WO2017100965A1

WO2017100965A1 - Radio frequency power supply for laser

Info

Publication number: WO2017100965A1
Application number: PCT/CN2015/000904
Authority: WO
Inventors: 徐海军
Original assignee: 徐海军
Priority date: 2015-12-14
Filing date: 2015-12-14
Publication date: 2017-06-22

Abstract

A radio frequency power supply for a laser, comprising a first power amplification module (1), a second power amplification module (2), a third power amplification module (3), a fourth power amplification module (4), a fifth power amplification module (5), a sixth power amplification module (6), a first microstrip power synthesising circuit (7), a second microstrip power synthesising circuit (8), a third microstrip power synthesising circuit (9), a radio frequency output matching circuit (10), and a water-cooled heat dissipation device (11). The six power amplification modules simultaneously supply 81.36 MHz of radio frequency power current, which is synthesised into one current by means of the three microstrip power synthesising circuits, then conveyed to the output matching microstrip circuit by means of electrodes and, after being matched through the output matching microstrip circuit, is outputted to a carbon dioxide laser.

Description

RF power supply for lasers

The present invention relates to a radio frequency power supply for a laser, and more particularly to the field of lasers.

Background technique

Gas lasers, especially carbon dioxide gas lasers, use a radio frequency power source to generate a laser for the discharge of a gas in a laser. The role of the RF power supply is to generate high-frequency excitation current. The traditional RF power supply uses common heat sinks and structures. Generally, it is air-cooled or single-sided water-cooled. Therefore, high-power lasers are placed separately from the RF power supply. This requires multiple enclosures, increased in size, and increased in cost, and requires an RF cable to be connected between the laser and the RF power supply. This RF cable generates heat when operating at high power and generates additional Energy loss. Moreover, the internal RF power synthesizers of commonly used lasers generally use a magnetic ring transformer or a discrete inductor and capacitor to form a synthesizer. Such a radio frequency power synthesizer is relatively bulky because it needs to be connected to an additional component on the composite circuit board. And the efficiency of the micro-band RF power synthesizer will be low, so it will generate heat and equipment that needs to be cooled. The advantage of the microstrip circuit is that it does not require additional components, and it has high efficiency and low heat generation. Even if it is heated, it can be carried away by the circuit board to conduct heat to the underground heat sink, without the need for an air-cooled heat dissipation method. Summary of the invention

In view of the problems and deficiencies of the above-mentioned existing radio frequency power supply, an object of the present invention is to provide an RF power supply system with high power density and small size and capable of being mounted into a laser.

A radio frequency power supply for a laser, comprising a first power amplification module, a second power amplification module, a third power amplification module, a fourth power amplification module, a fifth power amplification module, a sixth power amplification module, and a first microstrip Power synthesis circuit, second microstrip power synthesis circuit, third power synthesis microstrip circuit, RF output matching circuit and water cooling radiator; wherein, the first power amplification module, the second power amplification module, the third power amplification module, Four power amplification modules, a fifth power amplification module, and a sixth power amplification module, the six modules simultaneously give an RF power current of 81.36 Mhz, which is transmitted to the first power synthesis microstrip circuit through the electrodes, and the third power synthesis microstrip a circuit, the first power synthesis microstrip circuit and the third power synthesis microstrip circuit, each of the signals output by the three power amplification modules are combined into one path, and outputted to an input end of the second power synthesis microstrip circuit, The second power synthesis microstrip circuit combines two input power currents into one path and delivers them through electrodes The output matching microstrip circuit is matched to the carbon dioxide laser after being matched by the output matching microstrip circuit.

A power synthesis microstrip circuit, comprising: a first microstrip transmission portion; an RF current is input from three input terminals, and the RF current is finally aggregated and synthesized on the output end through the microstrip line; wherein the first microstrip transmission portion Is a width of 3. 2mm, The 237mm copper-plated line is formed by connecting three straight lines of 69.6 mm long and two semicircles having a radius of 4.5 mm.

