JP6859957B2 - Discharge lamps, discharge lamp replacement methods, light source devices, exposure devices, exposure methods, and device manufacturing methods - Google Patents

Description

The present invention relates to a discharge lamp and its replacement method, a light source device including a discharge lamp, an exposure method using the replacement method, an exposure device equipped with the light source device, and a device manufacturing method using an exposure technique.

Used to transfer a pattern formed on a mask to a substrate (glass plate, semiconductor wafer, etc.) coated with a photosensitive material in a lithography process for manufacturing various devices (liquid crystal display device, semiconductor device, etc.). The exposure equipment such as the batch exposure type projection exposure apparatus and the scanning exposure type projection exposure apparatus includes a light source apparatus for exposure composed of a combination of a discharge lamp such as an ultrahigh pressure mercury lamp and a condenser mirror. There is a type that has it.

In a conventional light source device, a flange portion and a step portion are provided on one base of a discharge lamp, and the flange portion is placed on the surface of a base portion provided with an opening, and the step portion is formed in the opening. There is a lever member or the like that fixes the discharge lamp by urging it downward (see, for example, Patent Document 1). Further, if the discharge lamp for the exposure apparatus is used beyond a predetermined allowable time, the exposure performance (resolution, etc.) may be deteriorated due to the decrease in illuminance. Therefore, when the cumulative usage time of the discharge lamp has passed the allowable time, the discharge lamp is replaced with an unused discharge lamp.

International Publication No. 2007/066947 Pamphlet

In the light source device of the exposure device, for example, when the used discharge lamp and the unused discharge lamp are stored in a common storage unit so that the discharge lamp can be replaced automatically, the used discharge is conventionally used. Since the outer shape of the lamp and the unused discharge lamp are the same, there is a risk that the used discharge lamp will be used again.
Further, for example, when a non-axisymmetric discharge lamp is transported from the storage unit to the installation position of the discharge lamp, if the rotation angle of the discharge lamp deviates relatively significantly from the target value, the discharge lamp is transferred to the transport unit or the like. There is a risk that it will not be possible to deliver quickly.

In view of such circumstances, an aspect of the present invention is to make it possible to easily confirm the state of the discharge lamp.

According to the first aspect of the present invention, the discharge lamp is loaded into a device provided with a detection unit for detecting the usage state of the discharge lamp, and is an electrode for discharge and an electrode detected by the detection unit. Provided is a discharge lamp provided with a detected portion that changes from a first state to a second state when the power is turned on.
According to the second aspect of the present invention, the discharge lamp includes a glass member forming a light emitting portion, and a first base member and a second base member provided so as to sandwich the glass member. A discharge lamp having a through hole in the first base member is provided.
According to the third aspect, the light source device provided with the discharge lamp according to the aspect of the present invention, the storage unit for storing the discharge lamp, the transport unit for transporting the discharge lamp, and the third aspect of the discharge lamp. 1 The state of the discharge lamp is obtained by using a light transmitting portion for incident a light beam into the through hole of the base member, a light receiving portion for detecting the light beam passing through the through hole, and a detection result of the light receiving portion. A light source device including a control unit is provided.

According to the fourth aspect, the light source device of the aspect of the present invention, the illumination system that illuminates the mask with the light generated from the discharge lamp of the light source device, and the projection optics that projects an image of the mask pattern onto the substrate. An exposure apparatus comprising the system is provided.

According to the fifth aspect, it is the method of exchanging the discharge lamp according to the aspect of the present invention, in which the discharge lamp is stored, the discharge lamp is transported from the storage unit to the installation position, and the discharge lamp is used. To make a light beam incident on the through hole of the first base member, to detect the light beam passing through the through hole, and to obtain the state of the discharge lamp by using the detection result of the light beam. And, including exchange methods are provided.

According to a sixth aspect, replacing the discharge lamp using the discharge lamp replacement method of the aspect of the present invention, illuminating the mask with the light generated from the discharge lamp, and an image of the pattern of the mask. Is provided on a substrate and an exposure method including.
According to the seventh aspect, the pattern of the photosensitive layer is formed on the substrate by using the exposure apparatus or the exposure method of the aspect of the present invention, and the substrate on which the pattern is formed is processed. A device manufacturing method is provided.

It is a figure which shows the schematic structure of the exposure apparatus which concerns on 1st Embodiment. It is a figure which shows the discharge lamp in FIG. (A) is a cross-sectional view taken along the line AA of FIG. 3 (B), (B) is a cross-sectional view showing an anode side base portion of an unused discharge lamp, and (C) is an anode side base portion of a used discharge lamp. It is sectional drawing which shows. (A) is a plan view showing a part of the light source device in FIG. 1, and (B) is a side view showing a part of the light source device of FIG. 4 (A). It is a perspective view which shows the anode side base part and the clamp mechanism of a discharge lamp. (A) is a plan view showing a light source device moving on a slide portion, and (B) is a side view showing a part of the light source device of FIG. 6 (A). (A) is a diagram showing a state in which the anode side base portion of the discharge lamp is clamped, and (B) is a diagram showing a state in which the clamp portion of the base portion is released. It is a side view which cut out a part which shows a light source device. (A) is a plan view showing a state in which the anode side mouthpiece is gripped by the claw portion for gripping the lamp, and (B) is a side view of FIG. 9 (A). (A) is a plan view showing a light source device moving a discharge lamp, and (B) is a side view showing a part of the light source device of FIG. 10 (A). It is the figure which cut out a part which shows a plurality of discharge lamps installed in a lamp storage turntable. It is a figure which shows the positioning part of the turntable for lamp storage. It is a flowchart which shows an example of the exchange method of a discharge lamp. (A) is a cross-sectional view showing an anode side base part of an unused discharge lamp of the second embodiment, and (B) is a cross-sectional view showing an anode side mouthpiece part of a used discharge lamp. (A) and (B) are cross-sectional views showing the clamp mechanism of the anode side base portion of FIG. 14 (A), respectively. (A) is a cross-sectional view showing the anode side base portion of the discharge lamp of the first modification, and (B) is a cross-sectional view showing the anode side base portion of the discharge lamp of the second modification. (A) is a cross-sectional view showing the anode side base portion of the discharge lamp of the third modification, and (B) is a cross-sectional view showing a state in which the sphere of FIG. 17 (A) has moved downward. (A) is a view showing a state in which the anode side base portion of the discharge lamp of the fourth modification is clamped, (B) is an enlarged cross-sectional view showing the anode side base portion of FIG. 18 (A), and (C) is FIG. A cross-sectional view showing the terminal portion of FIG. 18B and FIG. 18D is a view of the inside of the terminal portion of FIG. 18B in the D direction. (A) is a diagram showing the inside of the terminal portion of the anode side base portion of the discharge lamp of the fifth modification, and (B) is a state in which the distance between the tips of the two elastic hinge portions of FIG. 19 (A) is increased. It is a figure which shows. (A) is a diagram showing the inside of the terminal portion of the anode side base portion of the discharge lamp of the sixth modification, and (B) is a state in which the distance between the tips of the two elastic hinge portions of FIG. 20 (A) is increased. It is a figure which shows. (A) is a cross-sectional view showing a terminal portion of the anode side base portion of the discharge lamp of the seventh modification, and (B) is a diagram showing a state in which the angle of the mirror portion of FIG. 21 (A) has changed. It is a flowchart which shows an example of the manufacturing process of an electronic device.

[First Embodiment]
Hereinafter, the first embodiment of the present invention will be described with reference to FIGS. 1 to 13.
FIG. 1 shows a schematic configuration of an exposure apparatus EX provided with a light source apparatus 30 according to the present embodiment. The exposure apparatus EX is, for example, a scanning exposure type projection exposure apparatus. In FIG. 1, the light source device 30 includes a discharge lamp 1 made of an arc discharge type ultra-high pressure mercury lamp, a support member 33 that holds a base portion 26 on the cathode side of the discharge lamp 1, and a drawer that can move the support member 33. The elliptical mirror 2 arranged so as to surround the portion 36 (see FIG. 4B), the drive unit 34 for fixing and releasing the base portion 26 to the support member 33, and the glass tube 25 (valve) of the discharge lamp 1. It has a (condensing mirror) and a box-shaped lamp house 31 that houses the discharge lamp 1 and the elliptical mirror 2 at the time of exposure (when the discharge lamp 1 is used). At the time of exposure, the light emitting portion in the glass tube 25 of the discharge lamp 1 is arranged near the first focal point of the elliptical mirror 2 as an example.

Further, the light source device 30 has a flexible power cable 24 that can be detachably connected to the base portion 28 on the anode side of the discharge lamp 1, and a support member 33 to the base portion 26 on the cathode side of the discharge lamp 1. A flexible power cable 23 connected to the power cable 23, a power supply unit 20 that supplies power (current) to the discharge lamp 1 via the power cables 23 and 24 to cause the discharge lamp 1 to emit light, and a used discharge lamp. It has a fully automatic type exchange device 50 for exchanging 1. The switching device 50 has a clamp mechanism 52 for attaching / detaching the power cable 24 to / from the base portion 28 on the anode side, a storage unit 54 for storing the discharge lamp 1, and a discharge lamp 1 between the support member 33 and the storage unit 54. It has a lamp transport system 56 for transporting, a storage unit 54, and a box-shaped casing 51 for accommodating the lamp transport system 56.

As shown in FIG. 4B, the support member 33 is actually a substantially cylindrical metal (conductive) member having a ring-shaped flange portion formed on the upper portion. As will be described later, the support member 33 is fixed to the center of the drawer portion 36 movably supported along the guide member 41 on the inner surface of the lamp house 31 via its flange portion, and is fixed to the support member 33 and the drawer. It is electrically insulated from the portion 36. Further, a drive unit 34 for the base portion 26 is provided on the bottom surface of the drawer portion 36.

In FIG. 1, the light source device 30 includes a light source control system 32 that controls operations of a power supply unit 20, a drive unit 34, a lamp transport system 56, and the like. The light source control system 32 monitors the cumulative usage time of the discharge lamp 1, and when the cumulative usage time reaches a predetermined allowable time, the switching device 50 is operated to operate the used discharge lamp 1. Replace with an unused discharge lamp. The detailed configuration and operation of the light source device 30 will be described later.

The exposure apparatus EX is an illumination optical system 13 that illuminates the mask M using an exposure light IL selected from a luminous flux supplied from the light source device 30, and a photoresist of an image of the pattern of the mask M under the exposure light IL. Includes a projection optical system PL that projects onto the surface of a plate P (photosensitive substrate) made of a glass substrate coated with, a mask stage MST that moves the mask M, a substrate stage PST that moves the plate P, and a light source device 30. It includes a main control system 14 including a computer that comprehensively controls the operation of the entire exposure apparatus.

As an example, the exposure device EX is an exposure device for manufacturing a liquid crystal display device, and the main body of the exposure device EX (the part including the mask stage MST, the projection optical system PL, and the substrate stage PST) is a box in the manufacturing factory. It is installed inside a shaped chamber (not shown), and the light source device 30 is installed on the roof RT of the chamber. When the cumulative usage time of the discharge lamp 1 reaches the permissible time, the light source device 30 supplies information to that effect to the main control system 14. In response to this, the main control system 14 stops the exposure operation of the exposure device EX until the information indicating that the replacement of the discharge lamp 1 is completed is supplied from the light source device 30. Hereinafter, the Z axis is taken parallel to the optical axis AX of the projection optical system PL, and the X axis is taken parallel to the paper surface of FIG. 1 in a plane perpendicular to the Z axis (which is almost a horizontal plane in this embodiment). The Y-axis will be taken perpendicular to the paper surface for explanation.

The luminous flux emitted from the discharge lamp 1 is converged to the vicinity of the second focal point by the elliptical mirror 2, passes near the shutter (not shown), becomes divergent light, and is incident on the mirror 3 for bending the optical path. The mirror 3 is also housed in the lamp house 31. The luminous flux reflected by the mirror 3 passes through the light-transmitting window member 4 of the lamp house 31 and is incident on the interference filter 5, and the exposure light composed of a predetermined emission line (for example, i-line having a wavelength of 365 nm) by the interference filter 5. Only IL is selected. As the exposure light IL, in addition to the i-line, a g-line, an h-line, a mixed light thereof, or a bright line of a lamp other than a mercury lamp can be used. The selected exposure light IL is incident on the fly-eye lens 6 (optical integrator), and a large number of 2 are placed on the variable aperture diaphragm (hereinafter referred to as the illumination σ diaphragm) 7 arranged on the injection surface of the fly-eye lens 6. The next light source is formed. The exposure light IL that has passed through the variable σ diaphragm 7 enters the mask blind (variable field diaphragm) 9 via the first relay lens 8. The arrangement surface of the mask blind 9 is substantially conjugated with the pattern surface of the mask M, and the illumination region on the mask M is defined by setting the opening shape of the mask blind 9 via the drive device 9a. Further, the stage control system 15 can open and close the mask blind 9 via the drive device 9a so that the plate P is not irradiated with unnecessary exposure light when the plate P is stepped.

The exposure light IL that has passed through the mask blind 9 illuminates the pattern region of the pattern surface of the mask M via the second relay lens 10, the mirror 11 for bending the optical path of the exposure light IL, and the condenser lens 12. The illumination optical system 13 includes an interference filter 5, a fly-eye lens 6, a variable σ diaphragm 7, relay lenses 8 and 10, a mask blind 9, a mirror 11, and a condenser lens 12. The luminous flux from the light source device 30 illuminates an elongated illumination region of the mask M (mask), for example, in the Y direction, as exposure light IL through the illumination optical system 13. The pattern in the illumination region of the mask M is enlarged to the exposure region (the region optically conjugated to the illumination region) of one shot region of the plate P via the projection optical system PL (β is, for example, 1x magnification). It is projected at magnification or reduction magnification). As the projection optical system PL, for example, a multi-projection optical system in which a plurality of projection optical systems are arranged in two rows in the Y direction may be used. When a plurality of projection optical systems are used in this way, the exposure light IL from the illumination optical system 13 illuminates the plurality of illumination regions of the pattern surface of the mask M in parallel.

