WO2017090680A1 - Curable composition and method for manufacturing electronic component - Google Patents
Curable composition and method for manufacturing electronic component Download PDFInfo
- Publication number
- WO2017090680A1 WO2017090680A1 PCT/JP2016/084798 JP2016084798W WO2017090680A1 WO 2017090680 A1 WO2017090680 A1 WO 2017090680A1 JP 2016084798 W JP2016084798 W JP 2016084798W WO 2017090680 A1 WO2017090680 A1 WO 2017090680A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- curable composition
- acrylic monomer
- weight
- resist
- electronic component
- Prior art date
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- 239000000203 mixture Substances 0.000 title claims abstract description 113
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 238000000034 method Methods 0.000 title claims description 15
- 239000000178 monomer Substances 0.000 claims abstract description 65
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims abstract description 61
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims abstract description 49
- 229920005989 resin Polymers 0.000 claims abstract description 42
- 239000011347 resin Substances 0.000 claims abstract description 42
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims abstract description 40
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 claims abstract description 17
- 239000003999 initiator Substances 0.000 claims abstract description 17
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims abstract description 5
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims abstract description 5
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 58
- 150000001875 compounds Chemical class 0.000 claims description 34
- 239000004593 Epoxy Substances 0.000 claims description 23
- 238000011161 development Methods 0.000 claims description 16
- 239000007787 solid Substances 0.000 claims description 10
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 238000002845 discoloration Methods 0.000 abstract description 20
- -1 acryl Chemical group 0.000 abstract description 14
- 239000000047 product Substances 0.000 description 44
- 239000003822 epoxy resin Substances 0.000 description 24
- 229920000647 polyepoxide Polymers 0.000 description 24
- 239000011256 inorganic filler Substances 0.000 description 18
- 229910003475 inorganic filler Inorganic materials 0.000 description 18
- 239000000463 material Substances 0.000 description 18
- 239000012321 sodium triacetoxyborohydride Substances 0.000 description 18
- 239000002904 solvent Substances 0.000 description 17
- 239000002245 particle Substances 0.000 description 16
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 14
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 239000003963 antioxidant agent Substances 0.000 description 11
- 230000003078 antioxidant effect Effects 0.000 description 10
- 238000000576 coating method Methods 0.000 description 10
- 238000010438 heat treatment Methods 0.000 description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 9
- 229910052802 copper Inorganic materials 0.000 description 9
- 239000010949 copper Substances 0.000 description 9
- 238000005259 measurement Methods 0.000 description 8
- 229910000679 solder Inorganic materials 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 238000012360 testing method Methods 0.000 description 8
- 239000007788 liquid Substances 0.000 description 7
- 239000000454 talc Substances 0.000 description 7
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- 150000008065 acid anhydrides Chemical class 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 6
- 238000009826 distribution Methods 0.000 description 6
- 150000007519 polyprotic acids Polymers 0.000 description 6
- 229920001296 polysiloxane Polymers 0.000 description 6
- 238000004383 yellowing Methods 0.000 description 6
- 239000002202 Polyethylene glycol Substances 0.000 description 5
- 239000003795 chemical substances by application Substances 0.000 description 5
- 125000004386 diacrylate group Chemical group 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 229920001223 polyethylene glycol Polymers 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 4
