WO2017099221A1

WO2017099221A1 - Discharge lamp and method for exchanging same, and exposure method and device

Info

Publication number: WO2017099221A1
Application number: PCT/JP2016/086730
Authority: WO
Inventors: 青木　保夫
Original assignee: 株式会社ニコン
Priority date: 2015-12-09
Filing date: 2016-12-09
Publication date: 2017-06-15
Also published as: JP2021107931A; TW202122931A; CN108780280B; CN112684664A; JP6859957B2; TW201734654A; TWI723099B; CN108780280A; JPWO2017099221A1; KR20180091052A

Abstract

A discharge lamp is provided with a glass tube having an electrode for forming a light-emitting part provided therein, and a base provided at the end part of the glass tube. A light source device is provided with an emission unit for beaming a light beam into the through hole of the base of the discharge lamp, a light-receiving unit for detecting the light beam having passed through the through hole, and a light source control system for obtaining the angle of the discharge lamp using the result of the detection by the light-receiving unit. States of the discharge lamp, such as the rotation angle or whether or not the discharge lamp has already been used, can be easily verified.

Description

Discharge lamp, replacement method thereof, and exposure method and apparatus

The present invention relates to a discharge lamp and a replacement method thereof, a light source device including the discharge lamp, an exposure method using the replacement method, an exposure apparatus including the light source device, and a device manufacturing method using an exposure technique.

In lithography process for manufacturing various devices (liquid crystal display device or semiconductor device), it is used to transfer the pattern formed on the mask to the substrate (glass plate or semiconductor wafer etc.) coated with photosensitive material. The exposure apparatus such as the collective exposure type projection exposure apparatus and the scanning exposure type projection exposure apparatus includes an exposure light source device configured by combining a discharge lamp such as an ultra-high pressure mercury lamp and a condenser mirror. There are types.

In a conventional light source device, a flange portion and a step portion are provided on one base of a discharge lamp, and the step portion is disposed in the opening in a state where the flange portion is placed on the surface of the base portion provided with the opening. Some discharge lamps are fixed by urging downward with a lever member or the like (see, for example, Patent Document 1). Further, when a discharge lamp for an exposure apparatus is used beyond a predetermined allowable time, exposure performance (resolution, etc.) may deteriorate due to a decrease in illuminance. For this reason, when the accumulated usage time of the discharge lamp has passed its allowable time, it has been replaced with an unused discharge lamp.

International Publication No. 2007/066947 Pamphlet

In a light source device of an exposure apparatus, for example, when a used discharge lamp and an unused discharge lamp are stored in a common storage unit so that the discharge lamp can be replaced automatically, the used discharge lamp is conventionally used. Since the external shape of the lamp and the unused discharge lamp is the same, there is a possibility that the used discharge lamp may be used again.
Further, for example, when a non-axisymmetric discharge lamp is transported from the storage unit to the installation position of the discharge lamp, if the rotation angle of the discharge lamp deviates relatively from the target value, the discharge lamp is placed on the transport unit or the like. There is a risk that it cannot be delivered quickly.

In view of such circumstances, an aspect of the present invention aims to make it possible to easily check the state of a discharge lamp.

According to the first aspect of the present invention, there is provided a discharge lamp loaded in an apparatus having a detection unit for detecting a use state of the discharge lamp, the discharge electrode and the detection unit detecting the discharge electrode. When a current is supplied, a discharge lamp including a detected portion that changes from a first state to a second state is provided.
According to a second aspect of the present invention, there is provided a discharge lamp comprising a glass member that forms a light emitting part, and a first base member and a second base member that are provided so as to sandwich the glass member, A discharge lamp in which a through hole is provided in the first base member is provided.
According to the third aspect, there is provided a light source device including the discharge lamp according to the aspect of the present invention, a storage unit for storing the discharge lamp, a transport unit for transporting the discharge lamp, and the first of the discharge lamps. The state of the discharge lamp is obtained by using a light transmitting portion that makes a light beam enter the through hole of the single cap member, a light receiving portion that detects the light beam that has passed through the through hole, and a detection result of the light receiving portion. And a light source device including a control unit.

According to the fourth aspect, the light source device of the aspect of the present invention, the illumination system that illuminates the mask with the light generated from the discharge lamp of the light source device, and the projection optics that projects the image of the mask pattern onto the substrate And an exposure apparatus comprising the system.

According to a fifth aspect, there is provided a method for replacing a discharge lamp according to an aspect of the present invention, comprising storing the discharge lamp, transporting the discharge lamp from a storage unit to an installation position, Injecting the light beam into the through hole of the first base member, detecting the light beam that has passed through the through hole, and determining the state of the discharge lamp using the detection result of the light beam And an exchange method is provided.

According to the sixth aspect, the discharge lamp is replaced by using the discharge lamp replacement method of the aspect of the present invention, the mask is illuminated with light generated from the discharge lamp, and the pattern image of the mask is obtained. Projecting onto a substrate.
According to a seventh aspect, the method includes forming the pattern of the photosensitive layer on the substrate using the exposure apparatus or the exposure method according to the aspect of the present invention, and processing the substrate on which the pattern is formed. A device manufacturing method is provided.

It is a figure which shows schematic structure of the exposure apparatus which concerns on 1st Embodiment. It is a figure which shows the discharge lamp in FIG. (A) is a cross-sectional view taken along line AA in FIG. 3 (B), (B) is a cross-sectional view showing an anode-side base portion of an unused discharge lamp, and (C) is an anode-side base portion of a used discharge lamp. FIG. (A) is the top view which cut off some which shows the light source device in FIG. 1, (B) is the side view which cut off some which shows the light source device of FIG. 4 (A). It is a perspective view which shows the anode side nozzle | cap | die part of a discharge lamp, and a clamp mechanism. (A) is the top view which notched the part which shows the light source device which is moving the slide part, (B) is the side view which notched a part which shows the light source device of FIG. 6 (A). (A) is a figure which shows the state which clamped the anode side nozzle | cap | die part of the discharge lamp, (B) is a figure which shows the state which cancelled | released clamping of the nozzle | cap | die part. It is the side view which notched a part which shows a light source device. (A) is a top view which shows the state which grips an anode side nozzle | cap | die part with the nail | claw part for lamp | grip holding | grip, (B) is a side view of FIG. 9 (A). (A) is the top view which notched the part which shows the light source device which is moving the discharge lamp, (B) is the side view which notched a part which shows the light source device of FIG. 10 (A). It is the figure which notched a part which shows the some discharge lamp installed in the turntable for lamp | ramp storage. It is a figure which shows the positioning part of the turntable for lamp | ramp storage. It is a flowchart which shows an example of the replacement | exchange method of a discharge lamp. (A) is sectional drawing which shows the anode side nozzle | cap | die part of the unused discharge lamp of 2nd Embodiment, (B) is sectional drawing which shows the anode side nozzle | cap | die part of a used discharge lamp. (A) And (B) is sectional drawing which shows the clamp mechanism of the anode side nozzle | cap | die part of FIG. 14 (A), respectively. (A) is sectional drawing which shows the anode side nozzle | cap | die part of the discharge lamp of a 1st modification, (B) is sectional drawing which shows the anode side nozzle | cap | die part of the discharge lamp of a 2nd modification. (A) is sectional drawing which shows the anode side nozzle | cap | die part of the discharge lamp of a 3rd modification, (B) is sectional drawing which shows the state which the spherical body of FIG. 17 (A) moved below. (A) is a diagram showing a state in which the anode side base part of the discharge lamp of the fourth modified example is clamped, (B) is an enlarged sectional view showing the anode side base part of FIG. 18 (A), (C) is FIG. Sectional drawing which shows the terminal part of (B), (D) is the figure which looked at the inside of the terminal part of FIG. 18 (B) in the D direction. (A) is a figure which shows the inside of the terminal part of the anode side nozzle | cap | die part of the discharge lamp of a 5th modification, (B) shows the state where the space | interval of the front-end | tip of two elastic hinge parts of FIG. 19 (A) became large. FIG. (A) is a figure which shows the inside of the terminal part of the anode side nozzle | cap | die part of the discharge lamp of a 6th modification, (B) shows the state where the space | interval of the front-end | tip of two elastic hinge parts of FIG. 20 (A) became large. FIG. (A) is sectional drawing which shows the terminal part of the anode side nozzle | cap | die part of the discharge lamp of a 7th modification, (B) is a figure which shows the state from which the angle of the mirror part of FIG. 21 (A) changed. It is a flowchart which shows an example of the manufacturing process of an electronic device.

[First Embodiment]
Hereinafter, a first embodiment of the present invention will be described with reference to FIGS.
FIG. 1 shows a schematic configuration of an exposure apparatus EX including a light source device 30 according to the present embodiment. The exposure apparatus EX is, for example, a scanning exposure type projection exposure apparatus. In FIG. 1, a light source device 30 includes a discharge lamp 1 made of an arc discharge type ultra-high pressure mercury lamp, a support member 33 that holds a base 26 on the cathode side of the discharge lamp 1, and a drawer that can move the support member 33. Part 36 (see FIG. 4B), drive unit 34 for fixing and releasing the cap part 26 with respect to the support member 33, and the elliptical mirror 2 arranged so as to surround the glass tube 25 (bulb) of the discharge lamp 1 (Condensing mirror) and a box-shaped lamp house 31 that accommodates the discharge lamp 1 and the elliptical mirror 2 at the time of exposure (when the discharge lamp 1 is used). At the time of exposure, the light emitting part in the glass tube 25 of the discharge lamp 1 is arranged near the first focal point of the elliptical mirror 2 as an example.

The light source device 30 includes a flexible power cable 24 that can be detachably connected to the base 28 on the anode side of the discharge lamp 1 and a support member 33 on the base 26 on the cathode side of the discharge lamp 1. A flexible power cable 23 connected to each other, a power supply unit 20 for supplying power (current) to the discharge lamp 1 via the

power cables

23 and 24 to cause the discharge lamp 1 to emit light, and a used discharge lamp. 1 and a fully automatic exchanging device 50 for exchanging 1. The exchange device 50 includes the clamp mechanism 52 that attaches and detaches the power cable 24 to and from the base 28 on the anode side, the storage unit 54 that stores the discharge lamp 1, and the discharge lamp 1 between the support member 33 and the storage unit 54. A lamp transport system 56 for transporting, and a box-shaped casing 51 for housing the storage unit 54 and the lamp transport system 56 are provided.

As shown in FIG. 4B, the support member 33 is actually a substantially cylindrical metal (conductive) member having a ring-shaped flange portion formed on the upper portion. As will be described later, the support member 33 is fixed to the center of the drawer portion 36 movably supported along the guide member 41 on the inner surface of the lamp house 31 via its flange portion. The part 36 is electrically insulated. A drive unit 34 for the base part 26 is provided on the bottom surface of the drawer part 36.

1, the light source device 30 includes a light source control system 32 that controls operations of the power supply unit 20, the drive unit 34, the lamp transport system 56, and the like. The light source control system 32 monitors the accumulated usage time of the discharge lamp 1. When the accumulated usage time reaches a predetermined allowable time, the light source control system 32 operates the replacement device 50 and uses the used discharge lamp 1. Replace with an unused discharge lamp. The detailed configuration and operation of the light source device 30 will be described later.

The exposure apparatus EX includes an illumination optical system 13 that illuminates the mask M using the exposure light IL selected from the light flux supplied from the light source device 30, and a pattern image of the mask M under the exposure light IL. Includes a projection optical system PL that projects onto the surface of a plate P (photosensitive substrate) made of a glass substrate coated with, a mask stage MST that moves the mask M, a substrate stage PST that moves the plate P, and a light source device 30. And a main control system 14 including a computer that controls the overall operation of the exposure apparatus.

As an example, the exposure apparatus EX is an exposure apparatus for manufacturing a liquid crystal display device, and the main body of the exposure apparatus EX (a portion including the mask stage MST, the projection optical system PL, and the substrate stage PST) is a box in a manufacturing factory. The light source device 30 is installed on the rooftop RT of the chamber. When the accumulated usage time of the discharge lamp 1 reaches the allowable time, the light source device 30 supplies information to that effect to the main control system 14. In response to this, the main control system 14 stops the exposure operation of the exposure apparatus EX until information indicating that the replacement of the discharge lamp 1 is completed from the light source device 30. Hereinafter, the Z-axis is taken in parallel to the optical axis AX of the projection optical system PL, and the X-axis is made parallel to the plane of FIG. 1 within a plane perpendicular to the Z-axis (substantially a horizontal plane in this embodiment). A description will be given taking the Y axis perpendicular to the paper surface.

The luminous flux emitted from the discharge lamp 1 is converged to the vicinity of the second focal point by the elliptical mirror 2, then passes near the shutter (not shown) and becomes divergent light and enters the mirror 3 for bending the optical path. The mirror 3 is also accommodated in the lamp house 31. The light beam reflected by the mirror 3 passes through the light transmissive window member 4 of the lamp house 31 and enters the interference filter 5, and exposure light composed of a predetermined bright line (for example, i-line having a wavelength of 365 nm) by the interference filter 5. Only IL is selected. As the exposure light IL, in addition to i-line, g-line, h-line, or mixed light thereof, or bright lines of lamps other than mercury lamps can be used. The selected exposure light IL is incident on a fly-eye lens 6 (optical integrator), and a large number of 2 on a variable aperture stop (hereinafter referred to as illumination σ stop) 7 disposed on the exit surface of the fly-eye lens 6. A next light source is formed. The exposure light IL that has passed through the variable σ stop 7 enters the mask blind (variable field stop) 9 through the first relay lens 8. The arrangement surface of the mask blind 9 is substantially conjugated with the pattern surface of the mask M, and the illumination area on the mask M is defined by setting the opening shape of the mask blind 9 via the driving device 9a. Further, the stage control system 15 can open and close the mask blind 9 via the driving device 9a so that unnecessary exposure light is not irradiated onto the plate P when the plate P is moved stepwise.

