk-shaped top-plate part 220b. In the present embodiment, the top plate portion 220b is located on the second shaft rod, the center of which is located on the cylindrical portion 220a, that is, the central axis of the second rotating member 220, and is orthogonal to the second shaft rod. Is formed integrally with the cylindrical portion 220a so as to protrude outward in the radial direction from the outer peripheral surface of the cylindrical portion 220a. However, the top plate portion 220b may be formed separately from the cylindrical portion 220a and closely joined (fixed) to one end of the cylindrical portion 220a by welding or the like. Furthermore, an elliptical opening 220c is formed in the top plate portion 220b.

The second support member 221 has an inner diameter that is slightly larger than the outer diameter of the cylindrical portion 220a of the second rotating member 220. Furthermore, two annular grooves in which O-rings (second seal members) 223 are respectively arranged are formed on the inner peripheral surface of the second support member 221 with an interval in the axial direction. As shown in FIG. 2, the second support member 221 is fixed to the shell portion 210 c of the first rotation member 210 of the first rotation mechanism 21. That is, the second support member 221 has the first angle Δ1 with respect to the first shaft rod whose center axis is the center axis of the first rotation member 210 (and the first support member 211). The shell portion 210c is joined tightly (without a gap) to the inclined small diameter open end (the open end opposite to the flange portion 210b side) of the shell portion 210c so as to incline and intersect the first shaft rod.

As shown in FIG. 3, the second drive device 225 includes a second drive motor (stepping motor) M 2 and a worm gear mechanism 226 including a worm (screw gear) 227 and a worm wheel (helical gear) 228. The worm 227 of the worm gear mechanism 226 is coupled to rotate integrally with the rotor of the second drive motor M2. The worm wheel 228 is fixed coaxially to the second rotating member 220 via a plurality of bolts on the back surface (the lower surface in FIG. 2) of the outer peripheral portion of the top plate portion 220b of the second rotating member 220. As can be seen from FIGS. 2 and 3, the components of the second driving device 225 are arranged outside the vacuum chamber 10, that is, outside the O-ring 223 and the second support member 221.

As shown in FIG. 2, the cylindrical portion 220 a of the second rotating member 220 is fitted coaxially into the second support member 221. Further, between the inner peripheral surface of the worm wheel 228 fixed to the top plate portion 220b of the second rotating member 220 and the outer peripheral surface of the second support member 221, a bearing 224, which is a ball bearing in this embodiment, is provided. Be placed. As shown in FIG. 2, the bearing 224 is held by a second support member 221 and an annular second fixing member 221r fixed to the second support member 221 via a plurality of bolts (not shown). As a result, the second rotating member 220 is rotatably supported by the second support member 221 around the second shaft rod that is the central axis of the second rotating member 220, and the second shaft rod is supported by the first shaft. It crosses the first axis Α with a first angle Δ1 with respect to Α. Then, by rotating the worm 227 by the second drive motor M2 of the second drive device 225, the second rotation member 220 is moved to the second support member 221 and the first rotation member 210 via the worm 227 and the worm wheel 228. On the other hand, it can be rotated around the second shaft rod. In the present embodiment, the second driving device 225 can freely rotate the second rotating member 220 with respect to the second support member 221 in both the forward and reverse directions around the second shaft rod. It is configured.

Further, in the present embodiment, the second support member is provided in a narrow space defined between the second rotation member 220 and the second support member 221 in the radial direction and between the two O-rings 223 in the axial direction. The auxiliary vacuum pump is connected through a suction passage (not shown) formed in 221. As a result, the space is evacuated (roughly evacuated) by the auxiliary vacuum pump so that air can flow into the container body 15 through the gap between the second rotating member 220 and the second support member 221. It becomes possible to suppress. In addition, the opening 220c of the second rotating member 220 has a long axis extending in the radial direction of the top plate portion 220b, and a center (intersection of the long axis and the short axis) of the opening 220c with respect to the second shaft rod. The top plate 220b is formed so as to be inclined on the second angle Δ2 and located on a straight line passing through the intersection point O between the first shaft Α and the second shaft Β.

As shown in FIG. 2, the third rotating mechanism 23 is formed in a cylindrical shape (cylindrical shape) with the emitting portion 12 as an object (third rotating member) formed of a metal such as stainless steel and a metal such as stainless steel. The third support member 231 and the third driving device 235 are included. The emitting portion 12 includes a short cylindrical tubular portion 12a, an annular flange portion 12b extending radially outward from one end of the tubular portion 12a, and a central hole 12o for allowing light to pass therethrough. Have. The bellows 4 described above can be connected to the flange portion 12b via a bolt (not shown). Moreover, in this embodiment, the output part 12 is comprised so that the collector 5 (refer FIG. 2) can be coaxially mounted in the center hole 12o.

