CN105449502A - Radio-frequency power supply used for laser - Google Patents
Radio-frequency power supply used for laser Download PDFInfo
- Publication number
- CN105449502A CN105449502A CN201510923985.XA CN201510923985A CN105449502A CN 105449502 A CN105449502 A CN 105449502A CN 201510923985 A CN201510923985 A CN 201510923985A CN 105449502 A CN105449502 A CN 105449502A
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- Prior art keywords
- micro
- band
- transport part
- power
- radio
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/09702—Details of the driver electronics and electric discharge circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/04—Arrangements for thermal management
- H01S3/041—Arrangements for thermal management for gas lasers
Abstract
A radio-frequency power supply used for a laser is provided. The radio-frequency power supply is characterized by comprising a first power amplification module, a second power amplification module, a third power amplification module, a fourth power amplification module, a fifth power amplification module, a sixth power amplification module, a first microstrip power synthetic circuit, a second microstrip power synthetic circuit, a third microstrip power synthetic circuit, a radio-frequency output matching circuit and a water cooling radiator, wherein the first power amplification module, the second power amplification module, the third power amplification module, the fourth power amplification module, the fifth power amplification module and the sixth power amplification module provide 81.36MHz radio-frequency power current concurrently.
Description
Technical field
The present invention relates to a kind of radio-frequency power supply for laser, particularly relate to field of lasers.
Background technology
Gas laser, particularly carbon dioxide gas laser are all use radio-frequency power supply to produce laser to the gas discharge in laser.Radio-frequency power supply effect wherein produces high-frequency exciting current, and traditional radio-frequency power supply all uses common radiator and structure, generally with air-cooled or one side water-cooling pattern, therefore powerful laser is all separated with radio-frequency power supply, the multiple casing of such needs, volume adds, cost too increases, and between laser with radio-frequency power supply, also need a radio frequency cable to be connected, and this root radio frequency cable can generate heat when high-power operation and produce extra energy loss.And the radio-frequency (RF) power combiner of conventional laser inside generally all adopts magnetic ring transformer or forms synthesizer with discrete inductance capacitance, therefore volume can be relatively large because will weld extra components and parts on synthetic line plate for such radio-frequency (RF) power combiner, and the radio-frequency (RF) power combiner of the relatively micro-band of efficiency can be low, thus can produce the equipment that heat also needs supporting heat radiation.The advantage of microstrip circuit does not need extra components and parts, and the heating of efficiency height is little, even if heating is also taken away by wiring board the heating panel that heat leads underground, and need not this air-cooled radiating mode of incorporated fan.
Summary of the invention
For the problems and shortcomings part existing for existing radio-frequency power supply described above, the object of this invention is to provide the rf power system that also can be installed into laser that a power density is high and volume is little.
A kind of radio-frequency power supply for laser, comprise the first power amplifier module, second power amplifier module, the 3rd power amplifier module, the 4th power amplifier module, 5th power amplifier module, 6th power amplifier module, first micro-band power synthesis circuit, second micro-band power synthesis circuit, 3rd power combing microstrip circuit, radio frequency output matching circuit and water-filled radiator, wherein, first power amplifier module, second power amplifier module, 3rd power amplifier module, 4th power amplifier module, 5th power amplifier module, 6th power amplifier module, these six modules provide the radio-frequency power electric current of 81.36Mhz simultaneously, the first power combing microstrip circuit is transferred to by electrode, 3rd power combing microstrip circuit, described first power combing microstrip circuit and the 3rd power combing microstrip circuit, the signal syntheses that Ge Jiang tri-road power amplifier module exports is a road, export the input being given to the second power combing microstrip circuit, described second power combing microstrip circuit synthesizes a road two-way input power electric current, and flow to output matching microstrip circuit by electrode, carbon dioxide laser is outputted to after described output matching microstrip circuit coupling.
A kind of power combing microstrip circuit, is characterized in that: comprise first micro-band transport part; Radio-frequency current inputs from three inputs, and radio-frequency current is finally assembled through microstrip line and is synthesized on output; Wherein first micro-band transport part is the deposited copper wire of a wide 3.2mm, length 237mm, and being wherein that the semicircle of 4.5mm is end to end by the long straight line of 3 69.6mm and 2 radiuses forms.
A kind of power combing microstrip circuit, is characterized in that: comprise second micro-band transport part; Radio-frequency current inputs from three inputs, and radio-frequency current is finally assembled through microstrip line and is synthesized on output; Wherein second micro-band transport part is the deposited copper wire of a wide 3.2mm, length 186.3mm, and being wherein that the semicircle of 4.5mm is end to end by the long straight line of 4 36mm and 3 radiuses forms.