The mask M is held on the upper surface of the mask stage MST that can be finely moved in the X direction, the Y direction, and the rotation direction around the Z axis on the mask base (not shown). The position of the mask stage MST is measured with high accuracy by a laser interferometer 18R that irradiates a moving mirror 17R fixed to the mask stage MST with a laser beam for measurement, and this measured value is supplied to the stage control system 15 and the main control system 14. ing. Based on the measured value and the control information from the main control system 14, the stage control system 15 controls the position of the mask stage MST via the drive system 19R including the linear motor and the like.

On the other hand, the plate P is held on the upper surface of the substrate stage PST via a plate holder (not shown), and the substrate stage PST is movably placed on the base member (not shown) in the X and Y directions. The position of the substrate stage PST is measured with high accuracy by a laser interferometer 18W that irradiates a moving mirror 17W fixed to the moving mirror 17W with a measurement laser beam, and this measured value is supplied to the stage control system 15 and the main control system 14. ing. Based on the measured value and the control information from the main control system 14, the stage control system 15 controls the position of the substrate stage PST (wafer W) via the drive system 19W including the linear motor and the like.

At the time of exposure of the plate P, the operation (step movement) of moving each shot region of the plate P to the front of the exposure region of the projection optical system PL by the substrate stage PST and the light flux from the light source device 30 via the illumination optical system 13 While illuminating the mask M, the mask M and the plate P are moved in the X direction (scanning direction) in synchronization with the projection optical system PL, and an image of the mask M pattern is displayed on the entire surface of one shot area of the plate P. The operation of exposing (scanning exposure) is repeated in a step-and-scan manner. As a result, the image of the pattern of the mask M is transferred to each shot region of the plate P.

In order to perform alignment in advance during this exposure, for example, a spatial image measuring unit 22 for detecting the position of the alignment mark formed on the mask M is installed inside the substrate stage PST, and the projection optical system PL is provided. On the side surface, an alignment system 21 for detecting the position of the alignment mark attached to each shot region of the plate P is installed. The detection signals of the spatial image measurement unit 22 and the alignment system 21 are supplied to the alignment signal processing system 16, and the alignment signal processing system 16 processes, for example, those detection signals, and the alignment information of the mask M and each shot of the plate P. The sequence information of the region is obtained, and the obtained information is supplied to the main control system 14. The main control system 14 performs alignment of the mask M and position control of the plate P at the time of exposure based on the information. As a result, high overlay accuracy can be obtained during overlay exposure.

Next, the configuration of the light source device 30 of the present embodiment and the replacement operation of the discharge lamp 1 using the light source device 30 will be described in detail.
FIG. 2 shows the discharge lamp 1 of the light source device 30 in FIG. In FIG. 2, the discharge lamp 1 has a glass tube 25 composed of a bulb portion 25a, two substantially symmetrical and cylindrical rod-shaped portions 25b1, 25c fixed so as to sandwich the bulb portion 25a, and an end portion of one rod-shaped portion 25b1. A rod-shaped connecting portion 25b2 provided so as to cover the base portion 26 on the cathode side connected to the end portion of the connecting portion 25b2, and a covering portion 25d provided so as to cover the intermediate portion of the other rod-shaped portion 25c. It is provided with a base portion 28 on the anode side connected to the end portion of the portion 25c. The anode EL1 and the cathode EL2 for forming the light emitting portion are fixed to face each other in the bulb portion 25a, and the cathode EL2 and the anode EL1 are electrically connected to the base portions 26 and 28, respectively. The entire base portion 26 and most of the base portion 28 (parts other than the sphere 27 described later) are made of a metal having good electrical conductivity and thermal conductivity (for example, brass). The base portion 26, the glass tube 25, and the base portion 28 are arranged along one straight line connecting the central axes of the rod-shaped portions 25b1, 25c of the glass tube 25 and passing through the center of the light emitting portion. The direction parallel to the straight line connecting the central axes of the rod-shaped portions 25b1, 25c is the longitudinal direction L of the discharge lamp 1. The cover portion 25d and the connecting portion 25b2 do not necessarily have to be provided. In this case, the base portion 26 may be connected to the end portion of the rod-shaped portion 25b1.

The base portions 26 and 28 are basically used as power receiving terminals for supplying power to the cathode EL2 and the anode EL1 from the power supply unit 20 of FIG. 1 via the power cables 23 and 24. In addition, the base portion 26 is also used as a supported portion for supporting the glass tube 25 (discharge lamp 1) by the support member 33 (see FIG. 4B). Further, both the base portions 26 and 28 are formed with uneven portions (parts having a large surface area) for efficiently dissipating the heat conducted from the glass tube 25.

Further, the base portion 26 on the cathode side has a ring-shaped flange portion 26a (contact portion and longitudinal direction L) having an outer diameter about twice the outer diameter of the connecting portion 25b2 in this order from the connecting portion 25b2 to the open end side. Position defining part), a columnar shaft part 26b (fitting part or position defining part) having an outer diameter slightly larger than the outer diameter of the connecting part 25b2, and a columnar having an outer diameter smaller than the shaft part 26b. The small diameter portion 26f (stepped portion) and the cylindrical fixing portion 26h having an outer diameter slightly smaller than that of the shaft portion 26b or having substantially the same outer diameter as the shaft portion 26b are formed. A chamfered portion (not shown) may be formed at the boundary between the shaft portion 26b and the small diameter portion 26f. A chamfered portion 26i is formed on the open end side of the fixed portion 26h, and a rod-shaped guide portion 26j having a diameter smaller than that of the small diameter portion 26f is formed on the end portion of the fixed portion 26h. The outer shape of the columnar shaft portion 26b may be substantially the same as the outer shape of the rod-shaped portion 25b1. The small diameter portion 26f is formed by providing a recess (step portion) between the shaft portion 26b and the fixing portion 26h in a direction intersecting the longitudinal direction L of the discharge lamp 1.

When the discharge lamp 1 is placed on the support member 33 of FIG. 4B, the flange portion 26a abuts on the step portion surrounding the central opening of the support member 33, and the light emitting portion of the glass tube 25 is L in the longitudinal direction. It serves as a reference for positioning in the (first direction), and the shaft portion 26b fits into the opening and serves as a reference for positioning in a plane orthogonal to the longitudinal direction L of the light emitting portion.
Further, a pressed surface 26g is formed on the small diameter portion 26f of the fixing portion 26h. The pressed surface 26g is a plane perpendicular to the longitudinal direction L. The drive unit 34 of FIG. 4B is a lever 38 that urges the fixed portion 26h (pressed surface 26g) of the base portion 26 downward (−Z direction) when the discharge lamp 1 is supported by the support member 33. A pull coil spring 39 that rotates the lever 38 counterclockwise in the direction of urging the fixing portion 26h, and an air cylinder that rotates the lever 38 clockwise to release the fixing of the base portion 26 by the lever 38, for example. Alternatively, it has a drive unit 40 such as an electromagnetic cylinder. When the discharge lamp 1 is fixedly supported by the support member 33, the clockwise rotation of the lever 38 by the drive unit 40 may be released, and when the discharge lamp 1 is taken out from the support member 33, the drive unit 40 may be released. The lever member 38 may be rotated clockwise. As the drive unit 34, the mechanism described in the pamphlet of International Publication No. 2007/066947 can also be used.

Since the heat generated by the discharge lamp 1 flows through the base portion 26 to the support member 33 having a large surface area and a large heat capacity, it is possible to suppress an increase in the temperature of the discharge lamp 1. In addition, in order to enhance the cooling effect of the discharge lamp 1, the gas cooled from the blower (not shown) is inserted into the opening into which the fixing portion 26h of the base portion 26 of the support member 33 of FIG. 4B is inserted. May be blown.

In FIG. 2, as an example, a spiral groove portion (not shown) may be formed on the surface of the shaft portion 26b of the base portion 26 from the flange portion 26a to the small diameter portion 26f. By supplying, for example, a cooling gas from the outside to this groove, the cooling effect of the discharge lamp 1 can be enhanced.
Further, as an example, the flange portion 26a of the base portion 26 is formed with two openings AP1 and AP2 (positioning portions) (openings AP2 are not shown) at intervals of 90 °. Correspondingly, two pins (not shown) are provided on the surface on which the flange portion 26a of the support member 33 of FIG. 4B is placed. When the discharge lamp 1 is placed on the support member 33, the two pins are inserted into the opening AP1 or the like of the flange portion 26a, so that the discharge lamp 1 is positioned around the axis along the longitudinal direction L. It is said. The relative angle between the opening AP1 and the like and the base portion 28 on the anode side is set to an angle (predetermined angle) that makes it easy to connect the base portion 28 and the power cable 24.

The shape of the base portion 26 on the cathode side is arbitrary. As the base portion 26, for example, a member having only a flange portion 26a and a shaft portion 26b and having a recess into the shaft portion 26b into which the tip portion of the lever 38 of the drive unit 34 can be inserted is used. You can also. In FIG. 2, the base portion 28 on the anode side has a plurality of ring-shaped heat radiation fins 28j having an outer diameter larger than the diameter of the rod-shaped portion 25c in this order from the rod-shaped portion 25c side to the open end side of the glass tube 25 of the discharge lamp 1. A non-axisymmetric terminal portion having a substantially triangular columnar shape, formed by a heat radiating portion 28i having a spherical shape, a gripped portion 28e (held portion) having a spherical outer shape, and two V-shaped flat portions 28b and 28c. It is provided with 28a (connected portion) (see FIG. 3A).

FIG. 3 (B) shows the anode-side cap 28 when the discharge lamp 1 of FIG. 2 is unused, and FIG. 3 (C) shows the anode-side cap 28 in the state after the discharge lamp 1 is used. 28 is shown, and FIG. 3 (A) is a cross-sectional view taken along the line AA of FIG. 3 (B). In FIG. 3A, a flat surface portion 28d is formed so as to connect two symmetrically (V-shaped) inclined flat surface portions 28b and 28c of the terminal portion 28a, and a flat surface portion 28b and 28c are formed between the flat surface portions 28b and 28c. A chamfered portion 28a4 having a narrow width is formed parallel to the portion 28d.

In FIG. 3B, a plurality of upper end portions of the base portion 28 including the heat radiating portion 28i and the gripped portion 28e are connected to the connecting portion 25d of the end portion of the rod-shaped portion 25c of the glass tube 25 of the discharge lamp 1, for example. It is fixed by bolts (not shown). Further, a circular convex portion 28e2 is provided at the center of the circular concave portion 28e1 formed at the upper end portion of the gripped portion 28e. Further, a flange portion 29e of the accommodating portion 29 provided with a substantially cylindrical and annular band-shaped flange portion 29e at the lower end portion is placed in the concave portion 28e1 so as to surround the convex portion 28e2, and the upper portion 29a of the accommodating portion 29a is placed. A sphere 27 having a high sphericity and a coefficient of thermal expansion smaller than the coefficient of thermal expansion of the accommodating portion 29 is placed so as to cover the circular opening 29b provided in the center of the sphere. The size of the inside of the accommodating portion 29 is such that the sphere 27 can be displaced to some extent in the longitudinal direction of the discharge lamp 1 and in a plane orthogonal to the longitudinal direction. At the temperature (almost normal temperature) when the discharge lamp 1 is stored, the diameter of the opening 29b is smaller than the diameter of the sphere 27, and the bases 26 and 28 of the discharge lamp 1 are energized to cause the discharge lamp 1 to emit light for discharge. When the temperature of the lamp 1 has risen (for example, when the discharge lamp 1 has been used for several hours or more), the diameter of the opening 29b is larger than the diameter of the sphere 27 due to the thermal expansion of the housing portion 29. Is stipulated. As a result, when the discharge lamp 1 is used continuously for, for example, several hours or more, the sphere 27 passes through the opening 29b and is accommodated in the accommodating portion 29 as shown in FIG. 3C. As an example, the sphere 27 is, for example, a ball made of ceramics having an extremely small coefficient of thermal expansion, and the accommodating portion 29 is made of a metal such as stainless steel or an aluminum alloy. The sphere 27 may be formed from an alloy having a low expansion coefficient such as Invar.

Further, in FIG. 3B, a terminal portion 28a having a substantially triangular columnar outer shape and a circular flange portion 28a3 at the lower end is mounted so as to cover the accommodating portion 29 and the sphere 27 above the accommodating portion 29. It is placed. The inner surface of the terminal portion 28a has a tubular shape in which the outer shape of the accommodating portion 29 is slightly enlarged, and the gap between the upper end of the inner surface of the terminal portion 28a and the sphere 27 is such that the sphere 27 is from the opening 29b of the accommodating portion 29. It is set small so that it will not come off. The flange portion 29e of the accommodating portion 29 and the flange portion 28a3 of the terminal portion 28a overlap each other. As an example, the flange portions 29e and 28a2 are fixed to the recesses 28e1 of the gripped portion 28e by bolts BA1 at a plurality of locations to be gripped. The accommodating portion 29 and the terminal portion 28a are fixed to the portion 28e. For convenience of explanation, the flange portions 29e and 28a2 are not shown in FIG. 3C.

Further, two circular circles having a diameter smaller than that of the sphere 27 so as to be parallel to the flat surface portion 28d of the terminal portion 28a and to face the side surface of the accommodating portion 29 along a straight line passing through the central axis of the accommodating portion 29. The openings 29c and 29d are formed, and circular openings 28a1, 28a2 having substantially the same diameter as the openings 29c and 29d are formed in the region of the terminal portion 28a including the flat surface portion 28d and the chamfered portion 28a4 so as to face the openings 29c and 29d, respectively. It is formed. The height of the openings 29c and 29d is such that when the sphere 27 passes through the opening 29b and falls inside the accommodating portion 29 (the upper surface of the gripped portion 28e), the center of the openings 29c and 29d is approximately the center of the sphere 27. It is set to match, and the gap between the inner surface of the accommodating portion 29 and the sphere 27 is set so that the sphere 27 can move by, for example, about 5% to 30% (for example, about 10%) of the diameter of the sphere 27. There is.