The exposure light IL that has passed through the mask blind 9 illuminates the pattern area of the pattern surface of the mask M via the second relay lens 10, the mirror 11 for bending the optical path of the exposure light IL, and the condenser lens 12. The illumination optical system 13 includes the interference filter 5, the fly-eye lens 6, the variable σ stop 7, the

relay lenses

8 and 10, the mask blind 9, the mirror 11, and the condenser lens 12. The light beam from the light source device 30 illuminates an illumination area elongated in the Y direction of the mask M (mask) as exposure light IL through the illumination optical system 13. The pattern in the illumination area of the mask M is projected to the exposure area (area optically conjugate with the illumination area) of one shot area of the plate P via the projection optical system PL. (Magnification or reduction magnification). As the projection optical system PL, for example, a multi-projection optical system in which a plurality of projection optical systems are arranged in two rows in the Y direction may be used. When a plurality of projection optical systems are used in this way, the exposure light IL from the illumination optical system 13 illuminates a plurality of illumination areas on the pattern surface of the mask M in parallel.

The mask M is held on the upper surface of a mask stage MST that can be finely moved in a rotation direction around the X direction, the Y direction, and the Z axis on a mask base (not shown). The position of the mask stage MST is measured with high accuracy by a laser interferometer 18R that irradiates a measurement laser beam to the movable mirror 17R fixed thereto, and this measurement value is supplied to the stage control system 15 and the main control system 14. ing. Based on the measured value and control information from the main control system 14, the stage control system 15 controls the position of the mask stage MST via a drive system 19R including a linear motor and the like. *

On the other hand, the plate P is held on the upper surface of the substrate stage PST via a plate holder (not shown), and the substrate stage PST is placed on a base member (not shown) so as to be movable in the X direction and the Y direction. The position of the substrate stage PST is measured with high accuracy by a laser interferometer 18W that irradiates a measurement laser beam to a movable mirror 17W fixed thereto, and this measurement value is supplied to the stage control system 15 and the main control system 14. ing. Based on the measured value and control information from the main control system 14, the stage control system 15 controls the position of the substrate stage PST (wafer W) via a drive system 19W including a linear motor and the like.

During exposure of the plate P, the substrate stage PST moves each shot area of the plate P to the front of the exposure area of the projection optical system PL (step movement), and the light beam from the light source device 30 passes through the illumination optical system 13. While illuminating the mask M, the mask M and the plate P are moved in the X direction (scanning direction) in synchronization with the projection optical system PL, and an image of the pattern of the mask M is formed on the entire surface of one shot area of the plate P. Is repeated in a step-and-scan manner. As a result, the pattern image of the mask M is transferred to each shot area of the plate P.

In order to perform alignment in advance during this exposure, for example, an aerial image measurement unit 22 for detecting the position of the alignment mark formed on the mask M is installed inside the substrate stage PST, and the projection optical system PL On the side surface, an alignment system 21 for detecting the position of the alignment mark attached to each shot area of the plate P is installed. Detection signals from the aerial image measurement unit 22 and the alignment system 21 are supplied to the alignment signal processing system 16, and the alignment signal processing system 16 processes the detection signals, for example, to detect the alignment information of the mask M and each shot of the plate P. The arrangement information of the area is obtained, and the obtained information is supplied to the main control system 14. The main control system 14 performs alignment of the mask M and position control of the plate P during exposure based on the information. Thereby, high overlay accuracy can be obtained during overlay exposure.

Next, the configuration of the light source device 30 of the present embodiment and the replacement operation of the discharge lamp 1 using the light source device 30 will be described in detail.
FIG. 2 shows the discharge lamp 1 of the light source device 30 in FIG. In FIG. 2, a discharge lamp 1 includes a bulb 25a and a glass tube 25 composed of two substantially cylindrical rod-shaped portions 25b1 and 25c fixed so as to sandwich the bulb portion 25, and an end portion of one rod-shaped portion 25b1. A connecting portion 25b2 provided so as to cover; a cathode-side base portion 26 connected to the end of the connecting portion 25b2, a cover portion 25d provided so as to cover an intermediate portion of the other rod-like portion 25c; And an anode side cap portion 28 connected to an end portion of the portion 25c. An anode EL1 and a cathode EL2 for forming a light emitting portion are fixed to face each other in the bulb portion 25a, and the cathode EL2 and the anode EL1 are electrically connected to the

cap portions

26 and 28, respectively. All of the base part 26 and most of the base part 28 (parts excluding a sphere 27 described later) are made of a metal (for example, brass) having good electrical conductivity and thermal conductivity. The base part 26, the glass tube 25, and the base part 28 are arranged along one straight line that connects the central axes of the rod-like parts 25 b 1 and 25 c of the glass tube 25 and passes through the center of the light emitting part. The longitudinal direction L of the discharge lamp 1 is a direction parallel to a straight line connecting the central axes of the rod-like portions 25b1 and 25c. Note that the cover portion 25d and the connecting portion 25b2 are not necessarily provided. In this case, the base part 26 may be connected to the end of the rod-like part 25b1.

The

base parts

26 and 28 are basically used as power receiving terminals for supplying power to the cathode EL2 and the anode EL1 from the power supply part 20 of FIG. In addition, the base part 26 is also used as a supported part for supporting the glass tube 25 (discharge lamp 1) by a support member 33 (see FIG. 4B). Further, both the

cap portions

26 and 28 are formed with uneven portions (portions having a large surface area) for efficiently dissipating heat conducted from the glass tube 25.

In addition, the cathode-side base part 26 has a ring-shaped flange part 26a having an outer diameter of about twice the outer diameter of the connection part 25b2 in order from the connection part 25b2 to the open end side. Position defining portion), a cylindrical shaft portion 26b (fitting portion or position defining portion) having an outer diameter slightly larger than the outer diameter of the connecting portion 25b2, and a columnar shape having an outer diameter smaller than that of the shaft portion 26b. The small-diameter portion 26f (stepped portion) and a cylindrical fixing portion 26h having an outer diameter slightly smaller than the shaft portion 26b or substantially the same outer shape as the shaft portion 26b are formed. A chamfered portion (not shown) may be formed at the boundary between the shaft portion 26b and the small diameter portion 26f. A chamfered portion 26i is formed on the open end side of the fixed portion 26h, and a rod-shaped guide portion 26j having a diameter smaller than that of the small diameter portion 26f is formed on the end portion of the fixed portion 26h. Note that the outer shape of the cylindrical shaft portion 26b may be substantially the same as the outer shape of the rod-shaped portion 25b1. The small-diameter portion 26f is formed by providing a recess (step portion) between the shaft portion 26b and the fixed portion 26h with respect to the direction intersecting the longitudinal direction L of the discharge lamp 1.

When the discharge lamp 1 is placed on the support member 33 shown in FIG. 4B, the flange portion 26 a comes into contact with a stepped portion surrounding the central opening of the support member 33, and the longitudinal direction L of the light emitting portion of the glass tube 25. The shaft portion 26b fits into the opening and serves as a positioning reference in a plane orthogonal to the longitudinal direction L of the light emitting portion.
A pressed surface 26g is formed on the small diameter portion 26f of the fixed portion 26h. The pressed surface 26g is a plane perpendicular to the longitudinal direction L. 4B, when the discharge lamp 1 is supported by the support member 33, the lever 38 that urges the fixing portion 26h (the pressed surface 26g) of the base portion 26 downward (−Z direction). A tension coil spring 39 that rotates the lever 38 counterclockwise in the direction of biasing the fixing portion 26h, and an air cylinder that rotates the lever 38 clockwise to release the fixing of the base portion 26 by the lever 38, for example. Or it has drive parts 40, such as an electromagnetic cylinder. When the discharge lamp 1 is fixed and supported on the support member 33, the clockwise rotation of the lever 38 by the drive unit 40 may be released, and when the discharge lamp 1 is taken out from the support member 33, the drive unit 40 is removed. Therefore, the lever member 38 may be rotated clockwise. In addition, as the drive unit 34, the mechanism described in the international publication 2007/066947 pamphlet can also be used.

Since the heat generated in the discharge lamp 1 flows to the support member 33 having a large surface area and a large heat capacity via the base portion 26, an increase in the temperature of the discharge lamp 1 can be suppressed. In order to enhance the cooling effect of the discharge lamp 1, the gas cooled from the blower (not shown) in the opening into which the fixing portion 26 h of the base portion 26 of the support member 33 in FIG. 4B is inserted. May be blown.

In FIG. 2, as an example, a spiral groove (not shown) may be formed on the surface of the shaft part 26b of the base part 26 from the flange part 26a to the small diameter part 26f. The cooling effect of the discharge lamp 1 can be enhanced by supplying, for example, a cooling gas from the outside to the groove.
Further, as an example, two openings AP1 and AP2 (positioning portions) (opening AP2 is not shown) are formed at 90 ° intervals on the flange portion 26a of the base portion 26. Accordingly, two pins (not shown) are provided on the surface on which the flange portion 26a of the support member 33 in FIG. When the discharge lamp 1 is placed on the support member 33, the two pins are inserted into the opening AP1 or the like of the flange portion 26a, thereby positioning the discharge lamp 1 around the axis along the longitudinal direction L. Is called. A relative angle between the opening AP1 and the like and the base part 28 on the anode side is set to an angle (predetermined angle) at which the base part 28 and the power cable 24 are easily connected.

In addition, the shape of the base part 26 on the cathode side is arbitrary. As the base part 26, for example, a member having only a flange part 26a and a shaft part 26b and having a recess into which the tip of the lever 38 of the drive unit 34 can be inserted is used in the shaft part 26b. You can also. In FIG. 2, the anode-side cap portion 28 includes a plurality of annular radiating fins 28 j having an outer diameter larger than the diameter of the rod-like portion 25 c in order from the rod-like portion 25 c side of the glass tube 25 of the discharge lamp 1 to the open end side. A substantially triangular prism-shaped non-axisymmetric terminal portion formed with a heat radiating portion 28i formed with a gripped portion 28e (held portion) having a spherical outer shape and two V-shaped

flat portions

28b, 28c. 28a (connected portion) (see FIG. 3A).

FIG. 3B shows the anode-side base portion 28 in a state where the discharge lamp 1 of FIG. 2 is not used, and FIG. 3C shows the anode-side base portion in a state after using the discharge lamp 1. FIG. 3A is a cross-sectional view taken along the line AA in FIG. In FIG. 3A, a plane part 28d is formed so as to connect two symmetrically inclined (V-shaped)

plane parts

28b and 28c of the terminal part 28a, and a plane is formed between the

plane parts

28b and 28c. A chamfered portion 28a4 having a narrow width is formed in parallel with the portion 28d.

In FIG. 3B, the upper end portion of the portion including the heat radiating portion 28i and the gripped portion 28e of the base portion 28 is connected to a connecting portion 25d at the end portion of the rod-like portion 25c of the glass tube 25 of the discharge lamp 1, for example. It is fixed by a bolt (not shown). A circular convex portion 28e2 is provided at the center of a circular concave portion 28e1 formed at the upper end of the gripped portion 28e. Further, a flange portion 29e of the accommodating portion 29 having a substantially cylindrical shape and a ring-shaped flange portion 29e provided at the lower end portion is placed on the concave portion 28e1 so as to surround the convex portion 28e2, and an upper portion 29a of the accommodating portion 29 is placed. A spherical body 27 having a high sphericity and a thermal expansion coefficient smaller than the thermal expansion coefficient of the housing portion 29 is placed so as to cover a circular opening 29 b provided in the center of the storage area 29. The size of the inside of the housing portion 29 is such that the sphere 27 can be displaced to some extent in the longitudinal direction of the discharge lamp 1 and in a plane orthogonal to the longitudinal direction. At the temperature at which the discharge lamp 1 is stored (approximately room temperature), the diameter of the opening 29b is smaller than the diameter of the sphere 27, and the discharge lamp 1 is caused to emit light by energizing the

cap portions

26 and 28 of the discharge lamp 1. In a state in which the temperature of the lamp 1 has increased (a state in which the discharge lamp 1 has been used for several hours or more, for example), the diameter of the opening 29b is such that the diameter of the opening 29b is larger than the diameter of the sphere 27 due to thermal expansion of the housing portion 29. Is stipulated. As a result, when the use of the discharge lamp 1 is continued for several hours or more, for example, the sphere 27 passes through the opening 29b and is accommodated in the accommodating portion 29 as shown in FIG. As an example, the sphere 27 is a ball made of, for example, ceramic and having a very small coefficient of thermal expansion, and the accommodating portion 29 is made of a metal such as stainless steel or an aluminum alloy. Note that the sphere 27 may be formed of a low expansion coefficient alloy such as Invar.

Further, in FIG. 3B, a terminal portion 28a having a substantially triangular prism shape and a circular flange portion 28a3 provided at the lower end portion so as to cover the accommodating portion 29 and the sphere 27 above the accommodating portion 29 is mounted. Is placed. The inner surface of the terminal portion 28 a has a cylindrical shape with a slightly larger outer shape of the accommodating portion 29, and the gap between the upper end of the inner surface of the terminal portion 28 a and the sphere 27 is such that the sphere 27 extends from the opening 29 b of the accommodating portion 29. It is set small so as not to come off. The flange portion 29e of the housing portion 29 and the flange portion 28a3 of the terminal portion 28a overlap each other. For example, the flange portions 29e and 28a2 are fixed to the recesses 28e1 of the gripped portion 28e by bolts BA1 at a plurality of locations. The accommodating part 29 and the terminal part 28a are being fixed to the part 28e. For convenience of explanation, illustration of the flange portions 29e and 28a2 is omitted in FIG.