The third support member 231 has an inner diameter that is slightly larger than the outer diameter of the cylindrical portion 12 a of the emitting portion 12. In addition, two annular grooves in which O-rings (third seal members) 233 are respectively disposed are formed on the inner peripheral surface of the third support member 231 with an interval in the axial direction. Further, the third support member 231 has a cylindrical extending portion 231e that extends in the axial direction. The free end of the extending portion 231 e is cut by a plane that forms an angle (90−Δ2) with respect to the central axis of the third support member 231. It has an oval open end that fits into an opening 220c formed in the plate portion 220b. As shown in FIG. 2, the open end of the extending portion 231e is fitted into the opening 220c and is joined (fixed) closely (without a gap) to the top plate portion 220b by welding. As a result, the third support member 231 has the second angle Δ2 with respect to the second shaft rod in which the central axis of the third support member 231 is the central axis of the second rotating member 220 (and the second support member 221). It is fixed to the top plate portion 220b of the second rotating member 220 so as to be inclined and pass through the intersection point O between the first shaft rod and the first shaft rod.

As shown in FIG. 3, the third drive device 235 includes a third drive motor (stepping motor) M 3 and a worm gear mechanism 236 including a worm (screw gear) 237 and a worm wheel (helical gear) 238. The worm 237 of the worm gear mechanism 236 is coupled to rotate integrally with the rotor of the third drive motor M3. Further, the worm wheel 238 is fixed to the rear surface (the lower surface in FIG. 2) of the flange portion 12b of the emission portion 12 coaxially with the emission portion 12 via a plurality of bolts. As can be seen from FIGS. 2 and 3, the components of the third driving device 235 are arranged outside the vacuum chamber 10, that is, outside the O-ring 233 and the third support member 231.

As shown in FIG. 2, the cylindrical portion 12 a of the emitting portion 12 is fitted coaxially in the third support member 231. In addition, a bearing 234 that is a ball bearing in the present embodiment is disposed between the inner peripheral surface of the worm wheel 238 fixed to the flange portion 12 b of the emitting portion 12 and the outer peripheral surface of the third support member 231. . As shown in FIG. 2, the bearing 234 is held by a third support member 231 and an annular third fixing member 231r fixed to the third support member 231 via a plurality of bolts (not shown). Accordingly, the emitting portion 12 is inclined by the second angle Δ2 with respect to the second shaft rod by the third support member 231 so that the flange portion 12 b is exposed to the outside of the vacuum chamber 10. A third axis Γ passing through the intersection point O with the second shaft Β is coaxially supported and rotatably supported around the third axis Γ. In addition, the first support member 211 and the container body 15 are covered from above by the shell portion 210 c of the first rotating member 210, the top plate portion 220 b of the second rotating member 220, the third supporting member 231, and the emitting portion 12. Then, by rotating the worm 237 by the third drive motor M3 of the third drive device 235, the emission unit 12 is moved with respect to the third support member 231 and the second rotation member 220 via the worm 237 and the worm wheel 238. It is possible to rotate around the third axis Γ. In the present embodiment, the third driving device 235 is configured to freely rotate the emitting unit 12 around the third axis Γ with respect to the third support member 231 in both the forward direction and the reverse direction. ing.

Further, in the present embodiment, the narrow space defined between the emitting portion 12 and the third support member 231 in the radial direction and between the two O-rings 233 in the axial direction has the third support member 231. The auxiliary vacuum pump is connected through a formed suction passage (not shown). As a result, the space is evacuated (roughly evacuated) by the auxiliary vacuum pump, thereby satisfactorily suppressing air from flowing into the container main body 15 through the gap between the emitting portion 12 and the third support member 231. It becomes possible.

As shown in FIG. 3, the first drive motor M1 of the first drive device 215, the second drive motor M2 of the second drive device 225, and the third drive motor M3 of the third drive device 235 are computers including CPUs and the like. It is controlled by the control device 50. The control device 50 of the present embodiment is configured to control the drive device (not shown) of the spectrometer 3 independently of the first to third drive motors M1, M2, and M3. When the control device 50 rotates the spectroscope 3, the first and second

rotating members

210 and 220 and the emitting portion 12 are synchronized with the rotation of the spectroscope 3, and the first and second

rotating members

210 and 220 The first to third drive motors M1, M2 and M3 are controlled so as to rotate around the shaft rod or the third axis Γ. However, if the first to

third driving devices

215, 225, and 235 are controlled in synchronization with the rotation of the spectroscope 3, the driving device for the spectroscope 3 is controlled by a control device other than the control device 50. It may be controlled.