Further, as shown in FIG. 4B, the openings 28a1, 28a2 of the terminal portion 28a of the discharge lamp 1 (and thus the opening of the accommodating portion 29) are above the turntable 79 on which the discharge lamp 1 of the storage unit 54 is placed. The irradiation unit 94Aa that irradiates the light beam LB1 at the center of 29c, 29d) and the light beam LB1 that has passed through the openings 28a1, 28a2, 29c, 29d without the sphere 27 falling into the housing unit 29. A first detection device 94A having a light receiving unit 94Ab for detection is arranged, and a detection signal of the light receiving unit 94Ab is supplied to the light source control system 32. Since the light beam LB1 cannot be detected by the light receiving unit 94Ab when the sphere 27 is dropped in the accommodating unit 29, whether or not the sphere 27 is present in the accommodating unit 29, that is, the discharge is performed by using the first detection device 94A. It is possible to detect whether the lamp 1 is used or unused. That is, it is possible to detect whether the discharge lamp 1 is used or unused by changing the state of the sphere 27 with respect to the accommodating portion 29. Further, it can be said that the accommodating portion 29 and the sphere 27 are devices to be detected for detecting whether the discharge lamp 1 is used or unused. Further, the sphere 27 can be said to be a movable portion because it moves in the accommodating portion 29.

Further, below the turntable 79 of the storage unit 54, the irradiation unit 94Ba that irradiates the light beam LB2 at a position near the center of the fixed portion 26h of the base portion 26 of the discharge lamp 1 and the discharge lamp 1 are not provided. A second detection device 94B having a light receiving unit 94Bb for detecting the light beam LB2 that has passed the position is installed, and the detection signal of the light receiving unit 94Bb is supplied to the light source control system 32. Since the light beam LB2 cannot be detected by the light receiving unit 94Bb when the fixed portion 26h is in the optical path of the light beam LB2, whether or not the discharge lamp 1 is located at a predetermined position on the turntable 79 using the second detection device 94B. Can be detected.

Further, the base portion 28 of the present embodiment is provided at the end of the rod-shaped portion 25c of the glass tube 25 by bolts (not shown) in a plurality of openings (not shown) provided in the recesses 28e1 of the gripped portion 28e. It is connected to a metal connecting portion 25d that is electrically connected to the anode EL1. Therefore, the base portion 28 can be removed after the discharge lamp 1 is used, and the removed base portion 28 can be reused when manufacturing a new discharge lamp 1. The base portion 28 may be integrated with the glass tube 25 by adhesion, welding, or the like.

FIG. 5 shows a state in which the power cable 24 is connected to the base portion 28 on the anode side. In FIG. 5, a metal (conductive) member (hereinafter, conductive) in which a V-shaped groove 66a having the same angle as the flat surfaces 28b and 28c of the terminal 28a of the base 28 is formed at the end of the power cable 24. , A power supply block) 66 is connected. Further, the power supply block 66 is fixed to the lower end of the L-shaped reference lever 67, and the L-shaped drive lever 69 is rotatably connected to the reference lever 67 via the connecting pin P51, and the drive lever 69 is connected. The roller 70 is rotatably fixed to the lower end of the roller 70 via the connecting pin P52. The roller 70 is pressed against the flat surface portions 28d opposite to the flat surface portions 28b and 28c of the terminal portion 28a of the base portion 28. The flat surface portion 28d may be formed with a recess (not shown) having a size capable of accommodating the roller 70.

Further, in order to reduce the stress acting on the discharge lamp 1 as much as possible (to increase the flexibility of the reference lever 67 and the drive lever 69) when the power supply block 66 is connected to the terminal portion 28a as described later. The reference lever 67 and the drive lever 69 are formed as thin as possible in order to reduce the amount of light blocked by the elliptical mirror 2. Further, in FIG. 5, the reference lever 67 is formed by connecting both ends of two L-shaped members (the other end is not shown), but the reference lever 67 is one L-shaped member. It may be formed from a member.

The clamp mechanism 52 includes a power supply block 66, a reference lever 67, and a drive lever 69. The other ends of the reference lever 67 and the drive lever 69 are elongated as shown in FIG. 4 (B). With the groove 66a of the power supply block 66 pressed against the flat surfaces 28b and 28c of the terminal 28a of the base 28, the roller 70 at the tip of the drive lever 69 is pushed against the flat surface 28d of the terminal 28a. By rotating the drive lever 69 counterclockwise around the connecting pin P51 (fulcrum), the terminal portion 28a is stably sandwiched between the roller 70 and the power supply block 66 with a strong force according to the principle of leverage. Can be done. In this state, the electric power (current) of the electric power cable 24 is supplied to the base portion 28 via the power supply block 66 with a small electric resistance, so that the electric power loss is small. Further, when the power cable 24 (power supply block 66) is removed from the base portion 28 (terminal portion 28a), the drive lever 69 may be rotated clockwise.

The terminal portion 28a of the base portion 28 can reduce the electrical resistance (contact resistance) between the terminal portion 28a and the feeding block 66 by the V-shaped flat surface portions 28b and 28c. The tip of the drive lever 69 may not be provided with the roller 70, and the tip of the roller 70 may be formed into an arc shape and the arcuate portion may be pressed against the flat surface portion 28d.
Further, the shape of the terminal portion 28a of the base portion 28 on the anode side is not limited to the shape shown in FIG. 2B, and the cross-sectional shape may be a quadrangle or a polygon.

In FIGS. 4A and 4B referred to below, the shapes of the base portions 26 and 28 of the discharge lamp 1 are simplified for convenience of explanation.
Next, FIG. 4 (A) is a plan view showing the inside of the lamp house 31 and the casing 51 of the light source device 30 of FIG. 1, and FIG. 4 (B) is a side view showing the light source device 30 of FIG. 4 (A). .. In addition, in FIGS. 4 (A) and 4 (B), and FIGS. 6 (A) and 6 (B) referred to below, the lamp house 31, the casing 51, the support member 33 for supporting the discharge lamp 1 and the like, and the drawer portion. 36 mag is represented by a cross section.

In FIGS. 4A and 4B, the lamp house 31 is divided into a lower housing 31A in which the discharge lamp 1 is housed and an upper housing 31B in which the mirror 3 is housed and the window member 4 is installed on the side surface. .. An opening 31Ab for passing light from the discharge lamp 1 is provided on the adjacent surfaces of the housings 31A and 31B, and the discharge lamp 1 and the like are passed through the side surface of the lower housing 31A in the + X direction when the discharge lamp 1 is replaced. An opening 31Aa for the purpose is provided. The casing 51 of the switching device 50 is installed on the side surface of the lower housing 31A in the + X direction, and the opening 51a for passing the discharge lamp 1 and the like is provided on the side surface of the casing 51 facing the opening 31Aa.

A window portion 51b for carrying in and out of the discharge lamp 1 is provided on the side surface of the casing 51 in the + X direction, and the window portion 51b is opened and closed by a door (hereinafter referred to as a lamp replacement door) 45. The casing 51 of the switching device 50 and the lower housing 31A are connected by a connecting member (not shown) or the like so that the positional relationship does not shift. A storage unit 54 for the discharge lamp 1 is installed in the vicinity of the window portion 51b at the end in the + X direction in the casing 51, and the lamp transport system 56 is arranged in the upper part of the casing 51. Further, although not shown, the casing 51 is provided with an outside air intake port and a filter for removing dust and the like from the taken-in outside air.

Further, a pair of guide portions 41 are provided parallel to the X direction so as to face the two side surfaces of the lower housing 31A in the Y direction, and the drawer portions 36 are arranged so as to be movable in the X direction along the guide portions 41. The discharge lamp 1 is supported at the center of the drawer portion 36 via a support member 33. As the guide member 41, for example, a telescopic (multi-stage) guide mechanism may be used. Further, an elliptical mirror 2 provided with a circular opening 2a (see FIG. 4A) is installed in the drawer portion 36 so as to surround the discharge lamp 1, and the discharge lamp 1 is placed above the lower housing 31A. A light-shielding member 42 shaped like the side surface of a truncated cone is arranged so as to cover the clamp mechanism 52 connected to the base portion 28. An opening (not shown) for passing the discharge lamp 1 and the clamp mechanism 52 when the discharge lamp 1 is replaced is provided on the side surface of the light-shielding member 42 in the + X direction.

Further, the switching device 50 includes the drive unit 34 for the base portion 26 on the cathode side, the clamp mechanism 52 for the base portion 28 on the anode side, the storage unit 54, and the lamp transport system 56, as well as the inside of the lower housing 31A. It has a pull-out drive unit 60 that pulls out the pull-out portion 36 toward the casing 51 through the openings 31Aa and 51a, and a drive unit 72 that clamps and releases the base portion 28 by the clamp mechanism 52. As shown in FIG. 4A, the pull-out drive unit 60 passes through the center of the lower housing 31A on the floor surface in the casing 51 and is along the X direction with respect to the straight line parallel to the X axis in the −Y direction. The guide member 61 arranged in the direction of the guide member 61, the base table 62 arranged so as to be movable in the X direction along the guide member 61, and the base table 62 driven in the X direction along the guide member 61, for example, a ball screw method, a belt. It has a drive unit 63 such as a drive system or a linear motor system, and a connecting member 43. The connecting member 43 is provided at the end portion of the base table 62 on the −X direction side, the tip portion 62a protruding in the + Y direction and the Z direction, and the end portion of the drawer portion 36 in the + X direction at the center portion in the Y direction. It connects with the convex connected portion 36c.

By moving the base table 62 in the + X direction along the guide member 61 in the drive unit 63 of the drawer drive unit 60, the drawer portion 36 in the lower housing 31A is supported by the discharge lamp 1. It can be moved (pulled out) to a position where it enters the casing 51. Since the drawer portion 36 is supported by the guide member 41 and the drawer portion 36 can smoothly move in the X direction along the guide member 41, the load of the drawer portion 36 almost acts on the base table 62. Not done. Therefore, as the drawer drive unit 60, a mechanism that simply moves the drawer portion 36 in the X direction by, for example, an air cylinder may be used instead of the mechanism that uses the guide member 61.

Further, the drive unit 72 that drives the clamp mechanism 52 of the base 28 of the discharge lamp 1 is fixed to the upper surface of the base table 62 and is slightly inclined clockwise (for example, about 15 degrees) with respect to the X axis (for example, about 15 degrees). Hereinafter, the guide member 73 is arranged along the retracting direction D of the clamp mechanism 52 (see FIG. 4A), and the guide member 73 can be moved in the retracting direction D via two sliders 74. A flat plate-shaped movable table 75 mounted, a drive unit 77 such as an air cylinder or an electromagnetic cylinder that drives the movable table 75 in the retracting direction D with respect to the base table 62, and a Z fixed to the upper surface of the movable table 75. It has a support member 65 elongated in the direction. Further, a relay member 64 elongated in the Z direction is fixed to the end of the upper surface of the movable table 75 in the −X direction, the other end of the power cable 24 is connected to the upper portion of the relay member 64, and the center of the relay member 64 in the Z direction. The other end of the power cable 23 connected to the support member 33 is connected to the portion through an opening provided in the drawer portion 36. The power cables 23 and 24 are connected to the power supply unit 20 of FIG. 1 via an extension cable (not shown) having further flexibility.

FIG. 7A shows a detailed configuration of the clamp mechanism 52 and the drive unit 72. In FIG. 7A, the end of the reference lever 67 of the clamp mechanism 52 in the + X direction is in a movable direction parallel to the retracting direction D in FIG. 4A via a short linear guide 71H at the upper end of the support member 65. It is supported so that it can be finely moved in D1 (uniaxial direction). Further, the drive unit 72 has a tension coil spring 68 whose one end is fixed to the bottom near the end of the reference lever 67 in the + X direction and attracts the end of the drive lever 69 in the + X direction upward, and a movable table 75. It has a drive unit 76 such as an air cylinder or an electromagnetic cylinder whose one end is fixed to the upper surface and which can displace the end portion of the drive lever 69 in the + X direction downward (−Z direction). One end of the drive unit 76 is connected to the movable table 75 via a rotatable joint 76a. The tip of the mover of the drive unit 76 and the end of the drive lever 69 are connected via a rotatable joint 76b. As an example, a so-called clevis joint can be used as the joint 76a, and a so-called knuckle joint can be used as the joint 76b.

In the state of FIG. 7A, since the drive unit 76 does not apply a force to the end of the drive lever 69, the tension coil spring 68 exerts a counterclockwise force on the drive lever 69 with respect to the reference lever 67. It works. As a result, the roller 70 provided at the end of the drive lever 69 in the −X direction urges the terminal portion 28a of the base portion 28 toward the power supply block 66, so that the terminal portion 28a is formed by the power supply block 66 and the roller 70. It is held stable. At this time, even if the distance between the movable table 75 and the discharge lamp 1 deviates from the target value, the deviation amount is offset by the movement of the reference lever 67 in the movable direction D1 via the linear guide 71H.

Next, when the clamp of the terminal portion 28a by the clamp mechanism 52 is released, as shown in FIG. 7B, the end portion of the drive lever 69 is attracted downward by the drive portion 76, and the roller 70 is brought into the terminal portion. Move to a position higher than 28a. At this time, the position of the end portion of the drive lever 69 approaches the discharge lamp 1, but the drive portion 76 is slightly rotated by the joint 76a accordingly, so that stress that deforms the drive lever 69 does not act. .. In this state, the clamp mechanism 52 and the power cable 24 can be separated from the base 28 by moving the movable table 75 along the retracting direction D in the direction indicated by the arrow A2 by the drive unit 77 of FIG. 4 (B). it can.

