WO2017068645A1 - Component mounting method and component mounting machine - Google Patents

Component mounting method and component mounting machine Download PDF

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Publication number
WO2017068645A1
WO2017068645A1 PCT/JP2015/079558 JP2015079558W WO2017068645A1 WO 2017068645 A1 WO2017068645 A1 WO 2017068645A1 JP 2015079558 W JP2015079558 W JP 2015079558W WO 2017068645 A1 WO2017068645 A1 WO 2017068645A1
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Prior art keywords
component mounting
component
substrate
height
support
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PCT/JP2015/079558
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French (fr)
Japanese (ja)
Inventor
茂人 大山
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富士機械製造株式会社
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Priority to JP2017546311A priority Critical patent/JP6777644B2/en
Priority to PCT/JP2015/079558 priority patent/WO2017068645A1/en
Publication of WO2017068645A1 publication Critical patent/WO2017068645A1/en

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04Mounting of components, e.g. of leadless components

Definitions

  • the present invention relates to a component mounting method and a component mounting machine for mounting a component on a substrate.
  • Patent Documents 1 and 2 listed below describe a component mounting machine that lowers a component holding device capable of holding and detaching a component on a substrate held by a substrate support device and mounts the component.
  • the substrate support device has a support portion having a plurality of suction ports provided on the upper surface, as shown in Patent Documents 3 and 4 below, as well as a configuration supporting from the lower surface.
  • JP 2002-185193 A International Publication No. WO2015 / 107354A1 Pamphlet JP 2003-142896 A Japanese Patent Laid-Open No. 7-15191
  • the component mounting machine equipped with the vacuum back-up type board support device as described above can flatten and hold the board firmly by adsorbing the board even if the board is warped. is there.
  • This invention is made
  • a component mounting method of the present invention includes (A) a component mounting device that includes a component holding device that holds and detaches a component, and lowers the component holding device to mount the component on the board. (B) A substrate support that supports a substrate by having a support portion provided with a plurality of suction ports on the upper surface and adsorbing the lower surface of the substrate to the support surface that is the upper surface of the support portion using the suction ports.
  • a component mounting method for mounting a component on a board, and measuring the height of a support surface before performing a component mounting operation, which is a task of mounting components on a plurality of boards The component holding device is lowered based on the measured height of the support surface during the component mounting operation on the plurality of substrates.
  • the component mounting machine of the present invention has (A) a component holding device that holds and detaches a component, and lowers the component holding device to mount the component on the board, and (B) on the upper surface.
  • a substrate support device having a support portion provided with a plurality of suction ports, and supporting the substrate by adsorbing the lower surface of the substrate to the support surface which is the upper surface of the support portion using the suction ports; and
  • the substrate support device sucks and holds the substrate
  • the height on the substrate can be estimated from the height of the support surface of the substrate support device.
  • the height of the substrate is measured for each substrate, it is possible to detect a suction failure based on the difference between the height of the substrate and the height of the support surface.
  • FIG. 1 It is a perspective view of the component mounting machine which is an Example of this invention. It is a side view of the component mounting machine which is an Example of this invention. It is a perspective view which expands and shows the board
  • FIG. 1 and 2 show a component mounting machine 10 that is an embodiment of the present invention.
  • FIG. 1 is a perspective view of the component mounting machine 10, and FIG. 2 is a side view of the component mounting machine 10.
  • substrate arrange
  • the component mounting machine 10 includes a base 20, a beam 22 fixedly provided on the base 20, a board conveyor device 24 that is a board transfer device disposed on the base, and a base on the front side of the component mounting machine 10.
  • a plurality of component feeders 26 that are replaceably attached to 20, and a component mounting device that holds components supplied from any of the plurality of component feeders 26 and separates the components for mounting on the substrate S
  • the apparatus includes a mounting head 28, a head moving device 30 that is disposed on the beam 22 and moves the component mounting head 28, and a control device 32 that controls itself.
  • the direction in which the substrate is conveyed by the substrate conveyor device 24 is the left-right direction (X direction)
  • the direction perpendicular to the left-right direction on the horizontal plane is the front-rear direction (Y direction).
  • the direction perpendicular to the front-rear direction is referred to as the up-down direction (Z direction).
  • FIG. 3 shows a perspective view of the substrate conveyor device 24.
  • FIGS. 3A and 3B are perspective views from the viewpoints opposite to each other.
  • the substrate conveyor device 24 has a pair of conveyors 40, and the substrate S placed on the pair of conveyor belts 42 by rotating each conveyor belt 42 of the pair of conveyors 40 by a transport motor 44. Is configured to be conveyed in the left-right direction. Although a detailed description is omitted, one of the pair of conveyors 40 is moved in the front-rear direction by an electromagnetic motor 46 so that it can accommodate substrates S of various widths.
  • a substrate support device 50 for fixing and supporting the substrate S is provided between the pair of conveyors 42 of the substrate conveyor device 24.
  • the substrate support device 50 is a vacuum backup type support device.
  • the back-up plate 54 as a support portion provided with a plurality of suction ports 52 on the upper surface, a negative pressure source (not shown), and the back-up plate 54 are moved up and down.
  • a support lifting device 56 to be moved.
  • the substrate supporting device 50 is supplied with negative pressure from the negative pressure source to the suction port 52 of the backup plate 54, and adsorbs and supports the substrate S.
  • the support unit lifting device 56 is a state in which the substrate S is sucked and supported on the backup plate 54, and more specifically, the backup plate 54 is moved to a height at which component mounting work is performed. It raises until it contacts the collar part 58 provided above each of 40.
  • the thickness t of the substrate S is registered in the control device 32, and the amount of increase L of the backup plate 54 from the thickness t of the substrate S until the substrate S comes into contact with the flange portion 58 is calculated, and the increase Based on the amount L, the support lifting device 56 is controlled by the control device 32.
  • the head moving device 30 is a so-called XY type moving device, and includes a head mounting body 60 to which the component mounting head 28 is detachably mounted, an X direction moving mechanism for moving the head mounting body 60 in the X direction, and the beam 22.
  • the supported X direction moving mechanism includes a Y direction moving mechanism for moving the component mounting head 28 over the component feeder 26 and the substrate S.
  • a camera 62 for imaging the surface of the substrate S and a laser sensor 64 as a height sensor for measuring the height are fixed to the lower part of the head attachment body 60. ing.