Further, two circular shapes having a diameter smaller than that of the sphere 27 are provided so as to face the side surface of the accommodating portion 29 along a straight line that is parallel to the flat portion 28d of the terminal portion 28a and passes through the central axis of the accommodating portion 29.

Openings

29c and 29d are formed, and circular openings 28a1 and 28a2 having substantially the same diameter as the

openings

29c and 29d are provided in regions including the flat portion 28d and the chamfered portion 28a4 of the terminal portion 28a so as to face the

openings

29c and 29d, respectively. Is formed. The heights of the

openings

29c and 29d are set so that the centers of the

openings

29c and 29d are approximately the center of the sphere 27 when the sphere 27 passes through the opening 29b and falls into the housing portion 29 (the upper surface of the gripped portion 28e). The gap between the inner surface of the accommodating portion 29 and the sphere 27 is set so that the sphere 27 can move by, for example, about 5% to 30% (for example, about 10%) of the diameter of the sphere 27. Yes.

4B, above the turntable 79 on which the discharge lamp 1 of the storage unit 54 is placed, the openings 28a1 and 28a2 of the terminal portion 28a of the discharge lamp 1 (as a result, the opening of the housing portion 29). 29c, 29d), and the light beam LB1 that has passed through the openings 28a1, 28a2, 29c, and 29d in a state where the sphere 27 has not fallen into the accommodating portion 29. A first detection device 94A having a light receiving unit 94Ab for detection is arranged, and a detection signal of the light receiving unit 94Ab is supplied to the light source control system 32. Since the light beam LB1 cannot be detected by the light receiving unit 94Ab in a state in which the sphere 27 is falling in the storage unit 29, whether or not the sphere 27 is present in the storage unit 29 using the first detection device 94A, that is, discharge Whether the lamp 1 is used or not can be detected. That is, it is possible to detect whether the discharge lamp 1 has been used or not used by changing the state of the sphere 27 with respect to the housing portion 29. Further, it can be said that the accommodating portion 29 and the sphere 27 are detected devices that detect whether the discharge lamp 1 is used or not. Further, the sphere 27 can be said to be a movable part because it moves in the accommodating part 29.

Further, below the turntable 79 of the storage unit 54, the irradiation unit 94Ba for irradiating the light beam LB2 to a position near the center of the fixing unit 26h of the base unit 26 of the discharge lamp 1 and the discharge lamp 1 are not provided. A second detection device 94B having a light receiving portion 94Bb that detects the light beam LB2 that has passed through the position is installed, and a detection signal from the light receiving portion 94Bb is supplied to the light source control system 32. Since the light beam LB2 cannot be detected by the light receiving unit 94Bb in a state where the fixed portion 26h is in the optical path of the light beam LB2, whether the discharge lamp 1 is present at a predetermined position of the turntable 79 using the second detection device 94B. Can be detected.

Further, the base portion 28 of the present embodiment is provided at the end of the rod-like portion 25c of the glass tube 25 by bolts (not shown) in a plurality of openings (not shown) provided in the recesses 28e1 of the gripped portion 28e. And connected to a metal connecting portion 25d that is electrically connected to the anode EL1. Therefore, the base part 28 can be removed after the discharge lamp 1 is used, and the removed base part 28 can be reused when a new discharge lamp 1 is manufactured. The base portion 28 may be integrated with the glass tube 25 by adhesion or welding.

FIG. 5 shows a state where the power cable 24 is connected to the base 28 on the anode side. In FIG. 5, a metal (conductive) member (hereinafter referred to as a V-shaped groove 66a having the same angle as the

flat portions

28b and 28c of the terminal portion 28a of the base portion 28 is formed at the end of the power cable 24. 66, referred to as a power feeding block). The power supply block 66 is fixed to the lower end of an L-shaped reference lever 67, and an L-shaped drive lever 69 is connected to the reference lever 67 via a connecting pin P51. A roller 70 is fixed to the lower end portion of the roller 70 via a connecting pin P52 so as to be rotatable. The roller 70 is pressed against the flat surface portion 28d of the terminal portion 28a of the base portion 28 opposite to the

flat surface portions

28b and 28c. A concave portion (not shown) having a size that can accommodate the roller 70 may be formed in the flat surface portion 28d.

In order to make the stress acting on the discharge lamp 1 as small as possible (to increase the flexibility of the reference lever 67 and the drive lever 69) when connecting the power supply block 66 to the terminal portion 28a as described later, In order to reduce the amount of light that is collected by the elliptical mirror 2, the reference lever 67 and the drive lever 69 are formed as thin as possible. In FIG. 5, the reference lever 67 is formed by connecting both end portions of the two L-shaped members (the other end is not shown), but the reference lever 67 is a single L-shaped member. You may form from a member.

The clamp mechanism 52 is configured including the power supply block 66, the reference lever 67, and the drive lever 69. The other end sides of the reference lever 67 and the drive lever 69 are formed elongated as shown in FIG. With the groove 66a of the power supply block 66 pressed against the

flat portions

28b and 28c of the terminal portion 28a of the base portion 28, the roller 70 at the tip of the drive lever 69 is pushed against the flat portion 28d of the terminal portion 28a. By rotating the drive lever 69 counterclockwise around the connecting pin P51 (fulcrum), the terminal portion 28a can be stably sandwiched between the roller 70 and the power supply block 66 with a strong force by the lever principle. Can do. In this state, the power (current) of the power cable 24 is supplied to the base portion 28 through the power supply block 66 with a small electric resistance, so that power loss is reduced. Further, when the power cable 24 (power supply block 66) is removed from the base portion 28 (terminal portion 28a), the drive lever 69 may be rotated clockwise.

The terminal portion 28a of the base portion 28 can reduce the electrical resistance (contact resistance) between the terminal portion 28a and the power supply block 66 by the V-shaped

flat portions

28b and 28c. Instead of providing the roller 70 at the front end portion of the drive lever 69, the shape of the front end portion may be an arc shape, and the arc-shaped portion may be pressed against the flat surface portion 28d.
Further, the shape of the terminal portion 28a of the anode-side cap portion 28 is not limited to the shape of FIG. 2B, and the cross-sectional shape may be a quadrangle or a polygon.

4A and 4B referred to below, the shapes of the

cap portions

26 and 28 of the discharge lamp 1 are simplified for convenience of explanation.
4A is a plan view showing the inside of the lamp house 31 and the casing 51 of the light source device 30 of FIG. 1, and FIG. 4B is a side view showing the light source device 30 of FIG. 4A. . In FIGS. 4A and 4B and FIGS. 6A and 6B referred to below, a support member 33 that supports the lamp house 31, the casing 51, the discharge lamp 1, and the like, and a drawer portion are provided. 36 and the like are shown in cross section.

4A and 4B, the lamp house 31 is divided into a lower housing 31A in which the discharge lamp 1 is accommodated and an upper housing 31B in which the mirror 3 is accommodated and the window member 4 is installed on the side surface. . The adjacent surfaces of the

housings

31A and 31B are provided with an opening 31Ab for allowing light from the discharge lamp 1 to pass therethrough, and the side of the lower housing 31A in the + X direction allows the discharge lamp 1 and the like to pass when the discharge lamp 1 is replaced. For this purpose, an opening 31Aa is provided. The casing 51 of the exchange device 50 is installed on the side surface in the + X direction of the lower housing 31A, and the opening 51a for passing the discharge lamp 1 and the like is provided on the side surface of the casing 51 facing the opening 31Aa.

A window 51b for carrying out and carrying in the discharge lamp 1 is provided on the side surface in the + X direction of the casing 51, and the window 51b is opened and closed by a door (hereinafter referred to as a lamp replacement door) 45. The casing 51 of the exchange device 50 and the lower housing 31A are connected by a connecting member (not shown) or the like so that the positional relationship does not shift. A storage section 54 for the discharge lamp 1 is installed in the vicinity of the window section 51 b at the end in the + X direction in the casing 51, and a lamp transport system 56 is disposed in the upper section in the casing 51. Although not shown, the casing 51 is provided with an outside air inlet and a filter that removes dust and the like from the taken outside air.

In addition, a pair of guide portions 41 is provided in parallel to the X direction so as to oppose two side surfaces in the Y direction of the lower housing 31A, and a drawer portion 36 is disposed along the guide portion 41 so as to be movable in the X direction. The discharge lamp 1 is supported at the center of the lead-out portion 36 via the support member 33. As the guide member 41, for example, a telescopic (multistage) guide mechanism may be used. In addition, the ellipsoidal mirror 2 provided with a circular opening 2a (see FIG. 4A) is installed in the drawer portion 36 so as to surround the discharge lamp 1, and the discharge lamp 1 is disposed above the lower housing 31A. A light shielding member 42 shaped like a side surface of a truncated cone is disposed so as to cover the clamp mechanism 52 connected to the base portion 28. An opening (not shown) for passing the discharge lamp 1 and the clamp mechanism 52 when the discharge lamp 1 is replaced is provided on the side surface in the + X direction of the light shielding member 42.

In addition to the drive unit 34 for the cathode-side base part 26, the clamp mechanism 52 for the anode-side base part 28, the storage part 54, and the lamp transport system 56, the exchange device 50 is provided in the lower housing 31A. A drawer drive unit 60 that pulls out the drawer portion 36 toward the casing 51 through the openings 31Aa and 51a, and a drive unit 72 that clamps and releases the base portion 28 by the clamp mechanism 52. As shown in FIG. 4 (A), the drawer drive unit 60 is arranged along the X direction on the floor surface in the casing 51 on the −Y direction side of the straight line passing through the center of the lower housing 31A and parallel to the X axis. A guide member 61 arranged in a row, a base table 62 arranged so as to be movable in the X direction along the guide member 61, and a ball screw system, a belt for driving the base table 62 in the X direction along the guide member 61 A drive unit 63 such as a drive method or a linear motor method, and a connecting member 43 are included. The connecting member 43 is provided at the end of the base table 62 on the −X direction side in the + Y direction and at the front end 62a protruding in the Z direction, and at the end of the drawer portion 36 in the + X direction at the center in the Y direction. The convex connected portion 36c is connected.

By moving the base table 62 in the + X direction along the guide member 61 by the drive part 63 of the drawer drive unit 60, the discharge lamp 1 supported by the drawer part 36 is supported by the drawer part 36 in the lower housing 31A. It can move (draw out) to a position that enters the casing 51. Since the drawer portion 36 is supported by the guide member 41 and the drawer portion 36 can move smoothly in the X direction along the guide member 41, the load of the drawer portion 36 is hardly applied to the base table 62. Not done. For this reason, instead of the mechanism using the guide member 61, a mechanism that moves the drawer portion 36 in the X direction with an air cylinder or the like may be used as the drawer driving unit 60.

In addition, the drive unit 72 that drives the clamp mechanism 52 of the base portion 28 of the discharge lamp 1 is fixed to the upper surface of the base table 62 and tilted slightly (for example, about 15 degrees) clockwise (for example, about 15 degrees). Hereinafter, the guide member 73 is disposed along the retraction direction D of the clamp mechanism 52 (see FIG. 4A), and the guide member 73 can be moved in the retraction direction D via the two sliders 74. A flat plate-shaped movable table 75 placed thereon, a drive unit 77 such as an air cylinder or an electromagnetic cylinder that drives the movable table 75 in the retracting direction D with respect to the base table 62, and a Z fixed to the upper surface of the movable table 75. And a support member 65 elongated in the direction. Further, a relay member 64 that is elongated in the Z direction is fixed to the end portion of the upper surface of the movable table 75 in the −X direction, the other end of the power cable 24 is connected to the upper portion of the relay member 64, and the center of the relay member 64 in the Z direction is The other end of the power cable 23 connected to the support member 33 is connected to the part through an opening provided in the drawer part 36. The

power cables

23 and 24 are further connected to the power supply unit 20 of FIG. 1 via flexible extension cables (not shown).

FIG. 7A shows a detailed configuration of the clamp mechanism 52 and the drive unit 72. 7A, the + X direction end of the reference lever 67 of the clamp mechanism 52 is movable in a direction parallel to the retraction direction D of FIG. 4A via a short linear guide 71H at the upper end of the support member 65. It is supported so as to be finely movable in D1 (uniaxial direction). The drive unit 72 has one end fixed to the bottom of the reference lever 67 in the vicinity of the + X direction end, a tension coil spring 68 that pulls the + X direction end of the drive lever 69 upward, and a movable table 75. One end is fixed to the upper surface, and a driving portion 76 such as an air cylinder or an electromagnetic cylinder that can displace the end in the + X direction of the driving lever 69 downward (−Z direction). One end of the drive unit 76 is connected to the movable table 75 via a rotatable joint 76a. The tip of the movable element of the drive unit 76 and the end of the drive lever 69 are connected via a rotatable joint 76b. As an example, a so-called clevis joint can be used as the joint 76a, and a so-called knuckle joint can be used as the joint 76b.

In the state of FIG. 7A, the driving unit 76 does not apply a force to the end of the driving lever 69, so that the counterclockwise force is exerted on the driving lever 69 against the reference lever 67 by the tension coil spring 68. Works. As a result, the roller 70 provided at the end of the drive lever 69 in the −X direction urges the terminal portion 28a of the base portion 28 toward the power supply block 66, so that the terminal portion 28a is formed by the power supply block 66 and the roller 70. It is kept stable. At this time, even if the distance between the movable table 75 and the discharge lamp 1 is deviated from the target value, the amount of deviation is offset by the reference lever 67 moving in the movable direction D1 via the linear guide 71H.