Further, the lamp transport system 56 includes three claw portions 86 that grip the gripped portion 28e of the base portion 28 on the anode side of the discharge lamp 1 from above, a gripping claw opening / closing mechanism 85 that opens and closes these claw portions 86, and a grip claw opening / closing mechanism 85. The Z-axis drive mechanism 84 that grips the discharge lamp 1 and moves up and down (Z direction), the swivel shaft 83 that swivels the Z-axis drive mechanism 84 around an axis parallel to the Z-axis, and the swivel shaft 83 are casing 51. A support portion 82 that supports the ceiling portion of the lamp lamp is provided.

9 (A) is a plan view showing a state in which the gripped portion 28e of the base portion 28 is gripped by the three claw portions 86, and FIG. 9 (B) is a side view of FIG. 9 (A). When the discharge lamp 1 is gripped by the lamp transport system 56, as shown in FIG. 9A, the concave surfaces provided at the tips of the three claw portions 86 face each other with the spherical surface of the gripped portion 28e. , Positions the gripping claw opening / closing mechanism 85. In this state, as shown in FIG. 9B, the gripping claw opening / closing mechanism 85 moves (closes) the three claw portions 86 toward the center, and the concave surface of the three claw portions 86 is the gripped portion 28e. The three claws 86 are closed until they come into contact with the spherical surface. Since each of the three claw portions 86 is connected to the gripping claw opening / closing mechanism 85 via a spring mechanism (not shown) that can be displaced in the radial direction, stress that deforms the base portion 28 may act. Absent. Further, in order to hold the base portion 28 more stably, a convex portion (pin) may be provided on the inner surface of the claw portion 86, and a concave portion in which the convex portion fits may be provided in the corresponding portion of the gripped portion 28e.

In FIGS. 4A and 4B, a plurality of storage units 54 on which a used discharge lamp 1 and an unused discharge lamp 1 (hereinafter, also referred to as a discharge lamp 1N) are placed (FIG. 4 (A)). 6) openings 79a (see FIG. 11) are provided concentrically with a rotatable turntable 79 and a drive unit 80 for rotating the turntable 79. The number of openings 79a is the number of discharge lamps 1, 1N that can be stored in the turntable 79, and the number of discharge lamps 1, 1N that can be stored is arbitrary. As an example, the turntable 79 is made of an insulating material having high heat resistance such as synthetic resin. The tip of the base portion 26 on the cathode side of the discharge lamp 1 or 1N is inserted into these openings 79a, and the discharge lamp 1 or 1N is placed by its own weight via the flange portion 26a of the base portion 26 (see FIG. 1 (A)). It is placed on the turntable 79.

As shown in FIG. 12, a positioning member 87 having a recess in the center and a semicircular cross section is provided on the side surface of the turntable 79 corresponding to the plurality of openings 79a, and is provided in the side surface direction of the turntable 79. A convex portion that can be engaged is provided in the concave portion of the positioning member 87, and a leaf spring portion 88 that is deformable in the radial direction of the turntable 79 is arranged. The position of the opening 79a is discharged by rotating the turntable 79 around the rotation shaft 79b and stopping the rotation of the turntable 79 when the positioning member 87 engages with the leaf spring portion 88 (elastic member). The lamp 1 or 1N can be reliably positioned at the position where it is delivered to and from the lamp transport system 56.

Further, as shown in FIG. 11, a rotating portion 96 for rotating the discharge lamp 1N is arranged at a delivery position of the discharge lamps 1, 1N below the turntable 79, if necessary. As an example, the rotating portion 96 includes a cylindrical rotating portion 95 rotatably connected to a support portion (not shown) connected to the floor surface, and a base portion 26 of the discharge lamp 1N inserted into the rotating portion 95. Clamp portions 96A, 96B, 96C (clamp portions) driven in the radial direction with respect to the rotating portion 95 by three drive units 97A, 97B, 97C (drive unit 97C is not shown) in order to fix the shaft portion 26b of the above. The 96C is provided with a gear 98a for rotating the rotating portion 95 and a driving unit 98 for driving the gear 98a (not shown). The rotating unit 95 is provided with an encoder (not shown) for detecting the rotation angle, the detection result of this encoder is supplied to the light source control system 32, and the light source control system 32 uses the detection result and the like to drive the drive units 98 and 97A. The drive amount of ~ 97C is controlled. Further, an elevating part (not shown) for retracting the rotating portion 96 as a whole below the base portion 26 is arranged, and normally, the rotating portion 96 is retracted below the base portion 26. The second detection device 94B is arranged below the rotating portion 96 in the state of FIG. 11, and the first detecting device 94A is arranged above the surface of the turntable 79 opposite to the surface where the rotating portion 96 is located. ..

Hereinafter, in the light source device 30 of the present embodiment, an example of an operation when the discharge lamp 1 is replaced by using the switching device 50 will be described. This exchange operation is controlled by the light source control system 32. First, when performing an energization test (light emission test) of the discharge lamp 1N before mounting the unused discharge lamp 1N on the exposure device EX, the base portion 28 is provided so that the sphere 27 does not fall into the accommodating portion 29. The caps 28 and 26 are energized with the head down. Then, after the energization is completed, the base portion 28 is kept downward until the temperature of the base portion 28 returns to around room temperature. This makes it possible to prevent the substantially unused discharge lamp 1N from being determined to be used.

First, as shown in FIG. 4A, an operator (not shown) opens the lamp replacement door 45 of the casing 51 of the switching device 50, and stores the base portion 26 of the unused discharge lamp 1N in the storage section 54. It is inserted into the opening 79a of the turntable 79 and attached to the turntable 79 via the flange portion 26a of the base portion 26 of the discharge lamp 1N (replenishment of the discharge lamp). The turntable 79 can be manually rotated when the power is off, and as described with reference to FIG. 12, the turntable 79 is such that a predetermined positioning member 87 engages with the leaf spring portion 88. By rotating, the rotation angle of the turntable 79 can be set manually and accurately.

It is desirable to replenish the discharge lamp in a state where the power supply from the power supply unit 20 in FIG. 1 is stopped and the discharge lamp 1 in the lower housing 31A in FIG. 4B is turned off. However, by taking measures to prevent the light of the discharge lamp 1 in the lower housing 31A from leaking to the outside and forming the turntable 79 from the insulating material, the turntable 79 and the turntable 79 are connected while the discharge lamp 1 is lit. The lamps may be exchanged between them. As an example, in FIG. 4A, six discharge lamps 1, 1N can be set (replenished) in the turntable 79, but a space is made in the turntable 79 in order to collect the used lamps. Since FIGS. 4A and 4B show a case where the discharge lamp 1 is contained in the lamp house 31, five discharge lamps 1N are set in the turntable 79. After this, the lamp replacement door 45 is closed.

After that, when the cumulative usage time of the discharge lamp 1 reaches the permissible time, the light source control system 32 transmits information to that effect to the main control system 14, and the main control system 14 stops the exposure operation of the exposure apparatus EX. .. Then, the light source control system 32 stops the supply of power to the discharge lamp 1 from the power supply unit 20, turns off the discharge lamp 1, and then operates the switching device 50 to store the discharge lamp 1 in the storage unit 54. Replace with the existing discharge lamp 1N.

That is, first, in FIG. 4B, the drawer portion 36 that integrally supports the discharge lamp 1 and the elliptical mirror 2 in the lamp house 31 is positioned at a predetermined position in the + X direction by the drawer drive unit 60 as shown by the arrow A1. Pull out to. As a result, the drawer portion 36 is pulled out to the position shown in FIG. 6 (B). At this time, the clamp mechanism 52, the relay member 64, and the drive unit 72 are integrally pulled out to the inside of the casing 51 in the + X direction together with the pull-out portion 36. Note that FIG. 6A is a plan view showing a part of the drawer portion 36 and the switching device 50 shown in FIG. 6B as a cross section. Further, in FIGS. 8 and 10B referred to below, some of the plurality of discharge lamps 1N are omitted in order to avoid complication of the drawings.

Next, as described with reference to FIG. 7B, the drive unit 76 of the drive unit 72 pulls the drive lever 69 of the clamp mechanism 52 downward to pull the terminal portion 28a of the base portion 28 of the discharge lamp 1 downward. The roller 70 pressed against the power supply block 66 with a strong force is rotated around the connecting pin P51 (fulcrum), and the roller 70 is separated from the terminal portion 28a so as to be higher than the terminal portion 28a. After that, the drive unit 77 (see FIG. 4B) retracts the movable table 75 supporting the clamp mechanism 52 and the drive unit 76 in the direction indicated by the arrow A2 along the retract direction D. At this time, the roller 70 passes above the base portion 28.

After that, as shown in FIG. 8, the lever 38 is rotated clockwise by the drive unit 40 of the drive unit 34 to release the clamp of the fixed portion 26h of the base portion 26 on the cathode side. As a result, the base portion 26 can be pulled out from the support member 33. In order to avoid complication of the drawings, the drive unit 34 for the base portion 26 is not shown in FIG. 10B and the like referred to below.

Next, the swivel shaft 83 of the lamp transport system 56 is swiveled to move the gripping claw opening / closing mechanism 85 above the mouthpiece 28 of the discharge lamp 1. Then, as shown by an arrow A3, the gripping claw opening / closing mechanism 85 is lowered by the Z-axis drive mechanism 84 of the lamp transport system 56, and the gripping claw opening / closing mechanism 85 closes the three claws 86 on the bottom surface thereof to form a base portion. The gripped portion 28e of 28 is gripped (see FIG. 9B). After that, as shown by the arrow A5 in FIG. 10B, the claw portion 86 holding the discharge lamp 1 is raised by the Z-axis drive mechanism 84. At this time, the discharge lamp 1 is raised to a position where the lower end of the base portion 26 on the cathode side of the discharge lamp 1 is higher than the upper surface of the drawer portion 36 (that is, a position higher than the upper surface of the elliptical mirror 2).

After that, as shown by an arrow A6 in FIG. 10A, the gripping claw opening / closing mechanism 85 that grips the discharge lamp 1 is swiveled by about 180 degrees by the swivel shaft 83, and the discharge lamp 1 is moved above the turntable 79. Let me. At this time, the turntable 79 is rotated by the drive unit 80 of the storage unit 54, and the open opening 79a of the turntable 79 is moved below the gripping claw opening / closing mechanism 85 (discharge lamp 1). In this state, the gripping claw opening / closing mechanism 85 is lowered, the tip of the mouthpiece 26 of the discharge lamp 1 is accommodated in the opening 79a, and then the claw 86 is opened, so that the used claw portion 86 is opened, as shown in FIG. The discharge lamp 1 is placed at position A7 of the turntable 79. At this stage, the rotating portion 96 is retracted below the base portion 26 by an elevating portion (not shown).

The subsequent replacement operation of the discharge lamp will be described with reference to the flowchart of FIG. First, in FIG. 11, the gripping claw opening / closing mechanism 85 of the lamp transport system 56 is raised. Then, in step 202 of FIG. 13, it is confirmed whether or not there is a base portion 26 on the cathode side of the discharge lamp 1 (whether or not the discharge lamp 1 is at the position A7) by using the second detection device 94B. At this stage, since there is a base portion 26, the operation shifts to step 204, and whether or not the light beam LB1 passes through the openings 28a1, 28a2 of the base portion 28 on the anode side using the first detection device 94A ( Whether or not the discharge lamp 1 has been used and the sphere 27 of the base portion 28 has fallen into the accommodating portion 29) is confirmed.

If the light beam LB1 cannot be detected, as an example, the rotating unit 96 is raised, and the discharge lamp 1 is rotated within a range of about ± 60 degrees while the light receiving unit 94Ab continues to detect the light beam LB1. Let me. The rotation angle of the discharge lamp 1 is set in advance by the operator with an accuracy of about ± 30 degrees with respect to the target angle. Then, when the light beam LB1 can be detected at a certain rotation angle, the angle of the discharge lamp 1 is set to the rotation angle at which the amount of light detected by the light receiving unit 94Ab is maximized. After that, the rotating portion 96 is retracted downward. The angle of the discharge lamps 1, 1N placed on the turntable 79 by the lamp transport system 56 and the operator is the target angle (in the case of an unused discharge lamp 1N, the light beam detected by the light receiving unit 94Ab). When the angle at which the amount of light of the LB1 is substantially maximized) is set, the operation of correcting the rotation angles of the discharge lamps 1, 1N can be omitted.

At this stage, since the discharge lamp 1 has been used and the light beam LB1 is shielded by the sphere 27, the light source control system 32 can confirm that the discharge lamp 1 has been used. After that, it is confirmed whether or not the turntable 79 is rotated 360 degrees (step 212), and if the turntable 79 is not rotated 360 degrees, in step 214, the turntable 79 is rotated by, for example, 60 degrees and step 202. Move to. Here, for convenience of explanation, it is assumed that the discharge lamp 1N at the position A9 has moved on the optical path of the light beams LB1 and LB2 of the detection devices 94A and 94B.

Then, it is confirmed that the base portion 26 of the discharge lamp 1N is present (step 202), and it is confirmed whether or not the light beam LB1 passes through the openings 28a1, 28a2 of the base portion 28 (step 204). If the light beam LB1 cannot be detected at this time, the discharge lamp 1N may be rotated by raising the rotating portion 96 so that the amount of light of the detected light beam LB1 is maximized. Here, since the discharge lamp 1N is unused and the sphere 27 does not block the light beam LB1, the light source control system 32 can confirm that the discharge lamp 1N is unused. After that, the operation shifts to step 206, and the discharge lamp 1N is conveyed to the support member 33. Further, in step 202, if there is no base portion 26 on the cathode side, the operation shifts to step 212. If the unused discharge lamp 1N cannot be confirmed even after rotating the turntable 79 360 degrees in step 212, the process proceeds to step 216 and the operator is requested to replenish the discharge lamp 1N.