- 239000000460 chlorine Substances 0.000 description 4
- 229910052801 chlorine Inorganic materials 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 125000003700 epoxy group Chemical group 0.000 description 4
- 229920003986 novolac Polymers 0.000 description 4
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- 229920000642 polymer Polymers 0.000 description 4
- 229920006395 saturated elastomer Polymers 0.000 description 4
- 150000005846 sugar alcohols Polymers 0.000 description 4
- 229920001187 thermosetting polymer Polymers 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 3
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 229940105570 ornex Drugs 0.000 description 3
- 230000002265 prevention Effects 0.000 description 3
- 239000011342 resin composition Substances 0.000 description 3
- 238000007650 screen-printing Methods 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- 229920000877 Melamine resin Polymers 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 2
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 235000000126 Styrax benzoin Nutrition 0.000 description 2
- 244000028419 Styrax benzoin Species 0.000 description 2
- 235000008411 Sumatra benzointree Nutrition 0.000 description 2
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 2
- 235000010724 Wisteria floribunda Nutrition 0.000 description 2
- CGRTZESQZZGAAU-UHFFFAOYSA-N [2-[3-[1-[3-(3-tert-butyl-4-hydroxy-5-methylphenyl)propanoyloxy]-2-methylpropan-2-yl]-2,4,8,10-tetraoxaspiro[5.5]undecan-9-yl]-2-methylpropyl] 3-(3-tert-butyl-4-hydroxy-5-methylphenyl)propanoate Chemical compound CC(C)(C)C1=C(O)C(C)=CC(CCC(=O)OCC(C)(C)C2OCC3(CO2)COC(OC3)C(C)(C)COC(=O)CCC=2C=C(C(O)=C(C)C=2)C(C)(C)C)=C1 CGRTZESQZZGAAU-UHFFFAOYSA-N 0.000 description 2
- BGYHLZZASRKEJE-UHFFFAOYSA-N [3-[3-(3,5-ditert-butyl-4-hydroxyphenyl)propanoyloxy]-2,2-bis[3-(3,5-ditert-butyl-4-hydroxyphenyl)propanoyloxymethyl]propyl] 3-(3,5-ditert-butyl-4-hydroxyphenyl)propanoate Chemical compound CC(C)(C)C1=C(O)C(C(C)(C)C)=CC(CCC(=O)OCC(COC(=O)CCC=2C=C(C(O)=C(C=2)C(C)(C)C)C(C)(C)C)(COC(=O)CCC=2C=C(C(O)=C(C=2)C(C)(C)C)C(C)(C)C)COC(=O)CCC=2C=C(C(O)=C(C=2)C(C)(C)C)C(C)(C)C)=C1 BGYHLZZASRKEJE-UHFFFAOYSA-N 0.000 description 2
- DZBUGLKDJFMEHC-UHFFFAOYSA-N acridine Chemical compound C1=CC=CC2=CC3=CC=CC=C3N=C21 DZBUGLKDJFMEHC-UHFFFAOYSA-N 0.000 description 2
- 125000002947 alkylene group Chemical group 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- 229960002130 benzoin Drugs 0.000 description 2
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 2
- OSGAYBCDTDRGGQ-UHFFFAOYSA-L calcium sulfate Chemical compound [Ca+2].[O-]S([O-])(=O)=O OSGAYBCDTDRGGQ-UHFFFAOYSA-L 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- PPQREHKVAOVYBT-UHFFFAOYSA-H dialuminum;tricarbonate Chemical compound [Al+3].[Al+3].[O-]C([O-])=O.[O-]C([O-])=O.[O-]C([O-])=O PPQREHKVAOVYBT-UHFFFAOYSA-H 0.000 description 2
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 2
- 239000004205 dimethyl polysiloxane Substances 0.000 description 2
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- LEQAOMBKQFMDFZ-UHFFFAOYSA-N glyoxal Chemical compound O=CC=O LEQAOMBKQFMDFZ-UHFFFAOYSA-N 0.000 description 2
- 235000019382 gum benzoic Nutrition 0.000 description 2
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 2
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 2
- 125000005395 methacrylic acid group Chemical group 0.000 description 2
- DNIAPMSPPWPWGF-UHFFFAOYSA-N monopropylene glycol Natural products CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 2
- SSDSCDGVMJFTEQ-UHFFFAOYSA-N octadecyl 3-(3,5-ditert-butyl-4-hydroxyphenyl)propanoate Chemical compound CCCCCCCCCCCCCCCCCCOC(=O)CCC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 SSDSCDGVMJFTEQ-UHFFFAOYSA-N 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 239000003208 petroleum Substances 0.000 description 2
- 239000002530 phenolic antioxidant Substances 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 230000036211 photosensitivity Effects 0.000 description 2
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 2
- UOHMMEJUHBCKEE-UHFFFAOYSA-N prehnitene Chemical compound CC1=CC=C(C)C(C)=C1C UOHMMEJUHBCKEE-UHFFFAOYSA-N 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 150000003254 radicals Chemical class 0.000 description 2