Next, when the clamp of the terminal portion 28a by the clamp mechanism 52 is released, as shown in FIG. 7B, the end portion of the drive lever 69 is pulled downward by the drive portion 76, and the roller 70 is moved to the terminal portion. Move to a position higher than 28a. At this time, the position of the end portion of the drive lever 69 approaches the discharge lamp 1, but the drive portion 76 is slightly rotated by the joint 76 a accordingly, so that stress that deforms the drive lever 69 does not act. . In this state, the clamp mechanism 52 and the power cable 24 can be separated from the base portion 28 by moving the movable table 75 in the direction indicated by the arrow A2 along the retraction direction D by the driving portion 77 of FIG. it can.

The lamp transport system 56 includes three claw portions 86 for gripping the gripped portion 28e of the base portion 28 on the anode side of the discharge lamp 1 from above, a grip claw opening / closing mechanism 85 for opening and closing these claw portions 86, A Z-axis drive mechanism 84 that holds the discharge lamp 1 and moves up and down (Z direction), a turning shaft 83 that turns the Z-axis drive mechanism 84 around an axis parallel to the Z axis, and the turning shaft 83 as the casing 51. And a support portion 82 that is supported on the ceiling portion.

FIG. 9A is a plan view showing a state in which the gripped portion 28e of the base portion 28 is gripped by the three claw portions 86, and FIG. 9B is a side view of FIG. 9A. When the discharge lamp 1 is gripped by the lamp transport system 56, as shown in FIG. 9A, the concave surfaces provided at the tips of the three claw portions 86 are respectively opposed to the spherical surface of the gripped portion 28e. Then, the grip claw opening / closing mechanism 85 is positioned. In this state, as shown in FIG. 9B, the gripping claw opening / closing mechanism 85 moves (closes) the three claw portions 86 in the center direction so that the concave surfaces of the three claw portions 86 are formed on the gripped portion 28e. The three claw portions 86 are closed until they contact the spherical surface. Since the three claw portions 86 are respectively connected to the grip claw opening / closing mechanism 85 via a spring mechanism (not shown) that can be displaced in the radial direction, a stress that deforms the base portion 28 is applied. Absent. In order to hold the base portion 28 more stably, a convex portion (pin) may be provided on the inner surface of the claw portion 86, and a concave portion in which the convex portion is accommodated may be provided in a corresponding portion of the gripped portion 28e.

4A and 4B, the storage unit 54 has a plurality of used discharge lamps 1 and a plurality of unused discharge lamps 1 (hereinafter also referred to as discharge lamps 1N) mounted thereon (FIG. 4A). 6) openings 79a (refer to FIG. 11) are provided concentrically, and a rotatable turntable 79 and a drive unit 80 that rotates the turntable 79 are provided. The number of openings 79a is the number of

discharge lamps

1 and 1N that can be stored in the turntable 79, and the number of

discharge lamps

1 and 1N that can be stored is arbitrary. As an example, the turntable 79 is formed of an insulating material having high heat resistance such as synthetic resin. The tip of the base 26 on the cathode side of the

discharge lamp

1 or 1N is inserted into the opening 79a, and the

discharge lamp

1 or 1N is caused by its own weight via the flange 26a (see FIG. 1A) of the base 26. It is placed on the turntable 79.

As shown in FIG. 12, a positioning member 87 having a recess in the center and a semicircular cross section corresponding to the plurality of openings 79 a is provided on the side surface of the turntable 79. A convex portion that can be engaged with the concave portion of the positioning member 87 is provided, and a leaf spring portion 88 that is deformable in the radial direction of the turntable 79 is disposed. By rotating the turntable 79 around the rotation shaft 79b and stopping the rotation of the turntable 79 when the positioning member 87 is engaged with the leaf spring portion 88 (elastic member), the position of the opening 79a is discharged. The

lamp

1 or 1N can be reliably positioned at a position where the

lamp

1 or 1N is transferred to or from the lamp conveyance system 56.

Further, as shown in FIG. 11, a rotating unit 96 that rotates the discharge lamp 1N is disposed at the delivery position of the

discharge lamps

1 and 1N below the turntable 79 as necessary. As an example, the rotating part 96 includes a cylindrical rotating part 95 that is rotatably connected to a support part (not shown) connected to the floor surface, and a base part 26 of the discharge lamp 1N that is inserted into the rotating part 95. In order to fix the shaft portion 26b,

clamp portions

96A, 96B, and 96C (clamp portions) driven in a radial direction with respect to the rotating portion 95 by three

drive portions

97A, 97B, and 97C (drive portion 97C is not shown). 96C (not shown), a gear 98a that rotates the rotating unit 95, and a drive unit 98 that drives the gear 98a. The rotation unit 95 is provided with an encoder (not shown) for detecting the rotation angle, and the detection result of this encoder is supplied to the light source control system 32, and the light source control system 32 uses the detection result and the like to drive

units

98 and 97A. Controls drive amount of ~ 97C. Further, an elevating part (not shown) for retracting the rotating part 96 as a whole below the base part 26 is arranged, and the rotating part 96 is usually retracted below the base part 26. In the state of FIG. 11, the second detection device 94B is disposed below the rotation unit 96, and the first detection device 94A is disposed above the surface of the turntable 79 opposite to the surface on which the rotation unit 96 is located. .

Hereinafter, in the light source device 30 of the present embodiment, an example of an operation when the discharge lamp 1 is replaced using the replacement device 50 will be described. This exchange operation is controlled by the light source control system 32. First, when conducting an energization test (light emission test) of the discharge lamp 1N before the unused discharge lamp 1N is mounted on the exposure apparatus EX, the cap portion 28 prevents the sphere 27 from falling into the housing portion 29. The

base parts

28 and 26 are energized in a state where is set downward. After the energization is completed, the base part 28 is kept downward until the temperature of the base part 28 returns to near normal temperature. As a result, it can be determined that a substantially unused discharge lamp 1N has been used.

First, as shown in FIG. 4A, the operator (not shown) opens the lamp replacement door 45 of the casing 51 of the replacement device 50, and attaches the cap portion 26 of the unused discharge lamp 1N to the storage portion 54. It is inserted into the opening 79a of the turntable 79 and attached to the turntable 79 through the flange portion 26a of the base portion 26 of the discharge lamp 1N (replenishment of the discharge lamp). When the power is turned off, the turntable 79 can be manually rotated. As described with reference to FIG. 12, the turntable 79 is configured so that a predetermined positioning member 87 is engaged with the leaf spring portion 88. , The rotation angle of the turntable 79 can be set manually and accurately.

It should be noted that the discharge lamp is preferably replenished in a state where the supply of power from the power supply unit 20 in FIG. 1 is stopped and the discharge lamp 1 in the lower housing 31A in FIG. However, measures are taken so that the light of the discharge lamp 1 in the lower housing 31A does not leak to the outside, and the turntable 79 is made of an insulating material, so that the turntable 79 can be connected to the turntable 79 while the discharge lamp 1 is lit. The lamps may be exchanged between the lamps. As an example, in FIG. 4A, six

discharge lamps

1 and 1N can be set (supplemented) on the turntable 79, but a space is made in the turntable 79 to collect used lamps. 4A and 4B show the case where the discharge lamp 1 is contained in the lamp house 31, so that five discharge lamps 1N are set on the turntable 79. FIG. Thereafter, the lamp replacement door 45 is closed.

Thereafter, when the accumulated usage time of the discharge lamp 1 reaches an allowable time, the light source control system 32 transmits information to that effect to the main control system 14, and the main control system 14 stops the exposure operation of the exposure apparatus EX. . Then, the light source control system 32 stops the supply of power from the power supply unit 20 to the discharge lamp 1, turns off the discharge lamp 1, operates the exchange device 50, and stores the discharge lamp 1 in the storage unit 54. Replace with the discharge lamp 1N.

That is, first, in FIG. 4B, the drawer portion 36 that integrally supports the discharge lamp 1 and the elliptical mirror 2 in the lamp house 31 is moved to a predetermined position in the + X direction by the drawer drive unit 60 as indicated by the arrow A1. Pull out until. As a result, the drawer 36 is pulled out to the position shown in FIG. At this time, the clamp mechanism 52, the relay member 64, and the drive unit 72 are also pulled out together with the drawer portion 36 into the + X direction casing 51. 6A is a plan view, partly in section, showing the drawer portion 36 and the exchange device 50 of FIG. 6B. Further, in FIGS. 8 and 10B and the like referred to below, some of the plurality of discharge lamps 1N are not shown in order to avoid complication of the drawings.

Next, as described with reference to FIG. 7B, the drive lever 69 of the clamp mechanism 52 is pulled downward by the drive portion 76 of the drive unit 72, and the terminal portion 28 a of the base portion 28 of the discharge lamp 1 is moved. The roller 70 pressed against the power supply block 66 with a strong force is rotated about the connecting pin P51 (fulcrum), and the roller 70 is separated from the terminal portion 28a so as to be positioned higher than the terminal portion 28a. Thereafter, the movable table 75 that supports the clamp mechanism 52 and the drive unit 76 is retracted along the retract direction D in the direction indicated by the arrow A2 by the drive unit 77 (see FIG. 4B). At this time, the roller 70 passes above the base portion 28.

Then, as shown in FIG. 8, the lever 38 is rotated clockwise by the drive unit 40 of the drive unit 34 to release the clamp of the fixing part 26h of the base part 26 on the cathode side. Thereby, the base part 26 can be pulled out from the support member 33. In order to avoid complication of the drawings, the drive unit 34 for the base portion 26 is not shown in FIG. 10B referred to below.

Next, the turning shaft 83 of the lamp transport system 56 is turned to move the gripping claw opening / closing mechanism 85 above the base portion 28 of the discharge lamp 1. Then, as indicated by an arrow A3, the grip claw opening / closing mechanism 85 is lowered by the Z-axis drive mechanism 84 of the lamp transport system 56, and the grip claw opening / closing mechanism 85 closes the three claw portions 86 on the bottom surface thereof, thereby 28 gripped portions 28e are gripped (see FIG. 9B). Thereafter, the claw portion 86 holding the discharge lamp 1 is raised by the Z-axis drive mechanism 84 as indicated by an arrow A5 in FIG. At this time, the discharge lamp 1 is raised to a position where the lower end of the cathode side cap portion 26 of the discharge lamp 1 is higher than the upper surface of the lead-out portion 36 (that is, a position higher than the upper surface of the elliptical mirror 2).

Thereafter, as indicated by an arrow A6 in FIG. 10A, the gripping claw opening / closing mechanism 85 that grips the discharge lamp 1 is swung about 180 degrees by the swivel shaft 83, and the discharge lamp 1 is moved above the turntable 79. Let At this time, the turntable 79 is rotated by the drive unit 80 of the storage unit 54, and the vacant opening 79a of the turntable 79 is moved below the gripping claw opening / closing mechanism 85 (discharge lamp 1). In this state, the gripping claw opening / closing mechanism 85 is lowered, and the claw portion 86 is opened after the tip end portion of the base portion 26 of the discharge lamp 1 is accommodated in the opening 79a, as shown in FIG. The discharge lamp 1 is placed at position A7 of the turntable 79. At this stage, the rotating part 96 is retracted below the base part 26 by an elevating part (not shown). *

The subsequent replacement operation of the discharge lamp will be described with reference to the flowchart of FIG. First, in FIG. 11, the gripping claw opening / closing mechanism 85 of the lamp transport system 56 is raised. Then, in step 202 of FIG. 13, it is confirmed whether or not there is the base 26 on the cathode side of the discharge lamp 1 (whether the discharge lamp 1 is at position A7) using the second detection device 94B. At this stage, since there is the base part 26, the operation proceeds to step 204, and whether or not the light beam LB1 passes through the openings 28a1, 28a2 of the base part 28 on the anode side using the first detection device 94A ( It is confirmed whether or not the discharge lamp 1 has been used and the sphere 27 of the base part 28 has fallen into the housing part 29).

If the light beam LB1 cannot be detected, the rotating unit 96 is raised as an example, and the discharge lamp 1 is rotated within a range of about ± 60 degrees with the light receiving unit 94Ab continuously detecting the light beam LB1. Let Note that the rotation angle of the discharge lamp 1 is set with an accuracy of about ± 30 degrees with respect to a target angle in advance by an operator. When the light beam LB1 can be detected at a certain rotation angle, the angle of the discharge lamp 1 is set to a rotation angle at which the amount of light detected by the light receiving unit 94Ab is maximized. Thereafter, the rotating unit 96 is retracted downward. The target angle of the

discharge lamps

1 and 1N placed on the turntable 79 by the lamp transport system 56 and the operator (in the case of the unused discharge lamp 1N, the light beam detected by the light receiving unit 94Ab). If the LB1 light amount is set to an approximately maximum value, the operation of correcting the rotation angle of the

discharge lamps

1 and 1N can be omitted.

At this stage, since the discharge lamp 1 has been used and the light beam LB1 is shielded by the sphere 27, the light source control system 32 can confirm that the discharge lamp 1 has been used. Thereafter, it is confirmed whether or not the turntable 79 has been rotated 360 degrees (step 212). If the turntable 79 has not been rotated 360 degrees, in step 214, the turntable 79 is rotated by 60 degrees, for example, step 202. Migrate to Here, for convenience of explanation, it is assumed that the discharge lamp 1N at the position A9 has moved onto the optical paths of the light beams LB1 and LB2 of the

detection devices

94A and 94B.

Then, it is confirmed that there is the base part 26 of the discharge lamp 1N (step 202), and it is confirmed whether or not the light beam LB1 passes through the openings 28a1, 28a2 of the base part 28 (step 204). In this case, if the light beam LB1 cannot be detected, the discharge lamp 1N may be rotated so that the light amount of the detected light beam LB1 is maximized by raising the rotating unit 96. Here, since the discharge lamp 1N is not used and the sphere 27 does not block the light beam LB1, the light source control system 32 can confirm that the discharge lamp 1N is not used. Thereafter, the operation proceeds to step 206, and the discharge lamp 1N is conveyed to the support member 33. In Step 202, when there is no cathode side cap part 26, the operation proceeds to Step 212. If the unused discharge lamp 1N cannot be confirmed even if the turntable 79 is rotated 360 degrees in step 212, the process proceeds to step 216 and the operator is asked to replenish the discharge lamp 1N.