A power synthesis microstrip circuit, comprising: a second microstrip transmission portion; an RF current is input from three input terminals, and the RF current is finally aggregated and synthesized on the output end through the microstrip line; wherein the second microstrip transmission portion It is a copper-clad line having a width of 3. 2 mm and a length of 186.3 mm, wherein four straight lines of 36 mm length are connected with three semi-circles having a radius of 4. 5 mm.

A power synthesis microstrip circuit, comprising: a third microstrip transmission portion; an RF current is input from two input terminals, and the RF current is finally aggregated and synthesized on the output end through the microstrip line; wherein the third microstrip transmission portion It is a copper-clad line with a width of 4 mm and a length of 398 mm, in which nine straight lines of 34 faces are connected with eight semi-circles with a radius of 3.67 mm.

An output-matching microstrip circuit is characterized in that: the RF current is input to the matching end, and is outputted from the output end to the laser after being matched by the capacitor, wherein the fourth microstrip transmission portion is a width of 8 mm and a length of 51.5 mm. Copper lines, when the RF current passes, it plays a matching role. BRIEF DESCRIPTION OF THE DRAWINGS:

Figure 1 is a schematic view showing the system connection of the present invention;

2 is a detailed wiring diagram of the power combining microstrip circuit 7 of the present invention;

3 is a detailed wiring diagram of the power combining microstrip circuit 9 of the present invention;

4 is a detailed wiring diagram of the power combining microstrip circuit 8 of the present invention;

Figure 5 is a detailed wiring diagram of the output matching microstrip circuit 10 of the present invention;

Figure 6 is a detailed wiring diagram of the first total microstrip synthesis transmission section 29;

Figure 7 is a detailed wiring diagram of the second total microstrip synthesis transmission section 30;

Figure 8 is a detailed wiring diagram of the third total microstrip synthesis transmission section 31;

Figure 9 is a detailed wiring diagram of the fourth total microstrip synthesis transmission section 32;

Figure 10 is a detailed wiring diagram of the fifth total microstrip synthesis transmission section 33;

Figure 11 is a detailed wiring diagram of the sixth total microstrip synthesis transmission section 34;

Figure 12 is a detailed wiring diagram of the seventh total microstrip synthesis transmission section 35;

Figure 13 is a detailed wiring diagram of the eighth total microstrip synthesis transmission portion 36; detailed description:

The invention is further described in conjunction with the specific embodiments and the accompanying drawings, but should not be construed as limiting the scope of the invention.

Referring to FIG. 1, a first power amplifying module 1, a second power amplifying module 2, a third power amplifying module 3, a fourth power amplifying module 4, a fifth power amplifying module 5, a sixth power amplifying module 6, and a first microstrip a power combining circuit 7, a second microstrip power combining circuit 8, a third power combining microstrip circuit 9, a radio frequency output matching circuit 10, a water cooling radiator 11, wherein the first power amplifying module 1 and the second power amplifying module 2 The third amplification module 3, the fourth power amplification module 4, the fifth power amplification module 5, and the sixth power amplification module 6, the six modules simultaneously give an RF power current of 81.36 Mhz, which is transmitted to the first power synthesis micro through the electrodes. With the circuit 7, the third power synthesis microstrip circuit 9, the first power synthesis microstrip circuit 7 and the third power synthesis microstrip circuit 9, each of the signals output by the three power amplification modules are combined into one way, and the output is sent to An input end of the second power synthesis microstrip circuit 8, the second power synthesis microstrip circuit 8 synthesizes two input power currents into one path and passes through the electrodes Microstrip matching circuit to the output 10, via the output matching output carbon dioxide laser to match the microstrip circuit.