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- 239000000243 solution Substances 0.000 description 2
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 2
- VZXTWGWHSMCWGA-UHFFFAOYSA-N 1,3,5-triazine-2,4-diamine Chemical compound NC1=NC=NC(N)=N1 VZXTWGWHSMCWGA-UHFFFAOYSA-N 0.000 description 1
- OUPZKGBUJRBPGC-UHFFFAOYSA-N 1,3,5-tris(oxiran-2-ylmethyl)-1,3,5-triazinane-2,4,6-trione Chemical compound O=C1N(CC2OC2)C(=O)N(CC2OC2)C(=O)N1CC1CO1 OUPZKGBUJRBPGC-UHFFFAOYSA-N 0.000 description 1
- ZIKLJUUTSQYGQI-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxypropoxy)propane Chemical compound CCOCC(C)OCC(C)OCC ZIKLJUUTSQYGQI-UHFFFAOYSA-N 0.000 description 1
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- IVIDDMGBRCPGLJ-UHFFFAOYSA-N 2,3-bis(oxiran-2-ylmethoxy)propan-1-ol Chemical compound C1OC1COC(CO)COCC1CO1 IVIDDMGBRCPGLJ-UHFFFAOYSA-N 0.000 description 1
- VEPOHXYIFQMVHW-XOZOLZJESA-N 2,3-dihydroxybutanedioic acid (2S,3S)-3,4-dimethyl-2-phenylmorpholine Chemical compound OC(C(O)C(O)=O)C(O)=O.C[C@H]1[C@@H](OCCN1C)c1ccccc1 VEPOHXYIFQMVHW-XOZOLZJESA-N 0.000 description 1
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 1
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 1
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 1
- DRLRGHZJOQGQEC-UHFFFAOYSA-N 2-(2-methoxypropoxy)propyl acetate Chemical compound COC(C)COC(C)COC(C)=O DRLRGHZJOQGQEC-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- WAEVWDZKMBQDEJ-UHFFFAOYSA-N 2-[2-(2-methoxypropoxy)propoxy]propan-1-ol Chemical compound COC(C)COC(C)COC(C)CO WAEVWDZKMBQDEJ-UHFFFAOYSA-N 0.000 description 1
- QSRJVOOOWGXUDY-UHFFFAOYSA-N 2-[2-[2-[3-(3-tert-butyl-4-hydroxy-5-methylphenyl)propanoyloxy]ethoxy]ethoxy]ethyl 3-(3-tert-butyl-4-hydroxy-5-methylphenyl)propanoate Chemical compound CC(C)(C)C1=C(O)C(C)=CC(CCC(=O)OCCOCCOCCOC(=O)CCC=2C=C(C(O)=C(C)C=2)C(C)(C)C)=C1 QSRJVOOOWGXUDY-UHFFFAOYSA-N 0.000 description 1
- VFBJXXJYHWLXRM-UHFFFAOYSA-N 2-[2-[3-(3,5-ditert-butyl-4-hydroxyphenyl)propanoyloxy]ethylsulfanyl]ethyl 3-(3,5-ditert-butyl-4-hydroxyphenyl)propanoate Chemical compound CC(C)(C)C1=C(O)C(C(C)(C)C)=CC(CCC(=O)OCCSCCOC(=O)CCC=2C=C(C(O)=C(C=2)C(C)(C)C)C(C)(C)C)=C1 VFBJXXJYHWLXRM-UHFFFAOYSA-N 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- NQBXSWAWVZHKBZ-UHFFFAOYSA-N 2-butoxyethyl acetate Chemical compound CCCCOCCOC(C)=O NQBXSWAWVZHKBZ-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
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- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- PFANXOISJYKQRP-UHFFFAOYSA-N 2-tert-butyl-4-[1-(5-tert-butyl-4-hydroxy-2-methylphenyl)butyl]-5-methylphenol Chemical compound C=1C(C(C)(C)C)=C(O)C=C(C)C=1C(CCC)C1=CC(C(C)(C)C)=C(O)C=C1C PFANXOISJYKQRP-UHFFFAOYSA-N 0.000 description 1
- AIBRSVLEQRWAEG-UHFFFAOYSA-N 3,9-bis(2,4-ditert-butylphenoxy)-2,4,8,10-tetraoxa-3,9-diphosphaspiro[5.5]undecane Chemical compound CC(C)(C)C1=CC(C(C)(C)C)=CC=C1OP1OCC2(COP(OC=3C(=CC(=CC=3)C(C)(C)C)C(C)(C)C)OC2)CO1 AIBRSVLEQRWAEG-UHFFFAOYSA-N 0.000 description 1
- SSADPHQCUURWSW-UHFFFAOYSA-N 3,9-bis(2,6-ditert-butyl-4-methylphenoxy)-2,4,8,10-tetraoxa-3,9-diphosphaspiro[5.5]undecane Chemical compound CC(C)(C)C1=CC(C)=CC(C(C)(C)C)=C1OP1OCC2(COP(OC=3C(=CC(C)=CC=3C(C)(C)C)C(C)(C)C)OC2)CO1 SSADPHQCUURWSW-UHFFFAOYSA-N 0.000 description 1
- MECNWXGGNCJFQJ-UHFFFAOYSA-N 3-piperidin-1-ylpropane-1,2-diol Chemical compound OCC(O)CN1CCCCC1 MECNWXGGNCJFQJ-UHFFFAOYSA-N 0.000 description 1
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 1
- VSAWBBYYMBQKIK-UHFFFAOYSA-N 4-[[3,5-bis[(3,5-ditert-butyl-4-hydroxyphenyl)methyl]-2,4,6-trimethylphenyl]methyl]-2,6-ditert-butylphenol Chemical compound CC1=C(CC=2C=C(C(O)=C(C=2)C(C)(C)C)C(C)(C)C)C(C)=C(CC=2C=C(C(O)=C(C=2)C(C)(C)C)C(C)(C)C)C(C)=C1CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 VSAWBBYYMBQKIK-UHFFFAOYSA-N 0.000 description 1
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- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
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- JRMUNVKIHCOMHV-UHFFFAOYSA-M tetrabutylammonium bromide Chemical compound [Br-].CCCC[N+](CCCC)(CCCC)CCCC JRMUNVKIHCOMHV-UHFFFAOYSA-M 0.000 description 1