In step 206, the gripping claw opening / closing mechanism 85 is lowered again, and the gripping claw opening / closing mechanism 85 is lifted after the claw portion 86 grips the gripped portion 28e of the base portion 28 of the unused discharge lamp 1N. . Then, as shown by the dotted arrow B1 in FIG. 10 (A), the gripping claw opening / closing mechanism 85 is turned about 180 degrees by the turning shaft 83 by the reverse movement of the discharge lamp 1 when it is carried out, and FIG. 10 (B). As shown by the dotted arrow B2, the holding claw opening / closing mechanism 85 that holds the discharge lamp 1N is lowered, and the base 26 on the cathode side of the discharge lamp 1N is placed on the support member 33. Thereafter, as shown by a dotted arrow B3 in FIG. 8, the gripping claw opening / closing mechanism 85 is raised, and the cathode side cap 26 is clamped to the support member 33 by the drive unit 34 as shown in FIG. 6B. .

Further, as shown in FIG. 7B, the driving unit 77 of FIG. 8 moves the movable table 75 that supports the clamp mechanism 52 in the direction indicated by the arrow B4 along the retraction direction D (direction approaching the discharge lamp 1N). The power supply block 66 is brought into contact with the terminal portion 28a of the base portion 28 of the discharge lamp 1N. Thereafter, when the drive unit 76 pushes out the movable unit (in the case of an e-cylinder, the suction force is gradually weakened), the drive lever 69 is rotated around the connecting pin P51 by the force of the tension coil spring 68, The roller 70 comes into contact with the terminal portion 28 a and strongly presses the terminal portion 28 a against the power supply block 66. As a result, power can be supplied to the anode-side cap portion 28 without power loss.

At this time, since the base 26 on the cathode side of the discharge lamp 1N is fixed to the support member 33 by the drive unit 34 (see FIG. 6B), the position in the retraction direction D of the power supply block 66 is temporarily fixed. In this state, if the position of the power supply block 66 with respect to the anode side cap portion 28 is shifted, a large force may be applied to the discharge lamp 1N and the discharge lamp 1N may be damaged. In order to prevent this, in this embodiment, as shown in FIG. 7A, the reference lever 67 to which the power supply block 66 is attached can be moved in the direction D1 (radial direction with respect to the discharge lamp 1N) by the linear guide 71H. Therefore, the positioning error of the power supply block 66 can be corrected (absorbed). As the error absorbing mechanism, for example, the movable table 75 may freely move in the direction D1.

Further, the clamping mechanism 52 for the base portion 28 has low rigidity in the rotation direction and the turning direction of the drive lever 69 (rotation direction around an axis parallel to the Z axis), and the reference lever 67 and / or the drive lever 69 are By bending, positioning errors in the rotational direction and the turning direction can be absorbed. Furthermore, the groove 66a (see FIG. 5), which is a contact surface of the power supply block 66 with the base portion 28, has a constant V shape regardless of the position in the Z direction. It does not matter if the position in the Z direction is shifted between

As shown in FIG. 6B, when the clamping of the power supply block 66 by the clamp mechanism 52 with respect to the base portion 28 of the discharge lamp 1N is completed, as shown by the dotted arrow B5 in FIG. Then, the drawer portion 36 is returned to the original position in the lower housing 31A by moving the base table 62 in the -X direction. As a result, the used discharge lamp 1 is replaced with an unused discharge lamp 1N. Thereafter, exposure is performed by turning on the discharge lamp 1N in the exposure apparatus EX (step 210).

As described above, according to the discharge lamp replacement method of the present embodiment, the spherical body 27 (movable body) is disposed in the terminal portion 28 a of the base portion 28 of the discharge lamp 1, and the base portion 28 is in use during the use of the discharge lamp 1. When the temperature rises, the sphere 27 passes through the opening 29b of the accommodating portion 29 in the terminal portion 28a and falls into the accommodating portion 29. When the discharge lamp 1 is placed on the turntable 79 of the storage unit 54, the discharge lamp 1 is utilized by utilizing the light beam LB1 of the first detection device 94A shielded by the sphere 27 in the terminal portion 28a. Can be easily confirmed. For this reason, when replacing the discharge lamp 1 and the unused discharge lamp 1N fully automatically, it is possible to prevent the used discharge lamp 1 from being mounted on the support member 33 of the light source device 30 by mistake. *

Further, the exposure apparatus EX of the present embodiment includes a light source device 30 for causing the discharge lamp 1 (exposure light source) to emit light. The discharge lamp 1 sandwiches the glass tube 25 with a glass tube 25 (glass member) in which an anode EL1 (first electrode) and a cathode EL2 (second electrode) for forming a light emitting portion are provided. A base part 28 (first base member) and a base part 26 (second base member) provided in this manner, and the base part 28 is provided with through holes (openings) made of openings 28a1, 28a2, 29c, 29d. It has been.

The light source device 30 also enters the light beam LB1 into the through hole of the storage unit 54 for storing the discharge lamp 1, the lamp transport system 56 (transport unit) for transporting the discharge lamp 1, and the base unit 28 of the discharge lamp 1. The irradiation portion 94Aa (light transmission portion) to be performed, the light receiving portion 94Ab that detects the light beam LB1 that has passed through the through hole, and the angle of the discharge lamp 1 as the state of the discharge lamp 1 using the detection result of the light receiving portion 94Ab A required light source control system 32 (control unit).

According to this embodiment, for example, the angle of the discharge lamp 1 can be detected by obtaining the angle of the discharge lamp 1 when the light quantity of the detected light beam LB1 is maximized while rotating the discharge lamp 1. Using the angle, for example, the angle of the discharge lamp 1 can be set to a target angle, so that the discharge lamp 1 can be easily held by the lamp transport system 56 when the discharge lamp 1 is non-rotationally symmetric. For this reason, the replacement of the discharge lamp 1 can be performed efficiently.

Further, the exposure apparatus EX of the present embodiment includes the light source device 30 described above, an illumination optical system 13 (illumination system) that illuminates the mask M with light (exposure light IL) generated from the discharge lamp 1 of the light source device 30, and A projection optical system PL that projects an image of the pattern of the mask M onto the plate P (substrate) under the exposure light IL. According to the exposure apparatus EX, since the replacement time of the discharge lamp 1 can be shortened, the throughput of the exposure process can be improved.

In the above-described embodiment, the following modifications are possible.
First, in the above-described embodiment, the sphere 27 is disposed in the terminal portion 28a of the base portion 28 of the discharge lamp 1, but the sphere 27 can be omitted. In this case, the spherical body 27 and the accommodating portion 29 may be omitted, the terminal portion 28a may be formed in a substantially prismatic shape, and the through hole may be formed so as to pass through the same position as the openings 28a1 and 28a2. The rotation angle of the discharge lamp 1 can be detected by irradiating the through-hole with the light beam LB1 from the first detection device 94A and detecting the light quantity of the light beam LB1 with the light receiving portion 94Ab while rotating the discharge lamp 1. .

In the above-described embodiment, power is supplied to the power supply block 66 using the power cable 24. However, as a method of supplying power to the power supply block 66 (discharge lamp 1), the power cable 24 is not used. Alternatively, the reference lever 67 and the power supply block 66 may be used (conducted). Further, not only electric power but also compressed air for cooling the base portion 28 may be supplied to the discharge lamp 1 to the power supply block 66.

7A is configured to open and close the reference lever 67 and the drive lever 69 of the clamp mechanism 52 in the vertical direction (Z direction). However, the clamp mechanism drive unit 72 in FIG. You may make it open and close in a perpendicular direction. By doing so, the clamp mechanism 52 does not need to retract the roller 70 at the tip of the drive lever 69 to a position higher than the base portion 28 when the drive mechanism 77 moves the clamp mechanism 52 in the X direction. That is, only the opening / closing operation of the clamp mechanism 52 eliminates the components of the clamp mechanism 52 above the discharge lamp 1, so that the discharge lamp 1 can be transported in the Z direction.

[Second Embodiment]
The second embodiment will be described with reference to FIGS. 14A to 15B. The discharge lamp of the present embodiment is different from the first embodiment in the configuration of the base portion on the anode side. 14A to 15B, portions corresponding to those in FIGS. 4A and 4B are denoted by the same reference numerals, and detailed description thereof is omitted.

14A and 14B show a base part 28A on the anode side of the discharge lamp 1A according to this embodiment, and a power supply socket 152 that detachably connects the base part 28A and the power cable 24A. 14A and 14B, the anode-side cap portion 28A is connected to the connecting portion 25d at the end of the rod-like portion 25c of the glass tube 25 of the discharge lamp 1A, and the gripped portion whose outer surface is spherical. 28Ae, a heat dissipating part 28Ai having a plurality of ring-shaped heat dissipating fins 28Aj provided at the lower end of the grasped part 28Ae so as to cover a part of the rod-like part 25c, and a terminal provided at the upper end of the grasped part 28Ae The portion 28Aa, the cylindrical box-shaped storage portion 29A disposed in the terminal portion 28Aa and the gripped portion 28Ae, and the discharge lamp 1A are unused and provided at the center of the upper portion 29Aa of the storage portion 29A. And a spherical body 27 that is placed so as to cover the circular opening 29Ab and has a smaller thermal expansion coefficient than the thermal expansion coefficient of the accommodating portion 29A. The terminal portion 28Aa has a two-stage cylindrical portion that gradually decreases in diameter toward the tip, a concave portion 28Ab is formed at the upper end of the substantially axisymmetric terminal portion 28Aa, and a mountain shape is formed in the middle of the concave portion 28Aa. Convex part 28Ac is provided.

The accommodating portion 29A is disposed in a recessed portion formed in the gripped portion 28Ae and the terminal portion 28Aa, and the accommodating portion 29A is urged toward the connecting portion 25d by the compression coil spring SP1 on the terminal portion 28Aa side. At the temperature at which the discharge lamp 1A is stored, the diameter of the opening 29Ab is smaller than the diameter of the sphere 27, and in the state where the discharge lamp 1A emits light and the temperature of the discharge lamp 1A increases, The diameter of the opening 29Ab is defined so that the diameter of the opening 29Ab is larger than the diameter of the sphere 27. Thereby, when using the discharge lamp 1A, the sphere 27 passes through the opening 29Ab and falls onto the bottom 29Ae in the accommodating portion 29A. Instead of providing the compression coil spring SP1, a step is provided in a space (for example, in the terminal portion 28Aa) in which the accommodation portion 29A is disposed so that the upper portion is narrower than the lower portion, and the lower surface of the step portion and the accommodation portion 29A. The housing portion 29A may be prevented from moving upward by disposing the housing portion 29A so as to be in contact with the upper surface of the housing. In this case, the upper space that is narrower than the lower portion only needs to be large enough to arrange the sphere 27.

Further, along the straight axis orthogonal to the longitudinal direction of the glass tube 25 passing through the central axis of the glass tube 25 and the center of the accommodating portion 29A (the center of the sphere 27 when the sphere 27 is in the center of the bottom portion 29Ae). A circular through hole 28Ae1 having a smaller diameter than the sphere 27 is provided in the gripped portion 28Ae, and two circular openings 29Ac having a smaller diameter than the sphere 27 are formed on the side surface of the accommodating portion 29A so as to face the through hole 28Ae1. 29Ad is formed. The gap between the inner surface of the housing portion 29A and the sphere 27 is set so that the sphere 27 can move by, for example, about 5% to 30% (for example, about 10%) of the diameter of the sphere 27.

With the discharge lamp 1A unused, the light beam LB1 is irradiated from the irradiation section 94Aa of the first detection device 94A so as to pass through the centers of the through holes 28Ae1 of the discharge lamp 1A and the openings 29Ac and 29Ad of the housing section 29A. By detecting the light beam LB1 with the light receiving portion 94Ab, it can be confirmed that the sphere 27 has not fallen into the accommodating portion 29A, that is, the discharge lamp 1A is unused. After the use of the discharge lamp 1A, as shown in FIG. 14B, when the sphere 27 is falling in the accommodating portion 29A, the light beam LB1 is shielded by the sphere 27, and the light beam is received by the light receiving portion 94Ab. Since LB1 cannot be detected, it can be confirmed that the discharge lamp 1A has been used.

The power supply socket 152 includes a small disk-shaped main body 153, a connecting portion 154 that is provided on the bottom surface of the main body 153 and can be in close contact with the upper portion (tapered portion) of the recess 28Ab of the terminal portion 28Aa, And a plurality of (for example, at least four) spheres 157 provided on the convex portion 155 so as to be movable in the radial direction.
15A and 15B are cross-sectional views showing the power supply socket 152, respectively. In FIG. 15A, a main body portion 153 of the power supply socket 152 is obtained by connecting a lower end portion 153A provided with a connecting portion 154 and an upper end portion 153B with a bolt (not shown) or the like, and the center of the lower end portion 153A. A circular recess 153Aa is formed, and a small circular through hole 153Ab is formed between the recess 153Aa and the lower end of the projection 155. Further, a piston portion 158 for an air cylinder is accommodated in the recess 153Aa, and a shaft portion 158b having a cylindrical shape and having a recess 158a provided at the tip is connected to the bottom surface of the piston portion 158 so as to pass through the through hole 153Ab. . A gas (for example, air) compressed and cooled through the piping in the power cable 24A and the groove 153Ac in the main body 153 can be supplied into the recess 153Aa, and is provided between the lower end 153A and the piston 158. A compression coil spring 160 is installed to urge the piston portion 158 toward the upper end portion 153B, and a flexible and movable sealing member is provided between the concave portion 153a and the piston portion 158 to maintain airtightness. (For example, O-ring) 159 is arranged. In addition, a sphere 157 is disposed in each of the plurality of openings 154a (see FIG. 15B) of the convex portion 155.