Referring to Figure 2, the power synthesis microstrip circuit is shown in Figure 7. The RF current is input from the input terminals 12, 13, 14 and the RF current is finally aggregated through the microstrip line to the output terminal 15. The principle is that the RF current passes through a specific width and After the length of the microstrip is applied to the copper wire, it can be synthesized together, wherein the role of the microstrip is to match and reduce the loss. The first microstrip transmission portion 25 is a copper-plated circuit having a width of 3.2 ram and a length of 237 mm, wherein three straight lines of 69.6 mm long are connected with two semicircles having a radius of 4. 5 mm. The microstrip transmission part is a key part, so the design can reduce the volume and reduce the loss. The principle is that RF current flows through these microstrip lines to maintain the same phase at the output and is evenly output to the output. The power synthesis microstrip circuit 7 is composed of three total microstrip composite transmission sections, all of which are a microstrip copper wire having a width of 3.2 mm and a length of 557 mm, the difference being that the size of the circuit board is gone. The positions are different, and the connection order is different. The first total microstrip synthesis transmission portion 29 and the second total microstrip synthesis transmission portion 30 are separated from the microstrip input end of the third total microstrip synthesis transmission portion 31. The outputs are connected together. The design benefit of all microstrip synthesis lines is that the current can be averaged into one way and the phase of each line will not cancel each other out, no additional components are needed, and the efficiency is high and the heat is small, even if it is hot. It can also be carried away by the circuit board to conduct heat to the underground heat sink.

Referring to FIG. 3, the power synthesis microstrip circuit is shown in FIG. 9. The RF current is input from the input terminals 16, 17, 18, and the RF current is finally aggregated and synthesized on the output terminal 19 through the microstrip line, wherein the principle is that the RF current passes through a specific width and After the length of the microstrip is applied to the copper wire, it can be synthesized together, wherein the role of the microstrip is to match and reduce the loss. The second microstrip transmission portion 26 is a copper-plated circuit having a width of 3.2 mm and a length of 186.3 inches, wherein four straight lines of 36 mm length are connected with three semicircles having a radius of 4. 5 mm. The microstrip transmission parts are all key parts, and the design can reduce the volume and reduce the loss. The principle is that RF current flows through these microstrip lines to maintain the same phase at the output and is evenly output to the output. The power synthesis microstrip circuit 9 is composed of three total microstrip composite transmission sections, each of which is a microstrip copper wire having a width of 3.2 ram and a length of 557 mm, which is distinguished by the size of the circuit board. The positions are different, and the connection order is different. The fourth total microstrip synthesis transmission unit 32 and the fifth total microstrip synthesis transmission unit 33 are separated from the microstrip input end of the sixth total microstrip synthesis transmission unit 34. The outputs are connected together. The design benefit of all microstrip synthesis lines is that the current can be averaged into one way and the phase of each line will not cancel each other out, no additional components are needed, and the efficiency is high and the heat is small, even if it is hot. It can also be carried away by the circuit board to conduct heat to the underground heat sink.

Referring to FIG. 4, the power synthesis microstrip circuit is shown in FIG. 8. The RF current is input from the input terminals 20 and 21, and the RF current is finally aggregated and synthesized on the output terminal 22 through the microstrip line. The principle is that the RF current passes through a specific width and length. After the microstrip is coated with copper wire, it can be synthesized together, wherein the role of the microstrip is to match and reduce the loss. The third microstrip transmission portion 27 is a copper-clad line having a width of 4 mm and a length of 398 mm, wherein the three micro-band transmissions are formed by connecting nine straight lines of 34 mm length and eight semi-circles having a radius of 3.67 mm. The parts are all key parts, so the design can reduce the volume and reduce the loss. The principle is that RF current flows through these microstrip lines to maintain the same phase at the output and is evenly output to the output. The power synthesis microstrip circuit 8 is composed of two total microstrip synthesis transmission sections, both of which are a microstrip copper wire with a width of 4 hidden and a length of 557 mra, the difference being the position of the board due to the size of the board. The difference is that the connection order is different. The input of the seventh total microstrip synthesis transmission unit 35 is connected to the first total microstrip synthesis transmission unit 29 and the second total microstrip synthesis transmission unit 30 and the third total microstrip. The microstrip output of the synthesis transmission section 31, and the microstrip input of the eighth total microstrip synthesis transmission section 36 is connected to the fourth total microstrip synthesis transmission section 32 and the fifth total microstrip synthesis transmission section 33 and the sixth total The microstrip output end of the microstrip synthesis transmission section 34, the last seventh total microstrip synthesis transmission section 35 and the output end of the microstrip of the eighth total microstrip synthesis transmission section 36 are connected together, and the design of such a microstrip synthesis line The advantage is that the current can be averaged into one way and the phase of each line will not cancel each other, no additional components are needed, and the efficiency is high and the heat is small. Even if the heat is generated, the heat can be led to the underground heat sink through the circuit board. go.