- AYEKOFBPNLCAJY-UHFFFAOYSA-O thiamine pyrophosphate Chemical compound CC1=C(CCOP(O)(=O)OP(O)(O)=O)SC=[N+]1CC1=CN=C(C)N=C1N AYEKOFBPNLCAJY-UHFFFAOYSA-O 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- 150000003918 triazines Chemical class 0.000 description 1
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Images
Classifications
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- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/44—Polymerisation in the presence of compounding ingredients, e.g. plasticisers, dyestuffs, fillers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F265/00—Macromolecular compounds obtained by polymerising monomers on to polymers of unsaturated monocarboxylic acids or derivatives thereof as defined in group C08F20/00
- C08F265/02—Macromolecular compounds obtained by polymerising monomers on to polymers of unsaturated monocarboxylic acids or derivatives thereof as defined in group C08F20/00 on to polymers of acids, salts or anhydrides
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
- C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/18—Oxygen-containing compounds, e.g. metal carbonyls
- C08K3/20—Oxides; Hydroxides
- C08K3/22—Oxides; Hydroxides of metals
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking
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- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
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- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Materials For Photolithography (AREA)
- Polymerisation Methods In General (AREA)
- Epoxy Resins (AREA)
- Macromonomer-Based Addition Polymer (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Graft Or Block Polymers (AREA)
Abstract
Description
本発明に係る硬化性組成物は、光の照射により硬化されて用いられることが好ましい。本発明に係る硬化性組成物は、現像処理により硬化被膜を形成するために用いられることが好ましく、現像処理によりレジスト膜を形成するために用いられることがより好ましい。本発明に係る硬化性組成物は、現像型レジスト硬化性組成物であることが好ましい。本発明に係る硬化性組成物においては、レジスト膜を形成するために現像が行われなくてもよく、本発明に係る硬化性組成物は、非現像型レジスト硬化性組成物であってもよい。本発明に係る硬化性組成物は、ソルダーレジスト用硬化性組成物であることが好ましい。 [Curable composition]
The curable composition according to the present invention is preferably used after being cured by light irradiation. The curable composition according to the present invention is preferably used for forming a cured film by development processing, and more preferably used for forming a resist film by development processing. The curable composition according to the present invention is preferably a developable resist curable composition. In the curable composition according to the present invention, development may not be performed to form a resist film, and the curable composition according to the present invention may be a non-developable resist curable composition. . The curable composition according to the present invention is preferably a curable composition for solder resist.
(A)カルボキシル基含有樹脂は、カルボキシル基を有する重合性重合体であることが好ましい。カルボキシル基を有する重合性重合体は、重合性を有し、重合可能である。(A)カルボキシル基含有樹脂は、(メタ)アクリロイル基を3つ以上有するアクリルモノマー以外の樹脂であり、式(1)で表されるアクリルモノマー以外の樹脂である。(A)カルボキシル基含有樹脂は、1種のみが用いられてもよく、2種以上が併用されてもよい。 ((A) carboxyl group-containing resin)
(A) The carboxyl group-containing resin is preferably a polymerizable polymer having a carboxyl group. The polymerizable polymer having a carboxyl group has polymerizability and can be polymerized. (A) A carboxyl group-containing resin is a resin other than an acrylic monomer having three or more (meth) acryloyl groups, and is a resin other than an acrylic monomer represented by formula (1). (A) As for carboxyl group-containing resin, only 1 type may be used and 2 or more types may be used together.
(B)第1のアクリルモノマーは、(メタ)アクリロイル基を3つ以上有する。(B)第1のアクリルモノマーの(メタ)アクリロイル基の数は6以下であってもよく、5以下であってもよい。(B)第1のアクリルモノマーは、1種のみが用いられてもよく、2種以上が併用されてもよい。 ((B) a first acrylic monomer having three or more (meth) acryloyl groups and (C) a second acrylic monomer represented by formula (1))
(B) The first acrylic monomer has three or more (meth) acryloyl groups. (B) The number of (meth) acryloyl groups in the first acrylic monomer may be 6 or less, or 5 or less. (B) As for the 1st acrylic monomer, only 1 type may be used and 2 or more types may be used together.