Then, in step 206, the gripping claw opening / closing mechanism 85 is lowered again to grip the gripped portion 28e of the base portion 28 of the unused discharge lamp 1N by the claw portion 86, and then the gripping claw opening / closing mechanism 85 is raised. .. Then, due to the movement opposite to that when the discharge lamp 1 is carried out, the gripping claw opening / closing mechanism 85 is swiveled by the swivel shaft 83 by about 180 degrees as shown by the dotted arrow B1 in FIG. As shown by the dotted arrow B2, the gripping claw opening / closing mechanism 85 that grips the discharge lamp 1N is lowered, and the base portion 26 on the cathode side of the discharge lamp 1N is placed on the support member 33. After that, as shown by the dotted arrow B3 in FIG. 8, the gripping claw opening / closing mechanism 85 is raised, and as shown in FIG. 6B, the base portion 26 on the cathode side is clamped to the support member 33 by the drive unit 34. ..

Further, as shown in FIG. 7B, the drive unit 77 of FIG. 8 causes the movable table 75 supporting the clamp mechanism 52 to move along the retracting direction D in the direction indicated by the arrow B4 (direction approaching the discharge lamp 1N). The power supply block 66 is moved so as to come into contact with the terminal portion 28a of the base portion 28 of the discharge lamp 1N. After that, the drive unit 76 pushes out the movable portion (in the case of an e-cylinder, the suction force is gradually weakened), and the drive lever 69 rotates about the connecting pin P51 by the force of the tension coil spring 68. The roller 70 comes into contact with the terminal portion 28a and strongly presses the terminal portion 28a against the power supply block 66. As a result, power can be supplied to the base portion 28 on the anode side without power loss.

At this time, since the base portion 26 on the cathode side of the discharge lamp 1N is fixed to the support member 33 by the drive unit 34 (see FIG. 6B), the position of the power supply block 66 in the retracting direction D is temporarily fixed. If the position of the power supply block 66 with respect to the base portion 28 on the anode side is displaced in this state, a large force may be applied to the discharge lamp 1N to damage the discharge lamp 1N. In order to prevent this, in the present embodiment, as shown in FIG. 7A, the reference lever 67 to which the power supply block 66 is attached can be moved in the direction D1 (radial direction with respect to the discharge lamp 1N) by the linear guide 71H. Therefore, the positioning error of the power supply block 66 can be corrected (absorbed). As the error absorption mechanism, for example, the movable table 75 may be able to move freely in the direction D1.

Further, the clamp mechanism 52 for the base portion 28 has low rigidity in the rotation direction and the turning direction (rotation direction around the axis parallel to the Z axis) of the drive lever 69, and the reference lever 67 and / or the drive lever 69 By bending, it is possible to absorb the positioning error in the rotation direction and the turning direction. Further, since the groove portion 66a (see FIG. 5), which is the contact surface of the power supply block 66 with the base portion 28, has a constant V shape regardless of the position in the Z direction, the base portion 28 and the power supply block 66 It does not matter if the position in the Z direction deviates from the above.

As shown in FIG. 6 (B), when the clamping of the power supply block 66 by the clamping mechanism 52 with respect to the base portion 28 of the discharge lamp 1N is completed, the drawer drive unit 60 indicates by the dotted arrow B5 in FIG. 4 (B). By moving the base table 62 in the −X direction, the drawer portion 36 is returned to its original position in the lower housing 31A. As a result, the used discharge lamp 1 is replaced with the unused discharge lamp 1N. After that, the discharge lamp 1N is turned on in the exposure apparatus EX to perform the exposure (step 210).

As described above, according to the discharge lamp replacement method of the present embodiment, the sphere 27 (movable body) is arranged in the terminal portion 28a of the base portion 28 of the discharge lamp 1, and the base portion 28 is used while the discharge lamp 1 is in use. When the temperature rises, the sphere 27 passes through the opening 29b of the housing portion 29 in the terminal portion 28a and falls into the housing portion 29. Then, when the discharge lamp 1 is placed on the turntable 79 of the storage unit 54, the discharge lamp 1 utilizes the fact that the light beam LB1 of the first detection device 94A is shielded by the sphere 27 in the terminal portion 28a. Can be easily confirmed as used. Therefore, when the discharge lamp 1 and the unused discharge lamp 1N are replaced fully automatically, it is possible to prevent the used discharge lamp 1 from being mistakenly attached to the support member 33 of the light source device 30 again.

Further, the exposure device EX of the present embodiment includes a light source device 30 for causing the discharge lamp 1 (exposure light source) to emit light. Then, the discharge lamp 1 sandwiches a glass tube 25 (glass member) provided inside with an anode EL1 (first electrode) and a cathode EL2 (second electrode) for forming a light emitting portion, and the glass tube 25. The base portion 28 (first base member) and the base portion 26 (second base member) are provided as described above, and the base portion 28 is provided with a through hole (opening) composed of openings 28a1, 28a2, 29c, 29d. Has been done.

Further, in the light source device 30, the light beam LB1 is incident on the through hole of the storage unit 54 for storing the discharge lamp 1, the lamp transport system 56 (conveyor unit) for transporting the discharge lamp 1, and the base portion 28 of the discharge lamp 1. The angle of the discharge lamp 1 as the state of the discharge lamp 1 is determined by using the irradiation unit 94Aa (light transmission unit), the light receiving unit 94Ab that detects the light beam LB1 that has passed through the through hole, and the detection result of the light receiving unit 94Ab. It includes a desired light source control system 32 (control unit).

According to this embodiment, the angle of the discharge lamp 1 can be detected by obtaining the angle of the discharge lamp 1 when the amount of light of the detected light beam LB1 is maximized while rotating the discharge lamp 1, for example. Since the angle of the discharge lamp 1 can be set to a target angle by using the angle, for example, when the discharge lamp 1 is non-rotationally symmetric, the lamp transport system 56 can easily grip the discharge lamp 1. Therefore, the discharge lamp 1 can be replaced efficiently.

Further, the exposure device EX of the present embodiment includes the above-mentioned light source device 30, an illumination optical system 13 (illumination system) that illuminates the mask M with light (exposure light IL) generated from the discharge lamp 1 of the light source device 30. It includes a projection optical system PL that projects an image of the pattern of the mask M onto the plate P (substrate) under the exposure light IL. According to the exposure apparatus EX, the replacement time of the discharge lamp 1 can be shortened, so that the throughput of the exposure process can be improved.

In the above-described embodiment, the following modifications are possible.
First, in the above-described embodiment, the sphere 27 is arranged in the terminal portion 28a of the base portion 28 of the discharge lamp 1, but the sphere 27 can be omitted. In this case, the sphere 27 and the accommodating portion 29 may be omitted, the terminal portion 28a may be formed in a substantially prismatic shape, and a through hole may be formed so as to pass through the same position as the openings 28a1, 28a2. The rotation angle of the discharge lamp 1 can be detected by irradiating the through hole with the light beam LB1 from the first detection device 94A and detecting the amount of light of the light beam LB1 with the light receiving unit 94Ab while rotating the discharge lamp 1. ..

Further, in the above-described embodiment, power is supplied to the power supply block 66 by using the power cable 24, but as a method of supplying power to the power supply block 66 (discharge lamp 1), the power cable 24 is not used. , The reference lever 67 and the power supply block 66 may be used (conducting). Further, not only electric power but also compressed air for cooling the base 28 may be supplied to the power supply block 66 to the discharge lamp 1.

Further, the clamp mechanism drive unit 72 of FIG. 7A is configured to open and close the reference lever 67 and the drive lever 69 of the clamp mechanism 52 vertically (Z direction), but left and right (in the longitudinal direction of the discharge lamp 1). It may be opened and closed in the vertical direction). By doing so, the clamp mechanism 52 does not need to retract the roller 70 at the tip of the drive lever 69 to a position higher than the base portion 28 when the clamp mechanism 52 is moved in the X direction by the drive unit 77. That is, since the constituent members of the clamp mechanism 52 are eliminated above the discharge lamp 1 only by the opening / closing operation of the clamp mechanism 52, the discharge lamp 1 can be conveyed in the Z direction.

[Second Embodiment]
The second embodiment will be described with reference to FIGS. 14 (A) to 15 (B). The discharge lamp of the present embodiment has a different configuration of the base portion on the anode side from that of the first embodiment. In FIGS. 14 (A) to 15 (B), the parts corresponding to FIGS. 4 (A) and 4 (B) are designated by the same reference numerals, and detailed description thereof will be omitted.

14 (A) and 14 (B) show a base portion 28A on the anode side of the discharge lamp 1A according to the present embodiment, and a power supply socket 152 that detachably connects the base portion 28A and the power cable 24A, respectively. In FIGS. 14 (A) and 14 (B), the base portion 28A on the anode side is connected to the connecting portion 25d at the end of the rod-shaped portion 25c of the glass tube 25 of the discharge lamp 1A, and the gripped portion having a spherical outer surface. 28Ae, a heat radiating portion 28Ai provided at the lower end of the gripped portion 28Ae so as to cover a part of the rod-shaped portion 25c and having a plurality of ring-shaped heat radiating fins 28Aj, and a terminal provided at the upper end of the gripped portion 28Ae. The portion 28Aa, the cylindrical box-shaped accommodating portion 29A arranged in the terminal portion 28Aa and the gripped portion 28Ae, and the discharge lamp 1A are provided in the center of the upper portion 29Aa of the accommodating portion 29A in an unused state. It has a sphere 27 which is placed so as to cover the circular opening 29Ab and whose coefficient of thermal expansion is smaller than the coefficient of thermal expansion of the accommodating portion 29A. The terminal portion 28Aa has a two-stage columnar portion whose diameter gradually decreases toward the tip, a recess 28Ab is formed at the upper end of the terminal portion 28Aa which is substantially axisymmetric, and a mountain shape is formed in the middle of the recess 28Aa. The convex portion 28Ac of the above is provided.

The accommodating portion 29A is arranged in a recess formed in the gripped portion 28Ae and the terminal portion 28Aa, and the accommodating portion 29A is urged to the connecting portion 25d side by the compression coil spring SP1 on the terminal portion 28Aa side. At the temperature when the discharge lamp 1A is stored, the diameter of the opening 29Ab is smaller than the diameter of the sphere 27, and when the discharge lamp 1A is made to emit light and the temperature of the discharge lamp 1A rises, the thermal expansion of the accommodating portion 29A causes the discharge lamp 1A to emit light. The diameter of the opening 29Ab is defined so that the diameter of the opening 29Ab is larger than the diameter of the sphere 27. As a result, when the discharge lamp 1A is used, the sphere 27 passes through the opening 29Ab and falls onto the bottom portion 29Ae in the accommodating portion 29A. Instead of providing the compression coil spring SP1, a step is provided in the space where the accommodating portion 29A is arranged (for example, in the terminal portion 28Aa) so that the upper portion is narrower than the lower portion, and the lower surface of the step portion and the accommodating portion 29A are provided. By arranging the accommodating portion 29A so as to come into contact with the upper surface of the accommodating portion 29A, the accommodating portion 29A may not be able to move upward. In this case, the space in the upper part, which is narrower than the lower part, may be large enough to allow the sphere 27 to be arranged.

Further, it passes through the central axis of the glass tube 25 and the center of the accommodating portion 29A (the center of the sphere 27 when the sphere 27 is in the center of the bottom 29Ae) and along a straight line orthogonal to the longitudinal direction of the glass tube 25. A circular through hole 28Ae1 having a diameter smaller than that of the sphere 27 is provided in the gripped portion 28Ae, and two circular openings 29Ac having a diameter smaller than that of the sphere 27 are provided on the side surface of the accommodating portion 29A so as to face the through hole 28Ae1. 29Ad is formed. The gap between the inner surface of the accommodating portion 29A and the sphere 27 is set so that the sphere 27 can move by, for example, about 5% to 30% (for example, about 10%) of the diameter of the sphere 27.

When the discharge lamp 1A is unused, the light beam LB1 is irradiated from the irradiation unit 94Aa of the first detection device 94A so as to pass through the through holes 28Ae1 of the discharge lamp 1A and the openings 29Ac and 29Ad of the accommodation unit 29A. By detecting the light beam LB1 with the light receiving unit 94Ab, it can be confirmed that the sphere 27 has not fallen into the accommodating unit 29A, that is, the discharge lamp 1A is unused. After using the discharge lamp 1A, as shown in FIG. 14B, when the sphere 27 is dropped in the accommodating portion 29A, the light beam LB1 is shielded by the sphere 27, and the light beam is blocked by the light receiving portion 94Ab. Since LB1 cannot be detected, it can be confirmed that the discharge lamp 1A has been used.

Further, the power feeding socket 152 includes a small disk-shaped main body portion 153, a connecting portion 154 provided on the bottom surface of the main body portion 153 and capable of being in close contact with the upper portion (tapered portion) of the recess 28Ab of the terminal portion 28Aa, and the connecting portion 154. It has a convex portion 155 provided at the lower end of the above portion and a plurality of (for example, at least four) spheres 157 provided on the convex portion 155 so as to be movable in the radial direction.
15 (A) and 15 (B) are cross-sectional views showing a power feeding socket 152, respectively. In FIG. 15A, the main body portion 153 of the power feeding socket 152 is formed by connecting the lower end portion 153A provided with the connecting portion 154 and the upper end portion 153B with bolts (not shown) or the like, and is the center of the lower end portion 153A. A circular concave portion 153Aa is formed therein, and a small circular through hole 153Ab is formed between the concave portion 153Aa and the lower end of the convex portion 155. Further, a piston portion 158 for an air cylinder is housed in the recess 153Aa, and a shaft portion 158b having a columnar shape and a recess 158a provided at the tip portion is connected to the bottom surface of the piston portion 158 so as to pass through the through hole 153Ab. .. A gas (for example, air) compressed and cooled can be supplied into the recess 153Aa through the piping in the power cable 24A and the groove 153Ac in the main body 153, and between the lower end 153A and the piston 158. A compression coil spring 160 is installed so as to urge the piston portion 158 toward the upper end portion 153B, and a flexible and movable sealing member for maintaining airtightness between the recess 153a and the piston portion 158. (For example, O-ring) 159 is arranged. Further, the sphere 157 is arranged in each of the plurality of openings 154a (see FIG. 15B) of the convex portion 155.