  • the component mounting head 28 is a so-called index type mounting head. That is, each of the component mounting heads 28 has eight suction nozzles 70 that function as component holding devices and suck and hold the components at the lower end by supplying negative pressure, and these are held by the revolver 72. ing.
  • the revolver 72 rotates intermittently, and one suction nozzle 70 located at a specific position can be moved up and down by the nozzle lifting device, that is, can be moved in the vertical direction.
  • the suction nozzle 70 located at a specific position is lowered, negative pressure is supplied to hold the component, and when the negative pressure supply is cut off, the suction holding component is removed.
  • each of the eight suction nozzles 70 can be rotated around its own axis by the nozzle rotation mechanism, that is, around the axis, and the component mounting head 28 is rotated by each suction nozzle 70. It is possible to change and adjust the rotational position of the held component.
  • the device for lifting and lowering the holding device (holding device lifting device) is provided in the component mounting head 28, but is provided in the component mounting head 28.
  • the head moving device 30 may be provided.
  • Each of the plurality of component feeders 26 is set with a reel on which a component holding tape (a plurality of components are held on the tape, also called “component taping”) is wound.
  • a component holding tape a plurality of components are held on the tape, also called “component taping”
  • Each of the feeders 26 supplies parts one by one sequentially at a predetermined part supply site by intermittently feeding out the part holding tape.
  • the replenishment of the parts may be performed by splicing the part taping while exchanging the reels (splicing), or may be performed by exchanging the reels together with the part feeder 26.
  • the component mounting machine 10 can also be attached with a so-called tray-type component supply device instead of the plurality of component feeders 26.
  • the laser sensor 64 is moved by the head moving device 30, and the nine measurement points AI (see FIG. 4) set on the support surface of the backup plate 54 are measured.
  • the measured heights of the nine measurement points AI on the support surface are used for controlling the descending amount of the suction nozzle 70.
  • (II) Support surface inclination determination As described above, after the heights of the nine measurement points AI are measured, the heights of two of the nine measurement points are compared. When the difference is larger than the set value, the support surface may be greatly inclined, so that the component mounting operation is not started and a warning is issued. Specifically, first, the heights of two adjacent objects are obtained from nine measurement points AI, respectively, and from the set value determined based on the distance between the two measurement points and the inclination from the horizontal plane. If there is a large part, the component mounting operation is not started and a warning is issued. Also, when the difference between the highest and lowest of the nine measurement points AI is larger than the set value, the component mounting operation is not started and a warning is issued.
  • the substrate S to be used for the operation is carried in from the upstream side by the substrate conveyor device 24 to a predetermined position. Be transported.
  • the substrate S transported to a predetermined position is sucked and held by the vacuum backup type substrate support device 50 and raised to a predetermined height.
  • the component moving head 30 positions the component mounting head 28 above the plurality of component feeders 26, and the components are sequentially held in each of the eight suction nozzles 70.
  • the component moving head 28 is moved above the substrate S by the head moving device 30 and sequentially mounted at the set positions determined by the mounting program.
  • the height at the component mounting position on the substrate S is obtained based on the height of the support surface of the backup plate 54.
  • the height of the mounting position a shown in FIG. 4 is a support corresponding to the mounting position a interpolated from the heights of three measurement points A, B, and D around the mounting position a. This is obtained by adding the thickness t of the substrate S to the height above the surface.
  • the lowering amount of the suction nozzle 70 is determined from the height of the mounting position a on the substrate S.
  • the component mounting head 28 is reciprocated between the component feeder 26 and the board S for the number of times determined by the mounting program, and the holding and mounting of the component by the component mounting head 28 is repeated as described above to obtain one component.
  • the component mounting operation by the mounting machine 10 is completed.
  • the substrate S for which the component mounting operation has been completed is sent by the substrate conveyor device 24 to the next substrate mounting machine such as the component mounting machine 10.
  • the above-described component work is repeatedly performed on a plurality of substrates S. That is, the component mounting machine 10 of this embodiment uses the height of the support surface to control the lowering amount of the suction nozzle 70 during the component mounting operation on the substrate S. It is not necessary to measure the height of the substrate S for each substrate. Therefore, according to the component mounting machine 10, it is possible to shorten the cycle time.
  • (IV) Substrate Adsorption Determination For example, if the warp of the substrate S becomes too large, a portion that cannot be adsorbed by the substrate support device 50 may occur. In such a case, if the lowering amount of the suction nozzle 70 is controlled based on the height of the support surface, there is a possibility that the components cannot be properly mounted. Therefore, in the component mounting machine 10, it is possible to determine for each substrate S whether or not the substrate support device 50 is reliably sucked and held. Whether or not to make the determination can be switched by an operation by an operator or the like.
  • the laser sensor 64 measures the substrate S that has been attracted and held by the substrate support device 50 and raised to a position where the component mounting operation is performed. Specifically, the height of the position on the substrate S corresponding to the plurality of suction ports 52 provided in the backup plate 54, or the height on the substrate S due to components being mounted at that position, etc. When the measurement cannot be performed, the height of the position close to the position corresponding to the suction port 52 is measured by the laser sensor 64. Next, the height of the support surface at the position corresponding to the suction port 52 is obtained from three of the nine measurement points measured previously.
  • the difference between the obtained height of the support surface and the measured height on the substrate S is obtained, and the difference is set to a value larger than the thickness t of the substrate S. If it is greater than the set height difference, it is determined that there is a possibility that the substrate S cannot be adsorbed by the substrate support device 50. In that case, the component mounting operation is stopped and a warning is issued.
  • the component mounting machine 10 can detect the deficiency of the adsorption of the substrate by the substrate supporting device 50 with high accuracy by performing the above determination. Therefore, according to the component mounting machine 10, it is possible to manufacture a highly accurate product without causing defective mounting of components due to insufficient suction.
  • the plate-like backup plate 54 is adopted as the support portion of the board support device 50.
  • a suction port is provided at the upper end.
  • a plurality of support pins that support the substrate at its upper end. In the case where the component mounting machine is provided with a substrate support device including such a plurality of support pins, the height of the upper end of each of the plurality of support pins is set before the component mounting operation. , And the amount of lowering of the component holding device can be controlled based on the height of the upper end of each of the support pins.