上記硬化性組成物は、(D)光重合開始剤を含むので、光の照射により硬化性組成物を硬化させることができる。(D)光重合開始剤は、1種のみが用いられてもよく、2種以上が併用されてもよい。 ((D) Photopolymerization initiator)
Since the curable composition contains (D) a photopolymerization initiator, the curable composition can be cured by light irradiation. (D) As for a photoinitiator, only 1 type may be used and 2 or more types may be used together.
上記硬化性組成物が(E)酸化チタンを含むので、反射率が高いレジスト膜などの硬化物を形成できる。(E)酸化チタンを用いることによって、(E)酸化チタン以外の他の無機フィラーを用いた場合と比較して、反射率が高い硬化物を形成できる。(E)酸化チタンは、1種のみが用いられてもよく、2種以上が併用されてもよい。 ((E) Titanium oxide)
Since the curable composition contains (E) titanium oxide, a cured product such as a resist film having a high reflectance can be formed. By using (E) titanium oxide, it is possible to form a cured product having a high reflectance as compared with the case of using (E) an inorganic filler other than titanium oxide. (E) As for titanium oxide, only 1 type may be used and 2 or more types may be used together.
上記硬化性組成物は、(F)酸化チタンとは異なる無機フィラーを含んでいてもよい。(F)無機フィラーは、酸化チタンとは異なる無機フィラーである。(F)無機フィラーは1種のみが用いられてもよく、2種以上が併用されてもよい。 ((F) inorganic filler)
The said curable composition may contain the inorganic filler different from (F) titanium oxide. (F) The inorganic filler is an inorganic filler different from titanium oxide. (F) As for an inorganic filler, only 1 type may be used and 2 or more types may be used together.
硬化物の切り出し加工性を高めることなどを目的として、上記硬化性組成物は、(G)エポキシ化合物を含むことが好ましい。また、(G)エポキシ化合物の使用により、硬化性組成物の硬化性も良好になる。(G)エポキシ化合物は、(A)カルボキシル基含有樹脂以外のエポキシ化合物である。(G)エポキシ化合物は、1種のみが用いられてもよく、2種以上が併用されてもよい。 ((G) Epoxy compound)
The curable composition preferably contains (G) an epoxy compound for the purpose of improving the cutout processability of the cured product. Moreover, the curability of the curable composition is improved by using the (G) epoxy compound. (G) The epoxy compound is an epoxy compound other than (A) a carboxyl group-containing resin. (G) As for an epoxy compound, only 1 type may be used and 2 or more types may be used together.
上記硬化性組成物は、(H)溶剤を含んでいてもよい。(H)溶剤は、1種のみが用いられてもよく、2種以上が併用されてもよい。 ((H) solvent)
The curable composition may contain (H) a solvent. (H) As for a solvent, only 1 type may be used and 2 or more types may be used together.
硬化物の高温下での変色をより一層抑える観点からは、上記硬化性組成物は、(I)酸化防止剤を含んでいてもよい。(I)酸化防止剤は、ルイス塩基性部位を有することが好ましい。硬化物の高温下での変色をより一層抑える観点からは、(I)酸化防止剤は、フェノール系酸化防止剤、リン系酸化防止剤又はアミン系酸化防止剤であることが好ましく、フェノール系酸化防止剤であることがより好ましい。 ((I) Antioxidant)
From the viewpoint of further suppressing discoloration of the cured product at a high temperature, the curable composition may contain (I) an antioxidant. (I) The antioxidant preferably has a Lewis basic moiety. From the viewpoint of further suppressing discoloration of the cured product under high temperature, (I) the antioxidant is preferably a phenolic antioxidant, a phosphorus antioxidant, or an amine antioxidant. More preferably, it is an inhibitor.
上記硬化性組成物は、着色剤、充填剤、消泡剤、硬化剤、硬化促進剤、離型剤、表面処理剤、難燃剤、粘度調節剤、分散剤、分散助剤、表面改質剤、可塑剤、抗菌剤、防黴剤、レベリング剤、安定剤、カップリング剤、タレ防止剤又は蛍光体等を含んでいてもよい。 (Other ingredients)
The curable composition includes a colorant, a filler, an antifoaming agent, a curing agent, a curing accelerator, a release agent, a surface treatment agent, a flame retardant, a viscosity modifier, a dispersant, a dispersion aid, and a surface modifier. , Plasticizers, antibacterial agents, antifungal agents, leveling agents, stabilizers, coupling agents, anti-sagging agents or phosphors may be included.
本発明に係る電子部品の製造方法は、電子部品本体の表面上に、上記硬化性組成物を塗布して、組成物層を形成する工程と、上記組成物層に光を照射して、硬化被膜形成する工程とを備える。本発明に係る電子部品の製造方法では、上記硬化被膜を形成するために、上記組成物層を現像してもよい。上記組成物層がレジスト層であることが好ましく、上記硬化被膜がレジスト膜であることが好ましい。 [Electronic component and method of manufacturing electronic component]
The method of manufacturing an electronic component according to the present invention includes a step of coating the curable composition on the surface of the electronic component body to form a composition layer, and irradiating the composition layer with light to cure. Forming a film. In the method for manufacturing an electronic component according to the present invention, the composition layer may be developed in order to form the cured film. The composition layer is preferably a resist layer, and the cured film is preferably a resist film.
