WO2017061638A1 - Mems device, mems package comprising same and user terminal - Google Patents

Abstract

Provided are a MEMS device, a MEMS package comprising same and a user terminal. The MEMS device comprises: a fixing part; a plurality of first masses which are connected to the fixing part by means of springs and face each other in first direction; and a plurality of movable electrodes which are connected to each first mass by means of springs and have a comb structure, wherein the movable electrodes can be separated from the first masses and move when the Coriolis force is provided.

Description

MEMS device, MEMS package and user terminal comprising the same

The present invention relates to a MEMS device, and more particularly, to a comb-type sensing type MEMS device, a MEMS package including the same, and a user terminal.

MEMS (Micro Electro Mechanical Systems) is used for military applications such as satellites, missiles, and unmanned aerial vehicles, and for camera shake, mobile phones, cameras, camcorders, and mobile phones, such as air bags, electronic stability controls, and black boxes for vehicles. It is used for various purposes such as motion sensing and navigation for game consoles.

The parallel-type sensing MEMS device does not generate resonance at a desired frequency due to the squeeze film damping effect, and reduces the resonance frequency. In order to attenuate the influence of external noise, a high resonance frequency is required. In addition, the parallel sensing MEMS device has poor linearity due to the pull-in effect.

An object of the present invention is to provide a comb sensing MEMS device capable of obtaining a high resonance frequency.

Another technical problem of the present invention is to provide a comb sensing MEMS device capable of improving linearity and stability.

Another technical problem of the present invention is to provide a MEMS package and a user terminal including the above-described MEMS device.

The technical problems of the present invention are not limited to the above-mentioned problems, and other problems not mentioned will be clearly understood by those skilled in the art from the following description.

MEMS device according to an aspect of the present invention for solving the above technical problem, each of the plurality of first mass connected to the fixing portion by a spring, the first direction facing each other in the first direction, and the spring A plurality of moving electrodes connected to a first mass of and having a comb structure and provided with a Coriolis force, the plurality of moving electrodes move separately from the plurality of first masses It is possible.

In some embodiments of the present invention, the plurality of moving electrodes may be used for Yaw axis sensing.

In some embodiments of the invention, the device further comprises a plurality of second masses connected to the fixing part by springs and opposed to each other in a second direction, wherein the plurality of first masses and the The plurality of second masses may be coupled to each other.

In some embodiments of the present invention, the apparatus further includes a plurality of fixed electrode groups corresponding to the respective moving electrodes and having a comb structure, wherein each fixed electrode group comprises a first capacitor constituting a first capacitor. It may include a second fixed electrode constituting the fixed electrode and the second capacitor.

In addition, the capacitance of the first capacitor and the capacitance of the second capacitor may increase or decrease oppositely.

The change amounts of capacitances of the plurality of first capacitors may be added together and processed, or the change amounts of capacitances of the plurality of second capacitors may be added together and processed.

In some embodiments of the present invention, when a rotation in a predetermined direction is provided, the plurality of moving electrodes may move in different directions.

In some embodiments of the present invention, when acceleration in a predetermined direction is provided, the plurality of moving electrodes may move in the same direction.

MEMS package according to another aspect of the present invention for solving the above technical problem includes any one of the above-described MEMS device.

A user terminal according to another aspect of the present invention for solving the above technical problem includes any one of the above-described MEMS device.

Other specific details of the invention are included in the detailed description and drawings.

According to the MEMS device of the present invention, when a Coriolis force is provided, the force is sensed by using a movable electrode which is separated from the mass, not the entire mass, and is movable, so that the mass of the moving structure is reduced, resulting in a high resonance frequency. can do.

In addition, since the comb sensing scheme is adopted, the linearity is improved, and the pull-in voltage is reduced, thereby making the MEMS device more stable.

Effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned will be clearly understood by those skilled in the art from the following description.

1 is a plan view schematically showing a MEMS device according to an embodiment of the present invention.

FIG. 2 is a plan view schematically showing the operation of the MEMS device of FIG. 1 when rotation in a predetermined direction is provided.

FIG. 3 is a diagram schematically showing a change in capacitance of the MEMS device of FIG. 1 when rotation in a predetermined direction is provided. FIG.

4 is a plan view schematically illustrating the operation of the MEMS device of FIG. 1 when acceleration in a predetermined direction is provided.

5 is a diagram schematically showing a change in capacitance of the MEMS device of FIG. 1 when acceleration in a predetermined direction is provided.

6 is a diagram schematically illustrating a MEMS package including a MEMS device according to an embodiment of the present invention.

7-8 are schematic diagrams of sensor hubs including MEMS devices in accordance with embodiments of the present invention.

9 is a diagram schematically illustrating a user terminal including a MEMS device according to an embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be embodied in various different forms, and the present embodiments merely make the disclosure of the present invention complete, and are common in the art to which the present invention pertains. It is provided to fully inform those skilled in the art of the scope of the invention, which is defined only by the scope of the claims. Like reference numerals refer to like elements throughout.

Although the first, second, etc. are used to describe various elements, components and / or sections, these elements, components and / or sections are of course not limited by these terms. These terms are only used to distinguish one element, component or section from another element, component or section. Therefore, the first device, the first component, or the first section mentioned below may be a second device, a second component, or a second section within the technical spirit of the present invention.

When elements or layers are referred to as "on" or "on" of another element or layer, intervening other elements or layers as well as intervening another layer or element in between. It includes everything. On the other hand, when a device is referred to as "directly on" or "directly on" indicates that no device or layer is intervened in the middle. The spatially relative terms " below ", " beneath ", " lower ", " above ", " upper " It may be used to easily describe the correlation of a device or components with other devices or components. Spatially relative terms are to be understood as including terms in different directions of the device in use or operation in addition to the directions shown in the figures. For example, when flipping a device shown in the figure, a device described as "below or beneath" of another device may be placed "above" of another device. Thus, the exemplary term "below" can encompass both an orientation of above and below. The device may be oriented in other directions as well, in which case spatially relative terms may be interpreted according to orientation.

Unless otherwise defined, all terms (including technical and scientific terms) used in the present specification may be used in a sense that can be commonly understood by those skilled in the art. In addition, terms that are defined in a commonly used dictionary are not ideally or excessively interpreted unless they are specifically defined clearly.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. In this specification, the singular also includes the plural unless specifically stated otherwise in the phrase. As used herein, "comprises" and / or "comprising" does not exclude the presence or addition of one or more other components in addition to the mentioned components.

Hereinafter, to describe an embodiment of the present invention, a gyro sensor will be described as an example among various MEMS devices. However, the present invention is not limited thereto, and a person having ordinary knowledge in the technical field to which the present invention belongs is not only a gyro sensor but also a comb-type sensing base such as an acceleration sensor, a pressure sensor, a microphone, and the like. It will be appreciated that any MEMS device may be applied substantially the same without changing its technical spirit or essential features.

1 is a plan view schematically showing a MEMS device according to an embodiment of the present invention.

Referring to FIG. 1, the MEMS device 100 includes a plurality of mass bodies 110 to 140, fixed parts 150, moving electrodes 115 and 125, fixed electrode groups 170 and 180, and springs 161 to 163. It includes.

The plurality of masses 110 to 140 include a plurality of first masses 110 and 120 and a plurality of second masses 130 and 140. The plurality of first masses 110 and 120 oppose each other in a first direction (eg, the horizontal direction in FIG. 1), and the plurality of second masses 130 and 140 may correspond to a second direction (eg, FIG. In the vertical direction of one phase). The plurality of mass bodies 110 to 140 may be connected to the central fixing part 150 by a spring 162. In addition, the plurality of masses 110 to 140 may be directly coupled to each other by the spring 161. The plurality of first masses 110 and 120 may be used for pitch axis sensing, and the plurality of second masses 130 and 140 may be used for roll axis sensing, but is not limited thereto.

The plurality of moving electrodes 115 and 125 may be disposed inside the plurality of first mass bodies 110 and 120. By removing a predetermined region inside each of the first masses 110 and 120, an internal space of a groove or an opening may be formed in each of the first masses 110 and 120. In addition, the moving electrodes 115 and 125 may be formed in the space. The moving electrodes 115 and 125 may be connected to the first mass bodies 110 and 120 by springs 163. Substantially the same as the plurality of first mass bodies 110 and 120, the plurality of moving electrodes 115 and 125 may also face each other. The plurality of moving electrodes 115 and 125 may be used for Yaw axis sensing, but are not limited thereto.

The plurality of fixed electrode groups 170 and 180 may include a first fixed electrode group 170 and a second fixed electrode group 180. The first fixed electrode group 170 may be disposed corresponding to the first moving electrode 115, and the second fixed electrode group 180 may be disposed corresponding to the second moving electrode 125. Each of the fixed electrode groups 170 and 180 may include first fixed electrodes 171 and 181 disposed above and second fixed electrodes 173 and 183 disposed below. The plurality of fixed electrodes 171, 173, 181, and 183 and the plurality of moving electrodes 115 and 125 may be disposed on the same plane. The plurality of fixed electrodes 171, 173, 175, and 177 and the plurality of moving electrodes 115 and 125 have a comb structure and may be coupled to each other. The first fixed electrodes 171, 181 together with the respective moving electrodes 115, 125 constitute a first capacitor, and the second fixed electrodes 173, 183 correspond with the respective moving electrodes 115, 125. ) May be configured with the second capacitor.

The plurality of masses 110 to 140, the plurality of moving electrodes 115 and 125, and the plurality of fixed electrodes 171, 173, 175, and 177 may include silicon or metal, but are not limited thereto.

The springs 161 to 163 may support the plurality of masses 110 to 140 and the plurality of moving electrodes 125 and 145, respectively.

Although not clearly illustrated, the driving electrode may be disposed adjacent to the plurality of second mass bodies 130 and 140. As a predetermined time-varying voltage is provided to the driving electrode, the masses 110 to 140 may vibrate by the electrostatic force generated from the driving electrode. The plurality of masses 110 to 140 may be driven in different directions, respectively, in parallel with the vertical direction or the horizontal direction of FIG. 1, for example. Since the moving electrodes 115 and 125 are connected to the first masses 110 and 120 by the springs 163, the moving electrodes 115 and 125 may also vibrate together with the first masses 110 and 120. The driving electrode may be disposed adjacent to the plurality of first mass bodies 110 and 120.

When the Coriolis Force is provided as the MEMS device 100 rotates, the plurality of moving electrodes 115 and 125 may move apart from the plurality of first masses 110 and 120. By the movement of the plurality of moving electrodes 115 and 125, the capacitance of the first capacitor and the capacitance of the second capacitor may increase or decrease in opposite directions. That is, when the capacitance of the first capacitor is increased, the capacitance of the second capacitor is decreased, and when the capacitance of the first capacitor is decreased, the capacitance of the second capacitor may be increased. The direction and magnitude of the angular velocity may be sensed using the increase or decrease of the capacitance.

 On the other hand, unlike shown in Figure 1, the overall shape of the plurality of mass (110 ~ 140), the arrangement of the fixing part 150, the spring (161 ~ 163), the plurality of moving electrodes (115, 125) and a plurality of The shape and arrangement of the fixed electrodes 171, 173, 175, and 177 may be variously modified according to embodiments, within the scope of not changing the technical spirit or essential features of the present invention.

FIG. 2 is a plan view schematically showing the operation of the MEMS device of FIG. 1 when rotation in a predetermined direction is provided.

Referring to FIG. 2, when the MEMS device 100 is provided with rotation in the predetermined direction shown in FIG. 2, the plurality of moving electrodes 115 and 125 move in different directions by the Coriolis force. As illustrated, the plurality of moving electrodes 115 and 125 may move toward the outside of the MEMS device 100, respectively, but are not limited thereto, and may move the inside of the MEMS device 100 according to the direction of rotation provided. You can also move toward each other.

FIG. 3 is a diagram schematically showing a change in capacitance of the MEMS device of FIG. 1 when rotation in a predetermined direction is provided. FIG.

Referring to FIG. 3, first fixed electrodes 171 and 181 may be disposed on the plurality of moving electrodes 115 and 125, and second fixed electrodes 173 and 183 may be disposed below the moving electrodes 115 and 125.

The plurality of moving electrodes 115, 125 includes a plurality of fingers 116, 126, and each of the fixed electrodes 171, 173, 175, 177 also includes a plurality of fingers 172, 174, 182, 184. can do. The fingers 116, 126 of the plurality of moving electrodes 115, 125 and the fingers 172, 174, 182, 184 of the plurality of fixed electrodes 171, 173, 175, 177 are alternately disposed at predetermined intervals. Can be arranged.

The fingers 172 and 174 of the first fixed electrodes 171 and 181 and the fingers 174 and 184 of the second fixed electrodes 173 and 183 may be asymmetrically formed, for example, in the horizontal direction on FIG. 3. have.

Accordingly, as shown in FIG. 3, when the moving electrodes 115 and 125 move toward the outside of the MEMS device 100, the fingers 116 and 126 of the moving electrodes 115 and 125 are first fixed. Since the spacing between the fingers 172, 182 of the electrodes 171, 181 decreases, the capacitance of the first capacitor increases, and the fingers 116, 126 of the moving electrodes 115, 125 and the second fixed electrode 173, As the spacing between fingers 174 and 184 of 183 increases, the capacitance of the second capacitor is reduced.

On the contrary, although not clearly shown, when the moving electrodes 115 and 125 move toward the inside of the MEMS device 100, the fingers 116 and 126 and the first fixed electrode of the moving electrodes 115 and 125 ( Since the spacing between the fingers 172 and 182 of the 171 and 181 increases, the capacitance of the first capacitor decreases, and the fingers 116 and 126 of the moving electrodes 115 and 125 and the second fixed electrodes 173 and 183. As the spacing between the fingers 174 and 184 decreases, the capacitance of the second capacitor will increase.

4 is a plan view schematically illustrating the operation of the MEMS device of FIG. 1 when acceleration in a predetermined direction is provided.

Referring to FIG. 4, when the MEMS device 100 is provided with acceleration in the predetermined direction shown in FIG. 4, the plurality of moving electrodes 115 and 125 move in the same direction by the inertial force. As shown, the plurality of moving electrodes 115, 125 may move together toward one side of the MEMS device 100, but is not limited thereto, and the other movement of the MEMS device 100 may vary depending on the direction of acceleration provided. It can also move together towards the side.

5 is a diagram schematically showing a change in capacitance of the MEMS device of FIG. 1 when acceleration in a predetermined direction is provided.

As shown in FIG. 5, when the moving electrodes 115 and 125 move toward one side of the MEMS device 100, the fingers 116 and the first fixed electrode group 170 of the moving electrode 115 are moved. Since the spacing between the fingers 172 of the first fixed electrode 171 decreases, the capacitance of the first capacitor on the side of the first fixed electrode group 170 increases, but the fingers 126 and the second of the moving electrode 125 are increased. Since the distance between the fingers 182 of the first fixed electrode 181 of the fixed electrode group 180 is increased, the capacitance of the first capacitor on the side of the second fixed electrode group 180 is reduced. In contrast to the first capacitor, the capacitance of the second capacitor on the side of the first fixed electrode group 170 decreases, but the capacitance of the second capacitor on the side of the second fixed electrode group 180 increases.

Conversely, although not clearly shown, when the moving electrodes 115 and 125 move toward the other side of the MEMS device 100, the finger 116 and the first fixed electrode group 170 of the moving electrode 115 are moved. Since the spacing between the fingers 172 of the first fixed electrode 171 of the first electrode 171 increases, the capacitance of the first capacitor on the side of the first fixed electrode group 170 decreases, but the finger 126 and the first of the movable electrode 125 Since the spacing between the fingers 182 of the first fixed electrode 181 of the second fixed electrode group 180 decreases, the capacitance of the first capacitor on the side of the second fixed electrode group 180 increases. In contrast to the first capacitor, the capacitance of the second capacitor on the side of the first fixed electrode group 170 increases, but the capacitance of the second capacitor on the side of the second fixed electrode group 180 will decrease.

The amount of change in capacitance of the plurality of first capacitors and / or the amount of change in capacitance of the plurality of second capacitors may be summed and processed. As a result, the accuracy of the angular velocity measurement can be increased, and the influence by external acceleration can be reduced.

3 and 5, the fingers 116 and 126 of the plurality of moving electrodes 115 and 125 and the fingers 172, 174 and the fingers of the plurality of fixed electrodes 171, 173, 175 and 177 are illustrated. The shape and arrangement of the 182 and 184 may be variously modified according to the embodiment within the scope that does not change the technical spirit or essential features of the present invention.

6 is a diagram schematically illustrating a MEMS package including a MEMS device according to an embodiment of the present invention.

Referring to FIG. 6, the MEMS package 1000 includes a PCB substrate 1100, a MEMS device 1200 stacked on the PCB substrate 1100, and an ASIC device 1300. The MEMS device 1200 may be formed substantially the same as the MEMS device 100 described with reference to FIG. 1. 6 illustrates a wire bonding method, but the present invention is not limited thereto, and a flip chip method may be used.

7-8 are schematic diagrams of sensor hubs including MEMS devices in accordance with embodiments of the present invention.

Referring to FIG. 7, the sensor hub 2000 may include a processing device 2100, a MEMS device 2200, and an application specific integrated circuit (ASIC) device 2300. The MEMS device 2200 may be formed substantially the same as the MEMS device 100 described with reference to FIG. 1. The ASIC device 2300 may process the sensing signal of the MEMS device 2200. The processing device 2100 may function as a coprocessor for professionally performing sensor data processing on behalf of the application processor.

Referring to FIG. 8, the sensor hub 3000 may include a plurality of MEMS devices 3200 and 3400 and a plurality of ASIC devices 3300 and 3500. At least one of the plurality of MEMS devices 3200 and 3400 may be formed substantially the same as the MEMS device 100 described with reference to FIG. 1. The first MEMS device 3200 may be an acceleration sensor, and the second MEMS device 3400 may be a gyro sensor, but is not limited thereto. The plurality of ASIC devices 3300 and 3500 may process sensing signals of the corresponding MEMS devices 3200 and 3400, respectively. The processing device 3100 may function as a coprocessor for professionally performing sensor data processing on behalf of the application processor. Unlike shown, three or more MEMS devices and ASIC devices may be provided within the sensor hub 3000.

9 is a diagram schematically illustrating a user terminal including a MEMS device according to an embodiment of the present invention.

Referring to FIG. 9, the user terminal 200 may include a wireless communication unit 4100, an A / V input unit 4200, a user input unit 4300, a sensing unit 4400, an output unit 4500, a storage unit 4600, and the like. The interface unit 4700 includes a control unit 4800 and a power supply unit 4900.

The wireless communication unit 4100 may wirelessly communicate with an external device. The wireless communication unit 4100 may wirelessly communicate with an external device using various wireless communication methods such as mobile communication, WiBro, Wi-Fi, Bluetooth, Zigbee, ultrasonic wave, infrared ray, and RF (Radio Frequency). Can be. The wireless communication unit 4100 may transmit data and / or information received from the external device to the controller 4800, and may transmit data and / or information transmitted from the controller 4800 to the external device. To this end, the wireless communication unit 4100 may include a mobile communication module 4110 and a short range communication module 4120.

In addition, the wireless communication unit 4100 may include the location information module 4130 to obtain location information of the user terminal 4000. Location information of the user terminal 4000 may be provided from, for example, a GPS positioning system, a WiFi positioning system, a cellular positioning system, or a beacon positioning system, but is not limited thereto. Location information may be provided. The wireless communication unit 4100 may transfer the location information received from the positioning system to the controller 4800.

The A / V input unit 4200 is for inputting a video or audio signal and may include a camera module 4210 and a microphone module 4220. The camera module 4210 may include, for example, an image sensor such as a complementary metal oxide semiconductor (CMOS) sensor, a charge coupled device (CCD) sensor, or the like.

The user input unit 4300 receives various information from the user. The user input unit 4300 may include input means such as a key, a button, a switch, a touch pad, and a wheel. When the touch pad has a mutual layer structure with the display module 4510 described later, a touch screen may be configured.

The sensor unit 4400 detects a state of the user terminal 4000 or a state of the user. The sensing unit 4400 may include sensing means such as a touch sensor, a proximity sensor, a pressure sensor, a vibration sensor, a geomagnetic sensor, a gyro sensor, an acceleration sensor, and a biometric sensor. The sensing unit 240 may be used for user input.

The output unit 4500 notifies the user of various information. The output unit 4500 may output information in the form of text, video or audio. To this end, the output unit 4500 may include a display module 4510 and a speaker module 4520. The display module 4510 may be provided in a PDP, LCD, TFT LCD, OLED, flexible display, three-dimensional display, electronic ink display, or any form well known in the art. The output unit 4500 may further comprise any form of output means well known in the art.

The storage unit 4600 stores various data and commands. The storage unit 4600 may store system software and various applications for the operation of the user terminal 4000. The storage unit 4600 may include a RAM, a ROM, an EPROM, an EEPROM, a flash memory, a hard disk, a removable disk, or any type of computer readable recording medium well known in the art.

The interface unit 4700 serves as a path to an external device connected to the user terminal 4000. The interface unit 4700 receives data and / or information from an external device or receives power and transmits the data and / or information to components inside the user terminal 4000, or transmits data and / or information inside the user terminal 4000 to an external device. It can transmit power or supply internal power. The interface unit 4700 includes, for example, a wired / wireless headset port, a charging port, a wired / wireless data port, a memory card port, a universal serial bus (USB) port, and an identification module. Port may be connected to a connected device, an audio input / output (I / O) port, a video input / output (I / O) port, or the like.

The controller 4800 controls other components to control the overall operation of the user terminal 4000. The controller 4800 may execute system software and various applications stored in the storage 4600. The controller 2800 may include an integrated circuit such as a microprocessor, a microcontroller, a digital signal processing core, a graphics processing core, an application processor, or the like.

The power supply unit 4900 may include a wireless communication unit 4100, an A / V input unit 4200, a user input unit 4300, a sensor unit 4400, an output unit 4500, a storage unit 4600, an interface unit 4700, Supply power for the operation of the controller 4800. The power supply 4900 may include an internal battery.

The MEMS device 100 described with reference to FIG. 1 or the sensor hubs 2000 and 3000 described with reference to FIGS. 7 to 8 may be provided in the sensor unit 4400.

The method described in connection with an embodiment of the present invention may be implemented as a software module performed by a processor. The software module may reside in RAM, ROM, EPROM, EEPROM, flash memory, hard disk, removable disk, CD-ROM, or any form of computer readable recording medium well known in the art. .

Although the embodiments of the present invention have been described above with reference to the accompanying drawings, those skilled in the art to which the present invention pertains may implement the present invention in other specific forms without changing the technical spirit or essential features thereof. You will understand that. Therefore, it should be understood that the embodiments described above are exemplary in all respects and not restrictive.

Claims (10)

1. Fixing part;

   A plurality of first masses connected to the fixing part by a spring and opposed to each other in a first direction; And

   A plurality of moving electrodes connected to the respective first masses by springs and having a comb structure;

   And when a Coriolis Force is provided, the plurality of moving electrodes is movable apart from the plurality of first masses.
2. The method of claim 1,

   The plurality of moving electrodes are used for Yaw axis sensing.
3. The method of claim 1,

   A plurality of second masses connected to the fixing part by springs and opposed to each other in a second direction,

   And the plurality of first masses and the plurality of second masses are coupled to each other by a spring.
4. The method of claim 1,

   A plurality of fixed electrode groups corresponding to the respective moving electrodes and having a comb structure,

   Wherein each group of fixed electrodes comprises a first fixed electrode constituting a first capacitor and a second fixed electrode constituting a second capacitor.
5. The method of claim 4, wherein

   And the capacitance of the first capacitor and the capacitance of the second capacitor increase and decrease oppositely to each other.
6. The method of claim 4, wherein

   The change amount of the capacitance of the plurality of first capacitors is processed by adding up, or the change amount of the capacitance of the plurality of second capacitors is processed by adding up.
7. The method of claim 1,

   And when a rotation in a predetermined direction is provided, the plurality of moving electrodes move in different directions.
8. The method of claim 1,

   When the acceleration in a predetermined direction is provided, the plurality of moving electrodes move in the same direction.
9. MEMS package comprising the MEMS device of claim 1.
10. A user terminal comprising the MEMS device of any one of claims 1 to 8.

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