When the power supply socket 152 is attached to the terminal portion 28Aa of the base portion 28A as shown in FIG. 14 (B), compressed gas is applied from the power cable 24A to the piston portion 158 as shown in FIG. 15 (B). By supplying the gas, the piston portion 158 is lowered to accommodate the sphere 157 in the recess 158a. As a result, the sphere 157 of the convex portion 155 can pass through the inside of the convex portion 28Ac of the base portion 28A. After that, by stopping the supply of the compressed gas from the power cable 24A to the piston portion 158, the piston portion 158 rises, and as shown in FIG. 14B, the sphere 157 engages with the convex portion 28Ac. The power supply socket 152 is stably connected to the terminal portion 28Aa. When the power supply socket 152 is removed from the terminal portion 28Aa, the compressed gas may be supplied from the power cable 24A so as to lower the piston portion 158 again.

In each of the above-described embodiments, the first detection device 94A is arranged in the storage unit 54, but the present invention is not limited to this, and instead of the storage unit 54 or in the storage unit 54. In addition, the first detection device 94A may be provided in the lamp house 31. In that case, it is preferable that the irradiation unit 94Aa and the light receiving unit 94Ab are arranged in a state of being covered with a heat insulating material or the like so as to avoid the influence of heat caused by the discharge lamp 1. Further, it is preferable to arrange the lamp house 31 at a position as far as possible from the discharge lamp 1. By arranging the first detection device 94A in the lamp house 31 in this way, it is possible to detect whether the discharge lamp 1 is used or unused immediately before the discharge lamp 1 is turned on. Further, since it is possible to detect whether or not the sphere 27 has fallen (and thus the timing of falling) while the discharge lamp 1 is lit, the temperature state of the discharge lamp 1, the rate of temperature rise of the discharge lamp 1, and the lamp house. It is possible to detect the temperature state, the cooling state, and the like in 31. Further, it is also possible to detect an abnormality in the lamp house 31 based on the detection result. It should be noted that, based on the detection result of the first detection device 94A provided in the lamp house 31, the discharge lamp 1 is replaced or the replacement is urged (including displaying the time when the discharge lamp 1 should be replaced). You may do so.

Next, various modifications of the discharge lamp that can be used in the exposure apparatus or the light source apparatus of the first and second embodiments described above will be described. In the drawings used in the description of the following modification examples, the parts corresponding to FIGS. 3 (B), 7 (A), and 14 (A) and (B) are designated by the same or similar reference numerals. The detailed description thereof will be omitted.

FIG. 16A is a cross-sectional view showing a base portion 28A on the anode side of the discharge lamp 1B of the first modification. The discharge lamp 1B faces the sphere 27, which is in contact with the contour of the opening 29Ab of the accommodating portion 29A arranged inside the base portion 28, and the sphere 27 with respect to the discharge lamp 1A of FIG. 14 (A). A compression coil spring SP2 that urges the sphere 27 toward the accommodating portion 29A is arranged between the terminal portion 28Aa and the inner surface. Further, the accommodating portion 29A is fixed to the connecting portion 25d side of the discharge lamp 1B by, for example, adhesive. Other configurations are the same as those of the embodiment shown in FIG. 14 (A).

According to this modification, since the sphere 27 is urged by the compression coil spring SP2 toward the opening 29Ab side of the accommodating portion 29A, the discharge lamp 1B is placed in a horizontal plane in the longitudinal direction during transportation or use of the discharge lamp 1B. Even if they are made parallel, the position of the sphere 27 does not change. By providing the compression coil spring SP2, the temperature of the base portion 28A rises when the discharge lamp 1B is used (when energized), and the diameter of the opening 29Ab of the accommodating portion 29A becomes larger than the diameter of the sphere 27 due to thermal expansion. When it becomes, the sphere 27 surely passes through the opening 29Ab and moves into the accommodating portion 29A. Therefore, since the light beam LB1 of the detection device 94A is blocked by the sphere 27 when the discharge lamp 1B is stored, whether or not the discharge lamp 1B is used regardless of the posture during transportation and use of the discharge lamp 1B. Can be reliably determined.

Further, as shown by the discharge lamp 1C of the second modification of FIG. 16B, the sphere 27 may move in the direction (lateral direction) orthogonal to the longitudinal direction of the discharge lamp. In the discharge lamp 1C, the accommodating portion 29B having a cylindrical opening 29Bb provided on the side wall portion facing the outside of the gripped portion 28Ae is arranged in the recess 28Af provided on the side surface of the gripped portion 28Ae of the base portion 28A. Has been done. Further, a cylindrical fixing portion 29C is fixed in the recess 28Af by, for example, a ring-shaped fixing ring (not shown) so as to be in contact with the accommodating portion 29B, and the sphere 27 is in contact with the contour of the opening 29Bb in the fixing portion 29C. Is arranged, and the compression coil spring SP2 is arranged between the sphere 27 and the inner surface of the side wall portion of the fixing portion 29C so as to urge the sphere 27 toward the opening 29Bb. At the temperature when the discharge lamp 1C is stored, the diameter of the opening 29Bb is smaller than the diameter of the sphere 27, and when the discharge lamp 1C is made to emit light and the temperature of the discharge lamp 1C rises, the thermal expansion of the accommodating portion 29B causes the discharge lamp 1C to emit light. The diameter of the opening 29Bb is defined so that the diameter of the opening 29Bb is larger than the diameter of the sphere 27.

Further, two circular openings 29Bc and 29Bd having a diameter smaller than that of the sphere 27 are formed on the side surface of the accommodating portion 29B in the direction perpendicular to the paper surface of FIG. 16B for passing the light beam LB1 of the detection device 94A. A through hole (not shown) for passing the light beam LB1 in parallel with the straight line passing through the centers of the openings 29Bc and 29Bd is also provided in the gripped portion 28Ae of the base portion 28A. Other configurations are the same as those of the embodiment shown in FIG. 14 (A).

Also in this modification, since the sphere 27 is urged by the compression coil spring SP2 toward the opening 29Bb of the accommodating portion 29B, the longitudinal direction of the discharge lamp 1C is parallel to the horizontal plane during transportation or use of the discharge lamp 1C. The position of the sphere 27 does not change even if it is made parallel to the vertical direction. Therefore, when the discharge lamp 1C is used (when energized), when the diameter of the opening 29Bb of the accommodating portion 29B becomes larger than the diameter of the sphere 27, the sphere 27 surely passes through the opening 29Bb and the accommodating portion 29B. Move in. Therefore, when the discharge lamp 1C is stored next time, the detection device 94A can reliably determine whether or not the discharge lamp 1C is used regardless of the posture during transportation and use of the discharge lamp 1C.

Next, FIGS. 17A and 17B are cross-sectional views showing a base portion 28B on the anode side of the discharge lamp 1D of the third modification. In this modification, the sphere 27 is made to move stepwise according to the usage time of the discharge lamp 1D. In FIG. 17A, the base portion 28B is connected to the connecting portion 25d of the discharge lamp 1D, and has a spherical gripped portion 28Be on the outer surface and a plurality of ring strips provided at the lower ends of the gripped portion 28Be. Has a heat-dissipating fin 28Bj (heat-dissipating portion) and a substantially columnar terminal portion 28Ba provided at the upper end of the gripped portion 28Be. A concave portion 28Bb is formed in the center of the terminal portion 28Ba, and a mountain-shaped convex portion 28Bc is provided in the middle of the concave portion 28Bb. The terminal portion 28Ba can be connected to the connecting portion 154 of the power feeding socket 152 of FIG. 14 (A) via the concave portion 28Bb and the convex portion 28Bc.

Further, the first cylindrical accommodating portion 29A, the second cylindrical accommodating portion 29D, and the sphere 27 are arranged so as to be stacked in the terminal portion 28Ba and the gripped portion 28Be in order from the connecting portion 25d side. The accommodating portion 29A is fixed to the connecting portion 25d by adhesive or the like, and the accommodating portion 29D is fixed to the upper surface of the accommodating portion 29A by adhesive or the like. The accommodating portions 29A and 29B are large enough to accommodate the sphere 27, respectively, and the coefficient of thermal expansion of the accommodating portions 29A and 29B is larger than the coefficient of thermal expansion of the sphere 27. Further, a circular opening 29Ab is formed in the upper partition wall of the lower accommodating portion 29A, and a circular opening 29Db having a diameter larger than that of the opening 29Ab is formed in the upper partition wall of the upper accommodating portion 29B.

At the temperature at which the discharge lamp 1D is stored, the diameter d4 of the opening 29Db is smaller than the diameter of the sphere 27, and the diameter d3 of the opening 29Ab is smaller than the diameter d4. On the other hand, a state in which the discharge lamp 1D is attached to an exposure device, the discharge lamp 1D is energized, the discharge lamp 1D is made to emit light, and the temperature of the discharge lamp 1D rises to, for example, almost 1/2 of the maximum temperature (first threshold value). ), The diameter d4 of the opening 29Db becomes larger than the diameter of the sphere 27 due to the thermal expansion of the accommodating portion 29D, and the sphere 27 can pass through the opening 29Db, but the diameter d3 of the opening 29Ab of the accommodating portion 29A is smaller than the diameter of the sphere 27. The sphere 27 cannot pass through the opening 29Ab. Further, when the discharge lamp 1D continues to emit light (energized) and the temperature of the discharge lamp 1D rises to almost the maximum temperature, the diameter d3 of the opening 29Ab becomes larger than the diameter of the sphere 27 due to the thermal expansion of the accommodating portion 29A. , The diameters of the openings 26Ab and 29Db are defined so that the sphere 27 can pass through the opening 29Ab.

Further, it passes through the central axis of the glass tube 25 (see FIG. 2) of the discharge lamp 1D and the center of the accommodating portions 29A and 29D (the center of the sphere 27 when the sphere 27 is in the center of the accommodating portions 29A and 29D). , Circular through holes 28Be1 and 28Be2 having a diameter smaller than that of the sphere 27 are provided in the gripped portion 28Be and the terminal portion 28Ba, respectively, along a straight line orthogonal to the longitudinal direction of the discharge lamp 1D (glass tube 25). .. Two circular openings 29Ac, 29Ad and 29Dc, 29Dd having a diameter smaller than that of the sphere 27 are formed on the side surfaces of the accommodating portions 29A and 29D so as to face the through holes 28Be1 and 28Be2, respectively.

Further, with the discharge lamp 1D mounted on the turntable 79 of the storage unit 54 of FIG. 4B, as shown in FIG. 17A, the through hole 28Be1 of the discharge lamp 1D is placed above the turntable 79. A first detection device 94A having an irradiation unit 94Aa for irradiating the light beam LB1 and a light receiving unit 94Ab for detecting the light beam LB1 is arranged at the center of the openings 29Ac and 29Ad of the accommodation unit 29A. Further, above the detection device 94A, an irradiation unit 94Ca that irradiates the light beam LB3 at the center of the through holes 28Be2 of the discharge lamp 1D and the openings 29Dc and 29Dd of the accommodation unit 29D, and a light receiving unit 94Cb that detects the light beam LB3. A second detection device 94C is arranged. The detection signals of the light receiving units 94Ab and 94Cb are processed by the light source control system 32 described above. Other configurations are the same as those of the embodiment shown in FIG. 14 (A).

In this modification, when the discharge lamp 1D is unused and the sphere 27 is in contact with the contour of the opening 29Db of the accommodating portion 29D, the light beams LB1 and LB3 pass through the accommodating portions 29A and 29D, respectively, and the light receiving portion 94Ab. , 94Cb. In other words, when the detection devices 94A and 94C can detect the light beams LB1 and LB3 at the same time, it can be confirmed that the sphere 27 is above the accommodating portion 29D and the discharge lamp 1D is unused.

On the other hand, when the discharge lamp 1D is attached to the exposure apparatus and the discharge lamp 1D is made to emit light and the temperature of the discharge lamp 1D rises to about 1/2 of the maximum temperature, the thermal expansion of the accommodating portion 29D causes FIG. As shown in B), the sphere 27 passes through the opening 29Db and moves into the housing portion 29D. When the use of the discharge lamp 1D is interrupted in this state and the discharge lamp 1D is returned to the turntable 79 of the storage unit 54, the light beam LB1 passes through the accommodating unit 29A and is detected by the light receiving unit 94Ab. The LB3 is blocked by the sphere 27 in the accommodating portion 29D and is not detected by the light receiving portion 94Cb. In other words, if the detection device 94A can detect the light beam LB1 and the detection device 94B cannot detect the light beam LB3, the sphere 27 is inside the accommodating portion 29D and the discharge lamp 1D is used for a predetermined time (energization, energization, It can be confirmed that the light is emitted.

Then, in a state where the discharge lamp 1D is attached to the exposure apparatus, the discharge lamp 1D is made to emit light, and the discharge lamp 1D is continuously used until the temperature of the discharge lamp 1D rises to almost the maximum temperature (second threshold value), the discharge lamp 1D is accommodated. Due to the thermal expansion of the portion 29A, the sphere 27 passes through the opening 29Ab and moves to the position PA1 shown by the dotted line in the accommodating portion 29A. After that, for example, when the predetermined usable time elapses, the use of the discharge lamp 1D is stopped, and the discharge lamp 1D is returned to the turntable 79 of the storage unit 54, the light beam LB3 passes through the storage unit 29D and receives light. Although it is detected by the unit 94Cb, the light beam LB1 is blocked by the sphere 27 in the housing unit 29A and is not detected by the light receiving unit 94Ab. In other words, if the light beam LB1 is not detected by the detection device 94A and the light beam LB3 can be detected by the detection device 94B, the sphere 27 is inside the accommodating portion 29A, and the discharge lamp 1D has almost a predetermined usable time. You can confirm that it is only used (used).