(合成例1)
温度計、攪拌機、滴下ロート及び還流冷却器を備えたフラスコに、溶剤であるエチルカルビトールアセテートと、触媒であるアゾビスイソブチロニトリルとを入れ、窒素雰囲気下で80℃に加熱し、メタクリル酸とメチルメタクリレートとを30:70のモル比で混合したモノマーを2時間かけて滴下した。滴下後、1時間攪拌し、温度を120℃に上げた。その後、冷却した。得られた樹脂の全てのモノマー単位の総量のモル量に対するモル比が10となる量のグリシジルアクリレートを加え、触媒として臭化テトラブチルアンモニウムを用い100℃で30時間加熱して、グリシジルアクリレートとカルボキシル基とを付加反応させた。冷却後、フラスコから取り出して、固形分酸価60mgKOH/g、重量平均分子量15000、二重結合当量1000のカルボキシル基含有樹脂を50重量%(不揮発分)含む溶液を得た。以下、この溶液をアクリルポリマー1と呼ぶ。 1) Acrylic polymer 1 (carboxyl group-containing resin,
(Synthesis Example 1)
A flask equipped with a thermometer, a stirrer, a dropping funnel and a reflux condenser is charged with ethyl carbitol acetate as a solvent and azobisisobutyronitrile as a catalyst, heated to 80 ° C. in a nitrogen atmosphere, and methacrylic. A monomer in which acid and methyl methacrylate were mixed at a molar ratio of 30:70 was added dropwise over 2 hours. After dropping, the mixture was stirred for 1 hour, and the temperature was raised to 120 ° C. Then it was cooled. Glycidyl acrylate was added in such an amount that the molar ratio of the total amount of all the monomer units of the obtained resin was 10 and then heated at 100 ° C. for 30 hours using tetrabutylammonium bromide as a catalyst. The group was subjected to an addition reaction. After cooling, it was taken out from the flask to obtain a solution containing 50 wt% (nonvolatile content) of a carboxyl group-containing resin having a solid content acid value of 60 mg KOH / g, a weight average molecular weight of 15000, and a double bond equivalent of 1000. Hereinafter, this solution is referred to as
、新中村化学工業社製) 4) A-200 (second acrylic monomer, polyethylene glycol diacrylate, manufactured by Shin-Nakamura Chemical Co., Ltd.)
合成例1で得られたアクリルポリマー1を15重量部と、DPHA(第1のアクリルモノマー、ジペンタエリスリトールヘキサアクリレート、ダイセル・オルネクス社製)5重量部と、A-200(第2のアクリルモノマー、ポリエチレングリコールジアクリレート、新中村化学工業社製)1重量部と、157S(ビスフェノールAノボラック型エポキシ樹脂、三菱化学社製、25℃で固体)8重量部と、TPO(光ラジカル発生剤である光重合開始剤、BASFジャパン社製)2重量部と、CR-50(酸化チタン、石原産業社製)40重量部と、FH105(タルク、富士タルク社製)10重量部と、KS-7710(コンパウンド型シリコーンオイル、ポリジメチルシロキサン、信越化学工業社製)1重量部と、ジプロピレングリコールモノメチルエーテル(MFDG、溶剤、日本乳化剤社製)30重量部とを配合し、混合機(シンキー社製「練太郎ARE-310」)にて3分間混合した後、3本ロールにて混合し、混合物を得た。その後、ARE-310を用いて、得られた混合物を3分間脱泡することにより、硬化性組成物であるレジスト材料を得た。 Example 1
15 parts by weight of the
使用した材料の種類及び配合量を下記の表1,2に示すように変更したこと以外は、実施例1と同様にして、硬化性組成物であるレジスト材料を得た。 (Examples 2 to 15 and Comparative Examples 1 to 5)
A resist material, which is a curable composition, was obtained in the same manner as in Example 1 except that the type and blending amount of the material used were changed as shown in Tables 1 and 2 below.