  • component mounting machine 20 base 22: beam 24: substrate conveyor device 26: component feeder 28: component mounting head [component mounting device] 30: head moving device 32: control device 50: substrate support device 52: suction port 54: suction port 54: Backup plate [support part] 56: Support part lifting device 64: Laser sensor [height sensor]

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Abstract

The present invention is a component mounting method for mounting a component onto a substrate (S), by using a component mounting machine (10) provided with (A) a component mounting apparatus (28) that includes a component holding device (70) for holding/detaching a component and that mounts the component onto the substrate (S) by lowering the component holding device (70), and (B) a substrate support device (50) that includes a support part (54) having a plurality of suction ports (52) in the upper surface thereof and that supports the substrate (S) by using the suction ports (52) such that a support surface which is the upper surface of the support part sucks the lower surface of the substrate (S), the method being characterized by comprising: measuring the height of the support surface prior to a component mounting operation of mounting components onto a plurality of the substrates (S); and lowering the component holding device (70) on the basis of the measured height of the support surface, during the component mounting operation on the plurality of substrates (S).

Description

部品装着方法および部品装着機Component mounting method and component mounting machine
 本発明は、基板に対して部品を装着する部品装着方法および部品装着機に関する。 The present invention relates to a component mounting method and a component mounting machine for mounting a component on a substrate.
 下記特許文献1および2には、基板支持装置によって保持した基板に、部品を保持・離脱可能な部品保持デバイスを下降させて部品を装着する部品装着機が記載されている。なお、基板支持装置には、下面から支持する構成のものだけでなく、下記特許文献3および4に示すように、上面に複数の吸引口が設けられた支持部を有し、その吸引口を利用して支持部の上面に基板の下面を吸着させて、基板を支持するように構成されたもの、いわゆるバキュームバックアップ式の基板支持装置が存在する。 Patent Documents 1 and 2 listed below describe a component mounting machine that lowers a component holding device capable of holding and detaching a component on a substrate held by a substrate support device and mounts the component. Note that the substrate support device has a support portion having a plurality of suction ports provided on the upper surface, as shown in Patent Documents 3 and 4 below, as well as a configuration supporting from the lower surface. There is a so-called vacuum backup type substrate support device that is configured to support the substrate by using the lower surface of the substrate to be adsorbed on the upper surface of the support portion.
特開2002-185193号公報JP 2002-185193 A 国際公開第WO2015/107354A1号パンフレットInternational Publication No. WO2015 / 107354A1 Pamphlet 特開2003-142896号公報JP 2003-142896 A 特開平7-15191号公報Japanese Patent Laid-Open No. 7-15191
 上記のようなバキュームバックアップ式の基板支持装置を備えた部品装着機は、基板に反りが生じていても、基板を吸着することで、基板を平坦にするとともに、しっかりと保持することが可能である。しかしながら、そのような部品装着機でも、改良の余地が多分に残されており、改良を施すことにより、そのような部品装着機の実用性を向上させることが可能である。本発明は、そのような実情に鑑みてなされたものであり、バキュームバックアップ式の基板支持装置を備えた部品装着機の実用性を向上させる部品装着方法を提供することを課題とする。また、実用性の高い部品装着機を提供することを課題とする。 The component mounting machine equipped with the vacuum back-up type board support device as described above can flatten and hold the board firmly by adsorbing the board even if the board is warped. is there. However, there is still a lot of room for improvement even in such a component mounting machine, and it is possible to improve the practicality of such a component mounting machine by making improvements. This invention is made | formed in view of such a situation, and makes it a subject to provide the component mounting method which improves the practicality of the component mounting machine provided with the vacuum backup type board | substrate support apparatus. It is another object of the present invention to provide a highly practical component mounting machine.
 上記課題を解決するために、本発明の部品装着方法は、(A)部品を保持・離脱させる部品保持デバイスを有し、その部品保持デバイスを下降させて部品を基板に装着する部品装着装置と、(B)上面に複数の吸引口が設けられた支持部を有し、その吸引口を利用して支持部の上面である支持面に基板の下面を吸着させて、基板を支持する基板支持装置とを備えた部品装着機において、部品を基板に装着する部品装着方法であって、複数の基板に対して部品を装着する作業である部品装着作業を行う前に支持面の高さを測定し、それら複数の基板に対する部品装着作業の際に、その測定された支持面の高さに基づいて部品保持デバイスを下降させることを特徴とする。 In order to solve the above-described problems, a component mounting method of the present invention includes (A) a component mounting device that includes a component holding device that holds and detaches a component, and lowers the component holding device to mount the component on the board. (B) A substrate support that supports a substrate by having a support portion provided with a plurality of suction ports on the upper surface and adsorbing the lower surface of the substrate to the support surface that is the upper surface of the support portion using the suction ports. In a component mounting machine equipped with a device, a component mounting method for mounting a component on a board, and measuring the height of a support surface before performing a component mounting operation, which is a task of mounting components on a plurality of boards The component holding device is lowered based on the measured height of the support surface during the component mounting operation on the plurality of substrates.
 また、本発明の部品装着機は、(A)部品を保持・離脱させる部品保持デバイスを有し、その部品保持デバイスを下降させて部品を基板に装着する部品装着装置と、(B)上面に複数の吸引口が設けられた支持部を有し、その吸引口を利用して支持部の上面である支持面に基板の下面を吸着させて、基板を支持する基板支持装置と、(C)当該部品装着機の制御を司る制御装置とを備え、その制御装置が、複数の基板に対して部品を装着する作業である部品装着作業を行う前に支持面の高さを測定し、それら複数の基板に対する部品装着作業の際に、その測定された支持面の高さに基づいて部品保持デバイスを下降させるように構成されたことを特徴とする。 Further, the component mounting machine of the present invention has (A) a component holding device that holds and detaches a component, and lowers the component holding device to mount the component on the board, and (B) on the upper surface. A substrate support device having a support portion provided with a plurality of suction ports, and supporting the substrate by adsorbing the lower surface of the substrate to the support surface which is the upper surface of the support portion using the suction ports; and (C) A control device that controls the component mounting machine, and the control device measures the height of the support surface before performing a component mounting operation, which is a task of mounting components on a plurality of substrates, The component holding device is lowered based on the measured height of the support surface when the component is mounted on the substrate.
