WO2017075733A1 - 法兰和镜片一体式射频激光器 - Google Patents

法兰和镜片一体式射频激光器 Download PDF

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Publication number
WO2017075733A1
WO2017075733A1 PCT/CN2015/000757 CN2015000757W WO2017075733A1 WO 2017075733 A1 WO2017075733 A1 WO 2017075733A1 CN 2015000757 W CN2015000757 W CN 2015000757W WO 2017075733 A1 WO2017075733 A1 WO 2017075733A1
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Prior art keywords
flange
laser
lens
integrated
integral
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PCT/CN2015/000757
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English (en)
French (fr)
Inventor
徐海军
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徐海军
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Priority to PCT/CN2015/000757 priority Critical patent/WO2017075733A1/zh
Publication of WO2017075733A1 publication Critical patent/WO2017075733A1/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof

Definitions

  • the invention relates to a radio frequency laser, in particular to a flanged and lens integrated RF laser.
  • the present invention provides a flange and lens integrated RF laser.
  • a flange and lens integrated RF laser is provided, that is, the flange and the lens are integrally formed.
  • the flange and lens integrated RF lasers are flange- and lens-integrated.
  • the flange and lens integrated RF lasers are optical mirrors fabricated on the inner end faces of the front and rear vacuum sealing flanges of the RF laser.
  • the flange and lens integrated RF laser, integral flange and lens have optical angle adjustment.
  • the flange and lens integrated RF laser, integral flange and lens means that an optical mirror is machined directly on the inside of a unitary flange.
  • the integral flange referred to in the present invention is a single piece of metal machined or a few pieces of metal welded to form an integral rework.
  • the integral flange and the adjustment shaft of the lens have a top post, and the contact end of the top post and the top wire is a spherical surface.
  • the integral flange and the adjustment shaft of the lens are distributed with an adjustment isolation groove.
  • the integral isolation flange of the flange and the lens is corresponding at both end faces thereof, the adjustment groove of the outer end surface is deep, and the adjustment isolation groove of the inner end surface is shallow.
  • the intermediate flange and the two adjustment isolation grooves of the lens are adjustable regions, and the adjustable region has a width of between 1 and 3 mm.
  • the RF laser of the present invention utilizes an integral flange and lens.
  • the advantages of the flange and lens integrated RF laser are as follows: the lens is simple to adjust, the precision is high, the installation is convenient, the cooling is easy, and the photoelectric conversion efficiency is high.
  • FIG. 1 shows a cross-sectional view of a flange and lens integrated RF laser in accordance with an exemplary embodiment of the present invention
  • FIG. 2 shows a cross-sectional view of an integral full-reverse flange and total reflection mirror in accordance with an exemplary embodiment of the present invention.
  • FIG. 3 shows a cross-sectional view of an integral half-reverse flange and a half mirror in accordance with an exemplary embodiment of the present invention.
  • the flange and lens integrated RF laser is mainly composed of a laser housing 6 , a positive electrode plate 7 , a negative electrode plate 20 , a plasma region 21 , an RF electrode 8 , an integrated full reverse flange 12 and a total reflection mirror 22 .
  • the integral half-reverse flange 26 and the half mirror 19 are composed.
  • a total reflection mirror 22 is machined at its center position, and an adjustment isolation groove 9 is formed on the outer side of the total reflection mirror 22, and the periphery of the isolation spacer 9 is adjusted.
  • the sealing groove of the full reverse flange 12 and the laser housing 6 (see FIG. 1) is processed; on the right end surface of the full reverse flange 12, the regulating isolation groove 11 is processed corresponding to the adjusting isolation groove 9, and the isolation groove 11 is adjusted.
  • the groove depth is larger than the adjustment isolation groove 9, and finally the adjustable area 10 is formed.
  • the width of the adjustable area 10 is between 1 and 3 mm; the circle of the full reverse flange 12 On the circumferential surface, a hole for mounting the top post 24 is machined, and a threaded hole for adjusting the top wire 25 is machined at the same position, and one end of the top post 24 is processed into a spherical surface 23.
  • the embedded mirror block 18 is welded to the center hole of the right end surface of the half-reverse flange 26 at the center position of the right end surface of the half-reverse flange 26, and the welding position is shown as the welding point 3, thereby forming deformation isolation.
  • the groove 17 is formed with a half mirror 19 on the embedded mirror block 18, and an indium sealing groove 4 and an indium storage groove 5 are formed on the outer periphery of the right end surface of the half reverse flange 26, and the left end surface of the half reverse flange 26 is formed.
  • the adjustment isolation groove 2 is processed, the groove of the adjustment isolation groove 2 is larger than the adjustment isolation groove 17, and finally the adjustable area 16 is formed, and the width of the adjustable area 16 is between 1 and 3 mm;
  • a hole for mounting the top post 24 is machined, and a threaded hole for adjusting the top wire 25 is machined at the same position; and an output window 1 is mounted at the center of the left end surface of the half-reverse flange 26.
  • One end of the top post 24 is machined into a spherical surface 23.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