(1)測定サンプルの作製
80mm×90mm、厚さ0.8mmのFR-4基板を用意した。この基板上に、スクリーン印刷法により、100メッシュのポリエステルバイアス製の版を用いて、ベタパターンでレジスト材料を印刷した。印刷後、80℃のオーブン内で20分間乾燥させ、レジスト材料層を基板上に形成した。次に、所定のパターンを有するフォトマスクを介して、紫外線照射装置を用い、レジスト材料層に波長365nmの紫外線を、照射エネルギーが400mJ/cm2となるように100mW/cm2の紫外線照度で4秒間照射した。その後、未露光部のレジスト材料層を除去してパターンを形成するために、炭酸ナトリウムの1重量%水溶液(25℃)にレジスト材料層を30秒間浸漬して現像し、基板上にレジスト膜を形成した。その後、150℃のオーブン内で1時間加熱しレジスト膜を後硬化させることにより、測定サンプルとしてのレジスト膜を得た。得られたレジスト膜の厚みは20μmであった。 (Evaluation)
(1) Preparation of measurement sample An FR-4 substrate having a size of 80 mm × 90 mm and a thickness of 0.8 mm was prepared. On this substrate, a resist material was printed with a solid pattern using a 100 mesh polyester bias plate by a screen printing method. After printing, it was dried in an oven at 80 ° C. for 20 minutes to form a resist material layer on the substrate. Next, using a UV irradiation device through a photomask having a predetermined pattern, UV light having a wavelength of 365 nm is applied to the resist material layer at a UV intensity of 100 mW / cm 2 so that the irradiation energy is 400 mJ / cm 2. Irradiated for 2 seconds. Thereafter, in order to remove the resist material layer in the unexposed area and form a pattern, the resist material layer is immersed in a 1 wt% aqueous solution of sodium carbonate (25 ° C.) for 30 seconds and developed, and a resist film is formed on the substrate. Formed. Thereafter, the resist film was post-cured by heating in an oven at 150 ° C. for 1 hour to obtain a resist film as a measurement sample. The thickness of the obtained resist film was 20 μm.
測定サンプルを加熱オーブン内に入れ、270℃で5分間加熱した。 (2) Heat resistance and heat yellowing The measurement sample was put in a heating oven and heated at 270 ° C. for 5 minutes.
○:ΔE*abが0.5以下
△:ΔE*abが0.5を超え、1以下
×:ΔE*abが1を超える [Criteria for heat resistance]
○: ΔE * ab is 0.5 or less Δ: ΔE * ab exceeds 0.5 and 1 or less ×: ΔE * ab exceeds 1
○○:b*の変化量が1.0下
○:b*が1.0を超え、1.5以下
△:b*が1.5を超え、2.0以下
×:b*が2.0を超える [Judgment criteria for yellowing resistance]
◯: Change amount of b * is below 1.0 ○: b * exceeds 1.0 and 1.5 or less Δ: b * exceeds 1.5 and 2.0 or less ×: b * is 2. Over zero
測定サンプルを加熱オーブン内に入れ、270℃で5分間加熱した。270℃で5分間加熱した後の測定サンプルにおいて、レジスト膜におけるクラックの発生状態を確認した。また、測定サンプルを加熱オーブン内に入れ、270℃で10分間加熱した。270℃で10分間加熱した後の測定サンプルにおいて、レジスト膜におけるクラックの発生状態を確認した。 (3) Crack prevention property The measurement sample was put in a heating oven and heated at 270 ° C for 5 minutes. In the measurement sample after heating at 270 ° C. for 5 minutes, the occurrence of cracks in the resist film was confirmed. Further, the measurement sample was put in a heating oven and heated at 270 ° C. for 10 minutes. In the measurement sample after heating at 270 ° C. for 10 minutes, the occurrence of cracks in the resist film was confirmed.
○○:クラックが発生していない
○:最大長さが500μm未満のわずかなクラックが発生している
△:最大長さが500μm以上、1000μm未満のクラックが発生している
×:最大長さが1000μm以上のクラックが発生している [Criteria for crack prevention]
◯: No crack is generated. ○: A slight crack having a maximum length of less than 500 μm is generated. Δ: A crack having a maximum length of 500 μm or more and less than 1000 μm is generated. Cracks of 1000 μm or more have occurred
測定サンプルの未露光部のレジスト残渣、即ちレジスト材料層が除去され、パターン形成された銅表面に残っているレジスト残渣を観察した。この残渣から、現像性を以下の基準で判定した。 (4) Developability The resist residue in the unexposed portion of the measurement sample, that is, the resist material layer was removed, and the resist residue remaining on the patterned copper surface was observed. From this residue, developability was determined according to the following criteria.
○○:銅表面にレジスト材料層が全く残っておらず、銅色がはっきりと見える
○:銅表面にごくわずかにレジスト材料層が残っているが、銅色がはっきりと見える
△:銅表面にわずかにレジスト材料層が残っており、銅色が白くかすんでいる
×:銅表面にレジスト材料層が残っており、銅色が見えない [Development criteria]
○○: There is no resist material layer on the copper surface, and the copper color is clearly visible ○: The resist material layer is slightly left on the copper surface, but the copper color is clearly visible △: On the copper surface The resist material layer remains slightly and the copper color is white and hazy. ×: The resist material layer remains on the copper surface and the copper color cannot be seen.