A kind of power combing microstrip circuit, is characterized in that: comprise the 3rd micro-band transport part; Radio-frequency current inputs from two inputs, and radio-frequency current is finally assembled through microstrip line and is synthesized on output; Wherein the 3rd micro-band transport part is the deposited copper wire of a wide 4mm, length 398mm, and being wherein that the semicircle of 3.67mm is end to end by the long straight line of 9 34mm and 8 radiuses forms.
A kind of output matching microstrip circuit, it is characterized in that: radio-frequency current inputs into mating end, after capacitor and inductor coupling, output to laser from output, wherein the 4th micro-band transport part is a wide 8mm, the deposited copper wire of length 51.5mm, radio-frequency current is through the out-of-date effect playing coupling.
Accompanying drawing illustrates:
Fig. 1 is system connection diagram of the present invention;
Fig. 2 is the detailed routing figure of power combing microstrip circuit 7 of the present invention;
Fig. 3 is the detailed routing figure of power combing microstrip circuit 9 of the present invention;
Fig. 4 is the detailed routing figure of power combing microstrip circuit 8 of the present invention;
Fig. 5 is the detailed routing figure of output matching microstrip circuit 10 of the present invention;
Fig. 6 is first total micro-band synthesis transport part 29 detailed routing figure;
Fig. 7 is second total micro-band synthesis transport part 30 detailed routing figure;
Fig. 8 is the 3rd total micro-band synthesis transport part 31 detailed routing figure;
Fig. 9 is the 4th total micro-band synthesis transport part 32 detailed routing figure;
Figure 10 is the 5th total micro-band synthesis transport part 33 detailed routing figure;
Figure 11 is the 6th total micro-band synthesis transport part 34 detailed routing figure;
Figure 12 is the 7th total micro-band synthesis transport part 35 detailed routing figure;
Figure 13 is the 8th total micro-band synthesis transport part 36 detailed routing figure;
Embodiment:
Below in conjunction with specific embodiments and the drawings the invention will be further described book, but should not limit the scope of the invention with this.
With reference to figure 1, first power amplifier module 1, second power amplifier module 2, 3rd power amplifier module 3, 4th power amplifier module 4, 5th power amplifier module 5, 6th power amplifier module 6, first micro-band power synthesis circuit 7, second micro-band power synthesis circuit 8, 3rd power combing microstrip circuit 9, radio frequency output matching circuit 10, water-filled radiator 11, wherein, first power amplifier module 1, second power amplifier module 2, 3rd amplification module 3, 4th power amplifier module 4, 5th power amplifier module 5, 6th power amplifier module 6, six modules provide the radio-frequency power electric current of 81.36Mhz simultaneously, the first power combing microstrip circuit 7 is transferred to by electrode, 3rd power combing microstrip circuit 9, described first power combing microstrip circuit 7 and the 3rd power combing microstrip circuit 9, the signal syntheses that Ge Jiang tri-road power amplifier module exports is a road, export the input being given to the second power combing microstrip circuit 8, described second power combing microstrip circuit 8 synthesizes a road two-way input power electric current, and flow to output matching microstrip circuit 10 by electrode, carbon dioxide laser is outputted to after described output matching microstrip circuit coupling.
With reference to figure 2, be power combing microstrip circuit Fig. 7 in figure, radio-frequency current is from input 12,13,14 inputs, radio-frequency current is finally assembled through microstrip line and is synthesized on output 15, and wherein principle is after to be radio-frequency current apply copper cash by micro-band of specific width and length, can be synthesized together, wherein the effect of micro-band is coupling and Loss reducing.First micro-band transport part 25 is wide 3.2mm, the deposited copper wire of length 237mm, be wherein that the semicircle of 4.5mm is end to end by the long straight line of 3 69.6mm and 2 radiuses to form, the above micro-band transport part is all key position, designs the effect playing reduced volume reduction loss like this.Principle can keep same phase place at output after radio-frequency current flows through these microstrip lines, and output to output equably.Power combing microstrip circuit 7 synthesizes transport part by three total micro-bands and forms, these three parts are all wide 3.2mm, micro-band copper cash of long 557mm, its difference is that the position walked because of the size of circuit board is different, be exactly that the order of connection is different in addition, first total micro-band synthesis transport part 29 and second total micro-band synthesize transport part 30 and are always micro-ly with the micro-tape input end synthesizing transport part 31 to be what to separate with the 3rd, export and then receive together, the design benefit of all micro-band synthetic lines electric current can be synthesized a road fifty-fifty and keep the phase place of each circuit to cancel each other, do not need extra components and parts, and the heating of efficiency height is little, even if heating is also taken away by wiring board the heating panel that heat leads underground.