According to this modification, it is possible to determine how long the discharge lamp 1D has been used by detecting whether the sphere 27 is located in the accommodating portions 29A or 29D. Also in this modified example, a compression coil spring (not shown) may be provided to urge the sphere 27 to the opening 29Db side of the accommodating portion 29D. The accommodating portions 29A and 29D may be formed of materials having different coefficients of thermal expansion. The material forming the accommodating portion 29D is a material having a higher coefficient of thermal expansion than the material forming the accommodating portion 29A. In this case, when the discharge lamp 1D is made to emit light and the temperature of the discharge lamp 1D rises to about 1/2 of the maximum temperature, for example, the accommodating portion 29D is deformed to the extent that the sphere 27 can pass through, and the accommodating portion 29A is deformed. When the sphere 27 is deformed to the extent that it cannot pass through, the sphere 27 is housed in the 29D. Further, when the discharge lamp 1D is made to emit light and the temperature of the discharge lamp 1D rises to almost the maximum temperature, the accommodating portion 29A is further deformed, and the sphere 27 is accommodated in the 29A. By forming the accommodating portions 29A and 29D from materials having different coefficients of thermal expansion in this way, it is possible to detect the use or non-use of the discharge lamp 1D step by step. Further, when the accommodating portions 29A and 29D are formed of materials having different coefficients of thermal expansion, the diameter of the opening 29Ab and the diameter of the opening 29Db may be formed to have the same length. Further, when the difference in the coefficient of thermal expansion is increased, the diameter of the opening 29Db may be longer than the diameter of the opening 29Ab. The presence or absence of the discharge lamp 1D was detected in two stages by providing the accommodating portions 29A and 29D, but by providing a plurality of accommodating portions, the presence or absence of the discharge lamp 1D was detected in more stages than the two stages. It may be detected.

Next, FIG. 18 (A) shows a state in which the discharge lamp 1E of the fourth modified example is held by the clamp mechanism 52 of FIG. 7 (A), and FIG. 18 (B) shows the discharge lamp 1E of FIG. 18 (A). 18C is an enlarged cross-sectional view showing the base portion 28C of FIG. 18C, and FIG. 18C is a cross-sectional view showing the terminal portion 28Ca of FIG. 18B. In this modification, the sphere 27 is moved by using the elastic deformation of the predetermined member instead of the thermal expansion of the predetermined member.

In FIG. 18A, the cathode side base 26 of the discharge lamp 1E is supported by the support member 33, and the terminal portion 28Ca of the anode side base 28C of the discharge lamp 1E is a power supply block by the roller 70 of the clamp mechanism 52. It is urged and supported by the 66 side.
As shown in FIG. 18B, in the terminal portion 28Ca of the discharge lamp 1E, a circular opening 28Ch having a diameter smaller than that of the sphere 27 is formed in a portion facing the roller 70. Further, inside the terminal portion 28Ca, an elastically deformable thin flat plate-shaped limiting member 29A having a U-shaped notch 29Aa shown in FIG. 18D formed on the upper surface of the gripped portion 28Ce has an opening 28Ch. A sphere 27 is arranged between the opening 28Ch and the notch 29Aa. The limiting member 29A may be formed of, for example, a steel material. Further, an inclined member 29B inclined so as to be gradually lowered from the cutout portion 29Aa side of the limiting member 29A is fixed to the upper surface of the gripped portion 28Ce on the central direction side of the terminal portion 28Ca with respect to the limiting member 29A. Further, two openings 28Cf and 28Cg for passing the light beam LB1 of the detection device 94A shown in FIG. 18C on two side surfaces of the terminal portion 28Ca in the direction perpendicular to the paper surface of FIG. 18B. Is formed.

In this modification, the maximum width d5 of the cutout portion 29Aa of the limiting member 29A is defined to be smaller than the diameter of the sphere 27 when no external force is applied to the limiting member 29A. Therefore, in a state where the discharge lamp 1E is not held by the clamp mechanism 52 (a state in which the roller 70 is not in contact with the sphere 27), the maximum width d5 of the notch portion 29Aa is smaller than the diameter of the sphere 27 and is a sphere. 27 is arranged between the opening 28Ch and the notch 29Aa, and the light beam LB1 of the detection device 94A can pass through the openings 28Cf and 28Cg of the terminal 28Ca. Therefore, it can be confirmed from the detection signal of the detection device 94A that the discharge lamp 1E is unused.

On the other hand, in the state where the discharge lamp 1E is held by the clamp mechanism 52 (the state where the roller 70 is in contact with the sphere 27), the sphere 27 is urged toward the limiting member 29A, and the notch portion 29Aa is elastically deformed by the limiting member 29A. The maximum width of the sphere 27 becomes larger than the diameter of the sphere 27, the sphere 27 passes through the notch 29Aa, rolls on the upper surface of the inclined member 29B, and stops at a position approximately between the openings 28Cf and 28Cg in the terminal portion 28Ca. .. In this state, the light beam LB1 of the detection device 94A cannot pass through the opening 28Cg of the terminal portion 28Ca. Other configurations are the same as those of the embodiment shown in FIG. 3 (B).

According to this modification, when the discharge lamp 1E is held by the clamp mechanism 52 for use in the exposure device, the sphere 27 in the base portion 28C is urged toward the limiting member 29A by the roller 70 of the clamp mechanism 52. , The sphere 27 moves between the openings 28Cf, 28Cg. Therefore, when the discharge lamp 1E is returned to the turntable 79 of the storage unit, the light beam LB1 of the detection device 94A is blocked by the sphere 27, so that it can be confirmed that the discharge lamp 1E has been used. Further, since the inclined member 29B for moving the sphere 27 in the direction between the openings 28Cf and 28Cg is provided in the terminal portion 28Ca, the position of the sphere 27 is stably maintained between the openings 28Cf and 28Cg. ..

The width of the cutout portion 29Aa of the limiting member 29A is widened to some extent by the thermal expansion of the limiting member 29A due to the temperature rise of the base portion 28C due to the use (energization) of the discharge lamp 1E. Therefore, when the temperature of the base portion 28C reaches almost the maximum temperature, the maximum width d5 of the notch portion 29Aa may be made wider than the diameter of the sphere 27 due to the thermal expansion of the limiting member 29A.

Next, FIGS. 19A and 19B are views showing the inside of the terminal portion 28a of the base portion 28 on the anode side of the discharge lamp of the fifth modification. In this modification, the width of the gap through which the sphere 27 passes is expanded by utilizing the principle of leverage. Inside the terminal portion 28a of FIG. 19A, a substantially U-shaped elastically deformable limiting member 29E made of, for example, a steel material is fixed to the upper surface of the gripped portion 28e of the base portion 28. The limiting member 29E is a pair of a flat plate-shaped fixing portion 29Ec fixed to the upper surface of the gripped portion 28e and a pair provided at both ends of the upper surface of the fixing portion 29Ec so as to be openable and closable by elastic deformation via portions having a small cross-sectional area. It has L-shaped hinge portions 29Ea and 29Eb. The sphere 27 is placed on the gap between the tips of the hinge portions 29Ea and 29Eb. Further, between the hinge portions 29Ea and 29Eb, in order from the fixing portion 29Ec side, a rod-shaped drive member 29H made of, for example, aluminum having a thermal expansion coefficient larger than the thermal expansion coefficient of the limiting member 29E, and hinge portions 29Ea, 29Eb. A tension coil spring 29I that acts to narrow the distance a between the tips of the tip portions is provided. As an example, the tension coil springs 29I are provided at two locations separated from each other in the direction perpendicular to the paper surface of FIG. 19A, and the sphere 27 can be arranged between the two tension coil springs 29I.

Further, the diameter of the terminal portion 28a is smaller than the diameter of the sphere 27 for passing the light beam LB1 of the detection device 94A of FIG. 3B on the two side surfaces in the direction perpendicular to the paper surface of FIG. 19A. Two openings 28a1, 28a2 (openings 28a1 are not shown) are formed.
At the temperature at which the discharge lamp of this modified example is stored, the length of the driving member 29H and the limiting member 29E are set so that the distance a between the tips of the hinge portions 29Ea and 29Eb is smaller than the diameter d of the sphere 27. The shape is specified. On the other hand, when the discharge lamp is made to emit light and the temperature of the discharge lamp reaches almost the maximum temperature, as shown in FIG. 19B, the hinge portion 29Ea, due to the action of the lever due to the thermal expansion of the drive member 29H, The length of the driving member 29H is defined so that the distance between the tip portions of 29Eb is considerably larger than the diameter of the sphere 27. In this case, the sphere 27 passes from the original position PA2 through the distance of its tip and moves to the upper surface of the drive member 29H between the two tension coil springs 29I, and the light of the detection device 94A of FIG. 3 (B). The beam LB1 is blocked by the sphere 27. Other configurations are the same as those of the embodiment shown in FIG. 3 (B).

In this modification, when the discharge lamp is used (when energized), the distance between the tips of the hinge portions 29Ea and 29Eb of the limiting member 29E becomes larger than the diameter of the sphere 27 due to the thermal expansion of the driving member 29H. It moves to the upper surface of the drive member 29H through the gap between the tip portions. Therefore, when the discharge lamp is stored, the light beam LB1 of the detection device 94A is blocked by the sphere 27, so that it is possible to reliably determine whether or not the discharge lamp is used.

Further, in this modification, the amount of extension of the distance a between the tip portions of the hinge portions 29Ea and 29Eb is determined by the action of leverage due to the thermal expansion of the driving member 29H and the tip portions of the hinge portions 29Ea and 29Eb due to the thermal expansion of the limiting member 29E. It is much larger than the amount of extension of the interval. Therefore, the machining accuracy of the limiting member 29E and the driving member 29H when manufacturing the discharge lamp can be lower (coarse) than the machining accuracy of the opening 29b of the accommodating portion 29 in FIG. 3B, for example. Is easy to manufacture.

In this modification, instead of the sphere 27, a cylinder 27C having a low coefficient of thermal expansion having the same diameter as the diameter d of the sphere 27, which extends in the direction perpendicular to the paper surface of FIG. 19 (A), may be used. Even when the cylinder 27C is used, when the distance between the tips of the hinge portions 29Ea and 29Eb is larger than the diameter d, the cylinder 27C passes through the distance between the tip portions and reaches a position where the light beam LB1 is blocked, so that the cylinder 27C is discharged. Whether or not the lamp is used can be determined.

Further, as shown in the base portion 28 on the anode side of the discharge lamp of the sixth modified example of FIGS. 20 (A) and 20 (B), in addition to the principle of leverage used in the modified example of FIG. 19 (A), the bimetal The gap through which the sphere 27 (or the cylinder 27C) passes may be increased by the action. In FIG. 20A, each of the hinge portions 29Ea and 29Eb at both ends of the limiting member 29E arranged inside the terminal portion 28a of the base portion 28 has a coefficient of thermal expansion larger than the coefficient of thermal expansion of the limiting member 29E. For example, flat drive members 29F and 29G made of aluminum are fixed by adhesion or the like.

At the temperature at which the discharge lamp of this modification is stored, the distance a between the tips of the hinges 29Ea and 29Eb is smaller than the diameter d of the sphere 27, and the sphere 27 is the distance between the tips of the hinges 29Ea and 29Eb. It is placed above. On the other hand, when the discharge lamp is made to emit light and the temperature of the discharge lamp reaches almost the maximum temperature, as shown in FIG. 20B, the amount of thermal expansion of the drive members 29F and 29G is limited to the limiting member 29E (hinge portion). Since it is larger than the thermal expansion amount of 29Ea and 29Eb), the distance between the tips of the hinge portions 29Ea and 29Eb becomes considerably larger than the diameter of the sphere 27 due to the bimetal action. Therefore, the sphere 27 passes through the distance from the original position PA2 to the tip portion thereof, moves to the upper surface of the fixed portion 29Ec, and blocks the light beam LB1 of FIG. 3 (B) toward the opening 28a2. Therefore, when the discharge lamp is stored, the light beam LB1 of the detection device 94A is blocked by the sphere 27, and it is possible to accurately determine whether or not the discharge lamp is used.

Further, in this modification, the amount of extension of the distance a between the tips of the hinge portions 29Ea and 29Eb is determined by the bimetal action due to the thermal expansion of the driving members 29F and 29G, and the tips of the hinge portions 29Ea and 29Eb due to the thermal expansion of the limiting member 29E. It is significantly larger than the amount of extension of the interval between the parts. Therefore, the machining accuracy of the limiting member 29E and the driving members 29F and 29G in manufacturing the discharge lamp can be lower (coarse) than, for example, the machining accuracy of the opening 29b of the accommodating portion 29 in FIG. 3B. The discharge lamp is easy to manufacture.

Next, FIGS. 21 (A) and 21 (B) are cross-sectional views showing a base portion 28D on the anode side of the discharge lamp of the seventh modification. In this modification, the presence or absence of the discharge lamp is determined by the change in the angle of the reflecting surface of the mirror portion provided on the base portion.
In FIG. 21A, a circular convex portion 28e2 is provided at the center of a circular concave portion 28e1 formed at the upper end portion of the gripped portion 28e of the base portion 28D. A flange portion of a support member 29J having a substantially cylindrical shape and a ring-shaped flange portion at the lower end portion is placed so as to surround the convex portion 28e2 in the concave portion 28e1. Further, a disc-shaped intermediate member 29K made of a material that is plastically deformed by heat, for example, an alloy containing lead, is fixed to the upper surface of the support member 29J, and the reflective surface is directed outward so as to face the upper surface of the intermediate member 29K. The triangular prism-shaped mirror portions MR1 and MR4 are fixed.

Further, a terminal portion 28a having a substantially triangular columnar outer shape and a circular flange portion 28a3 at the lower end portion is provided so as to cover the support member 29J, the intermediate member 29K, and the mirror portions MR1 and MR2 above the intermediate member 29K. It is placed. Triangular prism-shaped mirror portions MR2 and MR3 are fixed at positions facing the mirror portions MR1 and MR2 on the inner surface of the terminal portion 28a so that the reflecting surfaces face inward, respectively. The flange portion of the support member 29J and the flange portion 28a3 of the terminal portion 28a overlap each other, and the two flange portions 28a3 and the like are fixed to the recess 28e1 by bolts BA1 at a plurality of locations.