When the power supply socket 152 is attached to the terminal portion 28Aa of the base portion 28A as shown in FIG. 14B, compressed gas is supplied from the power cable 24A to the piston portion 158 as shown in FIG. 15B. Then, the piston 158 is lowered and the sphere 157 is stored in the recess 158a. Thereby, the spherical body 157 of the convex portion 155 can pass inside the convex portion 28Ac of the base portion 28A. Thereafter, by stopping the supply of compressed gas from the power cable 24A to the piston portion 158, the piston portion 158 rises, and the sphere 157 engages with the convex portion 28Ac as shown in FIG. The power feeding socket 152 is stably connected to the terminal portion 28Aa. When removing the power supply socket 152 from the terminal portion 28Aa, the compressed gas may be supplied from the power cable 24A so as to lower the piston portion 158 again.

In each of the above-described embodiments, the first detection device 94A is arranged in the storage unit 54. However, the first detection device 94A is not limited to this, and instead of the storage unit 54 or in the storage unit 54. In addition, the first detection device 94 </ b> A may be provided in the lamp house 31. In that case, the irradiation unit 94Aa and the light receiving unit 94Ab are preferably arranged in a state of being covered with a heat insulating material or the like so as to avoid the influence of heat caused by the discharge lamp 1. Further, it is preferable to dispose the lamp house 31 as far as possible from the discharge lamp 1. By disposing the first detection device 94A in the lamp house 31 in this way, it is possible to detect whether the discharge lamp 1 has been used or not used immediately before the discharge lamp 1 is turned on. In addition, since it is possible to detect the presence or absence of the sphere 27 (and thus the timing of dropping) while the discharge lamp 1 is lit, the temperature state of the discharge lamp 1, the rate of temperature rise of the discharge lamp 1, the lamp house It is possible to detect the temperature state, the cooling state, and the like in 31. Further, it is possible to detect an abnormality in the lamp house 31 based on the detection result. It should be noted that the discharge lamp 1 is replaced or urged to be replaced based on the detection result of the first detection device 94A provided in the lamp house 31 (including displaying the time to be performed). You may do it.

Next, various modifications of the discharge lamp that can be used in the exposure apparatus or the light source apparatus of the first and second embodiments described above will be described. Note that in the drawings used in the following description of the modified examples, the same or similar reference numerals are given to the portions corresponding to FIGS. 3B, 7A, and 14A, 14B. Detailed description thereof will be omitted.

FIG. 16A is a cross-sectional view showing a base 28A on the anode side of the discharge lamp 1B of the first modification. With respect to the discharge lamp 1A of FIG. 14A, the discharge lamp 1B is opposed to the sphere 27 and the sphere 27 that are in contact with the outline of the opening 29Ab of the housing portion 29A disposed inside the base portion 28. Between the inner surface of the terminal portion 28Aa, a compression coil spring SP2 that urges the spherical body 27 toward the accommodating portion 29A is disposed. The accommodating portion 29A is fixed to the connecting portion 25d side of the discharge lamp 1B by, for example, adhesion. Other configurations are the same as those in the embodiment of FIG. *

According to this modification, since the spherical body 27 is urged by the compression coil spring SP2 toward the opening 29Ab of the accommodating portion 29A, the longitudinal direction of the discharge lamp 1B is horizontal when the discharge lamp 1B is being transported or used. Even if it becomes parallel, the position of the sphere 27 does not change. By providing the compression coil spring SP2, when the discharge lamp 1B is used (when energized), the temperature of the base portion 28A rises, and the diameter of the opening 29Ab of the housing portion 29A is larger than the diameter of the sphere 27 due to thermal expansion. At this time, the sphere 27 surely passes through the opening 29Ab and moves into the accommodating portion 29A. Therefore, since the light beam LB1 of the detection device 94A is blocked by the sphere 27 when the discharge lamp 1B is stored, whether or not the discharge lamp 1B is used regardless of the posture of the discharge lamp 1B during transport and use. Can be reliably determined.

Further, as shown by the discharge lamp 1C of the second modification of FIG. 16B, the sphere 27 may be moved in a direction (lateral direction) orthogonal to the longitudinal direction of the discharge lamp. In the discharge lamp 1C, in the concave portion 28Af provided on the side surface of the gripped portion 28Ae of the base portion 28A, a housing portion 29B having a cylindrical shape and provided with a circular opening 29Bb on the side wall portion facing the outside of the gripped portion 28Ae is disposed. Has been. Further, a cylindrical fixing portion 29C is fixed in the recess 28Af so as to be in contact with the accommodating portion 29B, for example, by a ring-shaped fixing ring (not shown), and the spherical body 27 is in contact with the outline of the opening 29Bb in the fixing portion 29C. The compression coil spring SP2 is disposed between the spherical body 27 and the inner surface of the side wall portion of the fixing portion 29C so as to bias the spherical body 27 toward the opening 29Bb. At the temperature at which the discharge lamp 1C is stored, the diameter of the opening 29Bb is smaller than the diameter of the sphere 27, and when the discharge lamp 1C emits light and the temperature of the discharge lamp 1C rises, The diameter of the opening 29Bb is defined so that the diameter of the opening 29Bb is larger than the diameter of the sphere 27.

Further, two circular openings 29Bc and 29Bd having a diameter smaller than that of the sphere 27 for allowing the light beam LB1 of the detection device 94A to pass through are formed on the side surface in the direction perpendicular to the paper surface of FIG. In addition, a through hole (not shown) for passing the light beam LB1 in parallel to a straight line passing through the centers of the openings 29Bc and 29Bd is also provided in the gripped portion 28Ae of the base portion 28A. Other configurations are the same as those in the embodiment of FIG.

Also in this modified example, since the spherical body 27 is biased by the compression coil spring SP2 to the opening 29Bb side of the accommodating portion 29B, the longitudinal direction of the discharge lamp 1C is parallel to the horizontal plane when the discharge lamp 1C is being transported or used. The position of the sphere 27 does not change even if it becomes parallel to the vertical direction. For this reason, when the diameter of the opening 29Bb of the housing part 29B becomes larger than the diameter of the sphere 27 when the discharge lamp 1C is used (when energized), the sphere 27 surely passes through the opening 29Bb and the housing part 29B. Move in. Accordingly, when the discharge lamp 1C is stored next time, the detection device 94A can reliably determine whether or not the discharge lamp 1C is used regardless of the posture of the discharge lamp 1C during transport and use.

Next, FIGS. 17A and 17B are cross-sectional views showing a base 28B on the anode side of the discharge lamp 1D of the third modification. In this modification, the sphere 27 is moved stepwise according to the usage time of the discharge lamp 1D. In FIG. 17A, the base portion 28B is connected to the connecting portion 25d of the discharge lamp 1D, and has a plurality of ring-shaped portions provided with a gripped portion 28Be having a spherical outer surface and a lower end of the gripped portion 28Be. Radiating fins 28Bj (heat radiating portions) and a substantially cylindrical terminal portion 28Ba provided at the upper end of the gripped portion 28Be. A concave portion 28Bb is formed in the center of the terminal portion 28Ba, and a mountain-shaped convex portion 28Bc is provided in the middle of the concave portion 28Bb. The terminal portion 28Ba can be connected to the connecting portion 154 of the power supply socket 152 in FIG. 14A via the concave portion 28Bb and the convex portion 28Bc.

Further, the first cylindrical accommodation portion 29A, the second cylindrical accommodation portion 29D, and the sphere 27 are arranged so as to be stacked in order from the connecting portion 25d side in the terminal portion 28Ba and the gripped portion 28Be. The housing portion 29A is fixed to the connecting portion 25d by bonding or the like, and the housing portion 29D is fixed to the upper surface of the housing portion 29A by bonding or the like. The

accommodating portions

29A and 29B are sized to accommodate the spherical body 27, and the thermal expansion coefficient of the

accommodating portions

29A and 29B is larger than the thermal expansion coefficient of the spherical body 27. In addition, a circular opening 29Ab is formed in the upper partition part of the lower housing part 29A, and a circular opening 29Db having a diameter larger than the opening 29Ab is formed in the upper partition part of the upper housing part 29B.

At the temperature when storing the discharge lamp 1D, the diameter d4 of the opening 29Db is smaller than the diameter of the sphere 27, and the diameter d3 of the opening 29Ab is smaller than the diameter d4. On the other hand, the discharge lamp 1D is mounted on the exposure apparatus, the energization of the discharge lamp 1D is started, the discharge lamp 1D is caused to emit light, and the temperature of the discharge lamp 1D rises to, for example, approximately half of the maximum temperature (first threshold value). ), The diameter d4 of the opening 29Db becomes larger than the diameter of the sphere 27 due to the thermal expansion of the accommodating portion 29D, and the sphere 27 can pass through the opening 29Db, but the diameter d3 of the opening 29Ab of the accommodating portion 29A is smaller than the diameter of the sphere 27. The sphere 27 cannot pass through the opening 29Ab. Further, when the discharge lamp 1D continues to emit light (energized) and the temperature of the discharge lamp 1D rises to a substantially maximum temperature, the diameter d3 of the opening 29Ab becomes larger than the diameter of the sphere 27 due to the thermal expansion of the housing portion 29A. The diameters of the openings 26Ab and 29Db are defined so that the sphere 27 can pass through the opening 29Ab.

Further, it passes through the central axis of the glass tube 25 (see FIG. 2) of the discharge lamp 1D and the centers of the accommodating portions 29A and 29D (the center of the sphere 27 when the sphere 27 is at the center of the accommodating portions 29A and 29D). The circular through holes 28Be1 and 28Be2 having a diameter smaller than that of the sphere 27 are provided in the gripped portion 28Be and the terminal portion 28Ba along a straight line orthogonal to the longitudinal direction of the discharge lamp 1D (glass tube 25). . Then, two circular openings 29Ac, 29Ad and 29Dc, 29Dd having a diameter smaller than that of the sphere 27 are formed on the side surfaces of the accommodating portions 29A and 29D so as to face the through holes 28Be1 and 28Be2.

Further, with the discharge lamp 1D mounted on the turntable 79 of the storage unit 54 in FIG. 4B, as shown in FIG. 17A, the through-hole 28Be1 of the discharge lamp 1D is placed above the turntable 79. A first detection device 94A having an irradiation part 94Aa for irradiating the light beam LB1 and a light receiving part 94Ab for detecting the light beam LB1 is arranged at the center of the openings 29Ac and 29Ad of the accommodating part 29A. Further, above the detection device 94A, an irradiation unit 94Ca that irradiates the light beam LB3 to the centers of the through hole 28Be2 of the discharge lamp 1D and the openings 29Dc and 29Dd of the housing unit 29D, and a light receiving unit 94Cb that detects the light beam LB3. A second detection device 94C having the above is arranged. Detection signals from the light receiving portions 94Ab and 94Cb are processed by the light source control system 32 described above. Other configurations are the same as those in the embodiment of FIG.

In this modification, when the discharge lamp 1D is not used and the sphere 27 is in contact with the outline of the opening 29Db of the housing portion 29D, the light beams LB1 and LB3 pass through the housing portions 29A and 29D, respectively, and receive the light receiving portion 94Ab. , 94Cb. In other words, when the

detection devices

94A and 94C can simultaneously detect the light beams LB1 and LB3, it can be confirmed that the sphere 27 is on the upper portion of the housing portion 29D and the discharge lamp 1D is unused.

On the other hand, in a state where the discharge lamp 1D is mounted on the exposure apparatus and the discharge lamp 1D emits light and the temperature of the discharge lamp 1D rises to almost ½ of the maximum temperature, due to the thermal expansion of the housing portion 29D, FIG. As shown in B), the sphere 27 passes through the opening 29Db and moves into the accommodating portion 29D. When the use of the discharge lamp 1D is interrupted in this state and the discharge lamp 1D is returned to the turntable 79 of the storage unit 54, the light beam LB1 passes through the housing unit 29A and is detected by the light receiving unit 94Ab. LB3 is blocked by the sphere 27 in the accommodating portion 29D and is not detected by the light receiving portion 94Cb. In other words, when the light beam LB1 can be detected by the detection device 94A and the light beam LB3 cannot be detected by the detection device 94B, the sphere 27 is inside the housing portion 29D and the discharge lamp 1D is used for a predetermined time (energization, It can be confirmed that light is emitted. *

Then, when the discharge lamp 1D is mounted on the exposure apparatus, the discharge lamp 1D is caused to emit light, and the discharge lamp 1D continues to be used until the temperature of the discharge lamp 1D rises to a substantially maximum temperature (second threshold value). Due to the thermal expansion of the portion 29A, the sphere 27 passes through the opening 29Ab and moves to a position PA1 indicated by a dotted line in the accommodating portion 29A. Thereafter, for example, when a predetermined usable time elapses and the use of the discharge lamp 1D is stopped and the discharge lamp 1D is returned to the turntable 79 of the storage unit 54, the light beam LB3 passes through the housing unit 29D and is received. Although detected by the portion 94Cb, the light beam LB1 is blocked by the sphere 27 in the accommodating portion 29A and is not detected by the light receiving portion 94Ab. In other words, when the light beam LB1 is not detected by the detection device 94A and the light beam LB3 can be detected by the detection device 94B, the sphere 27 is inside the housing portion 29A, and the discharge lamp 1D remains at a predetermined usable time. It can be confirmed that it is only used (used).