With reference to figure 3, be power combing microstrip circuit Fig. 9 in figure, radio-frequency current is from input 16,17,18 inputs, radio-frequency current is finally assembled through microstrip line and is synthesized on output 19, and wherein principle is after to be radio-frequency current apply copper cash by micro-band of specific width and length, can be synthesized together, wherein the effect of micro-band is coupling and Loss reducing.Second micro-band transport part 26 is wide 3.2mm, the deposited copper wire of length 186.3mm, be wherein that the semicircle of 4.5mm is end to end by the long straight line of 4 36mm and 3 radiuses to form, the above micro-band transport part is all key position, designs the effect playing reduced volume reduction loss like this.Principle can keep same phase place at output after radio-frequency current flows through these microstrip lines, and output to output equably.Power combing microstrip circuit 9 synthesizes transport part by three total micro-bands and forms, these three parts are all wide 3.2mm, micro-band copper cash of long 557mm, its difference is that the position walked because of the size of circuit board is different, be exactly that the order of connection is different in addition, 4th total micro-band synthesis transport part 32 and the 5th total micro-band synthesize transport part 33 and are always micro-ly with the micro-tape input end synthesizing transport part 34 to be what to separate with the 6th, export and then receive together, the design benefit of all micro-band synthetic lines electric current can be synthesized a road fifty-fifty and keep the phase place of each circuit to cancel each other, do not need extra components and parts, and the heating of efficiency height is little, even if heating is also taken away by wiring board the heating panel that heat leads underground.
With reference to figure 4, be power combing microstrip circuit Fig. 8 in figure, radio-frequency current is from input 20,21 inputs, radio-frequency current is finally assembled through microstrip line and is synthesized on output 22, wherein principle is after to be radio-frequency current apply copper cash by micro-band of specific width and length, and can be synthesized together, wherein the effect of micro-band is coupling and Loss reducing.3rd micro-band transport part 27 is wide 4mm, the deposited copper wire of length 398mm, be wherein that the semicircle of 3.67mm is end to end by the long straight line of 9 34mm and 8 radiuses to form, the above micro-band transport part is all key position, designs the effect playing reduced volume reduction loss like this.Principle can keep same phase place at output after radio-frequency current flows through these microstrip lines, and output to output equably.Power combing microstrip circuit 8 synthesizes transport part by two total micro-bands and forms, these two parts are all wide 4mm, micro-band copper cash of long 557mm, its difference is that the position walked because of the size of circuit board is different, be exactly that the order of connection is different in addition, what the input of the 7th total micro-band synthesis transport part 35 connect is first total micro-band synthesis transport part 29 and second total micro-band synthesizes transport part 30 and the 3rd and is always micro-ly with the micro-band output synthesizing transport part 31, and micro-tape input of the 8th total micro-band synthesis transport part 36 connects is that the 4th total micro-band synthesis transport part 32 and the 5th total micro-band synthesize transport part 33 and the 6th total micro-micro-band output synthesizing transport part 34 of being with, last 7th total micro-band synthesis transport part 35 connects together with the 8th total micro-output of the micro-band synthesizing transport part 36 of being with, the design benefit of micro-band synthetic line like this electric current can be synthesized a road fifty-fifty and keep the phase place of each circuit to cancel each other, do not need extra components and parts, and the heating of efficiency height is little, even if heating is also taken away by wiring board the heating panel that heat leads underground.
With reference to figure 5, output matching microstrip circuit 10, radio-frequency current inputs into mating end from 23, after capacitor and inductor coupling, output to laser from output 24.4th micro-band transport part 28 is deposited copper wire of a wide 8mm, length 51.5mm, and radio-frequency current is through the out-of-date effect playing coupling.
With reference to figure 6, first total micro-band synthesis transport part 29 detailed routing figure, described transport part is micro-band copper cash of a wide 3.2mm, overall length 557mm, is wherein be 4.5mm semicircle by 10 straight lines and 6 radiuses, and 4 radiuses are that 1/4 circle of 4.5mm forms.
With reference to figure 7, second total micro-band synthesis transport part 30 detailed routing figure, described transport part is micro-band copper cash of a wide 3.2mm, overall length 557mm, is wherein be 4.5mm semicircle by 8 straight lines and 6 radiuses, and 3 radiuses are that 1/4 circle of 4.5mm forms.