Here, as shown in FIG. 4, the rotation angle of the first rotating member 210 around the first shaft rod is “α”, and the rotation angle of the second rotating member 220 around the second shaft rod is “β”. And the rotation angle of the emitting portion 12 around the third axis Γ is “γ”. Further, as shown in FIG. 5, the azimuth from the X axis of the point on the sphere centered on the intersection O is “θ”, and the elevation from the XY plane is “φ”. To do. In this case, between the rotation angles α and β of the first and second

rotating members

210 and 220, the azimuth angle θ and the elevation angle φ, and the first and second angles Δ1 and Δ2 described above, ) To (3) are established. Further, the relationship represented by the following equation (4) is established between the rotation angle γ of the emitting portion 12, the azimuth angle θ, the elevation angle φ, and the first and second angles Δ 1 and Δ 2. 4 and 5 are set as shown in FIG. 2 with respect to the vacuum chamber 10 (soft X-ray emission spectroscopy system 1), and the incident portion 11 of the vacuum chamber 10 is set. The incident direction of the radiated light with respect to X coincides with the extending direction of the X axis, and the first axis 一致 coincides with the Y axis. Further, the rotation direction of the first and second

rotating members

210 and 220 and the emitting portion 12 is positive in the direction shown in FIG. Furthermore, FIG. 4 shows the first shaft rod and the second shaft rod when the rotation angles α and β of the first and second

rotating members

210 and 220 are 0 (rad).

In the positioning device 20 of the vacuum chamber 10, the possible range of the azimuth angle θ of the point on the spherical crown with the intersection O as the center is π / 2− (Δ1 + Δ2) ≦ θ ≦ π / 2− | Δ1−Δ2 |, π / 2 + | Δ1−Δ2 | ≦ θ ≦ π / 2 + (Δ1 + Δ2). In order to obtain an arbitrary azimuth angle θ within a continuous angle range, Δ1 = Δ2, 0 ≦ α ≦ It is necessary to satisfy 2π and 0 ≦ β ≦ π. For this reason, in the vacuum chamber 10, the first angle Δ1 and the second angle Δ2 are determined to be the same. In addition, as described above, the first driving device 215 can freely rotate the first rotating member 210 with respect to the first support member 211 in both the forward direction and the reverse direction around the first shaft rod. The second driving device 225 can freely rotate the second rotating member 220 relative to the second support member 221 in both the forward and reverse directions around the second shaft rod. Composed.

Thus, in the vacuum chamber 10, the first and second driving

members

215 and 225 rotate the first and second

rotating members

210 and 220 relative to the first or

second support members

211 and 221, thereby obtaining a spectrometer. 3, the length of the emitting portion 12 where the flange portion 12 b is exposed to the outside from the intersection O in the extending direction of the third axis Γ to the emitting portion 12 (for example, the extension of the third axis Γ) The distance from the intersection point O in the present direction to the end face of the flange portion 12b) can be accurately positioned at an arbitrary position on the surface of the spherical crown having a radius of curvature. Further, the emitting unit 12 (and the bellows 4) generated by the rotation of the first and second

rotating members

210 and 220 by rotating the emitting unit 12 with respect to the third support member 231 by the third driving device 235. Torsion around the third axis Γ can be eliminated. As a result, it is possible to smoothly perform the measurement by the soft X-ray emission spectroscopy system 1 by moving the emission unit 12 to a more appropriate position according to the rotation of the spectrometer 3. Further, when the condenser 5 is attached to the emission unit 12, at least one of the first to

third driving devices

215, 225, and 235 is operated to finely position the condenser 5 with respect to the spectrometer 3. Can be adjusted.

In the vacuum chamber 10, the first support member 211 of the first rotation mechanism 21 is closely joined to the open end 15 e of the container body 15, and the second rotation is performed between the first rotation member 210 and the first support member 211. O-

rings

213, 223, or 233 are disposed between the member 220 and the second support member 221 and between the emission unit 12 and the third support member 231. Thereby, even if the 1st and

2nd rotation members

210 and 220 and the radiation | emission part 12 rotate, it becomes possible to maintain the inside of the vacuum chamber 10 in an ultra-high vacuum state.

Further, in the vacuum chamber 10, the first driving device 215 is disposed outside the O-ring 213 and the first support member 211, and the second driving device 225 is disposed outside the O-ring 223 and the second support member 221. In addition, the third drive device 235 can be disposed outside the O-ring 213 and the third support member 231. Therefore, the entire vacuum chamber 10 can be made more compact while sufficiently securing the internal volume of the vacuum chamber 10. Since the vacuum chamber 10 is made compact, the distance from the emission point of the sample S to the spectroscope 3 can be shortened, thereby increasing the capture angle and improving the measurement efficiency of the spectroscope 3.