According to this modification, it is possible to determine how long the discharge lamp 1D has been used by detecting which one of the accommodating portions 29A and 29D the sphere 27 is in. Also in this modification, a compression coil spring (not shown) that urges the sphere 27 toward the opening 29Db of the housing portion 29D may be provided. In addition, you may form accommodating part 29A, 29D with the material from which a thermal expansion coefficient differs. The material forming the accommodating portion 29D is a material having a higher coefficient of thermal expansion than the material forming the accommodating portion 29A. In this case, in a state in which the discharge lamp 1D is caused to emit light and the temperature of the discharge lamp 1D is increased to, for example, approximately ½ of the maximum temperature, the housing portion 29D is deformed to allow the sphere 27 to pass therethrough. If the sphere 27 is deformed to such an extent that it cannot pass, the sphere 27 is accommodated in 29D. Furthermore, in a state where the discharge lamp 1D is caused to emit light and the temperature of the discharge lamp 1D has risen to a substantially maximum temperature, the accommodating portion 29A is further deformed, and the sphere 27 is accommodated in 29A. Thus, by forming the accommodating portions 29A and 29D with materials having different coefficients of thermal expansion, it is possible to detect whether or not the discharge lamp 1D is being used step by step. Further, when the accommodating portions 29A and 29D are formed of materials having different coefficients of thermal expansion, the diameter of the opening 29Ab and the diameter of the opening 29Db may be formed with the same length. Further, when the difference in coefficient of thermal expansion is increased, the diameter of the opening 29Db may be made longer than the diameter of the opening 29Ab. Although the use of the discharge lamp 1D is detected in two stages by providing the housing parts 29A and 29D, the use of the discharge lamp 1D is determined by more stages than two stages by providing a plurality of storage parts. You may make it detect.

Next, FIG. 18A shows a state in which the discharge lamp 1E of the fourth modification is held by the clamp mechanism 52 of FIG. 7A, and FIG. 18B shows the discharge lamp 1E of FIG. FIG. 18C is a cross-sectional view showing the terminal portion 28Ca of FIG. 18B. In this modified example, the spherical body 27 is moved by using the elastic deformation of the predetermined member instead of the thermal expansion of the predetermined member.

In FIG. 18A, the base part 26 on the cathode side of the discharge lamp 1E is supported by a support member 33, and the terminal part 28Ca of the base part 28C on the anode side of the discharge lamp 1E is blocked by a roller 70 of the clamp mechanism 52. It is biased and supported by the 66 side.
As shown in FIG. 18B, in the terminal portion 28Ca of the discharge lamp 1E, a circular opening 28Ch having a diameter smaller than that of the sphere 27 is formed in a portion facing the roller 70. Further, inside the terminal portion 28Ca, an elastically deformable thin flat plate limiting member 29A in which a U-shaped cutout portion 29Aa shown in FIG. 18D is formed on the upper surface of the gripped portion 28Ce has an opening 28Ch. The spherical body 27 is disposed between the opening 28Ch and the notch 29Aa. For example, the limiting member 29A may be formed of steel. In addition, an inclined member 29B is fixed to the upper surface of the gripped portion 28Ce on the center direction side of the terminal portion 28Ca with respect to the limiting member 29A so as to be gradually lowered from the cutout portion 29Aa side of the limiting member 29A. Further, two openings 28Cf and 28Cg for allowing the light beam LB1 of the detection device 94A shown in FIG. 18C to pass through on two side surfaces of the terminal portion 28Ca in the direction perpendicular to the paper surface of FIG. 18B. Is formed.

In this modification, the maximum width d5 of the notch 29Aa of the limiting member 29A is defined to be smaller than the diameter of the sphere 27 when no external force is applied to the limiting member 29A. Therefore, in a state where the discharge lamp 1E is not held by the clamp mechanism 52 (a state where the roller 70 is not in contact with the sphere 27), the maximum width d5 of the notch 29Aa is smaller than the diameter of the sphere 27, and the sphere 27 is disposed between the opening 28Ch and the notch 29Aa, and the light beam LB1 of the detection device 94A can pass through the openings 28Cf and 28Cg of the terminal portion 28Ca. For this reason, it can be confirmed that the discharge lamp 1E is unused from the detection signal of the detection device 94A.

On the other hand, in a state where the discharge lamp 1E is held by the clamp mechanism 52 (a state in which the roller 70 is in contact with the sphere 27), the sphere 27 is urged toward the restricting member 29A, and the notch 29Aa is caused by elastic deformation of the restricting member 29A. Is larger than the diameter of the sphere 27, the sphere 27 passes through the notch 29Aa, rolls on the upper surface of the inclined member 29B, and stops at a position between the openings 28Cf and 28Cg in the terminal portion 28Ca. . In this state, the light beam LB1 of the detection device 94A cannot pass through the opening 28Cg of the terminal portion 28Ca. Other configurations are the same as those in the embodiment of FIG.

According to this modification, when the discharge lamp 1E is held by the clamp mechanism 52 for use in the exposure apparatus, the sphere 27 in the base portion 28C is biased toward the restricting member 29A by the roller 70 of the clamp mechanism 52. The sphere 27 moves between the openings 28Cf and 28Cg. For this reason, when the discharge lamp 1E is returned to the turntable 79 of the storage unit, the light beam LB1 of the detection device 94A is blocked by the sphere 27, so that it can be confirmed that the discharge lamp 1E has been used. Furthermore, since the inclined member 29B for moving the sphere 27 in the direction between the openings 28Cf and 28Cg is provided in the terminal portion 28Ca, the position of the sphere 27 is stably maintained between the openings 28Cf and 28Cg. .

Note that the width of the cutout portion 29Aa of the limiting member 29A is increased to some extent by the thermal expansion of the limiting member 29A due to the temperature rise of the base portion 28C due to the use (energization) of the discharge lamp 1E. For this reason, the maximum width d5 of the notch 29Aa may be made wider than the diameter of the sphere 27 by the thermal expansion of the restricting member 29A when the temperature of the base part 28C reaches almost the maximum temperature.

Next, FIGS. 19A and 19B are views showing the inside of the terminal portion 28a of the base portion 28 on the anode side of the discharge lamp of the fifth modified example. In this modification, the width of the gap through which the sphere 27 passes is expanded using the principle of leverage. In the terminal portion 28a of FIG. 19A, a restricting member 29E made of, for example, a steel material that is substantially U-shaped and elastically deformable is fixed to the upper surface of the gripped portion 28e of the base portion 28. The limiting member 29E is a pair of flat plate-shaped fixing portions 29Ec fixed to the upper surface of the gripped portion 28e, and a pair of opening portions that can be opened and closed by elastic deformation at both ends of the upper surface of the fixing portion 29Ec via small portions of the cross-sectional area. L-shaped hinge portions 29Ea and 29Eb. A sphere 27 is placed on the gap between the tips of the hinge portions 29Ea and 29Eb. Further, between the hinge portions 29Ea and 29Eb, in order from the fixed portion 29Ec side, a rod-shaped drive member 29H made of, for example, aluminum having a thermal expansion coefficient larger than that of the limiting member 29E, and the hinge portions 29Ea and 29Eb. There is provided a tension coil spring 29I that acts to narrow the distance a between the tip ends of the coil springs. As an example, the tension coil spring 29I is provided at two locations separated in a direction perpendicular to the paper surface of FIG. 19A, and the sphere 27 can be disposed between the two tension coil springs 29I.

Further, the terminal portion 28a has a diameter smaller than the diameter of the sphere 27 for passing the light beam LB1 of the detection device 94A in FIG. 3B on two side surfaces in the direction perpendicular to the paper surface in FIG. 19A. Two openings 28a1 and 28a2 (opening 28a1 is not shown) are formed.
At the temperature when storing the discharge lamp of this modification, the length of the drive member 29H and the limit member 29E are such that the distance a between the tips of the hinge portions 29Ea and 29Eb is smaller than the diameter d of the sphere 27. The shape is specified. On the other hand, in a state where the discharge lamp emits light and the temperature of the discharge lamp reaches almost the maximum temperature, as shown in FIG. 19B, the lever portion 29Ea, The length of the drive member 29H is defined so that the distance between the tips of 29Eb is considerably larger than the diameter of the sphere 27. In this case, the sphere 27 moves from the original position PA2 to the upper surface of the drive member 29H between the two tension coil springs 29I through the distance between the tip portions, and the light of the detection device 94A in FIG. The beam LB1 is blocked by the sphere 27. Other configurations are the same as those in the embodiment of FIG.

In this modification, when the discharge lamp is used (when energized), if the distance between the tips of the hinge portions 29Ea and 29Eb of the limiting member 29E becomes larger than the diameter of the sphere 27 due to thermal expansion of the drive member 29H, the sphere 27 It moves to the upper surface of the drive member 29H through the distance between the tip portions. For this reason, when the discharge lamp is stored, the light beam LB1 of the detection device 94A is blocked by the sphere 27, so it is possible to reliably determine whether the discharge lamp is used.

Furthermore, in this modification, the extension amount of the distance a between the tip portions of the hinge portions 29Ea and 29Eb is the tip portion of the hinge portions 29Ea and 29Eb due to the thermal expansion of the limiting member 29E due to the lever action caused by the thermal expansion of the drive member 29H. It becomes significantly larger than the amount of elongation of the interval. For this reason, the processing accuracy of the limiting member 29E and the drive member 29H when manufacturing the discharge lamp can be lower (rougher) than the processing accuracy of the opening 29b of the accommodating portion 29 in FIG. Is easy to manufacture.

In this modification, instead of the sphere 27, a low thermal expansion cylinder 27 </ b> C having the same diameter as the diameter d of the sphere 27 extending in a direction perpendicular to the paper surface of FIG. 19A may be used. Even when the cylinder 27C is used, if the distance between the tips of the hinge portions 29Ea and 29Eb is larger than the diameter d, the cylinder 27C passes through the distance between the tips and reaches a position where the light beam LB1 is blocked. Whether or not the lamp is used can be determined.

Further, as shown in the base 28 on the anode side of the discharge lamp of the sixth modification of FIGS. 20A and 20B, in addition to the lever principle used in the modification of FIG. The gap through which the sphere 27 (or the cylinder 27C) passes may be increased by the action. In FIG. 20A, the thermal expansion coefficient is larger than the thermal expansion coefficient of the limiting member 29E inside the hinge portions 29Ea and 29Eb at both ends of the limiting member 29E disposed inside the terminal portion 28a of the base portion 28. For example,

flat drive members

29F and 29G made of aluminum are fixed by adhesion or the like.

At the temperature when the discharge lamp of this modification is stored, the distance a between the tips of the hinge portions 29Ea and 29Eb is smaller than the diameter d of the sphere 27, and the sphere 27 has the distance between the tips of the hinge portions 29Ea and 29Eb. It is placed on top. On the other hand, in a state where the discharge lamp emits light and the temperature of the discharge lamp reaches almost the maximum temperature, the amount of thermal expansion of the

drive members

29F and 29G is limited by the limiting member 29E (hinge portion) as shown in FIG. 29Ea, 29Eb), the distance between the tips of the hinge portions 29Ea, 29Eb is considerably larger than the diameter of the sphere 27 due to the bimetal action. For this reason, the sphere 27 passes from the original position PA2 through the distance between the tips thereof, moves to the upper surface of the fixed portion 29Ec, and blocks the light beam LB1 in FIG. 3B toward the opening 28a2. For this reason, when the discharge lamp is stored, the light beam LB1 of the detection device 94A is blocked by the sphere 27, so that it is possible to accurately determine whether or not the discharge lamp is used.

Further, in this modification, the extension amount of the distance a between the tips of the hinge portions 29Ea and 29Eb is caused by the bimetal action due to the thermal expansion of the

drive members

29F and 29G, and the tips of the hinge portions 29Ea and 29Eb due to the thermal expansion of the limiting member 29E. It becomes significantly larger than the amount of elongation of the interval between the parts. For this reason, the processing accuracy of the limiting member 29E and the

drive members

29F and 29G when manufacturing the discharge lamp can be lower (rougher) than the processing accuracy of the opening 29b of the housing portion 29 in FIG. 3B, for example. It is easy to manufacture a discharge lamp.

Next, FIGS. 21A and 21B are cross-sectional views showing a base 28D on the anode side of the discharge lamp of the seventh modified example. In this modification, whether or not the discharge lamp is used is determined based on a change in the angle of the reflection surface of the mirror portion provided in the base portion.
In FIG. 21A, a circular convex portion 28e2 is provided at the center of a circular concave portion 28e1 formed at the upper end portion of the gripped portion 28e of the base portion 28D. The flange portion of the support member 29J, which is substantially cylindrical and provided with a ring-shaped flange portion at the lower end portion, is placed so as to surround the convex portion 28e2 in the concave portion 28e1. Further, a disk-shaped intermediate member 29K made of a material that is plastically deformed by heat, for example, an alloy containing lead, is fixed to the upper surface of the support member 29J, and the reflective surface faces outward so as to face the upper surface of the intermediate member 29K. The triangular prism-shaped mirror portions MR1 and MR4 are fixed.

Further, a terminal portion 28a having a substantially triangular prism shape and a circular flange portion 28a3 at the lower end is provided so as to cover the support member 29J, the intermediate member 29K, and the mirror portions MR1 and MR2 above the intermediate member 29K. It is placed. The triangular prism-shaped mirror portions MR2 and MR3 are fixed at positions facing the mirror portions MR1 and MR2 on the inner surface of the terminal portion 28a so that the reflecting surfaces face inward. The flange portion of the support member 29J and the flange portion 28a3 of the terminal portion 28a overlap each other, and the two flange portions 28a3 and the like are fixed to the recess 28e1 by bolts BA1 at a plurality of locations.