2,2X…レジスト膜
11…塗布対象部材(電子部品本体)
11A…基板
11B…電極
12,12X…レジスト層
13…マスク DESCRIPTION OF
11A ...
Claims (7)
- カルボキシル基含有樹脂と、
(メタ)アクリロイル基を3つ以上有する第1のアクリルモノマーと、
下記式(1)で表される第2のアクリルモノマーと、
光重合開始剤と、
酸化チタンとを含む、硬化性組成物。
A first acrylic monomer having three or more (meth) acryloyl groups;
A second acrylic monomer represented by the following formula (1);
A photopolymerization initiator;
A curable composition comprising titanium oxide.
- エポキシ化合物を含む、請求項1に記載の硬化性組成物。 The curable composition according to claim 1, comprising an epoxy compound.
- 前記エポキシ化合物が、25℃で固体状である、請求項2に記載の硬化性組成物。 The curable composition according to claim 2, wherein the epoxy compound is solid at 25 ° C.
- 前記第1のアクリルモノマーの含有量の前記第2のアクリルモノマーの含有量に対する比が、重量基準で、0.05以上、20以下である、請求項1~3のいずれか1項に記載の硬化性組成物。 The ratio of the content of the first acrylic monomer to the content of the second acrylic monomer is 0.05 or more and 20 or less on a weight basis, according to any one of claims 1 to 3. Curable composition.
- 現像処理によりレジスト膜を形成するために用いられる現像型レジスト硬化性組成物である、請求項1~4のいずれか1項に記載の硬化性組成物。 The curable composition according to any one of claims 1 to 4, which is a development-type resist curable composition used for forming a resist film by a development treatment.
- 電子部品本体の表面上に、請求項1~5のいずれか1項に記載の硬化性組成物を塗布して、組成物層を形成する工程と、
前記組成物層に光を照射して、硬化被膜を形成する工程とを備え、
前記硬化被膜を形成するために、前記組成物層を現像する、電子部品の製造方法。 Applying the curable composition according to any one of claims 1 to 5 on the surface of the electronic component main body to form a composition layer;
Irradiating the composition layer with light to form a cured film,
The manufacturing method of the electronic component which develops the said composition layer in order to form the said cured film. - 前記組成物層がレジスト層であり、前記硬化被膜がレジスト膜である、請求項6に記載の電子部品の製造方法。 The method for manufacturing an electronic component according to claim 6, wherein the composition layer is a resist layer and the cured film is a resist film.
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JP2019178270A (en) * | 2018-03-30 | 2019-10-17 | 太陽インキ製造株式会社 | Curable composition, cured product of the same and electronic component having cured product |
JP2019178260A (en) * | 2018-03-30 | 2019-10-17 | 太陽インキ製造株式会社 | Curable composition for inkjet printing, cured product of the same, and electronic component having cured product |
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JPWO2019017047A1 (en) * | 2017-07-21 | 2020-05-28 | 積水化学工業株式会社 | Curable composition, electronic component, and method for manufacturing electronic component |
JP2019091854A (en) * | 2017-11-16 | 2019-06-13 | 積水化学工業株式会社 | Non-development type resist photocurable composition and method for manufacturing electronic component |
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WO2019189186A1 (en) * | 2018-03-30 | 2019-10-03 | 太陽インキ製造株式会社 | Curable composition for inkjet printing, cured product of same, and electronic component having said cured product |
JP2019178270A (en) * | 2018-03-30 | 2019-10-17 | 太陽インキ製造株式会社 | Curable composition, cured product of the same and electronic component having cured product |
JP2019178260A (en) * | 2018-03-30 | 2019-10-17 | 太陽インキ製造株式会社 | Curable composition for inkjet printing, cured product of the same, and electronic component having cured product |
JP7362992B2 (en) | 2018-03-30 | 2023-10-18 | 太陽ホールディングス株式会社 | Curable composition, cured product thereof, and electronic components containing the same |
JP7362991B2 (en) | 2018-03-30 | 2023-10-18 | 太陽ホールディングス株式会社 | Curable composition for inkjet printing, cured product thereof, and electronic component having cured product thereof |
Also Published As
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KR102639455B1 (en) | 2024-02-23 |
KR20180087137A (en) | 2018-08-01 |
JP6145232B1 (en) | 2017-06-07 |
TWI724068B (en) | 2021-04-11 |
JPWO2017090680A1 (en) | 2017-11-24 |
CN107531815B (en) | 2021-05-11 |
JP2017141472A (en) | 2017-08-17 |
TW201734059A (en) | 2017-10-01 |
CN107531815A (en) | 2018-01-02 |
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