 本発明の部品装着方法および部品装着機によれば、例えば、基板支持装置が基板を吸着保持するため、その基板支持装置の支持面の高さから、基板上の高さを推定することが可能であり、基板ごとに基板の高さを図ることなく、部品装着作業を行うことが可能である。一方、基板ごとに、その基板の高さを計測すれば、その基板の高さと支持面の高さとの差に基づいて、吸着不備を検知することも可能である。そのような利点を有することで、本発明の部品装着機の実用性は、大きく向上させられるのである。また、そのような部品装着機に用いることのできる本発明の部品装着方法は、その部品装着機の実用性の向上に寄与するものとなる。 According to the component mounting method and the component mounting machine of the present invention, for example, since the substrate support device sucks and holds the substrate, the height on the substrate can be estimated from the height of the support surface of the substrate support device. Thus, it is possible to perform the component mounting operation without increasing the height of the board for each board. On the other hand, if the height of the substrate is measured for each substrate, it is possible to detect a suction failure based on the difference between the height of the substrate and the height of the support surface. By having such an advantage, the practicality of the component mounting machine of the present invention is greatly improved. Moreover, the component mounting method of the present invention that can be used for such a component mounting machine contributes to improvement of the practicality of the component mounting machine.
本発明の実施例である部品装着機の斜視図である。It is a perspective view of the component mounting machine which is an Example of this invention. 本発明の実施例である部品装着機の側面図である。It is a side view of the component mounting machine which is an Example of this invention. 図1に示す基板搬送装置および基板支持装置を拡大して示す斜視図である。It is a perspective view which expands and shows the board | substrate conveyance apparatus and board | substrate support apparatus which are shown in FIG. 基板支持装置を拡大して示す側面図である。It is a side view which expands and shows a board | substrate support apparatus. 支持面上に設けられた複数の測定点の位置を示す平面図である。It is a top view which shows the position of the several measurement point provided on the support surface.
<部品装着機の構成>
 本発明の実施例である部品装着機10を、図1および図2に示す。図1は、部品装着機10の斜視図であり、図2は、部品装着機10の側面図である。なお、基板に部品を装着する作業は、複数の種類の部品を基板に装着するために、複数の部品装着機10が配置される。図1には、それら複数の部品装着機10のうちの2つのものを示し、そのうちの1つのものは、外装パネルを外した状態のものを示している。部品装着機10は、ベース20と、ベース20に固定的に設けられたビーム22と、ベースに配設された基板搬送装置である基板コンベア装置24と、当該部品装着機10の正面側においてベース20に交換可能に取り付けられた複数の部品フィーダ26と、複数の部品フィーダ26のいずれかから供給される部品を保持してその部品を基板Sに装着するために離脱させる部品装着装置としての部品装着ヘッド28と、ビーム22に配設されて部品装着ヘッド28を移動させるヘッド移動装置30と、自身の制御を司る制御装置32とを含んで構成されている。なお、以下の説明において、基板コンベア装置24によって基材が搬送される方向を左右方向(X方向)と、水平面上においてその左右方向に直角な方向を前後方向(Y方向)と、それら左右方向および前後方向に直角な方向を上下方向(Z方向)と称することとする。
<Configuration of component mounting machine>
1 and 2 show a component mounting machine 10 that is an embodiment of the present invention. FIG. 1 is a perspective view of the component mounting machine 10, and FIG. 2 is a side view of the component mounting machine 10. In addition, the operation | work which mounts components in a board | substrate arrange | positions the several component mounting machine 10 in order to mount a several kind of component in a board | substrate. In FIG. 1, two of the plurality of component mounting machines 10 are shown, and one of them shows the one with the exterior panel removed. The component mounting machine 10 includes a base 20, a beam 22 fixedly provided on the base 20, a board conveyor device 24 that is a board transfer device disposed on the base, and a base on the front side of the component mounting machine 10. A plurality of component feeders 26 that are replaceably attached to 20, and a component mounting device that holds components supplied from any of the plurality of component feeders 26 and separates the components for mounting on the substrate S The apparatus includes a mounting head 28, a head moving device 30 that is disposed on the beam 22 and moves the component mounting head 28, and a control device 32 that controls itself. In the following description, the direction in which the substrate is conveyed by the substrate conveyor device 24 is the left-right direction (X direction), and the direction perpendicular to the left-right direction on the horizontal plane is the front-rear direction (Y direction). The direction perpendicular to the front-rear direction is referred to as the up-down direction (Z direction).
 図3に、基板コンベア装置24の斜視図を示す。図3(a),(b)は、互いに反対の方向からの視点における斜視図である。基板コンベア装置24は、1対のコンベア40を有しており、1対のコンベア40の各々のコンベアベルト42を搬送モータ44によって周回させることで、1対のコンベアベルト42上に載せられる基板Sを左右方向に搬送する構造とされている。なお、詳しい説明は省略するが、1対のコンベア40の一方は、電磁モータ46によって前後方向に移動させられるようになっており、種々の幅の基板Sに対応できるようになっている。 FIG. 3 shows a perspective view of the substrate conveyor device 24. FIGS. 3A and 3B are perspective views from the viewpoints opposite to each other. The substrate conveyor device 24 has a pair of conveyors 40, and the substrate S placed on the pair of conveyor belts 42 by rotating each conveyor belt 42 of the pair of conveyors 40 by a transport motor 44. Is configured to be conveyed in the left-right direction. Although a detailed description is omitted, one of the pair of conveyors 40 is moved in the front-rear direction by an electromagnetic motor 46 so that it can accommodate substrates S of various widths.
 また、基板コンベア装置24の1対のコンベア42の間には、基板Sを固定支持するための基板支持装置50が設けられている。その基板支持装置50は、バキュームバックアップ式の支持装置であり、上面に複数の吸引口52が設けられた支持部としてのバックアッププレート54と、図示を省略する負圧源と、バックアッププレート54を昇降させる支持部昇降装置56とを含んで構成される。基板支持装置50は、バックアッププレート54の上面に基板Sが置かれた状態で、そのバックアッププレート54の吸引口52に負圧源から負圧が供給され、基板Sを吸着させて支持する。また、支持部昇降装置56は、バックアッププレート54上に基板Sが吸着支持された状態で、そのバックアッププレート54を、部品装着作業が行われる高さまで、詳しく言えば、基板Sが1対のコンベア40の各々の上方に設けられた鍔部58に接触するまで、上昇させる。ちなみに、制御装置32には、基板Sの厚みtが登録されており、その基板Sの厚みtから基板Sが鍔部58に接触させるまでのバックアッププレート54の上昇量Lが算出され、その上昇量Lに基づいて支持部昇降装置56が制御装置32によって制御されるようになっている。 Further, a substrate support device 50 for fixing and supporting the substrate S is provided between the pair of conveyors 42 of the substrate conveyor device 24. The substrate support device 50 is a vacuum backup type support device. The back-up plate 54 as a support portion provided with a plurality of suction ports 52 on the upper surface, a negative pressure source (not shown), and the back-up plate 54 are moved up and down. And a support lifting device 56 to be moved. In the state where the substrate S is placed on the upper surface of the backup plate 54, the substrate supporting device 50 is supplied with negative pressure from the negative pressure source to the suction port 52 of the backup plate 54, and adsorbs and supports the substrate S. Further, the support unit lifting device 56 is a state in which the substrate S is sucked and supported on the backup plate 54, and more specifically, the backup plate 54 is moved to a height at which component mounting work is performed. It raises until it contacts the collar part 58 provided above each of 40. Incidentally, the thickness t of the substrate S is registered in the control device 32, and the amount of increase L of the backup plate 54 from the thickness t of the substrate S until the substrate S comes into contact with the flange portion 58 is calculated, and the increase Based on the amount L, the support lifting device 56 is controlled by the control device 32.
 ヘッド移動装置30は、いわゆるXY型移動装置であり、部品装着ヘッド28が脱着可能に取り付けられるヘッド取付体60と、そのヘッド取付体60をX方向に移動させるX方向移動機構と、ビーム22に支持され、そのX方向移動機構を、部品装着ヘッド28を部品フィーダ26と基板Sとにわたって移動させるY方向移動機構とを含んで構成されている。なお、図2に示すように、ヘッド取付体60の下部には、基板Sの表面を撮像するためのカメラ62、および、高さを測定するための高さセンサとしてのレーザーセンサ64が固定されている。 The head moving device 30 is a so-called XY type moving device, and includes a head mounting body 60 to which the component mounting head 28 is detachably mounted, an X direction moving mechanism for moving the head mounting body 60 in the X direction, and the beam 22. The supported X direction moving mechanism includes a Y direction moving mechanism for moving the component mounting head 28 over the component feeder 26 and the substrate S. As shown in FIG. 2, a camera 62 for imaging the surface of the substrate S and a laser sensor 64 as a height sensor for measuring the height are fixed to the lower part of the head attachment body 60. ing.
 部品装着ヘッド28は、いわゆるインデックス型の装着ヘッドである。つまり、部品装着ヘッド28は、それぞれが、部品保持デバイスとして機能して負圧の供給によって部品を下端部において吸着保持する8つの吸着ノズル70を有しており、それらが、リボルバ72に保持されている。そのリボルバ72は、間欠回転し、特定位置に位置する1の吸着ノズル70がノズル昇降装置によって昇降可能、つまり、上下方向に移動可能とされている。特定位置に位置する吸着ノズル70は、下降した際に、負圧が供給されることによって、部品を保持し、また、負圧の供給が断たれることで、吸着保持している部品を離脱させる。ちなみに、8つの吸着ノズル70の各々は、ノズル回転機構によって、自身の軸線回りに、つまり、その軸線を中心に回転させられるようになっており、当該部品装着ヘッド28は、各吸着ノズル70によって保持されている部品の回転位置を、変更・調整することが可能とされている。 The component mounting head 28 is a so-called index type mounting head. That is, each of the component mounting heads 28 has eight suction nozzles 70 that function as component holding devices and suck and hold the components at the lower end by supplying negative pressure, and these are held by the revolver 72. ing. The revolver 72 rotates intermittently, and one suction nozzle 70 located at a specific position can be moved up and down by the nozzle lifting device, that is, can be moved in the vertical direction. When the suction nozzle 70 located at a specific position is lowered, negative pressure is supplied to hold the component, and when the negative pressure supply is cut off, the suction holding component is removed. Let Incidentally, each of the eight suction nozzles 70 can be rotated around its own axis by the nozzle rotation mechanism, that is, around the axis, and the component mounting head 28 is rotated by each suction nozzle 70. It is possible to change and adjust the rotational position of the held component.
 なお、上述のように、本実施例の部品装着機10において、保持デバイスを昇降させる装置(保持デバイス昇降装置)は、部品装着ヘッド28に設けられていたが、その部品装着ヘッド28に設けられた保持デバイス昇降装置に代えて、あるいは、その部品装着ヘッド28に設けられた保持デバイス昇降装置に加えて、ヘッド移動装置30に設けられてもよい。具体的に言えば、保持デバイス昇降装置として、部品装着ヘッド28が取り付けられたヘッド取付体60を上下方向に移動させるような構成のものを採用することも可能である。 As described above, in the component mounting machine 10 of the present embodiment, the device for lifting and lowering the holding device (holding device lifting device) is provided in the component mounting head 28, but is provided in the component mounting head 28. Instead of the holding device lifting / lowering device, or in addition to the holding device lifting / lowering device provided to the component mounting head 28, the head moving device 30 may be provided. Specifically, it is also possible to employ a structure that moves the head mounting body 60 to which the component mounting head 28 is mounted in the vertical direction as the holding device lifting device.
 複数の部品フィーダ26の各々には、部品保持テープ(複数の部品がテープに保持されたものであり、「部品テーピング」とも呼ばれる)が捲回されたリールが、セットされており、複数の部品フィーダ26の各々は、その部品保持テープを間欠的に送り出すことによって、所定の部品供給部位において、順次、部品を1つずつ供給する。部品の補給は、リールを交換しつつ、部品テーピングを繋ぎ合わせるようにして行ってもよく(スプライシング)、また、部品フィーダ26ごとリールを交換して行ってもよい。なお、当該部品装着機10は、複数の部品フィーダ26に代えて、いわゆるトレイ型の部品供給装置をも取り付け可能とされている。 Each of the plurality of component feeders 26 is set with a reel on which a component holding tape (a plurality of components are held on the tape, also called “component taping”) is wound. Each of the feeders 26 supplies parts one by one sequentially at a predetermined part supply site by intermittently feeding out the part holding tape. The replenishment of the parts may be performed by splicing the part taping while exchanging the reels (splicing), or may be performed by exchanging the reels together with the part feeder 26. Note that the component mounting machine 10 can also be attached with a so-called tray-type component supply device instead of the plurality of component feeders 26.
<部品装着機による作業>
 (I)支持面高さ測定
 本実施例の部品装着機10においては、複数の基板Sに対して繰り返し部品装着作業が行われる前に、バックアッププレート54の上面である支持面の高さが測定される。以下に、そのバックプレート54の支持面の高さを測定する工程から説明する。この工程は、部品装着機10が起動された場合や、部品装着作業を行う基板の種類を変更する場合、いわゆる段取り替えが行われた場合に、実行される。この工程では、まず、バックアッププレート54が、支持部昇降装置56によって上昇させられ、基板Sを支持したと仮定した場合に基板Sに部品を装着させるための高さ位置に位置させられる。そして、レーザーセンサ64がヘッド移動装置30によって移動させられ、バックアッププレート54の支持面上に設定された9つの測定点A-I(図4参照)の測定が行われる。後に詳しく説明するが、それら測定された支持面上の9つの測定点A-Iの高さは、吸着ノズル70の下降量の制御に用いられる。
<Working with a component mounting machine>
(I) Measurement of Support Surface Height In the component mounting machine 10 of the present embodiment, the height of the support surface which is the upper surface of the backup plate 54 is measured before the component mounting operation is repeatedly performed on the plurality of substrates S. Is done. Below, it demonstrates from the process of measuring the height of the support surface of the backplate 54. FIG. This process is executed when the component mounting machine 10 is started, when the type of the board on which the component mounting operation is performed is changed, or when so-called setup change is performed. In this step, first, the backup plate 54 is raised by the support unit lifting device 56 and is positioned at a height position for mounting components on the substrate S when it is assumed that the substrate S is supported. Then, the laser sensor 64 is moved by the head moving device 30, and the nine measurement points AI (see FIG. 4) set on the support surface of the backup plate 54 are measured. As will be described in detail later, the measured heights of the nine measurement points AI on the support surface are used for controlling the descending amount of the suction nozzle 70.
 (II)支持面傾斜判定
 上記のように、9つの測定点A-Iの高さが測定された後には、それら9つの測定点のうちの2つのものの高さが比較され、その高さの差が設定された値より大きい場合には、支持面が大きく傾いている虞があるため、部品装着作業が開始されず、ウォーニングが出されるようになっている。詳しく言えば、まず、9つの測定点A-Iから、それぞれ、隣り合う2つのものの高さが求められ、それら2つの測定点の距離と水平面からの傾きとに基づいて定められた設定値より大きい箇所がある場合には、部品装着作業が開始されず、ウォーニングが出されるのである。また、9つの測定点A-Iのうちの最も高いものと最も低いものとの差が、設定値より大きい場合にも、部品装着作業が開始されず、ウォーニングが出されるようになっている。
(II) Support surface inclination determination As described above, after the heights of the nine measurement points AI are measured, the heights of two of the nine measurement points are compared. When the difference is larger than the set value, the support surface may be greatly inclined, so that the component mounting operation is not started and a warning is issued. Specifically, first, the heights of two adjacent objects are obtained from nine measurement points AI, respectively, and from the set value determined based on the distance between the two measurement points and the inclination from the horizontal plane. If there is a large part, the component mounting operation is not started and a warning is issued. Also, when the difference between the highest and lowest of the nine measurement points AI is larger than the set value, the component mounting operation is not started and a warning is issued.
 (III)部品装着作業
 次に、本部品装着機10による部品装着作業について説明すれば、まず、基板コンベア装置24によって、作業に供される基板Sが、上流側から搬入され、所定の位置まで搬送される。所定位置まで搬送された基板Sは、バキュームバックアップ式の基板支持装置50によって、吸着保持され、所定の高さまで上昇させられる。続いて、ヘッド移動装置30によって、部品装着ヘッド28が複数の部品フィーダ26の上方に位置させられ、8つの吸着ノズル70の各々において部品が順次保持される。次に、ヘッド移動装置30によって、部品装着ヘッド28が基板Sの上方に移動させられ、順次、装着プログラムによって定められた設定位置に装着される。
(III) Component Mounting Operation Next, the component mounting operation by the component mounting machine 10 will be described. First, the substrate S to be used for the operation is carried in from the upstream side by the substrate conveyor device 24 to a predetermined position. Be transported. The substrate S transported to a predetermined position is sucked and held by the vacuum backup type substrate support device 50 and raised to a predetermined height. Subsequently, the component moving head 30 positions the component mounting head 28 above the plurality of component feeders 26, and the components are sequentially held in each of the eight suction nozzles 70. Next, the component moving head 28 is moved above the substrate S by the head moving device 30 and sequentially mounted at the set positions determined by the mounting program.
 なお、前述したように、基板Sは、基板支持装置50によってバックアッププレート54の支持面に吸着保持されているため、多少の反りが生じていたとしても、基板S上の部品装着位置における高さは、先に測定された支持面上の高さに、制御装置32に記憶された基板Sの厚みt分だけ高くなる。したがって、本部品装着機10では、基板S上の部品装着位置の高さが、バックアッププレート54の支持面の高さに基づいて求められるようになっているのである。具体的には、例えば、図4に示す装着位置aの高さは、その装着位置aの周囲にある3つの測定点A,B,Dの高さから補間された装着位置aに対応する支持面上の高さに、基板Sの厚みtを加えて求められるのである。そして、その基板S上における装着位置aの高さから、吸着ノズル70の下降量が決定されるようになっている。 As described above, since the substrate S is sucked and held on the support surface of the backup plate 54 by the substrate support device 50, the height at the component mounting position on the substrate S even if some warping occurs. Increases by the thickness t of the substrate S stored in the control device 32 to the previously measured height on the support surface. Therefore, in the component mounting machine 10, the height of the component mounting position on the substrate S is obtained based on the height of the support surface of the backup plate 54. Specifically, for example, the height of the mounting position a shown in FIG. 4 is a support corresponding to the mounting position a interpolated from the heights of three measurement points A, B, and D around the mounting position a. This is obtained by adding the thickness t of the substrate S to the height above the surface. The lowering amount of the suction nozzle 70 is determined from the height of the mounting position a on the substrate S.
 装着プログラムによって定められた回数、部品フィーダ26と基板Sとの間を部品装着ヘッド28が往復させられ、部品装着ヘッド28による部品の保持・装着が、上記のように繰り返されて、1つの部品装着機10による部品装着作業が完了する。部品装着作業が完了した基板Sは、基板コンベア装置24によって次の部品装着機10等の対基板作業機に送られる。そして、1つの部品装着機10においては、複数の基板Sに対して、上述の部品作業が繰り返し行われる。つまり、本実施例の部品装着機10は、基板S上の部品装着作業時の吸着ノズル70の下降量の制御に、支持面の高さが用いられるため、複数の基板Sの各々に対して、基板毎にその基板Sの高さを測定する必要がない。そのため、本部品装着機10によれば、サイクルタイムの短縮を図ることが可能となっている。 The component mounting head 28 is reciprocated between the component feeder 26 and the board S for the number of times determined by the mounting program, and the holding and mounting of the component by the component mounting head 28 is repeated as described above to obtain one component. The component mounting operation by the mounting machine 10 is completed. The substrate S for which the component mounting operation has been completed is sent by the substrate conveyor device 24 to the next substrate mounting machine such as the component mounting machine 10. In one component mounting machine 10, the above-described component work is repeatedly performed on a plurality of substrates S. That is, the component mounting machine 10 of this embodiment uses the height of the support surface to control the lowering amount of the suction nozzle 70 during the component mounting operation on the substrate S. It is not necessary to measure the height of the substrate S for each substrate. Therefore, according to the component mounting machine 10, it is possible to shorten the cycle time.
 (IV)基板吸着判定
 例えば、基板Sの反りが大きくなりすぎると、基板支持装置50によって吸着できない箇所が生じてしまう場合がある。そのような場合には、支持面の高さに基づいて、吸着ノズル70の下降量を制御すると、適切に部品を装着できない虞がある。そこで、本部品装着機10においては、基板Sごとに、基板支持装置50によって確実に吸着保持されているか否かの判定を行うことが可能となっている。なお、その判定を行うか否かは、オペレータ等による操作によって、切り換えることが可能とされている。
(IV) Substrate Adsorption Determination For example, if the warp of the substrate S becomes too large, a portion that cannot be adsorbed by the substrate support device 50 may occur. In such a case, if the lowering amount of the suction nozzle 70 is controlled based on the height of the support surface, there is a possibility that the components cannot be properly mounted. Therefore, in the component mounting machine 10, it is possible to determine for each substrate S whether or not the substrate support device 50 is reliably sucked and held. Whether or not to make the determination can be switched by an operation by an operator or the like.
 より詳しく言えば、まず、基板支持装置50によって吸着保持されて部品装着作業が行われる位置まで上昇させられた基板Sが、レーザーセンサ64によって測定される。具体的には、基板S上の、バックアッププレート54に設けられた複数の吸引口52に対応する位置の高さ、あるいは、その位置に部品が装着されている等により基板S上の高さが測定できないような場合には、その吸引口52に対応する位置に近い位置の高さが、レーザーセンサ64によって測定される。次いで、その吸引口52に対応する位置の支持面の高さが、先に測定された9つの測定点のうちの3つのものから求められる。そして、各吸引口52に対応する位置において、求められた支持面の高さと、測定された基板S上の高さとの差が求められ、その差が、基板Sの厚みtより大きな値に設定された設定高低差より大きい場合には、基板支持装置50によって基板Sを吸着できていない虞があると判断される。そして、その場合には、部品装着作業が停止され、ウォーニングが出されるようになっている。 More specifically, first, the laser sensor 64 measures the substrate S that has been attracted and held by the substrate support device 50 and raised to a position where the component mounting operation is performed. Specifically, the height of the position on the substrate S corresponding to the plurality of suction ports 52 provided in the backup plate 54, or the height on the substrate S due to components being mounted at that position, etc. When the measurement cannot be performed, the height of the position close to the position corresponding to the suction port 52 is measured by the laser sensor 64. Next, the height of the support surface at the position corresponding to the suction port 52 is obtained from three of the nine measurement points measured previously. Then, at the position corresponding to each suction port 52, the difference between the obtained height of the support surface and the measured height on the substrate S is obtained, and the difference is set to a value larger than the thickness t of the substrate S. If it is greater than the set height difference, it is determined that there is a possibility that the substrate S cannot be adsorbed by the substrate support device 50. In that case, the component mounting operation is stopped and a warning is issued.
 本部品装着機10は、上記の判定を行うことにより、基板支持装置50による基板の吸着不備を、高精度で検知することが可能となる。したがって、本部品装着機10によれば、吸着不備に伴う部品の装着不良が生じることがなく、高精度な製品を製作することが可能となる。 The component mounting machine 10 can detect the deficiency of the adsorption of the substrate by the substrate supporting device 50 with high accuracy by performing the above determination. Therefore, according to the component mounting machine 10, it is possible to manufacture a highly accurate product without causing defective mounting of components due to insufficient suction.
<変形例>
 上述した実施例の部品装着機10において、基板支持装置50の支持部には、プレート状のバックアッププレート54が採用されていたが、そのバックアッププレート54に代えて、上端に吸引口を有してその上端において基板を支持する複数の支持ピンを採用することも可能である。部品装着機が、そのような複数の支持ピンを含んで構成される基板支持装置を備えたものである場合には、部品装着作業の前に、それら複数の支持ピンの各々の上端の高さを測定し、それら各支持ピンの上端の高さに基づいて、部品保持デバイスの下降量を制御するように構成することが可能である。
<Modification>
In the component mounting machine 10 of the above-described embodiment, the plate-like backup plate 54 is adopted as the support portion of the board support device 50. However, instead of the backup plate 54, a suction port is provided at the upper end. It is also possible to employ a plurality of support pins that support the substrate at its upper end. In the case where the component mounting machine is provided with a substrate support device including such a plurality of support pins, the height of the upper end of each of the plurality of support pins is set before the component mounting operation. , And the amount of lowering of the component holding device can be controlled based on the height of the upper end of each of the support pins.
 10:部品装着機  20:ベース  22:ビーム  24:基板コンベア装置   26:部品フィーダ  28:部品装着ヘッド〔部品装着装置〕  30:ヘッド移動装置  32:制御装置 50:基板支持装置  52:吸引口  54:バックアッププレート〔支持部〕  56:支持部昇降装置 64:レーザーセンサ〔高さセンサ〕 10: component mounting machine 20: base 22: beam 24: substrate conveyor device 26: component feeder 28: component mounting head [component mounting device] 30: head moving device 32: control device 50: substrate support device 52: suction port 54: suction port 54: Backup plate [support part] 56: Support part lifting device 64: Laser sensor [height sensor]

Claims (5)

  1.  (A)部品を保持・離脱させる部品保持デバイスを有し、その部品保持デバイスを下降させて部品を基板に装着する部品装着装置と、(B)上面に複数の吸引口が設けられた支持部を有し、前記吸引口を利用して前記支持部の上面である支持面に基板の下面を吸着させて、基板を支持する基板支持装置とを備えた部品装着機において、部品を基板に装着する部品装着方法であって、
     複数の基板に対して部品を装着する作業である部品装着作業を行う前に前記支持面の高さを測定し、それら複数の基板に対する部品装着作業の際に、その測定された前記支持面の高さに基づいて前記部品保持デバイスを下降させることを特徴とする部品装着方法。
    (A) A component mounting device that has a component holding device that holds and detaches a component, and lowers the component holding device to mount the component on the board, and (B) a support portion provided with a plurality of suction ports on the upper surface. A component mounting machine including a substrate support device for supporting a substrate by adsorbing a lower surface of the substrate to a support surface that is an upper surface of the support portion using the suction port. A component mounting method for
    The height of the support surface is measured before performing a component mounting operation, which is a task of mounting components on a plurality of substrates, and the measured support surface is measured during component mounting operations on the plurality of substrates. A component mounting method, wherein the component holding device is lowered based on a height.
  2.  当該部品装着方法が、
     前記測定された支持面の高さと、予め分かっている前記複数の基板の各々の厚みとに基づいて、前記複数の基板の各々の上面の高さを推定して前記部品保持デバイスの下降量を制御する請求項1に記載の部品装着方法。
    The component mounting method is
    Based on the measured height of the support surface and the thickness of each of the plurality of substrates known in advance, the height of the upper surface of each of the plurality of substrates is estimated, and the descending amount of the component holding device is determined. The component mounting method according to claim 1 to be controlled.
  3.  当該部品装着方法が、
     前記支持面の高さとして、その支持面に設定された複数の測定点の高さを測定するものであり、それら複数の測定点のうちの2つものの高さの差が設定された値より大きい場合には、前記複数の基板に対する部品装着作業を開始しない請求項1または請求項2に記載の部品装着方法。
    The component mounting method is
    As the height of the support surface, the height of a plurality of measurement points set on the support surface is measured, and the difference between the heights of two of the plurality of measurement points is set from the set value. The component mounting method according to claim 1, wherein when it is larger, the component mounting operation for the plurality of substrates is not started.
  4.  当該部品装着方法が、
     前記基板支持装置に支持された前記複数の基板の各々に対して、それらの基板の各々の上面の高さを測定し、その測定された基板の上面の高さと前記支持面の高さとの差が、基板の厚みより大きな値に設定された設定高低差より大きい場合には、前記部品装着作業を停止する請求項1ないし請求項3のいずれか1つに記載の部品装着方法。
    The component mounting method is
    For each of the plurality of substrates supported by the substrate support device, the height of the upper surface of each of the substrates is measured, and the difference between the measured height of the upper surface of the substrate and the height of the support surface The component mounting method according to any one of claims 1 to 3, wherein the component mounting operation is stopped when the difference is larger than a set height difference set to a value larger than the thickness of the board.
  5.  部品を基板に装着する部品装着機であって、
     部品を保持・離脱させる部品保持デバイスを有し、その部品保持デバイスを下降させて部品を基板に装着する部品装着装置と、
     上面に複数の吸引口が設けられた支持部を有し、前記吸引口を利用して前記支持部の上面である支持面に基板の下面を吸着させて、基板を支持する基板支持装置と、
     前記当該部品装着機の制御を司る制御装置と
     を備え、
     前記制御装置が、
     複数の基板に対して部品を装着する作業である部品装着作業を行う前に前記支持面の高さを測定し、それら複数の基板に対する部品装着作業の際に、その測定された前記支持面の高さに基づいて前記部品保持デバイスを下降させるように構成されたことを特徴とする部品装着機。
    A component mounting machine for mounting components on a board,
    A component mounting device that has a component holding device for holding and releasing the component, and lowering the component holding device to mount the component on the board;
    A substrate support device that has a support portion provided with a plurality of suction ports on an upper surface, and supports the substrate by adsorbing a lower surface of the substrate to a support surface that is an upper surface of the support portion using the suction ports;
    A control device for controlling the component mounting machine;
    The control device is
    The height of the support surface is measured before performing a component mounting operation, which is a task of mounting components on a plurality of substrates, and the measured support surface is measured during component mounting operations on the plurality of substrates. A component mounting machine configured to lower the component holding device based on a height.
PCT/JP2015/079558 2015-10-20 2015-10-20 Component mounting method and component mounting machine WO2017068645A1 (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH079381A (en) * 1993-06-25 1995-01-13 Fuji Mach Mfg Co Ltd Elevating device for electronic parts
JP2003289199A (en) * 2002-01-25 2003-10-10 Fuji Mach Mfg Co Ltd Working system for board
WO2005107354A1 (en) * 2004-04-30 2005-11-10 Fuji Machine Mfg. Co., Ltd. Printed board supporting device

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JP6151925B2 (en) * 2013-02-06 2017-06-21 ヤマハ発動機株式会社 Substrate fixing device, substrate working device, and substrate fixing method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH079381A (en) * 1993-06-25 1995-01-13 Fuji Mach Mfg Co Ltd Elevating device for electronic parts
JP2003289199A (en) * 2002-01-25 2003-10-10 Fuji Mach Mfg Co Ltd Working system for board
WO2005107354A1 (en) * 2004-04-30 2005-11-10 Fuji Machine Mfg. Co., Ltd. Printed board supporting device

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