With reference to figure 8, the 3rd total micro-band synthesis transport part 31 detailed routing figure, described transport part is micro-band copper cash of a wide 3.2mm, overall length 557mm, is wherein be 4.5mm semicircle by 11 straight lines and 9 radiuses, and 2 radiuses are that 1/4 circle of 4.5mm forms.
With reference to figure 9, the 4th total micro-band synthesis transport part 32 detailed routing figure, described transport part is micro-band copper cash of a wide 3.2mm, overall length 557mm, is wherein be 4.5mm semicircle by 11 straight lines and 9 radiuses, and 2 radiuses are that 1/4 circle of 4.5mm forms.
With reference to Figure 10, the 5th total micro-band synthesis transport part 33 detailed routing figure, described transport part is micro-band copper cash of a wide 3.2mm, overall length 557mm, is wherein be 4.5mm semicircle by 8 straight lines and 6 radiuses, and 3 radiuses are that 1/4 of 4.5mm justifies and forms.
With reference to Figure 11, the 6th total micro-band synthesis transport part 34 detailed routing figure, described transport part is micro-band copper cash of a wide 3.2mm, overall length 557mm, is wherein be 4.5mm semicircle by 10 straight lines and 6 radiuses, and 4 radiuses are that 1/4 of 4.5mm justifies and forms.
With reference to Figure 12, the 7th total micro-band synthesis transport part 35 detailed routing figure, described transport part is micro-band copper cash of a wide 4mm, overall length 557mm, is wherein be 3.67mm semicircle by 14 straight lines and 13 radiuses, and 1 radius is that 1/4 of 3.67mm justifies and forms.
With reference to Figure 13, the 8th total micro-band synthesis transport part 36 detailed routing figure, described transport part is micro-band copper cash of a wide 4mm, overall length 557mm, is wherein be 3.67mm semicircle by 14 straight lines and 6 radiuses, and 9 radiuses are that 1/4 of 3.67mm justifies and forms.
Claims (8)
1. the radio-frequency power supply for laser, it is characterized in that: comprise the first power amplifier module, second power amplifier module, the 3rd power amplifier module, the 4th power amplifier module, 5th power amplifier module, 6th power amplifier module, first micro-band power synthesis circuit, second micro-band power synthesis circuit, 3rd power combing microstrip circuit, radio frequency output matching circuit and water-filled radiator, wherein, first power amplifier module, second power amplifier module, 3rd power amplifier module, 4th power amplifier module, 5th power amplifier module, 6th power amplifier module, these six modules provide the radio-frequency power electric current of 81.36Mhz simultaneously, the first power combing microstrip circuit is transferred to by electrode, 3rd power combing microstrip circuit, described first power combing microstrip circuit and the 3rd power combing microstrip circuit, the signal syntheses that Ge Jiang tri-road power amplifier module exports is a road, export the input being given to the second power combing microstrip circuit, described second power combing microstrip circuit synthesizes a road two-way input power electric current, and flow to output matching microstrip circuit by electrode, carbon dioxide laser is outputted to after described output matching microstrip circuit coupling.
2. a power combing microstrip circuit, is characterized in that: comprise first micro-band transport part; Radio-frequency current inputs from three inputs, and radio-frequency current is finally assembled through microstrip line and is synthesized on output; Wherein first micro-band transport part is the deposited copper wire of a wide 3.2mm, length 237mm, and being wherein that the semicircle of 4.5mm is end to end by the long straight line of 3 69.6mm and 2 radiuses forms.
3. power combing microstrip circuit according to claim 2, it is characterized in that: described power combing microstrip circuit synthesizes transport part by three total micro-bands and forms, these three parts are all wide 3.2mm, micro-band copper cash of long 557mm, wherein, first total micro-band synthesis transport part and second total micro-band synthesis transport part are always micro-ly with the micro-tape input end synthesizing transport part to be what to separate with the 3rd, and output is received together.
4. a power combing microstrip circuit, is characterized in that: comprise second micro-band transport part; Radio-frequency current inputs from three inputs, and radio-frequency current is finally assembled through microstrip line and is synthesized on output; Wherein second micro-band transport part is the deposited copper wire of a wide 3.2mm, length 186.3mm, and being wherein that the semicircle of 4.5mm is end to end by the long straight line of 4 36mm and 3 radiuses forms.
5. power combing microstrip circuit according to claim 4, it is characterized in that: described power combing microstrip circuit synthesizes transport part by three total micro-bands and forms, these three parts are all wide 3.2mm, micro-band copper cash of long 557mm, 4th total micro-band synthesis transport part and the 5th total micro-band synthesis transport part are always micro-ly with the micro-tape input end synthesizing transport part to be what to separate with the 6th, and output is received together.