一种法兰和镜片一体式射频激光器，包括一体式的法兰和镜片、激光器外壳(6)、激光腔、正负极板、射频单元、控制系统；法兰和镜片一体式射频激光器整体采用前中后结构，激光器外壳是激光器的基础，它位于中部，全反射镜片和全反法兰位于激光器的后部，半反射镜片和半反法兰位于前部，其他部分均附着于激光器壳体上。

Description

法兰和镜片一体式射频激光器 技术领域
本发明涉及射频激光器，具体涉及法兰和镜片一体式的射频激光器。
背景技术
目前市场上存在的传统的射频激光器都是采用法兰和镜片分体结构。
传统结构的射频激光器主要存在以下缺陷：
(1)镜片调节困难，调节精度低，
(2)镜片冷却困难，
(3)密封困难，安装麻烦。
发明内容
鉴于上述背景情况，本发明提供一种法兰和镜片一体式射频激光器。
根据本发明的一方面，提供一种法兰和镜片一体式射频激光器，即将法兰和镜片做成一个整体。
优选地，法兰和镜片一体式射频激光器，采用法兰和镜片一体式结构。
优选地，法兰和镜片一体式射频激光器，是在射频激光器的前后真空密封法兰的内端面上加工出光学反射镜。
优选地，法兰和镜片一体式射频激光器，一体式的法兰和镜片具有光学角度调节功能。
优选地，法兰和镜片一体式射频激光器，一体式的法兰和镜片是指直接在一块整体的法兰内侧加工有光学反射镜。本发明所指的整体法兰是一整块金属加工的或几块金属焊接后形成一个整体再加工的。
优选地，一体式的法兰和镜片的调节轴上有顶柱，顶柱与顶丝的接触端是球面。
优选地，一体式的法兰和镜片的调节轴周围分布有调节隔离槽。
优选地，一体式的法兰和镜片的调节隔离槽在其两端面是相对应的，外端面的调节隔离槽深，内端面的调节隔离槽浅。
优选地，一体式的法兰和镜片的两调节隔离槽中间是可调节区，可调节区的宽度在1到3毫米之间。
优选地，本发明的射频激光器采用了一体式的法兰和镜片。
与传统的射频激光器相比，法兰和镜片一体式射频激光器的优点如下：镜片调节简单，精度高，安装方便，易冷却，光电转换效率高。
附图说明
结合以下附图来详细描述本发明的示例实施例，
图1示出了根据本发明的示例实施例的法兰和镜片一体式射频激光器的剖视图；
图2示出了根据本发明的示例实施例的一体的全反法兰和全反射镜的剖视图。
图3示出了根据本发明的示例实施例的一体的半反法兰和半反射镜的剖视图。
附图中，相同或相似的部件由相同或相似的参考标号表示。
具体实施方式
以下结合附图来详细描述本发明的示例实施例的法兰和镜片一体式射频激光器。
如图1所示，法兰和镜片一体式射频激光器主要由激光器壳体6、正极板7、负极板20、等离子区21、射频电极8、一体的全反法兰12和全反射镜22、一体的半反法兰26和半反射镜19组成。
如图2所示，在全反法兰12的左端面上，在其中心位置加工出全反射镜22，在全反射镜22的外侧加工出调节隔离槽9，在调节隔离槽9的外围再加工出全反法兰12与激光器壳体6(见图1)的密封槽；在全反法兰12的右端面上，相对应于调节隔离槽9加工出调节隔离槽11，调节隔离槽11槽深大于调节隔离槽9，最后形成可调节区10，可调节区10的宽度在1到3毫米之间；在全反法兰12的圆 周面上，加工出安装顶柱24的孔，并在相同位置加工出调节顶丝25用的螺纹孔，顶柱24的一端加工成球面23。
如图3所示，在半反法兰26的右端面的中心位置将嵌入式镜块18焊接到半反法兰26右端面的中心孔中，焊接位置如图焊接点3，从而形成变形隔离槽17，在嵌入式镜块18上加工出半反射镜19，在半反法兰26右端面的外围加工出铟密封槽4和储铟槽5，在半反法兰26的左端面，相对应于调节隔离槽17加工出调节隔离槽2，调节隔离槽2槽深大于调节隔离槽17，最后形成可调节区16，可调节区16的宽度在1到3毫米之间；，在半反法兰26的圆周面上，加工出安装顶柱24的孔，并在相同位置加工出调节顶丝25用的螺纹孔；在半反法兰26的左端面中心位置安装输出窗1。顶柱24的一端加工成球面23。
以上对本发明的示例实施例的详细描述是为了说明和描述的目的而提供。不是为了穷尽或将本实用新型限制为所公开的精确形式。显然，许多变型和改变对本领域技术人员而言是显而易见的。实施例的选择和描述是为了最佳地说明本发明的原理及其实际应用，从而使本领域其他技术人员能够理解本发明的各种实施例和适于特定使用预期的各种变型。本发明的实施例可以省略上述技术特征中的一些技术特征，仅解决现有技术中存在的部分技术问题。而且，所公开的技术特征可以进行任意组合。本发明的范围由所附权利要求及其等价物来限定，本领域技术其他人员可以对所附权利要求中所公开的技术方案进行各种变型和组合。