As described above, in the vacuum chamber 10 of the present disclosure, the positioning unit 20 accurately positions the emission unit 12 at a more appropriate position in the three-dimensional space according to the rotation of the spectroscope 3 and has a good vacuum inside. Can be kept in a state. In the vacuum chamber 10, the first angle Δ1 and the second angle Δ2 are determined to be the same, but the present invention is not limited to this. That is, the continuity of the azimuth angle θ is lost, but the first angle Δ1 and the second angle Δ2 may be determined to be different from each other. Further, the configuration of the vacuum chamber 10 may be applied to, for example, a sealed container in which a gas other than air is enclosed. Further, the first to

third driving devices

215, 225, and 235 described above include gear mechanisms other than the worm gear mechanism, a winding transmission mechanism, a roller transmission mechanism, and the like instead of the

worm gear mechanisms

216, 226, and 236. There may be. Further, the positioning device 20 of the vacuum chamber 10 may be used alone as a device for positioning an object in a three-dimensional space.

The invention of the present disclosure is not limited to the above-described embodiment, and it goes without saying that various changes can be made within the scope of the extension of the present disclosure. Furthermore, the above-described embodiment is merely a specific form of the invention described in the Summary of Invention column, and does not limit the elements of the invention described in the Summary of Invention column.

The invention of the present disclosure can be used in the manufacturing industry of positioning devices, sealed containers, vacuum chambers, and the like.

Claims

A positioning device for positioning an object in a three-dimensional space,
A first rotating member; a first supporting member that rotatably supports the first rotating member around a first axis that is a central axis of the first rotating member; and the first rotating member that is the first supporting member. A first rotation mechanism including a first drive device that rotates about the first axis with respect to the first axis;
A second rotating member, and the second rotating member are rotatably supported around a second axis that is a central axis of the second rotating member, and the second axis is first with respect to the first axis. A second support member fixed to the first rotating member so as to be inclined at an angle and intersecting the first axis; and the second rotating member is arranged around the second axis with respect to the second supporting member. A second rotation mechanism including a second drive device for rotation;
The object is fixed to the second rotating member and the object is tilted by a second angle with respect to the second axis and supported on a third axis passing through the intersection of the first axis and the second axis. A third support member that
A positioning device comprising:
The positioning device according to claim 1, wherein the first angle and the second angle are the same.
The positioning device according to claim 1 or 2,
The third support member rotatably supports the object around the third axis;
A positioning device further comprising a third driving device for rotating the object relative to the third support member around the third axis.
A sealed container comprising the positioning device according to any one of claims 1 to 3,
A container body having an open end to which the first support member of the first rotation mechanism is closely joined;
A first seal member disposed between the first rotating member and the first support member;
A second seal member disposed between the second rotating member and the second support member;
With
The sealed object is supported by the third support member so that at least a part of the object is exposed to the outside of the sealed container.
A vacuum chamber having an incident part of synchrotron radiation, a stage that supports a sample irradiated with the synchrotron light, and an output part that transmits light emitted from the sample;
A container body having the incident portion and at least one end being opened;
A first rotating member and a first supporting member that is closely joined to the open end of the container body and that supports the first rotating member around a first axis that is a central axis of the first rotating member. A first seal member disposed between the first rotating member and the first support member; and a first seal member that rotates the first rotating member about the first axis with respect to the first support member. A first rotation mechanism including one driving device;
A second rotating member, and the second rotating member are rotatably supported around a second axis that is a central axis of the second rotating member, and the second axis is first with respect to the first axis. A second support member that is closely joined to the first rotating member so as to be inclined by an angle and intersect the first axis; and a second supporting member that is disposed between the second rotating member and the second supporting member. A second rotation mechanism including a second seal member and a second drive device that rotates the second rotation member about the second axis with respect to the second support member;
The exit portion is inclined by a second angle with respect to the second axis so that at least a part is exposed to the outside of the sealed container, and passes through the intersection of the first axis and the second axis. A third support member that is coaxial with the three axes and rotatably supported around the third axis, and is tightly joined to the second rotation member, and is disposed between the emitting portion and the third support member A third rotation mechanism including a third seal member formed, and a third drive device that rotates the light emitting portion around the third axis with respect to the third support member;
A vacuum chamber comprising:
The vacuum chamber according to claim 5,
The emission part is connected to a spectrometer via a bellows,
The spectrometer is a vacuum chamber that is rotated about a rotation axis that extends in a direction orthogonal to both the incident direction of the radiated light and the first axis.
The vacuum chamber according to claim 5 or 6, wherein the first, second and third rotating mechanisms are hollow rotary introducers.