6. a power combing microstrip circuit, is characterized in that: comprise the 3rd micro-band transport part; Radio-frequency current inputs from two inputs, and radio-frequency current is finally assembled through microstrip line and is synthesized on output; Wherein the 3rd micro-band transport part is the deposited copper wire of a wide 4mm, length 398mm, and being wherein that the semicircle of 3.67mm is end to end by the long straight line of 9 34mm and 8 radiuses forms.
7. power combing microstrip circuit according to claim 6, it is characterized in that: described power combing microstrip circuit synthesizes transport part by two total micro-bands and forms, these two parts are all wide 4mm, micro-band copper cash of long 557mm, what the input of the 7th total micro-band synthesis transport part connect is first total micro-band synthesis transport part as claimed in claim 2 and second total micro-band synthesizes transport part and the 3rd and is always micro-ly with the micro-band output synthesizing transport part, and micro-tape input of the 8th total micro-band synthesis transport part connects is that the 4th total micro-band synthesis transport part as claimed in claim 4 and the 5th total micro-band synthesize transport part and the 6th total micro-micro-band output synthesizing transport part of being with, last 7th total micro-band synthesis transport part connects together with the 8th total micro-output of the micro-band synthesizing transport part of being with.
8. an output matching microstrip circuit, it is characterized in that: radio-frequency current inputs into mating end, after capacitor and inductor coupling, output to laser from output, wherein the 4th micro-band transport part is a wide 8mm, the deposited copper wire of length 51.5mm, radio-frequency current is through the out-of-date effect playing coupling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510923985.XA CN105449502A (en) | 2015-12-14 | 2015-12-14 | Radio-frequency power supply used for laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510923985.XA CN105449502A (en) | 2015-12-14 | 2015-12-14 | Radio-frequency power supply used for laser |
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| Publication Number | Publication Date |
|---|---|
| CN105449502A true CN105449502A (en) | 2016-03-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510923985.XA Pending CN105449502A (en) | 2015-12-14 | 2015-12-14 | Radio-frequency power supply used for laser |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017100965A1 (en) * | 2015-12-14 | 2017-06-22 | 徐海军 | Radio frequency power supply for laser |
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| US5896065A (en) * | 1997-06-06 | 1999-04-20 | Myer; Daniel | Radially combined RF/microwave power amplifier |
| JP2000269710A (en) * | 1999-03-18 | 2000-09-29 | Nec Corp | Power combining apparatus |
| US20030197572A1 (en) * | 2002-04-23 | 2003-10-23 | Xytrans, Inc. | Microstrip-to-waveguide power combiner for radio frequency power combining |
| US20100316084A1 (en) * | 2009-06-10 | 2010-12-16 | Coherent, Inc. | Arrangement for rf power delivery to a gas discharge laser with cascaded transmission line sections |
| CN201829806U (en) * | 2010-07-27 | 2011-05-11 | 南京晨锐达激光设备有限公司 | Carbon dioxide laser radio frequency power board |
| CN203760616U (en) * | 2014-01-23 | 2014-08-06 | 芜湖航飞科技股份有限公司 | Power divider multilayer microstrip circuit |
| CN205429411U (en) * | 2015-12-14 | 2016-08-03 | 北京热刺激光技术有限责任公司 | A radio -frequency power supply for laser instrument |
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2015
- 2015-12-14 CN CN201510923985.XA patent/CN105449502A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5896065A (en) * | 1997-06-06 | 1999-04-20 | Myer; Daniel | Radially combined RF/microwave power amplifier |
| JP2000269710A (en) * | 1999-03-18 | 2000-09-29 | Nec Corp | Power combining apparatus |
| US20030197572A1 (en) * | 2002-04-23 | 2003-10-23 | Xytrans, Inc. | Microstrip-to-waveguide power combiner for radio frequency power combining |
| US20100316084A1 (en) * | 2009-06-10 | 2010-12-16 | Coherent, Inc. | Arrangement for rf power delivery to a gas discharge laser with cascaded transmission line sections |
| CN201829806U (en) * | 2010-07-27 | 2011-05-11 | 南京晨锐达激光设备有限公司 | Carbon dioxide laser radio frequency power board |
| CN203760616U (en) * | 2014-01-23 | 2014-08-06 | 芜湖航飞科技股份有限公司 | Power divider multilayer microstrip circuit |
| CN205429411U (en) * | 2015-12-14 | 2016-08-03 | 北京热刺激光技术有限责任公司 | A radio -frequency power supply for laser instrument |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2017100965A1 (en) * | 2015-12-14 | 2017-06-22 | 徐海军 | Radio frequency power supply for laser |
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