Referring to Figure 5, the output matching microstrip circuit 10, the RF current is input from the 23 input to the matching terminal, and after being capacitively matched, the output is output from the output terminal 24 to the laser. The fourth microstrip transmission portion 28 is a copper-clad line having a width of 8 mm and a length of 51.5 mm, which serves to match the radio frequency current.

Referring to Fig. 6, the first total microstrip synthesis transmission portion 29 is a detailed wiring pattern, and the transmission portion is a microstrip copper wire having a width of 3.2 mm and a total length of 557 mm, wherein the line is composed of 10 straight lines and 6 radii. 5毫米半圆, 4 1/4 circle with a radius of 4. 5mm.

Referring to Fig. 7, the second total microstrip synthesis transmission portion 30 is a detailed wiring pattern. The transmission portion is a microstrip copper wire having a width of 3.2 mm and a total length of 557 mm, wherein the line is composed of 8 straight lines and 6 radii. 5mra semicircle, 3 1/4 circle with a radius of 4. 5mm.

Referring to Figure 8, the third total microstrip synthesis transmission portion 31 is a detailed wiring diagram, the transmission portion is a width of 3.2 mm, the total length of 557 5毫米的1/4圆组成。 The microstrip copper wire, which is composed of 11 straight lines and 9 radii of 4. 5mm semicircle, 2 1/4 circle with a radius of 4. 5mm. Referring to Fig. 9, the fourth total microstrip synthesis transmission portion 32 is a detailed wiring pattern, and the transmission portion is a microstrip copper wire having a width of 3.2 mm and a total length of 557 mm, wherein the ellipse is 11 straight lines and 9 radii are 4. 5毫米半圆, 2 1/4 circle with a radius of 4. 5mm.

Referring to FIG. 10, the fifth total microstrip synthesis transmission portion 33 is a detailed wiring diagram, and the transmission portion is a microstrip copper wire having a width of 3.2 min and a total length of 557 mm, wherein the distance is 8 straight lines and 6 radii are 4. 5 隐半圆, 3 1/4 circle with a radius of 4. 5mm.

Referring to Fig. 11, the sixth total microstrip synthesis transmission portion 34 is a detailed wiring diagram, and the transmission portion is a microstrip copper wire having a width of 3.2 mm and a total length of 557 mm, wherein the line is composed of 10 straight lines and 6 radii. 5mm semicircle, 4 1/4 circle with a radius of 4.5.

Referring to FIG. 12, the seventh total microstrip synthesis transmission portion 35 is a detailed wiring diagram. The transmission portion is a microstrip copper wire having a width of 4 mm and a total length of 557 mm, wherein the line is composed of 14 straight lines and 13 radii of 3.67 mm. , a 1/4 circle with a radius of 3.67mm.

Referring to Fig. 13, the eighth total microstrip synthesis transmission portion 36 is a detailed wiring diagram, the transmission portion is a microstrip copper wire having a width of 4 cu., and a total length of 557 mm, which is composed of 14 straight lines and 6 radii of 3.67 ram. Semicircle, 9 1/4 circle with a radius of 3.67ram.