Claims (9)

  1. 一种法兰和镜片一体式射频激光器，所述法兰和镜片一体式射频激光器整体采用前中后结构，激光器外壳是激光器的基础，位于中部，全反射镜片和全反法兰位于激光器的后部，半反射镜片和半反法兰位于前部；一体式的法兰和镜片是指直接在一块整体的法兰内侧加工有光学反射镜。
  2. 根据权利要求1所述的法兰和镜片一体式射频激光器，其特征在于：射频激光器端面的真空密封法兰和镜片采用的是一体式结构。
  3. 根据权利要求1所述的法兰和镜片一体式射频激光器，其特征在于：在射频激光器的前后真空密封法兰的内端面上加工出光学反射镜。
  4. 根据权利要求1所述的法兰和镜片一体式射频激光器，其特征在于：一体式的法兰和镜片具有光学角度调节功能。
  5. 根据权利要求1所述的法兰和镜片一体式射频激光器，其特征在于：一体式的法兰和镜片的调节轴上有顶柱，顶柱与顶丝的接触端是球面。
  6. 根据权利要求1所述的法兰和镜片一体式射频激光器，其特征在于：一体式的法兰和镜片的调节轴周围分布有调节隔离槽。
  7. 根据权利要求1所述的法兰和镜片一体式射频激光器，其特征在于：一体式的法兰和镜片的调节隔离槽在其两端面是相对应的，外端面的调节隔离槽深，内端面的调节隔离槽浅。
  8. 根据权利要求1所述的法兰和镜片一体式射频激光器，其特征在于：一体式的法兰和镜片的两调节隔离槽中间是可调节区，可调节区的宽度在1到3毫米。
  9. 根据权利要求1所述的法兰和镜片一体式射频激光器，其特征在于：该射频激光器采用了一体式的法兰和镜片。
PCT/CN2015/000757 2015-11-03 2015-11-03 法兰和镜片一体式射频激光器 WO2017075733A1 (zh)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5048050A (en) * 1988-01-08 1991-09-10 Ricoh Company, Ltd. Semiconductor laser apparatus
CN1657976A (zh) * 2004-02-16 2005-08-24 柯尼卡美能达精密光学株式会社 光学元件和光接收装置
CN201171140Y (zh) * 2008-02-28 2008-12-24 武汉金运激光设备制造有限公司 激光器
CN102576553A (zh) * 2009-09-30 2012-07-11 柯尼卡美能达精密光学株式会社 物镜以及光拾取装置
CN103764336A (zh) * 2011-09-05 2014-04-30 奥迪克激光应用技术股份有限公司 具有设有谐振管的气体激光器和可单独调节的偏转装置的标记仪器

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5048050A (en) * 1988-01-08 1991-09-10 Ricoh Company, Ltd. Semiconductor laser apparatus
CN1657976A (zh) * 2004-02-16 2005-08-24 柯尼卡美能达精密光学株式会社 光学元件和光接收装置
CN201171140Y (zh) * 2008-02-28 2008-12-24 武汉金运激光设备制造有限公司 激光器
CN102576553A (zh) * 2009-09-30 2012-07-11 柯尼卡美能达精密光学株式会社 物镜以及光拾取装置
CN103764336A (zh) * 2011-09-05 2014-04-30 奥迪克激光应用技术股份有限公司 具有设有谐振管的气体激光器和可单独调节的偏转装置的标记仪器

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