Further, two circular openings 28a1 and 28a2 are formed on the side surface of the terminal portion 28a so as to face the mirror portions MR1 and MR4 on the intermediate member 29J and along a straight line passing through the central axis of the support member 29J. Has been.
When the discharge lamp of this modification is not used and this discharge lamp is placed on the release table 79 of the storage unit shown in FIG. 11, the light beam LB1 emitted from the irradiation unit 94Aa of the detection device 94A is The light passes through the opening 28a1, the mirror portions MR1, MR2, MR3, MR4, and the opening 28a2, and is received by the light receiving portion 94Ab. It can be confirmed from the detection signal of this light receiving portion 94Ab that the discharge lamp is unused.

On the other hand, in a state where the discharge lamp is mounted on the exposure apparatus and the temperature of the discharge lamp is increased (a state where the temperature of the discharge lamp reaches a maximum temperature or a state where the use of the discharge lamp is continued for a predetermined time or more), As shown in FIG. 21B, the intermediate member 29K is plastically deformed by heat, and the angles of the reflecting surfaces of the mirror portions MR1 and MR4 change. Thereafter, when the used discharge lamp is placed on the turntable 79 of the storage unit shown in FIG. 11, the light beam LB1 emitted from the irradiation unit 94Aa of the detection device 94A is shown in FIG. 21 by the mirror unit MR1 (or MR4). The light is reflected in a direction different from the case of (A) and is not received by the light receiving unit 94Ab. For this reason, it can be confirmed from the detection signal of the light receiving unit 94Ab that the discharge lamp has been used.

In this modified example, as shown in FIG. 21A, the light receiving unit 94Ab of the detection device 94A may be arranged at a position PA5 indicated by a dotted line close to the irradiation unit 94Aa. In this case, the angle of the reflecting surface of the mirror part MR1 is set so that the light beam LB1 from the irradiation part 94Aa is received by the light receiving part 94Ab at the position PA5, and the other mirror parts MR2 to MR4 are omitted. Even in this case, when the temperature of the discharge lamp is increased, the intermediate member 29K is plastically deformed by heat, the angle of the reflecting surface of the mirror part MR1 is changed, and the reflected light from the mirror part MR1 is received by the light receiving part 94Ab. become unable. For this reason, it can be confirmed from the detection signal of the light receiving unit 94Ab that the discharge lamp has been used. In addition, although the example which provides a mirror part in the side surface inside the terminal part 28a was shown, not only this but you may make it provide a mirror part in the side surface outside the terminal part 28a. In this case, the mirror portions MR2 and MR3 may be provided in the casing 51, for example, instead of the terminal portion 28a. By providing the mirror part on the side surface outside the terminal part 28a, it is not necessary to form the openings 28a1 and 28a2 in the terminal part 28a, the strength and synthesis of the terminal part 28a is increased, and the manufacturing of the terminal part 28a is facilitated. An effect is obtained.

In addition, although it has been described that the detection device 94 includes the irradiation unit 94Aa and the light receiving unit 94Ab that irradiate the light beam LB1, the present invention is not limited thereto. The irradiation unit 94Aa may be a point light source, and it may be possible to confirm that the discharge lamp has been used depending on whether or not a predetermined amount of light is detected by the light receiving unit 94Ab. Further, the light receiving unit 94Ab may be configured by an imaging device, for example, a camera. Whether or not the sphere 27 is accommodated in the accommodating portion 29 may be detected by a known image processing or the like by the imaging device.

As an eighth modification, when the discharge lamp has been used (energized) for a predetermined time, the state of the anode-side base portion 28D has changed due to discoloration and / or deformation, etc. May be detected. Further, when the discharge lamp is used (energized) for a predetermined time, marks are formed on the cathode-side base part 26, the anode-side base part 28, the glass tube 25, etc. by a mark forming part (not shown), and the mark is described above. The use of the discharge lamp may be detected by detecting with this imaging device.

In addition, you may make it form a groove | channel instead of opening 28a1, 28a2 in the terminal part 28a. That is, since the light beam LB1 from the irradiation unit 94Aa only needs to pass through the accommodation unit, a notch may be provided instead of a configuration covering the sphere like the opening. The openings 28a1 and 28a2 may be covered with a material that can transmit the light beam LB1, such as glass. As a result, there is no risk of dust entering the storage portion 29.

In each of the above-described embodiments, the presence or absence of use of the discharge lamp is detected by the anode-side base part 28. However, the cathode-side base part 26 is provided with a configuration equivalent to the anode-side base part 28, and the discharge lamp is used. The presence or absence may be detected. In addition, a configuration capable of detecting whether or not the discharge lamp is used may be provided in both the cathode side cap part 26 and the anode side base part 28.

A liquid crystal display element or the like is formed by forming a predetermined pattern (circuit pattern, electrode pattern, etc.) on the substrate (plate P) using the exposure apparatus of each of the above-described embodiments or the exposure method using these exposure apparatuses. The liquid crystal device can be manufactured. Hereinafter, an example of this manufacturing method will be described with reference to steps S401 to S404 in FIG.
In step S401 (pattern formation process) of FIG. 22, first, a coating process for preparing a photosensitive substrate (plate P) by applying a photoresist on a substrate to be exposed, and a liquid crystal display element using the above exposure apparatus. An exposure process for transferring and exposing the mask pattern onto the photosensitive substrate and a developing process for developing the photosensitive substrate are performed. A predetermined resist pattern is formed on the substrate by a lithography process including the coating process, the exposure process, and the development process. Following this lithography process, a predetermined pattern including a large number of electrodes and the like is formed on the substrate through an etching process using the resist pattern as a processing mask, a resist stripping process, and the like. The lithography process or the like is executed a plurality of times according to the number of layers on the plate P.

In the next step S402 (color filter forming step), a large number of three fine filter sets corresponding to red R, green G, and blue B are arranged in a matrix, or red R, green G, and blue B are arranged. A color filter is formed by arranging a set of three stripe-shaped filters in the horizontal scanning line direction. In the next step S403 (cell assembly process), for example, liquid crystal is injected between the substrate having the predetermined pattern obtained in step S401 and the color filter obtained in step S402, and a liquid crystal panel (liquid crystal cell) is obtained. ).

In subsequent step S404 (module assembly process), the liquid crystal panel (liquid crystal cell) thus assembled is attached with an electric circuit for performing a display operation and components such as a backlight to complete a liquid crystal display element. Let According to the above-described method for manufacturing a liquid crystal display element, the discharge lamp can be exchanged efficiently in the exposure apparatus, so that high throughput can be obtained.

The present invention is not limited to application to a manufacturing process of a liquid crystal display element. For example, a manufacturing process of a display device such as a plasma display, an imaging element (CCD or the like), a micromachine, a MEMS (Microelectromechanical Systems: It can be widely applied to manufacturing processes of various devices such as micro electromechanical systems), thin film magnetic heads using ceramic wafers or the like as substrates, and semiconductor elements.

The light source device of the above-described embodiment includes a step-and-repeat type projection exposure apparatus (stepper or the like) in addition to the above-described step-and-scan type scanning exposure type projection exposure apparatus (scanner or the like). It can also be applied to an exposure light source. The light source device of the above-described embodiment can also be applied to a light source device of a proximity type or contact type exposure device that does not use a projection optical system, or a light source of equipment other than the exposure device.

EX ... exposure apparatus, M ... mask, P ... plate, PL ... projection optical system, 1 ... discharge lamp, 1N ... unused discharge lamp, 2 ... elliptical mirror, 13 ... illumination optical system, 20 ... power supply, 23, 24 ... Power cable, 25 ... Glass tube, 25a ... Valve part, 26 ... Cathode side base part, 28 ... Anode side base part, 28a ... Terminal part, 28e ... Grasped part, 30 ... Light source device, 31 ... Lamp House, 32 ... Light source control system, 33 ... Support member, 36 ... Drawer, 50 ... Exchanger, 52 ... Clamp mechanism, 54 ... Storage, 56 ... Lamp transport system

Claims

A discharge lamp loaded in an apparatus having a detection unit for detecting a use state of the discharge lamp,
An electrode for discharge;
A discharge lamp comprising: a detected portion that is detected by the detecting portion and changes from a first state to a second state when the electrode is energized.
2. The discharge lamp according to claim 1, wherein the detected portion changes from the first state to the second state when the energization time of the electrode elapses a predetermined time or more.
A glass member forming a light emitting part;
A current-carrying member that is provided at an end of the glass member and energizes the discharge electrode; and
The discharge lamp according to claim 1, wherein the detected portion is provided on the energization member.
The discharge lamp according to claim 3, wherein the detected portion is an opening provided in the energization member.
The discharge lamp according to claim 4, wherein the detected part has a movable part capable of shielding at least a part of a light beam passing through the opening of the energization member.
The energizing member is provided adjacent to the first accommodating portion through a first accommodating portion provided with the opening and capable of accommodating the movable portion, and a partition portion provided with a hole, and accommodates the movable portion. A second accommodating part that is possible,
In the first state where the electrode is not energized, the movable part is accommodated in the second accommodating part, and in the second state where the electrode is energized for a predetermined time, the movable part passes through the hole and passes through the hole. The discharge lamp of Claim 5 accommodated in a 1st accommodating part.
The discharge lamp according to claim 6, wherein the detected part has a restricting part for restricting movement so that the movable part in the first accommodating part does not move to the second accommodating part in the second state.
The discharge lamp according to any one of claims 3 to 7, wherein the energizing member includes a first energizing member and a second energizing member provided so as to sandwich the glass member.
A discharge lamp comprising: a glass member that forms a light emitting portion; and a first energizing member and a second energizing member that energize an electrode in the glass member,
A discharge lamp in which an opening is provided in the first current-carrying member.
The discharge lamp according to claim 9, further comprising a movable part capable of shielding at least a part of the light beam passing through the opening of the first current-carrying member.
The first energization member is provided adjacent to the first accommodating portion through a first accommodating portion in which the opening is provided and the movable portion can be accommodated, and a partition portion in which a hole is provided, and the movable member is movable. A second accommodating part capable of accommodating the part,
Before the start of use of the discharge lamp, the movable part is accommodated in the second accommodating part,
In a state where the first energization member and the second energization member are not energized, the movable portion cannot pass through the hole of the partition wall portion and energizes the first cap member and the second cap member. The discharge lamp according to claim 10, wherein the movable part can pass through the opening in a state.
The first energizing member is
A connected portion to which a member to which the power cable is connected can be connected;
The discharge lamp according to any one of claims 8 to 11, further comprising a held portion including a non-planar portion that can be held by the conveying portion.
The discharge lamp according to claim 12, wherein the held portion of the first energizing member includes an axially symmetric portion having a spherical surface.
The discharge lamp according to any one of claims 8 to 13, wherein the first current-carrying member has a heat radiating fin.
The second current-carrying member has a flange portion that can be placed on the support member, a small-diameter portion having a smaller cross-sectional area than the flange portion, and a step portion having a larger cross-sectional area than the small-diameter portion. The discharge lamp according to any one of the above.
A light source device comprising the discharge lamp according to any one of claims 8 to 15,
A storage unit for storing the discharge lamp;
A transport unit for transporting the discharge lamp;
A light transmitting section for causing a light beam to enter the opening of the first energization member of the discharge lamp;
A light receiving unit for detecting the light beam that has passed through the opening;
A control unit for determining a state of the discharge lamp using a detection result of the light receiving unit;
A light source device comprising:
A correction unit for correcting the rotation angle of the discharge lamp;
The control unit obtains a rotation angle of the discharge lamp using a detection result of the light receiving unit, and corrects the rotation angle of the discharge lamp via the correction unit based on the obtained rotation angle. Light source device.
The discharge lamp includes a movable part capable of shielding at least part of the light beam incident on the opening of the first energization member,
The control unit determines whether at least a part of the light beam incident on the opening is shielded by the movable unit using the detection result of the light receiving unit, and based on the determination result, the discharge lamp The light source device according to claim 15 or 17, which determines a use state of the light source.
A connecting portion for detachably connecting a power cable to the first energizing member of the discharge lamp;
The light source device according to any one of claims 16 to 19, further comprising a support portion that detachably supports the second energization member of the discharge lamp.
A light source device according to any one of claims 16 to 19,
An illumination system for illuminating the mask with light generated from the discharge lamp of the light source device;
An exposure apparatus comprising: a projection optical system that projects an image of the mask pattern onto a substrate.
A method for replacing a discharge lamp according to any one of claims 8 to 15,
Storing the discharge lamp;
Transporting the discharge lamp from a storage unit to an installation position;
Making a light beam incident on the opening of the first energization member of the discharge lamp;
Detecting the light beam that has passed through the aperture;
Determining the state of the discharge lamp using the detection result of the light beam;
Including exchange methods.
Determining the state of the discharge lamp includes determining a rotation angle of the discharge lamp using a detection result of the light beam,
The replacement method according to claim 21, further comprising correcting the rotation angle of the discharge lamp based on the obtained rotation angle.
The discharge lamp includes a movable part capable of shielding at least part of the light beam incident on the opening of the first energization member,
The state of the discharge lamp is determined by determining whether at least a part of the light beam incident on the opening is shielded by the movable part using the detection result of the light beam, The replacement method according to claim 21 or 22, further comprising: determining a use state of the discharge lamp based on a determination result.
Replacing the discharge lamp using the discharge lamp replacement method according to any one of claims 21 to 23;
Illuminating the mask with light generated from the discharge lamp;
Projecting an image of the mask pattern onto a substrate.
Forming a pattern of a photosensitive layer on a substrate using the exposure apparatus according to claim 20;
Processing the substrate on which the pattern is formed;
A device manufacturing method including:
Forming a pattern of a photosensitive layer on a substrate using the exposure method according to claim 24;
Processing the substrate on which the pattern is formed;
A device manufacturing method including: