WO2017060130A3 - Mems-drehratensensor mit magnetischer detektion - Google Patents

Mems-drehratensensor mit magnetischer detektion Download PDF

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Publication number
WO2017060130A3
WO2017060130A3 PCT/EP2016/073005 EP2016073005W WO2017060130A3 WO 2017060130 A3 WO2017060130 A3 WO 2017060130A3 EP 2016073005 W EP2016073005 W EP 2016073005W WO 2017060130 A3 WO2017060130 A3 WO 2017060130A3
Authority
WO
WIPO (PCT)
Prior art keywords
mass
primary
main part
movement
rate sensor
Prior art date
Application number
PCT/EP2016/073005
Other languages
English (en)
French (fr)
Other versions
WO2017060130A2 (de
Inventor
Marcus Besson
Bernhard Ostrick
Original Assignee
Epcos Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Epcos Ag filed Critical Epcos Ag
Priority to JP2018517794A priority Critical patent/JP2018529972A/ja
Priority to US15/765,581 priority patent/US20180292211A1/en
Publication of WO2017060130A2 publication Critical patent/WO2017060130A2/de
Publication of WO2017060130A3 publication Critical patent/WO2017060130A3/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5769—Manufacturing; Mounting; Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/098—Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0242—Gyroscopes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)

Abstract

Die vorliegende Erfindung betrifft einen MEMS-Drehratensensor (1), der einen Grundkörper (2), eine erste Primärmasse (3), die dazu ausgestaltet ist, eine Primärschwingung relativ zu dem Grundkörper (2) auszuführen, eine erste Sekundärmasse (6), die mit der ersten Primärmasse (3) derart über eine Aufhängung (7) verbunden ist, dass die Primärbewegung der ersten Primärmasse (3) eine Primärbewegung der ersten Sekundärmasse (6) anregt und eine Sekundärbewegung der ersten Sekundärmasse (6) relativ zu der ersten Primärmasse (3) zugelassen wird, ein erstes magnetfelderzeugendes Element (9) und ein erstes magnetsensitives Element (8), von denen eines auf dem Grundkörper (2) angeordnet ist und eines auf der ersten Primärmasse (3) angeordnet ist, wobei das erste magnetsensitive Element (8) zur Bestimmung der Primärbewegung der ersten Primärmasse (3) relativ zu dem Grundkörper (2) ausgestaltet ist, und ein zweites magnetfelderzeugendes Element (11) und ein zweites magnetsensitives Element (10), von denen eines auf dem Grundkörper (2) oder der ersten Primärmasse (3) angeordnet ist und eines auf der ersten Sekundärmasse (6) angeordnet ist, wobei das zweite magnetsensitive Element (10) zur Bestimmung der Sekundärbewegung der ersten Sekundärmasse (6) relativ zu der ersten Primärmasse (3) ausgestaltet ist, aufweist.
PCT/EP2016/073005 2015-10-07 2016-09-27 Mems-drehratensensor WO2017060130A2 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2018517794A JP2018529972A (ja) 2015-10-07 2016-09-27 Ｍｅｍｓ回転数センサ
US15/765,581 US20180292211A1 (en) 2015-10-07 2016-09-27 MEMS Yaw-Rate Sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015117094.9A DE102015117094B4 (de) 2015-10-07 2015-10-07 MEMS-Drehratensensor
DE102015117094.9 2015-10-07

Publications (2)

Publication Number Publication Date
WO2017060130A2 WO2017060130A2 (de) 2017-04-13
WO2017060130A3 true WO2017060130A3 (de) 2017-06-01

Family

ID=57003508

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2016/073005 WO2017060130A2 (de) 2015-10-07 2016-09-27 Mems-drehratensensor

Country Status (4)

Country Link
US (1) US20180292211A1 (de)
JP (1) JP2018529972A (de)
DE (1) DE102015117094B4 (de)
WO (1) WO2017060130A2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3696503B1 (de) * 2019-02-15 2022-10-26 Murata Manufacturing Co., Ltd. Vibrationsrobuster mehrachsiger kreisel
JP6897806B2 (ja) * 2019-02-15 2021-07-07 株式会社村田製作所 バランス型多軸ジャイロスコープ
DE102019212091A1 (de) * 2019-08-13 2021-02-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikrosystem und verfahren zum herstellen desselben
FR3102240B1 (fr) * 2019-10-18 2021-10-01 Safran Electronics & Defense Capteur à compensation mécanique de l’anisotropie de fréquence
DE102021212100A1 (de) * 2021-10-27 2023-04-27 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil für einen Drehratensensor
CN116147600A (zh) * 2021-10-27 2023-05-23 苏州明皜传感科技股份有限公司 微机电多轴角速度感测器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002066928A1 (de) * 2001-02-21 2002-08-29 Robert Bosch Gmbh Drehratensensor
US20110271759A1 (en) * 2010-05-10 2011-11-10 Toyota Jidosha Kabushiki Kaisha Angular velocity sensor
US20150033853A1 (en) * 2012-05-31 2015-02-05 Insightech, Llc Mems gyroscope

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Publication number Priority date Publication date Assignee Title
US5488862A (en) 1993-10-18 1996-02-06 Armand P. Neukermans Monolithic silicon rate-gyro with integrated sensors
JPH07301536A (ja) 1994-05-09 1995-11-14 Murata Mfg Co Ltd 角速度センサ
DE19641284C1 (de) 1996-10-07 1998-05-20 Inst Mikro Und Informationstec Drehratensensor mit entkoppelten orthogonalen Primär- und Sekundärschwingungen
KR20000038207A (en) 1998-12-04 2000-07-05 Samsung Electronics Co Ltd Structure having comb using electromagnetic force and actuator and inertia sensing sensor using the same
JP2000329561A (ja) * 1999-05-24 2000-11-30 Matsushita Electric Ind Co Ltd 角速度センサ
KR100436367B1 (ko) * 2001-12-14 2004-06-19 삼성전자주식회사 수직 진동 질량체를 갖는 멤스 자이로스코프
JP4556515B2 (ja) * 2004-07-02 2010-10-06 株式会社デンソー 角速度センサ
US20080276706A1 (en) * 2004-09-27 2008-11-13 Conti Temic Microelectronic Gmbh Rotation Speed Sensor
EP1832841B1 (de) 2006-03-10 2015-12-30 STMicroelectronics Srl Mikroelektromechanische integrierte Sensorstruktur mit Rotationsantriebsbewegung
ATE496279T1 (de) * 2008-11-11 2011-02-15 Fraunhofer Ges Forschung Mikromechanischer coriolis-drehratensensor
FR2969278B1 (fr) * 2010-12-20 2013-07-05 Onera (Off Nat Aerospatiale) Structure planaire pour gyrometre tri-axe
US20140026659A1 (en) 2012-07-27 2014-01-30 Biao Zhang Mems device and a method of using the same
US8973439B1 (en) 2013-12-23 2015-03-10 Invensense, Inc. MEMS accelerometer with proof masses moving in anti-phase direction normal to the plane of the substrate

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002066928A1 (de) * 2001-02-21 2002-08-29 Robert Bosch Gmbh Drehratensensor
US20110271759A1 (en) * 2010-05-10 2011-11-10 Toyota Jidosha Kabushiki Kaisha Angular velocity sensor
US20150033853A1 (en) * 2012-05-31 2015-02-05 Insightech, Llc Mems gyroscope

Also Published As

Publication number Publication date
US20180292211A1 (en) 2018-10-11
WO2017060130A2 (de) 2017-04-13
DE102015117094A1 (de) 2017-04-13
DE102015117094B4 (de) 2020-04-23
JP2018529972A (ja) 2018-10-11

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