Further, two circular openings 28a1, 28a2 are formed on the side surface of the terminal portion 28a so as to face the mirror portions MR1 and MR4 on the intermediate member 29J and along a straight line passing through the central axis of the support member 29J. Has been done.
When the discharge lamp of this modified example is placed on the discharge turntable 79 of the storage unit shown in FIG. 11 in an unused state, the light beam LB1 irradiated from the irradiation unit 94Aa of the detection device 94A is It passes through the opening 28a1, the mirror portions MR1, MR2, MR3, MR4, and the opening 28a2, and is received by the light receiving portion 94Ab. From the detection signal of the light receiving unit 94Ab, it can be confirmed that the discharge lamp is unused.

On the other hand, when the discharge lamp is attached to an exposure device and the temperature of the discharge lamp rises (the temperature of the discharge lamp has reached almost the maximum temperature, or the discharge lamp has been used for a predetermined time or longer, for example), As shown in FIG. 21B, the intermediate member 29K is plastically deformed by heat, and the angles of the reflecting surfaces of the mirror portions MR1 and MR4 change. After that, when the used discharge lamp is placed on the turntable 79 of the storage unit shown in FIG. 11, the light beam LB1 irradiated from the irradiation unit 94Aa of the detection device 94A is determined by the mirror unit MR1 (or MR4) in FIG. 21. It is reflected in a direction different from that in the case of (A), and is not received by the light receiving unit 94Ab. Therefore, it can be confirmed from the detection signal of the light receiving unit 94Ab that the discharge lamp has been used.

In this modification, as shown in FIG. 21A, the light receiving portion 94Ab of the detection device 94A may be arranged at the position PA5 shown by the dotted line near the irradiation portion 94Aa. In this case, the angle of the reflecting surface of the mirror unit MR1 is set so that the light beam LB1 from the irradiation unit 94Aa is received by the light receiving unit 94Ab at the position PA5, and the other mirror units MR2 to MR4 are omitted. Even in this case, when the temperature of the discharge lamp rises, the intermediate member 29K is plastically deformed by heat, the angle of the reflecting surface of the mirror portion MR1 changes, and the reflected light from the mirror portion MR1 is received by the light receiving portion 94Ab. become unable. Therefore, it can be confirmed from the detection signal of the light receiving unit 94Ab that the discharge lamp has been used. Although the example in which the mirror portion is provided on the side surface inside the terminal portion 28a is shown, the present invention is not limited to this, and the mirror portion may be provided on the side surface outside the terminal portion 28a. In this case, the mirror portions MR2 and MR3 may be provided not in the terminal portion 28a but in the casing 51, for example. By providing a mirror portion on the outer side surface of the terminal portion 28a, it is not necessary to form openings 28a1, 28a2 in the terminal portion 28a, the strength and composition of the terminal portion 28a are increased, and the terminal portion 28a can be easily manufactured. The effect is obtained.

Although it has been described that the detection device 94 has an irradiation unit 94Aa for irradiating the light beam LB1 and a light receiving unit 94Ab, the detection device 94 is not limited to this. The irradiation unit 94Aa may be used as a point light source, and it may be possible to confirm that the discharge lamp has been used by checking whether or not a predetermined amount of light or more is detected by the light receiving unit 94Ab. Further, the light receiving unit 94Ab may be configured by an imaging device, for example, a camera. The image pickup apparatus may detect whether or not the sphere 27 is accommodated in the accommodating portion 29 by well-known image processing or the like.

As an eighth modification, when the discharge lamp is used (energized) for a predetermined time, the detection device 94 indicates whether or not the discharge lamp is used, indicating that the state of the base portion 28D on the anode side has changed due to discoloration and / or deformation. May be detected. When the discharge lamp is used (energized) for a predetermined time, a mark is formed on the cathode side base 26, the anode side base 28, the glass tube 25, etc. by the mark forming portion (not shown), and the mark is given as described above. The presence or absence of the discharge lamp may be detected by detecting with the image pickup device of the above.

It should be noted that the terminal portion 28a may be formed with a groove instead of the openings 28a1, 28a2. That is, since the light beam LB1 from the irradiation unit 94Aa only needs to pass through the accommodating portion, a notch may be provided instead of a configuration that covers the sphere like an opening. Further, the openings 28a1, 28a2 may be covered with a material through which the light beam LB1 can pass, for example, glass. As a result, there is no possibility that dust will enter the accommodating portion 29.

In each of the above-described embodiments, the presence / absence of the discharge lamp is detected by the base portion 28 on the anode side, but the base portion 26 on the cathode side is provided with the same configuration as the base portion 28 on the anode side, and the discharge lamp is used. The presence or absence may be detected. Further, both the base portion 26 on the cathode side and the base portion 28 on the anode side may be provided with a configuration capable of detecting the presence or absence of use of the discharge lamp.

A liquid crystal display element or the like is formed by forming a predetermined pattern (circuit pattern, electrode pattern, etc.) on the substrate (plate P) by using the exposure apparatus of each of the above-described embodiments or an exposure method using these exposure apparatus. Liquid crystal devices can be manufactured. Hereinafter, an example of this manufacturing method will be described with reference to steps S401 to S404 of FIG.
In step S401 (pattern forming step) of FIG. 22, first, a coating step of applying a photoresist on a substrate to be exposed to prepare a photosensitive substrate (plate P), for a liquid crystal display element using the above-mentioned exposure apparatus. An exposure step of transferring and exposing the mask pattern onto the photosensitive substrate and a developing step of developing the photosensitive substrate are executed. A predetermined resist pattern is formed on the substrate by the lithography process including the coating process, the exposure process, and the developing process. Following this lithography step, a predetermined pattern including a large number of electrodes and the like is formed on the substrate through an etching step using the resist pattern as a mask for processing, a resist peeling step, and the like. The lithography process and the like are executed a plurality of times according to the number of layers on the plate P.

In the next step S402 (color filter forming step), a large number of sets of three fine filters corresponding to red R, green G, and blue B are arranged in a matrix, or red R, green G, and blue B are arranged. A color filter is formed by arranging a set of three striped filters in the horizontal scanning line direction. In the next step S403 (cell assembly step), for example, liquid crystal is injected between the substrate having the predetermined pattern obtained in step S401 and the color filter obtained in step S402, and the liquid crystal panel (liquid crystal cell). ) Is manufactured.

In the subsequent step S404 (module assembly process), the liquid crystal panel (liquid crystal cell) assembled in this way is completed as a liquid crystal display element by attaching an electric circuit for performing a display operation and parts such as a backlight. Let me. According to the above-mentioned manufacturing method of the liquid crystal display element, the discharge lamp can be efficiently replaced in the exposure apparatus, so that a high throughput can be obtained.

The present invention is not limited to application to a manufacturing process of a liquid crystal display element, for example, a manufacturing process of a display device such as a plasma display, an imaging device (CCD or the like), a micromachine, and a MEMS (Microelectromechanical Systems: It can be widely applied to the manufacturing process of various devices such as microelectromechanical systems), thin film magnetic heads using ceramic wafers as substrates, and semiconductor elements.

The light source device of the above-described embodiment is a step-and-repeat type projection exposure device (stepper or the like) in addition to the above-mentioned step-and-scan type scanning exposure type projection exposure device (scanner or the like). It can also be applied to an exposure light source. Further, the light source device of the above-described embodiment can be applied to a light source device of a proximity type or contact type exposure device that does not use a projection optical system, or a light source of a device other than the exposure device.

EX ... exposure device, M ... mask, P ... plate, PL ... projection optical system, 1 ... discharge lamp, 1N ... unused discharge lamp, 2 ... elliptical mirror, 13 ... illumination optical system, 20 ... power supply unit, 23, 24 ... power cable, 25 ... glass tube, 25a ... valve part, 26 ... cathode side base part, 28 ... anode side base part, 28a ... terminal part, 28e ... gripped part, 30 ... light source device, 31 ... lamp House, 32 ... Light source control system, 33 ... Support member, 36 ... Drawer, 50 ... Exchanger, 52 ... Clamp mechanism, 54 ... Storage, 56 ... Lamp transport system

Claims (22)

A discharge lamp that is loaded into a device equipped with a detector that detects the usage status of the discharge lamp.
Electrodes for discharge and
The glass member that forms the light emitting part and
An energizing member provided at the end of the glass member and energizing the discharge electrode, and
It has an opening provided in the energizing member and a movable portion capable of blocking at least a part of a light beam passing through the opening, and when detected by the detection unit and the electrode is energized , at least the light beam is energized. A discharge lamp comprising a first state in which a part of the light beam can pass through the opening to a second state in which at least a part of the light beam is shielded by the movable part. The discharge lamp according to claim 1, wherein the detected unit changes from the first state to the second state when the energization time of the electrodes elapses for a predetermined time or longer. The energizing member is provided adjacent to the first accommodating portion via a first accommodating portion provided with the opening and capable of accommodating the movable portion and a partition wall portion provided with a hole, and accommodates the movable portion. Has a possible second containment and
In the first state in which the electrode is not energized, the movable portion is housed in the second accommodating portion, and in the second state in which the electrode is energized for a predetermined time, the movable portion passes through the hole. The discharge lamp according to claim 1 or 2 , which is housed in the first housing unit. The discharge lamp according to claim 3 , wherein the detected portion has a regulating portion that regulates the movement of the movable portion in the first accommodating portion so as not to move to the second accommodating portion in the second state. The current-carrying member, the discharge lamp according to any one of claims 1 to 4 having a first current-carrying member and the second energizing member provided so as to sandwich the glass member. A discharge lamp including a glass member forming a light emitting portion and a first energizing member and a second energizing member that energize electrodes in the glass member.
An opening is provided in the first energizing member .
It said first conducting discharge lamp Ru with a movable portion capable of shielding at least a portion of the light beam passing through the aperture of the member. The first energizing member is provided adjacent to the first accommodating portion via a first accommodating portion provided with the opening and capable of accommodating the movable portion and a partition wall portion provided with a hole, and is movable. It has a second accommodating part that can accommodate the part,
Prior to the start of use of the discharge lamp, the movable portion is accommodated in the second accommodating portion.
When the first energizing member and the second energizing member are not energized, the movable portion cannot pass through the hole of the partition wall portion, and the first energizing member and the second energizing member are energized. The discharge lamp according to claim 6 , wherein the movable portion can pass through the opening in the state. The first energizing member is
The connected part to which the member to which the power cable is connected can be connected, and
The discharge lamp according to any one of claims 6 to 7 , further comprising a held portion including a non-planar portion that can be held by the transport portion. The discharge lamp according to claim 8 , wherein the held portion of the first energizing member includes an axisymmetric portion having a spherical surface. The discharge lamp according to any one of claims 6 to 9, wherein the first energizing member has radiating fins. Said second conducting member, claims and can be placed flange to the support member, claim 6 having a cross-sectional area than the flange portion is small diameter portion, and a stepped portion is larger cross-sectional area than the small-diameter portion The discharge lamp according to any one of up to 10. A light source device including the discharge lamp according to any one of claims 6 to 11.
A storage unit for storing the discharge lamp and
A transport unit that transports the discharge lamp and
A light transmitting unit that causes a light beam to enter the opening of the first energizing member of the discharge lamp, and
A light receiving unit that detects the light beam that has passed through the aperture, and
A light source device including a control unit that determines the state of the discharge lamp using the detection result of the light receiving unit. A correction unit for correcting the rotation angle of the discharge lamp is provided.
The 12th aspect of claim 12, wherein the control unit obtains the rotation angle of the discharge lamp using the detection result of the light receiving unit, and corrects the rotation angle of the discharge lamp via the correction unit based on the obtained rotation angle. Light source device. The discharge lamp includes a movable portion capable of blocking at least a part of the light beam incident on the opening of the first energizing member.
The control unit determines whether or not at least a part of the light beam incident on the opening is shielded by the movable portion by using the detection result of the light receiving unit, and the discharge lamp is based on the determination result. The light source device according to claim 12 or 13 , which determines the usage state of the light source. A connecting portion that detachably connects a power cable to the first energizing member of the discharge lamp, and
The light source device according to any one of claims 12 to 14 , further comprising a support portion that detachably supports the second energizing member of the discharge lamp. The light source device according to any one of claims 12 to 15.
An illumination system that illuminates the mask with the light generated from the discharge lamp of the light source device, and
An exposure apparatus including a projection optical system that projects an image of the mask pattern onto a substrate. The method for replacing a discharge lamp according to any one of claims 6 to 11.
To store the discharge lamp and
Transporting the discharge lamp from the storage unit to the installation position
Injecting a light beam into the opening of the first energizing member of the discharge lamp,
Detecting the light beam that has passed through the aperture
A replacement method including determining the state of the discharge lamp using the detection result of the light beam. Determining the state of the discharge lamp includes obtaining the rotation angle of the discharge lamp using the detection result of the light beam.
The replacement method according to claim 17 , wherein the rotation angle of the discharge lamp is corrected based on the obtained rotation angle. The discharge lamp includes a movable portion capable of blocking at least a part of the light beam incident on the opening of the first energizing member.
To determine the state of the discharge lamp, the detection result of the light beam is used to determine whether or not at least a part of the light beam incident on the opening is shielded by the moving portion. The replacement method according to claim 17 or 18 , wherein the usage state of the discharge lamp is determined based on the determination result. Replacing the discharge lamp by using the discharge lamp replacement method according to any one of claims 17 to 19.
Illuminating the mask with the light generated from the discharge lamp
An exposure method comprising projecting an image of the mask pattern onto a substrate. Forming a pattern of a photosensitive layer on a substrate by using the exposure apparatus according to claim 16.
Processing the substrate on which the pattern is formed and
Device manufacturing method including. Forming a pattern of a photosensitive layer on a substrate by using the exposure method according to claim 20,
Processing the substrate on which the pattern is formed and
Device manufacturing method including.

Images