Claims

Claim

1 . A radio frequency power supply for a laser, comprising: a first power amplification module, a second power amplification module, a third power amplification module, a fourth power amplification module, a fifth power amplification module, and a sixth power amplification Module, first microstrip power synthesis circuit, second microstrip power synthesis circuit, third power synthesis microstrip circuit, radio frequency output matching circuit and water cooling radiator; wherein, first power amplification module, second power amplification module, a three-power amplification module, a fourth power amplification module, a fifth power amplification module, and a sixth power amplification module, the six modules simultaneously giving an RF power current of 81.36 Mhz, which is transmitted to the first power synthesis microstrip circuit through the electrodes, a third power synthesis microstrip circuit, the first power synthesis microstrip circuit and the third power synthesis microstrip circuit, each of the signals output by the three power amplification modules are combined into one way, and outputted to the second power synthesis microstrip circuit Input, the second power synthesis microstrip circuit combines two input power currents into one path, Transport through the electrode to the output microstrip matching circuit, the output of the laser to the carbon dioxide through a microstrip matching circuit to match the output.

2. A power synthesis microstrip circuit, comprising: a first microstrip transmission portion; a radio frequency current is input from three input terminals, and the radio frequency current is finally aggregated and synthesized on the output end through the microstrip line; wherein the first microstrip The transmission portion is a copper-plated circuit having a width of 3.2 mm and a length of 237 mm, wherein three straight lines of 69.6 mm long are connected with two semicircles having a radius of 4. 5 ram.

The power-synthesizing microstrip circuit according to claim 2, wherein the power-synthesizing microstrip circuit is composed of three total microstrip synthesis transmission sections, each of which is a width of 3. 2 mm, long The 557 mm microstrip copper wire, wherein the first total microstrip synthesis transmission portion and the second total microstrip synthesis transmission portion are separated from the microstrip input end of the third total microstrip synthesis transmission portion, and the outputs are connected together.

A power synthesis microstrip circuit, comprising: a second microstrip transmission portion; the radio frequency current is input from three input terminals, and the radio frequency current is finally aggregated and synthesized on the output end through the microstrip line; wherein the second microstrip The transmission portion is a copper-clad line having a width of 3.2 mm and a length of 186.3 mm, wherein four straight lines of 36 mm length are connected with three semi-circles having a radius of 4. 5 mm.

The power-synthesizing microstrip circuit according to claim 4, wherein the power-synthesizing microstrip circuit is composed of three total microstrip synthesis transmission sections, each of which is a width of 3. 2 mm, long The 557 mm microstrip copper wire, the fourth total microstrip synthesis transmission portion and the fifth total microstrip synthesis transmission portion are separated from the microstrip input end of the sixth total microstrip synthesis transmission portion, and the outputs are connected together.

A power synthesis microstrip circuit, comprising: a third microstrip transmission portion; an RF current is input from two input terminals, and the RF current is finally aggregated and synthesized on the output end through the microstrip line; wherein the third microstrip The transmission part is a copper-clad line with a width of 4 mm and a length of 398 mm, wherein nine straight lines of 34 mm length are connected with eight semi-circles having a radius of 3.67 mm.

7. The power synthesis microstrip circuit according to claim 6, wherein: said power synthesis microstrip circuit is composed of two total microstrip synthesis transmission sections, each of which is a width of 4 mm and a length of 557 mm. The microstrip copper wire, the input of the seventh total microstrip synthesis transmission portion is the first total microstrip synthesis transmission portion and the second total microstrip synthesis transmission portion according to claim 2; a microstrip output end of the third total microstrip synthesis transmission portion, and the microstrip input of the eighth total microstrip synthesis transmission portion is connected to the fourth total microstrip synthesis transmission portion and the fifth total micro according to claim 4. The microstrip output terminal with the combined transmission portion and the sixth total microstrip synthesis transmission portion is connected to the output end of the microstrip of the eighth total microstrip synthesis transmission portion.

8. An output matching microstrip circuit, characterized in that: the radio frequency current is input into the matching end, and is outputted from the output end to the laser after being matched by the capacitor inductance, wherein the fourth microstrip transmission part is a width of 8 paintings and a length of 51. 5 painted copper lines, the RF current through the matching role.